JP3460288B2 - Surface coating member with excellent wear resistance - Google Patents
Surface coating member with excellent wear resistanceInfo
- Publication number
- JP3460288B2 JP3460288B2 JP00513294A JP513294A JP3460288B2 JP 3460288 B2 JP3460288 B2 JP 3460288B2 JP 00513294 A JP00513294 A JP 00513294A JP 513294 A JP513294 A JP 513294A JP 3460288 B2 JP3460288 B2 JP 3460288B2
- Authority
- JP
- Japan
- Prior art keywords
- hard coating
- cutting
- nitride
- tool
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＷＣ基超硬合金、サー
メット、セラミックス等を母材とし、その母材の表面に
硬質物質を特殊な層構成にして被覆することにより、母
材の耐欠損性を維持しながら耐摩耗性を向上させた表面
被覆部材に関する。なお、この部材の代表的な用途とし
ては切削工具や耐摩工具が挙げられる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a WC-based cemented carbide, cermet, ceramics, etc. as a base material, and coats the surface of the base material with a hard substance in a special layered structure to improve the resistance of the base material. The present invention relates to a surface coating member having improved wear resistance while maintaining chipping property. Note that typical applications of this member include cutting tools and wear resistant tools.
【０００２】[0002]
【従来の技術】切削工具、耐摩工具の耐摩耗性を向上さ
せるため、これ等の工具の母材表面にＰＶＤ法やＣＶＤ
法によりＴｉ、Ｈｆ、Ｚｒの炭化物、窒化物、炭窒化物
やＡｌの酸化物から成る単層又は複層の被覆膜を設ける
ことは既に一般化している。この硬質被膜をもつ表面被
覆部材の中でも特に、硬質被膜をＰＶＤ法で形成するも
のは、母材強度の劣化なしに耐摩耗性を向上できるとい
う特長があり、ドリル、エンドミル、フライス切削用ス
ローアウェイチップなど強度の要求される切削用途に適
応されている。2. Description of the Related Art In order to improve the wear resistance of cutting tools and wear resistant tools, the surface of the base materials of these tools is subjected to PVD or CVD.
It has already been generalized to provide a single-layer or multi-layer coating film made of oxides of Ti, Hf, Zr carbides, nitrides, carbonitrides and Al by the method. Among the surface-coated members having this hard coating, the one in which the hard coating is formed by the PVD method has the characteristic that the wear resistance can be improved without deterioration of the strength of the base metal, and it is a drill, end mill, or throwaway tool for milling. It is suitable for cutting applications that require strength such as chips.
【０００３】[0003]
【発明が解決しようとする課題】Ａｌの酸化物被膜は、
耐摩耗性に関して非常に好ましいものであるが、ＰＶＤ
法ではこのＡｌの酸化膜を安定して被覆するのが難し
く、母材強度の面からＰＶＤ法を用いる部材については
このＡｌの酸化被膜は実用化に至っていない。The oxide film of Al is
Highly preferred for abrasion resistance, but PVD
With this method, it is difficult to stably coat this Al oxide film, and from the viewpoint of the strength of the base material, this Al oxide film has not been put to practical use for members using the PVD method.
【０００４】現在実用化されているものは、Ｔｉ、Ｈ
ｆ、Ｚｒ等の窒化物の被膜である。ところが、この種の
被膜は、特に、高速切削用途での耐摩性が不足し、早期
に寿命に至っている。Ti and H are currently in practical use.
It is a film of nitride such as f and Zr. However, this type of coating has insufficient wear resistance, especially in high-speed cutting applications, and has reached the end of its service life early.
【０００５】そこで、本発明は、ＰＶＤ法での形成が可
能であり、しかも従来のＰＶＤ法による被膜に比べて格
段に優れている被膜をもった表面被覆部材を提供しよう
とするものである。Therefore, the present invention is intended to provide a surface coating member which can be formed by the PVD method and has a coating much superior to the coating by the conventional PVD method.
