JP3647150B2 - Method for manufacturing liquid discharge head - Google Patents

Description

また、このようなエージング処理を行う際、発熱体２の駆動条件として、一定の回数、例えば１０^３以下の回数だけ発泡駆動を行うように制御することができる。このような発泡駆動回数の制御は、後述する図２９の記憶装置に内蔵されたＲＯＭ３０３の制御プログラムを用いて処理することができ、さらに、ハード的なカウンタを用いて制御することも可能である。
【００７２】
また、このようなエージング処理を行うことによって、可動部材３１を変位させやすくなり、これにより発熱の安定化を図り、発泡の安定性を向上させることができ、さらには発熱体２の表面のゴミを容易に除去することも可能となる。
【００７３】
また、本実施例の液体吐出ヘッドにおいては、第２液流路１６の断面積が第１液流路１４に比べて小さくかつ流路内に流抵抗が大きくなる部分を有し、発泡液を用いてエージング処理を行うことによって、第２液流路１６内を通常の処理時に発泡液で満たしやすくなり、特に、第１液流路１４に用いられる吐出液にコゲやすいタイプの液体を用いる場合においても、発熱体２の寿命を短くするようなことをなくすことができる。なお、液体が吐出する程に可動部材３１を変位させなくてもよい。
【００７４】
次に、２流路構造のエージング処理の第２の実施例について説明する。
図１に示すように、本実施例で用いる液体吐出ヘッドは、吐出口１８に連通するとともに、液室と連通する第１の液流路１４と、第１の液流路１４の下方に設けられ、液室と連通する第２の液流路１６と、第１の液流路１４と第２の液流路１６との間に設けられ、スリット３５を設けることにより下流側が変位自在な自由端３２として形成される可動部材３１を有する分離壁３０と、可動部材３１に対向した第２の液流路１６の底面に配設された発熱体２とを具えている。
このような液体吐出ヘッドの製造方法において、第１の液流路１４内に吐出液を充填し、第２の液流路１６内に発泡液を充填する充填工程と、発熱体２を駆動していないときには、可動部材３１の自由端を変位させずに分離壁３０と同一平面内の初期位置に留まらせ、かつ、発熱部材２を所定の駆動条件にて駆動して発泡液に気泡を発生させたときには、可動部材２の自由端を初期位置から第１の液流路１４内の位置へ変位させることにより、第１の液流路１４から吐出液を吐出させて、吐出パターンも検出するエージング工程とを具 えている。
この場合、図１０に示すように、分離壁３０により分離される第１の液流路１４と第２の液流路１６とに各々別個に連通された液室１５，１７を有してもよい。
以下、具体例を挙げて説明する。
本実施例では、前述した第１の実施例と同様な２流路構造の液体吐出ヘッドを用いるが、第１液流路１４には吐出液を満たし、第２液流路１６には発泡液を満たした状態にして、表１の同様な条件によってエージング処理を行う。これにより、可動部材３１をより変位させやすくなり、第２液流路１６内での発泡安定性を向上させることができる。
【００７５】
また、本例においては、着色された吐出液を用いることによって、エージング処理を行うと同時に、液体の吐出パターンを検出することができる。この吐出パターンを行うことにより、正常な印字状態になったところで、エージング処理を終了させるようにしてもよい。
【００７６】
さらに、このような２流路構造の液体吐出ヘッドを用いる場合、発泡液と吐出液との混合を防ぐために、分離壁３０に可動部材３１を形成することにより形成されるスリット３５の幅をできるだけ狭くすることが望ましいが、このようにスリット幅を狭くすることによって製造時にバリＸａが多数発生する割合が高くなるため、このような意味合いからも、本実施例のように出荷前の製造段階でエージング処理を行うことは有益なことである。これにより、可動部材３１を何回か変位させて断面部をなじませることができるため、可動部材３１が変位しやすくなり、これに伴って発熱体２の発熱の安定化も図ることができる。
【００７７】
次に、本実施の形態の更なる特徴的な構造と効果について、以下に説明する。本実施の形態の第２液流路１６は、発熱体２の上流に発熱体２と実質的に平坦につながる（発熱体表面が大きく落ち込んでいない）内壁を持つ液体供給路１２を有している。このような場合、気泡発生領域１１および発熱体２の表面への液体の供給は、可動部材３１の気泡発生領域１１に近い側の面に沿って、ＶＤ２のように行われる。このため、発熱体２の表面上に液体が淀むことが抑制され、液体中に溶存していた気体の析出や、消泡できずに残ったいわゆる残留気泡が除去され易く、また、液体への蓄熱が高くなりすぎることもない。従って、より安定した気泡の発生を高速に繰り返し行うことができる。なお、本実施の形態では、実質的に平坦な内壁を持つ液体供給路１２を持つもので説明したが、これに限らず、発熱体２表面となだらかに繋がり、なだらかな内壁を有する液供給路であればよく、発熱体２上に液体の淀みや、液体の供給に大きな乱流を生じない形状であればよい。
【００７８】
また、気泡発生領域１１への液体の供給は、可動部材３１の側部（スリット３５）を介してＶＤ１から行われるものもある。しかし、気泡発生時の圧力をさらに有効に吐出口に導くために図１で示すように気泡発生領域１１の全体を覆う（発熱体面を覆う）ように大きな可動部材３１を用い、可動部材３１が第１の位置へ復帰することで、気泡発生領域１１と第１液流路１４の吐出口に近い領域との液体の流抵抗が大きくなるような形態の場合、前述のＶＤ１から気泡発生領域１１に向かっての液体の流れが妨げられる。しかし、本発明のヘッド構造においては、気泡発生領域１１に液体を供給するための流れＶＤ１があるため、液体の供給性能が非常に高くなり、可動部材３１で気泡発生領域１１を覆うような吐出効率向上を求めた構造を取っても、液体の供給性能を落とすことがない。
【００７９】
また、可動部材３１の自由端３２と支点３３の位置は、例えば図５で示されるように、自由端３２が相対的に支点より下流側にある。このような構成のため、前述した発泡の際に気泡の圧力伝搬方向や成長方向を吐出口側に導く等の機能や効果を効率よく実現できる。さらに、この位置関係は吐出に対する機能や効果のみならず、液体の供給の際にも液流路１０を流れる液体に対する流抵抗を小さくしでき高速にリフィルできるという効果を達成している。これは、図５に示すように、吐出によって後退したメニスカスＭが毛管力により吐出口１８へ復帰する際や、消泡に対しての液供給が行われる場合に、液流路１０（第１液流路１４、第２液流路１６を含む）内を流れる流れＳ１、Ｓ２、Ｓ３に対し、逆らわないように自由端３２と支点３３とを配置しているためである。
【００８０】
補足すれば、図１においては、前述のように可動部材３１の自由端３２が、発熱体２を上流側領域と下流側領域とに２分する面積中心３（発熱体の面積中心（中央）を通り液流路の長さ方向に直交する線）より下流側の位置に対向するように発熱体２に対して延在している。これによって発熱体の面積中心位置３より下流側で発生する液体の吐出に大きく寄与する圧力、又は気泡を可動部材３１が受け、この圧力及び気泡を吐出口１８側に導くことができ、吐出効率や吐出力を根本的に向上させることができる。さらに、加えて上記気泡の上流側をも利用して多くの効果を得ている。また、本実施の形態の構成においては可動部材３１の自由端３２が瞬間的な機械的変位を行っていることも、液体の吐出に対して有効に寄与していると考えられる。
【００８１】
次に、本発明の第二の実施の形態を図６に基づいて説明する。
本実施の形態の主要部であるエージング処理の説明に入る前に、液体吐出ヘッドの基本的な構造および液体吐出原理について説明する。
図６において、Ａは可動部材が変位している状態を示し（気泡は図示せず）、Ｂは可動部材が初期位置（第１位置）の状態を示し、このＢの状態をもって、発泡発生領域１１を吐出口１８に対して実質的に密閉しているとする。（ここでは、図示していないがＡ、Ｂ間には流路壁があり流路と流路を分離している。）
図６における可動部材３１は土台３４を側部に２点設け、その間に液供給路１２を設けている。これにより、可動部材３１の発熱体２側の面に沿って、また、発熱体２の面と実質的に平坦もしくは、なだらかにつながる面を持つ液供給路から液体の供給を成すことができる。
【００８２】
ここで、可動部材３１の初期位置（第１位置）では、可動部材３１は発熱体２の下流側および横方向に配された発熱体下流壁３６と発熱体側壁３７に近接または密着しており、気泡発生領域１１の吐出口１８側に実質的に密閉されている。このため、発泡時の気泡の圧力、特に気泡の下流側の圧力を逃がさず可動部材の自由端３２側に集中的に作用させることができる。
【００８３】
また、消泡時には、可動部材３１は第１位置に戻り、発熱体２上への消泡時の液供給は気泡発生領域３１の吐出口側が実質的に密閉状態になるため、メニスカスの後退抑制等、先の実施の形態で説明した種々の効果を得ることができる。また、リフィルに関する効果においても先の実施の形態と同様の機能、効果を得ることができる。
【００８４】
また、本実施の形態においては、図２や図６のように、可動部材３１を支持固定する土台３４を発熱体２より離れた上流に設けると共に液流路１０より、小さな幅の土台３４とすることで前述のような液供給路１２への液体の供給を行っている。また、土台３４の形状のこれに限らず、リフィルをスムースに行えるものであればよい。
【００８５】
次に、本発明におけるエージング処理の第３の実施例について説明する。
本実施例では、液流路１０内に発泡発生領域１１を有する例えば図６のような流路構造の液体吐出ヘッドについてのエージング処理について説明する。
【００８６】
まず、発熱体下流壁３６と発熱体側壁３７とその上部の可動部材３１とにより形成された発泡発生領域１１内の下面に発熱体２を有する流路構造の液体吐出ヘッドにおいて、液流路１０内を吐出液で満たした状態にする。そして、この吐出液を満たした状態で、前述した第１の実施例および第２の実施例と同様に、発熱体２を所定の駆動条件（表１）にて駆動制御してエージング処理を行う。これにより、可動部材３１の縁周部に発生したバリＸａを取り除くことができるため、可動部材３１を液流路１０内でなじませ変位しやすくすることができ、さらには液流路１０内での発泡安定性を向上させることができる。
【００８７】
また、ヘッドの高密度化に伴って、可動部材３１と流路壁との隙間が非常に狭くなっていき、可動部材３１の縁周部の断面にバリ等があると、変位時にそのバリが流路壁にぶつかってしまい、変位の妨げとなる恐れがある。しかし、本実施例のように可動部材３１をエージング処理により変位させることによって、バリによる変位の妨げを完全になくした高密度化されたヘッドを出荷することが可能となる。
【００８８】
なお、本実施例においては可動部材３１と発熱体２の間隔を１５μｍ程度としたが、気泡の発生に基づく圧力が十分に可動部材３１に伝わる範囲であればよい。
【００８９】
以下、図面を参照して、本発明にかかる構成例を図７〜図３１に基づいて順次説明する。図７は、一つの液流路中に気泡発生領域１１、そこで発生する気泡および可動部材３１との位置関係を示していると共に、本発明の液体吐出方法やリフィル方法をより分かり易くした実施例である。
【００９０】
前述の実施の形態の多くは、可動部材３１の自由端３２に対して、発生する気泡の圧力を集中して、急峻な可動部材３１の移動と同時に気泡の移動を吐出口１８側に集中させることを達成している。これに対して、本実施の形態は、発生する気泡の自由度を与えながら、滴吐出に直接作用する気泡の吐出口１８側である気泡の下流側部分を可動部材３１の自由端３２側で規制するものである。
【００９１】
構成上で説明すると、図７では、前述の図２（第１実施例）に比較すると、図２の素子基板１上に設けられた気泡発生領域１１の下流端に位置するバリヤーとしての凸部（図の斜線部分）が本実施例では設けられていない。つまり、可動部材３１の自由端領域および両側端領域は、吐出口領域に対して気泡発生領域を実質的に密閉せずに開放しており、この構成が本実施の形態である。
【００９２】
本実施の形態では、気泡の液滴吐出に直接作用する下流側部分のうち、下流側先端部の気泡成長が許容されているので、その圧力成分を吐出に有効に利用している。加えて少なくともこの下流側部分の上方へ向かう圧力（図３のＶＢ、ＶＢ、ＶＢの分力）を可動部材３１の自由端側部分が、この下流側先端部の気泡成長に加えられるように作用するため吐出効率を上述した実施の形態と同様に向上する。前述した実施の形態に比較して本実施の形態は、発熱体２の駆動に対する応答性が優れている。また、本実施例は、構造上簡単であるため製造上の利点がある。
【００９３】
本実施の形態の可動部材３１の支点部は、可動部材３１の面部に対して小さい幅の１つの土台３４に固定されている。従って、消泡時の気泡発生領域１１への液体供給は、この土台の両側を通って供給される（図の矢印参照）。この土台は供給性を確保するものであればどのような構造でもよい。
【００９４】
液体の供給時におけるリフィルは、本実施の形態の場合には、可動部材３１の存在によって気泡の消泡にともなって上方から気泡発生領域１１へ流れ込む流れが制御されるので、従来の発熱体のみの気泡発生構造に対して優れたものとなる。無論、これによって、メニスカスの後退量を減じることもできる。
【００９５】
本実施の形態の変形例としては、可動部材３１の自由端３２に対する両側端（一方でも可）のみを気泡発生領域１１に対して実質的に密閉状態とすることは好ましいものとして挙げられる。この構成によれば、可動部材３１の側方へ向かう圧力をも先に説明した気泡の吐出口１８側端部の成長に変更して利用することができるので、一層吐出効率が向上する。
【００９６】
次に、前述した機械的変位による液体の吐出力をさらに向上させた例を図８に基づいて説明する。
図８は、このようなヘッド構造の横断面図である。図８においては、可動部材３１の自由端３２の位置が発熱体２のさらに下流側に位置するように、可動部材３１が延在している実施の形態を示している。これによって自由端位置での可動部材３１の変位速度を高くすることができ、可動部材３１の変位による吐出力の発生をさらに向上させることができる。
【００９７】
また、自由端３２が先の実施例に比較して吐出口１８側に近づくことになるので気泡の成長をより安定した方向成分に集中できるので、より優れた吐出を行うことができる。
【００９８】
また、気泡の圧力中心部の気泡成長速度に応じて、可動部材３１は変位速度Ｒ１で変位するが、この位置より支点３３に対して、遠い位置の自由端３２はさらに速い速度Ｒ２で変位する。これにより、自由端３２を高い速度で機械的に液体に作用せしめ液移動を起こさせることで吐出効率を高めている。
【００９９】
また、自由端形状は、図７と同じように液流れに対して垂直な形状をすることにより、気泡の圧力や可動部材の機械的な作用をより効率的に吐出に寄与させることができる。
【０１００】
次に、１流路構造のエージング処理の第３の実施例について説明する。
図９に示すように、本実施例で用いる液体吐出ヘッドは、吐出口１８に直接連通するとともに、該吐出口１８と対向する反対側が閉鎖された流路領域と、該流路領域１０に対応して設けられるとともに、上流側の液室１３に連通する気泡発生領域１１とを有する液流路１０と、流路領域と気泡発生領域１１との間を仕切る面内に配設され、スリット３５を設けることにより下流側が変位自在な自由端３２として形成された可動部材３１と、可動部材３１に対向した液流路１０の底面に配設された発熱部材２とを具えている。
【０１０１】
このような液体吐出ヘッドの製造方法において、液流路１０内に、液体を充填する充填工程と、発熱部材２を駆動していないときには、可動部材３１の自由端を変位させずに流路領域と気泡発生領域１１との間を仕切る面内の初期位置に留まらせ、かつ、発熱部材２を所定の駆動条件にて駆動して気泡を発生させたときには、可動部材３１の自由端を初期位置から流路領域側の上部位置へ変位させるエージング工程とを具えたことを特徴とする。
【０１０２】
以下、具体的な例を挙げて説明する。
【０１０３】
吐出口と直接連通する領域が液室側と連通した流路形状となっていない場合の構造例を図９（ａ）、（ｂ）、（ｃ）に基づいて説明する。
【０１０４】
液供給は全て、可動部材３１の発泡領域側の面に沿った液供給路１２からのみ行われるもので、可動部材３１の自由端３２や支点３３の吐出口１８に対する位置関係や発熱体２に面する構成は前述の実施例と同様である。
【０１０５】
本実施例は、吐出効率や液供給性等、前述した効果を実現するものであるが、特にメニスカスの後退を抑制し消泡時の圧力を利用して、ほとんど全ての液供給を消泡時の圧力を利用して、強制リフィルを行うものである。
【０１０６】
図９（ａ）は発熱体２により液体を発泡させた状態を示しており、図９（ｂ）は、発泡が収縮しつつある状態で、このとき可動部材３１の初期位置への復帰とＳ３による液供給が行われる。
【０１０７】
図９（ｃ）では、可動部材３１が初期位置に復帰する際のわずかなメニスカス後退Ｍを、消泡後に吐出口１８付近の毛細管力によって、リフィルしている状態である。
【０１０８】
次に、他の実施の形態として、液流路を複流路構成にした例を図１０および図１１に基づいて説明する。
【０１０９】
この例では、液流路を複流路構成にすることで、さらに熱を加えることで発泡させる液体（発泡液）と、主として吐出される液体（吐出液）とを分けることができる。
【０１１０】
図１０は、液体吐出ヘッドの流路方向の断面模式図を示しており、図１１はこの液体吐出ヘッドの部分破断斜視図を示している。
【０１１１】
この液体吐出ヘッドは、液体に気泡を発生させるための熱エネルギーを与える発熱体２が設けられた素子基板１上に、発泡用の第２液流路１６があり、その上に吐出口１８に直接連通した吐出液用の第１液流路１４が配されている。
【０１１２】
第１液流路１４の上流側は、複数の第１液流路に吐出液を供給するための第１共通液室１５に連通しており、第２液流路１６の上流側は、複数の第２液流路に発泡液を供給するための第２共通液室に連通している。
【０１１３】
但し、発泡液と吐出液を同じ液体とする場合には、共通液室１５を一つにして共通化させてもよい。
【０１１４】
第１液流路１４と第２液流路１６との間には、金属等の弾性を有する材料で構成された分離壁３０が配されており、第１液流路１４と第２の液流路１６とを区分している。なお、発泡液と吐出液とができる限り混ざり合わない方がよい液体の場合には、この分離壁３０によってできる限り完全に第１液流路１４と第２液流路１６の液体の流通を分離した方がよいが、発泡液と吐出液とがある程度混ざり合っても、問題がない場合には、分離壁３０に完全分離の機能を持たせなくてもよい。
【０１１５】
発熱体２の面方向上方への投影空間（以下吐出圧発生領域という。図１０中のＡの領域とＢの気泡発生領域１１）に位置する部分の分離壁３０は、スリット３５によって吐出口側（液体の流れの下流側）が自由端で、共通液室（１５、１７）側に支点３３が位置する片持梁形状の可動部材３１となっている。この可動部材３１は、気泡発生領域１１（Ｂ）に面して配されているため、発泡液の発泡によって第１液流路１４側の吐出口１８側に向けて開口するように動作する（図中矢印方向）。図１１においても、発熱体２としての発熱抵抗部と、この発熱抵抗部に電気信号を印加するための配線電極５とが配された素子基板１上に、第２液流路１６を構成する空間を介して分離壁３０が配置されている。
【０１１６】
可動部材３１の支点３３、自由端３２の配置と、発熱体２との配置の関係については、前述した実施の形態の構成と同様にしている。
【０１１７】
また、前述した実施の形態の構成で液供給路１２と発熱体２との構造の関係について説明したが、本実施例においても第２液流路１６と発熱体２との構造の関係を同じくしている。
【０１１８】
次に、図１２を用いて本実施例の液体吐出ヘッドの動作を説明する。
【０１１９】
ヘッドを駆動させるにあたっては、第１液流路１４に供給される吐出液と第２液流路１６に供給される発泡液として同じ水系のインクを用いて動作させた。
【０１２０】
発熱体２が発生した熱が、第２液流路の気泡発生領域１１内の発泡液に作用することで、前述した実施の形態の構成で説明したのと同様に発泡液にＵＳＰ４，７２３，１２９に記載されているような膜沸騰現象に基づく気泡４０を発生させる。
【０１２１】
本実施の形態においては、気泡発生領域１１の上流側を除く、３方からの発泡圧の逃げがないため、この気泡発生にともなう圧力が吐出圧発生部に配された可動部材３１側に集中して伝搬し、気泡の成長をともなって可動部材３１が図１２（ａ）の状態から図１２（ｂ）のように第１液流路１４側に変位する。この可動部材３１の動作によって第１液流路１４と第２液流路１６とが大きく連通し、気泡の発生に基づく圧力が第１液流路の吐出口１８側の方向（Ａ方向）に主に伝わる。この圧力の伝搬と、前述のような可動部材３１の機械的変位によって液体が吐出口から吐出される。
【０１２２】
次に、気泡が収縮するに伴って可動部材３１が図１２（ａ）の位置まで戻ると共に、第１液流路１４では吐出された吐出液体の量に見合う量の吐出液体が上流側から供給される。本実施例においても、この吐出液体の供給は前述の実施例と同様に可動部材３１が閉じる方向であるため、吐出液体のリフィルを可動部材で妨げることがない。
【０１２３】
本実施の形態は、可動部材３１の変位に伴う発泡圧力の伝搬、気泡の成長方向、バック波の防止等に関する主要部分の作用や効果については先の第１の実施の形態と同じであるが、本実施の形態のような２流路構成をとることによって、さらに次のような長所がある。
【０１２４】
すなわち、上述の実施の形態の構成によると、吐出液と発泡液とを別液体とし、発泡液の発泡で生じた圧力によって吐出液を吐出することができる。このため従来、熱を加えても発泡が十分に行われにくく吐出力が不十分であったポリエチレングリコール等の高粘度の液体であっても、この液体を第１液流路１４に供給し、発泡液に発泡が良好に行われる液体（エタノール：水＝４：６の混合液１〜２ｃＰ程度等）や低沸点の液体を第２液流路１６に供給することで良好に吐出させることができる。
【０１２５】
また、発泡液として、熱を受けても発熱体の表面にコゲ等の堆積物を生じない液体を選択することで、発泡を安定化し、良好な吐出を行うことができる。
【０１２６】
さらに、本発明のヘッドの構造においては前述した実施の形態で説明したような効果をも生じるため、さらに高吐出効率、高吐出力で高粘性液体等の液体を吐出することができる。
【０１２７】
また、加熱に弱い液体の場合においてもこの液体を第１液流路１４に吐出液として供給し、第２液流路１６で熱的に変質しにくく良好に発泡を生じる液体を供給すれば、加熱に弱い液体に熱的な害を与えることなく、しかも上述のように高吐出効率、高吐出力で吐出することができる。
【０１２８】
＜その他の実施の形態＞
以上、本発明の液体吐出ヘッドや液体吐出方法の要部の実施の形態について説明を行ったが、以下にこれらの実施の形態に好ましく適用できる例について図面を用いて説明する。ただし、以下の説明においては前述の１流路形態の実施の形態と２流路形態の実施の形態のいずれかを取り上げて説明する場合があるが特に記載しない限り、両実施の形態に適用しうるものである。
【０１２９】
＜液流路の天井形状＞
図１３は本発明の液体吐出ヘッドの流路方向断面図であるが、第１液流路１３（若しくは図１における液流路１０を構成するための溝が設けられた溝付き部材５０が分離壁３０上に設けられている。本実施の形態においては可動部材３１の自由端３２位置近傍の流路天井の高さが高くなっており、可動部材３１の動作角度θをより大きく取れるようにしている。この可動部材３１の動作範囲は、液流路の構造、可動部材３１の耐久性や発泡力等を考慮して決定すればよいが、吐出口の軸方向の角度を含む角度まで動作することが望ましいと考えられる。
【０１３０】
また、この図で示されるように吐出口の直径より可動部材３１の自由端３２の変位高さを高くすることで、より十分な吐出力の伝達が成される。また、この図で示されるように、可動部材３１の自由端３２位置の液流路天井の高さより可動部材３１の支点３３位置の液流路天井の高さの方が低くなっているため、可動部材３１の変位よる上流側への圧力波の逃げがさらに有効に防止できる。
【０１３１】
＜第２液流路と可動部材との配置関係＞
図１４は、上述の可動部材３１と第２液流路１６との配置関係を説明するための図であり、同図（ａ）は分離壁３０、可動部材３１近傍を上方から見た図であり、同図（ｂ）は、分離壁３０を外した第２液流路１６を上方から見た図である。そして、同図（ｃ）は、可動部材３１と第２液流路１６との配置関係を、これらの各要素を重ねることで模式的に示した図である。なお、いずれの図も図面下方に吐出口が配されている前面側である。
【０１３２】
本実施の形態の第２液流路１６は発熱体２の上流側（ここでの上流側とは、第２共通液室側から発熱体２位置、可動部材３１、第１液流路１４を経て吐出口１８に向う大きな流れの中の上流側のことである。）に狭窄部１９を持っており、発泡時の圧力が第２液流路１６の上流側に容易に逃げることを抑制するような室（発泡室）構造となっている。
【０１３３】
従来のヘッドのように、発泡する流路と液体を吐出するための流路とが同じで、発熱体より液室側に発生した圧力が共通液室側に逃げないように狭窄部を設けるヘッドの場合には、液体のリフィルを充分考慮して、狭窄部における流路断面積があまり小さくならない構成を採る必要があった。
【０１３４】
しかし、本実施の形態の場合、吐出される液体の多くを第１液流路１４内の吐出液とすることができ、発熱体２が設けられた第２液流路１６内の発泡液はあまり消費されないようにできるため、第２液流路１６の気泡発生領域１１への発泡液の充填量は少なくて良い。従って、上述の狭窄部１９における間隔を数μｍ〜十数μｍと非常に狭くできるため、第２液流路１６で発生した発泡時の圧力をあまり周囲に逃がすことをさらに抑制でき、集中して可動部材３１側に向けることができる。そして、この圧力を可動部材３１を介して吐出力として利用することができるため、より高い吐出効率、吐出力を達成することができる。ただ、第１液流路１６の形状は上述の構造に限られるものではなく、気泡発生に伴う圧力が効果的に可動部材３１側に伝えられる形状であれば良い。
【０１３５】
なお、図１４（ｃ）で示されるように可動部材３１の側方は、第２液流路１６を構成する壁の一部を覆っており、このことで、可動部材３１の第２液流路１６への落ち込みが防止できる。これによって、前述した吐出液と発泡液との分離性をさらに高めることができる。また、気泡のスリット３５からの逃げの抑制ができるため、さらに吐出圧や吐出効率を高めることができる。さらに、前述の消泡時の圧力による上流側からのリフィルの効果を高めることができる。
【０１３６】
なお、図１２（ｂ）や図１３においては、可動部材３１の第１の液流路１４側への変位に伴って第２液流路１６の気泡発生領域１１で発生した気泡の一部が第１液流路１４側に延在しているが、この様に気泡が延在するような第２流路の高さにすることで、気泡が延在しない場合に比べ更に吐出力を向上させることができる。このように気泡が第１液流路１４に延在するようにするためには、第２液流路１６の高さを最大気泡の高さより低くすることが望ましく、この高さを数μｍ〜３０μｍとすることが望ましい。なお、本実施例においてはこの高さを１５μｍとした。
【０１３７】
＜可動部材および分離壁＞
図１５は可動部材３１の他の形状を示すもので、３５は、分離壁３０に設けられたスリットであり、このスリット３５によって、可動部材３１が形成されている。同図（ａ）は長方形の形状であり、（ｂ）は支点側が細くなっている形状で可動部材３１の動作が容易な形状であり、同図（ｃ）は支点側が広くなっており、可動部材３１の耐久性が向上する形状である。動作の容易性と耐久性が良好な形状として、図１４（ａ）で示したように、支点側の幅が円弧状に狭くなっている形態が望ましいが、可動部材３１の形状は第２液流路１６側に入り込むことがなく、容易に動作可能な形状で、耐久性に優れた形状であればよい。
【０１３８】
前述した実施の形態においては、板状の可動部材３１をおよびこの可動部材３１を有する分離壁５は厚さ５μｍのニッケルで構成したが、これに限られることなく可動部材３１、分離壁３０を構成する材質としては発泡液と吐出液に対して耐溶剤性があり、可動部材３１として良好に動作するための弾性を有し、微細なスリット３５が形成できるものであればよい。
【０１３９】
可動部材３１の材料としては、耐久性の高い、銀、ニッケル、金、鉄、チタン、アルミニュウム、白金、タンタル、ステンレス、りん青銅等の金属、およびその合金、または、アクリロニトリル、ブタジエン、スチレン等のニトリル基を有する樹脂、ポリアミド等のアミド基を有する樹脂、ポリカーボネイト等のカルボキシル基を有する樹脂、ポリアセタール等のアルデヒド基を持つ樹脂、ポリサルフォン等のスルホン基を持つ樹脂、そのほか液晶ポリマー等の樹脂およびその化合物、耐インク性の高い、金、タングステン、タンタル、ニッケル、ステンレス、チタン等の金属、これらの合金および耐インク性に関してはこれらを表面にコーティングしたもの若しくは、ポリアミド等のアミド基を有する樹脂、ポリアセタール等のアルデヒド基を持つ樹脂、ポリエーテルエーテルケトン等のケトン基を有する樹脂、ポリイミド等のイミド基を有する樹脂、フェノール樹脂等の水酸基を有する樹脂、ポリエチレン等のエチル基を有する樹脂、ポリプロピレン等のアルキル基を持つ樹脂、エポキシ樹脂等のエポキシ基を持つ樹脂、メラミン樹脂等のアミノ基を持つ樹脂、キシレン樹脂等のメチロール基を持つ樹脂およびその化合物、さらに二酸化珪素等のセラミックおよびその化合物が望ましい。
