JP2802954B2 - Test method for a sensor having a force acting body and a sensor capable of implementing the method - Google Patents

Description

Description: FIELD OF THE INVENTION The present invention relates to a test method for a sensor having a force acting body and a sensor capable of performing the method, and particularly to an acceleration sensor, a magnetic sensor, or a force sensor. It relates to product testing that can be performed without actually applying acceleration, magnetic force, or force.

[Conventional technology]

In recent years, a force sensor has been proposed in which a resistance element having the property of a piezoresistive effect in which electric resistance changes due to mechanical deformation is arranged on a semiconductor substrate, and a force is detected from a change in the resistance value of the resistance element. I have. Further, an acceleration sensor or a magnetic sensor using the force sensor has been proposed. In each device, a flexure element having flexibility is used partially, and mechanical deformation occurring in the flexure element is detected as a change in the electric resistance of the resistance element. An action body is provided for applying a force to the strain body. If a weight that responds to acceleration is used as this acting body, it becomes an acceleration sensor, and if a magnetic substance that responds to magnetism is used, it becomes a magnetic sensor. For example, WO 88/08522, which is an international application based on the Patent Cooperation Treaty, discloses a force / acceleration / magnetism sensor using a resistive element according to the invention of the same person as the present inventor. A new method of manufacturing such a sensor is disclosed in Japanese Patent Application No. 3-2535.

[Problems to be solved by the invention]

In order to mass produce and market a sensor having such a force acting body, it is necessary to conduct a test at the end of the manufacturing process. Testing for force sensors is relatively easy. That is, a force of a predetermined magnitude is applied to the force detector in a predetermined direction, and the detection output at this time may be checked. However, tests on acceleration sensors and magnetic sensors are more complicated. Since the sensor body is sealed, it is necessary to check the detection output while actually applying acceleration or magnetism from the outside. In particular, in the case of acceleration sensors, at present, tests are performed by applying vibration to the sensor body using a vibration generator, which requires a large-scale test device and only tests for dynamic acceleration called vibration. There is also a problem that can not be.

Therefore, the present invention provides a test method that can more easily perform a test on a sensor having a force acting body such as an acceleration sensor or a magnetic sensor, and has a function of immediately executing the test method. It is intended to provide a sensor.

[Means for solving the problem]

(1) The first invention of the present application is directed to an operation portion which receives an action of a force,
A flexure element having a fixed portion fixed to the sensor body, and a flexible portion formed between them, and a flexible body formed between them; an operating body for transmitting the applied force to the operating portion; Mechanical deformation that occurs in the strain body due to the applied force,
Detecting means for detecting the force acting on the acting body as an electric signal by converting the electric signal into an electric signal.A method for testing a sensor comprising the steps of: A first surface and a second surface are defined, an electrically single electrode layer is formed on the first surface, and a plurality of electrically independent electrode layers are formed at a plurality of locations on the second surface. A voltage of a first polarity is applied to the electrode layer on the first surface;
A voltage of a first polarity or a voltage of a second polarity opposite thereto is selectively applied to each electrode layer on the second surface for each electrode layer. A Coulomb force consisting of a repulsive force or an attractive force is applied between the electrode layer and the electrode layer on the second surface, and a sensor test is performed based on the applied Coulomb force and a detection result by the detection means. is there.

(2) The second invention of the present application is the testing method of the sensor according to the first invention, wherein a resistance element having a property that a resistance value changes due to mechanical deformation generated in the flexure element is provided as detection means. With the sensor as a test object, the test is performed based on a change in the resistance value of the resistance element when Coulomb force is applied between the electrode layer on the first surface and the electrode layer on the second surface. It was done.

(3) The third invention of the present application is directed to an acceleration sensor, comprising: an operating portion that receives a force action, a fixing portion fixed to the sensor main body, and a flexible portion formed therebetween. And the force exerted by the acceleration applied to the sensor body,
A weight body for transmitting the applied force to the acting portion to cause mechanical deformation of the flexure element, and a resistance element having a property in which a resistance value changes due to mechanical deformation generated in the flexure element, A first electrode layer formed on a first surface that is displaced by the action of acceleration, a second electrode layer formed on a second surface opposed to the first surface, a resistance element, A wiring means for connecting the electrode layer and the second electrode layer to an external electric circuit, and applying a predetermined voltage to the first electrode layer and the second electrode layer, and By applying Coulomb force, it is configured to be able to cause mechanical deformation of the flexure element even when acceleration is not acting,
Further, of the first electrode layer and the second electrode layer, one electrode layer is formed by an electrically single electrode layer, and the other electrode layer is formed by a plurality of electrically independent sub-electrode layers. By selecting the polarity of the voltage applied to each sub-electrode layer, the mechanical deformation generated in the strain body can be given a direction.

