JP3100448B2 - Surface condition inspection device - Google Patents

Surface condition inspection device

Info

Publication number
JP3100448B2
JP3100448B2 JP04015883A JP1588392A JP3100448B2 JP 3100448 B2 JP3100448 B2 JP 3100448B2 JP 04015883 A JP04015883 A JP 04015883A JP 1588392 A JP1588392 A JP 1588392A JP 3100448 B2 JP3100448 B2 JP 3100448B2
Authority
JP
Japan
Prior art keywords
light
luminance
area
inspected
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP04015883A
Other languages
Japanese (ja)
Other versions
JPH05209732A (en
Inventor
一基 田中
浩志 池田
良美 新原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mazda Motor Corp
Original Assignee
Mazda Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mazda Motor Corp filed Critical Mazda Motor Corp
Priority to JP04015883A priority Critical patent/JP3100448B2/en
Publication of JPH05209732A publication Critical patent/JPH05209732A/en
Application granted granted Critical
Publication of JP3100448B2 publication Critical patent/JP3100448B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、輝度が一方向に沿って
漸変的に変化する明暗光を被検査面に照射し、該被検査
面から反射された反射光を受光して受光画像を形成し、
該受光画像における輝度変化に基づいて上記被検査面の
表面状態を検査する表面状態検査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for illuminating a surface to be inspected with bright and dark light whose luminance gradually changes in one direction, and receiving reflected light reflected from the surface to be inspected. To form
The present invention relates to a surface condition inspection apparatus for inspecting the surface condition of the surface to be inspected based on a change in luminance in the received light image.

【0002】[0002]

【従来の技術】従来より、被検査面に光を照射し、被検
査面からの反射光に基づいて被検査面の表面状態例えば
凹凸等の表面欠陥有無の検査を行う方法が知られてい
る。例えば、特開昭62-233710 号公報には、非検査面に
光を照射し、被検査面からの反射光をスクリーン上に投
影させ、その投影像の鮮映度から被検査面の表面欠陥を
自動的に検出する技術が開示されている。
2. Description of the Related Art Conventionally, there has been known a method of irradiating a surface to be inspected with light and inspecting the surface state of the surface to be inspected, for example, for the presence or absence of surface defects such as irregularities, based on the reflected light from the surface to be inspected. . For example, Japanese Patent Application Laid-Open No. 62-233710 discloses that a non-inspection surface is irradiated with light, reflected light from the inspection surface is projected on a screen, and the surface defect of the inspection surface is determined from the sharpness of the projected image. Has been disclosed that automatically detects the

【0003】ところで、上記のような表面状態検査方法
の一つとして、被検査面に光を照射し、被検査面からの
反射光を受光して受光画像を形成し、該受光画像におけ
る輝度変化に基づいて被検査面の表面状態を検査する方
法であって、検査効率の向上及び検査精度の向上を図る
ため、上記被検査面に照射する光として、輝度が一様な
均一光ではなく、輝度が一方向に向かって徐々に変化す
る輝度勾配を有する明暗光を用いる方法が考えられてい
る(特願平3-134092号、特願平3-225038号)。
As one of the surface state inspection methods as described above, a surface to be inspected is irradiated with light, a light reflected from the surface to be inspected is received to form a light-receiving image, and a luminance change in the light-receiving image is performed. Is a method for inspecting the surface state of the surface to be inspected on the basis of, in order to improve the inspection efficiency and inspection accuracy, as the light to irradiate the surface to be inspected, not uniform light with uniform brightness, A method using bright and dark light having a brightness gradient in which the brightness gradually changes in one direction has been considered (Japanese Patent Application Nos. 3-134092 and 3-225038).

【0004】[0004]

【発明が解決しようとする課題】一般に、被検査面に光
を照射し、被検査面からの反射光を受光して受光画像を
形成した場合、通常は、被検査面からの反射光量は大き
くまた背景(被検査面以外の部分)からの反射光量は小
さいので、受光画像のうち被検査面に対応する被検査面
領域の輝度は大きく(明るく)、背景に対応する背景領
域の輝度は小さく(暗く)なり、従って被検査面に照射
する光が一様な輝度の均一光である場合には、輝度差に
よって被検査面領域と背景領域とを明確に識別すること
ができ、両者の境界も明瞭となる。
In general, when light is irradiated to a surface to be inspected and light reflected from the surface to be inspected is received to form a light-receiving image, the amount of light reflected from the surface to be inspected is usually large. Also, since the amount of reflected light from the background (a part other than the surface to be inspected) is small, the luminance of the surface to be inspected corresponding to the surface to be inspected in the received image is large (bright), and the luminance of the background region corresponding to the background is small. (Dark), and therefore, when the light to be irradiated on the inspection surface is uniform light having uniform luminance, the inspection surface region and the background region can be clearly distinguished from each other by the luminance difference. Will also be clear.

【0005】しかるに、被検査面に照射する光が上記の
如く輝度が一方向に沿って漸変的に変化する明暗光であ
る場合には、受光画像中の被検査面領域のうち明光(輝
度の大きい光)が反射した被検査面領域の輝度は大であ
るが、暗光(輝度の小さい光)が反射した被検査面領域
の輝度は小となり、従って上記明光が反射した被検査面
領域と背景領域とは輝度差に基づき明確に識別すること
ができそれら両者の境界も明瞭であるが、上記暗光が反
射した被検査面領域と背景領域とは輝度差が小さいので
輝度差に基づいて両者を明確に識別することができず、
両者の境界も不明瞭となり、その結果、次の様な問題が
生じる。
However, when the light to be irradiated on the surface to be inspected is bright and dark light whose luminance gradually changes in one direction as described above, bright light (luminance) in the region of the inspected surface in the received image. Is large, but the luminance of the inspected surface area where dark light (light with low luminance) is reflected is small, and thus the inspected surface area where the bright light is reflected. The background region and the background region can be clearly identified based on the luminance difference, and the boundary between them is also clear. The two cannot be clearly distinguished,
The boundary between the two is also unclear, resulting in the following problem.

【0006】即ち、受光画像中に被検査面領域と背景領
域とが存在する場合、被検査面領域のみでなく背景領域
からもノイズ等の種々の原因により欠陥検出がなされる
ことがあるが、その様な場合には被検査面領域内で検出
された欠陥のみを真の欠陥情報として出力する必要があ
る。しかしながら、上記の様に被検査面領域と背景領域
との境界が不明瞭な場合には、その不明瞭な境界近傍で
検出された欠陥がいずれの領域内の欠陥であるのかを正
確に判別することができず、そのため検査精度が低下す
るという問題がある。
That is, when the inspection surface area and the background area exist in the received light image, the defect may be detected not only from the inspection area but also from the background area due to various causes such as noise. In such a case, it is necessary to output only defects detected in the inspection surface area as true defect information. However, when the boundary between the inspection surface area and the background area is unclear as described above, it is accurately determined in which area the defect detected near the unclear boundary is a defect. Therefore, there is a problem that the inspection accuracy is reduced.

