JP2019132636A - Sensor assembly, stylus pen, drawing method guidance system, dental technician device, dental technician method display system, medical equipment, remote surgery system, and surgical method display system - Google Patents

Abstract

To improve the accuracy of a detection of an inclination of a pressure and sensor assembly in contact to an object in the sensor assembly including a 6-axis force sensor, without interfering with a field of view and operation.SOLUTION: A sensor assembly 100 includes a tubular housing 4, a tip end member 5 capable of contacting the object in a state in which a portion from one end of the housing 4 protrudes, a 6-axis force sensor 1 provided in the housing 4 and provided with a force point input unit 24 protruding on the tip end member 5 side, and a tip end member mounting portion 3 capable of attaching the tip end member 5 connected to the force point input unit 24 of the 6-axis force sensor 1, and the tip end member mounting portion 3 and the tip end member 5 is provided on an inner peripheral side of the housing 4 so that there is a space gap between it and the inner peripheral surface 4i of the housing 4.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a sensor assembly, a sensor stylus pen, a work drawing technique guidance system, a dental technique instrument, a dental technique technique display system, a medical instrument, a remote operation system, and a surgical technique display system using a six-axis force sensor.

  Conventionally, an input device equipped with a force sensor device for detecting force and moment is known. For example, a pen-type input device using a pen tip as an input unit is known and is called a stylus pen or the like.

  As a force sensor device, a three-axis detection type is generally used. However, Patent Document 1 discloses time series data of contact force obtained when a handwritten signature is performed with a pen in order to increase the safety of personal authentication. A force sensor (also referred to as a 6-axis sensor or a 6-axis force sensor) using (four-dimensional data) has been proposed. The four-dimensional data is a force vector having a three-dimensional component that acts on the contact point as well as the writing pressure that is the pressure in the vertical direction of the touch panel. In this Patent Document 1, a handwritten sign individual that performs personal authentication to identify whether or not the person is authentic by comparing four-dimensional data detected by a force sensor with time-series data of the contact force of an individual to be authenticated registered in advance. Authentication has been proposed.

  In recent years, with the development of medical technology, remote surgery systems including a patient surgery robot and an operator operation robot connected via the patient surgery robot wired or network have become widespread. However, even if the scalpel or scissors held by the arm of the patient surgery robot is in contact with the organ or abdominal wall, the surgeon cannot detect it as a hand and mechanical problems such as arm compression have been reported. ing.

  Therefore, as a 6-axis force sensor for detecting contact force data when analyzing a human grip operation and using the data with a robot for wearing on a human fingertip and performing an operation, Patent Document 2 has been proposed.

JP 2008-46781 A Patent No. 427344

  However, in the configuration shown in Patent Document 1, the distance between the pen tip 92 and the six-axis sensor 95 is long as shown in FIG. For this reason, since the moment increases as an input to the 6-axis sensor 95, noise sources such as pen tip vibration increase, making it difficult to detect minute forces, and detection accuracy is low.

  Further, in the configurations of Patent Document 1 shown in FIG. 1A and Patent Document 2 shown in FIG. 1B, the 6-axis sensor (95, 903) protrudes from the gripping shaft (91, 901). Therefore, the 6-axis sensor (95, 903) narrows the field of view of the operator and obstructs the operation of the tip (92, 902 + 904).

  Therefore, in view of the above circumstances, the present invention provides a sensor including a 6-axis force sensor that can improve the accuracy of detecting the pressure of contact with the object and the inclination of the sensor assembly without interfering with the visual field and operation. Provide assembly.

In order to solve the above problems, in one embodiment of the present invention,
A cylindrical housing;
In a state in which a part protrudes from one end of the housing, a tip member that can contact an object;
A 6-axis force sensor provided in the housing and provided with a force point input portion protruding toward the tip member;
A tip member attaching portion connected to the force point input portion of the six-axis force sensor and capable of attaching the tip member;
Provided is a sensor assembly, wherein the tip member mounting portion and the tip member are provided on an inner peripheral side of the casing such that a space gap exists between the tip member mounting portion and the inner peripheral surface of the casing. To do.

  According to one aspect, in a sensor assembly including a 6-axis force sensor, it is possible to improve the accuracy of detecting the pressure of contact with an object and the inclination of the sensor assembly without disturbing the visual field and operation.

It is a structural example of the sensor assembly containing the force sensor of a prior art example. It is an example of composition of a sensor assembly concerning an embodiment of the present invention. It is a perspective view which illustrates the 6-axis sensor provided in a sensor assembly. It is explanatory drawing, the sensor chip | tip in a 6-axis sensor, Comprising: (a) is the figure seen from the Z-axis direction upper side, (b) is the figure seen from the Z-axis direction upper side. It is a figure explaining the code | symbol which shows the force and moment concerning each axis | shaft in the sensor chip of a 6-axis sensor. 2 is a diagram illustrating an arrangement of piezoresistive elements of a sensor chip 10. FIG. 2 is a perspective view illustrating a strain generating body 20. FIG. It is the simulation result (the 1) about a deformation | transformation (distortion) at the time of applying a force and a moment to a strain body. It is the simulation result (the 2) about a deformation | transformation (distortion) at the time of applying a force and a moment to a strain body. It is the simulation result (the 1) about the stress which generate | occur | produces in the sensor chip 10 when the force and moment of FIG.8 and FIG.9 are applied. It is the simulation result (the 2) about the stress which generate | occur | produces in the sensor chip 10 when the force and moment of FIG.8 and FIG.9 are applied. It is the simulation result (the 3) about the stress which generate | occur | produces in the sensor chip 10 when the force and moment of FIG.8 and FIG.9 are applied. It is an example of the other connection of the attachment and tip member in a sensor assembly. It is another structural example of a 6-axis sensor. It is a structural example in the case of mounting a sensor assembly in a stylus pen. It is a figure which shows the state which the nib of the stylus pen of FIG. 15 contacted the touch panel. It is a figure which shows a mode that it is inputting into a touchscreen with the stylus pen of this embodiment. This is an example in which the type of the tip of the stylus pen is specified using the resonance frequency. In this example, the type of the stylus pen tip is specified using an impedance and a microcomputer. This is an example in which the stylus pen of the present embodiment receives guidance on the writing pressure and orientation of the stylus pen while writing characters. It is a block diagram of the work drawing technique guidance system which implement | achieves FIG. It is a structural example in the case of mounting a sensor assembly on a dental technical instrument. It is an example of the dental technician technique display system using the dental technician instrument of FIG. It is a block diagram of the dental technician technique display system of FIG. It is a structural example in the case of mounting a sensor assembly on a medical knife. FIG. 25 is an example of a telesurgical system using the medical knife and / or medical tentacle of FIG. 24. FIG. 27 is a block diagram of the telesurgical system of FIG. 26. FIG. 26 is an example of a surgical technique display system using the medical knife and / or medical tentacle of FIG. 25. It is a block diagram of the surgical technique display system of FIG. It is a structural example in the case of mounting a sensor assembly on a shoe sole.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant description may be omitted.

<Common configuration example>
First, a configuration example of a sensor assembly common to the following embodiments will be described with reference to FIG. FIG. 2 shows a configuration example of the sensor assembly according to the embodiment of the present invention.

  The assembly 100 shown in FIG. 2 includes a 6-axis force sensor 1, an attachment (tip member attaching portion) 3, a housing 4, and a tip member 5.

  The tip member 5 is a contact member including a contact portion 51 with an object. A male screw 53 is formed in the fitting portion 52 inserted inside the housing 4, not the contact portion 51 of the tip member 5.

  The tip member 5 is, for example, a pen tip, a brush pen-like conductive fiber, a dental technique instrument (drill or the like), a medical blade (female), a medical tentacle, a shoe sole sensor, or the like.

  The case 4 is a cylindrical case and is a part that is held by a user, a technician, a robot, or the like. The tip member 5 may be housed in the housing 4 by knocking, but in use, the tip member 5 comes into contact with the object with at least a portion protruding from one end of the housing 4.

  The attachment 3 is connected to the force point input portion 24 of the 6-axis force sensor 1 and can be attached with the tip member 5 described above.

  The attachment 3 includes a receiving portion 31 and an attachment upright portion 32 having an internal thread 33 formed on the inner wall.

  In the example of FIG. 2, the male screw 53 of the tip member 5 is engaged with a female screw 33 formed on the inner wall of the mounting upright portion 32 of the attachment 3.

  Here, the attachment 3 and the tip member 5 are provided on the inner peripheral side (inner peripheral surface side) of the housing 4 such that a space gap G exists between the attachment 3 and the tip member 5 and the inner peripheral surface 4 i of the housing 4. Therefore, the triaxial force applied to the tip member 5 and the moment about the axis are effectively transmitted to the six-axis sensor.

  The six-axis sensor 1 is configured such that four force point input portions 24 projecting toward the distal end side are provided, and the force point input portions 24 are bonded to the receiving portion 31 of the attachment 3.

