JP3456945B2 - Laser marking device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
Use a galvanometer mirror to radiate the laser beam
By scanning over the object to be marked, the desired
Laser marking for marking characters, symbols, figures, etc.
Relates to the device. [0002] 2. Description of the Related Art A laser marking device is used for a laser light source.
At the beginning of setting the laser output, the laser output is as set.
Marking is performed, but it is
The actual work due to various factors.
The laser power emitted to Therefore, cheap
To maintain the specified print quality, monitor the laser output.
Control to stabilize the laser output to the set value.
It is necessary to And conventionally, the laser output is monitored
In order to achieve this, between the laser light source and the galvanometer mirror,
Separate splitter, half mirror, etc.
Part of the laser beam from the optical path onto the object to be marked
A configuration in which the light receiving element receives light toward another position is adopted.
It was. [0003] However, the above-mentioned problem is not solved.
In the conventional configuration, a beam splitter or the like is provided on the laser optical path.
The number of parts is increased because the optical system parts are required separately.
Add. Not only that, in the manufacturing process,
Adjusting the optical axis between the printer and the laser light source and light receiving element,
The number of man-hours to strictly adjust the beam splitter angle increases,
With the enormous adjustment work and the increase in the number of parts,
This increases the manufacturing cost. Further, as a conventional technique, an object to be marked
Monitor the reflected light of the laser beam irradiated on the object
Some configurations control the laser output of the light source. However
However, in this configuration, the material to be marked is
Quality, laser beam irradiation angle etc.
Because of this, the reflectance constantly fluctuates.
-Even if you monitor the laser light and control the laser output,
There was a problem that control could not be performed. Furthermore, a semiconductor laser is used as the laser light source.
In general, in a laser marking apparatus, a semiconductor label is used.
The laser beam is emitted from the semiconductor laser to the object to be marked.
The front direction and the back direction opposite to the object to be marked
The laser beam is emitted in both directions.
The power of the laser light emitted in both directions is almost the same.
Therefore, the light receiving means is arranged on the back side of the semiconductor laser,
Laser emitted from the semiconductor laser by this light receiving means
Some are configured to monitor light. However, in such a configuration,
The light receiving means is located on the back side of the semiconductor laser.
The object to be marked is, for example, metal
If the reflectance is high, the object to be marked
The return light reflected on the surface of the laser follows the path of the laser light.
The light is directly received by the light receiving means. As a result, semiconductor
This return to the laser beam emitted from the body laser to the back side
The light is added and the laser output can be controlled accurately.
There was no problem. The present invention has been made in view of the above circumstances.
Therefore, the output of the laser light source can be reduced while suppressing an increase in manufacturing cost.
To provide a laser marking device that can be stabilized
Objective. [0008] [Means for solving the problems and functions / effects]
In order to achieve the above, the laser markin according to the invention of claim 1
The laser device includes a laser light source and a laser emitted from the laser light source.
Galvano mirror device receiving light and galvano mirror device
The received laser light is applied to the object to be marked.
Galvanomi that can be reflected and the angle of reflection can be changed
And characters to be marked on the object to be marked
Each coordinate data of marking information such as symbols and figures
Outputs to the vano mirror and controls the laser output of the laser light source
In a laser marking device provided with a control means for
The galvanometer mirror transmits part of the laser light and leaves it
It consists of a partially transmissive mirror that reflects the
The laser beam that has passed through the mirror is received and the amount of received light is adjusted.
Light receiving means for supplying the received light signal to the control meansAnd partially transparent
Detects the angle of the mold mirror and detects the angle according to the angle
An angle detection means for providing a signal to the control means;
The transmittance of the mirror is made to correspond to the angle of the partially transmissive mirror
Storage means stored therein, the control means is an angle detection signal
The transmissivity according to the angle of the partially transmissive mirror is recorded based on
Read out from the memory means, the transmittance and preset laser output
The normal amount of light received by the light receiving means is calculated from the force,Positive light receiving means
And the actual received light amount obtained from the received light signal
Control the laser output of the laser light source to eliminate the difference
It has a feature. In the laser marking apparatus of claim 1,
-Laser light emitted from the user's light source is a partially transmissive mirror
By changing the reflection direction with
The light irradiation point is scanned over the object to be marked, and
Desired characters / figures are marked. At this time,
A part of the light is transmitted through a partially transmissive mirror to receive light.
