JP3379637B2 - Electronic probe micro analyzer - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron probe microanalyzer, and more particularly to position control of a sample in the Z-axis direction.

[0002]

2. Description of the Related Art In an electron probe microanalyzer (EPMA) using a wavelength dispersive spectroscope, a sample, a dispersive crystal, and a detection crystal are used as light condensing conditions for detecting characteristic X-rays emitted from a sample by electron beam irradiation. The X-ray spectroscope of the instrument is required to be accurately arranged on the circumference of the Roland circle. Usually, the focusing condition of this X-ray spectrometer is performed by aligning the height of the sample surface.

In the analysis using the electron probe microanalyzer, a point analysis for analyzing one point on the sample surface, or an X-ray signal is detected by changing the analysis position on the sample surface one by one and detecting the X-ray signal each time. There are line analysis and mapping analysis that obtain a one-dimensional or two-dimensional distribution. In order to accurately perform point analysis, line analysis, and mapping analysis on an uneven sample surface, always make sure that the sample surface height satisfies the focusing condition of the X-ray spectrometer at each analysis position. It is necessary to control the height direction of the stage.

Conventionally, the alignment of the electron probe microanalyzer in the height direction (Z-axis direction) is performed by (a) acquiring the current height information of the sample surface for each analysis point and returning the information to the sample stage. Feedback control that adjusts the height position of the sample stage so that the above analysis point is at a position that satisfies the condensing condition, or (b) the sample surface is divided into minimum unit areas,
The coordinate value at the intersection of each unit area is acquired in advance, the height information of the analysis point in the unit area is approximately calculated from this coordinate value, and the height position of the sample stage is calculated based on the obtained height information. Adjustment control is performed.

[0005]

When performing point analysis, line analysis, and mapping analysis with the conventional electronic probe microanalyzer, the alignment in the height direction can be performed with high accuracy by the control of the above (a) and (b). In order to do so, it is necessary to acquire the coordinate value for each analysis point, increase the number of divisions of the area and the number of times of acquiring the coordinate value, which requires a huge amount of data and prolongs the processing time. There is. In particular, the number of times coordinate values are acquired when performing line analysis or mapping analysis becomes enormous.

Further, in the line analysis and the mapping analysis, it is necessary to perform the position control in the height direction while moving the analysis point, and in the feedback control of the above (a), the variation amount in the height direction per unit time is large. In this case, there is a problem in that the response speed of the position control cannot keep up with the fluctuating speed, so that the control diverges and the possibility of going out of the tracking state increases. Further, in the case where the control by the divided areas of the above (b) is performed in the line analysis and the mapping analysis, there is no fear of divergence which occurs when the feedback control is sequentially performed as in the case of (a). However, the height information obtained does not accurately represent the shape of the sample.Therefore, to perform height correction on a sample surface where there are partial locations where the changes in undulations are dense, The divided areas must be subdivided in accordance with the area having the highest density, and the number of divided areas and the number of times coordinate values are acquired increases, which increases the number of data and the processing time.

When line analysis and mapping analysis are performed on a sample whose surface is concentrically symmetrical about a single axis, if the control by the divided area of (b) is applied, the same height information is obtained in the circumferential direction. However, there is a problem that it requires a large number of divisions of the area and the number of times of obtaining coordinate values.

Therefore, an object of the present invention is to solve the above-mentioned conventional problems and perform highly accurate analysis in an electronic probe microanalyzer with a small number of times of acquisition of coordinate values. Moreover, even if the degree of change in the height direction is large, it is an object to perform highly accurate analysis without diverging the control.

[0009]

Means for Solving the Problems The first invention of the present application is an electron probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from the sample by irradiation with an electron beam, and measuring within an analysis range. From coordinate value to Z
Equipped with a calculation function that forms an isoline of axis coordinate values and obtains a Z-axis correction value area divided by the isolines, and the sample surface is analyzed under the analysis conditions based on the Z-axis correction value divided by the isolines. The position of the sample in the Z-axis direction is controlled so as to satisfy the height.

