JP2885100B2 - Infrared reflective objective - Google Patents

Infrared reflective objective

Info

Publication number
JP2885100B2
JP2885100B2 JP29895994A JP29895994A JP2885100B2 JP 2885100 B2 JP2885100 B2 JP 2885100B2 JP 29895994 A JP29895994 A JP 29895994A JP 29895994 A JP29895994 A JP 29895994A JP 2885100 B2 JP2885100 B2 JP 2885100B2
Authority
JP
Japan
Prior art keywords
prism
mirror
infrared
fixed
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29895994A
Other languages
Japanese (ja)
Other versions
JPH08136449A (en
Inventor
孝博 田島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimazu Seisakusho KK
Original Assignee
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimazu Seisakusho KK filed Critical Shimazu Seisakusho KK
Priority to JP29895994A priority Critical patent/JP2885100B2/en
Publication of JPH08136449A publication Critical patent/JPH08136449A/en
Application granted granted Critical
Publication of JP2885100B2 publication Critical patent/JP2885100B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、試料を密着させたプ
リズムに赤外線を入射させ、全反射させることによって
その試料を分析する全反射測定法(ATR法)において
用いられる赤外線反射対物鏡に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared reflection objective used in the total reflection measurement method (ATR method) for analyzing a sample by irradiating infrared light to a prism on which the sample is adhered and totally reflecting the sample.

【0002】[0002]

【従来の技術】赤外線を通す高屈折率物質で作られたプ
リズムに対し臨界角(全反射を起こす角度)以上の入射
角で光を入射させプリズムと試料の境界で全反射された
光を測定すれば赤外線スペクトル情報を得ることが出来
る。このような全反射測定法(ATR法)は柔らかいゴ
ム、プラスチックフィルム或いは表面が平らな物質等の
表面の赤外線スペクトル情報を得るのに有効である。そ
してプリズムから試料へ赤外線を入射させる場合、赤外
線のもぐり込む深さhは次の式で表される。 h= λ/2π(sins2 θ−n21 21/2 ここで、θ・・・・・入射角 n21 ・・・・試料の屈折率/プリズムの屈折率 λ・・・・・波長 従って入射角θを小さくすれば赤外線のもぐり込む深さ
hを大きくすることが可能となりそれだけ内部の赤外線
情報が得られることになる。
2. Description of the Related Art Light is incident on a prism made of a high-refractive-index material that transmits infrared light at an incident angle greater than a critical angle (the angle at which total reflection occurs), and the light totally reflected at the boundary between the prism and the sample is measured. Then, infrared spectrum information can be obtained. Such a total reflection measurement method (ATR method) is effective for obtaining infrared spectrum information on the surface of a soft rubber, plastic film, or a substance having a flat surface. When infrared light is incident on the sample from the prism, the depth h into which the infrared light penetrates is expressed by the following equation. h = λ / 2π (sins 2 θ−n 21 2 ) 1/2 where θ: incident angle n 21 : refractive index of sample / refractive index of prism λ: wavelength Therefore, if the incident angle θ is reduced, the depth h into which the infrared rays can be penetrated can be increased, and the infrared information inside can be obtained accordingly.

【0003】図5は従来から知られているATR対物鏡
の構成を示す図である。即ち、赤外線光源(図示省略)
より投射された赤外線はアパ−チャ15を透過してミラ
−5及びミラ−11で反射して試料を密着させたプリズ
ム3に入射し、更に反射した赤外線はミラ−10及びミ
ラ−5で反射して検出器(図示省略)に入りその赤外線
スペクトル情報が得られる。
FIG. 5 is a diagram showing a configuration of a conventionally known ATR objective mirror. That is, an infrared light source (not shown)
The infrared light transmitted through the aperture 15 passes through the aperture 15 and is reflected by the mirrors 5 and 11 to enter the prism 3 on which the sample is adhered, and the further reflected infrared light is reflected by the mirrors 10 and 5 Then, it enters a detector (not shown), and its infrared spectrum information is obtained.

