JP3139359B2 - Single-wafer coating method and color filter manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single-wafer coating method, and more particularly to a method for performing single-wafer coating using a die coater for precision coating. In addition to forming a coating film on a substrate in order to form a color filter for a liquid crystal display, for example, a liquid state such as a semiconductor manufacturing field such as a resist coating and an optical filter manufacturing field such as an ultraviolet absorbing layer coating. This is suitable for a case where the above-mentioned coating material is thinly and uniformly applied on the surface of the material to be coated supplied in a single-wafer method.

[0002]

2. Description of the Related Art Conventionally, a small substrate such as a plastic substrate for an optical filter, a glass substrate for a liquid crystal display, or a glass substrate for a color filter, having a length of less than 1 m in a coating direction. It is strongly demanded that various paints be applied thinly and uniformly.
In order to form a coating film on such a substrate industrially, a single-wafer coating method is used in which the material to be coated is supplied one by one to a coater, the coating material is applied, and the coating material is conveyed to the next process such as drying. Will do.

[0003] In forming a coating film on a material to be coated, a spin coater, a bar coater, and a roll coater are widely used.

[0004] Among them, a method using a spin coater is as follows.
This is a method widely used for coating a photoresist on a semiconductor wafer, and a coating film can be formed by dropping a coating material on the center of the surface of a rotating workpiece. The coating film obtained by this method can have a film thickness which is fairly accurately uniform over the entire range by setting the kind of the paint suitable for the method. However, the amount of paint used to obtain a coating film having a predetermined thickness is extremely large, which is uneconomical. In addition, paint may adhere to the edges and the back surface of the material to be coated, or the paint scattered in the apparatus may be gelled or solidified, resulting in poor process stability and cleanliness. It causes quality deterioration.

A method using a roll coater is a method of transferring a coating material to a material to be coated via a rubber roll, and is used for coating a long material to be coated or a roll-shaped material to be wound. It can be performed. However, since the paint is sequentially sent from the pan to the application roll and then to the material to be coated, the paint is exposed to the air for a long time. Also easily occur. As a result, the quality of the coated product is reduced.

The method using a bar coater is a method in which a coating material is applied to a material to be coated using a bar in which a thin wire is wound around a rod. In this method, the wire wound on the rod comes into contact with the material to be coated, so there is an inconvenience that streaks of the coating film easily enter.

In view of such inconvenience, use of a die coater has recently been proposed. Proposals for applying a die coater to the production of a color filter have been proposed in JP-A-5-11105 and JP-A-5-14240.
7 and JP-A-6-339656.

[0008] Die coaters have been widely used for thick film coating and continuous application of high-viscosity paints. If a die coater is used to form a coating film on a material to be coated, US Pat. No. 4,230,793, U.S. Pat.
Coating methods such as a curtain flow method, an extrusion method, and a bead method are known as described in US Pat. No. 6,885 and US Pat. No. 2,761,791. Above all, in the above-mentioned bead method, paint is discharged from a slit provided in a die coater die, and a paint pool called a paint bead is formed between the die and a work material that relatively moves while maintaining a certain interval. In this state, the paint is drawn out as the material to be coated travels to form a coating film.The same amount of paint as the paint consumed by the coating film formation is supplied from the slit to continuously form the coating film. If the bead method of forming a film is adopted, the formed coating film can achieve uniformity of the film thickness with considerably high accuracy. In addition, there is almost no waste of paint, and since the paint feed path is sealed until it is discharged from the slit, it is possible to prevent the deterioration of paint and the intrusion of foreign matter, and to maintain high quality of the obtained coating film. it can.

[0009]

However, if an attempt is made to form a coating film by using a bead method with a die coater on a material supplied in a single-wafer system, the coating on the material to be coated is not possible. Inevitably becomes intermittent, so regardless of whether the paint is being discharged continuously or intermittently, the paint is applied at the coating start position and coating end position of the material to be coated. The bead is disturbed or the paint bead disappears. Then, it becomes difficult to maintain a stable coating bead suitable for coating over the entire range of coating, and a uniform coating film cannot be obtained until the coating bead becomes stable.

[0010] Such inconvenience occurs similarly in the case of a short workpiece and a long workpiece, but in the case of a short workpiece. , While the ratio of the length to obtain a coating film of uniform thickness with respect to the entire length is small,
In the case of long coated materials, this ratio increases,
As described in JP-B-43-24133, "bead coating cannot be applied to a continuous support because an intermittent support cannot maintain a stable bead." Coating by a die coater was performed on the material to be coated. Also, Japanese Unexamined Patent Publication No.
Neither -11105 nor JP-A-5-142407 does not disclose the inconvenience of coating these short intermittent supports and the means for solving them. Also,
In Japanese Patent Application Laid-Open No. Hei 6-339656, pressurizing is applied to the paint supply means only in advance of coating for a time estimated in advance in order to compensate for a time delay of liquid sending which is unavoidable in principle due to the use of pressurized feeding. However, there is no description of a method for controlling the formation or disappearance of a paint bead or a method of suppressing the disturbance of a paint bead. In this case, too, the proportion of the length of the material to be coated that cannot be effectively utilized is large. Therefore, waste of the material to be coated is significantly increased. In other words, since the ratio of the length of the coating film having a uniform film thickness to the entire length of the coating material is small, the only effective use ratio for the coating material is small. The features of the die coater such as economy, high-precision thin film coating, and paint tightness cannot be effectively utilized.

[0011] Among the known techniques, there are disclosures of techniques focusing on these coating start portions. For example, even in the case of coating on a continuous support, Japanese Unexamined Patent Publication No. 1-213641 discloses an unstable coating by temporarily increasing or decreasing the pressure applied before and after the bead at the start of coating in which the web approaches the coating machine. It is described that the state of the bead at the forefront is stabilized, and a method of promoting bead formation by temporarily increasing the discharge speed of the paint as described in JP-A-63-148251 is described. I have. U.S. Pat. No. 4,938,994 also discloses a method of forming a connection bead by generating a pulse with respect to a short sheet-like substrate.

However, even when any of the above methods is adopted, both the film thickness distribution in the coating direction and the film thickness distribution in the width direction, which is a direction substantially perpendicular to the coating direction, are uniformly and stably maintained immediately after the start of coating. It was difficult to make them compatible so that they could be applied.