<6-axis sensor>
Here, the 6-axis sensor will be described.
FIG. 3 is a perspective view illustrating a 6-axis force sensor (force sensor) included in the sensor assembly according to the embodiments of the present invention. Referring to FIG. 3, the 6-axis force sensor 1 includes a sensor chip 10 and a strain body 20.

  The sensor chip 10 is bonded to the upper surface side of the strain body 20 so as not to protrude from the strain body 20. The strain body 20 is provided with four force point input portions 24 projecting toward the distal end side so as to surround the sensor chip 10.

  In the present embodiment, for the sake of convenience, in the force sensor 1, the side on which the attachment of the strain body 20 is attached is referred to as the upper side or one side, and the opposite side is referred to as the lower side or the other side. In addition, the surface on the side where the attachment 3 of the strain body 20 of each part is provided is defined as one surface or upper surface, and the opposite surface is defined as the other surface or lower surface. However, the 6-axis force sensor 1 (force sensor device) can be used upside down, or can be arranged at an arbitrary angle. Further, the planar view means that the object is viewed from the normal direction (Z-axis direction) of the upper surface of the sensor chip 10, and the planar shape is the normal direction of the upper surface of the sensor chip 10 (Z-axis direction). ) Refers to the shape viewed from.

(Sensor chip 10)
4A and 4B are explanatory diagrams of the sensor chip 10, wherein FIG. 4A is a top perspective view of the sensor chip 10 viewed from the upper side in the Z-axis direction, and FIG. 4B is a lower side of the sensor chip 10 in the Z-axis direction. It is the bottom perspective view seen from.

  The direction parallel to one side of the upper surface of the sensor chip 10 is the X-axis direction, the perpendicular direction is the Y-axis direction, and the thickness direction of the sensor chip 10 (the normal direction of the upper surface of the sensor chip 10) is the Z-axis direction. . The X axis direction, the Y axis direction, and the Z axis direction are orthogonal to each other.

  The sensor chip 10 shown in FIGS. 3 and 4 is a MEMS (Micro Electro Mechanical Systems) sensor chip that can detect up to six axes with one chip, and is formed from a semiconductor substrate such as an SOI (Silicon On Insulator) substrate. The planar shape of the sensor chip 10 can be a square of about 3 mm square, for example.

  The sensor chip 10 includes five columnar support portions 11a to 11e. The planar shape of the support portions 11a to 11e can be a square of about 500 μm square, for example. Support portions 11 a to 11 d that are first support portions are arranged at four corners of the sensor chip 10. The support part 11e which is a 2nd support part is arrange | positioned in the center of support part 11a-11d.

  The support portions 11a to 11e can be formed from, for example, an active layer, a BOX layer, and a support layer of an SOI substrate, and each thickness can be set to about 500 μm, for example.

  Between the support portion 11a and the support portion 11b, there is provided a reinforcing beam 12a that is fixed at both ends to the support portion 11a and the support portion 11b (connects adjacent support portions) and reinforces the structure. It has been. Between the support part 11b and the support part 11c, both ends of the support part 11b and the support part 11c are fixed (to connect adjacent support parts), and a reinforcing beam 12b is provided to reinforce the structure. It has been.

  Between the support portion 11c and the support portion 11d, there are provided reinforcing beams 12c that are fixed at both ends to the support portion 11c and the support portion 11d (to connect adjacent support portions) and reinforce the structure. It has been. Between the support part 11d and the support part 11a, both ends of the support part 11d and the support part 11a are fixed (to connect adjacent support parts), and a reinforcing beam 12d is provided to reinforce the structure. It has been.

  In other words, the four reinforcing beams 12a, 12b, 12c, and 12d, which are the first reinforcing beams, are formed in a frame shape, and the corners that form the intersections of the reinforcing beams are the support portions 11b, 11c, 11d. 11a.

  The corners on the inner side of the support part 11a and the corners of the support part 11e opposite thereto are connected by a reinforcing beam 12e for reinforcing the structure. The corner portion inside the support portion 11b and the corner portion of the support portion 11e opposite to the corner portion are connected by a reinforcing beam 12f for reinforcing the structure.

  The inner corner of the support portion 11c and the opposite corner of the support portion 11e are connected by a reinforcing beam 12g for reinforcing the structure. The corner part inside the support part 11d and the corner part of the support part 11e facing it are connected by a reinforcing beam 12h for reinforcing the structure. The reinforcing beams 12e to 12h, which are the second reinforcing beams, are disposed obliquely with respect to the X-axis direction (Y-axis direction). That is, the reinforcing beams 12e to 12h are arranged non-parallel to the reinforcing beams 12a, 12b, 12c, and 12d.

  The reinforcing beams 12a to 12h can be formed from, for example, an active layer, a BOX layer, and a support layer of an SOI substrate. The thickness (width in the short direction) of the reinforcing beams 12a to 12h can be set to about 140 μm, for example. The upper surfaces of the reinforcing beams 12a to 12h are substantially flush with the upper surfaces of the support portions 11a to 11e.

  On the other hand, the lower surfaces of the reinforcing beams 12a to 12h are recessed to the upper surface side by about several tens of micrometers from the lower surfaces of the support portions 11a to 11e and the lower surfaces of the force points 14a to 14d. This is to prevent the lower surfaces of the reinforcing beams 12 a to 12 h from coming into contact with the opposing surface of the strain body 20 when the sensor chip 10 is bonded to the strain body 20.

  As described above, the rigidity of the sensor chip 10 as a whole can be increased by disposing the reinforcing beam having a high rigidity formed thicker than the detection beam separately from the detection beam for detecting the strain. This makes it difficult to deform other than the detection beam with respect to the input, so that good sensor characteristics can be obtained.

  Inside the reinforcement beam 12a between the support part 11a and the support part 11b, both ends are fixed to the support part 11a and the support part 11b in parallel with a predetermined interval (adjacent to the reinforcement beam 12a). Detection beams 13a for detecting strain are provided.

  Between the detection beam 13a and the support portion 11e, a detection beam 13b is provided in parallel with the detection beam 13a at a predetermined interval from the detection beam 13a and the support portion 11e. The detection beam 13b connects the end portion on the support portion 11e side of the reinforcement beam 12e and the end portion on the support portion 11e side of the reinforcement beam 12f.

  The substantially central portion in the longitudinal direction of the detection beam 13a and the substantially central portion in the longitudinal direction of the detection beam 13b facing the detection beam 13a are arranged so as to be orthogonal to the detection beam 13a and the detection beam 13b. It is connected by a detection beam 13c for detection.

  Inside the reinforcing beam 12b between the support portion 11b and the support portion 11c, both ends are fixed to the support portion 11b and the support portion 11c (adjacent to each other) in parallel with the reinforcing beam 12b at a predetermined interval. 13 d of detection beams for detecting distortion are provided.

  Between the detection beam 13d and the support portion 11e, a detection beam 13e is provided in parallel to the detection beam 13d with a predetermined distance from the detection beam 13d and the support portion 11e. The detection beam 13e connects the end portion on the support portion 11e side of the reinforcing beam 12f and the end portion on the support portion 11e side of the reinforcement beam 12g.

  A substantially central portion in the longitudinal direction of the detection beam 13d and a substantially central portion in the longitudinal direction of the detection beam 13e facing the detection beam 13d are arranged so as to be orthogonal to the detection beam 13d and the detection beam 13e. It is connected by a detection beam 13f for detection.

  Inside the reinforcing beam 12c between the support part 11c and the support part 11d, both ends are fixed to the support part 11c and the support part 11d in parallel with a predetermined interval (adjacent to the reinforcing beam 12c). A supporting beam 13g for detecting strain is provided.

  Between the detection beam 13g and the support portion 11e, a detection beam 13h is provided in parallel with the detection beam 13g at a predetermined interval from the detection beam 13g and the support portion 11e. The detection beam 13h connects the end portion on the support portion 11e side of the reinforcement beam 12g and the end portion on the support portion 11e side of the reinforcement beam 12h.

  A substantially central portion in the longitudinal direction of the detection beam 13g and a substantially central portion in the longitudinal direction of the detection beam 13h opposed thereto are arranged so as to be orthogonal to the detection beam 13g and the detection beam 13h. It is connected by a detection beam 13i for detection.

  Inside the reinforcing beam 12d between the supporting portion 11d and the supporting portion 11a, both ends are fixed to the supporting portion 11d and the supporting portion 11a in parallel with a predetermined distance from the reinforcing beam 12d (adjacent to each other). Detection beams 13j for detecting strain are provided.

  Between the detection beam 13j and the support portion 11e, a detection beam 13k is provided in parallel with the detection beam 13j at a predetermined interval from the detection beam 13j and the support portion 11e. The detection beam 13k connects the end portion on the support portion 11e side of the reinforcement beam 12h and the end portion on the support portion 11e side of the reinforcement beam 12e.

  The substantially central portion in the longitudinal direction of the detection beam 13j and the substantially central portion in the longitudinal direction of the detection beam 13k facing the detection beam 13j are arranged so as to be orthogonal to the detection beam 13j and the detection beam 13k. It is connected by a detection beam 13l for detection.

