JP2602165B2 - Polishing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for precision polishing of an inner surface of a round hole or a tapered end surface.

[0002]

2. Description of the Related Art A polishing apparatus for precisely polishing the inner surface of a round hole such as the inner surface of a pipe is called a honing machine. This honing machine is disclosed in Japanese Patent Application Laid-Open No. 61-28897.
As shown in Japanese Patent Publication No. 1 (1993), the inner surface of a round hole is precisely polished by a combination of a rotational motion of a main shaft and a vertical motion called a vibration. FIG. 1 shows a spindle drive mechanism provided in a conventional honing machine.

The main shaft 1 is rotatably and axially movably supported in a vertically extending cylindrical housing 2, and is urged downward by a spring 3. And
It is driven to rotate around the central axis by a main shaft rotation motor 4. The housing 2 is reciprocated in the axial direction together with the spindle rotating motor 4 and the like by an elevating mechanism such as a rack and pinion 5. The tool 7 is called honing, and is held by the holder 8 below the main shaft 1.

The vibrator 9 includes a pin 9a penetrating the main shaft 1 at a right angle, eccentric rollers 9b, 9b rotatably attached to both ends of the pin 9a, and an eccentric roller 9b.
A receiving seat 9c fixed to the housing 2 to support the b and 9b is provided in the housing 2. The eccentric rollers 9b, 9b are pressed by the seat 9c when the main shaft 1 is urged downward by the spring 3.

When the spindle 1 is driven to rotate by the spindle rotation motor 4, the tool 7 rotates. At the same time, the eccentric roller 9
b and 9b revolve around the central axis of the main shaft 1 and rotate by friction with the seat 9c. Therefore, at the same time as the main shaft 1 rotates, it moves up and down in the axial direction. Then, by gradually lowering the housing 2 and inserting the tool 7 into the round hole,
The inner surface of the round hole is precisely polished by the rotational movement and the vertical movement of the tool 2.

As processing similar to the inner surface polishing of a round hole,
There is precision polishing of a tapered end face that is depressed in a conical or hemispherical shape. This is done on a drilling machine, as described below.

[0007]

A conventional honing machine having the above-described spindle drive mechanism has the following problems.

Since the vertical movement period of the main shaft 1 is controlled by the rotation speed of the main shaft 1, the vertical movement period of the main shaft 1 cannot be freely adjusted. Since the amount of vertical movement of the main shaft 1 is uniquely determined by the amount of eccentricity of the eccentric rollers 9b, 9b, it is difficult to change the amount of vertical movement of the main shaft 1. To make this change, the inside of the housing 2 must be disassembled and the eccentric rollers 9b, 9b must be replaced.

Generally speaking, when the amount of polishing is large, the load applied to the tool 7 is large. Therefore, it is necessary to reduce the amount of vertical movement of the main shaft 1 and shorten the moving cycle. Conversely, when the amount of polishing is small, the load applied to the tool 7 is small. Therefore, a high-precision finish can be achieved by increasing the amount of vertical movement of the spindle 1 and lengthening the movement cycle. However, in the conventional honing machine, it is difficult to change the vertical movement amount of the main shaft 1 and the vertical movement period cannot be freely adjusted, so that such high-precision polishing cannot be performed, and polishing accuracy is low.

Recent honing machines have been increasingly automated. On the other hand, in order to precisely grind the tapered end face,
It is necessary to move the tool up and down in a long cycle. However, automated honing machines cannot perform such polishing. For this reason, precision polishing of the tapered end surface is still performed by a skilled person operating a drilling machine.

Honing machines are more expensive than drilling machines,
Automated ones are particularly expensive. In order to produce an inexpensive honing machine, it is conceivable to modify the drilling machine. That is, the main shaft of the drilling machine is moved up and down. However, since the conventional honing machine has a structure in which the vibrator 9 is built in the housing 2, the honing machine requires the housing 2 which is considerably thicker than the main shaft 1. Since a drilling machine does not have such a housing, it is not possible to produce an inexpensive honing machine based on a drilling machine.

When the eccentric rollers 9b, 9b rotate on the seat 9c, iron powder is generated. Conventional honing machines
This iron powder enters the bearing in the housing 2 and shortens the life of the bearing. That is, the vibrator 9 shortens the life of the bearing in the housing 2.

