JP2915896B1 - Indoor positioning system - Google Patents

Abstract

An indoor positioning device capable of easily and accurately positioning an ultrasonic anemometer or the like indoors such as in a clean room. An indoor positioning device according to the present invention includes: a plurality of targets (A, B, C, D) arranged at a plurality of predetermined locations inside a building surrounded by an inner wall; Holding means for holding position coordinates, distance to an appropriate target (Ra,
Rb, Rd), and a processing means for calculating a position in the building from the measured distance to each target and the held position coordinates of these targets. And an irradiation notifying means (La, Lb, Lc, Ld) for notifying the positioning device that the laser beam from the laser rangefinder (1) has been irradiated to each of the targets. Prepare.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an indoor positioning device for positioning an anemometer or the like in a clean room for manufacturing ICs.

[0002]

2. Description of the Related Art In a clean room for manufacturing semiconductor devices, clean air is constantly blown off to keep the room clean. In such a clean room, in order to check whether the air flow is normal or not, while moving the ultrasonic anemometer over several tens to several hundred measurement target locations in the room, three-dimensional We measure the weak wind direction and speed. In particular, it is confirmed that there is no stagnation or stagnation of air that is a source of contamination anywhere in the clean room. Since the location where the air stays cannot be overlooked even if it is extremely small, extremely high values are required for the resolution and accuracy of the positioning of the measurement location.

[0003]

Conventionally, in order to position the anemometer as described above at each of several tens to several hundreds of measurement object locations in a clean room, an anemometer such as a tape measure is used to measure the position from the inner wall surface. The distance was being measured. However, the positioning method using the tape measure has a problem that labor and time are required, such as requiring two or more operators.

[0004] In particular, the distance to the inner wall surface of the clean room is measured as the length of a perpendicular line dropped on the inner wall surface.
The operation of lowering the perpendicular to the inner wall surface is performed by forming a rectangle having a part of the inner wall surface as one side. However, the work of forming this rectangle cannot be applied after the various IC processing devices are installed in the clean room because many of the inner wall surfaces are hidden by the installed IC processing devices, and the work becomes more complicated. As a result, there is a problem that the accuracy decreases. Therefore, an object of the present invention is to provide an indoor positioning device that can easily and accurately position an anemometer or the like indoors such as in a clean room.

[0005]

SUMMARY OF THE INVENTION An indoor positioning apparatus according to the present invention comprises a plurality of targets arranged at a plurality of predetermined different places inside a building surrounded by an inner wall surface, and a position coordinate of each target. Holding means for holding, a laser range finder for measuring the distance to an appropriate one of the targets, and the measured distance to each of the targets and the position coordinates of the held targets in the building, In addition to the positioning device having the processing means for calculating the position, the apparatus further includes irradiation target notification means for notifying the positioning device that the laser beam from the laser distance meter has been irradiated on each of the targets.

[0006]

According to a preferred embodiment of the present invention, the illuminated notifying means transmits an electric signal for notification to a positioning device via a light emitting device or a space or a wired transmission path. Device. Each target is placed on the inner wall of the building or on the ceiling.

[0007]

FIG. 2 is a functional block diagram showing a configuration of a positioning device constituting an indoor positioning system according to one embodiment of the present invention. The positioning device includes a laser distance meter 1, a distance display panel 2, a data interface circuit 3, a personal computer 4, a keyboard 5, and a display panel 6, and a frame such as a tripod (not shown) integrated with the ultrasonic anemometer 7. Assembled on top of. The position calculation personal computer 4 includes a position calculation means 4a and a target position coordinate holding memory 4b.

In the target position coordinate memory 4b of the personal computer 4, as shown in a frame surrounded by a dotted line in the figure, a predetermined area such as an inner wall surface or a ceiling of an IC manufacturing clean room in which room positioning is performed. Three-dimensional coordinates (Xi, Yi, Zi) of a plurality of targets set at a plurality of locations
), I = a, b, c...

As shown in FIG. 1, the positioning device shown in FIG. 2 positions each part of the room where the wind speed is to be measured in a clean room CR in which an IC processing device is arranged everywhere on a wall surface. 1. However, in FIG. 1, the positioning device of FIG. Four targets A, B, C, and D are installed at predetermined locations on the inner wall surface in the clean room CR. Each target has a fine irregular reflection surface to reflect a part of the incident laser beam in the incident direction, a reflecting surface consisting of a group of triangular pyramids to reflect many parts of the incident laser beam in the incident direction, etc. Have.

The laser range finder 1 is aimed at a number of targets that are not shielded by an IC processing device and are clearly visible by an operator. This laser range finder 1 emits a pulsed laser beam toward a wall surface at a constant period, receives a laser beam reflected back from the wall surface, and receives a laser beam from the emission of the laser beam to the reception of the reflected beam. By detecting the value of half the required time and multiplying it by the propagation time of the laser beam, that is, the speed of light, this laser distance meter,
That is, the distance between the positioning device and the wall surface is calculated.