【０１４０】
分離壁３０の材質としては、ポリエチレン、ポリプロピレン、ポリアミド、ポリエチレンテレフタレート、メラミン樹脂、フェノール樹脂、エポキシ樹脂、ポリブタジエン、ポリウレタン、ポリエーテルエーテルケトン、ポリエーテルサルフォン、ポリアリレート、ポリイミド、ポリサルフォン、液晶ポリマー（ＬＣＰ）等の近年のエンジニアリングプラスチックに代表される耐熱性、耐溶剤性、成型性の良好な樹脂、およびその化合物、もしくは、二酸化珪素、チッ化珪素、ニッケル、金、ステンレス等の金属、合金およびその化合物、もしくは表面にチタンや金をコーティングしたものが望ましい。
【０１４１】
また、分離壁３０の厚さは、分離壁３０としての強度を達成でき、可動部材３１として良好に動作するという観点からその材質と形状等を考慮して決定すればよいが、０．５μｍ〜１０μｍ程度が望ましい。
【０１４２】
なお、可動部材３１を形成するためのスリット３５の幅は本実施の形態では２μｍとしたが、発泡液と吐出液とが異なる液体であり、両液体の混液を防止したい場合は、スリット幅を両者の液体間でメニスカスを形成する程度の間隔とし、夫々の液体同士の流通を抑制すればよい。例えば、発泡液として２ｃＰ（センチポアズ）程度の液体を用い、吐出液として１００ｃＰ以上の液体を用いた場合には、５μｍ程度のスリット３５でも混液を防止することができるが、３μｍ以下にすることが望ましい。
【０１４３】
本発明における可動部材３１としてはμｍオーダーの厚さ（ｔμｍ）を対象としており、ｃｍオーダーの厚さの可動部材３１は意図していない。μｍオーダーの厚さの可動部材３１にとって、μｍオーダーのスリット幅（Ｗμｍ）を対象とする場合、製造のバラツキをある程度考慮することが望ましい。
【０１４４】
スリット３５を形成する可動部材３１の自由端あるいは／且つ側端に対向する部材の厚みが可動部材の厚みと同等の場合（図１２、図１３等）、スリット幅と厚みの関係を製造のバラツキを考慮して以下のような範囲にすることで発泡液と吐出液の混液を安定的に抑制することができる。このことは限られた条件ではあるが設計上の観点として、３ｃｐ以下の粘度の発泡液に対して高粘度インク（５ｃｐ、１０ｃｐ等）を用いる場合、Ｗ／ｔ≦１を満足するようにすることで、２液の混合を長期にわたって抑制することが可能な構成となった。
【０１４５】
本発明の「実質的な密閉状態」を与えるスリット３５としては、このような数μｍオーダであればより確実である。
【０１４６】
上述のように、発泡液と吐出液とに機能分離させた場合、可動部材３１がこれらの実質的な仕切部材となる。この可動部材３１が気泡の生成に伴って移動する際に吐出液に対して発泡液がわずかに混入することが見られる。画像を形成する吐出液は、インクジェット記録の場合、色材濃度を３％乃至５％程度有するものが一般的であることを考慮すると、この発泡液が吐出液滴に対して２０％以下の範囲で含まれても大きな濃度変化をもたらさない。従って、このような混液としては、吐出液滴に対して２０％以下となるような発泡液と吐出液との混合を本発明に含むものとする。
【０１４７】
尚、上記構成例の実施では、粘性を変化させても上限で１５％の発泡液の混合であり、５ｃｐｓ以下の発泡液では、この混合比率は、駆動周波数にもよるが、１０％程度を上限とするものであった。
【０１４８】
特に、吐出液の粘度を２０ｃｐｓ以下にすればする程、この混液は低減（例えば５％以下）できる。
【０１４９】
次に、このヘッドにおける発熱体２と可動部材３１の配置関係について、図を用いて説明する。ただし、可動部材３１と発熱体２の形状および寸法，数は、以下に限定されるものではない。発熱体２と可動部材３１の最適な配置によって、発熱体２による発泡時の圧力を吐出圧として有効に利用することが可能となる。
【０１５０】
熱等のエネルギーをインクに与えることで、インクに急峻な体積変化（気泡の発生）を伴う状態変化を生じさせ、この状態変化に基づく作用力によって吐出口１８からインクを吐出し、これを被記録媒体上に付着させて画像形成を行うインクジェット記録方法、いわゆるバブルジェット記録方法の従来技術においては、図１６に示すように、発熱体面積とインク吐出量は比例関係にあるが、インク吐出に寄与しない非発泡有効領域Ｓが存在していることがわかる。また、発熱体２上のコゲの様子から、この非発泡有効領域Ｓが発熱体２の周囲に存在していることがわかる。これらの結果から、発熱体２の周囲の約４μｍ幅は、発泡に関与されていないとされている。
【０１５１】
したがって、発泡圧を有効利用するためには、発熱体２の周囲から約４μｍ以上内側の気泡発泡領域１１の直上が可動部材３１の可動領域で覆われるように、可動部材３１を配置するのが効果的であると、言える。本実施例においては、発泡有効領域を発熱体２の周囲から約４μｍ以上内側としたが、発熱体２の種類や形成方法によっては、これに限定されるものではない。
【０１５２】
図１７は、５８×１５０μｍの発熱体２に可動領域の総面積が異なる可動部材３０１（（ａ）図）、可動部材３０２（（ｂ）図）を配置したときの上部から見た模式図を示す。
【０１５３】
可動部材３１の寸法は、５３×１４５μｍで、発熱体２の面積よりも小さいが、発熱体２の気泡発泡領域１１と同じ程度の寸法であり、該気泡発泡領域１１を覆うように、配置されている。一方、可動部材３０２の寸法は、５３×２２０μｍで発熱体２の面積よりも大きく（幅寸法を同じにした場合、支点〜可動先端間の寸法が発熱体の長さよりも長い）、可動部材３０１と同じように気泡発泡領域１１を覆うように配置されている。上記２種の可動部材３０１、３０２に対し、それらの耐久性と吐出効率について測定を行った。測定条件は以下の通りである。
【０１５４】
発泡液 ： エタノール４０％水溶液
吐出用インク ： 染料インク
電圧 ： ２０．２Ｖ
周波数 ： ３ｋＨｚ
この測定条件で実験を行った結果、可動部材３０１の耐久性に関しては、（ａ）可動部材３０１の方は、１×１０７ パルス印加したところで可動部材３０１の支点部分に損傷が見られた。（ｂ）可動部材３０２の方は、３×１０^８パルス印加しても、損傷は見られなかった。また、投入エネルギーに対する吐出量と吐出速度からもとまる運動エネルギーも約１．５〜２．５倍程度向上することが確認された。
【０１５５】
以上の結果から、耐久性、吐出効率の両面からみても、気泡発泡領域１１の真上を覆うように可動部材を設け、該可動部材の面積が発熱体２の面積よりも大きい方が、優れていることがわかる。
【０１５６】
図１８は、発熱体２のエッジから可動部材３１の支点までの距離と、可動部材３１の変位量の関係を示す。
【０１５７】
図１９は、発熱体２と可動部材３１との位置関係を側面方向から見た断面構成図を示す。
【０１５８】
発熱体２は４０×１０５μｍのものを用いた。発熱体２のエッジから可動部材３１の支点３３までの距離ｌが大きい程、変位量が大きいことがわかる。したがって、要求されるインクの吐出量や吐出液の流路構造および発熱体形状などによって、最適変位量を求め、可動部材３１の支点の位置を決めることが望ましい。
【０１５９】
また、可動部材３１の支点が発熱体の発泡有効領域直上に位置する場合は、可動部材の変位による応力に加え、発泡圧力が直接支点に加わるため可動部材３１の耐久性が低下してしまう。本発明者の実験によると、気泡発泡領域１１の真上に支点を設けたものでは、１×１０^６パルス程度で、可動部材３１に損傷が生じており、耐久性が低下してしまうことが分かっている。したがって、可動部材３１の支点は、発熱体２の発泡有効領域１１直上外に配置することで耐久性がそれ程高くない形状や材質の可動部材であっても実用可能性が高くなる。ただし、発泡有効領域１１直上に支点がある場合でも形状や材質を選択すれば、良好に用いることができる。かかる構成において、高吐出効率および耐久性に優れた液体吐出ヘッドが得られる。
【０１６０】
＜素子基板＞
以下に液体に熱を与えるための発熱体２が設けられた素子基板の構成について説明する。
【０１６１】
図２０は本発明の液体吐出ヘッドの縦断面図を示したもので、図２０（ａ）は後述する保護膜があるヘッド、同図（ｂ）は保護膜がないものである。
【０１６２】
素子基板１上に第２液流路１６、分離壁３０、第１液流路１４、第１液流路１４を構成する溝を設けた溝付き部材５０が配されている。
【０１６３】
素子基板１には、シリコン等の気体１０７に絶縁および蓄熱を目的としたシリコン酸化膜またはチッ化シリコン膜１０６を成膜し、その上に発熱体２を構成するハフニュウムボライド（ＨｆＢ２ ）、チッ化タンタル（ＴａＮ）、タンタルアルミ（ＴａＡｌ）等の電気抵抗層１０５（０．０１〜０．２μｍ厚）とアルミニュウム等の配線電極（０．２〜１．０μｍ厚）を図１１のようにパターニングされている。この２つの配線電極１０４から抵抗層１０５に電圧を印加し、抵抗層に電流を流し発熱させる。配線電極間の抵抗層上には、酸化シリコンやチッ化シリコン等の保護層を０．１〜２．０μｍ厚で形成し、さらにそのうえにタンタル等の耐キャビテーション層（０．１〜０．６μｍ厚）が成膜されており、インク等の各種の液体から抵抗層１０５を保護している。
【０１６４】
特に、気泡の発生、消泡の際に発生する圧力や衝撃波は非常に強く、堅くてもろい酸化膜の耐久性を著しく低下させるため、金属材料のタンタル（Ｔａ）等が耐キャビテーション層として用いられる。
【０１６５】
また、液体、液流路構成、抵抗材料の組み合わせにより上述の保護層を必要としない構成でもよくその例を図２０（ｂ）に示す。このような保護層を必要としない抵抗層の材料としてはイリジュウム−タンタル−アルミ合金等が挙げられる。
【０１６６】
このように、前述の各実施例における発熱体の構成としては、前述の電極間の抵抗層（発熱部）だけででもよく、また抵抗層を保護する保護層を含むものでもよい。
【０１６７】
本実施例においては、発熱体として電気信号に応じて発熱する抵抗層で構成された発熱部を有するものを用いたが、これに限られることなく、吐出液を吐出させるのに十分な気泡を発泡液に生じさせるものであればよい。例えば、発熱部としてレーザ等の光を受けることで発熱するような光熱変換体や高周波を受けることで発熱するような発熱部を有する発熱体でもよい。
【０１６８】
なお、前述の素子基板１には、前述の発熱部を構成する抵抗層１０５とこの抵抗層に電気信号を供給するための配線電極１０４で構成される電気熱変換体の他に、この電気熱変換素子を選択的に駆動するためのトランジスタ、ダイオード、ラッチ、シフトレジスタ等の機能素子が一体的に半導体製造工程によって作り込まれていてもよい。
【０１６９】
また、前述のような素子基板１に設けられている電気熱変換体の発熱部を駆動し、液体を吐出するためには、前述の抵抗層１０５に配線電極１０４を介して図２１で示されるような矩形パルスを印加し、配線電極間の抵抗層１０５を急峻に発熱させる。前述の各実施例のヘッドにおいては、それぞれ電圧２４Ｖ、パルス幅７μｓｅｃ、電流１５０ｍＡ、電気信号を６ｋＨｚで加えることで発熱体を駆動させ、前述のような動作によって、吐出口から液体であるインクを吐出させた。しかしながら、駆動信号の条件はこれに限られることなく、発泡液を適正に発泡させることができる駆動信号であればよい。
【０１７０】
＜２流路構成のヘッド構造＞
以下に、第１、第２の共通液室に異なる液体を良好に分離して導入でき部品点数の削減を図れ、コストダウンを可能とする液体吐出ヘッドの構造例について説明する。
【０１７１】
図２２は、このような液体吐出ヘッドの構造を示す模式図であり、先の実施の形態と同じ構成要素については同じ符号を用いており、詳しい説明はここでは省略する。
【０１７２】
本実施の形態においては、溝付き部材５０は、吐出口１８を有するオリフィスプレート５１と、複数の第１液流路１４を構成する複数の溝と、複数の液流路１４に共通して連通し、各第１液流路１４に液体（吐出液）を供給するための第１の共通液室１５を構成する凹部とから概略構成されている。
【０１７３】
この溝付部材５０の下側部分に分離壁３０を接合することにより複数の第１液流路１４を形成することができる。このような溝付部材５０は、その上部から第１共通液室１５内に到達する第１液体供給路２０を有している。また、溝付部材５０は、その上部から分離壁３０を突き抜けて第２共通液室１７内に到達する第２の液体供給路２１を有している。
【０１７４】
第１の液体（吐出液）は、図２２の矢印Ｃで示すように、第１液体供給路２０を経て、第１の共通液室１５、次いで第１の液流路１４に供給され、第２の液体（発泡液）は、図２２の矢印Ｄで示すように、第２液体供給路２１を経て、第２共通液室１７、次いで第２液流路１６に供給されるようになっている。
【０１７５】
本実施例では、第２液体供給路２１は、第１液体供給路２０と平行して配されているが、これに限ることはなく、第１共通液室１５の外側に配された分離壁３０を貫通して、第２共通液室１７に連通するように形成されればどのように配されてもよい。
【０１７６】
また、第２液体供給路２１の太さ（直径）に関しては、第２液体の供給量を考慮して決められる。第２液体供給路２１の形状は丸形状である必要はなく、矩形状等でもよい。
【０１７７】
また、第２共通液室１７は、溝付部材５０を分離壁３０で仕切ることによって形成することができる。形成の方法としては、図２３で示す本実施例の分解斜視図のように、素子基板上にドライフィルムで共通液室枠と第２液路壁を形成し、分離壁を固定した溝付部材５０と分離壁３０との結合体と素子基板１とを貼り合わせることにより第２共通液室１７や第２液流路１６を形成してもよい。
【０１７８】
本実施例では、アルミニュウム等の金属で形成された支持体７０上に、前述のように、発泡液に対して膜沸騰による気泡を発生させるための熱を発生する発熱体としての電気熱変換素子が複数設けられた素子基板１が配されている。
【０１７９】
この素子基板１上には、第２液路壁により形成された液流路１６を構成する複数の溝と、複数の発泡液流路に連通し、それぞれの発泡液路に発泡液を供給するための第２共通液室（共通発泡液室）１７を構成する凹部と、前述した可動壁３１が設けられた分離壁３０とが配されている。
【０１８０】
符号５０は、溝付部材である。この溝付部材は、分離壁３０と接合されることで吐出液流路（第１液流路）１４を構成する溝と、吐出液流路に連通し、それぞれの吐出液流路に吐出液を供給するための第１の共通液室（共通吐出液室）１５を構成するための凹部と、第１共通液室に吐出液を供給するための第１供給路（吐出液供給路）２０と、第２の共通液室１７に発泡液を供給するための第２の供給路（発泡液供給路）２１とを有している。第２の供給路２１は、第１の共通液室１５の外側に配された分離壁３０を貫通して第２の共通液室１７に連通する連通路に繋がっており、この連通路によって吐出液と混合することなく発泡液を第２の共通液室１５に供給することができる。
【０１８１】
なお、素子基板１、分離壁３０、溝付天板５０の配置関係は、素子基板１の発熱体に対応して可動部材３１が配置されており、この可動部材３１に対応して吐出液流路１４が配されている。また、本実施形態例では、第２の供給路を１つ溝付部材に配した例を示したが、供給量に応じて複数設けてもよい。さらに吐出液供給路２０と発泡液供給路２１の流路断面積は供給量に比例して決めればよい。
【０１８２】
このような流路断面積の最適化により溝付部材５０等を構成する部品をより小型化することも可能である。
【０１８３】
以上説明したように本実施例によれば、第２液流路１６に第２液体を供給する第２の供給路と、第１液流路１４に第１液体を供給する第１の供給路とが同一の溝付部材としての溝付天板からなることにより部品点数が削減でき、工程の短縮化とコストダウンが可能となる。
【０１８４】
また第２液流路１６に連通した第２の共通液室への、第２液体の供給は、第１液体と第２液体を分離する分離壁３０を突き抜ける方向で第２液流路によって行なわれる構造であるため、分離壁３０と溝付部材と発熱体形成基板との貼り合わせ工程が１度で済み、作りやすさが向上すると共に、貼り合わせ精度が向上し、良好に吐出することができる。
【０１８５】
また、第２液体は、分離壁３０を突き抜けて第２液体共通液室へ供給されるため、第２液流路１６に第２液体の供給が確実となり、供給量が十分確保できるため、安定した吐出が可能となる。
【０１８６】
＜吐出液体、発泡液体＞
先の実施の形態で説明したように本発明においては、前述のような可動部材３１を有する構成によって、従来の液体吐出ヘッドよりも高い吐出力や吐出効率でしかも高速に液体を吐出することができる。本実施の形態の内、発泡液と吐出液とに同じ液体を用いる場合には、発熱体２から加えられる熱によって劣化せずに、また加熱によって発熱体上に堆積物を生じにくく、熱によって気化、凝縮の可逆的状態変化を行うことが可能であり、さらに液流路や可動部材３１や分離壁３０等を劣化させない液体であれば種々の液体を用いることができる。
【０１８７】
このような液体の内、記録を行う上で用いる液体（記録液体）としては従来のバブルジェット装置で用いられていた組成のインクを用いることができる。
【０１８８】
一方、本発明の２流路構成のヘッドを用い、吐出液と発泡液を別液体とした場合には、発泡液として前述のような性質の液体を用いればよく、具体的には、メタノール、エタノール、ｎ−プロパノール、イソプロパノール、ｎ−ヘキサン、ｎ−ヘプタン、ｎ−オクタン、トルエン、キシレン、二塩化メチレン、トリクレン、フレオンＴＦ、フレオンＢＦ、エチルエーテル、ジオキサン、シクロヘキサン、酢酸メチル、酢酸エチル、アセトン、メチルエチルケトン、水等およびこれらの混合物が挙げられる。
【０１８９】
吐出液としては、発泡性の有無、熱的性質に関係なく様々な液体を用いることができる。また、従来吐出が困難であった発泡性が低い液体、熱によって変質、劣化しやすい液体や高粘度液体等であっても利用できる。
【０１９０】
ただし、吐出液の性質として吐出液自身、又は発泡液との反応によって、吐出や発泡また可動部材の動作等を妨げるような液体でないことが望まれる。
【０１９１】
記録用の吐出液体としては、高粘度インク等をも利用することができる。その他の吐出液体としては、熱に弱い医薬品や香水等の液体を利用することもできる。
【０１９２】
本発明においては、吐出液と発泡液の両方に用いることができる記録液体として以下のような組成のインクを用いて記録を行ったが、吐出力の向上によってインクの吐出速度が高くなったため、液滴の着弾精度が向上し非常に良好な記録画像を得ることができた。
【０１９３】
染料インク（粘度２ｃｐｓ）の組成
（Ｃ．Ｉ．フードブラック２）染料 ３重量％
ジエチレングリコール １０重量％
チオジグリコール ５重量％
エタノール ５重量％
水 ７７重量％
また、発泡液と吐出液に以下で示すような組成の液体を組み合わせて吐出させて記録を行った。その結果、従来のヘッドでは吐出が困難であった十数ｃｐｓ粘度の液体はもちろん１５０ｃＰという非常に高い粘度の液体でさえも良好に吐出でき、高画質な記録物を得ることができた。
【０１９４】
発泡液１の組成
エタノール ４０重量％
水 ６０重量％
発泡液２の組成
水 １００重量％
発泡液３の組成
イソプロピルアルコール １０重量％
水 ９０重量％
吐出液１顔料インク（粘度約１５ｃｐｓ）の組成
カーボンブラック ５重量％
スチレン−アクリル酸−アクリル酸エチル共重合体 １重量％
（酸価１４０、重量平均分子量８０００）
モノエタノールアミン ０．２５重量％
グリセリン ６９重量％
チオジグリコール ５重量％
エタノール ３重量％
水 １６．７５重量％
吐出液２（粘度５５ｃｐｓ）の組成
ポリエチレングリコール２００ １００重量％
吐出液３（粘度１５０ｃｐｓ）の組成
ポリエチレングリコール６００ １００重量％
ところで、前述したような従来吐出されにくいとされていた液体の場合には、吐出速度が低いために、吐出方向性のバラツキが助長され記録紙上のドットの着弾精度が悪く、また吐出不安定による吐出量のバラツキが生じこれらのことで、高品位画像が得にくかった。しかし、上述の実施形態例の構成においては、気泡の発生を発泡液を用いることで充分に、しかも安定して行うことができる。このことで、液滴の着弾精度向上とインク吐出量の安定化を図ることができ記録画像品位を著しく向上することができた。
【０１９５】
＜液体吐出ヘッドの製造＞
次に、本発明の液体吐出ヘッドの製造工程について説明する。
【０１９６】
図２で示したような液体吐出ヘッドの場合には、素子基板１上に可動部材３１を設けるための土台３４をドライフィルム等をパターニングすることで形成し、この土台３４に可動部材３１を接着、もしくは溶着固定した。その後、各液流路１０を構成する複数の溝と吐出口１８と共通液室１３を構成する凹部を有する溝付部材を、溝と可動部材が対応するような状態で素子基板１に接合することで形成した。
【０１９７】
次に、図１０や図２３で示されるような２流路構成の液体吐出ヘッドの製造工程について説明する。
【０１９８】
大まかには、素子基板１上に第２液流路１６の壁を形成し、その上に分離壁３０を取り付け、さらにその上に第１液流路１４を構成する溝等が設けられた溝付き部材５０を取り付ける。もしくは、第２液流路１６の壁を形成した後、この壁の上に分離壁３０を取り付けた溝付き部材５０を接合することでヘッドの製造を行った。
【０１９９】
さらに第２液流路の作製方法について詳しく説明する。
【０２００】
図２４（ａ）〜（ｅ）は、本発明の液体吐出ヘッドの製造方法の第１の実施例を説明するための概略断面図である。
【０２０１】
本実施例においては、（ａ）に示すように、素子基板（シリコンウエハ）１上に半導体製造工程で用いるのと同様の製造装置を用いてハフニュウムボライドやチッ化タンタル等からなる発熱体２を有する電気熱変換用素子を形成した後、次工程における感光性樹脂との密着性の向上を目的として素子基板１の表面に洗浄を施した。さらに、密着性を向上させるには、素子基板表面に紫外線−オゾン等による表面改質を行った後、例えばシランカップリング剤（日本ユニカ製：Ａ１８９）をエチルアルコールで１重量％に希釈した液を上記改質表面上にスピンコートすることで達成される。
【０２０２】
次に、表面洗浄を行い、密着性を向上した基板１上に、（ｂ）に示すように、紫外線感光性樹脂フィルム（東京応化製：ドライフィルム オーディルＳＹ−３１８）ＤＦをラミネートした。
【０２０３】
次に、（ｃ）に示すように、ドライフィルムＤＦ上にフォトマスクＰＭを配し、このフォトマスクＰＭを介してドライフィルムＤＦのうち、第２の流路壁として残す部分に紫外線を照射した。この露光工程は、キヤノン（株）製：ＭＰＡ−６００を用いて行い、約６００ｍＪ／ｃｍ２ の露光量で行った。
【０２０４】
次に、（ｄ）に示すように、ドライフィルムＤＦを、キシレンとブチルセルソルブアセテートとの混合液からなる現像液（東京応化製：ＢＭＲＣ−３）で現像し、未露光部分を溶解させ、露光して硬化した部分を第２液流路１６の壁部分として形成した。さらに、素子基板１表面に残った残渣を酸素プラズマアッシング装置（アルカンテック社製：ＭＡＳ−８００）で約９０秒間処理して取り除き、引き続き、１５０℃で２時間、さらに紫外線照射１００ｍＪ／ｃｍ^２を行って露光部分を完全に硬化させた。
【０２０５】
以上の方法により、上記シリコン基板から分割、作製される複数のヒータボード（素子基板）に対し、一様に第２の液流路を精度よく形成することができる。シリコン基板を、厚さ０．０５ｍｍのダイヤモンドブレードを取り付けたダイシングマシン（東京精密製：ＡＷＤ−４０００）で各々のヒータボード１に切断、分離した。分離されたヒータボード１を接着剤（東レ製：ＳＥ４４００）でアルミベースプレート７０上に固定した（図２７）。次いで、予めアルミベースプレート７０上に接合しておいたプリント配線基板７１と、ヒータボード１とを直径０．０５ｍｍのアルミワイヤ（図示略）で接続した。
【０２０６】
次に、このようにして得られたヒータボード１に、図２４（ｅ）に示すように、上述の方法で溝付部材５０と分離壁３０との接合体を位置決め接合した。すなわち、分離壁３０を有する溝付部材とヒータボード１とを位置決めし、押さえバネ７８により係合、固定した後、インク・発泡液用供給部材８０をアルミベースプレート７０上に接合固定し、アルミワイヤ間、溝付部材５０とヒータボード１とインク・発泡液用供給部材８０との隙間をシリコーンシーラント（東芝シリコーン製：ＴＳＥ３９９）で封止して完成させた。
【０２０７】
以上の製法で、第２の液流路を形成することにより、各ヒータボードのヒータに対して位置ズレのない精度の良い流路を得ることができる。特に、溝付部材５０と分離壁３０とをあらかじめ先の工程で接合しておくことで、第１液流路１４と可動部材３１の位置精度を高めることができる。
【０２０８】
このようにして製造された液体吐出ヘッドを用いて、前述したような第１の例から第３の例に示すエージング処理を行うことによって、製造時に発生したバリを除去し、可動部材を変位しやすくすることができ、これにより安定した吐出を行うことが可能となる。
【０２０９】
そして、これらの高精度製造技術によって、吐出安定化が図られ印字品位が向上する。また、ウエハ上に一括で形成することが可能なため、多量に低コストで製造することが可能である。
【０２１０】
なお、本実施例では、第２の液流路を形成するために紫外線硬化型のドライフィルムを用いたが、紫外域、特に２４８ｎｍ付近に吸収帯域をもつ樹脂を用い、ラミネート後、硬化させ、エキシマレーザで第２の液流路となる部分の樹脂を直接除去することによっても得ることが可能である。
【０２１１】
次に、図２５（ａ）〜（ｄ）は、本発明の液体吐出ヘッドの製造方法の第２の実施例を説明するための概略断面図である。
【０２１２】
本実施例においては、（ａ）に示すように、ＳＵＳ基板１００上に厚さ１５μｍのレジスト１０１を第２の液流路の形状でパターニングした。
【０２１３】
次に、（ｂ）に示すように、ＳＵＳ基板１００に対して電気メッキを行ってＳＵＳ基板１００上にニッケル層１０２を同じく１５μｍ成長させた。メッキ液としては、スルフォミン酸ニッケルに応力減少剤（ワールドメタル社製：ゼロオール）とほう酸、ピット防止剤（ワールドメタル社製：ＮＰ−ＡＰＳ）、塩化ニッケルを使用した。電着時の電界のかけ方としては、アノード側に電極を付け、カソード側に既にパターニングしたＳＵＳ基板１００を取り付け、メッキ液の温度を５０℃とし、電流密度を５Ａ／ｃｍ^２とした。
【０２１４】
次に、（ｃ）に示すように、上記のようなメッキを終了したＳＵＳ基板１００に超音波振動を与え、ニッケル層１０２の部分をＳＵＳ基板１００から剥離し、所望の第２の液流路を得た。
【０２１５】
一方、電気熱変換用素子を配設したヒータボードを、半導体と同様の製造装置を用いてシリコンウエハに形成した。このウエハを先の実施例と同様に、ダイシングマシンで各々のヒータボードに分離した。このヒータボード１を、予めプリント基板１０４が接合されたアルミベースプレート７０に接合し、プリント基板７１とアルミワイヤ（図示略）とを接続することで電気的配線を形成した。このような状態のヒータボード１上に、図２５（ｄ）に示すように、先の工程で得た第２液流路と位置決め固定した。この固定に際しては、後工程で第１の実施例と同様に分離壁を固定した天板と押さえバネによって係合・密着されるため、天板接合時に位置ズレが発生しない程度に固定されていれば十分である。
【０２１６】
本実施例では、上記位置決め固定に紫外線硬化型接着剤（グレースジャパン製：アミコンＵＶ−３００）を塗布し、紫外線照射装置を用い、露光量を１００ｍＪ／ｃｍ２として約３秒間で固定を完了した。
【０２１７】
本実施例の製法によれば、発熱体に対して位置ズレのない精度の高い第２の液流路を得ることができることに加え、ニッケルで流路壁を形成しているため、アルカリ性の液体に強く、信頼性の高いヘッドを提供することが可能となる。なお、本製造方法においても、前述した例と同様なエージング処理を行う。
【０２１８】
次に、図２６（ａ）〜（ｄ）は、本発明の液体吐出ヘッドの製造方法の第３の実施例を説明するための概略断面図である。
【０２１９】
本実施例においては、（ａ）に示すように、アライメント穴あるいはマーク１００ａを有する厚さ１５μｍのＳＵＳ基板１００の両面にレジスト３１を塗布した。ここで、レジストとしては、東京応化製のＰＭＥＲＰ−ＡＲ９００を使用した。
【０２２０】
この後、（ｂ）に示すように、素子基板１００のアライメント穴１００ａに合わせて、露光装置（キヤノン（株）製：ＭＰＡ−６００）を用いて露光し、第２の液流路を形成すべき部分のレジスト１０３を除去した。露光は８００ｍＪ／ｃｍ^２の露光量で行った。
【０２２１】
次に、（ｃ）に示すように、両面のレジスト１０３がパターニングされたＳＵＳ基板１００を、エッチング液（塩化第２鉄または塩化第２銅の水溶液）に浸漬し、レジスト１０３から露出している部分をエッチングした後、レジストを剥離した。
