JP2018205645A - Tremor correction characteristic evaluation device for optical device with tremor correction function - Google Patents

Abstract

To evaluate a rotation tremor correction characteristic for an optical device attached with a tremor correction function at an inexpensive cost without spending burdensome chores upon changing a measurement direction for using a rotary stage, without a mirror surface in a product for using a laser autocollimator.SOLUTION: By control of a control IC 20a, a storage body 12 is rotated as a correction body with an optical axis L of a camera 13a as a rotary axis to take a picture of a plurality of images 36 having point light sources 37 and 38 reflected by the camera 13a. From a change in each inclination of a straight line 39 connecting the point light sources 37 and 38 in each of these images 36, an image tremor around the optical axis L of the camera 13a can be learned. Accordingly, on the basis of each inclination of the straight line 39 in the plurality of images 36, driving characteristics of a rotary actuator 12c upon correcting the image tremor of a subject image around the optical axis L of the camera 13a can be learned, and from the driving characteristic, rotary tremor correction characteristics of an optical device 11 can be evaluated by a host system 21.SELECTED DRAWING: Figure 10

Description

  The present invention relates to a shake correction characteristic evaluation apparatus that evaluates a shake correction characteristic of an optical device with a shake correction function that corrects an image shake of a subject image, and more particularly, a subject image generated around an optical axis of a camera provided in a movable module. The present invention relates to a shake correction characteristic evaluation apparatus characterized by an evaluation of a shake correction characteristic that corrects image shake by rotating a container that houses a movable module.

  2. Description of the Related Art Conventionally, as a shake correction characteristic evaluation apparatus for an optical apparatus with this kind of shake correction function, for example, there is a shake correction camera inspection apparatus disclosed in Patent Document 1. The shake correction camera inspection apparatus includes a camera side portion, a communication tool side portion, and a vibration table portion. The camera side portion includes a photographing optical system, a CPU, an X and Y axis lens position detection circuit, an X and Y axis drive motor circuit, a yaw and pitch angular velocity detection circuit, and the like. One of the plurality of photographic lenses constituting the photographic optical system functions as an anti-vibration lens that corrects image blur due to camera shake. The shake correction camera inspection device applies predetermined vibrations to the shake correction camera by the shaking table to check the operation of the shake correction function, and determines whether or not the shake correction function is normal.

  However, the shake correction camera inspection apparatus disclosed in Patent Document 1 is for inspecting a shake correction camera that corrects image shake using an anti-vibration lens. FIG. 1A is different from the inspection apparatus of the optical apparatus 1 with a shake correction function as conceptually shown in an external perspective view. In the optical device 1 with shake correction function, like the optical unit with shake correction function disclosed in Patent Document 2, a movable module 2 on which a camera is mounted is housed in a housing 3 so as to be swingable. At the center of the bottom, it is rotatably supported by the fixed body 4 and configured. With respect to image shake in the pitch (Pitch) direction and yaw (Yaw) direction, as shown in the schematic side views of FIGS. 3 is corrected by swinging in a direction to cancel the image blur. For image blur in the roll direction, the image blur of the container 3 relative to the fixed body 4 is caused by a rotational shake correction mechanism as shown in the plan views of FIGS. Rotate in the direction to cancel out and correct.

  Conventionally, in this type of inspection apparatus for an optical apparatus 1 with a shake correction function, the relationship between the drive signal for the swing shake correction mechanism that swings the movable module 2 and the swing angle of the movable module 2 based on this drive signal is determined in the pitch direction. Further, it is measured as the angle characteristic of the movable part in the yaw direction, and it is determined whether or not the swing shake correction function is normal. In addition, the relationship between the drive signal for the rotational shake correction mechanism that rotates the container 3 and the rotational shake angle of the container 3 by this drive signal is measured as the movable portion angle characteristic in the roll direction, and the rotational shake correction function is normal. It is determined whether or not.

  In general, an inspection apparatus 5 as shown in the external perspective view of FIG. In this inspection apparatus 5, a laser autocollimator 6 is used for measuring the movable portion angle characteristics in the pitch direction and the yaw direction, and a laser autocollimator 7 is used for measuring the movable portion angle characteristics in the roll direction. However, the laser autocollimators 6 and 7 can obtain only an inclination angle and a rotation angle of approximately ± 2.5 deg. Therefore, if the swing angle range of the movable module 2 and the rotation angle range of the container 3 are large, the measurable range of the laser autocollimators 6 and 7 is exceeded, and the angle characteristics of the movable part in each direction of the optical device 1 are increased. It cannot be measured. For this reason, the optical device 1 with a shake correction function to be inspected is placed on the gonio stage 8, and the gonio stage 8 is tilted as shown in the schematic side view of FIG. By driving and measuring the movable module 2 while tilting, the movable portion angle characteristics in the pitch direction and the yaw direction at a necessary tilt, for example, a tilt of about ± 10 deg. Can be measured. Further, the gonio stage 8 is placed on the rotary stage 9, and the rotary stage 9 is rotated as shown in the plan view of FIG. By measuring by rotational driving, it is possible to measure the movable portion angle characteristic in the roll direction at a necessary rotation angle, for example, a rotation angle of about ± 10 deg.

JP 07-261229 A Japanese Patent Laying-Open No. 2015-82072

  However, since the inspection apparatus 5 of the conventional optical apparatus 1 with shake correction function uses the reflected light of the laser beam emitted from the laser autocollimator 7 when measuring the movable portion angle characteristic in the roll direction, It is necessary to provide a mirror surface with a reflectance of 90% or more on the surface of the body. For this reason, it is necessary to measure the product itself by forming a mirror surface on the surface of the product or mounting the mirror surface as a measurement part on the product.

  In addition, when measuring the angle characteristics of the movable part in the roll direction, it is necessary to use the rotary stage 9 in addition to the laser autocollimator 7 and rotate the entire product, so that the inspection apparatus 5 is expensive. End up. Furthermore, since it is necessary to link the measurement direction of the movable portion angle characteristic and the rotation direction of the rotary stage 9, the measurement direction cannot be easily changed.

  The present invention has been made to solve such a problem, and includes a housing for housing a movable module having a camera for photographing a subject, and a housing that is rotatable about the optical axis of the camera. A rotating support mechanism that supports the camera and a correction body that can correct image blur around the optical axis of the subject image captured by the camera. In a shake correction characteristic evaluation apparatus for evaluating the shake correction characteristic of an optical device with a shake correction function that includes a rotational shake correction mechanism that corrects image shake that occurs in a camera, a correction body that uses the optical axis of the camera as a rotation axis by the rotational shake correction mechanism The control means for taking a plurality of images of the fixed sample body with the camera, and each inclination of the sample body image in each image taken by the control of the control means. Based on, characterized in that it comprises an evaluation means for evaluating the rotation shake correction characteristics of the optical device for about the optical axis of the camera.

  According to this configuration, by controlling the control means, the correction body is rotated about the optical axis of the camera by the rotational shake correction mechanism, and a plurality of images of the fixed sample body are taken by the camera, whereby the sample body A plurality of images are obtained. The image shake around the optical axis of the camera can be known from the change in the inclination of the sample body image in each image. Therefore, based on the inclinations of the sample body images in a plurality of images, it is possible to know the drive characteristics of the rotational shake correction mechanism when correcting the image shake of the subject image around the optical axis of the camera. From this drive characteristic of the mechanism, it becomes possible to evaluate the rotational shake correction characteristic of the optical device with the shake correction function by the evaluation means.

  For this reason, it is possible to evaluate the rotational shake compensation characteristics using components such as cameras and rotational shake compensation mechanisms that are mounted on products of optical equipment with shake compensation, and use laser autocollimators and rotary stages. There is no need to use a conventional expensive inspection device. Therefore, when measuring the angle characteristics of the movable part in the roll direction, in order to use the laser autocollimator, the product itself is processed to form a mirror surface on the surface of the product, or the mirror surface is mounted on the product as a measurement part. It is possible to evaluate the rotational shake correction characteristics of an optical apparatus with a shake correction function without performing the measurement in step (b). In addition, it is no longer necessary to link the measurement direction of the movable part angle characteristics of the optical equipment with shake correction function and the rotation direction of the rotary stage, which was necessary to use the rotary stage, and it is easy to change the measurement direction. Will be able to do.

  Further, according to the present invention, the evaluation unit calculates the rotational shake angle at which the correction body is rotated by the rotational shake correction mechanism based on each inclination of the sample body image, and the drive characteristic of the rotational shake correction mechanism is calculated from the calculated rotational shake angle. It is characterized in that it is evaluated as a rotational shake correction characteristic.

