JP2022047187A - Individual piece manufacturing method and individual piece manufacturing device - Google Patents

Abstract

To provide an individual piece manufacturing method and an individual piece manufacturing device that can prevent non-uniform spacing between individual pieces.SOLUTION: An individual piece manufacturing method includes a separation step of applying tension to a first adhesive sheet AS1 to which a base material WK is attached to widen the mutual spacing of a plurality of pieces CPs formed from the base material WK, a sticking step of sticking a second adhesive sheet AS2 to the plurality of piece CPs with widened mutual spacing, a cooling step of cooling the second adhesive sheet AS2 attached to the plurality of piece CPs, a cutting step of cutting and fragmenting the second adhesive sheet AS2 along a gap between the plurality of pieces CPs to form an individual CP1 obtained by attaching the fragmented second adhesive sheet AS2 to the piece CP, and a peeling step of peeling off the first adhesive sheet AS1 from the piece CP1.SELECTED DRAWING: Figure 1

Description

The present invention relates to an individual piece manufacturing method and an individual piece manufacturing apparatus.

Tension is applied to the first adhesive sheet to which the base material is attached to widen the mutual spacing between the plurality of pieces formed from the base material, and the adhesive sheet is cut along the gaps between the plurality of pieces. There is known a method for producing an individual piece, in which the individualized adhesive sheet is attached to the piece piece to form an individual piece (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2014-63809

In the processing method (individual piece manufacturing method) described in Patent Document 1, the expanded tape 13 (first adhesive sheet) is attached to a plurality of chips 3 (piece pieces) via the adhesive sheet 12 (second adhesive sheet). After affixing and applying tension to the first adhesive sheet, the second adhesive sheet is cut to form individual pieces while widening the mutual spacing between the pieces, and then the loosened first adhesive sheet is heated and shrunk. Since the heat-shrinking step is carried out, the mutual spacing between the individual pieces located in the vicinity of the loosened first adhesive sheet also shrinks in the heat-shrinking step, and there is an inconvenience that the mutual spacing between the individual pieces becomes non-uniform. be.

An object of the present invention is to provide an individual piece manufacturing method and an individual piece manufacturing apparatus capable of preventing the mutual spacing between individual pieces from becoming non-uniform.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the heat shrinkage step of the first adhesive sheet is not carried out, it is possible to prevent the mutual spacing between the individual pieces from becoming non-uniform.
Further, if the second adhesive sheet is cut by blowing gas on the second adhesive sheet, it is possible to prevent the individual pieces from being damaged.

Explanatory drawing of the sheet sticking apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to FIG.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis, when the direction is shown, "up" is the arrow direction of the Z axis, "down" is the opposite direction, and ". "Left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the direction of the arrow on the Y-axis, and "rear" is the opposite direction.

The individual piece manufacturing apparatus EA of the present invention is a separating means for applying tension to the first adhesive sheet AS1 to which the base material WK is attached and widening the mutual spacing between the plurality of piece pieces CP formed from the base material WK. 10 and a sticking means 20 for sticking the second adhesive sheet AS2 to a plurality of piece-shaped CPs whose mutual spacing is widened, and a cooling means 30 for cooling the second adhesive sheet AS2 stuck to the plurality of piece CPs. Then, the second adhesive sheet AS2 is cut along the gaps between the plurality of pieces CP to be individualized, and the individualized second adhesive sheet AS2 is attached to the piece CP1 (individual piece CP1). It is provided with a cutting means 40 for forming (see FIG. 1C) and a peeling means 50 for peeling the first adhesive sheet AS1 from the individual piece CP1.

The separating means 10 is supported by the output shaft 11A of the linear motor 11 as a drive device, and has a table 12 having a support surface 12A that can be sucked and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. It is a holding means having a pair of gripping members 13A and includes a plurality of chuck cylinders 13 as a driving device.

The sticking means 20 is a so-called articulated robot as a drive device which is composed of a plurality of arms and can displace what is supported by the tip arm 21A, which is a working portion, at any position and at any angle within the working range. 21 is provided with a holding member 22 as a pressing member, which is supported by the tip arm 21A and has a holding surface 22A which is supported by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

The cooling means 30 has a support surface 31A that can be sucked and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector, and a table 31 in which an annular recess 31B is formed in the support surface 31A. The upper lid member 33, which is supported by the output shaft 32A of the linear motion motor 32 as a drive device and has a recess 33A formed therein, is connected to the upper lid member 33 via a pipe 34A, and is formed by an integral UP and an upper lid member 33. The space SP (see FIG. 1B) is provided with a cooling medium supply means 34 for supplying a cooling medium such as cooling air or cooling gas.

