JP3469999B2 - Adsorber manufacturing method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a suction plate which constitutes a suction surface of a vacuum suction device,
In particular, it is suitable for holding objects to be adsorbed such as semiconductor wafers and glass substrates having different sizes.

[0002]

2. Description of the Related Art Conventionally, in a manufacturing process of a semiconductor or a liquid crystal substrate, a vacuum suction device has been used to fix or convey a semiconductor wafer, a glass substrate for liquid crystal or the like which is an object to be attracted.

For example, as shown in FIGS. 9 (a) and 9 (b) showing the structure of a vacuum suction device 81 called a multi type, a first partition member 87 is provided around a disk-shaped suction member 83 in the center. And a second annular suction member 84, and a suction plate 8 made of a plate-like body around which a second partition member 88 is provided and a third annular suction member 85.
2 and a holding base 91 having a concave portion 95 surrounding the suction plate 82, and the suction plate 82 has suction members 83, 8
There was one in which 4, 85 were made of porous ceramics, partition members 87, 88 were made of dense ceramics, and they were joined by glass 89.

Further, on the bottom surface of the concave portion 95 of the holding base 91, annular grooves 92, 93, 94 are provided at positions corresponding to the respective suction members 83, 84, 85 of the suction plate 82, and these grooves 92, 93 are provided. , 94 to the intake holes 102, 103, 1
By vacuum suction via a vacuum pump (not shown) via 04, an object to be sucked (not shown) mounted on the suction surface 86 is sucked and held.

The suction plate 82 is provided with the suction members 83, 8
Since the members 4 and 85 are separated by the partition members 37 and 38 and are independent of each other, by controlling the opening and closing of the intake holes 102, 103 and 104, the objects to be attracted having different sizes can be handled by the single vacuum adsorption device 81. It can be held.

A suction plate 82 constituting such a vacuum suction device 81 has a disk body made of a porous ceramic which constitutes a suction member 83, a ring body made of a porous ceramic which constitutes the suction members 84 and 85, and a partition member. In some cases, the ring bodies 37 and 38 made of dense ceramics were separately formed and fired, and then the pieces were fitted into each other, and the joint portions were fused and integrated with glass 89.

[0007]

However, the suction plate 82
When manufacturing the above, it is necessary to fit the disk body forming the suction member 83 and the ring body forming the suction members 84 and 85 and the ring bodies forming the partition members 87 and 88, respectively, without any gaps, but it is possible to perform a precise cutting process. However, even if the gap is formed, a gap is always formed, and even if the glass 89 is fused to join the two, a gap of 0.1 mm or more remains in the joined portion, so the joining strength of the suction cup 82 is weak. If an object to be adsorbed is held by the suction plate 82, air may leak from the gap and a desired suction force may not be obtained.

Even if the adsorbing members 83, 84, 85 and the partitioning members 87, 88 are made of ceramics having the same composition, the porous ceramics are smaller in strength and hardness than the dense ceramics, so When the disc body (adsorption member 83) made of porous ceramics and the ring body (adsorption members 84, 85) are fitted into the ring body (partitioning members 87, 88) made of ceramics, chipping or chipping occurs, and in severe cases, adsorption is performed. Since a large depression is formed on the surface 82, the flatness accuracy of the wafer may decrease when the object to be attracted and held by suction is a thin wafer such as a semiconductor wafer.

Moreover, the suction surface 86 of the suction plate 82 is
Although it is necessary to finish the object to be adsorbed with high accuracy to an excellent flatness accuracy, the adsorption plate 82 has partition members 87 and 88 made of dense ceramics and adsorption members 83 and 84 made of porous ceramics. 85 and glass 8
When the polishing process is performed, the adsorption members 83, 84, 85 and the glass 38, which are made of porous ceramics and have a hardness smaller than that of the partition members 87, 88, which are made of the dense ceramics, are largely scraped due to the difference in hardness. Therefore, the flatness of the suction surface 86 can only be about 10 μm, and it is difficult to further improve the flatness accuracy.

