JP2021015861A - Processing device - Google Patents

Abstract

To provide a processing device that reduces a burden when an operator confirms processing conditions.SOLUTION: The processing device includes a touch panel 21 and a control unit that receives settings of processing conditions via the touch panel. The control unit displays a list of machining condition items and displays on the touch panel a processing start screen 213, including a list display screen that allows selection of any item or a processing start button 233 that instructs a start of processing. The processing start screen 213 displays setting data 235 of items selected by the operator on the list display screen.SELECTED DRAWING: Figure 6

Description

The present invention relates to a processing apparatus.

Some processing devices such as semiconductor wafers include a touch panel that receives input operations of processing conditions from an operator (for example, Patent Document 1). The processing device displays, for example, an operation screen on a touch panel, and accepts an operator's operation via the touch panel.

JP-A-2010-49466

By the way, the operation screen displayed on the touch panel may be composed of a plurality of layers. The operator needs to switch the screen a plurality of times according to the machining conditions and confirm that the machining conditions are set correctly, which requires a considerable burden to confirm the setting status of the machining conditions.

The present invention has been made in view of the above, and an object of the present invention is to provide a processing apparatus capable of reducing the burden on an operator when confirming processing conditions.

In order to solve the above-mentioned problems and achieve the object, the processing apparatus according to the present invention includes a touch panel and a control unit that accepts setting of processing conditions via the touch panel, and the control unit comprises the processing. A list display screen that displays condition items in a list and makes it possible to select any of the items, or a machining start screen having a machining start button for instructing machining start is displayed on the touch panel, and the machining start screen is displayed. It is characterized in that the setting data of the item selected by the operator is displayed on the list display screen.

According to the present invention, there is an effect that the burden on the operator when confirming the processing conditions can be reduced.

FIG. 1 is a schematic perspective view showing an example of the external configuration of the processing apparatus according to the embodiment. FIG. 2 is a schematic perspective view showing a main part of the processing apparatus according to the embodiment. FIG. 3 is a diagram showing a configuration example of a work piece processed by the processing apparatus according to the embodiment. FIG. 4 is a diagram showing a configuration example of a top menu screen according to the embodiment. FIG. 5 is a diagram showing an example of a list display screen according to the embodiment. FIG. 6 is a diagram showing an example of a processing start screen according to the embodiment. FIG. 7 is a flowchart showing an example of a processing procedure of the processing apparatus according to the embodiment. FIG. 8 is a flowchart showing an example of a processing procedure of the processing apparatus according to the embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

Further, in the embodiment of the present invention, when it is not necessary to particularly distinguish each of the plurality of components having substantially the same functional configuration, they may be described with the same reference numerals. In addition, different numbers or letters may be added after the same code to distinguish them.

In the embodiment described below, the XYZ Cartesian coordinate system is set, and the positional relationship of each part will be described with reference to the XYZ Cartesian coordinate system. One direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the directions orthogonal to each of the X-axis direction and the Y-axis direction are the Z-axis directions. The XY plane, including the X and Y axes, is parallel to the horizontal plane. The Z-axis direction orthogonal to the XY plane is the vertical direction.

[Configuration of processing equipment]
FIG. 1 is a schematic perspective view showing an example of the external configuration of the processing apparatus according to the embodiment. The processing device 1 according to the embodiment is a cutting device that cuts a workpiece using a cutting blade. The processing device 1 is provided with a touch panel 21 on the front front side of the housing 2 incorporating processing means and the like described later. The touch panel 21 is arranged at a position that is easy for the user to operate and see, and displays various information related to the operation control of the processing device 1. The touch panel 21 integrally includes a display means 22 composed of, for example, a liquid crystal panel. As is well known, the touch panel 21 can be input by an operator by touching an image, a button, a desired portion in a character portion, or the like displayed on the display surface of a display means 22 such as a liquid crystal panel. ..

FIG. 2 is a schematic perspective view showing a main part of the processing apparatus according to the embodiment. The processing device 1 includes a holding means 110, an imaging means 120, and a cutting means 130 as a processing means.

The holding means 110 has, for example, a holding surface 111 formed of porous ceramic or the like and holding the wafer 200, and holds the workpiece 30 shown in FIG. The holding means 110 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 30. Further, the holding means 110 is rotatably provided around an axis parallel to the Z-axis direction by a rotation drive source 140 fixed to the moving base 141. Further, the holding means 110 is provided so as to be movable in the X-axis direction which is horizontal to the holding surface 111 by an X-axis moving unit 142 using a ball screw, a nut, a pulse motor, etc. It is moved in the X-axis direction relative to 120 and the cutting means 130.

