JP2018097406A - Traveling vehicle system and traveling vehicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a traveling vehicle system and traveling vehicles capable of realizing follow-up running of the traveling vehicles while preventing interference between the traveling vehicles even when the distance between at least two of the traveling vehicles traveling in a continuous state becomes short.SOLUTION: A traveling vehicle system includes a traveling vehicle 21 traveling in front and a traveling vehicle 22 traveling behind. The preceding traveling vehicle 21 has a transmitting unit that periodically transmits information on a stoppable position P1 capable of being stopped when the deceleration is started at the current position. The succeeding traveling vehicle 22 includes a receiving unit that periodically receives the information on the stoppable position P1, and a control unit that periodically updates a target position P2 on the basis of the information. The control unit determines the target position P2 such that a rear end 21a of the preceding traveling vehicle 21 stopping at the stoppable position P1 locates in front of a front end 22a of the succeeding traveling vehicle 22 stopping at the target position P2.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a traveling vehicle system and a traveling vehicle.

  In the traveling control system described in Patent Document 1, each of a plurality of traveling vehicles transmits position information indicating the current position to the ground controller, and the ground controller travels at a constant inter-vehicle distance and at a constant speed. A plurality of traveling vehicles are controlled to do so.

JP 2010-205102 A

  Thus, in the traveling vehicle system, from the viewpoint of increasing the number of traveling vehicles that travel in a unit section per unit time, for example, two traveling vehicles are in a state in which no other traveling vehicle exists between them (hereinafter, When the vehicle is traveling along a track in a “continuous state”), even if the distance between the two traveling vehicles becomes shorter, the rear traveling vehicle does not stop and moves forward. It is required to travel following the traveling vehicle (hereinafter sometimes referred to as “following traveling”).

  Therefore, the present invention can realize the follow-up traveling of the traveling vehicle while preventing the interference between the traveling vehicles even when the distance between at least two traveling vehicles traveling in a continuous state is shortened. An object is to provide a traveling vehicle system and a traveling vehicle.

  The traveling vehicle system of the present invention travels along the track behind the first traveling vehicle in a state where there is no other traveling vehicle between the first traveling vehicle traveling along the track and the first traveling vehicle. A first traveling unit that periodically transmits first information relating to a first stoppable position that can be stopped when deceleration is started at the current position. The second traveling vehicle has a first receiving unit that periodically receives the first information, and a first destination position that is a destination in traveling of the second traveling vehicle based on the first information. A first controller that updates the second traveling vehicle when the rear end of the first traveling vehicle stops at the first target position when stopped at the first stoppable position. The first target position is determined so as to be positioned in front of the front end.

  In this traveling vehicle system, among the first traveling vehicle and the second traveling vehicle that travel in a continuous state, in the second traveling vehicle behind, the first destination position that is the destination in the traveling of the second traveling vehicle is periodic. Updated to At this time, the first target position is determined to be positioned in front of the front end of the second traveling vehicle when the rear end of the first traveling vehicle is stopped at the first target position when the first target position is stopped at the first stoppable position. Is done. As a result, even when the distance between the first traveling vehicle and the second traveling vehicle is shortened, the rear second traveling vehicle travels following the first traveling vehicle without stopping. can do. Even if the front first traveling vehicle suddenly stops, the rear second traveling vehicle can stop without interfering with the front first traveling vehicle. Therefore, according to this traveling vehicle system, even when the distance between at least two traveling vehicles traveling in a continuous state is shortened, the traveling vehicle can follow the traveling while preventing the traveling vehicles from interfering with each other. can do.

  In the traveling vehicle system of the present invention, the first information may be information indicating the first stoppable position, or information indicating the current position and the current speed of the first traveling vehicle. In any case, based on the first information, the first destination position that is the destination in the travel of the second traveling vehicle can be periodically updated.