The present invention has been made to solve the above problems, and is supplied in a single-wafer system without impairing the features of a die coater such as economy, high-precision thin-film coating, and paint tightness. It is an object of the present invention to provide a single-wafer coating method capable of stably forming a coating film having a uniform film thickness on a material to be coated.

[0014]

The condition of the paint bead required for uniform and stable coating by the above-mentioned bead method is defined by the force for fixing the paint bead between the paint discharger and the material to be coated. The power to take away is in a state of being exactly balanced. The former force may be, for example, a surface tension that forms a meniscus, and the latter force may be a shear force accompanying the movement of the material to be coated. Therefore, the shape of the bead in the stable state depends on the paint discharge speed, coating speed,
Base specifications, clearance coating conditions, viscosity, specific gravity,
It is uniquely determined by the physical properties of the paint such as surface tension, the coating environment such as temperature, etc., and even if the bead is temporarily disturbed by external factors etc., the stable state is maintained by self-repair. It is a kind of thing.

[0015] Under such a fixed coating condition, the coating conditions for uniform and stable coating are determined uniquely, but the coating is further performed at a higher speed for industrial and economic reasons. There is a request to work. In such a case, U.S. Pat. No. 2,681,294 discloses a technique of providing a decompression chamber or the like and sucking the bead in a direction opposite to the running direction of the web. By thinning the film, the force for removing the paint bead increased, and it was no longer possible to withstand the surface tension of the liquid alone. It can be understood that this is a technique for positively stabilizing beads.

As a result of considering and considering these analyses, the applicants have found that in order to obtain a coating film having a uniform and stable film thickness in the coating direction and in the direction perpendicular thereto immediately after the start of coating, The discharge device and the material to be coated are relatively stopped to discharge the paint, and to ensure that the substrate is wet over the entire width of the slit opening,
Supply a sufficient amount of paint to form a paint bead in a stable coating state.Before the start of coating, a unique coating must be applied between the coating device and the material to be coated under the coating conditions. It has been found that it is desirable to start moving the material to be coated after forming a paint bead having substantially the same shape as the paint bead in the stable coating state to be determined.

According to a first aspect of the present invention, there is provided a single-wafer coating method in which at least one of a stage for holding a material to be coated and a paint discharger while supplying the paint to a paint discharger having a slit for discharging paint by the paint supply device. Is a sheet-fed coating method for forming a coating film on the surface of the material to be coated by relatively moving the coating material, wherein the slit tip opening of the paint discharge device and the material to be coated are
The paint bead formed over the entire width of the coating between
Before the material reaches the coating end position, the material
The supply of paint to the
When the end position is reached or past the coating end position
Later, by sucking through the paint discharge device,
Collect paint that is no more than sufficient to extinguish the paint bead and
This is a method to prevent adhesion on the coating material. Paint bead
The amount of paint that is enough to extinguish the lip of the base
For the surface tension of paint in the space between the lower surface and the workpiece
To the coating film from the paint bead to the coating end point
Since the volume of paint used has been reduced,
The box indicates the front lip 71 of the paint discharger shown in FIG.
Lf (mm) is the lower end length of the rear lip 72
Is Lr (mm), and the opening width of the slit 14 tip opening is h
(Mm) and start coating of the paint discharger 7 and the material 9 to be coated.
C (mm), distance clearance 11 between the parts is applied
The width of the coating in the direction perpendicular to the coating direction of the coating is W (mm).
And the thickness of the applied coating film (8) is d (mm),
Lf × C × W + (h + Lr) × (C−d) × W at maximum
Not exceed h × (Cd) × W at least.
It is preferable not to rotate.

According to a second aspect of the present invention, there is provided a paint supply apparatus.
To paint dispenser with slit for paint dispensing
Stage or coating that holds the material to be coated while supplying
Relatively moving at least one of the material discharge devices
Is a single-wafer coating method that forms a coating film on the surface of the material to be coated.
Therefore, after the coating is completed or before the coating starts,
Operate to discharge the paint from the paint discharger,
Filling the voids that may occur in the paint with paint
After wetting the tip of the paint discharger with paint,
Wipe off excess paint adhering to the tip of the paint discharger
Method to make the tip of the slit of the paint discharge device substantially uniform
It is.

The sheet coating method according to claim 3, coating material delivery device
Pump as a paint supply device that supplies paint to the machine
It is a method of adopting.

According to a fourth aspect of the present invention, there is provided a paint supplying apparatus.
Is a method of adopting a syringe type pump.

According to a fifth aspect of the present invention, there is provided a sheet discharging method, comprising:
Of the paint bead at the tip of
In this method, a positive pressure or a negative pressure is applied.

According to a sixth aspect of the present invention, there is provided a color filter manufacturing method,
A color using the sheet-fed coating method according to any one of claims 1 to 5.
This is a method for manufacturing a filter.

According to a seventh aspect of the present invention, there is provided a color filter manufacturing method,
In the color filter manufacturing process, protective layers, colored layers,
By applying at least one layer of a fat light-shielding layer and a resist
is there.

According to the single-wafer coating method of the present invention, a paint supply device supplies a paint to a paint discharge device having a slit for discharging the paint, and a stage or a paint discharge device for holding a material to be coated. In forming a coating film on the surface of the material to be coated by moving at least one of the members relatively, the gap between the slit tip opening of the paint discharger and the material to be coated is formed.
Paint bead formed over the entire width of the
Before the work reaches the coating end position, the work
Supply of paint to be applied is stopped, and then
At the time of arrival or after passing the coating end position
The paint is sucked through the paint discharge device
Because we collect paint that is no more than enough to extinguish the bead
Thinning or coating due to insufficient liquid supply or excessive recovery.
Paint that has formed a coating bead is left on the workpiece
Coating can be prevented from thickening
A good coating film having a uniform film thickness can be obtained up to the portion.

In the sheet-fed coating method according to the second aspect, the coating
Paint discharge device with slit for discharging paint by feeding device
The stage that holds the material to be coated while supplying paint to the
Or relatively move at least one of the paint discharger
In forming a coating film on the surface of the material to be coated,
To operate the paint supply device after coating is completed or before coating is started.
To discharge the paint from the paint discharge device
Fill the voids that may occur in the paint with paint,
Wet the tip of the paint ejection device with paint and then paint
Since excess paint adhering to the tip of the discharge device is wiped off
Because there is, just before coating of each sheet
Initializes the paint condition at the tip of the slit of the discharge device.
As a result, a uniform and good coating is obtained continuously,
Lubricate and wipe the tip slit of the paint discharger with the paint itself
It removes unnecessary dust and removes the
Life can be extended.

