JP2542724B2 - Sheet electrostatic adsorption method - Google Patents

Sheet electrostatic adsorption method

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Publication number
JP2542724B2
JP2542724B2 JP2116506A JP11650690A JP2542724B2 JP 2542724 B2 JP2542724 B2 JP 2542724B2 JP 2116506 A JP2116506 A JP 2116506A JP 11650690 A JP11650690 A JP 11650690A JP 2542724 B2 JP2542724 B2 JP 2542724B2
Authority
JP
Japan
Prior art keywords
sheet
adsorption
layer
adsorbed
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2116506A
Other languages
Japanese (ja)
Other versions
JPH0412683A (en
Inventor
敬次 笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Abisare Co Ltd
Original Assignee
Abisare Co Ltd
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Filing date
Publication date
Application filed by Abisare Co Ltd filed Critical Abisare Co Ltd
Priority to JP2116506A priority Critical patent/JP2542724B2/en
Publication of JPH0412683A publication Critical patent/JPH0412683A/en
Application granted granted Critical
Publication of JP2542724B2 publication Critical patent/JP2542724B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、例えばオーバーヘッドプロジェクタ等にお
ける原稿、或は掲示用の各種文書類やポスター類を透明
もしくは不透明の担体に保持するための静電吸着板、を
用いてのシート静電吸着方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to electrostatic attraction for holding a manuscript in an overhead projector or the like, or various documents or posters for posting on a transparent or opaque carrier. The present invention relates to a method for electrostatically attracting a sheet using a plate.

(従来の技術) 近年、ワードプロセッサやパーソナルコンピュータの
高級機化が進み、その印字出力についても高精細化する
に伴ってシート状記録媒体はますます薄くなると共に、
カラー記録も普及しつつある。
(Prior Art) In recent years, high-definition word processors and personal computers have advanced, and the print output has become finer, the sheet-shaped recording medium has become thinner and thinner.
Color recording is becoming popular.

ところが、そのような高精細な記録を施された薄い媒
体は、それ自体では平坦な形態を保持できず、例えばオ
ーバーヘッドプロジェクタの原稿載置板に載せられたと
き細かい皺がより、映写像が歪むという問題がある。高
精細の文字等においては、この歪みが特に見苦しいもの
となる。このような不具合は例えばショーウィンド等の
透明ガラスに該印字記録、又は手書き文書類を掲示する
場合にも同様に問題である。
However, such a high-definition recorded thin medium cannot hold a flat shape by itself, and for example, when it is placed on the original plate of an overhead projector, fine wrinkles cause more distortion of the projected image. There is a problem. This distortion is particularly unsightly for high-definition characters and the like. Such a problem is also a problem when, for example, the print record or handwritten document is posted on a transparent glass such as a show window.

しかしながら、極めて薄いシートないしはフィルム状
の記録媒体や掲示媒体を皺や波うちのない平坦な姿勢で
保持するための支持体、として効果的かつ実用的なもの
は今だ需要家に提供されていない現状である。
However, an effective and practical support for holding an extremely thin sheet or film recording medium or a display medium in a flat position without wrinkles or waviness has not yet been provided to consumers. The current situation.

他方、上記の一般的な問題のほか、被吸着物がきわめ
て高い抵抗率、例えば1016Ωcm以上の抵抗率を有するOH
P用ポリエステルフィルムなどは、従来の静電吸着板に
よっては強固に吸着保持することができない。このよう
な傾向は、相当に厚さが大のポリエステルフィルム等を
垂直に静電吸着保持する場合などでは特に重大な問題と
なる。本発明者は、このような被吸着物の種類と静電吸
着力の大きさとの関係を把握するべく、次のようなテス
トを実施した。
On the other hand, in addition to the above general problems, the OH that has a very high resistivity of the substance to be adsorbed, for example, a resistivity of 10 16 Ωcm or more.
Polyester films for P and the like cannot be firmly adsorbed and held by conventional electrostatic adsorption plates. Such a tendency becomes a particularly serious problem when electrostatically holding a polyester film or the like having a considerably large thickness vertically. The inventor conducted the following test in order to understand the relationship between the type of the object to be attracted and the magnitude of the electrostatic attraction force.

