JP2786070B2 - Inspection method and apparatus for transparent plate - Google Patents

Inspection method and apparatus for transparent plate

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Publication number
JP2786070B2
JP2786070B2 JP1406393A JP1406393A JP2786070B2 JP 2786070 B2 JP2786070 B2 JP 2786070B2 JP 1406393 A JP1406393 A JP 1406393A JP 1406393 A JP1406393 A JP 1406393A JP 2786070 B2 JP2786070 B2 JP 2786070B2
Authority
JP
Japan
Prior art keywords
transparent plate
inspection
light source
dimensional camera
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1406393A
Other languages
Japanese (ja)
Other versions
JPH06229741A (en
Inventor
岡村真一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP1406393A priority Critical patent/JP2786070B2/en
Publication of JPH06229741A publication Critical patent/JPH06229741A/en
Application granted granted Critical
Publication of JP2786070B2 publication Critical patent/JP2786070B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、車両用窓ガラス等の3
次元曲面形状を有する透明板状体が所望の形状に成形さ
れているか否かの判断をする透明板状体の周縁部分の外
形寸法および曲率の検査方法および検査装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention
The present invention relates to a method and an apparatus for inspecting an outer dimension and a curvature of a peripheral portion of a transparent plate-shaped body for determining whether or not a transparent plate-shaped body having a three-dimensional curved surface shape is formed into a desired shape.

【0002】[0002]

【従来技術とその問題点】3次元曲面形状を有する透明
板状体の形状検査方法に於ける従来技術としては、特開
昭55−89708号などに示されるように、周縁部輪
郭に沿って配置された複数のプローブによって測定する
もの、又特開昭58−198710号で示されるよう
に、移動自在なアームの先端に位置計測センサーを備え
たもので基準型に基づき測定の位置順序を学習記憶さ
せ、その後記憶内容を反復再現することにより測定する
もの、更に特開平3−72206号に示される様な被検
査体に略直線状の明暗線を投影し、シャッターカメラで
撮像及び画像処理後、明暗線の像を直線近似して得られ
た傾きと基準となる傾きとを比較して、曲げ形状の良否
を判定するものが知られている。
2. Description of the Related Art As a prior art in a method of inspecting the shape of a transparent plate having a three-dimensional curved surface shape, as disclosed in Japanese Patent Application Laid-Open No. 55-89708, it is known to follow a peripheral edge contour. One that measures with a plurality of probes arranged, and one that has a position measurement sensor at the tip of a movable arm as shown in Japanese Patent Application Laid-Open No. 58-198710, and learns the measurement position sequence based on a reference type. Measurement is carried out by repeatedly reproducing the stored contents, and further, a substantially linear light-dark line is projected on the object to be inspected as shown in JP-A-3-72206. In addition, there is known a method in which a slope obtained by linearly approximating an image of a light-dark line is compared with a reference slope to determine the quality of a bent shape.

【0003】しかしながら、前述の様な検出方法の内、
特開昭55−89708号、特開昭58−198710
のいずれの方法にあっても、センサーが接触タイプであ
り被対象物を傷つけ、又センサー自身が摩耗することは
避けられないものであった。又、特開平3−72206
についても、被検査体が自動車のフロント硝子等の曲げ
の深い形状のものについて測定する場合には上方の高い
位置から検査している為に測定精度が悪くなり、実用上
問題が懸念されるという問題点がある。
[0003] However, among the detection methods described above,
JP-A-55-89708, JP-A-58-198710
In any of the above methods, the sensor is a contact type, and it is inevitable that the object is damaged and the sensor itself is worn. Also, JP-A-3-72206
Also, when measuring an object to be inspected that has a deeply bent shape such as a front glass of an automobile, the inspection accuracy is deteriorated because the inspection is performed from a high position above, and there is a problem in practical use. There is a problem.

【0004】非接触タイプについて、本出願人は特開平
1−174907号として曲面形状測定方法およびその
装置を、特開平1−187403号としてガラスエッジ
検出装置を提案しているが、いずれも3次元の座標系を
設定し、これに基づいてレーザー光源を使用した位置セ
ンサーにより透明板状体のエッジを測定し設計上の仮想
曲面と比較することにより検査し、さらに各測定点にお
いて、光量がエッジ部分で急変させその点を測定するの
で、センサーをシーミング部分に交差するように移動さ
せる必要があり、制御が複雑になり、測定時間もやや遅
くなる恐れがあった。
For the non-contact type, the present applicant has proposed a curved surface shape measuring method and its apparatus in Japanese Patent Application Laid-Open No. 1-174907, and a glass edge detecting apparatus in Japanese Patent Application Laid-Open No. 1-187403, all of which are three-dimensional. The coordinate system is set, and based on this, the edge of the transparent plate is measured by a position sensor using a laser light source and compared with the virtual curved surface in the design, and the inspection is performed. Since the point is suddenly changed and the point is measured, it is necessary to move the sensor so as to intersect with the seaming part, which complicates the control and may possibly shorten the measurement time.

