JP2015127769A - Device, method, and program for magnifying observation, and computer readable recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnifying observation device that facilitates observation under a plurality of different imaging conditions.SOLUTION: A magnifying observation device includes: magnification adjustment means 89a for increasing or reducing magnification for images displayed on a display unit 52; display position changing means 89b for moving display positions of images; a simplified imaging condition generation unit 89c for generating a plurality of provisional imaging conditions; a list display area for displaying a list of a plurality of simplified images acquired using illumination means and image capturing means under the plurality of simplified imaging conditions generated by the simplified imaging condition generation unit 89c; and interlocking adjustment means 89d for adjusting a display magnification and display position for each simplified image while the list of the plurality of simplified images is displayed in the list display area, such that magnification adjustment of one simplified image by the magnification adjustment means 89a causes magnification of other simplified images to be interlockingly adjusted and that display position modification for one simplified image by the display position changing means 89b causes display positions of other simplified images to be interlockingly changed.

Description

  The present invention relates to a digital microscope and a magnification observation device such as a microscope that capture and display an enlarged image, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium.

  An optical microscope using an optical lens, a digital microscope, or the like is used as a magnification observation apparatus that magnifies and displays a sample such as a minute object or a subject such as a workpiece. A digital microscope is a CCD, CMOS, or the like that electrically reads reflected light or transmitted light from an observation target fixed to an observation target fixing unit incident through an imaging optical system for each pixel arranged in a two-dimensional shape. The image is received by the image sensor and electrically read image is displayed on a display unit such as a display (for example, Patent Document 1).

  In such a magnifying observation device, by performing different image processing and lighting effects on the same field of view, displaying them in a plurality of windows, and allowing the user to select preferred image processing and lighting effects, Some have a function of easily obtaining a desired image without requiring complicated settings or specialized knowledge.

  However, when using this function to zoom and observe the same part of an image, it is necessary to specify the zoom magnification and display range for each window. However, the same operation had to be repeated, and there was a problem that it took time and effort. Furthermore, since the designation of the display position is set for each individual image, adjustment work for observing the same position is also required, and it is actually difficult to align the position completely. there were.

JP 2012-145722 A JP 2004-170574 A

  The present invention has been made to solve such conventional problems. A main object of the present invention is to provide a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium that facilitate observation under a plurality of different imaging conditions.

Means for Solving the Problems and Effects of the Invention

  In order to achieve the above object, the first magnification observation apparatus includes an illuminating unit for irradiating an observation target with illumination light, and an imaging for receiving reflected light or transmitted light of the illumination light irradiated by the illumination unit. An imaging condition setting unit for setting an imaging condition including at least an illumination condition for illuminating illumination light by the illumination unit, and an imaging condition setting unit as an imaging condition when an image is captured by the imaging unit A display unit for displaying an image captured under a set imaging condition, a magnification adjusting unit for enlarging or reducing a display magnification of an image displayed on the display unit, and an image displayed on the display unit. Display position changing means for moving the display position, a simple imaging condition generation unit for generating a plurality of different provisional imaging conditions, and a plurality of different simple imaging conditions generated by the simple imaging condition generation unit Then, a list display area for displaying a list of simple images acquired using the illumination means and the imaging means, and a plurality of simple images displayed in the list display area as a list, the magnification adjusting means When the magnification of one simple image is adjusted, the magnification of another simple image is also adjusted in conjunction with this, and when the display position of one simple image is changed by the display position changing means, It is possible to provide interlocking adjustment means for adjusting the display magnification and the display position of each simple image so that the display position is also changed in conjunction therewith. With the above configuration, each simple image acquired under different imaging conditions displayed on the list display area can change the display magnification in conjunction with each other. When the magnification is changed, it is easy to compare the corresponding parts in each simple image, eliminating the need to manually adjust the other simple images to the same magnification in the same way. It becomes possible to save labor for adjustment of conditions.

  In addition, according to the second magnification observation apparatus, in addition to the list display area, a wide-area image acquired at the same magnification or lower than each simple image displayed in the list display area is displayed. A wide area image display area, the area corresponding to the display content of each simple image displayed in the list display area is displayed in a frame shape on the wide area image display area, and the display magnification of the simple image Alternatively, when the display position is changed, the frame size can be changed following the change. With the above-described configuration, it is possible to easily grasp a part currently being observed in a plurality of simple images with an image having a wider field of view, and the field of view can be easily changed.

  Further, according to the third magnifying observation apparatus, the interlock adjustment unit performs display magnification interlocking and / or display position interlocking ON / OFF with respect to an arbitrary simple image displayed in the list display area. Can be set individually. With the above configuration, not only the magnification and display position are linked uniformly to all the simple images displayed in the list, but the display of some simple images is not linked, for example, the display of the reference image is fixed. For example, a flexible display mode can be selected.

  Furthermore, according to the fourth magnified observation device, the display content of an arbitrary simple image displayed in the list display area can be updated in real time. With the above configuration, it is possible to display live images that are updated in real time on the display unit, and the images that are actually displayed are also changed according to changes in the imaging conditions, so setting work such as fine adjustment of the imaging conditions Can be made easier.

  Furthermore, according to the fifth magnifying observation device, the illuminating means can include a coaxial epi-illuminating means for irradiating the observation object with coaxial epi-illumination light as illumination light from the direction of the optical axis of the imaging means. .

  Furthermore, according to the sixth magnifying observation device, the illuminating means transmits ring light as illumination light from the ring illumination means for irradiating the observation object with ring-shaped illumination light or the back surface of the observation object. Transmitting illumination means can be provided.

  Furthermore, according to the seventh magnification observation apparatus, the imaging condition can include any of the type of the illumination unit, the direction of illumination light, and the exposure time.

  Furthermore, according to the eighth magnified observation device, the list display area can be included in the display area displayed on the display unit.

  Furthermore, according to the ninth magnified observation method, in the magnified image observation method, the illumination target is irradiated with illumination light, the amount of reflected light or transmitted light of the illumination light is detected, and an image of the capture target is acquired. In addition, a process of easily generating a plurality of different conditions as an imaging condition including at least the condition of the illumination unit that irradiates the observation target with illumination light, and the illumination unit is controlled by the plurality of simple imaging conditions. A step of displaying a list of a plurality of simple images simply obtained by irradiating illumination light in a list display area of a display unit, and selecting any of the simple images displayed in the list, When the display magnification is changed by the magnification adjustment unit, the display magnification of each simple image is changed in conjunction so that a plurality of other simple images displayed in a list are also displayed with the same display magnification. Process and can include . As a result, the simple images acquired under different imaging conditions that are displayed on the list display area can change the display magnification in conjunction with each other, so the corresponding parts of the respective simple images are compared. It is possible to observe the image while adjusting the imaging conditions.

  Further, according to the tenth magnified observation method, another list is further triggered by selecting any simple image displayed in the list and moving the display position of the simple image by the display position changing means. It is possible to include a step of changing the display position of each simple image in conjunction with each other so that the displayed simple images also have the same display position. As a result, the simple images acquired under different imaging conditions that are displayed on the list display area can change the display magnification and the display position in conjunction with each other. It is possible to observe the images while contrasting them, and it is possible to facilitate adjustment of the imaging conditions.