(4) A fourth aspect of the present invention is a magnetic sensor, comprising: an operating portion which receives a force, a fixing portion fixed to the sensor main body, and a flexible portion formed therebetween. Under the action of force by the flexure element and the magnetic field where the sensor body is placed,
A magnetic body for transmitting the applied force to the acting portion to cause mechanical deformation of the strain body, a resistance element having a property that a resistance value changes due to the mechanical deformation generated in the strain body, and a magnetic force. A first electrode layer formed on a first surface that is displaced by the action of the first electrode, a second electrode layer formed on a second surface opposite to the first surface, a resistance element, and a first electrode Wiring means for connecting the first electrode layer and the second electrode layer to an external electric circuit, and applying a predetermined voltage to the first electrode layer and the second electrode layer to provide a coulomb between the two electrode layers. By applying a force, a mechanical deformation can be generated in the strain body even in a state where no magnetic force is applied, and the first electrode layer and the second electrode layer can be mechanically deformed. Of these, one electrode layer is composed of an electrically single electrode layer and the other electrode layer is electrically isolated. Composed of a plurality of sub-electrode layers is, by selecting the polarity of the voltage applied to each sub-electrode layer is obtained by so be imparted a directional mechanical deformation occurring in the strain generating body.

(5) The fifth invention of the present application is the sensor according to the third or fourth invention, wherein the other electrode layer is constituted by two electrically independent sub-electrode layers, and the voltage is applied to each sub-electrode layer. By selecting the polarity of the applied voltage, mechanical deformation in the line direction connecting the centers of the two sub-electrode layers and mechanical deformation in the direction perpendicular to the layer surfaces of the two sub-electrode layers are caused. This is to cause a distorted body.

(6) The sixth invention of the present application is the sensor according to the third or fourth invention, wherein the other electrode layer is constituted by four electrically independent sub-electrode layers, and these sub-electrode layers are By arranging at each end point position of two orthogonal line segments and selecting the polarity of the voltage applied to each sub-electrode layer, mechanical deformation in the first line segment direction of the two line segments and the second Mechanical deformation in the direction of the line segment and mechanical deformation in the direction perpendicular to the layer surfaces of the four sub-electrode layers are caused to occur in the strain body.

(Operation)

(1) According to the first aspect of the present invention, Coulomb force acts between the first portion and the second portion. Due to this Coulomb force, the first portion is displaced with respect to the second portion, and mechanical deformation is induced in the flexure element. Therefore, the same state as when an external force is applied to the action body can be created, and the sensor can be tested without actually applying the external force. Moreover, since one electrode layer is a single electrode layer and the other electrode layer is a plurality of sub-electrode layers, the Coulomb force can act as both a repulsive force and an attractive force by selecting the polarity of the applied voltage. It is possible to perform tests in which Coulomb force is applied in various directions.

(2) According to the second invention of the present application, since the resistance element having the property of changing the resistance value due to mechanical deformation is applied to the sensor provided as the detection means, the resistance when the Coulomb force is applied between the two electrode layers is obtained. A test can be performed by detecting a change in the resistance value of the resistance element.

(3) According to the third invention of the present application, in the acceleration sensor,
Each electrode layer for performing the test according to the first invention is formed, and wiring is performed on the electrode layer. Therefore, by selecting the polarity of the electrode to be applied, it is possible to perform tests in which Coulomb force is applied in various directions.

(4) According to the fourth invention of the present application, each electrode layer for performing the test according to the first invention is formed in the magnetic sensor, and wiring is performed for the electrode layer. Therefore,
By selecting the polarity of the electrode to be applied, it becomes possible to perform tests in which Coulomb force is applied in various directions.

(5) According to the fifth invention of the present application, in the sensor according to the third or fourth invention described above, since two sub-electrode layers are provided, Coulomb force is applied in two directions perpendicular to each other. You will be able to perform tests.

