JP2020068326A - Adherend processing method - Google Patents

Abstract

To execute integration of an adherend with a frame member, and exfoliation of a sheet material from the adherend without breaking the adherend.SOLUTION: An integration step of sticking a first adhesion sheet AS1 to the other side WK2 of an adherend WK having one side WK1 to which a sheet material SM is stuck and a frame member RF, and forming a unit piece UP with the sheet material SM by integrating them, and an exfoliation step of forming the unit piece UP by exfoliating the sheet material SM from the unit piece UP with the sheet material SM are executed. In the pre-stage of the integration step, and a breakage prevention sheet sticking step of sticking a breakage prevention sheet AS2 to the other side WK2 of the adherend WK is executed. In the breakage prevention sheet sticking step, a maximum load imparted in the subsequent steps is considered, and a breakage prevention sheet AS2 having such a rigidity as the adherend WK is not broken down by the maximum load is selected.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an adherend processing method.

  Conventionally, a first adhesive sheet is attached to the other surface of an adherend having a sheet material attached to one surface and a frame member, and the sheet material is peeled from the adherend to form an integrated article. Is known (for example, refer to Patent Document 1).

JP, 2005-317712, A

  However, in the wafer processing method (adherent processing method) described in Patent Document 1, the other surface of the wafer W (adherent) having the protective tape PT (sheet material) attached to one surface and the ring A series of operations for adhering the dicing tape DT (first adhesive sheet) to the frame RF (frame member) and peeling the sheet material from the adherend to form a work K (integral object) without the sheet material is performed. When performing, the adhesive sheet S is attached to the other surface of the adherend, but the step of integrating the adherend and the ring frame RF by the tape attaching unit 16 (integration step), or the sheet material by the tape peeling unit 17 In the peeling process (peeling process), the adherend is rarely damaged due to the load of any of the processes.

  An object of the present invention is a method for treating an adherend, which can integrate the adherend with a frame member and peel the sheet material from the adherend without damaging the adherend. To provide.

  The present invention employs the configurations described in the claims.

According to the present invention, in the damage prevention sheet attaching step, considering the maximum load in the subsequent steps, a damage prevention sheet having rigidity such that the adherend is not damaged by the maximum load is selected, It is possible to integrate the adherend to the frame member and peel the sheet material from the adherend without damaging the adherend.
Rigidity is a property that an object is difficult to be deformed by an external force such as compression, displacement, and twist.

(A)-(C) is explanatory drawing of the to-be-adhered body processing method which concerns on embodiment of this invention.

An embodiment of the present invention will be described below with reference to the drawings.
The X axis, the Y axis, and the Z axis in the present embodiment are in a relationship of being orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y axis as a reference, when the direction is shown, “up” is the arrow direction of the Z axis, “down” is the opposite direction, and “down” is the opposite direction. “Left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

The adherend processing method of the present invention can be implemented by, for example, the following adherend processing device EA.
That is, the adherend processing apparatus EA arranges them so that the adherend WK having the sheet material SM attached to one surface WK1 and the ring frame RF as a frame member have a predetermined positional relationship. And an arranging means 10 for carrying out the above, and an adhering step of adhering the first adhesive sheet AS1 to the other surface WK2 side of the adherend WK and the ring frame RF and integrating them to form an integrated body UP with the sheet material SM. Integrated means 20 for carrying out the above, first carrying means 30 for carrying out the first carrying step for carrying the integrated material UP with the sheet material SM, and peeling the sheet material SM from the integrated material UP with the sheet material SM for integration. The stripping means 40 for performing the stripping step for forming the article UP, the second transporting means 50 for performing the second transporting step for transporting the integrated article UP, and the disposing means between the disposing means 10 and the integrating means 20. Then, the transporting means 70 for transporting the adherend WK and the ring frame RF is provided with the damage preventing sheet attaching means 60 for performing the damage preventing sheet attaching step for attaching the damage preventing sheet AS2 to the other surface WK2 of the adherend WK. It is located near.

  The arranging means 10 is composed of a plurality of arms, and within a working range of the arranging means 10, a so-called multi-joint robot as a drive device capable of displacing what is supported by the tip arm 11A as a working part at any position and at any angle. 11 and a support arm 12 having a support surface 12A supported by the tip arm 11A and having a support surface 12A that can be adsorbed and held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown).