Based on the light reception signal from the light receiving means,
The control means makes sure that the regular laser output and the actual laser output
Find the difference and control the laser power to eliminate this difference
Is done.Specifically, the control means receives the angle detection means.
Depending on the angle of the partially transmissive mirror based on the angle detection signal
Read the transmittance from the storage means, and set the transmittance in advance.
The amount of regular light received by the light receiving means is obtained from the laser output,
The actual amount of light received by the light receiving means and the actual amount obtained from the received light signal.
The laser light source laser
The output is controlled.This allows marking
The actual laser output irradiated to the object is as set.
So that stable print quality can be obtained.
The Moreover, in the present invention, a book is used for scanning the laser beam.
The galvanometer mirror itself, which is necessary in the future, becomes a partially transmissive mirror.
Since it was only changed, a beam splitter etc. was provided separately.
Suppressing production costs compared to conventional products
Can do. Furthermore, the light receiving means is partially transmitted from the laser light source.
If placed on the extension of the optical axis to the mold mirror,
Reflected light from the target object returns to the partially transmissive mirror
Even if the light is partially transmitted through the transmissive mirror,
Is not received by the light receiving element, so the laser output can be accurately
Can be monitored. [0010] [0011] DESCRIPTION OF THE PREFERRED EMBODIMENTS <First Embodiment> The first embodiment of the present invention.
The laser marker is shown in FIG.
200 (corresponding to the control means of the present invention) and a separation type head
300 (corresponding to the galvanometer mirror device of the present invention)
And an input / output circuit 110 provided for each.
110 are connected by an electric cable 400
The In addition, the controller unit 200 and the head unit 300
An optical fiber 33 extends between them, and the controller unit 2
The laser beam generated at 00 is transmitted through this optical fiber 33.
It is given to the head unit 300. The controller section
The detailed configuration will be described in the order of 200 and the head unit 300.
The Laser generation provided in controller unit 200
Means 250 (corresponding to the “laser light source” of the present invention)
Reference numeral 10 denotes a laser light source composed of a semiconductor laser.
Yes, it is pulse-driven by the driver 11 and laser light
Is output. 20A, 20B and 20C are semiconductor lasers.
This is an excitation light source composed of These excitation light sources 20A,
20B and 20C are connected to the drivers 21A, 21B and 21C.
Each rare earth-doped optical fiber, which will be described later, is DC driven
Has a wavelength for exciting 30AB and 30BC rare earth elements
Output excitation light. 30AB is a single mode rare earth dopant.
Optical fiber, which is in the middle of this optical fiber 30AB
There is an isolator 90 for cutting the return light from the front.
Is provided. 30BC is a multimode rare earth
Doped optical fiber, bobbin-shaped shaft (not shown)
It is made into a compact shape by winding it multiple times.
The These rare earth doped optical fibers 30AB, 3
0BC is a glass fiber that contains both rare earths and can be bent.
It is composed of laser light by the amplification action of rare earth
Amplify. Reference numeral 80A denotes a coupling means, which is a laser light source.
10 from the optical fiber 31 and the excitation light source 20A
The extended optical fiber 32A is connected to the rare earth doped optical fiber.
Combines with Iva 30AB. 80B and 80C are also
The coupling means 80B is a rare earth doped optical fiber.
The optical fiber extended from the fiber 30AB and the excitation light source 20B.
Iba 32B is connected to the rare earth-doped optical fiber 30BC.
The coupling means 80C includes the rare earth doped optical fiber 30.
The optical fiber 32C extending from the BC and the excitation light source 20C
Are coupled to the optical fiber 33. And optical fiber
At 33, the controller unit 200 and the head unit 300 are
It is connected. Reference numeral 100 denotes control means, which includes:
Input means 401 (for example, console) is connected.
From the input means 401, the marking program
Or receiving the marking information,
Controls the vano mirror 50. In addition, the control means 100
Is provided with a series of memories (not shown).
Corresponds to the angle of the X-axis galvanometer mirror 51 described later.
The laser beam transmittance is stored as a data table.
ing. This will be described in detail later. Each of the laser generating means 250 described above
The part is stored in the case of the controller unit 200.
By filling with a silicone resin, which is a curable substance.
It is fixed. Also, in the controller unit 200
Although not shown, operating power is supplied to the cooling device and other parts of the device.
A power supply circuit to be supplied is also provided. On the other hand, of the head unit 300, 40 is a copier.