According to the first aspect of the invention, in order to control the position of the sample in the Z-axis direction, a region of the Z-axis correction value divided by an isoline of Z-axis coordinate values is used. A Z-axis correction value is set for each area divided by the iso-lines of Z-axis coordinate values, and analysis points existing in the area are analyzed in the Z-axis direction by using the Z-axis correction values set in the area. Position control is performed. The contour line of the Z-axis coordinate value is obtained by measuring the Z coordinate value with respect to the X and Y coordinate values within the analysis range and connecting the same Z axis coordinate value in the Z axis direction using the measured coordinate value. The Z-axis coordinate value of the area formed by the range delimited by the iso-line of the Z-axis coordinate value is within the range of a predetermined width. In order to analyze the analysis points in this area, the position of the sample in the Z-axis direction is controlled using the value set in the area as the Z-axis correction value.

The first mode of the Z-axis correction value is set as one value for the area delimited by the contour line, and the second mode is X,
It is set by the Z-axis correction function value that continuously changes along the moving direction of the Y coordinate axis. In the line analysis and the mapping analysis, the position control can be performed by any of the first Z-axis correction value and the second Z-axis correction function value.

According to the first aspect of the present invention, since the Z-axis correction value for adjusting the height that satisfies the analysis condition of the sample surface is provided over the entire analysis range, the divergence of control can be prevented. In addition, the acquisition position and the number of acquisition points of the Z-axis coordinate value can be selected according to the shape of the sample surface such as increasing or decreasing the number of acquisition points of the Z-axis coordinate value according to the density of the undulation change of the sample surface. It is possible to perform highly accurate position control with a small number of acquisitions.

A second invention of the present application is an electron probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from the sample by irradiation of an electron beam, and a straight line passing through the center position of the height distribution of the sample. Equipped with a calculation function that obtains the upper height correction value, and uses the height correction value to obtain a three-dimensional correction value with the center position of the height distribution as the rotation center.
The position of the sample in the Z-axis direction is controlled so that the sample surface satisfies the analysis condition height based on the Z-axis correction value obtained from the three-dimensional correction value.

A second aspect of the present invention analyzes a sample having a geometrical characteristic that the height distribution of the sample changes depending on the distance from a certain point. The center position of the height distribution is analyzed. A three-dimensional Z-axis correction value that is the center of rotation is used. Three
The dimensional Z-axis correction value is obtained by obtaining a height correction value on a straight line passing through the center position of the height distribution of the sample and rotating this height correction value with the center position of the height distribution as the center of rotation. You can The Z coordinate value corresponding to the X and Y coordinate values of the analysis point is corrected using the three-dimensional Z axis correction value, and the position control in the Z axis direction is performed.

Since the height distribution of the sample changes depending on the distance from a certain point, the height correction value is obtained on the straight line passing through the center position of the height distribution of the sample. , Z-axis correction values over the entire surface within the analysis range can be obtained. The three-dimensional Z-axis correction value over the entire surface within the analysis range can be obtained by rotating the height correction value with the center position of the height distribution as the rotation center. In order to analyze the analysis points within the analysis range using the three-dimensional correction values, the Z-axis correction values corresponding to the X and Y coordinate values of the analysis points are obtained from the three-dimensional correction values, and the obtained Z-axis is obtained. Position control of the sample in the Z-axis direction is performed as a correction value.

The height correction value on a straight line passing through the center position of the height distribution of the sample may be determined stepwise at predetermined intervals in the height direction or may be determined continuously. You can also When the stepwise height correction value is used, the three-dimensional correction value has a shape in which cylindrical bodies whose height direction becomes the Z-axis correction value are overlapped in the radial direction, and a continuous height correction value is obtained. When used, it becomes a cylindrical body whose height changes in the radial direction. To obtain the Z-axis correction value from the three-dimensional correction value, in the case of point analysis, the Z-coordinate value corresponding to the X and Y coordinate values of the analysis point is obtained from the three-dimensional correction values, and the Z-axis coordinate is calculated. The value is used as the Z-axis correction value, and in the case of line analysis or mapping analysis, the corresponding Z-coordinate value is obtained from the three-dimensional correction values along the movement directions of the X and Y coordinate axes. Is the Z-axis correction value.