  The traveling vehicle system of the present invention further includes a control device that communicates with each of a plurality of traveling vehicles existing in the jurisdiction area, the control device receiving a first information periodically, and a first information. A transmission unit that periodically broadcasts to a plurality of traveling vehicles, and the second traveling vehicle may further include an identification unit that identifies the first traveling vehicle. In this case, since the first information about the first stoppable position is distributed to each of the plurality of traveling vehicles existing in the jurisdiction area, the first traveling vehicle immediately transmits the first information. Each of the plurality of traveling vehicles can receive the first information. Since the rear second traveling vehicle has an identification unit that identifies the first traveling vehicle ahead, the second traveling vehicle is the destination in the traveling of the second traveling vehicle based on the first information transmitted from the first traveling vehicle. One target position can be updated appropriately. Thus, both the immediacy of the first information by broadcast distribution and the identification of the first information corresponding to the first traveling vehicle ahead can be ensured.

  In the traveling vehicle system of the present invention, the first traveling vehicle further includes a display unit that displays identification information indicating that it is the first traveling vehicle, and the second traveling vehicle further includes a detection unit that detects the display unit. The identification unit may identify the first traveling vehicle based on identification information included in the display unit detected by the detection unit. In this case, the rear second traveling vehicle can easily and reliably identify the front first traveling vehicle.

  The traveling vehicle system of the present invention further includes a third traveling vehicle that travels along the track behind the second traveling vehicle in a state where there is no other traveling vehicle between the second traveling vehicle and the second traveling vehicle. Has a second transmitter for periodically transmitting second information relating to a second stoppable position that can be stopped when deceleration is started at the current position, and the third traveling vehicle transmits the second information. A second receiving unit that periodically receives the second receiving unit, and a second control unit that periodically updates a second destination position that is a destination in traveling of the third traveling vehicle based on the second information, (2) The second control position is such that the rear end of the second traveling vehicle when stopped at the second stoppable position is positioned in front of the front end of the third traveling vehicle when stopped at the second target position. May be determined. Accordingly, it is possible to realize the follow-up traveling of the traveling vehicle while preventing the interference of the traveling vehicles with respect to at least three traveling vehicles traveling in a continuous state.

  The traveling vehicle of the present invention is a traveling vehicle that travels along a track, and periodically transmits first information about a first stoppable position that can be stopped when the host vehicle starts decelerating at the current position. A transmitting unit for transmitting, a receiving unit for periodically receiving second information about a second stoppable position that can be stopped when another traveling vehicle starts decelerating at the current position, and another traveling vehicle When the vehicle is traveling along a track behind another traveling vehicle in the absence of another traveling vehicle, the target position that is the destination in the traveling of the vehicle is periodically determined based on the second information. And a control unit that updates the control unit so that the control unit is positioned in front of the front end of the host vehicle when the rear end of the other traveling vehicle stops at the target position when the control unit stops at the second stoppable position. Next, the target position is determined.

  According to this traveling vehicle, as described above, even when the distance between at least two traveling vehicles traveling in a continuous state is shortened, the traveling vehicle follows the traveling while preventing interference between the traveling vehicles. Can be realized.

  According to the present invention, even when the distance between at least two traveling vehicles traveling in a continuous state is shortened, it is possible to realize the following traveling of the traveling vehicle while preventing the interference between the traveling vehicles. A traveling vehicle system and a traveling vehicle can be provided.

It is a block diagram of the traveling vehicle system of one Embodiment. It is a block diagram of the traveling vehicle of the traveling vehicle system of FIG. It is a block diagram of the traveling vehicle controller of the traveling vehicle system of FIG. It is a figure for demonstrating the follow-up driving | running | working implemented in the traveling vehicle system of FIG. It is a figure for demonstrating the follow-up driving | running | working implemented in the traveling vehicle system of FIG. It is a figure for demonstrating the follow-up driving | running | working implemented in the traveling vehicle system of FIG.

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.
[Configuration of traveling vehicle system]

  As shown in FIG. 1, the traveling vehicle system 1 includes a track 10, a plurality of traveling vehicles 20, and a controller 50. The track 10 is laid near the ceiling of a semiconductor manufacturing plant including a plurality of processing apparatuses 100. The traveling vehicle 20 is OHT (Overhead Hoist Transfer) and travels in one direction along the track 10 while being suspended on the track 10. However, the traveling vehicle 20 may reciprocate along a part of the track 10. The traveling vehicle 20 conveys a FOUP (Front Opening Unified Pod) 90 containing a plurality of semiconductor wafers to the load port 101 of each processing apparatus 100. The controller 50 communicates with each traveling vehicle 20 and controls the operation of each traveling vehicle 20.

