JP2632106B2 - High frequency heating coil - Google Patents
High frequency heating coilInfo
- Publication number
- JP2632106B2 JP2632106B2 JP3331237A JP33123791A JP2632106B2 JP 2632106 B2 JP2632106 B2 JP 2632106B2 JP 3331237 A JP3331237 A JP 3331237A JP 33123791 A JP33123791 A JP 33123791A JP 2632106 B2 JP2632106 B2 JP 2632106B2
- Authority
- JP
- Japan
- Prior art keywords
- heating coil
- heating
- diameter portion
- stepped shaft
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Heat Treatment Of Articles (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、高周波加熱コイルに関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency heating coil .
【０００２】[0002]
【従来の技術】以下、図面を参照して従来の技術を説明
する。図３および４は段付シャフトの焼入を例にとって
従来の高周波加熱コイルを説明するための図面であっ
て、図３は段付シャフトを高周波加熱コイルによって加
熱している状態の説明図、図４の段付シャフトに形成さ
れた硬化層の説明図である。2. Description of the Related Art A conventional technique will be described below with reference to the drawings. 3 and 4 are views for explaining a conventional high-frequency heating coil by quenching a stepped shaft as an example. FIG. 3 is an explanatory view showing a state in which the stepped shaft is heated by the high-frequency heating coil. It is explanatory drawing of the hardened layer formed in the stepped shaft of No. 4.
【０００３】段付シャフト１０は、円柱状の小径部１
１、１２と、これら小径部１１、１２の間に円柱状の大
径部１３を備えている。小径部１１と１２の径は、同じ
である場合もあるし、異なっている場合もある。そし
て、大径部１３の小径部１１側および小径部１２側のそ
れぞれの側面１４および１５は、段付シャフト１０の軸
１８と直角な環状の平面を構成している。The stepped shaft 10 has a cylindrical small diameter portion 1.
1 and 12 and a columnar large portion between these small diameter portions 11 and 12.
A diameter portion 13 is provided. The diameters of the small diameter portions 11 and 12 may be the same or different. The side surfaces 14 and 15 of the large-diameter portion 13 on the small-diameter portion 11 side and the small-diameter portion 12 side constitute an annular plane perpendicular to the axis 18 of the stepped shaft 10.
【０００４】小径部１１、１２および大径部１３のそれ
ぞれの周面、並びに大径部１３の側面１４、１５を高周
波焼入するには、図３に示す半開放型の高周波加熱コイ
ル（以下、加熱コイルと記す場合は高周波加熱コイルを
示す）１００を用いる。加熱コイル１００は、直列に接
続された加熱導体１０１、〜１１３を備えており、両端
の加熱導体１０１と１１３に電源供給導体１１８と１１
９がそれぞれ接続されている。In order to induction harden the respective peripheral surfaces of the small diameter portions 11 and 12 and the large diameter portion 13 and the side surfaces 14 and 15 of the large diameter portion 13, a semi-open type high frequency heating coil shown in FIG. , A heating coil is used to indicate a high-frequency heating coil). The heating coil 100 includes heating conductors 101 and 113 connected in series, and power supply conductors 118 and 11 are connected to the heating conductors 101 and 113 at both ends.
9 are connected to each other.
【０００５】ほぼ１／２円弧状の加熱導体１０１、１１
３は小径部１１の端部（大径部１３と反対側）近辺にお
いては小径部１１の周方向に配設されており、また、ほ
ぼ１／２円弧状の加熱導体１０７は、小径部１２の端部
（大径部１３と反対側）近辺において小径部１２の周方
向に配設されている。加熱導体１０２〜１０６および加
熱導体１０８〜１１２は、図３に示すように、段付シャ
フト１０の平面視における輪郭に沿うように形成されて
いる。[0005] Heating conductors 101 and 11 each having a substantially half arc shape.
Numeral 3 is disposed in the circumferential direction of the small-diameter portion 11 near the end of the small-diameter portion 11 (on the side opposite to the large-diameter portion 13). Is arranged in the circumferential direction of the small-diameter portion 12 in the vicinity of the end (opposite to the large-diameter portion 13). The heating conductors 102 to 106 and the heating conductors 108 to 112 are formed along the contour of the stepped shaft 10 in plan view, as shown in FIG.