  The unifying unit 20 supports the first original fabric RS1 in which the first adhesive sheet AS1 is temporarily attached to one surface of the strip-shaped first release sheet RL1 and a guide that guides the first original fabric RS1. The roller 21B, the peeling plate 22 as a peeling unit that bends the first peeling sheet RL1 at the peeling edge 22A and peels the first adhesive sheet AS1 from the first peeling sheet RL1, and the first peeling plate 22 peeled from the first peeling sheet RL1. A pressing roller 23 as pressing means for pressing and adhering the adhesive sheet AS1 to one surface RF1 of the ring frame RF and the other surface WK2 of the adherend WK, and an output (not shown) of a rotation motor 24A as a driving device. An adherend processing apparatus driven by a drive roller 24 supported by a shaft and sandwiching the first release sheet RL1 between the pinch roller 24B and a drive device (not shown). While the automatic operation A is performed, a predetermined tension is always applied to the first release sheet RL1 existing between the pinch roller 24B and the recovery roller 24C as a recovery unit that recovers the first release sheet RL1. It has and.

  The first transporting means 30 is a chuck that is supported by a rotary motor 32 as a driving device supported by a slider 31A of a linear motor 31 as a driving device, and an output shaft 32A thereof, and that grips the integral member UP with the sheet material SM. The chuck motor 33 is provided as a driving device (holding means) having the arm 33A.

  The peeling means 40 is rotatable on a support roller 41 that supports a strip-shaped peeling tape PT as a holding means, a guide roller 42 that guides the peeling tape PT, and an output shaft 43A of a linear motion motor 43 that is a driving device. Is driven by a peeling roller 44 supported by a driving roller 45 supported by an output shaft (not shown) of a rotation motor 45A as a driving device, and a pinch roller 45B sandwiches the peeling tape PT, and a driving device (not shown). As recovery means for constantly applying a predetermined tension to the peeling tape PT existing between the pinch roller 45B and the peeling tape PT while the adherend processing device EA is automatically operated. The collecting roller 45C is provided.

  The second carrying means 50 is composed of a plurality of arms, and within the working range, what is supported by the tip arm 51A as a working unit can be displaced at any position and at any angle. The joint robot 51 and a support arm 52 supported by the tip arm 51A and having a support surface 52A that can be suction-held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector are provided.

  The breakage prevention sheet attaching unit 60 guides the support roller 61A that supports the second original fabric RS2 in which the damage prevention sheet AS2 is temporarily attached to one surface of the strip-shaped second release sheet RL2, and the second original fabric RS2. A guide roller 61B, a peeling plate 62 as a peeling unit that bends the second peeling sheet RL2 at the peeling edge 62A and peels the damage preventing sheet AS2 from the second peeling sheet RL2, and a damage preventing member peeled from the second peeling sheet RL2. The sheet AS2 is pressed against the other surface WK2 of the adherend WK by a pressing roller 63 as a pressing unit for sticking the sheet W2, and an output shaft (not shown) of a rotation motor 64A as a driving device, and a pinch roller 64B. 2 While the driving roller 64 that holds the release sheet RL2 and a driving device (not shown) drive the adherend processing device EA to perform automatic operation. The second release sheet RL2 existing between the pinch roller 64B and the second release sheet RL2 is supported by the adherend transfer means 70 and a recovery roller 64C as a recovery means for recovering the second release sheet RL2. , And a coil heater 65 as an energy applying means capable of applying heat as predetermined energy.

  The transporting means 70 includes an adherend mounting base 71 on which an adherend WK having a sheet material SM attached to one surface WK1 is arranged, a ring frame mounting base 72 capable of mounting a plurality of ring frames RF, An outer table 74 supported by a slider 73A of a linear motor 73 as a drive device and having an upper surface as a support surface 74A, and a linear motor 75 as a drive device supported in a recess 74B formed in the outer table 74. An inner table 76 which is supported by the output shaft 75A and has an upper surface serving as a support surface 76A; and a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector for applying a suction force to the support surfaces 74A and 76A. ing. A notch 74C into which the chuck arm 33A is inserted is formed at the rear edge of the outer table 74. The heating means 65 is built in the inner table 76.

