JP3042333B2 - Electric signal displacement conversion device, equipment using the conversion device, and method of driving a fluid transfer device using the conversion device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric signal displacement conversion device,
The present invention relates to a device using the conversion device and a method for driving a fluid transfer device using the conversion device. Specifically,
The present invention relates to an electric signal displacement conversion device that converts an electric signal into a displacement of an operation unit by utilizing an electric property of a strain generating layer and conversely converts a displacement of the operation unit into an electric signal. Furthermore, actuators such as optical scanners, relays, vibration generators, moving mechanisms and the like using the electric signal displacement conversion device, pressure sensors,
The present invention relates to devices such as a physical quantity detector such as an acceleration sensor and a flow velocity sensor.

[0002]

2. Description of the Related Art A laminated piezoelectric actuator is well known as a microactuator for generating a minute displacement. As shown in FIG. 1A, the multilayer piezoelectric actuator C1 has a piezoelectric ceramic layer 101 and an electrode layer 102 that generate longitudinal strain (strain parallel to the direction of an electric field) alternately stacked in multiple layers. When an electric signal is input to both electrode layers 102, a longitudinal distortion is generated in the piezoelectric ceramic layer 101, and as shown in FIG. 1B, the laminated piezoelectric actuator C1 is vertically connected. Stretch in the direction. The amount of expansion and contraction of the laminated piezoelectric actuator C1 is obtained by multiplying the amount of expansion and contraction of each piezoelectric ceramic layer 101 by the number of piezoelectric ceramic layers 101. Therefore, when the driving target is fixed to the end face of the multilayer piezoelectric actuator C1, the driving target can be translated.

[0003] However, such a laminated piezoelectric actuator C1 does not have a structure for expanding the displacement itself, so that the maximum displacement amount is smaller than the size (eg, thickness) of the actuator. There is a problem that it is very small. In order to increase the output displacement, a mechanical displacement magnifying mechanism may be used. However, when the displacement magnifying mechanism is attached to the laminated piezoelectric actuator C1, there is a disadvantage that the actuator becomes large and the cost increases. . Further, in order to increase the displacement amount of the piezoelectric actuator itself, it is necessary to increase the number of stacked piezoelectric ceramic layers. Therefore, miniaturization is difficult, and a particularly thin actuator cannot be manufactured.

Further, in the multilayer piezoelectric actuator C1, since it is necessary to alternately laminate the multilayer piezoelectric ceramic layers 101 and the electrode layers 102, the manufacturing process is complicated and the cost is high.

Therefore, a cantilever type actuator C2 as shown in FIGS. 2A and 2B has been developed. This is a strip-shaped operating part by laminating a substrate layer 106, a strain-generating layer 107 made of a piezoelectric material that generates lateral strain (strain in a direction perpendicular to the direction of the electric field), and electrode layers 108 on both surfaces of the strain-generating layer 107. 109, and one end of the operation section 109 is connected to the frame section 11
It is fixed at 0. When an electric signal is input between the electrode layers 108 to generate an electric field in the strain generating layer 107, only the strain generating layer 107 expands and contracts due to lateral strain.
The operation layer 109 in which the substrate and the substrate layer 106 are joined is curved in the thickness direction (upward or downward in FIG. 2). This operation layer 109
Is controlled by the polarity and signal intensity of the electric signal applied to the electrode layer 108. In such a cantilever-type actuator C2, the displacement of the operation unit 109 is increased as the distance from the base end fixed to the frame unit 110 increases. Can be displaced greatly by driving the fixed object and by extending the operation unit 109.

Although FIGS. 2A and 2B show a unimorph type having only one strain-generating layer, a bimorph cantilever type actuator having strain-generating layers on both surfaces of a substrate layer. Is also known.

However, in the cantilever-type actuator C2, there is no region on the operation unit 109 which keeps the parallel before and after the deformation, and the object driven by the actuator cannot move in parallel. In particular, as the free end of the operating section is used to increase the displacement amount and the operating section 109 is made longer, the inclination of the driven object before and after the deformation increases. Therefore, for example, it cannot be used for driving a reflector or the like for changing an optical path length used in an interference optical system or the like.

[0008] Although an attempt has been made to provide a region which can be translated in the cantilever type actuator C2, the conventional method requires a very complicated structure, making it difficult to reduce the size and increasing the cost. Was.

Furthermore, because of the cantilever structure, it is easy to be displaced when an external force is applied to the tip of the operating part 109, and the accuracy and reliability of the displacement amount are low. For the same reason,
The driving force for displacing the driving object was also weak.

Further, in the cantilever structure, the operating portion 109
Since the initial strain is generated by the change in the internal stress in the thickness direction of the substrate, high-precision control of the internal stress of the strain-generating layer 107, the electrode layer 108, and the substrate layer 106 at the time of no load is required to perform the correct operation. Was.

[0011]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks of the conventional example, and has as its object to reduce the size and cost and to simplify the control of the manufacturing process. Another object of the present invention is to provide an electric signal displacement conversion device having a simple structure having a parallel displacement region. Another object of the present invention is to propose various devices using the electric signal displacement conversion device.

[0012]

According to the present invention, there is provided an electric signal displacement conversion device having a structure in which at least one strain-generating layer that generates transverse strain in a direction perpendicular to the direction of an electric field is sandwiched by at least two electrode layers. An operating unit having a frame unit that supports the operating unit, the operating unit includes a portion fixed to the frame portion, and a displaceable portion that is not fixed to the frame portion, and the fixed portion is at least a portion of the periphery of the portion that is not the fixed are arranged so as to sandwich the portion that is not the fixed, dynamic beside strain of the strain generating layer
By changing the length of the whole working part,
It is characterized in that directional displacement occurs .

In this electrical signal displacement conversion device, the thickness of at least one of the electrode layers may be different from the thickness of the other electrode layers. In at least one of the electrode layers, the thickness of a part of the electrode layer may be different from the thickness of the other part. Alternatively, in at least one of the electrode layers or the strain generating layer, an opening can be provided in a part of the electrode layer or the strain generating layer.

Further, a region formed of a material having a Young's modulus smaller than that of the strain generating layer may be provided between the electrode layers. Alternatively, a part of the operation unit may be a region having a higher Young's modulus than the other part.

Further, the electric signal displacement conversion device has a plurality of operating units and electric signal applying means for applying an electric signal to the electrode layer of each operating unit, and is applied to at least one of the operating units. The polarity of the electric signal may be opposite to that of the electric signal applied to the other operation unit, and the frame unit may be deformable by a force from the operation unit.

An optical scanner according to the present invention is characterized by having the electric signal displacement conversion device, a light reflecting surface provided on a displacement portion of the conversion device, and driving means for driving the displacement portion of the conversion device. I have.

The relay according to the present invention is characterized in that the electric signal displacement conversion device, an electric signal applying means for driving a displacement portion of the conversion device, a first switching electrode provided on the displacement portion of the conversion device, And a second switching electrode provided opposite to the first switching electrode.

A vibration generator according to the present invention is characterized by having the electric signal displacement conversion device and an electric signal application means for inputting an electric signal for vibrating a displacement portion of the conversion device.

A loudspeaker according to the present invention is characterized by having the electric signal displacement conversion device and an electric signal application means for inputting an electric audio signal for vibrating a displacement portion of the conversion device.

A valve device according to the present invention comprises a passage for allowing a fluid to pass therethrough, and the electric signal displacement conversion device arranged so that a displacement portion of an operating portion faces the passage. It is characterized in that the flow rate of the fluid flowing between them can be controlled.

[0021] A Braille display device according to the present invention includes the electric signal displacement conversion device in which a plurality of operation units are arranged in a matrix, and a plurality of protrusions recognizable by tactile sense driven by the respective operation units. It is characterized by that.

A printer head according to the present invention includes the electric signal displacement conversion device in which a plurality of operation units are arranged, and means for holding ink for discharging as ink particles by driving each operation unit. It is characterized by.