A remetric lens, the laser generating means 250
These amplified laser beams are converted into parallel beams. Reference numeral 60 denotes an fθ lens.
In response to the laser beam reflected by the vano mirror 50,
Focusing is performed on the surface of the workpiece W. Now, 50 is a galvanometer mirror,
X-axis galvanometer mirror 51 and Y-axis galvanometer mirror 52
Laser beam from the collimator lens 40
For example, from the X-axis galvanometer mirror 51 to the Y-axis galvano
It is arranged to reflect in the order toward the mirror 52
The And to change the angle of both galvanometer mirrors 51 and 52
Therefore, the laser beam irradiation point is on the object to be marked W.
Scanned two-dimensionally. Here, in this embodiment, the X axis
The galvanometer mirror 51 transmits part of the laser light and
Is made of a reflective material. More specific
For example, the X-axis galvanometer mirror 51 is, for example, a dielectric multilayer.
Constructed from silicon coated or synthetic quartz
Has been. And the laser light source side (collimator lens
40) from the optical axis to the X-axis galvanometer mirror 51
Is provided with a light receiving element 350 as a light receiving means,
Can receive laser light that has passed through the X-axis galvanometer mirror 51
It is as. Here, the amount of light received by the light receiving element 350 is the X axis.
It changes depending on the angle of the galvanometer mirror 51.
As the angle of the X-axis galvanometer mirror 51 changes, the X-axis
The transmittance of the laser beam in the galvanometer mirror 51 changes.
This is because that. In this embodiment, the X-axis gull
Angle detecting means 340 for detecting the angle of the vano mirror 51 is provided.
Angle detection corresponding to the angle of the X-axis galvanometer mirror 51
The output signal is sent to the control means 100 of the controller unit 200.
To give. In addition, the control means 100 includes the memory (illustrated
And the angle of the X-axis galvanometer mirror 51 as described above.
The laser beam transmittance corresponding to the
It is remembered. Here, the angle of the X-axis galvanometer mirror 51
The relationship between the transmittance and the transmittance is the relationship shown in the curve graph of FIG.
The data table of the memory has the above curve
It is generated based on the graph. Next, the operation of the present embodiment constructed as described above.
Will be explained. First, using the input means 401, the laser power
Setting values such as word and print speed, and marks such as characters and graphics
King information is input to the control means 100. Then, the system
The control means 100 runs a pre-input program.
From the above set values and marking information,
Control signals for controlling the output are sent to the drivers 11 and 21.
A, 21B, 21C. Then, driver 11
Drives the laser light source 10 in a pulsed manner and the driver 2
1A, 21B, 21C are excitation light sources 20A, 20B, 2
DC drive of 0C. Next, the laser marking device is provided.
If you turn on the excitation switch (not shown),
Excitation light is output from the excited excitation light source 20A, and this
Excitation light passes through the optical fiber 32A and the coupling means 80A.
Into both rare earth doped optical fibers 30AB and 30BC
Shoot. At this time, the output of the excitation light source 20A is small.
The optical fiber 3 is controlled so as to receive the excitation light.
When the entire 0AB and 30BC are in a uniform excited state,
The laser beam is generated when excited, and the laser beam is
Maintains strength that cannot be marked. At the start of marking, the control means 10
0 indicates the output of the laser light source 10 and the excitation light sources 20B and 20C.
Turn on the power. Then, from excitation light source 20B, 20C
Excitation light enters the rare earth-doped optical fiber 30BC.
Thus, the rare earth doped optical fiber 30BC is in a highly excited state.
In addition, the pulsed laser light from the laser light source 10 is rare
It is incident on the doped optical fiber 30AB. And
The laser light is a rare earth doped optical fiber 30AB and
Rare earth doped optical fiber 30BC in a highly excited state
It is amplified by passing. At this time,
The light is a single mode rare earth doped optical fiber 30
By passing through AB, the degree of amplification is small, but the light intensity
A laser beam with a well-distributed quality and good quality can be obtained.
Through a rare earth doped optical fiber 30BC
By this high quality laser beam marking
Is amplified to a sufficient intensity. Also, rare earth doped optical fiber
An isolator 90 is provided in the middle of the fiber 30AB.
Therefore, the laser light from the excitation light source 20C is returned backward
Is prevented. In this embodiment, the excitation light source 20A,
20B and 20C use light in the wavelength band that rare earths easily absorb
On the other hand, the laser light source 10 is excited.