【０００６】[0006]
【課題を解決するための手段】上記の課題を解決するた
め、本発明においては、母材表面に設ける硬質被膜を、
IVａ、Ｖａ、VIａ族金属元素およびＡｌ、Ｓｉから選ん
だ２種以上の元素の窒化物、酸化物、炭化物、炭窒化物
或いはホウ化物を０．４ｎｍ〜５０ｎｍの周期で組成を
連続的に変化させて全体の膜厚が０．５〜１０μｍとな
るように組合わせた構造の膜となしたのである。In order to solve the above-mentioned problems, in the present invention, a hard coating provided on the surface of the base material,
The composition of a nitride, oxide, carbide, carbonitride, or boride of IVa, Va, VIa group metal elements and two or more elements selected from Al and Si is continuously changed in a cycle of 0.4 nm to 50 nm. Thus, a film having a combined structure is formed so that the total film thickness is 0.5 to 10 μm.
【０００７】この表面被覆部材を切削工具や耐摩工具と
して利用する場合の母材材料は、ＷＣ基超硬合金、サー
メット、セラミックスなどが適している。WC-based cemented carbide, cermet, ceramics and the like are suitable as the base material when the surface-coated member is used as a cutting tool or an abrasion resistant tool.
【０００８】また、切削用途、耐摩用途では特に、母材
と硬質被膜との界面及び／若しくは硬質被膜の表面にIV
族金属元素の窒化物、炭化物、炭窒化物、酸化物の少な
くとも１種から成る中間層や表層膜を配することも有効
なことである。この中間層や表層膜は、Ｔｉの窒化物、
炭化物、炭窒化物、又はそれ等の積層物が特に好まし
い。[0008] In addition, especially in cutting applications and abrasion resistant applications, IV at the interface between the base material and the hard coating and / or the surface of the hard coating.
It is also effective to dispose an intermediate layer or surface layer film made of at least one kind of nitride, carbide, carbonitride, and oxide of a group metal element. The intermediate layer and surface layer are made of Ti nitride,
Carbides, carbonitrides, or laminates thereof are particularly preferred.
【０００９】以下、本発明の構成について更に詳細に述
べる。The structure of the present invention will be described in more detail below.
【００１０】IVａ、Ｖａ、VIａ族金属元素およびＡｌ、
Ｓｉの中から選ばれた２種類以上の金属からなる合金の
窒化物、酸化物、炭化物、炭窒化物及びホウ化物の被膜
を形成した表面被覆硬質部材は、優れた切削工具、耐摩
工具となり得ることがこれまでに良く知られているが、
発明者らはこれらの膜について、形成された膜の微視的
な構造とその特徴を研究していくうちに以下のような重
大な知見を得るに至った。IVa, Va, VIa group metal elements and Al,
A surface-coated hard member on which a nitride, oxide, carbide, carbonitride, or boride coating of an alloy composed of two or more kinds of metals selected from Si is formed can be an excellent cutting tool or wear resistant tool. It is well known that
The inventors have obtained the following important findings while studying the microscopic structure and characteristics of the formed films for these films.
【００１１】その知見とは、上記合金の窒化物、炭化
物、炭窒化物及びホウ化物のうち２種以上の化合物の均
一な混合物で硬質膜を構成したり（図２）化合物の多層
の薄膜として硬質膜を形成する（図３）のではなく、１
種の純粋な化合物の層から別の純粋な化合物の層との間
で例えばＴｉとＡｌが徐々に置換されて連続的に組成が
変化する構造（図４）をもった硬質膜を形成すると、こ
の膜が優れた耐摩耗性および靱性を示すというものであ
る。これは、層と層の間で組成が連続的に、かつ急激に
変わるため、大きな歪が蓄積されるためであると考えら
れる。The knowledge is that a hard film is composed of a uniform mixture of two or more compounds selected from the above-mentioned nitrides, carbides, carbonitrides and borides of the above alloys (FIG. 2) and as a multi-layered thin film of compounds. 1 instead of forming a hard film (Figure 3)
When a hard film having a structure (FIG. 4) in which the composition is continuously changed by gradually substituting Ti and Al, for example, between the layer of one pure compound and the layer of another pure compound is formed, This film exhibits excellent wear resistance and toughness. It is considered that this is because a large strain is accumulated because the composition continuously and rapidly changes between layers.
