JP2019135458A - Pressure distribution sensor - Google Patents

Abstract

To provide a sheet-like pressure distribution sensor capable of accurately detecting even subtle change of extremely small pressure such as airflow.SOLUTION: This invention is a sheet-like pressure distribution sensor that measures pressure distribution in a two-dimensional plane. The pressure distribution sensor comprises measuring means of measuring the distortion in the vicinity of the remaining part with a tongue-like part of a flexible sheet body as a cantilever beam, wherein the tongue-like part of the flexible sheet has a plurality of tongue-like parts formed in a matrix by giving the remaining part and punching in a ring shape.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet-like pressure distribution sensor that measures a pressure distribution in a two-dimensional plane, and in particular, a pressure distribution sensor that can accurately detect even a very small change in pressure such as an air flow. About.

  Pressure sensors using piezoelectric elements and piezoelectric films are used in various industrial products and measuring instruments. There has also been proposed a pressure distribution sensor in which a plurality of such pressure sensors are arranged in a plane so that the pressure distribution in a two-dimensional plane can be measured. Furthermore, among such pressure distribution sensors, it is formed in a flexible flexible sheet shape, giving pressure distribution measurements not only on flat surfaces but also on curved and complex surfaces, and also when applying pressure. A sensor sheet that can measure pressure distribution without absorbing and destroying water has also been proposed.

  For example, Patent Document 1 discloses a pressure sensor device in which a matrix wiring is provided on a film, a thin film transistor is formed at the intersection, and a pressure sensitive conductor is formed on the surface of the thin film transistor. A polymer film such as polyimide or polyethylene terephthalate (PET) is used for the film, and the wiring and thin film transistor on the film can be used for printing, so a large area can be realized at a low price.

  Further, Patent Document 2 discloses a walking analysis apparatus using a pressure measurement sheet in which a pressure sensor is arranged with a cross point of matrix wiring as a pressure measurement point. The pressure sensor is a layered structure that is composed of a pressure-sensitive layer that changes an electrical characteristic value according to the magnitude of an applied pressure, and is filled with pressure-sensitive ink, and when pressure is applied to the surface. This is a pressure element whose electric resistance is lowered.

  By the way, unlike the pressure applied when an object contacts the surface, in the case of an air current, the applied pressure becomes very small.

  For example, in Patent Document 3, a cantilever (support beam) is used as a sensor for estimating the pressure received by a workpiece when gas is blown onto the workpiece, and a strain gauge of the support portion is used. The pressure sensor which measures the load received from gas is disclosed. Here, the measurement target is a relatively strong airflow from the blower that is given for the purpose of drying the workpiece, but even a relatively small airflow measurement is possible by using a cantilever beam. You will get.

JP-A-2005-150146 JP 2006-284404 A JP 2006-121978 A

  Even in the sheet-like pressure distribution sensor for measuring the pressure distribution in the two-dimensional plane as described above, it is required to measure the pressure distribution when receiving a very small pressure such as an air flow, and the cantilever structure Can be considered. However, providing a cantilever structure on a flexible sheet-like substrate hinders the flexibility of the substrate and lowers the measurement accuracy. In particular, a very small pressure such as an air flow is very small. The impact on major changes is significant.

  The present invention has been made in view of the situation as described above, and its object is a sheet-like pressure distribution sensor for measuring pressure distribution in a two-dimensional plane, Another object of the present invention is to provide a pressure distribution sensor that can accurately detect even a small change in a small pressure.

  The pressure distribution sensor according to the present invention is a sheet-like pressure distribution sensor for measuring a pressure distribution in a two-dimensional plane, and may have a plurality of tongue-like portions formed in a ring shape by giving a remaining portion and punching in an annular shape. The tongue portion of the flexible sheet body is cantilevered, and a measuring means for measuring the distortion in the vicinity of the remaining portion is provided.

  According to this invention, the pressure distribution in the two-dimensional plane can be measured by forming the flexible sheet body itself, which is a substrate, in a cantilever, and a very small pressure change such as an air flow can be obtained. Even if it exists, it can be detected with high accuracy.

  In the above-described invention, the tongue-shaped portion may have a constricted portion partially reduced in width toward the tip of the tongue, and the measuring means may be provided to the constricted portion. According to this invention, the deflection of the tongue-like portion as the movable piece can be adjusted by the constricted portion, and even a very small change in pressure such as an air current can be detected with higher accuracy.