  According to this configuration, the rotational shake angle obtained by rotating the correction body by the rotational shake correction mechanism is calculated based on each inclination of the sample body image by the evaluation unit, so that the drive signal for the rotational shake correction mechanism and this The relationship with the rotational deflection angle of the corrector according to the drive signal can be measured as the movable portion angle characteristic. And based on this movable part angle characteristic, it can be judged whether the measured rotational shake correction function is normal.

  Further, according to the present invention, the control means gives a drive signal for the reciprocating body to reciprocate the movable rotation range of the correction body to the rotation shake correction mechanism to drive and control the rotation shake correction mechanism, and the evaluation means corrects the movable rotation range. The drive characteristics of the rotational shake correction mechanism are evaluated based on the relationship between the rotational shake angle obtained from a plurality of images of the sample body taken by the camera as the body reciprocates and the drive signal.

  According to this configuration, the correction body can reciprocate its movable rotation range by controlling the rotational shake correction mechanism of the control means, so that the evaluation means grasps a change in the rotational shake angle of the correction body with respect to the drive signal as a hysteresis characteristic. Is done. Therefore, the evaluation means can determine whether or not the rotational shake correction function of the optical device is normal based on this hysteresis characteristic.

  Further, the present invention is characterized in that the control means limits the magnitude of the drive signal given to the rotational shake correction mechanism within a movable rotation range in which the rotation of the correction body does not interfere with other parts.

  According to this configuration, the rotation of the correction body is limited by the control means within a movable rotation range that does not interfere with other parts, thereby preventing a failure due to a collision between the correction body and other parts around it. be able to. In addition, by restricting the rotation of the corrector within a certain range of movable rotation, it is possible to prevent unnecessary measurement from being performed over a wide range up to an unnecessarily large rotational deflection angle, thereby shortening the measurement time for rotational shake compensation characteristics. Can be achieved.

  Further, according to the present invention, the evaluation means determines the signal amount per unit rotational shake angle of the first drive signal required for rotating the correction body to the first rotational shake angle and the second rotational shake angle. Calculating a ratio of the second drive signal required for rotating the corrective body to a signal amount per unit rotational shake angle, and evaluating a drive characteristic of the rotational shake correction mechanism based on the calculated ratio; And

  According to this configuration, the signal amount per unit rotational shake angle of the first drive signal that rotates the correction body by the first rotational shake angle, and the second drive signal that rotates the correction body by the second rotational shake angle. By calculating the ratio with the signal amount per unit rotational shake angle, the evaluation means calculates the signal amount of the drive signal required to rotate the corrective body by the unit rotational shake angle, that is, the motion sensitivity of the corrective body. The linearity can be evaluated. The evaluation means is based on the linearity of the motion sensitivity of the corrector, that is, based on whether or not the motion sensitivity of the corrector is kept constant in the movable rotation range in which the corrector is rotated to the second rotational deflection angle. Thus, it can be determined whether or not the rotational shake correction function of the optical device is normal.

  Further, the present invention is characterized in that the sample body is composed of two light emitting points or point light sources having different sizes or one bright line.

  According to this configuration, two sampled points or point light sources or one bright line having different sizes are photographed as a sample body, so that the sample body is obtained from a straight line or a single bright line connecting the two light emitting points or point light sources. The inclination of the image can be easily grasped. At this time, since the size of each of the two light emitting points or point light sources is different, each light emitting point or point light source can be clearly distinguished and recognized, and the change in the slope of the straight line obtained by connecting each light emitting point or point light source can be changed. It can be reliably detected without error.

  Further, according to the present invention, the sample body has one light emitting point or point light source at a position coinciding with the optical axis of the camera, and the rotation support mechanism intersects the fixed body on the image forming side of the camera. One light emission in each of a plurality of images of a sample body that is photographed by rotating the container with the optical axis of the camera as a rotation axis under the control of the control means, with the container rotatably supported at the location as a fulcrum Based on a locus drawn by a point or a point light source, the shake on the subject side of the optical axis of the camera passing through the fulcrum is evaluated.

  According to this configuration, the rotational shake correction mechanism rotates the container around the optical axis of the camera as a rotation axis, and the camera shoots a plurality of one light emitting point or point light source at a position that coincides with the optical axis of the camera, By recognizing the locus drawn by the light emitting point image or the point light source image, the shake on the subject side of the optical axis of the camera passing through the fulcrum is determined. This shake occurs when the head of the container draws a circle with the fulcrum as a base point, and the subject side end of the optical axis of the camera shakes the neck so that it rubs. From this shake, it is possible to evaluate the axial shake of the optical axis of the camera and determine whether or not the rotational shake correction function of the optical device is normal.

  In the present invention, the rotation support mechanism supports the container in a rotatable manner at a point where the optical axis of the camera intersects with the fixed body on the image forming side of the camera, and the evaluation means controls the camera by controlling the control means. An intersection of straight lines connecting two light emitting points or point light sources, or an intersection of one bright line, or an optical axis of the camera in each of a plurality of images of a sample body photographed by rotating the container with the optical axis as a rotation axis Based on a locus drawn by a straight line located at a coincident position or a point on one bright line, the shake on the subject side of the optical axis of the camera passing through the fulcrum is evaluated.

  According to this configuration, a straight line located at the intersection of two light emitting points or point light sources in a plurality of images of the sample body, or the intersection of one bright line, or the optical axis of the camera, or 1 By recognizing the locus drawn by one point on the bright line of the book, the shake on the subject side of the optical axis of the camera passing through the fulcrum is found. Therefore, also from this shake, it is possible to evaluate the axial shake of the optical axis of the camera and determine whether or not the rotational shake correction function of the optical device is normal.

  Further, in the present invention, the optical device is generated around a swing support mechanism that swingably supports the movable module with respect to the container, and a direction of a subject image photographed by the camera perpendicular to the optical axis of the camera. And a shake shake correction mechanism that corrects image shake by moving the movable module relative to the container, and the control means is movable by the shake shake correction mechanism while taking an image of the fixed sample body with the camera. The module is moved with respect to the container to take a plurality of images of the sample body, and the evaluation means uses the optical axis of the camera based on the trajectory of the sample body image drawn by the plurality of images taken by the control of the control means. It is characterized by evaluating the shake correction characteristic of an optical apparatus with respect to an image shake that occurs around a direction orthogonal to.

  According to this configuration, images of a plurality of sample bodies can be obtained by moving the movable module by the swing shake correction mechanism while taking images of the fixed sample bodies with the camera under the control of the control means. The locus of the sample body image can be obtained from the images of the plurality of sample bodies. The locus of the sample body image is drawn according to the movement of the movable module. Therefore, based on the locus of the sample body image, it is possible to know the characteristics of the movement of the movable module when correcting the image blur of the subject image that occurs around the direction orthogonal to the optical axis of the camera. From this dynamic characteristic, it becomes possible to evaluate the swing shake correction characteristic of the optical device with the shake correction function by the evaluation means.

  Therefore, in addition to the drive characteristics of the rotational shake correction mechanism when correcting the image shake of the subject image around the optical axis of the camera, the shake when correcting the image shake of the subject image that occurs around the direction orthogonal to the optical axis of the camera. It is possible to know the drive characteristics of the shake correction mechanism. For this reason, in addition to the rotational shake correction characteristics in the roll direction of the optical device with the shake correction function, it is possible to evaluate the swing shake correction characteristics in the pitch direction and the yaw direction by the evaluation unit.

  According to the shake correction characteristic evaluation apparatus for an optical instrument with a shake correction function of the present invention, it is not necessary to use a conventional expensive inspection apparatus when measuring the movable part angle characteristic in the roll direction of the optical instrument. Without using a mirror surface on the product to use a rotating stage, and without having to change the measurement direction to use a rotating stage, evaluate the rotational shake compensation characteristics of optical equipment with a shake compensation function at low cost. Can do.