According to the third aspect of the present invention, there is provided a method for discharging a paint.
Piston type as a paint supply device that supplies paint to the discharge device
Because a pump is used, quantitative supply of paint is
Can be changed.

In the case of the single-wafer coating method according to the fourth aspect, the coating
Should a syringe pump be used as the feeding device?
That the precision of the quantitative supply of paint can be improved.
In addition, a special mechanism must be added to suck the paint on the workpiece.
Can be achieved without delay.

In the case of the sheet-fed coating method according to the fifth aspect, a paint discharge
The paint bead at the tip of
Since positive or negative pressure is applied from the flow side, normal pressure
So even in areas where bead balance cannot be maintained
Since the bead can be kept stable, a uniform coating film can be formed.
The range of film thickness that can be cut can be expanded.

A method of manufacturing a color filter according to claim 6.
Then, using the sheet- fed coating method according to any one of claims 1 to 5,
Remarkably high quality because we manufacture color filters
Can be obtained inexpensively.

A method of manufacturing a color filter according to claim 7.
In the color filter manufacturing process, the protective layer
Apply at least one of a layer, a resin light shielding layer, and a resist
The quality of the relevant layer can be significantly higher.
it can.

[0031]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 2 is a schematic view showing an example of a coating apparatus in which the single-wafer coating method of the present invention is performed. The coating apparatus includes a metering pump 5 (a coating material such as a piston type metering pump represented by a syringe pump) from a paint tank 1 through a first pipe 2 provided with an on-off valve 3, a filter 6 and a switching valve 4. The paint is supplied to the switching valve 4 and the second pipe 2 from the metering pump 5.
To supply paint to the base 7 of the paint discharger. Here, the metering pump means a positive displacement pump such as a gear pump and a diaphragm pump in addition to the syringe pump.
Further, a typical base 7 includes a front lip 71 and a rear lip 72, and a front lip 71 and a rear lip 72.
The opening formed between the slits is defined by a slit 14 defined as a paint discharge port, and the paint supplied to the base 7 is discharged through the slit 14. Further, by moving the workpiece 9 by the stage 10 in a state close to the tip of the base 7, a paint bead 13 is formed by the paint discharged through the slit 14 between the base 7 and the workpiece 9, In this state, the paint is drawn out along with the movement of the material to be coated to form a coating film. Then, the same amount of paint as the paint consumed in forming the coating film is supplied from the slit to form a coating film 8 having a predetermined thickness. To form The on-off valve 3 and the filter 6 can be omitted, and the switching valve 4 can be omitted depending on the type of the metering pump 5.

In the coating apparatus having the above-described structure, it is necessary to sufficiently secure the sealing property of the paint piping system in order to ensure the quick response of the paint discharge. Although the film thickness of the coating film 8 is not particularly limited, it is particularly advantageously used for a thin film coating having a film thickness after coating and before drying of 1 to 500 μm. When the thickness of the coating film 8 is less than 1 μm, it is difficult to obtain the coating film 8 with high uniformity due to the processing accuracy of the die 7 and the restriction on the thickness accuracy of the workpiece 9. However, this is not a coating in which the effectiveness of the present invention is particularly exhibited.

The uniformity of the coating film 8 is controlled by adjusting the slit gap 12 of the die 7 shown in FIG. 3 and the clearance 11 between the die 7 and the material 9 to be coated. In the present invention, the shape of the base, the slit gap 12 and the clearance 11 are not particularly limited. For example, when a base formed by bonding two lips so as to face each other is used, the lip along the moving direction of the stage is used. It is preferable that the length of the lower surface is 0.5 mm or less for the front lip and 1 to 4 mm for the rear lip from the viewpoint of the attainment of the thin film and the stability of coating. Slit gap 1
2 is preferably set in the range of 10 to 500 μm. This is because it is difficult to process the base 7 so as to accurately maintain the slit gap 12 of less than 10 μm, and the influence of gap variation and undulation is significantly increased. Further, when the slit gap 12 exceeds 500 μm, it is difficult to realize a uniform paint flow in the slit gap 12, causing a variation in the paint discharge amount in the cross direction. As a result, a uniform coating film can be obtained. Because it becomes difficult. Further, the clearance 11 is preferably set in a range of 10 μm to 1 mm. Because 10μm
It is difficult to precisely maintain the clearance 11 smaller than the above because of limitations on the processing accuracy of the apparatus and the workpiece 9. If the clearance 11 exceeds 1 mm, it is difficult to keep the paint bead 13 stable. Further, in order to stably form the coating bead 13 and obtain the coating film 8 with high uniformity, it is preferable to accurately maintain the clearance 11 at about 1.5 to several tens times the coating film thickness. . Alternatively, a pressurizing chamber 15 or the like may be provided to increase or decrease the pressure of the paint bead 13 on the upstream side in the stage conveyance reverse direction to promote the stable formation of the paint bead 13.

Next, the sheet-fed coating method will be described with reference to a time chart shown in FIG. However, A in FIG. 4 shows a time chart of the stage traveling, and the upper side shows the forward traveling and the lower side shows the reverse traveling, respectively. B indicates the operation of adsorbing the material to be coated. C indicates an operation of a lift pin (not shown) provided on the stage 10. D is base 7
3 shows the decompression operation. E indicates a wiping operation of the base 7. F indicates elevation of the base 7. G indicates the operation of the switching valve 4, wherein the upper side indicates switching to the base side, and the lower side indicates switching to the paint tank side. H indicates the operation of the metering pump 5, the upper side indicates the discharge operation, and the lower side indicates the suction operation. I schematically illustrates a series of operations. Although not specifically shown,
It has a sensor for detecting the position of the stage 10 or the position of the workpiece 9. This sensor may be a sensor including a proximity sensor, a photoelectric sensor, or the like, or may be an encoder that detects an operation amount of a motor for driving the stage.

First, after returning to the origin of each part of the coating apparatus, the switching valve 4 is switched to the paint tank side, and the suction operation by the metering pump 5 is performed. Then, the workpiece 9 is received from a transfer machine (not shown) with the lift pins raised, and the lift pins are lowered to place the workpiece 9 at a predetermined position on the stage 10. The workpiece 9 is fixed on the stage 10 by vacuum suction. As means for fixing (holding) the workpiece 9 on the stage 10, in addition to the above-described vacuum suction, clamping using a lever to which a link mechanism is applied, holding means using a suction cup, an adhesive sheet, or the like is used. Such means are also included in the “holding” in the present invention.