  In the above-described invention, the tongue-shaped portion may be provided inside the rectangle by punching the flexible sheet body into a rectangle. Further, the tongue-like portion may be provided with a gap provided inside the square. Further, the tongue portion may have the remaining portion at one corner portion of the square. According to this invention, the influence of the tongue-shaped portion from the flexible sheet body can be suppressed, and even a very small change in pressure such as an air current can be detected with higher accuracy.

  In the above-described invention, the measuring means may be a strain gauge. The flexible sheet body may be provided with matrix wiring, the tongue portion may be provided on each lattice of the matrix wiring, and the strain gauge may be connected to the matrix wiring. good. According to this invention, a highly accurate pressure distribution sensor can be easily manufactured by a printing technique.

  In the above-described invention, the flexible sheet body may be provided on the sheet with a spacer provided therebetween. According to this invention, the influence of the tongue-shaped portion from the sheet can be suppressed, and even a very small change in pressure such as an air current can be detected with higher accuracy.

It is a top view of the pressure distribution sensor in the Example by this invention. It is a top view of the principal part of a pressure distribution sensor. It is a sectional side view of the principal part of a pressure distribution sensor. It is a top view which shows the manufacturing process of a pressure distribution sensor. It is a top view which shows the shape of a strain gauge. It is a top view of the principal part of a pressure distribution sensor. It is a top view which shows arrangement | positioning of the element of the pressure distribution sensor used for the operation test 1. FIG. 3 is a graph showing electric resistance as a result of an operation test 1; It is a graph which shows resistance change amount as a result of the operation test 2. FIG. It is sectional drawing of the modification of a pressure distribution sensor.

  Hereinafter, a pressure distribution sensor 10 according to one embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  As shown in FIG. 1, the pressure distribution sensor 10 is a sensor that measures a pressure distribution in a two-dimensional plane along the sheet body 1 using a flexible sheet body 1 as a substrate. The sheet body 1 is formed with a plurality of tongue portions 3 arranged in a matrix. The tongue-like portion 3 is formed by a punched portion 2 obtained by punching the sheet body 1 in an annular shape leaving the remaining portion 4. That is, the tongue-like portion 3 is connected to the surrounding sheet body 1 by the remaining portion 4 and is a cantilever. As a result, the tongue portion 3 becomes a movable piece that can swing on both sides of the sheet body 1 by a very small change in pressure such as a surrounding airflow, and the remaining portion 4 can be bent. In addition, the punching part 2 does not necessarily limit a processing method to punching, For example, it can also be based on the cutting process by a laser or a cutter.

  In the present embodiment, the plurality of tongue-like portions 3 are arranged with gaps provided inside the quadrilaterals by punching portions 2 obtained by punching the sheet body 1 into quadrilaterals, and are arranged vertically and horizontally with the quadrangles as described above. A matrix is formed. That is, the elements 20 including the tongue-shaped portion 3 formed by the punched portion 2 and the strain gauge 15 described later are arranged vertically and horizontally. Moreover, it is preferable to connect the remaining part 4 to the square corner | angular part so that the length can be lengthened. In particular, if the tongue-shaped portion 3 has a constricted portion whose width is partially reduced toward the tongue tip 3a, the constricted portion is bent preferentially, so that the tongue-shaped portion 3 as a movable piece is bent. Can be adjusted. In the present embodiment, the constricted part has a remaining part 4. By doing so, when the remaining portion 4 is bent by the tongue portion 3, the sheet body 1 and the other tongue portion 3 around the punched portion 2 are not affected by the bending. Can do. The matrix described above is suitable as a pressure distribution sensor when the tongue portions 3 are arranged at a predetermined pitch within a range of, for example, 0.3 mm to 30 cm.