When repairing the vibrator 9, it is necessary to disassemble the inside of the housing 2, which is troublesome.

When the main shaft 1 is rotated at a high speed, the eccentric rollers 9b, 9b are temporarily separated from the receiving seat 9c by the inertial force due to the inertia force and lose the rolling force of the spring 3, and the eccentric rollers 9b, 9b are impacted by a large impact upon landing. Wear of 9b, 9b and seat 9c progresses.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a polishing apparatus which can adjust a vertical movement amount of a main shaft and can adjust a moving period thereof without being restricted by a rotation speed of the main shaft. And

Another object of the present invention is to provide a polishing apparatus having a structure capable of manufacturing an inexpensive honing machine based on a drilling machine.

Another object of the present invention is to provide a polishing apparatus having a structure capable of efficiently performing precise polishing of a tapered end face using an automated honing machine.

Another object of the present invention is to provide a polishing apparatus that can easily repair or replace a vibrator.

Another object of the present invention is to provide a polishing apparatus in which bearings in a housing have less wear.

Another object of the present invention is to provide a polishing apparatus in which the vibrator is less worn due to inertial force.

[0021]

A first polishing apparatus according to the present invention comprises a vertical cylinder, a housing reciprocally driven in the axial direction, and a rotatable and axially movable housing in the housing. Mainly supported and holds the polishing tool below, and a main shaft urged by a spring downward, a main shaft rotation motor that rotates the main shaft around the center axis, and holds the material to be polished below the main shaft. A chuck for rotating the material to be polished, two arms extending to both sides from the main shaft, moving up and down with the main shaft, and having their base ends connected to the main shaft so as not to rotate with the main shaft, and both sides of the housing. Two that are externally attached and extend to both sides from the main shaft in the housing
And two types of external vibrators capable of moving each tip end of the arm upward periodically and adjusting the movement period and the amount of movement.

Two types of external vibrators are provided on both sides of the housing, and each can be linked to two arms extending from the main shaft to both sides.

The first external vibrator is mounted eccentrically on the rotating shaft, the amount of eccentricity is adjusted,
Eccentric disk with a tapered outer surface, a free roller attached to the tip of the arm so as to contact the outer surface of the eccentric disk at a substantially right angle, and a variable speed vibration for driving the rotating shaft And a motor.

The second external vibrator is a cylinder that allows a rod to abut on the distal end of the arm via a wedge surface to adjust the movement cycle and movement stroke of the rod.

The third external vibrator is rotatably supported at a central portion, and its supporting point is adjusted in position, and a swing lever having one end connected to the tip of the arm; and a swing lever. And a variable speed crank motor for driving the other end of the motor up and down.

A second polishing apparatus according to the present invention comprises a vertical cylinder, a housing reciprocally driven in the axial direction, and a rotatably and axially movable housing supported in the housing, and A main shaft urged by a spring downward, a main shaft rotating motor for rotating the main shaft around a central axis, and a polishing material held below the main shaft, And a tilt ring which is provided on the spindle push-up ring attached to the lower end of the housing and is inclined to support the spindle from below.

The inclination ring is preferably configured so that the inclination angle can be adjusted from the outside by a screw provided on the spindle lifting ring.

[0028]

In the first polishing apparatus of the present invention, the main shaft is rotationally driven by the main shaft rotating motor, while the main shaft is rotated on both sides from the main shaft.
The two arms extending to the main shaft are periodically driven upward by an external vibrator, so that the main shaft moves up and down. Therefore, the main shaft moves up and down without being restricted by its rotation, and the period and the amount of movement of the up and down motion are adjusted arbitrarily. When the vibrator is built in the housing, it is difficult to independently move the main shaft up and down without being restrained by the rotation of the main shaft.However, by externally attaching the vibrator, the independent motion of the main shaft becomes easy, Adjustment of the period of vertical movement and the amount of movement can also be easily performed. External vibrators are not only easy to repair and replace,
The housing is made thinner, and there is no possibility that iron powder generated in the vibrator may enter the housing.

The external vibrator is provided with two on each side of the housing, so we are to cooperate in the two arms extending on both sides from the spindle, respectively, the vertical movement of heterologous to the spindle by a respective external vibrator Can be given.