【０２２２】
次に、（ｄ）に示すように、先の製造方法の実施例と同様に、ヒータボード１上に、エッチングされたＳＵＳ基板１００を位置決め固定して第２の液流路４を有する液体吐出ヘッドを組み立てた。
【０２２３】
本実施例の製法によれば、ヒータに対し位置ズレのない精度の高い第２液流路４を得ることができることに加え、ＳＵＳで流路を形成しているため、酸やアルカリ性の液体に強く信頼性の高い液体吐出ヘッドを提供することができる。なお、本製造方法においても前述した例と同様なエージング処理を行う。
【０２２４】
以上説明したように、本実施例の製造方法によれば、素子基板状に予め第２液流路の壁を配設することによって、電気熱変換体と第２液流路とが高精度に位置決めすることが可能となる。また、切断、分離前の基板上の多数の素子基板に対して第２の液流路を同時に形成することができるので、多量に、かつ、低コストの液体吐出ヘッドを提供することができる。
【０２２５】
また、本実施例の製造方法の液体吐出ヘッドの製造方法を実施することによって得られた液体吐出ヘッドは、発熱体と第２液流路とが高精度に位置決めされているので、電気熱変換体の発熱による発泡の圧力を効率よく受けることができ、吐出効率に優れたものとなる。
【０２２６】
以上説明したような製造方法において可動部材３１のエージング処理を行うことによって、可動部材３１に発生したバリを効果的に取り除くことができ、これにより、可動部材３１を変位しやすくすることができ、安定した吐出を行うことが可能となる。
【０２２７】
＜液体吐出ヘッドカートリッジ＞
次に、上記実施例に係る液体吐出ヘッドを搭載した液体吐出ヘッドカートリッジを概略説明する。
【０２２８】
図２７は、前述した液体吐出ヘッドを含む液体吐出ヘッドカートリッジの模式的分解斜視図であり、液体吐出ヘッドカートリッジは、主に液体吐出ヘッド部２００と液体容器９０とから概略構成されている。
【０２２９】
液体吐出ヘッド部２００は、素子基板１、分離壁３０、溝付部材５０、押さえバネ７８、液体供給部材８０、支持体７０等から成っている。素子基板１には、前述のように発泡液に熱を与えるための発熱抵抗体が、複数個、列状に設けられており、また、この発熱抵抗体を選択的に駆動するための機能素子が複数設けられている。この素子基板１と可動壁を持つ前述の分離壁３０との間に発泡液路が形成され発泡液が流通する。この分離壁３０と溝付天板５０との接合によって、吐出される吐出液体が流通する吐出流路（不図示）が形成される。
【０２３０】
押さえバネ７８は、溝付部材５０に素子基板１方向への付勢力を作用させる部材であり、この付勢力により素子基板１、分離壁３０、溝付部材５０と、後述する支持体７０とを良好に一体化させている。
【０２３１】
支持体７０は、素子基板１等を支持するためのものであり、この支持体７０上にはさらに素子基板１に接続し電気信号を供給するための回路基板７１や、装置側と接続することで装置側と電気信号のやりとりを行うためのコンタクトパッド７２が配置されている。
【０２３２】
液体容器９０は、液体吐出ヘッドに供給される、インク等の吐出液体と気泡を発生させるための発泡液とを内部に区分収容している。液体容器９０の外側には、液体吐出ヘッドと液体容器との接続を行う接続部材を配置するための位置決め部９４と接続部を固定するための固定軸９５が設けられている。吐出液体の供給は、液体容器の吐出液体供給路９２から接続部材の供給路８４を介して液体供給部材８０の吐出液体供給路８１に供給され、各部材の吐出液体供給路８３，７１，２１を介して第１の共通液室に供給される。発泡液も同様に、液体容器の供給路９３から接続部材の供給路を介して液体供給部材８０の発泡液供給路８２に供給され、各部材の発泡液体供給路８４，７１，２２を介して第２液室に供給される。
【０２３３】
以上の液体吐出ヘッドカートリッジにおいては、発泡液と吐出液が異なる液体である場合も、供給を行いうる供給形態および液体容器で説明したが、吐出液体と発泡液体とが同じである場合には、発泡液と吐出液の供給経路および容器を分けなくてもよい。
【０２３４】
なお、この液体容器には、各液体の消費後に液体を再充填して使用してもよい。このためには液体容器に液体注入口を設けておくことが望ましい。又、液体吐出ヘッドと液体容器とは一体であってもよく、分離可能としてもよい。
【０２３５】
＜液体吐出装置＞
図２８は、前述の液体噴射ヘッドを搭載した液体吐出装置の概略構成を示している。本実施例では特に吐出液体としてインクを用いたインク吐出記録装置を用いて説明する液体吐出装置のキャリッジＨＣは、インクを収容する液体タンク部９０と液体吐出ヘッド部２００とが着脱可能なヘッドカートリッジを搭載しており、被記録媒体搬送手段で搬送される記録紙等の被記録媒体１５０の幅方向に往復移動する。
【０２３６】
不図示の駆動信号供給手段からキャリッジ上の液体吐出手段に駆動信号が供給されると、この信号に応じて液体吐出ヘッドから被記録媒体に対して記録液体が吐出される。
【０２３７】
また、本実施例の液体吐出装置においては、被記録媒体搬送手段とキャリッジを駆動するための駆動源としてのモータ１１１、駆動源からの動力をキャリッジに伝えるためのギア１１２、１１３キャリッジ軸１１５等を有している。この記録装置及びこの記録装置で行う液体吐出方法によって、各種の被記録媒体に対して液体を吐出することで良好な画像の記録物を得ることができた。
【０２３８】
次に、図２９は、本発明の液体吐出方法および液体吐出ヘッドを適用したインク吐出記録を動作させるための記録装置全体のブロック図である。
【０２３９】
記録装置は、ホストコンピュータ３００より印字情報を制御信号として受ける。印字情報は印字装置内部の入力インタフェイス３０１に一時保存されると同時に、記録装置内で処理可能なデータに変換され、ヘッド駆動信号供給手段を兼ねるＣＰＵ３０２に入力される。ＣＰＵ３０２はＲＯＭ３０３に保存されている制御プログラムに基づき、前記ＣＰＵ３０２に入力されたデータをＲＡＭ３０４等の周辺ユニットを用いて処理し、印字するデータ（画像データ）に変換する。
【０２４０】
また、ＣＰＵ３０２は前記画像データを記録用紙上の適当な位置に記録するために、画像データに同期して記録用紙および記録ヘッドを移動する駆動用モータを駆動するための駆動データを作る。画像データおよびモータ駆動データは、各々ヘッドドライバ３０７と、モータドライバ３０５を介し、ヘッド２００および駆動モータ３０６に伝達され、それぞれ制御されたタイミングで駆動され画像を形成する。
【０２４１】
また、本記録装置には、エージング処理を行うための駆動条件等を含む制御プログラムや、発熱体２の発泡駆動の回数を制御するための制御プログラムを内蔵した記憶手段を具えることができる。この記憶手段としては、例えば、ＲＯＭ３０３等を用いることができる。また、カウンタ等を具えて、発泡駆動の回数を制御することも可能である。
【０２４２】
上述のような記録装置に適用でき、インク等の液体の付与が行われる被記録媒体としては、各種の紙やＯＨＰシート、コンパクトディスクや装飾板等に用いられるプラスチック材、布帛、アルミニュウムや銅等の金属材、牛皮、豚皮、人工皮革等の皮革材、木、合板等の木材、竹材、タイル等のセラミックス材、スポンジ等の三次元構造体等を対象とすることができる。
【０２４３】
また上述の記録装置として、各種の紙やＯＨＰシート等に対して記録を行うプリンタ装置、コンパクトディスク等のプラスチック材に記録を行うプラスチック用記録装置、金属板に記録を行う金属用記録装置、皮革に記録を行う皮革用記録装置、木材に記録を行う木材用記録装置、セラミックス材に記録を行うセラミックス用記録装置、スポンジ等の三次元網状構造体に対して記録を行う記録装置、又布帛に記録を行う捺染装置等をも含むものである。
【０２４４】
またこれらの液体吐出装置に用いる吐出液としては、夫々の被記録媒体や記録条件に合わせた液体を用いればよい。
【０２４５】
＜記録システム＞
次に、本発明の液体吐出ヘッドを記録ヘッドとして用い被記録媒体に対して記録を行う、インクジェット記録システムの一例を説明する。
【０２４６】
図３０は、前述した本発明の液体吐出ヘッド２０１を用いたインクジェット記録システムの構成を説明するための模式図である。本実施例における液体吐出ヘッドは、被記録媒体１５０の記録可能幅に対応した長さに３６０ｄｐｉの間隔で吐出口を複数配したフルライン型のヘッドであり、イエロー（Ｙ），マゼンタ（Ｍ），シアン（Ｃ），ブラック（Ｂｋ）の４色に対応した４つのヘッドをホルダ２０２によりＸ方向に所定の間隔を持って互いに平行に固定支持されている。
【０２４７】
これらのヘッドに対してそれぞれ駆動信号供給手段を構成するヘッドドライバ３０７から信号が供給され、この信号に基づいて各ヘッドの駆動が成される。
【０２４８】
各ヘッドには、吐出液としてＹ，Ｍ，Ｃ，Ｂｋの４色のインクがそれぞれ２０４ａ〜２０４ｄのインク容器から供給されている。なお、符号２０４ｅは発泡液が蓄えられた発泡液容器であり、この容器から各ヘッドに発泡液が供給される構成になっている。
【０２４９】
また、各ヘッドの下方には、内部にスポンジ等のインク吸収部材が配されたヘッドキャップ２０３ａ〜２０３ｄが設けられており、非記録時に各ヘッドの吐出口を覆うことでヘッドの保守を成すことができる。
【０２５０】
符号２０６は、先の各実施例で説明したような各種、非記録媒体を搬送するための搬送手段を構成する搬送ベルトである。搬送ベルト２０６は、各種ローラにより所定の経路に引き回されており、モータドライバ３０５に接続された駆動用ローラにより駆動される。
【０２５１】
本実施例のインクジェット記録システムにおいては、記録を行う前後に被記録媒体に対して各種の処理を行う前処理装置２５１および後処理装置２５２をそれぞれ被記録媒体搬送経路の上流と下流に設けている。
【０２５２】
前処理と後処理は、記録を行う被記録媒体の種類やインクの種類に応じて、その処理内容が異なるが、例えば、金属、プラスチック、セラミックス等の被記録媒体に対しては、前処理として、紫外線とオゾンの照射を行い、その表面を活性化することでインクの付着性の向上を図ることができる。また、プラスチック等の静電気を生じやすい被記録媒体においては、静電気によってその表面にゴミが付着しやすく、このゴミによって良好な記録が妨げられる場合がある。このため、前処理としてイオナイザ装置を用い被記録媒体の静電気を除去することで、被記録媒体からごみの除去を行うとよい。また、被記録媒体として布帛を用いる場合には、滲み防止、先着率の向上等の観点から布帛にアルカリ性物質、水溶性物質、合成高分子、水溶性金属塩、尿素およびチオ尿素から選択される物質を付与する処理を前処理として行えばよい。前処理としては、これらに限らず、被記録媒体の温度を記録に適切な温度にする処理等であってもよい。
【０２５３】
一方、後処理は、インクが付与された被記録媒体に対して熱処理、紫外線照射等によるインクの定着を促進する定着処理や、前処理で付与し未反応で残った処理剤を洗浄する処理等を行うものである。
【０２５４】
なお、本実施例では、ヘッドとしてフルラインヘッドを用いて説明したが、これに限らず、前述したような小型のヘッドを被記録媒体の幅方向に搬送して記録を行う形態のものであってもよい。
【０２５５】
＜ヘッドキット＞
以下に、本発明の液体吐出ヘッドを有するヘッドキットを説明する。図３１は、このようなヘッドキットを示した模式図であり、このヘッドキットは、インクを吐出するインク吐出部５１１を有する本発明のヘッド５１０と、このヘッドと不可分もしくは分離可能な液体容器であるインク容器５２０と、このインク容器にインクを充填するためのインクを保持したインク充填手段とを、キット容器５０１内に納めたものである。
【０２５６】
インクを消費し終わった場合には、インク容器の大気連通口５２１やヘッドとの接続部や、もしくはインク容器の壁に開けた穴などに、インク充填手段の挿入部（注射針等）５３１の一部を挿入し、この挿入部を介してインク充填手段内のインクをインク容器内に充填すればよい。
【０２５７】
このように、本発明の液体吐出ヘッドと、インク容器やインク充填手段等を一つのキット容器内に納めてキットにすることで、インクが消費されてしまっても前述のようにすぐに、また容易にインクをインク容器内に充填することができ、記録の開始を迅速に行うことができる。
【０２５８】
なお、本実施例のヘッドキットでは、インク充填手段が含まれるもので説明を行ったが、ヘッドキットとしては、インク充填手段を持たず、インクが充填された分離可能タイプのインク容器とヘッドとがキット容器５１０内に納められている形態のものであってもよい。
【０２５９】
また、この図３１では、インク容器に対してインクを充填するインク充填手段のみを示しているが、インク容器の他に発泡液を発泡液容器に充填するための発泡液充填手段をキット容器内に納めた形態のものであってもよい。
【発明の効果】
【０２６０】
以上説明したように、本発明によれば、１流路構造又は２流路構造の液体吐出ヘッドにおいて、ヘッドを出荷前の段階で、発熱部材を所定の駆動条件にて駆動させ液流路内に設けられた可動部材を可変してエージング処理を行うようにしたので、液流路内での可動部材を変位しやすくすることができ、これにより、出荷後の経時的変化をなくして安定した吐出を行うことができる。また、これにより、発熱部材を安定化して駆動制御できるため、発泡の安定性を向上させることができ、さらに発熱部材の駆動に対する可動部材の応答性を高めることができる。
【０２６１】
以下、本発明に付随する効果を列挙する。
【０２６２】
上述したような、エージング処理を行った可動部材を用いる新規な吐出原理に基づく本発明の液体吐出方法、ヘッド等によると、発生する気泡とこれによって変位する可動部材との相乗効果を得ることができ、吐出口近傍の液体を効率よく吐出できるため、従来のバブルジェット方式の吐出方法、ヘッド等に比べて吐出効率を向上できる。
【０２６３】
また、本発明によれば、低温や低湿で長期放置を行った場合であっても不吐出になることを防止でき、仮に不吐出になっても予備吐出や吸引回復といった回復処理をわずかに行うだけで正常状態に即座に復帰できる利点もある。これに伴い、回復時間の短縮や回復による液体の損失を低減でき、ランニングコストも大幅に下げることが可能である。
【０２６４】
また、本発明のリフィル特性を向上した構成によれば、連続吐出時の応答性、気泡の安定成長、液滴の安定化を達成して、高速液体吐出による高速記録また高画質記録を可能にすることができた。
【０２６５】
また、２流路構成のヘッドにおいて発泡液として、発泡しやすい液体や、発熱体上への堆積物（こげ等）が生じにくい液体を用いることで、吐出液の選択の自由度が高くなり、発泡が生じにくい高粘性液体、発熱体上に体積物を生じやすい液体等、従来のバブルジェット吐出方法で吐出することが困難であった液体についても良好に吐出することができた。さらに熱に弱い液体等も、この液体に熱による悪影響を与えず吐出することができた。
【０２６６】
また、本発明の液体吐出ヘッドのエージング工程を含む製造方法によると、上述のような液体吐出ヘッドを精度良く製造でき、また部品点数を少なく、安価に、しかも容易に製造することができる。
【０２６７】
また、本発明のエージング処理された液体吐出ヘッドを記録用の液体吐出記録ヘッドとして用いることで、さらに高画質な記録を達成することができた。
【０２６８】
また、本発明のエージング処理された液体吐出ヘッドを用い、液体の吐出効率等がさらに向上した液体吐出装置や記録システム等を提供することができた。
【０２６９】
また、本発明のエージング処理された液体吐出ヘッドを有するヘッドカートリッジやヘッドキットを用いることで、ヘッドの利用、再利用を容易に成すことができる。
【図面の簡単な説明】
【０２７０】
【図１】 本発明の第１の実施の形態における液体吐出ヘッドの一例を示す模式断面図である。
【図２】 本発明の液体吐出ヘッドの部分破断斜視図である。
【図３】 従来のヘッドにおける気泡からの圧力伝搬を示す模式図である。
【図４】 本発明のヘッドにおける気泡からの圧力伝搬を示す模式図である。
【図５】 本発明の液体の流れを説明するための模式図である。
【図６】 本発明の第２の実施の形態における液体吐出ヘッドの部分破断斜視図である。
【図７】 本発明の他の実施の形態における液体吐出ヘッドの部分破断斜視図である。
【図８】 本発明の他の実施の形態における液体吐出ヘッドの断面図である。
【図９】 本発明の他の実施の形態における液体吐出ヘッド（１流路構造）の模式断面図である。
【図１０】 本発明の他の実施の形態における液体吐出ヘッド（２流路構造）の断面図である。
【図１１】 図１０の液体吐出ヘッドの部分破断斜視図である。
【図１２】 可動部材の動作を説明するための図である。
【図１３】 可動部材と第１液流路の構造を説明するための図である。
【図１４】 可動部材と液流路の構造を説明するための図である。
【図１５】 可動部材の他の形状を説明するための図である。
【図１６】 発熱体面積とインク吐出量の関係を示す図である。
【図１７】 可動部材と発熱体との配置関係を示す図である。
【図１８】 発熱体のエッジと支点までの距離と可動部材の変位量の関係を示す図である。
【図１９】 発熱体と可動部材との配置関係を説明するための図である。
【図２０】 本発明の液体吐出ヘッドの縦断面図である。
【図２１】 駆動パルスの形状を示す模式図である。
【図２２】 本発明の液体吐出ヘッドの供給路を説明するための断面図である。
【図２３】 本発明のヘッドの分解斜視図である。
【図２４】 本発明の液体吐出ヘッドの製造方法の第１実施例を説明するための工程図である。
【図２５】 本発明の液体吐出ヘッドの製造方法の第２実施例を説明するための工程図である。
【図２６】 本発明の液体吐出ヘッドの製造方法の第３実施例を説明するための工程図である。
【図２７】 液体吐出ヘッドカートリッジの分解斜視図である。
【図２８】 液体吐出装置の概略構成図である。
【図２９】 装置ブロック図である。
【図３０】 液体吐出記録システムを示す図である。
【図３１】 ヘッドキットの模式図である。
【図３２】 従来の可動部材の縁周部にバリが発生した形状を示す斜視図である。
【図３３】 従来の可動部材の縁周部にバリが発生した場合の形状を示す斜視図である。
【符号の説明】
【０２７１】
１ 素子基板
２ 発熱体
３ 面積中心
１０ 液流路
１１ 気泡発生領域
１２ 供給路
１３ 共通液室
１４ 第１液流路
１５ 第１共通液室
１６ 第２液流路
１７ 第２共通液室
１８ 吐出口
１９ 狭窄部
２０ 第１供給路
２１ 第２供給路
２２ 第１液流路壁
２３ 第２液流路壁
２４ 凸部
３０ 分離壁
３１ 可動部材
３２ 自由端
３３ 支点
３４ 支持部材
３５ スリット
３６ 気泡発生領域前壁
３７ 気泡発生領域側壁
４０ 気泡
４５ 液滴
５０ 溝付き部材
５１ オリフィスプレート
７０ 支持体
７８ ばね
８０ 供給部材[0001]
BACKGROUND OF THE INVENTION
[0002]
  The present invention relates to a method for manufacturing a liquid discharge head that discharges a desired liquid by generating bubbles generated by applying thermal energy to the liquid.
[Prior art]
[0003]
  By applying energy such as heat to the ink, the ink undergoes a change in state accompanied by a steep volume change (bubble generation), and the ink is discharged from the discharge port by the action force based on this change in state, and this is recorded 2. Description of the Related Art An ink jet recording method for forming an image by adhering to a medium, a so-called bubble jet recording method is conventionally known. In a recording apparatus using this bubble jet recording method, as disclosed in US Pat. No. 4,723,129 or the like, an ejection port for ejecting ink, an ink flow path communicating with the ejection port, an ink In general, an electrothermal converter as an energy generating means for discharging ink disposed in the flow path is disposed.
[0004]
  According to such a recording method, a high-quality image can be recorded at high speed and with low noise, and the ejection ports for ejecting ink can be arranged with high density in the head that performs this recording method. Therefore, it has many excellent points that a high-resolution recorded image and a color image can be easily obtained with a small apparatus. For this reason, in recent years, this bubble jet recording method has been used in many office devices such as printers, copiers, and facsimiles, and further has been used in industrial systems such as textile printing apparatuses.
[0005]
  As the bubble jet technology is used in various products in this way, the following various demands have been increasing in recent years.
[0006]
  For example, as a study on the demand for improvement in energy efficiency, optimization of a heating element such as adjusting the thickness of a protective film is cited. This method is effective in improving the propagation efficiency of the generated heat to the liquid.
[0007]
  In addition, in order to obtain a high-quality image, a drive condition for providing a liquid discharge method capable of performing a good ink discharge based on the generation of a stable bubble with a high ink discharge speed is proposed. From the viewpoint, there has also been proposed an improved flow channel shape in order to obtain a liquid discharge head having a high filling (refill) speed of discharged liquid into the liquid flow channel.
[0008]
  Of these channel shapes, the channel structure shown in FIGS. 32 (a) and 32 (b) is described in JP-A-63-199972. In the flow path structure and the head manufacturing method described in this publication, a back wave generated with the generation of bubbles (pressure toward the direction opposite to the direction toward the discharge port, that is, pressure toward the liquid chamber 12). It is the invention which paid attention to. This back wave is known as loss energy because it is not energy in the ejection direction.
[0009]
  FIG.2 (The invention shown in a) and (b) discloses a valve 10 that is located farther from the bubble generation region formed by the heating element 2 and located on the opposite side of the discharge port 11 with respect to the heating element 2.
[0010]
  In FIG. 32 (b), this valve 10 has an initial position as if attached to the ceiling of the flow path 3 by a manufacturing method using a plate material or the like, and hangs down into the flow path 3 as bubbles are generated. It is disclosed as a thing. This invention is disclosed as suppressing energy loss by controlling a part of the above-described back wave by the valve 10.
[0011]
  However, in this configuration, it is practical for liquid discharge to suppress a part of the back wave caused by the valve 10, as can be seen when bubbles are generated inside the flow path 3 holding the liquid to be discharged. It turns out that it is not typical.
[0012]
  Originally, the back wave itself is not directly related to ejection as described above. When this back wave is generated in the flow path 3, as shown in FIG. 32A, the pressure directly related to the discharge among the bubbles is already in a state capable of discharging the liquid from the flow path 3. Therefore, it is clear that even if a part of the back wave is suppressed, ejection is not greatly affected.
[0013]