【００１２】ここで注意すべきことは膜厚５０ｎｍ以下
の２種類の薄膜を積層させていくにあたり積層周期（２
種の薄膜１層ずつの和、図４においては、たとえばＡｌ
Ｎから始まってＴｉＮに変わり再びＡｌＮに戻るまでの
範囲を云う）が１００ｎｍ以上あるとその間に多数の転
位が導入されてしまうために歪が緩和されてしまい、硬
質膜としての優れた性質を失う。図４における濃淡はＡ
ｌ又はＴｉの濃度分布を示すもので、ＴｉＮ層にはＡｌ
が、ＡｌＮ層にはＴｉが各中心部に向かって相互に変化
する状態を示すものである。It should be noted here that when laminating two kinds of thin films having a film thickness of 50 nm or less, the laminating cycle (2
Seed thin film layer by layer, for example, in FIG.
If it is 100 nm or more, a large number of dislocations are introduced, and the strain is alleviated, and the excellent properties as a hard film are lost. . The shade in Figure 4 is A
shows the concentration distribution of 1 or Ti, and the TiN layer has Al
However, the AlN layer shows a state in which Ti changes mutually toward each central portion.
【００１３】また、層と層の間隔を０．２ｎｍ未満にす
ることは製造技術上困難である。Further, it is difficult in terms of manufacturing technology to make the distance between layers less than 0.2 nm.
【００１４】なお、積層周期内での組成傾斜については
積層周期全域にわたって組成を傾斜させることも可能で
あるし、積層周期の一部にわたって実施することも可能
である。傾斜させる組成に関しても２種の材料の濃度を
自由に設定することができる。例えばＴｉＮ→ＴｉＡｌ
Ｎ→ＴｉＮというようにＴｉＮとＴｉ５０％、Ａｌ５０
％の窒化物の間で傾斜させてもよい。さらにくわえてこ
の多層膜を形成する際、硬質被膜と母材の界面、また
は、硬質被膜の最表面にIV族金属元素の窒化物、炭窒化
物、炭化物、酸化物を形成しておくと、さらに良好な耐
摩耗性を得ることができるという知見を得た。Regarding the composition gradient within the stacking cycle, the composition can be graded over the entire stacking cycle, or it can be carried out over a part of the stacking cycle. Concerning the composition to be inclined, the concentrations of the two kinds of materials can be freely set. For example TiN → TiAl
TiN and Ti50%, Al50 such as N → TiN
It may be graded between% nitride. In addition, when forming this multilayer film, if the nitride of the group IV metal element, carbonitride, carbide, or oxide is formed on the interface between the hard coating and the base material, or on the outermost surface of the hard coating, It has been found that even better wear resistance can be obtained.
【００１５】なお、本発明を切削工具や耐摩工具に応用
する際の母材は、勿論高速度鋼等であってもよい。When the present invention is applied to a cutting tool or an abrasion resistant tool, the base material may of course be high speed steel or the like.
【００１６】[0016]
【実施例】以下に、本発明の表面被覆部材の具体例とそ
の製造方法について説明する。EXAMPLES Specific examples of the surface-coated member of the present invention and a method for producing the same will be described below.
【００１７】基板母材として、ＪＩＳ規格Ｐ３０の超硬
合金と、サーメットと、セラミックスを用意した。母材
の形状はＪＩＳ・ＳＮＧ４３２の切削チップである。こ
の切削チップを、公知の真空アーク蒸着法によりターゲ
ットとしてＴｉとＡｌ、ＺｒとＨｆ、およびＴｉとＨｆ
の３種の組合せを用いて被覆を行なった。As a substrate base material, a JIS P30 cemented carbide, cermet and ceramics were prepared. The shape of the base material is a cutting tip of JIS SNG432. This cutting tip was used as a target by a known vacuum arc vapor deposition method to form Ti and Al, Zr and Hf, and Ti and Hf.
Coating was carried out using a combination of the three.