[0023] A probe device according to the present invention is characterized by comprising the electric signal displacement conversion device and a probe provided in an operation section of the conversion device.

A generator according to the present invention is characterized by comprising the electric signal displacement conversion device and means for outputting electric energy generated in the conversion device when physical energy is applied to the conversion device. .

A pressure sensor according to the present invention includes the electric signal displacement conversion device, and pressure introducing means for guiding a detected pressure to a displacement portion of the conversion device. It is characterized in that the pressure is detected based on the generated electric signal.

An acceleration sensor according to the present invention is characterized in that acceleration is detected based on the electric signal displacement conversion device and an electric signal generated in a displacement portion of the conversion device by the acceleration.

A flow rate sensor according to the present invention comprises the electric signal displacement conversion device, and means for guiding a fluid pressure, which varies according to the flow velocity of the fluid, to the surface of the operation section of the conversion device, and is guided to the surface of the operation section. It is characterized in that the flow velocity of the fluid is obtained from the fluid pressure.

A temperature sensor according to the present invention includes the electric signal displacement conversion device, and means for generating a thermal stress in an operation section of the conversion device by a change in temperature. It is characterized by seeking change.

A fluid transport device according to the present invention includes a fluid passage for transporting a fluid, and the electric signal displacement conversion device having at least three operating portions provided to face the fluid passage. It is characterized in that the fluid in the fluid passage is conveyed by driving.

The driving method of the fluid transfer device according to the present invention is as follows.
A method of transporting a fluid by switching the operation of each of the operation units at a constant timing, wherein each operation unit is switched at a constant timing in the order of a closed state, a closed state, and an open state.

Further, another driving method of the fluid transfer device according to the present invention includes a state in which the operating section is displaced to the fluid passage side to close the fluid flow path, a state in which the operating section is not displaced, and a state in which the operating section is not displaced. A method of transporting fluid by switching at a certain timing between a state in which a fluid passage is widened by being displaced to a side opposite to a passage, and a state in which each operating unit is displaced to a fluid passage side at a fixed timing, and a state in which no displacement is caused. The switching is performed in the order of the state of displacement to the side opposite to the fluid passage and the state of no displacement.

[0032]

In the electric signal displacement conversion device according to the present invention, when an electric signal is input to the strain generating layer via the electrode layer, the operating section extends in the length direction due to the lateral strain of the strain generating layer. At least a portion around a portion not fixed to the frame portion (referred to as a displacement portion) is fixed so as to sandwich the displacement portion. The amount varies with the signal strength. Alternatively, when the fixed portion is fixed to the frame portion in a form in which the displaced portion is curved in an initial state where no electric signal is applied, the electric signal is applied to expand and contract the operating portion in the length direction. Then, displacement occurs in the thickness direction according to a change in the length of the displacement portion.

Conversely, when an external force is applied to the displaced part due to a change in the physical quantity in contact with the displaced part, an electric signal corresponding to the physical quantity or the change is output from the operation unit.

Moreover, in the electric signal displacement conversion device of the present invention, since the fixed portion is arranged so as to sandwich the displaced portion at least around the displaced portion, the center portion of the displaced portion can be displaced. Displaces while maintaining the parallel state with the original state. Since the fixed position moves in parallel while maintaining the parallel state, this position (the center of the displacement portion)
For example, when a driving target is attached to the device, the driving target can be moved in parallel. In addition, by sensing a physical quantity or a change thereof in a portion that moves in parallel, the sensing accuracy of the physical quantity can be improved.

Further, since at least a part of the opposed portion around the displaced portion is fixed, the stress at the time of deformation of the displaced portion does not escape in any portion, and a large displacement amount can be obtained in the displaced portion. Can be. In particular, if the entire circumference of the displaced portion is fixed, it can be used even when the object in contact with the displaced portion is liquid or powder. If only both ends of the displacement portion are fixed, the constraint of the displacement portion can be reduced, and a large displacement can be obtained. In addition, the driving force of the driving target can be increased.

Further, since the entire circumference and both ends of the displaced portion are fixed to the frame portion, the positional accuracy of the displaced portion is increased, and the displacement amount can be controlled with high accuracy.

Further, in the electric signal displacement conversion device of the present invention, since the buckling of the operating portion is used, a substrate layer is not required as in the conventional cantilever type actuator, and the minimum unit of the operating portion is It can be composed of one strain-forming layer and one set of electrode layers. This greatly simplifies the structure,
It is possible to reduce the size (particularly, the thickness) and reduce the cost.

Further, since the displacement portion of the electric signal displacement converter of the present invention is displaced by buckling, even if there is an initial strain in the operating portion, the operating portion is deformed as long as the buckling stress of Euler is not exceeded. Therefore, high-precision control of the internal stress at the time of no load unlike the cantilever type actuator is not required, and the accuracy of the output displacement amount can be increased.

In such an electric signal displacement conversion device, the buckling direction of the operating portion can be controlled by making at least one of the electrode layers different in thickness from the other electrode layers.

Further, in at least one of the electrode layers, by making the thickness of a part of the electrode layer different from the thickness of the other parts, it is possible to make the operating part easy or difficult to deform in that part. Can be adjusted. Similarly, by providing an opening in at least one of the electrode layers or the strain-generating layer, a part of the electrode layer or the strain-generating layer can be easily deformed. Alternatively, even if a region formed of a material having a Young's modulus smaller than that of the strain generating layer is provided between the electrode layers, the operating portion can be easily deformed.

Conversely, if a part of the operating part is a region having a higher Young's modulus than the other part, the operating part can be hardly deformed at that part, and in particular, the part of the operating part which is displaced in parallel can be hardly deformed. As a result, the area for parallel displacement can be widened.

Further, when a tensile stress is generated in a part of the plurality of operating portions to deflect the frame portion and a compressive stress is generated in the other operating portions to cause buckling, a displacement amount of the buckled operating portion is obtained. Can be amplified. Alternatively, different operation units can be driven as needed.

When the electric signal displacement conversion device of the present invention is used as an actuator for an optical scanner, a relay, a valve device, or the like, an actuator having a novel structure can be obtained. In particular, these actuators can be made smaller, lighter and thinner, and can be applied to applications that could not be used conventionally. In particular, when an array or a matrix is used, it can be integrated and miniaturized, so that it can be used as a Braille display device or a printer head.

Similarly, it can be used as a physical quantity detecting means such as a pressure sensor or a flow rate sensor, so that various sensors having a novel structure can be provided, and the various sensors can be reduced in size, weight and thickness.

[0045]

FIG. 3 is a perspective view showing an electric signal displacement converter A1 according to one embodiment of the present invention. This electric signal displacement conversion device A1 includes a frame unit 1 and an operation unit 2. The frame portion 1 can be formed by a semiconductor wafer such as silicon or a thin metal plate such as stainless steel. In this embodiment, silicon capable of utilizing a semiconductor manufacturing process is used. Although the frame portion 1 has a rectangular shape in FIG. 3 in terms of yield and processing efficiency, the frame portion 1 may have any shape such as a disk shape. An opening or recess 3 is formed in the frame portion 1, and the band-shaped operating portion 2 is disposed so as to bridge over the opening or recess 3. Working part 2
Are electrode layers 5a and 5b formed on the upper and lower surfaces of the strain-generating layer 4. Both ends of the operating portion 2 are fixed portions 6 fixed to the upper surface of the frame portion 1. Is a displacement portion 7 not fixed to the frame portion 1. That is, the operating section 2 has a double-supported beam structure in which the displacement portion 7 is bridged over the opening or the concave portion 3. In the one fixed portion 6, the lower electrode layer 5b is exposed, and the electric signal lines 8 are connected to the upper and lower electrode layers 5a and 5b.
Is connected.

