JP2023028684A - Electromagnetic valve device with self-holding plunger - Google Patents

Abstract

To fix (hold) a plunger at two points with a combination of a solenoidal coil and a permanent magnet.SOLUTION: An electromagnetic valve device includes: a solenoidal coil 2; a plunger 1 which is made of a magnetic body and slides back and forth via a bearing 15 arranged in the solenoidal coil 2; a fixed iron core 5 which is arranged on the same axis as that of the plunger 1, is formed in a hollow shape, and has a one stopper part composed of a flange part 55 on its one end side; a connection member 11 connected to the plunger 1 and arranged so as to slide in the hollow part formed in the fixed iron core 5; and a permanent magnet 3 integrally arranged at one end side of the connecting member 11, the permanent magnet 3 operating so that a plunger head 15 is alternately adsorbed onto the flange part (stopper part) 55 of the fixed iron core 5 forming the stopper part or onto another stopper part 95 made of a magnetic body which is formed at one end side of a case 9 made of a cylindrical body.SELECTED DRAWING: Figure 2

Description

The present invention relates to a solenoid plunger and a solenoid valve that reciprocate their shaft core (iron core) by the action of an electromagnetic force generated by applying a predetermined current to a coil, and particularly to a reciprocating motion ( Stroke movement) relates to a solenoid valve device having a self-holding plunger that is made to perform the opening and closing function of a related device, such as a vacuum circuit, by fixing the shaft core (solenoid plunger) at a predetermined position. is.

General electromagnetic valves (solenoid valves) are operated by a combination of the force of an electromagnet (electromagnetic force) and the force of a coil spring, as disclosed in Japanese Patent Application Laid-Open No. 8-250327 (Patent No. 3337180). A movable iron core (shaft core) provided inside is moved by an ON/OFF action of a predetermined current to a solenoid mechanism forming the solenoid valve. In order to hold such a movable iron core (plunger) at a predetermined position, a predetermined current (holding current) must be continuously supplied to the solenoid portion. Also, in a two-way holding type in which the plunger moves linearly in two directions and is held at specific locations in these two directions, a coil (solenoid wound coil: It is necessary to provide two Solenoidal Coils C.

Japanese Patent Application Laid-Open No. 8-250327 (Patent No. 3337180)

In a general self-holding solenoid valve device, there is one in which a permanent magnet is provided at a predetermined position so that the movable iron core can be held at a predetermined position (predetermined state) without applying the holding current. However, in this conventional device, since the magnetic circuits of the electromagnet and the permanent magnet are the same magnetic circuit, the electromagnetic force generated by the electromagnet and the magnetic force generated by the permanent magnet interfere with each other. , the electromagnet force and the permanent magnet force cannot be fully exerted. Therefore, there is a problem that it is difficult to obtain a sufficient holding force (fixing force) when trying to fix the movable iron core at a predetermined position. In order to solve such problems, a magnetic circuit formed by one permanent magnet and one electromagnet, and a magnetic circuit formed by the above permanent magnet. It is an object (problem) of the present invention to provide a solenoid valve device having a self-retaining plunger that is capable of separating from and fully utilizing the attractive force formed by a permanent magnet. is.

In the first invention, which is the invention of claim 1, the solenoid valve device having the self-holding plunger is formed by winding a predetermined lead wire into a cylindrical shape, and an electromagnet is formed by energization. One solenoidal coil, one permanent magnet provided in series with the one solenoidal coil, and a magnetic circuit provided between the two magnets and formed by the two magnets. are independent magnetic shielding means formed so as not to interfere with each other, and a magnetic body provided in the solenoid coil and linearly moving in the axial direction of the solenoid coil. One end side or a head portion composed of a projecting portion integrally formed on the one end side is held at a predetermined position by the magnetic force of the permanent magnet. and an output shaft connected to the other end side of the plunger to transmit the movement of the plunger.

In the second invention, which is the invention of claim 2, in the electromagnetic valve device having the self-holding plunger of claim 1, at the position of the output shaft, the output shaft is always arranged in the axial direction. We adopted a configuration in which a coil spring that operates to press is provided.

