JP3291251B2 - X-ray fluorescence analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for measuring the intensity of fluorescent X-rays generated by irradiating a sample with primary X-rays and obtaining the concentration of an element in the sample based on the measured intensity.
The present invention relates to a line analyzer.

[0002]

2. Description of the Related Art Conventionally, a sample is irradiated with primary X-rays,
In so-called fluorescent X-ray analysis in which the intensity of fluorescent X-rays generated from the elements in the sample is measured and the concentration of the elements in the sample is determined based on the measured intensity, the analysis accuracy is a function of the measurement time, Since the measurement time fluctuates depending on the concentration of the element in the sample and the background intensity, and it is not easy to determine the measurement time so as to obtain a desired analysis accuracy, for example, the measurement time is uniformly set to 20 seconds for heavy elements, The time is set to 40 seconds for a light element having lower sensitivity than the above.

[0003]

However, in this case, however, in practice, a desired and sufficient analysis accuracy cannot be obtained, or on the contrary, the measurement time becomes unnecessarily long. That is, it is not possible to perform measurement with appropriate time and analysis accuracy. Similarly, in a conventional X-ray fluorescence analyzer, it is not possible to easily know in advance how much analysis accuracy can be obtained in a desired measurement time, and measurement cannot be performed with an appropriate time and analysis accuracy.

The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide an apparatus capable of performing measurement with appropriate time and analysis accuracy in so-called X-ray fluorescence analysis.

[0005]

To achieve the above object, an X-ray fluorescence spectrometer according to claim 1 comprises a sample stage on which a sample is fixed and an X-ray for irradiating the sample with primary X-rays. Source
Detecting means for measuring the intensity of secondary X-rays generated from the sample. Furthermore, the following measurement means, first calculation means and display means are provided. The measuring means irradiates a representative sample with primary X-rays from an X-ray source, causes the detecting means to measure the peak intensity and background intensity of fluorescent X-rays generated from the elements in the sample, Remember the intensity.

When the first calculating means receives an instruction to measure only the peak intensity for the sample to be analyzed, the first calculating means calculates the representative intensity based on the peak intensity and the background intensity stored in the measuring means. The peak measurement time at which the specified analysis accuracy is obtained for the sample is calculated, and when an instruction to measure the peak intensity and the background intensity is received for the sample to be analyzed, the peak measurement time is stored in the measurement means. Based on the peak intensity and the background intensity, a peak measurement time and a background measurement time at which the specified analysis accuracy is obtained for the representative sample are calculated. The display means,
The peak measurement time or the peak measurement time and the background measurement time calculated by the first calculation means are displayed.
Furthermore, the X-ray fluorescence analyzer according to claim 1 is an object to be analyzed.
Range of element concentration in the sample
Of elements in feedstock and elements in the representative samples
The range of the ratio to the concentration of the sample is specified and stored in the measuring means.
Based on peak and background intensities
At each concentration or concentration ratio within the specified range.
Third calculating means for calculating the analysis accuracy and the detection limit.
Prepare. Further, the display means calculates by the third calculating means.
The displayed analysis accuracy and detection limit are displayed.

According to the first aspect of the present invention, for a representative sample whose composition is close to the sample to be analyzed, the measurement time for obtaining the specified analysis accuracy is calculated and displayed. , It is easy to determine whether the specified analysis accuracy is appropriate, and a sample to be analyzed can be measured with appropriate time and analysis accuracy. And minutes
Assuming the range of element concentration etc. in the sample to be analyzed
If specified, the analysis accuracy at each concentration in the range, and
And detection limits are calculated and displayed.
Based on the analytical accuracy and detection limit
It is easier to determine whether or not the analysis accuracy is appropriate.
More appropriate time and analytical accuracy for the sample of interest
Can measure.

A fluorescent X-ray analyzer according to a second aspect of the present invention includes a sample stage, an X-ray source, a detecting unit, and a measuring unit, as in the first embodiment. Further, the apparatus includes the following second calculating means and display means. The second calculating means, when receiving an instruction to measure only the peak intensity for the sample to be analyzed, based on the peak intensity and the background intensity stored in the measuring means, for the representative sample. Calculate the analysis accuracy obtained at the specified peak measurement time, while, when receiving an instruction to measure the peak intensity and the background intensity for the sample to be analyzed, the peak intensity and the peak intensity stored in the measurement unit are received. Based on the background intensity, the analysis accuracy obtained at the specified peak measurement time and background measurement time for the representative sample is calculated. The display means displays the analysis accuracy calculated by the second calculation means. Furthermore, the fluorescent X-ray analyzer according to claim 2 is capable of analyzing
Range of elemental concentration in the sample of interest, or analyte
Element concentration in the sample and the representative sample
The range of the ratio to the concentration of the element is specified and recorded in the measuring means.
Based on the peak intensity and background intensity
For each concentration or concentration ratio within the specified range.
Calculation means for calculating analysis accuracy and detection limit
Is provided. Further, the display means may be the third calculation means.
The calculated analysis accuracy and detection limit are displayed.