In the first external vibrator, the free roller rises and descends along the tapered outer peripheral surface of the eccentric disk when the eccentric disk is rotationally driven by the vibration motor. By being transmitted to the main shaft via the arm, the main shaft moves up and down. The vertical movement period of the main shaft is adjusted by changing the speed of the vibration motor, and the vertical movement amount is adjusted by changing the eccentric amount of the eccentric disk. If the inclination of the outer peripheral surface of the eccentric disk is made gentle, the phenomenon that the free roller separates from the eccentric disk due to inertial force can be suppressed.

In the second external vibrator, the main shaft moves up and down as the cylinder rod moves forward and backward. The vertical movement period of the main shaft is adjusted by changing the rod movement period, and the vertical movement amount is adjusted by changing the rod movement stroke.

In the third external vibrator, the main shaft moves up and down by operating the swing lever by the crank motor. The cycle of the vertical movement of the main shaft is adjusted by changing the speed of the crank motor, and the amount of vertical movement is adjusted by changing the position of the support point on the swing lever.

In the second polishing apparatus of the present invention, the main shaft, which is point-supported by the inclined ring, rotates, so that the main shaft moves up and down. The inclined ring is provided on the spindle push-up ring attached to the lower end of the housing, and is inclined, and is configured to point-support the spindle from below, so that the housing is not thickened.

When the tilt ring is configured so that the tilt angle can be adjusted from the outside by a screw provided on the spindle lifting ring, the amount of vertical movement of the spindle can be easily adjusted by adjusting the tilt angle.

[0035]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 2 is a front view of a polishing apparatus showing one embodiment of the present invention, FIG. 3 is a side view of the polishing apparatus, FIG. 4 is a vertical front view of a head showing a spindle drive mechanism, and FIG. FIG.

This polishing apparatus is the first polishing apparatus of the present invention, and is equipped with a first external vibrator and a second vibrator as vibrators, so that it can be used as a honing machine and a tapered end face polishing apparatus. Has become.
That is, the single polishing apparatus can perform the precision polishing of the inner surface of the round hole and the precision polishing of the tapered end surface.

In this polishing apparatus, as shown in FIGS. 2 and 3, a column 11 is erected on a gantry 10, and a chuck 12 is disposed in front of the column 11. The chuck 12 clamps the material to be polished from the surroundings, and is rotated around a vertical line by a motor 19. Chuck 1
An XY table 13 is provided between 2 and the gantry 10. The XY table 13 drives the chuck 12 in the horizontal direction, and even when a round hole or the like is not located at the center of the material to be polished, the round hole or the like can be easily guided directly below the head 14 described later.

A head 14 is provided above the chuck 12. The head 14 is supported by an LM guide 17 vertically attached to the front surface of the column 11 so as to be able to move up and down, and is moved up and down by rotation of a ball screw 15 provided vertically along the front surface of the column 11. The rotation of the ball screw 15 is
1 is performed by a motor provided in the upper end portion. That is, the rotation of the motor in the upper end of the column 11 is transmitted to the ball screw 15 via the pulley and the belt.

A pulse encoder 18 is connected to the upper end of the ball screw 15. The pulse encoder 18 detects the rotation of the ball screw 15 and supplies the rotation to the control device to control the elevation of the head 14.

As shown in FIG. 4, the main components of the head 14 are a cylindrical housing 20 extending vertically,
A main shaft 21 provided concentrically within the housing 20. The main shaft 21 is rotatably supported by a plurality of bearings 22 and 23 provided in a housing 20.
It is supported movably in the axial direction. A spindle push-up ring 24 that supports the spindle 21 from below is screwed into the lower end of the housing 20.

Above the spindle 21, a spindle rotation motor 25 is provided.
Is provided. The main shaft rotation motor 25 is concentrically attached to the upper end of the housing 20 with the output shaft facing downward. The output shaft of the spindle rotation motor 25 is connected to the upper end of the spindle 21 via a coupling 26. The coupling 26 has a structure that does not hinder the axial movement of the main shaft 21.
A spring 27 for urging the main shaft 21 downward is interposed.