【0004】[0004]

【発明が解決しようとする課題】上記するように赤外線
が試料にもぐり込む深さは入射角に依存しており、入射
角を変えることによって異なった深さのスペクトル情報
を得ることが出来る。しかし、従来のATR対物鏡では
入射角は常に一定であり変更できるようにはなっていな
いため試料分析を行っている実務担当者からは簡単に入
射角を可変とすることのできる赤外線反射対物鏡を要望
する声が強い。この発明はかかる課題に着目してなされ
たものであってプリズムから試料への赤外線のもぐり込
み深さを容易に変更することが可能で同一物質の異なっ
た情報を得ることのできる赤外線反射対物鏡を提供する
ことを目的とする。
As described above, the depth at which infrared light penetrates into a sample depends on the incident angle, and spectral information at different depths can be obtained by changing the incident angle. However, with the conventional ATR objective, the angle of incidence is always constant and cannot be changed. Therefore, a person in charge of analyzing the sample can easily change the angle of incidence by an infrared reflecting objective. There is a strong voice that demands. The present invention has been made in view of such a problem, and an infrared reflecting objective mirror capable of easily changing the depth of penetration of infrared light from a prism to a sample and obtaining different information of the same substance. The purpose is to provide.

【0005】[0005]

【課題を解決するための手段】即ち、この発明は上記す
る課題を解決するために、赤外線反射対物鏡が、試料
面に対しプリズムを上下動させる手段と、このプリズム
の上下動と連動してプリズムへの赤外光入射用鏡とプリ
ズムからの赤外光受光鏡の角度を変化させる手段とを備
え、プリズムへの赤外光の入射角を可変としたことを特
徴とする。或いは、赤外線反射対物鏡が、下端部に試
料を密着させるプリズムを固定して取り付け中間部に突
起部を設け上下移動可能とした固定棒と、フレ−ムの固
定部に設置され前記固定棒を上下移動可能に挿通したミ
ラ−と、前記固定棒の途中に形成された突起部に周囲全
体を緩く嵌め込んだ保持具と、一方の端部は前記保持具
に回動自在に枢着され他方の端部は両端部をミラ−の端
部に回動自在に枢着した梁を挿通した連結棒と、前記梁
の端部に枢着された両端部をフレ−ムの固定部に設けた
溝に摺動可能に嵌め入れ更にもう一方の両端部をフレ−
ムの固定部に設けたもう一方の溝に摺動可能に嵌め入れ
たミラ−と、より成ることを特徴とする。
In other words, in order to solve the above-mentioned problems, the present invention provides an infrared reflecting objective means for moving a prism up and down with respect to a sample surface, and interlocking with the up and down movement of the prism. It is characterized by comprising a mirror for changing the angle of the infrared light incident on the prism and the angle of the infrared light receiving mirror from the prism, and making the angle of incidence of the infrared light on the prism variable. Alternatively, an infrared reflecting objective mirror is fixed at a lower end with a prism for adhering the sample, and a projection is provided at an intermediate portion so as to be movable up and down. A mirror inserted so as to be able to move up and down, a holding tool whose entire periphery is loosely fitted into a projection formed in the middle of the fixing bar, and one end pivotally attached to the holding tool so as to be rotatable; Are provided with a connecting rod through which a beam whose both ends are rotatably connected to the end of the mirror is inserted, and both ends which are connected to the ends of the beam at the fixed portion of the frame. Sliding fit into the groove and free the other end.
And a mirror slidably fitted in the other groove provided in the fixing portion of the drum.

【0006】[0006]

【作用】赤外線反射対物鏡を上記手段としたときの作用
について添付図の符号を用いて説明する。先ず、固定棒
1を回転させると、該固定棒1は上下方向に移動する。
そして該固定棒1に枢着させた連結棒7、7はその両端
部が回動しつつ揺動し、更に該連結棒7、7に挿通した
梁8の両端部に枢着したミラ−10の両端部はそれぞれ
溝12及び13を摺動する。このときプリズム3とミラ
−5とは相対的に離れたり近づいたりする。
The operation when the infrared reflecting objective is used as the above means will be described with reference to the reference numerals in the accompanying drawings. First, when the fixed bar 1 is rotated, the fixed bar 1 moves in the vertical direction.
The connecting rods 7, 7 pivotally attached to the fixed rod 1 swing at both ends while rotating, and furthermore, a mirror 10 pivotally attached to both ends of the beam 8 inserted through the connecting rods 7, 7. Slide in grooves 12 and 13, respectively. At this time, the prism 3 and the mirror 5 are relatively separated or approach.