Band when the emitted rare earth loses energy and emits light
The light is output. As a result, excitation light
The excitation light from the sources 20A, 20B, 20C is an optical fiber
30AB, absorbed by rare earth in 30BC and excited state
When the rare earth light is emitted from the laser light source 10
Whether light of wavelength enters the optical fibers 30AB and 30BC
Therefore, the light emission by stimulated emission is promoted, and the laser light is efficiently used.
Can be amplified. The amplified pulsed laser beam is coupled to the coupling means 80.
Controller unit 200 via C and optical fiber 33
To the head unit 300. Along with this,
The input / output circuit 110 of the controller unit 200 to the head unit 3
00 to the X and Y axes via the electric cable 400
Control signals and drive power for both galvanometer mirrors 51 and 52
Power is sent. In the head unit 300, the controller unit 20
Pulse laser light received from the 0 side is collimated by the collimator lens 4
When 0, the light is focused to parallel light, and this parallel light is applied to the galvanometer mirror 50.
So change direction. Here, with galvanometer mirror 50
The parallel light is converted into one by the X-axis galvanometer mirror 51.
Is scanned in the direction of X by the Y-axis galvanometer mirror 52.
In a direction orthogonal to the direction in which the axial galvanometer mirror 51 scans
By scanning, you can scan in any two-dimensional direction
it can. The parallel light from the galvanometer mirror 50 is fθlen
From the parallel light by the condenser lens 60 called
It is narrowed down to a spot laser beam for performing squeezing. This
Laser beam on the surface of the object W to be marked.
Thus, desired marking is performed. Now, here, the laser beam of the present invention is
The output control will be described. In this embodiment, Markin
In the middle of the moving operation, the collimator
Part of the laser light focused to parallel light by the lens 40 is the X axis.
Light passes through the galvanometer mirror 51 and is received by the light receiving element 350.
Is done. At this time, the angle detection means 340
The angle, which is the deflection angle of the mirror 51, is detected. The light receiving element 350 corresponds to the amount of light received.
The control unit 100 of the controller unit 200 outputs the received light signal.
On the other hand, the angle detection means 340 includes an X-axis galvanometer.
The angle detection signal corresponding to the angle of the
To the means 100. Then, the control means 100
The memory in the control means 100 (not shown)
From the angle of the X-axis galvanometer mirror 51.
Read the data of the excess rate, and this and the preset laser
From the output, based on the following formula,
Calculate the amount of received light. [Regular amount of light received by the light receiving element] = [Transmissivity] x [Set
Laser output] Then, [Normal received light amount of light receiving element] and [Reality of light receiving element]
The difference in the amount of light received at the time]
In addition, the laser output is controlled. As a control method,
The following may be used. For example, transmittance and reception
Of the laser beam currently marked based on the optical signal
[Measured laser output] is calculated by the following formula, [Measured laser output] = [Actual amount of light received by the light receiving element] /
[Transmissivity] This [Measured laser output] is changed to [Set laser output].
If the output is reduced, the output is reduced.
The laser output may be increased at the same time. further,
[Measured laser power] is [Set laser power]
If it is greater than the predetermined reference level,
You may control to lower. Thus, the laser marking of this embodiment
According to the device, as marking is performed over a long period of time,
For example, laser output due to semiconductor laser degradation, etc.
Even if falls below the set value, the laser output is compensated accordingly.
Because it is positively controlled, it always has a stable laser output.
Can do king and keep good quality marking
be able to. Moreover, in this embodiment, the laser beam is run.
X-axis galvanometer mirror 51 which is essentially necessary for inspection
I just changed my body to a partially transmissive mirror, so the beam
Compared to the conventional type with a separate splitter, etc.
The increase in strike can be suppressed. The light receiving element 3
50 from the laser light source side (collimator lens 40) to the X axis
Since it is arranged on the extension of the optical axis to the galvanometer mirror 51,
The reflected light from the object to be marked W is X-axis galvano.
When returning to the mirror 51 and passing through the mirror 51
Even so, the return light is not received by the light receiving element 350,
The laser output can be accurately monitored. By the way, the controller unit 200 and the head.
The fiber 33 connecting the unit 300 is cracked or broken.
If this occurs, the measured laser output mentioned above is extremely low.
It appears as a phenomenon to lower. Therefore, the measured laser output is
If it is significantly lower than the set reference level,
If the laser output is configured to stop, for example, a disconnected portion
The risk of leakage of laser light from can be avoided. <Second Embodiment> The laser marker of this embodiment.