  Furthermore, according to the eleventh enlarged image observation program, an enlarged image observation program that irradiates the imaging target with illumination light, detects the amount of reflected light or transmitted light of the illumination light, and acquires an image of the imaging target. The imaging conditions including at least the conditions of the illumination means for irradiating the illumination light to the observation target are generated by a simple imaging condition generation function that simply generates a plurality of different conditions, and the simple imaging condition generation function. A function of controlling the illuminating means under a plurality of simplified imaging conditions and displaying a list of a plurality of simple images obtained simply by irradiating illumination light in a list display area of a display unit; When a simple image is selected and the display magnification of the simple image is changed by the magnification adjustment means, a plurality of other simple images displayed in a list are also displayed with the same display magnification. In response to the function of changing the display magnification of each simple image in conjunction with the selected simple image displayed in the list and moving the display position of the simple image by the display position changing means. More than the simple images displayed in the list display area, the function of changing the display position of each simple image in conjunction with each other so that the other simple images displayed in the list are also in the same display position. A wide-area image display function for displaying a wide-field image with a wide field of view acquired at a low magnification, and an area corresponding to the display content of each simple image displayed in the list display area in a frame shape on the wide-area image display area The display function can be realized by a computer. As a result, the simple images acquired under different imaging conditions that are displayed on the list display area can change the display magnification and the display position in conjunction with each other. It is possible to observe the images while contrasting them, and it is possible to facilitate adjustment of the imaging conditions.

  Furthermore, a twelfth computer-readable recording medium or recorded device stores the above program. CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray (registered) Trademark), HD DVD (AOD), and other magnetic disks, optical disks, magneto-optical disks, semiconductor memories, and other media that can store programs. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recording medium includes a device capable of recording the program, for example, a general purpose or dedicated device in which the program is implemented in a state where the program can be executed in the form of software, firmware, or the like. Furthermore, each process and function included in the program may be executed by computer-executable program software, or each part of the process or hardware may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

1 is an external view of a magnification observation apparatus according to an embodiment of the present invention. It is a block diagram of the magnification observation device concerning one embodiment of the present invention. It is the schematic which shows an illumination part. It is an image figure which shows the user interface screen of the illumination light switching screen of an enlarged image observation program. It is an image figure which shows the user interface screen of the brightness setting screen of an enlarged image observation program. It is a schematic diagram which shows the magnification observation apparatus which concerns on a modification. It is a schematic diagram which shows the magnification observation apparatus which concerns on another modification. It is sectional drawing of a head part. It is a perspective view which shows the external appearance structure of the imaging system of a magnification observation apparatus. It is a schematic diagram which shows a mode that a head part is rock | fluctuated. It is a perspective view which shows a magnification observation apparatus provided with an objective lens switching means. It is an image figure which shows the user interface screen of the white balance setting screen of an enlarged image observation program. It is an image figure which shows the user interface screen of the enlarged image observation program which displayed the list display area. It is an image figure which shows the user interface screen of the image setting screen of an enlarged image observation program. It is an image figure which shows the user interface screen of the enlarged image observation program which displayed the wide image display area. It is an image figure of a wide area image display area. It is an image figure of the list display area which shows the example which turned off the interlocking function partially.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below exemplifies a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium for embodying the technical idea of the present invention, The present invention does not specify a magnification observation apparatus, a magnification image observation method, a magnification image observation program, and a computer-readable recording medium as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

  The connection between the magnification observation apparatus used in the embodiment of the present invention and the computer, printer, external storage device and other peripheral devices for operation, control, display, and other processing connected thereto is, for example, IEEE 1394, RS-232x, RS-422, serial connection such as USB, parallel connection, or communication via network such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. Do. The connection is not limited to a physical connection using a wire, but IEEE802. Wireless connection using radio waves such as wireless LAN such as x, Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for exchanging data or storing settings. In this specification, the magnification observation apparatus and the magnification image observation method are used to include not only the magnification observation apparatus body but also a magnification observation system in which peripheral devices such as a computer and an external storage device are combined.

  Further, in this specification, the magnification observation apparatus is not limited to a system that performs magnification observation, and an apparatus or method that performs input / output, display, calculation, communication, and other processes related to imaging in hardware. An apparatus and method for realizing processing by software are also included in the scope of the present invention. For example, a general-purpose circuit or computer that incorporates software, programs, plug-ins, objects, libraries, applets, compilers, modules, macros that operate on specific programs, etc., and enables imaging itself or related processing The system also corresponds to the magnification observation apparatus of the present invention. In this specification, the computer includes a workstation, a terminal, and other electronic devices in addition to a general-purpose or dedicated electronic computer. Further, in the present specification, the program is not limited to a program that is used alone, an aspect that functions as a part of a specific computer program, software, service, etc., an aspect that is called and functions when necessary, an environment such as an OS, etc. It can also be used as a mode provided as a service, a mode that operates resident in the environment, a mode that operates in the background, and other support programs.

  Hereinafter, the magnification observation apparatus 100 according to the embodiment of the present invention will be described with reference to FIGS. The magnification observation apparatus 100 is roughly divided into an imaging system 1 and a control system 2 as shown in FIG. The imaging system 1 includes an illumination unit 60 for illuminating a sample or a workpiece or other subject that is the observation object S, and a head unit 4 that images the observation object S illuminated by the illumination unit 60. The head unit 4 includes a camera unit 10 including an image sensor 12 and a microscope lens unit 20 that is detachably attached to the tip of the camera unit 10. The microscope lens unit 20 constitutes an imaging optical system (lens optical system) composed of a plurality of optical lenses. Here, the microscope lens unit 20 includes an objective lens unit 25. The head unit 4 functions as an imaging unit that receives reflected light or transmitted light of illumination light.

  In addition, the imaging system 1 serves as a placement unit 30 on which the observation object S is placed, and a first focus adjustment unit that adjusts the focus by changing the relative distance between the placement unit 30 and the head unit 4 in the optical axis direction. And an upper stage elevator 16 for driving the upper Z stage and the upper Z stage. On the other hand, the head unit 4 also includes an upper Z stage as a second focus adjustment unit that adjusts the focal point by changing the relative distance from the mounting unit in the optical axis direction. The observation object S placed on the placement unit 30 is incident via the imaging optical system 11 and reflected from the observation object S or irradiated from the bottom surface side of the observation object S. The transmitted light is electrically read by the image sensor 12 of the camera unit 10.

  Further, the control system 2 includes a main body unit 50 having a display unit 52 that displays an enlarged image captured by the camera unit 10. The camera unit 10 is connected to the main body unit 50 via the cable unit 3. In the example of FIG. 1, the display unit 52 is provided integrally with the main body unit 50, but the display unit may be a separate member from the main body unit. The cable unit 3 transmits illumination light from the main body unit 50 to the head unit 4 side in addition to an electrical cable for transmitting image information obtained by the imaging element of the camera unit 10 to the carrier unit 50 side. An optical cable 3b is provided. The cable portion 3 can be integrated with the electrical cable and the optical cable 3b, or these can be provided individually.

  Furthermore, the placement unit 30 can be moved in a plane in addition to the movement in the height direction, that is, the Z direction by the lower stage elevator 35. Specifically, an XY stage that can move in the X-axis direction and the Y-axis direction is provided. In addition, a rotatable stage (θ stage) that rotates the placement unit 30 may be provided.

