JP2020183799A - Operation analysis system for fluid control device, operation analysis method for fluid control device, and computer program - Google Patents

Abstract

To accurately determine operation abnormality of a fluid control device and to enable the prediction of such an operation abnormality.SOLUTION: An operation analysis system comprises a fluid control device V and an information processing device 7 for executing data mining, and the fluid control device V has a position sensor M2 for acquiring a lift amount due to opening/closing. In the information processing device 7, a determination processing unit 71 compares the lift amount with a prescribed threshold to determine abnormality due to a foreign matter on a sheet of the fluid control device V and a pattern of the abnormality. An information extraction unit 73 selectively extracts, as an analysis object, other operation information having the same prescribed operation information, and information related to a determination result and being information in a prescribed time before and after an opened/closed state of the fluid control device V is switched in each fluid control device V with reference to the information storage unit 72. A correlation analysis unit 74 analyzes a correlation between a prescribed operation of the fluid control device V and an abnormality occurrence by comparing the extracted information.SELECTED DRAWING: Figure 7

Description

The present invention relates to a technique for analyzing the operation of a fluid control device.

Conventionally, in the film formation process for forming a thin film on the surface of a semiconductor wafer, finer thin films have been required, and in recent years, a film formation method called ALD (Atomic Layer Deposition) for forming a thin film at an atomic level or a molecular level has been used. It is used.
However, such miniaturization of thin films requires fluid control equipment to open and close more frequently than ever before, and the load may easily cause abnormalities such as fluid leakage. Therefore, there is an increasing demand for a technology that can easily detect an abnormality in a fluid control device.

In addition to being able to easily detect abnormalities, various environments that affect fluid control equipment abnormalities, including the above-mentioned leaks, such as frequency of use, temperature, humidity, and vibration of fluid control equipment, which were not considered in the past. There is an increasing demand for fluid control equipment and information collection methods that can collect factor information, analyze the correlation with abnormalities, and help predict the occurrence of abnormalities.

In this regard, Patent Document 1 is a seal portion breakage detection mechanism including a hole formed on the outer surface of a controller that controls a fluid flow rate and a leak detection member attached to the hole, and the hole is inside the controller. The leak detection member is composed of a tubular body attached to the hole and a movable member provided in the tubular body, and the movable member is a leaking fluid filled in the gap in the controller. It has been proposed that the tubular body is movable outward by the pressure of the above.
Further, in Patent Document 2, the controller has a seal portion breakage detection mechanism including a hole formed on the outer surface of the controller that controls the flow rate of the fluid and a leak detection member attached to the hole, and the hole is controlled. It has been proposed that the leak detection member communicates with the void in the vessel and is sensitive to the presence of a specific fluid.
Further, in Patent Document 3, a leak detection device for detecting a fluid leak is provided in a sensor holder and a leak port provided in the leak detection target member and communicating with a sealed portion in the leak detection target member and the outside. A process for processing an ultrasonic sensor held by a sensor holder so as to face each other, an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and a leak port, and an ultrasonic wave obtained by the ultrasonic sensor. Those equipped with a circuit have been proposed.

Japanese Unexamined Patent Publication No. 04-093736 Japanese Unexamined Patent Publication No. 05-126669 Japanese Unexamined Patent Publication No. 2014-21029

Due to the sophistication and complexity of semiconductor manufacturing processes, the burden on fluid control equipment mounted on fluid supply lines is becoming harsher, and the maintenance frequency and product life cycle are becoming faster. .. Therefore, there is a demand for a method that can accurately determine the operation abnormality of the fluid control device and further predict the operation abnormality.

Therefore, one of the objects of the present invention is to accurately determine an operation abnormality of a fluid control device and to predict such an operation abnormality.

In order to achieve the above object, the motion analysis system of the fluid control device according to one aspect of the present invention is a system that analyzes the motion of the fluid control device, and is acquired from the fluid control device and the fluid control device. An information processing device that executes data mining based on information is configured to be able to transmit information, and the fluid control device acquires a lift amount associated with opening and closing of the fluid control device as operation information of the fluid control device. The information processing device has an operation information acquisition mechanism, and the information processing device is a determination processing means for determining an abnormality due to a foreign substance on a sheet of the fluid control device and an abnormality pattern by comparing the lift amount with a predetermined threshold value. , The information storage means for storing the operation information and the abnormality determination result of the fluid control device, and the other operation information and the determination result having the same predetermined operation information as the analysis target by referring to the information storage means. The information extraction means for selectively extracting the information in the predetermined time before and after the open / closed state of the fluid control device is switched for each fluid control device is compared with the extracted information. By doing so, it has a correlation analysis means for analyzing the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality.

Further, the information processing apparatus calculates the abnormality occurrence probability of the fluid control device by referring to the operation information of the fluid control device stored in the information storage means based on the analysis result by the correlation analysis means. By doing so, it may be further provided with an abnormality anticipation means for anticipating an abnormality of the fluid control device.

Further, the abnormality prediction means is made to learn the first abnormality prediction means for determining whether the operation information has a characteristic peculiar to the period immediately before the failure and the operation information at the time of normal operation by supervised learning. The autoencoder may have a second abnormality prediction means for determining whether or not the operation information is in the normal operation state.

Further, the fluid control device may further include a purge gas supply means for supplying purge gas for discharging foreign matter into the flow path based on the abnormality determination result of the fluid control device.

Further, the fluid control device has a stem that slides according to an opening / closing operation and a presser foot adapter that presses the peripheral edge of the diaphragm, and the operation information acquisition mechanism is attached to the presser foot adapter to determine the stem. It may be configured by a position sensor that detects a change in distance from the location of.

Further, it further has a magnet attached to a predetermined position in the vicinity of the pressing adapter, and the position sensor is attached to a surface inside the pressing adapter and facing the stem and a distance from the magnet. It may consist of a magnetic sensor that detects changes.

Further, the position detection accuracy of the position sensor may be ± 0.01 mm to ± 0.001 mm.

Further, the operation analysis method of the fluid control device according to another aspect of the present invention is a method of analyzing the operation of the fluid control device, and the operation information of the fluid control device is a lift accompanying opening and closing of the fluid control device. The fluid control device having an operation information acquisition mechanism for acquiring the amount and an information processing device for executing data mining based on the information acquired from the fluid control device are described by a system configured to be able to transmit information. A determination process for determining an abnormality and an abnormality pattern due to a foreign substance on the seat of the fluid control device by comparing the lift amount with a predetermined threshold, and information storage for storing the operation information and the abnormality determination result of the fluid control device. With reference to the means, the analysis target is information related to the determination result and other operation information having the same predetermined operation information, and is a predetermined time before and after the open / closed state of the fluid control device is switched. Correlation that analyzes the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality by comparing the information extraction process that selectively extracts the information in the above for each fluid control device with the extracted information. Perform analysis processing and.