The straight line for obtaining the height correction value is
The number can be one or plural. When using a plurality of straight lines, a three-dimensional correction value can be divided and set in the circumferential direction in the vicinity of the straight lines.

In the second invention, the three-dimensional correction value is tilted according to the tilt of the analysis range, the Z-axis correction value is obtained using the tilted three-dimensional correction value, and the position of the sample in the Z-axis direction is determined. Control can be performed. The inclination of the analysis range can be obtained from the height on the sample surface within the analysis range.

According to the second aspect of the invention, since the Z-axis correction value for adjusting the height satisfying the analysis condition of the sample surface is provided over the entire analysis range, it is possible to prevent the divergence of the control. In addition, since the Z-axis correction value over the entire analysis range can be obtained by measuring the height on the straight line passing through the center position of the height distribution of the sample, highly accurate position control can be performed with a small number of coordinate values. It can be carried out.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a schematic block diagram of a configuration example of an electronic probe microanalyzer of the present invention. In the electron probe microanalyzer 1 shown in FIG. 1, the electron beam 12 generated from the filament 11 is applied to the sample S arranged on the sample stage 17 via the condenser lens 13 and the objective lens 14. The X-rays emitted from the sample S are separated by wavelength into a spectroscopic element 15 and a detector 16 for detecting the characteristic X-rays.
Is analyzed by an X-ray spectroscope including.

The sample stage 17 is moved by the driver 4 which receives the control pulse from the stage controller 3 to X,
It can be moved in the Y and Z axis directions. The stage controller 3 uses the control command from the computer 2 to move X,
Positioning in the Y-axis direction and height adjustment in the Z-axis direction are performed. For the observation of the sample S, the image reflected by the reflecting mirror 18 is picked up by the image pickup device 5 such as a CCD camera and displayed on the monitor 7 via the autofocus controller 5. The auto-focus controller 6 returns the data in the Z-axis direction to the stage controller 3 and feedback-controls the sample stage 17, thereby focusing the image and simultaneously measuring the sample S.
Get the height data of. Normally, the focus position on the sample S of the imaging device 5 by the autofocus controller 6 and
It is set so that the analysis position on the sample S by the X-ray spectroscope that satisfies the condensing conditions matches, and the focusing condition of the X-ray spectroscope is adjusted by focusing the optical image with the autofocus controller 6. Can be matched. In the conventional electron probe microanalyzer, an optical image is observed for each analysis point and the sample stage 17 is aligned in the Z-axis direction so that the sample is in focus.

In the invention of the present application, the function provided in the computer 2 aligns the sample stage 17 in the Z-axis direction without observing an optical image for each analysis point. Less than,
Regarding the functions and operations of computers,
The second example will be described with reference to FIGS. 2 to 5, and the second example will be described with reference to FIGS. 6 to 10.

First, the first example will be described. 2 is a functional block diagram for explaining the functions of the first example, FIG. 3 is a flowchart for explaining the functions and operations of the first example, and FIGS. 4 and 5 are the functions of the first example. 5A and 5B are diagrams showing a Z-axis coordinate value and an isoline, and a diagram showing a Z-axis correction value for explaining In the first example, an isoline of Z-axis coordinate values is formed from the measured coordinate values within the analysis range, a region of Z-axis correction values divided by the isolines is obtained, and the sample is determined based on the Z-axis correction values. The position of the sample in the Z-axis direction is controlled so that the surface satisfies the analysis condition height.

In FIG. 2, each block shown in a chain line indicates a functional block included in the computer 2, a data storage block 20A for storing each data, an arithmetic functional block 2G for obtaining an isoline, and a Z-axis correction value. , A calculation function block 2E for obtaining a Z-axis correction function.

