JP3073392U - Semiconductor test equipment - Google Patents

Abstract

(57) [Summary] [Problem] To continuously update a plurality of CAL files,
The present invention also provides a semiconductor test apparatus having an automatic calibration function capable of automatically executing and updating a CAL file. Kind Code: A1 In a semiconductor test apparatus for storing and updating a CAL file updated by performing predetermined calibration, a plurality of types of CALs are stored from a storage medium of the semiconductor test apparatus.
A means for acquiring a list of file names of the files, receiving the list of file names of the obtained CAL file,
A semiconductor test apparatus including means for performing calibration based on level value information of an L file and automatically updating a CAL file sequentially.

Description

[Detailed description of the invention]

[0001]

[Technical field to which the invention belongs]

 The present invention relates to a semiconductor test apparatus having a calibration function for maintaining a certain timing accuracy. In particular, a semiconductor test with a calibration function that acquires and executes timing data under multiple types of level conditions after various devices with different physical propagation delay characteristics are installed / replaced or after a certain period of time. Related to the device.

[0002]

[Prior art]

 FIG. 1 shows a conceptual configuration diagram of a semiconductor test apparatus. It should be noted that since the semiconductor test apparatus is well-known and well-known in the art, other signals and components, and the detailed description thereof will be omitted except for the main part according to the present application.

First, the form and background of calibration will be described. Among the semiconductor test apparatuses, as a timing calibration form, there is a semiconductor test apparatus in which calibration data is acquired in advance, stored in a storage medium such as a hard disk, and used repeatedly. The present application is directed to a semiconductor test apparatus of this embodiment. That is, the calibration file storing the timing data corresponding to the test conditions acquired in advance is read from the storage medium and transferred to the corresponding timing correction circuit. This eliminates the need for calibration execution time, thus eliminating the drop in device test throughput. The typical timing and renewal timing of the timing calibration in the semiconductor test equipment as described above are as follows: at the time of shipment, at regular intervals taking into account aging, immediately after board repair / replacement, and immediately after the connection device (HIFIX, etc.). For each change in), after adjusting the unit power supply, after attaching / detaching the optional unit, etc.

The conditions for calibration differ depending on the device to be tested, the power supply voltage supplied to the device, and the input / output level of the input / output pin. For example, CMOS, TTL, LVCMOS, ECL, PECL, LVECL, or the like, or a desired level When conducting device testing, it is diverse. Multiple types of calibration files corresponding to this are stored.

As an example of a timing correction circuit in a semiconductor test device, a variable delay circuit VD and other correction circuits are provided for each tester channel in order to perform skew correction between clocks / channels.

On the other hand, the calibration data (referred to as CAL data) has different calibration conditions (referred to as CAL conditions) for performing the calibration measurement depending on the type of the device under test (DUT) and the test conditions. Representative examples of the CAL condition include the amplitude level of the driver DR and the threshold level of the comparator CP. Along with this, a calibration file (referred to as a CAL file), which is a storage unit for each CAL condition, obtained by performing calibration in advance under the required CAL conditions, is stored in a storage medium such as a disk. Will be saved. By applying this calibration, the timing variation of each delay of the hardware is corrected in a predetermined manner, so that the timing accuracy is maintained and a correlated device test can be performed.

Here, one CAL file is a file held for each CAL condition. For example, CAL data for all operation modes, all timing edges, and all waveform modes in a tester channel having 1000 channels, for example, tens of thousands of data. These multiple data groups are stored in a file together with CAL conditions as one unit. FIG. 2 shows a specific example of the file name of the CAL file and the voltage values of the high level VIH and the low level VIL of the driver DR as a simple example of the CAL condition. In this figure, the file name “base” is a standard CAL file, and the other file names are arbitrary CAL files. Usually, several tens or more CAL files are stored in the storage medium. Note that the comparator CP is similarly calibrated with the high-level VOH and low-level VOL voltage values, but here, only the driver DR side is focused.