The cutting means 40 includes a first linear motor 41 as a drive device supported in the upper lid member 33, a second linear motor 42 supported by a slider 41A of the first linear motor 41, and a slider of the second linear motor 42. The second adhesive sheet AS2 is provided with a gas spraying means 43 such as a spray pipe or a nozzle that is supported by the 42A and blows a compressed gas such as air or gas generated by a gas supply means (not shown) such as a pressure pump or a turbine. The second adhesive sheet AS2 is cut by blowing gas.

The peeling means 50 includes an articulated robot 51 equivalent to the articulated robot 21, a holding member 52 as a pressing member equivalent to the holding member 22 supported by the tip arm 51A thereof, and an articulated robot equivalent to the articulated robot 21. The robot 53 is provided with a suction pad 54 supported by the tip arm 53A and capable of suction and holding by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

The operation of the above-mentioned individual piece manufacturing apparatus EA will be described.
First, with respect to the individual piece manufacturing apparatus EA in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the individual piece manufacturing apparatus EA (hereinafter, simply referred to as “user”) , An operation means such as an operation panel (not shown) or a personal computer is used to input a signal for starting automatic operation. Next, as shown in FIG. 1A, a user or a transporting means (not shown) such as an articulated robot or a belt conveyor has a second adhesive sheet AS2 on the holding surface 22A and a third adhesive sheet AS3 on the holding surface 52A. The sticking means 20 and the peeling means 50 each drive a decompression means (not shown) to attract and hold the second adhesive sheet AS2 on the holding surface 22A and to attract the third adhesive sheet AS3 on the holding surface 52A. Start holding. After that, as shown in FIG. 1A, the user or a transport means (not shown) supports the integral UP in which the base material WK is supported by the ring frame RF as a frame member via the first adhesive sheet AS1. When placed in a predetermined position on the surface 12A, the separating means 10 drives a decompression means (not shown) to start adsorbing and holding the integral UP on the support surface 12A. Next, the separating means 10 drives the chuck cylinder 13 and the linear motion motor 11, and as shown by the two-dot chain line in FIG. 1A, the gripping member 13A grips the integrated object UP, and then the table 12 is raised. A tension is applied to the first adhesive sheet AS1 to widen the mutual spacing between the plurality of flake CPs formed from the base material WK.

Then, the sticking means 20 drives the articulated robot 21 to move the holding member 22, and as shown by the alternate long and short dash line in FIG. Attach the adhesive sheet AS2. Next, the sticking means 20 stops driving the depressurizing means (not shown), releases the suction holding of the second adhesive sheet AS2 on the holding surface 22A, and then drives the articulated robot 21 to return the holding member 22 to the initial position. Let me. After that, the separating means 10 drives the linear motion motor 11 and the chuck cylinder 13 to return the table 12 and the gripping member 13A to the initial positions, and then the separating means 10 stops driving the depressurizing means (not shown) to support the support surface 12A. Releases the adsorption and holding of the one-piece UP in. Next, the user or a transport means (not shown) supports the integral UP, and as shown by the chain double-dashed line in FIG. 1 (A), the loosened first adhesive sheet AS1 is received by the recess 31B. When the integral UP is placed on the support surface 31A, the cooling means 30 drives a decompression means (not shown) to start adsorption and holding of the integral UP on the support surface 31A.

Then, the cooling means 30 drives the linear motion motor 32, lowers the upper lid member 33, presses the ring frame RF at the lower portion of the upper lid member 33, and presses the ring frame RF at the lower part of the upper lid member 33, and the integral UP and the upper lid are pressed. After forming the space SP with the member 33, the cooling medium supply means 34 is driven to supply the cooling medium to the space SP to cool the second adhesive sheet AS2. At this time, the gas before cooling that was present in the space SP may be discharged, or the gas may be circulated by the cooling medium supply means 34 to make cold air. Next, the cutting means 40 drives the first and second linear motors 41, 42 and a gas supply means (not shown), and while blowing gas from the gas blowing means 43, the gas blowing means 43 is placed in the gap between the plurality of flake CPs. Move along. As a result, as shown in FIG. 1C, the second adhesive sheet AS2 is cut and individualized, and the individualized second adhesive sheet AS2 is attached to the individual CP1. Is formed. After that, the cooling means 30 and the cutting means 40 stop driving the cooling medium supply means 34 and the gas supply means (not shown), stop the supply of the cooling medium and the gas spraying, and then the linear motor 32 and the first and second linears. The motors 41 and 42 are driven to return the upper lid member 33 and the gas spraying means 43 to the initial positions.