【００１８】図１に示すように、蒸着装置１内の一方に
Ｔｉターゲット２を設置し、その向い側にＡｌターゲッ
ト３を設置し、その中央でターンテーブル４上の切削チ
ップＴＡが一分間に５０回転するように調節した後、炉
内をＡｒガス１×１０-2Ｔｏｒｒの真空度に保ち、切削
チップに−２０００Ｖの電圧をかけて洗浄を行い、さら
に、５００℃まで加熱した後、Ａｒを排気してＮ2 ガス
を３００ＣＣ／ｍｉｎの割合で導入した。ここで真空ア
ーク放電によりＴｉターゲット、Ａｌターゲットを蒸
発、イオン化させることにより、切削チップがＴｉとＡ
ｌの混合蒸気の中を通過することになる。このとき、被
覆対象の切削チップを回転させることで表面にＡｌＮか
らＡｌの濃度が下がり、逆にＴｉの濃度が増してＴｉＡ
ｌＮ、そしてＴｉＮへ、更にＴｉＮからＴｉの濃度が下
がり、Ａｌの濃度が増して再びＡｌＮへと連続的に組成
の変化する組成変化の繰り返し層を持った膜を形成する
ことができた。全体の層厚は被覆時間によって制御し
た。As shown in FIG. 1, a Ti target 2 is installed on one side of the vapor deposition apparatus 1 and an Al target 3 is installed on the opposite side of the vapor deposition apparatus 1. After adjusting so as to rotate 50 times, the inside of the furnace was maintained at a vacuum degree of Ar gas of 1 × 10 -2 Torr, the cutting tip was cleaned by applying a voltage of -2000 V, and further heated to 500 ° C. Was evacuated and N 2 gas was introduced at a rate of 300 CC / min. Here, a Ti tip and an Al target are vaporized and ionized by vacuum arc discharge, so that the cutting tip has Ti and A
It will pass through the mixed vapor of 1 l. At this time, by rotating the cutting tip to be coated, the concentration of Al is reduced from AlN to the surface, and conversely, the concentration of Ti is increased to increase the TiA concentration.
It was possible to form a film having a repetitive composition change layer in which the concentration of Ti decreased from 1N to TiN, the concentration of Ti from TiN further decreased, and the concentration of Al increased, and the composition changed again to AlN. The total layer thickness was controlled by the coating time.
【００１９】以上の方法にて表１に示される層構成の硬
質被膜層を形成することにより、本発明の表面被覆切削
チップを製造した（実施例Ｉ）。同様にターゲットとし
てＺｒとＨｆ、反応ガスとしてＣＨ4 を使用し、連続的
に組成が変化してＺｒＣとＨｆＣになる膜を形成した
（実施例II）。また、ターゲットとしてＴｉとＨｆ、反
応ガスとしてＣＨ4 を用い連続的に組成が変化してＴｉ
ＣとＨｆＣになる膜を形成した（実施例III ）。By forming the hard coating layer having the layer constitution shown in Table 1 by the above method, the surface-coated cutting tip of the present invention was manufactured (Example I). Similarly, Zr and Hf were used as targets and CH 4 was used as a reaction gas to form a film whose composition was changed to ZrC and HfC continuously (Example II). In addition, Ti and Hf are used as targets, and CH 4 is used as a reaction gas.
A film of C and HfC was formed (Example III).
【００２０】さらに、比較のため、同じ切削チップを同
じ装置にて表面にＴｉおよびＡｌの窒化物、炭化物、炭
窒化物のうちの１種類の単層、もしくは２種類以上の複
層を形成した表面被覆切削チップＡ〜Ｃをそれぞれ製造
し、通常良く用いられているＣＶＤ法にてコーティング
した表面被覆切削チップＤ、Ｅも用意した。また、Ｆと
して、通常良く知られている合金の蒸発源を使用して作
製したＴｉＡｌＮ膜被覆の切削チップを用意した。ま
た、Ｇとして組成が連続的に変わるのではなく、図３の
ように２種類の層が断続的に入れ変わるＴｉＮとＡｌＮ
の積層膜を形成した表面被覆切削チップを用意した。ま
た、ＺｒＨｆＣおよびＴｉＨｆＣについても同様な層構
成をもつ表面被覆切削チップを用意した。これらをまと
めて表１、表２、表３、表４に示す。Further, for comparison, the same cutting tip was formed on the surface of the same device with a single layer of one kind of nitrides of Ti and Al, a carbide or a carbonitride, or with a multilayer of two or more kinds. Each of the surface-coated cutting chips A to C was manufactured, and the surface-coated cutting chips D and E coated by the commonly used CVD method were also prepared. Further, as F, a cutting tip coated with a TiAlN film prepared by using an evaporation source of a well-known alloy was prepared. Further, the composition of G does not change continuously, but two kinds of layers are intermittently changed as shown in FIG.