In the device program to be tested, the CAL file name to be applied is described in the above file, so that the CAL file is allocated to the device program. Then, when the test of the DUT is performed, all of the plurality of CAL files of the CAL conditions necessary for the test conditions are read out based on the execution of the device program, and are collectively stored in a table memory of a corresponding correction circuit. Transferred and set up for use. During the device test, the CAL condition corresponding to the test item among the plurality of CAL conditions is selectively controlled for use.

By the way, the types of DUTs to be tested include power supply voltages different from, for example, 5 V, 3 V, and 2 V, CMOS, TTL, ECL, mixed analog devices, and other types. In addition, it is used under a plurality of types of CAL conditions that differ depending on the test items of the DUT. Further, in particular, in a semiconductor test apparatus applied to high-mix low-volume production, a large number of CAL files are stored and stored in a storage medium because various types of CAL conditions are required. On the other hand, as described above, the typical timing of calibration and the timing of updating are as follows: the CAL file is updated every fixed period in consideration of aging, immediately after board repair / replacement, and every time the connected device is changed. It is necessary to update all of them.

Next, the types of CAL files to be obtained will be described with reference to specific examples. When the calibration types according to the present application are classified, firstly, standard calibration (standard timing calibration), secondly, arbitrary level calibration (driver arbitrary level timing calibration), and others. There is.

In the first standard calibration, as shown in FIG. 1, when a standard driver output level of VIH = 3v and VIL = 0v defining an output amplitude output by a driver DR of pin electronics is used, This is a calibration performed under CAL conditions with a timing point of 50% of the output amplitude, and generates and stores the most basic CAL file required for each system / station / HIFIX type. Store and save to media. For example, in a two-station configuration, a semiconductor test apparatus to which ten types of H FIX are applied requires 2 × 10 = 20 types of CAL files. Here, the CAL file is a file that stores the correction data group acquired under one CAL condition as a unit. For example, assuming that a pin electronics driver has 1000 channels, 1000 × (timing edge) Type and operation mode) are acquired and stored. If the station is different, it must be generated as another unique CAL file. If the type of HIFIX connected to the IC handler or the IC prober changes, it must be generated as another unique CAL file.

The second arbitrary level calibration is a CAL file acquired under CAL conditions other than the standard calibration. For example, VIH = 2.5v and the other is at the same level VIL = 0v. Further, when a desired timing point other than 50%, for example, 30%, 70%, etc., in the output amplitude is designated, another CAL file is obtained.

Next, an example of a calibration update operation procedure will be described with reference to a flowchart of FIG. Here, it is assumed that the hardware related to the tester pins, that is, the hardware replacement work of a board, a unit, or a device.

In step 12, after the power supply of the main body of the semiconductor test apparatus is turned off, a desired hardware replacement operation is performed.

Step 14 is to turn on the power of the semiconductor test apparatus, and after a predetermined warm-up time elapses, the operator opens a calibration menu screen and executes the standard level calibration file shown in FIG. The name "base" is selected and designated to instruct execution of calibration. Thus, the calibration function of the semiconductor test apparatus measures all the timings of the tester channel under the standard CAL conditions, that is, at the levels of 3v and 0v, at the 50% timing point, and based on the obtained timing measurement data. Timing to correct skew between pins, etc., is obtained, and the data is sequentially stored in the corresponding storage position of the standard CAL file to complete the update. If the acquired CAL data becomes defective (calibration error) that cannot be registered as correction data, replacement of the CAL file may be interrupted due to replacement work or a failure of the replacement device. A warning is displayed to the operator by displaying it on the screen together with the correction data and the channel information.

Step 16 is a selection designation of an arbitrary level calibration according to one CAL condition. The operator opens a calibration menu screen and stores the calibration menu screen as shown in FIG. A list of file names of many CAL files is displayed on the screen, and one CAL file is selected from the list.