  A block diagram of the main body 50 is shown in FIG. As shown in this figure, the main body 50 indicates focal length information related to the relative distance between the stage 30 and the imaging optical system 11 in the optical axis direction when the focal point is adjusted by the lower stage elevator 35, substantially perpendicular to the optical axis direction. A storage unit 53, a display unit 52 for displaying an image read by the image sensor 12, a head unit 4 and a lower stage elevator, as a focal length information storage unit for storing together with the two-dimensional position information of the observation object S in the plane 35 and an interface 54 for communicating data. The magnification observation apparatus 100 captures an observation image using the imaging element 12 that electrically reads reflected light or transmitted light from the observation target S fixed to the stage 30 incident via the imaging optical system 11, It is displayed on the display unit 52.

The storage unit 53 is a lens identification information storage unit that stores lens identification information and lens aberration information, or a wavelength component storage unit that stores a wavelength component with less aberration in each lens unit in association with aberration information of the lens unit. Also works. The storage unit 53 is configured by a hard disk, a semiconductor memory, or the like. An individual storage unit may be provided for each database.
(Lens identification information)

  The lens identification information includes information such as the lens type, the position of the focal length, and the length of the lens barrel. As described above, since the imaging system 1 and the control system 2 are connected via the cable unit 3, the control system 2 can perform appropriate control by determining the type of lens currently mounted. For example, by grasping the physical length of the microscope lens unit 20, when the microscope lens unit 20 is lowered on the stage on the Z, the lower limit movement that can be lowered so as not to contact the observation object S or the mounting unit 30. You can keep track of the distance and limit it so that it doesn't fall any further.

  In addition to directly recording the information of the microscope lens unit as the lens type information, only the identification information of the microscope lens unit, for example, the model, is recorded, and the detailed information of the microscope lens unit corresponding to the model is stored in the main body unit 50 in advance. It can also be stored in the section 53 or the like as a lookup table associated with the model. As a result, when the main body unit 50 acquires the model that is the lens identification information through the camera unit, the main unit 50 acquires the detailed information corresponding to the model with reference to the storage unit 53, and stores the detailed information in the microscope lens unit based on the acquired information. It is possible to perform matching control. With this method, it is possible to grasp necessary information on the main body unit 50 side while reducing the amount of information to be held on the microscope lens unit side.

  Further, the magnifying observation apparatus 100 includes an imaging condition for setting conditions for capturing an image with the camera unit 10, an operation unit 55 for performing various other necessary settings and operations, and a set area. A control unit 51 that calculates the height in the optical axis direction of the observation object S corresponding to the set area based on the focal length information stored in the storage unit 53 relating to a part or all of the corresponding observation object S. Is provided. The magnification observation apparatus 100 can calculate an average height (depth) in the optical axis direction of the observation object S corresponding to a region designated by using the imaging element 12.

  The control unit 51 is configured to simultaneously display on the display unit 52 a plurality of observation images picked up from the optical field shift control unit 81 that operates the optical path shift unit 14 and the same field of view of the observation object S using a plurality of illumination filters. An image selection unit 82 that can select one, an imaging condition setting unit 83 that sets an image observation condition including the type of illumination filter used for imaging the observation image selected by the image selection unit 82, as an imaging condition, An image combining unit 85 that combines at least two observation images obtained by imaging the same observation object S using different illumination filters, and the image combining unit 85 combines the observation images to obtain a color high-resolution image observation image. Based on the aberration information of the microscope lens unit currently mounted on the camera unit among a plurality of interchangeable microscope lens units with automatic specification 84, which automatically operates. The wavelength selection means 86 capable of selecting a wavelength component that is relatively less affected by the aberration of the microscope lens portion among the plurality of wavelength components, and a plurality of different wavelength ranges included in the wavelength band of the light emitted from the illumination light source 65 Illumination light selection means 87 that can be selectively switched to any one of the wavelength ranges, magnification adjustment means 89a for enlarging or reducing the display magnification of the image displayed on the display unit 52, and image displayed on the display unit 52 Display position changing means 89b for moving the display position, a simple imaging condition generation unit 89c for generating a plurality of different provisional imaging conditions, and a magnification in a state where a plurality of simple images are displayed as a list in the list display area When the magnification of one simple image is adjusted by the adjusting unit 89a, the magnification of another simple image is also adjusted in conjunction with this, and the display position of the one simple image is adjusted by the display position changing unit 89b. Changing, as modified in conjunction with this, the display position of the other simple image, to realize functions such as interlocking adjustment means 89d for adjusting the display magnification and the display position of each simplified image. The control unit 51 can be composed of a gate array such as an ASIC or FPGA.

The operation unit 55 is connected to the main body unit 50 or the computer in a wired or wireless manner, or is fixed to the computer. Examples of the general operation unit 55 include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. In addition to the operation of the operation program for magnification observation, these operation units 55 can be used for operations of the magnification observation apparatus 100 itself and its peripheral devices. Furthermore, using a touch screen or touch panel on the display itself that displays the interface screen, the user can directly input or operate the screen by hand, or use voice input or other existing input means, Or these can also be used together. In the example of FIG. 1, the operation unit 55 is configured by a pointing device such as a mouse.
(Lighting unit 60)

  The illumination unit 60 generates illumination light that illuminates the observation object S imaged on the image sensor 12. The illumination light source of the illumination unit 60 is built in the main body unit 50, and illumination light is transmitted to the illumination unit 60 of the head unit 4 through the optical cable 3 b. Note that the illumination unit 60 may be of any type that is built into the head unit 4 or a separate unit that is detachable from the head unit 4. As the illumination method of illumination light, epi-illumination, transmission illumination, or the like can be used as appropriate. The epi-illumination is an illumination method in which illumination light is dropped from above the observation object, and includes ring illumination, coaxial epi-illumination, and the like. The illumination unit 60 shown in FIG. 1 includes a coaxial incident illumination unit 62 (see FIG. 3) for irradiating the observation object S with coaxial incident light, and a ring illumination for irradiating ring-shaped illumination light from a ring-shaped light source. A unit 63 and a transmission illumination unit 64 for irradiating transmitted light are provided. These lights are connected to the main body 50 via the optical cable 3b. The main body 50 includes a connector for connecting the optical cable 3b, and incorporates an illumination light source 65 for sending light to the optical cable 3b via the connector (see FIG. 3). Further, the ring illumination unit 63 can switch between all-around illumination and side illumination. In order to realize this, there are a configuration in which a plurality of LEDs are arranged in a ring shape as the ring illumination unit 63, a configuration in which some LEDs are turned ON / OFF, a configuration in which a turret mask that cuts a part of illumination light is arranged, etc. Available. The illumination light control unit 66 performs lighting control and switching of the illumination light. The illumination light control unit 66 includes an illumination light switching unit 61 for switching illumination light.

Details of the illumination unit 60 are shown in the schematic cross-sectional view of FIG. The illumination unit 60 includes a coaxial incident illumination unit 62 and a ring illumination unit 63. The coaxial epi-illumination is a method of irradiating from the same direction as the imaging surface of the camera, and is also called bright field illumination. The coaxial epi-illumination is effective when looking at unevenness of a mirror workpiece, such as a silicon wafer or an LCD panel. Lighting control of the illumination unit 60 is performed by the illumination light control unit 66. The illumination light control unit 66 includes an illumination light switching unit 61. The illumination switching unit 61 can switch between the coaxial incident illumination unit 62 and the ring illumination unit 63. The illumination switching unit 61 can also be configured to mix the coaxial epi-illumination unit 62 and the ring illumination unit 63 at different ratios.
(Enlarged image observation program)

  An example of a user interface screen constituting one aspect of the illumination light switching means is shown in FIG. FIG. 4 is a user interface screen of a magnified image observation program for operating the magnification observation apparatus 100. Such an operation screen can be displayed on the display unit 52 of the magnifying observation apparatus 100 or an externally connected computer monitor. The user performs various settings and operations of the magnification observation apparatus 100 from the displayed screen. The enlarged image observation program is incorporated in the main body unit 50.