【0005】また、本出願人は特願平4−231662
号として曲面形状測定方法およびその装置を提案してい
るが、外形寸法と曲率の測定にはそれぞれ別の光源とカ
メラが必要で同時に測定することはできず、光源を切り
換えて測定する必要があり、検査箇所が多い場合には処
理速度にやや問題があった。
[0005] The applicant of the present invention has disclosed Japanese Patent Application No. Hei 4-231662.
As a reference, a curved surface shape measurement method and its device have been proposed.However, measurement of external dimensions and curvature requires separate light sources and cameras, and cannot be measured at the same time. However, when there are many inspection points, there is a problem in the processing speed.

【0006】本発明はこのような点に鑑みてなされたも
のであり、簡単な装置によって透明板状体の外形寸法と
曲率を迅速に検査する装置を提供することを目的とす
る。
The present invention has been made in view of the above points, and has as its object to provide an apparatus for quickly inspecting the outer dimensions and curvature of a transparent plate using a simple apparatus.

【0007】[0007]

【問題点を解決するための手段】本発明の検査方法は、
エッジ部分がシーミングされた透明板状体を検査型に載
置、位置決めした状態で、透明板状体のエッジ部分にレ
ーザー光源からのスリット光をシーミング部分を交差す
るように照射し、シーミング部分の拡散光を2次元カメ
ラにより撮像し、予め記憶された透明板状体の標準値に
対するシーミング部分の画像の横方向と縦方向の変位を
演算し、この外形寸法と曲率のズレが許容範囲内にある
か否かによって合否を判定するようにしたことを特徴と
するものであり、この発明を実施する検査装置は透明板
状体の端面のほぼ延長線上であって、検査する箇所にお
ける透明板状体の法線方向に、シリンドリカルレンズと
レーザーを組み合わせたレーザー光源を配設するととも
に、透明板状体の端面のほぼ延長線上であって、前記透
明板状体の検査する箇所における法線と30°〜60°
の範囲に配設し、2次元カメラによって得られた濃淡の
信号の、予め記憶された透明板状体の標準値に対する横
方向と縦方向の変位を演算し、この外形寸法と曲率のズ
レが許容範囲内にあるか否かを演算する演算処理装置を
少なくとも具備するようにしたことを特徴とする。
[Means for Solving the Problems] The inspection method of the present invention comprises:
With the transparent plate with the edge part seamed, placed on the inspection mold and positioned, the edge part of the transparent plate is irradiated with slit light from the laser light source so as to cross the seaming part, The diffused light is imaged by a two-dimensional camera, and the displacement of the image of the seaming portion in the horizontal direction and the vertical direction with respect to the standard value of the transparent plate body stored in advance is calculated, and the deviation between the external dimensions and the curvature is within an allowable range. The inspection apparatus embodying the present invention is characterized in that the pass / fail is determined based on whether or not there is a transparent plate at an inspection position substantially on an extension of the end face of the transparent plate. A laser light source combining a cylindrical lens and a laser is provided in the normal direction of the body, and the inspection of the transparent plate is performed substantially on the extension of the end face of the transparent plate. Normal and 30 ° ~60 ° at the location
And the horizontal and vertical displacements of the grayscale signal obtained by the two-dimensional camera with respect to the previously stored standard value of the transparent plate are calculated, and the deviation between the external dimensions and the curvature is calculated. It is characterized by having at least an arithmetic processing unit for calculating whether or not it is within an allowable range.