(A) is an external perspective view of a shake correction optical apparatus to be inspected by a conventional inspection apparatus for an optical apparatus with a shake correction function, and (b) and (c) are pitches of the shake correction optical apparatus shown in (a). FIGS. 6A and 6B conceptually illustrate shake correction in the roll direction of the shake correction optical apparatus illustrated in FIG. 5A. FIGS. (A) is a perspective view which shows schematic structure of the inspection apparatus of the conventional optical apparatus with a shake correction function, (b) is operation | movement explanatory drawing of the gonio stage used for the inspection apparatus shown to (a), (c) is It is operation | movement explanatory drawing of the rotation stage used for the test | inspection apparatus shown to (a). (A) is a system block diagram of the test | inspection apparatus of the optical device with a shake correction function by one Embodiment of this invention, (b) is a schematic block diagram of the optical device shown to (a). 1 is a circuit block diagram of an inspection apparatus for an optical apparatus with a shake correction function according to an embodiment. (A) is an external perspective view of an inspection apparatus for an optical device with a shake correction function according to an embodiment, (b) is an external perspective view of the inspection apparatus with its front cover opened, and (c) is the same as the above. It is a figure explaining the hole provided in the ceiling of a test | inspection apparatus. (A) is a figure showing the image of imaging | photography at the time of evaluating the shake correction characteristic of the pitch direction of an optical instrument, and a yaw direction by the inspection apparatus of the optical instrument with a shake correction function by one Embodiment, (b) is (a). It is a figure which shows the some image obtained by imaging | photography shown to (). (A) is a graph showing the position of each light emitting point obtained from the plurality of images shown in FIG. 6 (b), and (b) is a fluctuation for each input voltage of the movable module based on the locus of the light emitting point. It is a graph which shows the result of having calculated the angle. It is a figure explaining the calculation principle of the deflection angle shown in FIG.7 (b). 6 is a graph showing a relationship between a drive signal of a movable module and a shake angle when the movable module reciprocates in the movable range in the inspection apparatus for an optical apparatus with a shake correction function according to one embodiment. (A) is a figure showing the image of photography at the time of evaluating the shake correction characteristic of the roll direction of an optical instrument by the inspection device of the optical instrument with shake correction function by one embodiment, and (b) shows in (a). It is a figure which shows the image obtained by imaging | photography. 6 is a graph showing a relationship between a drive signal of a container and a rotational shake angle when the container reciprocates in the movable rotation range in the inspection apparatus for an optical apparatus with a shake correction function according to an embodiment. (A) is a general flowchart showing an inspection processing procedure of a swing actuator and a rotary actuator by an inspection apparatus for an optical device with a shake correction function according to an embodiment; (b) is a yawing measurement and a pitching measurement shown in (a); It is a flowchart of a roll ring measurement. (A) is a figure showing the image of imaging | photography at the time of evaluating the axial shake of the optical axis of the camera with which an optical apparatus is equipped with the inspection apparatus of the optical apparatus with a shake correction function by one Embodiment, (b) is (a). It is a figure which shows the image obtained by imaging | photography shown in FIG. (A) is image | photographed when evaluating the axial shake of the optical axis of the camera with which an optical apparatus is provided from the intersection of the straight line which connects between two light emission points in the inspection apparatus of the optical apparatus with a shake correction function by one Embodiment. The figure which shows an image, (b) is a figure which shows the image image | photographed when evaluating the axial shake of the optical axis of the camera with which an optical apparatus is equipped from one point on the straight line which connects between two light emission points.

  Next, an embodiment for implementing the shake correction characteristic evaluation apparatus for an optical apparatus with a shake correction function according to the present invention will be described.

  FIG. 3A is a system configuration diagram of the inspection apparatus 10 constituting the shake correction characteristic evaluation apparatus of the optical apparatus 11 with shake correction function according to an embodiment of the present invention, and FIG. 4 is a circuit block diagram. In this specification, the three axes of XYZ are directions orthogonal to each other, one side in the X-axis direction is indicated by + X, the other side is indicated by -X, one side in the Y-axis direction is indicated by + Y, and the other side is indicated by -Y. , One side in the Z-axis direction is indicated by + Z and the other side is indicated by -Z. The Z-axis direction is a direction along the optical axis L of the camera 13a mounted on the movable module 13 in a state where the movable module 13 of the optical device 11 with the shake correction function is not swinging. The + Z direction is the image side in the optical axis L direction, and the −Z direction is the object side (subject side) in the optical axis L direction.

  The inspection object of the inspection apparatus 10 is the optical apparatus 11 with a shake correction function, and the inspection by the inspection apparatus 10 is performed using the product of the optical apparatus 11 that is the inspection object, and the shake correction characteristics of the optical apparatus 11 are. To evaluate.

  The optical device 11 is a thin camera used for a mobile phone with a camera or an electronic device such as a drone for performing aerial photography, and is mounted on the electronic device in a state of being supported by the device body of the electronic device. As conceptually shown in FIG. 3B, the optical device 11 includes a movable module 13 that is swingably accommodated in a housing 12, and the housing 12 is positioned around the optical axis L of the camera with respect to the fixed body 14. It is configured to be rotatably supported. The movable module 13 includes a camera 13a for photographing a subject, an angular velocity sensor 13b, a swing actuator 13c, and the like. The camera 13a is configured to include a lens 15 on the front surface of the movable module 13, and subject light enters the lens 15 from the −Z direction in a state where the movable module 13 is not rocked. A subject image is formed by the lens 15 on an imaging element (not shown) built in the camera 13a. This subject image is converted into a video signal by an imaging circuit module (not shown) built in the camera 13a.

  The camera 13a is supported so as to be swingable in the X-axis direction and the Y-axis direction with respect to the container 12 by a gimbal mechanism (not shown) constituting a swing support mechanism. The rotation of the container 12 around the X axis is detected as pitching (pitch), and the rotation around the Y axis is detected as yawing (rolling) by the angular velocity sensor 13b provided in the movable module 13.

  Between the movable module 13 and the container 12, a swing shake correction mechanism that corrects image shake in the pitch direction and yaw direction of a subject image photographed by the camera 13a is provided as a swing actuator 13c. The swing actuator 13c is composed of a magnet (not shown) provided in the housing 12 and a coil (not shown) provided in the movable module 13, and the movable module 13 is interposed between the movable module 13 and the container 12. A magnetic driving force is generated that swings 13 in the X-axis direction and the Y-axis direction relative to the container 12 and relatively displaces them.

  The container 12 is provided with a convex portion 12 a at the bottom center, and the convex portion 12 a is surrounded by a ball bearing 16 provided on the fixed body 14. The convex portion 12a and the ball bearing 16 constitute a rotation support mechanism that supports the container 12 with respect to the fixed body 14 so as to be rotatable around the optical axis L of the camera. The rotation of the container 12 around the Z axis, that is, around the optical axis L of the camera, is detected by an angular velocity sensor 12b provided in the container 12 as rolling (rotational shaking). Alternatively, the angular velocity sensor 13b detects not only pitching (pitch) as rotation around the X axis and yawing (rolling) as rotation around the Y axis, but also rolling (rotation) as rotation around the optical axis L. Also good.

  Between the container 12 and the fixed body 14, a rotational shake correction mechanism that corrects image shake in the roll direction of a subject image photographed by the camera 13a is provided as a rotary actuator 12c. The rotary actuator 12 c is composed of a magnet (not shown) provided on the container 12 and a coil (not shown) provided on the fixed body 14, and the container 12 is interposed between the container 12 and the fixed body 14. A magnetic driving force is generated to rotate and displace the fixed body 14 around the Z axis. In the present embodiment, the container 12 constitutes a correction body that can correct image blur that occurs around the optical axis L of the subject image.

  A flexible wiring board 17 for feeding power to and receiving signals from the movable module 13, the container 12, and the like is drawn out from the optical device 11. The end of the flexible wiring board 17 is reinforced by a reinforcing plate 18. A connector (not shown) is provided. The video processing board 19 and the control board 20 are connected to the flexible wiring board 17 by this connector, and exchange signals with the movable module 13 and the container 12 through the flexible wiring board 17. A video processing IC (Integrated Circuit) 19a is mounted on the video processing board 19, and a control IC 20a is mounted on the control board 20.

  A video processing IC 19a mounted on the video processing board 19 takes in a video signal photographed by the camera 13a and performs predetermined video processing. This video processing board 19 is connected by a UVC (USB Video Class) specification to a host system 21 constituted by a PC (Personal Computer) by USB (Universal Serial Bus) communication, and is controlled by the host system 21. Video signals are exchanged with the system 21.