In the examples of user interface screens of these programs, it goes without saying that the layout, shape, display method, size, color scheme, pattern, etc. of each input field and button can be changed as appropriate. By changing the design, the layout can be made easier to display, easier to evaluate and judge, and easy to operate. For example, the detailed setting screen can be displayed as a separate window, or a plurality of screens can be displayed within the same display screen. On the user interface screens of these programs, the operation unit 55 is used to specify ON / OFF operations, numerical values, command inputs, and the like for virtually provided buttons and input fields. Here, the imaging conditions and the like are set with an input device connected to a computer in which the program is incorporated. In this specification, “pressing” includes not only physically touching and operating buttons, but also clicking or selecting with an input unit and pseudo-pressing. Input / output devices constituting the operation unit and the like are connected to a computer by wire or wirelessly, or are fixed to the computer or the like. Examples of general input units include various pointing devices such as a mouse, keyboard, slide pad, track point, tablet, joystick, console, jog dial, digitizer, light pen, numeric keypad, touch pad, and accu point. These input / output devices are not limited to program operations, and can be used for hardware operations such as the magnification observation apparatus 100. Furthermore, a touch screen or a touch panel is used for the display itself of the display unit 52 that displays the interface screen, so that the user can directly input or operate the screen by hand, or voice input or other existing input. Means can be used, or these can be used in combination.
(Lighting switching screen 110)

The user interface screen of the enlarged image observation program shown in FIG. 4 shows an illumination switching screen 110 as one form of illumination condition setting means for setting the illumination condition of the illumination unit 40. In the illumination switching screen 110, a display area 111 is provided on the left side, and an operation area 112 is provided on the right side. The operation area 112 displays a menu in the form of a ribbon on the left side, and the contents that can be operated on the right side are switched according to the selected ribbon. Here, the setting contents can be further switched by switching a plurality of tabs. In the example of FIG. 4, the “brightness / lighting” ribbon 113 in the operation area 112 is selected, and the “lighting” tab 114 is further selected. Then, the direction and brightness of each illumination light are set in the “epi-illumination” setting field 115 provided in the upper stage of the “illumination” tab 114 and the “transmission illumination” setting field 116 provided in the lower stage. For example, when the “ON” button 117 in the “epi-illumination” setting field 115 is pressed, the ring illumination is turned on, and the brightness is designated from 0 to 255. The brightness is specified by a numerical value or a slider. The image is bright when the light intensity value is large, and dark when it is small. When the “ring illumination” button 118 is pressed, the entire circumference of the annular ring illumination is turned on. When the “ring irradiance” button 119 is pressed, only a part of the annular illumination is turned on. By irradiating illumination light from an oblique direction, for example, it is possible to observe with emphasis on scratches and irregularities on the surface of the observation object. On the other hand, in the “transmission illumination” setting field 116, similarly, when the “ON” button 120 is pressed, the transmission illumination is turned on, and the brightness is designated by a numerical value or the slider 121. In this example, ring illumination is turned on and transmitted illumination is turned off. However, the balance can be adjusted by turning on both illuminations according to the purpose of observation.
(Brightness setting screen 122)

When the “illumination” tab 114 is selected in the operation area 112 from the illumination switching screen 110 in FIG. 4, the screen is switched to the brightness setting screen 122 in FIG. 5. On this screen, the shutter speed (exposure time) and gain at the time of imaging by the camera unit can be adjusted as the brightness of the image. When the shutter speed is slow (exposure time is long), the image is bright, and when it is fast (short exposure time), the image is dark. Here, the shutter speed can be selected from radio, auto, manual, supercharge, or preset. When the shutter gain value is increased, the image becomes brighter, and when the shutter gain value is decreased, the image becomes darker. Here, auto, manual, or preset can be selected as the gain.
(Illumination light source 65)

  As the illumination light source 65, a semiconductor light emitting element such as a light emitting diode (LED) or a semiconductor laser (Laser Diode: LD) can be used. For example, as shown in FIG. 3, LEDs 65r, 65g, and 65b having wavelength ranges of R, G, and B are prepared, and illumination light is switched to red, green, and blue by turning on each LED, or white color is obtained by mixing these colors. Light can be obtained. Moreover, white LED can also be prepared separately. In particular, since the LED is excellent in ON / OFF responsiveness, there is an advantage that the measurement throughput can be improved. It also has features such as long life, low power consumption, low heat generation, and resistance to mechanical shock. Or it can also be set as the light source using wavelength conversion members, such as the fluorescent substance excited by the ultraviolet-ray of visible light, or visible light. Thereby, even one LED can emit white light. Further, an LED capable of emitting ultraviolet light or infrared light in addition to visible light can be used as a light source. For example, observation with infrared light is useful for analysis of defective products, tissue distribution of living tissue, and the like. The illumination light source is not limited to the semiconductor light emitting element, and a halogen lamp, a xenon lamp, an HID lamp, or the like may be used as a white light source that emits white light in a wide wavelength range. Moreover, it is good also as a light source which can irradiate not only visible light but infrared light. In particular, a halogen lamp is preferable because the wavelength range of the emission wavelength is wide. In addition to using a single light source, a plurality of light sources can be provided, and these can be turned on simultaneously to make mixed color light illumination light, or can be switched to illuminate.

  The illumination light source is not limited to the configuration built in the main body. For example, it can also be provided on the placement unit or the microscope lens unit. As a modification, the magnification observation apparatus 400 illustrated in FIG. 6 includes a transmission illumination light source 65B as an illumination light source on the placement unit 30 side. 7 includes an illumination light source 65C for coaxial epi-illumination and ring illumination on the microscope lens unit 20 side. With such a configuration, there is an advantage that it is not necessary to transmit illumination light from the main body side to the head side with an optical fiber or the like, and the configuration can be simplified by reducing the number of cables drawn to the outside. Also, inside the head portion side, the light from the illumination light source is branched by an optical fiber, and a semiconductor light emitting element such as a high-intensity LED may be provided for direct illumination. In particular, an LED is small in size and generates a small amount of heat as compared with a conventional halogen lamp or the like.

  In this way, by preparing an illumination light source that can emit red, green, and blue light, a filter such as a conventional white light source can be eliminated, and mechanical operation such as filter switching is not required, and only an electrical signal is generated. Stable and high-speed illumination light switching is realized. Further, since LEDs have a long life, maintenance work such as replacement of a light bulb can be saved. Furthermore, since the semiconductor light emitting element is smaller than the bulb, there is an advantage that a plurality of types of light emitting elements can be arranged in a space-saving manner. Furthermore, for example, by providing an infrared light emitting element or an ultraviolet light emitting element, it is possible to easily switch the illumination light to not only visible light but also infrared light, ultraviolet light, and the like. In addition, the cooling fan can be reduced in size or omitted with low power consumption, and excellent in quietness. In this way, an illumination light source including a plurality of light emitting elements having different wavelength ranges can be controlled by the illumination light selecting means 87, and a light emitting element having a desired wavelength range can be selected and turned on to emit illumination light.

