JP2951129B2 - Multilayer piezoelectric actuator and method of manufacturing the same - Google Patents
Multilayer piezoelectric actuator and method of manufacturing the sameInfo
- Publication number
- JP2951129B2 JP2951129B2 JP29033492A JP29033492A JP2951129B2 JP 2951129 B2 JP2951129 B2 JP 2951129B2 JP 29033492 A JP29033492 A JP 29033492A JP 29033492 A JP29033492 A JP 29033492A JP 2951129 B2 JP2951129 B2 JP 2951129B2
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- piezoelectric actuator
- internal electrodes
- electrodes
- internal electrode
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Description
【０００１】[0001]
【産業上の利用分野】この発明は、積層型圧電アクチュ
エータおよびその製造方法、特に外部電極が形成されな
い素子側面の、内部電極が素子外部に露出する内部電極
の側端部を、チタン酸鉛を主とする絶縁物で形成して成
る圧電アクチュエータおよびその製造方法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-layer piezoelectric actuator and a method of manufacturing the same, and more particularly, to forming a side end of an internal electrode on the side of an element where an external electrode is not formed, with the internal electrode exposed to the outside of the element, using lead titanate. The present invention relates to a piezoelectric actuator formed of a main insulator and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】従来、積層型圧電アクチュエータ１０
は、図８に示される様に内部電極層１５と絶縁部分１６
が設けられた圧電セラミックスのグリーンシート１４を
図９および図１０に示される如くセラミックス層１３と
内部電極層１５とを交互に積層して、内部電極層１５と
外部電極１７とを一層置きに接続する構造に成ってい
る。積層型圧電アクチュエータ１０は、積層型圧電アク
チュエータ１０の上下両端面を除く四側面を外装樹脂等
で被う構造に成っているのが一般的であるが、外部電極
１７の形成されていない側面には、極性の異なる電圧が
印加される内部電極層１５が露出した構造に成ってい
る。2. Description of the Related Art Conventionally, a laminated piezoelectric actuator 10 has been disclosed.
8 shows that the internal electrode layer 15 and the insulating portion 16 are formed as shown in FIG.
9 and 10, the ceramic sheets 13 and the internal electrode layers 15 are alternately laminated as shown in FIGS. 9 and 10, and the internal electrode layers 15 and the external electrodes 17 are connected alternately. It has a structure to do. The laminated piezoelectric actuator 10 generally has a structure in which four sides except for the upper and lower end surfaces of the laminated piezoelectric actuator 10 are covered with an exterior resin or the like. Has a structure in which the internal electrode layer 15 to which voltages having different polarities are applied is exposed.
【０００３】[0003]
【発明が解決しようとする課題】積層型圧電アクチュエ
ータ１０のセラミックス層１３部分がグリーンシート法
などの厚膜形成法等で形成された積層型圧電アクチュエ
ータ１０は、セラミックス層１３部分の厚みが１００ミ
クロン以下と薄く、積層型圧電アクチュエータ１０の素
子自体の小型化、低電圧駆動が可能なデバイスとして注
目されている。セラミックスは、図１１に示す様にセラ
ミックスの厚みが薄くなると単位厚み当たりに印加可能
な電圧が高くなる特性がある。そのために、積層型圧電
アクチュエータにおいて、セラミックス層の厚みを薄く
することによって、より大きな電界をセラミックス層に
印加することが可能に成る。ところが、図１０に示され
る様に、外部電極１７の形成されていない側面に極性の
異なる電圧が印加される内部電極層１５が露出した構造
に成っていると、外装樹脂等で側面がたとえ被覆されて
いても、異なる極性の電圧が印加される内部電極層１５
間の沿面距離はセラミックス層１３の厚みしかないため
に、電圧が印加されると、異なる極性の電圧が印加され
る内部電極層１５間で放電が生じて積層型圧電アクチュ
エータ１０素子自体が破壊するという現象を生じ、積層
型圧電アクチュエータ素子の製造段階で高電圧を印加す
る試験工程等での歩留まりが悪く、且つ信頼性が悪い等
の問題点がある。特に、製造工程において、ゴミなどが
付着すると、付着したゴミが微小なゴミでも、電極間間
隔が１００ミクロン以下と小さいために、付着した処が
起点と成って内部電極層１５間の放電が生じて、絶縁不
良の原因と成る。The multilayer piezoelectric actuator 10 in which the ceramic layer 13 of the multilayer piezoelectric actuator 10 is formed by a thick film forming method such as a green sheet method has a thickness of 100 microns. As a device having a small thickness, the device itself of the laminated piezoelectric actuator 10 is attracting attention as a device that can be downsized and driven at a low voltage. As shown in FIG. 11, ceramics have a characteristic that as the thickness of the ceramics becomes thinner, the voltage that can be applied per unit thickness increases. Therefore, in the laminated piezoelectric actuator, it is possible to apply a larger electric field to the ceramic layer by reducing the thickness of the ceramic layer. However, as shown in FIG. 10, if the internal electrode layer 15 to which a voltage having a different polarity is applied is exposed on the side surface where the external electrode 17 is not formed, the side surface is covered with an exterior resin or the like. The internal electrode layers 15 to which voltages of different polarities are applied.