  As the sheet body 1, for example, a flexible material having a thickness of about 10 μm to 2 mm can be used. The Young's modulus of the sheet body 1 is preferably 10 GPa or less. Examples of the material of the sheet 1 include polyvinyl chloride, polyethylene, polypropylene, polystyrene, acrylonitrile / butadiene / styrene, acrylonitrile / styrene, polymethylmethacryl, polyvinyl alcohol, polyvinylidene chloride, polyethylene terephthalate, polyamide (nylon). ), Polyacetal, polycarbonate, polyphenylene ether, polybutylene terephthalate, ultrahigh molecular weight polyethylene, polyvinylidene fluoride, polysulfone, polyethersulfone, polyphenylene sulfide, polyarylate, polyamideimide, polyetherimide, polyetheretherketone, polyimide, liquid crystal polymer , Polytetrafluoroethylene (Teflon (registered trademark)), phenol resin (bakelite), lily Resin, melamine resin, unsaturated polyester, epoxy resin, silicone resin, polyurethane can be exemplified.

  Referring also to FIG. 2, the element 20 of the pressure distribution sensor 10 further includes a measuring unit that measures the strain near the remaining portion 4. As such a measuring means, for example, a strain gauge 15 can be used. The strain gauge 15 is attached so as to extend from the outer peripheral side of the punched portion 2 to the inside of the tongue-shaped portion 3 along the remaining portion 4. The strain gauge 15 is a resistance wire, and the strain near the remaining portion 4 can be measured by a change in resistance based on the deformation. Here, as described above, the tongue-shaped portion 3 can preferentially bend the remaining portion 4 so as not to affect the surrounding sheet body 1, and can accurately measure the distortion in the vicinity of the remaining portion 4.

  The strain gauge 15 is connected to the wiring arranged on the sheet body 1 and connected to the outside. As the wiring, a matrix wiring including the vertical wiring 11 extending in the vertical direction and the horizontal wiring 12 extending in the horizontal direction along the respective sides around the square of the punched portion 2 can be used. Further, the intersections of the vertical wiring 11 and the horizontal wiring 12 are overlapped so as to sandwich the insulating layer 13 made of an insulator so as not to contact each other. Here, the vertical wiring 11, the insulating layer 13, and the horizontal wiring 12 are arranged in this order from the bottom on the upper surface of the sheet body 1. The strain gauge 15 connects the poles to the vertical wiring 11 and the horizontal wiring 12 so as to straddle the intersection. That is, it is the same as the passive matrix used in the field of liquid crystal display devices. In this case, in order to reduce crosstalk, the resistance per wiring (each of the vertical wiring 11 and the horizontal wiring 12) is preferably set to 1/100 or less of the resistance per strain gauge 15. Note that the intersection of the vertical wiring 11 and the horizontal wiring 12 may be connected by a semiconductor instead of the insulating layer 13 and switched in the same manner as in the active matrix. In this case, since the crosstalk can be reduced by switching, the ratio of the resistance between the wiring and the strain gauge 15 is not particularly limited.

  Referring also to FIG. 3, the vertical wiring 11 and the horizontal wiring 12 are disposed on the sheet body 1 at the connection portion between the strain gauge 15 and the vertical wiring 11 and the horizontal wiring 12, and these are partially connected from above. Both electrodes of the strain gauge 15 are formed so as to cover. As described above, since the vertical wiring 11 is disposed below the horizontal wiring 12 with the insulating layer 13 sandwiched at the intersection with the horizontal wiring 12, also from the surface of the sheet body 1 at the connection portion with the strain gauge 15. May be made lower than the horizontal wiring 12.

The vertical wiring 11 and the horizontal wiring 12 are preferably made of a material having a resistivity of 1 × 10 ⁻⁴ Ωcm or less, for example, in order to reduce the above-described crosstalk. The dimensions of the vertical wiring 11 and the horizontal wiring 12 can be set as appropriate within a range of thickness 10 nm to 1 mm, width 1 μm to 1 cm, and length 10 cm to 10 m. It is made to become. Examples of the material of the vertical wiring 11 and the horizontal wiring 12 include metals and metal oxides such as gold, silver, copper, aluminum, magnesium, zinc, titanium, iron, lead, nickel, chromium, ITO, and IZO. In addition, alloys composed of these, and pastes obtained by kneading these metal particles and resin into inks can be used. The vertical wiring 11 and the horizontal wiring 12 can be formed by a printing method such as film formation by sputtering or patterning by etching, patterning by plating film formation etching, screen printing, ink jet, or the like.