即ち、絶縁層と、体積抵抗率が約1011Ωcm以上の吸着
層との間に、一対の櫛歯状電極がその櫛歯部分を接触す
ることなく互いに入り込ませた状態に形成されている吸
着板の該吸着層の表面へ、A4サイズの被吸着物の表面を
接当し、前記電極に2600V(ボルト)の直流電圧を印加
し該吸着板へ吸着させた状態のもとに被吸着物を吸着板
から強制的に引剥すに要する力(吸着力)と該状態にお
ける消費電流(μA)(下記表においては単に電流と記
す)を測定したところ、次の第1表の結果を得た。
That is, a pair of comb-teeth-shaped electrodes formed between the insulating layer and the adsorption layer having a volume resistivity of about 10 11 Ωcm or more are formed in such a state that the comb-teeth-shaped electrodes are inserted into each other without contacting each other. The surface of the adsorption layer of the plate is brought into contact with the surface of the A4 size object to be adsorbed, and a direct current voltage of 2600 V (volt) is applied to the electrode to adsorb the object to be adsorbed on the adsorption plate. The force required for forcibly peeling off the adsorbent (adsorption force) and the current consumption (μA) in this state (simply referred to as current in the table below) were measured, and the results shown in Table 1 below were obtained. .

第1表において「導電フィルム」とはポリエステルフ
ィルムに四塩化インジウムを蒸着したもの、「絶縁フィ
ルム」とは厚さ300μmの未加工ポリエステルフィル
ム、「アルミ板」の厚さは1mm、「銅板」の厚さは35μ
mとした。
In Table 1, "conductive film" is a polyester film with indium tetrachloride vapor-deposited, "insulating film" is a raw polyester film with a thickness of 300 µm, "aluminum plate" has a thickness of 1 mm, and "copper plate" Thickness is 35μ
m.

第1表に明らかなように、OHPフィルムに代表される
ような絶縁フィルムに対しては静電吸着作用が極めて弱
く殆ど吸着不可能に近い。この問題を従来法により解決
するには、極めて薄い、例えば25〜50μm程度の透明な
吸着板を使用するか、或は普通の吸着板に極めて高い、
例えば約10,000ボルトにも達する電圧を印加するといっ
た措置が必要である。しかし、極薄の吸着板では耐久性
が低下し、また高電圧を用いる場合には危険を伴う、等
々の別の問題を派生する。
As is clear from Table 1, the electrostatic adsorption action is extremely weak for an insulating film such as an OHP film, and it is almost impossible to adsorb. To solve this problem by the conventional method, an extremely thin transparent suction plate of, for example, about 25 to 50 μm is used, or an ordinary suction plate is extremely high.
For example, it is necessary to take measures such as applying a voltage of up to about 10,000 volts. However, the ultra-thin suction plate lowers the durability and is dangerous when a high voltage is used, which causes other problems.

(発明が解決しようとする課題) 従って本発明の目的は、上記のような欠点のないシー
ト静電吸着方法を提供することにあり、特に本発明者に
よる試験の結果を集録した上掲第1表に示されている如
き導電性シート状体に対する静電吸着作用の強さを利用
して難吸着性の被吸着物に対する効果的かつ実施容易な
シート吸着方法を提供することにある。
(Problems to be Solved by the Invention) Therefore, an object of the present invention is to provide a sheet electrostatic adsorption method which does not have the above-mentioned drawbacks. An object of the present invention is to provide an effective and easy-to-implement sheet adsorption method for an object to be adsorbed, which is difficult to adsorb, by utilizing the strength of the electrostatic adsorption action on the electrically conductive sheet-like material as shown in the table.