Since the creepage distance between them is only the thickness of the ceramic layer 13, when a voltage is applied, discharge occurs between the internal electrode layers 15 to which voltages of different polarities are applied, and the element itself of the laminated piezoelectric actuator 10 is broken. This causes problems such as low yield and poor reliability in a test step of applying a high voltage in the manufacturing stage of the multilayer piezoelectric actuator element. In particular, in the manufacturing process, if dust adheres, even if the adhered dust is minute, the distance between the electrodes is as small as 100 microns or less. It causes insulation failure.
【０００４】この様な内部電極層１５間での絶縁不良、
および放電を防ぐためには、露出した内部電極層１５を
無くしたり、或は露出している内部電極層１５の沿面距
離を長くすることが有効である。露出する内部電極層１
５の側端部を、全部、若しくは、選択的に一部が、機械
的な方法で除去する等の方法が考えられているが、特
に、セラミックス層１３部分がグリーンシート法などの
厚膜法で形成された積層型圧電アクチュエータ１０素子
は、セラミックス層１３の厚みが１００ミクロン以下と
薄いために、内部電極層１５の側面露出部分を機械的な
加工法等により、除去することは困難である。また、内
部電極層１５の側端部を空孔にすることは、１００ミク
ロン以下と薄いセラミックス層１３を積層した構造を持
つ積層型圧電アクチュエータ１０では、強度的な問題が
出てくる。[0004] Such poor insulation between the internal electrode layers 15,
In order to prevent discharge, it is effective to eliminate the exposed internal electrode layer 15 or to increase the creepage distance of the exposed internal electrode layer 15. Exposed internal electrode layer 1
A method of removing all or a part of the side edges of the ceramic layer 5 by a mechanical method is considered. In particular, the ceramic layer 13 is formed by a thick film method such as a green sheet method. Since the thickness of the ceramic layer 13 is as thin as 100 μm or less, it is difficult to remove the exposed side surface of the internal electrode layer 15 by a mechanical processing method or the like in the multilayer piezoelectric actuator 10 element formed by . In addition, making the side edges of the internal electrode layer 15 voids raises a strength problem in the laminated piezoelectric actuator 10 having a structure in which the ceramic layers 13 as thin as 100 microns or less are laminated.
【０００５】従って、この発明の目的は、この様な従来
における問題点を解決するために、グリーンシートを積
層して一体焼結することによって作成される積層型圧電
アクチュエータ、特に、内部電極間隔が１００ミクロン
以下の超小型の積層型圧電アクチュエータおよびその製
造方法において、１００ミクロン以下の内部電極間隔を
持つ積層焼結体においても露出する内部電極の側端部
を、全部、若しくは、選択的に一部が除去されて絶縁さ
れた積層型圧電アクチュエータおよびその製造方法を提
供することにある。Accordingly, an object of the present invention is to solve such a conventional problem by stacking green sheets and integrally sintering the green sheets. In an ultra-small multilayer piezoelectric actuator of 100 microns or less and a method of manufacturing the same, the side edges of the internal electrodes that are exposed even in a multilayer sintered body having an internal electrode spacing of 100 microns or less can be completely or selectively removed. It is an object of the present invention to provide a laminated piezoelectric actuator whose part is removed and insulated, and a method of manufacturing the same.
【０００６】[0006]
【課題を解決するための手段】上述の目的を達成するた
めに、この発明は、側面に露出する内部電極の側端部の
少なくとも１つを圧電アクチュエータが変位する時にそ
の変位の妨げにならない絶縁物で構成することにより、
側面に露出する内部電極層の側端部を除去して絶縁する
方法、乃至は極性の異なる電圧が印加される内部電極の
沿面距離を長くする方法を提案するものである。SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides at least one of the side ends of an internal electrode exposed on a side face which does not hinder the displacement of a piezoelectric actuator when the piezoelectric actuator is displaced. By composing things,
The present invention proposes a method of removing and insulating the side edge of the internal electrode layer exposed on the side surface, or a method of increasing the creepage distance of the internal electrode to which voltages having different polarities are applied.