  On the other hand, in the bubble jet recording method, since heating is repeated while the heating element is in contact with the ink, deposits are generated due to scorching of ink on the surface of the heating element, but depending on the type of ink, this deposit is often generated. As a result, the generation of bubbles becomes unstable, and it may be difficult to perform good ink ejection. In addition, even when the liquid to be discharged is a liquid that is easily deteriorated by heat, or when it is difficult to obtain sufficient foaming, there has been a demand for a method for discharging well without changing the liquid to be discharged. .
[0014]
  From such a point of view, a method of discharging the discharge liquid by transferring the pressure due to foaming to the discharge liquid by separating the liquid (foam liquid) that generates bubbles by heat and the liquid to be discharged (discharge liquid) into separate liquids, It is disclosed in Japanese Patent Laid-Open Nos. 61-69467, 55-81172, USP 4,480,259, and the like. In these gazettes, the ink that is the discharge liquid and the foam liquid are completely separated by a flexible film such as silicon rubber so that the discharge liquid does not come into direct contact with the heating element, and pressure due to foaming of the foam liquid is allowed. The configuration is such that the fluid is transferred to the discharge liquid by deformation of the flexible film. With such a configuration, it is possible to prevent deposits on the surface of the heating element, improve the degree of freedom in selecting the discharge liquid, and the like.
[0015]
  However, the head configured to completely separate the discharge liquid and the foaming liquid as described above is configured to transmit the pressure at the time of foaming to the discharge liquid by the expansion and contraction of the flexible film. The sexual membrane absorbs considerably. Further, since the deformation amount of the flexible film is not so large, the effect of separating the discharge liquid and the foaming liquid can be obtained, but there is a possibility that the energy efficiency and the discharge force may be reduced.
[0016]
  In addition, conventionally, it has a discharge port for discharging a liquid, a discharge path communicating with the discharge port and containing a liquid, and an electrothermal conversion element disposed in the discharge path, and driving the electrothermal conversion element Accordingly, development of a method for manufacturing a head that generates bubbles and discharges liquid from the discharge port has been actively performed.
[0017]
  In this case, in the manufacturing stage before shipment of the head, the liquid is preliminarily placed in the discharge port in order to make the discharge path compatible with the liquid to be used or to stabilize the temporal change in the heat generation characteristics of the electrothermal transducer. In a filled state, the electrothermal conversion element is experimentally driven to generate bubbles, and a process of continuously discharging liquid from the discharge port about 10n times (n: 4 to 5), that is, an aging process is performed. Is generally known.
[Problems to be solved by the invention]
[0018]
  However, in recent years, a head with an epoch-making discharge principle has been researched and developed for the purpose of achieving excellent discharge efficiency and stable discharge amount. For example, the displacement of the free end of the movable member due to the generation of bubbles is reduced. There are heads used.
[0019]
  In a head having such a movable member, if the manufacturing conditions of the movable member itself (for example, downsizing of the movable member accompanying the increase in the density of the head) change during the manufacturing stage, the displacement state of the movable member is shipped. There was a tendency to change between immediately after use and after use.
[0020]
  FIG. 33 shows an example of the structure of the separation wall having movable members arranged at high density in the ejection path of the head. In this case, the movable member 31 is separated.Wall 30It is formed by cutting a part of it, but it is separated from the movable member 31 as the density increases.Wall 30It is desirable to make the gap between the slit 35 and the slit 35 as narrow as possible.
[0021]
  However, the separation with the movable member 31Wall 30In the stage of forming the movable member 31 and separationWall 30The burr Xa may occur in the cross section on the slit 35 side. When such burrs Xa occur, there is a problem in that the liquid discharge efficiency and the discharge amount are affected, and stable discharge cannot be performed. Moreover, such a problem cannot be dealt with by the conventional aging process.
[0022]
  Further, in the head manufactured in this way, the liquid filled at the beginning of shipment may be introduced with microbubbles. In this case, the surface of the movable member facing the bubble generation region or the movable member There is also a problem that microbubbles adhere to the surface facing the displacement region and cause a variation in initial ejection characteristics.
[0023]
  Therefore, the present invention providesIn view of such a problem, the purpose is to provide a stable discharge without any change over time even after shipment even when there is variation in the manufacturing stage with respect to the movable member. An object of the present invention is to provide a method for manufacturing a liquid discharge head that can be used.
[0024]
  The accompanying objects of the present invention are listed below.
[0025]
  First, it is to provide a very novel liquid discharge principle by fundamentally controlling the generated bubbles.
[0026]
  In addition, while improving discharge efficiency and discharge pressure, it is possible to greatly reduce the heat storage in the liquid on the heating element and to reduce the residual bubbles on the heating element, so that good liquid discharge can be performed.Liquid ejection methodIs to provide.
[0027]
  In addition, it suppresses the action of inertia force in the direction opposite to the liquid supply direction due to the back wave, and at the same time reduces the meniscus retraction by the valve function of the movable member, thereby increasing the refill frequency and improving the printing speed. Liquid dischargemethodIt is to provide.
[0028]
  In addition, the amount of deposits on the heating element can be reduced, the range of application of the discharge liquid can be expanded, and the discharge efficiency and discharge force are sufficiently high.methodIt is to provide.
[0029]
  In addition, the liquid discharge that can increase the degree of freedom of selection of the liquid to be dischargedmethodIt is to provide.
[0030]
  It is another object of the present invention to provide a method of manufacturing a liquid discharge head that can easily manufacture the liquid discharge head as described above.
[0031]
  It is another object of the present invention to obtain a recorded image with a good image using the discharge method of the present invention.
[Means for Solving the Problems]
[0032]
  In order to achieve such an object, the invention according to claim 1 communicates with the discharge port and with the liquid chamber.A first liquid flow path;Provided below the first liquid flow path and communicated with the liquid chamberA second liquid channel;A movable member provided between the first liquid flow path and the second liquid flow path, wherein the downstream side is formed as a free end that can be displaced by providing a slit;With separation wall,Disposed on the bottom surface of the second liquid channel facing the movable member.With heat-generating memberIn the method of manufacturing a liquid discharge head comprising the first liquid flow path and the second liquid flow A filling step of filling the liquid into the channel, and when the heat generating member is not driven, the free end of the movable member is not displaced and remains in the initial position in the same plane as the separation wall; and When bubbles are generated by driving the heat generating member under a predetermined driving condition, the free end of the movable member is displaced from the initial position to a position in the first liquid flow path.An aging process is provided.
[0033]
  The invention according to claim 2 communicates with the discharge port and with the liquid chamber.A first liquid flow path;Provided below the first liquid flow path and communicated with the liquid chamberA second liquid channel;A movable member provided between the first liquid flow path and the second liquid flow path, wherein the downstream side is formed as a free end that can be displaced by providing a slit;With separation wall,Disposed on the bottom surface of the second liquid channel facing the movable member.With heat-generating memberA filling step of filling the first liquid flow path with the discharge liquid and filling the second liquid flow path with the foaming liquid, and driving the heat generating member. If not, the free end of the movable member is not displaced and remains in the initial position in the same plane as the separation wall, and the heating member is driven under a predetermined driving condition to cause bubbles in the foaming liquid. When generated, the free end of the movable member is displaced from the initial position to a position in the first liquid flow path, thereby discharging the discharge liquid from the first liquid flow path, thereby forming a discharge pattern. Also detectAn aging process is provided.
[0034]
  The invention according to claim 3 is provided in correspondence with the flow path region, which is in direct communication with the discharge port and closed on the opposite side opposite to the discharge port, and corresponding to the flow channel region, and is provided in the upstream liquid chamber. A bubble generating region that communicatesA liquid flow path;A movable member that is disposed in a plane that partitions between the flow path region and the bubble generation region, and that is formed as a free end that can be displaced downstream by providing a slit.When,Disposed on the bottom surface of the liquid channel facing the movable member.With heat-generating memberIn the method of manufacturing the liquid discharge head, the filling step of filling the liquid flow path with the liquid, and the flow path without displacing the free end of the movable member when the heating member is not driven. The free end of the movable member is moved to the initial position within the plane separating the region and the bubble generation region, and when the heat generating member is driven under a predetermined driving condition to generate bubbles. Displace from the initial position to the upper position on the channel area sideAn aging process is provided.
[0035]
  The invention according to claim 4 is the invention according to claim 1,It has a common liquid chamber communicated in common with the first liquid channel and the second liquid channel separated by the separation wall.
[0036]
  The invention according to claim 5 is the invention according to claim 1 or 2,The liquid chamber includes separate liquid chambers respectively connected to the first liquid channel and the second liquid channel separated by the separation wall.
DETAILED DESCRIPTION OF THE INVENTION
[0037]
  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0038]
  A first embodiment of the present invention will be described with reference to FIGS.
Main examplePrior to the description of the aging process which is the main part, the basic structure of the liquid discharge head and the principle of liquid discharge will be described.
[0039]
  FIG. 1 is a schematic cross-sectional view of the liquid discharge head cut in the liquid flow path direction, and FIG. 2 is a partially broken perspective view of the liquid discharge head.
[0040]
  This exampleIn the liquid discharge head, a heating element 2 (heat generating resistor having a shape of 40 μm × 105 μm in the present embodiment) that applies thermal energy to the liquid is provided on the element substrate 1 as a discharge energy generating element for discharging the liquid. A liquid flow path 10 is disposed on the element substrate corresponding to the heating element 2. The liquid flow path 10 communicates with the discharge ports 18 and also communicates with a common liquid chamber 13 for supplying liquid to the plurality of liquid flow paths 10, and an amount of liquid corresponding to the liquid discharged from the discharge ports. Is received from the common liquid chamber 13.