Further, the computer program according to still another aspect of the present invention is a computer program for analyzing the operation of the fluid control device, and the lift amount associated with the opening and closing of the fluid control device is used as the operation information of the fluid control device. The fluid control device having the operation information acquisition mechanism for acquiring the above, and the information processing device for executing data mining based on the information acquired from the fluid control device, are described for a system configured to be able to transmit information. A determination process for determining an abnormality and an abnormality pattern due to a foreign substance on the seat of the fluid control device by comparing the lift amount with a predetermined threshold, and information storage for storing the operation information and the abnormality determination result of the fluid control device. With reference to the means, the analysis target is the information related to the determination result and the other operation information having the same predetermined operation information, and the predetermined time before and after the open / closed state of the fluid control device is switched. Correlation that analyzes the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality by comparing the information extraction process that selectively extracts the information in the above for each fluid control device with the extracted information. Execute the analysis process.
The computer program can be recorded and provided on various recording media that can be read by the computer program.

According to the present invention, it is possible to accurately determine an operation abnormality of a fluid control device and predict such an operation abnormality.

In the motion analysis system of the fluid control device according to the embodiment of the present invention, (a) an external perspective view and (b) a plan view show the fluid control device to be the target of motion analysis. In the motion analysis system of the fluid control device according to the embodiment of the present invention, it is a cross-sectional view taken along the line AA showing the internal structure of the fluid control device to be subject to motion analysis, wherein (a) a valve closed state, (b). Indicates the valve open state. In the motion analysis system of the fluid control device according to the embodiment of the present invention, it is a BB sectional view showing the internal structure of the fluid control device to be the object of motion analysis, wherein (a) a valve closed state, (b). Indicates the valve open state. It is an exploded perspective view which showed the fluid control apparatus which is the object of motion analysis in the motion analysis system of the fluid control apparatus which concerns on embodiment of this invention. It is an exploded perspective view which showed the fluid control apparatus which is the object of motion analysis in the motion analysis system of the fluid control apparatus which concerns on embodiment of this invention. It is an exploded perspective view which showed the fluid control apparatus which is the object of motion analysis in the motion analysis system of the fluid control apparatus which concerns on embodiment of this invention. It is a functional block diagram which showed the function which the motion analysis system of the fluid control apparatus which concerns on embodiment of this invention has. It is a schematic diagram which showed an example of the pattern of the abnormality to be determined in the operation analysis system of the fluid control apparatus which concerns on embodiment of this invention, and shows the time passage in the order of (a), (b), (c). There is. It is a schematic diagram which showed an example of the pattern of the abnormality to be determined in the operation analysis system of the fluid control apparatus which concerns on embodiment of this invention, and shows the time passage in the order of (a), (b), (c). There is. It is a schematic diagram which showed an example of the pattern of the abnormality to be determined in the operation analysis system of the fluid control apparatus which concerns on embodiment of this invention, and shows the time passage in the order of (a), (b), (c). There is. In the motion analysis system of the fluid control device according to the embodiment of the present invention, it is a graph which shows the relationship between the measured sheet height and the passage of time for each abnormality pattern, and (a) the pattern shown by FIG. b) Corresponds to the pattern shown in FIG. 9 and (c) the pattern shown in FIG. It is a functional block diagram which showed the function which the motion analysis system of the fluid control apparatus which concerns on another Embodiment of this invention has.

● Fluid control device V
Hereinafter, the motion analysis system of the fluid control device according to the embodiment of the present invention will be described with reference to the drawings.
First, in the motion analysis system of the fluid control device according to the present embodiment, an example of the fluid control device to be the target of motion analysis will be described.
The fluid control device V shown in FIG. 1 is an air-operated direct diaphragm valve, which constitutes a gas unit with other fluid control devices, a flow rate control device, etc., controls a process fluid, and processes an object to be processed. To do. As shown in FIGS. 1 to 3, the fluid control device V includes a valve body 1, a bonnet portion 2, a cover portion 3, and an actuator portion 4.

As shown in FIGS. 2 and 3, the valve body 1 includes a base portion 11 on which a flow path is formed and a substantially cylindrical cylindrical portion 12 provided on the base portion 11.
The base portion 11 has a rectangular shape in a plan view, and is a portion installed on a substrate or a manifold block when a gas unit is composed of a plurality of fluid control devices V.

As shown in FIG. 4, the cylindrical portion 12 has a hollow shape in which the end face on the side on which the bonnet portion 2 is arranged is open, and the inside of the hollow constitutes a recess 12a in which the bonnet portion 2 is housed.
The cylindrical portion 12 has a length in the axial direction, and one end on the side on which the bonnet portion 2 is arranged and opposite to the base portion 11 is opened, and from the outside to the recess 12a side. A slit 12b that penetrates is provided. The flexible cable 26 extending from the bonnet wall 25 is led out from the inside to the outside through the slit 12b.

An inflow path 111 into which the fluid flows in, an outflow path 113 in which the fluid flows out, and a valve chamber 212 communicating with the inflow path 111 and the outflow path 113 are formed below the recess 12a and in the base portion 11. The inflow path 111, the outflow path 113, and the valve chamber 212 integrally form a flow path through which a fluid flows.

The annular seat 21 is provided on the periphery of the opening of the inflow path 111 in the valve chamber 212. By abutting and separating the diaphragm 22 from the sheet 21, the fluid can flow from the inflow path 111 to the outflow path 113, or the flow can be blocked.

The diaphragm 22 is a spherical shell-shaped member made of a metal such as stainless steel or a Ni-Co alloy and having a convex central portion, and separates the flow path from the space in which the actuator portion 4 operates. There is. When the diaphragm 22 is not pressed by the diaphragm retainer 23, the diaphragm 22 is separated from the sheet 21 as shown in FIGS. 2 (b) and 3 (b), and the inflow path 111 and the outflow path 113 are separated from each other. It will be in a state of communication. On the other hand, in the state of being pressed by the diaphragm retainer 23, as shown in FIGS. 2 (a) and 3 (a), the central portion of the diaphragm 22 is deformed and is in contact with the sheet 21, and the inflow path 111 and The outflow path 113 is blocked.