【０００６】段付シャフト１０を高周波焼入するには、
段付シャフト１０の両端を図示しないセンタやチャック
等で段付シャフト１０が回動自在であるように支持し、
加熱コイル１００を段付シャフト１０に接近対向して配
置後、図示しない装置によって段付シャフト１０を軸１
８を中心として回転しながら、加熱コイル１００に高周
波電流を所定時間通電し、次いで、段付シャフト１０に
図示しない冷却液を噴射して冷却することによって段付
シャフト１０の表面に硬化層１９が形成される。In order to induction harden the stepped shaft 10,
Both ends of the stepped shaft 10 are supported by a center or a chuck (not shown) so that the stepped shaft 10 is rotatable,
After the heating coil 100 is arranged close to and facing the stepped shaft 10, the stepped shaft 10 is moved to the axis 1 by a device not shown.
While rotating around the center 8, a high-frequency current is applied to the heating coil 100 for a predetermined time, and then a cooling liquid (not shown) is sprayed onto the stepped shaft 10 to cool the stepped shaft 10, whereby a hardened layer 19 is formed on the surface of the stepped shaft 10. It is formed.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、このよ
うにして段付シャフト１０の表面に形成された硬化層１
９は、大径部１３の側面１４と小径部１１との交叉部分
１６、および大径部１３の側面１５と小径部１２との交
叉部分１７では、他の部分の硬化層１９より浅くなって
おり、これら交叉部分１６、１７の強度が不足している
場合があった。これは、交叉部分１６、１７の加熱不足
が原因である。However, the hardened layer 1 formed on the surface of the stepped shaft 10 in this manner.
Reference numeral 9 denotes that at the intersection 16 between the side surface 14 of the large-diameter portion 13 and the small-diameter portion 11 and at the intersection 17 between the side surface 15 of the large-diameter portion 13 and the small-diameter portion 12, it is shallower than the hardened layer 19 in other portions. In some cases, the strength of the crossover portions 16 and 17 was insufficient. This is due to insufficient heating of the intersections 16,17.
【０００８】段付シャフト１０の従来の加熱コイルによ
る上記焼入結果によっても明らかなように、ワークに複
数の被焼入部がある場合に、１個の加熱コイルによって
全ての被焼入部を加熱する焼入方法では、全ての被焼入
部に均一な深さの硬化層を形成することが困難な場合が
ある。As is apparent from the above-described quenching results of the conventional heating coil of the stepped shaft 10, when there are a plurality of quenched portions in the work, all the parts are hardened by one heating coil. In the quenching method of heating the quenched portion, it may be difficult to form a hardened layer having a uniform depth on all the quenched portions.
【０００９】本発明は上記事情に鑑みて創案されたもの
であって、複数箇所の被焼入部を有するワークの全ての
被焼入部に均一な深さの硬化層を形成することができる
高周波加熱コイルを提供することを目的としている。The present invention has been made in view of the above circumstances, and high frequency heating capable of forming a hardened layer having a uniform depth on all hardened portions of a work having a plurality of hardened portions. It is intended to provide a coil .
【００１０】[0010]
【課題を解決するための手段】請求項１記載の高周波加
熱コイルは、大径部と大径部の両側に形成された小径部
とを有する段付シャフトを加熱する高周波加熱コイルに
おいて、大径部の周面及び両側面と小径部の周面に沿っ
て形成された第１加熱コイルと、大径部の両側面と小径
部の周面との交叉部分に沿って円弧状に形成された第２
加熱コイルとを具備しており、かつ、前記第１加熱コイ
ルと第２加熱コイルとは別個の高周波電源に接続されて
いることを特徴としている。According to a first aspect of the present invention, there is provided a high-frequency heating coil comprising a large-diameter portion and small-diameter portions formed on both sides of the large-diameter portion.
In the high frequency heating coil for heating a stepped shaft having bets, along the circumferential surface and the circumferential surface of both sides and a small diameter portion of the large-diameter portion
The first heating coil formed by heating, the both sides of the large diameter part and the small diameter
A second portion formed in an arc shape along the intersection with the peripheral surface of the portion
A heating coil, and the first heating coil
And the second heating coil are connected to separate high-frequency power sources.