【0007】前記ミラ−5に入射した赤外線は、ミラ−
11で反射してプリズム3に入射する。該プリズム3か
らの反射光はミラ−10及び5で反射し検出器に到達す
る。ミラ−10及び11は、プリズム3を固定した固定
棒1を回転させると、その両端部がそれぞれ溝12及び
13に沿って摺動して移動する。即ち、固定棒1(保持
具6)とミラ−10及び11に連結した連結棒7、7が
ミラ−10及び11を押したり、引いたりする。そして
図4に示すように、ミラ−10及び11は二点鎖線で示
すように移動し、プリズム3も二点鎖線で示すように移
動する。このようにしてプリズム3への入射光をθから
θ' に変えることが出来る。従ってプリズム3に密着さ
せた試料にもぐり込む赤外線の深さを変えることができ
る。
The infrared light incident on the mirror 5 is a mirror.
The light is reflected by 11 and enters the prism 3. The reflected light from the prism 3 is reflected by the mirrors 10 and 5 and reaches the detector. When the fixing rod 1 on which the prism 3 is fixed is rotated, both ends of the mirrors 10 and 11 slide and move along the grooves 12 and 13, respectively. That is, the connecting rods 7 connected to the fixing rod 1 (holding tool 6) and the mirrors 10 and 11 push and pull the mirrors 10 and 11, respectively. Then, as shown in FIG. 4, the mirrors 10 and 11 move as shown by the two-dot chain line, and the prism 3 also moves as shown by the two-dot chain line. Thus, the light incident on the prism 3 can be changed from θ to θ ′. Therefore, it is possible to change the depth of infrared rays penetrating into the sample adhered to the prism 3.

【0008】[0008]

【実施例】以下、この発明の具体的実施例について図面
を参照しながら説明する。図1はこの発明の赤外線反射
対物鏡のリンク機構の構成を示す図であり、図2は図1
のQ矢視図である。赤外線反射対物鏡の中央には固定棒
1が配置され、該固定棒1の下端部には試料を密着させ
るプリズム3が保持具2により固定されて取り付けら
れ、上端部は雄ねじ1aが設けられてフレ−ム4の固定
部の一部に設けた雌ねじに螺合させてある。また該固定
棒1は中間部をフレ−ム4等の固定部に設置されたミラ
−5の中央部を挿通させてある。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration of a link mechanism of the infrared reflecting objective mirror of the present invention, and FIG.
FIG. A fixing rod 1 is arranged at the center of the infrared reflecting objective mirror, and a prism 3 for adhering the sample is fixed and attached to a lower end of the fixing rod 1 by a holder 2, and an upper end is provided with a male screw 1a. The frame 4 is screwed into a female screw provided on a part of the fixing portion. The fixing rod 1 has an intermediate portion inserted through a central portion of a mirror 5 installed on a fixing portion such as the frame 4 or the like.

【0009】前記固定棒1の中間より少し上部には該固
定棒1の一部に突起部1bが形成されているが、該突起
部1bは周囲全体を保持具6にゆるく嵌め込んである。
図3にその拡大図を示す。よって該固定棒1は回転させ
ることにより該保持具6と共に上下に移動させることが
出来る。7は連結棒であって、一方の端部は前記固定棒
1に嵌め込んだ保持具6に回動自在に枢着されている。
A projection 1b is formed at a part of the fixing bar 1 slightly above the middle of the fixing bar 1, and the entire periphery of the projection 1b is loosely fitted into the holder 6.
FIG. 3 shows an enlarged view thereof. Therefore, the fixing bar 1 can be moved up and down together with the holder 6 by rotating. Reference numeral 7 denotes a connecting rod, one end of which is rotatably mounted on a holder 6 fitted in the fixing rod 1.

【0010】また、前記連結棒7の他端部には、図2に
示すように、長い梁8が挿通してあり、且つ該梁8の両
端部は少し折り曲げてミラ−10(もう一方のミラ−1
1は固定棒1に対してミラ−10と対称に設けられてい
るため該ミラ−10で説明する)に設けた突起棒10a
と回動自在に枢着してある。また、該ミラ−10の突起
棒10aにはころ9を設けてフレ−ム等の固定部に設け
た溝12内を滑らかに摺動可能に嵌め入れてある。更
に、該ミラ−10の他端部はころを介して図示しないこ
ろ等によりフレ−ム等の固定部に設けたもう一方の溝1
3内を摺動可能にしてある。
As shown in FIG. 2, a long beam 8 is inserted into the other end of the connecting rod 7, and both ends of the beam 8 are slightly bent to form a mirror 10 (the other end). Mira-1
1 is provided symmetrically with respect to the mirror 10 with respect to the fixed rod 1 and will be described with reference to the mirror 10).
And pivotably attached. A roller 9 is provided on the projection bar 10a of the mirror 10 so as to be smoothly slidably fitted in a groove 12 provided in a fixed portion such as a frame. Further, the other end of the mirror 10 is provided with another groove 1 provided in a fixed portion such as a frame by a roller (not shown) through a roller.
3 is slidable.