Next, the peeling means 50 drives the articulated robot 51 to move the holding member 52, and as shown in FIG. 1C, the third adhesive sheet AS3 is attached to the ring frame RF and the plurality of individual pieces CP1. do. Then, after the cooling means 30 stops driving the depressurizing means (not shown) and releases the suction holding of the integrated object UP on the support surface 31A, the peeling means 50 drives the articulated robot 51, and the third adhesive sheet AS3 The attached integrated object UP is moved to a predetermined position. Next, the peeling means 50 drives the articulated robot 53 and the decompression means (not shown), and starts suction holding of the right end portion of the first adhesive sheet AS1 by the suction pad 54 as shown in FIG. 1 (D). After that, the peeling means 50 drives the articulated robot 53 to lower the suction pad 54 and then move it to the left, and as shown by the two-dot chain line in FIG. 1 (D), the ring frame RF and the individual CP1 The first adhesive sheet AS1 is peeled off from the above, and the ring frame RF and the plurality of individual pieces CP1 are integrated to form a product GP via the third adhesive sheet AS3. Next, the peeling means 50 drives the articulated robot 51 to convey the product GP to the next step, and then the holding member 52 is returned to the initial position, and the same operation as described above is repeated thereafter.

According to the above embodiment, since the heat shrinkage step of the first adhesive sheet AS1 is not carried out, it is possible to prevent the mutual spacing between the individual pieces CP1 from becoming non-uniform.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a particular embodiment, but without departing from the scope of the technical idea and object of the present invention, the shape, as opposed to the above-described embodiment. Those skilled in the art can make various modifications in terms of material, quantity, and other detailed configurations. Further, the description limiting the shape, material, etc. disclosed above is merely an example for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, the shape, material, and the like are described above. The description in the name of the member excluding a part or all of the limitation such as is included in the present invention.

For example, the separating means 10 may apply tension in the vertical direction, or may apply tension in four directions of right, left, front and rear, two directions of right and left, front left, three directions of rear left and right, or , Tension may be applied in five or more directions including components in the front-back and left-right directions to widen the mutual spacing between the flake CPs, or when the first adhesive sheet AS1 is not attached to the ring frame RF. By supporting the first adhesive sheet AS1 and applying tension to the first adhesive sheet AS1, the mutual spacing between the flake CPs may be widened, or the table 12 may be chucked without or while being moved. The cylinder 13 may be moved to widen the mutual spacing between the flake CPs, or a fragile layer physically or chemically formed by a fragile means such as a laser irradiation device or a chemical solution applying device, a cutter blade, or a laser. By applying tension to the first adhesive sheet AS1 to which the base material WK, which is in a state where it can be separated into individual pieces, is attached to a plurality of piece-shaped CPs by means of recesses or notches formed by a cutting means such as a cutter. , The base material WK may be divided into a plurality of flake CPs to widen the mutual spacing between the flake CPs.

The cooling means 30 may move the table 31 to bring the lower portion of the upper lid member 33 into contact with the ring frame RF without or while moving the upper lid member 33, or the cooling means 30 may not include the upper lid member 33. If the upper lid member 33 is not provided, for example, a cooling medium may be sprayed on the second adhesive sheet AS2 to cool the table 31, or a cooler such as a Pelche element or a cooling side of a heat pipe may be provided inside the table 31. The second adhesive sheet AS2 may be provided and cooled by the cooler via the first adhesive sheet AS1 and the flake CP.

The cutting means 40 may move the gas blowing means 43 in the left-right direction and the front-back direction on a so-called XY table as a driving device in place of or in combination with the first and second linear motors 41 and 42.
The gas blown by the gas blowing means 43 may be cold air, air, a simple substance gas, a mixed gas, or the like.

The peeling means 50 has a configuration in which a single-wafer or strip-shaped peeling tape is attached to the first adhesive sheet AS1 and tension is applied to the peeling tape to peel the first adhesive sheet AS1 from the ring frame RF and the individual piece CP1. The peeling tape may be in an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness.