It is characterized in that there.
【００１１】[0011]
【実施例】【Example】
以下、図面を参照して本発明の一実施例を説Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
明する。I will tell.
【００１２】図１〜２は本実施例を説明するための図面
であって、図１は本発明加熱コイルの一実施例の説明
図、図２は、加熱コイルの一部の説明図である。なお、
従来の技術で説明したものと同等のものには、同一の符
号を付して説明する。 FIGS. 1 and 2 are drawings for explaining this embodiment.
FIG. 1 illustrates an embodiment of the heating coil of the present invention.
FIG. 2 is an explanatory diagram of a part of the heating coil. In addition,
The same symbols as those described in the related art
A description will be given with numbers.
【００１３】ワークは、従来の技術で説明したのと同じ
段付シャフト１０である。図１に示すように、本実施例
の加熱コイルは、第１加熱コイル１００と第２加熱コイ
ル２ ００とを備えている。 The work is the same as described in the prior art.
Stepped shaft 10. As shown in FIG.
The heating coil of the first heating coil 100 and the second heating coil
200 .
【００１４】第１加熱コイル１００は、従来の技術で説
明した加熱コイル１００と同じ加熱コイルであって、小
径部１１、１２と大径部１３の周面に沿うように形成さ
れており、軸状ワーク１０の小径部１１、大径部１３お
よび小径部１２のそれぞれの周面と、大径部１３の側面
１４、１５を加熱するのに用いられ、１０１〜１１３か
らなる加熱導体を備えている。 The first heating coil 100 is described in the prior art.
The same heating coil as the heating coil 100
It is formed along the peripheral surfaces of the diameter portions 11 and 12 and the large diameter portion 13.
And the small-diameter portion 11, the large-diameter portion 13 and the
Peripheral surface of the small diameter portion 12 and the side surface of the large diameter portion 13
Used to heat 14,15, 101-113
And a heating conductor comprising:
【００１５】第２加熱コイル２００は、小径部１１と側
面１４との交叉部分１６および小径部１２と側面１５と
の交叉部分１７の加熱に用いられ、直列に接続されたリ
ード導体２０１、加熱導体２０２、リード導体２０３、
２０５、加熱導体２０６、リード導体２０７、を備えて
いる。図中２０４、２０８は電源接続導体である。 The second heating coil 200 is connected to the small-diameter portion 11 and the side.
The intersection 16 with the surface 14 and the small diameter portion 12 and the side surface 15
Used to heat the crossover portion 17 of the
Lead conductor 201, heating conductor 202, lead conductor 203,
205, a heating conductor 206, and a lead conductor 207.
I have. In the figure, 204 and 208 are power supply connection conductors.
【００１６】加熱導体２０２、２０６は、それぞれ交叉
部分１６、１７に対応した径を有しており小径部１１、
１２の周面に沿ってほぼ円弧状に形成され、交叉部分１
６、１７に対向する面を除く周面に磁性体のコア２２０
が装着されている（図２参照）。 The heating conductors 202 and 206 each cross
The small-diameter portion 11, which has a diameter corresponding to the portions 16 and 17,
12 is formed in a substantially arc shape along the peripheral surface, and the intersection 1
The core 220 made of a magnetic material is provided on the peripheral surface except for the surfaces facing 6 and 17.
(See FIG. 2).
【００１７】リード導体２０１、２０３、２０５、２０
７は前記加熱導体２０２、２０６から所定間隔を設けて
外方に向かって同心状に形成されている。そしてリード
導体２０１は、一端が電源供給導体２１８に、他端が加
熱導体２０２の一端に接続されている。一方、リード導
体２０３は、一方の端部が加熱導体２０２の他端に、他
方の端部が電源接続導体２０４の一端に接続されてい
る。またリード導体２０５は、一端が電源供給導体２０
４の他端に、他方の端部が加熱導体２０６の一端に接続
されている。一方、リード導体２０７は、一端が加熱導
体２０６の他端に、また他端が電源接続導体２０８の一
端に接続されている。そして、電源接続導体２０８の他
端は電源供給導体２１９に接続されている。 Lead conductors 201, 203, 205, 20
7 is provided at a predetermined interval from the heating conductors 202 and 206.