The measured values of the laser distance meter 1 are displayed on the distance display panel 2 and transferred to the personal computer 4 via the data interface circuit 3.
A photodiode is attached to a central portion of each target to be irradiated with the laser beam, and the photodiode generates a pulse signal having a constant width when it detects that the laser beam has been irradiated to each target. This pulse signal causes the corresponding lamps La to Ld including light emitting diodes and the like installed near each target to emit light through a smoothing circuit installed as necessary.

When the operator confirms that the lamp corresponding to the target to be irradiated is emitting light and that the measured value displayed on the distance display panel 2 is an appropriate value, the operator captures the measured value. Command the personal computer 4. Before or after this, the operator inputs the identifiers of the targets A to D from the keyboard 5 to the personal computer 4 as information indicating to which target the captured data is. As described above, by arranging the lamp corresponding to each target, it can be confirmed that the target is irradiated with the laser beam. This method is effective when the brightness of the laser beam to be irradiated is small and it is difficult to determine the tip of the laser beam. Further, according to this method, there is an advantage that a laser distance meter that emits a laser beam that is not visible light such as infrared light can be used.

The operator measures the distance to the target for a plurality of targets. In the example of FIG. 1, distances Ra, Rb, and Rd to three targets A, B, and D are measured. The position calculating means 4a calculates the measured values of the distances Ra and Rb.
, Rd, and the position coordinates of each target read from the target position holding memory 4b, the following three spherical surfaces each having the center at each target and each measurement value as a radius: Is calculated, and the intersection (X, Y, Z) of the laser distance meter 1, that is, the two-dimensional position (X, Y) of the positioning device is calculated by calculating the intersection of each spherical surface, and displayed on the display panel 6. I do.

The positioning device of this embodiment is mounted on a tripod as described above, and an ultrasonic anemometer 7 is also mounted on the top of the tripod. For this reason, immediately after positioning in the clean room is completed, the ultrasonic anemometer 7 is used.
Measurement of the wind speed is started.

FIG. 3 is an indoor elevation view showing the configuration of another embodiment of the indoor positioning system of the present invention. In the indoor positioning system of this embodiment, two targets A and B are installed not on the inner wall but on the ceiling. As means for notifying the positioning device that each target has been irradiated with the laser beam, radio transmitters Wa and W are used instead of the lamps.
b is installed. Then, as shown in FIG. 4, the positioning device of this embodiment is provided with a wireless receiver 8 added to the positioning device having the configuration shown in FIG. 2 in order to receive the notification of irradiation by the wireless signal. Configuration. In the positioning system of this embodiment, the height h of the laser distance meter 1 from the floor is fixed.

Also in this embodiment, the operator measures the distance to each of the targets A and B, as in the case of the above-described embodiment in which the target is set on the inner wall surface.
The measured values Ra and Rb of each distance and the target identifier are taken into the personal computer 4. However, in this embodiment, the notification of irradiation from the wireless transmitters Wa and Wb received by the wireless receiver 8 is transferred to the personal computer 4 via the data interface circuit 3, and the position calculating means 4a Only when the notification of the irradiation is being received, the above data is fetched.

The position calculating means 4a of the personal computer 4 uses a laser to determine the intersection of the spherical surface Sa of radius Ra centered on the target A, the spherical surface Sb of radius Rb centered on the target B, and the horizontal plane L of height h. Two-dimensional coordinates (X,
Y) and thus the two-dimensional coordinates (X, Y) of the positioning measurement.

In the embodiment shown in FIG. 3 in which the target is installed on the ceiling, the target is less likely to be blocked by an IC manufacturing apparatus installed in a clean room than in the embodiment shown in FIG. There is an advantage that the number of targets to be performed is small.

The configuration in which the notification of the irradiation is performed wirelessly has been described above. However, a configuration may be adopted in which the irradiation notification unit and the positioning device are connected by a wired transmission path, and the irradiation notification is performed through the wired transmission path.

The configuration and operation of the indoor positioning apparatus of the present invention have been described by taking as an example the case where the apparatus is integrally formed with an ultrasonic anemometer. However, the indoor positioning device may be configured so that it can be replaced separately from a related device such as an ultrasonic anemometer or a part thereof.

Further, the configuration in which the three-dimensional position of the target is held in the holding memory has been exemplified. However, when each target is installed on a ceiling or the like, or when the target is installed at a fixed height on the inner wall surface, etc. Instead of keeping height information for each target,
A configuration in which only one information is held as common information for each target can be adopted.