【０００７】すなわち、この発明に依れば、圧電セラミ
ックスと内部電極が交互に積層されて内部電極が外部電
極と一層置きに接続された積層型圧電アクチュエータ
は、内部電極と一層置きに接続される外部電極が形成さ
れない素子側面における内部電極の露出を少なくとも一
層置きになるように内部電極の側端部を、チタン酸鉛を
主とする絶縁物で構成して、異なる電位が印加される内
部電極間の絶縁を保つことを特徴としている。That is, according to the present invention, a laminated piezoelectric actuator in which piezoelectric ceramics and internal electrodes are alternately laminated and the internal electrodes are connected alternately to the external electrodes is connected alternately to the internal electrodes. A side end portion of the internal electrode is formed of an insulator mainly composed of lead titanate so that at least one layer of the internal electrode is exposed on the side surface of the element where the external electrode is not formed. It is characterized by maintaining insulation between them.
【０００８】また、この発明に依れば、積層型圧電アク
チュエータの製造方法は、圧電セラミックスグリーンシ
ート上に導体ペーストを印刷して内部電極を形成し、チ
タン酸鉛を主とする絶縁物から成る絶縁ペーストを、外
部電極が形成されない素子側面に露出する内部電極の少
なくとも１つの側端部を含むよう導体ペーストと隣接す
るように印刷した後に、内部電極と一層置きに接続され
る外部電極が形成されない素子側面における内部電極の
露出を少なくとも一層置きに成るように積層し、次い
で、圧着、脱脂、焼成して、内部電極と外部電極を一層
置きに接続することを特徴としている。Further, according to the present invention, a method of manufacturing a laminated piezoelectric actuator is provided in which a conductive paste is printed on a piezoelectric ceramic green sheet to form an internal electrode, and is made of an insulator mainly containing lead titanate. After printing the insulating paste so as to include at least one side end of the internal electrode exposed on the side of the element where the external electrode is not formed, the insulating paste is adjacent to the conductive paste, and then the external electrode connected to the internal electrode is formed. It is characterized in that the internal electrodes on the side surfaces of the element not to be exposed are laminated at least every other layer, and then the internal electrodes and the external electrodes are connected every other layer by pressure bonding, degreasing, and firing.
【０００９】本発明者らは、先に、特願平３−１５３２
１９号明細書において、外部電極と内部電極との絶縁を
保ち、且つ、内部応力を緩和する部分がチタン酸鉛で構
成される方法を提供しているが、この発明によれば、積
層型圧電アクチュエータは、圧電セラミックスと内部電
極が交互に積層され、内部電極が外部電極と一層置きに
接続される積層型圧電アクチュエータにおいて、外部電
極が形成されていない側面に露出する内部電極の端部
を、内部電極間の沿面距離を広げ且つ絶縁を保ち且つ変
位の妨げにならないように、チタン酸鉛で構成されるこ
とを特徴としている。The present inventors have previously described Japanese Patent Application No. 3-1532.
In the specification of Japanese Patent No. 19, there is provided a method in which a portion for maintaining the insulation between the external electrode and the internal electrode and relaxing the internal stress is made of lead titanate. The actuator is a laminated piezoelectric actuator in which piezoelectric ceramics and internal electrodes are alternately laminated, and the internal electrodes are connected alternately with the external electrodes.In the laminated piezoelectric actuator, the ends of the internal electrodes exposed on the side surfaces on which the external electrodes are not formed, It is characterized by being made of lead titanate so as to increase the creepage distance between the internal electrodes, maintain insulation, and do not hinder displacement.
【００１０】更にまた、この発明に依れば、積層型圧電
アクチュエータの製造方法は、圧電セラミックスグリー
ンシート上に導体ペーストを印刷して内部電極を形成
し、チタン酸鉛を主とする絶縁物から成る絶縁ペースト
を導体ペーストと隣接するように印刷した後に、積層、
圧着、脱脂、焼成して、積層型圧電アクチュエータを作
成することを特徴としている。Still further, according to the present invention, a method of manufacturing a laminated piezoelectric actuator is provided in which a conductive paste is printed on a piezoelectric ceramic green sheet to form an internal electrode, and an insulating material mainly composed of lead titanate is used. After printing the insulating paste consisting of the conductive paste adjacent to the conductive paste,
It is characterized in that a laminated piezoelectric actuator is produced by pressure bonding, degreasing and firing.