The adherend processing method of the present invention by the above-described adherend processing apparatus EA will be described.
First, with respect to the adherend processing apparatus EA in which each member is arranged at the initial position shown by the solid line in FIG. 1A, the user of the adherend processing apparatus EA (hereinafter, simply referred to as “user”) The second original fabric RS1, the peeling tape PT and the ring frame RF are set as shown in the figure, and an automatic operation start signal is input through an operation means (not shown) such as an operation panel or a personal computer. Then, the unifying unit 20 and the breakage prevention sheet attaching unit 60 drive the rotation motors 24A and 64A to feed out the first and second original fabrics RS1 and RS2, and the first adhesive sheet AS1 and the breakage prevention sheet AS2 at the head are removed. When the front end portions in the feeding direction are peeled by the peeling edges 22A, 62A of the peeling plates 22, 62 from the first and second peeling sheets RL1, RL2 by a predetermined length, the driving of the rotation motors 24A, 64A is stopped.

Then, as shown in FIG. 1A, the user or a transporting device (not shown) such as a drive device or a conveyor places the adherend WK on the adherend placement table 71 with the sheet material SM facing downward. Then, the placement process described below is performed by the placement unit 10.
That is, in the arranging step, the arranging means 10 drives the multi-joint robot 11, the supporting arm 12 is brought into contact with the other surface WK2 of the adherend WK on the adherend placing table 71, and a depressurizing means (not shown) is used. It drives and starts adsorption holding of the adherend WK on the support surface 12A. After that, the arranging means 10 drives the articulated robot 11, and the sheet material SM attached to the adherend WK sucked and held by the support arm 12 is placed on the inner table 76. The means is driven to start sucking and holding the adherend WK on the support surface 76A. Next, the disposing unit 10 stops driving the depressurizing unit (not shown), releases the suction holding of the adherend WK on the support surface 12A, and then drives the articulated robot 11 to move the support arm 12 to the adherend WK. Is separated from the other surface WK2. Then, the arranging means 10 drives the articulated robot 11 and the depressurizing means (not shown) to bring the support arm 12 into contact with one surface RF1 of the ring frame RF on the ring frame mounting table 72, and the ring on the support surface 12A. After the suction holding of the frame RF is started, the ring frame RF is placed on the outer table 74. Next, when the carrying means 70 drives the depressurizing means (not shown) to start sucking and holding the ring frame RF on the support surface 74A, the disposing means 10 stops driving the depressurizing means (not shown) and the ring frame RF on the support surface 12A. After releasing the RF suction holding, the articulated robot 11 is driven to return the support arm 12 to the initial position, and the placement process is completed. At this time, when the adherend WK is arranged so as to fit inside the opening RFH of the ring frame RF in a top view looking down from above, they are arranged so as to have a predetermined positional relationship.
In the arrangement step described above, for example, when the adherend WK is placed on the inner table 76, a maximum load is applied to the adherend WK, and this load is set as the first load.

Here, in the case of the present embodiment, the damage prevention sheet attaching step of attaching the damage prevention sheet AS2 to the other surface WK2 of the adherend WK is performed before the integration step and after the placement step. In this damage prevention sheet attaching process, the maximum loads (second load, third load, fourth load) applied in the subsequent processes (integration process, first carrying process, peeling process, and second carrying process). In consideration of the load and the maximum load of the fifth load), the breakage prevention sheet AS2 having rigidity such that the adherend WK is not damaged by the maximum load is selected.
That is, in the step of attaching the damage prevention sheet, the conveying means 70 drives the linear motion motor 75, and the other surface WK2 of the adherend WK is positioned at the same plane as the one surface RF1 of the ring frame RF, or After raising the inner table 76 to a height above one surface RF1 of the ring frame RF, the linear motor 73 is driven to move the slider 73A to the left. Here, in the damage prevention sheet attaching means 60, the second original fabric RS2 having the damage prevention sheet AS2 having the rigidity as described above is set in advance by the user as shown in FIG. 1 (A). . After that, when the ring frame RF reaches a predetermined position with respect to the damage prevention sheet attaching means 60, the damage prevention sheet attaching means 60 drives the rotation motor 64A to move the second original fabric RS2 according to the moving speed of the slider 73A. Let out. As a result, the breakage prevention sheet AS2 is peeled off from the second release sheet RL2, and the breakage prevention sheet AS2 peeled off from the second release sheet RL2 is pressed by the pressing roller 63 as shown by the chain double-dashed line in FIG. 1A. Is pressed and attached to the other surface WK2 of the adherend WK. Next, when the front end portion of the next damage prevention sheet AS2 following the leading damage prevention sheet AS2 in the feeding direction is separated from the second release sheet RL2 by the release edge 62A of the release plate 62 for a predetermined length, the damage prevention sheet AS2 is released. The drive of the rotation motor 64A is stopped, and the damage prevention sheet attaching process is completed.
When the breakage prevention sheet AS2 is hardened by heat as a predetermined energy and its rigidity is improved, the breakage prevention sheet sticking means 60 drives the coil heater 65 to apply heat to the breakage prevention sheet AS2. You may implement the energy provision process which hardens the damage prevention sheet AS2.