At the lower end of the main shaft 21, a holder 29 for holding a tool 30 is mounted concentrically.

A pair of left and right arms 31 and 32 extending horizontally to both sides are attached to an intermediate portion of the main shaft 21.
The arms 31 and 32 are inserted into through holes 33 and 34 provided on both sides of the housing 20, and the tip of one arm 31 projects outside the housing 20. Arm 3
1 and 32 are connected to the main shaft 2 via bearings 35.
1 connected. Above the bearing 35, another bearing 36 for locking the bearing 35 is provided. Due to these bearings, the rotation of the main shaft 21 is not transmitted to the arms 31 and 32, and when the arms 31 and 32 move up, the main shaft 21 rises against the urging force of the spring 27.

A first external vibrator 38 is mounted on one side of the housing 20. The first external vibrator 38 is used for precision polishing of the inner surface of the round hole, and has a vertically supported rotating shaft 39.
The rotating shaft 39 is driven to rotate by a variable speed vibration motor 40 provided above the rotating shaft 39. Rotating shaft 39
An eccentric disk 41 is bolted to the lower end of the. As shown in FIG. 5, the center of the eccentric disk 41 is eccentric with respect to the center of the rotating shaft 39, and the amount of eccentricity is determined by loosening the mounting bolt 42 and setting the elongated hole 43 formed in the eccentric disk 41. Is adjusted arbitrarily by moving the eccentric disk 41 in the radial direction along the axis.

The outer peripheral surface of the eccentric disk 41 is a tapered surface whose outer diameter decreases upward. A free roller 44 is attached to the tip of one arm 31 at an angle so as to abut at right angles to the outer peripheral surface of the eccentric disk 41.

A second external vibrator 45 is attached to the other side of the housing 20. The second external vibrator 45 is a horizontal air cylinder 46 having the piston rod 47 directed toward the main shaft 21, and is used for precision polishing of the tapered end surface. Piston rod 47
Is inserted into the housing 20 through the through-hole 34 so that the distal end faces the arm 32. The upper surface of the distal end of the piston rod 47 is a wedge surface inclined downward toward the distal end, and the lower surface of the distal end of the arm 32 is a wedge surface corresponding to the wedge surface and is inclined upward toward the distal end. .

The operation cycle and operation stroke of the air cylinder 46 are arbitrarily adjusted.

In the upper end of the housing 20, two sensors 51 and 52 are provided vertically. The sensors 51 and 52 detect the approach of the upper end of the main shaft 21 by contact or non-contact.
1 is detected, and is used for precision polishing of the inner surface of the round hole and precision polishing of the tapered end surface. Lower stage sensor 52
Is for detecting that the tool 30 held below the main shaft 21 has come into contact with the material to be polished, and is used exclusively for precision polishing of the tapered end surface.

The polishing apparatus having the above-described structure can perform the precision polishing of the inner surface of the round hole and the precision polishing of the tapered end surface.

When performing the precision polishing of the inner surface of the round hole, first,
The corresponding tool 30 is mounted on the holder 29. The workpiece is held by the chuck 12 directly below the main shaft 21. Next, the head 14 is lowered, and the tool 30 is inserted into the round hole of the workpiece. Then, while rotating the chuck 12, the main shaft rotating motor 25 and the vibration motor 40 in the first external vibrator 38 are rotated.
Activate

By the rotation of the spindle rotation motor 25, the rotation is transmitted to the spindle 21 via the coupling 26,
The main shaft 21 rotates. Further, the rotation of the vibration motor 40 causes the rotation shaft 39 to rotate, the eccentric disk 41 to rotate around its center, and the free roller 44 abutting on the outer peripheral surface of the eccentric disk 41 to rotate the eccentric disk 41. It rotates with rotation.

Here, the center of the eccentric disk 41 is
9, the diameter from the center of rotation of the eccentric disk 41 to the outer peripheral surface is unequal. In the step where the largest diameter portion approaches the free roller 44, the free roller 44 rises along the inclination of the outer peripheral surface of the eccentric disk 41, and in the step where the smallest diameter portion approaches the free roller 44, Descends along the inclination of the outer peripheral surface of the eccentric disk 41. Therefore, the arm 31 moves up and down with the rotation of the eccentric disk 41, and the main shaft 21 moves up and down.