On the other hand, in order to reduce the above-described crosstalk, the strain gauge 15 preferably has an electric resistance per line of 100 times or more of the electric resistance per wiring. In order to obtain such an electrical resistance, it is preferable to use a material having a resistivity higher than 1 × 10 ⁻⁴ Ωcm, for example. As such a material, for example, a carbon-based material such as graphite or carbon black, a nichrome-based alloy material that is an alloy of nickel-iron-chromium, and a conductive polymer material can be used. Any of these can change the electric resistance in accordance with deformation and can be suitably used as the strain gauge 15. Even if the material has a low resistivity, the electrical resistance can be increased by reducing the thickness or width, or increasing the length, and the strain gauge 15 can be used. Such a strain gauge 15 can be formed, for example, by patterning by etching after film formation by sputtering or plating, or by printing techniques such as screen printing or ink jet printing.

  With the pressure distribution sensor 10 as described above, the pressure distribution in the two-dimensional plane can be measured by punching out the flexible sheet body 1 itself as a substrate and forming the tongue-like portion 3 in a cantilever shape. . In other words, even a very small change in pressure of a fluid such as gas or liquid can detect the flow due to the change with high accuracy and measure the pressure distribution.

In particular, the tongue-shaped portion 3 has the remaining portion 4 as a constricted portion that is partially reduced in width toward the tongue tip 3a as described above, and the remaining portion 4 that is the constricted portion is preferentially bent. I will. More specifically, this can be explained by the equation of displacement W when a load P is applied to a cantilever having a length L. The displacement W can be expressed as follows, where E is the Young's modulus of the material of the cantilever and I is the moment of inertia of the cross section.
W = PL ³ / 3EI (Formula 1)
When the cross section of the beam is rectangular, the cross section secondary moment I can be expressed as follows, where the width is h and the thickness is b.
I ⁼ bh 3/12 (Equation 2)
That is, it can be seen that the cube of the width h contributes to the cross-sectional secondary moment I and contributes to the displacement W. Therefore, the displacement W can be increased by reducing the width h. That is, by providing the constricted portion as described above, the deformation of the tongue-like portion 3 as the movable piece can be increased, and even a minute change in pressure can be detected with higher accuracy.

[Operation test]
Since the pressure distribution sensor as described above was manufactured and an operation test was performed when air was partially blown, the details will be described with reference to FIGS.

<Production>
First, a pressure distribution sensor used for the operation test was manufactured.

  A polyethylene naphthalate (PEN) film having a width and a length of 200 mm and a thickness of 0.1 mm was prepared. The Young's modulus of this PEN film was measured by a tensile test and found to be 5.0 GPa.

  As shown in FIG. 4, the PEN film was used as a sheet body 1, and wirings and strain gauges were formed on the surface thereof, and then a tongue-like portion 3 was formed.

Specifically, as shown in FIG. 4A, first, the vertical wiring 11 was formed on the sheet body 1 made of a PEN film. The vertical wiring 11 was obtained by screen printing of a silver paste for printing (GOAGT93C, manufactured by DIC Corporation). The vertical wirings 11 were arranged at 13 locations at intervals of 10 mm in the horizontal direction with a width of 0.2 mm, a thickness of 10 μm, and a length of 150 mm. After printing, the silver paste was heated at 150 ° C. for 30 minutes together with the sheet body 1 to be cured. The resistance value per one vertical wiring 11 was measured and found to be 21Ω. The resistivity of the vertical wiring 11 calculated in light of the dimensions was 4 × 10 ⁻⁴ Ωcm.

  As shown in FIG. 4B, a dot-like insulating layer 13 was formed on the vertical wiring 11 by screen printing. The insulating layer 13 was a square having a side length of 0.5 mm and a thickness of 20 μm when viewed from above. The insulating layer 13 was arranged in 13 rows and 13 columns at 10 mm intervals in both the vertical and horizontal directions. Examples of the material of the insulating layer 13 include epoxy resin, acrylic resin, silicon resin, polyvinyl chloride, polyurethane, polystyrene, polytetrafluoroethylene (Teflon), polyimide, phenol resin (bakelite), urea resin, and melamine resin. .

As shown in FIG. 4C, the horizontal wiring 12 was formed so as to overlap the insulating layer 13. Similarly to the vertical wiring 11, the horizontal wiring 12 was obtained by screen printing of a silver paste for printing. The horizontal wirings 12 were arranged at 13 locations at 10 mm intervals in the vertical direction with a width of 0.2 mm, a thickness of 35 μm, and a length of 150 mm. In order to arrange on the vertical wiring 11 and the insulating layer 13, the thickness was made larger than the total thickness of the vertical wiring 11 and the insulating layer 13. After printing, the silver paste was heated at 150 ° C. for 30 minutes together with the sheet body 1 to be cured. The resistance value per one horizontal wiring 12 was measured and found to be 7.0Ω. The resistivity of the horizontal wiring 12 calculated in light of the dimensions was 4 × 10 ⁻⁴ Ωcm, similar to the vertical wiring 11.