  The control board 20 operates by receiving a DC 3.3V power supply from the video processing board 19 and receives an angular velocity signal of the movable module 13 from the angular velocity sensor 13b. Moreover, the angular velocity signal of the container 12 is received from the angular velocity sensor 12b. The control IC 20a mounted on the control board 20 detects pitching and yawing of the container 12 from the angular velocity signal received from the angular velocity sensor 13b, and swings a PWM (Pulse Width Modulation) drive signal that cancels the pitching and yawing. Output to the actuator 13c. The swing actuator 13c is driven and controlled by this PWM drive signal, and swings the movable module 13 in a direction that cancels image shake in the pitch direction and yaw direction imaged on the image sensor. Further, the rolling of the container 12 is detected from the angular velocity signal received from the angular velocity sensor 12b, and a PWM drive signal that cancels this rolling is output to the rotary actuator 12c. The rotary actuator 12c is driven and controlled by this PWM drive signal, and rotates the container 12 around the optical axis L of the camera 13a in a direction that cancels out the image shake in the roll direction formed on the image sensor.

  The control board 20 is connected to the host system 21 via the USB-I2C converter 22 by I2C (Inter-Integrated Circuit) communication, is controlled by the host system 21, and exchanges data with the host system 21.

  FIG. 5 shows the equipment configuration of the inspection apparatus 10, where FIG. 5A shows a state where the front cover 10 b of the casing 10 a of the inspection apparatus 10 is closed, and FIG. 5B shows the power switch 25 and the lift switch 26. Represents a state in which the front cover 10b has been opened. The optical device 11, the image processing board 19 and the control board 20 are disposed on the bottom surface of the housing 10a. At this time, the optical device 11 is attached so that the photographing direction of the camera 13a is directed to the ceiling of the housing 10a. A USB-I2C converter 22 and a USB hub 27 are also arranged on the bottom surface of the housing 10a. The video processing board 19 and the control board 20 are connected to a PC of the host system 21 by a USB cable via the USB hub 27.

  In the ceiling of the housing 10a, three holes 29a, 29b, and 29c shown in FIG. Point-like light is emitted from the holes 29 a, 29 b, 29 c toward the optical device 11 by the LED device 28. The central hole 29a is located at a position that coincides with the optical axis L of the camera 13a included in the optical device 11 disposed on the bottom surface of the housing 10a. The diameters of the holes 29a and 29b and the hole 29c are different, and the hole 29c has a larger diameter than the holes 29a and 29b. The center hole 29a is used when evaluating shake correction characteristics in the pitch direction and the yaw direction, and shaft shake described later of the optical axis L of the camera 13a. At this time, the holes 29b and 29c at both ends are covered with a shutter (not shown), and the dot light is emitted as one light emitting point by the LED device 28 from the central hole 29a toward the optical device 11. The holes 29b and 29c at both ends having different sizes are used when evaluating the shake correction characteristics in the roll direction. At this time, the central hole 29a is covered by a shutter (not shown), and the pointed light having different sizes is emitted from the holes 29b and 29c at both ends toward the optical device 11 as two light emitting points. The

  The inspection by the inspection apparatus 10 is performed in a state where the front cover 10b is closed and the optical apparatus 11 is disposed in a dark place. The housing 10a and the front cover 10b are formed of black antistatic acrylic resin so that light does not enter the housing.

  The inspection of the optical device 11 by the inspection apparatus 10 is performed by photographing with the camera 13a as a sample body in which one light emission point or two light emission points irradiated by the LED device 28 are fixed. That is, when the shake correction characteristics in the pitch direction and the yaw direction are evaluated by the control of the control IC 20a constituting the control means, the camera 13a captures an image of one fixed light emitting point formed by the hole 29a, The movable actuator 13c is driven to move the movable module 13, and a plurality of images of one light emitting point are taken. When evaluating the shake correction characteristic in the roll direction, the container 12 is rotated about the optical axis L of the camera 13a as a rotation axis, and images of two fixed light emitting points formed by the holes 29b and 29c are displayed on the camera 13a. Take multiple shots. These controls by the control IC 20a are performed by setting the register value of the control IC 20a from the host system 21. This register value determines the duty ratio of the PWM drive signal applied to the swing actuator 13c or the rotary actuator 12c.

  FIG. 6A is a diagram illustrating an image of photographing by the optical device 11 at the time of evaluation of shake correction characteristics in the pitch direction and the yaw direction. The movable module 13 is swung as indicated by an arrow by a swing actuator 13c while a sample body, which is generated by the LED device 28 and is captured as a light emitting point 32 in a black background image 31, is photographed by the camera 13a. By this photographing, as shown in FIG. 5B, a plurality of images 31 in which the light emission points 32 are photographed are obtained. The movable module 13 is swung at a swing angle of about ± 10 deg. In the Y-axis direction and the X-axis direction.

  FIG. 7A shows the above-described shooting while changing the duty ratio of the PWM drive signal and changing the input voltage applied to the swing actuator 13c for each constant voltage, and swinging the movable module 13 in the Y-axis direction. It is a graph which shows the position of each light emission point 32 obtained by image | photographing the image 31. FIG. The horizontal axis of the graph represents the position in the X-axis direction, and the vertical axis represents the position in the Y-axis direction. FIG. 7B is a graph showing the result of calculating the swing angle of the movable module 13 with respect to each input voltage from the locus of movement of the light emitting point 32. The horizontal axis of the graph represents the input voltage applied to the swing actuator 13c, and the vertical axis represents the swing angle of the movable module 13. Also, the black rhombus plot 33 represents the deflection angle in the Y axis direction, and the white square plot 34 represents the deflection angle in the X axis direction which is not intended (no drive signal is given).

  FIG. 8 is a diagram for explaining the calculation principle of the deflection angle. When the focal length of the lens 15 is f [mm], the pixel pitch of the image sensor 35 of the camera 13a is d [mm], and the unit deflection angle per pixel is θ [deg.], Θ is an equation shown in FIG. Represented by 1). For this reason, the deflection angle of the movable module 13 is determined from the pixel pitch d of the image sensor 35 that constitutes the camera 13a and the focal length f of the lens 15 that is an optical system that constitutes the camera 13a. It is calculated by multiplying θ by the number of pixels to which the light emitting point 32 has moved on the image sensor 35 (= θ × number of moving pixels).

  These calculations are performed by the host system 21. The host system 21 constitutes an evaluation unit that evaluates the shake correction characteristic of the movable module 13 based on the locus of the light emission point 32 drawn by the plurality of images 31 photographed under the control of the control IC 20a. In the present embodiment, the host system 21 calculates a swing angle at which the movable module 13 is swung by the swing actuator 13c based on the locus of the light emitting point 32, and the drive characteristic of the swing actuator 13c is swung from the calculated swing angle. Evaluated as correction characteristics.

  FIG. 9 shows the PWM drive signal when the control IC 20a controls the drive of the swing actuator 13c by giving the swing actuator 13c a PWM drive signal in which the movable module 13 reciprocates the movable range of the movable module 13 in the Y-axis direction. 4 is a graph showing the relationship between the angle of deflection and the swing angle of the movable module 13. In the graph, the horizontal axis represents the PWM drive signal duty (PWM Duty) setting value [%], and the vertical axis represents the deflection angle [deg.] Of the movable module 13. The characteristic line 41 represents the deflection angle characteristic of the movable module 13 in the Y-axis direction, and the characteristic line 42 represents the deflection angle characteristic of the X-axis direction. In addition, an alternate long and short dash line 41 a surrounded by the characteristic line 41 represents an average value of the characteristic line 41.

  For example, the PWM drive signal is increased from 0 to the plus side, decreased to the minus side when the deflection angle reaches the maximum end of the movable range, and increased to the plus side when the deflection angle reaches the minimum end of the movable range. The movable module 13 reciprocates in the movable range by reversing and applying it to the swing actuator 13c. Each characteristic line 41, 42 shows a hysteresis characteristic.

  The host system 21 is based on the relationship between the drive angle and the deflection angle obtained from the plurality of images 31 of the light emitting point 32 that the movable module 13 reciprocates and captures the movable range in the Y-axis direction shown in the graph. The pitching drive characteristics of the swing actuator 13c are evaluated. Further, the yawing drive characteristics of the swing actuator 13c are based on the relationship between the shake angle obtained from the plurality of images 31 of the light emitting point 32 that the movable module 13 reciprocates in the movable range in the X-axis direction and the drive signal. Are evaluated in the same manner as the pitching drive characteristics.

  When measuring the drive characteristics of the swing actuator 13c, the movable range in which the movable module 13 is swung is controlled by the control IC 20a so that the magnitude of the PWM drive signal given to the swing actuator 13c is controlled by the control IC 20a. The swing in the Y-axis direction and the X-axis direction is limited to a movable range that does not interfere with other parts. The operation guarantee range of the movable range as the product of the optical device 11 is set to ± 6 deg., But the operation guarantee of the movable range at the time of design is set to the deflection angle with the duty setting value at the value A shown in the graph. .