In this state, the head 14 is gradually lowered,
The tool 30 is inserted deeper into the round hole of the workpiece. Thereby, the inner surface of the round hole is precisely polished by the rotational motion and the vertical motion of the tool 30.

The cycle of the vertical movement of the main shaft 21 is adjusted independently of the rotation of the main shaft 21 by changing the rotation speed of the vibration motor 40. Similarly, the amount of vertical movement is adjusted independently of the rotation of the main shaft 21 by changing the amount of eccentricity of the eccentric disk 41 with respect to the center of rotation. Therefore, the vertical movement amount of the main shaft 21 is reduced to shorten the moving period, or the vertical movement amount of the main shaft 21 is increased,
Operations required for high-precision polishing, such as lengthening the moving cycle, can be performed, and polishing with much higher precision than before can be performed.

If the inclination of the outer peripheral surface of the eccentric disk 41 is made gentle, the upward inertial force of the free roller 44 is reduced, and even when the eccentric disk 41 rotates at high speed, the free roller 44 is not eccentric. The phenomenon of separation from the plate 41 can be suppressed, and the impact at the time of landing is eliminated. Therefore, wear due to inertial force is small.

When the first external vibrator 38 is repaired or replaced, the inside of the housing 20 does not need to be disassembled, and these operations are easy.

Further, since there is no possibility that the iron powder generated in the first external vibrator 38 may enter the housing 20, wear of the bearing in the housing 20 can be suppressed.

When a large load is applied to the tool 30,
When the main shaft 21 excessively rises and is detected by the upper sensor 51, the apparatus abnormally stops.

When performing precision polishing of the tapered end surface, first, the corresponding tool 30 is mounted on the holder 29. The workpiece is held by the chuck 12 directly below the spindle 21. Next, the chuck 12 is rotated, and the spindle rotation motor 25 is operated. By the rotation of the main shaft rotation motor 25, the rotation is transmitted to the main shaft 21 via the coupling 26, and the main shaft 21 rotates. Then, the head 14 is lowered in this state.

When the tool 30 hits the workpiece, the spindle 21
Slightly rises, and this is detected by the lower sensor 52. At this time, the height of the head 14 is stored, and the air cylinder 46 as the second external vibrator 45 starts operating, and the head 14 descends until a predetermined cutting depth is obtained.

The operation of the air cylinder 46 causes the piston rod 47 to move forward and backward, and the arm 32 is periodically pushed upward. Thereby, the main shaft 21 moves up and down. At this time, the period of the vertical movement of the main shaft 21 is adjusted by changing the movement period of the piston rod 47. Further, by changing the movement stroke of the piston rod 47, the vertical movement amount of the main shaft 21 is adjusted. In particular, since the air cylinder 46 can move the tool 30 up and down in a long cycle, it is suitable for precision polishing of the tapered end surface. Therefore, precise polishing of the tapered end surface can be efficiently performed by using an automated honing machine.

Further, when repairing or replacing the second external vibrator 45, it is not necessary to disassemble the inside of the housing 20, and these operations are easy.

Since there is no possibility that the iron powder generated in the second external vibrator 45 will enter the housing 20, wear of the bearings in the housing 20 can be suppressed.

When a large load is applied to the tool 30,
When the main shaft 21 excessively rises and is detected by the upper sensor 51, the apparatus abnormally stops.

FIG. 6 is a front view showing a configuration example of the third external vibrator. This external vibrator 55
The swing lever 56 is provided on the side of the housing 20. The swing lever 56 is rotatably supported at the center by a support member 57 so that the support point can be moved in the longitudinal direction. The support member 57 includes the housing 2
The support position is adjusted by the rotation of the screw 58 while being supported by a horizontal screw 58 provided on the side of the zero.

One end of the swing lever 56 is connected to the housing 2
The arm 31 is rotatably connected to the distal end of the arm 31 that protrudes to the side. The other end is connected to a crank pin of a crank motor 59 provided on a side of the housing 20.