【0008】[0008]

【作用】本発明者らは、板ガラスなどの3次元曲面形状
を有する透明板状体のエッジに対して特定方向にレーザ
ー光源と2次元カメラを配設することにより、シーミン
グされた透明板状体のエッジ部分の検出ができ、その結
果透明板状体の外形寸法と曲率を同時に検査できること
を見出したものであり、透明板状体の端面のほぼ延長線
上であって、検査する箇所における透明板状体の法線方
向に、シリンドリカルレンズを内蔵したレーザー光源を
配設するとともに、透明板状体の端面のほぼ延長線上で
あって、前記透明板状体の検査する箇所における法線と
30°〜60°、好ましくは40°〜55°の範囲に2
次元カメラを配設し、カメラに撮像された透明板状体の
シーミング部分の濃淡の信号と標準の透明板状体のシー
ミング部分との変位を求めることにより、一組の光源と
カメラで外形寸法と曲率を検査することができるもの
で、さらにレーザー光源からスリット光を透明板状体の
シーミング部分にクロスするように照射することによ
り、特開平1−174907号などにおいて、光源とカ
メラ(受光器)が検査点においてシーミング部分をクロ
スするように移動する動きが必要なくなり、板状体外周
に沿って連続して移動させれば検査ができるようになっ
たので、処理速度を格段に向上させるものである。
The present inventors dispose a laser light source and a two-dimensional camera in a specific direction with respect to the edge of a transparent plate having a three-dimensional curved surface such as a plate glass, thereby forming a seamed transparent plate. The edge portion of the transparent plate can be detected, and as a result, the outer dimensions and the curvature of the transparent plate can be inspected simultaneously. A laser light source having a built-in cylindrical lens is disposed in the normal direction of the plate-like body, and is approximately 30 ° from the normal line at a location where the transparent plate-like body is inspected, substantially on an extension of the end face of the transparent plate-like body. 2 to 60 °, preferably 40 ° to 55 °.
By installing a three-dimensional camera and calculating the displacement between the light and shade signals of the seaming part of the transparent plate-like body imaged by the camera and the seaming part of the standard transparent plate-like body, the external dimensions with a set of light source and camera In addition, by irradiating a slit light from a laser light source so as to cross the seamed portion of the transparent plate, a light source and a camera (light receiver) are disclosed in Japanese Patent Application Laid-Open No. 1-174907. ) Eliminates the need to move to cross the seaming portion at the inspection point, and the inspection can be performed by moving it continuously along the outer periphery of the plate-like body, so that the processing speed is significantly improved. It is.

【0009】[0009]

【実施例】以下、図面に基づいて本発明を詳細に説明す
る。図1は、本発明の検査装置を示す概略側面図、図2
は本発明の実施例におけるシステム構成図、図3は本発
明の実施例における透明板状体に対する2次元カメラと
光源の配置を示す要部斜視図、図4、図5はそれぞれ本
実施例における検査装置を示す要部側面図と要部正面
図、図6は図5の一部を拡大した要部正面図(レーザー
光源と2次元カメラは点で表す)、図7は2次元カメラ
で撮像された画像を示す図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic side view showing an inspection apparatus of the present invention, and FIG.
FIG. 3 is a system configuration diagram in an embodiment of the present invention, FIG. 3 is a perspective view of a main part showing an arrangement of a two-dimensional camera and a light source with respect to a transparent plate in the embodiment of the present invention, and FIGS. FIG. 6 is an enlarged front view of a part of FIG. 5 (a laser light source and a two-dimensional camera are represented by dots), and FIG. 7 is an image taken by a two-dimensional camera. FIG. 7 is a diagram showing a processed image.

【0010】まず検査装置について説明する。図1に示
すように、回転自在であって、外形寸法、曲率等が精密
に政策製作された検査型1に、図示しない移載装置によ
り移載されて、位置決めされた自動車用窓ガラスなどの
3次元曲面形状を有する透明板状体2を載置し、6軸多
関節ハンドリングロボット3の移動自在なアームの先端
部のロボットハンド31 に光源として半導体レーザーな
どのレーザーと図示しないシリンドリカルレンズを組み
合わせたレーザー光源4と検液用カメラとしてのCCD
カメラなどの2次元カメラ5を取り付け固定する。
First, the inspection apparatus will be described. As shown in FIG. 1, a vehicle window glass or the like, which is transferred by a transfer device (not shown) and positioned to an inspection mold 1 that is rotatable and has precisely manufactured external dimensions, curvature, and the like, is precisely manufactured. placing the transparent plate-shaped object 2 having a three-dimensional curved surface shape, a cylindrical lens (not shown) with the laser such as a semiconductor laser as a light source in the robot hand 3 1 of the distal end portion of the movable arm of the six-axis articulated handling robot 3 Combined laser light source 4 and CCD as test solution camera
A two-dimensional camera 5 such as a camera is attached and fixed.