  Hereinafter, on the basis of the traveling direction when the traveling vehicle 20 travels in one direction along the track 10, it is referred to as "downstream" and "upstream", "front" and "rear", and "merge" and "branch". Use terminology.

  The track 10 has a plurality of sections. The track 10 has a branch point where one section branches into a plurality of sections, and a junction where a plurality of sections merge into one section. In the example shown in FIG. 1, the track 10 includes a portion constituted by sections 10 a, 10 b, 10 c, 10 d, and 10 e. The section 10a and the section 10b join the section 10c at the joining point 11a. The section 10c and the section 10d join the section 10e at the joining point 11b.

  The traveling vehicle 20 has a transfer mechanism for transferring the FOUP 90 to the load port 101. The transfer mechanism includes, for example, a gripping part that grips the FOUP 90 and a lifting mechanism that lifts and lowers the gripping part. As a result, the traveling vehicle 20 that has stopped at the position where the FOUP 90 can be transferred to the load port 101 can transfer the FOUP 90 to the load port 101 by operating the transfer mechanism. The transfer of the FOUP 90 to the load port 101 includes a case where the FOUP 90 held (loaded) by the traveling vehicle 20 is supplied (unloaded) to the load port 101 and a case where the FOUP 90 placed on the load port 101 is transferred. And the case where the traveling vehicle 20 acquires (catch).

  The controller 50 includes a transport controller 50A and a traveling vehicle controller 50B. The transport controller 50A is a host controller for the traveling vehicle controller 50B. The conveyance controller 50A communicates with each of a manufacturing controller (not shown) and the traveling vehicle controller 50B. The manufacturing controller communicates with each processing apparatus 100 and transmits a transport request for transporting the FOUP 90 to the load port 101 of each processing apparatus 100 to the transport controller 50A. When the transport controller 50A grasps that there is a transport request, the traveling vehicle controller 50B performs transport corresponding to the transport request to any traveling vehicle 20 that exists in the jurisdiction area set in advance on the track 10. Assign a command.

  Each of the transport controller 50A, the traveling vehicle controller 50B, and the manufacturing controller is configured as a computer apparatus including a processor, a memory, a storage, a communication device, and the like, for example. In each controller, a processor executes predetermined software (program) read into a memory or the like, and controls reading and writing of data in the memory and storage, and communication between controllers by a communication device, thereby controlling each controller. The function is realized.

  As shown in FIG. 2, the traveling vehicle 20 includes a transmission unit 23, a reception unit 24, and a control unit 25. The transmission part 23 transmits various information to the traveling vehicle controller 50B. The receiving unit 24 receives various types of information from the traveling vehicle controller 50B. The control unit 25 controls traveling of the own vehicle.

  In the present embodiment, the transmission unit 23 periodically transmits information indicating the stoppable position of the vehicle (first information regarding the first stoppable position). Specifically, every time the receiving unit 24 receives a status request from the traveling vehicle controller 50B by polling communication, the transmitting unit 23 transmits a status report including information indicating the position where the host vehicle can be stopped. The stop position of the host vehicle is a position where the host vehicle can stop when the host vehicle starts decelerating at the current position. For example, the stop possible position of the own vehicle is a stop position when the own vehicle suddenly stops from the current position, in other words, the nearest stop position at which the own vehicle can start decelerating from the current position and stop. . Information indicating the position where the own vehicle can be stopped is calculated by the control unit 25 of the own vehicle based on the current position of the own vehicle, the current speed (current actual speed), and the braking ability (deceleration during braking). . Note that the polling communication is performed, for example, via a signal line (feeder line) provided along the track 10.

  The receiving unit 24 periodically receives information indicating the stoppable position of the other traveling vehicle 20 (second information regarding the second stoppable position). Specifically, each time the traveling vehicle controller 50B receives the status report of the other traveling vehicle 20 by polling communication, and the traveling vehicle controller 50B transmits information indicating the stoppable position of the other traveling vehicle 20, the reception is received. The unit 24 receives information indicating the stoppable position of the other traveling vehicle 20. The stoppable position of the other traveling vehicle 20 is a position where the other traveling vehicle 20 can stop when the other traveling vehicle 20 starts decelerating at the current position. For example, the stoppable position of the other traveling vehicle 20 is a stop position when the other traveling vehicle 20 suddenly stops from the current position. In other words, the other traveling vehicle 20 starts to decelerate from the current position. It is the closest stop position that can be stopped. Information indicating the stoppable position of the other traveling vehicle 20 is calculated by the control unit 25 of the other traveling vehicle 20 based on the current position, the current speed, and the braking ability of the other traveling vehicle 20.