(6) According to the sixth aspect of the present invention, in the sensor according to the third or fourth aspect, since four sub-electrode layers are provided in a cross shape, the Coulomb force is increased in three directions perpendicular to each other. The applied test can be performed.

〔Example〕

 Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

First, the structure of a sensor having a force acting object that is an object of the present invention will be briefly described. FIG. 1 is a structural sectional view showing an example of an acceleration sensor. The semiconductor pellet 10 is the central unit of this sensor. A top view of the semiconductor pellet 10 is shown in FIG. The cross section of the semiconductor pellet 10 shown in the center of FIG. 1 corresponds to a cross section of FIG. 2 cut along the X axis. This semiconductor pellet
10 is an action part 11, a flexible part in order from the inside to the outside.
12, divided into three areas of the fixing part 13. As shown by a broken line in FIG. 2, a groove is formed in the lower surface of the flexible portion 12 in an annular shape. Due to this groove, the flexible portion 12 becomes thinner and has flexibility. Therefore, when a force is applied to the action section 11 while the fixing section 13 is fixed, the flexible section 12 bends and mechanical deformation occurs. Thus, the semiconductor pellet 10 has a function as a strain generator. As shown in FIG. 2, on the upper surface of the flexible portion 12, the resistance elements Rx1 to Rx4, Ry1 to Ry4,
Rz1 to Rz4 are formed in a predetermined direction.

As shown in FIG. 1, a weight body 20 is joined below the action section 11, and pedestals 21 and 22 are connected below the fixing section 13. Although not shown in FIG. 1, pedestals 23 and 24 are further arranged in a direction perpendicular to the paper surface, and pedestals 21a to 24a are arranged in an oblique direction. This situation is clearly shown in FIG. 3, which shows the upper surface of only the weight body 20 and the pedestals 21 to 24 and 21a to 24a. The cross section shown in FIG.
FIG. 3 corresponds to a cross section cut along the cutting line AA. The pedestal is arranged as shown in FIG. 3 because the manufacturing process disclosed in the specification of Japanese Patent Application No. 3-2535 has been carried out. .
A control member 30 is connected below the pedestals 21 to 24.
The upper surface of the control member 30 is shown in FIG. On the upper surface of the control member 30, a rectangular groove 31 (a hatched portion in FIG. 4)
Are formed. The cross section shown in FIG.
The figure corresponds to a cross section cut along the cutting line BB. Also,
The control member 40 covers the upper surface of the semiconductor pellet 10. The lower surface of the control member 40 is shown in FIG. Control member 40
A rectangular groove 41 (a portion to be hatched in FIG. 5) is formed on the lower surface of. The cross section shown in FIG.
FIG. 5 corresponds to a cross section cut along the cutting line CC.

The bottom surface of the control member 30 is joined to the inner bottom surface of the package 50, and the semiconductor pellet 10 and the weight body 20 are
Supported by 24 and 21a-24a. The weight body 20 is in a suspended state inside. The package 50 has a lid 51
Is covered. The bonding pad 14 provided on the semiconductor pellet 10 is electrically connected to each resistance element in the pellet, and the bonding pad 14 and the lead 52 provided on the side of the package are connected by a bonding wire 15. It is connected.

When acceleration is applied to this sensor, an external force acts on the weight body 20. This external force is transmitted to the action portion 11, and the flexible portion 12 undergoes mechanical deformation. As a result, a change occurs in the electric resistance of the resistance element, and this change can be taken out through the bonding wire 15 and the lead 52 to the outside. The X-direction component of the force applied to the acting part 11 is the resistance element Rx1
~ Rx4, the resistance in the Y-direction
The Z-direction component is detected by the change in the electric resistance of y1 to Ry4, and the change in the electric resistance of the resistance elements Rz1 to Rz4. Since this detection method is not the gist of the present invention, the description is omitted here. For details, refer to International Publication No. WO88 / 08522, which is an international application based on the Patent Cooperation Treaty.

