JP3362993B2 - Semiconductor manufacturing equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, a semiconductor manufacturing apparatus, and in particular, semiconductor manufacturing capable of changing a series of manufacturing specification information (hereinafter referred to as process flow information) necessary for manufacturing a semiconductor device. Regarding the device.

[0002]

2. Description of the Related Art Manufacturing a semiconductor device requires hundreds of steps such as a thermal oxidation step, a film forming step, an etching step, and the like, and the process flow information indicates a series of processing flows. It contains a huge amount of information about the specifications.
Furthermore, in this process flow information, predetermined processing conditions are set according to the type of product, the position and order of the process.

FIG. 4 shows an example of process flow information. For example, in the thermal oxidation step 121, "90
The processing conditions such as “oxidize at 0 ° C. for 20 minutes” are set. The manufacturing apparatus operates according to this set value, and the semiconductor device is manufactured according to this information.

In recent years, the production of semiconductor devices has been controlled by computer systems. That is, the process flow information is stored in the computer system, and the computer system controls the manufacturing apparatus according to the process flow information, so that the product can be manufactured without the need for human information input.

The process flow information is determined in advance before manufacturing the product, and if there is no problem, the product is manufactured according to the process flow information. However, for example, in a certain film forming process, when the film formed becomes thicker or thinner than a preset value, the processing conditions of the next process must be changed. That is, when the next step is an etching step, the time required for etching must be lengthened or shortened. While processing hundreds of steps other than this example, it is necessary to change the process flow information according to various events.

FIG. 5 shows a conventional computer system for managing semiconductor production. This computer system includes a host computer 51, a storage device 52 connected to the host computer 51, a device management computer 54 and a device control controller 55, and a manufacturing device 5 connected to the device control controller 55.
8. Carrier device controller 56, carrier device 59 connected to the carrier device controller 56, a plurality of terminal devices 57, the host computer 51 and the device management computer 54, a carrier device controller 56, a plurality of terminal devices 57. It is configured by a network 60 connecting the above. The host computer 51 has a CPU 51a.
It includes a main memory 51b and manages the progress of products and information used in the system.

In the above conventional system, the process flow information is stored in the storage device 52, and the manufacturing device 58 is controlled based on this information. The manufacturing apparatus 58 acquires the system flow information by accessing the storage device 52 from the host computer 51 or by acquiring the information, or by the host computer 51 downloading the information to the manufacturing management computer 54 . Etc. are possible. Further, the process flow information may be distributed and stored in a memory card or the like connected to another computer (not shown) other than the storage device 52.

[0008]

By the way, in the case of changing the above-mentioned conventional process flow information, a researcher or an engineer as a user operates from the terminal device 57 to the host computer 5.
1 had to be accessed to directly change the process flow information stored in the storage device 52. In the case of such a method, when many researchers and engineers access the host computer 51 at the same time, there arises a problem that the processing speed of the host computer 51 decreases and it becomes difficult to ensure security. Further, when a system for checking the changed process flow information is added to the host computer 51, if the system tries to perform the check, the time required for the change is further increased, and a researcher required to change the process flow information or It has the potential to increase the labor of engineers.

Further, the number of terminal devices connected to the host computer 51 may be small due to security and system performance limitations. In such a case, the user has to move to the place where the terminal device 57 is installed and perform the change process, and the change process is troublesome.

On a line where the process is not automated, the process flow information managed by the computer is confirmed from the terminal device, and the process flow information called a process chart accompanying the product is printed on paper or the like. Have been done. In such a case, in addition to changing the process flow information managed by the computer, it is necessary to correct the process table information. Since the process chart is usually attached to the product, when changing the process chart, researchers and engineers have to go to the line to modify the process chart, and the change work is complicated. As described above, in the conventional semiconductor manufacturing, a great amount of time and labor is required to change the process flow information.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a semiconductor manufacturing apparatus capable of easily changing process flow information in a short time.

[0012]

According to the present invention, manufacturing control of a semiconductor device is performed using storage means for storing process flow information indicating manufacturing conditions of a semiconductor device, and process flow information stored in the storage means. From the storage means
If the process flow information was read, this read
Set an identifier in the storage location of process flow information
Restrict execution of process flow information located after the identifier
And a read- out unit which is connected to the first calculation unit via a network and which reads out the process flow information stored in the storage unit.
And the process read by the reading means
Editing means for editing the flow information, and the edited process
Check means to check the contents of sflow information, and
A plurality of second calculation means having a transfer means for transferring the process flow information checked by the check means to the storage means.