【００１１】チタン酸鉛（ＰｂＴｉＯ3）は、積層型圧
電アクチュエータに使用されるチタン酸ジルコン酸鉛
（ＰＺＴ）等と同じペロブスカイト型化合物で、５００
℃付近にキュリー温度を持っている。純粋なチタン酸鉛
は、高温で焼結しても５００℃付近のキュリー温度を通
過した時に起きる相転移による軸比の変化が大きいため
に、大きな内部応力が発生し、微細に破壊して焼結しな
い。この発明は、この現象に着目し、チタン酸鉛を、内
部電極の側面に露出する側端部の絶縁部分として利用す
ることによって構成されている。[0011] Lead titanate (PbTiO 3 ) is a perovskite compound similar to lead zirconate titanate (PZT) or the like used in a laminated piezoelectric actuator, and is 500
It has a Curie temperature around ° C. Pure lead titanate, even when sintered at high temperatures, undergoes a large change in the axial ratio due to the phase transition that occurs when it passes through the Curie temperature of around 500 ° C. Do not tie. The present invention focuses on this phenomenon, and uses lead titanate as an insulating portion at the side end exposed on the side surface of the internal electrode.
【００１２】すなわち、内部電極の側面に露出する端部
の絶縁部分として使用されるチタン酸鉛は変位を誘起す
るセラミックス層のチタン酸ジルコン酸鉛と同じペロブ
スカイト型結晶構造を持つ化合物であり、絶縁部分とし
てセラミックス層との馴みが良い。また、焼成時の昇温
過程では、セラミックス層のチタン酸ジルコン酸鉛（Ｐ
ＺＴ）と同じ様に焼結して、焼成時の降温過程で５００
℃付近のキュリー点で微細化する、特性を利用したもの
である。形成された絶縁部分は微細化したチタン酸鉛が
入っているので、十分に絶縁を示し、且つ積層型圧電ア
クチュエータに電圧を印加した時に変位を拘束すること
がない。That is, lead titanate used as an insulating portion at the end exposed on the side surface of the internal electrode is a compound having the same perovskite type crystal structure as lead zirconate titanate of the ceramic layer which induces displacement. Good compatibility with the ceramic layer as a part. In the heating process during firing, lead zirconate titanate (P
ZT) and sintering in the same manner as in
It utilizes the property of making finer at the Curie point around ℃. Since the formed insulating portion contains finely divided lead titanate, it shows sufficient insulation and does not restrain displacement when a voltage is applied to the multilayer piezoelectric actuator.
【００１３】積層型圧電アクチュエータに使用される変
位を誘起するセラミックスは、先に述べた様に、ペロブ
スカイト型構造のチタン酸ジルコン酸鉛系の化合物が殆
どである。この化合物はＡサイトに鉛（Ｐｂ）を含む化
合物であるが、焼成時に鉛雰囲気を調整してやらない
と、Ａサイトの鉛が蒸発してセラミックスの特性に悪影
響を与えるという問題がある。従って、この発明におい
て、絶縁部分に使用されるチタン酸鉛は、その点でも同
じペロブスカイト化合物であってＡサイトに鉛が入って
いるので、セラミックス層の鉛蒸発を抑えることができ
る。また、チタン酸鉛は、鉛化合物の中では、特に変位
を誘起するチタン酸ジルコン酸鉛（ＰＺＴ）と比べて、
安定な化合物であり、セラミックス層と反応して変位を
誘起する特性に影響を与えることも少ない。As described above, most of the ceramics for inducing displacement used in the laminated piezoelectric actuator are lead zirconate titanate compounds having a perovskite structure. This compound is a compound containing lead (Pb) at the A site. However, if the lead atmosphere is not adjusted during firing, there is a problem that the lead at the A site evaporates and adversely affects the properties of the ceramic. Therefore, in this invention, the lead titanate used for the insulating portion is also the same perovskite compound in that respect, and lead is contained in the A site, so that lead evaporation of the ceramic layer can be suppressed. In addition, lead titanate is one of the lead compounds, particularly in comparison with lead zirconate titanate (PZT) which induces displacement.
It is a stable compound and has little effect on the property of inducing displacement by reacting with the ceramic layer.
【００１４】また、絶縁部分として、使用するチタン酸
鉛は、焼成時に変位を誘起する圧電セラミックスと反応
しないことが必要であり、また、焼結後に、冷却過程で
相転移による破砕が起きるように、軸比の変化が十分起
きる程度の純度が望ましい。このためには、チタン酸鉛
が、高純度であること、十分結晶化していること等が重
要である。Further, it is necessary that the lead titanate used as the insulating portion does not react with the piezoelectric ceramics that induces displacement during firing, and that crushing due to phase transition occurs in the cooling process after sintering. It is desirable that the purity is such that the change in the axial ratio occurs sufficiently. For this purpose, it is important that the lead titanate has high purity and is sufficiently crystallized.