When used as an acceleration sensor, an excessive external force acts on the weight body 20 when a large acceleration is applied.
As a result, large mechanical deformation occurs in the flexible portion 12, and the semiconductor pellet 10 may be damaged. In order to prevent such damage, the sensor shown in FIG.
Forty are provided. The control member 30 controls the downward displacement of the weight body 20 so as not to exceed an allowable value,
The control member 40 controls the upward displacement of the weight body 20 (actually, the action portion 11) so as not to exceed an allowable value.
Further, the pedestals 21 to 24 play a role of controlling the lateral displacement of the weight body so as not to exceed an allowable value. Even if an excessive external force acts on the weight body 20 and attempts to move beyond the above-mentioned allowable value, the weight body 20 collides with these members and the movement thereof is hindered. As a result, the semiconductor pellet 10 is protected from damage without being subjected to mechanical deformation exceeding the allowable value.

Principle of the test method according to the present invention A method for mass-producing the acceleration sensor as described above is disclosed in Japanese Patent Application No. Hei 3-2535, but before shipping the product as a product, It is necessary to carry out a test to check if the function as a function is not hindered. As a test method, it is possible to perform a test by applying a vibration to the acceleration sensor by a vibration generating device and inspecting an output from the sensor at that time, but as described above, the test device becomes large-scale, Only dynamic characteristics can be obtained. In particular, since this sensor can detect acceleration in all directions of XYZ in the three-dimensional coordinate system, it is necessary to give vibration in consideration of the three-dimensional direction, and the test equipment becomes considerably complicated. Would.

With the test method according to the invention, the sensor can be placed in the same environment in which the acceleration acted without actually applying the acceleration. The basic principle is as follows. First, several electrode layers are formed at predetermined positions inside the sensor. This electrode layer may be any layer as long as it is a layer made of a conductive material. actually,
A metal such as aluminum may be thinly formed at a predetermined location by vapor deposition or sputtering.
Note that the upper surface of aluminum is made of SiO ₂ for surface protection.
It is preferable to cover with a film or a SiN film. The electrode layer is formed in each of the following parts. First, as shown in FIG. 4, the electrode layer E1 is provided in the groove 31 provided with the control member 30, and as shown in FIG. 5, the electrode layer E2 is provided in the groove 41 provided in the control member 40.
Are formed respectively. Further, as shown in FIG. 6, an electrode layer E3 is formed on all side surfaces and the bottom surface of the weight body 20 (one electrode layer formed over five surfaces but electrically conductive). Are formed, and electrode layers E4 to E7 are formed on the respective inner surfaces of the pedestals 21 to 24. On the upper surface of the semiconductor pellet 10, an electrode layer E8 is formed so as to avoid the resistance element R as shown in FIG. Thus, in FIGS. 4 to 7, an electrode layer is formed in each of the hatched regions. Then
A cross-sectional view of the central part of the sensor in the package is as shown in FIG. 8 (in the following figures, hatched portions indicate electrode layers, and hatching indicating a cross-section is omitted because the figure is complicated). Do). According to FIG. 8, each electrode layer E1
You can understand the relative positional relationship of ~ E8. Note that the dashed lines in FIG. 8 indicate wiring for each electrode layer. Such wiring can be further connected to a lead 52 (see FIG. 1) outside the package by a bonding wire. In addition, the electrode layer E3 formed on the surface of the weight body 20 is wired by a bonding wire 25.