According to the second aspect of the present invention, the analysis accuracy obtained in the designated measurement time is calculated and displayed for a representative sample whose composition is close to that of the sample to be analyzed. Based on the above, it is easy to determine whether or not the specified measurement time is appropriate, and the measurement can be performed on the sample to be analyzed with appropriate time and analysis accuracy. And minutes
Assuming the range of element concentration etc. in the sample to be analyzed
If specified, the analysis accuracy at each concentration in the range, and
And detection limits are calculated and displayed.
Based on the analytical accuracy and detection limits
It is easier to judge whether the time is appropriate or not.
More appropriate time and analytical accuracy for the sample of interest
Can measure.

[0010]

[0011]

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An apparatus according to a first embodiment of the present invention will be described below. First, regarding the configuration of this device,
This will be described with reference to FIG. The apparatus comprises a sample table 8 on which the samples 3 and 13 are fixed, an X-ray source 1 for irradiating the samples 3 and 13 with primary X-rays 2, and a secondary X-ray 6 generated from the samples 3 and 13. And detection means 10 for measuring the intensity of the light. The detecting means 10 includes a spectroscope 5 for separating the secondary X-rays 4 generated from the samples 3 and 13 and a detector 7 for measuring the intensity of the secondary X-rays 6 for each wavelength separated by the spectrometer 5. . This device is a so-called scan type device in which the spectroscope 5 and the detector 7 are linked by a goniometer. Further, this device includes the following control means 17 including the measurement means 12, the first calculation means 14 and the third calculation means 16, and the display means 19.

The measuring means 12 adds X to the representative sample 3.
The primary X-ray 2 is irradiated from the radiation source 1, the peak intensity and the background intensity of the fluorescent X-ray 6 generated from the element in the sample 3 are measured by the detecting means 10, and the measured intensity is stored. When receiving an instruction to measure only the peak intensity for the sample 13 to be analyzed, the first calculating unit 14 calculates the representative value based on the peak intensity and the background intensity stored in the measuring unit 12. The peak measurement time at which the specified analysis accuracy is obtained for the simple sample 3 is calculated. On the other hand, the first calculating means 14
When receiving an instruction to measure the peak intensity and the background intensity for the sample 13 to be analyzed, the representative sample 3 is designated based on the peak intensity and the background intensity stored in the measuring means 12. The peak measurement time and the background measurement time at which the obtained analysis accuracy is obtained are calculated.

The third calculating means 16 calculates the range of the concentration of the element in the sample 13 to be analyzed or the range of the ratio of the concentration of the element in the sample 13 to be analyzed to the concentration of the element in the representative sample 3. Designated and said measuring means 12
The analysis accuracy and the detection limit at each concentration or concentration ratio within the specified range are calculated based on the peak intensity and the background intensity stored in. The display unit 19 is, specifically, a liquid crystal display panel, a CRT, or the like, and calculates the peak measurement time calculated by the first calculation unit 12 or the peak measurement time and the background measurement time. The displayed analysis accuracy and detection limit are displayed.

Next, the operation of this device will be described.
First, a case where the peak intensity and the background intensity of the sample 13 to be analyzed are measured and the composition of a representative sample 3 whose composition is close to that of the sample 13 to be analyzed is known will be described. First, the measuring means 12
Is the X-ray source 1 on the representative sample 3 fixed on the sample stage 8.
By irradiating the primary X-rays 2 from measured peak intensity ^S I _P (cps) and background intensity ^S I _B (cps) detecting means 10 of the fluorescent X-rays 6 generated from elements of the sample 3 their measured intensity ^S I _P, and stores the ^S I _B. Note that the suffix ^S means a numerical value for a representative sample 3.