It is formed concentrically outward. And lead
The conductor 201 has one end connected to the power supply conductor 218 and the other end connected.
It is connected to one end of the heat conductor 202. Meanwhile, lead leads
The body 203 has one end at the other end of the heating conductor 202 and the other end.
One end is connected to one end of the power supply connection conductor 204.
You. One end of the lead conductor 205 is connected to the power supply conductor 20.
4, the other end is connected to one end of the heating conductor 206
Have been. On the other hand, one end of the lead conductor 207 is
The other end of the body 206 and the other end
Connected to the end. Then, other than the power supply connection conductor 208
The end is connected to the power supply conductor 219.
【００１８】図２に於いて、第２加熱コイル２００は加
熱導体２０２のコアを装着していな い面を交叉部分１６
に近接して配置されている。 リード導体２０３、２０
５、および２０７もリード線２０１と同様な要領で配置
される。なお加熱導体２０６にも前記と同様にコアが装
着されている。 In FIG . 2, the second heating coil 200 is
Crossover gastric surface that have mounted a core of the heat conductor 202 parts 16
It is arranged close to. Lead conductors 203, 20
5 and 207 are arranged in the same manner as the lead wire 201.
Is done. The core is also mounted on the heating conductor 206 in the same manner as described above.
Is being worn.
【００１９】次に、本実施例の動作について説明する。
第１加熱コイル１００の加熱導体１０１、１０２、１１
２および１１３を段付シャフト１０の小径部１１の周面
に加熱導体１０３および１１１を側面１４に加熱導体１
０５および１０９を側面１５に、加熱導体１０６〜１０
８を小径部１２の周面に、それぞれ、接近対向するよう
に、第１加熱コイル１００を配設する。また、第２加熱
コイル２００の加熱導体２０２および２０６が交叉部分
１６、１７に、それぞれ接近対向するように、第２加熱
コイル２００を配設する。 Next, the operation of this embodiment will be described.
Heating conductors 101, 102, 11 of the first heating coil 100
2 and 113 are the peripheral surfaces of the small diameter portion 11 of the stepped shaft 10.
Heating conductors 103 and 111 on the side surface 14
05 and 109 on the side surface 15 and the heating conductors 106 to 10
8 on the peripheral surface of the small diameter portion 12 so as to approach and face each other.
Then, the first heating coil 100 is provided. Also, the second heating
Where the heating conductors 202 and 206 of the coil 200 intersect
The second heating is carried out so that
The coil 200 is provided.
【００２０】次いで、段付シャフト１０の両端を図示し
ないセンタおよびチャック等で、段付シャフト１０が回
転自在であるように支持し、段付シャフト１０を軸１８
を中心として回転させながら、第１、第２加熱コイル１
００と２００にそれぞれ所定時間にわたって高周波電流
を通電する。 第１加熱コイル１００によって段付シャフ
ト１０の小径部１１、１２、大径部１３、同側面１４、
１５は一様に加熱される。そして交叉部分１６、１７は
第２加熱コイル２００によって加熱される。 Next, both ends of the stepped shaft 10 are illustrated.
When the stepped shaft 10 is turned
The stepped shaft 10 is supported so that it can rotate freely,
While rotating the first and second heating coils 1
High-frequency current over 00 and 200 respectively
Is turned on. Stepped shuff by first heating coil 100
, Small-diameter portions 11, 12, large-diameter portion 13,
15 is heated uniformly. And the crossover parts 16, 17
Heated by the second heating coil 200.
【００２１】この際第２加熱導体２０２により発生する
磁束は、コア２０２の非装着面からこれに対向する交叉
部分１６に洩れることなく集中して作用するので、交叉
部分１６が効率よく加熱され、加熱不足を生じない。 な
お加熱導体２０６が動作も前記に準ずるものである。 At this time, it is generated by the second heating conductor 202.