  The evaluation of the drive characteristics of the swing actuator 13c is performed by measuring and inspecting the following first to ninth items. The first item is the deflection angle at the duty setting value A, the second item is the operation sensitivity of the movable module 13 obtained from the duty setting value B when the deflection angle is 1 deg, and the third item. Is the operation sensitivity of the movable module 13 obtained from the duty setting value C when the deflection angle is 3 deg., And the fourth item is the movable module 13 obtained from the duty setting value D when the deflection angle is 6 deg. The fifth item is the ratio of the respective motion sensitivities when the deflection angle is 1 deg. And 6 deg., And the sixth item is the duty setting value E when the deflection angle is 4 deg. Item 7 is the duty setting value F when the deflection angle is the specified 7 deg., And item 8 is the deviation width (hysteresis) G at the origin when the drive signal is returned back and forth. The item of X axis not giving drive signal The width (crosstalk) H between the maximum value and the minimum value of the deflection angle in the direction.

  Here, a positive value in the graph will be described, but a negative value is similarly measured and evaluated.

  Based on the deflection angle at the duty setting value A of the first item, the host system 21 determines whether or not the oscillation actuator 13c in the optical device 11 to be inspected satisfies the operation guarantee requirement of the movable range at the time of design. evaluate.

  Further, the operation sensitivity of the movable module 13 can be obtained by calculating the signal amount of the PWM drive signal that is required to swing the movable module 13 by the unit deflection angle. The host system 21 calculates the signal amount per unit deflection angle for each drive signal of the duty setting values B, C, and D when the deflection angle of the movable module 13 is 1 deg., 3 deg., And 6 deg. Thus, the operation sensitivity of the second, third, and fourth items of the movable module 13 at each deflection angle is obtained. Then, the drive characteristics of the oscillating actuator 13c are evaluated from the viewpoint of whether each obtained motion sensitivity satisfies a specified motion sensitivity requirement.

  In addition, the host system 21 evaluates the drive characteristics of the swing actuator 13c from the viewpoint of linearity of motion sensitivity based on the ratio of motion sensitivity at the swing angle of 1 deg. And 6 deg. . The host system 21 uses the sixth and seventh items in the actual shake correction using the swing actuator 13c for the duty set values E and F when the swing angle is 4 deg. And 7 deg. Used as a parameter.

  Further, the host system 21 evaluates the drive characteristics of the swing actuator 13c from the viewpoint of whether the deviation width (hysteresis) G at the origin, which is the eighth item, is within a specified value. Further, when the movable module 13 gives the swing actuator 13c a drive signal that reciprocates the movable range in the Y axis direction, the host system 21 swings in the X axis direction that does not give a drive signal orthogonal to the Y axis direction. The swing angle in the X-axis direction of the movable module 13 generated by the movement is determined based on the width (crosstalk) H between the maximum value and the minimum value of the swing angle of the ninth item, and the swing actuator 13c Evaluate drive characteristics.

  FIG. 10A is a diagram illustrating an image of shooting by the optical device 11 when evaluating the shake correction characteristic in the roll direction. The container 12 is rotated as indicated by an arrow about the optical axis L of the camera 13a as a rotation axis, and the camera 13a captures a plurality of images of the sample body imaged as the light emitting points 37 and 38 on the black background image 36. By this photographing, as shown in FIG. 5B, a plurality of combinations of light emission points 37 and 38 having different sizes are photographed in the image 36. The container 12 is rotated at a rotational deflection angle of about ± 10 deg. Around the optical axis L of the camera 13a.

  The host system 21 constituting the evaluation means, based on each inclination of the sample body image in each image 36 photographed under the control of the control IC 20a, the rotational shake correction characteristic of the optical device 11 about the optical axis L of the camera 13a. To evaluate. In the present embodiment, the host system 21 calculates the rotational shake angle at which the container 12 is rotated based on each inclination of the sample body image, and the drive characteristic of the rotary actuator 12c is used as the rotational shake correction characteristic from the calculated rotational shake angle. evaluate. Each inclination of the sample body image is calculated from a straight line 39 connecting the two light emitting points 37 and 38 having different sizes. The rotational shake angle at which the container 12 is rotated is calculated from the difference between the slope of the straight line 39 in the image 36 obtained by the current photographing and the slope of the straight line 39 in the image 36 obtained by the previous photographing.

  In FIG. 11, the control IC 20 a drives and controls the rotation actuator 12 c by giving the rotation actuator 12 c a PWM drive signal for the container 12 to reciprocate within the movable rotation range of the container 12 whose rotation axis is the optical axis L of the camera 13 a. It is a graph which shows the relationship between the PWM drive signal and the rotational deflection angle of the container 12 at the time. In the graph, the horizontal axis represents the PWM drive signal duty (PWM Duty) setting value [%], and the vertical axis represents the rotational deflection angle [deg.] Of the container 12. The characteristic line 43 represents the rotational deflection angle characteristic of the container 12, and the alternate long and short dash line 43 a surrounded by the characteristic line 43 represents the average value of the characteristic line 43.

  For example, when the PWM drive signal is increased from 0 to the plus side, the rotation deflection angle is decreased to the minus side when reaching the maximum end of the movable rotation range, and the rotation deflection angle reaches the minimum end of the movable rotation range. The container 12 reciprocates in the movable rotation range by being reversed to the plus side and applied to the rotary actuator 12c. A characteristic line 43 shows a hysteresis characteristic.

  The host system 21 shows the relationship between the drive signal and the rotational shake angle obtained from the straight line 39 connecting the light emitting points 37 and 38 taken by the camera 13a as the container 12 reciprocates in the movable rotation range shown in the graph. Based on the above, the rolling drive characteristic of the rotary actuator 12c is evaluated.

  When measuring the rolling drive characteristics of the rotary actuator 12c, the movable rotation range in which the container 12 is rotated is such that the magnitude of the PWM drive signal applied to the rotary actuator 12c is controlled by the control IC 20a. The rotation around L is limited to a movable rotation range that does not interfere with other parts. The operation guarantee range of the movable rotation range as a product of the optical device 11 in the roll direction is set to approximately ± 6 deg., Similarly to the pitch direction and the yaw direction. The rotational deflection angle at the value A shown in the graph is set.

  The rolling drive characteristic of the rotary actuator 12c is evaluated by measuring and inspecting the following first to eighth items. The first item is the rotational deflection angle at the duty setting value A, the second item is the operation sensitivity of the container 12 obtained from the duty setting value B when the rotational deflection angle is 1 deg. The item is the operation sensitivity of the container 12 obtained from the duty setting value C when the deflection angle is 3 deg., And the fourth item is the accommodation obtained from the duty setting value D when the deflection angle is 6 deg. The motion sensitivity of the body 12, the fifth item is the ratio of each motion sensitivity when the deflection angle is 1 deg. And 6 deg., And the sixth item is the duty setting value E when the deflection angle is the specified 4 deg. The seventh item is the duty setting value F when the deflection angle is the specified 7 deg., And the eighth item is the deviation width (hysteresis) G at the origin when the drive signal is returned back and forth. is there.

  Here, a positive value in the graph will be described, but a negative value is similarly measured and evaluated.

  Based on the rotational deflection angle at the duty setting value A of the first item, the host system 21 determines whether the rotary actuator 12c in the optical device 11 to be inspected satisfies the operation guarantee requirement of the movable rotational range at the time of design. ,evaluate.

  Further, the operation sensitivity of the container 12 can be obtained by calculating the signal amount of the PWM drive signal required to swing the container 12 by the unit rotation deflection angle. The host system 21 calculates the signal amount per unit rotation deflection angle for each drive signal of the duty setting values B, C, and D when the rotational deflection angle of the container 12 is 1 deg., 3 deg., And 6 deg. Thus, the operation sensitivity of the second, third, and fourth items of the container 12 at each rotation deflection angle is obtained. Then, the drive characteristics of the rotary actuator 12c are evaluated from the viewpoint of whether or not each obtained motion sensitivity satisfies a specified motion sensitivity requirement.