The diaphragm retainer 23 is provided on the upper side of the diaphragm 22 and presses the central portion of the diaphragm 22 in conjunction with the vertical movement of the piston 43.
As shown in FIG. 5, the diaphragm retainer 23 includes a substantially cylindrical base portion 231 and a diameter-expanded portion 232 whose diameter is increased on one end side on the side that abuts on the diaphragm 22.

The base portion 231 is formed with a bottomed groove 231a having a length in the axial direction and having one end open on the side opposite to the enlarged diameter portion 232. The shaft rod portion of the screw 25d screwed into the screw hole 25c of the bonnet wall 25 is slidably fitted into the groove 231a. The groove 231a and the screw 25d constitute a rotation regulating means for restricting the rotation of the diaphragm retainer 23 in the circumferential direction, whereby the diaphragm retainer 23 moves up and down in conjunction with the piston 43, but in the circumferential direction. Rotation is restricted.

Further, a magnet M1 is attached to the substrate portion 231. In this embodiment, the magnet M1 is attached to the opposite side of the groove 231a of the base portion 231. However, the position sensor M2 does not hinder the detection of the magnetic force of the magnet M1, and the fluid control device V It can be attached to another position on the base portion 231 as long as it does not interfere with the operation of.

The bonnet 24 has a substantially cylindrical shape and is housed in the recess 12a of the valve body 1.
The peripheral edge of the diaphragm 22 is sandwiched between the lower end portion of the bonnet 24 and the valve body 1, and a seal between the diaphragm 22 and the valve body 1 is formed at this portion.
Inside the bonnet 24, a substantially disk-shaped partition portion 241 is provided in which a penetration hole 241a through which the diaphragm retainer 23 is inserted is formed at the center.
The bonnet wall 25 is housed in the recess 24a formed above the partition portion 241 or on the side where the actuator portion 4 is arranged. The partition portion 241 and the bonnet wall 25 are provided with screw holes 241b and through holes 25e at positions corresponding to each other, and the bonnet wall 25 is screwed into the bonnet 24 by bolts 75f.

The partition portion 241 of the bonnet 24 has a certain thickness, and an O-ring O1 is interposed between the inner peripheral surface of the insertion hole 241a formed in the partition portion 241 and the diaphragm retainer 23. .. As a result, the airtightness of the closed space S2 defined by the partition portion 241, the diaphragm 22, and the diaphragm retainer 23 is ensured.
Further, the partition portion 241 of the bonnet 24 is provided with a communication hole 241d that communicates with the pressure sensor P attached to the bonnet wall 25. Since the pressure sensor P is provided through the communication hole 241d, the pressure in the closed space S2 defined by the partition portion 241 and the diaphragm 22 and the diaphragm retainer 23 can be measured.

Further, on the side surface of the bonnet 24, a through hole 241c for leading the flexible cable 26 led out from the bonnet wall 25 housed inside to the outside is provided.

The bonnet wall 25 is a member arranged in the bonnet 24. The bonnet wall 25 has a shape in which a thick, substantially disk-shaped member is hollowed out in a substantially C-shape in a plan view. At the center of the bonnet wall 25, a penetration hole 25a for inserting the base portion 231 of the diaphragm retainer 23 is provided. Further, an opening 25b is provided to open the insertion hole 25a toward the outside in the radial direction of the bonnet wall 25.

A screw hole 25c threaded outward in the radial direction from the insertion hole 25a is formed at a predetermined portion of the thick portion of the bonnet wall 25. A screw 25d is screwed into the screw hole 25c from the outside, and the axial portion of the screwed screw 25d protrudes toward the insertion hole 25a and is inserted into the insertion hole 25a. It is slidably fitted to 231a.

The bonnet wall 25 is provided with a through hole 25e at a position corresponding to the screw hole 241b of the bonnet 24. A bolt 75f is screwed into the screw hole 241b and the through hole 25e with the bonnet wall 25 disposed on the partition portion 241 of the bonnet 24, whereby the bonnet wall 25 is fixed to the bonnet 24.

On the outer peripheral surface of the bonnet wall 25, in the vicinity of the opening 25b, a flat plate-shaped position sensor M2 that is hung and fixed so as to close the opening 25b is attached. The position sensor M2 is a magnetic sensor that senses a change in distance between the position sensor M2 and the magnet M1 attached to the diaphragm retainer 23, and can measure not only the open / closed state of the fluid control device V but also the opening degree by sensing. it can. The position sensor M2 attached to the bonnet wall 25 is fixed at a predetermined position without being affected by the vertical movement of the piston 43 and the diaphragm retainer 23 due to the opening / closing operation of the fluid control device V.

As shown in FIG. 6, the cover portion 3 sandwiches and integrally holds the actuator body 41 and the valve body 1, and fixes the circuit board 27 and the connector 28 provided on the circuit board 27 to the fluid control device V. Configure the fixing means.
The cover portion 3 includes a cover 31 and flat plates 32 and 33.

The cover 31 has a substantially U-shape, and the end portions of the actuator body 41 and the valve body 1 are fitted inside the cover 31.
Screw holes 31a are provided on both side surfaces of the cover 31 corresponding to the positions where the actuator body 41 is fitted. As a result, when the screw 31b is screwed into the screw hole 31a with the valve body 1 fitted inside and the tip of the screw 31b is pressed against the valve body 1, the valve body 1 is sandwiched inside the cover 31. Can be done.

Further, a screw hole 31c is provided in the thick portion of the cover 31. The plates 32 and 33 are attached to the cover 31 by screwing the screws 31d into the screw holes 31c via the through holes 32b and 33b of the plates 32 and 33.

The plates 32 and 33 are screwed and fixed to the cover 31 with the actuator body 41 and the end portions of the valve body 1 fitted inside the cover 31, and in the fixed state, the actuator body 41 is located between the actuator body 41 and the cover 31. And the valve body 1 are held under pressure.
A notch portion 32a cut out in the shape of a tongue piece is formed below the plate 32, and the flexible cable 26 is led out to the circuit board 27 provided with the connector 28 via the notch portion 32a.

The plate 33 is screwed and fixed to the plate 32 and the cover 31 with the circuit board 27 interposed between the plate 33 and the plate 32, and holds the circuit board 27 by sandwiching the circuit board 27 with the plate 32.
The plate 33 is provided with a substantially rectangular through hole 33a in the central portion, and the connector 28 provided on the circuit board 27 exits from the through hole 33a to the outside.