(課題を解決するための手段) この目的を達成するべく、本発明によるシート静電吸
着方法は、 絶縁層と、体積抵抗率が約1011Ωcm以上の誘電材料よ
り構成されている吸着層との間に一対の櫛歯状電極がそ
の櫛歯部分を互いに接触することなく入り込ませた状態
に形成されてなる吸着板の該吸着層の表面へ被吸着物の
一方の側の表面を接当させ、前記電極に直流電圧を印加
して前記吸着層の表面に静電荷を帯びさせることにより
前記被吸着物を吸着板へ吸着させるシート静電吸着方法
において、 前記被吸着物の他方の側の表面に、抵抗率が約108Ωc
m以下の導電性を有する押えシートを接当させ、前記吸
着層の表面における静電荷に対向する前記押えシートの
部位に、この静電荷とは逆極性の静電荷を誘電生起させ
ることを特徴とするものである。
(Means for Solving the Problem) In order to achieve this object, the sheet electrostatic adsorption method according to the present invention comprises an insulating layer and an adsorption layer composed of a dielectric material having a volume resistivity of about 10 11 Ωcm or more. A pair of comb-teeth-shaped electrodes are formed in such a manner that the comb-teeth portions are inserted without coming into contact with each other, and one surface of the object to be adsorbed is brought into contact with the surface of the adsorption layer of the adsorption plate. Then, in the sheet electrostatic adsorption method for adsorbing the adsorbate to the adsorbing plate by applying a DC voltage to the electrode to impart an electrostatic charge to the surface of the adsorbing layer, the other side of the adsorbent is The surface has a resistivity of about 10 8 Ωc
A pressing sheet having a conductivity of m or less is brought into contact with the surface of the adsorption layer, and a portion of the pressing sheet facing the electrostatic charge causes a static charge having a polarity opposite to that of the static charge to be dielectrically generated. To do.

本発明において、吸着板における両電極間つまり隣接
櫛歯状部分間の間隔はmm単位、例えば2mm前後である
が、これら電極と押えシートの導電性表層との間の距離
はμm単位、例えば高々500μm程度であることが肝要
な条件である。
In the present invention, the distance between both electrodes of the suction plate, that is, the distance between the adjacent comb-teeth-shaped portions is in the unit of mm, for example, about 2 mm, but the distance between these electrodes and the conductive surface layer of the holding sheet is in the unit of μm, for example, at most. It is an important condition that the thickness is about 500 μm.

(作 用) 本発明のシート静電吸着方法では、上記のような距離
関係に起因して、1つの正極側電極櫛歯部分Pから隣の
負極側電極櫛歯部分Nへ至る吸着層中または絶縁層中の
直線的電界強度(第1図参照)に比べ、導電性表層Cの
ために櫛歯部分Pから該部分に対向した前記導電性表層
Cの部位C1へ至り該表層C中を進んで櫛歯部分Nに対向
した部位C2から櫛歯部分Nへ帰還する弧状の電界強度の
ほうが遥かに強くなる。
(Operation) In the sheet electrostatic adsorption method of the present invention, due to the distance relationship as described above, in the adsorption layer from one positive electrode side electrode comb tooth portion P to the adjacent negative electrode side electrode comb tooth portion N or Compared to the linear electric field strength in the insulating layer (see FIG. 1), the conductive surface layer C leads to the portion C1 of the conductive surface layer C facing the portion from the comb tooth portion P and proceeds in the surface layer C. Thus, the arc-shaped electric field strength returning from the portion C2 facing the comb tooth portion N to the comb tooth portion N becomes much stronger.

したがって、この弧状電界線上の上記部位C1,C2に接
する個所の被吸着物の部位には分極による強い静電荷を
生じ、吸着力が大になるものと考えられる。
Therefore, it is considered that a strong electrostatic charge due to polarization is generated in the part of the object to be adsorbed at the position on the arc-shaped electric field line which is in contact with the parts C1 and C2, and the adsorption force becomes large.