The magnetic flux flows from the non-mounting surface of the core 202 to the
Because it acts in a concentrated manner without leaking to the part 16,
The portion 16 is efficiently heated and does not cause underheating. What
The operation of the heating conductor 206 is also the same as described above.
【００２２】その後、軸状ワーク１０全体に図示しない
ジャケットから冷却液を所定時間噴射して軸状ワーク１
０の焼入を終了する。このようにして焼入された段付シ
ャフト１０の表面には、交叉部分１６、１７を含めて均
一な深さの硬化層１９ａが形成される。 Thereafter, the entire axial workpiece 10 is not shown.
By spraying the cooling liquid from the jacket for a predetermined time, the axial work 1
The quenching of 0 is terminated. The stepped sheet quenched in this way
The surface of the shaft 10, including the crossover portions 16 and 17, is uniform.
A hardened layer 19a having a uniform depth is formed.
【００２３】前記に於いて、リード導体２０１は加熱導
体２０２に対して図２に示すような位置に配設するのが
一般的であるが、図２の２０１ａに示す位置に配置して
小径部１２の周面の加熱に寄与させることもある。 In the above, the lead conductor 201 is heated
It should be arranged at the position shown in FIG.
Generally, it is arranged at the position indicated by 201a in FIG.
It may contribute to heating of the peripheral surface of the small diameter portion 12.
【００２４】[0024]
前記実施例では、交叉部分１６、１７を１In the above embodiment, the crossover portions 16 and 17 are 1
個の第２加熱コイル２００で加熱したが、別個の加熱コAre heated by the second heating coil 200,
イルで加熱することもできる。また、第１、第２加熱コIt can be heated with an il. In addition, the first and second heating cores
イル１００、２００の高周波電源は、共通な電源であっThe high frequency power supplies of the coils 100 and 200 are common power supplies.
ても、別個の電源でもよい。この場合には第１、第２加Or a separate power supply. In this case, the first and second
熱コイルの電流を別個に調整できるので都合がよい。更Advantageously, the current in the thermal coil can be adjusted separately. Change
に、段付シャフト１０の冷却は、空気中においてジャケIn addition, the cooling of the stepped shaft 10
ットから冷却液を噴射する方法を説明したが、軸状ワーAlthough the method of injecting coolant from the
ク１０を冷却液中に浸漬する方法や、浸漬し且つ冷却液To immerse the cooling 10 in a cooling liquid,
を噴射する方法を採用することもできる。May be adopted.
【００２５】[0025]
【発明の効果】以上説明したように、本発明の請求項１
記載の発明は、大径部と大径部の両側に形成された小径
部とを有する段付シャフトを加熱する高周波加熱コイル
において、大径部の周面及び両側面と小径部の周面に沿
って形成された第１加熱コイルと、大径部の両側面と小
径部の周面との交叉部分に沿って円弧状に形成された第
２加熱コイルとを具備しており、かつ、前記第１加熱コ
イルと第２加熱コイルとは別個の高周波電源に接続され
ていることを特徴としている。As described above, according to the first aspect of the present invention,
The described invention has a large diameter portion and a small diameter formed on both sides of the large diameter portion.
In a high-frequency heating coil for heating a stepped shaft having a large diameter portion, the high frequency heating coil is formed along the circumferential surface of the large diameter portion and both side surfaces and the circumferential surface of the small diameter portion.
The first heating coil formed by
A circular arc formed along the intersection of the diameter part with the peripheral surface
And comprising a second heating coil, and said first heating co
And the second heating coil are connected to separate high-frequency power sources.
It is characterized by having.
【００２６】従って段付シャフト交叉部分を含む全周面
に亘って均一な深さの硬化層を形成させることができ
る。また第１加熱コイルと第２加熱コイルには個別に供
給電力、周波数、力率等を制御することが可能である。
従って例えば各コイルの加熱終了のタイミングを合わせ
るように加熱開始時刻を変える等加熱時間を制御するこ
とができるので、大変都合がよいものである。 Accordingly, a hardened layer having a uniform depth can be formed over the entire peripheral surface including the stepped shaft crossing portion. Also, the first heating coil and the second heating coil are individually supplied.
It is possible to control power supply, frequency, power factor, and the like.