The data storage block 20A has an analysis range 2
Each data such as A, X, Y, Z coordinate value 2B, contour map 2F, Z axis correction value 2C, Z axis correction function value 2D, etc. is stored. The analysis range 2A is a range in which analysis is performed on the sample S, and is set by an input unit (not shown) while observing an optical image or the like displayed on the monitor 7. The X, Y, Z coordinate values 2B are the coordinate values of the sample surface within the analysis range, the X, Y coordinate values are the current position of the sample stage 17 input from the stage controller 3, and the Z coordinate values are the autofocus controller 6 etc. The height information of the sample surface obtained by the height detection means is input.

The contour line operation 2G is performed in the X, Y, and
It is obtained by connecting equal Z-axis coordinate values using the coordinate data of Z coordinate values. The interval between the contour lines can be set arbitrarily. The contour line obtained by the contour line calculation 2G is stored in the contour line diagram 2F. The contour map can be confirmed on the monitor 7, and the acquisition of X, Y, Z coordinate values and the contour calculation can be repeated if necessary. The contour map shows the unevenness of the sample surface,
The deviation in the Z-axis direction from the reference position of the sample stage is shown.

The Z-axis correction value / Z-axis correction function calculation 2E is a calculation for obtaining the height adjustment amount required for the sample surface to satisfy the analysis conditions. The obtained Z-axis correction value and Z-axis correction function are Z
It is stored in the axis correction value 2C and the Z axis correction function value 2D, and sent to the stage controller 3 at the time of analysis for height control,
Adjust the focus position of the line spectroscope.

The height detecting means for forming the unevenness of the sample S shown in the illustrated structural example is an example formed by the autofocus controller 6, and the optical focus obtained by the feedback system shown by the broken line in the figure. It can be calculated by combining.

Next, the flowchart of FIG. 3 and FIGS.
The operation of the first example will be described using. The optical range and SEM image of the sample S are observed on the monitor 7 to set the analysis range,
The data is stored in the analysis range 20A (step S1). In order to obtain the surface shape of the sample S, the X and Y coordinates are set by the sample stage 17 and the Z coordinate value is obtained by the autofocus controller 6 within the analysis range.
The X, Y, Z coordinate values 2B are stored. FIG. 4A shows the analysis range and the coordinate values obtained within the analysis range, and the numerical value is Z.
It represents the coordinate value. The measurement points for obtaining the coordinate values can be arbitrary, and for example, the portion where the shape change is sharp can be densely measured, and the portion where the shape change is slow can be roughly measured (step S2).

The contour line calculation 2G obtains contour lines using the measured X, Y and Z coordinate values and displays them on the monitor 7. Figure 4
(B) is an example of the contour map. In the figure, the isolines are shown with an interval of 1 in the Z direction at equal intervals, but the intervals of the isolines can be arbitrary and can be unequal intervals. The obtained contour lines are stored in the contour diagram 2F (step S3). The obtained contour map can be observed on a monitor, and if necessary, steps S2 and S3 can be repeated to improve the accuracy of the contour map (step S4).

A Z-axis correction value is set in an area delimited by isolines. FIG. 5A shows an example of setting the Z-axis correction value, and values of “1” to “8” are set in each area as the Z-axis correction value. As the Z-axis correction value, one value can be set in each region, or in the line analysis or the mapping analysis, a Z-axis correction function continuous along the analysis direction can be used.

When setting one value in the area, any value within the range of the Z-axis coordinate value can be used. FIG. 5A shows the case where the minimum value that defines the area is used (step S5).

When performing point analysis (step S6),
Determine the X and Y coordinate values of the analysis point within the analysis range. A Z-axis correction value corresponding to the X- and Y-coordinate values of the determined analysis point is obtained from the Z-axis correction value 2C. For example, in FIG. 5A, when the analysis point is set to the point A (xa, ya), 3 can be obtained as the corresponding Z-axis correction value (step S7a). This Z-axis correction value is sent to the pulse motor driver via the stage controller 3 to control the Z-axis height of the sample stage 17. Thereby, height adjustment at the analysis point can be performed (step S
8a).