  The detection beams 13a to 13l are provided on the upper end side in the thickness direction of the support portions 11a to 11e, and can be formed from, for example, an active layer of an SOI substrate. The thickness (width in the short direction) of the detection beams 13a to 13l can be set to, for example, about 75 μm. The upper surfaces of the detection beams 13a to 13l are substantially flush with the upper surfaces of the support portions 11a to 11e. The thickness of each of the detection beams 13a to 13l can be set to, for example, about 0.5 μm.

  A force point 14a is provided on the lower surface side (intersection of the detection beam 13a and the detection beam 13c) of the central portion in the longitudinal direction of the detection beam 13a. The detection beams 13a, 13b, and 13c and the force point 14a constitute a set of detection blocks.

  A force point 14b is provided on the lower surface side (intersection of the detection beam 13d and the detection beam 13f) of the central portion in the longitudinal direction of the detection beam 13d. The detection beams 13d, 13e, and 13f and the force point 14b form a set of detection blocks.

  A force point 14c is provided on the lower surface side (intersection of the detection beam 13g and the detection beam 13i) of the central portion in the longitudinal direction of the detection beam 13g. The detection beams 13g, 13h, and 13i and the force point 14c form a set of detection blocks.

  A force point 14d is provided on the lower surface side (intersection of the detection beam 13j and the detection beam 13l) of the central portion in the longitudinal direction of the detection beam 13j. The detection beams 13j, 13k, and 13l and the force point 14d form a set of detection blocks.

  The force points 14a to 14d are places to which an external force is applied, and can be formed from, for example, a BOX layer and a support layer of an SOI substrate. The lower surfaces of the force points 14a to 14d are substantially flush with the lower surfaces of the support portions 11a to 11e.

  In this way, by taking in force or displacement from the four force points 14a to 14d, different beam deformations can be obtained for each type of force, so that a sensor with good separation of six axes can be realized.

  In addition, in the sensor chip 10, from the viewpoint of suppressing the stress concentration, it is preferable that the portion forming the inner angle has an R shape.

  FIG. 5 is a diagram for explaining symbols indicating forces and moments applied to the respective axes. As shown in FIG. 5, the force in the X-axis direction is Fx, the force in the Y-axis direction is Fy, and the force in the Z-axis direction is Fz. In addition, a moment for rotating about the X axis as Mx, a moment for rotating about the Y axis as My, and a moment for rotating about the Z axis as Mz are set as Mz.

  FIG. 6 is a diagram illustrating the arrangement of the piezoresistive elements of the sensor chip 10. Piezoresistive elements are arranged at predetermined positions of the respective detection blocks corresponding to the four force points 14a to 14d.

  Specifically, referring to FIGS. 5 and 6, in the detection block corresponding to the force point 14a, the piezoresistive elements MxR3 and MxR4 are on a line that bisects the detection beam 13a in the longitudinal direction, and The detection beam 13c is arranged at a symmetrical position with respect to a line that bisects the beam in the longitudinal direction. Further, the piezoresistive elements FyR3 and FyR4 are on the side of the detection beam 13a with respect to the line that bisects the detection beam 13b in the longitudinal direction, and the line that bisects the detection beam 13c in the longitudinal direction. They are arranged at symmetrical positions.

  In the detection block corresponding to the force point 14b, the piezoresistive elements MyR3 and MyR4 are on a line that bisects the detection beam 13d in the longitudinal direction and bisect the detection beam 13f in the longitudinal direction. It is arranged at a symmetrical position with respect to the line. Further, the piezoresistive elements FxR3 and FxR4 are on the detection beam 13d side with respect to the line that bisects the detection beam 13e in the longitudinal direction, and are lines that bisect the detection beam 13f in the longitudinal direction. They are arranged at symmetrical positions.

  Further, MzR3 and MzR4 are on the detection beam 13e side with respect to the line that bisects the detection beam 13f in the short direction, and with respect to the line that bisects the detection beam 13f in the longitudinal direction. It is arranged in a symmetrical position. Further, FzR3 and FzR4 are arranged on a line that bisects the detection beam 13f in the longitudinal direction and symmetrically with respect to a line that bisects the detection beam 13f in the short direction. Yes.

  In the detection block corresponding to the force point 14c, the piezoresistive elements MxR1 and MxR2 are on a line that bisects the detection beam 13g in the longitudinal direction and bisects the detection beam 13i in the longitudinal direction. It is arranged at a symmetrical position with respect to the line. Further, the piezoresistive elements FyR1 and FyR2 are on the side of the detection beam 13g with respect to the line that bisects the detection beam 13h in the longitudinal direction, and the line that bisects the detection beam 13i in the longitudinal direction. They are arranged at symmetrical positions.

  In the detection block corresponding to the force point 14d, the piezoresistive elements MyR1 and MyR2 are on a line that bisects the detection beam 13j in the longitudinal direction and bisects the detection beam 13l in the longitudinal direction. It is arranged at a symmetrical position with respect to the line. The piezoresistive elements FxR1 and FxR2 are on the side of the detection beam 13j with respect to the line that bisects the detection beam 13k in the longitudinal direction, and are lines that bisect the detection beam 13l in the longitudinal direction. They are arranged at symmetrical positions.

  Further, MzR1 and MzR2 are located on the detection beam 13k side with respect to the line that bisects the detection beam 13l in the short direction, and with respect to the line that bisects the detection beam 13l in the longitudinal direction. It is arranged in a symmetrical position. Further, FzR1 and FzR2 are arranged on a line that bisects the detection beam 13l in the longitudinal direction and symmetrically with respect to a line that bisects the detection beam 13l in the short direction. Yes.

  Here, the piezoresistive elements FxR1 to FxR4 detect the force Fx, the piezoresistive elements FyR1 to FyR4 detect the force Fy, and the piezoresistive elements FzR1 to FzR4 detect the force Fz. The piezoresistive elements MxR1 to MxR4 detect the moment Mx, the piezoresistive elements MyR1 to MyR4 detect the moment My, and the piezoresistive elements MzR1 to MzR4 detect the moment Mz.

  Thus, in the sensor chip 10, a plurality of piezoresistive elements are arranged separately in each detection block. Thereby, based on the change of the output of the several piezoresistive element arrange | positioned to the predetermined beam according to the direction (axial direction) of the force or displacement applied (transmitted) to the force points 14a-14d, the predetermined axis It is possible to detect the displacement in the direction up to 6 axes.

  Specifically, in the sensor chip 10, displacement in the Z-axis direction (Mx, My, Fz) can be detected based on a predetermined deformation of the detection beam. That is, the moments (Mx, My) in the X-axis direction and the Y-axis direction can be detected based on the deformation of the detection beams 13a, 13d, 13g, and 13j that are the first detection beams. Further, the force (Fz) in the Z-axis direction can be detected based on the deformation of the detection beams 13f and 13l which are the third detection beams.

  Further, in the sensor chip 10, displacements (Fx, Fy, Mz) in the X-axis direction and the Y-axis direction can be detected based on a predetermined deformation of the detection beam. That is, the forces (Fx, Fy) in the X-axis direction and the Y-axis direction can be detected based on the deformation of the detection beams 13b, 13e, 13h, and 13k, which are the second detection beams. The moment (Mz) in the Z-axis direction can be detected based on the deformation of the detection beams 13f and 13l that are the third detection beams.

  By varying the thickness and width of each detection beam, it is possible to make adjustments such as uniform detection sensitivity and improvement of detection sensitivity.

  However, it is also possible to reduce the number of piezoresistive elements and to provide a sensor chip that detects a displacement in a predetermined axial direction of 5 axes or less. The piezoresistive element is a typical example of the strain detecting element according to the present invention.

(Distortion body 20)
FIG. 7 is a perspective view illustrating the strain body 20.
As shown in FIG. 7, in the strain body 20, four pillars 22 a to 22 d that are first pillars are arranged at four corners on the base 21, and are the first beams that connect adjacent pillars to each other. A certain four beams 23a to 23d are provided in a frame shape. A pillar 22e, which is a second pillar, is disposed at the center on the base 21. The pillar 22e is a pillar for fixing the sensor chip 10, and is thicker and shorter than the pillars 22a to 22d. The sensor chip 10 is fixed on the pillar 22e so as not to protrude from the upper surfaces of the pillars 22a to 22d.

  The schematic shape of the strain body 20 can be, for example, a rectangular parallelepiped having a length of about 500 μm, a width of about 500 μm, and a height of about 700 μm. The cross-sectional shape of the pillars 22a to 22d can be a square of about 100 μm square, for example. The cross-sectional shape of the pillar 22e can be a square of about 200 μm square, for example.

  A protrusion that protrudes upward from the center in the longitudinal direction of the beams 23a to 23d is provided at the center in the longitudinal direction of each of the upper surfaces of the beams 23a to 23d, and, for example, a columnar input part ( Force point input units) 24a to 24d are provided. The input portions 24a to 24d are portions to which a force is applied from the outside. When a force is applied to the input portions 24a to 24d, the beams 23a to 23d and the columns 22a to 22d are deformed accordingly.