After a predetermined amount of paint has been sucked from the paint tank 1 into the metering pump 5, the switching valve 4 is switched to the mouthpiece side, and the stage 10 is moved forward to move the workpiece 9 directly below the mouthpiece 7. To stop the forward running of the stage 10. Next, the base 7 is lowered, and a predetermined clearance 11 is secured by a positioning mechanism such as a linear sensor or a cotter. However, the workpiece 9 may be moved after the base 7 is lowered. By operating the metering pump 5 at substantially the same time as securing the clearance 11, the paint is supplied to the base 7 to start the discharge of the paint.
By maintaining 0 in a stopped state, wetting is ensured between the base 7 and the material 9 to be coated over the entire region in the predetermined cross direction, and the paint bead 13 which is almost the same as in the regular coating is formed.

After the paint beads 13 necessary for stable coating are formed as described above, the coating is started by moving the stage 10 forward at a predetermined speed. Further, substantially at the same time as the start of coating, the pressure in the decompression chamber is maintained at a predetermined pressure to reduce the pressure, thereby stabilizing the paint bead 13. Therefore, the paint consumed for forming the coating film by the stabilization of the coating bead 13 and the paint discharged from the slit 14 of the base 7 are balanced, and a stable coating film can be formed immediately after the start of coating. It becomes a steady coating state.

A paint bead, which is a liquid pool of a certain paint, is indispensable for performing stable coating. However, if the coating is not properly erased at the end of coating, a thick film can be formed at this portion. I will invite you. Therefore, as a means for positively controlling the disappearance of the paint bead, the supply of the paint by the metering pump 5 is stopped when the material to be coated 9 reaches a position a predetermined distance before the coating end position, Paint bead 13
The coating film is formed by so-called squeegee coating while consuming. However, the supply of the paint may be stopped when the workpiece 7 reaches the coating end position. And the material to be coated 9
When the paint reaches the coating end position, a predetermined amount of paint is sucked and collected through the slit 14 of the base 7 by inverting the metering pump 5. However, when the supply of the paint is stopped when the workpiece 7 reaches the coating end position,
The coating material 7 may be temporarily stopped at the coating end position, and the paint bead may be reliably collected. After these operations, the coating is completed by raising the base 7 and moving it away from the workpiece 9. After that, the paint is discharged by operating the metering pump 5 in order to eliminate a gap that may be formed in the slit 14 due to the suction and collection of the paint. Stage 1
Thereafter, the forward movement of the workpiece 9 is carried out to a predetermined position for transferring the workpiece 9 to the next step and stopped, the vacuum suction is released, and the lift pins are raised to raise the workpiece 9.
Is lifted, and the workpiece 9 is transferred to a workpiece transfer machine (not shown) at that position. At the same time, the paint is discharged by the metering pump 5 and the base 7 is wiped to remove the paint remaining on the tip of the base 7. Then stage 1
0 is run in reverse, and returns to a predetermined position to receive the next coating material 9, thereby completing a series of processes and preparing for coating of the next coating material 9.

By performing the series of processes described above, it is possible to greatly suppress the variation in the film thickness at the coating start portion and the coating end portion with respect to the film thickness of the steady portion obtained by the steady coating. In addition, since the coating film is formed by running the stage 10 after the coating bead 13 is formed, the distance from the end of the material 9 to be coated to the corresponding end of the steady coating film thickness is significantly reduced. Material to be coated 9
The ratio of the effective utilization coating film formation range (steady portion) to the entire length range can be increased. Further, by these effects, it is possible to maximize the advantage of the single-wafer die coater that can set the coating start point and the end point inside the material 9 to be coated.

[0041]

EXAMPLES AND COMPARATIVE EXAMPLES Example 1 Polybromide phthalocyanine green (CI Pigment Green 36) was mixed with polyamic acid as a polyimide precursor as a binder and N-methyl-2-pyrrolidone as a solvent. Weight solid content concentration 8wt obtained by dispersion
%, A coating material for forming a green colored coating film having a viscosity of 25 cPs as a coating material, and a 360 mm × 465 mm × 1.1 mm non-alkali glass substrate OA-2 (manufactured by Nippon Electric Glass Co., Ltd.)
Is adopted as the material 9 to be coated, and the slit gap 12 is set to 100
μm and the clearance 11 were set to 75 μm for coating. As the metering pump 5, a gear pump was used. The substrate transfer stage 10 was driven by using a high-precision stepping motor and controlled by a sequencer (FIG. 5). The above-mentioned paint for forming a colored coating film was charged into the paint tank 1 and the inside of the liquid feeding path up to the base 7 was filled with the paint in advance.
The lip lower surface length of the front lip and the rear lip of the base 7 was 0.5 mm and 3.5 mm, respectively. Also, in order to prevent the coating film from being formed on the portion of both ends of the glass substrate of 2 mm, the width of the leading end of the slit in the cross direction of the discharge port is 356 mm.
And The workpiece 9 is fixed on the transport stage 10 by vacuum-sucking the workpiece. The transfer stage 10 is driven to move the workpiece 9 directly below the base 7 and is stopped. At this time, the proximity sensor senses that the stage 10 has reached just below the base 7, and the metering pump 5 is driven at substantially the same time as lowering the base 7 to the above-described position for securing the predetermined clearance, and the 285 μl / The discharge of the paint is started at a rate of second, and after the material to be coated is stopped for 0.3 seconds and a bead is formed between the base 7 and the material to be coated 9 over the entire area of 356 mm in the cross direction, Coating was started by driving the transport stage 10 again at 3 m / min to relatively move the workpiece 9. Almost immediately after this, the paint consumed for forming the coating film and the paint supplied from the die slit 14 are equilibrated, and a steady coating state is achieved in which a stable coating film can be continuously formed. As before, the driving of the metering pump 5 was stopped by 10 mm before the coating end position by the proximity sensor. On the other hand, in order for the stage 10 to continue to move, a coating film is formed by so-called squeegee coating while consuming the paint bead 13 formed between the workpiece 9 and the base 7. When the material to be coated reached the coating end position, the coating was finished by raising the die 7 and moving it away from the material 9 to be coated. Coating start point and end point are each 1m from the edge of the substrate
m. The obtained coated substrate was dried at 120 ° C. for 20 minutes in a drying oven (not shown) to obtain a green colored coating film. FIG. 6 shows the film thickness profile of the obtained coating film. Except for 9 mm from the coating start position and 10 mm from the end of coating, the coating film had a steady part film thickness. The film thickness of both the coating start portion and the coating end portion was good in the range of 87% to 134% of the steady portion.