In addition to the three primary colors RGB, these complementary colors (for example, cyan, magenta, and yellow) can be used as appropriate for the illumination light source and illumination filter means. In addition, a filter that transmits ultraviolet light or infrared light can be used as a filter.
(Coaxial epi-illumination observation)

A sectional view of the head portion 4 is shown in FIG. The head unit 4 includes a coaxial epi-illumination unit 62 for irradiating the observation target with the coaxial epi-illumination light, and a camera unit 10 having an imaging device that receives reflected light of the illumination light irradiated by the coaxial epi-illumination unit 62. The objective lens unit 25 optically coupled to the camera unit 10 with the optical axis aligned, and the phase delay element 90 disposed with the optical axis aligned with the objective lens unit 25 are provided. The illumination unit 60 includes a coaxial incident illumination unit 62 and a ring illumination unit 63. The head unit 4 includes a camera unit 10, a polarization beam splitter 28, and an objective lens unit 25. These are optically coupled in a state where the optical axes AX coincide with each other, and constitute an imaging optical system. In the objective lens unit 25, a phase delay element 90 is disposed on the optical axis AX. On the other hand, the ring illumination light is directly applied to the observation object S without being introduced into the imaging optical system. The phase delay element 90 may be a λ / 4 plate, a λ plate, a (1/2) λ plate, a (3/4) λ plate, a (5/8) λ plate, etc. Four plates are used. Note that the λ / 4 plate is preferably arranged to be inclined with respect to the optical axis AX so that reflection does not occur at this boundary surface.
(Support base 40)

An example of the external configuration of the imaging system 1 of the magnification observation apparatus 100 is shown in FIG. The imaging system 1 shown in this figure includes a placement unit 30 on which the observation object S is placed and a support base 40 that supports the head unit 4. The support base 40 includes a stage fixing mechanism 42 that holds the mounting unit 30 in a horizontal plane or a state in which the mounting unit 30 can move up and down, and a head tilting mechanism 44 that tilts the head unit 4 while holding the mounting unit 30. . The stage fixing mechanism 42 and the head tilting mechanism 44 are fixed to the base portion 41. The base portion 41 is formed in a flat plate shape, so that the support base 40 can be stably provided.
(Stage fixing mechanism 42)

The stage fixing mechanism 42 fixes the mounting unit 30 to the support base 40 through one or more moving mechanisms that can move the mounting unit 30 in the horizontal plane (XY axis direction) and in the vertical direction (Z axis direction). ing. Specifically, here, as a moving mechanism, a Z-axis direction moving mechanism (first focus adjustment unit) for moving the mounting unit 30 in the Z-axis direction, and a mechanism for moving the mounting unit 30 in the XY-axis direction. An XY axis movement mechanism and a rotation movement mechanism for rotating the placement unit 30 in the θ direction can be used. In the example shown in FIG. 9, the lower stage elevator 35 is realized by the slider 32 fixed to the base 41 so as to be movable up and down as the Z-axis moving mechanism, and further, the intermediate stage fixed on the slider 32 as the rotational moving mechanism. The mounting portion 30 can be rotated by the connecting portion 34, and the mounting portion 30 can be moved in the XY-axis direction by an XY stage fixed on the intermediate connecting portion 34 as an XY axis moving mechanism.
(Head tilt mechanism 44)

  On the other hand, the head tilting mechanism 44 tilts the head unit 4 with respect to the mounting unit 30, as shown in the perspective view of FIG. A moving part 46 and a head fixing part 48 for fixing the head part 4 to the swinging part 46 are provided. The oscillating portion 46 includes an oscillating column 47 provided in a posture protruding upward from the base portion 41, and an oscillating shaft 45. The head fixing portion 48 includes a head arm 49 that fixes the head portion 4 to the swing column 47 in a substantially parallel posture. The swing column 47 is provided with a swing shaft 45 at the lower end, and is supported by the base portion 41 so as to turn around the swing shaft 45. The head arm 49 is fixed by clamping the swing column 47 at an intermediate position from the upper portion of the swing column 47 so as to hold the head unit 4 above the placement unit 30. A fixing mechanism for fixing the head unit 4 is provided at the tip of the head arm 49. Here, the fixing mechanism is formed in a ring shape surrounding the outer periphery of the head portion 4, and the head portion 4 is inserted into the center of the ring shape, and is fixed by being screwed with a set screw from a plurality of surrounding positions.

  On the upper surface of the base portion 41, a block 41a that extends downward is fixed, and a bearing portion 41b is formed above the block 41a. The bearing portion 41b includes a pair of guide portions 41c that are fixed apart from each other, and the pair of guide portions 41c are formed in a concave shape in a side view. Each guide portion 41c opens a circular hole formed with an axis parallel to the Y-axis direction as a central axis. A rocking shaft 45 is fitted in these holes along the Y-axis direction. In this example, a scale is provided on the swing shaft 45 so that the angle at which the head portion 4 is swung can be seen with the scale.

  By tilting the head unit 4 with respect to the mounting unit 30 by the head tilting mechanism 44, tilt observation in which the observation object S is observed from an oblique direction can be performed. In particular, the head unit 4 can be observed from either the left or right direction by swinging the head unit 4 from the vertical position and swinging the pivot shaft 45 as the rotation axis, and the observation freedom from different viewpoints can be increased. It becomes possible. In such tilted observation, eucentric observation is required in which the visual field does not change even when the head unit 4 is tilted. For this reason, in tilt observation, it is desirable to adjust the height of the mounting portion 30 in advance so that the observation surface of the observation object S coincides with the center of the swing shaft 45.

Further, as shown in the perspective view of FIG. 11, the magnifying observation apparatus 200 has the first objective lens portion 25 </ b> A and the second objective lens portion 25 </ b> B provided at the tip of the head portion 4 on a surface for swinging the head portion 4. An objective lens switching means 26 is provided for switching by swinging in a vertical plane. Thus, when the objective lens unit 25 is switched in a state where the head unit 4 is tilted, the objective lens unit 25 is switched when the objective lens unit 25 is tilted by making the swing surface of the head unit 4 orthogonal to the swing surface for switching the objective lens unit 25. A situation in which the tip of the lens comes into contact with the observation object can be avoided. At this time, the objective lens portions are designed in advance so that the lengths are equal.
(Camera unit 10)

The head unit 4 includes a camera unit 10 having an image sensor and a microscope lens unit 20 that is detachably attached to the tip of the camera unit 10. The camera unit 10 includes an imaging element 12 that electrically reads reflected light incident through the imaging optical system 11 from the observation object S illuminated by the illumination unit 60. In this example, the imaging device 12 uses a CMOS, but other light receiving devices such as a CCD can also be used. In addition to the objective lens unit 25, the microscope lens unit 20 includes a lens body 21 and a mount unit 22 that is attached to an end surface of the lens body 21 and forms a lens connection surface. The mount portion 22 is electrically connected to the microscope lens portion 20 via a flexible lens side cable 24. Thereby, the lens identification information of the microscope lens unit 20 is sent to the lens side connection terminal of the mount unit 20 via the lens side cable 24.
(Display unit 52)

  Further, such image data and setting contents held in the storage unit 53 can be displayed on the display unit 52. The display unit 52 can use a monitor such as a CRT, a liquid crystal display, or an organic EL. In addition, an operation unit 55 is connected to the control unit 51 for a user to perform various operations. The operation unit 55 is an input device such as a console or a mouse. In this example as well, the display unit and the operation unit can be integrated with the main body unit 50 or can be external members. Furthermore, if a display part is comprised with a touch panel, a display part and an operation part can also be comprised integrally.