Therefore, for example, adjust the timing of the end of heating of each coil.
Control the heating time by changing the heating start time
This is very convenient.
【００２７】また請求項２記載の発明に係る高周波加熱
コイルは前記第１加熱コイルと第２加熱コイルとを別個
の高周波電源に接続したことを特徴としている。 従って
請求項１記載の発明の効果に加えて、交叉部分の加熱を
個別に調整する ことができるので、請求項１記載の発明
とともに実施すると大変便利なものである。 The high frequency heating according to the second aspect of the present invention.
The coil separates the first heating coil and the second heating coil
Is connected to a high-frequency power supply. Therefore
In addition to the effect of the invention described in claim 1, heating of the crossing portion is
The invention according to claim 1, which can be adjusted individually.
It is very convenient to carry out with.
【図１】本発明の加熱コイルの一実施例の説明図であ
る。FIG. 1 is an explanatory view of one embodiment of a heating coil of the present invention.
【図２】図１に示す加熱コイルの一部の説明図である。FIG. 2 is an explanatory view of a part of the heating coil shown in FIG.
【図３】従来の加熱コイルの説明図である。FIG. 3 is an explanatory diagram of a conventional heating coil .
【図４】従来の加熱コイルによって段付シャフトに形成
された硬化層の説明図である。FIG. 4 is an explanatory diagram of a hardened layer formed on a stepped shaft by a conventional heating coil .
１０ 段付シャフト １１、１２ 小径部 １３ 大径部 １４、１５ 側面１６、１７ 交叉部分 １００ 第１加熱コイル ２００ 第２加熱コイル 10- step shafts 11, 12 Small diameter portion 13 Large diameter portion 14, 15 Side surface 16, 17 Intersection 100 First heating coil 200 Second heating coil
Claims (1)
部とを有する段付シャフトを加熱する高周波加熱コイル
において、大径部の周面及び両側面と小径部の周面に沿
って形成された第１加熱コイルと、大径部の両側面と小
径部の周面との交叉部分に沿って円弧状に形成された第
２加熱コイルとを具備しており、かつ、前記第１加熱コ
イルと第２加熱コイルとは別個の高周波電源に接続され
ていることを特徴とする高周波加熱コイル。1. A large diameter portion and a small diameter formed on both sides of the large diameter portion.
In a high-frequency heating coil for heating a stepped shaft having a large diameter portion, the high frequency heating coil is formed along the circumferential surface of the large diameter portion and both side surfaces and the small diameter portion.
The first heating coil formed by
A circular arc formed along the intersection of the diameter part with the peripheral surface
And comprising a second heating coil, and said first heating co
And the second heating coil are connected to separate high-frequency power sources.
High-frequency heating coil, characterized in that are.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331237A JP2632106B2 (en) | 1991-11-19 | 1991-11-19 | High frequency heating coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331237A JP2632106B2 (en) | 1991-11-19 | 1991-11-19 | High frequency heating coil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05140634A JPH05140634A (en) | 1993-06-08 |
| JP2632106B2 true JP2632106B2 (en) | 1997-07-23 |
Family
ID=18241434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3331237A Expired - Fee Related JP2632106B2 (en) | 1991-11-19 | 1991-11-19 | High frequency heating coil |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2632106B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7287636B2 (en) * | 2018-08-10 | 2023-06-06 | 富士電子工業株式会社 | Heating coil for high frequency induction heating |
| EP3975664A4 (en) * | 2019-05-23 | 2022-07-13 | Nippon Steel Corporation | Secondary coil module, traverse hardening apparatus, and traverse hardening method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5239368A (en) * | 1975-09-25 | 1977-03-26 | Hitachi Ltd | Method for surface treatment of silicon wafer |
| JPS6436907U (en) * | 1987-08-31 | 1989-03-06 | ||
| JPH01136156U (en) * | 1988-03-02 | 1989-09-18 | ||
| JPH03122220A (en) * | 1989-10-05 | 1991-05-24 | Fuji Denshi Kogyo Kk | High-frequency hardening coil for gear with shafts |
-
1991
- 1991-11-19 JP JP3331237A patent/JP2632106B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05140634A (en) | 1993-06-08 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |