JP2938915B2 - Pattern processing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to a figure processing method, and more particularly to a method of registering a figure in an area prior to creation of drawing data such as mask data and directly drawn figure data in semiconductor manufacturing. Accordingly, the object of the present invention is to provide a graphic processing method capable of simplifying a process of checking whether a graphic is included in an area or not, and thus speeding up graphic registration without wasteful processing. Is divided into meshes at predetermined intervals to form a large number of divided areas, and a figure arranged in the coordinate system is registered in the included divided areas as to which of the divided areas is included. In the graphic processing method described above, the scanning line parallel to one coordinate axis of the ΧY two-dimensional coordinate axis is translated along the other coordinate axis, and each end point and A contour line group intersecting with the scanning line at the boundary of the divided area is determined, and in each of the determined contour line groups, the contour line is not allowed in order from the contour line closest to the other coordinate axis or from the furthest contour line. A pair pair is obtained, and the figure is registered in each divided region from the divided region including one outer line segment to the divided region including the other outer line segment for each outer line segment pair.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a graphic processing method, and more particularly to a method of registering a graphic in an area prior to creation of drawing data such as mask data and directly drawn graphic data in semiconductor manufacturing.

When registering each figure of a set of figures constituting an LSI in a certain area, rather than registering the entire LSI chip,
It is more effective to divide the entire chip area into a mesh shape to form a large number of divided areas, and to register in which divided area a figure is formed in the divided area. That is, if the registration processing of one figure is performed on the entire chip area, many other figures on the chip are also processed at the same time, but if the registration processing of one figure is performed on the fine divided area, The number of other graphics to be processed can be greatly reduced. As a result, the time required for registering a figure can be significantly reduced.

2. Description of the Related Art Conventionally, when each figure of a set of figures constituting an LSI is registered in an area, as shown in FIG. 8, the entire chip area is divided into meshes at predetermined intervals to form a large number of divided areas. When Tb is formed and, for example, the figure F is registered in a divided area, a minimum area T including the figure F is set by a plurality of divided areas Tb1 to Tb15 as indicated by a dashed line. After this, the divided area T
b1 is extracted and the same region Tb1
It is checked whether or not 1 is included in the same area Tb1, and if the vertex F1 is included, the figure is registered in the divided area Tb1 as an area where the figure F is formed. If the vertex F1 is not included in the divided area Tb1, it is sequentially checked whether the vertices F2, F3,..., F12 are included in the divided area Tb1, and any of the vertices is included in the divided area Tb1. If so, the figure is registered in the divided area Tb1. If these vertices F1 to F12 are not included in the divided region Tb1, it is determined whether the horizontal line segments L1 to L6 and the vertical line segment (indicated by a two-dot chain line) of the figure F intersect with the boundary of the same divided region Tb1. Is checked for each line segment, and if any line segment crosses the boundary of the divided region Tb1, a figure is registered in the divided region Tb1.
When these line segments do not intersect the boundary of the divided area Tb1, it is further checked whether or not the figure F includes the same divided area Tb1. This series of processing is performed on all the divided areas Tb1 to Tb15 in the smallest area T including the outer shape F, so that the figure F is registered in the divided area Tb including the figure F.

[Problems to be Solved by the Invention] However, in the above-described conventional registration method, attention is paid to the divided area Tb in the area T, and it is checked whether or not the figure F is included in the divided area Tb. Is not only complicated, but also a wasteful process for performing the above series of processes on the divided regions Tb8, Tb9, Tb13, and Tb15 not including the figure F as shown in FIG. As a result, there is a problem that it takes an enormous amount of time and cannot register a figure at high speed.

The present invention has been made to solve the above-described problem, and an object of the present invention is to focus on a graphic, thereby simplifying a process of checking whether or not a graphic is included in an area, thereby eliminating unnecessary processing. To provide a graphic processing method capable of speeding up graphic registration.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a method in which an area represented by ΧY two-dimensional coordinates is divided into meshes at predetermined intervals to form a large number of divided areas, and the coordinate system is In a graphic processing method in which a figure to be arranged is included in any of the divided areas, a figure is registered in the included divided area, and a scanning line parallel to one of the two Y-dimensional coordinate axes is changed to the other coordinate axis. Translate along. An outline segment group that intersects the scanning line at each end point of each outline of the figure and at the boundary of each divided region is obtained. Then, in each of the determined outline segment groups, an outline segment pair is determined from the outline segment closest to the other coordinate axis, or from the furthest outline segment without sequentially allowing overlap, and one of the outline segment pairs is determined. The figure is registered in each of the divided areas from the divided area including the outline to the divided area including the other outline.

[Operation] A group of external line segments that intersect the scanning line at each end point of each external line segment of the figure and at the boundary of each divided region is obtained, and in each of the obtained external line group groups, from the external line segment closest to the other coordinate axis, or From the furthest outline, a pair of outlines is determined in order without allowing overlap, and each of the divided regions from the divided region including one outline to the divided region including the other outline for each pair of outlines. Since the figure is registered in the subroutine, the process of checking whether or not the figure is included in a divided area that does not include the figure is omitted, and unnecessary processing is eliminated, and the figure registration is speeded up.

Embodiment An embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 is a flowchart showing a graphic registration program according to one embodiment of the present invention, FIG. 2 is a schematic diagram showing an electrical configuration of a graphic processing apparatus, FIG. 3 is a diagram showing graphic line segment data, and FIG. FIG. 5 is a diagram showing the structure of the work list after the initial setting, FIG. 5 is a diagram showing the structure of the work list after the registration of a line segment, and FIG.

As shown in FIG. 2, the CPU 1 of the graphic processing apparatus in this embodiment comprises a system control unit 2, a processed graphic data input unit 3, a graphic processing unit 4, and a data output processing unit 5. Perform registration processing for the area. That is, when the control command 6 instructing the graphic registration processing is input, the system control unit 2 starts a predetermined graphic registration program and reads the graphic data 7 into the graphic data input unit 3 to be processed. Then, the system control unit 2 executes the graphic registration in the graphic processing unit 4 by using the work direct access device 8, outputs the processing path to the processing list 9, and outputs the output data 10 of the graphic registration to a magnetic tape or the like. .

Next, the graphic registration processing executed by the graphic processing unit 4 will be described with reference to the flowchart shown in FIG.

First, in step 11, the graphic data 7 input to the internal storage area M1 is divided into lines. That is, the horizontal or diagonal outline of the figure F arranged in the ΧY orthogonal coordinate system is extracted and
As shown in the figure, the line segment data including the line segment direction code, the left end point Χ coordinate, the left end point Y coordinate, the right end point 及 び coordinate, and the right end point Y coordinate are stored in the internal storage area M2 as a graphic line segment format.
To memorize. Therefore, for example, in the graphic F shown in FIG. 6, only the line data of the line segments L1 to L6 parallel to the Χ axis is input to the internal storage area M2.

Next, in step 12, the line segment data stored in the internal storage area M2 in step 11 is stored as the left end point Χ coordinate and the left end point Y coordinate while using the left end point サ ブ coordinate as a main key and the left end point Y coordinate as a sub key. Coordinates in ascending order,
That is, they are classified in ascending order. Therefore, in the figure F, the line segments L1 to L6
Will be classified in this order.

Next, at step 13, the internal storage area M3 of the graphic processing unit 4
As shown in FIG. 4, a node 20 having a storage unit 20a and a pointer 20b in the graphic line segment format shown in FIG.
And all the nodes 20 are connected by the pointer 20b. The pointer 20b of the last connected node 20 and the root pointer 21 indicating the start of the connection are connected to the sentinel (Sentel) which is a value for recognizing the end of the connection.
inel), and defines the internal storage area M3 as a work connection area (work list) with all of the areas as empty areas.

Next, in step 14, as shown in FIG. 6, the smallest {coordinate value in the internal storage area M2, that is, the left end point of the line segment L1} with respect to the scanning line (scan line) provided in parallel to the Y axis, as shown in FIG. Initial setting of a scan line is performed by setting coordinate values. In the present embodiment, the scan line is scanned in a direction in which the Y coordinate value increases, and
平行 Translated in the direction in which the coordinate value increases. In the following step 15, a scan line is set as a scan line value, which is the smaller of the smallest value of the right end point Χ coordinate value of the line segment data in the work list M3 and the coordinate value of the right end boundary B of the divided area Tb. . At this time, since there is no line segment data yet in the work list M3, the left end point Χ coordinate value of the line segment L1 becomes a scan line value.

Next, in step 16, line segments having a portion having a larger Χ coordinate value than the scan line among the line segments intersecting with the scan line are taken in order from the line segment having the smaller Y coordinate value according to the work list M3. Find a group of line segments. In this embodiment, the intersecting line segments refer to the contacting or intersecting line segments, and do not include overlapping line segments. FIG. 5 shows the state of the work list M3 when a scan line comes to the position of S1 in FIG. 6, and the line segment data of the line segments L1 and L2 are sequentially taken in. In step 17, the Y coordinate value of the intersection of the line segment in the work list M3 and the scan line is traced in ascending order, and it is determined whether the direction of the line segment is rightward or leftward.

If it is determined in step 17 that the direction of the line segment is rightward, the process proceeds to step 18 in which the rightward line segment and the leftward line segment having the next largest Y coordinate value next to the rightward line segment are formed into an outline. As a pair, the divided region Tb from the divided region including the rightward line segment to the divided region including the leftward line segment is determined as a region for forming the figure F, and the divided region Tb is stored in the internal storage region M4. By doing so, the figure F is registered. Accordingly, as shown in FIG. 6, three divided regions Tb1 from the divided region including the line segment L1 to the divided region including the line segment L2
.About.Tb3 are determined as areas for forming the figure F, and are stored in the internal storage area M4.

If the Y coordinate values of the two outlines captured in the step 16 are equal and the entire outlines are on the right side of the scan line, the two outlines are regarded as outline lines. In this case, only the divided area including the coincident end point is determined as the divided area including the graphic.

Next, proceeding to step 19, it is determined whether or not line segment data remains in the internal storage area M2 or the work list M3. If so, the flow returns to step 15 to return to the line storage in the internal storage area M2. Steps 15 to 18 are repeated until there is no more data and no line data in the work list M3. on the other hand,
If no line segment remains, the process is terminated.

Accordingly, in FIG. 6, the scan lines are sequentially set at the positions of S2 to S9. When the scan line comes to the position of S2 in FIG. 6, the line segment is divided from the segment including the line segment L1.
The divided areas Tb4 to Tb6 up to the divided area including L2 are determined as the areas forming the figure F, and are stored in the internal storage area M4. When the scan line comes to the position of S3, the divided area Tb4 including the line segments L1 and L3 is determined as the area forming the figure F, but since the divided area Tb4 is already stored in the internal storage area M4, Will not be stored.

When the scan line comes to the position of S4, the line segment L1
And a divided area Tb7 including L3 is determined as an area forming the figure F and stored in the internal storage area M4. When a scan line comes to the position of S5, the divided area Tb10 including the line segments L1 and L3 The area to be formed is determined and stored in the internal storage area M4. When the scan line comes to the position of S6, three divided regions Tb10 to Tb12 from the divided region including the line segment L1 to the divided region including the line segment L4 are determined as the regions for forming the figure F. Since Tb10 is stored in the internal storage area M4, only the divided areas Tb11 and Tb12 are newly stored in the internal storage area M4.

Further, when the scan line comes to the position of S7, the divided area Tb11 including the line segments L5 and L6 is determined as the area for forming the graphic F, but the divided area Tb11 has already been set in the internal storage area.
Since it is stored in M4, it is not newly stored in the internal storage area M4. When the scan line comes to the position of S8, the divided area Tb14 including the line segments L5 and L6 is determined as an area for forming the figure F, and is stored in the internal storage area M4. As a result of the above processing, the divided area is stored in the internal storage area M4.
A total of 11 divided regions of Tb1 to Tb7, Tb10 to Tb12, and Tb14 are stored.

As described above, in the present embodiment, the horizontal (or oblique)
Focusing on the line segment, move the scan line along the Χ axis in the direction in which the coordinate value increases, and divide the line segment that has the intersection with the same line at each moving position of the same line, including the line segment to the right The divided region Tb from the region Tb to the divided region Tb including the line segment to the left is determined as a region for forming the figure F, and the divided region Tb is stored in the internal storage area M4 to register the figure F. Therefore, the process of examining the divided area Tb where the figure F is formed can be simplified, and the figure F is formed for the divided areas Tb8, Tb9, Tb13 and Tb15 not including the figure F as shown in FIG. It is not necessary to check whether or not this is the case, and unnecessary processing can be eliminated to speed up graphic registration.

In this embodiment, the scan line is set so as to be scanned in the direction in which the Y coordinate value increases, and the scan line is translated in the direction in which the Χ coordinate value increases.
The setting may be made as shown in FIG. That is, FIG. 7A shows an example in which the scan line is set so as to be scanned in the direction in which the Y coordinate value decreases, and is translated in the direction in which the Χ coordinate value increases. The left end point Χ coordinate is used as the main key, the left end point Y coordinate is used as the sub key, and each line segment data of the figure is displayed in ascending order (from the smallest one) for the left end point Χ coordinate, and What is necessary is just to classify in descending order (from the largest one).

