JP3151699B2 - Fabrication method of optical circuit components - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an optical circuit component used in fields such as optical communication and optical information processing. This optical circuit component performs a predetermined function of the optical waveguide circuit by aligning and connecting an independent optical waveguide having a simple structure of the optical waveguide circuit and an optical fiber of an optical fiber array component corresponding to the optical waveguide. Since the optical axes of the optical waveguide group and the optical fiber of the optical fiber array component corresponding to the optical waveguide group can also be aligned and connected at the same time, the optical waveguide circuit and the optical fiber array component can be easily and accurately connected . It is what was constituted .

[0002]

2. Description of the Related Art Various optical components have been developed in fields such as optical communication and optical information processing. One of these optical components is an optical waveguide circuit formed from an optical waveguide. This optical waveguide circuit has a feature that a highly integrated and highly functional optical circuit can be configured. It is effective to use an optical fiber in order to efficiently input and output light to and from the optical waveguide circuit. For that purpose, a high precision and simple optical fiber connection technology is used to connect the optical waveguide circuit and the optical fiber. Need to be connected.

FIG. 2 is a configuration diagram of a conventional optical waveguide circuit.
1 is an optical waveguide circuit, 2 is an optical waveguide constituting the optical waveguide circuit 1, 3 and 6 are optical fiber array components connected to the optical waveguide circuit 1, 4 and 7 are optical fibers constituting the optical fiber array component Reference numerals 5 and 8 denote optical fiber fixing parts constituting the optical fiber array part. θ is the alignment axis. The optical fiber is connected only to the optical waveguide related to the function of the optical waveguide circuit (here, the 1 × 8 demultiplexing / multiplexing function). The alignment of the optical fiber and the optical waveguide is
This is performed using light that has been actuated ( demultiplexed ) in an optical waveguide circuit.

[0004]

However, in the above-mentioned prior art, the intensity of field-multiplexed light obtained by multiplying the optical demultiplexing function of the optical waveguide circuit is reduced due to the principle loss due to demultiplexing. . For example, the principle loss due to field demultiplexing of a 1 × 64 demultiplexer is 18 dB. In the case of performing alignment using such low-intensity light, there is a problem that the S / N ratio deteriorates when light is detected, so that the alignment accuracy is deteriorated. The alignment between the optical waveguide circuit and the optical fiber array component must be performed in the x, y, z directions and the θ direction. When one optical waveguide is connected to an optical fiber, the alignment in the x, y, and z directions is performed by detecting the optical output from the optical waveguide. However, the surface alignment in the θ direction cannot be performed using the light output, and the surfaces are aligned while actually observing the connection surface, and there is a problem that it takes time. Furthermore, when the optical waveguide circuit has a function such as optical path switching or optical wavelength selection, it is necessary to switch the optical path or select a wavelength at the time of alignment, which complicates the alignment apparatus or the alignment method. The problem arises. SUMMARY OF THE INVENTION An object of the present invention is to solve the problem of deterioration and complication of alignment accuracy that occurs when an optical waveguide circuit is connected to an optical fiber in accordance with the increase in the number of cores or the functionality of the optical waveguide circuit, thereby achieving high accuracy and simple operation. To provide an optical circuit component manufacturing method for connecting an optical waveguide circuit and an optical fiber.

[0005]

SUMMARY OF THE INVENTION According to the present invention, there is provided an optical waveguide circuit and an optical fiber array for solving the above-mentioned problems.
To produce an optical circuit component by connecting
An optical waveguide circuit composed of at least three optical waveguides
That is, at least one is an optical waveguide having a predetermined function.
And two are independent optical waveguides not involved in the predetermined function.
And these two independent optical waveguides are arranged at a predetermined interval.
And adjacent to one end of the optical waveguide circuit.
And arrange these two independent optical waveguides in front of each other.
For the part where the optical waveguide having the specified function is located
An optical waveguide circuit that can be separated linearly
Manufacturing, and an optical fiber including two single-core optical fibers.
The va array can determine the position of these two optical fibers.
At a predetermined interval corresponding to the position of the independent optical waveguide
And one end of the optical fiber array
The optical fiber fixed to the V-groove part
Producing an array component, the optical waveguide circuit and the light
The fiber array component is connected to the independent optical waveguide
For aligning using an optical fiber corresponding to a simple optical waveguide
Floor, the optical waveguide circuit and the optical fiber array component
Fixing, the independent optical waveguide and the optical waveguide
And removing the corresponding optical fiber.
And Reruko is obtained by the manufacturing method of the optical circuit components and features.

[0006] The predetermined function is to demultiplex and multiplex the optical output.
Function, wavelength selection function, or optical path
Is one of the functions to switch between
A method for manufacturing an optical circuit component according to claim 1 .