The overall configuration of the king device is shown in FIG.
The head unit including the light source 210 and the galvanometer mirror 220
301 (corresponding to the galvanometer mirror device of the present invention)
And controller unit 201 (corresponding to the control means of the present invention)
) For each line driver / receiver 50
A and 50B are connected. The galvanometer mirror 220 has a pair of galvanometers.
The laser light source 210 includes mirrors 220X and 220Y.
From the X-axis galvanometer mirror 220, for example.
X is received first, and the reflected light is Y-axis galvanometer mirror 22.
The arrangement is toward 0Y. And both galvanos
By changing the angle of the mirrors 220X and 220Y, the laser
Light irradiation point is secondary on workpiece W (object to be marked)
Originally scanned. Here, the X axis is also used in this embodiment.
The Galvano mirror 220X can only transmit part of the laser light.
The remainder is made of a reflective material. More
Physically, the X-axis galvanometer mirror 220X, for example,
It is made of silicon or synthetic quartz coated with an electric multilayer.
It is configured. The laser light source 210 to X
On the extension of the optical axis to the axial galvanometer mirror 220X, no light is received
A light receiving element 290 as a means is arranged to
The laser beam that has passed through the mirror 200X can be received.
is there. Reference numeral 111 in the controller unit 201 is shown.
Is a console and the statement marking it
Characters and figures can be set, and the display unit (illustrated
)) And input data can be confirmed. Reference numeral 120 denotes data generation means, which is a pair of data generation means.
CPUs 1 and 2. And the data generation means 12
0 is the mark input from the console 111.
A plurality of coordinate data is generated based on the mapping information. Reference numeral 140 denotes storage means, which is a memory 14.
2 and a counter 141 are connected. And the memory 14
2, a plurality of coordinates generated by the data generation means 120
Data is stored. Reference numeral 130 denotes control means, which is the memory device.
The plurality of coordinate data is stored in the stage 140, and
These coordinate data are retrieved from the storage means 140 in order.
The output is made to the line driver / receiver 50A. Also,
The control means 130 is configured so that the plurality of coordinate data is a start point and a start point.
And the coordinate data of the end point is recognized.
The light source 210 is ON / OFF controlled. Further, the control means 130
Has a built-in memory.
Laser light corresponding to the angle of the axial galvanometer mirror 220X
Are stored as a data table. On the other hand, reference numeral 230 of the head portion 301 is provided.
Is a D / A conversion means, and the controller unit 20
1 storage means 140 to line driver / receiver 50
A plurality of coordinate data sent via A and 50B,
Convert to the corresponding voltage. A servo circuit 240 is a D / A converter.
Based on the voltage from the conversion means 230, the galvano mirror
-220 controls the driving means 260. Reference numeral 249 denotes an approach state detection means,
Corresponding to each coordinate data from the D / A conversion means 230
Corresponds to the voltage and the driving amount of the galvanometer mirror 220
Based on the voltage, the coordinates for the coordinate data of the end points are
-The approaching state of the irradiation position of the laser beam is detected. In more detail
The approach state detection means 249 includes a comparator 253,
Window comparator 254, angle sensor 251, and fine
And a dividing circuit 252. And the above
The paralator 253 is connected to the output voltage of the D / A converter 230.
The difference from the output voltage of the angle sensor 251 is determined as a predetermined first base.
Compared to the quasi-voltage, the result is controlled as a first binary signal.
To the control means 130. Meanwhile, the comparator 2
54 is an output voltage of the differentiating circuit 252 and a predetermined second reference.
Compare the voltage and control the result as a second binary signal
Output to means 130. The laser marking apparatus of this embodiment is as follows.
It works as follows. Emitted from laser light source 210
The laser beam is reflected by the galvanometer mirror 220 and reflected.
By changing the direction, the laser beam irradiation point
Scanned on the mark W, marking the desired characters, figures, etc.
Is done. At this time, as in the first embodiment, the laser beam
Part of light is transmitted through the X-axis galvanometer mirror 220X
Light received by the element 290 and received from the light receiving element 290
Based on the signal, the control means 130 determines the normal laser output and
The difference from the actual laser output is required, and this difference is eliminated.
In this way, the laser output of the laser light source 210 is controlled. this
Thus, the actual laser output irradiated to the workpiece W is
The set value is maintained, so that stable print quality is obtained.