Here, where the base portion 11 has a rectangular shape in a plan view, the cover portion 3 is a fluid control device with the connector 28 directed in the diagonal direction of the rectangular base portion 11 as shown in FIG. 1 (b). It is fixed to V. The connector 28 is fixed in such an orientation for the following reasons. That is, when the gas unit is composed of a plurality of fluid control devices V, the orientation of the adjacent rectangular base portions 11 is aligned to eliminate the gap as much as possible in response to the request for integration, and the gas unit is placed on the base or the manifold block. It is preferable to dispose the fluid control device V. On the other hand, when they are arranged and integrated in this way, it becomes difficult to connect terminals and the like to the connector 28. Therefore, by directing the connector 28 in the diagonal direction of the base portion 11, a wider space for connecting can be taken as compared with the case where the connector 28 is directed toward the fluid control device V arranged right beside it. As a result, it is easy to connect the terminal or the like to the connector 28, prevent problems such as disconnection due to breakage or twisting of the terminal or the like, or the terminal or the like hits the fluid control device V and the operation of the fluid control device V is abnormal. It is also possible to prevent problems such as causing a problem.

The actuator portion 4 is arranged on the bonnet portion 2.
As shown in FIG. 4, the actuator unit 4 includes an actuator body 41, an actuator cap 42, a piston 43, and a spring 44. Although the internal structure of the actuator unit 4 is omitted in FIG. 4, the internal structure is as shown in FIGS. 2 and 3.

The actuator body 41 is interposed between the piston 43 and the bonnet 24.
As shown in FIG. 4, the actuator body 41 has a substantially cylindrical shape, and a through hole 41a through which the piston 43 and the diaphragm retainer 23 are inserted is provided in the central portion along the length direction. As shown in FIGS. 2 and 3, the piston 43 and the diaphragm retainer 23 are in contact with each other in the insertion hole 41a, and the diaphragm retainer 23 moves up and down in conjunction with the vertical movement of the piston 43.

A peripheral wall 411 made of an annular ridge is formed on the upper end surface on the side where the piston 43 is arranged, and is between the flat horizontal surface inside the peripheral wall 411 and the lower end surface of the enlarged diameter portion 431 of the piston 43. The drive pressure introduction chamber S1 into which the drive pressure is introduced is formed in.

Further, a male screw is cut on the outer peripheral surface of the actuator body 41 on the side where the piston 43 is arranged, and the actuator is screwed with the female screw cut on the inner peripheral surface of the actuator cap 42. The body 41 is attached to one end of the actuator cap 42.

The central portion of the actuator body 41 in the length direction is formed in a substantially hexagonal shape in cross-sectional view, and the hexagonal portion in cross-sectional view and the upper end portion of the valve body 1 are integrally sandwiched by the cover 31.

The actuator cap 42 is a cap-shaped member having an open lower end, and houses a piston 43 and a spring 44 inside.
An opening 42a communicating with the drive pressure introduction path 432 of the piston 43 is provided on the upper end surface of the actuator cap 42.
The lower end of the actuator cap 42 is closed by screwing the upper portion of the actuator body 41.

The piston 43 moves up and down in response to the supply and stop of the driving pressure, and causes the diaphragm 22 to abut and separate from the seat 21 via the diaphragm retainer 23.
The diameter of the piston 43 is enlarged substantially in the axial direction in a disk shape, and the portion constitutes the enlarged diameter portion 431. The piston 43 receives the urging force of the spring 44 on the upper surface side of the enlarged diameter portion 431. Further, a drive pressure introduction chamber S1 to which drive pressure is supplied is formed on the lower end side of the diameter-expanded portion 431.

Further, inside the piston 43, a drive pressure introduction path 432 for communicating the opening 93a formed on the upper end surface and the drive pressure introduction chamber S1 formed on the lower end side of the enlarged diameter portion 431 is provided. ing. The opening 93a of the piston 43 communicates with the opening 42a of the actuator cap 42, and an introduction pipe for introducing drive pressure from the outside is connected to the opening 42a, whereby the drive pressure is applied to the drive pressure introduction chamber S1. Be supplied.

An O-ring O21 is mounted on the outer peripheral surface of the enlarged diameter portion 431 of the piston 43, and the O-ring O21 seals between the outer peripheral surface of the enlarged diameter portion 431 of the piston 43 and the peripheral wall 411 of the actuator body 41. ing. An O-ring O22 is also attached to the lower end side of the piston 43, and the O-ring O22 seals between the outer peripheral surface of the piston 43 and the inner peripheral surface of the insertion hole 41a of the actuator body 41. These O-rings O21 and O22 form a drive pressure introduction chamber S1 communicating with the drive pressure introduction path 432 in the piston 43, and the airtightness of the drive pressure introduction chamber S1 is ensured.

The spring 44 is wound around the outer peripheral surface of the piston 43, abuts on the upper surface of the enlarged diameter portion 431 of the piston 43, and urges the piston 43 downward, that is, in a direction of pressing the diaphragm 22.

Here, the opening / closing operation of the valve accompanying the supply and demand of the driving pressure will be referred to. When air is supplied from the introduction pipe (not shown) connected to the opening 42a, the air is introduced into the drive pressure introduction chamber S1 via the drive pressure introduction path 432 in the piston 43. In response to this, the piston 43 is pushed upward against the urging force of the spring 44. As a result, the diaphragm 22 is separated from the seat 21 to open the valve, and the fluid flows.
On the other hand, when air is no longer introduced into the drive pressure introduction chamber S1, the piston 43 is pushed downward according to the urging force of the spring 44. As a result, the diaphragm 22 comes into contact with the seat 21 and the valve is closed, and the flow of the fluid is blocked.

The fluid control device V includes a pressure sensor P and a position sensor M2 as an operation information acquisition mechanism for acquiring operation information in the device.
As shown in FIG. 3, the pressure sensor P is attached to the lower surface of the bonnet wall 25 or the flow path side, and is defined by the diaphragm 22, the partition portion 241 of the bonnet 24, and the diaphragm retainer 23 via the communication hole 241d. It communicates with the closed space S2. The pressure sensor P is composed of a pressure-sensitive element that detects a pressure change, a conversion element that converts a pressure detection value detected by the pressure-sensitive element into an electric signal, and the like. As a result, the pressure sensor P can detect the pressure in the closed space S2 defined by the diaphragm 22, the partition portion 241 of the bonnet 24, and the diaphragm retainer 23.
A packing 29 is interposed at a position where the pressure sensor P communicates with the communication hole 241d to ensure an airtight state.
The pressure sensor P may detect either gauge pressure or atmospheric pressure.