The strain-generating layer 4 only needs to generate a lateral strain in a direction perpendicular to the direction of the electric field by applying a voltage, or generate an electric field in a vertical direction by the transverse strain. For example, a piezoelectric material, an electrostrictive material, A functional thin film made of a magnetostrictive material or the like can be used. In particular, a PZT thin film having the largest piezoelectric constant among piezoelectric materials for which a manufacturing process has been established is suitable for the strain generating layer 4. At this time, in order to obtain a PZT film having a large piezoelectric coefficient, it is necessary to orient the strain-generating layer 4 in the [111] direction.
1) It is necessary to use a Pt / Ni vapor-deposited film in which the lattice constant of the orientation film is close to the lattice constant of the (111) orientation film of PZT. On the other hand, the upper electrode layer 5a is made of a deposited Pt film.
Therefore, the frame portion 1, the strain-generating layer 4, and the electrode layers 5a, 5b
Can be processed and formed into a film using a semiconductor manufacturing process, high mass productivity and accuracy can be obtained, and miniaturization and cost reduction can be achieved.

The electric signal lines 8 pass through the electrode layers 5.
In an initial state in which no voltage is applied between a and 5b, as shown in FIG. 4A, the strain-generating layer 4 is supported on the frame portion 1 in a flat state in a bilateral manner. When an electric signal (voltage V) is input to the electric signal line 8, lateral strain is generated in the strain generating layer 4 by a piezoelectric transverse effect, and the strain generating layer 4 extends in the length direction. Since the part 6) is fixed, a compressive stress is generated in the operating part 2. When the voltage V applied to the strain generating layer 4 is small and the compressive stress generated in the operation unit 2 is smaller than the buckling stress σ _{E of} Euler, an electric signal is input as shown in FIG. Even if it is, the operation part 2 remains flat and does not deform, and the displacement part 7 is kept in a non-displaced state. Note that the Euler buckling stress σ _E is theoretically expressed by σ _E = (π ² EI) / (QaL ² ). Here, E is the Young's modulus of the working unit 2, I is the second moment of area of the working unit 2, L is the length of the displacement part 7,
Qa is a cross-sectional area of the operation unit 2. In contrast, by increasing the applied voltage V, the compressive stress of the operating unit 2 at a certain voltage value V _E exceeds the buckling stress sigma _E Euler, displacement portion 7 as shown in FIG. 4 (c) the seat It bends and its center is displaced in the thickness direction. At this time, since both sides of the displacement portion 7 are the fixed portions 6, the displacement portion 7 is deformed symmetrically, so that the central portion of the displacement portion 7 moves in parallel. Moreover, the amount of displacement at the center of the displacement portion 7 increases as the applied voltage V increases. FIG. 5 is a diagram showing an example of the relationship between the applied voltage V and the amount of displacement at the center of the displacement portion 7, in which displacement occurs at a voltage higher than the applied voltage V _E corresponding to the buckling stress σ _E of Euler. doing. Moreover, since beyond the applied voltage V _E to generate a displacement begun by buckling, when initially displacement generation is large rate of change of displacement (slope of the curve in FIG. 5), the applied voltage is increased, the amount of change The rate of change decreases. When a linear displacement input / output is required, as in an optical scanner or an acceleration sensor, it is preferable to use this in an area where the rate of change is large and the curve is relatively linear. Further, when an on / off displacement input / output is required as in a relay or an opening / closing valve device, it is desirable to use a gentle region having a small displacement speed.

As described above, since both ends of the operating portion 2 are fixed and the displacement portion 7 is constantly deformed symmetrically, the displacement portion 7 is deformed.
Are parallel regardless of the magnitude of the displacement.
Therefore, for example, when used as an actuator,
By fixing the driven object at the center of the displacement portion 7, the driven object can be translated. Moreover, if only one end of the displacement portion 7 is fixed, the free end slides on the frame portion 1 and the internal stress generated in the strain generating layer 4 escapes. Device A1
Since both sides of the displacement portion 7 are fixed, a large displacement in the thickness direction can be obtained. Further, since the displacement portion 7 only fixes the fixed portions 6 at both ends, and the both side edges are not fixed or restricted, the displacement portion 7 is easily bent and can output a large displacement in the thickness direction. As a result, the displacing portion 7 is deformed into a bridge shape so that the operating portion 2
It also has a function as a displacement magnifying mechanism that expands and converts the lateral expansion / contraction amount into a displacement amount in the thickness direction, and can output a large displacement amount.

FIG. 6 is a perspective view showing an electric signal displacement conversion device A2 according to another embodiment of the present invention, in which the upper and lower electrode layers 5a, 5a, 5b are electrically separated by an insulating layer 9. That is, in one fixed portion 6, the electrode lead-out wiring 10b is provided on the upper surface of the frame portion 1 by extending from the end of the lower electrode layer 5b, and the lower electrode layer 5b, the electrode lead-out wiring 10b, Each end of the layer 4 is covered with an insulating layer 9. An electrode lead wire 10 a extending from an end of the upper electrode layer 5 a is guided to the upper surface of the frame unit 1 through the upper surface of the insulating layer 9. As the insulating layer 9, a silicon oxide film or a silicon nitride film whose formation process has been established can be used.
Therefore, electrical leakage between the upper and lower electrode layers 5a and 5b can be reliably prevented by the insulating layer 9, and stable operation characteristics can be obtained. Electrode lead wires 10a, 10b
Pad portions 11 for connecting the electric signal lines 8
a, 11b are provided. Although the electrode lead wires 10a and 10b are formed on the upper surface of the frame portion 1 in FIG. 6, they may be led to the side surface or the lower surface of the frame portion 1.

FIG. 7 is a perspective view showing an electric signal displacement conversion device A3 according to still another embodiment of the present invention. In this embodiment, the thicknesses of the electrode layers 5a and 5b are different between the upper and lower sides, and the thickness of the upper electrode layer 5a is larger than the thickness of the lower electrode layer 5b as shown in the figure. Alternatively, the thickness of the lower electrode layer 5b may be larger than the thickness of the upper electrode layer 5a. Thus, the electrode layer 5
By making the thicknesses of a and 5b different between the upper and lower sides, it is possible to determine which side of the displacement portion 7 is to be buckled and displaced.

Further, in order to reduce the effective rigidity of the operation section 2 and facilitate the deformation of the displacement section 7, an opening 12 and a film thickness change section 13 are provided in the operation section 2 (particularly, the displacement section 7).
For example, in this embodiment, the opening 12 is formed in the upper and lower electrode layers 5 a and 5 b and the strain-generating layer 4 at the end of the displacement portion 7 so that the operating portion 2 is easily bent at the boundary between the fixed portion 6 and the displacement portion 7.
Is open. In addition, thin film thickness changing portions 13 are provided at appropriate intervals on the electrode layer 5a on the thick side, and the film thickness changing portions 13 are provided.
Makes the displacement portion 7 easy to bend. Therefore, the displacement amount in the thickness direction of the displacement portion 7 can be further increased for the same electric signal input. However, the opening 12 and the film thickness changing part 13 are formed symmetrically on both sides of the fixed part 6 with respect to an axis passing through the center of the displacement part 7 and extending in the width direction of the displacement part 7, and Are formed symmetrically on both sides with respect to an axis extending in the longitudinal direction of the displacement portion 7 through the shaft, so as to effectively increase the displacement amount without causing torsional deformation.

The upper and lower electrode layers 5a, 5b and the electrode lead-out wirings 10a, 10b extending therefrom are insulated from each other by covering the end of the lower electrode layer 5b with the strain-generating layer 4.

It should be noted that the way of providing the openings 12 and the film thickness changing portions 13 is not limited to the illustrated example, and can be provided arbitrarily. For example, in FIG. 7, the opening 12 is provided in the upper and lower electrode layers 5a and 5b and the strain generating layer 4, but may be provided in any one of them. For example,
It may be provided only on the electrode layer 5a having a large thickness. Furthermore, not only the end of the displacement portion 7 but also the displacement portion 7
May be provided closer to the center. Further, the thin film thickness changing portion 13 may be provided in the other electrode layer 5b. Conversely, by providing the thick film thickness changing portion 13 at the center of the displacement portion 7 so as to make it difficult to deform, it is possible to widen the region where the parallel movement is performed.