[0041]
  On the element substrate of the liquid flow path 10, a plate-like shape made of a material having elasticity such as metal, facing the above-described heating element 2, and having a flat portion.A separation wall 30 is provided, and a slit 35 is formed in the outer separation wall 30.The movable member 31 is provided in a cantilever shape. This movable member31Is fixed to a base (support member) 34 formed by patterning a photosensitive resin or the like on the wall of the liquid flow path 10 or the element substrate. As a result, the movable member31Is held and constitutes a fulcrum (fulcrum part) 33.
[0042]
  This movable member 31 has a fulcrum (fulcrum portion; fixed end) 33 on the upstream side of a large flow flowing from the common liquid chamber 13 to the discharge port 18 side through the movable member 31 by the liquid discharge operation. In order to have a free end (free end portion) 32 on the downstream side, the heating element 2 is disposed at a position facing the heating element 2 at a distance of about 15 μm from the heating element. A bubble generation region 11 is formed between the heating element and the movable member. Note that the types, shapes, and arrangements of the heating elements and the movable members are not limited thereto, and may be any shapes and arrangements that can control bubble growth and pressure propagation as described later. In the liquid flow path 10 described above, for the purpose of explaining the flow of liquid to be described later, a portion that directly communicates with the discharge port 18 with the movable member 31 as a boundary serves as the first liquid flow path 14, and a bubble generation region 11 and the second liquid channel 16 having the liquid supply channel 12 will be described separately.
[0043]
  Heating the heating element 2 causes heat to act on the liquid in the bubble generation region 11 between the movable member 31 and the heating element 2, and the liquid is based on the film boiling phenomenon as described in USP 4,723,129. Generate bubbles. The pressure based on the generation of bubbles and the bubbles preferentially act on the movable member, and the movable member 31 opens largely toward the discharge port centering on the fulcrum 33 as shown in FIG. 1 (b), (c) or FIG. Displace as follows. Depending on the displacement or the displaced state of the movable member 31, the propagation of pressure based on the generation of bubbles and the growth of the bubbles themselves are guided to the discharge port side.
[0044]
  Here, one of the basic ejection principles of the present invention will be described. One of the basic principles of ejection is that the movable member arranged so as to face the bubble is a second position after being displaced from the first position in the steady state based on the pressure of the bubble or the bubble itself. This is to guide the pressure accompanying the generation of the bubble and the bubble itself to the downstream side where the discharge port 18 is disposed by the movable member 31 that is displaced.
[0045]
  This principle will be described in more detail by comparing FIG. 3 schematically showing a conventional liquid flow path structure without using a movable member and FIG. 4 of the present invention. Here, the pressure propagation direction toward the discharge port is indicated as VA, and the pressure propagation direction toward the upstream side is indicated as VB.
[0046]
  In the conventional head as shown in FIG. 3, there is no configuration for restricting the propagation direction of pressure by the generated bubbles 40. For this reason, the pressure propagation direction of the bubble 40 is a perpendicular direction of the bubble surface as in V1 to V8 and faces various directions. Among these, those having the component of the pressure propagation direction in the VA direction that has the greatest influence on the liquid discharge are V1 to V4, that is, the pressure propagation direction component of the portion closer to the discharge port than the almost half position of the bubble. This is an important part that directly contributes to discharge efficiency, liquid discharge force, discharge speed, and the like. Furthermore, since V1 is closest to the discharge direction VA, it works efficiently. Conversely, V4 has a relatively small direction component toward VA.
[0047]
  On the other hand, in the case of the present invention shown in FIG. 4, the pressure propagation directions V1 to V4 of the bubbles in which the movable member 31 faces in various directions as in the case of FIG. The pressure of the bubble 40 directly and efficiently contributes to the discharge. Then, the bubble growth direction itself is guided downstream as in the pressure propagation directions V1 to V4, and grows larger downstream than upstream. In this way, by controlling the bubble growth direction itself with the movable member and controlling the bubble pressure propagation direction, fundamental improvements in discharge efficiency, discharge force, discharge speed, and the like can be achieved.
[0048]
  Next, returning to FIG. 1, the discharge operation of the liquid discharge head will be described in detail.
[0049]
  FIG. 1A shows a state before energy such as electric energy is applied to the heating element 2.2Is the state before heat is generated. In this example, the movable member 31 is provided at a position facing at least the downstream side portion of the bubble with respect to the bubble generated by the heat generation of the heating element. That is, the downstream side of the bubble is the movable member31In the liquid flow path structure, at least downstream from the area center 3 of the heating element (heating element)2The movable member 31 is disposed up to a position downstream of a line perpendicular to the length direction of the flow path through the area center 3.
[0050]
  In FIG. 1B, electric energy or the like is applied to the heating element 2 so that the heating element 2 generates heat, and a part of the liquid filling the bubble generation region 11 is heated by the generated heat, and bubbles accompanying the film boiling are removed. It is the state that was generated.
[0051]
  At this time, the movable member 31 is displaced from the first position to the second position by the pressure based on the generation of the bubble 40 so as to guide the propagation direction of the pressure of the bubble 40 toward the discharge port. What is important here is that, as described above, the free end 32 of the movable member 31 is disposed on the downstream side (discharge port side), and the fulcrum 33 is disposed on the upstream side (common liquid chamber side). Movable member31At least part of the heating element2It faces the downstream portion of the gas, that is, the downstream portion of the bubble.
[0052]
  FIG. 1C shows a state where the bubble 40 has further grown, but the movable member 31 is further displaced according to the pressure accompanying the generation of the bubble 40. The generated bubbles grow greatly from the upstream to the downstream and moveable.31It greatly grows beyond the first position (dotted line position). In this way, the movable member 31 is gradually displaced according to the growth of the bubbles 40, so that the pressure propagation direction of the bubbles 40 and the direction in which the bubbles move easily, that is, the direction of the bubble growth toward the free end is used as the discharge port. It can be considered that increasing the discharge efficiency can also be directed uniformly. Movable member31Can hardly interfere with the transmission of bubbles or foam pressure in the direction of the discharge port, and can efficiently control the direction of pressure propagation and the direction of bubble growth according to the magnitude of the propagating pressure. .
[0053]
  FIG. 1D shows a state in which the bubble 40 contracts and disappears due to the decrease in the bubble internal pressure after the film boiling described above.
[0054]
  The movable member 31 that has been displaced to the second position returns to the initial position (first position) in FIG. 1A due to the negative pressure due to the contraction of the bubbles and the restoring force due to the spring property of the movable member itself. Further, at the time of defoaming, VD1 and VD2 flow from the upstream side (B), that is, from the common liquid chamber side in order to supplement the contraction volume of the bubbles in the bubble generation region 11 and to supplement the volume of the discharged liquid. Like, also outlet18The liquid flows from the side like the flow Vc. As described above, the movable member accompanying the generation of bubbles31The operation and the liquid discharge operation have been described.
[0055]
  Next, liquid refill in the liquid discharge head of the present invention will be described in detail. The liquid supply mechanism in the present invention will be described in more detail.
[0056]
  After the bubble 40 enters the defoaming process after the state of the maximum volume after FIG. 1 (c), the volume of liquid supplementing the defoamed volume enters the bubble generation region 11 and the discharge port of the first liquid channel 14 It flows from the common liquid chamber side 13 of the 18 side and the second liquid flow path 16. In the conventional liquid flow path structure that does not have the movable member 31, the discharge port is located at the defoaming position.18Of liquid flowing in from the side and common liquid chamber13The amount of liquid flowing in from the bubble generation area11More outlet18Near part and common liquid chamber13(This is based on the flow resistance and the inertia of the liquid.)
[0057]
  For this reason, the discharge port18When the flow resistance on the side close to is small, a large amount of liquid flows from the discharge port side to the defoaming position, and the retreat amount of the meniscus increases. In particular, the discharge port to increase the discharge efficiency18As the flow resistance on the side closer to the height is decreased to increase the discharge efficiency, the retreat of the meniscus M at the time of defoaming becomes larger, and the refill time becomes longer, preventing high-speed printing.
[0058]
  On the other hand, since the movable member 31 is provided in this embodiment, when the bubble volume W is W1 on the upper side of the first position of the movable member 31 and W2 is the bubble generation region 11 side, the movable member is used during defoaming.31The meniscus retreats when it returns to its original position, and the liquid supply for the remaining volume of W2 is mainly the second.Liquid flowThis is achieved by supplying liquid from the flow VD2 of the passage 16. As a result, the amount corresponding to about half of the volume of the bubble W has conventionally been the meniscus retraction amount, but it is possible to suppress the meniscus retraction amount to about half of W1 which is smaller than that.
[0059]
  Furthermore, the liquid supply for the volume of W2 uses the pressure at the time of defoaming, and the heating element of the movable member 312The second liquid channel mainly along the side surface16Since this can be forcibly performed from the upstream side (VD2), a faster refill can be realized.
[0060]
  Here, when refilling using the pressure at the time of defoaming with a conventional head, the vibration of the meniscus increased and led to deterioration of the image quality, whereas in the high-speed refilling of this example, The discharge port between the region of the first liquid flow path 14 on the discharge port 18 side and the bubble generation region 11 by the movable member 3118Since the circulation of the liquid on the side is suppressed, the vibration of the meniscus can be extremely reduced.
[0061]
  In this way, this embodiment is the secondLiquid flowBy using forced refilling to the foaming region through the liquid supply path 12 of the path 16 and high-speed refilling by suppressing the meniscus retreat and vibration described above, it can be used for stable ejection, repeated high-speed ejection, and recording. In such a case, image quality can be improved and high-speed recording can be realized.
[0062]
  Further, in this embodiment, it also has a function of suppressing the propagation (back wave) of the pressure upstream due to the generation of bubbles. Of the bubbles generated on the heating element 2, most of the pressure due to the bubbles on the common liquid chamber 13 side (upstream side) is a force (back wave) that pushes the liquid toward the upstream side. This back wave caused the pressure on the upstream side, the amount of liquid movement, and the inertial force accompanying the liquid movement, which lowered the refill of the liquid into the liquid flow path and hindered high-speed driving. . In the present invention, the refill supply performance is further improved by suppressing these actions to the upstream side by the movable member 31 first.
[0063]
  Next, the aging process in the present invention will be described.
[0064]
  First,2 channel structureThe first of the aging processExampleWill be described.
[0065]
  As shown in FIG. 1, the liquid discharge head used in the present embodiment is provided below the first liquid flow path 14 and the first liquid flow path 14 communicating with the discharge port 18 and communicating with the liquid chamber. The second liquid flow path 16 communicating with the liquid chamber, the first liquid flow path 14 and the second liquid flow path 16 are provided between the first liquid flow path 16 and the second liquid flow path 16. A separation wall 30 having a movable member 31 formed as an end 32 and a heating element 2 disposed on the bottom surface of the second liquid channel 16 facing the movable member 31 are provided.
[0066]
  In this method of manufacturing a liquid discharge head, the filling process of filling the liquid into the first liquid flow path 14 and the second liquid flow path 16 and the movable member 31 of the movable member 31 when the heating element 2 is not driven. When the free end 32 remains in the initial position in the same plane as the separation wall 30 without being displaced, and the heat generating member 2 is driven under predetermined driving conditions to generate bubbles, the free end of the movable member 31 And an aging process for displacing the position 32 from the initial position to a position in the first liquid flow path 14.
[0067]
  In this case, you may have the common liquid chamber 13 connected to the 1st liquid flow path 14 and the 2nd liquid flow path 16 isolate | separated by the separation wall 30 in common.
[0068]
  Hereinafter, a specific example will be described.
[0069]
  BookExampleThen, an aging process for a liquid discharge head having a first liquid flow path 14 and a second liquid flow path 16 having, for example, a two flow path structure as shown in FIG. 1 (similar structures in FIGS. 10 and 11 described later). Will be described.
  First, the separation wall30In the liquid discharge head having the two-channel structure in which the movable member 31 is formed, both the first liquid channel 14 and the second liquid channel 16 are filled with the foaming liquid. Then, by applying a voltage higher than the applied voltage at the time of normal printing to the heating element 2 in a state where the foaming liquid is filled, the foaming liquid in the second liquid flow path 16 is foamed and the movable member 31 becomes the first member. Displacement in the direction of the one-liquid channel 14. Thereby, the separating wall facing the slit 3530The burr Xa (see FIG. 33 described in the conventional example) generated on the side surface and the peripheral edge portion of the movable member 31 can be removed.
[0070]
  The conditions for the aging treatment are not limited to the conditions described above, and energy equivalent to the energy applied during normal printing may be added. For example, as shown in Table 1, the frequency, voltage, Even if the processing is performed by setting the pulse width to a condition larger than the condition at the time of printing, the flash Xa can be completely removed. By removing the burrs Xa in this way, the movable member 31 is easily displaced, and stable discharge can be performed, and further excellent discharge efficiency and discharge amount can be obtained. Moreover, the responsiveness with respect to the heat generating body 2 can be improved by this.
[0071]
[Table 1]

  Moreover, when performing such an aging process, as a drive condition of the heat generating body 2, it is a fixed number of times, for example, 10³It is possible to control to perform the foaming drive for the following number of times. Such control of the number of times of foaming driving can be processed by using a control program of the ROM 303 built in the storage device of FIG. 29 described later, and can also be controlled by using a hardware counter. .
[0072]
  Further, by performing such an aging treatment, the movable member 31 can be easily displaced, thereby stabilizing the heat generation, improving the foaming stability, and further, dust on the surface of the heating element 2. Can also be easily removed.
[0073]
  Further, in the liquid discharge head of the present embodiment, the second liquid flow path 16 has a portion in which the cross-sectional area is smaller than that of the first liquid flow path 14 and the flow resistance is increased in the flow path. When the aging process is performed, the second liquid channel 16 is easily filled with the foaming liquid during a normal process. In particular, a type of liquid that is easily burned is used as the discharge liquid used in the first liquid channel 14. In this case, it is possible to eliminate the shortening of the life of the heating element 2. Note that the movable member 31 may not be displaced to the extent that liquid is discharged.
[0074]
  next,2 channel structureA second embodiment of the aging process will be described.
As shown in FIG. 1, the liquid discharge head used in the present embodiment is provided below the first liquid flow path 14 and the first liquid flow path 14 communicating with the discharge port 18 and communicating with the liquid chamber. The second liquid flow path 16 communicating with the liquid chamber, the first liquid flow path 14 and the second liquid flow path 16 are provided between the first liquid flow path 16 and the second liquid flow path 16. A separation wall 30 having a movable member 31 formed as an end 32 and a heating element 2 disposed on the bottom surface of the second liquid channel 16 facing the movable member 31 are provided.
In such a method for manufacturing a liquid discharge head, a filling step of filling the first liquid flow path 14 with the discharge liquid and filling the second liquid flow path 16 with the foaming liquid, and the heating element 2 are driven. If not, the free end of the movable member 31 is not displaced and remains in the initial position in the same plane as the separation wall 30, and the heat generating member 2 is driven under predetermined driving conditions to generate bubbles in the foaming liquid. In this case, the free end of the movable member 2 is displaced from the initial position to a position in the first liquid flow path 14 so that the discharge liquid is discharged from the first liquid flow path 14 and the discharge pattern is also detected. Aging process It is.
In this case, as shown in FIG. 10, the liquid chambers 15 and 17 may be separately connected to the first liquid flow path 14 and the second liquid flow path 16 separated by the separation wall 30. Good.
Hereinafter, a specific example will be described.
BookExampleThen, the first mentioned aboveExampleA liquid discharge head having a two-flow channel structure similar to that in Table 1 is used, but the first liquid flow path 14 is filled with the discharge liquid and the second liquid flow path 16 is filled with the foaming liquid. Aging is performed according to conditions. Thereby, it becomes easier to displace the movable member 31, and the foaming stability in the second liquid channel 16 can be improved.
[0075]
  Further, in this example, by using the colored discharge liquid, it is possible to detect the liquid discharge pattern at the same time as performing the aging process. By performing this ejection pattern, the aging process may be terminated when a normal printing state is achieved.
[0076]
  Furthermore, when using such a liquid discharge head having a two-channel structure, in order to prevent mixing of the foaming liquid and the discharge liquid, separation is performed.Wall 30It is desirable to make the width of the slit 35 formed by forming the movable member 31 as small as possible. However, by reducing the slit width in this way, the rate at which many burrs Xa are generated at the time of manufacture increases. The book also from the meaningExampleAs described above, it is beneficial to perform the aging process at the manufacturing stage before shipment. As a result, the movable member 31 can be displaced several times to adapt the cross-sectional portion, so that the movable member 31 is easily displaced, and accordingly, the heat generation of the heating element 2 can be stabilized.
[0077]
  Next, further characteristic structures and effects of the present embodiment will be described below. The second liquid flow path 16 of the present embodiment has a liquid supply path 12 having an inner wall connected to the heating element 2 in a substantially flat manner upstream of the heating element 2 (the heating element surface is not greatly depressed). Yes. In such a case, the supply of the liquid to the bubble generation region 11 and the surface of the heating element 2 is performed like VD2 along the surface of the movable member 31 on the side close to the bubble generation region 11. For this reason, it is suppressed that the liquid stagnates on the surface of the heating element 2, so that the deposition of the gas dissolved in the liquid and the so-called residual bubbles remaining without being defoamed can be easily removed. The heat storage is not too high. Therefore, more stable generation of bubbles can be repeated at high speed. ActuallyForm of applicationIn the above description, the liquid supply path 12 having a substantially flat inner wall has been described.2Any liquid supply passage that gently connects to the surface and has a gentle inner wall may be used.2Any shape may be used as long as it does not cause liquid stagnation or large turbulence in the liquid supply.
[0078]
  Bubble generation area11Supply of liquid to the movable member31Some are performed from VD1 through the side (slit 35). However, a large movable member that covers the entire bubble generating region 11 (covers the heating element surface) as shown in FIG.31When the movable member 31 is returned to the first position, the liquid flow resistance between the bubble generation region 11 and the region near the discharge port of the first liquid channel 14 is increased. The liquid flow from the VD 1 toward the bubble generation region 11 is hindered. However, in the head structure of the present invention, since there is the flow VD1 for supplying the liquid to the bubble generation region 11, the liquid supply performance becomes very high, and the ejection that covers the bubble generation region 11 with the movable member 31 is performed. Even if it takes a structure that seeks to improve efficiency, the liquid supply performance will not be degraded.
[0079]
  Further, the positions of the free end 32 and the fulcrum 33 of the movable member 31 are, for example, as shown in FIG.32Is relatively downstream of the fulcrum. Due to such a configuration, it is possible to efficiently realize functions and effects such as guiding the pressure propagation direction and growth direction of bubbles to the discharge port side during the foaming described above. Furthermore, this positional relationship achieves not only a function and an effect on ejection but also an effect that the flow resistance with respect to the liquid flowing through the liquid flow path 10 can be reduced and the refill can be performed at high speed even when supplying the liquid. As shown in FIG. 5, when the meniscus M retracted by discharge returns to the discharge port 18 by capillary force, or when liquid supply against defoaming is performed, the liquid flow path 10 (first (Including the liquid flow path 14 and the second liquid flow path 16) The free ends so as not to oppose the flow S1, S2, S3 flowing in the interior32This is because the fulcrum 33 is arranged.
[0080]
  In other words, in FIG. 1, as described above, the free end 32 of the movable member 31 divides the heating element 2 into the upstream area and the downstream area by the area center 3 (area center (center) of the heating element). The line extends perpendicularly to the longitudinal direction of the liquid flow path) and extends to the heating element 2 so as to oppose the downstream position. As a result, the movable member 31 receives a pressure or a bubble that greatly contributes to the discharge of the liquid generated downstream from the center position 3 of the area of the heating element.18The discharge efficiency and the discharge force can be fundamentally improved. In addition, many effects are obtained by utilizing the upstream side of the bubbles. In the configuration of the present embodiment, the free end of the movable member 3132It is considered that the momentary mechanical displacement of the lens effectively contributes to the liquid discharge.
[0081]
  Next, a second embodiment of the present invention will be described with reference to FIG.
Prior to the description of the aging process, which is the main part of the present embodiment, the basic structure of the liquid discharge head and the liquid discharge principle will be described.
In FIG. 6, A shows a state in which the movable member is displaced (bubbles are not shown), B shows a state in which the movable member is in the initial position (first position), and in this B state, the foam generation region 11 is substantially sealed with respect to the discharge port 18. (Here, although not shown, there is a channel wall between A and B to separate the channel from the channel.)
  In the movable member 31 shown in FIG. 6, two bases 34 are provided on the side, and the liquid supply path 12 is provided therebetween. As a result, the movable member31Heating element2Along the side surface, also heating element2The liquid can be supplied from a liquid supply path having a surface that is substantially flat or smoothly connected to the surface.
[0082]
  Here, at the initial position (first position) of the movable member 31, the movable member 31 is close to or in close contact with the heating element downstream wall 36 and the heating element side wall 37 arranged on the downstream side and the lateral direction of the heating element 2. The bubble generation region 11 is substantially sealed on the discharge port 18 side. For this reason, the free end of the movable member does not release the pressure of bubbles during foaming, particularly the pressure on the downstream side of the bubbles.32Can act intensively on the side.
[0083]
  Further, at the time of defoaming, the movable member 31 returns to the first position, and the heating element2The liquid supply at the time of defoaming upward is substantially sealed on the discharge port side of the bubble generation region 31.Form of applicationVarious effects described in (1) can be obtained. In addition, the effect on refillingForm of applicationThe same functions and effects can be obtained.
[0084]
  Also bookEmbodiment2 and 6, a base 34 for supporting and fixing the movable member 31 is provided upstream from the heating element 2, and a base 34 having a smaller width than the liquid flow path 10 is used as described above. A liquid is supplied to the proper liquid supply path 12. Further, the shape of the base 34 is not limited to this, and any shape can be used as long as refilling can be performed smoothly.
[0085]
  Next, a third aging process according to the present invention.ExampleWill be described.
ExampleThen, for example, as shown in FIG.Flow pathAn aging process for the liquid discharge head having the structure will be described.
[0086]
  First, the heating element 2 is provided on the lower surface in the foam generation region 11 formed by the heating element downstream wall 36, the heating element side wall 37, and the movable member 31 thereabove.Flow pathIn the liquid discharge head having the structure, the liquid flow path 10 is filled with the discharge liquid. And in the state filled with this discharge liquid, the first mentioned aboveExampleAnd secondExampleSimilarly to the above, the aging process is performed by controlling the driving of the heating element 2 under a predetermined driving condition (Table 1). Thereby, since the burr | flash Xa which generate | occur | produced in the edge peripheral part of the movable member 31 can be removed, the movable member 31 can be made to adapt and displace easily in the liquid flow path 10, and also in the liquid flow path 10 The foaming stability of can be improved.
[0087]
  Further, as the density of the head increases, the gap between the movable member 31 and the flow path wall becomes very narrow. If there are burrs or the like in the cross-section of the peripheral edge of the movable member 31, the burrs are displaced when displaced. There is a risk that it will hit the channel wall and hinder displacement. But bookExampleBy displacing the movable member 31 by aging processing as described above, it is possible to ship a high-density head that completely eliminates the hindrance to displacement due to burrs.