【0011】この発明の赤外線反射対物鏡のリンク機構
は以上のような構成からなり、固定棒1を回転させる
と、該固定棒1は雄ねじ部1aをフレ−ム4の雌ねじと
螺合させてあるので、上下方向に移動する。そして該固
定棒1(保持具6)に枢着させた連結棒7、7はその両
端部が回動しつつ揺動し、更に該連結棒7、7に枢着し
た梁8の両端部に枢着したミラ−10、11の両端部は
それぞれ溝12及び13を摺動する。また、このときプ
リズム3とミラ−5とは相対的に離れたり近づいたりす
る。
The link mechanism of the infrared reflecting objective mirror according to the present invention has the above-described structure. When the fixing rod 1 is rotated, the fixing rod 1 engages the male screw portion 1a with the female screw of the frame 4. So move up and down. The connecting rods 7, 7 pivotally attached to the fixing rod 1 (holding tool 6) swing while their both ends rotate, and furthermore, the both ends of the beam 8 pivotally attached to the connecting rods 7, 7 Both ends of the pivoted mirrors 10, 11 slide in grooves 12 and 13, respectively. Further, at this time, the prism 3 and the mirror 5 are relatively separated or approached.

【0012】前記固定棒1を回転させ上下運動させるこ
とにより赤外線は次のようにしてプリズム3に入射し且
つ反射させることが出来る。即ち、図1及び図4に示す
ように、赤外線はミラ−5及び11で反射し、プリズム
3に入射する。該プリズム3からの反射光はミラ−10
及び5で反射し検出器(図示省略)に到達する。ミラ−
10及び11は、プリズム3を固定した固定棒1を回転
させると上下に移動する。即ち、該固定棒1(保持具
6)とミラ−10及び11に連結した連結棒7、7がミ
ラ−10及び11を押したり、引いたりする。このリン
ク機構の動作によりミラ−10及び11は図4の二点鎖
線で示すように移動し、プリズム3も二点鎖線で示すよ
うに移動する。このようにしてプリズム3への入射光を
θからθ' に変えることが出来る。従ってプリズム3に
密着させた試料にもぐり込む赤外線の深さを変えること
ができる。
By rotating the fixed rod 1 and moving it up and down, infrared rays can be made incident on the prism 3 and reflected by the prism 3 as follows. That is, as shown in FIGS. 1 and 4, the infrared rays are reflected by the mirrors 5 and 11 and enter the prism 3. The reflected light from the prism 3 is Mira-10
Then, the light is reflected by the light source 5 and reaches a detector (not shown). Mira
10 and 11 move up and down when the fixed rod 1 to which the prism 3 is fixed is rotated. That is, the connecting rods 7 connected to the fixing rod 1 (holding tool 6) and the mirrors 10 and 11 push and pull the mirrors 10 and 11, respectively. By the operation of this link mechanism, the mirrors 10 and 11 move as shown by the two-dot chain line in FIG. 4, and the prism 3 also moves as shown by the two-dot chain line. Thus, the light incident on the prism 3 can be changed from θ to θ ′. Therefore, it is possible to change the depth of infrared rays penetrating into the sample adhered to the prism 3.

【0013】[0013]

【発明の効果】以上詳述したようにこの発明の赤外線反
射対物鏡によれば、プリズムへ入射させる赤外線の入射
角度を種々変更させることができるのでプリズムから試
料への赤外線のもぐり込む深さを変えることができる。
従って試料の表面から内部方向への深さの異なる部分の
赤外線情報、例えばポリマ−の劣化度が表面から内部方
向へ向かって変化している場合のような赤外線情報を得
ることが出来る。
As described above in detail, according to the infrared reflecting objective mirror of the present invention, the incident angle of the infrared ray to be incident on the prism can be changed in various ways, so that the depth at which the infrared ray penetrates the sample from the prism is changed. be able to.
Therefore, it is possible to obtain infrared information at portions having different depths from the surface of the sample toward the inside, for example, when the degree of deterioration of the polymer changes from the surface toward the inside.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の赤外線反射対物鏡のリンク機構の構
成を示す図である。
FIG. 1 is a diagram showing a configuration of a link mechanism of an infrared reflecting objective mirror of the present invention.