【００１５】[0015]
【実施例】以下、実施例を挙げて、この発明の積層型圧
電アクチュエータおよびその製造方法を、図を追って更
に詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The laminated piezoelectric actuator of the present invention and a method of manufacturing the same will be described in more detail with reference to the drawings.
【００１６】まず、一体焼成可能な積層型圧電アクチュ
エータ用材料として好適であるＰｂ（Ｚｒ，Ｔｉ）Ｏ3
に第３成分として複合ペロブスカイト化合物を加え、ス
トロンチウムで変性したセラミックス粉体を、サンドミ
ルで粉砕し１ミクロン以下の粒径にする。この粉末にバ
インダー、分散剤、活性剤、消泡剤を加え真空脱泡した
のちドクタブレード法を用いグリーンシート４を作製す
る。得られたグリーンシート４の厚みは９５ミクロンで
あった。このグリーンシート４上に、スクリーン印刷法
を用いて内部電極層５（白金）を印刷した（図１）。次
に、同じグリーンシート４上に内部電極層５に隣接する
ように、チタン酸鉛から構成される絶縁ペーストを印刷
して絶縁部分６を形成する（図２）。この絶縁部分６を
形成する絶縁ペーストは、９９.９％のチタン酸鉛粉末
を固形分（７０ｗｔ％）とし、エチルセルロースをバイ
ンダーとし、ブチルカルビトール、α−テルピネオール
を溶剤として構成される。絶縁ペーストの印刷厚みは内
部電極層５の印刷厚みを考慮した上で決定する必要があ
る。つまり、積層焼結体２の焼結時に同じ厚みに成る必
要がある。積層圧着時や焼結時に厚みの差があると、デ
ラミネーションやクラックの原因となる。実施例では、
内部電極層５のペースト印刷厚みを１８ミクロン、絶縁
部分６の層の絶縁ペースト印刷厚みを８ミクロンとし
た。First, Pb (Zr, Ti) O 3 which is suitable as a material for a laminated piezoelectric actuator that can be integrally fired.
Then, a composite perovskite compound is added as a third component, and the ceramic powder modified with strontium is pulverized with a sand mill to a particle size of 1 micron or less. A binder, a dispersing agent, an activator, and an antifoaming agent are added to the powder, and the powder is vacuum defoamed. The thickness of the obtained green sheet 4 was 95 microns. An internal electrode layer 5 (platinum) was printed on the green sheet 4 using a screen printing method (FIG. 1). Next, an insulating paste made of lead titanate is printed on the same green sheet 4 so as to be adjacent to the internal electrode layer 5, thereby forming an insulating portion 6 (FIG. 2). The insulating paste forming the insulating portion 6 is composed of 99.9% lead titanate powder as a solid (70 wt%), ethyl cellulose as a binder, and butyl carbitol and α-terpineol as a solvent. The printing thickness of the insulating paste needs to be determined in consideration of the printing thickness of the internal electrode layer 5. That is, it is necessary that the laminated sintered body 2 has the same thickness at the time of sintering. If there is a difference in thickness at the time of lamination and pressure bonding or sintering, it causes delamination and cracks. In the example,
The thickness of the paste printed on the internal electrode layer 5 was 18 μm, and the thickness of the printed paste on the layer of the insulating portion 6 was 8 μm.
【００１７】次に、内部電極層５の印刷していないグリ
ーンシート４を３０枚、内部電極層５とチタン酸鉛から
構成される絶縁ペーストから成る絶縁部分６の印刷して
あるグリーンシート４を図３に示す様に交互に１２０
枚、更に、内部電極層５の印刷していないグリーンシー
ト４を３０枚、積層して加熱圧着し、脱脂して、１２０
０℃で焼成して図４のような積層焼結体２を得た。積層
焼結体２のセラミックス層３の厚みは５０ミクロン、内
部電極層５とチタン酸鉛から構成される絶縁ペーストか
ら成る絶縁部分６の厚みは共に５ミクロンであった。Next, 30 green sheets 4 on which the internal electrode layers 5 have not been printed, and green sheets 4 on which the insulating portions 6 made of an insulating paste composed of the internal electrode layers 5 and lead titanate have been printed. As shown in FIG.
Sheets, and further, 30 sheets of the green sheet 4 on which the internal electrode layer 5 has not been printed are laminated, heated and pressed, degreased, and dried.
By firing at 0 ° C., a laminated sintered body 2 as shown in FIG. 4 was obtained. The thickness of the ceramic layer 3 of the laminated sintered body 2 was 50 μm, and the thickness of both the internal electrode layer 5 and the insulating portion 6 made of an insulating paste composed of lead titanate was 5 μm.