  Here, the operation of the lower stage elevator 35 will be described. The main body unit 50 inputs control data related to the control of the stepping motor 37 to the motor control circuit 36, whereby the optical axis direction of the mounting unit 30 and the head unit 4 having the imaging optical system 11 and the imaging element 12. The relative distance at, here, the height in the z direction is changed. Specifically, the main body 50 controls the rotation of the stepping motor 37 by inputting control data necessary for controlling the lower stage elevator 35 to the motor control circuit 36, and the height z ( z position) is moved up and down. The stepping motor 37 generates a rotation signal corresponding to the rotation. Based on the rotation signal input via the motor control circuit 36, the main body 50 determines the height z of the mounting unit 30 as information regarding the relative distance between the mounting unit 30 and the imaging optical system 11 in the optical axis direction. Remember. The placement unit 30 functions as an observation positioning unit that positions the observation position with respect to the observation object S.

  Needless to say, the lower stage elevator 35 is not limited to such an electric type, and may be manually raised and lowered.

  Furthermore, in the present embodiment, not only the relative distance in the optical axis direction between the mounting unit 30 and the imaging optical system 11 is changed by changing the height of the mounting unit 30, but also the height of the imaging optical system, That is, the height of the head part 4 can also be changed. The head unit 4 is connected to the main body unit 50 and the cable unit 3. Thereby, the data acquired by the head part 4 is sent to the main body part 50 via the cable part 3, and a required process can be performed on the main body part 50 side.

  The image sensor 12 can electrically read the amount of received light for each pixel arranged two-dimensionally in the x and y directions. The image of the observation object S formed on the image sensor 12 is converted into an electrical signal in accordance with the amount of received light in each pixel of the image sensor 12, and further converted into digital data in the image sensor control circuit 13. The main body 50 uses the digital data converted by the image sensor control circuit 13 as the received light data D in a plane (x and y directions in FIG. 2) substantially perpendicular to the optical axis direction (z direction in FIG. 2). The information is stored in the storage unit 53 together with pixel arrangement information (x, y) as the two-dimensional position information of the observation object S. Here, the in-plane substantially perpendicular to the optical axis direction does not need to be a plane strictly forming 90 ° with respect to the optical axis, and the shape of the observation object S is determined by the resolution of the imaging optical system and the imaging element. Any observation surface may be used as long as it is within a recognizable inclination range.

In the above description, an example in which the observation object S is placed on the placement unit 30 is shown as an example of the placement unit 30. For example, instead of the placement unit, an arm is attached and the observation target is attached to the tip of the arm. It can also be set as the structure which fixes the thing S. FIG. Further, the head unit 4 can be used by being attached to the camera attachment unit 43, and can be arranged at a desired position and angle by a method such as hand-holding so as to be detachable.
(Control unit 51)

  The control unit 51 controls the captured observation image to be displayed after being converted to a resolution that can be displayed by the display unit 52. In the magnifying observation apparatus 100 of FIG. 1, the camera unit 10 displays an observation image obtained by imaging the observation object S with the imaging element 12 on the display unit 52. In general, the performance of an image sensor such as a CMOS or CCD often exceeds the display capability of the display unit, so in order to display a captured observation image on a single screen, the resolution is displayed on a single screen by thinning the image. Reduced to the possible size and reduced. When the reading resolution when reading with the camera unit 10 is the first resolution, the display unit 52 displays the second resolution lower than the first resolution.

Furthermore, when still images of observation images are continuously captured and displayed on the display unit 52, the captured images may be displayed by switching them continuously to display them as if they were moving images. Such a continuous shooting mode can be switched to normal still image shooting and display mode by the control unit 51. In addition, the pixel shifting function can also be used during such continuous shooting.
(Simple imaging condition generation function)

  When observing an observation object using the magnifying observation apparatus 100, it is necessary to set an imaging condition for acquiring an image. For example, when there are a plurality of illumination units, the imaging conditions include selection of illumination light, type and direction of illumination light, shutter speed (exposure time) of the camera unit, screen brightness and contrast, white balance, or after imaging Examples of post-processing include various imaging parameters such as various types of image processing such as various filters (here, “post-processing parameters after imaging” are also referred to as “imaging parameters”). As an example, FIG. 12 shows a user interface screen of the white balance setting screen 124 for setting the white balance. The white balance, that is, the color of the image is adjusted on the white balance setting screen 124.

  Setting these imaging conditions individually takes time. In addition, since some imaging parameters are correlated, it may be difficult for a novice user to know which imaging parameter has to be adjusted in order to obtain a desired image. Therefore, the magnifying observation apparatus according to the present embodiment simply generates a plurality of provisional imaging conditions that combine various imaging parameters in advance, and further displays a list of simple images acquired under each simple imaging condition. A simple imaging condition setting function is provided. According to this, by allowing the user to select a desired simple image from the list-displayed simple images, the simple imaging condition that acquired the simple image can be set as a regular imaging condition. Even a user who is not familiar with the operation can easily obtain an image visually close to a desired image. In addition, each imaging parameter can be finely adjusted with respect to the selected simple imaging condition, thereby obtaining an advantage that the imaging condition setting operation can be easily performed. Such a simple imaging condition generation function is realized by the simple imaging condition generation unit 89c of the control unit 51.

A plurality of different simple imaging conditions generated by the simple imaging condition generation unit 89c are set from the control unit to the illumination unit and the camera unit, and each simple image is easily captured. Since the simple image captured here is for the purpose of displaying a list as a list for comparison with the user, it is not necessary to acquire a fine image, and simple imaging is sufficient. Specifically, the resolution and frame rate are reduced or the calculation processing for image generation is simplified, so that the image can be obtained in a shorter time than normal imaging. Thereby, a plurality of simple images with different simple imaging conditions can be acquired in a short time (sometimes referred to as a preview in the sense of preliminary imaging). The simple imaging condition generation unit 89c can make the impression of the obtained simple image stand out by setting the imaging parameters whose appearance effects are easily changed.
(List display function)

  Further, the magnification observation apparatus 100 has a list display function for displaying a list of simple images that are simply acquired under a plurality of different simple imaging conditions generated by the simple imaging condition generation unit 89c in a list display area of the display unit. ing. An example of the list display is shown in the list display screen 130 of FIG. In the example of FIG. 13, in order to execute the list display function, the “image quality improvement” ribbon 131 in the operation area 112 is selected, and the “optimum image selection” tab 132 is further selected. The display area 111 is switched to the list display area 134 by pressing an “execute optimum image” button 133 provided in the upper part of the “optimum image selection” tab 132. In the list display area 134, simple images captured under each simple imaging condition are displayed side by side. In this example, nine simple imaging conditions are generated by the simple imaging condition generation unit 89c, and nine simple images captured simply under each simple imaging condition are displayed. Each simple image is subjected to different image processing and lighting effects, and the user selects a desired simple image according to the observation purpose. In the example of FIG. 13, nine list display images 136 similar to the list display area 134 are also displayed in the operation area 112. Since the arrangement of the list display images 136 matches the arrangement of the list display areas 134, the user determines a desired simple image while comparing each simple image in the larger list display area 134, and is at a corresponding position. An image is selected from the list display image 136 in the operation area 112 by a mouse click or the like. As a result, a simple imaging condition corresponding to the selected simple image is called, and this simple imaging condition is input as a normal imaging condition. Further, the user can further finely adjust the imaging conditions as necessary.