When the damage prevention sheet attaching process is completed, the following integrating process is performed by the integrating means 20.
That is, in the integration step, while the linear motor 73 is being driven to move the slider 73A to the left, the transporting means 70 drives the linear motion motor 75 to move the upper surface of the breakage prevention sheet AS2 to one side of the ring frame RF. It is located in the same plane as the surface RF1. Then, when the ring frame RF reaches a predetermined position with respect to the unifying means 20, the unifying means 20 drives the rotation motor 24A and feeds the original fabric RS in accordance with the moving speed of the slider 73A. As a result, the first adhesive sheet AS1 is peeled off from the first release sheet RL1, and the first adhesive sheet AS1 released from the first release sheet RL1 is pressed as indicated by the chain double-dashed line in FIG. 1 (A). The roller 23 is pressed and attached to the one surface RF1 of the ring frame RF and the breakage prevention sheet AS2 to form an integral body UP with the sheet material SM. Next, when the front end portion of the first adhesive sheet AS1 next to the leading first adhesive sheet AS1 in the feeding direction is peeled by the peeling edge 22A of the peeling plate 22 from the first peeling sheet RL1 for a predetermined length, the unifying means 20. Stops driving the rotation motor 24A, and the integration process is completed.
In the integration step, the maximum load is applied to the adherend WK when the first adhesive sheet AS1 is pressed onto the damage prevention sheet AS2 by the pressing roller 63 and is adhered to the adherend WK. Load 2

When the integration step is completed, the following first transfer step by the first transfer means 30 is performed.
That is, in the first carrying step, when the notch 74C reaches the front of the chuck arm 33A by continuing the movement of the slider 73A to the left by the driving of the linear motor 73, the carrying means 70 stops the driving of the linear motor 73. After that, the first conveying means 30 drives the chuck motor 33, and the chuck arm 33A holds the integral material UP with the sheet material SM as shown by the chain double-dashed line in FIG. 1 (B). After that, when the transporting means 70 stops the driving of the depressurizing means (not shown) and releases the suction holding of the sheet material SM-equipped integral article UP on the holding surfaces 74A and 76A, the first transporting means 30 causes the linear motor 31 and the rotation motor. By driving 32, as shown by the chain double-dashed line in FIG. 3 (B), the integral member UP with sheet material SM held by the chuck arm 33A is lifted to a predetermined height, and the integral article UP with sheet material SM is moved up and down. Invert. Next, the transporting means 70 drives the linear motion motor 75 to return the inner table 76 to the initial position, and then the first transporting means 30 drives the linear motor 31 to set the first adhesive sheet AS1 to the lower side. The unitary object UP with the sheet material SM is placed on the holding surfaces 74A and 76A. Then, when the transporting means 70 drives the depressurizing means (not shown) to start sucking and holding the integral material UP with the sheet material SM on the holding surfaces 74A and 76A, the first transporting means 30 drives the chuck motor 33 and the chuck arm. 33A is returned to the initial position, and the first transfer process is completed.
In the first transporting step, the maximum load is applied to the adherend WK when the integrated body UP with the sheet material SM is turned upside down, and this load is used as the third load.

When the first carrying step is completed, the peeling means 40 carries out the following peeling step.
That is, in the peeling process, the transporting means 70 drives the linear motor 73 to move the slider 73A to the left, and as shown by the chain double-dashed line in FIG. When the left end of the SM reaches directly below the lowermost end of the peeling roller 44, the driving of the linear motor 73 is stopped. Next, when the peeling means 40 drives the linear motor 43 and lowers the peeling roller 44 to attach the peeling tape PT to the left end portion of the sheet material SM, the conveying means 70 and the peeling means 40 rotate the linear motor 73 and rotate. The motor 45A is driven, and the peeling tape PT is sent in the direction of the collecting roller 45C in accordance with the moving speed of moving the slider 73A to the left. As a result, as shown in FIG. 3C, when the sheet material SM is peeled off from the adherend WK and the entire sheet material SM is peeled off from the adherend WK to form the integral article UP, the peeling means After 40 drives the linear motor 43 and returns the peeling roller 44 to the initial position, the driving of the rotation motor 45A is stopped, and the peeling process is completed.
In the peeling step, for example, when the peeling tape PT is attached to the left end portion of the sheet material SM, the maximum load is applied to the adherend WK, and this load is set as the fourth load.