FIG. 8 is a perspective view showing an electric signal displacement conversion device A4 according to still another embodiment of the present invention, in which a part of the strain generating layer 4 between the electrode layers 5a and 5b is replaced with a strain generating layer. The elastic layer 14 made of an insulating material having a Young's modulus smaller than 4 is used. The area to be replaced with the elastic layer 14 is an area where the bending of the operation section 2 is desired to be increased. As the elastic layer 14, a polymer material such as polyimide having a well-established forming process can be used. For example, in the embodiment shown in FIG. 8, the elastic layer 14 is provided over the end regions of the fixed portion 6 and the displacement portion 7, and the operating section 2 is fixed to the frame 1 in the region of the elastic layer 14. Thus, by replacing a part of the strain generating layer 4 with the elastic layer 14 having a small Young's modulus, the effective rigidity of the operating part 2 can be reduced, and the displacement of the displacement portion 7 in the thickness direction is increased. can do. In particular, when the boundary region between the fixed portion 6 and the displacement portion 7 is replaced with the elastic layer 14, the energy used for bending the operating portion 2 can be reduced. Can be obtained. However, even in the case of the replacement with the elastic layer 14, in order to prevent torsional deformation of the displacement portion 7, as in the case of the opening 12 and the film thickness changing portion 13, it is line-symmetric in the width direction and the length direction of the operation portion 2. It is necessary to provide.

FIG. 9 is a perspective view showing an electric signal displacement conversion device A5 according to still another embodiment of the present invention, wherein the Young's modulus is more than the combined Young's modulus of the strain-generating layer 4 and the electrode layers 5a and 5b. The non-deformable portion 15 made of an insulating material having a large thickness is provided in a part of the operation portion 2. The non-deformed portion 15 may be provided so as to be added to the center of the displacement portion 7 or may be provided so as to replace the center of the displacement portion 7. When the non-deformable portion 15 is provided at the center of the displacement portion 7 as described above, even if the displacement portion 7 is deformed by the input of the electric signal, the central non-deformation portion 15 moves in parallel without being deformed, or moves very little. It is possible to make a parallel movement by a large deformation and to widen the area for the parallel movement. Therefore, this embodiment
This structure is effective for use in applications where the displacement output portion of the electric signal displacement conversion device A5 needs to be completely parallel. However, the non-deformable portion 15 also needs to be provided line-symmetrically in the width direction and the length direction of the operation portion 2 in order to prevent the displacement portion 7 from torsional deformation, as in the case of the opening 12 and the film thickness change portion 13. is there.

FIG. 10 is a perspective view showing an electric signal displacement conversion device A6 according to still another embodiment of the present invention, in which at least two or more operation units 2a, 2b are provided on a frame unit 1. , 2c. These operating parts 2a, 2b, 2c are respectively pad parts 11a, 11b.
Can input an electric signal independently of the operation units 2a and 2a for outputting displacement in the thickness direction.
2b and 2c can be used.

However, as shown in FIG. 10, in the case of the electric signal displacement conversion device A6 having a plurality of operation units 2a, 2b, 2c, there is an important driving method. That is, by generating a tensile stress in the strain generating layer 4 of some of the operating portions 2b and 2c, the frame portion 1 is bent inward to reduce the distance between the fixed portions 6 and to be compressed into the strain generating layer 4. This is to increase the amount of displacement of the operating part 2a that is generating stress. More specifically, each of the operation units 2a, 2b, and 2c is arranged in parallel on the frame unit 1, and fixed portions 6 at both ends are fixed to the frame unit 1. The plurality of operation units 2a, 2
b, 2c, for example, in the central operating portion 2a, a lateral extension strain is generated in the strain generating layer 4 so that the displacement portion 7 between the fixed portions 6 is formed.
To generate a compressive stress, thereby displacing the displacement portion 7 of the operating portion 2a in the thickness direction. At the same time, the operation parts 2b, 2 on both sides
In (c), a lateral contraction strain is generated in the strain-generating layer 4 to contract the displacement portion 7 between the fixed portions 6, and the contraction force causes the frame portion 1 to bend inward, thereby bringing the fixed portions 6 closer to each other. As a result, the central operating portion 2a extends in the length direction due to the input of the electric signal and buckles in the thickness direction to be displaced, and at the same time, the distance between the fixed portions 6 is shortened. Will be done. Here, in order to generate a compressive stress by expanding some of the operating portions 2a and to generate a tensile stress by compressing the other operating portions 2b and 2c, the same is applied to each of the operating portions 2a and 2b and 2c. The simplest method is to input an electric signal with its polarity inverted. Further, as shown in FIG. 10, the dimensions (for example, the widths of the operating units 2a, 2b, 2c) of the operating unit 2a for outputting the displacement and the operating units 2b, 2c for increasing the displacement are made different, so that the electric signal The magnitude of the displacement amount with respect to the strength can be controlled.

Further, as shown in FIG. 10, the frame 1 has a structure in which a pair of movable parts (or one movable part) 17 is supported by an elastic beam 18 in an outer frame part 16, and each operating part 2a , 2b, 2c are fixed to both movable parts 17 (or one fixed part 6 is
If the other fixed part 6 is fixed to the outer frame part 16), the movable part 17 is easily elastically displaced, so that the distance between the fixed parts 6 can be easily changed by the displacement enlarging operation parts 2b and 2c. , It is possible to obtain a larger displacement.

In any of the above embodiments,
The operation unit 2 includes two or more strain-generating layers 4, particularly different types of strain-generating layers 4, and three or more electrode layers 5a, 5b, 5c,... Like the electric signal displacement conversion device A7 in FIG. It may have a laminated structure. In the case of the electric signal the displacement converter A7 differs strain generating layer 4 of the piezoelectric constant and thickness, by adjusting the width and the like, it is possible to adjust the voltage V _E and a displacement amount of buckling occurs. Further, as shown in the electric signal displacement conversion device A8 in FIG. 12, the operation section 2 may be configured to be curved in a state where no electric signal is input. Further, as in an electric signal displacement conversion device A9 shown in FIG. 13, the entire circumference of the operation section 2 is fixed to the frame section 1, and the displacement portion 7 surrounded by the fixed portion 6 over the entire circumference is displaced in a film shape. You may do so.

Next, an application of the electric signal displacement converter of the present invention will be described. As described above, the electric signal displacement converter outputs an amount of displacement at a displaced portion when an electric signal is input (electrical energy → mechanical energy conversion), and thus can be used as an actuator for various devices. Further, since the energy conversion by the strain generating layer is a reversible phenomenon, the energy conversion in the opposite direction is also possible. That is, when an external force is applied to the displaced portion, an electric signal corresponding to the external force is output (mechanical energy → electrical energy conversion), so that it can be used as a sensor for various devices. As shown below, if the electric signal displacement conversion device of the present invention is used for various actuators and various sensors, it is possible to manufacture small actuators and sensors with a simple structure, and to input electric signals from electric signal lines. Just be able to control easily.

FIG. 14 shows an electric signal displacement converter 2 according to the present invention.
FIG. 2 is a schematic cross-sectional view showing an optical scanner B1 using No. 1. In the optical scanner B1, the electric signal displacement conversion device 2
The light reflecting surface 22 is formed on the surface of the displacement portion 7, for example, on the electrode layer 5 a, and the drive circuit 23 is connected to the electric signal line (for input) 8. Thus, the light beam 25 emitted from the light source 24 is reflected by the light reflecting surface 22 at a position deviated from the center of the displacement portion 7, and the driving circuit 23 outputs, for example, an AC voltage signal (or a DC and AC superimposed signal). And vibrates the displacement portion 7 of the operating section 2 up and down,
As shown in FIG. 14, the light beam 25 reflected by the light reflecting surface 22 is scanned according to the vibration of the displacement portion 7.