Can be. Thus, the laser marking of this embodiment
Effects similar to those of the first embodiment can also be obtained by the apparatus.
be able to. The laser marking device of this embodiment
From marking information setting to printing operation
Is described in detail as follows. First, characters, symbols, figures, etc. to be marked
The marking information is entered on the console 111
The Console 111 has both input device and output device
The entered marking information is confirmed by the display unit.
The marking information can be entered while looking at this display.
To help. Marking start trigger from console 111
When a signal is input, this trigger signal is received and data
The CPU 1 of the generation unit 120 receives the input marking information.
The information is broken down into line segments of a predetermined length called vector components.
Generate point and end point coordinate data. These coordinate data
Whether the vector component is a straight line or a curve
The line type information is also included. On the other hand, the CPU 2 of the data generating means 120
When the coordinate data from the CPU 1 is received, the control means 1
30 and the control means 130 outputs this signal.
The memory 142 in the storage means 140
Set to a state where data can be written (write mode).
To do. The CPU 2 also receives coordinate data from the CPU 1.
Each vector component from the start point to the end
Break down to the point in more detail, including the start and end points
Calculate the coordinate data of multiple trajectory points,
An address is assigned to each coordinate data, and the data is sequentially stored in the memory 142.
I will pay. In the coordinate data of the locus point generated at this time,
Is the coordinate data of the start point or the coordinate data of the end point
Or the coordinate data of the midpoint
Information on point data is also included. CPU2 is all
When all the coordinate data have been calculated,
The character start signal is output. Then, the control means 130
When these coordinate data stored in the memory 142 are output,
In both cases, data can be read from the memory 142 (read
Set to (Flush mode). Further, the control means 130
Counter to the counter 141 in the storage means 140
A control signal is output, and the counter 141 receives this control signal.
Count the addresses in the memory 142 sequentially.
Read and output the target data. The coordinate data output from the memory 142
The line driver / receiver of the controller unit 201
Send to D / A conversion means 230 via 50A and 50B
At the same time, it is also sent to the control means 130. The control means 130 receives the received coordinate data.
Is the coordinate data of the start point or the coordinate data of the end point
ON / O which is a laser control signal to be described later
The FF signal is output to the laser light source 210 and the laser light source 210 is output.
Receives the control signal and turns on / off the laser beam. On the other hand, the D / A conversion means 230 received
Convert coordinate data to voltage and output to servo circuit 240
In addition, a window provided in the approach state detection means 249 is provided.
The data is output to the window comparator 253. The servo circuit 240 receives this voltage and drives it.
X axis galvanometer mirror 220X and Y axis galvo
The laser light source 21 is changed by changing the angle of the mirror 200Y.
Controls the direction of the laser beam from 0, so on the workpiece W
Is scanned in a two-dimensional direction. In addition, the angle sensor provided in the servo circuit 240
Sa 251 is an angle of galvanometer mirrors 220X and 220Y.
And a voltage corresponding to this angle is applied to the servo circuit 240.
And feed this voltage back into the window
The data is also output to the comparator 253, and further the head unit 30.
Via one line driver / receiver 50A, 50B
Also output to the control means 130. The servo circuit 240 includes speed detection means.
The differentiation circuit 252 provided as an output of the angle sensor 251
The voltage is a voltage corresponding to the scanning speed of the galvano mirror 220.
Converted into pressure and fed back into the servo circuit 240
In addition, this voltage is provided in the approach state detection means 249.
Also output to the comparator 254. The window comparator 253 has a D / A
The output voltage of the conversion means 230 and the output of the angle sensor 251
The difference from the voltage is compared with a predetermined first reference voltage and
The result is output as a first binary signal. This first binary signal
Is sent via line drivers / receivers 50A and 50B.
To the control means 130. The comparator 254 includes a differentiating circuit 2.
52 output voltage is compared with a predetermined second reference voltage.
Is output as a second binary signal, and this second binary signal is output.
Signals are also sent via line drivers / receivers 50A and 50B.
To the control means 130. The control means 130 sends it from the memory 142.
The output coordinate data is the coordinate data of the start point and end point.
If this binary signal is accepted, the D / A conversion
The voltage from angle sensor 251 for the voltage from stage 230
The pressure difference is within a predetermined first reference voltage and
The voltage from the dividing circuit 252 is within a predetermined second reference voltage.