【0007】また、例えば検査ステーションに搬入され
た自動車の塗装表面をロボットの表面状態検査装置によ
って検査する場合のように被検査物と検査装置との相対
的位置関係が予め既知であるときは、計算により受光画
像中における被検査面領域と背景領域との境界を求める
ことができる。しかしながら、その様な境界検出方法
は、被検査物が常に予め設定された所定の検査位置に位
置せしめられていることを前提とするものであり、実際
には所定の検査位置への搬入誤差や搭載誤差等が生じ、
その結果境界検出精度が低く、欠陥検査精度の低下につ
ながるという問題がある。
Further, when the relative positional relationship between the object to be inspected and the inspection device is known in advance, for example, when the painted surface of a car carried into the inspection station is inspected by a surface condition inspection device of a robot, The boundary between the inspection surface area and the background area in the received light image can be obtained by the calculation. However, such a boundary detection method is based on the premise that the object to be inspected is always located at a predetermined inspection position that is set in advance. Mounting errors occur,
As a result, there is a problem that the boundary detection accuracy is low, leading to a decrease in defect inspection accuracy.

【0008】本発明の目的は、上記事情に鑑み、上記の
如き明暗光を用いた表面状態検査装置において、被検査
面領域と背景領域との境界を精度良く検出し、それによ
って検査精度の向上を図るようにした表面状態検査装置
を提供することにある。
SUMMARY OF THE INVENTION In view of the above circumstances, it is an object of the present invention to accurately detect a boundary between a surface area to be inspected and a background area in a surface state inspection apparatus using light and dark light as described above, thereby improving inspection accuracy. It is another object of the present invention to provide a surface condition inspection apparatus which can achieve the above.

【0009】[0009]

【課題を解決するための手段】本発明にかかる表面状態
検査装置は、上記目的を達成するために、輝度が一方向
に沿って漸変的に変化する明暗光を被検査面に照射し、
該被検査面から反射された反射光を受光して受光画像を
形成し、該受光画像における輝度変化に基づいて上記被
検査面の表面状態を検査する表面状態検査装置であっ
て、上記受光画像中における被検査面領域のうち背景領
域の輝度との差が大きい輝度を有する顕在被検査面領域
を検出し、該顕在被検査面領域に関する位置情報に基づ
いて、上記被検査面領域のうち背景領域の輝度との差が
小さい輝度を有する潜在被検査面領域と上記背景領域と
の境界を検出する境界検出手段を備えていることを特徴
とする。
In order to achieve the above object, a surface state inspection apparatus according to the present invention irradiates a surface to be inspected with bright and dark light whose luminance gradually changes along one direction,
A surface condition inspection apparatus for receiving a reflected light reflected from the inspection surface to form a light reception image, and inspecting a surface state of the inspection surface based on a luminance change in the light reception image, wherein the light reception image A surface area to be inspected having a luminance with a large difference from the luminance of the background area in the surface area to be inspected, and based on position information relating to the surface area to be inspected, the background of the surface area to be inspected is detected. The image processing apparatus further includes a boundary detection unit that detects a boundary between the latent inspection surface area having a luminance with a small difference from the luminance of the area and the background area.

【0010】上記表面状態検査装置においては、上記境
界検出手段を、上記受光画像中における被検査面領域の
うち背景領域の輝度との差が大きくかつ背景領域の輝度
よりも大きい輝度を有する顕在被検査面領域を検出し、
該顕在被検査面領域に関する位置情報に基づいて、上記
被検査面領域のうち背景領域の輝度との差が小さい輝度
を有する潜在被検査面領域と上記背景領域との境界を検
出するものとして構成することができる。
In the above-mentioned surface condition inspection apparatus, the boundary detecting means may detect the actual object having a large difference between the luminance of the background area and the luminance of the background area in the inspected surface area in the received light image. Detect the inspection surface area,
Based on the position information regarding the surface area to be inspected, the boundary between the background area and the latent area to be inspected having a small difference in luminance with the luminance of the background area in the area to be inspected is configured to be detected. can do.

【0011】上記輝度が一方向に沿って漸変的に変化す
る明暗光は、輝度の漸変的変化が一回のみの明暗光であ
っても良いしあるいは輝度の漸変的変化を複数回繰り返
すような明暗光であっても良い。
The bright and dark light whose brightness gradually changes in one direction may be a bright and dark light whose brightness changes only once or a plurality of times when the brightness changes gradually. Bright and dark light that repeats may be used.

【0012】[0012]

【作用】上述のように明暗光を照射した場合、被検査面
領域と背景領域とを明確に識別できる顕在被検査面領域
と明確に識別できない潜在被検査面領域とが生じる。し
かるに、本発明にかかる表面状態検査装置によれば、上
記境界検出手段により、背景領域との輝度差に基づいて
顕在被検査面領域を検出し、該顕在被検査面領域の位置
情報特に顕在被検査面領域と背景領域との境界位置情報
に基づき潜在被検査面領域と背景領域との不明確な境界
を検出することができるので、被検査面領域と背景領域
との境界全体を知ることができ、それによって検査精度
の向上を図ることができる。
When the light and dark light are irradiated as described above, there are a visible surface area to be clearly distinguished from a surface area to be inspected and a background area, and a latent surface area to be unclearly distinguishable. However, according to the surface condition inspection apparatus of the present invention, the boundary detecting means detects the surface area to be inspected based on the luminance difference from the background area, and the position information of the surface area to be inspected, particularly It is possible to detect the unclear boundary between the latent inspection surface area and the background area based on the information on the boundary position between the inspection plane area and the background area, so that it is possible to know the entire boundary between the inspection plane area and the background area. The inspection accuracy can be improved thereby.

【0013】上記顕在被検査面領域の位置情報に基づく
潜在被検査面領域と背景領域との不明確な境界の検出
は、例えば顕在被検査面領域と背景領域との境界位置情
報に基づきその境界を直線的に延長したり、あるいは複
数の顕在被検査面領域が存在する場合にはそれらの顕在
被検査面領域と背景領域との境界が複数存在するのでそ
れらをむすぶことにより検出することができる。
The detection of the unclear boundary between the latent inspection surface area and the background area based on the position information of the actual inspection surface area is performed, for example, based on the boundary position information between the actual inspection surface area and the background area. Can be detected by linearly extending, or when there are a plurality of actual inspected surface regions, since there are a plurality of boundaries between the actual inspected surface regions and the background region, the boundaries can be detected. .