  As described above, a wiring serving as a passive matrix having 169 intersections was formed. At this time, when the continuity between the vertical wiring 11 and the horizontal wiring 12 was examined with a tester, it was confirmed that there was no short circuit and that the vertical wiring 11 and the horizontal wiring 12 were electrically insulated from each other by the insulating layer 13. .

  Further, a strain gauge 15 was formed as shown in FIG. The strain gauge 15 was obtained with conductive carbon paste (CH-8, manufactured by Jujo Chemical Co., Ltd.). In order to connect the two poles to the vertical wiring 11 and the horizontal wiring 12, respectively, the intersections of the vertical wiring 11 and the horizontal wiring 12 are straddled, and are arranged in a diagonal direction of a square formed by the wiring so as to be folded at an intermediate portion.

  Referring also to FIG. 5, in the strain gauge 15, the width of the electrode portion 16 and the intermediate portion 17 is widened so that the electrical resistance per length is increased at the portion 18 extending in the diagonal direction described above. It was done. Specifically, the width W1 of the electrode portion 16 was 0.5 mm, the intermediate portion 17n width W2 was 0.1 mm, and the width W3 of other portions was 80 μm. Moreover, the distance from the electrode part 16 to the intermediate part 17 was 7 mm, and thickness was 45 micrometers.

The strain gauge 15 was obtained by printing the above-described carbon paste in such a shape and then heating and curing the sheet body 1 at 150 ° C. for 30 minutes. The electric resistance per strain gauge 15 was 40 kΩ. That is, the electric resistance was 100 times or more that of both the vertical wiring 11 and the horizontal wiring 12. Moreover, the resistivity of the strain gauge 15 calculated in light of the dimensions was 1 × 10 ⁻² Ωcm.

  Next, as shown in FIG. 4 (e), the annular punched portion 2 leaving the remaining portion 4 is cut away to form the tongue-shaped portion 3, and the elements 20 are arranged in a matrix of 13 rows and 13 columns. A distribution sensor 10 was obtained. The punching part 2 was cut by a carbon dioxide laser.

  Referring also to FIG. 6, the tongue-like portion 3 is formed in a substantially elliptical shape, the length 3L from the remaining portion 4 corresponding to the major axis of the elliptical shape to the tip is 7.5 mm, and the width 3W corresponding to the minor axis is 5. 0 mm. The length and width of the remaining portion 4 were both 1.0 mm. The punched portion 2 has a tongue-shaped portion 3 and a remaining portion 4 formed inside, and the outer peripheral side has a substantially square shape. The square side length 2L was set to 8.0 mm.

<Operation test 1>
When the pressure distribution sensor 10 manufactured in this way is used to displace only one of the tongue-shaped portions 3 that are movable pieces formed in a matrix, other adjacently disposed pieces are arranged. The effect on the tongue 3 was investigated.

  First, as shown in FIG. 7, one element 20 and other elements 21 to 24 adjacent to the element 20 in the vertical direction and the horizontal direction are in a state where no airflow is generated, that is, a tongue-shaped part (tongue The electrical resistance of the strain gauge 15 including the vertical wiring 11 and the horizontal wiring 12 was measured in a state in which the shape piece 3) was not displaced. An impedance analyzer was used for the measurement. As a result, the electrical resistance was 40 kΩ for all elements.

  Then, using an air blowing device, an air current was blown from the cylindrical nozzle having a diameter of 5 mm to the central element 20. At this time, the air current was blown only on the tongue-like portion 3 of the element 20 and was not blown on the surrounding sheet body 1 and other elements 21 to 24. The electric resistance of each element was measured by changing the flow rate of the air flow by air blow.

  As shown in FIG. 8, with respect to the central element 20 to which the airflow was blown, the electrical resistance increased as the flow rate of the airflow increased. On the other hand, for the elements 21 to 24 where the airflow was not blown, the electric resistance always showed 40 kΩ regardless of the increase of the airflow. That is, although the flexible sheet 1 is used, the operation of the tongue 3 as a movable piece does not affect the measurement of the electrical resistance of other elements.

