JP2550265Y2 - LSI tester - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-frequency measurement type LSI tester, and more particularly, to a method for measuring a measurement signal by providing a test head as close as possible to a device under test (hereinafter abbreviated as DUT). The present invention relates to an LSI tester with improved quality.

[0002]

2. Description of the Related Art FIG. 5 is an exploded perspective view of a test head of a conventional LSI tester. In the drawing, 10 is a test head, 20 is a performance board for electrically connecting the test head side 10 and the handler side (see FIG. 6), and a roller through hole 21 is provided in the test head 10 side. It is inserted into the working arm 11 and mounted on the contact ring 12. The contact ring 12 has a plurality of contact pins 121 implanted therein and is electrically connected to the pads of the performance board 20. In the drawing, only some of the contact pins 121 are shown. Numeral 30 denotes a circular pressing ring for pressing the performance board 20 against the test head 10, and four tapes are provided at equal intervals along the outer periphery.
A public lock 31 is provided.

The pressing ring 30 is composed of a pressing ring 301 and a rotating ring 302. When the rotating rod 32 is rotated in the θ direction with both hands, only the rotating ring 302 rotates accordingly, and The provided rotary roller 111 climbs on the taper block 31. For this reason, the pressing ring 30 is displaced in the direction of arrow D to push down the performance board 20 and strongly press the pads of the performance board 20 against the contact pins 121 of the test head 10. This ensures that the performance board 20 is electrically connected between the test heads 10.

FIG. 6 is a side view of a main part when the LSI tester shown in FIG. 5 is connected to a handler. In the figure, components having the same functions as those in FIG. The same applies to the following drawings. A handler 40 for supplying a DUT is provided with a test head connection socket 41 connected to the connection socket 22 on the test head 10 side. The handler 40 is connected to the test head 10 by the test head connection socket 41. Since the working arm 11 protrudes more than the height h from the pressing ring, the handler 40 is connected to the connection socket 2 via the relay socket 42 or the like.
2 are connected.

[0005]

[Problem to be Solved by the Invention] Since a relay socket must be provided so as not to hit the handler, the signal path between the test head and the handler becomes longer,
There is a disadvantage that the quality of the measurement signal is reduced.

The present invention has been made in view of such a point, and it is possible to shorten the connection distance between the performance board and the handler to maintain the signal quality and measure the LSI with high accuracy. It is intended to provide an LSI tester.

[0007]

A performance board to be exchanged according to a device under test to be measured is pressed against a contact pin of a test head and fixed, and a test board mounted on the performance board is fixed. An LSI tester for inspecting a target device, wherein the LSI tester is rotatably attached to a contact ring provided with the contact pins, and an L-shaped groove having an open upper end is formed on a peripheral surface thereof. A rotating ring in which the horizontal line portion of the character is an inclined groove, and a tip of an arm mounted on the performance board and extending toward the test head at a position not overlapping with the device under test. A fixing ring having an engaging portion that engages with the inclined groove, the engaging portion is inserted into the L-shaped groove, and the rotating ring is rotated. Press down the engaging portion along the inclined groove, said by the fixing ring Paphos - Mansubo -
The contact is pressed against the contact pin and fixed.

[0008]

The components of the present invention operate as follows. The rotating ring is rotatably mounted on a contact ring of the test head. The fixing ring is provided mounted on the performance board, and presses the performance board against the contact pin by rotation of the rotating ring.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings. FIG. 1 is an exploded perspective view showing an embodiment of a test head section of an LSI tester according to the present invention. In the figure, reference numeral 50 denotes a rotary ring, and the elongated hole 51 is fitted and attached to four guide shafts 122 provided on the outer periphery of the contact ring 12. The rotating ring 50
When the handle 52 integrated with the rotating ring 50 is moved to the fixed position F, the elongated hole 51 is inserted into the guide shaft 12.
2 and rotate along the outer circumference of the contact ring 12.

On the contact ring 12 to which the rotating ring 50 is attached, the performance board 20 is mounted, and further, the performance board fixing ring 60 is mounted. The performance board 20 is provided with a positioning pin 1 for the contact ring 12 so that the positioning between the wiring pad (not shown) and the contact pin 121 can be easily performed.
A hole 22 is provided for positioning to be fitted into 23. The performance board fixing ring 60 is provided with an arm 62 at four positions of a ring 61, and a rotating roller 621 is attached to a tip of the arm 62.

Reference numeral 53 denotes an L-shaped groove (hereinafter abbreviated as an L-shaped groove) having an opening 531 on the upper end side of the peripheral surface of the rotating ring 50, and the rotating roller 621 of the arm 62 is used as a performance bore. And is inserted from the opening 531 through the roller through hole 21 of the base 20 and attached. When the handle is moved from the release position E to the fixed position F, the rotary ring 50 rotates, and the L-shaped groove 53 moves the rotary roller 621 in the direction of arrow D by the inclined groove 532 provided in the circumferential direction. Push down. Therefore, the performance board fixing ring 60
Is displaced downward, and strongly presses the performance board 20 against the contact pin 121.