When the peeling process is completed, the following second carrying process by the second carrying means 50 is carried out.
That is, in the second carrying step, when the slider 73A reaches the predetermined position by continuing the movement of the slider 73A to the left by driving the linear motor 73, the carrying means 70 stops the driving of the linear motor 73. After that, the second transfer means 50 drives the articulated robot 51 to bring the support arm 52 into contact with the other surface RF2 of the ring frame RF on the outer table 74, and then drives the depressurizing means (not shown) to support it. The suction holding of the ring frame RF on the surface 52A is started. Next, after the transporting means 70 stops the driving of the depressurizing means (not shown) and releases the suction holding of the integral object UP on the holding surfaces 74A and 76A, the second transporting means 50 drives the articulated robot 51 to perform the integral operation. When the article UP is conveyed to the next step, the conveyance means 70 drives the linear motor 73 to return the slider 73A to the initial position. Then, the second transfer means 50 drives the articulated robot 51 to return the support arm 52 to the initial position, and thereafter the same operation as described above is repeated.
In the second transfer step, for example, when separating the integrated article UP from the holding surfaces 74A and 76A, the maximum load is applied to the adherend WK, and this load is set as the fifth load.

  According to the embodiment as described above, in the damage prevention sheet attaching step, the maximum load (second load, first load, second transfer step, second transfer step) in the subsequent steps (integration step, first transfer step, peeling step and second transfer step) is performed. Considering the maximum load of the third load, the fourth load, and the fifth load, for example, the fourth load, the rigidity such that the adherend WK is not damaged by the maximum load (the fourth load). Since the breakage prevention sheet AS2 including is adhered, the adherend WK is integrated with the ring frame RF and the sheet material SM is separated from the adherend WK without damaging the adherend WK. And can be carried out.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for the means and steps, let alone the constituents of one embodiment shown in the above-mentioned embodiment. The process is not limited at all. For example, in the integration step, the first adhesive sheet is attached to the other surface side of the adherend having the sheet material attached to one surface and the frame member, and these are integrated to form an integrated article with a sheet material. As far as the process is concerned, there is no limitation as long as it is within the technical scope in view of the common technical knowledge at the time of application (other means and processes are the same).

  In the disposing step, after the ring frame RF is placed on the outer table 74, the adherend WK to which the sheet material SM is attached may be placed on the inner table 76, or the sheet material SM is attached. Both the adherend WK and the ring frame RF may be placed on the inner table 76 and the outer table 74 at the same time. For example, the adherend WK may be placed in the opening RFH of the ring frame RF in a top view. May be arranged so as to have a predetermined positional relationship by arranging so that the sheet material SM does not fit on one surface WK1 before the adherend processing method of the present invention. If the adhered adherend WK and the ring frame RF are arranged so as to have a predetermined positional relationship, the adherend adherence processing method of the present invention need not be performed.