[0088]
  In this embodiment, the distance between the movable member 31 and the heating element 2 is about 15 μm, but the pressure based on the generation of bubbles is sufficiently movable.31It suffices if it is within the range transmitted to
[0089]
  Hereinafter, configuration examples according to the present invention will be sequentially described with reference to the drawings with reference to FIGS. FIG. 7 shows a bubble generation region in one liquid flow path.11, Bubbles generated there and movable members31The liquid discharge method and the refill method of the present invention are easier to understand.
[0090]
  The aboveEmbodimentMany of the movable members31Free end of32In contrast, the pressure of the generated bubbles is concentrated and a steep movable member31Simultaneously with the movement of bubbles18Achieving concentration on the side. In contrast, the bookEmbodimentIs a bubble outlet that directly affects droplet discharge while giving the freedom of bubbles to be generated.18The downstream part of the bubble that is the side is a movable member31Free end of32It is to be regulated on the side.
[0091]
  In terms of configuration, in FIG. 7, compared with the above-described FIG. 2 (first embodiment), the bubble generation region provided on the element substrate 1 of FIG.11In this embodiment, a convex portion (shaded portion in the figure) serving as a barrier located at the downstream end of the barrier is not provided. That is, the movable member31The free end region and both end regions of the air bubble are open without substantially sealing the bubble generation region with respect to the discharge port region.EmbodimentIt is.
[0092]
  BookEmbodimentIn the downstream portion directly acting on the bubble droplet discharge, bubble growth at the downstream tip is allowed, and the pressure component is effectively used for discharge. In addition, at least the pressure (the component force of VB, VB, and VB in FIG. 3) upward of the downstream portion is movable.31The discharge efficiency has been described above because the free end side portion of the nozzle acts so as to be added to the bubble growth at the downstream end portion.EmbodimentImprove as well.Embodiment described aboveCompared to the bookEmbodimentThe heating element2Responsiveness to driving is excellent. In addition, this embodiment has a manufacturing advantage since it is simple in structure.
[0093]
  BookOf the embodimentThe fulcrum part of the movable member 31 is a movable member.31It is fixed to one base 34 having a small width with respect to the surface portion. Therefore, the liquid supply to the bubble generation region 11 at the time of defoaming is supplied through both sides of this base (see arrows in the figure). This foundation may have any structure as long as it ensures supply.
[0094]
  Refill when supplying liquidEmbodimentIn the case of31Bubble generation region from above due to the defoaming of bubbles due to the presence of11Since the flow into the air is controlled, it is superior to the conventional bubble generating structure of only a heating element. Of course, this also reduces the amount of meniscus retraction.
[0095]
  BookEmbodimentAs a modification of the movable member31Free end of32It is preferable that only the both side ends (or one of them) are substantially sealed with respect to the bubble generation region 11. According to this configuration, the movable member31The bubble outlet that explained the pressure toward the side of18Since it can be used by changing to the growth of the side end portion, the discharge efficiency is further improved.
[0096]
  Next, an example in which the liquid ejection force due to the mechanical displacement described above is further improved will be described with reference to FIG.
FIG. 8 is a cross-sectional view of such a head structure. In FIG. 8, the free end of the movable member 3132The position of the heating element2Movable member so as to be located further downstream of31Is extendedEmbodimentIs shown. This allows the movable member at the free end position.31The displacement speed of the movable member can be increased31The generation of the discharge force due to the displacement of can be further improved.
[0097]
  Also free end32Compared to the previous embodiment, the discharge port18Since the bubble is closer to the side, the growth of bubbles can be concentrated in a more stable directional component, so that more excellent discharge can be performed.
[0098]
  Further, the movable member 31 is displaced at the displacement speed R1 in accordance with the bubble growth speed at the pressure center of the bubble, but the free end 32 at a position far from the fulcrum 33 from this position is displaced at a higher speed R2. . Thus, the discharge efficiency is increased by causing the free end 32 to mechanically act on the liquid at a high speed to cause liquid movement.
[0099]
  In addition, the free end shape is perpendicular to the liquid flow in the same manner as in FIG. 7, so that the pressure of the bubbles and the mechanical action of the movable member can contribute more efficiently to the discharge.
[0100]
  Next, a description will be given of a third embodiment of the aging process of the one flow path structure.
As shown in FIG. 9, the liquid discharge head used in this embodiment corresponds to the flow path region 10 that directly communicates with the discharge port 18 and is closed on the opposite side facing the discharge port 18. And a liquid flow path 10 having a bubble generation area 11 communicating with the upstream liquid chamber 13, and a plane that partitions the flow path area and the bubble generation area 11, and a slit 35. Is provided with a movable member 31 formed as a free end 32 that is displaceable on the downstream side, and a heat generating member 2 disposed on the bottom surface of the liquid flow path 10 facing the movable member 31.
[0101]
  In such a liquid ejection head manufacturing method, the liquid flow path 10 is filled with a liquid, and when the heat generating member 2 is not driven, the flow path region without displacing the free end of the movable member 31. The free end of the movable member 31 is moved to the initial position when the bubbles are generated by driving the heat generating member 2 under a predetermined driving condition. And an aging step of displacing from the position to the upper position on the flow path region side.
[0102]
  Hereinafter, a specific example will be described.
[0103]
  A structural example in the case where the region directly communicating with the discharge port does not have a flow channel shape communicating with the liquid chamber side will be described based on FIGS. 9 (a), 9 (b), and 9 (c).
[0104]
  All the liquid supply is performed only from the liquid supply path 12 along the surface of the movable member 31 on the foaming region side. The positional relationship between the free end 32 of the movable member 31 and the fulcrum 33 with respect to the discharge port 18 and the heating element 2 The facing configuration is similar to the previous embodiment.
[0105]
  This example realizes the above-mentioned effects such as discharge efficiency and liquid supply property, but particularly suppresses meniscus retraction and uses the pressure during defoaming to remove almost all liquid supply during defoaming. Forced refill is performed using the pressure of
[0106]
  FIG. 9A shows a state in which the liquid is foamed by the heating element 2, and FIG.FoamIn this state, the movable member 31 is returned to the initial position and the liquid is supplied by S3.
[0107]
  In FIG. 9C, the movable member31 isThe slight meniscus retraction M when returning to the initial position is being refilled by the capillary force near the discharge port 18 after defoaming.
[0108]
  next,As another embodiment,An example in which the liquid channel has a multi-channel configuration will be described with reference to FIGS.
[0109]
  In this exampleBy making the liquid flow path into a multi-flow path structure, it is possible to separate a liquid (foamed liquid) that is foamed by further applying heat and a liquid that is mainly discharged (discharged liquid).
[0110]
  FIG.,liquidFIG. 11 shows a schematic cross-sectional view of the discharge head in the flow path direction, and FIG. 11 shows a partially broken perspective view of the liquid discharge head.
[0111]
  This liquid discharge head has a second liquid flow path 16 for foaming on an element substrate 1 provided with a heating element 2 that gives thermal energy for generating bubbles in the liquid, and a discharge port 18 on the second liquid flow path 16. A first liquid passage 14 for discharge liquid that is in direct communication is disposed.
[0112]
  First liquid flow path14Of the first liquid passage 15 is in communication with the first common liquid chamber 15 for supplying the discharge liquid to the plurality of first liquid passages.16The upstream side communicates with a second common liquid chamber for supplying the foaming liquid to the plurality of second liquid flow paths.
[0113]
  However, if the foaming liquid and the discharge liquid are the same liquid, the common liquid chamber15May be shared and shared.
[0114]
  A first liquid channel 14 and a second liquid channel 16;A separation wall 30 made of an elastic material such as metal is disposed between the first liquid flow path and the first liquid flow path.14And second liquid flow path16And is divided. If the foam liquid and discharge liquid should not be mixed as much as possible, this separation wall30It is better to separate the flow of the liquid in the first liquid passage 14 and the second liquid passage 16 as completely as possible, but if there is no problem even if the foaming liquid and the discharge liquid are mixed to some extent, The separation wall 30 may not have a complete separation function.
[0115]
  Heating element2The separation wall of the portion located in the projection space upward in the surface direction (hereinafter referred to as a discharge pressure generation region; region A and bubble generation region 11 in FIG. 10)30The slit 35 forms a cantilever-shaped movable member 31 having a free end on the discharge port side (downstream side of the liquid flow) and a fulcrum 33 positioned on the common liquid chamber (15, 17) side. Since this movable member 31 is arranged facing the bubble generation region 11 (B), the first liquid flow path is formed by foaming of the foaming liquid.14Side outlet18It operates so as to open toward the side (in the direction of the arrow in the figure). Also in FIG. 11, the second liquid flow path is formed on the element substrate 1 on which the heating resistor portion as the heating element 2 and the wiring electrode 5 for applying an electric signal to the heating resistor portion are arranged.16A separation wall 30 is arranged through a space constituting the.
[0116]
  Arrangement of fulcrum 33 and free end 32 of movable member 31 and heating element2For the relationship of placement withConfiguration of the embodiment described aboveLike.
[0117]
  Also,Configuration of the embodiment described aboveThe structure relationship between the liquid supply path 12 and the heating element 2 has been described above, but the structure relationship between the second liquid path 16 and the heating element 2 is the same in this embodiment.
[0118]
  Next, the operation of the liquid discharge head of this embodiment will be described with reference to FIG.
[0119]
  In driving the head, the discharge liquid supplied to the first liquid flow path 14 and the first liquid2The same water-based ink was used as the foaming liquid supplied to the liquid flow path 16.
[0120]
  The heat generated by the heating element 2 is generated in the bubble generation area of the second liquid channel.11By acting on the foaming liquid inside,Configuration of the embodiment described aboveThe bubble 40 based on the film boiling phenomenon as described in USP 4,723,129 is generated in the foaming liquid in the same manner as described in the above.
[0121]
  In this embodimentIn the bubble generation area11Since there is no escape of the foaming pressure from the three sides except the upstream side, the movable member in which the pressure associated with the generation of the bubbles is arranged in the discharge pressure generating part31Concentrated and propagated to the side, with the growth of bubbles, movable member31FIG. 12A shows the first liquid flow path as shown in FIG.14Displace to the side. This movable member31The first liquid flow path 14 and the second liquid flow path 16 are in great communication with each other, and the pressure based on the generation of bubbles is the discharge port of the first liquid flow path.18It is mainly transmitted in the side direction (direction A). Propagation of this pressure and the movable member as described above31The liquid is discharged from the discharge port by the mechanical displacement.
[0122]
  Next, as the bubble contracts, the movable member 31 returns to the position shown in FIG. 12A, and an amount of discharge liquid corresponding to the amount of discharged liquid is supplied from the upstream side in the first liquid channel 14. Is done. RealExamplesHowever, the supply of the discharged liquid isExamplesLike moving parts31Is the closing direction, so that the refilling of the discharged liquid is not hindered by the movable member.
[0123]
  This embodimentIs a movable member31As for the actions and effects of the main parts concerning the propagation of foaming pressure accompanying the displacement of bubbles, the direction of bubble growth, the prevention of back waves, etc.Embodiments andSame butThis embodimentBy taking the two-channel configuration as described above, there are the following advantages.
[0124]
  That is, the above-mentionedOf the embodimentAccording to the configuration, the discharge liquid and the foaming liquid can be separate liquids, and the discharge liquid can be discharged by the pressure generated by the foaming of the foaming liquid. Therefore, conventionally, even if heat is applied, foaming is not sufficiently performed, and even if it is a highly viscous liquid such as polyethylene glycol that has insufficient discharge force, this liquid is used as the first liquid channel.14To the second liquid flow path, a liquid (such as a mixed liquid of ethanol: water = 4: 6, about 1 to 2 cP) or a liquid having a low boiling point is supplied to the foaming liquid.16It can be made to discharge satisfactorily by supplying it.
[0125]
  In addition, by selecting a liquid that does not generate deposits such as koge on the surface of the heating element even when receiving heat, foaming can be stabilized and good discharge can be performed.
[0126]
  Furthermore, in the structure of the head of the present invention,In the embodiment described aboveSince the effects as described above are also produced, it is possible to discharge a liquid such as a highly viscous liquid with higher discharge efficiency and higher discharge force.
[0127]
  Even in the case of a liquid that is weak to heating, the liquid is passed through the first liquid channel.14Supplied as discharge liquid to the second liquid flow path16If a liquid that hardly foams thermally and produces good foaming is supplied, it can be discharged with high discharge efficiency and high discharge force as described above without causing thermal damage to the liquid that is vulnerable to heating. .
[0128]
  <Other implementationsForm of>
  As mentioned above, implementation of the main part of the liquid discharge head and the liquid discharge method of the present inventionForm ofWe explained about the followingIn the form ofPreferably applicableExampleWill be described with reference to the drawings. However, in the following description, the above-described one flow path configuration is used.EmbodimentAnd two-channel configurationEmbodimentHowever, unless otherwise stated, bothEmbodimentIt can be applied to.
[0129]
  <Ceiling shape of liquid flow path>
  FIG. 13 is a cross-sectional view of the liquid discharge head according to the present invention in the direction of the flow path.10A grooved member 50 provided with a groove for constituting the is provided on the separation wall 30. BookIn the embodimentThe movable member31The height of the channel ceiling in the vicinity of the position 32 of the free end is high, and the movable member31The operating angle θ is made larger. This movable member31The operation range is the structure of the liquid flow path, the movable member31However, it is considered that it is desirable to operate up to an angle including the angle in the axial direction of the discharge port.
[0130]
  In addition, as shown in this figure, the movable member can be determined from the diameter of the discharge port.31Free end of32By increasing the height of the displacement, a more sufficient discharge force can be transmitted. Also, as shown in this figure, the movable member31The movable member from the height of the liquid flow path ceiling at the 32 free end position31Since the height of the liquid flow path ceiling at the fulcrum 33 position is lower, the movable member31The escape of the pressure wave to the upstream side due to the displacement of can be further effectively prevented.
[0131]
  <Arrangement relationship between second liquid flow path and movable member>
  FIG. 14 is a view for explaining the positional relationship between the above-described movable member 31 and the second liquid flow path 16. FIG. 14A is a view of the separation wall 30 and the vicinity of the movable member 31 as viewed from above. FIG. 5B is a view of the second liquid channel 16 with the separation wall 30 removed as viewed from above. And (c) in the figure shows a movable member.31FIG. 6 is a diagram schematically showing the positional relationship between the second liquid flow path 16 and the second liquid flow path 16 by overlapping these elements. All figures are belowInIt is the front side where the discharge port is arranged.
[0132]
  This embodimentThe second liquid passage 16 is upstream of the heating element 2 (here, the upstream side is the heating element from the second common liquid chamber side).2Position, movable member31,First liquid channel 14Through the discharge port18It is the upstream side in the big flow toward ) Has a narrowed portion 19 and has a chamber (foaming chamber) structure that suppresses the pressure during foaming from easily escaping to the upstream side of the second liquid channel 16.
[0133]
  Like the conventional head, the flow path for foaming and the flow path for discharging liquid are the same, and the head is provided with a constricted portion so that the pressure generated on the liquid chamber side from the heating element does not escape to the common liquid chamber side In this case, it is necessary to take a configuration in which the cross-sectional area of the flow path in the narrowed portion is not so small in consideration of the refill of the liquid.
[0134]
  But,This embodimentIn the case of the first liquid flow path,14The discharge liquid inside can be a heating element2Second liquid flow path provided with16Since the foaming liquid inside can be made less consumed, the second liquid flow path16The amount of foaming liquid filled into the bubble generation region 11 may be small. Therefore, since the interval in the narrowed portion 19 can be very narrow, from several μm to several tens of μm, the second liquid channel16It is possible to further suppress the pressure generated at the time of foaming to escape to the surroundings, and it is possible to concentrate and move31Can be directed to the side. And since this pressure can be utilized as discharge force via the movable member 31, higher discharge efficiency and discharge force can be achieved. However, the shape of the first liquid channel 16 is not limited to the above-described structure, and the pressure accompanying the generation of bubbles is effectively a movable member.31Any shape that can be transmitted to the side is acceptable.
[0135]
  As shown in FIG. 14C, the side of the movable member 31 is the second liquid channel.16Part of the wall constituting the second liquid flow path of the movable member 3116Depressing into can be prevented. Thereby, the separability between the discharge liquid and the foaming liquid described above can be further enhanced. Also, bubble slit35Therefore, the discharge pressure and the discharge efficiency can be further increased. Furthermore, the effect of the refill from the upstream side by the pressure at the time of the above-mentioned defoaming can be heightened.
[0136]
  In addition, in FIG.12 (b) and FIG. 13, a movable member31In accordance with the displacement of the first liquid passage 14 toward the first liquid passage 14 side.16A part of the bubbles generated in the bubble generation region 11 extends to the first liquid channel 14 side, but by setting the height of the second channel so that the bubbles extend in this way, The ejection force can be further improved as compared with the case where bubbles do not extend. thisLikeIn order to allow the bubbles to extend to the first liquid flow path 14, it is desirable to make the height of the second liquid flow path 16 lower than the maximum bubble height, and this height is several μm to 30 μm. It is desirable to do. In the present embodiment, this height is 15 μm.
[0137]
  <Moveable member and separation wall>
  FIG. 15 shows another shape of the movable member 31, and 35 is a separation wall.30It is a slit provided in this slit35Thus, the movable member 31 is formed. (A) is a rectangular shape, and (b) is a movable member with a fulcrum side being narrowed.31The shape shown in FIG. 4C is wide at the fulcrum side, and is a movable member.31This is a shape that improves durability. As a shape having good ease of operation and durability, as shown in FIG. 14 (a), it is desirable that the width on the fulcrum side is narrow in an arc shape.31The shape of the second liquid channel16Any shape that does not enter the side, can be easily operated, and has excellent durability.
[0138]
  Embodiment described aboveThe plate-like movable member 31 and the movable member31The separation wall 5 having a thickness of 5 μm is made of nickel, but the movable member is not limited to this.31The separation wall30The material that makes up the solvent is resistant to foaming liquid and discharged liquid, and is a movable member31As long as it has elasticity to operate satisfactorily and can form a fine slit 35.
[0139]
  Movable member31As a material of high durability, metals such as silver, nickel, gold, iron, titanium, aluminum, platinum, tantalum, stainless steel, phosphor bronze, and alloys thereof, or nitrile groups such as acrylonitrile, butadiene, and styrene are used. Resin, resin having amide group such as polyamide, resin having carboxyl group such as polycarbonate, resin having aldehyde group such as polyacetal, resin having sulfone group such as polysulfone, other resin such as liquid crystal polymer and compound thereof, High ink properties such as gold, tungsten, tantalum, nickel, stainless steel, titanium, etc., their alloys and ink resistance, or those coated on the surface, or resins having an amide group such as polyamide, polyacetal, etc. Resin with aldehyde group Resin having a ketone group such as polyetheretherketone, resin having an imide group such as polyimide, resin having a hydroxyl group such as phenol resin, resin having an ethyl group such as polyethylene, resin having an alkyl group such as polypropylene, epoxy resin A resin having an epoxy group such as a resin, a resin having an amino group such as a melamine resin, a resin having a methylol group such as a xylene resin and a compound thereof, and a ceramic such as silicon dioxide and a compound thereof are desirable.
[0140]
  Separation wall30As the material, polyethylene, polypropylene, polyamide, polyethylene terephthalate, melamine resin, phenol resin, epoxy resin, polybutadiene, polyurethane, polyether ether ketone, polyether sulfone, polyarylate, polyimide, polysulfone, liquid crystal polymer (LCP), etc. Resins with good heat resistance, solvent resistance, moldability, and their compounds represented by recent engineering plastics, or metals such as silicon dioxide, silicon nitride, nickel, gold, and stainless steel, alloys and compounds thereof, Alternatively, it is desirable that the surface is coated with titanium or gold.
[0141]
  Also separation wall30The thickness of the separation wall30As a movable member31From the viewpoint of satisfactory operation, it may be determined in consideration of the material, shape, etc., but is preferably about 0.5 μm to 10 μm.
[0142]
  The width of the slit 35 for forming the movable member 31 isThis embodimentIn the case where the foaming liquid and the discharge liquid are different liquids and it is desired to prevent the liquid mixture of the two liquids, the slit width is set to an interval that forms a meniscus between the two liquids, What is necessary is just to suppress distribution. For example, when a liquid of about 2 cP (centipoise) is used as the foaming liquid and a liquid of 100 cP or more is used as the discharge liquid, a slit of about 5 μm35However, it is possible to prevent mixed liquid, but it is desirable to make it 3 μm or less.
[0143]
  Movable member in the present invention31Is intended for the thickness of the order of μm (tμm), the movable member of the thickness of the order of cm31Is not intended. Movable member with thickness of μm order31For this reason, when a slit width (W μm) on the order of μm is targeted, it is desirable to consider manufacturing variations to some extent.
[0144]
  slit35Movable member forming31When the thickness of the member facing the free end and / or the side end is equal to the thickness of the movable member (FIGS. 12, 13, etc.), the relationship between the slit width and the thickness is considered in consideration of manufacturing variations as follows. By making it into the range, the mixed liquid of the foaming liquid and the discharge liquid can be stably suppressed. This is a limited condition, but as a design point of view, when high viscosity ink (5 cp, 10 cp, etc.) is used for a foaming liquid having a viscosity of 3 cp or less, W / t ≦ 1 should be satisfied. Thus, it was possible to suppress the mixing of the two liquids over a long period of time.
[0145]
  The slit which provides the “substantially sealed state” of the present invention35As such, it is more certain if it is on the order of several μm.
[0146]
  As described above, when the function is separated into the foaming liquid and the discharge liquid, the movable member31These are the substantial partition members. This movable member31It can be seen that the foaming liquid is slightly mixed with the discharged liquid when the bubbles move with the generation of bubbles. In consideration of the fact that the discharge liquid for forming an image generally has a colorant concentration of about 3% to 5% in the case of ink jet recording, the foaming liquid is in a range of 20% or less with respect to the discharge liquid droplets. Even if it is contained in, it does not cause a large concentration change. Therefore, as such a mixed liquid, the present invention includes a mixture of a foaming liquid and a discharged liquid that is 20% or less with respect to the discharged liquid droplets.
[0147]
  In the implementation of the above configuration example, even if the viscosity is changed, the upper limit is 15% of the foaming liquid, and in the case of a foaming liquid of 5 cps or less, the mixing ratio is about 10%, depending on the driving frequency. It was the upper limit.
[0148]
  In particular, the liquid mixture can be reduced (for example, 5% or less) as the viscosity of the discharged liquid is reduced to 20 cps or less.
[0149]
  Next, the positional relationship between the heating element 2 and the movable member 31 in this head will be described with reference to the drawings. However, movable member31And heating element2The shape, dimensions, and number of are not limited to the following. Heating element2And movable parts31The optimal arrangement of the heating element2It is possible to effectively use the pressure during foaming due to the discharge pressure.
[0150]
  By applying energy such as heat to the ink, the ink undergoes a state change accompanied by an abrupt volume change (bubble generation).18In the prior art of the ink jet recording method in which ink is ejected from the ink and deposited on the recording medium to form an image, so-called bubble jet recording method, as shown in FIG. It can be seen that there is a non-foaming effective region S that is proportional but does not contribute to ink ejection. Also heating element2From the appearance of the above koge, this non-foaming effective area S is a heating element.2It can be seen that there is around. From these results, the heating element2It is said that the width of about 4 μm around is not involved in foaming.