The imaging means 120 is fixed to the spindle housing 133 of the cutting means 130 so as to move integrally with the cutting means 130. The imaging means 120 is an electron microscope that photographs the surface of the workpiece 30 held by the holding means 110, and is shared for operations such as alignment and calf check. The image pickup means 120 includes a CCD (Charge Coupled Device) image pickup element or the like, which is a camera that photographs the surface of the workpiece 30 held by the holding means 110.

The cutting means 130 cuts the workpiece 30 held by the holding means 110 along the scheduled division line 32 by a rotating ring-shaped ultrathin cutting blade. The cutting blade is mounted on a spindle rotatably housed in the spindle housing 133, the spindle housing 133 being supported by a Z-axis moving unit 143. The spindle is a rotating shaft for transmitting the rotational driving force of the drive source 134 to the cutting blade to rotate at high speed, and is supported in the spindle housing 133 so as to be rotatable at high speed via a bearing mechanism or the like. The rotation axes of the cutting blade and spindle of the cutting means 130 are set parallel to the Y-axis direction. The cutting means 130 is provided so as to be relatively movable in the Y-axis direction by a Y-axis moving unit 144 including a ball screw, a nut, a pulse motor, or the like with respect to the workpiece 30 held by the holding means 110. Further, the cutting means 130 is provided so as to be movable in the Z-axis direction by a Z-axis moving unit 143 using a ball screw, a nut, a pulse motor, or the like. The cutting means 130 is indexed and fed in the Y-axis direction by the Y-axis moving unit 144, and the holding means 110 is cut and fed in the X-axis direction by the X-axis moving unit 142 while being cut and fed into the Z-axis moving unit 143. 30 is cut into the workpiece 30.

FIG. 3 is a diagram showing a configuration example of a work piece processed by the processing apparatus according to the embodiment. As shown in FIG. 3, the workpiece 30 includes a wafer 31 and an annular frame 35. The wafer 31 is a disk-shaped semiconductor wafer or sapphire made of silicon as a base material, an optical device wafer made of SiC (silicon carbide) or the like as a base material, a package resin substrate, a ceramics substrate, a glass substrate, or the like. In the wafer 31, the device 33 is formed in a plurality of regions partitioned by the grid-like division schedule lines 32 formed on the surface 31S. The wafer 31 is supported by the annular frame 35 via an adhesive tape (for example, dicing tape) 34 attached to the back surface 31B. The adhesive tape 34 is cut to the same size and shape as the annular frame 35. The workpiece 30 is integrally formed by attaching the adhesive tape 34 to the back surface 35B of the annular frame 35 and the back surface 31B of the wafer 31 in a state where the wafer 31 is arranged inside the annular frame 35.

Returning to FIG. 1, the processing apparatus 1 includes a control unit 10 (an example of a control unit). The control unit 10 includes an arithmetic processing unit such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The control unit 10 is a computer capable of executing a computer program or the like for controlling each of the above-described components in order to carry out various processes described below by the respective units.

As shown in FIG. 1, the control unit 10 includes a data setting unit 11 and a display control unit 12, and each of these units realizes or executes various processing functions and operations of the processing apparatus 1 according to the embodiment. Each part of the control unit 10 is realized by, for example, a function provided by a program stored in a storage device. That is, each part of the control unit 10 is realized by executing the program stored in the storage device by the arithmetic processing unit using the RAM or the like as a work area. The functional configuration of the control unit 10 is not particularly limited to the configuration example shown in FIG. 1, and may be any other configuration as long as it can perform various processes in the processing apparatus 1 described later.

The data setting unit 11 receives the setting for each item of the machining condition from the operator through the screen for accepting the setting of the machining condition displayed on the touch panel 21. The data setting unit 11 allows the operator to freely browse the setting data for each item of the processing conditions and manage the data setting unit 11 in a state where it can be changed as appropriate.

The display control unit 12 controls the display of various information on the touch panel 21 through the touch panel 21 according to the operation input by the operator. The display control unit 12 displays the top menu screen 211, the list display screen 212, and the processing start screen 213, which will be described later, on the touch panel 21.

FIG. 4 is a diagram showing a configuration example of a top menu screen according to the embodiment. FIG. 5 is a diagram showing an example of a list display screen according to the embodiment. FIG. 6 is a diagram showing an example of a processing start screen according to the embodiment.