FIG. 15 shows an electric signal displacement converter 2 according to the present invention.
FIG. 3 is a schematic sectional view showing a relay B2 using No. 1; In this embodiment, the frame unit 1 is spaced apart from the operation unit 2.
The opposing substrate 26 is joined on the substrate. A first switching electrode 28 is provided on the upper surface of the displacement portion 7 with an insulating film 27 interposed therebetween.
And the switching electrode 2 is provided on the inner surface of the opposite substrate 26.
8 is provided, and the switching electrode 29 is guided to the upper surface of the counter substrate 26 through the through hole 30 of the counter substrate 26.
Both switching electrodes 28 and 29 are connected to a secondary circuit as shown in FIG.

When the electric signal line (for input) 8 of the electric signal displacement converter 21 is connected to the primary side circuit,
When no voltage is applied to the electric signal line 8 from the primary side circuit, since the operating portion 2 is held in a flat plate shape, the two switching electrodes 28 and 29 are separated from each other, and the secondary side circuit Is open. In contrast, when the electric signal line 8 is a voltage higher than a predetermined value V _E is applied by the primary circuit, the operation section 2 is buckled to both switching electrodes 28,2
9 comrades make contact and the secondary circuit closes. At this time, the primary circuit and the secondary circuit are insulated by the insulating film 27 and are separated from each other. When the electric signal displacement converter 21 of the present invention is used for such a relay B2, the displacement portion 7
Since the switching electrodes 28 and 29 can be brought into contact with each other in the portion that moves in parallel, the switching electrodes 28 and 29 can be surely brought into contact with each other. Further, since the contact area between the switching electrodes 28 and 29 can be relatively large, the resistance of the relay B2 can be reduced.

FIG. 16 shows an electric signal displacement converter 2 according to the present invention.
FIG. 2 is a schematic cross-sectional view showing a pressure sensor B3 using No. 1. In the pressure sensor B3, the entire periphery of the operation unit 2 is fixed to the frame unit 1, and a substrate 31 such as a glass substrate or a silicon substrate is joined to the lower surface of the frame unit 1 of the electric signal displacement conversion device 21. Thus, a pressure introducing chamber 32 is provided between the substrate 31 and the displacement portion 7, and a pressure introducing path 33 leading to the pressure introducing chamber 32 is formed in the substrate 31. The electric signal line (for output) 8 is connected to the pressure detection circuit unit 34.

When the pressure P is guided to the pressure introducing chamber 32 through the pressure introducing passage 33, the displaced portion 7 is bent in the direction of the film thickness due to the pressure difference with the outside. When the displacement portion 7 bends, a lateral strain is generated in the strain-generating layer 4, so that an electric field in the thickness direction is generated in the strain-generating layer 4 by the piezoelectric transverse effect, and
A voltage is generated between a and 5b. Since the generated voltage changes according to the force applied to the displacement portion 7, that is, the pressure,
The applied pressure P is calculated by the pressure detection circuit unit 34 from an electric signal generated between the electrode layers 5a and 5b. Even in applications for sensors such as a pressure sensor, since the displacement portion 7 moves in parallel in a stable state, good detection accuracy can be obtained.

FIG. 17 shows an electric signal displacement converter 2 according to the present invention.
FIG. 3 is a schematic cross-sectional view showing an acceleration sensor B4 using No. 1.
The acceleration sensor B4 is arranged so that the direction of the acceleration to be detected is parallel to the displacement direction of the operation unit 2, and the electric signal line (for output) 8 is connected to the acceleration detection circuit unit 3.
5 is connected.

When the acceleration sensor B4 senses the acceleration, the displacement portion 7 is displaced by the inertial force as shown in FIG. The acceleration detection circuit unit 35 detects a voltage generated by the deformation of the operation unit 2 due to the acceleration, and calculates the acceleration. Alternatively, a vibration sensor can also detect the strength or change of vibration. Further, if the weight 36 is fixed to the center of the displacement portion 7 as in the acceleration sensor B5 in FIG. 18, the acceleration detection sensitivity can be increased.

FIG. 19 shows an electric signal displacement converter 2 according to the present invention.
1 is a schematic cross-sectional view showing a valve device (micro valve) B6 for adjusting a flow rate or opening and closing using No. 1. In the valve device B6, the side wall of the fluid pipe 37 through which the fluid flows is partially opened, and the frame portion 1 of the electric signal displacement conversion device 21 is fitted to the side wall opening 38 in a watertight manner. Even in the electric signal displacement conversion device 21, the operation unit 2 is joined to the frame unit 1 on the entire circumference so that the fluid does not leak outside. Since the displacement amount of the displacement portion 7 can be changed by changing the voltage applied to the electric signal line (for input) 8 from the valve controller 39, the displacement portion 7 is largely displaced to
Can be narrowed, or the displacement of the displacement portion 7 can be reduced to widen the opening of the fluid passage 40, thereby controlling the flow rate of the fluid. Therefore, according to the valve device B6, a very small valve device B6 can be realized with a simple structure, fine adjustment of the fluid flow rate is possible, and the cost can be reduced. In FIG. 19, the operating section 2 or the electric signal displacement conversion device 21 is in direct contact with the fluid, but a flexible diaphragm such as rubber is attached to the side wall opening 38 and the movable section flexes the diaphragm to open the fluid passage 40. The degree may be adjusted. Further, if a valve made of rubber or the like is provided in the operation section 2 so that the fluid passage 40 can be completely closed, it can be used for opening and closing.

FIG. 20 shows an electric signal displacement converter 2 according to the present invention.
FIG. 2 is a schematic sectional view showing a flow rate sensor B7 using No. 1; In the this flow sensor B7, the operation portion 2 is adapted to being fixed to the entire circumference to the frame portion 1, leads to a reference pressure p ₀ on the lower surface side of the operation portion 2 (frame portion 1 side). The electric signal displacement conversion device 21 is water-tightly fitted into a side wall opening 42 opened in the fluid pipe 41 with the surface on the side where the operation section 2 is provided as an interior.
The flow line of the fluid flowing in the inside and the operation unit 2 are arranged in parallel.

When the flow velocity of the fluid flowing through the fluid passage 43 increases, the pressure p of the fluid decreases (Bernoulli's theorem), and the difference between the flow velocity of the fluid and the differential pressure p ₀ -p is, for example, as shown in FIG. There is a relationship as shown. Therefore, the flow velocity of the fluid can be calculated by obtaining the differential pressure p ₀ -p from the voltage signal output from the electric signal line (for output) 8 by the flow velocity detection circuit section 44. Moreover, such a flow rate sensor B
In 7, since the surface of the operation unit 2 has a smooth streamline shape, it does not easily affect the flow of the fluid, and detecting the flow velocity does not cause turbulence in the fluid.
Further, since the central portion of the operating section 2 is attracted to the fluid side in a parallel state and the flow velocity can always be detected in the parallel portion, the detection accuracy is improved.

FIG. 22 shows an electric signal displacement converter 2 according to the present invention.
It is a schematic sectional drawing which shows the vibration generator B8 using No. 1. In this embodiment, the operating section 2 is designed to have a material, thickness, and the like suitable for vibration. Therefore, an electric signal (AC signal or a superimposed signal of DC and AC) can be input from the electric signal line (for input) 8 to generate mechanical vibration. In particular, if an ultrasonic vibration is generated by inputting a high-frequency signal, it can be used for, for example, an ultrasonic cleaner, an ultrasonic humidifier, and the like.

Further, as shown in a vibration generator B9 of FIG. 23, a diaphragm 45 for amplifying vibration in the audible range is provided on the displacement portion 7.
Can be used as a speaker, an earphone, a buzzer, or the like.