[0010]

[0011]

Therefore, the present invention is based on the above-mentioned section.
In view of the problem, the present invention has an adsorption surface for adsorbing and holding an object to be adsorbed,
Adsorption member composed of a plurality of porous ceramics, and
In a method for manufacturing an adsorption disk composed of a glass fusing wall for joining adsorbing members to each other, by filling a ceramic raw material into a mold having a convex wall portion corresponding to the glass fusing wall and performing pressure molding. After manufacturing a molded body having a groove corresponding to the convex wall portion and firing the molded body at a temperature slightly lower than a temperature required for completely sintering the ceramic raw material, a porous ceramic body is manufactured. The glass fusion wall is filled with glass paste in the groove of the porous ceramic body and hardened.
And then the porous glass without the glass fusion wall
By removing the part of the ceramic body by grinding ,
It is intended to manufacture a plate-shaped adsorption board in which adsorption members made of porous ceramics and glass fusing walls are alternately arranged.

Further, according to the present invention, the ceramic raw material to which the burned material is added is filled into a mold having a convex wall portion corresponding to the glass fusing wall and pressure-molded to form a groove corresponding to the convex wall portion. After forming a molded body with the above, and firing this molded body at the temperature necessary to completely sinter the ceramic raw material to manufacture a porous ceramic body, fill the groove of the porous ceramic body with glass paste. And then cure to fuse the above glass
Forming a wall, and then the above-mentioned glass fusion wall without porosity
To remove parts of fine ceramic body by grinding
Then, a plate-shaped suction plate in which suction members made of porous ceramics and glass fusing walls are alternately arranged is manufactured.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

1A and 1B are views showing a vacuum suction device 1 equipped with a suction plate 2 of the present invention. FIG. 1A is a perspective view, and FIG.
It is a X-ray sectional view.

This vacuum suction device 1 has a second disk-shaped suction member 22 around a disk-shaped suction member 21 in the center through a glass fusion wall 24 having an annular shape, and further around it. A suction plate 2 comprising a disk-shaped plate-like body having a third annular suction member 23 via an annular glass fusing wall 25, and one surface of the plate-shaped body serving as a suction surface 5; The suction base 2 includes an annular wall 35 surrounding the outer circumference of the suction base 2, and a holding base 3 having a recess 34 in which the suction base 2 is fitted inside the annular wall 35. It is arranged so as to be located on the same plane as the annular wall 35 of the holding base 3.

Adsorption members 21, 2 constituting the adsorption plate 2
2 and 23 have the same composition and a porosity of 30 to 40
%, A porous ceramics having an average pore diameter of 5 to 200 μm, and these adsorption members 21, 22, 23
The width t of the glass fusing walls 24 and 25 for joining the two is 0.5.
~ 2.0 mm. The glass fusing walls 24, 2
The width t of 5 is the thickness of the glass portion interposed only between the suction members 21, 22, and 23.

A hole 31 communicating with the disk-shaped suction member 21 of the suction plate 2 is formed in the center of the bottom surface of the recess 34 of the holding substrate 3, and the suction plate 2 is centered around the hole 31. Concentric annular grooves 32 and 33 are formed to communicate with the suction members 22 and 23 having an annular shape, respectively, and through intake holes 41, 42 and 43 that communicate with the holes 31 and the annular grooves 32 and 33, respectively. By vacuum suction by a vacuum pump (not shown), an object to be adsorbed (not shown) placed on the adsorption surface 5 is adsorbed and held.

The suction plate 2 is provided with the suction members 21, 2
Since 2 and 23 are separated by the glass fusing walls 24 and 25 and are independent of each other, by controlling the opening and closing of the intake holes 41, 42, and 43, the objects to be adsorbed having different sizes are combined into one vacuum adsorption device. It can be held at 1.

As described above, in the adsorption plate 2 according to the present invention, each of the adsorption members 21, 22 and 23 is made of porous ceramics having the same composition, has the same average pore diameter and porosity, and has a conventional adsorption property. Since the partition members 87 and 88 made of dense ceramics such as the board 82 are not provided, if the suction surface 5 is subjected to polishing processing, each suction member 21,
Both 22 and 23 can be cut by the same amount. Moreover,
A glass fusing wall 2 for joining the adsorbing members 21, 22, 23
Since the width t of 4 and 25 is as small as 0.5 to 2.0 mm, the glass fusing walls 24 and 25 are attached to the suction members 21 and 2.
Even if it is scraped as compared with Nos. 2 and 23, there is little influence on the flatness accuracy of the suction surface 5, and the flatness accuracy of the suction surface 5 can be significantly improved.