The feature of each of the electrode layers E1 to E8 thus formed is that they are formed at positions facing each other for each pair of electrode layers. That is, as shown in FIG. 8, E2: E8, E2
3: E4, E3: E5, E3: E6, E3: E7, E3: E1 are formed at positions facing each other (the electrode layer E3 has five surfaces facing different electrode layers). . When a voltage is applied to each of the opposing electrode layers, a Coulomb force acts between them. That is, a repulsive force acts when voltages of the same polarity are applied between the two, and an attractive force acts when voltages of different polarities are applied. So, repulsive force between E3: E4, attractive force between E3: E5,
Assuming that a voltage is applied such that a force acts on the weight 20, the same phenomenon as when a force in the + X direction acts on the weight body 20 occurs. In other words, the sensor can be placed in the same environment in which the acceleration in the -X direction is acting on the sensor body (when the acceleration acts on the sensor body, the weight body has the opposite direction). Inertia force acts). In this environment, if it is determined whether or not the output indicating the change in the resistance value of the resistance element indicates that the acceleration in the −X direction has been detected, a test relating to the acceleration in the −X direction can be performed. If the attractive force and the repulsive force are made to act in reverse, a test on the acceleration in the + X direction can be performed. In the same way, if a voltage is applied so that an attractive force acts between E3 and E6 and a repulsive force acts between E3 and E7, a test on acceleration in the -Y direction (upward perpendicular to the plane of FIG. 8) is performed. And if the attractive force and the repulsive force act in reverse, + Y
A test can be performed on the acceleration in the direction (downward perpendicular to the plane of FIG. 8). Furthermore, if a voltage is applied such that an attractive force acts between E2 and E8 and a repulsive force acts between E3 and E1, a test relating to acceleration in the −Z direction can be performed.If the attractive force and the repulsive force are applied in reverse, A test on acceleration in the -Z direction can be performed. As described above, each of the electrode layers and each of the resistance elements for acceleration detection are both electrically connected to the leads 52 (see FIG. 1) outside the package by bonding wires. It is only necessary to monitor the acceleration detection signal output from the predetermined lead terminal while applying a predetermined voltage to the predetermined lead terminal. As described above, according to the test method of the present invention, it is possible to very easily perform acceleration detection tests in all three-dimensional directions.

More Practical Embodiment The embodiment shown in FIG. 8 is not very practical because the electrode layers need to be formed at a considerable number of places. If possible, the electrode layers provided in the minimum necessary places
Preferably, an acceleration detection test is performed in all dimensions. Therefore, consider the following model. FIG. 9 is a sectional view of a central portion of the acceleration sensor. Now
Points P1 and P2 are set at two places on the semiconductor pellet 10, and points Q1 and Q2 are set at two places inside the control member 40. Point P1 and
Q1 faces, and points P2 and Q2 face. Where point P1: Q
When an attractive force is applied between 1 and a repulsive force is applied between points P2 and Q2, the points P1 and P2 are displaced with respect to the points Q1 and Q2, and the semiconductor pellet 10 undergoes mechanical deformation as shown in FIG. Occurs. This state is the same state as when the force Fx in the + X direction acts on the weight body 20. In other words, this is the same state as when the acceleration in the −X direction acts on the sensor body. If the attractive force and the repulsive force are applied in reverse, the state becomes the same as the state where the acceleration in the + X direction is applied. Thus, it can be seen that the acceleration detection test in the ± X direction can be performed if the electrode layers are formed at the predetermined location on the upper surface of the semiconductor pellet 10 and the predetermined location on the lower surface of the control member 40. In the acceleration detection test in the ± Y direction,
You can do the same with a 90 ゜ change. Next, point P1: Q1
When a repulsive force is applied between the points P2 and Q2, as shown in FIG. 11, a force -Fz
Will be in the same state as when. In other words, the state is the same as when the acceleration in the + Z direction acts on the sensor body.
Further, if an attractive force acts on both, the state becomes the same as the state where the acceleration in the + Z direction acts. Thus, it can be understood that the acceleration detection test in the ± Z direction can be performed if the electrode layer is formed at a predetermined position on the upper surface of the semiconductor pellet 10 and a predetermined position on the lower surface of the control member 40.

As described above, after all, if an electrode layer is formed on a predetermined location on the upper surface of the semiconductor pellet 10 and a predetermined location on the lower surface of the control member 40, acceleration detection tests in all three-dimensional directions can be performed. Is possible. A more specific example of the electrode layer arrangement will be described below. First, the semiconductor pellet
On the upper surface of 10, four electrode layers E9 to E12 are formed as shown by hatching in FIG. Each electrode layer is formed so as to avoid the formation region of the resistance element R, and is connected to bonding pads B9 to B12 by wiring layers W9 to W12, respectively. Bonding pad B9 ~ B
A bonding wire (not shown) is connected to 12, and an electrical connection is finally made to a lead outside the package. Although not shown in FIG. 12, each resistance element R is also connected to each bonding pad 14 and is electrically connected to a lead outside the package. A wiring layer made of aluminum or the like is formed on the semiconductor pellet 10 for wiring to the resistance element R. To form the electrode layers E9 to E12 and the wiring layers W9 to W12, the aluminum It is preferable to use the same mask as the wiring layer. In this case, the additional electrode layers E9 to E9 to
E12 and wiring layers W9 to W12 can be formed. Of course, the wiring layers W9 to W12 may be formed as diffusion layers using a diffusion process for forming a gauge resistor or the like. The manufacturing process of the semiconductor pellet 10 may be exactly the same as the conventional process. On the other hand, an electrode layer shown in FIG.
What is necessary is just to form E2. This can be achieved by depositing aluminum or the like on the surface by vapor deposition or sputtering. FIG. 13 is a cross-sectional view when the above-described electrode layers are formed. The electrode layer E2 is wired as shown by a broken line in the figure, and further connected to an external lead.
Thus, a single electrode layer E2 is formed as one electrode layer, and four sub-electrode layers are formed as the other electrode layer opposed thereto.
This means that E9 to E12 were formed.