A surface-coated cutting tip having a laminated film formed thereon was prepared. Further, surface coated cutting chips having the same layer structure were prepared for ZrHfC and TiHfC. These are summarized in Table 1, Table 2, Table 3 and Table 4.
【００２１】次に、これらの試作表面被覆切削チップに
ついて、連続切削試験、および断続切削試験を表５に示
した条件にて行ない、切れ刃の逃げ面摩耗量を測定し
た。その結果を表１〜表４に併せて示す。Next, these trial surface-coated cutting tips were subjected to a continuous cutting test and an interrupted cutting test under the conditions shown in Table 5 to measure the flank wear amount of the cutting edge. The results are also shown in Tables 1 to 4.
【００２２】[0022]
【表１】 [Table 1]
【００２３】[0023]
【表２】 [Table 2]
【００２４】[0024]
【表３】 [Table 3]
【００２５】[0025]
【表４】 [Table 4]
【００２６】[0026]
【表５】 [Table 5]
【００２７】表１〜表４に示す切削実験結果から判るよ
うに、本発明の表面被覆切削チップは、いずれも従来の
被覆切削チップＡ〜Ｆと同様の材料で硬質被膜を形成し
たにも拘らず、従来チップに比べてはるかに優れた耐欠
損性と耐摩耗性を発揮する。As can be seen from the cutting experiment results shown in Tables 1 to 4, the surface-coated cutting tips of the present invention all have the same hard coating as the conventional coated cutting tips AF. In addition, it exhibits much better fracture resistance and wear resistance than conventional chips.
【００２８】[0028]
【発明の効果】以上述べたように、本発明の表面被覆部
材は、所定周期で連続的に組成を変化させて構成した硬
質被膜が、優れた耐摩耗性、溶着防止特性、耐酸化性、
摺動特性、耐マイクロチッピング性を有し、従来の被膜
と同等以上の硬さを持ちながら靱性も兼ね備えている
上、その被膜をＰＶＤ法で形成できるため、切削工具や
耐摩工具として用いると、長期に渡って良好な工具性能
を維持し続けると言う効果が得られる。As described above, in the surface-coated member of the present invention, the hard coating formed by continuously changing the composition in a predetermined cycle has excellent wear resistance, anti-welding property, oxidation resistance,
It has sliding properties and micro-chipping resistance, and has toughness while having hardness equal to or higher than that of conventional coatings, and since the coating can be formed by the PVD method, it can be used as a cutting tool or abrasion resistant tool. The effect is that good tool performance is maintained over a long period of time.
【００２９】なお、本発明の部材は、切削工具、耐摩工
具はもとより、表面の摩滅防止が要求される摺動部品等
に利用しても寿命延長の効果がある。The member of the present invention is effective not only for cutting tools and abrasion resistant tools, but also for extending the life of the sliding parts and the like which are required to prevent surface abrasion.
【図１】本発明の表面被覆部材の製造方法の一例を示す
線図FIG. 1 is a diagram showing an example of a method for manufacturing a surface-coated member of the present invention.
【図２】硬質被膜の層構成の説明図（従来品）FIG. 2 is an explanatory view of a layer structure of a hard coating (conventional product).
【図３】硬質被膜の層構成の説明図（従来品）FIG. 3 is an illustration of a layer structure of a hard coating (conventional product).
【図４】硬質被膜の層構成の説明図（本発明の一例）FIG. 4 is an explanatory view of a layer structure of a hard coating (an example of the present invention).