In step 18, the application program for executing calibration receives the one selected file name and executes an arbitrary level calibration. The designated CAL condition is, for example, in the file name "opt1 v" shown in FIG. 2, the levels of 1.0v and 0v are the CAL condition, and the timing correction data for correcting the skew or the like is obtained based on this condition. In the same manner as described above, the data is stored in the corresponding CAL file and the update is completed.

In step 20, the operator checks whether or not all arbitrary level calibrations have been completed, and if there is an unupdated CAL file, the process proceeds to step 16. If all CAL files have been updated, the calibration operation ends.

Meanwhile, the calibration execution time under one CAL condition takes, for example, several tens of minutes. This time varies depending on the system configuration. For example, assuming that one type of CAL time is 30 minutes and all 20 types of CAL conditions are executed, it takes 10 hours. During this time, the operator needs to wait for a key input operation each time one CAL is completed. The user operates the operation terminal to display the large number of lists on the screen. Based on the list, the user manually executes the calibration for each CAL condition, and sequentially updates. However, there is a danger that the update may be forgotten in rare cases due to the long wait time. During the execution of the calibration, the device test is temporarily stopped. For this reason, workers wait on the spot so that the calibration is performed continuously, and monitor them so that no idle time occurs. If idle time occurs, the utilization rate of device testing will be substantially reduced. There are practical difficulties in these respects.

[0020]

[Problems to be solved by the invention]

 As described above, in the related art, at the time of updating a CAL file, an operator manually selects and instructs each CAL file for execution. In addition, in updating the CAL file at regular intervals to maintain a certain timing accuracy, the operator needs to face the updating of the CAL file each time. In a mass production line, dozens of semiconductor test equipments are installed, so a lot of labor is required to perform the work. In these, there are undesirable and practical difficulties. Therefore, the problem to be solved by the present invention is to provide a semiconductor test apparatus having an automatic calibration function that enables a CAL file to be updated by continuously and automatically performing an update operation of a plurality of CAL files. To provide.

[0021]

[Means for Solving the Problems]

 First, in order to solve the above-mentioned problem, in a semiconductor test apparatus for performing storage and updating of the CAL file updated by performing predetermined calibration, a file name list of a plurality of types of CAL files from a storage medium of the semiconductor test apparatus is provided. And a means for receiving a list of the obtained CAL file names, performing calibration based on the level value information of the CAL file, and automatically updating the CAL file sequentially and automatically. A semiconductor test apparatus having the above features and capable of automatically updating a plurality of CAL files collectively. According to the above-described invention, a semiconductor test apparatus having an automatic calibration function capable of continuously and automatically updating a plurality of CAL files and updating the CAL file can be realized.

Second, in order to solve the above-mentioned problem, transmission / reception is performed between each IC pin of the device under test via a pin electronics driver DR or a comparator CP, and the driver DR applies an applied waveform applied to a DUT. The comparator CP has a variable threshold voltage for logically converting the received signal, and the timing skew between channels, etc., depends on the setting conditions of these variable voltage levels. A correction circuit for correcting the change is provided for each channel in a predetermined manner. The correction circuit can correct the timing of the applied waveform or the phase of the logical determination timing in a predetermined manner in response to the setting of the correction data. The correction data to be set and supplied to the correction circuit is called calibration data (CAL data), and one type of voltage level The calibration condition (CAL condition) is referred to as the calibration condition (CAL condition), and the file storing the one type of CAL condition in units of the correction data of all tester channels is referred to as a calibration file (CAL file). After changing the hardware conditions of the semiconductor test equipment to conditions different from the equipment conditions that were previously calibrated, or after a certain period of time, calibrated and updated the calibration data in the specified CAL file. A means for obtaining a list of file names of a plurality of types of CAL files from a storage medium of the semiconductor test apparatus, receiving the obtained list of file names of the CAL file, and obtaining level value information of the CAL file. Carry out calibration based on Comprises means for sequentially automatically update the CAL file, comprises a least, there is a semiconductor testing apparatus, characterized in that the automatically updatable collectively multiple CAL file.