【0014】また、上記境界検出は、受光画像中の画像
データに基づいて行なうものであるので、被検査物と検
査装置との相対的位置関係に基づいて境界検出を行なう
方法の様な被検査物の検査位置への搬入、搭載誤差によ
る境界検出誤差が生じる虞れはなく、高精度の境界検出
が可能である。
Further, since the boundary detection is performed based on image data in the received light image, the boundary detection is performed based on the relative positional relationship between the inspection object and the inspection apparatus. There is no possibility that a boundary detection error occurs due to an error in loading or mounting an object to the inspection position, and high-precision boundary detection is possible.

【0015】[0015]

【実施例】以下、図面を参照しながら本発明の実施例に
ついて詳細に説明する。
Embodiments of the present invention will be described below in detail with reference to the drawings.

【0016】図1は本発明にかかる表面状態検査装置の
一実施例を示す斜視図である。図示の表面状態検査装置
2は、自動車4の車体塗装面6の表面状態を検査するつ
まり塗装表面に存在する凹凸等の塗装欠陥を検出する装
置であり、塗装検査ステーションKに搬送された自動車
4の近傍に配置されている。上記表面状態検査装置2
は、台座8上に載置されたロボット10と、該ロボット10
の先端アーム12に取り付けられた光照射手段14およびC
CDカメラ等の撮像手段16と、上記ロボットの作動制御
を行なうロボット制御手段18と、上記撮像手段16によっ
て形成された受光画像の画像データを処理する画像処理
手段20と、上記ロボット制御手段18および画像処理手段
20に接続されてそれらを制御するホストコンピュータ
(総合制御手段)22とを備えて成る。
FIG. 1 is a perspective view showing one embodiment of a surface condition inspection apparatus according to the present invention. The illustrated surface condition inspection device 2 is a device that inspects the surface condition of the painted surface 6 of the vehicle body of the automobile 4, that is, detects a coating defect such as unevenness existing on the painted surface. Are arranged in the vicinity. Surface condition inspection device 2
Is a robot 10 mounted on a pedestal 8 and the robot 10
Irradiating means 14 and C attached to the distal arm 12
Imaging means 16 such as a CD camera; robot control means 18 for controlling the operation of the robot; image processing means 20 for processing image data of a received image formed by the imaging means 16; Image processing means
And a host computer (total control means) 22 connected to and controlling them.

【0017】上記ホストコンピュータ22によって与えら
れる指令に基づき上記ロボット制御手段18が上記ロボッ
ト10に内蔵された所定のアクチュエータ(図示せず)を
駆動制御し、それによってロボット10は光照射手段14と
撮像手段16とを被検査面である自動車の車体塗装面6に
沿って移動させ、その際光照射手段14から被検査面6に
光を照射し、鏡面として作用する被検査面6から反射さ
れた反射光を撮像手段16が受光し、撮像手段16はこの受
光した反射光に基づく受光画像を形成し、この受光画像
の画像データを画像処理手段20に出力し、画像処理手段
20は入力された画像データを処理して受光画像中におけ
る被検査面領域(被検査面6に対応する領域)と背景領
域(背景つまり被検査面6以外の部分例えば検査ステー
ションKにおける自動車4が載置されている載置台や床
部分に対応する領域)との境界を検出すると共に該境界
の検出によって確定された被検査面領域内の表面欠陥の
検出つまり凹凸等の塗装欠陥の有無、欠陥位置、欠陥形
状等の検出を行なう。
The robot control means 18 drives and controls a predetermined actuator (not shown) built in the robot 10 based on a command given by the host computer 22. The means 16 is moved along the painted surface 6 of the automobile, which is the surface to be inspected. At this time, light is emitted from the light irradiating means 14 to the surface 6 to be inspected, and the light is reflected from the surface 6 to be inspected serving as a mirror surface. The reflected light is received by the imaging means 16, and the imaging means 16 forms a light-receiving image based on the received reflected light, outputs image data of the received light to the image processing means 20, and outputs the image data.
Reference numeral 20 denotes a processing unit that processes the input image data to determine whether the inspection surface area (the area corresponding to the inspection surface 6) and the background area (the background, that is, the part other than the inspection surface 6 such as the automobile 4 in the inspection station K) (A region corresponding to a mounting table or a floor portion on which the device is placed) and a surface defect in the inspection surface region determined by the detection of the boundary, that is, the presence or absence of a coating defect such as unevenness, and a defect. The position, defect shape, etc. are detected.

【0018】上記光照射手段14は、輝度が光射出面14a
上の一方向に沿って漸変的に変化する明暗光を発する。
具体的には、上記光照射手段14は、図2に示す様に、前
面(光射出面)側が開放されたボックス24内に設けられ
た光源としての複数の蛍光灯(特に蛍光灯に限定される
ものではない)26と、これらの蛍光灯26の前面側に設け
られてボックス24の前面を閉塞する光フィルタ28および
拡散スクリーン30とで構成されている。上記光フィルタ
28は、各蛍光灯26から射出される光を光射出面14a の一
方向(本実施例では図中のX方向)に沿って輝度が漸変
的に変化するつまり明から暗にもしくは暗から明に徐々
に変化する明暗光に変換すべく、X方向の各位置によっ
て光の透過率が徐々に変化する(Y方向の各位置におい
ては光透過率は同一である)様に構成されている。従っ
て、本実施例の光照射手段14から発せられる光は、例え
ば図3に示す様に光射出面14a 上のX方向の一端(図2
に示す拡散スクリーン30の左端)から他端(図2に示す
拡散スクリーン30の右端)に向けて輝度が大から小に徐
々に変化する明暗光となる。
The light irradiating means 14 has a light emission surface 14a.
Emit light and dark light that changes gradually along one direction above.
Specifically, as shown in FIG. 2, the light irradiating means 14 includes a plurality of fluorescent lamps (particularly limited to fluorescent lamps) as light sources provided in a box 24 having an open front (light emitting surface) side. , And an optical filter 28 and a diffusion screen 30 provided on the front side of the fluorescent lamps 26 and closing the front of the box 24. Above optical filter
The reference numeral 28 indicates that the light emitted from each fluorescent lamp 26 changes its luminance gradually along one direction of the light emitting surface 14a (in this embodiment, the X direction in the drawing), that is, from bright to dark or from dark to dark. In order to convert into light and dark light that gradually changes to light, the light transmittance gradually changes at each position in the X direction (the light transmittance is the same at each position in the Y direction). . Accordingly, the light emitted from the light irradiation means 14 of this embodiment is, for example, as shown in FIG.
The left and right ends of the diffusion screen 30 shown in FIG. 2 are the bright and dark lights whose brightness gradually changes from large to small from the other end (the right end of the diffusion screen 30 shown in FIG. 2).