When the crank motor 59 is operated, the swing lever 56 swings about the center support point. Thereby, the arm 31 moves up and down, and the main shaft in the housing 20 moves up and down. Here, when the speed of the crank motor 59 is changed, the period of the vertical movement of the main shaft is adjusted. When the screw 58 is rotated to move the support member 57, the position of the support point of the swing lever 56 is changed, and the amount of vertical movement of the main shaft is adjusted.

Since the external vibrator 55 connects one end of the swing lever 56 to the tip of the arm 31,
There is no separation phenomenon due to inertial force, and there is little wear due to inertial force.

Further, when repairing or replacing the external vibrator 55, it is not necessary to disassemble the inside of the housing 20, and these operations are easy.

Further, since there is no possibility that the iron powder generated in the external vibrator 55 may enter the housing 20, wear of the bearings in the housing 20 can be suppressed.

FIG. 7 is a vertical sectional front view showing the structure of the main part of an example of the second polishing apparatus of the present invention.

This polishing apparatus is equipped with an inclined ring 60 as a vibrator. The inclined ring 60 is inclined and fitted to the lower end of the main shaft 21 in the housing 20, and is screwed into the lower end of the housing 20.
4 from below. Spindle lifting ring 2
4, a vertical screw 61 is screwed through to tilt the tilt ring 60 and adjust its tilt angle. The lower end of the main shaft 21 is point-supported by bringing a downwardly protruding hemispherical support portion 62 into contact with the upper surface of the inclined ring 60. The structure other than the vibrator is basically the same as the above-described polishing apparatus.

When the main shaft 21 rotates, the support portion 62 moves up and down along the inclination of the upper surface of the inclined ring 60,
The main shaft 21 moves up and down. When the inclination angle of the inclination ring 60 is changed, the vertical movement amount of the main shaft 21 is adjusted. This adjustment can be easily performed from outside the housing 20.
However, the moving cycle of the vertical movement of the main shaft 21 is restricted by the rotation of the main shaft 21. However, the inclined ring 60 does not make the housing 20 thick, so that the vibrator
Despite being built in, it enables the production of inexpensive honing machines based on drilling machines.

The first polishing apparatus and the second polishing apparatus of the present invention are not limited to the above embodiment. For example, the spring 27 for urging the main shaft 21 downward is, as shown in FIG.
It can be inserted as a power transmission member between the output shaft 63 of the main shaft rotating motor 25 and the main shaft 21, and the configuration can be simplified by eliminating the coupling.

[0075]

As described above, the first polishing apparatus of the present invention uses an external vibrator to arbitrarily adjust the period and amount of vertical movement of the main shaft without being restricted by the rotation of the main shaft. Therefore, it is possible to perform operations required for high-accuracy polishing, such as reducing the amount of vertical movement of the spindle and shortening the movement cycle, or increasing the amount of vertical movement of the spindle and increasing the movement cycle. Enables high precision polishing. Since the tool can be moved up and down in a long cycle,
The precision polishing of the tapered end face can be efficiently performed by using an automated honing machine. Since the housing can be made thin, an inexpensive honing machine based on a drilling machine can be manufactured. Repair and replacement of the vibrator is easy. Since there is no possibility that iron powder generated in the vibrator may enter the housing, wear of bearings in the housing is small.

When two types of external vibrators are provided on both sides of the housing, and each is linked to two arms extending from the main shaft to both sides, a method such as precision polishing of the inner surface of the round hole and precision polishing of the tapered end surface can be used. Different polishing processes can be performed.

Since the first external vibrator can suppress the phenomenon that the free roller separates from the eccentric disk due to the inertial force, the wear caused by the inertial force is small.

The second external vibrator can move the tool up and down in a long cycle, so that it is suitable for efficiently performing precise polishing of the tapered end face by using an automated honing machine.

In the third external vibrator, since one end of the swing lever is connected to the tip of the arm, there is no separation phenomenon due to inertial force, and there is little wear due to inertial force.

In the second polishing apparatus of the present invention, the inclined ring for moving the spindle up and down is provided on the spindle push-up ring mounted on the lower end of the housing, and the housing is not thickened. Despite being built-in, a cheap honing machine based on a drilling machine can be manufactured.

When the tilt ring is configured so that the tilt angle can be adjusted from the outside by a screw provided on the spindle lifting ring, there is an effect that the amount of vertical movement of the spindle can be easily adjusted from the outside.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a spindle drive mechanism provided in a conventional polishing apparatus.