【0011】また、2次元カメラ5の出力は図2に示す
ように、画像処理装置6とパーソナルコンピューター7
などから構成される演算処理装置8に入力される。な
お、ロボットはコントローラー9によって3次元曲面の
あらゆる位置に移動させることができる。
The output of the two-dimensional camera 5 is, as shown in FIG.
The data is input to the arithmetic processing device 8 composed of the above. The robot can be moved to any position on the three-dimensional curved surface by the controller 9.

【0012】このような検査装置により、透明板状体の
任意のエッジを検査する場合について説明すると、透明
板状体を図示しない駆動装置により回転させた状態で、
予めロボットコントローラー8に教示された順序に従っ
て、ロボット3は駆動され、ロボットハンド31 の作動
により、レーザー光源4と2次元カメラ5は、図3〜図
6に示すように、レーザー光源は透明板状体の端面のほ
ぼ延長線上であって、検査する箇所における透明板状体
の法線Hの方向に、2次元カメラは透明板状体の端面の
ほぼ延長線上であって、法線Hとの角度が30°〜60
°の範囲、例えば50°になるような位置関係を保って
動く。
A case where an arbitrary edge of the transparent plate is inspected by such an inspection apparatus will be described. In a state where the transparent plate is rotated by a driving device (not shown),
According to pre-order taught to the robot controller 8, the robot 3 is driven by the operation of the robot hand 3 1, the laser light source 4 and the two-dimensional camera 5, as shown in FIGS. 3 to 6, the laser light source is a transparent plate In the direction of the normal H of the transparent plate at the point to be inspected, which is substantially on the extension of the end face of the transparent body, the two-dimensional camera is substantially on the extension of the end face of the transparent plate, and the normal H Angle is 30 ° -60
The robot moves while maintaining a positional relationship within a range of, for example, 50 degrees.

【0013】まず、サンプルとして、外形寸法、曲率が
規格範囲内にある標準サイズの板ガラスなどの透明板状
体をマニュアルで複数の検査点について、精密に製作さ
れた検査型との外形寸法、曲率についての差異を測定
し、パーソナルコンピューター7に記憶し、さらにこの
サンプルの透明板状体2s をこの装置によって、全周に
わたりシーミング部分を撮像する。
First, as a sample, a transparent plate-like body such as a standard-size sheet glass having an outer dimension and a curvature within a specified range is manually inspected at a plurality of inspection points with respect to a plurality of inspection points and a precisely manufactured inspection mold. the difference in the measured and stored in the personal computer 7, further a transparent plate-shaped object 2 s of the sample by the apparatus, to image the seaming portion over the entire circumference.

【0014】レーザー光源から例えば幅が0.5mm、
長さが60mmのスリット光Sがシーミング部分に直角
に交差するように照射されると、2次元カメラ5によっ
て撮像された任意の検査点における画像は図7の点線で
示すように、上側のシーミング部分a1 −b1 が明確に
表示され、a1 とb1 について、画像処理装置6によっ
て横方向(x軸)と縦方向(y軸)の座標に、すなわち
1 は(a1x,a1y)に、b1 は(b1x,b1y)に変換
され、パーソナルコンピューター7に検査点とともに記
憶される。
From the laser light source, for example, the width is 0.5 mm,
When the slit light S having a length of 60 mm is irradiated so as to intersect the seaming portion at a right angle, the image at an arbitrary inspection point captured by the two-dimensional camera 5 becomes the upper seaming as shown by a dotted line in FIG. The part a 1 -b 1 is clearly displayed, and a 1 and b 1 are coordinated by the image processing device 6 in the horizontal direction (x axis) and the vertical direction (y axis), that is, a 1 is (a 1x , a 1 1y ), b 1 is converted to (b 1x , b 1y ) and stored in the personal computer 7 together with the inspection points.

【0015】ついで、検査しようとする透明板状体2を
検査型1に載置、位置決めして、検査型1を回転させ、
ロボット3を作動させ、レーザー光源4と2次元カメラ
5を透明板状体2のシーミング部分(a2 −b2 )に対
して一定の前記角度を保って動かしながら検査を行う。
Next, the transparent plate 2 to be inspected is placed on the inspection die 1 and positioned, and the inspection die 1 is rotated.
The robot 3 is operated, and the inspection is performed while the laser light source 4 and the two-dimensional camera 5 are moved at a fixed angle with respect to the seaming portion (a 2 -b 2 ) of the transparent plate 2.

【0016】任意の検査点において、レーザー光源から
例えば幅が0.5mm、長さが60mmのスリット光S
がシーミング部分に直角に交差するように照射される
と、2次元カメラ5に撮像された画像は図7の実線で示
すように、上側のシーミング部分a2 −b2 が明確に表
示され、a2 とb2 について、画像処理装置6によって
横方向(x軸)と縦方向(y軸)の座標に、すなわちa
2 は(a2x,a2y)に、b2 は(b2x,b2y)に変換さ
れ、パーソナルコンピューター7に出力され、パーソナ
ルコンピューター7によって外形寸法と曲率が検査され
る。
At an arbitrary inspection point, for example, a slit light S having a width of 0.5 mm and a length of 60 mm
Is irradiated so as to intersect the seaming portion at a right angle, the image taken by the two-dimensional camera 5 clearly shows the upper seaming portion a 2 -b 2 as shown by the solid line in FIG. With respect to 2 and b 2 , the image processing device 6 sets the coordinates in the horizontal direction (x axis) and the vertical direction (y axis), that is, a
2 is converted to (a 2x , a 2y ) and b 2 is converted to (b 2x , b 2y ) and output to the personal computer 7, where the external dimensions and curvature are inspected.

【0017】外形寸法は図4に示すように、予め実測さ
れパーソナルコンピューター7に記憶された検査型とサ
ンプルの透明板状体2s との外形寸法の差h0 と、被検
査物である透明板状体2とサンプルの透明板状体2s
の外形寸法の差h1 との差(h0 −h1 )として表さ
れ、h1 は図7において、横方向(x軸)のb1 とb2
の差(b2x−b1x)となるので、求める外形寸法は(h
0 +b1x−b2x)となり、この値が+であれば、透明板
状体2の外形寸法が検査型より小さく、−であれば検査
型より大きいことを示し、この絶対値が所定の値より小
さければ合格、大きければ不合格と判定される。
As shown in FIG. 4, the external dimension difference h 0 between the test mold and the sample transparent plate 2 s measured and stored in the personal computer 7 in advance and the transparent object to be inspected, as shown in FIG. It is expressed as a difference (h 0 −h 1 ) between the outer dimension difference h 1 of the plate-shaped body 2 and the transparent plate-shaped body 2 s of the sample, and h 1 is b in the horizontal direction (x-axis) in FIG. 1 and b 2
Is the difference (b 2x −b 1x ).
0 + b 1x −b 2x ). If this value is +, it indicates that the outer dimensions of the transparent plate 2 are smaller than the inspection type, and if −, it is larger than the inspection type, and the absolute value is a predetermined value. If it is smaller, it is judged as pass, and if it is larger, it is judged as failed.

【0018】曲率については、図6においてサンプルの
透明板状体2s のパーソナルコンピューター7に記憶さ
れた曲率実測値h2 と、サンプルの透明板状体2s と被
検査物である透明板状体2の法線方向Hの差h3 (サン
プルの透明板状体が被検査物である透明板状体より上に
あるときには+、下にあるときには−になる)との差
(h2 −h3 )で表され、h3 は図6の三角形a1 2
dにおいて、a2 d(a 2 d間の距離を示す)/cos
θ であり、a2 d(a2 d間の距離を示す)は図7に
おいて縦方向(y軸)のa1 とa2 の差(a1y−a2y
となるので、求める曲率は(h2 −(a1y−a2y)/c
osθ)となり、この値が所定の規格内であれば合格、
規格外であれば不合格と判定される。
Regarding the curvature, FIG.
Transparent plate 2sStored in personal computer 7
Measured curvature hTwoAnd the sample transparent plate 2sAnd received
Difference h in the normal direction H of the transparent plate 2 as the inspection objectThree(Sun
Pull transparent plate above the transparent plate to be inspected
(Sometimes +, below-))
(HTwo-HThree) And hThreeIs the triangle a in FIG.1aTwo
In d, aTwod (a Twod) / cos
θ and aTwod (aTwod shows the distance between d)
A in the vertical direction (y-axis)1And aTwoDifference (a1y-A2y)
Therefore, the required curvature is (hTwo− (A1y-A2y) / C
osθ), and if this value is within a predetermined standard, it passes.
If it is out of the standard, it is judged as reject.

【0019】以上のような検査を、透明板状体の周縁に
沿って全周にわたり、連続して行うが本発明によれば、
数百点について検査を行っても数秒で検査を完了するこ
とができ、格段に処理速度が向上した。
According to the present invention, the above-described inspection is performed continuously over the entire periphery along the periphery of the transparent plate.
The inspection could be completed in a few seconds even if the inspection was performed for several hundred points, and the processing speed was remarkably improved.

【0020】パーソナルコンピューターにより計測され
た外形寸法と曲率データはモニターディスプレイ装置で
表示させ、記憶して管理情報として利用してもよく、ま
た発生した不良情報を早急に前工程である成形工程にフ
ィードバックさせてもよい。
The external dimensions and curvature data measured by the personal computer may be displayed on a monitor display device, stored and used as management information, and the generated defect information is immediately fed back to the preceding molding process. May be.

【0021】以上好適な実施例により説明したが、本発
明はこれらに限定されるものではなく、種々の応用が可
能である。スリット光をシーミング部分に照射するレー
ザー光源について、通常のレーザー光をスリット光に変
えるには、実施例で示したシリンドリカルレンズと組み
合わせたものが好ましいが、シリンドリカルに代えてポ
リゴンミラーでレーザー光を透明板状体のシーミング部
分にクロスするように移動させてもよい。また、レーザ
ー光源の取り付け位置は透明板状体の端面方向であって
法線Hの方向がこのましいが、端面に対しては、図4に
おいて右に30°、左に10°程度ずれてもよく、図
5、図6における法線との角度も±10°すなわち10
°程度であれば左右にずれてもよい。また、スリットに
ついてはスリットがシーミング部分に直角に交差する方
向に照射するようにした方がよいが、5°程度であれば
ずれてもよい。スリットの寸法は幅は小さい方がよく、
長さはカメラの視野より大きくした方がよい。
Although the preferred embodiments have been described above, the present invention is not limited to these, and various applications are possible. Regarding the laser light source that irradiates the slit light to the seaming portion, in order to change the normal laser light to the slit light, it is preferable to use the combination with the cylindrical lens shown in the embodiment, but the laser light is transparent with a polygon mirror instead of the cylindrical. The plate-like body may be moved so as to cross the seaming portion. The mounting position of the laser light source is in the direction of the end face of the transparent plate-like body and is preferably in the direction of the normal line H. However, the laser light source is shifted by about 30 ° to the right and 10 ° to the left in FIG. 5 and 6, the angle with respect to the normal is also ± 10 °, that is, 10 °.
If it is about °, it may be shifted to the left and right. Further, it is preferable to irradiate the slit in the direction in which the slit intersects the seaming portion at a right angle. The smaller the width of the slit, the better
The length should be larger than the field of view of the camera.

【0022】2次元カメラについて、CCDを使用した
2次元のエリアセンサーが好ましいが、1次元カメラを
使用し信号を記憶して2次元的処理する方式をとっても
良い。また、図5、図6における法線との角度φは30
°〜60°、好ましくは40°〜55°の範囲で適宜選
択すればよく、端面に対しては、図4において右に30
°、左に10°程度ずれてもよい。
For the two-dimensional camera, a two-dimensional area sensor using a CCD is preferable. However, a one-dimensional camera may be used to store signals and perform two-dimensional processing. The angle φ with respect to the normal in FIGS.
4 ° to 60 °, preferably 40 ° to 55 °, and 30 ° to the right in FIG.
° and about 10 ° to the left.

【0023】外形寸法と曲率の標準値について、実施例
では精密に製作された検査型とサンプルの板状体との差
を予め求め、被検査板状体とサンプル板状体の差を求
め、これらの結果からさらに被検査板状体の検査型に対
する外形寸法と曲率を求めたが、すなわち検査型を標準
値としたが、サンプルの板状体の外形寸法と曲率が設計
通りに、誤差がないように、あるいは誤差があっても既
知であれば、検査型の精度は必要なく、このサンプルの
板状体の寸法と曲率を標準値とすればよい。また、この
各検査点における標準値が設計データとして与えられた
ときは、これをもとに各検査点における座標に変換し
て、標準値としてもよい。この場合には検査型の精度も
必要ないばかりか、サンプルの板状体を用いる必要もな
い。
With respect to the standard values of the outer dimensions and the curvature, in the embodiment, the difference between the precisely manufactured inspection die and the sample plate is obtained in advance, and the difference between the inspected plate and the sample plate is obtained. From these results, the outer dimensions and curvature of the plate to be inspected with respect to the inspection mold were further determined. That is, the inspection mold was used as a standard value. If there is no error, or if there is an error, the accuracy of the inspection mold is not required, and the dimensions and curvature of the plate-like body of this sample may be set as standard values. Further, when the standard value at each inspection point is given as design data, it may be converted into coordinates at each inspection point based on this and used as the standard value. In this case, not only the accuracy of the inspection mold is not required, but also it is not necessary to use a sample plate.

【0024】ロボットは実施例のように3次元曲面を有
する透明板状体の検査を精密に行なう場合には6軸以上
の自由度を有するロボットが必要であるが、平面形状の
透明板状体の検査を行なう場合あるいは検査精度が粗く
てよい場合などには5軸以下の自由度を有するロボット
も使用可能である。また、ロボットとして一体的に製作
されたものだけでなく、各軸の駆動装置を別々に製作し
て組み合わせたものでもよい。
In order to precisely inspect a transparent plate having a three-dimensional curved surface as in the embodiment, a robot having six or more axes of freedom is required. In the case where the inspection is performed or the inspection accuracy may be low, a robot having five or less axes of freedom can be used. In addition, not only a unit integrally manufactured as a robot, but also a unit in which drive units for each axis are separately manufactured and combined.

【0025】また、実施例では検査型を回転させ、レー
ザー光源と2次元カメラを追従させて、処理速度を向上
させたが、透明板状体を静止させて、レーザー光源と2
次元カメラのみをロボットにより移動させて検査するよ
うにしてもよい。
In the embodiment, the processing speed is improved by rotating the inspection mold and following the laser light source and the two-dimensional camera. However, the transparent plate is kept stationary, and the laser light source and the two-dimensional camera are stopped.
The inspection may be performed by moving only the three-dimensional camera by the robot.

【0026】検査対象物について、板ガラス以外にも透
明な樹脂などにも応用することができ、3次元を有する
湾曲形状の透明板以外にもフラットな形状のものでも勿
論よい。
The object to be inspected can be applied not only to a plate glass but also to a transparent resin or the like. Of course, other than a transparent plate having a three-dimensional curved shape, a flat shape may be used.

【0027】[0027]

【発明の効果】以上説明してきたように、この発明によ
れば、2次元カメラにより非接触方式にて測定を行うた
め、被検査体に傷を付けることなく、又検出センサーの
摩耗の恐れもなく、またレーザー光源から被検査体のシ
ーミング部分に交差するように照射するので、検査点に
おいて、光源をシーミング部分に交差させる動きが必要
なく、また光源と2次元カメラをシーミング部分に対し
て特定範囲に配置することにより、一組ですむものであ
り、その結果同時に検査することができ、格段に処理速
度を向上させるものである。
As described above, according to the present invention, since the measurement is performed by the non-contact method using the two-dimensional camera, the object to be inspected is not damaged and the detection sensor may be worn. In addition, since the laser light source emits light so as to intersect the seamed part of the test object, there is no need to move the light source to the seamed part at the inspection point, and the light source and the two-dimensional camera are specified for the seamed part. By arranging them in a range, only one set is required, and as a result, inspection can be performed simultaneously, thereby significantly improving the processing speed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の検査装置を示す概略側面図である。FIG. 1 is a schematic side view showing an inspection device of the present invention.

【図2】本発明の実施例におけるシステム構成図であ
る。
FIG. 2 is a system configuration diagram in an embodiment of the present invention.

【図3】本発明の実施例における透明板状体に対する2
次元カメラと光源の配置を示す要部斜視図である。
FIG. 3 is a view illustrating a transparent plate-shaped member according to an embodiment of the present invention;
It is a principal part perspective view which shows arrangement | positioning of a three-dimensional camera and a light source.

【図4】本実施例における検査装置を示す要部側面図で
ある。
FIG. 4 is a side view of a main part showing the inspection apparatus in the present embodiment.

【図5】本実施例における検査装置を示す要部正面図で
ある。
FIG. 5 is a front view of a main part showing the inspection apparatus in the present embodiment.

【図6】図5の一部を拡大した要部正面図である(レー
ザー光源と2次元カメラは点で表す)。
6 is an enlarged front view of a part of FIG. 5 (a laser light source and a two-dimensional camera are indicated by dots).

【図7】2次元カメラで撮像された画像を示す図であ
る。
FIG. 7 is a diagram showing an image captured by a two-dimensional camera.