Next, the operator instructs the first calculation means 14 to measure the peak intensity and the background intensity for the sample 13 to be analyzed, and to indicate that the peak measurement time T _P (sec) and the background measurement time T _B ( sec) and the ratio h (h = T
_P / T _B , for example 2), and the desired analytical accuracy ^A σ _m (m
ass%), and input a representative sample 3.
The concentration of the element in ^S W (mass%) is also input. Here, the analysis accuracy ^A σ _m is the concentration accuracy. Then, the first calculating means 14, the ratio h of the designated measurement time, and peak intensity ^S I _P and background intensity ^S I _B stored in the measuring unit 12, the concentration of the element in a typical sample 3 ^S based on the W, to calculate a representative sample 3 given analytical precision ^a sigma _m is obtained peak measurement time for T _P and background measurement time T _B. Then, the display means 19 displays the calculated peak measurement time T.
_P and the background measurement time to display the T _B. Note that the subscript ^A means that it is a designated numerical value.

Here, the peak measurement time T_PAnd back
Ground measurement time T_BIs calculated based on the following equation (1).
Good. For example,^SI_P= 10100,^SI_B= 100, h
= 2 ^Aσ_m= 0.004^SIf W = 2, the peak
Measurement time T_P= 26 (sec) and background measurement
Fixed time T_B= 13 (sec) (rounded to the nearest decimal)
Issued and displayed.

[0018]

(Equation 1)

The equation (1) is derived from the following equations (2) to (5).

[0020]

(Equation 2)

[0021]

(Equation 3)

[0022]

(Equation 4)

[0023]

(Equation 5)

As described above, according to the apparatus of the first embodiment, for the representative sample 3 whose composition is similar to the sample 13 to be analyzed, for example, the specified analysis accuracy of 0.004 (ma
(ss%) is obtained and the peak measurement time 26 (sec) and the background measurement time 13 (sec) are calculated and displayed, so that the operator can display the displayed measurement time and the total measurement time 39 (sec). ), It becomes easy to judge whether the specified analysis accuracy of 0.004 (mass%) is appropriate, and the sample 13 to be analyzed can be measured at an appropriate time and analysis accuracy. . In other words, when the displayed measurement time reaches several hundred seconds, it is determined that the specified analysis accuracy was inappropriately severe, and a lower analysis accuracy is specified to obtain the analysis accuracy again. The measurement time can be calculated and displayed.

In the case where only the peak intensity is measured for the sample to be analyzed, the point that only the peak intensity is measured for the sample 13 to be analyzed is designated and input to the first calculating means 14, and the peak measurement time T There is no need to specify and input the ratio h between _P and the background measurement time T _B, and only the peak measurement time T _P is calculated by the first calculation means 14 and displayed on the display means 19. This is different from the case where the peak intensity and the background intensity of the sample 13 to be analyzed are measured. Here, the calculation of the peak measurement time T _P is based on the following equation (6).

[0026]

(Equation 6)

The expression (6) is derived from the expressions (2) and (5) and the following expressions (7) and (8).

[0028]

(Equation 7)

[0029]

(Equation 8)

In this case as well, similarly to the case where the background intensity is measured for the sample 13 to be analyzed, the specified sample 3 whose composition is similar to the sample 13 to be analyzed has the specified analysis accuracy ^A σ _m since appears the calculated peak measurement time T _P obtained, based on the displayed peak measurement time T _P i.e. total measurement time, whether the specified analytical precision ^a sigma _m is appropriate easily determined Thus, measurement can be performed on the sample 13 to be analyzed with appropriate time and analysis accuracy.

If the composition of the representative sample 3 is unknown, the desired analysis accuracy input to the first calculating means 14 is equivalent to the relative accuracy ^{A of the} net intensity which is considered to be equivalent to the relative accuracy of the concentration. σ _R (anonymous number). In this case, the peak measurement time T _{P and the} like are calculated by using ^A σ _m / ^S W in the above equation (1) or (6), as is clear from the equation (5).
^It is based on the formula ^A σ _R.

Further, in the device of the first embodiment,
When the composition of the representative sample 3 is known, the third calculating means 16 sends the element concentration W in the sample 13 to be analyzed.
Is specified and entered. Then, the third calculating means 1
6, the peak intensity is stored in the measurement unit 12 ^S I _P
And based on the background intensity ^S I _B, to calculate the analytical precision sigma _m, and the detection limit (mass%) at each concentration W within the specified range. The display means 19 displays the calculated analysis accuracy σ _m and the detection limit at each concentration W. Here, the calculation is based on the following equation (9), and the detection limit uses a value three times as large as σ _m when W = 0.