  When the control unit 25 is traveling along the track 10 behind the other traveling vehicle 20 in a state where another traveling vehicle 20 does not exist between the own vehicle and the other traveling vehicle 20, The target position is updated periodically. Specifically, every time the receiving unit 24 receives information indicating a stoppable position of another traveling vehicle 20 that travels ahead, the control unit 25 updates the target position based on the information. The destination position is a destination in traveling of the own vehicle. The control unit 25 controls the traveling of the host vehicle so that the host vehicle can travel to the target position and stop at the target position. How to determine the target position will be described later.

  The traveling vehicle 20 further includes a display unit 26, a detection unit 27, and an identification unit 28. The display part 26 displays the identification information of the own vehicle. The display unit 26 is, for example, a barcode provided at the rear end of the traveling vehicle 20. The detection unit 27 detects the display unit 26 of another traveling vehicle 20 that travels ahead. The detection unit 27 is, for example, a camera that images the front. The identification unit 28 identifies the other traveling vehicle 20 traveling forward based on the identification information included in the display unit 26 (the display unit 26 of the other traveling vehicle 20 traveling forward) detected by the detection unit 27. To do.

  The transmission unit 23, the reception unit 24, the control unit 25, and the identification unit 28 described above are provided in the controller of the traveling vehicle 20. The controller is configured as a computer apparatus including a processor, a memory, a storage, a communication device, and the like, for example. In the controller, the processor executes predetermined software (program) read into the memory or the like, and controls reading and writing of data in the memory and storage, and communication between the controllers by the communication device. The function is realized.

  As illustrated in FIG. 3, the traveling vehicle controller (control device) 50 </ b> B includes a reception unit 51 and a transmission unit 52. The receiving unit 51 receives various types of information from the transport controller 50A and the traveling vehicle 20 existing in the jurisdiction area (there may be a single vehicle or a plurality of vehicles; the same applies hereinafter). The transmission unit 52 transmits various information to the transport controller 50A and the traveling vehicle 20 existing in the jurisdiction area.

  In the present embodiment, the receiving unit 51 periodically receives information indicating the stoppable position of the traveling vehicle 20 existing in the jurisdiction area. Specifically, every time the traveling vehicle 20 existing in the jurisdiction area transmits a status report including information indicating a stoppable position of the own vehicle by polling communication, the receiving unit 51 includes a status report including the information. Receive.

The transmission part 52 transmits periodically the information which shows the stop possible position of the traveling vehicle 20 which exists in a jurisdiction area to the other traveling vehicles 20 which exist in a jurisdiction area. Specifically, each time the receiving unit 51 receives a status report from the traveling vehicle 20 existing in the jurisdiction area by polling communication, the transmitting unit 52 displays information indicating a stoppable position included in the status report. And transmitted to other traveling vehicles 20 existing in the jurisdiction area. When there are a plurality of traveling vehicles 20 in the jurisdiction area, the transmission unit 52 broadcast-distributes information indicating a stoppable position (that is, broadcasts simultaneously to the plurality of traveling vehicles 20 present in the jurisdiction area). .
[Follow-up driving performed in a traveling vehicle system]

  In the traveling vehicle system 1, the following traveling described below is performed. As an example, as shown in FIG. 4A, two traveling vehicles 20 travel along the track 10 in a continuous state (that is, a state where no other traveling vehicle 20 exists between them). The case where it is doing is demonstrated. For convenience of explanation, the traveling vehicle 20 traveling forward is referred to as a traveling vehicle (first traveling vehicle) 21, and the traveling vehicle 20 traveling rearward is referred to as a traveling vehicle (second traveling vehicle) 22.