１ 真空アーク蒸着装置 ２、３ ターゲット ４ ターンテーブル ＴＡ 切削チップ 1 Vacuum arc deposition equipment A few targets 4 turntable TA cutting tip
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｃ２３Ｃ 14/06 Ｃ２３Ｃ 14/06 Ｃ Ｈ 14/08 14/08 Ａ Ｈ 14/18 14/18 (72)発明者 瀬戸山 誠 伊丹市昆陽北一丁目１番１号 住友電気 工業株式会社伊丹製作所内 (72)発明者 中山 明 伊丹市昆陽北一丁目１番１号 住友電気 工業株式会社伊丹製作所内 (72)発明者 吉岡 剛 伊丹市昆陽北一丁目１番１号 住友電気 工業株式会社伊丹製作所内 (56)参考文献 特開 昭58−115081（ＪＰ，Ａ) 特開 昭54−23608（ＪＰ，Ａ) 特開 昭54−17914（ＪＰ，Ａ) 特開 昭61−26786（ＪＰ，Ａ) 特開 昭55−145165（ＪＰ，Ａ) 特開 昭48−59106（ＪＰ，Ａ) 特開 昭61−99678（ＪＰ，Ａ) 特開 昭49−108111（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B32B 9/00 B23B 27/14 B23P 15/28 - 15/52 C23C 14/06 Front page continuation (51) Int.Cl. 7 identification code FI C23C 14/06 C23C 14/06 C H 14/08 14/08 A H 14/18 14/18 (72) Inventor Makoto Setoyama Kunyo Kita, Itami City 1-1-1 Sumitomo Electric Industries, Ltd. Itami Works (72) Inventor Akira Nakayama 1-1-1 Konyo Kita, Itami-shi Sumitomo Electric Industries Ltd. Itami Works (72) Inventor Tsuyoshi Yoshioka, Koyo Kita, Itami City 1-1-1 Sumitomo Electric Industries, Ltd. Itami Works (56) Reference JP 58-115081 (JP, A) JP 54-23608 (JP, A) JP 54-17914 (JP, A) JP 61-26786 (JP, A) JP 55-145165 (JP, A) JP 48-59106 (JP, A) JP 61-99678 (JP, A) JP 49 −108111 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) B32B 9/00 B23B 27/14 B23P 15/28-15/52 C23C 14/06
Claims (7)
ｌ、Ｓｉから選んだ２種以上の元素の窒化物、酸化物、
炭化物、炭窒化物或いはホウ化物を０．４ｎｍ〜５０ｎ
ｍの周期で組成を連続的に変化させて全体の膜厚が０．
５〜１０μｍとなるように組合わせた硬質被膜を母材表
面に持つことを特徴とする耐摩耗性に優れた表面被覆部
材。1. A group IVa, Va, or VIa metal element and A
l, nitrides or oxides of two or more elements selected from Si,
Carbide, carbonitride or boride 0.4nm-50n
The composition was continuously changed in a cycle of m to obtain a total film thickness of 0.
A surface-coated member having excellent wear resistance, which has a hard coating on the surface of the base material in combination so as to have a thickness of 5 to 10 μm.
ックスから成る母材の表面に請求項１記載の硬質被膜を
設けてある切削工具又は耐摩工具。2. A cutting tool or wear resistant tool, wherein the hard coating according to claim 1 is provided on the surface of a base material made of WC-based cemented carbide, cermet or ceramics.
元素の窒化物、炭化物、炭窒化物、酸化物の少なくとも
１種から成る中間層を配してある請求項２記載の切削工
具又は耐摩工具。3. The cutting according to claim 2, wherein an intermediate layer made of at least one of a nitride, a carbide, a carbonitride and an oxide of a group IV metal element is arranged at the interface between the base material and the hard coating. Tool or wear resistant tool.
窒化物、又はそれ等の積層物である請求項３記載の切削
工具又は耐摩工具。4. The cutting tool or wear resistant tool according to claim 3, wherein the intermediate layer is a nitride, a carbide, a carbonitride of Ti, or a laminate thereof.