【0019】なお、上記拡散スクリーン30は、光フィル
タ28を透過した光を拡散させて自動車の塗装面(被検査
面)6にムラなく明暗光を照射するためのものである。
また、上記光フィルタ28によって形成される明暗光の輝
度勾配は、欠陥検出の精度を向上させるため、予め所定
の勾配となる様に設定されているが、塗装面6が曲面形
状の場合は、その曲率の大小により反射光量が変化して
受光画像中の輝度勾配が変化するので、その受光画像中
の輝度勾配が欠陥検出精度を低下させることのない様
に、塗装面6の曲率の大小に応じて所定の輝度勾配の明
暗光を照射すべく光フィルタ26の透過率変化勾配を設定
することが望ましい。
The diffusing screen 30 is for diffusing the light transmitted through the optical filter 28 and irradiating the painted surface (inspection surface) 6 of the automobile with bright and dark light evenly.
The brightness gradient of the bright and dark light formed by the optical filter 28 is set in advance to a predetermined gradient in order to improve the accuracy of defect detection. However, when the painted surface 6 has a curved surface shape, Since the amount of reflected light changes depending on the magnitude of the curvature, and the luminance gradient in the received image changes, the curvature of the painted surface 6 is adjusted so that the luminance gradient in the received image does not lower the defect detection accuracy. Accordingly, it is desirable to set a transmittance change gradient of the optical filter 26 so as to irradiate light and dark light having a predetermined brightness gradient.

【0020】次に、上記撮像手段16による受光画像の形
成およびその受光画像に基づく表面欠陥の検出について
説明する。図4および図5はそれぞれ被検査面(塗装
面)6上に凸状欠陥32および凹状欠陥34が存在する場合
の光照射手段14による光照射状態および撮像手段16によ
る撮像状態を示す図である。
Next, the formation of a received light image by the image pickup means 16 and the detection of a surface defect based on the received light image will be described. FIGS. 4 and 5 are diagrams showing a light irradiation state by the light irradiation unit 14 and an imaging state by the imaging unit 16 when a convex defect 32 and a concave defect 34 exist on the inspection surface (painted surface) 6, respectively. .

【0021】上述の様に、光照射手段14からは光射出面
14a におけるX方向に沿って輝度が徐々に変化する(本
実施例では図4,5中においてX方向左端から右端に向
けて輝度が小さくなる、なお図中線分mの長さは輝度の
大きさを表わす)明暗光が被検査面6上に照射され、該
被検査面6からの反射光が撮像手段16によって受光され
てその反射光による被検査面6の画像(受光画像)が形
成される。図中Sは光照射手段14による光照射領域であ
り、Fは撮像手段16の視野であり、撮像手段16において
はこの視野Fの受光画像が形成される。
As described above, the light emitting means 14 emits light from the light emitting surface.
14a, the luminance gradually changes along the X direction (in this embodiment, the luminance decreases from the left end to the right end in the X direction in FIGS. 4 and 5; Bright and dark light is irradiated onto the surface 6 to be inspected, and the reflected light from the surface 6 to be inspected is received by the imaging means 16 to form an image (light-receiving image) of the surface 6 to be inspected by the reflected light. You. In the figure, S is a light irradiation area by the light irradiation means 14, F is a field of view of the imaging means 16, and a light receiving image of this field of view F is formed in the imaging means 16.

【0022】なお、上記光照射手段14は図示の様に被検
査面6上に明暗光を照射すべく被検査面6に対向して配
置され、撮像手段16は被検査面6から反射された光を受
光して受光画像を形成すべく被検査面6に対向して配置
され、かつ両者14,16は相互に一定の位置関係を保つと
共に被検査面6に対しても適切な位置関係を確保した状
態で該被検査面6に沿って移動せしめられ、欠陥検査が
行なわれる。
The light irradiating means 14 is arranged opposite to the inspected surface 6 so as to irradiate bright and dark light onto the inspected surface 6 as shown in the figure, and the imaging means 16 is reflected from the inspected surface 6. They are arranged to face the surface 6 to be inspected so as to receive light and form a light-receiving image, and both 14 and 16 maintain a constant positional relationship with each other and have an appropriate positional relationship with the surface 6 to be inspected. In the secured state, it is moved along the inspection surface 6 and a defect inspection is performed.

【0023】図6および図7はそれぞれ図4および図5
における受光画像を示す図である。これらの図に示す様
に、受光画像36は、光照射手段14の光射出面14a から射
出される光の輝度が大から小に変化するX方向に対応す
るX1 方向に沿って、輝度が大から小に徐々に変化す
る。なお、図6,7においては縦線nの密度が疎である
程輝度が大であり、縦線nの密度が密である程輝度が小
である。
FIGS. 6 and 7 correspond to FIGS. 4 and 5, respectively.
FIG. 3 is a diagram showing a light receiving image in FIG. As shown in these figures, the light receiving image 36 along the X 1 direction in which the luminance of light emitted through the light exit plane 14a of the light irradiation unit 14 corresponding to the X direction of changing from large to small, the luminance It gradually changes from large to small. In FIGS. 6 and 7, the brightness is higher as the density of the vertical lines n is lower, and the brightness is lower as the density of the vertical lines n is higher.

【0024】上記の如き受光画像36において、被検査面
6上に欠陥32,34が存在すると、この欠陥32,34によっ
て光照射手段14からの光の正反射方向が変換し、それに
よって受光画像36中の欠陥32,34に対応する領域32A,
34Aにおける輝度は周囲の輝度とは異なると共に輝度変
化状態も周囲の輝度変化状態とは異なることとなる。
In the light receiving image 36 as described above, if there are defects 32 and 34 on the surface 6 to be inspected, the defects 32 and 34 change the regular reflection direction of the light from the light irradiating means 14 and thereby the light receiving image An area 32A corresponding to the defects 32 and 34 in 36,
The luminance at 34A is different from the surrounding luminance, and the luminance change state is different from the surrounding luminance change state.