Example 2 A coating start point and a coating end point are defined as ends of a material to be coated, respectively, a syringe pump is used as a metering pump 5, and a proximity sensor is used to drive the metering pump 5 and the stage 10 at the coating end position. And at the same time, 85.5 μl of the paint bead 13 formed between the workpiece 9 and the base 7 is rotated through the base slit 14 by inverting the metering pump 5.
After collecting by suction, the coating is completed by raising the base 7 and moving away from the material 9 to be coated, and then the green colored coating film is formed in the same manner as in Example 1 except that the stage 10 is restarted. I got As shown in FIG. 7, the obtained coating film was formed satisfactorily over the entire desired region from the coating start portion to the coating end portion without causing film breakage or chipping. Shown in The coating is 9m from the coating start position
m and the steady part film thickness were obtained except for 9 mm from the coating end position. Further, the film thickness of both the coating start portion and the coating end portion was in the range of 88% to 108% of the steady portion.

Embodiment 3 In the same manner as in the embodiment, except that the driving of the syringe pump 5 is stopped 5 mm before the coating end position by the proximity sensor at the coating end position and the stage 10 continues to move. A coating film is formed by so-called squeegee coating while consuming the paint bead 13 formed between the material to be coated 9 and the base 7, and the proximity sensor stops driving the metering pump 5 at the coating end position, At the same time, the paint bead 13 formed between the material 9 to be coated and the base 7 is turned 140 μm through the base slit 14 by inverting the metering pump 5.
35 μl of suction was collected at a rate of 1 / sec, and a green colored coating film was obtained in the same manner as in Example 2 except that the coating was terminated by raising the base 7 and moving it away from the material 9 to be coated. Was. FIG. 9 shows the film thickness profile of the obtained coating film. The coating film is 5 mm from the coating start position and goes back from the coating end position 7
Except for mm, the steady part film thickness was obtained. Coating start part,
Any film thickness at the coating end portion is from 92% of the steady portion to 107%.
% Was good.

COMPARATIVE EXAMPLE 1 In this comparative example, the up and down operation of the mouthpiece, the stop operation during the forward running of the stage was not performed at all, the squeegee was not applied, and the paint was not collected and collected in the paint bead. A coating film was formed on the material to be coated in the same manner as in Example 1 above. FIG. 10 shows a typical film thickness profile of the coating film obtained in Comparative Example 1. As shown in FIG. 11, a coating film over the entire width was not formed at 122 mm from the coating start position, and an uncoated portion remained. 180mm from the coating start position and 40mm from the coating end position
Except for the above, a film thickness at a steady portion was obtained. Further, at the end of coating, there was a point exceeding 300% of the film thickness in the steady part.

Comparative Example 2 In this comparative example, the stop operation was not performed at all during the forward running of the stage at the coating start point, and instead, the material to be coated passed just below the die. At the same time
Generate a positive momentary pulsation (pulse) in the paint feed with the paint discharge direction being positive, and apply a negative pulsation (pulse) in the paint feed without performing squeegee coating at the coating end point. A coating film was formed on the material to be coated in the same manner as in Example 1 except for the generation (FIG. 12). FIG. 13 shows a typical film thickness profile of the coating film obtained in Comparative Example 2. Except for 28 mm from the coating start position and 20 mm from the coating end position, the steady part film thickness was obtained. In particular, the temporary drop in the film thickness observed at the coating start portion is considered to be due to the re-formation of the paint bead, and the same tendency was observed even when the discharge speed and the transport speed were changed.

COMPARATIVE EXAMPLE 3 In this comparative example, the stop operation was not performed at all during the forward running of the stage at the coating start point, and the coating material was moved by the metering pump before the workpiece passed immediately below the base. In the same manner as in Example 1 except that the discharge of the paint is started, the squeegee coating is not performed at the coating end point, and the paint is not collected and collected in the paint bead, Was formed (FIG. 14). As shown in FIG. 15, at 8 mm from the coating start position, a coating film over the entire width was not formed, and an uncoated portion remained. FIG. 16 shows a typical film thickness profile of the coating film obtained in Comparative Example 3. 37mm from the coating start position and 24mm from the coating end position
Except for the above, a film thickness at a steady portion was obtained. In particular, no coating film was formed on the entire surface at the start of coating. This is because the paint is discharged to the lower surface of the base before the material passes directly below the base, and this paint adheres to the lower surface of the lip in a so-called hanging curve shape by its own weight. This is considered to be due to non-uniform contact over the crossing direction when the contact is made. Therefore, in order to secure the coating film in the entire crossing direction immediately after the start of coating, the amount of paint to be discharged until the material to be coated arrives immediately below the base is increased. It was possible to form a coating film over the entire area. However, the thickness of this portion was about three times as large as the desired thickness, and the paint adhered to the side surface of the substrate and contaminated the transfer stage. With this method, it is impossible to secure a coating film having a desired width immediately after the start of coating and prevent the film from being thickened.

Comparing Examples 1 to 3 with Comparative Examples 1 to 3, Examples 1 to 3 were able to obtain a wider range of steady portions, and were extremely close to the end of the material to be coated. The coating film can be formed from the position where it is performed. Further, in Examples 1 to 3, the variation in the film thickness at the coating start position and the coating end position is also significantly reduced.

Embodiment 4 After the stop operation for 0.5 seconds during the forward running of the stage, the transfer stage 10 is driven to relatively move the workpiece 9 to start coating, and at the same time, the pressurizing chamber 15 is started. Is maintained at −15 mmAq to stabilize the paint bead 13, and the coating is performed by discharging the paint at a rate of 143 μl / sec. A green colored coating film was obtained in exactly the same manner as in Example 1 except that it was returned. A uniform coating having a constant part thickness of 0.9 μm was obtained.