Therefore, by using the vacuum suction device 1 provided with the suction plate 2 according to the present invention, the suction surface 5 can be held even if an object to be sucked that is thin and easily deformed, such as a semiconductor wafer, is sucked and held.
Can be held with high accuracy by following the flatness accuracy of
Even if the surface of the held object to be adsorbed is subjected to processing such as polishing, the shapes of the glass fusing walls 24 and 25 are not projected as a pattern, and the surface is finished to be flat according to the flatness accuracy of the adsorbing surface 5. You can

The suction plate 2 according to the present invention has a suction surface 5
Since the adsorbing members 21, 22, 23 occupy a large proportion of the adsorbing member, and almost the entire surface of the adsorbed object can be adsorbed and held, the adsorbed object has a larger suction force than the conventional suction plate 82 having the same diameter. Can be adsorbed and held.

The width t of the glass fusing walls 24 and 25 is set to 0.5 to 2.0 mm, because when the width t is larger than 2.0 mm, the adsorption member 2 made of porous ceramics is used.
Glass fusing walls 24, 2 that are cut compared to 1, 22, 23
Since the ratio of 5 is too large, the flatness accuracy of the suction surface 5 cannot be increased so much, and the strength of the suction plate 2 is reduced, so that the suction surface 5 is deformed into a concave shape when the suction target is vacuum-sucked. However, it is difficult to accurately hold the object to be adsorbed, and conversely, it is difficult to make the width t less than 0.5 mm in manufacturing.

Next, a method of manufacturing the suction plate 2 provided in the vacuum suction device 1 shown in FIG. 1 will be described.

First, as shown in FIG. 2 (a), a mold 50 is prepared in which annular convex wall portions 54 and 55 corresponding to the glass fusing walls 24 and 25 are concentrically projected. Mold 50
After the ceramic raw material 70 is filled in the inside as shown in FIG. 3A, the upper punch 60 as shown in FIG. The annular groove 7 corresponding to the convex wall portions 54 and 55 of the mold 60 as shown in FIG.
A molded body 71 having concentric circles 4 and 75 is manufactured.

Here, the ceramic raw material 70 is a granulated body mainly composed of alumina, silicon carbide, etc., and a binder and a solvent are added to and mixed with these raw materials,
For example, when the main component is alumina, M is used as a sintering aid.
A ceramic raw material 70 to which gO, SiO ₂ , CaO, TiO ₂ or the like is added may be used. When the main component is silicon carbide, a ceramic containing Al ₂ O ₃ and Y ₂ O ₃ or B and C as a sintering aid is used. The raw material 70 may be used.

The die 50 is provided on the tip surface of the upper punch 60.
Corresponding annular convex portions 61, 62, 63 are provided between the convex wall portions 54, 55 protruding from the bottom surface of the mold, and are filled in the upper portions of the convex wall portions 54, 55 provided in the mold 50 at the time of pressure molding. The pressure applied to the ceramic raw material 70a and the ceramic raw material 70b filled in the portions other than the convex wall portions 54 and 55 is made constant so that the raw material powder is uniformly clogged.

Next, in order to prevent the glass paste from flowing into the molded body 71 at the time of injecting the glass paste into the annular grooves 74 and 75 which will be described later, the molded body 71 shown in FIGS. Firing at a temperature slightly lower than the temperature at which the raw material 70 is completely sintered, porosity of 30 to 40%,
A porous ceramic body having an average pore diameter of 5 to 200 μm is formed.

Specifically, when the ceramic raw material 70 mainly composed of alumina is used, 1100 is used in the air atmosphere.
It may be fired at a temperature of about 1200 ° C for about 2 hours,
When the ceramic raw material 70 mainly containing silicon carbide is used, it may be fired in an inert gas atmosphere at a temperature of about 1800 to 1900 ° C. for about 2 hours.

Then, the viscosity-adjusted glass paste is injected into the annular grooves 74 and 75 of the sintered porous ceramic body, and the glass is cured by firing at a temperature of 1100 to 1200, as shown in FIG. After forming the porous ceramic body 76 having the glass fusing walls 24 and 25 as shown in (b), the portion without the glass fusing walls 24 and 25 is removed by grinding to obtain the structure shown in FIG. Adsorption member 2 made of a plurality of porous ceramics as shown in (b)
It is possible to obtain the plate-shaped suction plate 2 in which 1, 22, 23 and glass fusing walls 24, 25 for joining the suction members 21, 22, 23 are alternately arranged.