【0025】即ち、欠陥が凸状欠陥32の場合、図4に示
す様に、その凸状欠陥32はいわゆる凸面鏡として作用
し、欠陥32の左面32a からは光照射手段14の輝度が大き
い部分38からの明光が正反射して撮像手段16に入射し、
一方欠陥32の右面32b からは光照射手段14の輝度の小さ
い部分40からの暗光が正反射して撮像手段16に入射し、
その結果図6に示す様に受光画像36中の凸状欠陥対応領
域32Aは、受光画像36全体の輝度がX1 方向に向って小
さくなっていく中で該領域32Aの左側領域(凸状欠陥32
の左面32a 対応領域)は周囲よりも輝度が大きくなり、
領域32Aの右側領域(凸状欠陥32の右面32b 対応領域)
は周囲よりも輝度が小さくなる。
That is, when the defect is a convex defect 32, as shown in FIG. 4, the convex defect 32 acts as a so-called convex mirror. Bright light from the mirror is specularly reflected and enters the imaging means 16,
On the other hand, from the right side 32b of the defect 32, the dark light from the low-luminance portion 40 of the light irradiation means 14 is specularly reflected and enters the imaging means 16,
Convex defect corresponding region 32A in the received-light image 36 as shown in the Results Figure 6, the left area (convex defect region 32A in which the luminance of the entire light receiving image 36 becomes smaller toward the X 1 direction 32
Area corresponding to the left side 32a) has a higher luminance than the surrounding area,
Right side area of area 32A (area corresponding to right side 32b of convex defect 32)
Has lower brightness than the surroundings.

【0026】また、欠陥が凹状欠陥34の場合、図5に示
す様に、その凹状欠陥34はいわゆる凹面鏡として作用
し、欠陥34の左面34a からは光照射手段14の輝度が小さ
い部分40からの暗光が正反射して撮像手段16に入射し、
一方欠陥34の右面34b からは光照射手段14の輝度の大き
い部分38からの明光が正反射して撮像手段16に入射し、
その結果図7に示す様に受光画像36中の凹状欠陥対応領
域34Aは、受光画像36全体の輝度がX1 方向に向って小
さくなっていく中で該領域34Aの左側領域(凹状欠陥34
の左面34a 対応領域)は周囲よりも輝度が小さくなり、
領域34Aの右側領域(凸状欠陥34の右面34b 対応領域)
は周囲よりも輝度が大きくなる。
In the case where the defect is a concave defect 34, as shown in FIG. 5, the concave defect 34 acts as a so-called concave mirror. Dark light is specularly reflected and is incident on the imaging means 16,
On the other hand, from the right surface 34b of the defect 34, bright light from the high luminance portion 38 of the light irradiation means 14 is specularly reflected and enters the imaging means 16,
Consequently view in received-light image 36 of the as shown in 7 concave defects corresponding region 34A is left area of the region 34A in which the luminance of the entire light receiving image 36 becomes smaller toward the X 1 direction (concave defects 34
Area corresponding to the left side 34a) has lower brightness than the surrounding area,
The right side area of the area 34A (the area corresponding to the right side 34b of the convex defect 34)
Is brighter than the surroundings.

【0027】上記の如き受光画像36は撮像手段16から画
像処理手段20に入力され、該画像処理手段20は入力され
た受光画像データに基づいて欠陥検出を行なう。
The received light image 36 as described above is input from the imaging means 16 to the image processing means 20, and the image processing means 20 detects a defect based on the input received light image data.

【0028】即ち、画像処理手段20は、入力された受光
画像36をX1 方向に沿って主走査すると共にX1 方向に
直角なY1 方向に沿って副走査を行なうことにより全面
走査を行なう。この場合、図6,7に示す受光画像36に
おいて欠陥対応領域32A,34Aを通らない主走査ライン
(画素列)L1 における輝度(画像信号レベル)はX1
方向に向けて単に直線的に減少していくこととなるが、
図6における凸状欠陥対応領域32Aを通る主走査ライン
2 における輝度は、図8に示す様に凸状欠陥対応領域
32A部分で一旦増大した後大きく減少してまた増大する
こととなり、またその主走査ラインL2 における輝度の
微分値(主走査ラインL2 上の隣接する画素の輝度同志
の差)は図9に示す様に凸状欠陥対応領域32A部分で一
旦増大した後大きく減少してまた増大し減少することと
なる。
[0028] That is, the image processing unit 20 performs the entire scan by performing sub-scanning along the perpendicular Y 1 direction received-light image 36 inputted to the X 1 direction with main scanning along the X 1 direction . In this case, the defect corresponding region 32A, the main scanning line (pixel row) not passing through 34A luminance in L 1 (image signal level) in the received-light image 36 shown in FIGS. 6 and 7 X 1
It simply decreases linearly in the direction,
Brightness in the main scanning line L 2 passing through a convex defect corresponding regions 32A in FIG. 6, convex defect corresponding region as shown in FIG. 8
After increased once at 32A moiety greatly decreases and also will be increased, also the brightness of the differential value in the main scanning line L 2 (the difference in brightness comrades of adjacent pixels on the main scanning line L 2) in FIG. 9 As shown in the figure, the area once increases in the convex defect corresponding area 32A, then decreases greatly, and then increases and decreases.

【0029】また、図7における凹状欠陥対応領域34A
を通る主走査ラインL2 における輝度は、図10に示す様
に凹状欠陥対応領域34A部分で一旦減少した後大きく増
大してまた減少することとなり、またその主走査ライン
2 における輝度の微分値は図11に示す様に凹状欠陥対
応領域34A部分で一旦減少した後大きく増大してまた減
少し増大することとなる。
The concave defect corresponding area 34A in FIG.
Brightness in the main scanning line L 2 passing through is larger increased to also becomes possible to decrease after once decreased by concave defects corresponding region 34A portion as shown in FIG. 10, also the brightness of the differential value at the main scanning line L 2 As shown in FIG. 11, once decreases at the concave defect corresponding region 34A, then increases greatly and then decreases and increases.

【0030】従って、画像処理手段20により受光画像36
を走査し、各主走査ライン上の輝度を微分し、その微分
値が所定のしきい値(+Th,−Th)を超えた場合
(図9,11参照)に、その超えた位置に欠陥が存在し、
かつ微分値が+Thを超えた場合は凸状欠陥であり、−
Thを超えた場合は凹状欠陥である旨を検出することが
できる。
Therefore, the light receiving image 36
, And the luminance on each main scanning line is differentiated. When the differentiated value exceeds a predetermined threshold value (+ Th, -Th) (see FIGS. 9 and 11), a defect is detected at the position where the difference is exceeded. Exists,
And when the differential value exceeds + Th, it is a convex defect and −
If it exceeds Th, it can be detected that the defect is a concave defect.

【0031】次に、上記受光画像36に基づく被検査面領
域と背景領域との境界検出について説明する。図12,13
は検査対象である自動車4と受光画像36との関係を示す
平面図である。
Next, detection of the boundary between the inspection surface area and the background area based on the light receiving image 36 will be described. Figures 12, 13
FIG. 3 is a plan view showing the relationship between the automobile 4 to be inspected and the received light image 36.