[0033]

(Equation 9)

The equation (9) is based on the assumption that the background intensity is constant and the net intensity _IN is proportional to the density W, and the equations (2) and (3) and the following equation (1) are used.
0) and (11).

[0035]

(Equation 10)

[0036]

[Equation 11]

[0037] For example, the above-mentioned ^S I _P = 10100, ^S I
In the case of _{B = 100, h = 2,} S W = 2, the range of concentration W is designated with 5.0~0.001 (mass%), the following table 1 calculated and displayed. That is, each density W within the specified range is, for example, n × 10 ^m within the specified range.
(N is 1, 2, or 5; m is an integer) may be used.

[0038]

[Table 1]

As described above, according to the apparatus of the first embodiment, the range of the element concentration in the sample 13 to be analyzed is
For example, if it is specified assuming that it is 5.0 to 0.001 (mass%), the analysis accuracy at each concentration in the range is 0.006.
2 to 0.0007 (mass%), with a detection limit of 0.002
0 (mass%) is calculated and displayed. Based on the displayed analysis accuracy and detection limit, whether the specified analysis accuracy of 0.004 (mass%) is appropriate or not is determined.
Further, the peak measurement time 26 (s
ec) and the background measurement time 13 (sec) are more easily determined, and the sample 1
3 can be measured with more appropriate time and analysis accuracy.

When only the peak intensity is measured for the sample to be analyzed, the calculation by the third calculating means 16 is based on the following equation (12).

[0041]

(Equation 12)

This equation (12) is derived from the above equations (2), (7) and (11) and the following equation (13).

[0043]

(Equation 13)

[0044] When the composition of the representative sample 3 is unknown, the third calculating means 16, the concentration of the element concentration W of the elements in the sample 13 to be analyzed in the representative sample 3 ^S W The range of the ratio (so-called relative density) W / ^SW is designated and input. Then, the third calculating means 16, the peak intensity is stored in the measurement unit 12 ^S I on the basis of _P and background intensity ^S I _B, the analysis accuracy of the concentration ratio W / ^S W within the specified range σ Calculate _R and detection limit (anonymous number). Here, the analysis accuracy σ
_R is the relative accuracy σ _R (absolute number) of the net intensity, which is considered to be equivalent to the relative accuracy of the concentration, similarly to the desired analysis accuracy input to the first calculating means 14, and the detection limit is W / ^S
A value three times as large as σ _R when W = 0 is used. This calculation is based on the equations (5) and (9) when the peak intensity and the background intensity are measured for the sample 13 to be analyzed, and when the peak intensity and the background intensity alone are measured, the equation (5) is used.
And (12). Display means 19 displays the analysis accuracy sigma _R and detection limits at each concentration ratio W / ^S W that has been calculated.

[0045] That is, not limited to the case described with reference to Table 1, and when to measure only peak intensity ^S I _P for the sample 13 to be analyzed, even if the composition of a typical sample 3 is unknown, The third calculating means 16 and the display means 19 determine the element concentrations W, W /
By specifying assume the scope of ^S W, the concentration, etc. W of the range, accuracy of analysis sigma _m in W / ^S W, sigma _R, and the detection limit is displayed is calculated, analysis as their display Based on the accuracy σ _m , σ _R and the detection limit, it becomes easier to judge whether the specified analysis accuracy ^A σ _m , ^A σ _R is appropriate, and more appropriate time and analysis accuracy for the sample 13 to be analyzed. Can be measured at

Next, an apparatus according to a second embodiment of the present invention will be described. First, as shown in FIG. 2, the configuration of this device is different from the first calculating unit 14 (FIG. 1) in that the second calculating unit 15 is provided instead of the first calculating unit 14 and the display content of the display unit 19 is different accordingly. Unlike the device of the first embodiment, the other points are the same, and thus the description is omitted.

That is, the control means 18 provided in the device of the second embodiment comprises the measuring means 12 and the third calculating means 1.
6 and a second calculating means 15. When the second calculating means 15 receives an instruction to measure only the peak intensity of the sample 13 to be analyzed, the second calculating means 15
Based on the peak intensity and the background intensity stored in (1), the analysis accuracy obtained for the representative sample 3 in the designated peak measurement time is calculated. On the other hand, when receiving an instruction to measure the peak intensity and the background intensity with respect to the sample 13 to be analyzed, the second calculating unit calculates the peak intensity and the background intensity stored in the measuring unit 12 based on the instruction. Calculate the analysis accuracy obtained for the representative sample 3 at the designated peak measurement time and background measurement time.
The display unit 19 displays the analysis accuracy calculated by the second calculation unit 15, the analysis accuracy calculated by the third calculation unit, the detection limit, and the like.