【００１８】次に、この積層焼結体２の４側面を研磨
し、内部電極層５とチタン酸鉛から構成される絶縁部分
６の露出する相対する端面に銀ペーストを焼き付けた外
部電極７を形成する。この外部電極７にリード線を半田
付けし、外装を施してＷ５×Ｄ７×Ｈ９mmの積層型圧電
アクチュエータ１を得た。Next, four side surfaces of the laminated sintered body 2 are polished, and an external electrode 7 having a silver paste baked on the exposed opposite end surfaces of the internal electrode layer 5 and the insulating portion 6 made of lead titanate is formed. Form. A lead wire was soldered to the external electrode 7 and exteriorly provided to obtain a laminated piezoelectric actuator 1 of W5 × D7 × H9 mm.
【００１９】また、比較例として、図８に示す印刷パタ
ーンで印刷して、図９および図１０に示す様な従来型の
構造の積層型圧電アクチュエータ１０も作製した。As a comparative example, a multilayer piezoelectric actuator 10 having a conventional structure as shown in FIGS. 9 and 10 was produced by printing with the print pattern shown in FIG.
【００２０】作製した積層型圧電アクチュエータ素子各
々１００個に４００Ｖの電圧を５秒間印加し耐圧試験を
行ったところ、この発明の第１の実施例に依る図４の様
な構造を持つ積層型圧電アクチュエータ１素子が９８％
の合格率であったのに対し、比較例の図９の様な従来構
造の積層型圧電アクチュエータ１０素子は合格率が６３
％しかなく、不良の原因は、その殆どが、異なる極性の
電圧が印加される内部電極層１５間で放電が生じたゝめ
であった。A voltage of 400 V was applied to 100 of each of the manufactured laminated piezoelectric actuator elements for 5 seconds to perform a withstand voltage test. As a result, a laminated piezoelectric actuator having a structure as shown in FIG. 4 according to the first embodiment of the present invention was obtained. 98% actuator 1 element
In contrast, the pass rate of the conventional laminated piezoelectric actuator 10 element as shown in FIG.
%, And most of the causes of the failure were that a discharge occurred between the internal electrode layers 15 to which voltages having different polarities were applied.
【００２１】この発明に従って作製した積層型圧電アク
チュエータ素子の絶縁抵抗を調べたところ１００ＭΩ以
上有って十分に絶縁されていること、また、変位を測定
したところ１５０Ｖで１０ミクロン以上変位して積層型
圧電アクチュエータ素子として十分機能することが解か
った。When the insulation resistance of the laminated piezoelectric actuator element manufactured according to the present invention was examined, it was found that the insulation resistance was 100 MΩ or more, and that the insulation was sufficiently insulated. It turned out that it functions sufficiently as a piezoelectric actuator element.
【００２２】更に、この発明に従って作製した積層型圧
電アクチュエータ素子に１５０Ｖ，１ｋＨｚサイン波電
圧を印加して積層型圧電アクチュエータ素子を駆動さ
せ、寿命試験を行ったところ、１０8回変位させても破
壊は起こらず十分耐久性も有ることも解かった。Furthermore, 150 V to the laminated piezoelectric actuator element produced in accordance with the present invention, to drive the application to multilayer piezoelectric actuator device a 1kHz sine wave voltage was subjected to life test, fracture be displaced 108 times It was also found that there was no durability and there was sufficient durability.
【００２３】この発明の第１の実施例では、図４に示す
ように外部電極７の形成されていない積層型圧電アクチ
ュエータ素子側面に露出する内部電極層５全ての側端部
をチタン酸鉛で構成された積層型圧電アクチュエータ素
子を示しているが、この発明の主旨からすると、図６お
よび図７に示す様に、極性の同じ電圧が印加される内部
電極層５’のみの側端部をチタン酸鉛の絶縁部分６’で
構成されるものでも同様の効果が期待される。In the first embodiment of the present invention, as shown in FIG. 4, the side ends of all the internal electrode layers 5 exposed on the side surfaces of the laminated piezoelectric actuator element where the external electrodes 7 are not formed are made of lead titanate. FIG. 6 and FIG. 7 show a side view of only the internal electrode layer 5 ′ to which a voltage having the same polarity is applied, as shown in FIGS. 6 and 7. A similar effect can be expected even with a structure made of an insulating portion 6 'of lead titanate.
【００２４】[0024]
【発明の効果】以上説明したように、この発明により、
１００ミクロン以下の内部電極間隔をもつ積層焼結体に
おいても、露出する内部電極の側端部を、全部、もしく
は、選択的に一部を除去して絶縁することができ、製造
工程での歩留まりが良く、充分耐電圧があり、信頼性の
高い積層型圧電アクチュエータ素子を製造することが出
来る等の効果が得られる。As described above, according to the present invention,
Even in the case of a laminated sintered body having an internal electrode interval of 100 microns or less, the side edges of the exposed internal electrodes can be insulated by completely or selectively removing a part thereof, and the yield in the manufacturing process can be improved. In addition, such effects can be obtained that a laminated piezoelectric actuator element having high reliability, sufficient withstand voltage, and high reliability can be manufactured.