As described above, in the present invention, the porous ceramic body 76 having the grooves 77 and 78 corresponding to the glass fusing walls 24 and 25 is formed in advance, and the grooves 77 and 78 are filled with the glass paste and fired. After the glass is hardened in this manner, it is manufactured by grinding the glass into a predetermined shape. Therefore, the suction members 83, 84, 85 and the partition member 87, which are separately formed like the conventional suction plate 82, are manufactured. It is possible to manufacture easily without the work of processing with high precision and fitting.

Moreover, the groove 7 of the porous ceramic body 76
Since the glass fusing walls 24, 25 can be formed by filling a sufficient amount of glass in 7, 78, the adsorbing members 21, 22, 23 and the glass fusing wall 24, which constitute the suction plate 2,
There is no gap between the two and 25, and both can be firmly joined.

In addition, the groove 7 of the porous ceramic body 76
Even if the width of 7, 78 is reduced, a sufficient amount of glass can be filled by adjusting the viscosity of the glass paste. Therefore, the width t of the glass fusing walls 24, 25 is 0.5 to 2.0.
It is possible to manufacture the suction cup 2 having a very small size of mm.

On the other hand, in the manufacturing process of the suction plate 2,
As another method of manufacturing the porous ceramic body 76, a burnable material such as polyethylene, polyvinyl alcohol, polypropylene, vinyl acetate, acrylic resin, cellulose, calcium carbide, or magnesium carbide that does not burn when fired is added to the ceramic raw material 70, This raw material is filled in a mold 50 having annular convex wall portions 54 and 55 corresponding to the glass fusing walls 24 and 25 of the suction plate 2 and pressure-molded to thereby perform the molding as shown in FIGS. A molded body 71 having annular grooves 74 and 75 corresponding to the convex wall portions 54 and 55 of the mold 60 as shown in FIG. 2 is concentrically provided, and then the ceramic raw material 70 constituting the molded body 71 is manufactured. It can also be formed by firing at a temperature for complete sintering.

According to this method, since the ceramic raw material 70 can be fired at a temperature at which it is completely sintered,
It is possible to manufacture the suction plate 2 having higher hardness and higher strength.

Specifically, for the ceramic raw material 70,
A raw material added with burned material in the range of 2 to 30% by weight is molded into a predetermined shape, and when the ceramic raw material 70 is mainly composed of alumina, 1600 to 18 in an air atmosphere.
It may be fired at a temperature of about 00 ° C. for about 1 to 2 hours. When the ceramic raw material 70 mainly composed of silicon carbide is used, it is fired at a temperature of about 1900 to 2000 ° C. for about 1 to 2 hours to form a three-dimensional mesh. A porous ceramic body 76 having a structure can be obtained.

By using this method, it is possible to use, as the ceramic raw material 70, a ceramic raw material 70 mainly composed of silicon nitride or zirconia in addition to alumina or silicon carbide. It is sufficient to use a ceramic raw material 70 to which Al ₂ O ₃ and Y ₂ O ₃ are added as a co-agent, and to calcinate it in a nitrogen atmosphere at a temperature of about 1700 to 1800 ° C. for about 2 hours. When zirconia is the main constituent, it is stabilized. Y ₂ O ₃ , CaO, Mg as agents
The ceramic raw material 70 added with O, CeO ₂ or the like may be used and fired in the air at a temperature of about 1400 to 1650 ° C. for about 2 hours.

Further, in the above-mentioned manufacturing method, the grooves 77 and 78 formed on the surface of the porous ceramic body 76 are formed in the mold 50.
The convex walls 54 and 55 formed on the bottom surface of the
The plate-shaped porous ceramic body 75 is formed in advance, and the glass fusion walls 24, 25 are formed by grinding the surface thereof.
The grooves 77 and 78 that match the shape of the above may be formed.

In FIG. 1, the glass fusing walls 24 and 25 are shown to have a ring shape. However, the shape of the convex wall portions 54 and 55 projecting from the mold 50 can be changed for these as well. , A glass fusing wall 2 as shown in FIG.
4 and 25 have a triangular shape, and FIG. 7 (b),
The suction plate 2 itself as shown in (c) is a square plate or an elliptical plate, and the glass fusing walls 24, 2 similar to the outer shape thereof.
5 or a plate-shaped body in which plate-shaped suction plates 26 and thin plate-shaped glass fusing walls 27 are alternately arranged as shown in FIG. 7D, depending on the purpose of use. Can be changed as appropriate.