[0007]

According to the method of manufacturing an optical circuit component of the present invention, an independent optical waveguide having a simple structure of an optical waveguide circuit and an optical fiber of an optical fiber array component corresponding to the optical waveguide are aligned and connected. Since the optical axis of the optical waveguide group having a predetermined function of the optical waveguide circuit and the optical fiber of the optical fiber array component corresponding to the optical waveguide group can be simultaneously aligned and connected, the optical waveguide circuit and the optical fiber array component can be connected. It is possible to provide an optical circuit component that is connected with high accuracy and simply. Further, the two independent optical waveguides and the one-core optical fiber for alignment corresponding to the independent optical waveguides are integrated at one end, respectively, so that the two independent optical waveguides and the The area of the substrate from which the alignment optical fiber corresponding to the independent waveguide is to be removed is increased, so that it is easier to remove the substrate on which the two are arranged, and the two independent optical waveguides are removed. When removing the alignment optical fiber corresponding to the independent waveguide, it is possible to reduce the influence on the optical waveguide having the predetermined function and to remove the substrate on which the two are arranged. Become. In addition, since the independent optical waveguide having the simple structure of the optical waveguide circuit can be arranged without depending on the optical waveguide group having a predetermined function of the optical waveguide circuit, a free design is possible. Furthermore, it is possible to perform the adjustment using the surface alignment light output in the rotation direction about the optical axis. Therefore, the object of the present invention is to provide a method for manufacturing an optical circuit component for connecting an optical waveguide circuit and an optical fiber of an optical fiber array component with high precision and ease, which is an unnecessary part of the optical waveguide circuit and the optical fiber array component. Can be achieved more easily and while ensuring the safety of the optical waveguide having the predetermined function.

[0008]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view showing the configuration of an embodiment of the optical circuit component of the present invention. In this figure, 45
Is an optical waveguide circuit having a wavelength selection function, 46 is an independent optical waveguide, 47 is an optical waveguide constituting a wavelength selection filter, 4
8 is a 3 dB directional coupler, 49 is a wavelength selective reflector, 50
Is a glass plate, 51 is an optical fiber array component having four single-core optical fibers 52, 53 is a V-groove component that serves as a guide for aligning the single-core optical fibers 52, and 54 is a V-groove that forms a single-core optical fiber 52. Holding lid for fixing to the groove of the part 53,
aa 'is a cutting line.

The optical waveguide circuit 45 comprises an optical waveguide 47 constituting a set of wavelength selective filters and two independent optical waveguides 46. The wavelength selection filter includes a 3 dB directional coupler 48 and a wavelength selection reflector 49.
The operation of the wavelength selection filter will be briefly described. The wavelength selective reflector 49 reflects light of a specific wavelength λ1. When light having a wavelength λ1 is input from one port of the wavelength selective filter, the light is reflected by a wavelength selective reflector 49 via a 3 dB directional coupler 48, passes through the 3 dB directional coupler 48 again, and Output from the other port. Light other than the wavelength λ1 is emitted from the opposite end face without being reflected by the wavelength selective reflector 49.

[0010] placed in the manufacturing method of the optical circuit components of the present invention
The optical waveguide circuit 45 was formed on a silicon substrate by using a flame deposition method. The cross section of both optical waveguides 46 and 47 was a rectangle of 6 × 6 μm. A glass plate 50 was bonded to the input end of the optical waveguide circuit 45 using an ultraviolet curing adhesive. Further, the input and output ends of the optical waveguide circuit 45 were polished at an angle of 8 degrees in order to control the reflected light returning from the end face.
The optical fiber array component 51 was manufactured by arranging four single-core optical fibers 52 in a V-groove component 53, fixing them with a holding lid 54, and then fixing them with an ultraviolet curable adhesive.
The optical waveguide circuit 45 and the optical fiber array component 51 are:
After centering using the independent optical waveguide 46, it was fixed using an ultraviolet curable adhesive. Finally, cutting was performed along the cutting line a-a 'to remove the independent optical waveguide 46.

For alignment, the optical output at wavelength λ 1 is -2.5 dB.
m laser light was used. The laser light enters the light input ends P1 and P2 of the independent optical waveguide 46, and the light output ends P1 and P2.
Alignment was performed using the outputs from 1 'and P2'. The light output at the time of alignment was -3.5 dBm, and the light intensity was sufficient to perform the alignment stably and easily. In the prior art, when alignment is performed using light of wavelength λ1, since the input and output ends of the light are the same end, alignment is performed only after surface alignment in the θ direction. Was impossible. Therefore, it is necessary to perform alignment using light other than the wavelength λ1.

By using the method of manufacturing an optical circuit component according to the present invention , alignment using light having a wavelength of λ1 is enabled. The connection between the optical waveguide 47 and the single-core optical fiber 52 constituting the wavelength selection filter was performed accurately with an excessive loss due to axial misalignment of 0.5 dB or less as an average of all ports. Therefore, it has been clarified that the method for manufacturing an optical circuit component of the present invention can connect the optical waveguide circuit 45 and the optical fiber array component 51 with high accuracy and ease. Although the embodiment of the method for manufacturing an optical circuit component relates to an optical waveguide circuit constituting a wavelength selection filter, the present invention is also applicable to an optical waveguide circuit having another function in which the light input / output end is the same end. The present invention is effective. In this embodiment, the size of the manufactured optical waveguide circuit is reduced. Although the independent optical waveguide portion is cut and removed, the same effect can be obtained without removing it.