Comparative Example 4 In this comparative example, a coating film was formed on a material to be coated in the same manner as in Example 4 except that the pressure in the pressurized chamber 15 was not adjusted. As shown in FIG. 17, the coating film obtained by this comparative example had a so-called film breakage in which no film was formed in some places, and the formed coating film also had a nonuniform film thickness distribution. This is because the coating conditions of Comparative Example 4 are such that the film thickness of the obtained coating film is too thin and the force for removing the above-mentioned paint bead becomes large, and the surface tension of the liquid alone cannot withstand this. It is considered that the paint bead could not be retained because it could not be completely removed and the film was cut. Comparing Example 4 with Comparative Example 4, it was found that by controlling the paint bead with the force generated by the reduced pressure, a film having a smaller film thickness that would cause film breakage in a conventional manner as shown in Comparative Example 4 was obtained. The coating can be applied uniformly.

Example 5 Using polyamic acid as a polyimide precursor as a binder and N-methyl-2-pyrrolidone as a solvent, phthalocyanine blue (CI Pigment Blue 15:
4) was added and dispersed with dioxazine violet (CI Pigment Violet 23), and the solid content by weight was 7 w.
A coating material for forming a blue colored coating film having a viscosity of 20 cPs and a viscosity of 20% by weight was used as a coating material, and a 360 mm × 465 mm × 0.7 mm non-alkali glass substrate OA-2 (Nippon Electric Glass Co., Ltd.)
Is used as the material 9 to be coated, and the slit gap 12 is 1
Coating was performed with the clearance 11 set to 75 µm and the clearance 11 set to 75 µm. A syringe pump was used as the metering pump 5. A precision AC servomotor was used to drive the substrate transfer stage 10. The delivery lift pin (not shown) built in the transfer stage 10 is raised to receive the workpiece 9 from the transfer machine (not shown) at this position. Put in the place. Further, the material to be coated 9 is vacuum-adsorbed so that the material to be coated 9
Is fixed on the transfer stage 10. At the same time as these operations, the switching valve 4 is opened toward the paint tank 1 and the metering pump 5 is opened.
Is driven to the suction side to fill 3100 μl of the paint, and the switching valve 4 is switched to the base side to prepare for coating. At the same time, the base 7 is lowered to the position at which the predetermined clearance is secured. Next, the transfer stage 10 is driven to move the workpiece 9 immediately below the base 7 and stop. At this time, it is sensed that the stage 10 has reached just below the base 7 by the number of steps of the AC servomotor for driving the stage, and the metering pump 5 is driven to discharge the paint to the paint feeding speed 308.
Starting at μl / sec, the material to be coated is stopped for 0.3 seconds to form a bead extending in the entire direction between the base 7 and the material to be coated 9, and then the transport stage 10 is again driven at a driving speed of 3
The coating was started by driving at m / min to relatively move the material to be coated 9. Almost immediately after this, the paint consumed for forming the coating film and the paint supplied from the die slit 14 are equilibrated, and a steady coating state is achieved in which a stable coating film can be continuously formed. As described above, the position of 5 mm before the coating end position is sensed by the number of steps of the stage driving AC servomotor to stop the drive of the metering pump 5 while the stage 10 continues to move. The paint film 13 is formed by so-called squeegee coating while consuming the paint beat 13 formed between the work material 9 and the base 7. When the material to be coated reached the coating end position, the metering pump 5 was driven to reverse, and 70 μl of the paint bead 13 was sucked and collected at a speed of 280 μl / sec through the mouthpiece slit 14. Thereafter, the coating was completed by raising the base 7 and moving it away from the material 9 to be coated. Subsequently, the metering pump 5 was driven to rotate in the normal direction, and the base was filled with 70 μl of the paint. The stage further moves to a predetermined position for transfer to the next process, stops, releases the vacuum suction, raises the lift pin, lifts the workpiece, and places the glass substrate transfer machine (not shown) at that position. Hand over the substrate. The stage 10 houses lift pins to receive the next substrate, and reversely moves to a predetermined position. Further, the coated substrate was dried at 130 ° C. for 10 minutes using a drying hot plate (not shown) in the next step to obtain a blue colored coating film. Subsequently, the metering pump 5 is driven to rotate in the normal direction, and 140 μl of the paint is applied to the mouthpiece 7 in order to discharge further excess paint.
Supplied. At this time, the excessively supplied paint overflowed from the base 7, but adhered to the base 7 and stopped. Next, the spinning device (not shown) is operated to wipe off the paint overflowing from the spinneret 7 and prepare for the next application of the workpiece 9. The above operation was sequentially repeated to form a coating film on 100 substrates. FIG. 18 shows an outline of a series of these operations. The obtained coating film had a steady part film thickness of 1.2 μm. An example of a typical film thickness profile of the coating film thus obtained is shown in FIG. As for the coating film, a constant part film thickness was obtained except for 8 ± 1 mm from the coating start position and 7 mm ± 1 dating from the coating end position. Further, the film thickness of both the coating start portion and the coating end portion was good in the range of 93% to 126% of the steady portion. Also, the variation in the film thickness in the steady portion and the variation in the film thickness at the same position of the coating start portion and the coating end portion within the range of ± 0.05 μm between the 100 coated films are good. High reproducibility.

Comparative Example 5 In this comparative example, at the end of coating, the metering pump 5 was driven to rotate in the normal direction, and the gap created in the slit due to the suction operation was not filled with the paint. Except not discharging excess paint to the base and operating the base wiping device to wipe off the base 7, coating films were formed on 100 sheets of the workpiece in exactly the same manner as in Example 5.
The coating film applied to the first coating material was almost the same as the film thickness profile shown in FIG.
The coating film applied to the material to be coated from the 1st sheet to the 100th sheet has a large variation in film thickness, particularly at the coating start portion, and a large variation in the uncoated area within a range of 0 to 15 mm from the coating start position. Or the maximum film thickness is 106% to 350% of the steady area.
In the range. 30-180m from coating start position
In the area of m, no steady-state film thickness was obtained.

Comparing Example 5 with Comparative Example 5, when applying continuously to two or more sheets of the material to be coated, Example 5 can obtain a wider range of the stationary part than Comparative Example 3, and The variation between the obtained coating films was also small.