  The column 22e is separated from the beams 23a to 23d that are deformed by the applied force and the columns 22a to 22d that are deformed by the applied force. Therefore, even if a force is applied to the input units 24a to 24d. Does not move (does not deform due to applied force).

  Thus, by providing the four input parts 24a-24d, compared with the structure of one input part, for example, the load resistance of the beams 23a-23d can be improved.

  Four columns 25a to 25d, which are third columns, are arranged at the four corners of the upper surface of the column 22e, and a column 25e, which is the fourth column, is arranged at the center of the upper surface of the column 22e. The pillars 25a to 25e are formed at the same height.

  That is, the upper surfaces of the columns 25a to 25e are located on the same plane. Each upper surface of the pillars 25 a to 25 e serves as a bonding portion that is bonded to the lower surface of the sensor chip 10. Since the columns 25a to 25e are separated from the beams 23a to 23d deformed by the applied force and the columns 22a to 22d deformed by the applied force, the columns 25a to 25e are movable even when a force is applied to the input units 24a to 24d. (It will not be deformed by the applied force).

  Beams 26a to 26d projecting inward in the horizontal direction from the inner side surfaces of the beams 23a to 23d are provided at the longitudinal center portions of the inner side surfaces of the beams 23a to 23d. The beams 26 a to 26 d are second beams that transmit deformation of the beams 23 a to 23 d and the columns 22 a to 22 d to the sensor chip 10. Further, projections 27a to 27d projecting upward from the distal end side of the upper surfaces of the beams 26a to 26d are provided on the distal ends of the upper surfaces of the beams 26a to 26d.

  The protrusions 27a to 27d are formed at the same height. That is, the upper surfaces of the protrusions 27a to 27d are located on the same plane. Each upper surface of the protrusions 27 a to 27 d serves as a bonding portion bonded to the lower surface of the sensor chip 10. Since the beams 26a to 26d and the projecting portions 27a to 27d are connected to the beams 23a to 23d serving as movable portions, when a force is applied to the input portions 24a to 24d, the beams 26a to 26d are deformed accordingly.

  In addition, in a state where no force is applied to the input parts 24a to 24d, the upper surfaces of the columns 25a to 25e and the upper surfaces of the protrusions 27a to 27d are located on the same plane.

  In the strain body 20, the base 21, the columns 22 a to 22 e, the beams 23 a to 23 d, the input portions 24 a to 24 d, the columns 25 a to 25 e, the beams 26 a to 26 d, and the projecting portions 27 a to 27 d ensure rigidity. Moreover, it is preferable that they are integrally formed from the viewpoint of manufacturing with high accuracy. As a material of the strain body 20, for example, a hard metal material such as SUS (stainless steel) can be used. Among them, it is particularly preferable to use SUS630 that is particularly hard and has high mechanical strength.

  Thus, like the sensor chip 10, the strain-generating body 20 also has a structure including a column and a beam, so that the six-axis separability is exhibited because the six-axis changes due to the applied force. Good deformation can be transmitted to the sensor chip 10.

  That is, the force applied to the input portions 24a to 24d of the strain body 20 is transmitted to the sensor chip 10 via the columns 22a to 22d, the beams 23a to 23d, and the beams 26a to 26d. Detect. In the sensor chip 10, the output of each axis can be obtained from a bridge circuit formed one for each axis.

  In addition, in the strain body 20, from the viewpoint of suppressing the stress concentration, it is preferable that the portion forming the inner angle has an R shape.

(Simulation of stress)
8 and 9 are simulation results on deformation (strain) when a force and a moment are applied to the strain generating body 20. The force and moment were applied from the input parts 24a to 24d (see FIG. 9 and the like) of the strain generating body 20. 10 to 12 show simulation results for the stress generated in the sensor chip 10 when the forces and moments shown in FIGS. 8 and 9 are applied. 10 to 12, the tensile normal stress is indicated by “+” and the compressive normal stress is indicated by “−”.

  When the force Fx is applied in the direction from X1 to X2 along the X axis, the strain generating body 20 is deformed as shown in FIG. 8, and the stress as shown in FIG. To do. Specifically, the detection beams 13k and 13e are distorted in the direction of the force Fx by application of the force Fx.

  Here, since the piezoresistive elements FxR1 and FxR2 are located on the X1 side from the longitudinal center of the detection beam 13k, a tensile vertical stress is generated and the resistance value is increased. On the other hand, since the piezoresistive elements FxR3 and FxR4 are located on the X2 side from the longitudinal center of the detection beam 13e, compressive vertical stress is generated and the resistance value is reduced. Thereby, since the balance of the piezoresistive elements FxR1 to FxR4 is lost, a voltage is output from the bridge circuit shown in FIG. 10A, and the force Fx can be detected.

  Although the detection beams 13d and 13j are also distorted in the direction of the force Fx, little or no stress is generated at the positions of the piezoresistive elements MyR1 and MyR2 and the piezoresistive elements MyR3 and MyR4. Therefore, the balance of the bridge is maintained, and no voltage is output from the bridge circuit of the moment My shown in FIG.

  When a force Fy is applied in the direction from Y1 to Y2 along the Y axis, stress as shown in FIG. Specifically, the detection beams 13b and 13h are distorted in the direction of the force Fy by the application of the force Fy.

  Here, since the piezoresistive elements FyR3 and FyR4 are located on the Y1 side from the center in the longitudinal direction of the detection beam 13b, a tensile vertical stress is generated and the resistance value is increased. On the other hand, since the piezoresistive elements FyR1 and FyR2 are located on the Y2 side from the longitudinal center of the detection beam 13h, compressive vertical stress is generated and the resistance value is reduced. Thereby, since the balance of the piezoresistive elements FyR1 to FyR4 is lost, a voltage is output from the bridge circuit shown in FIG. 10B, and the force Fy can be detected.

  For the same reason as the moment My, no voltage is output from the bridge circuit of the moment Mx shown in FIG.

  When a force Fz is applied in the direction from Z2 to Z1 along the Z axis, the strain generating body 20 is deformed as shown in FIG. 14, and stress as shown in FIG. To do. Specifically, the detection beams 13a, 13b, 13g, 13h, 13d, 13e, 13j, 13k, 13c, 13f, 13l, and 13i are distorted in the direction of the force Fz by applying the force Fz.

  Here, a tensile normal stress is generated in the piezoresistive elements FzR1 and FzR4, and the resistance value increases. Further, compressive normal stress is generated in the piezoresistive elements FzR2 and FzR3, and the resistance value is reduced. Thereby, since the balance of the piezoresistive elements FzR1 to FzR4 is lost, the force Fz can be detected by the bridge circuit shown in FIG.

  For the same reason as described above, the bridge circuit of force Fx shown in FIG. 10A, the bridge circuit of force Fy shown in FIG. 10B, the bridge circuit of moment Mx shown in FIG. No voltage is output from the bridge circuit of moment My shown in FIG. 12A and the bridge circuit of moment Mz shown in FIG.

  When the moment Mx is applied in the direction of Y2-Z2-Y1 with the X axis as the rotation axis, stress as shown in FIG. Specifically, the application of the moment Mx distorts the detection beams 13g and 13a in the direction of the moment Mx. Therefore, tensile normal stress is generated in the piezoresistive elements MxR1 and MxR2, and the resistance value increases. Further, compressive vertical stress is generated in the piezoresistive elements MxR3 and MxR4, and the resistance value is reduced. Thereby, since the balance of the piezoresistive elements MxR1 to MxR4 is lost, the moment Mx can be detected by the bridge circuit shown in FIG.

  For the same reason as described above, no voltage is output from the bridge circuit of force Fy shown in FIG.

  When the moment My is applied in the direction of X1-Z2-X2 with the Y axis as the rotation axis, the strain body 20 is deformed as shown in FIG. 9, and the sensor chip 10 has a shape as shown in FIG. Stress is generated. Specifically, the detection beams 13j and 13d are distorted in the direction of the moment My by the application of the moment My.

  Here, a tensile normal stress is generated in the piezoresistive elements MyR1 and MyR2, and the resistance value increases. In addition, compressive vertical stress is generated in the piezoresistive elements MyR3 and MyR4, and the resistance value decreases. Thereby, since the balance of the piezoresistive elements MyR1 to MyR4 is lost, the moment My can be detected by the bridge circuit shown in FIG.

  For the same reason as described above, no voltage is output from the bridge circuit of force Fx shown in FIG.

  When the moment Mz is applied in the direction of X2-Y2-X1 with the Z axis as the rotation axis, the strain body 20 is deformed as shown in FIG. 9, and the sensor chip 10 has a shape as shown in FIG. Stress is generated. Specifically, the detection beams 13a, 13b, 13g, 13h, 13d, 13e, 13j, 13k, 13c, 13f, 13l, and 13i are distorted in the direction of the moment Mz by applying the moment Mz.

  Here, a tensile normal stress is generated in the piezoresistive elements MzR1 and MzR4, and the resistance value is increased. Further, compressive vertical stress is generated in the piezoresistive elements MzR2 and MzR3, and the resistance value is reduced. Thereby, since the balance of the piezoresistive elements MzR1 to MzR4 is lost, the moment Mz can be detected by the bridge circuit shown in FIG.