[0013]

As described above, the optical circuit of the present invention
In the method of manufacturing a component, at least three optical waveguides are used.
At least one of the formed optical waveguide circuits is a predetermined device.
Optical waveguides having two functions.
Are independent optical waveguides, and these two independent
The optical waveguides are adjacent to each other at a predetermined interval, and
Arranged along one end of the optical waveguide circuit, these two
An optical waveguide having the predetermined function, wherein the independent optical waveguide is
Can be separated linearly from the part where
To fabricate an optical waveguide circuit as described above, and two single-core light
A fiber optic array that includes fibers is one of these two
The position of the optical fiber is paired with the position of the independent optical waveguide.
So that they are adjacent to each other at a predetermined interval, and
Arranged along one end of the optical fiber array,
Producing an optical fiber array component fixed to the product,
The optical waveguide circuit and the optical fiber array component are
Standing optical waveguide and optical fiber corresponding to this independent optical waveguide
Aligning the optical waveguide circuit with the optical waveguide circuit;
Fixing the fiber array component and the independent light
Removing the waveguide and the optical fiber corresponding to the waveguide;
And the simple structure of the optical waveguide circuit.
Independent optical waveguide of pure structure and corresponding to this optical waveguide
Align and connect the optical fiber of the optical fiber array
An optical waveguide group having a predetermined function of the optical waveguide circuit;
Of optical fiber array components corresponding to various optical waveguide groups
Since the optical axis with Iva can be aligned and connected at the same time,
Waveguide circuits and optical fiber array components can be easily and accurately formed
A connected optical circuit component can be provided. further,
The two independent optical waveguides are paired with the independent optical waveguide.
The corresponding one-core optical fiber for alignment is combined at each end.
The two independent optical waveguides and the independent
Substrate to be removed with alignment optical fiber corresponding to waveguide
The area of the substrate is enlarged, and the substrate on which the two are arranged can be removed.
And the two independent optical waveguides
And the alignment fiber corresponding to this independent waveguide are excluded.
When leaving, give to the optical waveguide having the predetermined function
Removing the substrate on which both are disposed with less influence
It becomes possible . In addition, since the independent optical waveguide having a simple structure of the optical waveguide circuit can be arranged without depending on the optical waveguide group having a predetermined function of the optical waveguide circuit, a free design is possible. Further, it is possible to use the surface alignment light output in the rotation direction about the optical axis. You
That is, according to the method for manufacturing an optical circuit component according to the present invention,
The intended purpose is to achieve high precision and simple optical waveguide circuit and optical fiber.
Optical circuit components that connect to the optical fiber
The method of manufacturing the optical waveguide circuit and the optical fiber array component
Of these, unnecessary portions can be removed more easily, and
Achieved by ensuring the safety of the optical waveguide having the function of
This has the effect .

[Brief description of the drawings]

FIG. 1 is a perspective view of an embodiment of the present invention.

FIG. 2 is a configuration diagram of a conventional optical circuit component.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 optical waveguide circuit 2 optical waveguide 3 optical fiber array component 4 optical fiber 5 optical fiber fixing component 6 optical fiber array component 7 optical fiber 8 optical fiber fixing component 45 optical waveguide circuit 46 independent optical waveguide 47 light guide constituting wavelength selective filter Waveguide 48 3 dB directional coupler 49 Wavelength selective reflector 50 Glass plate 51 Optical fiber array component 52 Single core optical fiber 53 V groove component 54 Holding lid

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hiroshi Nakagomi 1-6-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (56) References JP-A-2-12226 (JP, A) JP-A Heisei JP-A-1-283507 (JP, A) JP-A-8-262266 (JP, A) JP-A-8-190028 (JP, A) JP-A-63-163408 (JP, A) A) Hikaru 2-131705 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) G02B 6/12-6/14 G02B 6/26 G02B 6/30

Claims (2)

(57) [Claims] An optical waveguide circuit is connected to an optical fiber array.
To a method of making an optical circuit component, the configured optical waveguide circuit from at least three optical waveguides
At least one of them is an optical waveguide having a predetermined function.
And two are independent optical waveguides which are not involved in the predetermined function.
A road, these two independent optical waveguide becomes a predetermined interval
So that they fit together and line up with one end of the optical waveguide circuit
And dispose these two independent optical waveguides in the predetermined
Linear to the part where the optical waveguide with function is located
Producing an optical waveguide circuit that can be separated
The step and the optical fiber array including two single-core optical fibers
The positions of these two single-core optical fibers are
Adjacent at predetermined intervals corresponding to the road position
And aligned with one end of the optical fiber array.
To create an optical fiber array part fixed to the V-groove part.
Manufacturing the optical waveguide circuit and the optical fiber array component.
Standing optical waveguide and optical fiber corresponding to this independent optical waveguide
And aligning the optical waveguide circuit with the optical fiber array component.
The independent optical waveguide and an optical fiber corresponding to the optical waveguide.
And removing the base.
Of manufacturing optical circuit components . 2. The method according to claim 1, wherein the predetermined function is to multiplex / demultiplex an optical output.
Function, wavelength selection function, or optical path
Service that is one of the functions
The method for producing an optical circuit component according to claim 1 .