When line analysis and mapping analysis are performed (step S6), an analysis line or an analysis range is set within the analysis range. For the X and Y coordinate values of the defined analysis line or analysis range, the corresponding Z from the Z axis correction value 2C
Calculate the axis correction value. For example, in FIG. 5A, when the measurement line in the x-axis direction with the y coordinate value of y0 is defined as the analysis line, the contour line diagram of FIG.
The Z-axis correction value and the Z-axis correction function shown in (c) can be obtained (step S7b). The Z-axis correction value or the Z-axis correction value determined by the Z-axis correction function is used as the stage controller 3
A control signal is sent to the pulse motor driver via the to control the height of the Z axis of the sample stage 17. by this,
The height at the analysis point can be adjusted (step S8b).

Next, the second example will be described. 6 is a functional block diagram for explaining the functions of the second example, FIG. 7 is a flowchart for explaining the functions and operations of the first example, and FIGS. 8-10 are the functions of the second example. It is a figure which shows the three-dimensional correction value for demonstrating. In the second example, the height distribution of the sample is analyzed with respect to a sample having a geometrical feature in which the height changes according to the distance from a certain point, and the center position of the height distribution is taken as the center of rotation. Do 3
The Z-axis correction value of the dimension is used. The three-dimensional Z-axis correction value is obtained by obtaining a height correction value on a straight line passing through the center position of the height distribution of the sample and rotating this height correction value with the center position of the height distribution as the center of rotation. . The Z coordinate value corresponding to the X and Y coordinate values of the analysis point is corrected using the three-dimensional Z axis correction value, and the position control in the Z axis direction is performed.

In FIG. 6, each block shown in the one-dot chain line shows a functional block included in the computer 2, and a data storage block 20a for storing each data, a functional block 2j for setting a straight line and a measurement point, and a central position are shown. A function block 2k for calculating, a calculation function block 2m for performing a height correction calculation, a function block 2n for an approximation function for obtaining an approximate function of a height correction value, a function block 2p for obtaining a three-dimensional function from the approximation function, and a sample A functional block 2q for obtaining the inclination between the surface and the three-dimensional function, and a calculation function block 2e for obtaining the Z-axis correction value and the Z-axis correction function are provided.

The data storage block 20a has an analysis range 2
a, center position 2f, X, Y, Z coordinate values 2b, Z-axis coordinate value 2g of height correction value, three-dimensional function 2h, inclination 2i, Z-axis correction value 2c, Z-axis correction function value 2d, etc. To store.

The analysis range 2a is a range in which analysis is performed on the sample S, and is set by input means (not shown) while observing an optical image or the like displayed on the monitor 7. The X, Y, Z coordinate values 2b are the coordinate values of the sample surface within the analysis range, and X, Y
The coordinate values are from the stage controller 3 to the sample stage 17
Is input, and the Z coordinate value is the height information of the sample surface obtained by the height detecting means such as the autofocus controller 6.

The sample to be analyzed is characterized in that its height varies depending on the distance from a certain point, and the center position calculation block 2k uses the X, Y, Z coordinate values to determine the center. The position is calculated and stored in the center position 2f.

The straight line / measurement point setting block 2j defines a straight line in the radial direction from the center position and sets measurement points on the straight line. The height correction value calculation block 2m obtains a Z-axis coordinate value for height correction from the Z-axis coordinate value at the measurement point and stores it in 2g. The approximate function block 2n obtains an approximate function for height correction in the radial direction using the Z-axis coordinate value for height correction, and the three-dimensional function block 2p rotates the approximate function around the center position as a rotation center to form a cubic function. The original function is obtained and stored in block 2h. In addition, the block 2q for tilt calculation calculates the tilt of the sample surface and stores the calculated tilt coefficient in 2i.