Next, the operation of the device of the second embodiment will be described. The device of the first embodiment calculates and displays the measurement time at which the measurement time can be obtained from the specified analysis accuracy. However, the device of the second embodiment, on the contrary, From, calculate the analytical accuracy obtained from it,
To display. That is, the second calculating means 15
This is a case where the peak intensity and the background intensity are measured for the sample 13 to be analyzed.
Is known, the peak measurement time designated for the representative sample 3 based on the following equation (14)
^The analysis accuracy ^S σ _m obtained by the ^A T _P and the background measurement time ^A T _B is calculated.
When only the peak intensity is measured and the composition of the representative sample 3 is known, the following equation (15) is used.
, The analysis accuracy ^S σ _m obtained for the representative sample 3 at the specified peak measurement time ^A T _P is calculated.

[0049]

[Equation 14]

[0050]

(Equation 15)

The expression (14) is obtained by the expression (10),
Equation (15) is derived from (3) and (2), and equation (15) is derived from previous equations (13), (7) and (2).

When the composition of the representative sample 3 is unknown, the above formulas (5) and (1) are used depending on whether the background intensity of the sample 13 to be analyzed is also measured.
4) Alternatively, the analysis accuracy ^S σ _R is calculated based on the above equations (5) and (15). Display means 19 displays the calculated analytical precision ^{S σ} _m, ^{S σ} _R.

As described above, according to the apparatus of the second embodiment, for the representative sample 3 whose composition is similar to the sample 13 to be analyzed, the analysis accuracy obtained at the specified measurement times ^A T _P and ^A T _B is obtained. ^{Since S} σ _m and ^S σ _R are calculated and displayed,
Based on the displayed analysis accuracy ^S σ _m , ^S σ _R , it becomes easy to determine whether or not the specified measurement time ^A T _P , ^A T _B is appropriate. Measurements can be made with high accuracy.

Also, in the device of the second embodiment,
3 Calculation means 16 and display means 19
Element concentration W, W /^SThink of the range of W
If specified and specified, based on previous equations (9), (12), etc.
And each concentration W, W /^SMinutes in W
Analysis accuracy σ_m, Σ_R, And detection limits are calculated and displayed
This is similar to the device of the first embodiment. Used for calculation
In the apparatus of the first embodiment, the measured measurement time
Analysis accuracy^Aσ_m,^Aσ_RFrom the first calculation means
Things T_P, T_BHowever, in the device of the second embodiment,
Specified ^AT_P,^AT_BOnly differs in that
It is. Therefore, according to the device of the second embodiment, the table
W, W /^SAnalysis accuracy σ at W_m,
σ_RAnd the specified measurement time based on
^AT_P,^AT_BIs easier to determine if
More appropriate time for sample 13 to be analyzed.
Measurement can be performed with analytical accuracy. In addition, the first device
Both the calculating means 14 and the second calculating means 16 may be provided.
No.

In the above description of the embodiment, the measurement point of the background is the spectral angle 2θ from the peak measurement position.
In this case, one point is separated by about 0.1 to 1 degree, but two points may be used. In this case, the ratio h ₁ (h ₁ = T _P / T _B1 ) of the peak measurement time T _P to the first background measurement time T _B1 ,
In addition, the ratio h ₂ (h ₂ = T _P / T _B2 ) between the peak measurement time T _P (sec) and the second background measurement time T _B2 may be specified. The total measurement time T is T = T _P + T _B1 + T _B2
Becomes In this case, the following expressions (16) and (17) are used instead of the expressions (2) and (3).

[0056]

(Equation 16)

[0057]

[Equation 17]

The background removal coefficients k ₁ and k ₂ are
Usually, it is obtained from the relationship between the peak measurement position and each background measurement position. Note that these equations (16),
(17) includes the case where only one point is measured in the background (k ₂ = 0), in which case k ₁ = 1 is often set, and the above-described embodiment is also such ( Equations (2) and (3)).

In the case where the concentration is high, the concentration and the intensity are not in a proportional relationship, and the formulas (10) and (11) do not hold, if the composition of the whole sample is known, the theoretical matrix correction constant is calculated. It can also be used to calculate concentration accuracy.