【0032】自動車4の塗装面6を被検査面として検査
する場合、通常は自動車4を検査ステーションの床ある
いは検査台上に載置して検査を行ない、その際例えば自
動車4のボンネット上面である塗装面6を検査する場
合、受光画像36中には被検査面6に対応する被検査面領
域44と背景(被検査面6以外の部分、例えば自動車4が
載置されている床や検査台等)に対応する背景領域46と
が存在することとなる。
When the painted surface 6 of the automobile 4 is inspected as a surface to be inspected, the automobile 4 is usually placed on the floor of an inspection station or on an inspection table and inspected. When the painted surface 6 is inspected, the light receiving image 36 includes the inspected surface region 44 corresponding to the inspected surface 6 and a background (a part other than the inspected surface 6, for example, a floor or an inspection table on which the automobile 4 is mounted). ) Is present in the background area 46.

【0033】この場合、上記の如き方法で検出した欠陥
が被検査面領域44内に位置するものか背景領域46内に位
置するものかを調べ、背景領域46内に位置するものはノ
イズ等に起因するものであって真の欠陥ではないのでこ
れを排除し、被検査面領域44内に位置する欠陥のみを
真の欠陥として検出するもしくは被検査面領域44のみ
検査を行なうことが望ましく、そのため受光画像36内に
おいて被検査面領域44と背景領域46との境界を知る必要
がある。
In this case, it is checked whether the defect detected by the above-described method is located in the inspection surface area 44 or the background area 46, and the defect located in the background area 46 is regarded as noise or the like. It is desirable to detect only the defect located in the inspection surface area 44 as a true defect or to inspect only the inspection surface area 44 because it is caused and not a true defect. It is necessary to know the boundary between the inspection surface area 44 and the background area 46 in the light receiving image 36.

【0034】しかるに、上記の如き輝度が漸変的に変化
する明暗光を用いた場合には、図13に示す様に、受光画
像36中において背景領域46の輝度は小さく、被検査面領
域44の輝度は反射する明暗光の輝度に応じてX1 方向に
向けて大から小に変化し(図13中の横線pの密度が疎で
ある程輝度は大きく、密である程輝度は小さい)、従っ
て被検査面領域44のうち輝度が大である領域44a (図12
参照)は輝度差に基づき背景領域46と明確に区別でき両
者の境界も明確に知ることができるが、被検査面領域44
のうち輝度が小である領域44b (図12参照)はその輝度
が背景領域46の輝度と大差なく、従って輝度差に基づい
て背景領域46と明確に区別することができず、両者の境
界qも明確に知ることができない。
However, when the bright and dark light whose luminance gradually changes as described above is used, as shown in FIG. 13, the luminance of the background area 46 is small in the light-receiving image 36 and the inspection surface area 44 is small. the brightness toward the X 1 direction changes from large to small depending on the brightness of the dark light reflected (intensity enough density of the horizontal line p in FIG. 13 is sparse is large, the luminance is small enough is dense) Therefore, the region 44a where the luminance is high in the inspection surface region 44 (FIG. 12)
) Can be clearly distinguished from the background region 46 based on the luminance difference and the boundary between them can be clearly known.
Of the area 44b (see FIG. 12) having a small luminance, the luminance is not much different from the luminance of the background area 46, and therefore cannot be clearly distinguished from the background area 46 based on the luminance difference. Also can not know clearly.

【0035】そこで、上記表面状態検査装置2において
は、上記画像処理手段20に境界検出手段48を備え、該境
界検出手段48によって上記不明瞭な境界qを検出する様
に構成されている。
Therefore, in the surface condition inspection apparatus 2, the image processing means 20 is provided with a boundary detection means 48, and the boundary detection means 48 detects the unclear boundary q.

【0036】上記境界検出手段48は、受光画像36中にお
ける被検査面領域44のうち背景領域46の輝度との差が大
きい輝度を有する顕在被検査面領域(背景領域46との輝
度差が大きいので受光画像36中で顕在化している)44a
を検出し、該顕在被検査面領域44a に関する位置情報に
基づいて、上記被検査面領域44のうち背景領域46の輝度
との差が小さい輝度を有する潜在被検査面領域(背景領
域46との輝度差が小さいので受光画像36中で潜在化して
いる)44b と上記背景領域36との境界qを検出する。
The above-mentioned boundary detecting means 48 is provided to detect the surface area of the surface to be inspected (the luminance difference from the background area 46 is large) having a luminance that is large in difference from the luminance of the background area 46 in the area to be inspected 44 in the received light image 36. 44a
Is detected, and based on the positional information on the actual inspected surface area 44a, the potential inspected surface area (the difference between the background area 46 and the A boundary q between 44b and the background area 36 is detected.

【0037】かかる境界検出手段48による境界検出の実
施例について、図14に示すフローチャートを参照しなが
ら説明する。まず、S1において入力された受光画像36
を2値化する。つまり、各画素の画像信号レベル(輝
度)を所定のしきい値Th以上か否かで分け、Th以上
の画素は“1”、Thより小の画素は“0”とする。こ
の2値化によって上記顕在被検査面領域44a および欠陥
対応領域32A,34Aその他のノイズ等による大輝度部分
等が“1”(S1の右側の図中における白抜き部分)と
なり、潜在被検査面領域44b および背景領域46が“0”
(S1の右側の図中における斜線部分)となる。そし
て、S2において上記2値化画像における“1”領域の
うち所定値以上の面積を有する“1”領域を検出する。
これにより、“1”領域のうち顕在被検査面領域44a の
みが検出される。
An embodiment of the boundary detection by the boundary detecting means 48 will be described with reference to a flowchart shown in FIG. First, the received light image 36 input in S1
Is binarized. That is, the image signal level (luminance) of each pixel is divided according to whether it is equal to or greater than a predetermined threshold value Th, and pixels equal to or greater than Th are set to “1”, and pixels smaller than Th are set to “0”. As a result of this binarization, a large luminance portion or the like caused by noise or the like in the above-described surface area to be inspected 44a and the defect corresponding areas 32A and 34A becomes "1" (white area in the figure on the right side of S1). The area 44b and the background area 46 are "0"
(The hatched portion in the figure on the right side of S1). Then, in S2, among the "1" regions in the binary image, a "1" region having an area equal to or larger than a predetermined value is detected.
As a result, of the “1” region, only the actual inspection surface region 44a is detected.