FIG. 24 shows an electric signal displacement converter 2 according to the present invention.
FIG. 2 is a schematic sectional view showing a generator B10 using No. 1. In this embodiment, the operating section 2 can receive physical energy such as acoustic energy or vibration energy. When acoustic energy or the like is incident on the operating section 2, the displacement portion 7 resonates and vibrates. . The electric power generated at this time is sent from an electric signal line (for output) 8 to a charger 46 such as a battery or a rechargeable battery, and is charged.

FIG. 25 shows an electric signal displacement converter 2 according to the present invention.
FIG. 2 is a schematic cross-sectional view showing a microphone B11 using No. 1; In this embodiment, the operation unit 2 can receive a sound. When the sound enters the operation unit 2, the displacement portion 7 resonates and vibrates. The voltage generated at this time is input from the electric signal line (for output) 8 to the amplifier 47 and output as an audio signal to, for example, an audio device.

FIG. 26 shows an electric signal displacement converter 2 according to the present invention.
FIG. 4 is a schematic sectional view showing a probe device B12 using No. 1. In the probe device B12, a probe (tip) 48 having a sharp tip is provided on the lower surface of the displacement portion 7 of the operation section 2, and the probe device B12 is an XY stage mechanism capable of minute displacement. (Not shown), the position can be adjusted in the horizontal direction. The probe 48 is made of silicon and is manufactured simultaneously with the frame 1 by anisotropically wet-etching a silicon wafer.
In the probe device B12, when a voltage is applied from the electric signal line (for input) 8 to the electric signal displacement conversion device 21, the operating section 2 buckles and the probe 48 is moved downward (in the Z-axis direction). Displace.

As described above, according to the probe device B12 using the electric signal displacement conversion device 21 according to the present invention, a relatively large displacement amount (about 2 μm or more) can be obtained with high resolution. (Scanning T
It can be used as a microactuator of an unneling microscope. That is, the scanning tunneling microscope is intended for inspection of minute surface roughness such as observation of the surface of a semiconductor crystal, and the tip of the probe 48 that moves three-dimensionally approaches the sample surface 49 by about 1 nm. By utilizing the fact that the current flowing through the tunnel effect across the gap between the probe 48 and the sample surface 49 (atoms) changes in the uneven state of the sample surface 49, the change is displayed in an enlarged scale and observed. . Attempts have also been made to adsorb and move one atom with the probe 48 of this scanning tunneling microscope. According to the probe device B12 of the present invention, the probe device B12 can be made extremely small in size, and can obtain a nano-level displacement as the displacement amount of the probe 48, and about 1 nm required for the microactuator of the tunneling scanning microscope. The above displacement can be obtained.

FIG. 27 shows an electric signal displacement converter 2 according to the present invention.
FIG. 3 is a schematic cross-sectional view showing a temperature sensor B13 using No. 1.
In the temperature sensor B13, the entire circumference or both ends of the operating layer 2 in which the Pt electrode layers 5a and 5b are formed on both surfaces of the strain-generating layer 4 made of PZT on the silicon frame 1 is fixed. I have. In such a structure, since the silicon frame portion 1 has a larger thermal expansion coefficient than the operating portion 2, when the temperature rises, the operating portion 2 is pulled by the difference in the thermal expansion coefficient between the frame portion 1 and the operating portion 2, and the operation is increased. A tensile thermal stress is generated in the portion 2. Conversely, when the temperature drops, the frame 1
Then, a compressive thermal stress is generated in the operation section 2. Since a lateral strain is generated in the strain-generating layer 4 by the thermal stress, an electric signal corresponding to a temperature change is output from the electric signal line (for output) 8, and the temperature detection circuit unit 50 detects a temperature based on the electric signal. Is calculated. The temperature sensor B13 having such a structure has a feature that the structure is simple.

Further, contrary to the above embodiment, the thermal expansion coefficient of the operation section 2 may be larger than the thermal expansion coefficient of the frame section 1. In this case, the operating section 2 that undergoes a large deformation due to a temperature change is in the form of a thin film and has a small heat capacity, so that the response is improved and the temperature sensor B13 with good sensitivity can be manufactured. Furthermore, in order to obtain the same effect, thin films having different thermal expansion coefficients may be formed on the upper and lower surfaces of the upper and lower electrode layers 5a and 5b having the same thermal expansion coefficient.

FIG. 28 shows an electric signal displacement converter 2 according to the present invention.
Explanatory diagram showing a braille display device B14 using No. 1.
FIG. 29 is a cross-sectional view showing the structure and operation. The electric signal displacement conversion device 21 used in the Braille display device B14 is of a matrix type, and a large number of openings or recesses 3 are provided in a single frame portion 1 in a matrix form. The operation unit 2 is provided on the upper side to enable independent driving. A projection 5 is provided on each operation unit 2.
1 are provided, and the protrusions 51 are arranged vertically and horizontally by the number required for one Braille character. The upper surface of the electric signal displacement conversion device 21 is covered with a cover.
Faces a window 53 provided in a cover 52. When the operating unit 2 is not driven as in the left projection 51 in FIG. 29, the projection 51 is retracted into the window 53 of the cover 52, but the operating unit 2 is driven as in the right projection 51. Then, the projection 51 protrudes from the window 53 of the cover 52. Therefore, the required operation unit 2 is set so as to have a braille pattern.
Is driven to project the projection 51, a Braille pattern can be displayed on the surface of the Braille display device B14, and when a finger is placed on the Braille display device B14, Braille can be read.

The Braille display device B14 can be used, for example, as an output device of a Braille translation system B15 using a computer. FIG. 28 shows an example thereof. A braille translation processing unit 54 is connected to an electric signal line (bus line) of the braille display device B14, and a compact disc (C
D) a reading device 56 for reading information from a storage medium 55 such as a floppy disk, a cassette tape, or the like;
An input device 57 such as a keyboard is connected. When a language is input from the input device 57, the Braille translation processing unit 54 translates the language into Braille, and sends a control signal for displaying the Braille pattern on the Braille display device B14 to the Braille display device B14. Sent every hour. In the Braille display device B14, each of the projections 5 is controlled in accordance with a control signal sent from the Braille translation processing unit 54.
1 is projected or retracted, and Braille is sequentially displayed. One Braille is displayed for a certain period of time (for example, one to several seconds), which can be adjusted by the user. Therefore,
By using the Braille display device B14, it is possible to sequentially read Braille simply by placing the fingertip on the Braille display device B14 and keeping the finger still, and the finger can be moved along the Braille like the conventional Braille perforated on paper or the like. No need to slide. Similarly, when the storage medium 55 is set in the reading device 56, the information recorded in the storage medium 55 is read and sent to the Braille translation processing unit 54, where it is translated into Braille, and the Braille display device B14 is used. Will be displayed.

FIG. 30 shows an electric signal displacement converter 2 according to the present invention.
Printer Head B16 Using Ink Jet 1
FIG. The electric signal displacement converter 21 used here also has a plurality of operating units 2 corresponding to the number of print dots arranged in a matrix on one frame unit 1, and each operating unit 2 The circumference is fixed to the frame unit 1. In addition, an ink nozzle 58 that ejects ink is disposed near each operation unit 2. Then
As shown in FIG. 31A, a predetermined amount of ink is ejected from the ink nozzle 58 to the operation unit 2 corresponding to the print dot specified by the control unit of the printer, and the ink particles 61 are discharged onto the operation unit 2. The ink particles 61 may be supplied (or the ink particles 61 may be supplied to all the operation units 2 in advance). Next, when the operation unit 2 corresponding to the print dot is driven, FIG.
As shown in FIG. 1B, the ink particles 61 on the operation unit 2 are repelled and emitted from the window 60 of the cover 59 to the outside, and adhere to the surface of paper or the like. If the electric signal displacement converter 21 of the present invention is used for such a printer head B16, an ink jet printer head having a novel structure can be manufactured, and the size and weight of the printer head can be reduced. In the embodiment shown in FIG. 30, the operation units 2 for ejecting the ink particles 61 are arranged in a matrix, but are arranged in a line along a direction perpendicular to the moving direction of the printer head B16. Is also good.