In order to perform a test on such an acceleration sensor, a voltage of + V is applied to the electrode layer E2, and an acceleration detection test in all three-dimensional directions can be performed as follows.

(1) If + V is applied to E10 and -V is applied to E12, a force + Fx can be applied to the weight 20, and an acceleration detection test in the -X direction can be performed.

(2) When -V is applied to E10 and + V is applied to E12, a force -Fx can be applied to the weight body 20, and an acceleration detection test in the + X direction can be performed.

(3) If + V is applied to E11 and -V is applied to E9, a force + Fy can be applied to the weight 20, and an acceleration detection test in the -Y direction can be performed.

(4) If -V is applied to E11 and + V is applied to E9, a force -Fy can be applied to the weight 20, and an acceleration detection test in the + Y direction can be performed.

(5) If -V is applied to all of E9 to E12, the weight 20
And a force + Fz can be applied to the acceleration sensor to perform an acceleration detection test in the −Z direction.

(6) If + V is applied to all of E9 to E12, the weight 20
, A force-Fz can be applied to the acceleration sensor, and a Z-direction acceleration detection test can be performed.

The acceleration detection test on the X, Y, and Z axes has been described above.
A detection test can be performed by applying a predetermined voltage according to 9 to E12.

Note that the applied voltages + V and -V are set to voltage values that can sufficiently detect a change in the resistance value of the resistance element R. This value depends on the thickness and the diameter of the flexible portion 12 forming the annular diaphragm.

Other Embodiments The embodiments described above are one embodiment of the present invention, and various other embodiments are also conceivable. Some of them are described below. In the embodiment whose cross section is shown in FIG. 14, an electrode layer E13 is formed instead of the electrode layer E2 of the above-described embodiment.
Since the electrode layer E13 is formed on the upper surface of the control member 40,
External wiring becomes easy. However, the Coulomb force acting between the electrodes is slightly weaker than in the above embodiment.

The embodiment shown in FIG. 15 is the same as the electrode layers E9 to E1 of the above-described embodiment.
In place of 2, electrode layers E14 to E17 are formed, and wiring layers W14 to W17 and bonding pads B14 to B17 corresponding thereto are formed. Such an arrangement has the advantage that it does not hinder the wiring to the resistance element R, but the electrode layer is arranged inside the most flexible position of the semiconductor pellet, Since the area is reduced, the efficiency of the force is reduced.

The embodiment shown in FIGS. 16 and 17 is obtained by reversing the upper and lower relations of the electrode layers of the embodiments described above. That is, four electrode layers E18 to E21 and their wiring layers W18 to W21 are formed in the groove 41 on the lower surface of the control member 40. The opposing electrode may be, for example, a single electrode E8 formed on the semiconductor pellet 10 as shown in FIG.

Various other embodiments are also conceivable. In short, according to the present invention, what kind of Coulomb force can be applied between a first portion that is displaced by the action of a force and a second portion located at a position facing the first portion. A configuration may be adopted.

The above embodiments are all directed to the acceleration sensor. However, the present invention can be applied to a magnetic sensor using a magnetic body instead of a weight body, or to a force sensor in the same manner. Is possible. Furthermore, 3
The present invention is applicable not only to a two-dimensional sensor but also to a two-dimensional or one-dimensional sensor. For example, in a two-dimensional sensor for detecting acceleration and magnetism in the X and Z axes and a one-dimensional sensor for detecting acceleration and magnetism in the X-axis direction, a twelfth sensor is used.
It is only necessary to provide two electrodes E10 and E12 among the four electrodes E9 to E12 shown in the figure.