【図2】図1のQ矢視図である。FIG. 2 is a view taken in the direction of the arrow Q in FIG. 1;

【図3】固定棒と保持具と連結棒との連結状態を示す一
部拡大図である。
FIG. 3 is a partially enlarged view showing a connection state of a fixing rod, a holder, and a connection rod.

【図4】この発明の赤外線反射対物鏡のリンク機構にお
いて固定棒を上下させる場合のミラ−の動作を示す図で
ある。
FIG. 4 is a view showing the operation of a mirror when the fixing rod is moved up and down in the link mechanism of the infrared reflecting objective mirror of the present invention.

【図5】従来の赤外線反射対物鏡の構成概要を示す図で
ある。
FIG. 5 is a diagram showing a schematic configuration of a conventional infrared reflecting objective mirror.

【符号の説明】[Explanation of symbols]

1 固定棒 3 プリズム 4 フレ−ム 5 ミラ− 6 保持具 7 連結棒 8 梁 10、11 ミラ− 12、13 溝 DESCRIPTION OF SYMBOLS 1 Fixing rod 3 Prism 4 Frame 5 Mirror 6 Holder 7 Connecting rod 8 Beam 10, 11 Mirror 12, 13 Groove

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G01N 21/00 - 21/01 G01N 21/17 - 21/61 G02B 7/198 G02B 26/08 ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. 6 , DB name) G01N 21/00-21/01 G01N 21/17-21/61 G02B 7/198 G02B 26/08

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 試料面に対しプリズムを上下動させる手
段と、このプリズムの上下動と連動してプリズムへの赤
外光入射用鏡とプリズムからの赤外光受光鏡の角度を変
化させる手段とを備え、プリズムへの赤外光の入射角を
可変としたことを特徴とする赤外線反射対物鏡。
1. A means for moving a prism up and down with respect to a sample surface, and a means for changing an angle between a mirror for incident infrared light on the prism and an infrared light receiving mirror from the prism in conjunction with the vertical movement of the prism. And a variable angle of incidence of infrared light to the prism.
【請求項2】 下端部に試料を密着させるプリズムを固
定して取り付け中間部に突起部を設け上下移動可能とし
た固定棒と、 フレ−ムの固定部に設置され前記固定棒を上下移動可能
に挿通したミラ−と、 前記固定棒の途中に形成された突起部に周囲全体を緩く
嵌め込んだ保持具と、 一方の端部は前記保持具に回動自在に枢着され他方の端
部は両端部をミラ−の端部に回動自在に枢着した梁を挿
通した連結棒と、 前記梁の端部に枢着された両端部をフレ−ムの固定部に
設けた溝に摺動可能に嵌め入れ更にもう一方の両端部を
フレ−ムの固定部に設けたもう一方の溝に摺動可能に嵌
め入れたミラ−と、 より成る赤外線反射対物鏡。
2. A fixed rod which is fixed to a lower end of the prism and which is attached to the sample and which can be vertically moved by providing a projection at an intermediate part; and a fixed rod which is mounted on a fixed part of the frame and which can be vertically moved. A holder which is loosely fitted around the entire periphery into a projection formed in the middle of the fixing rod; one end is pivotally attached to the holder and is rotatably connected to the other end. Is a connecting rod through which a beam whose both ends are pivotally connected to the end of a mirror is inserted, and both ends which are pivotally connected to the ends of said beam are slid into grooves provided in a fixed portion of the frame. An infrared reflecting objective mirror comprising: a mirror movably inserted; and a mirror slidably inserted at the other end into the other groove provided in the frame fixing portion.
JP29895994A 1994-11-07 1994-11-07 Infrared reflective objective Expired - Lifetime JP2885100B2 (en)

Priority Applications (1)

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JPH08136449A JPH08136449A (en) 1996-05-31
JP2885100B2 true JP2885100B2 (en) 1999-04-19

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JP2002286637A (en) * 2001-03-27 2002-10-03 Matsushita Electric Ind Co Ltd Plastic discriminating device
WO2003038412A1 (en) * 2001-10-29 2003-05-08 Matsushita Eco Technology Center Co., Ltd. Device and method for identifying plastic
MXPA03009519A (en) 2001-11-28 2004-12-06 Matsushita Eco Technology Ct C Plastic identifying method.
US6862814B2 (en) 2002-12-20 2005-03-08 The Boeing Company High speed linear displacement measurement
CN103018175B (en) * 2012-11-30 2014-10-15 中国科学院上海技术物理研究所 Auxiliary device for accurately calibrating light beams of spectrum equipment

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