  In the integration step, a closed loop shape or an entire cut in the short width direction is formed in a band-shaped adhesive sheet base material temporarily attached to a release sheet, and a predetermined area partitioned by the cut is first The raw material used as the adhesive sheet AS1 may be fed out, or a raw material in which a strip-shaped adhesive sheet base material is temporarily attached to a release sheet is adopted, and the adhesive sheet base material is cut in a closed loop shape or in the entire short width direction. The slit may be formed by a cutting means, and the predetermined region partitioned by the slit may be the first adhesive sheet AS1. When the first original sheet RS1 is supported, the first original sheet RS1 is wound. Instead, for example, it may be supported in the state of fanfold folding, or when collecting the first release sheet RL1, for example, fanfold folding, shredding, or winding or fanfold folding is performed without winding. Tari It may be simply collected without being collected, or the pressure roller 23 or the like is moved without moving or while moving the adherend WK or the ring frame RF, and the one surface RF1 of the ring frame RF and the object to be covered. The first adhesive sheet AS1 may be attached to the other surface WK2 side of the body WK to integrate them to form an integrated article UP with the sheet material SM, or the first adhesive sheet AS1 may be opposite to the adhesive surface. From the side, and the first adhesive sheet AS1 is held by a holding member, and is attached to one surface RF1 of the ring frame RF and the other surface WK2 of the adherend WK. May be carried out, or may be carried out by an integrated means such that the pressing roller 23 is arranged upside down or laterally arranged, or the pressing roller 23 is separated from the ring frame RF or the adherend WK so as to approach it. A drive device may be employed as the member contacting / separating means, and the ring frame RF or the adherend WK may be integrated by a means capable of preventing stress or damage. When the first adhesive sheet AS1 is attached to the one surface RF1 of the RF and the damage prevention sheet AS2, the upper surface of the damage prevention sheet AS2 may be above or below the one surface RF1 of the ring frame RF.

  The first conveying step holds at least one of the ring frame RF, the first adhesive sheet AS1, the adherend WK, and the sheet material SM attached to the adherend WK in the unitary article UP with the sheet material SM. Alternatively, the outer table 74 and the inner table 76 may be moved to raise and lower the united body UP with the sheet material SM without raising the united body UP with the sheet material SM. May be carried out by the first conveying means supported by the sheet material SM, or the sheet material SM with the sheet material SM can be peeled off from the adherend WK without turning upside down the sheet material SM with the sheet material SM. If it is not necessary to convey the UP, it is not necessary to carry out the UP. For example, each of the integration means and the peeling means is individually provided with a transportation means for transporting the integrated material UP with the sheet material SM. If it is, it may be configured to convey the sheet material SM with one piece UP to transport means of the peeling means from the transport means, for integrating means.

  In the peeling step, the peeling tape PT may be attached to the sheet material SM without stopping the movement of the slider 73A, or the peeling tape PT may be attached to the sheet material SM without moving the peeling roller 44 up and down. Alternatively, the sheet material SM may be held by a holding member that is supported by the output shaft of a direct drive motor as a driving device and that can be suction-held by a pressure reducing means such as a pressure reducing pump or a vacuum ejector. The sheet material SM may be separated from the adherend WK to be peeled off, or may be peeled off by a peeling means supported by the conveying means 70, or a sheet-shaped peeling tape PT is attached to the sheet material SM. Then, the sheet material SM may be peeled from the adherend WK by applying a tension to the peeling tape PT of the sheet, or the adherend WK may move without moving or while moving. WK The sheet material SM may be peeled off from the sheet material. For example, a sheet material whose adhesive strength is reduced by electromagnetic waves such as infrared rays, ultraviolet rays, visible rays, sound waves, X-rays or gamma rays, and adhesive strength reducing energy such as hot water or hot air. When SM is adopted, the adhesive force reduction energy applying step of applying adhesive force reducing energy to the sheet material SM may be performed before the sheet material SM is separated from the adherend WK.

  In the second transporting step, at least one of the ring frame RF, the first adhesive sheet AS1 and the adherend WK in the unitary article UP may be held, or by the second transporting means supported by the transporting means 70. It may be carried out, or when the integrated article UP is transported after the adherend processing method of the present invention is carried out, it may not be carried out in the adherend processing method of the present invention.