  For the same reason as described above, a bridge circuit of force Fx shown in FIG. 10A, a bridge circuit of force Fy shown in FIG. 10B, a bridge circuit of moment Mx shown in FIG. No voltage is output from the bridge circuit of moment My shown in (a).

  As described above, in the sensor chip 10, when displacement (force or moment) is input to the force point, bending and torsional stress corresponding to the input is generated in the predetermined detection beam. The resistance value of the piezoresistive element arranged at a predetermined position of the detection beam is changed by the generated stress, and the output voltage from each bridge circuit formed in the sensor chip 10 can be obtained from the electrode 15. Further, the output voltage of the electrode 15 can be obtained outside via the input / output substrate 30.

  In the sensor chip 10, since one bridge circuit is formed for each axis, the output of each axis can be obtained without combining the outputs. As a result, multi-axis displacement can be detected and output by a simple method that does not require complicated calculations and signal processing.

  Also, the piezoresistive elements are arranged separately for different detection beams depending on the type of input. Thereby, the sensitivity of an arbitrary axis | shaft can be adjusted independently by changing the rigidity (thickness and width | variety) of the applicable detection beam.

  The detailed configuration of the 6-axis sensor is appropriately incorporated with reference to Japanese Patent Application No. 2016-199486. Such a 6-axis sensor can detect and output multi-axis (at least 4 axes) displacement by a simple method.

<Another example of engagement between attachment and tip member>
FIG. 13 shows another example of the engagement between the attachment 3-1 and the tip member 5-1 in the sensor assembly.

  The attachment of the tip member 5 to the attachment is not limited to screw fitting using the male screw 53 and the female screw 33 as shown in FIG. 2, and any other method can be employed.

  For example, as shown in FIG. 13, the groove 34 may be provided on the attachment 3-1 side, and the pin 54 of the tip member 5-1 may be fitted and fixed. Also in this configuration, the attachment 3-1 and the tip member 5-1 are provided on the inner peripheral side of the housing 4 so that the space gap G exists between the inner surface of the housing 4. Therefore, the triaxial force applied to the tip member 5-1 and the moment about the axis are effectively transmitted to the six-axis sensor 1.

  Further, the configuration of the six-axis sensor 1 provided in the sensor assembly 100 is not limited to that shown in FIGS. 3 to 12, and may be the following configuration.

<Other configuration examples of 6-axis sensor>
FIG. 14 shows another configuration example of the 6-axis sensor. In this configuration example, the strain body 20α of the six-axis force sensor 1α has a substantially truncated cone shape.

  Specifically, as shown in FIG. 14, in this configuration, the columns 201 a to 201 d are spaced apart from each other around the column 202 and arranged at substantially equal intervals. The pillars 201a to 201d are arranged obliquely so that the center position of each upper surface is closer to the center side of the pedestal part 204 than the center position of each lower surface in plan view. That is, the pillars 201a to 201d are disposed obliquely so as to approach the pillar 202 as the distance from the pedestal part 204 increases (as the distance from the contact part 20 increases).

  In the present embodiment, the columns 201a to 201d are shaped so that the cross-sectional area (the area of the cross section perpendicular to the Z axis) decreases as the distance from the pedestal portion 204 increases (towards the attachment 3α side). . The other configurations and functions are the same as those of the strain generating body shown in FIG. 7, and it is assumed that the sensor chip 10 is provided in the vicinity of the attachment 3α also in the strain generating body 20α of this configuration.

  In this configuration, the front end (front end member side) of the housing 4α is formed with an annular edge bent inward. In this configuration, a stopper may be provided that is provided on the tip side of the edge and contacts when the pen tip is deformed.

  Next, a specific configuration example in which the sensor assembly described above is applied to members including tip members in various fields will be described.

<First Embodiment: Stylus Pen>
First, as a first embodiment, an example in which a sensor assembly is applied to a stylus pen will be described in detail with reference to FIGS.

  FIG. 15 shows a configuration example when the sensor assembly is a stylus pen 100A.

  A stylus pen (also referred to as an electronic pen or a digitizer pen) 100A has a pen tip 5A as the tip member 5 described above.

  Further, the stylus pen 100A includes a position transmitter 6 in addition to the 6-axis force sensor 1A, the attachment (pen tip mounting portion) 3A, the housing 4A, and the pen tip (tip member) 5A. Yes.

  Even in this configuration, there is a space gap between the attachment (pen tip attaching portion) 3A and the inner surface of the housing 4A. Therefore, the triaxial force applied to the pen tip 5A and the pen tilt (rotation) corresponding to the moment about the axis and the writing pressure are effectively transmitted to the 6-axis sensor 1A.

  That is, the 6-axis sensor 1A can detect the contact pressure of the pen tip 5A with respect to the touch panel (panel) 210 (see FIG. 20) and the inclination and / or rotation of the pen tip 5A on the panel.

  The position transmitter 6 includes a magnetic body 61, a magnetic core 62, and a magnetic coil 63. As shown in FIG. 15, the magnetic body 61 is contained in the pen tip 5A. The magnetic coil 63 is provided behind the 6-axis force sensor 1. The magnetic core 62 passes through the 6-axis force sensor 1 </ b> A and the attachment 3 </ b> A, and connects the magnetic body 61 and the magnetic coil 63.

  The stylus pen 100A is an electromagnetic induction type pen. The magnetic coil 63 built in the stylus pen 100A is moved by the electronic pen moving in the magnetic field (electromagnetic) created on the surface of the digitizer 212 (see FIG. 21) of the touch panel (panel surface, display unit) of the tablet 200. Electricity flows through the tablet, and the tablet receives an induction signal generated by the stylus pen 100A using the electricity (induction). By repeating this process at a high speed, a smooth stylus pen trajectory is read by the tablet.

  Further, in the stylus pen 100A shown in FIG. 15, the strength of the drawn lines and the color density can be expressed on the touch panel 100A by the function of the 6-axis sensor 1 detecting the writing pressure, the inclination, the rotation, and the like.

  Here, it is known that a magnetic coil used in a general electromagnetic induction type stylus pen has a relatively large size. Therefore, when a magnetic coil is provided on the pen tip side and a 6-axis sensor is provided behind it, the distance between the pen tip that is a contact point that touches the touch panel and the 6-axis sensor that is a power point increases, and writing pressure, tilt, and rotation are increased. Sensing sensitivity such as is reduced.

  On the other hand, in the case of this configuration, as shown in FIG. 15, since the magnetic core 62 is configured to penetrate the 6-axis sensor 1 and the attachment 3A, the magnetic coil 63 is provided behind the attachment 3A. The size does not affect the distance between the pen tip 5A and the 6-axis sensor 1A. Therefore, since the 6-axis sensor 1A can be provided close to the pen tip 5A, it is possible to avoid a decrease in sensing sensitivity of the 6-axis sensor 1A.

  FIG. 16 shows a state where the pen tip 5A of the stylus pen 100A of FIG. 15 is in contact with the touch panel 210 (see FIG. 20). FIG. 17 shows a state where the user O is inputting to the touch panel 210 with the stylus pen 100A of the present embodiment.

  As shown in FIG. 16, it is preferable that the nib 5A according to the present embodiment can be deformed by the pressure when contacting the panel. At this time, the magnetic core 62 has elasticity and follows the deformation of the pen tip 5A.

  Therefore, for example, the material of the nib 5A is preferably resin, fiber, or the like. The magnetic core 62 is preferably composed of a piano wire that allows a certain degree of deformation, for example.

  If the nib 5A of the stylus pen 100A of the present application is hard, it will slide on the hard panel surface, making it difficult to write. On the other hand, if it is too soft like a brush, the sensation of rebounding from the force when it is applied cannot be transmitted well to the 6-axis sensor 1A.

  As described above, by giving elasticity to the pen tip 5A and the magnetic core 62, a user who holds the stylus pen 100A following the deformation of the pen tip 5A when inputting using the stylus pen on the touch panel. It becomes possible for O to obtain a touch close to the touch (force feedback, texture) when drawing on paper.

  Further, the 6-axis force sensor 1A detects and detects the pressure (writing pressure) of the pen tip that is in contact with the panel 22A by setting the friction coefficient within a desired range using resin, silicon, polyester fiber, or the like. Therefore, even if the touch panel side does not detect the contact area, the thickness of the line can be changed as shown in FIG.

(Replace the stylus pen tip type)
FIG. 18 shows an example in which the pen tip type of the stylus pen is specified using the resonance frequency.

  The stylus pen 100A may have a replaceable pen tip type. In the example of FIG. 18, the pen tip shows an example in which different resonance circuits including coils and capacitors are mounted for each type. For example, the resonance frequency of the resonance circuit 64A of the pen tip 5A-1 having the contact portion 51A of FIG. 18A is ω1, and the resonance circuit 64B of the pen tip 5A-2 having the contact portion 51B of FIG. The resonance frequency is ω2.