  In addition, the host system 21 evaluates the drive characteristics of the rotary actuator 12c from the viewpoint of linearity of motion sensitivity, based on the ratio of motion sensitivity when the deflection angle is 1 deg. And 6 deg. Further, the host system 21 uses the parameters for the actual shake correction using the rotary actuator 12c for the duty setting values E and F when the swing angles of the sixth and seventh items are the specified 4 degrees and 7 degrees. Use as Further, the host system 21 evaluates the drive characteristics of the rotary actuator 12c from the viewpoint of whether the deviation width (hysteresis) G at the origin of the eighth item is within a specified value.

  FIG. 12A is a general flowchart showing the inspection processing procedure of the swing actuator 13c and the rotary actuator 12c by the inspection apparatus 10.

  First, when a switch (not shown) of the inspection apparatus 10 is operated, the power of each apparatus constituting the inspection apparatus 10 is turned on (see step (hereinafter referred to as S) 1). Next, the front cover 10b is opened upward by the elevating switch 26, and the optical device 11 to be inspected is attached to the housing 10a as a workpiece (see S2). Next, by operating individual switches of the USB hub 27, the USB power is supplied to the LED device 28, the USB-I2C converter 22, and the image processing board 19 (see S3), and the image of the light emission point is displayed on the PC of the host system 21. (See S4). Next, the movable module 13 is swung in the X-axis direction, and yawing measurement around the Y-axis is performed (see S5). Subsequently, the movable module 13 is swung in the Y-axis direction and pitched around the X-axis. Is measured (see S6). Subsequently, the container 12 is rotated around the optical axis L (Z axis) of the camera 13a, and rolling measurement is performed (see S7). Thereafter, the power supply to the video processing board 19 is turned off (see S8), the workpiece is removed from the housing 10a (see S9), and the inspection of one product is completed.

  FIG. 5B is a flowchart of yawing measurement performed in S5. In addition, the pitching measurement performed in S6 is performed similarly to the yawing measurement.

  At the time of yawing measurement, first, the host system 21 sets parameters for the swing actuator 13c driving register of the control IC 20a by I2C communication (see S11). Next, a value that determines the duty ratio of the PWM drive signal output from the control IC 20a to the swing actuator 13c is set in the swing actuator 13c drive register of the control IC 20a by the host system 21 (see S12). Next, the swing actuator 13c is driven as shown in FIG. 6A at a swing angle corresponding to the duty ratio set in the register, and the camera 13a takes a picture as shown in FIG. 6B. The image 31 is taken into the host system 21 (see S13). Thereafter, the host system 21 detects the position of the light emission point 32 in the image 31 as shown in FIG. 7A (see S14). Next, the upper system 21 converts the deflection angle with respect to the input voltage of the movable module 13 from the position of the light emitting point 32 as shown in FIG. 7B (see S15).

  Thereafter, it is determined whether or not the measurement of the deflection angle with respect to the input voltage is completed for all the light emitting points 32 of the image 31 to be photographed (see S16). If the measurement has not been completed, the determination in S16 is No, the process returns to S12, and the processes in S12 to S15 are repeated. When the measurement of the deflection angle with respect to the input voltage is completed for all the light emitting points 32, the determination in S16 is Yes, and then the calculation for each of the above-described first to ninth inspection items regarding the shake correction characteristics in the yaw direction. Is performed by the host system 21 (see S17). Next, the evaluation of the drive characteristics of the swing actuator 13c for each inspection item is determined as described above (see S18), and the yawing measurement is completed.

  The rolling measurement performed in S7 of FIG. 10A is also performed according to the flowchart shown in FIG.

  That is, in rolling measurement, first, the host system 21 sets parameters for the rotary actuator 12c driving register of the control IC 20a by I2C communication (see S11). Next, a value that determines the duty ratio of the PWM drive signal output from the control IC 20a to the rotary actuator 12c is set in the rotary actuator 12c drive register of the control IC 20a by the host system 21 (see S12). Next, the rotary actuator 12c is driven as shown in FIG. 10A at a rotational shake angle corresponding to the duty ratio set in the register, and the camera 13a takes a picture as shown in FIG. 10B. The image 36 is captured by the host system 21 (see S13). Thereafter, the host system 21 detects the positions of the light emitting points 37 and 38 in the image 36, and calculates the slope of the straight line 39 connecting the light emitting points 37 and 38 (see S14). Next, the host system 21 converts the rotational deflection angle with respect to the input voltage of the container 12 from the difference in inclination of each straight line 39 (see S15).

  Thereafter, it is determined whether or not the measurement of the rotational deflection angle with respect to the input voltage is completed for all the straight lines 39 of the image 36 to be photographed (see S16). If the measurement has not been completed, the determination in S16 is No, the process returns to S12, and the processes in S12 to S15 are repeated. When the measurement of the rotational shake angle with respect to the input voltage is completed for all the straight lines 39, the determination in S16 is Yes, and then the calculation for each of the above-described first to eighth inspection items regarding the shake correction characteristics in the roll direction. Is performed by the host system 21 (see S17). Next, the evaluation of the drive characteristics of the rotary actuator 12c for each inspection item is determined as described above (see S18), and the rolling measurement ends.

(Main effects of this embodiment)
According to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the light emitting points 37 and 38 are fixed by rotating the container 12 around the optical axis L of the camera 13a as a rotation axis under the control of the control IC 20a. A plurality of images 36 taken as sample bodies are photographed by the camera 13a. The image shake around the optical axis L of the camera 13a can be known from the change in the inclination of the light emitting points 37 and 38 in each image 36. Therefore, it is possible to know the drive characteristics of the rotary actuator 12c when correcting the image shake of the subject image around the optical axis L of the camera 13a based on the inclinations of the light emitting points 37 and 38 in the plurality of images 36. From this drive characteristic of the rotary actuator 12c, the rotational shake correction characteristic of the optical device 11 can be evaluated by the host system 21.

  For this reason, the rotational shake correction characteristics can be evaluated using components such as the camera 13a and the rotary actuator 12c mounted on the product of the optical apparatus 11, and the conventional technique using the laser autocollimator 7 and the rotary stage 9 is used. It is not necessary to use the expensive inspection apparatus 5. Therefore, when measuring the angle characteristic of the movable part in the roll direction, in order to use the laser autocollimator 7, the product itself is processed to form a mirror surface on the surface of the product, or the mirror surface is mounted on the product as a measurement part. The rotational shake correction characteristic of the optical device 11 can be evaluated without performing the above measurement. Further, it is not necessary to link the measurement direction of the movable portion angle characteristic of the optical device 11 and the rotation direction of the rotation stage 9 which are necessary for using the rotation stage 9, and the rotation IC 12a driving register of the control IC 20a is eliminated. By simply rewriting the value set in, the measurement direction can be changed easily.

  Further, according to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the rotational deflection angle that the container 12 is rotated by the rotary actuator 12c is shaken based on each inclination of the straight line 39 connecting the light emitting points 37 and 38. Accordingly, the relationship between the drive signal for the rotary actuator 12c and the rotational deflection angle of the container 12 by this drive signal can be measured as the movable part angle characteristic. And based on this movable part angle characteristic, it can be judged whether the measured rotational shake correction function is normal.

  Further, according to the inspection apparatus 10 of the optical device 11 according to the present embodiment, the container 12 is reciprocated in the movable rotation range by the control of the control IC 20a with respect to the rotary actuator 12c, so that the rotational deflection angle of the container 12 is driven. A change with respect to the signal is grasped by the host system 21 as a deviation width G in the graph of FIG. Accordingly, the host system 21 can determine whether or not the rotational shake correction function of the optical device 11 is normal based on the hysteresis characteristic indicated by the deviation width G.

  Further, according to the inspection apparatus 10 for the optical device 11 according to the present embodiment, the rotation of the container 12 is limited within the movable rotation range that does not interfere with other components by the control IC 20a, so that the container 12 and its surroundings are Failure due to collision with other parts can be prevented. Further, since the rotation of the container 12 is limited within a certain movable rotation range, it is possible to prevent unnecessary measurement from being performed over a wide range up to an unnecessarily large rotation deflection angle, and to shorten the measurement time of the rotational shake correction characteristics. Can be achieved.

  Further, according to the inspection apparatus 10 for the optical instrument 11 according to the present embodiment, the ratio between the operation sensitivity when the container 12 is swung by 1 deg. And the operation sensitivity when the container 12 is swung by 6 deg. Is calculated by the host system 21, and the linearity of the operation sensitivity of the container 12 can be evaluated. The host system 21 determines whether or not the operation sensitivity of the container 12 is kept constant based on the linearity of the operation sensitivity of the container 12, that is, in the movable rotation range from 0 deg. Based on this, it can be determined whether or not the rotational shake correction function of the optical device 11 is normal.