炭化物、炭窒化物、もしくはそれ等の積層物から成る表
層膜を配した請求項２、３又は４記載の切削工具又は耐
摩工具。5. A Ti nitride on the surface of the hard coating,
The cutting tool or wear resistant tool according to claim 2, 3 or 4, wherein a surface layer film made of a carbide, a carbonitride, or a laminate thereof is provided.
期でＴｉとＡｌの濃度が連続的に変化する窒化物被膜を
有している請求項２記載の切削工具又は耐摩工具。6. The cutting tool or wear resistant tool according to claim 2, wherein the hard coating has a nitride coating in which the concentrations of Ti and Al continuously change in a cycle of 50 nm or less.
化物からなる中間層を有している請求項６記載の切削工
具又は耐摩工具。7. The cutting tool or wear resistant tool according to claim 6, further comprising an intermediate layer made of Ti nitride at an interface between the base material and the hard coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00513294A JP3460288B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00513294A JP3460288B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07205362A JPH07205362A (en) | 1995-08-08 |
| JP3460288B2 true JP3460288B2 (en) | 2003-10-27 |
Family
ID=11602793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00513294A Expired - Lifetime JP3460288B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3460288B2 (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100408237C (en) * | 2002-01-21 | 2008-08-06 | 三菱麻铁里亚尔株式会社 | Surface-coated cutting tool member having coating layer exhibiting superior wear resistance during high speed cutting operation and method for forming hard coating layer on surface of cutting tool |
| KR100594333B1 (en) * | 2002-01-31 | 2006-06-30 | 미쓰비시 마테리알 가부시키가이샤 | Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool |
| AU2003244324A1 (en) * | 2002-06-25 | 2004-01-06 | Mitsubishi Materials Corporation | Coated cutting tool member |
| US7368182B2 (en) | 2004-02-12 | 2008-05-06 | Hitachi Tool Engineering, Ltd. | Hard coating and its formation method, and hard-coated tool |
| EP1614655B2 (en) | 2004-06-18 | 2018-08-08 | Hitachi Tool Engineering Ltd. | Hard coating and its production method |
| WO2007029290A1 (en) * | 2005-09-01 | 2007-03-15 | Osg Corporation | Hard laminated coating and hard laminated coating provided tool |
| JP4824989B2 (en) * | 2005-11-02 | 2011-11-30 | 株式会社神戸製鋼所 | Hard coating |
| JP4985919B2 (en) | 2005-12-22 | 2012-07-25 | 三菱マテリアル株式会社 | Cutting tool made of surface-coated cubic boron nitride-based ultra-high pressure sintered material that provides excellent long-term surface accuracy in high-speed cutting of hardened steel |
| JP5005262B2 (en) | 2006-05-26 | 2012-08-22 | 三菱マテリアル株式会社 | Cutting tool made of surface-coated cubic boron nitride-based ultra-high pressure sintered material that exhibits excellent surface finish accuracy over a long period of time in high-speed cutting of hardened steel |
| KR100821535B1 (en) * | 2007-01-17 | 2008-04-14 | 오에스지 가부시키가이샤 | Hard multilayer coating, and hard multilayer coated tool including the hard multilayer coating |
| JP5043464B2 (en) * | 2007-02-19 | 2012-10-10 | 株式会社オンワード技研 | Metal compound film, film forming method and film forming apparatus |
| EP2168702B1 (en) | 2008-03-26 | 2014-09-03 | Kyocera Corporation | Cutting tool |
| JP5441822B2 (en) * | 2010-06-08 | 2014-03-12 | シチズンホールディングス株式会社 | Hard decorative member |
| JP6143158B2 (en) * | 2012-12-28 | 2017-06-07 | 住友電工ハードメタル株式会社 | Surface covering member and manufacturing method thereof |
| JP5618429B2 (en) | 2012-12-28 | 2014-11-05 | 住友電工ハードメタル株式会社 | Surface covering member and manufacturing method thereof |
| US9994958B2 (en) | 2016-01-20 | 2018-06-12 | Sumitomo Electric Hardmetal Corp. | Coating, cutting tool, and method of manufacturing coating |
-
1994
- 1994-01-21 JP JP00513294A patent/JP3460288B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07205362A (en) | 1995-08-08 |
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