Next, another embodiment of the present invention will be described.

8A and 8B are views showing a vacuum suction device 1 provided with another suction plate 2 of the present invention, wherein FIG. 8A is a perspective view and FIG.
FIG. 6 is a sectional view taken along line YY

This vacuum suction device 1 has the same basic structure as that of FIG. 1, but the suction surface 5 of the suction plate 2 is made to project from the annular wall 35 of the holding substrate 3, and the outermost periphery of the suction plate 2 is provided. A sealing film 4 made of glass or resin having a film thickness of about 1 to 2 mm
It is the one that is attached.

According to this structure, since the object to be adsorbed can be held only by the adsorption surface 5 of the adsorption platen 2, the object to be adsorbed can be held more accurately.

[0043]

EXAMPLE A suction cup 2 having different widths t of the glass fusing walls 24 and 25 was prototyped, and the flatness accuracy when the suction surface 5 of each of the suction cups 2 was subjected to polishing was measured. .

The adsorption disk 2 used in this experiment is made of Al ₂ O ₃
10% by weight of SiO ₂ powder as a sintering aid was added to 90% by weight of the powder, and the mixture was kneaded and dried with a solvent and a binder, and then this ceramic raw material was molded into a mold having double annular convex walls 54 and 55. 300 kg /
By press-molding at a pressure of about cm ^{2 and} then firing at a temperature of 1200 ° C. for 2 hours in an air atmosphere, the surface has double annular grooves 74 and 75 and a porosity of 3
A porous ceramic body 76 made of alumina ceramics having an average pore diameter of 50 μm and 8% is formed, and then glass paste is injected into the annular grooves 74 and 75 of the porous ceramic body 76 and fired at a temperature of about 1100 ° C. Thus, the glass was hardened, and after that, a plate-like body having an outer diameter of 200 mm and a thickness of 7 mm was cut out by cutting to be used.

Then, one surface of the plate-shaped body was subjected to polishing using diamond abrasive grains to form a suction surface 5, and the surface condition of the suction surface 5 was measured by a straightness measuring instrument.

Alumina ceramics having the same porosity and average pore size as those of the adsorption plate 2 were prepared as a reference sample.
Similarly, when polishing was performed using diamond abrasive grains, the flatness was 0.3 μm.

The respective results are shown in Table 1.

[0048]

[Table 1]

As a result, the width t of the glass fusing walls 24, 25 is t.
Is 3 mm, the flatness of the adsorbing surface 5 is only about 3 μm because the width t of the glass fusing walls 24, 25 that are abraded more than the adsorbing members 21, 22, 23 made of porous ceramics is too long. could not.

On the other hand, when the width t of the glass fusing walls 24 and 25 is 2 mm or less, the width t is larger than that of the adsorbing members 21, 22 and 23 made of porous ceramics. Since it is narrow, it has little influence on the flatness of the suction surface 5, and the flatness can be set to 1 μm or less. In particular, the width t of the glass fusing walls 24 and 25 is 0.5 mm.
The flatness of the suction surface 5 is 0.3 μm.
It was possible to obtain the same flatness accuracy as that of the reference sample without the glass fusing walls 24 and 25.

From this, it is understood that the suction surface 5 can be finished with excellent flatness accuracy by setting the width t of the glass fusing walls 24 and 25 to 2 mm or less.

[0052]

As described above , according to the present invention, there is no partition member made of dense ceramics unlike the conventional suction plate, and the glass fusing wall having a low hardness at the time of polishing the suction surface is used as the suction member. Even if it is greatly shaved, its width is very small, so that the flatness of the suction surface can be finished with high accuracy, and since it has sufficient strength, the suction surface can be suctioned even if the suction target is vacuum-sucked. Does not deform into a concave shape.

Therefore, even if the surface of the object to be adsorbed and held on the adsorbing surface is polished, the shape of the glass fusion wall is not projected as a pattern, and the object to be adsorbed is made to follow the flatness of the adsorbing surface. Can be held by adsorption.

Moreover, since the width of the glass fusing wall is small, the ratio of the adsorbing member to the adsorbing surface can be increased, and the adsorbed material can be adsorbed with a larger suction force than the conventional suction disk having the same diameter. Objects can be adsorbed and held.