Further, according to the present invention, a storage means for storing process flow information indicating a manufacturing condition of the semiconductor device, and a first calculation for manufacturing control of the semiconductor device using the process flow information stored in the storage means. Means and a plurality of second computing means connected to the first computing means via a network.
Each of the second computing means reads the process flow information selected by the selecting means from the storing means, the selecting means selecting the process flow information stored in the storing means. Reading means for outputting, editing means for editing the process flow information read by the reading means, checking means for checking the contents of the process flow information edited by the editing means, and process flow checked by the checking means Transfer means for transferring information to the first arithmetic means, the first arithmetic means, when the process flow information is read from the storage means by the read means, the read process flow information An identifier is set in the storage location of and the execution of process flow information located after this identifier is restricted Control means, rewriting means for rewriting the process flow information stored in the storage means into the process flow information transferred by the transfer means, the format of the process flow information handled by the second computing means, and the first When the formats of the process flow information handled by one computing means are different from each other, it has a conversion means for matching these formats.

[0014]

That is, in the present invention, the plurality of second arithmetic means are connected to the first arithmetic means as the host computer via the network, and the second arithmetic means are stored in the storage means of the first arithmetic means. The stored process flow information is read and edited, and the edited process flow information is stored in the storage means. Therefore, since the process flow information can be changed in the distributed second calculation means, it is possible to prevent the deterioration of the capability of the first calculation means and to efficiently perform the change processing.

Further, since the checking means checks whether or not the content of the process flow information edited by the editing means is correct, it is possible to surely edit the process flow information. Moreover, since the editing means and the checking means are executed by the second calculating means, the load on the first calculating means can be reduced.

Further, when the process flow information is read from the storage means, the control means of the first computing means sets an identifier in the storage position of the read process flow information, and the process located after this identifier. Since the execution of the flow information is limited, the manufacturing of the semiconductor device is not adversely affected.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of the present invention. In this computer system, each of the plurality of changing computers 11j and 11k to 11n for changing the process flow information includes a CPU 12a and a main memory 12b. A storage device 13 is connected to the changing computers 11j to 11n.
The storage device 13 stores a flow changing program and the like described later. Each of the changing computers 11j to
11n has a function of changing the process flow information according to the flow changing program stored in the storage device 13.

The host computer 14 includes a CPU 15a and a main memory 15b. A storage device 16 is connected to the host computer 14. The storage device 16 stores process flow information, a program for managing the progress status of products, the flow change program, and information used in the system. The host computer 14 manages the progress status of products and the operation of the entire system according to the information stored in the storage device 16.

An apparatus control controller 18 is connected to the apparatus management computer 17, and a manufacturing apparatus 19 is connected to the apparatus control controller 18. The device management computer 17 and the device control controller 18 are
The manufacturing apparatus 19 is controlled according to the process flow information to execute processing. A carrier device 21 is connected to the carrier device controller 20. The controller 20 for the carrier device 21 carries the carrier device 21 according to the process flow information.
Control and convey the product. Multiple workstations 2
2i and 22j to 22n function as input / output terminal devices of the host computer 14. These workstations 22i and 22j to 22n can also be used as the terminal devices of the changing computers 11j to 11n.

The changing computers 11j to 11n,
Host computer 14, device management computer 1
7, the transport device controller 20 and the workstations 22i to 22n are, for example, a network 23 such as a LAN.
Are organically connected by.

FIG. 2 shows the structure of the flow change program. This flow changing program is stored in the storage device 1.
6 is for changing the plurality of process flow information, and the flow selecting unit 30, the first transfer capturing unit 31, the flow editing unit 32, and the flow checking unit 3 are included.
3, flow conversion processing unit 34, second transfer capturing unit 3
5, a flow control unit 36, and a status control unit 37. The flow selection unit 30, the flow check unit 33, the editing unit 32, and the first transfer capturing unit 31 are
Normally, it is stored in the storage device 13 of the changing computers 11j to 11n, for example, and is called by the main memory 12b at the time of execution. Further, the flow conversion processing unit 34, the second transfer capturing unit 35, the control unit 36, and the status control unit 37
For example, it is stored in the storage device 16 of the host computer 14 and is called by the main memory 15b at the time of execution.

The flow selection unit 30 includes the network 2
The process flow information to be edited is selected from a plurality of process flow information stored in the storage device 16 via 3. That is, the file names of the process flow information stored in the storage device 16 are listed and displayed on the screens of the display devices 10j to 10n connected to the changing computers 11j to 11n. In this state, for example, the changing computer 11
Using a mouse or a cursor (not shown) connected to j, a desired file name is designated from a plurality of file names displayed on the display device 10j of the computer 11j. Then, the flow selecting unit 30 sends the instructed file name to the first transfer fetching unit 31.