【図１】この発明の積層型圧電アクチュエータの製造工
程の第１段階を示す説明図である。FIG. 1 is an explanatory diagram showing a first stage of a manufacturing process of a multilayer piezoelectric actuator of the present invention.
【図２】この発明の積層型圧電アクチュエータの製造工
程の第２段階を示す説明図である。FIG. 2 is an explanatory view showing a second stage of the manufacturing process of the multilayer piezoelectric actuator of the present invention.
【図３】この発明の積層型圧電アクチュエータの製造工
程の第３段階を示す説明図である。FIG. 3 is an explanatory view showing a third stage of the manufacturing process of the multilayer piezoelectric actuator of the present invention.
【図４】この発明の積層型圧電アクチュエータの製造工
程の第４段階を示す説明図である。FIG. 4 is an explanatory view showing a fourth stage of the manufacturing process of the multilayer piezoelectric actuator of the present invention.
【図５】この発明の積層型圧電アクチュエータの製造工
程の最終段階を示す説明図である。FIG. 5 is an explanatory diagram showing the final stage of the manufacturing process of the multilayer piezoelectric actuator of the present invention.
【図６】この発明の積層型圧電アクチュエータの第２の
実施例を示す図２に相当する説明図である。FIG. 6 is an explanatory view corresponding to FIG. 2 showing a second embodiment of the multilayer piezoelectric actuator of the present invention.
【図７】図６の第２の実施例を示す図４に相当する説明
図である。FIG. 7 is an explanatory diagram corresponding to FIG. 4 showing the second embodiment of FIG. 6;
【図８】比較例としての従来の積層型圧電アクチュエー
タのセラミックス層の１つを示す説明図である。FIG. 8 is an explanatory view showing one of ceramic layers of a conventional laminated piezoelectric actuator as a comparative example.
【図９】図８の従来のセラミックス層の積層を示す説明
図である。FIG. 9 is an explanatory view showing the conventional lamination of the ceramic layers of FIG. 8;
【図１０】図９の従来の積層型圧電アクチュエータを示
す説明図である。FIG. 10 is an explanatory view showing the conventional laminated piezoelectric actuator of FIG.
【図１１】積層型圧電アクチュエータにおける絶縁破壊
電圧とセラミックス厚さの関係を示すグラフである。FIG. 11 is a graph showing a relationship between a dielectric breakdown voltage and a ceramic thickness in a laminated piezoelectric actuator.
１ 積層型圧電アクチュエータ ２ 積層焼結体 ３ セラミックス層 ４ グリーンシート ５ 内部電極層 ５’ 内部電極層 ６ 絶縁部分 ６’ 絶縁部分 ７ 外部電極 １１ 積層型圧電アクチュエータ １２ 積層焼結体 １３ セラミックス層 １４ グリーンシート １５ 内部電極層 １６ 絶縁部分 １７ 外部電極 REFERENCE SIGNS LIST 1 laminated piezoelectric actuator 2 laminated sintered body 3 ceramic layer 4 green sheet 5 internal electrode layer 5 ′ internal electrode layer 6 insulating part 6 ′ insulating part 7 external electrode 11 laminated piezoelectric actuator 12 laminated sintered body 13 ceramic layer 14 green Sheet 15 Internal electrode layer 16 Insulated part 17 External electrode
Claims (4)
層され、内部電極が外部電極と一層置きに接続される積
層型圧電アクチュエータにおいて、 内部電極と一層置きに接続される外部電極が形成されな
い素子側面における内部電極の露出を少なくとも一層置
きに成るように内部電極の側端部を、チタン酸鉛を主と
する絶縁物で構成して、異なる電位が印加される内部電
極間の絶縁を保つことを特徴とする積層型圧電アクチュ
エータ。1. A laminated piezoelectric actuator in which piezoelectric ceramics and internal electrodes are alternately stacked, and the internal electrodes are connected alternately with external electrodes, and the side of the element where the external electrodes connected alternately with the internal electrodes are not formed The side edges of the internal electrodes are made of an insulator mainly composed of lead titanate so that the exposure of the internal electrodes is at least every other layer, and the insulation between the internal electrodes to which different potentials are applied is maintained. Characteristic multilayer piezoelectric actuator.