【符号の説明】[Explanation of symbols]

1 検査型 2 透明板状体 2s サンプルの透明板状体 3 ロボット 4 レーザー光源 5 2次元カメラ 6 画像処理装置 7 パーソナルコンピューター 8 演算処理装置 9 コントローラーReference Signs List 1 inspection type 2 transparent plate 2 s sample transparent plate 3 robot 4 laser light source 5 two-dimensional camera 6 image processing device 7 personal computer 8 arithmetic processing device 9 controller

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】エッジ部分がシーミングされた透明板状体
を検査型に載置、位置決めした状態で、透明板状体のエ
ッジ部分にレーザー光源からのスリット光をシーミング
部分を交差するように照射し、シーミング部分の拡散光
を2次元カメラにより撮像し、予め記憶された透明板状
体の標準値に対するシーミング部分の画像の横方向と縦
方向の変位を演算し、この外形寸法と曲率のズレが許容
範囲内にあるか否かによって合否を判定するようにした
ことを特徴とする透明板状体の検査方法。
A slit light from a laser light source is applied to the edge portion of the transparent plate so as to cross the seamed portion while the transparent plate having an edge portion seamed is placed on an inspection mold and positioned. Then, the diffused light of the seaming portion is imaged by a two-dimensional camera, and the displacement of the image of the seaming portion in the horizontal direction and the vertical direction with respect to the standard value of the transparent plate member stored in advance is calculated. A pass / fail judgment is made based on whether or not is within an allowable range.
【請求項2】エッジ部分がシーミングされた透明板状体
を検査型に載置、位置決めした状態で、透明板状体のエ
ッジ部分に光源からの光を照射して、2次元カメラで前
記エッジ部分を撮像することにより、透明板状体の曲率
と外形寸法を検査する装置において、透明板状体の端面
のほぼ延長線上であって、検査する箇所における透明板
状体の法線方向に、シリンドリカルレンズとレーザーを
組み合わせたレーザー光源を配設するとともに、透明板
状体の端面のほぼ延長線上であって、前記透明板状体の
検査する箇所における法線と30°〜60°の範囲に配
設し、2次元カメラによって得られた濃淡の信号の、予
め記憶された透明板状体の標準値に対する横方向と縦方
向の変位を演算し、この外形寸法と曲率のズレが許容範
囲内にあるか否かを演算する演算処理装置を少なくとも
具備するようにしたことを特徴とする透明板状体の検査
装置。
2. A transparent plate having an edge portion seamed is placed on an inspection mold and positioned, and light from a light source is applied to the edge portion of the transparent plate. In the device for inspecting the curvature and the outer dimensions of the transparent plate by imaging the portion, in a direction substantially normal to the end face of the transparent plate and in the normal direction of the transparent plate at the location to be inspected, A laser light source combining a cylindrical lens and a laser is provided, and is approximately on an extension of the end face of the transparent plate-like body, and is in a range of 30 ° to 60 ° with respect to a normal line at a location where the transparent plate-like body is inspected. The horizontal and vertical displacements of the light and shade signals obtained by the two-dimensional camera with respect to the previously stored standard values of the transparent plate are calculated, and the deviation between the external dimensions and the curvature is within an allowable range. Whether or not An apparatus for inspecting a transparent plate-shaped object, comprising at least an arithmetic processing unit for performing an operation.
JP1406393A 1993-01-29 1993-01-29 Inspection method and apparatus for transparent plate Expired - Fee Related JP2786070B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1406393A JP2786070B2 (en) 1993-01-29 1993-01-29 Inspection method and apparatus for transparent plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1406393A JP2786070B2 (en) 1993-01-29 1993-01-29 Inspection method and apparatus for transparent plate

Publications (2)

Publication Number Publication Date
JPH06229741A JPH06229741A (en) 1994-08-19
JP2786070B2 true JP2786070B2 (en) 1998-08-13

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ID=11850638

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Country Link
JP (1) JP2786070B2 (en)

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KR101503992B1 (en) 2003-04-09 2015-03-18 가부시키가이샤 니콘 Exposure method and apparatus, and device manufacturing method
TWI628698B (en) 2003-10-28 2018-07-01 尼康股份有限公司 Optical illumination device, exposure device, exposure method and device manufacturing method
TWI519819B (en) 2003-11-20 2016-02-01 尼康股份有限公司 Light beam converter, optical illuminating apparatus, exposure device, and exposure method
TWI379344B (en) 2004-02-06 2012-12-11 Nikon Corp Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method
KR101452145B1 (en) 2005-05-12 2014-10-16 가부시키가이샤 니콘 Projection optical system, exposure apparatus and exposure method
JP5332122B2 (en) * 2006-03-23 2013-11-06 日産自動車株式会社 Work position detection system and work position detection method
JP5648674B2 (en) * 2006-03-23 2015-01-07 日産自動車株式会社 Work position detection system
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Also Published As

Publication number Publication date
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