  Further, according to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the two light emitting points 37 and 38 having different sizes are photographed as sample bodies, whereby a straight line 39 connecting the two light emitting points 37 and 38 is used. The inclination of the sample body image can be easily grasped. At this time, since the two light emitting points 37 and 38 are different in size, the light emitting points 37 and 38 can be clearly distinguished and recognized, and the change in the slope of the straight line 39 obtained by connecting the light emitting points 37 and 38 is changed. Can be reliably detected without error.

  Further, according to the inspection apparatus 10 for the optical apparatus 11 according to the present embodiment, the camera 31a captures an image 31 in which the fixed light emission point 32 is captured as shown in FIG. 6A by the control of the control IC 20a. By moving the movable module 13 by the swing actuator 13c, images 31 of a plurality of light emitting points 32 are obtained as shown in FIG. 6B. The locus of the light emission point 32 can be obtained from the image 31 of the plurality of light emission points 32. The locus of the light emitting point 32 is drawn according to the movement of the movable module 13. Therefore, it is possible to know the characteristics of the movement of the movable module 13 when correcting the image shake of the subject image in the pitch direction and the yaw direction based on the locus of the light emitting point 32, and further, the dynamic characteristics of the movable module 13. Therefore, it is possible to evaluate the shake correction characteristics of the optical device 11 in the pitch direction and the yaw direction by the host system 21.

  Accordingly, the image of the subject image generated around each of the X and Y directions orthogonal to the optical axis of the camera 12 together with the driving characteristics of the rotary actuator 12c when correcting the image shake of the subject image around the optical axis L of the camera 13a. It is possible to know the drive characteristic of the swing actuator 13c when correcting the shake. For this reason, in addition to the rotational shake correction characteristics in the roll direction of the optical device 11, it is possible for the host system 21 to evaluate the swing shake correction characteristics in the pitch direction and the yaw direction from these drive characteristics.

  Further, according to the inspection apparatus 10 for the optical device 11 according to the present embodiment, the swing shake correction characteristic is evaluated using components such as the camera 13a and the swing actuator 13c mounted on the product of the optical device 11. Therefore, it is not necessary to use the conventional expensive inspection apparatus 5 using the laser autocollimator 6 or the gonio stage 8. Therefore, in order to use the laser autocollimator 6, the product itself is processed to form a mirror surface on the surface of the product, or the mirror surface is mounted on the product as a measurement part and the measurement is not performed. The swing shake correction characteristic can be evaluated. In addition, it is not necessary to link the measurement direction of the movable portion angle characteristic of the optical device 11 and the inclination direction of the gonio stage 8 which are necessary for using the gonio stage 8, and for driving the swing actuator 13c of the control IC 20a. The measurement direction can be changed easily by simply rewriting the value set in the register.

  Further, according to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the deflection angle that the movable module 13 swings and swings by the swing actuator 13c is calculated based on the locus of the light emitting point 32 by the host system 21. Thus, the relationship between the drive signal for the swing actuator 13c that moves the movable module 13 and the swing angle of the movable module 13 based on this drive signal can be measured as the movable portion angle characteristic. Then, based on this movable part angle characteristic, it is possible to determine whether or not the measured swing shake correction function of the optical device 11 is normal.

  Further, according to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the movable module 13 is reciprocated in the respective movable ranges in the Y-axis direction and the X-axis direction by the control of the control IC 20a with respect to the swing actuator 13c. A change in the swing angle of the module 13 with respect to the drive signal is grasped by the host system 21 as a deviation width G in the graph of FIG. Therefore, the host system 21 can determine whether or not the shake correction function of the optical device 11 is normal based on the hysteresis characteristic indicated by the deviation width G.

  Further, according to the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the hysteresis characteristic of the movable module 13 with respect to the drive signal of the swing angle in the unintended X-axis direction orthogonal to the Y-axis direction is a cross in the graph of FIG. The higher system 21 grasps the talk H. Therefore, the host system 21 determines, based on this hysteresis characteristic, the deflection angle of the movable module 13 in the unintended X-axis direction orthogonal to the Y-axis direction and the movable module 13 in the unintended Y-axis direction orthogonal to the X-axis direction. It is possible to determine whether or not the shake correction function of the optical apparatus 11 is normal.

  Further, according to the inspection apparatus 10 for the optical device 11 according to the present embodiment, the swing of the movable module 13 in the Y-axis direction and the X-axis direction is limited by the control IC 20a within a movable range that does not interfere with other components. Failure due to the collision between the movable module 13 and other parts around it can be prevented. In addition, since the swing of the movable module 13 is limited within a certain movable range, it is possible to prevent unnecessary measurement from being performed over a wide range up to an unnecessarily large swing angle, and to shorten the measurement time of the swing shake correction characteristic. Can be achieved.

  Further, according to the inspection apparatus 10 for the optical instrument 11 according to the present embodiment, the ratio between the operation sensitivity when the movable module 13 is swung by 1 deg. And the operation sensitivity when the movable module 13 is swung by 6 deg. Is calculated by the host system 21, and the linearity of the operation sensitivity of the movable module 13 can be evaluated. The host system 21 is based on the linearity of the operational sensitivity of the movable module 13, that is, based on whether or not the operational sensitivity of the movable module 13 is kept constant in the movable range from 0 deg. Thus, it can be determined whether or not the swing shake correction function of the optical device 11 is normal.

  In addition, the inspection apparatus 10 for the optical device 11 according to the present embodiment evaluates the shake correction characteristic with respect to the optical device 11 in a completed product state in which the camera 13a is accommodated in the movable module 13. For this reason, it is possible to evaluate the shake correction characteristic of each optical device 11 with the shake correction function in a finished product state in which the camera 13a is housed in the movable module 13.

  Further, the inspection apparatus 10 for the optical device 11 according to the present embodiment has a camera in the movable module 13 for the optical device 11 with a shake correction function in a semi-finished product state in which the camera 13 a is not accommodated in the movable module 13. The dummy of 13a is set and the swing shake correction characteristic is evaluated. For this reason, the dummy of the camera 13a is set for measurement in the movable module 13 even for the optical device 11 with a shake correction function in a semi-finished product type in which the camera 13a is accommodated in the movable module 13 later. By doing so, the swing shake correction characteristic can be evaluated.

(Modification)
In the above embodiment, the case where the correcting body that can correct the image blur around the optical axis L of the subject image is the container 12 including the imaging element 35 of the camera 13a has been described. However, the correction body is not limited to the container 12, and for example, the movable module 13 including the image sensor 35, the image sensor 35 itself, or the like is used as a correction body, and these are rotated around the optical axis L. Image blurring that occurs around the optical axis L of the subject image can also be corrected.

  Further, in the above-described embodiment, the case where the sample body is the light emitting points 37 and 38 when evaluating the shake correction characteristic in the roll direction has been described. However, instead of the light emitting points 37 and 38 formed using the holes 29b and 29c provided on the ceiling of the housing 10a, a single bright line formed using a slit or the like provided on the ceiling of the housing 10a may be used as a sample body. Good. Further, the case where the sample body is set to one point-like light emission point 32 when evaluating the shake correction characteristics in the pitch direction and the yaw direction has been described. However, this sample body may be changed to a straight line, a crosshair, a special image, or the like as necessary. Further, in the above embodiment, the light emitting points 32, 37, and 38 formed using the holes 29a, 29b, and 29c provided in the ceiling of the housing 10a are used as the sample bodies, but at the positions of the holes 29a, 29b, and 29c. A sample body may be formed by providing a point light source in place of the LED device 28 with an LED having an emission diameter corresponding to the size thereof. Also with each of these sample bodies, the same effect as the above-described embodiment is achieved.

  Further, in the inspection apparatus 10 for the optical apparatus 11 according to the present embodiment, as shown in FIG. 3B, the rotation support mechanism including the convex portion 12a formed at the bottom of the container 12 and the ball bearing 16 is provided. The container 12 is rotatably supported at a fulcrum 50 where the optical axis L of the camera 13a intersects the fixed body 14 on the imaging side of the camera 13a. Therefore, the head of the container 12 draws a circle with the fulcrum 50 as a base point, and the subject side end of the optical axis L of the camera 13a swings his / her neck so as to rub the fulcrum 50. A wobbling occurs at the subject-side end of the optical axis L of the camera 13a passing through.