出する内部電極の両側端部を、チタン酸鉛を主とする絶
縁物で構成して、異なる電位が印加される内部電極間の
絶縁を保つことを特徴とする請求項１記載の積層型圧電
アクチュエータ。2. Both ends of an internal electrode exposed on both side surfaces of an element where an external electrode is not formed are made of an insulator mainly composed of lead titanate, and insulation between the internal electrodes to which different potentials are applied is provided. The multilayer piezoelectric actuator according to claim 1, wherein the piezoelectric actuator is maintained.
体ペーストを印刷して内部電極を形成し、チタン酸鉛を
主とする絶縁物から成る絶縁ペーストを、外部電極が形
成されない素子側面に露出する内部電極の少なくとも１
つの側端部を含むよう導体ペーストと隣接するように印
刷した後に、内部電極と一層置きに接続される外部電極
が形成されない素子側面における内部電極の露出を少な
くとも一層置きに成るように積層し、次いで、圧着、脱
脂、焼成して、内部電極と外部電極を一層置きに接続す
ることを特徴とする積層型圧電アクチュエータの製造方
法。3. An internal electrode in which a conductive paste is printed on a piezoelectric ceramic green sheet to form an internal electrode, and an insulating paste made of an insulator mainly composed of lead titanate is exposed on the side of the element where the external electrode is not formed. At least one of
After printing so as to be adjacent to the conductor paste so as to include one side end, the internal electrodes and the internal electrodes are stacked so that the exposure of the internal electrodes on the element side where the external electrodes connected to each other are not formed is at least every other layer, Next, a method for manufacturing a laminated piezoelectric actuator, wherein the internal electrodes and the external electrodes are connected alternately by pressure bonding, degreasing, and firing.
縁ペーストを、外部電極が形成されない素子両側面に露
出する内部電極の側端部を含むよう導体ペーストと隣接
して圧電セラミックスグリーンシート上に印刷したこと
を特徴とする請求項３記載の積層型圧電アクチュエータ
の製造方法。4. A piezoelectric ceramic green sheet is formed by placing an insulating paste made of an insulator mainly composed of lead titanate adjacent to a conductive paste so as to include side ends of internal electrodes exposed on both side surfaces of the element where external electrodes are not formed. 4. The method according to claim 3, wherein the piezoelectric actuator is printed thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29033492A JP2951129B2 (en) | 1992-10-28 | 1992-10-28 | Multilayer piezoelectric actuator and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29033492A JP2951129B2 (en) | 1992-10-28 | 1992-10-28 | Multilayer piezoelectric actuator and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06140683A JPH06140683A (en) | 1994-05-20 |
| JP2951129B2 true JP2951129B2 (en) | 1999-09-20 |
Family
ID=17754721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29033492A Expired - Fee Related JP2951129B2 (en) | 1992-10-28 | 1992-10-28 | Multilayer piezoelectric actuator and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2951129B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10016428A1 (en) * | 2000-04-01 | 2001-10-18 | Bosch Gmbh Robert | Electroceramic multilayer component, has filler layers between internal electrodes |
| DE10046657A1 (en) * | 2000-09-20 | 2002-04-04 | Bosch Gmbh Robert | Manufacture of piezoelectric element e.g. for vehicle fuel injection system actuator, by forming block with neutral regions, and separating after sintering |
| DE10048928A1 (en) * | 2000-10-04 | 2002-04-25 | Bosch Gmbh Robert | piezo element |
| JP4434016B2 (en) * | 2002-08-02 | 2010-03-17 | 日本碍子株式会社 | Method for manufacturing piezoelectric / electrostrictive membrane element |
| JP4610215B2 (en) * | 2004-03-19 | 2011-01-12 | 株式会社ノリタケカンパニーリミテド | Conductor paste |
| JP5200331B2 (en) * | 2006-04-17 | 2013-06-05 | Ｔｄｋ株式会社 | Multilayer piezoelectric element |
| JP4358220B2 (en) * | 2006-11-21 | 2009-11-04 | Ｔｄｋ株式会社 | Multilayer piezoelectric element |
| JP6259194B2 (en) * | 2013-03-21 | 2018-01-10 | 日本特殊陶業株式会社 | Piezoelectric element |
| JP2015185666A (en) * | 2014-03-24 | 2015-10-22 | 株式会社日本セラテック | Method for manufacturing piezoelectric element |
| US20200350484A1 (en) * | 2017-09-28 | 2020-11-05 | Toyoda Gosei Co., Ltd. | Piezoelectric element formed from elastomer and method for producing piezoelectric element formed from elastomer |
-
1992
- 1992-10-28 JP JP29033492A patent/JP2951129B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06140683A (en) | 1994-05-20 |
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