The position sensor M2 can not only grasp the open / closed state of the fluid control device V but also measure the lift amount by sensing the change in the distance between the position sensor M2 and the magnet M1 attached to the diaphragm retainer 23.
The position sensor M2 can detect the opening / closing operation of the valve as follows. That is, while the magnet M1 moves up and down according to the vertical movement of the diaphragm retainer 23, the position sensor M2 is fixed in the valve body 1 together with the bonnet wall 25 and the bonnet 24. As a result, based on the change in the magnetic field generated between the magnet M1 that moves up and down according to the vertical movement of the diaphragm retainer 23 and the position sensor M2 whose position is fixed, the operation of the diaphragm retainer 23 and the opening / closing operation of the valve are performed. It can be detected and the lift amount can be measured.

Various types of position sensors M2 can be used, but the position sensor M2 according to one example has a planar coil, an oscillation circuit, and an integration circuit, and is a distance from a magnet M1 at an opposite position. The oscillation frequency changes according to the change. Then, by converting this frequency with the integrating circuit and obtaining the integrated value, the lift amount can be measured together with the open / closed state of the fluid control device V.

In the present embodiment, the position sensor M2 composed of a magnetic sensor is used, but the present invention is not limited to this, and the positional relationship between the diaphragm retainer 23 and the bonnet 24 or predetermined locations of these members is similar to the above-mentioned position sensor M2. As long as it is a position sensor capable of measuring the distance of, other types of sensors such as an optical position sensor can also be used.
Further, also in the fluid control device V according to the present embodiment, it is desirable to select a position sensor including the position sensor M2 whose position detection accuracy is within ± 0.01 mm to ± 0.001 mm. As a valve for the semiconductor manufacturing process, fine opening control of about ± 0.01 mm is required to realize fine fluid control, but if a detection accuracy exceeding ± 0.001 mm is used, a vacuum near the valve is used. This is because vibration generated by a pump or the like is detected and noise is generated.

One end of a flexible communication flexible cable 26 is connected to the pressure sensor P and the position sensor M2, respectively, and the other end of the flexible cable 26 is a circuit board provided outside the fluid control device V. It is connected to 27. In this example, the circuit board 27 is configured with a processing module that executes information transmission / reception, whereby the operation information acquired from the pressure sensor P and the position sensor M2 for the external terminal connected to the connector 28 is configured. Can be sent.

In the fluid control device V, a flexible substrate (FPC) is used for the flexible cable 26 and the circuit board 27, and the flexible cable 26, the circuit board 27, and the connector 28 are integrally configured. By using the flexible substrate for the flexible cable 26 and the circuit board 27, it becomes possible to utilize the gap between the members as the wiring path, and as a result, the fluid control device V itself is downsized as compared with the case where the covered wire is used. can do.
Further, the processing module may be housed in the fluid control device V separately from the circuit board 27, or may be configured as a part of the pressure sensor P or the position sensor M2.
Further, the type and shape of the connector 28 can be appropriately designed according to various standards.

In addition, as the operation information acquisition mechanism realized by the pressure sensor P and the position sensor M2 described above, a drive pressure sensor for detecting the drive pressure, a temperature sensor for measuring the temperature in the flow path, a piston 43, or a diaphragm presser 23 It is also possible to provide a limit switch or the like for detecting the behavior of.

In the above fluid control device V, the piston 43 and the diaphragm retainer 23 are formed separately, but the magnet M1 is attached to the diaphragm retainer 23. Thereby, it is possible to determine the malfunction of the diaphragm retainer 23. That is, normally, the diaphragm retainer 23 rises following the piston 43 by the valve opening operation, but when the valve is closed, the valve chamber 212 is depressurized to near vacuum, so that the diaphragm 22 is attracted to the seat 21. Therefore, even though the piston 43 is raised, the diaphragm retainer 23 may not follow the piston 43 and may remain in contact with the diaphragm 22. As a result, the diaphragm 22 may remain blocked in the flow path. However, even in such a case, since the magnet M1 is interlocked with the diaphragm presser 23 in the fluid control device V, the operation of the diaphragm presser 23 can be discriminated from the value detected by the position sensor M2, and the malfunction can be discriminated. it can.

The position sensor M2 is attached to the diaphragm presser 23, which does not move up and down like the piston 43 and the diaphragm presser 23, in response to the opening / closing operation of the fluid control device V to determine the malfunction of the diaphragm presser 23. This is possible because the relative operation of the diaphragm retainer 23 can be identified. Therefore, in terms of identifying the operation of the diaphragm retainer 23 and making it possible to determine the malfunction, the member to which the position sensor M2 should be attached is fixed at a predetermined position regardless of the opening / closing operation of the fluid control device V. It should be.

As shown in FIG. 7, the fluid control device V as described above includes a communication processing unit 51 for enabling information to be transmitted to another terminal or device via a predetermined network. It is configured to be able to transmit information to the information processing device 7 via the networks NW1 and NW2.
The communication processing unit 51 transmits the data acquired by the pressure sensor P and the position sensor M2 to the information processing device 7. In this example, a relay device 6 is provided between the fluid control device V and the information processing device 7, and information from the fluid control device V is provided to the information processing device 7 via the relay device 6. ..

Specifically, the data transmitted by the communication processing unit 51 is once sent to the relay device 6 via the network NW1 realized by wireless communication such as Bluetooth (registered trademark), infrared communication, or Zigbee (registered trademark). It is transmitted and transmitted from the relay device 6 to the information processing device 7 via the network NW2 realized by a wireless or wired LAN or the like.

Further, the communication processing unit 51 can transmit the data measured by each sensor at an arbitrarily set predetermined cycle such as one hour or one day. When information is transmitted at a predetermined cycle in this way, power consumption can be suppressed.

● Information processing device The information processing device 7 is a device that determines the presence or absence of an abnormality based on the operation information acquired from the fluid control device V, and performs operation analysis, so-called data mining, based on the collected operation information and the abnormality determination result. Is.
The information processing device 7 includes a CPU (Central Processing Unit), a computer program executed by the CPU, a RAM (Random Access Memory) or ROM (Read Only Memory) for storing the computer program and predetermined data, and an external device such as a hard disk drive. It is composed of hardware resources such as a storage device, and thereby includes a determination processing unit 71, an information storage unit 72, an information extraction unit 73, a correlation analysis unit 74, an abnormality prediction unit 75, and a communication processing unit 76.