  When the pen tip is exchanged, the digitizer 212 (see FIG. 21) of the touch panel 210 has resonance frequencies (ω1, ω2) of the resonance circuit (LC circuit) mounted on the pen tips 5A-1 and 5A-2 shown in FIG. ) To make the pen tip type recognizable.

  In the above example, the example in which the resonance circuit 64 is used to recognize the replacement of the pen tip type has been described. However, the replacement of the pen tip may be recognized by another method.

  FIG. 19 shows an example in which the pen tip type of the stylus pen is specified using impedance and a microcomputer.

  When the microcomputer is provided in the stylus pen 100A-1, the microcomputer 65 is provided behind the 6-axis sensor 1A.

  The pen tip 5A-3, 5A-4 is provided with a detection mechanism 66 for detecting the connection state with the stylus pen 100A-1, and this detection mechanism 66 is an RLC series circuit, for example, It has a predetermined impedance Z for each type. For example, the impedance of the RLC series circuit 66C of the pen tip 5A-3 having the contact portion 51C of FIG. 19A is Z1, and the RLC series circuit of the pen tip 5A-4 having the contact portion 51D of FIG. The impedance of 66D is Z2.

  When the pen tip is exchanged in this configuration, the microcomputer 65 of the stylus pen 100A-1 specifies the type of the pen tip 5A-3, 5A-4 via the detection mechanism 66 (66C, 66D) and wirelessly communicates with the touch panel 210. The device (for example, tablet 200) including the touch panel 210 recognizes the type of the pen tip.

  By recognizing the type of the nib using the above method, characters and lines can be drawn on the touch panel with thicknesses and textures corresponding to each of the plurality of recognized nibs.

<Application example of stylus pen>
FIG. 20 shows an example in which the stylus pen of this embodiment receives guidance on the writing pressure and direction of the stylus pen while writing characters. FIG. 21 is a block diagram of a work drawing technique guidance system 1000 using the stylus pen 100A shown in FIG.

  A work drawing technique guidance system 1000 illustrated in FIG. 21 includes a stylus pen 100 </ b> A and a tablet 200.

  In FIG. 21, it is assumed that the tablet 200 is connected to an external storage medium 290 such as a USB (Universal Serial Bus). The external storage medium 290 may be connected to the tablet 200 via the USB adapter 295 (see FIG. 20).

  The external storage medium 290 stores a sample handwriting table, a sample pen tilt table, a sample pen pressure table, fixed advice data (for display), fixed advice data (for voice), and the like.

  In the example of FIG. 21, an example in which necessary data is stored in the external storage medium 290 is shown. However, for example, by downloading, data necessary for teaching a drawing technique can be stored in the internal memory of the tablet 200. It may be memorized.

  The stylus pen 100A has a communication unit 7A in addition to the 6-axis sensor 1A and the position transmission unit 6A described above.

  The tablet 200 has a touch panel 210 having functions of an LCD (Liquid Cristal Display) 211 and a position detection unit (digitizer) 212.

  Furthermore, the tablet 200 includes a control unit 220, a display control unit 230, an audio control unit 240, a speaker 250, a storage unit 260, a communication unit 270, a data input / output unit 280, and the like.

  The stylus pen 100A and the tablet 200 are paired (wirelessly connected) in advance by the method shown in FIG. 18 or FIG. 19 so as to be detectable by the electromagnetic induction method. When the position detection unit (digitizer) 212 in the touch panel 210 of the tablet 200 detects the position transmitted from the position transmission unit 6 of the stylus pen 100A, the touch panel 210 recognizes the position and the stylus pen 100A touches the screen. Detect position.

  Then, the detected position of the stylus pen 100A on the touch panel 210 is displayed on the LCD 211 and sent to the detection result storage area 261 of the storage unit 260.

  In addition, information on the tip tilt and writing pressure detected by the 6-axis sensor 1A of the stylus pen 100A is sent to the communication unit 270 of the tablet 200 via the communication unit 7A, and temporarily stored in the detection result storage area 261. Saved in.

  The control unit 220 includes a comparison unit 221 and an instruction information setting unit 222.

  The comparison unit 221 stores, in real time, the handwriting of the stylus pen 100A, the tilt of the pen, and the writing pressure stored in the detection result storage area 261 in the external storage medium 290, and the data input / output unit (acquisition unit) 280 To the sample handwriting table, the sample pen tilt table, and the sample pen pressure table. In this example, the position information of the detected pen tip, the inclination of the pen tip 5A of the stylus pen 100A, and the pressure information are temporarily stored in the detection result storage area 261. Instead, the detection result may be directly input to the comparison unit 221.

  The instruction information setting unit 222 sets instruction information according to the comparison result. More specifically, the advice is selected as instruction information with reference to the standard advice data for display and voice according to the comparison result.

  That is, the control unit 220 generates advice information on the direction in which the stylus pen 100A travels, how to apply force, and the tilt of the pen tip while the user is creating a work such as calligraphy or painting.

  When the instruction by voice is set, the instruction content set by the instruction information setting unit 222 is sent to the voice control unit 240, and advice is given to the user by voice from the speaker 250 provided in the tablet 200 as shown in FIG. To do.

  When an instruction by display is set, the instruction content set by the instruction information setting unit 222 is sent to the display control unit 230, and the instruction content is displayed on the touch panel 210 by the LCD 211 to advise the user.

  In a conventional guidance system using a touch panel, only handwriting was taught, but by using the 6-axis sensor of the present application, characters, paintings, drawings, etc. can be used in real time with pen tilt, writing pressure, etc. Can be evaluated in comparison.

  In this example, the tablet 200 paired with the stylus pen 100A is displayed on the voice or the touch panel 210, so that the handwriting, strength or inclination of the stylus pen 100A, and then the pen tip. The example which advises the position etc. which heads is shown.

  However, by providing a speaker function on the stylus pen 100A side, the stylus pen 100A itself that is paired with the tablet 200 is configured to advise the direction of travel, how to apply force, the inclination of the pen tip, and the like. May be.

  FIG. 20 shows an example of receiving instruction of calligraphy, but what receives the instruction may be other works such as drawing, painting, and cartoon.

  The conventional touch panel was only capable of teaching handwriting, but by using the stylus pen including the above 6-axis sensor as in this configuration, characters, paintings, drawings, etc., in addition to handwriting, pen tilt and writing Pressure can also be evaluated in real time compared to the sample.

<Second Embodiment>
Next, as a second embodiment, an example in which the sensor assembly is applied to a dental laboratory instrument will be described in detail with reference to FIGS.

FIG. 22 is a configuration example in the case where the sensor assembly is a dental laboratory instrument 100B.
The dental technician instrument (dental technician tool) 100B, which is a dental technician tool, has a tip tool 5B as a tip member.

  In FIG. 22, as an example of the tip tool, an example of a push carbide bar for shape correction is shown, but the tip tool is for a carbide cutter or diamond point for shape correction, for intermediate finishing or finish polishing, Other tip tools such as a paper cone, a cross cone, a silicon point, a margin point, and a grindstone may be used.

  The tip tool 5B processes the technical object AT (form correction or finishing such as polishing and excavation) by contacting the technical object AT (see FIG. 23) such as a denture or a prosthesis.

  The dental laboratory instrument 100B further includes a 6-axis force sensor 1B that detects the inclination and pressure of the tip tool 5B, a tip tool attachment portion 3B that is an attachment, and a housing 4B.

  Also in the present configuration shown in FIG. 22, there is a space gap between the tip tool attachment portion 3B and the inner surface of the housing 4B. Therefore, the triaxial force applied to the tip tool 5B, which is the tip member, and the moment about the axis are effectively transmitted to the six-axis sensor 1B. That is, the 6-axis sensor 1B detects information on the direction and pressure in which a force is applied to the technical object when the tip tool 5B comes into contact with the technical object.

  Furthermore, you may have the memory | storage part which memorize | stores the direction to which the force was applied to the technical object which contacted, the information of pressure, and the information of the duration of a pressure and a direction in the dental laboratory instrument 100B.

<Application Example of Second Embodiment>
FIG. 23 is an example of a dental technician technique display system that displays the contact angle and pressure of the dental technician instrument with respect to the technician object AT during the technician using the dental technician instrument 100B of the present embodiment. FIG. 24 is an example of a block diagram of the dental technician technique display system 2000 of FIG.

  A dental technician technique display system 2000 shown in FIG. 24 includes a dental technician instrument 100B, a PC 300, and a camera 400.

  The PC 300, which is an example of an information processing apparatus, is connected to the dental laboratory instrument 100B via a wired or wireless network. The camera 400 is connected to the PC 300 via a wired or wireless network.

  The PC 300 includes a display unit 310, a control unit 320, a display control unit 330, an audio control unit 340, a speaker 350, a storage unit 360, a communication unit 370, and the like.

  The storage unit 360 includes a complete shape storage area, a tooth shape storage area, and a detection result storage area. Data is set in advance in the completed shape memory area and the tooth mold memory area based on the patient's tooth mold as the technical object.

  The storage unit 360 stores information on the direction in which a force is applied to the technical object AT and the pressure when the dental technical instrument 100B comes into contact.