〔The invention's effect〕

(1) According to the first invention of the present application, a Suuron force acts between the first portion and the second portion opposed thereto to induce mechanical deformation in the strain body, and to apply an external force to the action body. Since the same state as that of the above is created, the sensor can be tested without actually applying an external force. Moreover, since one electrode layer was a single electrode layer and the other electrode layer was a plurality of sub-electrode layers, tests were conducted in which Coulomb forces were applied in various directions by selecting the polarity of the applied voltage. Will be able to do it.

(2) According to the second invention of the present application, since the resistance element having the property of changing the resistance value due to mechanical deformation is applied to the sensor provided as the detection means, the resistance when the Coulomb force is applied between the two electrode layers is obtained. A test can be performed by detecting a change in the resistance value of the resistance element.

(3) According to the third invention of the present application, in the acceleration sensor,
Since each electrode layer for carrying out the test according to the above-described first invention was formed and wiring was applied thereto, the Coulomb force was applied in various directions by selecting the polarity of the electrode to be applied. Test can be performed.

(4) According to the fourth aspect of the present invention, each electrode layer for performing the test according to the first aspect of the present invention is formed in the magnetic sensor, and wiring is performed on the electrode layer. By selecting the polarity of, it becomes possible to perform tests in which Coulomb force is applied in various directions.

(5) According to the fifth invention of the present application, in the sensor according to the third or fourth invention described above, since two sub-electrode layers are provided, Coulomb force is applied in two directions perpendicular to each other. You will be able to perform tests.

(6) According to the sixth aspect of the present invention, in the sensor according to the third or fourth aspect described above, four sub-electrode layers are provided in a cross shape, so that Coulomb force acts in three mutually perpendicular directions. It will be possible to carry out the test.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of an acceleration sensor to be subjected to a test method according to the present invention, FIG. 2 is a top view of a semiconductor pellet which is a center of the sensor of FIG. 1, and FIG. 3 is a weight of the sensor of FIG. FIG. 4 is a top view of the lower control member of the sensor of FIG. 1, FIG. 5 is a bottom view of the upper control member of the sensor of FIG. 1, and FIG. 6 is a top view of the sensor of FIG. FIG. 7 is a perspective view showing a state where an electrode layer is formed on a weight body and a pedestal of the sensor, and FIG.
FIG. 8 is a top view showing a state in which an electrode layer is formed on a semiconductor pellet of the sensor shown in FIG. 8, FIG. FIG. 12 is a sectional view showing the state of displacement of the central portion of the sensor shown in FIG.
FIG. 13 is a top view showing a state where a practical electrode layer is formed on the semiconductor pellet of the sensor of FIG. 1, and FIG. 13 is a state where a practical electrode layer is formed at a predetermined portion of a central portion of the sensor of FIG. FIG. 14 is a cross-sectional view showing a state where an electrode layer according to another embodiment is formed at a predetermined portion of a central portion of the sensor of FIG. 1, and FIG. 15 is a semiconductor pellet of the sensor of FIG. A top view showing a state where an electrode layer according to still another embodiment is formed,
FIG. 16 is a bottom view showing a state in which an electrode layer according to another embodiment is formed on the upper control member of the sensor of FIG. 1, and FIG. 17 is another view at a predetermined position of the central portion of the sensor of FIG. It is sectional drawing which shows the state which formed the electrode layer which concerns on an Example. 10: semiconductor pellet, 11: working part, 12: flexible part,
13 ... fixed part, 14 ... bonding pad, 15 ... bonding wire, 20 ... weight, 21-24 ... pedestal, 25 ...
... bonding wire, 30 ... control member, 31 ... groove, 40
…… Control member, 41 …… Groove, 50 …… Package, 51 ……
Lid, 52 lead, R resistance element, E1 to E21 electrode layer, W9 to W21 wiring layer, B9 to B21 bonding pad.