The individual piece manufacturing apparatus EA may be provided with a pressing means for pressing and attaching the first adhesive sheet AS1 to the ring frame RF and the base material WK or a plurality of piece pieces CP by a pressing member such as a pressing roller. , A base material cutting means such as a cutter blade or a laser cutter that cuts the base material WK and separates it into a plurality of flake CPs may be provided, or the base material WK may be ground to form the base material WK. A grinding means such as a grinder or a grindstone for reducing the thickness may be provided.
The frame member may have a non-annular shape (the outer circumference is not connected), a circular shape, an elliptical shape, a polygonal shape, or any other shape other than the ring frame RF.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the separation step may be any step as long as it applies tension to the first adhesive sheet to which the base material is attached and widens the mutual spacing between the plurality of pieces formed from the base material. There is no limitation as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and processes).

The materials, types, shapes, etc. of the first to third adhesive sheets AS1 to AS3, the base material WK, and the flake CP are not particularly limited. For example, the first to third adhesive sheets AS1 to AS3, the base material WK, and the flake CP may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or the first to third adhesive sheets. 3 The adhesive sheets AS1 to AS3 may have an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. Further, such first to third adhesive sheets AS1 to AS3 are, for example, a single layer having only an adhesive layer, a sheet having an intermediate layer between the base sheet and the adhesive layer, and a base sheet. It may be a so-called double-sided adhesive sheet having three or more layers such as having a cover layer on the upper surface, or a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer, and the double-sided adhesive sheet is a single layer. Alternatively, it may be one having an intermediate layer of multiple layers, or one having a single layer or multiple layers without an intermediate layer. The base material WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood plates, and resin alone. It may be an object, or it may be a composite formed of two or more of them, and any form of a member, an article, or the like can be targeted. The first to third adhesive sheets AS1 to AS3 can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording. Any sheet such as a layer-forming resin sheet, a film, a tape, or the like may be used.
When the second adhesive sheet AS2 is a die attach film, the cooling temperature of the second adhesive sheet AS2 is preferably 20 degrees or less in an atmosphere, more preferably 0 degrees or less, further preferably -5 degrees or less, and -10 degrees. Degree or less is particularly preferable.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators such as cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above-described embodiment, when a pressing means such as a pressing roller or a pressing head or a pressing member for pressing a pressed object is adopted, the roller, the round bar, the roller, the round bar, in place of or in combination with the above-exemplified ones. A member such as a blade material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or the pressed object can be deformed such as rubber or resin. It may be composed of a member, may be composed of a member that does not deform, or if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it is exemplified above. A member such as a peeling tape or a blade material may be adopted in place of or in combination with the one to be peeled off, or the peelable material may be composed of a deformable member such as rubber or resin, or may not be deformed. It may be composed of members, or when a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck, a chuck cylinder, or the like. Supporting member is supported (held) by gripping means, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. It may be adopted, or if a material for cutting a member to be cut such as a cutting means or a cutting member or forming a cut or a cutting line in the member to be cut is adopted, instead of the one exemplified above or In combination, it can be cut with a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc., or with a combination of appropriate drive equipment. You may move things to cut them.

EA ... Individual piece manufacturing equipment 10 ... Separation means 20 ... Pasting means 30 ... Cooling means 40 ... Cutting means 50 ... Peeling means AS1 ... 1st adhesive sheet AS2 ... 2nd adhesive sheet CP ... Piece-like body CP1 ... Individual piece WK …Base material

Claims (3)

A separation step of applying tension to the first adhesive sheet to which the base material is attached to widen the mutual spacing of a plurality of pieces formed from the base material, and
A sticking step of sticking the second adhesive sheet to the plurality of pieces whose mutual spacing is widened, and
A cooling step for cooling the second adhesive sheet attached to the plurality of pieces.
The second adhesive sheet is cut and individualized along the gaps between the plurality of pieces, and the individualized second adhesive sheet is cut to form an individual piece attached to the piece. Process and
A method for producing an individual piece, which comprises carrying out a peeling step of peeling the first adhesive sheet from the individual piece. The individual piece manufacturing method according to claim 1, wherein in the cutting step, gas is blown onto the second adhesive sheet to cut the second adhesive sheet. A separating means for applying tension to the first adhesive sheet to which the base material is attached to widen the mutual spacing between the plurality of pieces formed from the base material, and
A sticking means for sticking the second adhesive sheet to the plurality of pieces whose mutual spacing is widened, and
A cooling means for cooling the second adhesive sheet attached to the plurality of pieces, and a cooling means.
The second adhesive sheet is cut and individualized along the gaps between the plurality of pieces, and the individualized second adhesive sheet is cut to form an individual piece attached to the piece. Means and
An individual piece manufacturing apparatus comprising a peeling means for peeling the first adhesive sheet from the individual piece.

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