As shown in FIG. 4, the top menu screen 211 displayed on the touch panel 21 has a plurality of menu buttons 211a to 211d for executing maintenance, operation, various settings, and the like of the processing apparatus 1. The operator can operate the top menu screen 211 through the touch panel 21.

Menu buttons 211a to 211d can be operated. The menu button 211a is a button for displaying the machining start screen 213 (see FIG. 6) for causing the machining device 1 to execute the fully automatic operation (F1) on the touch panel 21. The menu button 211b is a button for displaying the machining start screen 213 (see FIG. 6) for causing the machining apparatus 1 to execute the manual operation (F2) on the touch panel 21. The menu button 211c is a button for displaying the processing condition setting screen composed of a plurality of layers on the touch panel 21. The menu button 211d is a button for displaying the items of the processing conditions in a list and displaying the list display screen 212 (see FIG. 5) on the touch panel 21 so that any item can be selected. The configuration of the top menu screen 211 illustrated in FIG. 4 is an example, and is not particularly limited to the configuration shown in FIG.

As shown in FIG. 5, the list display screen 212 has a processing condition item display area 221 and an EXIT button 222. The operator can operate the list display screen 212 through the touch panel 21.

The processing condition item display area 221 is an area for displaying a list of a plurality of items 221a that define processing conditions. The plurality of items 221a displayed in the processing condition item display area 221 include items of processing conditions that lead to deterioration of processing quality and increase in processing time. These plurality of items 221a include items that cannot be displayed unless the operator operates the touch panel 21 to switch the screen a plurality of times.

The machining condition item display area 221 includes a check box 221b for individually designating each item for each of the plurality of items 221a that define the machining conditions. The operator can select and deselect check box 221b by directly touching check box 221b. In FIG. 5, the items “cut margin width” and “work thickness” are selected by the operator's operation, and the check boxes 221b corresponding to the “cut margin width” and “work thickness” are checked. It shows the entered state. The EXIT button 222 is a button for returning to the top menu screen 211.

As shown in FIG. 6, the machining start screen 213 has a machining status display area 231, a keyboard display area 232, a machining start button 233, an EXIT button 234, and a setting data display area 235. The operator can operate the machining start screen 213 through the touch panel 21.

The processing status display area 231 is an area for displaying the processing status of the processing apparatus 1. The keyboard display area 232 is an area for displaying a keyboard that accepts various inputs by the operator. The machining start button 233 is a button for causing the machining device 1 to start the machining process. The EXIT button 234 is a button for returning to the top menu screen 211. The setting data display area 235 is an area for displaying the setting data of the item 221a selected on the list display screen 212. FIG. 6 shows an example in which setting data corresponding to each of the “cut margin width” and the “work thickness” selected by the operator on the list display screen 212 is displayed corresponding to FIG.

The processing start screen 213 can directly accept a change in the setting data from the operator in the setting data display area 235. For example, when the display control unit 12 detects an operation on the setting data field of the setting data display area 235, the display control unit 12 displays the keyboard in the keyboard display area 232. The operator can operate the keyboard to change the setting data displayed in the setting data display area 235. An ENTER button (not shown) for confirming the changed setting data may be displayed in the keyboard display area 232 or the setting data display area 235. When the change of the setting data is confirmed, the display control unit 12 sends the changed setting data to the data setting unit 11.

The display control unit 12 causes the touch panel 21 to display the list display screen 212 or the processing start screen 213 via the top menu screen 211.

[Processing procedure of processing equipment]
An example of the processing procedure of the processing apparatus according to the embodiment will be described with reference to FIGS. 7 and 8. 7 and 8 are flowcharts showing an example of the processing procedure of the processing apparatus according to the embodiment. The processes shown in FIGS. 7 and 8 are executed by each unit included in the control unit 10.

The processing procedure on the list display screen 212 will be described with reference to FIG. 7. As shown in FIG. 7, the display control unit 12 displays the list display screen 212 on the touch panel 21 in response to the operator's operation (step S101).

Subsequently, the display control unit 12 determines whether or not the operation for the EXIT button 222 is detected on the list display screen 212 (step S102).

When the display control unit 12 determines that the operation for the EXIT button 222 has not been detected (step S102; No), the display control unit 12 repeats the determination in step S102.

On the other hand, when the display control unit 12 determines that the operation for the EXIT button 222 has been detected (step S102; Yes), the display control unit 12 determines whether or not the processing condition item 221a has been selected on the list display screen 212 shown in FIG. (Step S103).