(発明の効果) 本発明によれば、以上に記した如く、被吸着物を吸着
板との間で挟持する押えシートとして導電性の表層を設
けたものを使用するという簡潔な構成をもって、従来は
吸着困難又は不十分であった完全絶縁性のポリエステル
フィルム(例えばOHPフィルム)や厚手のポスター類を
も確実に吸着できることになった。
(Effects of the Invention) According to the present invention, as described above, the pressing sheet having the electrically conductive surface layer is used as the pressing sheet for sandwiching the object to be adsorbed between the adsorption plate and the conventional structure. Was able to reliably adsorb completely insulating polyester films (eg OHP films) and thick posters that were difficult or insufficient to adsorb.

(実施例) 次に、本発明によるシート吸着方法の具体的実施例に
つき、図面を参照しつつ説明する。
(Example) Next, a specific example of the sheet adsorption method according to the present invention will be described with reference to the drawings.

第1図に示されるように、本実施例では、平坦な基板
(10)の上に、絶縁層(22)と吸着層(26)とが正・負
一対の電極(24a)(24b)(図では櫛歯部分を1つずつ
示す)を挟んだ構造の吸着板(20)を載置し、電源(1
2)からはコネクタ(14)を介して該電極へ2600Vの直流
電圧を印加可能に装置を構成した。吸着層(26)の抵抗
率は約1013Ωcmであった。被吸着物(40)としては、例
えばOHP用の絶縁性のポリエステルフィルムを用い、こ
の被吸着物(40)を押えシート(50)により吸着板(2
0)との間に挟圧させた。押えシート(50)の表面に形
成した導電性の表層(50a)は108Ωcm以下、例えば約10
3Ωcm程度の抵抗率を有し、予め四塩化インジウムをベ
ースフィルム面へ蒸着したものである。この場合に、吸
着層(26)と押えシート(50)の対向部位に夫々逆極性
の強い静電荷が発生して吸引し合うので、両者間に挟持
された被吸着物(40)は高度の絶縁性であるにも拘らず
吸着板(20)により保持されることになる。印加電圧を
2600Vとして被吸着物(40)を吸着させ、バネ秤により
図の矢印(W)方向へ引張って剥離に要する力を測定し
たところ、吸着力は約3Kg強であった。尚、比較のため
押えシートとして抵抗率約1016Ωcmのものを用いたとこ
ろ、引き剥しに要する力は約1Kg弱という不十分さであ
った。
As shown in FIG. 1, in this embodiment, an insulating layer (22) and an adsorption layer (26) are a pair of positive and negative electrodes (24a) (24b) (on a flat substrate (10). In the figure, the suction plate (20) with sandwiching the comb teeth is placed, and the power supply (1
From 2), a device was constructed so that a DC voltage of 2600V could be applied to the electrode via a connector (14). The resistivity of the adsorption layer (26) was about 10 13 Ωcm. An insulating polyester film for OHP, for example, is used as the object to be adsorbed (40), and the object to be adsorbed (40) is held by the holding sheet (50) to the adsorption plate (2).
It was pinched between 0). The conductive surface layer (50a) formed on the surface of the presser sheet (50) is 10 8 Ωcm or less, for example, about 10
It has a resistivity of about 3 Ωcm and indium tetrachloride is previously vapor-deposited on the surface of the base film. In this case, since strong electrostatic charges having opposite polarities are generated at the opposing portions of the adsorption layer (26) and the pressing sheet (50) to attract each other, the object to be adsorbed (40) sandwiched between the two is highly advanced. Even though it is insulating, it is held by the suction plate (20). Applied voltage
When the object to be adsorbed (40) was adsorbed at 2600 V and the force required for peeling was measured by pulling in the direction of the arrow (W) in the figure with a spring balance, the adsorbing force was about 3 Kg or more. For comparison, when a presser sheet having a resistivity of about 10 16 Ωcm was used, the force required for peeling off was insufficient at about 1 kg.