By adopting such a configuration, the first invention, which is the invention according to claim 1, is basically composed of one permanent magnet and one electromagnet (solenoid wound coil), and furthermore, these Both magnets are arranged in series, and the magnetic forces formed by both magnets are prevented from interfering with each other. After moving the plunger by a predetermined amount, the plunger made of the magnetic material can be attracted and fixed to the permanent magnet. In this way, the plunger can be driven only by momentarily energizing the solenoid coil, and after moving a predetermined amount, the upper plunger is separated from the magnetic force of the electromagnet formed by the solenoid coil. The magnetic force of an independently formed permanent magnet attracts and firmly attaches to a predetermined position specified in two directions on a straight line. That is, it becomes possible to hold the position. That is, in the present invention, one permanent magnet and one electromagnet are provided in series, and the magnetic forces of these two magnets are formed in an independent state. It can be used effectively and fully. In addition, since the plunger is actuated only by momentarily energizing the solenoid winding coil, and electric power for holding the plunger at a predetermined position is not required, energy can be saved as a whole.

Next, in the second invention, which is the invention defined in claim 2, basically, similarly to the first invention, the plunger composed of the movable iron core is fixed (held) by a permanent magnet. This can be ensured by the attraction to the magnetic material formed by Specifically, the above series of operations are performed by energizing a solenoidal coil for a certain period of time (instantaneously) to excite the coil, that is, to operate it as an electromagnet. move the plunger in one direction. When the plunger made of the movable iron core is moved by a predetermined amount, the plunger head integrally formed with the plunger is attracted and fixed to the stopper portion made of a magnetic material by the magnetic force of the permanent magnet. Then, the plunger can be held (fixed) at a predetermined position, that is, the plunger can be held at the other stopper portion. In this way, only by instantaneously passing electricity through the electromagnet formed by the solenoidal coil, the electromagnet is activated (excited), while the plunger is fixed (held) by each stopper. is performed by the magnetic force of the permanent magnet. In this way, the plunger can be securely fixed (held) at two points, and for example, it can be used as a switching mechanism for the plunger in various devices.

It is a figure which shows the state which has a plunger in each position regarding 1st embodiment of this invention. FIG. 10 is a diagram relating to the second embodiment of the present invention and showing a state in which the movable iron core is in one fixing (holding) position; FIG. 10 is a diagram relating to the second embodiment of the present invention and showing a state in which the movable iron core is in the other fixed (holding) position; FIG. 10 is a vertical cross-sectional view of a conventional solenoid valve device having a two-coil system in which a plunger is fixed (held) at two positions;

A first embodiment of a mode for carrying out the present invention will be described with reference to FIG. The first embodiment basically consists of one permanent magnet 3 and an electromagnet formed by one solenoid wound coil 2, and the action of the magnetic force by these is the double-magnetism. Mutual interference is prevented by magnetic shielding means 99 provided between the circuits. In such a configuration, the actuation of a typical self-retaining plunger is by movement of the plunger 1 in an electromagnet comprising a solenoid wound coil 2 of FIG. Specifically, the stable position when the current is ON to the electromagnet made up of the solenoid coil 2 is the central position of the electromagnet made up of the solenoid coil 2, as shown in (b) of FIG. On the other hand, the stable position by the permanent magnet 3 is the position where the movable iron core by the permanent magnet 3 hits the stopper as shown in (a) and (c) of FIG. In the state of FIG. 1, when a current is instantaneously applied to the solenoid wound coil 2, the plunger 1 moves to the state of (b) in FIG. The plunger 1 moves to the state. Also, when the solenoid coil 2 is momentarily energized in the state shown in FIG. 1(C), the state shifts to the stable state shown in FIG. 1(A) through the state shown in FIG. In this way, the plunger 1 functions as a solenoid valve, consumes power only during the Open and Close operations, and after the Open and Close operations, the opening and closing operations are performed. Since the attractive force of the permanent magnet 3 is used for holding the closed state, there is no power consumption for holding.

As shown in FIG. 1, the solenoid valve device according to the first embodiment is provided with a case 9 made of a magnetic material, a solenoid coil 2, a plunger 1, and a plunger 1 coaxially therewith. a fixed iron core 5 having a hollow shape and having a stopper portion (first stopper portion) 55 which has a flange portion on one end side and serves as a stopper for the operation of the plunger 1; It is provided at the first stopper portion 55 and consists of permanent magnets 3 having N poles or S poles formed at both end portions thereof.