Example 6 Using a polyamic acid as a polyimide precursor as a binder and N-methyl-2-pyrrolidone as a solvent, phthalocyanine blue (CI Pigment Blue 15:
4) was added and dispersed with dioxazine violet (CI Pigment Violet 23), and the solid content by weight was 7 w.
A paint for forming a blue colored coating film having a t% and a viscosity of 20 cPs is obtained. Similarly, using N-methyl-2-pyrrolidone as a solvent, chlorobrominated phthalocyanine green (CI Pigment Green 36) is mixed and dispersed to obtain a solid content of 8 wt.
%, A coating material for forming a green colored coating film having a viscosity of 25 cPs.
Similarly, a coating material for forming a red colored coating film mixed with dianthraquinonyl red (CI Pigment Red 177) was prepared at a weight solid content concentration of 5 wt% and a viscosity of 120 cPs, and a patterned chromium light-shielding film layer was provided. On a 465 mm × 360 mm × 0.7 mm alkali-free glass substrate (OA-2),
Filling amount is 5170 μl.
After coating in the same manner as in Example 5 except that the coating time was 18 μl / sec and the stop time at the start of coating was 0.1 second, the solvent under reduced pressure was removed by 7 minutes.
The temperature was kept at 0 ° C. and 2 Torr or less for 3 minutes.
Minutes of drying. A positive resist (2
6.7 wt%, 20 CPS), the filling amount is 1100 μl,
The coating film thickness of the obtained resist obtained by coating and drying in the same manner as in Example 5 except that the coating liquid was discharged at a coating liquid supply speed of 109 μl / sec and the stop time at the start of coating was set at 0.8 second was obtained. 1.6μ
m. Next, a pattern is formed by a so-called photolithography method of performing mask exposure, development, and etching, and post-heating is performed to close the imide ring, thereby forming a red pixel. This process was repeated sequentially under appropriate conditions for the blue and green coating films to obtain red, green and blue primary color pixels. A 0.9 μm thick polyimide film is provided as a protective film on a glass substrate provided with the pixels, and a transparent conductive film having a thickness of 0.18 μm is further provided thereon.
A tin oxide-indium film of μm was formed by sputtering to form a color filter. Four surfaces of 10.4 inch diagonal color filters were formed on the glass. For evaluation, the pixel thickness of the same color was measured after pattern formation of each color. Each of the obtained pixels showed a uniform film thickness, and the obtained color filters also showed good characteristics.

Comparative Example 6 A color filter was obtained in the same manner as in Example 6, except that the coating process of the colored layer was performed as in Comparative Example 1. Similarly, for evaluation, the pixel thickness of the same color was measured after pattern formation of each color. The film thickness of the pixels located at the coating start portion and the coating end portion was different from the pixel portion obtained from the steady film thickness portion. The color filter obtained in this way has different characteristics depending on which part of the base material is obtained, but the pixels obtained from the coating start portion and the coating end portion of the base substrate have an in-plane pixel due to the film thickness variation. There were variations in the color characteristics, and all of them were unsuitable for use as products.

Example 7 In the same manner as in Example 6, after the coating solution for forming a red colored coating film was applied, the solvent was removed under reduced pressure by maintaining it at 70 ° C. and 2 Torr or less for 3 minutes. Subsequently, drying was performed at 130 ° C. for 10 minutes using a hot plate (not shown). Next, a positive photoresist (26.
7 wt%, 20 centipoise) and the filling amount is 1100μ
1, coating and drying in the same manner as the coating solution for forming a red colored coating film, except that the coating material sending speed of the coating material is 109 μl / second and the stop time at the start of coating is 0.8 seconds. 1.6μm thick
Was obtained.

Next, a red pixel was formed by forming a pattern by a so-called photolithography method of performing mask exposure, development, and etching, followed by heating to close the imide ring. The width of the red pixel was highly accurate within the range of 90 μm (design value) ± 1 μm, and there was no variation due to unevenness in the thickness of the photoresist layer. This process was repeated sequentially under appropriate conditions for the blue and green coating films to obtain red, green and blue primary color pixels. The die has front and rear lip lower end surface lengths LF and LR of 0.5 mm, respectively.
3.5 mm, opening width h of the opening at the tip of the slit is 100 μ
m, and the length (length in the die longitudinal direction) W of the tip opening of the slit in the direction perpendicular to the coating direction was 360 mm.

The volume V of the paint discharged to form a paint bead during the stopping operation of the coating start portion is [h × LC ×
W] to [(LF + LR + h) .times.LC.times.W] and 104 .mu.l, 92 .mu.l, 92 in order of red, green and blue.
μl.

A 0.9 μm-thick polyimide film is provided as a protective film on the glass substrate on which the pixels are provided, and a 0.18 μm-thick tin oxide-indium film is formed thereon as a transparent conductive film by sputtering. And Four 10.4 inch diagonal color filters were placed on this glass.
Surface formed. For evaluation, the pixel thickness of the same color was measured after pattern formation of each color. Each of the obtained pixels showed a uniform film thickness, and the obtained color filters also showed good characteristics.

[0059]

According to the first aspect of the present invention, no matter whether the stage or the paint discharger is moved, the invention is compared with the case where the material to be coated is transported before the formation of the paint bead is completely achieved. As a result, it is possible to form a coating film having a considerably high accuracy from the coating start position, and thus, the ratio of the coating film area having a substantially uniform film thickness to the entire coating film area and having no defects due to foreign matter falling down. This has a specific effect that it can be increased. In addition, the slit tip opening of the paint discharge device
Paint that is formed over the entire width of the coating between the material and the material to be coated
Move the bead before the workpiece reaches the coating end position.
Stop supplying paint to the material to be coated with
When the material reaches the coating end position or the coating end position
After passing, suction through the paint discharger.
With enough paint to extinguish paint beads
Because it is collected, the thin film is generated due to insufficient liquid supply or excessive recovery.
Paint or forming a paint bead on the material to be coated
Can be prevented from being thickened by being left behind
It is possible to obtain a good coating with a uniform thickness up to the end of coating.
It has a unique effect that it can be done.

According to a second aspect of the present invention, there is provided a stage or paint discharger.
Regardless of which dispensing device is moved, the paint bead
The material to be coated is transported before the formation of
Compared to the coating start position
And thus, over the entire length of the coating
Coating with almost uniform thickness and no defects due to foreign matter falling
Unique effect of being able to increase the proportion of the range
To play. Also, after coating is completed or before coating is started, paint
Operate the feeder to discharge paint from the paint discharger.
Fills gaps that may occur in the slit with paint
And wet the tip of the paint discharger with paint.
After that, excess paint adhering to the tip of the paint discharger
Is to be wiped off.
Immediately before the process, the paint state at the tip of the slit of the paint discharger
The state can be initialized, and a uniform and good coating film can be obtained continuously.
At the same time as the paint slit itself
Lubricated and wiped off to reduce unnecessary dust generation,
The unique feature of extending the life of the wiping device
It works.