  In the example of FIG. 13, when the “image setting” tab 138 is selected, the list display screen 130 is switched to the image setting screen 140 of FIG. Here, fine adjustment of edge enhancement, gamma correction, offset, and monochrome setting can be performed as imaging parameters. In this example, edge enhancement, gamma correction, and offset are adjusted with a slider, and monochrome settings are selected with a radio button to select the degree of shadow enhancement. Here, the edge enhancement is an imaging parameter for enhancing the outline portion of the image to make it easy to observe scratches and fine objects. The larger the value, the stronger the edge enhancement is applied. The gamma correction is an adjustment to the luminance histogram for each pixel included in the image, and is used for enhancing contrast and gradation. Further, the offset adjustment is also a luminance histogram adjustment, which is used when making the entire image brighter or darker. Further, according to the setting conditions here, a new simple imaging condition can be generated and the list display function can be executed again. Further, by pressing the “Adjust HDR parameter” button provided at the bottom of the list display image 136 from the screen of FIG. 13, the screen shifts to a detailed composite parameter setting screen for generating an HDR image.

  By displaying a list of a plurality of simple images as shown in FIG. 13, the difference between the simple images becomes clear, which is convenient for selecting a desired image. On the other hand, when trying to display a plurality of simple images on one screen, the size of one simple image displayed is reduced. For this reason, it is difficult to see details of the simple image. Therefore, a magnification adjusting unit 89a for changing the display magnification of the simple image and a display position changing unit 89b for moving the display position of the simple image are provided, and the user adjusts so as to display a portion of interest in the image. it can.

  However, if there are many simple images displayed in a list, there is a problem that it is necessary to change the display magnification and the display position for all the simple images in order to perform contrast observation, which is troublesome. Therefore, by automatically changing the display magnification and display position changed for one simple image to other simple images, changes made to only one simple image are automatically made. Reflected in other simple images, the work for aligning the field of view can be greatly saved, and comparative observation can be performed efficiently.

  Note that the enlargement / reduction operation of the display magnification by the magnification adjustment unit 89a is linked with the operation of the mouse wheel of the mouse as the input unit on the list display area 134, thereby improving usability. Further, the movement of the display position by the display position changing means 89b can be moved by an operation by a mouse drag on the list display area 134.

  In this example, the list display area is provided on the main display unit. However, the present invention is not limited to this configuration. For example, a dedicated monitor for displaying a list may be prepared separately from the normal display unit. Needless to say, it can be done.

Further, the number of simple images displayed in the list display area 134 is nine in the example of FIG. 13, but is not limited to this, and can be set to any number such as two, four, or sixteen.
(Wide area image display function)

  Furthermore, by displaying a wide-field image with a wide field of view captured at a lower magnification than each simple image displayed in the list display area 134, the observation position of the simple image can be easily confirmed. An example in which a wide area image display area 150 for displaying such a wide area image is displayed is shown in FIG. The wide area image display area 150 displays the wide area image WI captured at the same magnification as the simple image or at a lower magnification. Further, an area corresponding to the display content of the simple image displayed in the list display area 134 is displayed in a frame shape on the wide area image display area 150. This makes it possible to confirm which part of the observation object is currently enlarged as a simple image with the display frame 152 of the wide-area image WI with a wider field of view, and to easily grasp the overall positional relationship. Furthermore, when the user changes the display magnification or display position of the simple image, the size of the display frame 152 is changed following this change. Thereby, it becomes possible to confirm sequentially without losing sight of the positional relationship after the change.

  An image diagram of the wide area image display area 150 is shown in FIG. By operating the display frame 152 in the wide area image display area 150, the display of each simple image displayed in the list display area 134 on the left side can be moved. That is, when the display frame 152 is dragged with the mouse and moved on the wide area image display area 150, the display content of the list display area 134 is also updated so that the image in the area surrounded by the display frame 152 becomes a simple image. Is done. Furthermore, the display magnification of the simple image can be changed by enlarging or reducing the display frame while maintaining the aspect ratio of the display frame. In particular, since the display contents of a plurality of simple images are updated at once by the operation of the display frame, there is an advantage that comparative observation of the enlarged simple images displayed in the list display area 134 can be easily performed.

  Note that the wide-area image WI desirably has a wide field of view, and an image captured at a low magnification is preferably used, but the same image as the simple image may be used. In this case, it is possible to confirm the position being enlarged only when the simple image is enlarged. For example, an entire image (an unenlarged image) of an arbitrary simple image selected in the list display area on the left side may be displayed as a wide area image.

  A wide area image display area 150 shown in FIG. 15 is displayed in a separate window on the display unit, and can be moved to an arbitrary position. In addition, the enlarged image display area can be provided in a window common to the list display area, without being limited to the configuration of displaying in a separate window.

  Furthermore, in the list display area 134 for displaying a plurality of simple images, not only simple images subjected to image processing and illumination effects for the same field of view, but also a plurality of arbitrary images can be displayed. For example, the above-mentioned display magnification interlocking function and display position interlocking function are also used when observing changes over time by comparing the observation object currently being observed and the observation object previously photographed under the same photographing conditions. It can be suitably used. Alternatively, it can also be used for applications in which it is desired to compare and observe the same part of a non-defective product and a non-defective product. Alternatively, it is possible to display an image (moving image) updated in real time. As described above, the image displayed in the list display area 134 is not limited to the simple image, and may be another image.

  In addition, the configuration is not limited to the configuration in which the display magnification and the field of view are linked to all the images displayed in the list display area 134, but the linkage function is activated for any image, and the other images are linked. It is also possible to turn off the function. Further, the combination and position of images that activate the interlock function may be arbitrarily designated. For example, it is suitable for a case where it is desired to perform a comparative observation by magnifying different parts at different magnifications, or when there are a plurality of parts to be comparatively observed. FIG. 17 shows such a display example. Here, the upper two images in the list display area 134 are displayed as a wide area display and the interlocking function is turned off. On the other hand, the lower two images are enlarged images of the upper wide image, and the interlock function is turned on for the lower two images. If the display magnification of either one of the lower images is changed, it will follow this. Then, the display magnification of other images is also automatically changed.

  The magnifying observation apparatus, the magnifying image observing method, the magnifying image observing program, and the computer-readable recording medium of the present invention can be suitably used for a microscope, a reflection / transmission type digital microscope, a digital camera, and the like. In addition, when the present technology is applied to a fluorescence microscope, reflected light or transmitted light from an observation target with respect to illumination light can be read as excitation light.