The Z-axis correction value and Z-axis correction function calculation 2e uses the data of the three-dimensional function 2h or the three-dimensional function 2h and the inclination 2i to determine the height adjustment amount required for the sample surface to satisfy the analysis conditions. Ask. The obtained Z-axis correction value and Z-axis correction function are stored in the Z-axis correction value 2C and the Z-axis correction function value 2D, and are sent to the stage controller 3 at the time of analysis to control the height and focus of the X-ray spectrometer. Adjust the position.

Next, the flow chart of FIG. 7 and FIGS.
The operation of the second example will be described using 0. The optical range and SEM image of the sample S are observed by the monitor 7 to set the analysis range and stored in the analysis range 20a. A rectangle surrounded by a broken line in FIG. 8 shows an example of the analysis range (step S11).

Since the sample S has a geometrical characteristic that the height distribution changes depending on the distance from a certain point, only the height change in the radial direction from the center position of the surface of the sample is determined. The shape of the entire sample is obtained by measuring. Therefore, the coordinate value of the sample surface is obtained by the stage controller and the autofocus controller, the center position is calculated by the center position calculation 2k, and the storage block 2
It is stored in f (step S12).

Further, a radial straight line passing through the obtained center position (dashed line in FIG. 8) is set (step S13),
Get coordinate values on a straight line. The coordinate values can be obtained by setting the X and Y coordinates by the sample stage 17 and obtaining the Z coordinate values by the autofocus controller 6, and the X, Y and Z coordinate values 2b are stored. The measurement points for obtaining the coordinate values can be arbitrarily set on the straight line. For example, the portion where the shape change is abrupt can be densely measured, and the portion where the shape change is slow can be roughly measured (step S14).

From the obtained coordinate values, the Z-axis coordinate value of the height correction value is obtained (step S15), and an approximate function for height correction of the sample in the radial direction is further obtained. FIG. 8 shows an example of an approximate function for height correction (step S16). Rotate the height correction approximation function with the center position as the center of rotation,
Find a three-dimensional function. This three-dimensional function represents the surface shape of the sample, and the Z-axis direction can be corrected using this coordinate value. FIG. 8 shows a three-dimensional function with a part cut off (step S17).

The three-dimensional function obtained in step S17 assumes that the sample S has no inclination, but in reality the sample S may be inclined with respect to the sample stage. Steps S18 and S19 determine the Z-axis correction value in consideration of the inclination of the sample in such a case. Therefore, after obtaining the coordinate values for several points on the analysis range of the sample S (step S
18) Find the slope coefficient of the three-dimensional function that passes as close as possible to the coordinate values found by the three-dimensional function. By correcting the Z-axis using this tilt coefficient and the three-dimensional function, it is possible to perform height correction in consideration of the tilt of the sample surface. FIG. 9 shows the relationship between the inclination of the sample surface and the three-dimensional function. With respect to the inclination of the analysis range shown by the diagonal lines in FIG. 9, as shown in FIG. It is tilted and tilted by θy in the Y-axis direction (step S19).

After this, steps S20 to S22
Thus, the height direction is corrected and analysis is performed in the same manner as in steps S6 to S8. The processing in steps S20 to S22 can be performed using only the three-dimensional function obtained in step S17 or the three-dimensional function obtained in step S17 and the slope coefficient obtained in step S19. Hereinafter, the case where the three-dimensional function and the slope coefficient are used will be described.

When performing point analysis (step S20), the X and Y coordinate values of the analysis point are determined within the analysis range. With respect to the X and Y coordinate values of the determined analysis point, a corresponding Z axis correction value is obtained from the three-dimensional function and the inclination coefficient (step S21a). This Z-axis correction value is sent to the pulse motor driver via the stage controller 3 to control the Z-axis height of the sample stage 17. Thereby, height adjustment at the analysis point can be performed (step S22a).

When the line analysis and the mapping analysis are performed (step S20), an analysis line or an analysis range is set within the analysis range. For the X and Y coordinate values of the determined analysis line or analysis range, a corresponding Z axis correction function is obtained from the three-dimensional function and the inclination coefficient (step S21b).
A Z-axis correction value determined by this Z-axis correction function is sent to the pulse motor driver via the stage controller 3 to control the height of the sample stage 17 in the Z-axis. Thereby, height adjustment at the analysis point can be performed (step S21b).