[0060]

As described above in detail, according to the present invention, in a fluorescent X-ray analysis, a measurement time at which a specified analysis accuracy can be obtained for a representative sample whose composition is close to that of a sample to be analyzed is obtained. Alternatively, since the analysis accuracy obtained at the specified measurement time is calculated and displayed, it is easy to determine whether the specified analysis accuracy is appropriate based on the displayed measurement time, etc. Measurement can be performed with appropriate time and analytical accuracy. Moreover, the sample to be analyzed
If it is specified assuming the range of element concentration etc. in
Analysis accuracy and detection limit at each concentration in the range
Since they are calculated and displayed, their displayed analytical accuracy
And the specified analysis accuracy or based on the detection limit or
It is easier to determine whether the measurement time is appropriate,
More appropriate time and analysis accuracy for the sample to be analyzed
Can be measured.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a fluorescent X-ray analyzer according to a first embodiment of the present invention.

FIG. 2 is a schematic view showing a fluorescent X-ray analyzer according to a second embodiment of the present invention.

[Explanation of symbols]

1: X-ray source, 2: primary X-ray, 3: representative sample, 4, 6
... Secondary X-ray (fluorescent X-ray), 8 ... sample stage, 10 ... detection means, 12 ... measurement means, 13 ... sample to be analyzed, 14 ... first calculation means, 16 ... third calculation means, 19 ... display means.

Continuation of the front page (56) References JP-A-5-133910 (JP, A) JP-A-7-63711 (JP, A) Glen F. Noll (translated by Itsuo Kimura and Ei Sakai), Radiation Measurement Handbook, Japan, Nikkan Kogyo Shimbun, 113 (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 23/00-23/227

Claims (2)

(57) [Claims] A sample stage on which a sample is fixed; an X-ray source for irradiating the sample with primary X-rays; a detecting means for measuring the intensity of secondary X-rays generated from the sample; Measuring means for irradiating primary X-rays from the X-ray source, causing the detecting means to measure the peak intensity and background intensity of fluorescent X-rays generated from the elements in the sample, and storing the measured intensities; When an instruction to measure only the peak intensity for the sample to be analyzed is received, the analysis accuracy specified for the representative sample is obtained based on the peak intensity and the background intensity stored in the measuring means. The peak measurement time to be measured is calculated, and when an instruction to measure the peak intensity and the background intensity of the sample to be analyzed is received, the peak intensity and the peak intensity stored in the measurement unit are received. A first calculating means for calculating a peak measurement time and a background measurement time at which the specified analysis accuracy is obtained for the representative sample based on the background intensity; and a peak measurement time calculated by the first calculation means. or display means for displaying the peak measurement time and background measurement time, the range of concentration of elements in the sample to be analyzed or analyzed,
The concentration of the element in the sample of interest and the
The range of the ratio to the concentration of the element to be measured is specified,
To the peak and background intensities stored in
Based on each concentration or concentration ratio within the specified range
Calculation to calculate analysis accuracy and detection limit
Means, and the display means displays the analysis accuracy calculated by the third calculation means.
X-ray fluorescence analyzer that displays the degree and the detection limit . 2. A sample stage on which a sample is fixed, an X-ray source for irradiating the sample with primary X-rays, detection means for measuring the intensity of secondary X-rays generated from the sample, Measuring means for irradiating primary X-rays from the X-ray source, causing the detecting means to measure the peak intensity and background intensity of fluorescent X-rays generated from the elements in the sample, and storing the measured intensities; When receiving an instruction to measure only the peak intensity for the sample to be analyzed, based on the peak intensity and the background intensity stored in the measuring means, at the peak measurement time designated for the representative sample. After calculating the obtained analysis accuracy and receiving an instruction to measure the peak intensity and the background intensity for the sample to be analyzed, the peak intensity and the peak intensity stored in the measurement means are received. A second calculating unit that calculates an analysis accuracy obtained at the designated peak measurement time and the background measurement time for the representative sample based on the background intensity; and analyzing the analysis accuracy calculated by the second calculation unit. Display means for displaying , the range of element concentration in the sample to be analyzed, or analysis
The concentration of the element in the sample of interest and the
The range of the ratio to the concentration of the element to be measured is specified,
To the peak and background intensities stored in
Based on each concentration or concentration ratio within the specified range
Calculation to calculate analysis accuracy and detection limit
Means, and the display means displays the analysis accuracy calculated by the third calculation means.
X-ray fluorescence analyzer that displays the degree and the detection limit .