[0151]
  Therefore, in order to effectively use the foaming pressure,2About 4 μm or more insideBubble foam region 11Directly above the movable member31The movable member is covered with the movable region of31It can be said that it is effective to arrange. In this embodiment, the effective foaming area is the heating element.2It is about 4 μm or more inside from the surroundings, but the heating element2However, it is not limited to this depending on the type and forming method.
[0152]
  FIG. 17 is a schematic view seen from above when the movable member 301 (FIG. (A)) and the movable member 302 (FIG. (B)) having different total areas of the movable region are arranged on the heating element 2 of 58 × 150 μm. Show.
[0153]
  Movable member31The size of the heating element 2 is 53 × 145 μm, which is smaller than the area of the heating element 2.Bubble foam region 11And the same size asBubble foam region 11It is arranged so as to cover. On the other hand, the dimension of the movable member 302 is 53 × 220 μm, which is larger than the area of the heating element 2 (when the width dimension is the same, the dimension between the fulcrum and the movable tip is longer than the length of the heating element). the same asBubble foam region 11It is arranged to cover. The durability and discharge efficiency of the two movable members 301 and 302 were measured. The measurement conditions are as follows.
[0154]
        Foaming solution: Ethanol 40% aqueous solution
        Discharge ink: Dye ink
        Voltage: 20.2V
        Frequency: 3kHz
  As a result of experiments under these measurement conditions, movable members301Regarding the durability of (a), the movable member 301 was damaged at the fulcrum portion of the movable member 301 when 1 × 10 7 pulses were applied. (B) The movable member 302 is 3 × 10⁸No damage was observed even when the pulse was applied. It was also confirmed that the kinetic energy obtained from the discharge amount and discharge speed relative to the input energy was improved by about 1.5 to 2.5 times.
[0155]
  From the above results, from the viewpoint of both durability and discharge efficiency,Bubble foam region 11A movable member is provided so as to cover directly above, and the area of the movable member is a heating element.2It can be seen that the area larger than the area is superior.
[0156]
  FIG.IsHeating element2Moving parts from the edge of31The distance to the fulcrum and the movable member31The relationship of the amount of displacement is shown.
[0157]
  FIG.IsThe cross-sectional block diagram which looked at the positional relationship of the heat generating body 2 and the movable member 31 from the side surface direction is shown.
[0158]
  A heating element 2 of 40 × 105 μm was used. It can be seen that the greater the distance l from the edge of the heating element 2 to the fulcrum 33 of the movable member 31, the greater the displacement. Therefore, the optimum displacement amount is determined according to the required ink discharge amount, the flow path structure of the discharge liquid, the heating element shape, etc., and the movable member31It is desirable to determine the position of the fulcrum.
[0159]
  Also movable member31When the fulcrum is located immediately above the effective foaming area of the heating element, the movable member is not subjected to the foaming pressure in addition to the stress caused by the displacement of the movable member.31Endurance will be reduced. According to the inventors' experiments,Bubble foam region 11In the case where a fulcrum is provided directly above, 1 × 10⁶Movable with pulseMember 31It has been found that damage has occurred and durability has been reduced. Therefore, the movable member31The fulcrum of the heating element2Effective foaming area11Even if it is a movable member having a shape or material whose durability is not so high by arranging it directly above and outside, it is highly practical. However, effective foaming area11Even if there is a fulcrum directly above, if the shape or material is selected, it can be used satisfactorily. In such a configuration, a liquid discharge head excellent in high discharge efficiency and durability can be obtained.
[0160]
  <Element substrate>
  The heating element to heat the liquid below2The structure of the element substrate provided with is described.
[0161]
  FIG. 20 is a longitudinal sectional view of a liquid discharge head according to the present invention. FIG. 20A shows a head having a protective film, which will be described later, and FIG. 20B shows a head without a protective film.
[0162]
  On the element substrate 1, the second liquid channel 16, the separation wall 30, the first liquid channel 14, and the first liquid channel14The grooved member 50 provided with the grooves constituting the is disposed.
[0163]
  On the element substrate 1, a silicon oxide film or silicon nitride film 106 is formed on a gas 107 such as silicon for insulation and heat storage, and a heating element is formed thereon.2An electric resistance layer 105 (0.01-0.2 μm thickness) such as hafnium boride (HfB 2), tantalum nitride (TaN), tantalum aluminum (TaAl) and the like and wiring electrodes (0.2- (1.0 μm thickness) is patterned as shown in FIG. A voltage is applied from the two wiring electrodes 104 to the resistance layer 105, and a current is passed through the resistance layer to generate heat. On the resistance layer between the wiring electrodes, a protective layer such as silicon oxide or silicon nitride is formed with a thickness of 0.1 to 2.0 μm, and a cavitation-resistant layer such as tantalum (with a thickness of 0.1 to 0.6 μm) is further formed thereon. ) To protect the resistance layer 105 from various liquids such as ink.
[0164]
  In particular, the pressure and shock wave generated when bubbles are generated and defoamed are extremely strong, and the durability of the hard and brittle oxide film is significantly reduced. Therefore, tantalum (Ta), a metal material, is used as the anti-cavitation layer. .
[0165]
  Moreover, the structure which does not require the above-mentioned protective layer by the combination of a liquid, a liquid flow path structure, and a resistance material may be sufficient, and the example is shown in FIG.20 (b). Examples of the material of the resistance layer that does not require such a protective layer include iridium-tantalum-aluminum alloy.
[0166]
  As described above, the configuration of the heating element in each of the above-described embodiments may be only the resistance layer (heating unit) between the electrodes described above, or may include a protective layer that protects the resistance layer.
[0167]
  In this embodiment, a heating element having a heat generating part composed of a resistance layer that generates heat in response to an electrical signal is used. However, the present invention is not limited to this, and sufficient bubbles to discharge the discharge liquid are used. Any material can be used as long as it is generated in the foaming liquid. For example, a light-to-heat conversion body that generates heat when receiving light from a laser or the like as a heat generating section, or a heating element that includes a heat generating section that generates heat by receiving high frequency may be used.
[0168]
  The element substrate 1 includes the electric heat converter in addition to the electrothermal transducer formed of the resistance layer 105 constituting the heat generating portion and the wiring electrode 104 for supplying an electric signal to the resistance layer. Functional elements such as transistors, diodes, latches, and shift registers for selectively driving the conversion elements may be integrally formed by a semiconductor manufacturing process.
[0169]
  Further, in order to drive the heat generating portion of the electrothermal transducer provided on the element substrate 1 as described above and to discharge the liquid, the resistance layer 105 is shown in FIG. Such a rectangular pulse is applied, and the resistance layer 105 between the wiring electrodes is rapidly heated. In the head of each of the above-described embodiments, the heating element is driven by applying a voltage of 24 V, a pulse width of 7 μsec, a current of 150 mA, and an electric signal at 6 kHz, and the ink as a liquid is discharged from the ejection port by the operation as described above. It was discharged. However, the condition of the drive signal is not limited to this, and any drive signal that can appropriately foam the foaming liquid may be used.
[0170]
  <Head structure with two flow paths>
  In the following, an example of the structure of a liquid discharge head will be described in which different liquids can be well separated and introduced into the first and second common liquid chambers, the number of parts can be reduced, and the cost can be reduced.
[0171]
  FIG. 22 is a schematic diagram showing the structure of such a liquid discharge head.EmbodimentThe same components are denoted by the same reference numerals, and detailed description thereof is omitted here.
[0172]
  This embodiment, The grooved member 50 communicates with the orifice plate 51 having the discharge port 18, the plurality of grooves constituting the plurality of first liquid passages 14, and the plurality of liquid passages 14 in common. 1 liquid flow path14And a concave portion constituting the first common liquid chamber 15 for supplying the liquid (discharge liquid).
[0173]
  A plurality of first liquid flow paths 14 can be formed by joining the separation wall 30 to the lower portion of the grooved member 50. Such a grooved member 50 has a first liquid supply path 20 that reaches the first common liquid chamber 15 from the upper part thereof. Further, the grooved member 50 has a second liquid supply path 21 that penetrates the separation wall 30 from the upper part and reaches the second common liquid chamber 17.
[0174]
  The first liquid (discharge liquid) is supplied to the first common liquid chamber 15 and then to the first liquid flow path 14 via the first liquid supply path 20, as indicated by an arrow C in FIG. The second liquid (foamed liquid) is supplied to the second common liquid chamber 17 and then the second liquid flow path 16 through the second liquid supply path 21 as indicated by an arrow D in FIG. Yes.
[0175]
  In the present embodiment, the second liquid supply path 21 is arranged in parallel with the first liquid supply path 20, but the present invention is not limited to this, and the separation wall arranged outside the first common liquid chamber 15. As long as it is formed so as to penetrate through 30 and communicate with the second common liquid chamber 17, it may be arranged in any way.
[0176]
  Further, the thickness (diameter) of the second liquid supply path 21 is determined in consideration of the supply amount of the second liquid. The shape of the second liquid supply path 21 does not have to be round, and may be rectangular.
[0177]
  The second common liquid chamber 17 can be formed by partitioning the grooved member 50 with the separation wall 30. As a forming method, as shown in an exploded perspective view of this embodiment shown in FIG. 23, a grooved member in which a common liquid chamber frame and a second liquid path wall are formed on a device substrate with a dry film and a separation wall is fixed. The second common liquid chamber 17 and the second liquid flow path 16 may be formed by bonding the combined body 50 and the separation wall 30 and the element substrate 1 together.
[0178]
  In the present embodiment, as described above, the electrothermal conversion element as a heating element that generates heat for generating bubbles due to film boiling of the foamed liquid on the support 70 formed of a metal such as aluminum. Is provided with a plurality of element substrates 1.
[0179]
  On the element substrate 1, a plurality of grooves constituting the liquid flow path 16 formed by the second liquid path wall and a plurality of foam liquid flow paths communicate with each other, and the foam liquid is supplied to the respective foam liquid paths. For this purpose, there are provided a recess that constitutes a second common liquid chamber (common foaming liquid chamber) 17 and a separation wall 30 provided with the movable wall 31 described above.
[0180]
  Reference numeral 50 denotes a grooved member. This grooved member is joined to the separation wall 30 to communicate with the grooves constituting the discharge liquid flow path (first liquid flow path) 14 and the discharge liquid flow path. A first common liquid chamber (common discharge liquid chamber) 15 for supplying the first common liquid chamber 15 and a first supply path (discharge liquid supply path) 20 for supplying the discharge liquid to the first common liquid chamber. And a second supply path (foaming liquid supply path) 21 for supplying the foaming liquid to the second common liquid chamber 17. The second supply path 21 passes through a separation wall 30 disposed outside the first common liquid chamber 15 and is connected to a communication path that communicates with the second common liquid chamber 17. The foaming liquid can be supplied to the second common liquid chamber 15 without mixing with the liquid.
[0181]
  The element substrate 1, the separation wall 30, and the grooved top plate 50 are arranged such that the movable member 31 is disposed corresponding to the heating element of the element substrate 1, and the discharge liquid flow is associated with the movable member 31. Road 14 is arranged. Moreover, although the example which has distribute | arranged the 2nd supply path to the member with a groove | channel was shown in the example of this embodiment, you may provide two or more according to supply amount. Furthermore, the cross-sectional area of the discharge liquid supply path 20 and the foaming liquid supply path 21 may be determined in proportion to the supply amount.
[0182]
  By optimizing the cross-sectional area of the flow path, it is possible to further reduce the size of the parts constituting the grooved member 50 and the like.
[0183]
  As described above, according to this embodiment, the second liquid channel16A second supply channel for supplying the second liquid to the first liquid channel, and a first liquid channel14Since the first supply path for supplying the first liquid is made of a grooved top plate as the same grooved member, the number of parts can be reduced, and the process can be shortened and the cost can be reduced.
[0184]
  Second liquid channel16The supply of the second liquid to the second common liquid chamber communicated with the separation wall separates the first liquid and the second liquid.30Since the structure is performed by the second liquid flow path in a direction that penetrates the separation wall, the separation wall30In addition, the bonding process between the grooved member and the heating element forming substrate can be performed only once, which improves the ease of manufacturing and improves the bonding accuracy and enables good discharge.
[0185]
  In addition, the second liquid is a separation wall30And the second liquid flow path is supplied to the second liquid common liquid chamber.16In addition, since the supply of the second liquid is ensured and a sufficient supply amount can be secured, stable discharge is possible.
[0186]
  <Discharged liquid, foamed liquid>
  PreviousIn the embodimentAs described above, in the present invention, the movable member as described above is used.31With this configuration, it is possible to eject liquid at a high speed with higher ejection force and ejection efficiency than the conventional liquid ejection head. RealForm of applicationIf the same liquid is used for the foaming liquid and the discharge liquid,2It is possible to perform reversible state change of vaporization and condensation by heat without being deteriorated by heat applied from the heat source, or by heating to hardly cause deposits on the heating element.31Or separation wall30Various liquids can be used as long as the liquid does not deteriorate the above.
[0187]
  Among such liquids, as a liquid (recording liquid) used for recording, ink having a composition used in a conventional bubble jet apparatus can be used.
[0188]
  On the other hand, in the case of using the two-flow path head of the present invention and the discharge liquid and the foaming liquid are separate liquids, the liquid having the above-described properties may be used as the foaming liquid. Ethanol, n-propanol, isopropanol, n-hexane, n-heptane, n-octane, toluene, xylene, methylene dichloride, trichrene, freon TF, freon BF, ethyl ether, dioxane, cyclohexane, methyl acetate, ethyl acetate, acetone , Methyl ethyl ketone, water and the like and mixtures thereof.
[0189]
  As the discharge liquid, various liquids can be used regardless of the presence or absence of foamability and thermal properties. Further, it can be used even for liquids that have been difficult to discharge, such as liquids with low foamability, liquids that are easily altered or deteriorated by heat, and high-viscosity liquids.
[0190]
  However, it is desirable that the liquid is not a liquid that obstructs discharge, foaming, operation of the movable member, or the like due to a reaction with the discharge liquid itself or the foam liquid as a property of the discharge liquid.
[0191]
  High viscosity ink or the like can also be used as the recording discharge liquid. As other discharge liquids, liquids such as medicines and perfumes that are weak against heat can be used.
[0192]
  In the present invention, recording was performed using an ink having the following composition as a recording liquid that can be used for both the ejection liquid and the foaming liquid, but because the ejection speed of the ink increased due to the improvement in ejection force, The droplet landing accuracy was improved and a very good recorded image could be obtained.
[0193]
  Composition of dye ink (viscosity 2cps)
    (CI Food Black 2) Dye 3% by weight
    Diethylene glycol 10% by weight
    Thiodiglycol 5% by weight
    Ethanol 5% by weight
    77% by weight of water
  In addition, recording was performed by discharging a foamed liquid and a discharge liquid in combination with a liquid having the following composition. As a result, not only a liquid with a viscosity of over a dozen cps, which was difficult to be discharged with a conventional head, but also a liquid with a very high viscosity of 150 cP could be discharged well, and a high-quality recorded matter could be obtained.
[0194]
  Composition of foaming liquid 1
    Ethanol 40% by weight
    60% by weight of water
  Composition of foaming liquid 2
    100% water
  Composition of foaming liquid 3
    Isopropyl alcohol 10% by weight
    90% by weight of water
  Composition of discharge liquid 1 pigment ink (viscosity about 15 cps)
    5% carbon black
    1% by weight of styrene-acrylic acid-ethyl acrylate copolymer
      (Acid value 140, weight average molecular weight 8000)
    Monoethanolamine 0.25% by weight
    Glycerin 69% by weight
    Thiodiglycol 5% by weight
    Ethanol 3% by weight
    16.75% by weight of water
  Composition of discharge liquid 2 (viscosity 55 cps)
    Polyethylene glycol 200 100% by weight
  Composition of discharge liquid 3 (viscosity 150 cps)
    Polyethylene glycol 600 100% by weight
  By the way, in the case of a liquid that has been conventionally difficult to be ejected as described above, since the ejection speed is low, the variation in ejection directionality is promoted, the dot landing accuracy on the recording paper is poor, and the ejection is unstable. Variations in the discharge amount occurred, and it was difficult to obtain a high-quality image. However, in the configuration of the above-described embodiment, bubbles can be generated sufficiently and stably by using the foaming liquid. As a result, the droplet landing accuracy can be improved and the ink discharge amount can be stabilized, and the quality of the recorded image can be remarkably improved.
[0195]
  <Manufacture of liquid discharge head>
  Next, the manufacturing process of the liquid discharge head of the present invention will be described.
[0196]
  In the case of the liquid discharge head as shown in FIG. 2, a base 34 for providing the movable member 31 on the element substrate 1 is formed by patterning a dry film or the like, and the movable member 31 is bonded to the base 34. Or it was fixed by welding. Thereafter, a grooved member having a plurality of grooves constituting each liquid flow path 10, a discharge port 18, and a concave part constituting a common liquid chamber 13 is joined to the element substrate 1 in a state where the grooves correspond to the movable members. That was formed.
[0197]
  Next, a manufacturing process of a liquid discharge head having a two-channel structure as shown in FIGS. 10 and 23 will be described.
[0198]
  Roughly, the wall of the second liquid flow path 16 is formed on the element substrate 1, the separation wall 30 is attached on the wall, and the groove for forming the first liquid flow path 14 is provided thereon. The attached member 50 is attached. Or after forming the wall of the 2nd liquid flow path 16, the head was manufactured by joining the grooved member 50 which attached the separation wall 30 on this wall.
[0199]
  Further, a method for producing the second liquid channel will be described in detail.
[0200]
  24A to 24E are schematic cross-sectional views for explaining a first embodiment of the method for manufacturing a liquid discharge head according to the present invention.
[0201]
  In this embodiment, as shown in (a), a heating element made of hafnium boride, tantalum nitride, or the like using the same manufacturing apparatus as used in the semiconductor manufacturing process on the element substrate (silicon wafer) 1. After the electrothermal conversion element having 2 was formed, the surface of the element substrate 1 was washed for the purpose of improving the adhesion with the photosensitive resin in the next step. Further, in order to improve the adhesion, the surface of the element substrate is subjected to surface modification by ultraviolet-ozone or the like, and then, for example, a solution obtained by diluting a silane coupling agent (manufactured by Nippon Unica: A189) to 1% by weight with ethyl alcohol. Is achieved by spin coating on the modified surface.
[0202]
  Next, surface cleaning was performed, and an ultraviolet photosensitive resin film (manufactured by Tokyo Ohka: dry film ODyl SY-318) DF was laminated on the substrate 1 with improved adhesion as shown in FIG.
[0203]
  Next, as shown in (c), a photomask PM is arranged on the dry film DF, and ultraviolet light is irradiated to a portion of the dry film DF left as the second flow path wall through the photomask PM. . This exposure process was performed using Canon Inc .: MPA-600, and was performed at an exposure amount of about 600 mJ / cm 2.
[0204]
  Next, as shown in (d), the dry film DF is developed with a developer (Tokyo Ohka: BMRC-3) made of a mixed solution of xylene and butyl cellosolve acetate, and the unexposed part is dissolved. The exposed and cured part was formed as a wall part of the second liquid channel 16. Further, the residue remaining on the surface of the element substrate 1 is removed by processing for about 90 seconds with an oxygen plasma ashing apparatus (manufactured by Alcantech Co., Ltd .: MAS-800).²To completely cure the exposed portion.
[0205]
  By the above method, the second liquid flow path can be formed uniformly and accurately with respect to a plurality of heater boards (element substrates) divided and manufactured from the silicon substrate. The silicon substrate was cut and separated into each heater board 1 with a dicing machine (Tokyo Seimitsu: AWD-4000) equipped with a diamond blade having a thickness of 0.05 mm. The separated heater board 1 was fixed on the aluminum base plate 70 with an adhesive (Toray: SE4400) (FIG. 27). Next, the printed wiring board 71 previously bonded onto the aluminum base plate 70 and the heater board 1 were connected by an aluminum wire (not shown) having a diameter of 0.05 mm.
[0206]
  Next, as shown in FIG. 24 (e), the joined body of the grooved member 50 and the separation wall 30 was positioned and joined to the heater board 1 obtained in this way, as shown in FIG. That is, the grooved member having the separation wall 30 and the heater board 1 are positioned and engaged and fixed by the holding spring 78, and then the ink / foaming liquid supply member 80 is joined and fixed on the aluminum base plate 70, and the aluminum wire In the meantime, the gap between the grooved member 50, the heater board 1, and the ink / foaming liquid supply member 80 was sealed with a silicone sealant (Toshiba Silicone: TSE399) to complete.
[0207]
  By forming the second liquid flow path by the above manufacturing method, it is possible to obtain an accurate flow path that is not misaligned with respect to the heater of each heater board. In particular, the positional accuracy of the first liquid flow path 14 and the movable member 31 can be increased by previously joining the grooved member 50 and the separation wall 30 in the previous step.
[0208]
  By using the liquid discharge head manufactured in this way, the aging process shown in the first to third examples as described above is performed to remove burrs generated during the manufacturing process and to displace the movable member. This makes it possible to perform stable discharge.
[0209]
  These high-precision manufacturing techniques stabilize the discharge and improve the print quality. Further, since it can be formed on the wafer in a lump, it can be manufactured in large quantities at a low cost.
[0210]
  In this example, an ultraviolet curable dry film was used to form the second liquid flow path, but a resin having an absorption band in the ultraviolet region, particularly around 248 nm, was laminated and cured, It can also be obtained by directly removing the resin of the portion that becomes the second liquid flow path with an excimer laser.
[0211]
  Next, FIGS. 25A to 25D are schematic cross-sectional views for explaining a second embodiment of the manufacturing method of the liquid discharge head of the present invention.
[0212]
  In this example, as shown in FIG. 4A, a resist 101 having a thickness of 15 μm was patterned on the SUS substrate 100 in the shape of the second liquid channel.
[0213]
  Next, as shown in (b), electroplating was performed on the SUS substrate 100 to grow a nickel layer 102 on the SUS substrate 100 by 15 μm. As a plating solution, a stress reducer (manufactured by World Metal: Zerool), boric acid, a pit inhibitor (manufactured by World Metal: NP-APS), and nickel chloride were used as nickel sulfamate. The method of applying an electric field during electrodeposition is to attach an electrode on the anode side, attach an already patterned SUS substrate 100 to the cathode side, set the temperature of the plating solution to 50 ° C., and a current density of 5 A / cm.²It was.
[0214]
  Next, as shown in (c), ultrasonic vibration is applied to the SUS substrate 100 that has been plated as described above, and the nickel layer 102 is peeled off from the SUS substrate 100 to obtain a desired second liquid flow path. Got.
[0215]
  On the other hand, a heater board provided with an electrothermal conversion element was formed on a silicon wafer using a manufacturing apparatus similar to a semiconductor. This wafer was separated into each heater board by a dicing machine as in the previous example. The heater board 1 was bonded to an aluminum base plate 70 to which a printed board 104 was previously bonded, and an electric wiring was formed by connecting the printed board 71 and an aluminum wire (not shown). On the heater board 1 in such a state, as shown in FIG. 25D, the second liquid flow path obtained in the previous step was positioned and fixed. At the time of this fixing, the top plate with the separation wall fixed and engaged with the holding spring in the subsequent process, as in the first embodiment, are fixed to such an extent that positional displacement does not occur when the top plate is joined. It is enough.