  As shown in FIGS. 4A and 4B, the rear traveling vehicle 22 periodically measures the distance (inter-vehicle distance) from the front traveling vehicle 21. The measurement of the distance is performed by an inter-vehicle distance sensor included in each traveling vehicle 20. At this time, the transmission unit (first transmission unit) 23 of the front traveling vehicle 21 periodically transmits information indicating the stoppable position of the front traveling vehicle 21 (first information regarding the first stoppable position). Yes. On the other hand, the reception unit (first reception unit) 24 of the rear traveling vehicle 22 periodically receives information indicating the stoppable position of the front traveling vehicle 21 by receiving the broadcast distribution by the traveling vehicle controller 50B. ing.

  Then, as shown in FIG. 4B, when the distance between the two traveling vehicles 21 and 22 that travel in a continuous state is equal to or less than a predetermined value d, the rear traveling vehicle 22 travels on its own vehicle. Periodic updating of the target position (first target position), which is the destination at, is started, and follow-up traveling with respect to the traveling vehicle 21 ahead is started. Specifically, the detection unit 27 of the rear traveling vehicle 22 detects the display unit 26 of the front traveling vehicle 21, and the identification unit 28 of the rear traveling vehicle 22 is displayed on the display unit 26 of the front traveling vehicle 21. Based on the included identification information, the forward traveling vehicle 21 is identified. As a result, the control unit (first control unit) 25 of the rear traveling vehicle 22 recognizes that the traveling vehicle 20 traveling ahead in the continuous state is the traveling vehicle 21, and the stoppable position of the front traveling vehicle 21. The periodic update of the target position is started based on the information indicating.

  As shown in FIGS. 5A and 5B, the control unit 25 of the rear traveling vehicle 22 has the rear end 21a of the front traveling vehicle 21 when the vehicle is stopped at the stoppable position P1 at the target position P2. The target position P2 is determined so as to be positioned in front of the front end 22a of the rear traveling vehicle 22 when the vehicle stops. The control unit 25 of the rear traveling vehicle 22 periodically updates the target position P2 of the rear traveling vehicle 22 as the stoppable position P1 of the front traveling vehicle 21 is periodically updated. As a result, the rear traveling vehicle 22 follows the front traveling vehicle 21 as long as the front traveling vehicle 21 continues to travel (that is, the rear traveling vehicle 22 does not stop and the front traveling vehicle 21 stops). To follow). Note that the distance between the stoppable position P1 and the target position P2 may be determined in advance based on the dimensions of the traveling vehicle 20 in the traveling direction.

Then, as shown in FIGS. 6A and 6B, when the distance between the two traveling vehicles 21 and 22 traveling in a continuous state exceeds a predetermined value d, the rear traveling vehicle 22 becomes the target. The periodic update of the position is terminated, and the follow-up traveling with respect to the traveling vehicle 21 ahead is terminated.
[Action and effect]

  As described above, in the traveling vehicle system 1, among the two traveling vehicles 20, 20 that travel in a continuous state, in the rear traveling vehicle 20, a destination position that is a destination in the traveling of the rear traveling vehicle 20. Are updated periodically. At this time, the target position is determined so that the rear end of the front traveling vehicle 20 when stopped at the stoppable position is positioned in front of the front end of the rear traveling vehicle 20 when stopped at the target position. As a result, even when the distance between the two traveling vehicles 20 and 20 that travel in a continuous state becomes shorter, the rear traveling vehicle 20 should be stopped as long as the front traveling vehicle 20 continues to travel. It is possible to travel following the traveling vehicle 20 ahead. Even if the front traveling vehicle 20 suddenly stops, the rear traveling vehicle 20 can stop without interfering with the front traveling vehicle 20. Therefore, according to the traveling vehicle system 1 and the traveling vehicle 20, even when the distance between the two traveling vehicles 20, 20 traveling in a continuous state is shortened, interference between the traveling vehicles 20 is prevented. The following traveling of the traveling vehicle 20 behind can be realized.

  In the traveling vehicle system 1, the receiving unit 51 of the traveling vehicle controller 50B periodically receives information indicating the stoppable position from the traveling vehicle 20 existing in the jurisdiction area, and the transmitting unit 52 of the traveling vehicle controller 50B Information indicating the stoppable position is periodically broadcast to the traveling vehicle 20 existing in the jurisdiction area. Thereby, the information which shows a stop possible position is delivered simultaneously to each of the some traveling vehicles 20 which exist in a jurisdiction area. Therefore, each of the traveling vehicles 20 can receive the information promptly after the traveling vehicle 20 in front transmits the information indicating the stoppable position. Then, the identification unit 28 of the traveling vehicle 20 identifies the traveling vehicle 20 ahead. Thereby, based on the information indicating the stoppable position of the front traveling vehicle 20, the destination position that is the destination in the traveling of the rear traveling vehicle 20 can be appropriately updated. In this way, it is possible to ensure both immediacy of information by broadcast distribution and identification of information corresponding to the traveling vehicle 20 ahead.