FIG. 2 is a front view showing the overall structure of an example of the first polishing apparatus of the present invention.

FIG. 3 is a side view of the polishing apparatus of FIG. 1;

FIG. 4 is a vertical sectional front view of a head showing a spindle drive mechanism.

FIG. 5 is a view taken along line AA of FIG. 4;

FIG. 6 is a front view showing a configuration example of a third external vibrator.

FIG. 7 is a longitudinal sectional front view showing a configuration of a main part of an example of the second polishing apparatus of the present invention.

FIG. 8 is a front view showing a coupling structure between a spindle and a spindle rotating motor.

[Explanation of symbols]

 Reference Signs List 10 base 11 support 14 head 20 housing 21 spindle 24 spindle push-up ring 25 spindle rotation motor 27 spring 30 tool 31, 32 arm 38 first external vibrator 40 vibration motor 41 eccentric disk 44 free roller 45 second External vibrator 46 Air cylinder 47 Piston rod 51, 52 Sensor 55 Third vibrator 56 Swing lever 58 Screw 59 Crank motor 60 Incline ring 61 Screw

Claims (10)

(57) [Claims] (1) A vertical cylindrical body, which extends in the axial direction.
A reciprocatingly driven housing, and a rotating
Is supported movably in the axial direction, and the polishing tool is
And is urged downward by a spring.
A spindle and a spindle rotation mode that rotates the spindle around the center axis.
And the workpiece below the main shaft to hold the material to be polished.
A chuck that rotates the abrasive, and extends to both sides from the spindle,
Move up and down with the spindle and not rotate with the spindle.
Two arms whose base ends are connected to the main shaft, and a housing
On both sides of the housing and extend from the spindle inside the housing to both sides.
The tips of the two arms that have been ejected are periodically moved upward.
The movement period and amount of movement can be adjusted.
Polishing apparatus, comprising: a mounting vibrator.
Place . 2. The external vibrator is eccentric to the rotating shaft.
The eccentricity is adjusted and the outer
Eccentric disk with tapered surface and outer peripheral surface of eccentric disk
Attached to the tip of the arm so that it abuts at a right angle
Free roller and variable speed vibrator that drives the rotating shaft
And a motor for ration.
2. The polishing apparatus according to 1 . 3. An external vibrator is provided at an end of an arm.
The rod is brought into contact via the wedge surface, and the rod is moved.
A cylinder that can adjust the movement cycle and movement stroke.
The polishing apparatus according to claim 1, wherein the polishing apparatus is used . 4. The center of the external vibrator is rotatable.
The support point is adjusted and the support point is adjusted.
A swing lever with its end connected to the tip of the arm, and a swing
Variable speed crankshaft that drives the other end of the lever up and down
2. The polishing apparatus according to claim 1, further comprising:
Place . 5. A vertical cylindrical body, which extends in the axial direction.
A reciprocatingly driven housing, and a rotating
Is supported movably in the axial direction, and the polishing tool is
And is urged downward by a spring.
A spindle and a spindle rotation mode that rotates the spindle around the center axis.
And the workpiece below the main shaft to hold the material to be polished.
A chuck for rotating the abrasive material and the lower end of the housing
Installed on the spindle lifting ring
That comprises an inclined-ring to the point supporting the shaft from below
Characteristic polishing equipment . 6. The tilt ring is provided on a spindle push-up ring.
The angle of inclination can be adjusted externally by the set screw
The polishing apparatus according to claim 5, wherein the polishing is performed . 7. A sensor for detecting an abnormal rise of a spindle.
The method according to any one of claims 1 to 6, wherein
Polishing equipment . 8. The contact between the polishing tool and the workpiece is set on the spindle.
A sensor equipped with a sensor for detecting by ascending
The polishing apparatus according to claim 1 . 9. An XY table is provided on a gantry.
6. The method according to claim 1, wherein
The polishing apparatus according to any one of the above . 10. A spring for urging the main shaft downward,
Power transmission mechanism that transmits the rotation of the spindle rotation motor to the spindle
6. The method according to claim 1, wherein the function also serves as
A polishing apparatus according to claim 1 .