The damage prevention sheet attaching step may be performed before the arranging step, and in this case, for example, a transporting means (not shown) places the adherend WK to which the sheet material is attached on the adherend placing table 71. After that, the damage prevention sheet attaching means 60 attaches the damage prevention sheet AS2 to the other surface WK2 of the adherend WK, and then the arranging means 10 attaches the adherend WK and the ring frame RF to the inner table 76 and the outer table. 74, and then an integration process or the like may be performed. At this time, in the damage prevention sheet sticking step, the maximum load (first load, second load, first load, second load, first transfer step, peeling step and second transfer step) in each step In consideration of the load of No. 3, the fourth load, and the maximum load of the fifth load), the breakage prevention sheet AS2 having rigidity such that the adherend WK is not damaged by the maximum load is selected.
The damage-preventing sheet-attaching step is performed by forming a closed loop shape or an entire cut in the short width direction on the strip-shaped adhesive sheet base material that is temporarily attached to the release sheet, so that a predetermined area partitioned by the cut is formed. The original fabric made into the breakage prevention sheet AS2 may be fed out, or the original fabric in which the strip-shaped adhesive sheet base material is temporarily attached to the release sheet is adopted, and the adhesive sheet base material may be in a closed loop shape or the entire short width direction. The notch may be formed by a cutting means, and a predetermined area partitioned by the notch may be the damage prevention sheet AS2. When the damage prevention sheet AS2 is supported, the damage prevention sheet AS2 may be wound without winding, for example. The second release sheet RL2 may be supported in a fan-folded state, or when the second release sheet RL2 is collected, for example, it may be fan-folded, cut with a shredder or the like, or wound with a fan without winding. It may be simply collected and collected without being folded, or the pressure roller 63 or the like may be moved without moving or while moving the adherend WK or the ring frame RF, and the other side of the adherend WK. The breakage prevention sheet AS2 may be attached to the surface WK2 of the above, or the breakage prevention sheet AS2 may be held by a holding member from the side opposite to the adhesive surface, and the held breakage prevention sheet AS2 may be attached to the other surface WK2 of the adherend WK. It may be carried out by a breakage prevention sheet sticking means equipped with a drive device as a pressing means for sticking, or may be carried out by a breakage prevention sheet sticking means arranged upside down or sideways, or a pressing roller. A drive device is used as a pressing member contacting / separating means that moves the 63 away from and close to the adherend WK, and it is possible to prevent the adherend WK from being stressed or damaged. It may be carried out by a sheet sticking means, it is not necessary to apply a predetermined energy to the breakage prevention sheet AS2, and when the breakage prevention sheet AS2 is stuck to the other surface WK2 of the adherend WK, The other surface WK2 of the body WK may be below the one surface RF1 of the ring frame RF.

  In the carrying step, the adherend WK may be placed on the adherend placement table 71 with the sheet material SM facing upward, or a plurality of the adherends WK may be placed on the adherend placement table 71. Alternatively, a single ring frame RF may be mounted on the ring frame mounting table 72, or may not be implemented in the adherend processing method of the present invention.

The damage prevention sheet AS2 is attached to the adherend WK so that the adherend WK is damaged by the maximum load applied in the steps after the damage prevention sheet attaching step (hereinafter referred to as “post-process”). The adherend may have such a rigidity that it can be prevented, and even if it is a single body without being adhered to the adherend WK, the adherend can withstand the maximum load applied in the subsequent step. It may have rigidity enough to prevent the WK from being damaged.
The breakage prevention sheet AS2 contains heat such as hot water or hot air, a cooling medium such as a cooled gas or liquid, electromagnetic waves of any wavelength such as ultraviolet rays, visible rays, sound waves, X-rays or gamma rays, vibrations, chemicals, chemical substances, etc. An energy-curing type that cures when given energy is applied as the predetermined energy may be adopted, or an energy-curing type may not be adopted, and an energy-curing type may be adopted. In the energy applying step, heat, a cooling medium, electromagnetic waves of all wavelengths, vibrations, chemicals, chemical substances, etc. are applied in the energy applying step in consideration of the characteristics, characteristics, properties, materials, composition, composition, etc. of the breakage prevention sheet AS2. Thus, the damage prevention sheet AS2 can be cured.
The maximum load applied in each step (arrangement step, integration step, first transfer step, peeling step, second transfer step) is not the load applied in the above example, for example, in the arrangement step. When separating the adherend WK from the adherend placement table 71, a maximum load is applied to the adherend WK, and this load may be used as the first load. A maximum load is applied to the adherend WK when placing the inverted one-piece UP with the sheet material SM on the holding surfaces 74A and 76A, and this load may be used as the third load. Of the second load, the third load, the fourth load, and the fifth load, the maximum load may be the first load instead of the fourth load, or the fifth load. May be the load.
When the adherend WK is a semiconductor wafer or a compound wafer, a predetermined circuit may be formed on at least one of the one surface WK1 and the other surface WK2, or a circuit may not be formed on both of them. The sheet material SM, the first adhesive sheet AS1 or the breakage prevention sheet AS2 may be attached to the surface on which the circuit is formed, or may be attached to the surface on which the circuit is not formed.
The frame member may be annular or non-annular.
The adherend processing method of the present invention may be carried out by a device other than the adherend processing device EA or manually.