For the analysis of the operation of the fluid control device V, not only the operation information obtained from the pressure sensor P and the position sensor M2, but also the usage period of the fluid control device V and the temperature and humidity of the external environment of the fluid control device V. , The thrust force of the piston 43, the average moving speed of the piston 43, the vibration, the internal stress and the hardness of the members constituting the fluid control device V, and the like may be acquired.

Further, the information processing device 7 is provided with various data from the fluid control device V via the relay device 6 by the communication processing unit 76 capable of transmitting and receiving data to and from other terminals, devices, and the like via a predetermined network. Can be received. The information received by the information processing device 7 from the fluid control device V and the information processed by the information processing device 7 are monitored as appropriate in response to a request from a terminal used by a monitor of the fluid control device V or the like. It can be provided to terminals used by people and the like.

The relay device 6 receives data from the fluid control device V via the network NW1 and transmits the received data to the information processing device 7 via the network NW2.
As described above, the network NW1 is, for example, wireless communication such as Bluetooth (registered trademark), infrared communication, or Zigbee (registered trademark), and the network NW2 is, for example, a wired or wireless LAN.
Further, in the present embodiment, the relay device 6 is interposed between the fluid control device V and the information processing device 7, but the fluid control device V and the information processing device 7 are configured to be capable of direct data communication. You can also do it.

The determination processing unit 71 is a functional unit that executes processing for determining the presence or absence of an abnormality in the fluid control device V based on the data acquired by the position sensor M2. Specifically, based on the lift amount measured by the distance change between the position sensor M2 and the magnet M1, a predetermined threshold value held in advance on a reference table or the like is compared with the measured lift amount to match. Alternatively, if it is within a predetermined error range, it can be determined that there is no abnormality, and if it exceeds the predetermined error range and does not match, it can be determined that there is an abnormality. Further, if there is an abnormality, the pattern of the abnormality can be determined based on the change over time in the lift amount.

The abnormality determined here is an opening / closing abnormality caused by the sheet 21 biting a foreign substance, but the specific mode of the opening / closing abnormality determined in the present embodiment is as shown in FIGS. 8 to 10. There are 3 patterns.
FIG. 8 shows one pattern, and as shown in FIGS. 8A and 8B, when the diaphragm 22 comes into contact with the seat 21 due to the valve closing operation, the foreign matter S is the diaphragm 22 and the seat 21. It is sandwiched between them, and the foreign matter S is further sunk into the sheet 21 by the diaphragm 22. On the other hand, as shown in FIG. 8C, the foreign matter S is detached from the seat 21 with the subsequent valve opening operation, and the foreign matter S is normally intervened between the diaphragm 22 and the seat 21 temporarily. Return to the normal state.

In this pattern, the height of the seat 21 when the valve is closed is measured as shown in FIG. 11A based on the lift amount measured by the position sensor M2. That is, in the predetermined time t _1, is in the foreign substance S is state telescoped into a sheet 21, the lower end of the stroke of the diaphragm presser 23, is temporarily higher position than the position at the time of valve closing in the normal. On the other hand, in before and after the predetermined time t _1, the foreign matter S in the sheet 21 has not dent, the lower end of the stroke of the diaphragm presser 23 is in the position for closing at normal.

FIG. 9 shows another pattern, and as shown in FIGS. 9A and 9B, when the diaphragm 22 comes into contact with the seat 21 due to the valve closing operation, the foreign matter S of the diaphragm 22 and the seat 21 It is sandwiched between them, and the foreign matter S is further sunk into the sheet 21 by the diaphragm 22. Then, as shown in FIG. 9C, the foreign matter S does not come off the seat 21 even by the subsequent valve opening operation, and the foreign matter S is deeply sunk into the seat 21 with the repeated opening and closing operations.

In this pattern, the height of the seat when the valve is closed is measured as shown in FIG. 11B based on the lift amount measured by the position sensor M2. In a given time point t _2, located in the foreign object S is state telescoped into a sheet 21, the lower end of the stroke of the diaphragm presser 23, i.e. the position which is regarded as the height of the seat 21 is positioned higher than the position at the time of valve closing in the normal It is in. Predetermined time t ₂ after, embedment to foreign object S is deeper seat 21 with time, the lower end of the stroke of the diaphragm presser 23, gradually approaches the position at the time of closing in normal state, a predetermined time t ₃ In the end, the foreign matter S completely sinks into the seat 21 and takes a position that can be equated with the position when the valve is closed in the normal state.

FIG. 10 shows yet another pattern, and as shown in FIGS. 10A and 10B, when the diaphragm 22 comes into contact with the seat 21 by the valve closing operation, the foreign matter S is the diaphragm 22 and the seat 21. It is sandwiched between. Then, as shown in FIG. 10 (c), a large amount of foreign matter S is cumulatively accumulated due to the other foreign matter S sticking to the foreign matter S sunk into the sheet 21.

In this pattern, the height of the seat 21 at the time of valve closing is measured as shown in FIG. 11C based on the lift amount measured by the position sensor M2. In a given time point t _4, located in the foreign object S is state telescoped into a sheet 21, the lower end of the stroke of the diaphragm presser 23, i.e. the position which is regarded as the height of the seat 21 is positioned higher than the position at the time of valve closing in the normal It is in. Predetermined time t ₄ after the foreign matter is cumulatively deposit with time, the lower end of the stroke of the diaphragm presser 23 takes a higher position. Then, it comes to a predetermined time t _5, the diaphragm presser by the deposited foreign matters S can not be 23 vertical movement, so take the position of the upper end of the stroke.

Abnormal contemplated for three patterns as above, in the pattern shown in FIG. 11 (a), after t _1, the fluid control device V can be regarded as being a normal state, FIG. 11 the pattern shown in (b), t ₃ after, but returned to a normal height when focusing only on the height of the seat 21, is considered as a foreign substance S is dent deeply on the seat 21, the abnormality State is considered to be continuing. If the foreign matter S is deeply sunk into the sheet 21, there is no abnormality in the height of the sheet 21, but there is a concern that the foreign matter S may be present between the diaphragm 22 and the sheet 21 and adversely affect the sealing performance. As for FIG. 11C, since the height of the seat 21 is not at the normal height, it is considered that the abnormal state continues.
When an abnormality is determined, it is required to appropriately stop the operation of the fluid control device V and check the state of the device.

In the abnormality determination process, a means for correcting a predetermined threshold value may be provided as appropriate based on information such as temperature and humidity in the fluid control device V.