FIG. 7 (b) shows an example in which the scan line is set so as to be scanned in a direction in which the Y coordinate value increases, and is translated in a direction in which the Χ coordinate value decreases. In this case, Using the right end point Χ coordinate as the main key and the right end point Y coordinate as the sub key, the line segment data of the figure may be sorted in descending order for the right end point Χ coordinate and in ascending order for the right end point Y coordinate.

FIG. 7 (c) shows an example in which the scan line is set so as to be scanned in the direction in which the Y coordinate value decreases, and is translated in the direction in which the Χ coordinate value decreases. In this case, Using the right end point Χ coordinate as the main key and the right end point Y coordinate as the sub key, the line segment data of the figure may be sorted in descending order with respect to the right end point Χ coordinate and the right end point Y coordinate.

FIG. 7 (d) shows an example in which the scan line is set so as to be scanned in the direction in which the Χ coordinate value increases, and is translated in the direction in which the Y coordinate value increases. In this case, Using the lower end point Y coordinate as the main key and the lower end point Χ coordinate as the sub key, the line segment data of the figure may be sorted in ascending order with respect to the lower end point Y coordinate and the lower end point Χ coordinate.

FIG. 7 (e) shows an example in which the scan line is set so as to be scanned in a direction in which the 小 さ く coordinate value decreases, and is translated in a direction in which the Y coordinate value increases. In this case, Using the lower end point Y coordinate as a main key and the lower end point Χ coordinate as a sub key, the line segment data of the figure may be sorted in ascending order for the lower end point Y coordinate and in descending order for the lower end point Χ coordinate.

FIG. 7 (f) shows that the scan line is set so as to be scanned in the direction in which the Χ coordinate value increases, and
An example is shown in which the coordinate value is translated in a direction in which the coordinate value becomes smaller.
Using the upper end point Χ coordinate as a sub key, the line segment data of the figure may be classified in descending order for the upper end point Y coordinate and in ascending order for the upper end point Χ coordinate.

Further, FIG. 7 (g) sets the scan line so that it is scanned in the direction in which the Χ coordinate becomes smaller,
An example is shown in which the Y coordinate value is translated in a direction in which the Y coordinate value becomes smaller. In this case, the upper end point Y coordinate is used as the main key, the upper end point Χ coordinate is used as the sub key, and each line data of the figure is displayed as the upper key. The end point Y coordinate and the upper end point Χ coordinate may be classified in descending order.

[Effects of the Invention] As described above in detail, according to the present invention, it is possible to simplify the process of checking whether or not a graphic is included in an area by focusing on the graphic, thereby eliminating the unnecessary processing and registering the graphic. There is an excellent effect that the speed can be increased.

[Brief description of the drawings]

FIG. 1 is a flowchart showing a graphic registration program in one embodiment of the present invention, FIG. 2 is a schematic diagram showing an electrical configuration of a graphic processing device, FIG. 3 is a diagram showing graphic line segment data, FIG. FIG. 5 is a diagram showing a structure of a work list after initial setting, FIG. 5 is a diagram showing a structure of a work list after registration of a line segment, FIG. 6 is an operation explanatory diagram in the graphic processing method of one embodiment, FIG. (A) to (g) are explanatory diagrams each showing another example of scan line setting, and FIG. 8 is an operation explanatory diagram in a conventional graphic processing method. In the figure, 1 is a CPU, 2 is a system control unit, 3 is a graphic data input unit to be processed, 4 is a graphic processing unit, 5 is a drawing data output processing unit, 6 is a control command, 7 is graphic data, and 8 is direct access for work. 9 is a processing list, 10 is output data, L1 to L6 are line segments, and Tb is a divided area.

Claims (1)

(57) [Claims] An area represented by ΧY two-dimensional coordinates is divided into meshes at predetermined intervals to form a large number of divided areas, and a figure arranged in the coordinate system is included in any of the divided areas. In the graphic processing method in which a graphic is registered in the included divided area, a scanning line parallel to one coordinate axis of the Y two-dimensional coordinate axis is translated along the other coordinate axis, and each end point of each outline of the graphic is And, at the boundary of each divided region, a contour line group that intersects with the scanning line is obtained, and in each of the obtained contour line groups, from the contour line closest to the other coordinate axis or from the furthest contour line, overlapping is not allowed in order. An outline segment pair is determined, and the figure is registered in each divided region from the divided region including one outline segment to the divided region including the other outline segment for each outline segment pair. Graphic processing method comprising.