以上の測定結果は、前記導電性表層(C)のために櫛
歯部分が(P,24a)から該部分に対向した導電性表層
(C,50a)の部位(C1)へ至り該表層(C)中を進んで
櫛歯部分(N,24b)に対向した部位(C2)から櫛歯部分
(N)へ帰還する弧状の電界強度が他の方向の電界強度
よりも遥かに強くなり、これら部位(C1,C2)において
強い静電荷を生じていることを示唆している。そして被
吸着物に導電性の表層(50a)を設けない比較例、およ
び吸着層(26)の表面を導電性とした比較例にあって
は、電界線が被吸着物の中を殆ど通らず、従って被吸着
物中に静電荷を生じないことが吸着力の弱さをもたらし
ていると考えられる。
The above measurement results show that, due to the conductive surface layer (C), the comb-teeth part reaches from the (P, 24a) to the part (C1) of the conductive surface layer (C, 50a) facing the part and the surface layer (C ), The arc-shaped electric field strength returning from the part (C2) facing the comb tooth part (N, 24b) to the comb tooth part (N) becomes much stronger than the electric field strength in the other direction, and these parts This suggests that a strong electrostatic charge is generated at (C1, C2). And in the comparative example in which the conductive surface layer (50a) is not provided on the adsorbed material and the comparative example in which the surface of the adsorption layer (26) is electrically conductive, the electric field lines hardly pass through the adsorbed material. Therefore, it is considered that the fact that no electrostatic charge is generated in the substance to be adsorbed causes a weak adsorption force.

本実施例のシート吸着方法はOHPフィルムの吸着のみ
ならず、種々の用途に供することができる。例えば、シ
ョーウィンドウのガラス(本実施例における基板に相
当)に透明の吸着板(20)を取付け、該板面と透明の導
電性押えシート(50)との間に標識や表示媒体としての
切り文字や図柄などを挟み、吸着板へ直流電圧を印加す
れば該標識等を着脱容易に保持でき、そのデザイン変更
の際には従来よりも簡単に対処できるから便利である。
尚、電源としては消費電流が数マイクロアンペア程度で
あるため単1ないし単3の乾電池でもよいが、2000〜30
00Vに昇圧するためのトランスを必要とする。
The sheet adsorption method of this embodiment can be used not only for adsorption of OHP films but also for various purposes. For example, a transparent suction plate (20) is attached to the glass of a show window (corresponding to the substrate in this embodiment), and a label or a display medium is cut between the plate surface and the transparent conductive holding sheet (50). It is convenient because a character or a pattern is sandwiched and a DC voltage is applied to the adsorption plate so that the sign or the like can be easily attached and detached and the design change can be dealt with more easily than before.
It should be noted that as the power supply, since the current consumption is about several microamperes, AA to AA dry batteries may be used, but 2000 to 30
Need a transformer to boost to 00V.

屋内外におけるポスターボードに利用する場合には吸
着板(20)は不透明のものでよいが、押えシート(50)
は透明のものを用いることになる。電装ポスターボード
の場合には、透明吸着板(20)の背面の基板として、光
源からの光線を拡散する透明の光線拡散板を用い、透明
の押えシート(50)との間に光透過性のポスター等を静
電吸着力で保持すればよい。更に、グリットタイプのXY
プロッタにおいて補強シート(残留吸着力利用)を使用
する際に導電性押えシート(50)で被吸着物を覆い静電
吸着させれば、該押えシートを外したのちの残留吸着力
を強くできるので好都合である。
When used as a poster board indoors or outdoors, the suction plate (20) may be opaque, but the holding sheet (50).
Will be transparent. In the case of an electric poster board, a transparent light diffusing plate that diffuses light rays from a light source is used as a substrate on the back of the transparent suction plate (20), and a transparent light diffusion plate is provided between the transparent holding plate (50) and the transparent holding sheet (50). A poster or the like may be held by electrostatic attraction. Furthermore, grit type XY
When a reinforcement sheet (using residual suction force) is used in a plotter, if the object to be attracted is covered with a conductive pressing sheet (50) and electrostatically adsorbed, the residual suction force after removing the pressing sheet can be increased. It is convenient.