Continuation of the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G01P 21/00 G01P 15/12 G01L 25/00 G01L 27/00

Claims (6)

(57) [Claims] 1. A strain-generating body having an action portion receiving a force, a fixing portion fixed to a sensor main body, and a flexible portion having flexibility formed therebetween. And an actuating body for transmitting the force to the acting portion, and converting the mechanical deformation generated in the flexure element by the transmitted force into an electric signal, thereby detecting the force acting on the acting body as an electric signal. A method for testing a sensor comprising: a first surface and a second surface which are located at positions facing each other and which are displaced between each other by the action of a force; A single electrode layer is formed, and a plurality of electrically independent electrode layers are formed at a plurality of locations on the second surface, respectively, and the electrode layer on the first surface has a first polarity. Is applied to each of the electrode layers on the second surface. Voltage or which voltage of the second polarity opposite selectively applied to each electrode layer and, wherein the first electrode layer on the surface second
A Coulomb force consisting of a repulsive force or an attractive force is applied between the electrode layer and the electrode layer on the surface of the sensor, and a sensor test is performed based on the applied Coulomb force and a detection result by the detection means. Test method for a sensor having an actor of the formula 2. The test method according to claim 1, wherein a sensor having a resistance element having a property of changing a resistance value by a mechanical deformation generated in the flexure element as a detection means is used as a test object, A force acting body characterized in that a test is performed based on a change in the resistance value of the resistance element when a Coulomb force is applied between the electrode layer on the surface and the electrode layer on the second surface. Test method for sensors with 3. A strain-generating body having an action portion which receives a force action, a fixing portion fixed to the sensor main body, and a flexible portion having flexibility formed therebetween, and is applied to the sensor main body. A weight for receiving the action of the force by the acceleration and transmitting the applied force to the acting portion to cause mechanical deformation of the strain body; and a resistance value due to the mechanical deformation generated in the strain body. A first electrode layer formed on a first surface which is displaced by the action of acceleration, and a second electrode formed on a second surface opposite to the first surface. 2 electrode layers; and wiring means for connecting the resistance element, the first electrode layer, and the second electrode layer to an external electric circuit. A predetermined voltage is applied to the second electrode layer to create Coulomb force between both electrode layers. By doing so, it is configured such that mechanical deformation can be caused in the strain body even when acceleration is not acting, and further, the first electrode layer and the second electrode layer One electrode layer is composed of an electrically single electrode layer, and the other electrode layer is composed of a plurality of electrically independent sub-electrode layers, and the polarity of the voltage applied to each sub-electrode layer is selected. The acceleration sensor is characterized in that the direction of the mechanical deformation generated in the flexure element can be given by doing so. 4. A strain body having an action portion receiving a force, a fixing portion fixed to the sensor main body, and a flexible portion formed between them, and a sensor main body. A magnetic body for receiving the action of the force by the placed magnetic field, transmitting the applied force to the acting portion to cause mechanical deformation of the strain body, and mechanically deforming the strain body; A resistance element having a property of changing a resistance value; a first electrode layer formed on a first surface which is displaced by the action of a magnetic force; and a second electrode layer formed on a second surface opposed to the first surface. A second electrode layer, and wiring means for connecting the resistance element, the first electrode layer, and the second electrode layer to an external electric circuit. And applying a predetermined voltage to the second electrode layer to create Coulomb force between the two electrode layers. By doing so, it is configured such that mechanical deformation can be caused in the strain body even in a state where no magnetic force is acting, and further, the first electrode layer and the second electrode layer Among them, one electrode layer is composed of an electrically single electrode layer,
The other electrode layer is composed of a plurality of electrically independent sub-electrode layers, and by selecting the polarity of the voltage applied to each sub-electrode layer, it is possible to give directionality to mechanical deformation generated in the strain body. A magnetic sensor, characterized in that: 5. The sensor according to claim 3, wherein the other electrode layer is composed of two electrically independent sub-electrode layers, and the polarity of a voltage applied to each sub-electrode layer is selected. Thereby, the mechanical deformation in the line direction connecting the centers of the two sub-electrode layers and the mechanical deformation in the direction perpendicular to the layer surfaces of the two sub-electrode layers are caused in the strain body. A sensor characterized in that: 6. The sensor according to claim 3, wherein the other electrode layer is constituted by four electrically independent sub-electrode layers, and these sub-electrode layers are each end point of two orthogonal lines. The mechanical deformation in the direction of the first line segment and the mechanical deformation in the direction of the second line segment of the two line segments are selected by arranging them at the positions and selecting the polarity of the voltage applied to each sub-electrode layer. And a mechanical deformation in a direction perpendicular to a layer surface of the four sub-electrode layers in the strain body.