FIG. 32A shows a printer head B17 having still another structure. In this printer head B17,
A nozzle plate 62 having a nozzle port 63 opened is attached to the opening 3 of the frame unit 1 so as to face the operation unit 2 fixed to the entire circumference,
An ink reservoir 64 is formed between the operation unit 2 and the nozzle plate 62. Then, the operation unit 2 is operated and FIG.
When the operating section 2 is deformed as shown in (b), the ink 65 in the ink reservoir 64 is compressed and the ink particles 66 are ejected from the nozzle port 63 to the outside. Although not shown, the ink 65 is stored in the ink reservoir 64 after the ejection of the ink particles 66.
Is supplied.

FIG. 33 is a sectional view showing a fluid transfer device B18 using the electric signal displacement conversion device 21 according to the present invention. In this fluid transport device B18, a fluid passage 67 is formed in the pipe-shaped frame portion 1, and at least three openings 3 provided along the axial direction of the pipe-shaped frame portion 1 are respectively provided. An operation section 2 having a fixed circumference is provided. Fluid transfer pipes 69 are connected to connection ports 68 at both ends of the fluid transfer device B18.

By driving each operating section 2 of the fluid transfer device B18 as shown in FIGS. 34 and 35, the fluid can be forcibly transferred by the fluid transfer device B18. That is, the operation unit 2 is composed of A, B, C
And each of the operation units 2 (A), 2
(B) and 2 (C) repeat the cycle of closing → closing → open at regular time intervals Δt.
.. 2 (B), 2 (C),... In such a driving method, one operation unit (for example,
In the state where the fluid passage 67 is closed in 2 (A)), the fluid is forcibly moved in the transport direction by switching the opening and closing of the other two operation units (for example, 2 (B) and 2 (C)). be able to. Therefore, even when the pressure of the fluid transport destination is high, the fluid can be transported reliably without causing the fluid to flow backward. Further, in order to carry out this driving method, at least three operation units 2 are required. Of course, it is possible to appropriately arrange this basic driving method. For example, the four operating units 2 may be formed as a set of four, and two operating units 2 serving as open portions may be continuous, thereby increasing the amount of fluid transported.

FIG. 36 is a sectional view showing another fluid transfer device B19 of the present invention. This allows the pipe-shaped frame portion 1 of the fluid transfer device B18 as shown in FIG. 33 to be vertically divided into two portions so that the frame portion 1 can be opened from the hinge portion 70, and the two divided frame portions 1A, 1
B is closed by an engaging portion 71. In addition,
In this embodiment, the operation section 2 may be fixed at both ends.
Then, the frame portions 1A and 1B are opened from the engaging portion 71, and the frame portions 1A and 1B are closed by passing a tube 72 such as a flexible rubber tube or a vinyl tube through which a fluid passes. In this state, when the operation unit 2 is driven in the same manner as in, for example, FIGS. 34 and 35, the fluid is conveyed while the tube 72 is bent by the operation unit 2. For example, when performing infusion at a medical site such as a hospital, such a fluid transport device B19 can be easily attached to and detached from a tube for sending an infusion solution, and is used from above the tube 72. There is no fear. In addition, the infusion liquid can be sent with high accuracy at a constant speed.

In the driving method shown in FIGS. 34 and 35,
The operating unit 2 is in the open state in the flat state of the no-load state. However, in the fluid transfer device B18 as shown in FIG.
In the open state, by applying a drive voltage having a polarity opposite to that of the closed state, the operating section 2 may be displaced outward as shown in FIG. By driving as shown in FIG. 37, it is possible to increase the flow rate transferred by the fluid transfer device B18 without increasing the number of the operation units 2 and increasing the size of the fluid transfer device B18.

FIG. 38 is an explanatory diagram showing another driving method of the fluid transfer device B18 using the electric signal displacement conversion device 21 of the present invention, and FIG. 39 is an operation time chart thereof. In this driving method, four operation units 2 (A), 2
(B), 2 (C), 2 (D), and each of the operation units 2 (A), 2 (B), 2 (C), 2 (D),. Repeat the cycle of outer displacement (open) → no displacement (open) → inner displacement (closed) → no displacement (open),
Moreover, the adjacent operation units 2 (A), 2 (B), 2 (C), 2
(D) There is a one-off shift between each other. Therefore, the operation unit 2
The open / closed patterns of (A), 2 (B), 2 (C), and 2 (D) are sequentially shifted in the transport direction as shown in FIG. 38, and the fluid is sent in the transport direction. Such a driving method can be used, for example, in a metering / applying device that discharges an adhesive from a nozzle in a fixed amount, or in an application in which a drug or the like is dropped from a tip of a tube at a constant supply speed.

[0088]

According to the present invention, before and after the operation of the electric signal displacement conversion device, it is possible to make the displacement portion have a portion that maintains a parallel state, and by combining it with the non-deformation portion, Can be realized in parallel. This makes it possible to move the reflected light beam and the driven object in parallel, for example, in an application as an actuator that reflects light at the non-deformed portion or moves the driven object.

Further, according to the electric signal displacement converter of the present invention, it is not necessary to control the internal stress of the strain generating layer and the electrode layer at the time of manufacturing with high precision, so that the stress in the strain generating layer and the electrode layer can be reduced. There is no need for an annealing process for removal, and there is an effect of cost reduction by reducing the number of manufacturing process steps.

Further, the displacement and deformation with respect to the actuator dimensions can be increased as compared with the laminated piezoelectric actuator.

Further, since the electric signal displacement conversion device of the present invention can be composed of one strain layer and one set of electrode layers, it is possible to reduce the cost and reduce the size (particularly the thickness). .

Further, by using the electric signal displacement conversion device for various actuators and various sensors, it is possible to contribute to miniaturization and cost reduction of these actuators and sensors. Further, since both the actuator and the sensor can be used, in the case of an application requiring the actuator and the sensor, the actuator and the sensor can be realized on the same substrate by the same process.

[Brief description of the drawings]

FIG. 1 is a conventional laminated piezoelectric actuator,
(A) is a front view in a state where no electric signal is input,
(B) is a front view in the state where the electric signal was input.

FIG. 2 is a front view of a conventional cantilever-type actuator using a strain-generating layer, in which (a) is a front view in which an electric signal is not input, and (b) is a front view in which an electric signal is input. It is.

FIG. 3 is a perspective view showing an electric signal displacement conversion device according to an embodiment of the present invention.

FIGS. 4A, 4B, and 4C are schematic cross-sectional views for explaining the operation of the electric signal displacement conversion device of the above.

FIG. 5 is a diagram showing a relationship between an applied voltage and a displacement amount of a displacement portion in the electric signal displacement conversion device.

FIG. 6 is a perspective view showing an electric signal displacement conversion device according to another embodiment of the present invention.

FIG. 7 is a perspective view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 8 is a perspective view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 9 is a perspective view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 10 is a perspective view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 11 is a schematic sectional view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 12 is a schematic sectional view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 13 is a perspective view showing an electric signal displacement conversion device according to still another embodiment of the present invention.

FIG. 14 is a schematic sectional view showing an optical scanner according to the present invention.

FIG. 15 is a schematic sectional view showing a relay according to the present invention.

FIG. 16 is a schematic sectional view showing a pressure sensor according to the present invention.

FIG. 17 is a schematic sectional view showing an acceleration sensor according to the present invention.

FIG. 18 is a schematic sectional view showing another acceleration sensor according to the present invention.

FIG. 19 is a schematic sectional view showing a valve device according to the present invention.

FIG. 20 is a schematic sectional view showing a flow sensor according to the present invention.

FIG. 21 is a diagram showing a relationship between a flow velocity of a fluid and a differential pressure acting on both surfaces of an operation unit.