Sometimes, coordinate data is sent out sequentially. Note that the above requirements are met.
If not, count the memory 142 address
The counter 141 is set to the coordinates of the start point or end point.
Repeat counting at the data address
The The control means 130 satisfies the above requirements.
Therefore, when sending coordinate data sequentially, the coordinate data
When the data is the coordinate data of the start point,
Counts up to the laser light source 210
Provide laser control signal (ON signal) and emit laser light
On the other hand, if the coordinate data of the end point is
A laser control signal (OFF signal) is given to the light source 210 to
-Turn off the light. <Other Embodiments> The present invention is not limited to the above embodiments.
For example, I will explain below
Such embodiments are also included in the technical scope of the present invention.
Other than the following, various modifications can be made without departing from the scope of the invention.
Can be applied. (1) In the first and second embodiments,
The light receiving means receives the laser light transmitted through the X-axis galvanometer mirror.
It was configured to shine, but partially transmitted through the Y-axis galvanometer mirror
Type mirror, light receiving element and corner in the corresponding arrangement
It is good also as a structure which provided the degree detection means. (2) Also, X-axis and Y-axis galvano mirrors
-Both are partially transmissive mirrors, each receiving light
It is good also as a structure which provided the element and the angle detection means. (3) In the first and second embodiments,
The optical mirror is X-axis galvanometer mirror and Y-axis galvanometer.
-It was a configuration with two, but not limited to this, either
It may be configured to include only one optical mirror. (4) Even if the number of excitation light sources is one,
It may be a number. (5) In the first and second embodiments,
The input device was a console.
Input using a keyboard such as a computer
May be. (6) In the first and second embodiments,
The optical fiber was made of glass fiber.
Not limited to bendable plastic fibers
A resinous optical fiber may be used. (7) In the first and second embodiments,
The fiber in the controller section is a rare earth doped optical fiber.
Fiber connecting the controller and head
Was made up of optical fiber,
Without connecting the controller and head
Even if it is composed of rare earth doped optical fiber
Good, or from the controller to the head
Fiber is the same rare earth doped optical fiber
It may be configured. (8) The laser light source in the present invention is a gas
Lasers, liquid lasers, solid-state lasers, semiconductor lasers, etc.
Any device that emits laser light may be used.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a laser marking device according to a first embodiment of the present invention. FIG. 2 is a graph showing the relationship between the angle of a galvanometer mirror and transmittance. 1 is a block diagram showing a laser marking device of an embodiment. DESCRIPTION OF SYMBOLS 50, 220 ... Galvano mirror 51 ... X-axis galvano mirror (partially transmissive mirror) 70 ... Marking object 100, 130 ... Control means 200, 201 ... Controller Numerals (control means) 300, 301 ... Head part 210 ... Laser light source 220 ... X-axis galvanometer mirror (partially transmissive mirror) 250 ... Laser generation means (laser light source) 251 ... Angle sensor (angle detection means) 290 ... Light receiving element 300, 301 ... Head (galvanomirror device) 340 ... Angle detection means 350 ... Light receiving element W ... Workpiece (marked pair) Things)

Claims (1)

(57) Claims 1. A laser light source, a galvano mirror device that receives laser light emitted from the laser light source, and a laser light device provided on the galvano mirror device to receive the received laser light. A galvano mirror that reflects toward an object and can change its reflection angle, and outputs coordinate data of marking information such as characters, symbols, and figures to be marked on the object to be marked to the galvano mirror and And a control unit that controls a laser output of the laser light source, wherein the galvanometer mirror includes a partially transmissive mirror that transmits a part of the laser light and reflects the remainder, and the partially transmissive mirror The laser beam that has passed through the mold mirror is received,
The angle of the light receiving means for providing the light receiving signal corresponding to the amount of received light to the control means and the partially transmissive mirror is detected, and the angle is adjusted.
Angle detection means for supplying the detected angle detection signal to the control means
And the transmittance of the partially transmissive mirror, the partially transmissive mirror
Storage means stored in correspondence with the angle of-, and the control means based on the angle detection signal
The transmittance according to the angle of the transmissive mirror is obtained from the storage means.
Read out, the transmittance and preset laser output
Obtaining a normal light reception amount of the light receiving means, and controlling a laser output of the laser light source so as to eliminate a difference between a normal light reception amount of the light receiving means and an actual light reception amount obtained from the light reception signal. A laser marking device characterized by the above.