DESCRIPTION OF SYMBOLS 100, 200, 400, 500 ... Magnification observation apparatus 1 ... Imaging system 2 ... Control system 3 ... Cable part; 3b ... Optical cable 4 ... Head part 10 ... Camera part 11 ... Imaging optical system 12 ... Imaging element; Element control circuit; 14 ... Optical path shift means 16 ... Upper stage elevator 20 ... Microscope lens part; 21 ... Lens body 22 ... Mount part; 24 ... Lens side cable 25 ... Objective lens part; 25A ... First objective lens; Second objective lens 26 ... objective lens switching means 28 ... polarization beam splitter 29 ... illumination connection part; 29b ... connection connector 30 ... mounting part 32 ... slider 34 ... intermediate connection part 35 ... lower stage elevator 36 ... motor control circuit 37 ... Stepping motor 40 ... Support base 41 ... Base; 41a ... Block; 41b ... Bearing part; 41c ... Guide part 42 ... Stage fixing mechanism 43 Camera mounting portion 44 ... head tilting mechanism 45 ... oscillating shaft 46 ... oscillating portion 47 ... oscillating column 48 ... head fixing portion 49 ... head arm 50 ... main body portion; 51 ... control portion; 52 ... display portion 53 ... memory 54: Interface; 55 ... Operation unit 60 ... Illumination unit 61 ... Illumination switching unit 62 ... Coaxial epi-illumination unit 63 ... Ring illumination unit 64 ... Transmission illumination unit 65 ... Illumination light source; 65r, 65g, 65b ... LED
65B ... Transmitted illumination light source; 65C ... Ring illumination light source 66 ... Illumination light control unit 81 ... Optical path shift control unit 82 ... Image selection unit 83 ... Imaging condition setting unit 84 ... Automatic synthesis unit 85 ... Image synthesis unit 86 ... Wavelength selection Means 87 ... Illumination light selection means 88 ... Imaging element selection means 89a ... Magnification adjustment means 89b ... Display position change means 89c ... Simple imaging condition generator 89d ... Interlock adjustment means 90 ... Phase delay element 110 ... Illumination switching screen 111 ... Display area 112 ... Operation area 113 ... "Brightness / Illumination" ribbon 114 ... "Illumination" tab 115 ... "Illumination" setting field 116 ... "Transmission illumination" setting field 117 ... "ON" button 118 ... "Ring illumination" button 119 ... "Ring shot" button 120 ... "ON" button 121 ... Slider 122 ... Brightness setting screen 124 ... White balance setting screen 130 ... List display screen 131 ... "Image quality improvement" ribbon 132 ... "Optimum image selection" tab 133 ... "Execute optimum image" button 134 ... List display area 136 ... List display image 138 ... "Image setting" tab 140 ... Image setting screen 150 ... Wide-area image display area 152 ... Display frame S ... Observation object AX ... Optical axis WI ... Wide-area image

Claims (12)

Illuminating means for irradiating the observation object with illumination light;
Imaging means for receiving reflected light or transmitted light of the illumination light irradiated by the illumination means;
An imaging condition setting unit for setting an imaging condition including at least an illumination condition for illuminating illumination light with the illumination unit as an imaging condition for capturing an image with the imaging unit;
A display unit for displaying an image captured under the imaging condition set by the imaging condition setting unit;
A magnification adjusting means for enlarging or reducing the display magnification of the image displayed on the display unit;
Display position changing means for moving the display position of the image displayed on the display unit;
A simple imaging condition generation unit for generating a plurality of different provisional imaging conditions;
A list display area for displaying a list of simple images acquired using the illumination unit and the imaging unit, respectively, with a plurality of different simple imaging conditions generated by the simple imaging condition generation unit;
In a state where a plurality of simple images are displayed in a list in the list display area,
When the magnification of one simple image is adjusted by the magnification adjusting means, the magnification of the other simple image is also adjusted in conjunction with this,
Linked adjustment that adjusts the display magnification and the display position of each simple image so that when the display position of one simple image is changed by the display position changing means, the display position of another simple image is also changed in conjunction therewith. Means,
A magnifying observation apparatus comprising: The magnification observation apparatus according to claim 1, further comprising:
Aside from the list display area, a wide area image display area for displaying a wide area image acquired at the same magnification or lower magnification than each simple image displayed in the list display area,
An area corresponding to the display content of each simple image displayed in the list display area is displayed in a frame shape on the wide area image display area, and when the display magnification or display position of the simple image is changed, A magnifying observation apparatus configured to be able to change the size of the frame following the change. The magnification observation apparatus according to claim 1 or 2,
The interlock adjustment unit can individually set ON / OFF of display magnification interlock and / or display position interlock for any arbitrary simple image displayed in the list display area. Magnifying device. The magnification observation apparatus according to any one of claims 1 to 3,
An enlargement observation apparatus configured to update display contents of an arbitrary simple image displayed in the list display area in real time. The magnification observation apparatus according to any one of claims 1 to 4,
The magnifying observation apparatus, wherein the illuminating unit includes a coaxial epi-illuminating unit that irradiates the object to be observed with coaxial epi-illumination as illumination light from the direction of the optical axis of the imaging unit. A magnification observation device according to any one of claims 1 to 5,
The illumination means is
An enlargement observation apparatus comprising: a ring illumination unit for irradiating an observation target with ring-shaped illumination light; or a transmission illumination unit for transmitting transmitted light as illumination light from the back of the observation target. The magnification observation apparatus according to any one of claims 1 to 6,
The magnification observation apparatus, wherein the imaging condition includes any of the type of illumination means, the direction of illumination light, and the exposure time. A magnification observation device according to any one of claims 1 to 7,
The magnification observation apparatus, wherein the list display area is included in a display area displayed on the display unit. An enlarged image observation method of irradiating an imaging target with illumination light, detecting a received light amount of reflected light or transmitted light of the illumination light, and acquiring an image of the imaging target,
A step of easily generating a plurality of different conditions as imaging conditions including at least the conditions of illumination means for irradiating illumination light to the observation target
Controlling the illumination means under the plurality of simple imaging conditions, and displaying a plurality of simple images simply obtained by irradiating illumination light in a list display area of a display unit;
When a simple image displayed in the list is selected and the display magnification of the simple image is changed by the magnification adjustment unit, a plurality of other simple images displayed in the list are also displayed at the same display magnification. Changing the display magnification of each simple image in conjunction with each other so that it can be displayed,
An enlarged image observation method comprising: The enlarged image observation method according to claim 9, further comprising:
When a simple image displayed in the list is selected and the display position of the simple image is moved by the display position changing unit, a plurality of other simple images displayed in the list are displayed in the same display position. The enlarged image observation method characterized by including the process of changing the display position of each simple image interlockingly so that it may become. An enlarged image observation program that irradiates an imaging target with illumination light, detects the amount of reflected light or transmitted light of the illumination light, and acquires an image of the imaging target.
A simple imaging condition generation function for easily generating a plurality of different conditions as imaging conditions including at least the conditions of the illumination means for illuminating the observation target with illumination light;
The illumination unit is controlled under a plurality of simple imaging conditions generated by the simple imaging condition generation function, and a plurality of simple images obtained simply by irradiating illumination light are displayed in a list in a list display area of the display unit Function
When a simple image displayed in the list is selected and the display magnification of the simple image is changed by the magnification adjustment unit, a plurality of other simple images displayed in the list are also displayed at the same display magnification. A function to change the display magnification of each simple image in conjunction with each other so that it can be displayed,
When a simple image displayed in the list is selected and the display position of the simple image is moved by the display position changing unit, a plurality of other simple images displayed in the list are displayed in the same display position. A function to change the display position of each simple image in conjunction with
A wide-area image display function for displaying a wide-area image with a wide field of view acquired at a lower magnification than each simple image displayed in the list display area;
An enlarged image observation program for causing a computer to realize a function of displaying an area corresponding to display contents of each simple image displayed in the list display area in a frame shape on the wide area image display area.   The computer-readable recording medium which recorded the program of Claim 11, or the recorded apparatus.