FIG. 22 is a schematic sectional view showing a vibration generator according to the present invention.

FIG. 23 is a schematic sectional view showing another vibration generator according to the present invention.

FIG. 24 is a schematic sectional view showing a generator according to the present invention.

FIG. 25 is a schematic sectional view showing a microphone according to the present invention.

FIG. 26 is a schematic sectional view showing a probe device according to the present invention.

FIG. 27 is a schematic sectional view showing a temperature sensor according to the present invention.

FIGS. 28A and 28B are explanatory diagrams showing a braille display device according to the present invention.

FIG. 29 is an enlarged partial sectional view showing the structure and operation of the same Braille display.

FIG. 30 is a perspective view showing a printer head according to the invention.

FIGS. 31 (a) and 31 (b) are enlarged partial cross-sectional views for explaining the operation of the printer head.

FIGS. 32 (a) and 32 (b) are enlarged partial cross-sectional views for explaining the structure and operation of another printer head according to the present invention.

FIG. 33 is a sectional view of a fluid transfer device according to the present invention.

FIGS. 34 (a), (b), (c), and (d) are explanatory views of the operation of the above fluid transport device.

FIG. 35 is a drive time chart of the above fluid transport device.

FIG. 36 is a cross-sectional view showing another fluid conveyance device according to the present invention.

FIG. 37 is a cross-sectional view showing another driving method of the fluid conveyance device according to the present invention.

FIG. 38 is a sectional view showing still another driving method of the fluid transport device according to the present invention.

FIG. 39 is a time chart of a driving method of the above fluid transport device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Frame part 2, 2a, 2b, 2c Operating part 4 Strain-flexible layer 5a, 5b Electrode layer 6 Fixed part 7 Displacement part 8 Electric signal line B1 Optical scanner B2 Relay B3 Pressure sensor B4, B5 Acceleration sensor B6 Valve device B7 Flow rate sensor B8, B9 Vibration generator B10 Generator B11 Microphone B12 Probe device B13 Temperature sensor B14 Braille display device B15 Braille translation system B16, B17 Printer head B18 Fluid transport device

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification code FI G01K 7/00 G01P 15/09 G01L 1/16 H01L 29/84 A G01P 15/09 H02N 2/00 B H01L 29/84 B41J 3 / 04 103A 41/09 H01L 41/08 MH02N 2/00 U (72) Inventor Shuichi Wakabayashi Omron Co., Ltd. (56) References JP-A-5-231815 JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01B ^7/ 00-7/34 G01B 21/00-21/32

Claims (23)

(57) [Claims] 1. An operating unit having a structure in which at least one strain-generating layer that generates lateral strain in a direction perpendicular to the direction of an electric field is sandwiched between at least two electrode layers, and a frame unit that supports the operating unit. The operating unit has a portion fixed to the frame portion and a displaceable portion that is not fixed to the frame portion, and the fixed portion is provided at least in part around the non-fixed portion. It is arranged so as to sandwich the part that is not fixed, and the entire length of the operating part is reduced by the lateral strain of the strain generating layer.
The change causes a displacement in the thickness direction in the operating part.
Electric signal the displacement converter, characterized in that that. 2. The electric signal displacement conversion device according to claim 1, wherein a thickness of at least one of the electrode layers is different from a thickness of another electrode layer. 3. The electric signal displacement conversion device according to claim 1, wherein in at least one of the electrode layers, a thickness of a part of the electrode layer is different from a thickness of another part. 4. The electric signal displacement conversion device according to claim 1, wherein an opening is provided in at least one of the electrode layers or the strain-generating layer, and a part of the electrode layer or the strain-generating layer is provided. 5. The electric signal displacement conversion device according to claim 1, wherein a region formed of a material having a Young's modulus smaller than that of the strain generating layer is provided between the electrode layers. 6. The electric signal displacement conversion device according to claim 1, wherein a part of the operation unit is a region having a higher Young's modulus than other parts. 7. An operating unit comprising: a plurality of operating units; and an electrical signal applying unit configured to apply an electrical signal to an electrode layer of each operating unit, wherein the polarity of the electrical signal applied to at least one of the operating units is different. The polarity is opposite to the electric signal applied to the operation part of
The electric signal displacement conversion device according to claim 1, wherein the frame unit is deformable by a force from the operation unit. 8. An optical scanner comprising: the electric signal displacement conversion device according to claim 1; a light reflecting surface provided on a displacement portion of the conversion device; and a driving unit for driving the displacement portion of the conversion device. . 9. An electric signal displacement conversion device according to claim 1, an electric signal applying means for driving a displacement portion of the conversion device, and a first device provided on the displacement portion of the conversion device.
And a second switching electrode provided to face the first switching electrode. 10. A vibration generator comprising: the electric signal displacement conversion device according to claim 1; and an electric signal application unit that inputs an electric signal for vibrating a displacement portion of the conversion device. 11. A loudspeaker comprising: the electric signal displacement conversion device according to claim 1; and an electric signal application unit for inputting an electric audio signal for vibrating a displacement portion of the conversion device. 12. A fluid passage, comprising: a passage for allowing a fluid to pass therethrough; and the electric signal displacement conversion device according to claim 1, wherein the displacement portion of the operation section faces the passage. A valve device capable of controlling the flow rate of a fluid flowing between the valve device. 13. The electric signal displacement conversion device according to claim 1, wherein a plurality of operation units are arranged in a matrix, and a plurality of tactilely recognizable protrusions driven by the respective operation units. Braille display device provided. 14. An electric signal displacement conversion device according to claim 1, wherein a plurality of operation units are arranged, and means for holding ink for discharging as ink particles by driving each operation unit. Printer head. 15. A probe device comprising: the electric signal displacement conversion device according to claim 1; and a probe provided in an operation section of the conversion device. 16. A generator comprising: the electric signal displacement conversion device according to claim 1; and means for outputting electric energy generated in the conversion device when physical energy is applied to the conversion device. 17. An electric signal displacement conversion device according to claim 1, further comprising a pressure introducing means for guiding a detected pressure to a displacement portion of the conversion device, wherein the introduced device is displaced by the introduced pressure. A pressure sensor that detects the pressure based on an electric signal generated in a portion. 18. An electric signal displacement conversion device according to claim 1, wherein the acceleration sensor detects an acceleration based on an electric signal generated in a displacement portion of the conversion device by the acceleration. 19. An electric signal displacement conversion device according to claim 1, further comprising: means for guiding a fluid pressure, which changes according to a flow rate of the fluid, to a surface of an operation portion of the conversion device, wherein the device conducts the fluid pressure on the surface of the operation portion. A flow velocity sensor for determining the flow velocity of a fluid from the applied fluid pressure. 20. An electric signal displacement conversion device according to claim 1, further comprising: means for generating a thermal stress in an operation section of the conversion device by a temperature change, wherein the temperature is calculated based on the thermal stress generated in the operation section. Or, a temperature sensor for determining a temperature change. 21. The electric signal displacement conversion device according to claim 1, further comprising: a fluid passage for conveying a fluid; and at least three operation units provided to face the fluid passage. A fluid transport device configured to transport fluid in the fluid passage by driving the fluid. 22. A fluid is conveyed by switching the operation of each operation section at a constant timing.
3. The method for driving a fluid transport device according to claim 1, wherein each of the operation units is switched at a fixed timing in an order of a closed state, a closed state, and an open state. 23. A state in which the operating section is displaced to the fluid passage side to close the fluid channel, a state in which the operating section is not displaced, and a state in which the operating section is displaced to the side opposite to the fluid path to increase the fluid passage. 22. The method for driving a fluid transport device according to claim 21, wherein the fluid is transported by switching between the state and the state at a constant timing, wherein each operating unit is displaced toward the fluid passage at a constant timing.
A method for driving a fluid transport device, characterized by switching in the order of non-displaced state, displaced state to the side opposite to the fluid passage, and non-displaced state.