  The material, type, shape and the like of the sheet material SM, the first adhesive sheet AS1, the breakage prevention sheet AS2 and the adherend WK in the present invention are not particularly limited. For example, the sheet material SM, the first adhesive sheet AS1 or the breakage prevention sheet AS2 may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or pressure-sensitive adhesiveness, heat-sensitive adhesiveness, or the like. In the case where the heat-sensitive adhesive sheet AS is adopted, an appropriate coil heater for heating the adhesive sheet AS or a heating means such as a heating side of a heat pipe is appropriately provided. It may be bonded by any method. The sheet material SM, the first adhesive sheet AS1 or the breakage prevention sheet AS2 may be, for example, a single layer having only an adhesive layer, an intermediate layer between the base material and the adhesive layer, or a base material. It may have three or more layers, such as a cover layer on the upper surface of the material, or a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer. It may have one or more intermediate layers, or may have a single layer or multiple layers without an intermediate layer. Examples of the adherend WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wooden boards or resins. It may be a simple substance or a composite formed by two or more of them, and members and articles of any form can be targeted. Note that the adhesive sheet AS may be replaced with a functional or intended reading, and may be any label such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. It may be a sheet, film, tape or the like.

The drive device in the above-described embodiment is an electric device such as a rotary motor, a direct drive motor, a linear motor, a single-axis robot, a multi-joint robot having joints of two or more axes, an air cylinder, a hydraulic cylinder, and a rodless. An actuator such as a cylinder and a rotary cylinder can be adopted, and a combination of them, either directly or indirectly, can also be adopted.
When a rotary member such as a roller is adopted in the above-described embodiment, a driving device for rotationally driving the rotary member may be provided, and the surface of the rotary member or the rotary member itself may be deformed by rubber or resin. It may be configured by a member, the surface of the rotating member or the rotating member itself may not be deformed, or other members such as a shaft or a blade that rotates or does not rotate may be used instead of the roller. Alternatively, when a member that presses an object to be pressed such as a pressing unit such as a pressing roller or a pressing head or a pressing member is adopted, a roller, a round bar, or a blade may be used instead of or in combination with the one exemplified above. A member such as material, rubber, resin, sponge or the like may be adopted, or a structure of pressing by blowing gas such as atmosphere or gas may be adopted. Or a member that does not deform, and a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is used as an example. A member such as a plate-shaped member, a round bar, or a roller may be adopted instead of or in combination with the member, or the member to be peeled off may be formed of a deformable member such as rubber or resin, or may be deformed. A mechanical chuck or a chuck cylinder may be used if a member that supports (holds) a supported member (holding member) such as a supporting (holding) means or a supporting (holding) member is adopted. A structure for supporting (holding) a supported member with a gripping means such as Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. May be adopted or cutting When cutting a member to be cut such as a step or a cutting member or forming a cut or a cutting line on the member to be cut is adopted, instead of or in combination with those exemplified above, a cutter blade, a laser Use a cutter, ion beam, thermal power, heat, water pressure, heating wire, spray of gas or liquid, etc., or move by using a combination of appropriate drive equipment to cut. You may choose

AS1 ... First adhesive sheet AS2 ... Damage prevention sheet RF ... Ring frame (frame member)
SM ... Sheet material UP ... Integral object WK ... Adherent WK1 ... One surface WK2 ... Other surface

Claims (4)

An integration step of attaching the first adhesive sheet to the other surface side of the adherend having the sheet material attached to one surface and the frame member, and integrating them to form an integrated body with a sheet material;
Perform a peeling step of peeling the sheet material from the sheet material-attached one piece to form an one piece,
In the previous stage of the integration step, a damage prevention sheet sticking step for sticking a damage prevention sheet to the other surface of the adherend is carried out, and in the damage prevention sheet sticking step, the maximum load given in the subsequent steps. In consideration of the above, the damage prevention sheet having rigidity that prevents the adherend from being damaged by the maximum load is selected.   Before the integration step, an arranging step of arranging an adherend having a sheet material adhered to one surface thereof and a frame member to have a predetermined positional relationship is performed. The method for treating an adherend according to 1.   The adherend processing method according to claim 1 or 2, wherein a first transporting step of transporting the integrated body with the sheet material is performed between the integration step and the peeling step.   The adherend processing method according to any one of claims 1 to 3, wherein after the peeling step, a second carrying step of carrying an integrated article is performed.