Further , according to the present invention, it is possible to easily manufacture the suction member and the partition member, which are separately formed as in the conventional suction plate, without the work of highly accurately processing and fitting them together. . Moreover, since the glass fusing wall can be formed by filling the groove of the porous ceramic body with a sufficient amount of glass, it is possible to firmly bond the plurality of suction members constituting the suction plate. It is possible to obtain a suction cup having sufficient strength.

In addition, even if the width of the groove of the porous ceramic body is reduced, a sufficient amount of glass can be filled by adjusting the viscosity of the glass paste, so that the width of the glass fusion wall is very large. Small suction cups can also be manufactured.

[Brief description of drawings]

FIG. 1 is a diagram showing a vacuum suction device provided with a suction plate according to the present invention, (a) is a partially broken perspective view, and (b) is a sectional view taken along line XX thereof.

FIG. 2 is a perspective view showing a mold for manufacturing the suction plate according to the present invention.

3 (a) and 3 (b) are cross-sectional views for each step for explaining the method of manufacturing the suction cup according to the present invention.

FIG. 4 is a diagram showing a molded body in the process of manufacturing the suction cup according to the present invention, in which (a) is a perspective view and (b) is a sectional view taken along line AA.

5A and 5B are views showing a porous ceramic body in the process of manufacturing an adsorption disk according to the present invention, FIG. 5A is a perspective view, and FIG. 5B is a sectional view taken along line BB.

6A and 6B are views showing a suction plate according to the present invention, in which FIG. 6A is a perspective view and FIG. 6B is a sectional view taken along line CC.

7 (a) to (d) are perspective views showing another suction plate according to the present invention.

FIG. 8 is a diagram showing another vacuum suction device according to the present invention, in which (a) is a perspective view and (b) is a sectional view taken along line YY.

FIG. 9 is a view showing a vacuum suction device provided with a conventional multi-type suction plate, (a) is a partially broken perspective view,
(B) is the ZZ sectional view.

[Explanation of symbols]

1 ... Vacuum suction device, 2 ... Suction plate, 3 ...
Holding substrate, 5 ... suction surface, 21, 22, 23 ...
Adsorption member, 24, 25 ... Glass fusion wall, 31 ...
・ Hole, 32, 33 ... Annular groove, 34 ... Recess, 35 ... Annular wall, 41, 42, 43 ... Intake hole

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ identification code FI H01L 21/027 H01L 21/68 P 21/68 21/30 503C (58) Fields investigated (Int.Cl. ⁷ , DB name) B23Q 3/08 H01L 21/027 H01L 21/68 B65G 49/06 B65G 49/07 C04B 37/00 C04B 38/00

Claims (2)

(57) [Claims] 1. A method for manufacturing an adsorption disk, wherein an adsorption surface for adsorbing and holding an object to be adsorbed comprises an adsorption member made of a plurality of porous ceramics, and a glass fusing wall joining these adsorption members together. A ceramic body is filled with a ceramic raw material in a mold having a convex wall portion corresponding to a glass fusing wall and pressure molding is performed to manufacture a molded body having a groove corresponding to the convex wall portion. After the raw material is fired at a temperature slightly lower than the temperature required for complete sintering, a porous ceramic body is manufactured, and then a groove of the porous ceramic body is filled with a glass paste to be cured and the above glass fusion is performed. Shape the wall
Forms, after accordingly, without the glass melting Chakukabe porous Sera
Manufacture of a suction plate characterized by forming a plate-shaped suction plate by alternately arranging a suction member made of porous ceramics and a glass fusing wall by removing a portion of the mick body by grinding. Method. 2. A method for manufacturing an adsorption disk comprising an adsorption member having an adsorption surface made of a plurality of porous ceramics for adsorbing and holding an object to be adsorbed, and a glass fusing wall for adhering these adsorption members to each other. A molding having a groove corresponding to the convex wall portion is manufactured by filling a ceramic raw material to which a burnout material has been added into a mold having a convex wall portion corresponding to the fusion wall and pressure molding, After the formed body is fired at a temperature necessary for completely sintering the ceramic raw material to manufacture a porous ceramic body, a groove of the porous ceramic body is filled with a glass paste and cured to cure the glass fusion. Forming a wall ,
After that, the above-mentioned porous ceramic without glass fusion wall
A method for manufacturing an adsorption plate, which comprises removing a body part by grinding to form a plate-shaped adsorption plate in which adsorption members made of porous ceramics and glass fusing walls are alternately arranged. .