The information storage unit 72 is a storage unit that stores the operation information collected from the fluid control device V and the determination result of the abnormality of the fluid control device V. In the information storage unit 72, not only the operation information and the determination result of the abnormality, but also the above-mentioned abnormality pattern, the operation of the fluid control device V along the time series, and the information related to the presence or absence of the abnormality, particularly the fluid control. It is preferable to memorize the information related to the operation and the presence / absence of an abnormality in the predetermined time before and after the open / closed state of the device V is switched so as to contribute to more accurate operation analysis.

With reference to the information storage unit 72, the information extraction unit 73 selectively extracts information related to the abnormality determination result and other operation information having the same predetermined operation information as the analysis target for each fluid control device V. To do.
For example, for the operation information of a plurality of fluid control devices V, the operation time at the same valve opening / closing number (example: 10 million times) and the information related to the abnormality determination result in the operation time are extracted.
In particular, among the operation information data of the fluid control device V, the data before and after the open / closed state of the fluid control device V is switched, which is detected from the change of the pressure sensor P and the position sensor M2, is cut out and input data. And. This reflects that it is effective in abnormal prediction to measure the dynamic change of the sensor measurement value during the operation of the fluid control device V, and the number of dimensions of the input data is reduced to learn later. The calculation cost of can be reduced. The predetermined time is defined as the time required for opening and closing the fluid control device V (the time from the start of introducing the driving pressure until the fluid control device V is fully opened. The time between the two dotted lines in FIG. 15). Is 1 to 5 times the time (corresponding to this time), so that the required range of data can be extracted without waste. Further, by transmitting the data transmitted from the fluid control device V in advance within the range of this time, the amount of communication data can be reduced and the power consumption of the fluid control device V can be suppressed.

The correlation analysis unit 74 analyzes the correlation between the predetermined operation of the fluid control device V and the occurrence of an abnormality by comparing the information extracted by the information extraction unit 73. In the first learning, the fluid in which the abnormality has occurred Based on the past operation information of the control device V, the input data for a predetermined period before the abnormality occurs (hereinafter referred to as the period immediately before the failure), the input data after the abnormality occurs, and the normal operation before that. Perform supervised learning to classify input data. This learning is performed by, for example, a stochastic gradient descent (SGD) method using an error backpropagation method for a neural network model.

The discrimination performance of the trained model differs depending on the setting of the length of the period immediately before the failure, and the length of the predetermined period is also a hyperparameter to be adjusted as well as the hyperparameters such as the number of layers and the number of nodes of the neural network. The adjustment of these hyperparameters is selected by, for example, an optimization algorithm, and a value having a high discriminant ability can be selected. On the other hand, depending on the application of the valve user, clustering may be performed by preparing two or more types of periods immediately before the failure in response to a case where another value of the period immediately before the failure is to be known. Further, different classifications may be created for each type of failure, and it is possible to predict which failure will occur within a predetermined period.

According to the analysis, for example, with respect to the operation information of a plurality of fluid control devices V, the same 10 million times of valve opening and closing times are obtained based on the operation time required to open and close the valve 10 million times and the judgment result of abnormality in the operation time. Even so, it is possible to analyze whether or not the probability of occurrence of an abnormality differs depending on whether it is the number of times counted in 3 months or the number of times counted in 3 years.

In the second learning, unsupervised learning using an autoencoder is performed in order to detect in advance a special abnormality with a small number of data. The autoencoder inputs the input data when the valve is operating normally to the model composed of the neural network, and learns so that the same data is output. By setting the number of dimensions of the hidden layer of this neural network to be smaller than the number of dimensions of input data and output data, we learned an autoencoder that can appropriately reproduce the original data only for the pattern of input data during normal operation. Can be made to.

The abnormality prediction unit 75 calculates the abnormality occurrence probability of the fluid control device V by referring to the operation information of the fluid control device V stored in the information storage unit 72 based on the analysis result by the correlation analysis unit 74. Therefore, an abnormality of the fluid control device V is expected.
By classifying the trained model obtained by the first learning by inputting the measured value of the current sensor data, the probability that the fluid control device V is in the period immediately before the failure can be calculated (first abnormality). Anticipatory means 751). This probability is the probability of anomaly occurring that it breaks within a predetermined period when the reading is changed.

In addition, the input data obtained from the current sensor is passed through the autoencoder obtained by the second learning, the output is compared with the original input, and the distance between input and output is calculated using the L2 norm or the like to obtain a predetermined threshold value. Compare (second anomaly anticipation means 752). The autoencoder is configured so that the original data can be restored if it is data during normal operation, but since the original data cannot be restored correctly during abnormal operation, the difference between the input and output becomes large, so set the threshold value. If it exceeds the limit, an abnormality in the fluid control device V can be detected. By using this method in combination with the above-mentioned supervised learning, it is possible to detect in advance an abnormal state of an obvious outlier (for example, a sensor failure, an extreme change in operating temperature, etc.) that is not prepared as teacher data. It is possible to improve the reliability of the determination of the period immediately before the failure. That is, it is possible to deal with the problem that supervised learning in the first learning is not guaranteed to behave in a region without teacher data to some extent. The fluid control device V is often placed in a completely different operating environment from before due to modification of the device on which it is mounted, and can also be used as index data as to whether or not re-learning should be performed.

If an abnormality can be predicted, the information is notified to the administrator terminal or the like used by the administrator of the fluid control device V, the information is notified to the fluid control device V, and the fluid control device V is notified. The warning display may be performed by the warning display means provided in the above.

In addition, the occurrence of an abnormality may be predicted by the above data mining, and the expected information and the presence or absence of an abnormality that actually occurred may be compared and analyzed to improve the accuracy of the correlation analysis.

In the above-described embodiment, the example in which the information processing device 7 includes the determination processing unit 71 has been described, but the fluid control device V can also be configured to have the same functional units as the determination processing unit 71. In this case, for example, as shown in FIG. 12, the information processing device 7 is provided with an information collecting unit 77 that collects operation information and an abnormality determination result from the fluid control device V. That is, the information collecting unit 77 requests the fluid control device V to transmit the operation information and the abnormality determination result by the communication processing unit 76, collects such information, and the information processing device 7 is based on the collected information. And perform data mining.

In the above embodiment, the operation information in the fluid control device V may be collected not only from the fluid control device V but also from other devices. For example, it may be collected from a terminal that measures the temperature and humidity of the place where the fluid control device V is installed, or information input by the administrator terminal of the administrator of the fluid control device V may be collected. May be good.