  In the inspection apparatus 10 of the optical apparatus 11 according to the present embodiment, the light emitted from the central hole 29a located at the position coincident with the optical axis L of the camera 13a and photographed in the image 51 as shown in FIG. By photographing the point 52 with the camera 13a, the upper system 21 can evaluate the swaying of the optical axis L of the camera 13a. Note that, when evaluating the wobbling of the optical axis L of the camera 13a, the swinging actuator 13c is not driven, and the movable module 13 is not swung with respect to the container 12.

  A plurality of images 51 are taken by rotating the container 12 as indicated by an arrow with the optical axis L of the camera 13a as a rotation axis under the control of the control IC 20a. The host system 21 uses the light emitting point 52 in each of the plurality of images 51 to be photographed, for example, as shown in FIG. 5B, based on a locus 53 drawn on the subject side of the optical axis L of the camera 13a passing through the fulcrum 50. Evaluate the wobbling in If the recognized trajectory 53 is within the range 54, the host system 21 determines that the scraping shake is within the allowable range and determines that the rotational shake correction function of the optical device 11 is normal. Further, instead of the light emitting point 52, a single point light source on the optical axis L of the camera 13a is similarly photographed as a sample body, and the locus of the point light source image is recognized, so that the object side of the optical axis L is also measured. It is possible to evaluate swaying runout.

  Further, the above-mentioned sway shake is emitted from the holes 29b and 29c at both ends of different sizes, and the light emitting points 37 and 38 photographed in the image 36 as shown in FIG. The evaluation can also be performed by rotating the camera 13a and photographing a plurality of times. In this case, the host system 21 slides on the subject side of the optical axis L of the camera 13a passing through the fulcrum 50 based on the locus drawn by the intersection 55 of the straight line 39 connecting the two light emitting points 37 and 38 in each of the plurality of images 36. Evaluate the runout. If the recognized trajectory is within the range 56, the host system 21 determines that the scraping shake is within the allowable range, and determines that the rotational shake correction function of the optical device 11 is normal. Also, instead of the light emitting points 37 and 38, a single bright line is photographed in the same manner as a sample body, and by recognizing the trajectory drawn by the intersection of each bright line image, the precession on the subject side of the optical axis L is also reduced. Can be evaluated.

  Further, the above-mentioned swaying shake exists on a straight line 39 connecting the light emitting points 37 and 38, which is photographed in the image 36 as shown in FIG. 14B by rotating the container 12, and the optical axis of the camera 13a. Evaluation can also be made based on a locus drawn by one point 57 located at a position matching L. In this case, if the recognized locus is within the range 58, the host system 21 determines that the sway shake is within the allowable range and determines that the rotational shake correction function of the optical device 11 is normal. Further, instead of the one point 57 on the straight line 39, by similarly recognizing the locus drawn by one point on one bright line located at the position coincident with the optical axis L of the camera 13a, the optical axis L It is possible to evaluate scraping shake on the subject side.

10 ... Inspection device for optical device 11 with shake correction function (shake correction characteristic evaluation device)
11 ... Optical device with shake correction function 12 ... Container (corrected body)
12a ... convex portion 12b ... angular velocity sensor 12c ... rotary actuator (rotational shake correction mechanism)
DESCRIPTION OF SYMBOLS 13 ... Movable module 13a ... Camera L ... Optical axis of camera 13a 13b ... Angular velocity sensor 13c ... Oscillation actuator (oscillation shake correction mechanism)
14 ... fixed body 15 ... lens (optical system)
16 ... Ball bearing 17 ... Flexible wiring board 19 ... Video processing board 19a ... Video processing IC
20 ... Control board 20a ... Control IC
21 ... Host system (PC)
22 ... USB-I2C converter 28 ... LED device 29a, 29b, 29c ... hole 31, 36, 51 ... image 32, 37, 38, 52 ... light emitting point (sample body image)
39 ... straight line 55 ... intersection of straight line 39 57 ... one point on straight line 39

Claims (9)

A container that houses a movable module having a camera that shoots a subject, a rotation support mechanism that supports the container with respect to a fixed body so as to be rotatable around the optical axis of the camera, and a subject that is photographed by the camera A rotational shake correction mechanism that corrects image shake that occurs around the optical axis of the camera by rotating a correction body that can correct image shake that occurs around the optical axis of the camera around the optical axis of the camera. In the shake correction characteristic evaluation apparatus for evaluating the shake correction characteristic of an optical device with a shake correction function provided with
Control means for rotating the correction body around the optical axis of the camera as a rotation axis by the rotational shake correction mechanism and taking a plurality of images of the fixed sample body by the camera;
Evaluation means for evaluating a rotational shake correction characteristic of the optical device about the optical axis of the camera based on each inclination of the sample body image in each image photographed by the control of the control means. A shake correction characteristic evaluation apparatus for an optical device with a shake correction function.   The evaluation unit calculates a rotational shake angle at which the correction body is rotated by the rotational shake correction mechanism based on each inclination of the sample body image, and rotates the drive characteristic of the rotational shake correction mechanism from the calculated rotational shake angle. 2. The shake correction characteristic evaluation apparatus for an optical apparatus with a shake correction function according to claim 1, wherein the shake correction characteristic is evaluated as a shake correction characteristic. The control means drives and controls the rotational shake correction mechanism by providing a drive signal for the correction body to reciprocate within the movable rotation range of the correction body to the rotational shake correction mechanism.
The evaluation means is configured to correct the rotational shake based on a relationship between the rotational shake angle obtained from a plurality of images of the sample body taken by the camera as the correction body reciprocates in a movable rotational range and the drive signal. 3. The shake correction characteristic evaluation apparatus for an optical apparatus with a shake correction function according to claim 2, wherein the drive characteristic of the mechanism is evaluated.   The said control means restrict | limits the magnitude | size of the drive signal given to the said rotational shake correction mechanism in the said movable rotation range in which the rotation of the said correction body does not interfere with another component, The Claim 3 characterized by the above-mentioned. A shake correction characteristic evaluation apparatus for optical equipment with a shake correction function.   The evaluation means includes the signal amount per unit rotational shake angle of the first drive signal required to rotate the correction body to the first rotational shake angle, and the correction to the second rotational shake angle. A ratio of the second drive signal required for rotating the body to a signal amount per unit rotational shake angle is calculated, and the drive characteristic of the rotational shake correction mechanism is evaluated based on the calculated ratio. The shake correction characteristic evaluation apparatus for an optical apparatus with a shake correction function according to any one of claims 2 to 4.   6. The optical device with a shake correction function according to claim 1, wherein the sample body includes two light emitting points or point light sources having different sizes or one bright line. Device shake correction characteristic evaluation device. The sample body has one light-emitting point or point light source at a position coinciding with the optical axis of the camera,
The rotation support mechanism rotatably supports the container on a fulcrum where the optical axis of the camera intersects the fixed body on the imaging side of the camera,
The evaluation means is a locus drawn by one light emitting point or point light source in each of a plurality of images of the sample body, which is photographed by rotating the container with the optical axis of the camera as a rotation axis under the control of the control means. 7. The shake correction of the optical apparatus with a shake correction function according to claim 1, wherein the shake on the subject side of the optical axis of the camera passing through the fulcrum is evaluated. Characteristic evaluation device. The rotation support mechanism rotatably supports the container on a fulcrum where the optical axis of the camera intersects the fixed body on the imaging side of the camera,
The evaluation means is a straight line connecting two light emitting points or point light sources in each of a plurality of images of the sample body photographed by rotating the container with the optical axis of the camera as a rotation axis under the control of the control means. Or the intersection of the one bright line, or the camera passing through the fulcrum based on a trajectory drawn by the straight line or one point on the one bright line located at a position coincident with the optical axis of the camera. The shake correction characteristic evaluation apparatus for an optical device with a shake correction function according to claim 6, wherein shake on the subject side of the optical axis of the optical device is evaluated. The optical apparatus includes a swing support mechanism that swingably supports the movable module with respect to the container, and an image generated around a direction orthogonal to the optical axis of the camera of a subject image photographed by the camera. A swing shake correction mechanism that corrects shake by moving the movable module relative to the container,
The control means, while taking an image of a fixed sample body with the camera, moves the movable module with respect to the container by the swing shake correction mechanism, and takes a plurality of images of the sample body,
The evaluation unit includes the optical apparatus for image blurring that occurs around a direction orthogonal to the optical axis of the camera based on a trajectory of the sample body image drawn by a plurality of images photographed under the control of the control unit. The shake correction characteristic evaluation apparatus for an optical device with a shake correction function according to claim 1, wherein the shake correction characteristic is evaluated.

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