  In the traveling vehicle system 1, the display unit 26 of the traveling vehicle 20 ahead displays identification information indicating that the traveling vehicle 20 is forward (that is, the host vehicle). The detection unit 27 of the rear traveling vehicle 20 detects the display unit 26 of the front traveling vehicle 20, and the identification unit 28 of the traveling vehicle 20 includes the identification information included in the display unit 26 detected by the detection unit 27. Based on the above, the traveling vehicle 20 ahead is identified. Thus, the rear traveling vehicle 20 can easily and reliably identify the front traveling vehicle 20. The follow-up traveling described above is triggered by the detection of the display unit 26 of the front traveling vehicle 20 by the detection unit 27 of the rear traveling vehicle 20 regardless of the inter-vehicle distance sensor of the rear traveling vehicle 20. Also good.

In addition, even if three or more traveling vehicles 20 are traveling along the track 10 in a continuous state, the following traveling described above is performed in the two traveling vehicles 20 and 20 that travel in a continuous state. Is implemented. That is, in the example shown in FIGS. 4 to 6, when another traveling vehicle (third traveling vehicle) 20 is traveling in a state where the rear of the rear traveling vehicle 22 is continuous, transmission of the rear traveling vehicle 22 is performed. The unit (second transmission unit) 23 periodically transmits information indicating the stoppable position of the rear traveling vehicle 22 (second information regarding the second stoppable position). Further, the receiving unit (second receiving unit) 24 of the other traveling vehicle 20 in the rear periodically receives information indicating the stoppable position of the traveling vehicle 22 behind, and the control unit of the other traveling vehicle 20 (Second control unit) 25 periodically updates the target position (second target position) of the other traveling vehicle 20 based on the information. Thereby, it is possible to realize the follow-up traveling of the traveling vehicle 20 while preventing the traveling vehicles 20 from interfering with each other with respect to the three or more traveling vehicles 20 traveling in a continuous state.
[Modification]

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

  In the above embodiment, information indicating the stoppable position of the traveling vehicle 20 is used as the information related to the stoppable position of the traveling vehicle 20, but the present invention is not limited to this. For example, information indicating the current position and current speed of the traveling vehicle 20 may be used as the information regarding the stoppable position of the traveling vehicle 20. That is, the transmission unit 23 may periodically transmit information indicating the current position and the current speed of the host vehicle. In that case, the traveling vehicle controller 50B or the control unit 25 of the rear traveling vehicle 20 calculates a stoppable position of the front traveling vehicle 20 based on the current position, the current speed, and the braking capability of the front traveling vehicle 20. be able to.

  Moreover, in the said embodiment, the receiving part 24 of the back traveling vehicle 20 stops the traveling vehicle 20 from the transmission part 23 of the front traveling vehicle 20 via the receiving part 51 and the transmission part 52 of the traveling vehicle controller 50B. Although information on possible positions has been acquired, the present invention is not limited to this. For example, the receiving unit 24 of the rear traveling vehicle 20 does not go through the receiving unit 51 and the transmitting unit 52 of the traveling vehicle controller 50B, but directly communicates between the traveling vehicles 20 from the transmitting unit 23 of the front traveling vehicle 20. Information regarding the stoppable position of the traveling vehicle 20 may be acquired.

  Further, in the above embodiment, the identification unit 28 of the traveling vehicle 20 identifies the traveling vehicle 20 ahead based on the identification information included in the display unit 26 detected by the detection unit 27. It is not limited to. For example, even if the traveling vehicle 20 does not include the display unit 26 and the detection unit 27, the identification unit 28 of the traveling vehicle 20 acquires the identification information of the traveling vehicle 20 ahead from the traveling vehicle controller 50B. The traveling vehicle 20 may be identified.