Further, the fluid control device V may be provided with a purge gas supply means for supplying the purge gas for discharging the foreign matter S on the sheet 21 into the flow path based on the abnormality determination result by the determination processing unit 71. If the height of the sheet 21 measured from the lift amount becomes normal as a result of supplying the purge gas into the flow path, it is considered that the foreign matter S has been eliminated, and the process can be continued normally.

Further, in addition to the above-mentioned functional unit, the fluid control device V may be provided with another functional unit for outputting operation information and an abnormality determination result. For example, an information display unit such as a liquid crystal panel that displays the lift amount and the abnormality determination result may be provided. Further, a body warning display unit such as an LED that emits light when an abnormality occurs may be provided in response to the result of the abnormality determination.

Further, the embodiment of the present invention is not limited to the above-described embodiment, and those skilled in the art can change or add various configurations, means, or functions within a range not departing from the scope of the present invention. It is possible.

V Fluid control equipment 1 Valve body 11 Base part 12 Cylindrical part 2 Bonnet part 21 Seat 22 Diaphragm 23 Diaphragm presser 24 Bonnet 25 Bonnet wall 26 Flexible cable 27 Circuit board 28 Connector 29 Packing 3 Cover part 31 Cover 32 Plate 33 Plate 4 Actuator Unit 41 Actuator body 42 Actuator cap 43 Piston 44 Spring 51 Communication processing unit 6 Relay device 7 Information processing device 71 Judgment processing unit 72 Information storage unit 73 Information extraction unit 74 Correlation analysis unit 75 Abnormality prediction unit 751 First abnormality prediction means 752 Second abnormality anticipation means 76 Communication processing unit 77 Information gathering unit M1 Magnet M2 Position sensor P Pressure sensor S1 Drive pressure introduction chamber S2 Closed space

Claims (10)

A system that analyzes the operation of fluid control equipment.
The fluid control device and an information processing device that executes data mining based on the information acquired from the fluid control device are configured to be capable of transmitting information.
The fluid control device is
As the operation information of the fluid control device, there is an operation information acquisition mechanism for acquiring the lift amount associated with the opening and closing of the fluid control device.
The information processing device
A determination processing means for determining an abnormality due to a foreign substance on the sheet of the fluid control device and a pattern of the abnormality by comparing the lift amount with a predetermined threshold value.
An information storage means for storing operation information and abnormality determination results of the fluid control device, and
With reference to the information storage means, information related to the determination result and other operation information having the same predetermined operation information as the analysis target, before and after the open / closed state of the fluid control device is switched. An information extraction means for selectively extracting information at a predetermined time for each of the fluid control devices,
It has a correlation analysis means for analyzing the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality by comparing the extracted information.
Motion analysis system for fluid control equipment. The determination processing means is at least
Based on the change over time in the lift amount, it is determined that the pattern of the abnormality is either temporary inclusion of foreign matter in the sheet, infiltration of foreign matter into the sheet, or cumulative accumulation of foreign matter on the sheet. To do,
The motion analysis system for the fluid control device according to claim 1. The information processing device
Based on the analysis result by the correlation analysis means, the fluid control device is calculated by calculating the abnormality occurrence probability of the fluid control device by referring to the operation information of the fluid control device stored in the information storage means. Further have anomalous anticipatory means for anticipating anomalies,
The motion analysis system for the fluid control device according to claim 1 or 2. The anomaly anticipation means
By supervised learning, the first abnormality prediction means for determining whether the operation information has a characteristic peculiar to the period immediately before the failure, and
It has a second abnormality predicting means for determining whether or not the operation information is in the normal operation state by an autoencoder that has learned the operation information during normal operation.
The motion analysis system for the fluid control device according to claim 3. The fluid control device further includes a purge gas supply means for supplying a purge gas for discharging foreign matter into the flow path based on the abnormality determination result of the fluid control device.
The motion analysis system for a fluid control device according to any one of claims 1 to 4. The fluid control device is
A stem that slides according to the opening and closing operation,
Has a presser foot adapter that presses the periphery of the diaphragm,
The operation information acquisition mechanism is configured by a position sensor attached to the presser foot adapter and detecting a change in distance from a predetermined position of the stem.
The motion analysis system for a fluid control device according to any one of claims 1 to 5. Further having a magnet, which is attached to a predetermined position near the presser foot adapter,
The position sensor comprises a magnetic sensor inside the presser foot adapter, attached to a surface facing the stem, and detecting a change in distance from the magnet.
The motion analysis system for the fluid control device according to claim 6. The position detection accuracy of the position sensor is ± 0.01 mm to ± 0.001 mm.
The motion analysis system for the fluid control device according to claim 6 or 7. A method of analyzing the operation of fluid control equipment
As the operation information of the fluid control device, the fluid control device having an operation information acquisition mechanism for acquiring a lift amount associated with opening and closing of the fluid control device, and the fluid control device.
An information processing device that executes data mining based on the information acquired from the fluid control device, and a system configured to be able to transmit information
A determination process for determining an abnormality and an abnormality pattern due to foreign matter on the seat of the fluid control device by comparing the lift amount with a predetermined threshold value.
With reference to the information storage means for storing the operation information of the fluid control device and the abnormality determination result, the information related to the determination result is the other operation information having the same predetermined operation information as the analysis target. Information extraction processing that selectively extracts information at predetermined times before and after the open / closed state of the fluid control device is switched for each fluid control device.
By comparing the extracted information, a correlation analysis process for analyzing the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality is executed.
Operation analysis method for fluid control equipment. A computer program for analyzing the operation of fluid control equipment.
As the operation information of the fluid control device, the fluid control device having an operation information acquisition mechanism for acquiring a lift amount associated with opening and closing of the fluid control device, and the fluid control device.
For an information processing device that executes data mining based on the information acquired from the fluid control device and a system configured to be able to transmit information.
A determination process for determining an abnormality and an abnormality pattern due to foreign matter on the seat of the fluid control device by comparing the lift amount with a predetermined threshold value.
With reference to the information storage means for storing the operation information of the fluid control device and the abnormality determination result, the information related to the determination result is the other operation information having the same predetermined operation information as the analysis target. Information extraction processing that selectively extracts information at predetermined times before and after the open / closed state of the fluid control device is switched for each fluid control device.
By comparing the extracted information, a correlation analysis process for analyzing the correlation between a predetermined operation of the fluid control device and the occurrence of an abnormality is executed.
Computer program.

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