The first transfer fetching unit 31 reads the process flow information corresponding to the file name selected by the flow selecting unit 30 from the storage device 16 via the network 23, and designates the file name as the changing computer. And the function of transferring the edited process flow information, which will be described later, to the storage device 16 via the network 23 and the host computer 14.

The flow editing unit 32 changes the process included in the selected process flow information, changes parameters (processing conditions) during the process, position of the process, combination, etc.
It has functions to delete and add. This flow editor 3
For 2, it is also possible to use an ordinary screen editor or the like.

The flow check unit 33 checks whether the process flow information changed by the flow editing unit 32 is correct. That is, the flow check unit 33 checks, for example, the spelling check of the code or language that describes the process flow information, the combination of flows, and whether the process conditions are within the allowable range.

When the process flow information managed by the host computer 14 is different from the format used by the flow editing unit 32, the flow conversion processing unit 34 has a format of the process flow information stored in the host computer 14. To the format used by the flow editing unit 32. When the process flow information managed by the host computer 14 matches the format used by the flow editing unit 32, the flow conversion processing unit 34 is unnecessary.

The second transfer fetching unit 35 causes the changing computer 1 to operate by the first transfer fetching unit 33.
A function of writing the process flow information transferred from 1j to 11n into the storage device 16 of the host computer 14,
It has a function of transferring the process flow information selected by the flow selection unit 30 to the main memory 12b of the changing computers 11j to 11n via the network 23.

The flow control unit 36 is provided in the storage device 1.
6 has a function of managing and controlling the process flow information stored in 6. For example, the process flow information selected by the flow selection unit 30 is read out from the storage device 16 and passed to the second transfer fetching unit 35, and the time and various values related to the progress status of the process supplied from the status control unit 37. It has a function of writing the status information of the above into the storage device 16 based on the process flow information.

The status control section 37 has a function of receiving the time and various status information supplied from the apparatus management computer 17, the apparatus control controller 18 and the carrier equipment controller 20 and supplying them to the flow control section 36. Have

Although the plurality of functions of the above flow changing program are distributed and stored in the changing computers 11j to 11n and the host computer 14, the function of each computer is not limited to this, and it depends on the performance of the computer. And change it.

In the above configuration, the operation when changing the process flow information will be described with reference to FIG. First, the process flow information (PFD) to be edited is selected (step S1). That is, the flow selection unit 30 lists and displays the file names of the process flow information stored in the storage device 16 on the screens of the display devices 10j to 10n connected to the changing computers 11j to 11n. The process position to be edited can be specified. In this state, for example, by using a mouse or a cursor (not shown) connected to the changing computer 11j, a desired file name and an editing target are selected from a plurality of file names displayed on the display device 10j of the changing computer 11j. Indicate the process position. Then, the flow selecting unit 30 sets the instructed file name and the edit target process position to the first transfer capturing unit 31.
Send to. The first transfer fetching unit 31 transfers the file name and the edit target process position to the flow control unit 36 via the network 23.

The process flow information can be selected not only by directly accessing the storage device 16 by the flow selection unit 30 but also by accessing the storage device 16 by the flow control unit 36.

Next, the flow control unit 36 stores the process flow information corresponding to the selected file name in the storage device 1.
6, and an identifier such as a flag is added immediately before the edit target process stored in the storage device 16,
The process does not progress after the process to be edited (step S2).

The read process flow information is transferred by the second transfer loading unit 35 of the host computer 14 to the first transfer loading unit 31 of the changing computer 11j (step S3). At this time, if the process flow information does not match the format of information handled by the flow editing unit 32, the flow conversion processing unit 3
4 changes the format of the information, adds missing information, and adds the process flow information to the first transfer capturing unit 31.
(Steps S4 and S5).

The process flow information transferred to the main memory 12b of the changing computer 11j via the first transfer capturing unit 31 is displayed on the display device 10j and stored in the storage device 13 as necessary. (Step S6).

The process flow information displayed on the display device 10j as described above is edited using the flow editing unit 32 (step S7). That is, the flow editing unit 32 is used to change, delete, or add the process itself included in the process flow information, the process parameter (processing condition), the process position, the combination, and the like.

The changed process flow information is checked by the flow check unit 33 for correctness (step S8). That is, the flow check unit 33 can process the spelling check of the code or the language that describes the process flow information, whether the combination of the added process and the subsequent process is correct, and the condition of the edited variable can be processed in that process. Check whether it is within the allowable range. There are no particular restrictions on the content of the examination.

The process flow information, for which the above check has been completed, is transferred to the storage device 16 of the host computer 14 by the first transfer fetching section 31 (step S9). At this time, when the process flow information is transferred from the changing computer 11j to the host computer 14, if the format of the information is changed by the flow conversion processing unit 34, it is converted into the original format by the flow conversion processing unit 34. , To the host computer 14 (steps S10 and S11).