<Operation test 2>

  Further, using the pressure distribution sensor 10 having the elements 20 in the 13 rows and 13 columns, an operation test using all the elements was performed.

  First, the electrical resistance of the strain gauge 15 including the vertical wiring 11 and the horizontal wiring 12 was measured for all the elements 20 in a windless state. At this time, the electrical resistance of all the elements 20 was 40 kΩ. Further, an air flow was blown from the cylindrical nozzle having a diameter of 8 cm to the center of the pressure distribution sensor 10 using an air blowing device. The electrical resistance of each element at this time was measured, the difference from 40 kΩ was obtained, and recorded as the resistance change amount.

  As shown in FIG. 9, the obtained resistance change amount was the largest for the element at the center of 7 rows and 7 columns among the elements of 13 rows and 13 columns, and decreased toward the periphery. That is, the distortion in the vicinity of the remaining portion 4 based on the operation of the tongue portion 3 of each element 20 due to the airflow toward the center of the pressure distribution sensor 10 can be measured. Thereby, the pressure distribution in the two-dimensional plane along the sheet body 1 based on the airflow can be measured.

  As described above, according to the pressure distribution sensor 10, the pressure distribution in the two-dimensional plane can be measured. Further, since the sheet body 1 has flexibility, the installation location for measurement can be selected relatively freely, such as making the two-dimensional surface a curved surface. On the other hand, despite the fact that the flexible sheet body 1 is used as a substrate, the tongue-shaped portion 3 is formed by the annular punching portion 2 so that each of the plurality of elements 20 affects each other. The distortion in the vicinity of the remaining portion 4 can be measured without giving it, and the flow due to the change can be accurately detected even if the fluid has a very small pressure change.

  As shown in FIG. 10, the pressure distribution sensor may be a pressure distribution sensor 10 ′ in which a second sheet body 9 is further provided in addition to the sheet body 1. In this case, the spacer 8 is sandwiched between the sheet body 1 and the second sheet body 9 so that a space sufficient to ensure the operation of the tongue-shaped portion 3 as the movable piece is provided. By doing in this way, the bending and displacement as a whole of the sheet body 1 which has flexibility can be suppressed, and the influence from the sheet body 1 to the tongue-shaped part 3 can be suppressed. That is, even a smaller change in pressure can be detected with high accuracy. In the figure, the vertical wiring 11, the horizontal wiring 12, the insulating layer 13, and the strain gauge 15 are not shown.

  So far, representative examples and modified examples based on the examples have been described, but the present invention is not necessarily limited thereto. Those skilled in the art will recognize a variety of alternative embodiments without departing from the scope of the appended claims.

DESCRIPTION OF SYMBOLS 1 Sheet body 2 Punching part 3 Tongue part 4 Remaining part 10 Pressure distribution sensor

Claims (8)

A sheet-like pressure distribution sensor for measuring a pressure distribution in a two-dimensional plane,
A measuring means is provided for measuring the distortion in the vicinity of the remaining portion by using the tongue-shaped portion of the flexible sheet body having a plurality of tongue-shaped portions formed in a matrix as a result of giving the remaining portion and punching in a ring shape. A pressure distribution sensor.   2. The pressure distribution sensor according to claim 1, wherein the tongue-shaped portion has a constricted portion partially reduced in width toward the tip of the tongue, and the measuring means is provided to the constricted portion.   3. The pressure distribution sensor according to claim 2, wherein the tongue-shaped portion is provided inside the rectangle by punching the flexible sheet body into a rectangle.   The pressure distribution sensor according to claim 3, wherein the tongue is provided with a gap inside the square.   The pressure distribution sensor according to claim 4, wherein the tongue has the remaining portion at one corner of the quadrilateral.   6. The pressure distribution sensor according to claim 1, wherein the measuring means is a strain gauge.   The flexible sheet body is provided with matrix wiring, the tongue-like portion is provided on each lattice of the matrix wiring, and the strain gauge is connected to the matrix wiring. 6. The pressure distribution sensor according to 6. The pressure distribution sensor according to claim 1, wherein the flexible sheet body is provided on the sheet with a spacer provided therebetween.

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