FIG. 2 is a sectional view taken along the line AA 'of FIG. 1. FIG. 3 is a structural view of a main part of FIG.
FIG. 2 is a main part configuration diagram viewed from a direction b. Rotating ring 5
0 is inserted into the guide shaft 122 through an opening 511 provided below the long hole 51, and the contact ring 12
Attached to. The rotating ring 50 has a long hole distance r1.
Is in the rotation range, and is rotated by moving the handle between the release position E and the fixed position F. L-shaped groove 5
3 is provided with an inclined groove 532 at a distance r2 downward from the opening 531 side, and a horizontal portion 533 at a distance r3 at the tip side.

The rotating roller 6 inserted through the opening 531
21 is pulled down by a distance d along the inclined groove 532 when the rotating ring 50 is rotated.
Fixed at. At this time, since the performance board 20 and the performance board fixing ring 60 are pushed up in the direction of arrow U by the spring force of the contact pin 121, the rotating roller 621 is stably held at this position. Fixed. The arm 62 and the rotary roller 621 indicated by broken lines in FIG. 4 are for the case where the handle 52 has been moved to the fixed position F, and are shown as being moved in the lateral direction in the figure. Actually, it stays at the mounting position B and only displaces downward by the distance d.

Next, an assembling method and operation of the above configuration will be described. First, the rotating ring 50 is connected to four guide shafts 171 provided on the outer circumference of the contact ring 12.
And fit it into Next, the holes 22 for positioning the performance board 20 are inserted into the positioning pins 123 of the contact ring 12. The performance board 20 is formed such that the holes 22 and the positioning pins 123 are aligned with each other so that the pads and the contact pins 12 are formed.
1 is correctly aligned. After the performance board 20 is mounted on the contact ring 12, the performance board fixing ring 60 is moved to the performance board 2.
The opening 531 of the long hole 53 through the 0 roller through hole 21
And is attached to the rotating ring 50. At this time, the position of the handle 52 of the rotating ring 50 is at the release position E.

Holding each handle 52 with both hands,
Move the handle to the fixed position F. The movement of the handle 52 causes the rotation ring 50 to move the contact ring 12
, And the rotating roller 621 engaged with the L-shaped groove 53 is displaced downward by the distance d along the inclined groove 532. With the displacement of the rotary roller 621, the performance
The Month fixed ring 60 is displaced by the same distance d. For this reason, the performance board 20 is strongly pressed against the contact pins 121 of the contact ring 12. At this time, the rotary roller 50 is stably fixed by the horizontal portion 533 because the performance board 20 is always lifted by the spring force of the contact pin 121.

Next, the removal of the performance board will be described. The handle 52 is moved from the fixed position F to the release position E. With the movement of the handle 52,
The rotating ring 50 rotates along the contact ring 12, and the rotating roller 621 is displaced upward along the inclined groove 532 by a distance d. When the handler 52 reaches the release position E, the rotating roller 621 can be removed from the opening 531 and the performance fixing ring 60
It is lifted up and removed from the rotating ring 50. The performance board 20 is removed from the positioning pin 122 after the performance fixing ring 60 is removed. The rotating ring 50 does not need to be removed from the contact ring 12 each time the performance board 20 is replaced, and need only be removed during maintenance.

[0017]

[Effect of the Invention] As described in detail above, the L of the present invention
The SI tester is designed so that the performance board is pulled in from below and pressed against the contact pins in order to connect directly to the socket for connection of the performance board and the socket for connection of the test head of the handler. It is. For this reason, the signal path between the test head and the DUT can be shortened, and LS can be performed with high accuracy without deteriorating the quality of the measurement signal.
I can be measured.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a test head unit of an LSI tester according to the present invention.

FIG. 2 is a sectional view taken along the line AA ′ of FIG.

FIG. 3 is a main part configuration diagram of FIG. 2 as viewed from a direction a.

FIG. 4 is a main part configuration diagram of FIG. 2 viewed from a direction b.

FIG. 5 is an exploded perspective view of a test head of a conventional LSI tester.

FIG. 6 is a side view of a main part when the LSI tester shown in FIG. 5 is connected to a handler.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Test head 20 Performance board 50 Rotating ring 53 L-shaped groove 531 Inclined groove 60 Performance board fixing ring 62 Arm 621 Rotating roller

Claims (1)

(57) [Scope of request for utility model registration] 1. A device to be inspected mounted on a performance board is fixed by pressing a performance board replaced according to a device under test to be measured against a contact pin of a test head. In an LSI tester, an L-shaped groove is formed rotatably with respect to a contact ring provided with the contact pin, and has an L-shaped groove with an open upper end formed on the peripheral surface. A rotating ring which is a groove, and a tip of an arm which is mounted on the performance board at a position not overlapping with the device to be inspected and extends toward the test head; And a fixing ring having an engaging portion that fits into the groove. The engaging portion is inserted into the L-shaped groove, and the rotating ring is rotated. An LSI tester characterized in that the engagement portion is pushed down to press the performance board against the contact pin with the fixing ring.