When the display control unit 12 determines that the item 221a has been selected (step S103; Yes), the display control unit 12 acquires the setting data corresponding to the selected item 221a from the data setting unit 11 (step S104).

Subsequently, the display control unit 12 displays the top menu screen 211 on the touch panel 21 (step S105), and ends the process shown in FIG. 7.

In step S103, when it is determined that item 221a has not been selected (step S103; No), the display control unit 12 proceeds to the processing procedure of step S105 described above. That is, the display control unit 12 displays the top menu screen 211 on the touch panel 21 and ends the process shown in FIG. 7.

The display procedure of the machining start screen 213 will be described with reference to FIG. As shown in FIG. 8, the display control unit 12 detects an operation for a fully automatic operation (F1) or a manual operation (F2) on the top menu screen 211 (step S201).

Following the detection in step S201, the display control unit 12 determines whether or not the item of the machining condition is selected on the list display screen 212 (step S202).

When the display control unit 12 determines that the item of the processing condition has been selected (step S202; Yes), the display control unit 12 displays the processing start screen 213 reflecting the setting data of the selected item on the touch panel 21 (step S202; Yes). Step S203), the process shown in FIG. 8 is completed.

On the other hand, when the display control unit 12 determines that the processing condition item has not been selected (step S202; No), the display control unit 12 displays the normal processing start screen 213 on the touch panel 21 (step S204), and FIG. The process shown in is terminated. The normal machining start screen 213 means a machining start screen 213 in which the setting data is not displayed in the setting data display area 235.

In the above embodiment, the touch panel 21 includes a list display screen 212 for displaying the items 221a of the machining conditions in a list and making it possible to select any item, and a machining start button 233 for instructing the control unit 10 to start machining. Includes processing start screen 213. On the machining start screen 213, the setting data of the item 221a selected by the operator on the list display screen 212 is displayed. That is, the processing apparatus 1 according to the embodiment is in a state in which the operator can select items to be confirmed by the operator (items of processing conditions that lead to deterioration of processing quality and increase in processing time) before performing processing. Can be displayed on the list display screen 212. Further, the processing apparatus 1 according to the embodiment can display the setting data corresponding to the item 221a selected on the list display screen 212 on the processing start screen 213. Conventionally, the operator has correctly set the machining conditions such as the amount of cutting water, the spindle speed, and the cutting allowance width, which lead to deterioration of machining quality and increase in machining time, before performing machining processing by, for example, fully automatic operation. The touch panel 21 is operated to switch the screen a plurality of times to perform the final confirmation. On the other hand, according to the processing apparatus 1 according to the embodiment, the operator needs to switch the screen a plurality of times to confirm whether or not the processing conditions are set correctly before performing the processing. There is no. Therefore, the processing apparatus 1 according to the embodiment can reduce the burden on the operator when confirming the processing conditions. In addition, the operator can notice an error in the machining conditions before performing the machining process. Therefore, the processing apparatus 1 according to the embodiment can prevent deterioration of processing quality.

[Other]
In addition to the cutting device, each of the above embodiments can be similarly applied to various processing devices such as a grinding device, a polishing device, a laser processing device, a tool cutting device, a plasma device, and a water jet device.

Each component of the processing apparatus 1 described in each of the above embodiments is a functional concept, and does not necessarily have to be physically configured as shown in the figure. That is, the specific form of dispersion / integration of the control unit 10 included in the processing apparatus 1 is not limited to the one shown in the drawing, and all or part of the control unit 10 is functional in an arbitrary unit according to various loads and usage conditions. Alternatively, it can be physically distributed or integrated. For example, the data setting unit 11 and the display control unit 12 of the control unit 10 may be mounted on the control unit 10 in a functionally or physically integrated state.

1 Processing equipment 10 Control unit 11 Data setting unit 12 Display control unit 21 Touch panel 22 Display means 30 Work piece 31 Wafer 32 Scheduled division line 33 Device 34 Adhesive tape 35 Circular frame 110 Holding means 111 Holding surface 120 Imaging means 130 Cutting means 140 Rotational drive source 141 Moving base 142 X-axis moving unit 143 Z-axis moving unit 144 Y-axis moving unit

Claims (1)

It is a processing device
Touch panel and
It is provided with a control unit that accepts processing condition settings via the touch panel.
The control unit
A list display screen that displays the items of the machining conditions in a list and makes it possible to select any of the items, or a machining start screen including a machining start button that instructs the machining start is displayed on the touch panel.
On the processing start screen,
A processing apparatus characterized in that setting data of the item selected by an operator is displayed on the list display screen.

Images