  For example, the cutting information accumulating unit 321 of the control unit 320 accumulates and counts the duration of the contact time at the same angle and the same pressure when performing the technique.

  The PC 300 displays on the screen of the display unit 310 the image taken by the camera 400 and the pressure and inclination information of the tip tool 5B currently being worked by the technician O in association with each other on the display unit 310. To do.

  In the dental technician method display system 2000 of this configuration, the usage method of the dental technician instrument 100B of the expert technician O is displayed together with the video, and the method of applying pressure and the direction are displayed in numerical values, so that in the technical learning of students and the like This makes it possible to learn more specific techniques using tools.

  In this example, an example of a dental technician is shown, but the present technology can also be applied to a field that requires technical training using an electric tool. For example, it can be applied to woodworking engineering, metal processing, and the like.

<Third Embodiment>
FIG. 25 is a configuration example when the sensor assembly is mounted on a medical device. In FIG. 25, (a) is a configuration example when the sensor assembly is mounted on the medical knife 100C, and (b) is a configuration example when the sensor assembly is mounted on the medical tentacle 100D. The medical knife 100C and the medical tentacle 100D are examples of medical instruments.

  The medical knife 100C shown in FIG. 25 (a) has a medical blade 5C as a tip member. The medical blade 5C corresponds to a cutting edge portion of a medical knife. The medical blade (cutting edge) 5C shown in FIG. 25A is an example of a replaceable knife, but applicable medical blades 5C include a replaceable knife for other shapes and a replaceable knife for a microscope. It may be a scalpel.

  The medical knife 100C further includes a 6-axis force sensor 1C that detects the inclination and pressure of the medical blade 5C, an attachment (blade mounting portion) 3C, and a housing 4C.

  Also in this configuration, there is a space gap between the blade attachment portion 3C as an attachment and the inner surface of the housing 4C. Therefore, the triaxial force applied to the medical blade 5C as the tip member and the moment about the axis are effectively transmitted to the 6-axis sensor 1C.

  A medical tentacle 100D shown in FIG. 25B has a medical tentacle 5D as a tip member. The tentacle 5D is, for example, a soft rounded elastic body, and slowly touches the surgical site of a patient (or a patient) or its peripheral site instead of a finger when an operator such as a surgeon O or a veterinarian operates. Thus, the tactile sensation is detected using the tentacles 5D in the same manner as the affected part and the part other than the affected part are discriminated by tactile sensation.

  The medical tentacle 100D further includes a 6-axis force sensor 1D that detects the inclination and pressure of the tentacle 5D, an attachment (tentacle mounting portion) 3D, and a housing 4D.

  Even in this configuration, there is a space gap between the tentacle mounting portion 3D as an attachment and the inner surface of the housing 4D. Therefore, the triaxial force applied to the tentacle 5D as the tip member and the moment about the axis are effectively transmitted to the 6-axis sensor 1D.

  In the present embodiment, the 6-axis force sensors 1C and 1D indicate the softness of the surgical object (patient or patient) in contact with the medical blade 5C and / or the tentacles 5D and the direction in which pressure is applied to the surgical object. To detect.

<Application Example 1 of Third Embodiment>
FIG. 26 is an example of a telesurgical system using the medical knife and / or the tentacle of FIG. FIG. 27 is a block diagram of the telesurgical system 3000 of FIG.

  A remote operation system 3000 shown in FIG. 27 includes an operation robot (patient operation robot) 500 and an operation side console 600. The surgical robot 500 holds a medical knife 100C and a medical tentacle 100D so as to be operable.

  The surgical robot 500 and the operation side console 600 are connected via a network (wired, short-range wireless, designated wireless).

  The surgical robot 500 includes robot arms 510 and 520, an information processing unit 530, a camera 540, a microphone 550, and a speaker 560. The information processing unit 530 includes a 6-axis information acquisition unit 531, an audio processing unit 532, a video processing unit 533, a communication unit 534, and the like.

  The operation side console 600 includes input devices 610 and 620, an information processing unit 630, a display 640, a microphone 650, a speaker 660, and a leg pedal 670. The information processing unit 630 includes movement information acquisition units 631 and 632, a six-axis information conversion unit 633, an audio processing unit 634, a video processing unit 635, a pedal information acquisition unit 636, a communication unit 637, and the like.

  The surgical robot 500 is a device that directly performs an operation on a patient in response to an instruction from the operation side console 600.

  In the surgical robot 500, the robot arms (slave manipulators) 510 and 520 are operated by the surgeon operating the operation side console 600, so that the movement information acquisition units 631 and 632 acquire the position information of the operation, and the movement information transmission drive is performed. By being transmitted to the units 511 and 521, it is operated so as to move in conjunction with the input devices 610 and 620.

  In this embodiment, a medical knife 100C and / or a medical tentacle 100D are detachably held at the tips of robot arms (slave manipulators) 510 and 520. The inclination and pressure of the scalpel / tentacle detected by the medical scalpel 100C and / or the medical tentacle 100D are transmitted to the 6-axis information acquisition unit 531 of the information processing unit 530 via the robot arms 510 and 520 or wirelessly. The detected amount is digitized.

  The camera 540 images the surgical site of the patient. The camera 540 is more preferably a camera that can photograph three-dimensionally.

  The microphone (microphone) 550 receives a voice command from a surgical assistant or a surgical nurse attending the operation. The speaker 560 sends a surgeon's voice command input to the operation side console 600 as voice information.

  The operation side console 600 is a device operated by a surgeon.

  Input devices (master manipulators) 610, 620 may include any one or more of various input devices, such as joysticks, gloves, trigger guns, manual controllers, and the like. In this embodiment, the female input device 610 is an input device corresponding to the operation of the medical knife 100C of FIG. 25A, and the tentacle input device 620 is an operation of the medical tentacle 100D of FIG. An example of an input device corresponding to is shown.

  Note that the leg pedal 670 is also a leg input device for giving instructions different from the input devices 610 and 620 for inputting by hand.

  In the present embodiment, the input devices 610 and 620 are provided with vibration generators 611 and 621. Note that the leg pedal 670 may also be provided with a vibration generator as necessary.

  A microphone (microphone) 650 receives voice commands from the surgeon.

  The display (master display) 640 includes one or more images of the surgical site in the patient and other information for the surgeon, as detected by the medical scalpel 100C and the medical tentacle 100D. Etc. are also displayed.

  In the above configuration, the inclination / pressure of the scalpel / tentacle detected by the medical scalpel 100C and / or the medical tentacle 100D is transmitted via the robot arms 510, 520 or wirelessly, and the information processing unit 530 of the surgical robot 500. Is transmitted to. Then, the softness of the surgical object and the direction in which pressure is applied to the surgical object are transmitted to the operation side console 600 via the communication units 534 and 637 and converted into the vibration amount by the 6-axis information conversion unit 633. The vibration generating units 611 and 621 provided in the input devices 610 and 620 can be transmitted as vibrations.

  Thus, in the remote operation system, when the medical scalpel 100C and / or the medical tentacle 100D gripped by the robot arms 510 and 520 are in contact with a part other than the surgical site such as an organ or abdominal wall, the operation side console 600 The surgeon who is an operator can sense it as a response by vibration.

<Application Example 2 of Third Embodiment>
FIG. 28 is an example of a three-dimensional surgical technique display system using the medical knife 100C and / or the medical tentacle 100D of FIG. FIG. 29 is a block diagram of the three-dimensional surgical technique display system 4000 of FIG.

  A three-dimensional surgical technique display system 4000 shown in FIG. 29 includes a PC 700, a three-dimensional position detection device 800, and a camera 900. The three-dimensional position detection device 800 and the camera 900 function as a three-dimensional camera that measures the position of the medical blade 5C or the tentacle 5D of the medical instrument (100C, 100D).

  In the case where the camera 900 is provided two-dimensionally, it is preferable to take an image so that the surgical part where the operation is performed can be visually recognized by the medical knife 100C. Therefore, the camera 900 may be installed directly above or may move in conjunction with the medical knife 100C. Alternatively, the camera 900 and the medical knife 100C may be integrated.

  The PC 700 includes a display unit 710, a control unit 720, a display control unit 730, an audio control unit 740, a speaker 750, and a storage unit 760.

  The storage unit 760 includes a three-dimensional information storage area, an image information storage area, a 6-axis detection result storage area, and the like.

  The control unit 720 includes an information synthesis unit 721, and acquires an image of the surgical site from the camera 900 acquired through the communication unit, the medical scalpel 100C detected by the three-dimensional position detection device 800, and / or medical treatment. The position of the tentacle 100D is synthesized and displayed on the display unit 710.

  Further, by detecting the inclination and pressure of the 6-axis sensor detected by the medical scalpel 100C and / or the medical tentacle 100D, pressure is applied to the softness of the surgical object (patient or patient) and the surgical object. Detect direction.

  The PC 700 displays the photographed image, the position information, the pressure and tilt information of the tip tool 5B currently being worked on the screen of the display unit 710 together.

  In the surgical technique display system 4000 of this configuration, the method of using an expert's scalpel and the method of identifying the affected part (tumor part, etc.) are digitized and displayed together with the video, so that it is more specific in the learning of surgical techniques for students and the like. It is possible to learn how to use the scalpel during surgery and how to find the affected area.