  In the above embodiment, the traveling vehicle controller 50B may have some or all of the functions of the transport controller 50A, and the transport controller 50A may have some or all of the functions of the traveling vehicle controller 50B. Also good. Alternatively, one controller may have the functions of the transport controller 50A and the traveling vehicle controller 50B.

  The article conveyed in the traveling vehicle system 1 is not limited to the FOUP 90 in which a plurality of semiconductor wafers are accommodated, and may be other containers in which glass wafers, reticles, and the like are accommodated. The traveling vehicle system 1 can also be applied to facilities other than semiconductor manufacturing factories. Further, the traveling vehicle 20 is not limited to OHT, and may be any device that can travel along the track 10.

  DESCRIPTION OF SYMBOLS 1 ... Traveling vehicle system, 10 ... Track, 20 ... Traveling vehicle (third traveling vehicle), 21 ... Traveling vehicle (first traveling vehicle), 21a ... Rear end, 22 ... Traveling vehicle (second traveling vehicle), 22a ... Front end, 23 ... transmitting unit (first transmitting unit, second transmitting unit), 24 ... receiving unit (first receiving unit, second receiving unit), 25 ... control unit (first control unit, second control unit), DESCRIPTION OF SYMBOLS 26 ... Display part, 27 ... Detection part, 28 ... Identification part, 50B ... Traveling vehicle controller (control apparatus), 51 ... Reception part, 52 ... Transmission part.

Claims (6)

A first traveling vehicle traveling along a track;
A second traveling vehicle that travels along the track behind the first traveling vehicle in a state where there is no other traveling vehicle between the first traveling vehicle and
The first traveling vehicle includes a first transmission unit that periodically transmits first information related to a first stoppable position that can be stopped when deceleration is started at a current position;
The second traveling vehicle is
A first receiver that periodically receives the first information;
A first control unit that periodically updates a first destination position, which is a destination in traveling of the second traveling vehicle, based on the first information;
The first control unit is positioned in front of the front end of the second traveling vehicle when the rear end of the first traveling vehicle is stopped at the first target position when the first control unit is stopped at the first stoppable position. And a traveling vehicle system for determining the first destination position.   2. The traveling vehicle system according to claim 1, wherein the first information is information indicating the first stoppable position or information indicating a current position and a current speed of the first traveling vehicle. A control device that communicates with each of the plurality of traveling vehicles existing in the jurisdiction area;
The controller is
A receiving unit for periodically receiving the first information;
A transmitter that periodically broadcasts the first information to the plurality of traveling vehicles,
The traveling vehicle system according to claim 1, wherein the second traveling vehicle further includes an identification unit that identifies the first traveling vehicle. The first traveling vehicle further includes a display unit for displaying identification information indicating that the first traveling vehicle is the first traveling vehicle;
The second traveling vehicle further includes a detection unit that detects the display unit,
The traveling vehicle system according to claim 3, wherein the identification unit identifies the first traveling vehicle based on the identification information included in the display unit detected by the detection unit. A third traveling vehicle that travels along the track behind the second traveling vehicle in a state in which no other traveling vehicle exists between the second traveling vehicle and the second traveling vehicle;
The second traveling vehicle has a second transmitter that periodically transmits second information related to a second stoppable position that can be stopped when deceleration is started at a current position;
The third traveling vehicle is
A second receiver for periodically receiving the second information;
A second control unit that periodically updates a second destination position, which is a destination in traveling of the third traveling vehicle, based on the second information,
The second control unit is positioned in front of the front end of the third traveling vehicle when the rear end of the second traveling vehicle stops at the second target position when the second control unit stops at the second stoppable position. The traveling vehicle system according to any one of claims 1 to 4, wherein the second target position is determined. A traveling vehicle traveling along a track,
A transmitter that periodically transmits first information about a first stoppable position that can be stopped when the host vehicle starts decelerating at the current position;
A receiving unit that periodically receives second information related to a second stoppable position that can be stopped when another traveling vehicle starts decelerating at the current position;
When the vehicle travels along the track behind the other traveling vehicle in a state in which no other traveling vehicle exists with the other traveling vehicle, the vehicle travels based on the second information. A control unit that periodically updates a destination position that is a destination in
The control unit determines the target position so that a rear end of the other traveling vehicle when stopped at the second stoppable position is positioned in front of a front end of the own vehicle when stopped at the target position. A running car.

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