The flow control unit 36 rewrites the process flow information stored in the storage device 16 with the process flow information transferred to the host computer 14. When this rewriting is completed, the flow control unit 36 removes the identifier such as the flag and returns to a state in which progress after the edit target process is possible (step S12).

According to the above embodiment, the process flow information is transferred from the host computer 14 that manages the progress of the product to the changing computers 11j to 11n and edited by the changing computers 11j to 11n. Therefore, since the process flow information change processing can be performed in various places in a distributed manner, the load on the host computer 14 can be reduced, the change processing can be performed in a short time, and the work efficiency of the change processing can be improved.

Further, the changing computers 11j to 11n
In addition, since a function for checking the changed process flow information is provided, it is possible to reduce mistakes due to editing, and it is possible to reduce abnormalities in the manufacturing process. Furthermore, by setting the check function in the changing computers 11j to 11n, it is possible to prevent a decrease in the processing capacity of the host computer 14 and reduce the labor of researchers and engineers.

Further, when the process flow information to be edited is transferred to the changing computers 11j to 11n, the flow information control unit 36 sets an identifier such as a flag immediately before the edit target process stored in the storage device 16. Attached. Therefore, since the process does not progress after the process to be edited, it is possible to ensure security and prevent abnormalities from occurring in the process. Moreover, since the security can be surely maintained, the number of changing computers connected to the host computer 14 can be increased, and the utilization efficiency of the user can be improved. The present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the spirit of the invention.

[0043]

As described above in detail, according to the present invention, it is possible to provide the semiconductor manufacturing apparatus capable of easily changing the process flow information in a short time.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a configuration of a flow changing program of the present invention.

FIG. 3 is a flowchart illustrating the operation of FIGS. 1 and 2.

FIG. 4 is a diagram showing an example of process flow information.

FIG. 5 is a configuration diagram showing an example of a conventional semiconductor manufacturing apparatus.

[Explanation of symbols]

11j to 11n ... Change computer, 14 ... Host computer, 13, 16 ... Storage device, 23 ... Network, 30 ... Flow selection unit, 31 ... First transfer fetching unit, 32 ... Flow editing unit, 33 ... Flow check unit Three
4 ... Flow conversion processing unit, 35 ... Second transfer capturing unit,
36 ... Flow control unit, 37 ... Status control unit.

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-63-249328 (JP, A) JP-A-6-97021 (JP, A) JP-A-4-98312 (JP, A) JP-A-5- 100939 (JP, A) JP-A-7-66096 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G05B 19/00-19/05 H01L 21/82

Claims (4)

(57) [Claims] Storage means for storing the process flow information indicating the production conditions 1. A semiconductor device, have rows manufacturing management of the semiconductor device using the process flow information stored in the storage means, processes from the memory means
If the flow information is read, this read process
An identifier is set in the storage location of the sflow information, and this identifier
A control that limits the execution of the process flow information that is located after it.
First computing means having a controlling means, and being connected to the first computing means via a network,
Reads the process flow information stored in said storage means
Read out means and read out by the read out means
Editing means for editing the process flow information;
Check to check the contents of the collected process flow information.
And a transfer means for transferring the process flow information checked by the checking means to the storage means.
And a plurality of second arithmetic means for performing the semiconductor manufacturing apparatus. 2. The semiconductor manufacturing apparatus according to claim 1, wherein the second arithmetic means has a storage means for storing the process flow information. 3. When the format of the process flow information handled by the first computing means and the format of the process flow information handled by the second computing means are different, the first computing means matches these formats with each other. 2. The semiconductor manufacturing apparatus according to claim 1, further comprising conversion means for performing such conversion . 4. Storage means for storing process flow information indicating manufacturing conditions of a semiconductor device; first computing means for managing manufacturing of a semiconductor device using the process flow information stored in the storage means; A plurality of second calculation means connected to the first calculation means via a network, wherein each of the second calculation means selects a process flow information stored in the storage means; Reading means for reading the process flow information selected by the selecting means from the storage means, editing means for editing the process flow information read by the reading means, and process flow information edited by the editing means. Checking means for checking contents, and the process flow information checked by the checking means, the first computing means. And a transfer unit for transferring, wherein, when the reading unit reads the process flow information from the storage unit, the first computing unit sets an identifier at a storage position of the read process flow information, Control means for limiting the execution of the process flow information positioned after this identifier; rewriting means for rewriting the process flow information stored in the storage means to the process flow information transferred by the transfer means; When the format of the process flow information handled by the computing means and the format of the process flow information handled by the first computing means are different from each other, the semiconductor manufacturing apparatus is provided with a converting means for matching these formats.