【0038】上記の如くして顕在被検査面領域44a を検
出したら、該顕在被検査面領域44aの位置情報から潜在
被検査面領域44b と背景領域46との境界qを検出する。
この検出は、予め既知である撮像情報即ち受光画像36中
の大体どの部分に背景領域46が位置しまた大体どの部分
に顕在被検査面領域44a と潜在被検査面領域44b とが位
置しているという情報を参照して行なわれる。かかる情
報は、受光画像36が自動車4のどの部分の塗装面6を撮
影しているかおよびその際の光照射手段14による明暗光
はどちらに向けて明から暗に漸変しているかという情報
に基づいて得ることができ、かつ受光画像36が自動車4
のどの部分の塗装面6を撮影しているかは検査ステーシ
ョン上における自動車4の概略位置およびロボットによ
る光照射手段14と撮像手段16の位置とによって得ること
ができる。
After detecting the surface area 44a to be inspected as described above, the boundary q between the surface area 44b and the background area 46 is detected from the position information of the surface area 44a.
In this detection, the background region 46 is located at approximately which portion of the imaging information known in advance, that is, the received light image 36, and the apparent inspected surface region 44a and the latent inspected surface region 44b are located at approximately which portion. Is performed with reference to the information. Such information includes information indicating which part of the painted surface 6 of the automobile 4 the light-receiving image 36 is photographing, and to which direction the light / dark light from the light irradiating means 14 gradually changes from light to dark. , And the received light image 36 is
Which part of the painted surface 6 is photographed can be obtained from the approximate position of the automobile 4 on the inspection station and the positions of the light irradiation means 14 and the imaging means 16 by the robot.

【0039】本実施例の場合は、上記情報に基づき、S
2の右側の図に示す様に顕在被検査面領域44a は潜在被
検査面領域44b の下側に位置するものでありかつ顕在被
検査面領域44a の下側の輪部(境界)r1 と右側の輪部
(境界)r2 のうち右側の境界r2 の上方延長上に潜在
被検査面領域44b と背景領域46との境界qが存在するこ
とを知ることができるので、まずS3において顕在被検
査面領域44a の輪部を矢印D方向に追跡し、S4におい
て1回目のコーナ点c1 と2回目のコーナ点c2 を求
め、これによって顕在被検査面領域44a と背景領域46と
の境界r2 を検出し、続いてS5においてこの境界r2
を上方に延長し、つまり上記c1 とc2 の座標を結ぶ直
線を上方に向けて延長してその延長部分を上記境界qと
して検出する。
In the case of the present embodiment, S
Lower ring portion of the second right manifestation inspected surface region 44a as shown in figures are positioned on the lower side of the potential test surface area 44b and manifestation test surface area 44a (boundary) r 1 and can know that there is a boundary q and right limbus (boundary) r right boundary r 2 of the upper extension on the potentially test surface region 44b and the background area 46 of the two, first manifested in S3 track limbus of the inspected surface area 44a in the direction of arrow D, the in S4 1 st corner points c 1 and second look corner point c 2, whereby the manifest test surface area 44a and the background area 46 A boundary r 2 is detected, and subsequently, in S5, the boundary r 2
Is extended upward, that is, a straight line connecting the coordinates of c 1 and c 2 is extended upward, and the extended portion is detected as the boundary q.

【0040】そして、境界qを検出したら、S6におい
てこのS6の右側の図に示す様に境界qに基づいて被検
査面領域44を決定し、この被検査面領域44内のみについ
てS7で上記の如き方法で欠陥検出を行ない、検出され
た欠陥データを画像処理手段20から出力する。
When the boundary q is detected, the surface area to be inspected 44 is determined based on the boundary q in S6 as shown in the figure on the right side of S6. The defect is detected by such a method, and the detected defect data is output from the image processing means 20.

【0041】次に、境界検出の他の実施例について説明
する。上記実施例は光照射手段14として輝度の漸変的変
化が1回のみの明暗光を照射するものであったが、光照
射手段14は図15に示す様に輝度の漸変的変化を複数回繰
り返す様な明暗光を照射するものであっても良い。な
お、図中の線分mの長さは輝度の大きさを示す。
Next, another embodiment of the boundary detection will be described. In the above-described embodiment, the light irradiating means 14 irradiates the light with gradual change in luminance only once, but the light irradiating means 14 has a plurality of gradual changes in luminance as shown in FIG. It may be one that emits bright and dark light that is repeated several times. Note that the length of the line segment m in the drawing indicates the magnitude of the luminance.

【0042】そして、その場合には、例えば図12,13に
示す様な受光画像36の2値化画像は、例えば図16に示す
様なものとなる。従って、この様な場合には、例えば検
出された3つの顕在被検査面領域44a の右側の境界r2
を結ぶことによって、例えば3つの境界r2 上の任意の
点の座標を求め、それらの複数点を含む線分を最小二乗
法によって求め、その線分上に各潜在被検査面領域44b
と背景領域46との境界qが位置するものとしてそれらの
境界qを検出する。
In this case, the binarized image of the received light image 36 as shown in FIGS. 12 and 13, for example, is as shown in FIG. Therefore, in such a case, for example, the right boundary r 2 of the three detected inspection surface areas 44a is detected.
Are obtained, for example, the coordinates of an arbitrary point on three boundaries r 2 are obtained, a line segment including the plurality of points is obtained by the least square method, and each potential inspection surface area 44b is placed on the line segment.
The boundary q between the image and the background area 46 is detected as being located.

【0043】[0043]

【発明の効果】本発明にかかる表面状態検査装置は、上
記の如く、受光画像中における被検査面領域のうち背景
領域の輝度との差が大きい輝度を有する顕在被検査面領
域を検出し、該顕在被検査面領域に関する位置情報に基
づいて、上記被検査面領域のうち背景領域の輝度との差
が小さい輝度を有する潜在被検査面領域と上記背景領域
との境界を検出する境界検出手段を備えているので、該
境界検出手段により、背景領域との輝度差に基づいて顕
在被検査面領域を検出し、該顕在被検査面領域の位置情
報特に顕在被検査面領域と背景領域との境界位置情報に
基づき潜在被検査面領域と背景領域との不明確な境界を
検出することができ、それによって被検査面領域内の真
の欠陥のみを検出可能となり、検査精度の向上を図るこ
とができる。
As described above, the surface condition inspection apparatus according to the present invention detects an actual inspection surface area having a luminance having a large difference from the luminance of the background area among the inspection surface areas in the received image, as described above. Boundary detection means for detecting a boundary between a latent inspection surface area having a small difference in luminance with a luminance of a background area of the inspection surface area and the background area based on the position information regarding the actual inspection surface area Therefore, the boundary detection means detects the surface area to be inspected based on the luminance difference from the background area, and detects the position information of the surface area to be inspected, particularly the position between the surface area to be inspected and the background area. Based on the boundary position information, it is possible to detect an unclear boundary between the latent inspection surface area and the background area, thereby enabling detection of only true defects in the inspection surface area, thereby improving inspection accuracy. Can be.