Third, in order to solve the above-mentioned problem, in a means for acquiring a file name list of a CAL file, a single or a plurality of device programs to be applied to a device test are designated in advance, and The description contents of the device program are searched, and the CAL condition is extracted and obtained from the statement description of the CAL condition. Based on this, the CAL file having the CAL condition that matches the extracted CAL condition is extracted from a plurality of types of CAL files. The above-described semiconductor test apparatus further comprises a unit for outputting a file name list for only the file.

[0024] Further, in the update of the CAL file, a timer starting means for designating a start date and time of the update execution and automatically starting the calibration when the designated date and time is reached is further provided. There is the above-mentioned semiconductor test apparatus.

Further, there is the semiconductor test apparatus described above, wherein the type of the CAL file includes a standard calibration and an arbitrary level calibration.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an example of an embodiment to which the present invention is applied will be described with reference to the drawings. Further, the scope of claims for utility model registration is not limited by the following description of the embodiments, and the elements and connection relationships described in the embodiments are not necessarily essential to the solution. Absent.

The present invention will be described below with reference to FIGS.

An example of the procedure for updating the automatic calibration according to the present invention will be described below with reference to the flowchart of FIG. Here also, it is assumed that the hardware related to the tester pins, that is, the hardware replacement work of a board, a unit, or an apparatus. Here, it is assumed that all of the CAL files stored in the storage medium are four, and their file names are “base”, “opt1v”, “opt2v”, and “opt ECL” as shown in FIG. .

Step 12 is the same as the conventional case. After the main power supply of the semiconductor test apparatus is turned off, a desired hardware replacement operation is performed.

Step 30 searches for a storage medium storing a plurality of CAL files. Usually, it is stored in the specified directory. By searching this, a list of all file names of the corresponding CAL file is obtained as a file list. As a result, the four CAL files “base”, “opt1v”, “opt2v”, and “optECL” are automatically obtained.

In step 32, one CAL file is selected in order from the file list of the file name list and supplied to the application program for executing calibration. It is desirable that the first file name be specified as “base” which is the standard calibration.

In step 36, upon receiving the CAL file specified above, the application program for executing calibration executes calibration based on the level value information of the CAL file, and automatically updates. If the acquired CAL data becomes a defect that cannot be registered as correction data (calibration error), the update operation is interrupted because replacement work or a failure in the replacement device is considered, and the defective correction data is replaced with the correction data. Along with the channel information, a warning notification is given to the operator, and the information is stored for future reference.

In step 38, it is checked whether or not the calibration update has been completed for all the file names. If there is an unupdated CAL file, the process proceeds to step 32. If all the CAL files have been updated, the automatic calibration operation ends.

According to the automatic calibration of the present invention, the file list of the CAL file is obtained by searching the storage medium, and the CAL file is sequentially executed based on the obtained file list. By supplying and executing the calibration and updating the CAL file, there is an advantage that the calibration is automatically executed continuously even if the operator is not present at the site. Furthermore, since there is no need for an operator to be present at the site, for example, in a calibration after a certain period of time, a large number of systems installed in a mass production line can be efficiently and simultaneously calibrated.

The technical idea of the present invention is not limited to the specific configuration example and the connection example of the above-described embodiment. Further, based on the technical idea of the present invention, the above-described embodiment may be appropriately modified and applied. For example, as a means for initiating the execution of the above-mentioned automatic calibration function, when a network is formed with a higher-level workstation, the semiconductor test apparatus is a remote carrier that can be collectively controlled from the higher-level workstation. It may have a translation function.

Further, means for designating a date and time to execute an automatic calibration function may be additionally provided. That is, in the execution start of the above-mentioned automatic calibration function, a timer start means capable of starting by designating a desired date may be additionally provided. In this case, the semiconductor test equipment is often operated all day, but it can be automatically operated by specifying a non-operating holiday or a non-operating time, thereby reducing the pause time of the device test. This has the advantage that the total operation rate is substantially improved.