According to the third aspect of the present invention, the quantitative supply of paint is performed with high precision.
This has a specific effect that the temperature can be increased.

[0062] The invention according to claim 4 is characterized in that the quantitative supply of paint is performed with high precision.
As well as absorbing paint on the material to be coated.
Pulling can be achieved without adding any special mechanism
It has a unique effect of

According to the fifth aspect of the present invention, the paint bead is always stable.
Condition and thus the uniformity of the film thickness
Is achieved.

The sixth aspect of the present invention provides a color image having a remarkably high quality.
The unique effect that filters can be obtained at low cost
Play.

According to the invention of claim 7, the corresponding layer is significantly high.
Quality and thus high quality color fill
Has the unique effect that it can be obtained at low cost.
You.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a relationship between a size near a die of a die coater and a paint bead.

FIG. 2 is a schematic view showing an example of a die coater according to the present invention.

FIG. 3 is an enlarged view of the vicinity of the base of FIG. 1;

FIG. 4 is a schematic diagram showing an operation relationship of various devices of the embodiment.

FIG. 5 is a schematic diagram illustrating an example of a die coater according to the first embodiment.

FIG. 6 is a representative film thickness profile of a coating film obtained in Example 1.

FIG. 7 is a schematic view of a coating film obtained in Example 2.

FIG. 8 is a representative film thickness profile of a coating film obtained in Example 2.

FIG. 9 is a representative film thickness profile of a coating film obtained in Example 3.

FIG. 10 is a representative film thickness profile of a coating film obtained in Comparative Example 1.

FIG. 11 is a schematic view of a coating film obtained in Comparative Example 1.

FIG. 12 is a schematic diagram showing an operation relationship of various devices of Comparative Example 2.

FIG. 13 is a representative film thickness profile of a coating film obtained in Comparative Example 2.

FIG. 14 is a schematic diagram showing the operation relationship of various devices of Comparative Example 3.

FIG. 15 is a schematic view of a coating film obtained in Comparative Example 3.

FIG. 16 is a representative film thickness profile of a coating film obtained in Comparative Example 3.

FIG. 17 is a schematic diagram of a coating film obtained in Comparative Example 4.

FIG. 18 is a schematic diagram illustrating an operation relationship of various devices according to the fifth embodiment.

FIG. 19 is a representative film thickness profile of a coating film obtained in Example 5.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Paint tank 2 Piping 3 On-off valve 4 Switching valve 5 Metering pump (syringe pump) 6 Filter 7 Cap 71 Front lip 72 Rear lip 8 Coating 9 Material to be coated 10 Transfer stage 11 Clearance 12 Slit gap 13 Paint bead 14 Cap slit 15 Pressurizing room

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI // B05C 5/02 B05C 5/02 (56) References JP-A-4-61958 (JP, A) JP-A-5-201854 (JP, A) JP-A-5-261334 (JP, A) JP-A-4-341365 (JP, A) JP-B-62-50195 (JP, B2) WO 94/27737 (WO, A1) (58) ) Surveyed field (Int.Cl. ⁷ , DB name) B05D 1/26 B05C 11/10 B05D 3/00 G02B 5/20-5/28 G02F 1/1335 B05C 5/00-5/02

Claims (7)

(57) [Claims] 1. A stage (1) for holding a workpiece (9) while supplying paint to a paint discharge device (7) having a slit (14) for discharging paint by a paint supply device (5).
0) by relatively moving at least one of the coating material delivery device (7) or a sheet coating method for forming a coating film (8) to Hinurikozai (9) surface, coating material delivery device
(7) is along the relative traveling direction of the material to be coated (9).
Located at least the front lip (71) and the rear
Lip (72), these front lip (71) and
And the opening formed between the rear lip (72) and the paint
And a slit (14) serving as an exit,
The traveling direction on the lower end surface of the front lip (71)
The length of Lf (mm) on the lower end face of the rear lip (72)
Lr (mm) and slit
(14) The opening width of the tip opening in the traveling direction is h (m
m) and the tip of the slit (14) of the paint discharger (7)
Clearance between the opening and the start of coating of the coating material (9)
(11) to C (mm) in the coating direction of the coating film to be applied.
The width of application in the direction perpendicular to the direction is W (mm)
When the thickness of the coating film (8) is d (mm), the coating is completed.
Supply paint to paint discharge device (7) until it reaches the position
Coating end position of paint that should be supplied when
Stop supplying paint to paint discharger (7) before reaching
Paint not supplied to paint bead (13) due to
Volume U (mm ³ ) and the slit of the paint discharger (7)
The volume S (mm ³ ) of the paint sucked through (14) is
The following equation h × (C−d) × W ≦ U + S ≦ Lf × C × W +
A sheet-fed coating method characterized by a range given by (h + Lr) × (Cd) × W. 2. A stage (1) for holding a workpiece (9) while supplying paint to a paint discharge device (7) having a slit (14) for discharging paint by a paint supply device (5).
0) or by relatively moving at least one of the coating material delivery device (7), a sheet coating method for forming a coating film (8) to Hinurikozai (9) surface, finished coating Later
Or before starting coating, operate the paint supply device (5)
The paint is discharged from the discharge device (7), and the slit (1) is discharged.
4) Filling the voids that may occur inside with paint
First, wet the tip of the paint discharge device (7) with paint.
After that, excess paint adhering to the tip of the paint discharger (7)
Wipe off the paint and slit the paint discharge device (7)
(14) The sheet-fed coating method, wherein the tip is substantially uniform . 3. A paint supply device for supplying paint to the paint discharge apparatus (7) (5) of sheet coating method according to claim 1 or 2 is a piston pump (5). 4. A paint supply device for supplying paint to the paint discharge apparatus (7) (5) of sheet coating method according to claim 1 or 2 is a syringe pump (5). To 5. The tip coating bead of the coating material discharge apparatus (7) (13) according to any one of 4 claims 1 to apply a positive or negative pressure from the coating material moving direction upstream side Single-wafer coating method. 6. A method of manufacturing a color filter, which comprises using one of the sheet coating method of claims 1 5. 7. The method for producing a color filter according to claim 6 , wherein at least one layer of a protective layer, a colored layer, a resin light-shielding layer, and a resist is applied in the color filter production process.