【0044】また、上記境界検出は、受光画像の画像デ
ータに基づいて検出するものであるので、被検査物の検
査位置への搬入誤差や搭載誤差等に影響されることな
く、高精度で境界検出が可能となる。
Since the boundary detection is performed based on the image data of the received light image, the boundary detection can be performed with high accuracy without being affected by an error in loading the inspection object to the inspection position or a mounting error. Detection becomes possible.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例を示す斜視図FIG. 1 is a perspective view showing an embodiment of the present invention.

【図2】図1における光照射手段を示す分解斜視図FIG. 2 is an exploded perspective view showing a light irradiation unit in FIG. 1;

【図3】図2の光照射手段における輝度分布を示す図FIG. 3 is a diagram showing a luminance distribution in the light irradiation unit of FIG. 2;

【図4】図1における光照射手段と撮像手段との関係の
一例を示す図
FIG. 4 is a diagram showing an example of a relationship between a light irradiation unit and an imaging unit in FIG.

【図5】図1における光照射手段と撮像手段との関係の
他の例を示す図
FIG. 5 is a diagram showing another example of the relationship between the light irradiation unit and the imaging unit in FIG.

【図6】図4における撮像手段によって形成された受光
画像を示す図
FIG. 6 is a view showing a received light image formed by the image pickup means in FIG. 4;

【図7】図5における撮像手段によって形成された受光
画像を示す図
FIG. 7 is a diagram showing a light-receiving image formed by the imaging unit in FIG. 5;

【図8】図6におけるラインL2 上の輝度を示す図8 shows the brightness on the line L 2 in FIG. 6

【図9】図6におけるラインL2 上の輝度の微分値を示
す図
9 is a diagram illustrating a differential value of luminance on the line L 2 in FIG. 6

【図10】図7におけるラインL2 上の輝度を示す図10 is a view showing luminance on the line L 2 in FIG. 7

【図11】図7におけるラインL2 上の輝度の微分値を
示す図
11 is a diagram illustrating a differential value of luminance on the line L 2 in FIG. 7

【図12】受光画像における被検査面領域と背景領域と
の関係を示す図
FIG. 12 is a diagram illustrating a relationship between a surface area to be inspected and a background area in a received light image;

【図13】受光画像における輝度を示す図FIG. 13 is a diagram showing luminance in a received light image.

【図14】境界検出の手順を示すフローチャートFIG. 14 is a flowchart showing the procedure of boundary detection.

【図15】光照射手段の他の例を示す図FIG. 15 is a diagram showing another example of the light irradiation means.

【図16】図15に示す光照射手段を用いた場合の受光画
像の2値化状態を示す図
FIG. 16 is a diagram showing a binarized state of a received light image when the light irradiation unit shown in FIG. 15 is used.

【符号の説明】[Explanation of symbols]

6 被検査面 14 光照射手段 16 撮像手段 20 画像処理手段 48 境界検出手段 6 Inspection surface 14 Light irradiation means 16 Imaging means 20 Image processing means 48 Boundary detection means

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−64559(JP,A) 特開 昭62−294946(JP,A) 特開 平1−210807(JP,A) (58)調査した分野(Int.Cl.7,DB名) G01B 11/00 - 11/30 102 G01N 21/84 - 21/91 G06T 7/00 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-59-64559 (JP, A) JP-A-62-294946 (JP, A) JP-A-1-210807 (JP, A) (58) Field (Int.Cl. 7 , DB name) G01B 11/00-11/30 102 G01N 21/84-21/91 G06T 7/00

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 輝度が一方向に沿って漸変的に変化する
明暗光を被検査面に照射し、該被検査面から反射された
反射光を受光して受光画像を形成し、該受光画像におけ
る輝度変化に基づいて上記被検査面の表面状態を検査す
る表面状態検査装置であって、 上記受光画像中における被検査面領域のうち背景領域の
輝度との差が大きい輝度を有する顕在被検査面領域を検
出し、該顕在被検査面領域に関する位置情報に基づい
て、上記被検査面領域のうち背景領域の輝度との差が小
さい輝度を有する潜在被検査面領域と上記背景領域との
境界を検出する境界検出手段を備えていることを特徴と
する表面状態検査装置。
1. A method of irradiating a surface to be inspected with bright and dark light whose luminance gradually changes in one direction, receiving light reflected from the surface to be inspected, forming a light receiving image, What is claimed is: 1. A surface state inspection apparatus for inspecting a surface state of a surface to be inspected on the basis of a luminance change in an image, wherein: Detecting an inspection surface area, and, based on the position information regarding the surface area to be inspected, the potential inspection surface area having a small luminance difference from the luminance of the background area in the inspection surface area and the background area; A surface condition inspection apparatus comprising a boundary detecting means for detecting a boundary.
【請求項2】 上記境界検出手段が、上記受光画像中に
おける被検査面領域のうち背景領域の輝度との差が大き
くかつ背景領域の輝度よりも大きい輝度を有する顕在被
検査面領域を検出し、該顕在被検査面領域に関する位置
情報に基づいて、上記被検査面領域のうち背景領域の輝
度との差が小さい輝度を有する潜在被検査面領域と上記
背景領域との境界を検出するものであることを特徴とす
る請求項1に記載の表面状態検査装置。
2. A method according to claim 1, wherein said boundary detecting means detects a surface area to be inspected in said light receiving image, said surface area having a large difference from a luminance of a background area and a luminance greater than a luminance of said background area. Detecting a boundary between a potential inspection surface area having a small luminance difference from the luminance of a background area in the inspection surface area and the background area based on the position information regarding the actual inspection inspection surface area. The surface condition inspection apparatus according to claim 1, wherein:
JP04015883A 1992-01-31 1992-01-31 Surface condition inspection device Expired - Fee Related JP3100448B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04015883A JP3100448B2 (en) 1992-01-31 1992-01-31 Surface condition inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04015883A JP3100448B2 (en) 1992-01-31 1992-01-31 Surface condition inspection device

Publications (2)

Publication Number Publication Date
JPH05209732A JPH05209732A (en) 1993-08-20
JP3100448B2 true JP3100448B2 (en) 2000-10-16

Family

ID=11901193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04015883A Expired - Fee Related JP3100448B2 (en) 1992-01-31 1992-01-31 Surface condition inspection device

Country Status (1)

Country Link
JP (1) JP3100448B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5323320B2 (en) * 2006-07-19 2013-10-23 有限会社シマテック Surface inspection device
JP4822548B2 (en) * 2007-04-23 2011-11-24 レーザーテック株式会社 Defect inspection equipment

Also Published As

Publication number Publication date
JPH05209732A (en) 1993-08-20

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