Further, a function for updating the calibration of only the CAL file actually used may be additionally provided. That is, in the file list obtaining means in the automatic calibration function described above, a single or a plurality of device programs to be actually applied to the device test are specified in advance. Then, at the beginning of the execution of the automatic calibration function, the description content of the device program is searched, the CAL condition in the statement description of the CAL condition is obtained, and based on the CAL condition, only the corresponding CAL condition is targeted. A function to execute a file update operation may be additionally provided. In this case, the execution of the calibration under the CAL condition that is not actually used in the device test can be excluded, and as a result, the advantage that the total calibration execution time can be significantly reduced can be obtained. Therefore, the time for temporarily stopping the device test is reduced, and the operation rate of the device test can be improved.

[0038]

[Effect of the invention]

 The present invention has the following effects based on the above description. As described above, according to the automatic calibration function of the present invention, the storage medium is searched to obtain a file list of the CAL file, and based on this, the CAL file is sequentially calibrated to update the CAL file. This has the advantage that it can be automatically executed continuously. Furthermore, efficient calibration can be performed on many systems simultaneously and in parallel. Therefore, there is an advantage that the worker does not need to be present at the site. Therefore, the technical effect of the present invention is great, and the industrial economic effect is also great.

[Brief description of the drawings]

FIG. 1 is a conceptual configuration diagram of a semiconductor test apparatus.

FIG. 2 shows a plurality of four types of CAL files and respective CAL files.
FIG. 9 is a diagram showing specific numerical examples of VIH level and VIL level as conditions.

FIG. 3 is a flowchart illustrating a conventional calibration update operation procedure.

FIG. 4 is a flowchart illustrating an automatic calibration function according to the present invention.

[Explanation of symbols]

 DR driver CP comparator DUT Device under test VD Variable delay circuit VIH High level VIL Low level

Claims (5)

[Utility model registration claims] 1. A predetermined calibration is performed and CA
In a semiconductor test apparatus for storing and updating an L file, means for acquiring a list of file names of a plurality of types of CAL files from a storage medium of the semiconductor test apparatus;
Means for performing calibration based on level value information of an AL file and automatically updating a CAL file sequentially; and a semiconductor test apparatus comprising: 2. The circuit is exchanged with each IC pin of a device under test (DUT) via a driver DR of pin electronics or a comparator CP.
The amplitude voltage of the waveform applied to the UT is variable, the comparator CP has a variable threshold voltage for logically converting the received signal, and the timing skew between channels depends on the setting conditions of these variable voltage levels. Is provided for each channel in a predetermined manner, and correction data set and supplied to the correction circuit is used as calibration data (CAL data) to calibrate correction conditions at one type of voltage level. When a file that stores the one type of CAL condition in units of correction data of all tester channels is set as a calibration file (CAL file) as a condition (CAL condition), the condition differs from the device condition previously subjected to calibration. After changing the hardware conditions of the semiconductor test equipment, or after a certain period of time, A means for acquiring a list of file names of a plurality of types of CAL files from a storage medium of the semiconductor test apparatus, wherein the semiconductor test apparatus saves and updates the CAL file obtained by performing calibration in a predetermined manner and updating the calibration data; After receiving the obtained CAL file name list, C
Means for performing a calibration based on the level value information of the AL file and automatically updating the CAL file sequentially, comprising: a means for automatically updating a plurality of CAL files collectively; Characteristic semiconductor test equipment. 3. A means for acquiring a file name list of a CAL file, in which a device program to be applied to a device test is specified in advance, a description content of the device program is searched, and a statement description of a CAL condition is described. CAL conditions are extracted and obtained from the CAL conditions.
3. The semiconductor test apparatus according to claim 1, further comprising: means for outputting a file name list only for CAL files having CAL conditions that match the conditions. 4. A method for updating a CAL file, further comprising a timer starting means for designating a start date and time of the update execution and automatically starting the calibration when the designated date and time is reached. Claim 1 or 2
The semiconductor test apparatus according to the above. 5. The semiconductor test apparatus according to claim 1, wherein the type of the CAL file includes a standard calibration and an arbitrary level calibration.