<Fourth embodiment>
FIG. 30 is a configuration example when the sensor assembly is mounted on a shoe sole.

  In this embodiment, it is a structural example in case the sensor assembly is the balance detection shoe 100E provided in the shoe sole.

  The balance detection shoe 100 has a sensor 5E provided on the shoe sole as the tip member.

  Further, the balance detection shoe 100E includes the 6-axis force sensor 5E and an attachment. Since the sensor is provided by making a hole in the shoe sole, the housing 4E corresponds to a hole portion of the shoe.

  As shown in FIG. 30, also in this configuration, there is a space gap between the sensor, the sensor mounting portion, and the inner surface of the housing 4E. Therefore, the movement and application of the weight shift corresponding to the triaxial force applied to the sensor 5E disposed on the shoe sole and the moment about the axis are effectively transmitted to the six-axis sensor.

  The result of the 6-axis sensor detected in this way is transmitted to, for example, the mobile phone or the smartphone 5100 of the user wearing the shoes, and the reference data in advance as in the application example of the first embodiment shown in FIG. It is preferable that advice on walking or jogging can be received from the smartphone 5100 by registering.

  While the sensor assembly has been described with a plurality of exemplary embodiments, the present invention is not limited to the above exemplary embodiments. Various modifications and improvements, such as combinations and substitutions with part or all of other example embodiments, are possible within the scope of the present invention.

1 6-axis sensor (6-axis force sensor, force sensor)
3,3-1 Attachment (tip member mounting part)
3A Pen tip attachment (attachment)
3B Technical tool attachment (attachment)
3C Blade mounting part (attachment)
3D tentacle attachment (attachment)
3E Sole detection part mounting part (attachment)
4,4A, 4B, 4C, 4D, 4E Housing 4i Inner peripheral surface 5,5-1 Tip member 5A, 5A-1, 5A-2, 5A-3, 5A-4 Pen tip 5B Tip tool 5C Medical blade 5D Tentacle 5E Sole sensor 6 Position transmitter 10 Sensor chip (6-axis force sensor)
20 Straining body (6-axis force sensor)
31 receiving portion 32 mounting upright portion 33 female screw 34 groove 51 contact portion 52 fitting portion 53 male screw 54 pin 61 magnetic body 62 magnetic core 63 magnetic coil 100 sensor assembly 100A stylus pen 100B dental laboratory instrument 100C medical knife (medical) Appliance)
100D medical tentacles (medical instruments)
100E Balance detection shoe 200 Tablet 210 Touch panel (panel)
212 Digitizer (position detector)
270 Communication unit 280 Data input / output unit (acquisition unit)
300 PC (information processing equipment)
400 camera 500 surgical robot (patient surgical robot)
540 Camera 600 Operation console 610, 620 Input device 640 Display 700 PC (information processing apparatus)
800 3D position detector (3D camera)
900 Camera (3D camera)
1000 Work Drawing Technique Guidance System 2000 Dental Technician Technique Display System 3000 Remote Surgery System 4000 Surgical Technique Display System 5000 Walking State Display System

Claims (14)

A cylindrical housing;
In a state in which a part protrudes from one end of the housing, a tip member that can contact an object;
A 6-axis force sensor provided in the housing and provided with a force point input portion protruding toward the tip member;
A tip member attaching portion connected to the force point input portion of the six-axis force sensor and capable of attaching the tip member;
The sensor assembly, wherein the tip member attaching portion and the tip member are provided on an inner peripheral side of the casing such that a space gap exists between the inner peripheral surface of the casing. A cylindrical housing;
In a state where a part protrudes from one end of the housing, a pen tip that can contact the touch panel,
A 6-axis force sensor provided in the housing and provided with a force point input portion protruding toward the pen tip side;
A pen tip attachment portion connected to the force point input portion of the six-axis force sensor and capable of attaching the pen tip;
The pen tip mounting portion and the pen tip are provided on the inner peripheral side of the casing so that there is a space gap between the pen tip mounting portion and the inner peripheral surface of the casing;
The stylus pen, wherein the six-axis force sensor detects a contact pressure of the pen tip with respect to the touch panel and an inclination and / or rotation of the pen tip on the touch panel. A magnetic core penetrating the 6-axis force sensor and the pen tip mounting portion;
The nib contains a magnetic material,
The magnetic core is connectable to the magnetic body contained in the pen tip,
The stylus pen according to claim 2, wherein the touch panel detects the position of the pen tip in the touch panel by an electromagnetic induction method by detecting the magnetic body and the magnetic core. The pen nib is deformable by pressure when contacting the touch panel,
The stylus pen according to claim 3, wherein the magnetic core has elasticity and follows a deformation of the pen tip to give force feedback to the user. The type of the nib is exchangeable,
A resonance circuit with a coil and a capacitor is mounted on the pen tip,
The stylus pen according to claim 3 or 4, wherein the touch panel is capable of recognizing a type of the pen tip by scanning a resonance frequency of the resonance circuit mounted on the pen tip. In the housing, provided with a microcomputer provided behind the 6-axis force sensor,
The type of the nib is exchangeable,
The pen tip is provided with a detection mechanism for detecting a connection state with the stylus pen,
5. The stylus according to claim 3, wherein the microcomputer specifies the type of the nib through the detection mechanism and transmits the nib type to the touch panel so that the touch panel recognizes the type of the nib. pen. The stylus pen according to any one of claims 2 to 6, wherein the strain body of the six-axis force sensor has a truncated cone shape. The tip of the casing is formed with an annular edge bent inwardly,
The stylus pen according to claim 7, further comprising a stopper provided on a tip side of the edge and contacting when the pen tip is deformed. A stylus pen according to any one of claims 2 to 8,
A tablet provided with a position-detectable touch panel,
The tablet is capable of advising the direction of movement of the pen tip when applying calligraphy, painting, etc. with the stylus pen, how to apply force, and tilting of the pen tip. system. It is a dental laboratory instrument that can be connected to an information processing device via wire or wirelessly,
The dental technician instrument is:
A cylindrical housing;
A tip tool capable of contacting a technical object;
A 6-axis force sensor provided in the housing and provided with a force point input portion protruding toward the tip side;
A tip tool attachment portion connected to the force point input portion of the six-axis force sensor and capable of attaching the tip tool;
There is a space gap between the tip tool mounting portion and the inner surface of the housing,
The 6-axis force sensor detects information on the direction and pressure applied by the dental technician instrument to the technical object when the tip tool comes into contact with the technical object;
The dental technician instrument or the information processing apparatus includes a direction in which a force is applied to the contacted technical object, and a storage unit that stores information on pressure and information on pressure and duration of the direction. Dental technician instrument to do. The dental technical instrument according to claim 10, an information processing apparatus connected to the dental technical instrument in a wired or wireless manner, and a camera connected to the information processing apparatus in a wired or wireless manner,
The information processing apparatus includes:
The storage unit that stores information on the direction and pressure applied to the contacted technical object, and the information on the direction and pressure applied to the stored technical object are captured by the camera. A dental technician technique display system comprising: a display that displays on a screen in association with an image of the technical object being technically processed by a dental technician instrument. A cylindrical housing;
With a part protruding from one end of the housing, a medical blade or tentacle that can contact the surgical object;
A 6-axis force sensor provided in the housing and provided with a force point input portion protruding toward the tip side;
An attachment portion connected to the force point input portion of the six-axis force sensor and capable of attaching the medical blade or the tentacle;
The mounting portion and the medical blade or the tentacle are provided on the inner peripheral side of the casing such that a spatial gap exists between the inner peripheral surface of the casing and
The 6-axis force sensor detects the softness of the surgical object that the medical blade or the tentacle contacts and the direction in which pressure is applied to the surgical object. In a telesurgical system comprising a patient surgery robot, and the patient surgery robot and an operation side console connected via a wire or a network,
The patient surgery robot is
An arm for gripping the medical instrument according to claim 12, and a camera for photographing an operation part,
The operation side console is
An input device operated by the surgeon, and a display unit for displaying an image taken by the camera,
The arm of the patient surgery robot moves in conjunction with the input device of the operation side console,
The patient surgery robot transmits the softness of the surgical object and the direction in which pressure is applied to the surgical object, detected by the medical instrument, to the input device of the operation side console. Remote operation system. 13. The medical instrument according to claim 12, a three-dimensional camera for photographing a surgical object of the medical instrument, and an information processing apparatus connected to the medical instrument and the three-dimensional camera via a wire or a network A surgical technique display system for acquiring and displaying a three-dimensional surgical trajectory,
In contact with the medical blade or the tentacle while the surgeon is performing an operation on the surgical object placed on a predetermined operating table using the medical instrument, the 6 An axial force sensor detects the softness of the surgical object and the direction in which pressure is applied to the surgical object;
The three-dimensional camera measures the position of the medical blade or the tentacle;
The information processing apparatus includes a display for displaying the softness of the surgical object and the direction in which pressure is applied to the surgical object on the photographed image. .