以上の本発明方法については、導電性の表層の位置
を、図示した例とは逆に、即ち吸着板(20)から離隔し
た方の押えシート(50)の表面に配置する、等々の改変
を加えることができる。
Regarding the method of the present invention described above, the position of the conductive surface layer is opposite to the illustrated example, that is, it is arranged on the surface of the holding sheet (50) which is separated from the suction plate (20), and the like. Can be added.

【図面の簡単な説明】[Brief description of drawings]

第1図は、本発明の一実施例を示す概略断面図である。 (10)……基板、(20)……吸着板、 (22)……絶縁層、(24a)(24b)……電極、 (26)……吸着層、(40)……被吸着物、 (50a)……導電性の表層、 (50)……押えシート、 FIG. 1 is a schematic sectional view showing an embodiment of the present invention. (10) ... Substrate, (20) ... Suction plate, (22) ... Insulation layer, (24a) (24b) ... Electrode, (26) ... Suction layer, (40) ... Adsorption target, (50a) …… Conductive surface layer, (50) …… Presser sheet,

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】絶縁層と、体積抵抗率が約1011Ωcm以上の
誘電材料より構成されている吸着層との間に一対の櫛歯
状電極がその櫛歯部分を互いに接触することなく入り込
ませた状態に形成されてなる吸着板の該吸着層の表面へ
被吸着物の一方の側の表面を接当させ、前記電極に直流
電圧を印加して前記吸着層の表面に静電荷を帯びさせる
ことにより前記被吸着物を吸着板へ吸着させるシート静
電吸着方法において、 前記被吸着物の他方の側の表面に、抵抗率が約108Ωcm
以下の導電性を有する押えシートを接当させ、前記吸着
層の表面における静電荷に対向する前記押えシートの部
位に、この静電荷とは逆極性の静電荷を誘電生起させる
ことを特徴とするシート静電吸着方法。
1. A pair of comb-teeth-shaped electrodes are inserted between an insulating layer and an adsorption layer made of a dielectric material having a volume resistivity of about 10 11 Ωcm or more without contacting the comb-teeth portions with each other. The surface of one side of the object to be adsorbed is brought into contact with the surface of the adsorbing layer of the adsorbing plate formed in a state of being placed, and a DC voltage is applied to the electrode so that an electrostatic charge is applied to the surface of the adsorbing layer. In the sheet electrostatic adsorption method of adsorbing the adsorbate to the adsorption plate by doing, on the surface of the other side of the adsorbent, the resistivity is about 10 8 Ωcm
It is characterized in that a pressing sheet having the following conductivity is brought into contact with the surface of the adsorption layer, and a static charge having a polarity opposite to that of the static charge is dielectrically generated at a portion of the pressing sheet facing the static charge. Sheet electrostatic adsorption method.
JP2116506A 1990-05-02 1990-05-02 Sheet electrostatic adsorption method Expired - Lifetime JP2542724B2 (en)

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JP2116506A JP2542724B2 (en) 1990-05-02 1990-05-02 Sheet electrostatic adsorption method

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Application Number Priority Date Filing Date Title
JP2116506A JP2542724B2 (en) 1990-05-02 1990-05-02 Sheet electrostatic adsorption method

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JPH0412683A JPH0412683A (en) 1992-01-17
JP2542724B2 true JP2542724B2 (en) 1996-10-09

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2503364B2 (en) * 1992-08-20 1996-06-05 富士通株式会社 Wafer electrostatic chucking device, wafer electrostatic chucking method, wafer separating method, and dry etching method
JPH06274114A (en) * 1993-03-18 1994-09-30 Taihei Kagaku Seihin Kk Method for holding body with electrostatic force

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585734U (en) * 1981-07-06 1983-01-14 凸版印刷株式会社 Plastic film for drafting
JPS6477555A (en) * 1987-09-18 1989-03-23 Iwatsu Electric Co Ltd Electrostatic attractor

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