Further, the present invention has been described by taking as an example a case where the ultrasonic anemometer is used for positioning in a clean room. However, the present invention can be used for the positioning of a transport device that travels in a building such as a warehouse or a transport device that automatically travels in an accumulation place or a workplace without a roof surrounded by concrete wall surfaces.

Also, the positioning device of the present invention has been described by taking as an example the case of manual operation. However, when the present invention is used for positioning or traveling control of a work robot or a transfer robot that operates remotely or in a fully automatic manner, the operation of the indoor positioning device of the present invention is similar to those of these robots. Remote control and fully automatic operation can also be performed. In this case, the identifier of the corresponding target is transmitted together with the notification from the wireless transmitter that performs the notification of the irradiation, and the positioning device that receives this transmits the distance measured by decoding the identifier to which target. It can be configured to automatically identify whether it is a distance.

[0024]

As described above in detail, the indoor positioning system according to the present invention is a means for holding the position coordinates of each target arranged at a predetermined position inside the building, and for the appropriate one of the targets. A configuration including a laser range finder for measuring the distance, and a positioning device including processing means for calculating a position in the building from the measured distance to each target and the position coordinates of each target while the target is held. Therefore, there is an advantage that an anemometer or the like can be easily and accurately positioned indoors such as in a clean room.

Further, since the indoor positioning apparatus of the present invention uses a laser beam having a short wavelength instead of an ultrasonic wave or a radio wave, extremely high-precision positioning can be performed, and a location where air stays in a clean room can be obtained. The high resolution and accuracy required for positioning the ultrasonic anemometer to search for the presence or absence of the anemometer can be realized.

Further, since the positioning apparatus of the present invention is provided with the irradiation notifying means for notifying the positioning apparatus that the target is irradiated with the laser beam, the distance being measured is the distance to the target. This has the advantage that positioning with high accuracy can be performed.

Further, according to the preferred embodiment of the present invention, since each target can be installed at an appropriate place on the ceiling or the inner wall surface, it is difficult for the installed target to be shielded by an IC manufacturing device or the like, so that the target can be installed. There is an advantage that the number of targets to be reduced can be reduced.

[Brief description of the drawings]

FIG. 1 is a functional block diagram showing a configuration of an indoor positioning system according to an embodiment of the present invention.

FIG. 2 is a functional block diagram showing a configuration of an indoor positioning device integrated with an ultrasonic anemometer constituting the indoor positioning system of the embodiment.

FIG. 3 is a functional block diagram showing a configuration of an indoor positioning system according to another embodiment of the present invention.

FIG. 4 is a functional block diagram showing a configuration of an indoor positioning device integrated with an ultrasonic anemometer constituting an indoor positioning system of another embodiment.

[Explanation of symbols]

 A to D Target La to Ld lamp 1 Laser distance meter 2 Distance display panel 4 Personal computer 4a Position calculation means 4b Target position coordinate holding memory 7 Ultrasonic anemometer

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) G01C 15/00-15/14 G01B 11/00 G01S 17/10, 7/48

Claims (7)

(57) [Claims] 1. A plurality of targets arranged at a plurality of predetermined different places inside a building surrounded by an inner wall surface, holding means for holding position coordinates of each of the targets, and an appropriate one of the targets And a processing means for calculating a position in the building from the measured distances to the respective targets and the held position coordinates of the targets with respect to the targets. An indoor positioning system, comprising: a positioning device; and an irradiation notifying unit that notifies the positioning device that the laser beam from the laser rangefinder has been irradiated on each of the targets. 2. The indoor positioning system according to claim 1, wherein the irradiation notification unit is a light emitting device. 3. The indoor positioning system according to claim 1, wherein said irradiation target notifying means is a transmitting device for transmitting an electric signal for said notification to said positioning device via a space or a wired transmission path. system. 4. The indoor positioning system according to claim 1, wherein the target is installed on an inner wall surface of the building or on a ceiling. 5. The apparatus according to claim 1, wherein said building is a clean room for manufacturing a semiconductor integrated circuit, and said means are integrally formed with an ultrasonic anemometer for measuring a wind speed in said clean room. An indoor positioning device characterized by the above-mentioned. 6. The apparatus according to claim 1, wherein each of the means is mounted on a vehicle which travels by remote control or automatically, and the distance measurement by the laser distance meter and the positioning by the processing means are remote. An indoor positioning device characterized by being controlled or automatically. 7. A plurality of targets arranged at a plurality of predetermined different places inside a space surrounded by a wall, holding means for holding position coordinates of each of the targets, and an appropriate one of the targets. Laser range finder for measuring a distance to an object, and processing means for calculating a position of the laser range finder in the space from the measured distance to each target and the held position coordinates of the targets. And a positioning device, comprising: a radiation notification unit that notifies the positioning device that the laser beam from the laser distance meter has been irradiated to each of the plurality of targets. Internal positioning system.