[0216]
  In this example, an ultraviolet curable adhesive (Grace Japan: Amicon UV-300) was applied to the positioning and fixing, and the fixing was completed in about 3 seconds using an ultraviolet irradiation device with an exposure amount of 100 mJ / cm 2.
[0217]
  According to the manufacturing method of the present embodiment, in addition to being able to obtain a highly accurate second liquid flow path without positional deviation with respect to the heating element, since the flow path wall is formed of nickel, an alkaline liquid It is possible to provide a head that is strong and reliable. In this manufacturing method, the same aging process as in the above-described example is performed.
[0218]
  Next, FIGS. 26A to 26D are schematic cross-sectional views for explaining a third embodiment of the manufacturing method of the liquid discharge head of the present invention.
[0219]
  In this embodiment, as shown in FIG. 5A, a resist 31 is applied to both surfaces of a 15 μm thick SUS substrate 100 having alignment holes or marks 100a. Here, PMERP-AR900 made by Tokyo Ohka was used as the resist.
[0220]
  Thereafter, as shown in (b), exposure is performed using an exposure apparatus (manufactured by Canon Inc .: MPA-600) in accordance with the alignment hole 100a of the element substrate 100 to form a second liquid channel. The resist 103 in the portion to be removed was removed. Exposure is 800mJ / cm²The exposure amount was.
[0221]
  Next, as shown in (c), the SUS substrate 100 on which the resists 103 on both sides are patterned is immersed in an etching solution (an aqueous solution of ferric chloride or cupric chloride) to be exposed from the resist 103. After etching the part, the resist was peeled off.
[0222]
  Next, as shown in (d), as in the embodiment of the previous manufacturing method, the etched SUS substrate 100 is positioned and fixed on the heater board 1, and the liquid discharge having the second liquid flow path 4 is performed. I assembled the head.
[0223]
  According to the manufacturing method of the present embodiment, in addition to being able to obtain a highly accurate second liquid flow path 4 that is not misaligned with respect to the heater, the flow path is formed of SUS. A liquid ejection head that is strong and highly reliable can be provided. In this manufacturing method, the same aging process as in the above-described example is performed.
[0224]
  As described above, according to the manufacturing method of the present embodiment, the wall of the second liquid channel is arranged in advance in the shape of the element substrate, so that the electrothermal transducer and the second liquid channel are highly accurate. Positioning becomes possible. Further, since the second liquid flow path can be formed simultaneously for a large number of element substrates on the substrate before cutting and separation, a large amount and a low-cost liquid discharge head can be provided.
[0225]
  Further, in the liquid discharge head obtained by carrying out the liquid discharge head manufacturing method of the manufacturing method of the present embodiment, the heating element and the second liquid flow path are positioned with high accuracy, so that the electrothermal conversion The foaming pressure due to the heat generated by the body can be efficiently received, and the discharge efficiency is excellent.
[0226]
  By performing the aging process of the movable member 31 in the manufacturing method as described above, burrs generated in the movable member 31 can be effectively removed, and thereby the movable member 31 can be easily displaced. Stable ejection can be performed.
[0227]
  <Liquid discharge head cartridge>
  Next, a liquid discharge head cartridge equipped with the liquid discharge head according to the above embodiment will be schematically described.
[0228]
  FIG. 27 is a schematic exploded perspective view of a liquid discharge head cartridge including the liquid discharge head described above, and the liquid discharge head cartridge is mainly composed of a liquid discharge head portion 200 and a liquid container 90.
[0229]
  The liquid discharge head unit 200 includes the element substrate 1, the separation wall 30, the grooved member 50, the holding spring 78, the liquid supply member 80, the support body 70, and the like. The element substrate 1 is provided with a plurality of heating resistors for applying heat to the foaming liquid as described above, and a functional element for selectively driving the heating resistors. Are provided. A foaming liquid path is formed between the element substrate 1 and the aforementioned separation wall 30 having the movable wall, and the foaming liquid flows. A discharge flow path (not shown) through which discharged discharge liquid flows is formed by joining the separation wall 30 and the grooved top plate 50.
[0230]
  The holding spring 78 is a member that applies a biasing force in the direction of the element substrate 1 to the grooved member 50, and the element substrate 1, the separation wall 30, the grooved member 50, and a support body 70 to be described later by this biasing force. It is well integrated.
[0231]
  The support 70 is for supporting the element substrate 1 and the like, and is connected to the circuit board 71 for connecting to the element substrate 1 and supplying an electric signal to the support substrate 70 and the apparatus side. The contact pads 72 for exchanging electrical signals with the apparatus side are arranged.
[0232]
  The liquid container 90 separately stores therein a discharge liquid such as ink and a foaming liquid for generating bubbles, which are supplied to the liquid discharge head. Outside the liquid container 90, a positioning portion 94 for arranging a connection member for connecting the liquid discharge head and the liquid container and a fixed shaft 95 for fixing the connection portion are provided. The supply of the discharge liquid is supplied from the discharge liquid supply path 92 of the liquid container to the discharge liquid supply path 81 of the liquid supply member 80 via the supply path 84 of the connecting member, and the discharge liquid supply paths 83, 71, and 21 of each member. To be supplied to the first common liquid chamber. Similarly, the foaming liquid is supplied from the supply path 93 of the liquid container via the supply path of the connecting member to the foaming liquid supply path 82 of the liquid supply member 80, and via the foaming liquid supply paths 84, 71, and 22 of each member. It is supplied to the second liquid chamber.
[0233]
  In the above liquid discharge head cartridge, even when the foaming liquid and the discharge liquid are different liquids, the supply form and the liquid container that can be supplied have been described, but when the discharge liquid and the foaming liquid are the same, It is not necessary to separate the supply path and the container for the foaming liquid and the discharge liquid.
[0234]
  In addition, you may use this liquid container by refilling a liquid after consumption of each liquid. For this purpose, it is desirable to provide a liquid inlet in the liquid container. Further, the liquid discharge head and the liquid container may be integrated or separable.
[0235]
  <Liquid ejection device>
  FIG. 28 shows a schematic configuration of a liquid discharge apparatus equipped with the above-described liquid jet head. In this embodiment, the carriage HC of the liquid ejection apparatus, which will be described using an ink ejection recording apparatus using ink as the ejection liquid, is a head cartridge in which a liquid tank section 90 for storing ink and a liquid ejection head section 200 are detachable. Is reciprocated in the width direction of the recording medium 150 such as recording paper conveyed by the recording medium conveying means.
[0236]
  When a drive signal is supplied from a drive signal supply means (not shown) to the liquid discharge means on the carriage, the recording liquid is discharged from the liquid discharge head to the recording medium in response to this signal.
[0237]
  In the liquid ejection apparatus of the present embodiment, the motor 111 as a drive source for driving the recording medium conveying means and the carriage, the gear 112 for transmitting the power from the drive source to the carriage, 113, the carriage shaft 115, etc. have. With this recording apparatus and the liquid ejection method performed by this recording apparatus, it was possible to obtain recorded images with good images by ejecting liquid onto various recording media.
[0238]
  Next, FIG. 29 is a block diagram of the entire recording apparatus for operating ink discharge recording to which the liquid discharge method and the liquid discharge head of the present invention are applied.
[0239]
  The recording apparatus receives print information from the host computer 300 as a control signal. The print information is temporarily stored in the input interface 301 inside the printing apparatus, and at the same time, converted into data that can be processed in the recording apparatus and input to the CPU 302 that also serves as a head drive signal supply unit. Based on a control program stored in the ROM 303, the CPU 302 processes the data input to the CPU 302 using a peripheral unit such as the RAM 304 and converts it into data (image data) to be printed.
[0240]
  The CPU 302 generates drive data for driving a drive motor that moves the recording paper and the recording head in synchronization with the image data in order to record the image data at an appropriate position on the recording paper. The image data and the motor drive data are transmitted to the head 200 and the drive motor 306 via the head driver 307 and the motor driver 305, respectively, and are driven at controlled timings to form an image.
[0241]
  In addition, the recording apparatus can include a storage unit including a control program including a driving condition for performing an aging process and a control program for controlling the number of times of foaming driving of the heating element 2. As this storage means, for example, the ROM 303 or the like can be used. It is also possible to control the number of times of foam driving by providing a counter or the like.
[0242]
  The recording medium that can be applied to the recording apparatus as described above and to which liquid such as ink is applied includes various papers, OHP sheets, plastic materials used for compact discs, decorative plates, etc., fabrics, aluminum, copper, etc. Metal materials, leather materials such as cowhide, pig skin, and artificial leather, wood such as wood and plywood, ceramic materials such as bamboo and tiles, and three-dimensional structures such as sponges can be targeted.
[0243]
  Further, as the above-mentioned recording apparatus, a printer apparatus that records on various papers and OHP sheets, a recording apparatus for plastic that records on a plastic material such as a compact disk, a recording apparatus for metal that records on a metal plate, leather For recording apparatus for leather, recording apparatus for wood for recording on wood, recording apparatus for ceramics for recording on ceramic material, recording apparatus for recording on three-dimensional network structure such as sponge, and fabric It also includes a textile printing apparatus that performs recording.
[0244]
  In addition, as a discharge liquid used in these liquid discharge apparatuses, a liquid suitable for each recording medium and recording conditions may be used.
[0245]
  <Recording system>
  Next, an example of an ink jet recording system that performs recording on a recording medium using the liquid discharge head of the present invention as a recording head will be described.
[0246]
  FIG. 30 is a schematic diagram for explaining the configuration of an ink jet recording system using the above-described liquid discharge head 201 of the present invention. The liquid discharge head in this embodiment is a full-line type head in which a plurality of discharge ports are arranged at a distance corresponding to 360 dpi in a length corresponding to the recordable width of the recording medium 150, and is yellow (Y), magenta (M). , Cyan (C), and black (Bk), four heads corresponding to four colors are fixed and supported in parallel with each other at a predetermined interval in the X direction by a holder 202.
[0247]
  A signal is supplied to each of these heads from a head driver 307 constituting drive signal supply means, and each head is driven based on this signal.
[0248]
  Each head is supplied with ink of four colors Y, M, C, and Bk from the ink containers 204a to 204d as ejection liquids. Reference numeral 204e denotes a foaming liquid container in which the foaming liquid is stored, and the foaming liquid is supplied from the container to each head.
[0249]
  In addition, head caps 203a to 203d each having an ink absorbing member such as a sponge disposed therein are provided below each head, and the heads are maintained by covering the ejection openings of each head during non-recording. Can do.
[0250]
  Reference numeral 206 denotes a conveying belt that constitutes conveying means for conveying various non-recording media as described in the previous embodiments. The conveyor belt 206 is drawn around a predetermined path by various rollers, and is driven by a driving roller connected to a motor driver 305.
[0251]
  In the ink jet recording system of this embodiment, a pre-processing device 251 and a post-processing device 252 that perform various processes on the recording medium before and after recording are provided upstream and downstream of the recording medium conveyance path, respectively. .
[0252]
  The pre-processing and post-processing differ depending on the type of recording medium to be recorded and the type of ink. For example, for recording media such as metal, plastic, ceramics, etc. Ink adhesion can be improved by irradiating ultraviolet rays and ozone and activating the surface. Further, in a recording medium such as plastic that easily generates static electricity, dust is likely to adhere to the surface due to static electricity, and good recording may be hindered by the dust. For this reason, it is preferable to remove dust from the recording medium by removing static electricity from the recording medium using an ionizer device as pretreatment. When a fabric is used as the recording medium, the fabric is selected from alkaline materials, water-soluble materials, synthetic polymers, water-soluble metal salts, urea, and thiourea from the viewpoint of preventing bleeding and improving the first arrival rate. What is necessary is just to perform the process which provides a substance as pre-processing. The preprocessing is not limited to these, and may be a process for setting the temperature of the recording medium to an appropriate temperature for recording.
[0253]
  On the other hand, post-processing includes a fixing process that promotes fixing of the ink by heat treatment, ultraviolet irradiation, etc., on the recording medium to which the ink has been applied, a process of washing the unreacted processing agent that has been applied in the pre-process, etc. Is to do.
[0254]
  In this embodiment, the full line head is used as the head. However, the present invention is not limited to this, and the recording is performed by conveying the small head as described above in the width direction of the recording medium. May be.
[0255]
  <Head kit>
  Below, the head kit which has the liquid discharge head of this invention is demonstrated. FIG. 31 is a schematic diagram showing such a head kit. This head kit includes a head 510 of the present invention having an ink discharge portion 511 for discharging ink, and a liquid container that is inseparable from or separable from the head. An ink container 520 and an ink filling means for holding ink for filling the ink container are accommodated in a kit container 501.
[0256]
  When the ink has been consumed, the insertion portion (injection needle or the like) 531 of the ink filling means is inserted into the atmosphere communication port 521 of the ink container, the connection with the head, or the hole formed in the wall of the ink container. A part of the ink may be inserted, and the ink in the ink filling means may be filled into the ink container through the insertion portion.
[0257]
  In this way, by placing the liquid ejection head of the present invention, the ink container, the ink filling means, etc. in one kit container to make a kit, even if the ink is consumed, as described above, Ink can be easily filled in the ink container, and recording can be started quickly.
[0258]
  The head kit of the present embodiment has been described as including an ink filling means, but the head kit does not have an ink filling means, and is a separable type ink container filled with ink and a head. May be accommodated in the kit container 510.
[0259]
  Further, FIG. 31 shows only the ink filling means for filling the ink container with ink, but in addition to the ink container, the foaming liquid filling means for filling the foaming liquid container with the foaming liquid container is provided in the kit container. It may be in the form stored in
【The invention's effect】
[0260]
  As described above, according to the present invention, in the liquid discharge head having the one-channel structure or the two-channel structure, the heat generating member is driven under the predetermined driving condition at the stage before the head is shipped. Since the movable member provided in the aging process is performed by changing the movable member, the movable member in the liquid flow path can be easily displaced. Discharging can be performed. Further, since the heating member can be stabilized and driven and controlled, the foaming stability can be improved, and the responsiveness of the movable member to the driving of the heating member can be improved.
[0261]
  Hereinafter, effects associated with the present invention will be listed.
[0262]
  According to the liquid ejection method and the head of the present invention based on the novel ejection principle using the movable member subjected to the aging process as described above, a synergistic effect between the generated bubbles and the movable member displaced thereby can be obtained. In addition, since the liquid in the vicinity of the discharge port can be discharged efficiently, the discharge efficiency can be improved as compared with a conventional bubble jet type discharge method, a head, or the like.
[0263]
  In addition, according to the present invention, it is possible to prevent non-ejection even when left for a long time at low temperature and low humidity, and even if non-ejection occurs, a recovery process such as preliminary ejection or suction recovery is performed slightly. There is also an advantage that it can be immediately restored to a normal state by itself. Accordingly, the recovery time can be shortened, the liquid loss due to the recovery can be reduced, and the running cost can be greatly reduced.
[0264]
  In addition, according to the configuration of the present invention with improved refill characteristics, responsiveness during continuous ejection, stable growth of bubbles, and stabilization of droplets are achieved, enabling high-speed recording by high-speed liquid ejection and high-quality recording. We were able to.
[0265]
  In addition, by using a liquid that easily foams or a liquid that does not easily generate deposits (burning, etc.) on the heating element as a foaming liquid in a head having a two-channel configuration, the degree of freedom in selecting a discharge liquid increases. Liquids that were difficult to be ejected by conventional bubble jet ejection methods, such as highly viscous liquids that are less prone to foaming and liquids that easily generate a volume on the heating element, could be ejected satisfactorily. Furthermore, liquids that are vulnerable to heat could be discharged without adversely affecting the liquids.
[0266]
  Further, according to the manufacturing method including the aging process of the liquid discharge head according to the present invention, the liquid discharge head as described above can be manufactured with high accuracy, and the number of parts can be reduced, and it can be manufactured inexpensively and easily.
[0267]
  Further, by using the liquid discharge head subjected to the aging process of the present invention as a liquid discharge recording head for recording, it was possible to achieve recording with higher image quality.
[0268]
  In addition, it is possible to provide a liquid discharge apparatus, a recording system, and the like that further improve the liquid discharge efficiency using the liquid discharge head subjected to the aging process of the present invention.
[0269]
  Further, by using a head cartridge or a head kit having the liquid discharge head subjected to the aging process of the present invention, it is possible to easily use and reuse the head.
[Brief description of the drawings]
[0270]
FIG. 1 of the present inventionFirst implementationIt is a schematic cross section which shows an example of the liquid discharge head in the form.
FIG. 2 is a partially broken perspective view of a liquid discharge head according to the present invention.
FIG. 3 is a schematic diagram showing pressure propagation from bubbles in a conventional head.
FIG. 4 is a schematic diagram showing pressure propagation from bubbles in the head of the present invention.
FIG. 5 is a schematic view for explaining the flow of the liquid of the present invention.
FIG. 6 of the present inventionSecond implementationFIG. 6 is a partially broken perspective view of a liquid discharge head in the embodiment.
FIG. 7 is a partially broken perspective view of a liquid discharge head according to another embodiment of the present invention.
FIG. 8 is a cross-sectional view of a liquid discharge head according to another embodiment of the present invention.
FIG. 9 is a liquid discharge head according to another embodiment of the present invention.(1 channel structure)FIG.
FIG. 10 is a liquid discharge head according to another embodiment of the present invention.(2-channel structure)FIG.
FIG. 11Of FIG.FIG. 4 is a partially broken perspective view of a liquid discharge head.
FIG. 12 is a diagram for explaining the operation of the movable member.
FIG. 13 is a view for explaining the structure of a movable member and a first liquid channel.
FIG. 14 is a diagram for explaining the structure of a movable member and a liquid channel.
FIG. 15 is a diagram for explaining another shape of the movable member.
FIG. 16 is a diagram illustrating a relationship between a heating element area and an ink discharge amount.
FIG. 17 is a diagram showing an arrangement relationship between a movable member and a heating element.
FIG. 18 is a diagram showing the relationship between the distance between the edge of the heating element and the fulcrum and the amount of displacement of the movable member.
FIG. 19 is a diagram for explaining an arrangement relationship between a heating element and a movable member.
FIG. 20 is a longitudinal sectional view of a liquid discharge head according to the present invention.
FIG. 21 is a schematic diagram showing the shape of a drive pulse.
FIG. 22 is a cross-sectional view for explaining a supply path of the liquid ejection head of the present invention.
FIG. 23 is an exploded perspective view of the head of the present invention.
FIG. 24 is a manufacturing method of the liquid discharge head of the present invention.First Example ofIt is process drawing for demonstrating.
FIG. 25 is a manufacturing method of a liquid discharge head according to the present invention;Second embodiment ofIt is process drawing for demonstrating.
FIG. 26 shows a method for manufacturing a liquid discharge head according to the present invention.Third embodiment ofIt is process drawing for demonstrating.
FIG. 27 is an exploded perspective view of the liquid discharge head cartridge.
FIG. 28 is a schematic configuration diagram of a liquid ejection apparatus.
FIG. 29 is a device block diagram.
FIG. 30 is a diagram illustrating a liquid discharge recording system.
FIG. 31 is a schematic diagram of a head kit.
FIG. 32 is a perspective view showing a shape in which burrs are generated at the peripheral edge of a conventional movable member.
FIG. 33 is a perspective view showing a shape when a burr is generated in the peripheral edge portion of a conventional movable member.
[Explanation of symbols]
[0271]
  1 Element substrate
  2 Heating element
  3 Area center
  10 Liquid flow path
  11 Bubble generation area
  12 Supply path
  13 Common liquid chamber
  14 First liquid flow path
  15 First common liquid chamber
  16 Second liquid flow path
  17 Second common liquid chamber
  18 Discharge port
  19 Stenosis
  20 First supply path
  21 Second supply path
  22 First liquid channel wall
  23 Second liquid flow path wall
  24 Convex
  30 separation wall
  31 Movable member
  32 Free end
  33 fulcrum
  34 Support members
  35 slits
  36 Front wall of bubble generation area
  37 Side wall of bubble generation area
  40 bubbles
  45 droplets
  50 Grooved member
  51 Orifice plate
  70 Support
  78 Spring
  80 Supply members

Claims (5)

A first liquid flow path communicating with the discharge port and communicating with the liquid chamber ;
A second liquid flow path provided below the first liquid flow path and communicating with the liquid chamber ;
A separation wall provided between the first liquid flow path and the second liquid flow path and having a movable member formed as a free end whose downstream side is freely displaceable by providing a slit ;
A heat generating member disposed on a bottom surface of the second liquid channel facing the movable member;
In a method of manufacturing a liquid discharge head comprising
A filling step of filling the liquid in the first liquid flow path and the second liquid flow path;
When the heat generating member is not driven, the free end of the movable member is not displaced and remains in the initial position in the same plane as the separation wall, and the heat generating member is driven under a predetermined driving condition. An aging process for displacing a free end of the movable member from the initial position to a position in the first liquid flow path when bubbles are generated . A first liquid flow path communicating with the discharge port and communicating with the liquid chamber ;
A second liquid flow path provided below the first liquid flow path and communicating with the liquid chamber ;
A separation wall provided between the first liquid flow path and the second liquid flow path and having a movable member formed as a free end whose downstream side is freely displaceable by providing a slit ;
A heat generating member disposed on a bottom surface of the second liquid channel facing the movable member;
In a method of manufacturing a liquid discharge head comprising
A filling step of filling the first liquid flow path with a discharge liquid and filling the second liquid flow path with a foaming liquid;
When the heat generating member is not driven, the free end of the movable member is not displaced and remains in the initial position in the same plane as the separation wall, and the heat generating member is driven under a predetermined driving condition. When bubbles are generated in the foaming liquid, the discharge liquid is discharged from the first liquid flow path by displacing the free end of the movable member from the initial position to a position in the first liquid flow path. A method of manufacturing a liquid discharge head, comprising: an aging step of discharging and detecting a discharge pattern . A flow path region that communicates directly with the discharge port and is closed on the opposite side facing the discharge port, and a bubble generation region that is provided corresponding to the flow channel region and communicates with the upstream liquid chamber. A liquid flow path;
A movable member that is disposed in a plane partitioning between the flow path region and the bubble generation region, and that is formed as a free end whose downstream side is freely displaceable by providing a slit ;
A heat generating member disposed on a bottom surface of the liquid flow path facing the movable member;
In a method of manufacturing a liquid discharge head comprising
A filling step of filling the liquid flow path with a liquid;
When the heat generating member is not driven, the free end of the movable member is not displaced and is kept at the initial position in the plane separating the flow path region and the bubble generating region, and the heat generating member is An aging step for displacing the free end of the movable member from the initial position to the upper position on the flow path region side when bubbles are generated by driving under predetermined driving conditions. Manufacturing method of the discharge head. The method of manufacturing a liquid discharge head according to claim 1, further comprising a common liquid chamber that is in common communication with the first liquid flow path and the second liquid flow path separated by the separation wall. .   3. The liquid discharge head according to claim 1, further comprising a liquid chamber separately connected to the first liquid channel and the second liquid channel separated by the separation wall. Production method.

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