Next, FIG. 2 and FIG. 3 show a second embodiment based on an electromagnetic valve mechanism, which is a modified example in which the plunger in the first embodiment is a two-piece type. will be explained based on This is employed, for example, in a valve mechanism provided in an introduction path for guiding an electron beam excited in an ultra-high vacuum chamber to an electron microscope chamber in a normal vacuum state. Specifically, as shown in FIG. 2, it is provided in the middle of a passage 85 for sending the electron beam generated in the ultra-high vacuum chamber 82 side to the electron microscope provided in the normal vacuum chamber 83, This relates to a valve mechanism 8 for switching between conduction and closing between the chambers 82 and 83 and a solenoid mechanism for controlling the opening/closing operation thereof. Next, a solenoid mechanism that operates the valve shaft 81 and the like in the valve mechanism 8 will be described. For example, as shown in FIGS. 2 and 3, this basically consists of a solenoid wound coil 2 and a movable iron core (plunger) 1 which linearly moves by this excitation. As described above, the shape of the movable iron core (plunger) 1 that linearly moves at the electromagnet portion differs between the first embodiment and the second embodiment. In the first embodiment (see FIG. 1), the power is supplied only when the movable iron core (plunger) 1 is moved. On the other hand, in the second embodiment (see FIGS. 2 and 3), an electric current is passed through the electromagnet as power for opening and closing the valve, and the magnetic force of the electromagnet is used as the force for holding the valve open. . This is because, as a function of the solenoid valve in this embodiment, the valve is required to close quickly when the power is turned off (during a power failure), so an electromagnet force is used as an open holding force. For this reason, the movable iron core (plunger) in the first embodiment (see FIG. 1) has a shape that does not close the magnetic circuit, but in the second embodiment (see FIG. 2, FIG. 3), the magnetic circuit is closed when energized.

Further, in the structure having such a structure, a plunger head 15, which is made of a magnetic material and has a predetermined projecting portion, is connected to one end of the plunger 1 via a connecting member 11. An output shaft 7 for transmitting the movement of the plunger 1 is provided on the other end side. The connecting member 11 is connected to the plunger 1 and slides in a hollow portion formed in the fixed iron core 5 . Accordingly, as the plunger 1 is operated, the plunger head 15 is positioned at the one stopper portion (first stopper portion) 55 or on the extension of one end side of the case 9 made of the tubular body. At the other stopper portion (second stopper portion) 95 made of a lid-shaped body provided on one end side of the cover 91 which is provided and is also made of a cylindrical magnetic material, alternately It will be adsorbed.

In addition, in such a configuration, one end of the output shaft 7 is supported by a bearing 77 provided on one end side of the case 9, and the above-described bearing connected to the output shaft 7 is mounted there. A spring (coil spring) 71 is provided to always guide the valve shaft 81 to the closing side of the valve mechanism 8 . The spring 71 acts so that the valve mechanism 8 (see FIGS. 2 and 3) can be instantaneously kept closed even when the device is turned off due to a power failure. be. In this state, the plunger head 15 integrally formed with the plunger 1 is attracted to the one stopper portion (first stopper portion) 55 by the magnetic force of the permanent magnet 3. That is, it is held in the state shown in FIG. 2 by the action of the lines of magnetic force. As a result, the output shaft 7 and the plunger 1 to which it is connected are always pressed in a direction away from the opposing fixed iron cores 5 . A valve shaft 81 connected to the output shaft 7 operates to press an O-ring 88 forming the valve mechanism 8 . As a result, the passage 85 connecting between the ultra-high vacuum chamber 82 and the normal vacuum chamber 83 is cut off. In this way, the entire solenoid valve device including the valve mechanism 8 is held (fixed) in a predetermined state, so that the entire device is prevented from rattling or the like. As a result, the valve mechanism 8 connected to the solenoid valve device is always held in a constant state, and unnecessary operations are prevented.

Next, an instantaneous current is supplied to the solenoid wound coil 2 to excite it. This causes the plunger 1 to move in a predetermined direction. Specifically, as shown in FIG. 3, the plunger 1 is moved in the direction of the arrow in FIG. As a result, the plunger head 15, which is coaxially attached to the plunger 1 via the connecting member 11 and supported by the support 4, resists the spring reaction force of the spring 71 and moves to the first fixing place (second fixing position). (1 stopper portion) 55. As a result, the plunger 1 moves in the direction of the arrow in FIG. As a result, the valve shaft 81 connected to the output shaft 71 is operated to return, opening the passage 85 provided between the ultra-high vacuum chamber 82 and the normal vacuum chamber 83 formed on the electron microscope side. (to communicate). At this time, the plunger head 15 provided on the one end side of the connecting member 11 is formed on the one end side of the cylindrical case 9 and is also made of a cylindrical body and is made of a magnetic material. It comes in contact with the second stopper portion 95 provided at the end, and is attracted by the action of the magnetic force of the permanent magnet 3 .