Although the above example shows the case of obtaining a three-dimensional function using one approximate function, depending on the shape characteristics of the sample surface in the circumferential direction, a plurality of straight lines may be drawn radially from the center position. To obtain a plurality of approximate functions, rotate the approximate functions by a predetermined angle in the circumferential direction to obtain a plurality of three-dimensional functions, and form a plurality of these three-dimensional functions arranged in the circumferential direction. Z of sample surface
Axis correction can be performed.

[0051]

As described above, according to the present invention,
The electronic probe microanalyzer can perform highly accurate analysis with a small number of coordinate values, and even if the degree of change in the height direction is large, highly accurate analysis can be performed without diverging control. It can be carried out.

[Brief description of drawings]

FIG. 1 is a schematic block diagram of a configuration example of an electronic probe microanalyzer of the present invention.

FIG. 2 is a functional block diagram for explaining a function of the first example of the present invention.

FIG. 3 is a flow chart for explaining the function and operation of the first example of the present invention.

FIG. 4 is a diagram showing Z-axis coordinate values and isolines for explaining the function of the first example of the present invention.

FIG. 5 is a diagram showing Z-axis correction values for explaining the function of the first example of the present invention.

FIG. 6 is a functional block diagram for explaining a function of a second example of the present invention.

FIG. 7 is a flowchart for explaining the function and operation of the first example of the present invention.

FIG. 8 is a diagram showing a three-dimensional correction value for explaining the function of the second example of the present invention.

FIG. 9 is a diagram showing three-dimensional correction values for explaining the function of the second example of the present invention.

FIG. 10 is a diagram for explaining the function of the second example of the present invention;
It is a figure which shows the correction value of dimension.

[Explanation of symbols]

1 ... Electron probe microanalyzer, 2 ... Computer, 3 ... Stage controller, 4 ... Driver, 5 ...
Image pickup means, 6 ... Autofocus controller, 7 ... Monitor, 11 ... Filament, 12 ... Electron beam, 13 ... Condenser lens, 14 ... Objective lens, 15 ... Spectroscopic element, 1
6 ... Detector, 17 ... Sample stage, 2A, 2a ... Analysis range, 2B, 2b ... X, Y, Z coordinate value, 2C, 2c ... Z axis correction value, 2D, 2d ... Z axis correction function value, 2E, 2e ... Z
Axis correction value, Z-axis correction function calculation function block, 2F ... Iso map, 2f ... Center position, 2G ... Iso-line calculation function block, 2g ... Height correction Z-axis coordinate value, 2h ... Three-dimensional function,
2i ... inclination, 2j ... straight line, measurement point setting function block, 2
k ... Center position calculation function block, 2m ... Height correction function block, 2n ... Approximation function function block, 2p ... Three-dimensional function function block, 2q ... Inclination function block, 20A, 2
0a ... Data storage block, S ... Sample.

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01J 37/252 G01N 23/225 H01J 37/20

Claims (2)

(57) [Claims] 1. In an electronic probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from a sample by irradiation with an electron beam, an isoline of Z-axis coordinate values is formed from measured coordinate values within an analysis range. However, it is provided with a calculation function for obtaining a region of the Z-axis correction value divided by the isolines, and the sample surface is made to satisfy the analysis condition height based on the Z-axis correction value divided by the isolines. An electronic probe microanalyzer that controls the position in the Z-axis direction. 2. An electron probe microanalyzer for performing elemental analysis of a sample surface by characteristic X-rays emitted from the sample upon irradiation with an electron beam, the height correction value on a straight line passing through the center position of the height distribution of the sample The sample is provided with a calculation function for obtaining a three-dimensional correction value with the center position of the height distribution as the rotation center using the height correction value, and based on the Z-axis correction value obtained from the three-dimensional correction value. An electron probe microanalyzer that controls the position of the sample in the Z-axis direction so that the surface satisfies the analysis condition height.