Thereby, the plunger 1 is fixed (held) here. At this time, the magnetic circuit formed by the lines of magnetic force forms a closed loop circuit as indicated by the arrows in FIG. 2, and the plunger head 15 is fixed here. As a result, the valve mechanism 8 including the output shaft 7 and the valve shaft 81 is held (fixed) in a stable state. Therefore, the passage 85 connecting the ultra-high vacuum chamber 82 and the normal vacuum chamber 83 is maintained in a communicating state. In this manner, the electromagnet formed by the solenoid-wound coil 2 is excited only by momentarily passing electricity through it. On the other hand, the fixing (holding) of the plunger 1 by the respective stopper portions 55 and 95 , that is, the fixing of the plunger head 15 can be performed by the attraction action of the magnetic force of the permanent magnet 3 . In this way, the plunger 1 can be reliably fixed (held) at two points, and can serve as a switching mechanism in the valve mechanism 8, for example.

In a general electromagnetic valve device, it is required that the open state is maintained by maintaining the energized state, and that the closed state is instantaneously established when the power is turned off. To obtain this function, the spring force of the coil spring is used as the closing force. Therefore, in the conventional electromagnetic valve device, the electromagnetic force for holding the open state requires a holding force that is superior to the spring force of the coil spring. On the other hand, in this embodiment, the holding force is the resultant force of the magnetic force of the permanent magnet 3 and the magnetic force of the electromagnet (solenoid wound coil) 2 . That is, in this embodiment, there is a relationship between the spring force of the coil spring 71 acting to close the valve mechanism 8, the force of the permanent magnet 3 acting as a force to hold the valve mechanism 8 open, and the force of the electromagnet 2. is adjusted as follows.
"Power of permanent magnet < power of coil spring < power of permanent magnet + power of electromagnet"
As for the force of the permanent magnet 3, the holding force of the permanent magnet 3 can be easily adjusted by inserting a thin spacer in the contact portion between the fixed magnetic pole and the movable iron core (plunger) to create a gap. That is, if the force of the permanent magnet 3 is adjusted to be slightly smaller than the spring force of the coil spring 71, a slight electromagnet can be obtained from the relationship of "spring force of the coil spring - magnetic force of the permanent magnet < magnetic force of the electromagnet (solenoid coil)". The magnetic force of (solenoid wound coil) 2 allows it to be held "open". As a result, it is possible to construct a solenoid valve device that can be held open with very little power. In the present embodiment, the driving force when starting to close is only the spring force of the coil spring 71, but the valve pressing force when closing is the spring force of the coil spring 71 and the magnetic force of the permanent magnet 3. becomes. The magnetic force of the rare-earth permanent magnet can obtain strong power without consuming power due to an independent magnetic circuit. Therefore, the spring force of the coil spring 71 is sufficient only for the driving force when it starts to close, and generally a weak spring force is sufficient. By adopting the magnetic force of the rare earth magnet, it is possible to obtain a force five times greater than the spring force of a conventional coil spring. Therefore, the same function can be exhibited by a self-holding solenoid valve device.

Reference Signs List 1 plunger 11 connecting member 15 plunger head 2 solenoid coil 21 switch 25 bobbin 3 permanent magnet 33 guide portion 4 support 5 fixed iron core 55 flange portion (first stopper portion)
7 Output shaft 71 Coil spring 77 Bearing 8 Valve mechanism 81 Valve shaft 82 Ultra-high vacuum chamber 83 Normal vacuum chamber 85 Passage 88 O-ring 9 Case (non-magnetic material)
91 cover 95 second stopper portion 99 magnetic shielding means

Claims (2)

One solenoid wound coil that is formed by winding a predetermined conducting wire into a cylindrical shape and that forms an electromagnet when energized, one permanent magnet that is provided in series with the one solenoid wound coil, Magnetic shielding means provided between the two magnets and formed so that the magnetic circuits formed by the two magnets exist independently and do not interfere with each other; and the solenoid-wound coil. A protruding portion that is provided inside and is made of a magnetic material that moves linearly in the axial direction of the solenoid wound coil, and is integrally formed on one end side or on the one end side a plunger formed to be held at a predetermined position by the magnetic force of the permanent magnet; and an output shaft connected to the other end of the plunger to transmit the movement of the plunger. A solenoid valve device having a self-holding plunger, characterized in that it consists of: A solenoid valve device having a self-holding plunger according to claim 1, characterized in that a coil spring is provided at the output shaft to always press the output shaft in its axial direction. A solenoid valve device having a self-retaining plunger.

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