JP2015127661A - Displacement measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a displacement measuring apparatus having an advantage in downsizing the apparatus, and capable of measuring displacement of a structure in each direction.SOLUTION: The displacement measuring apparatus includes: a refraction member 104 having a front surface 104b composed of an inclined plane crossing a direction represented by an arrow d, and a rear surface 104a composed of a plane parallel to the direction represented by the arrow d; and a laser irradiation device 105 for irradiating the front surface 104b with a first laser beam and a second laser beam. The refraction member 104 is fixed to one side where the displacement can relatively occur, and the laser irradiation device 105 is fixed to the other side where the displacement can relatively occur. A CCD image sensor 103 has a light receiving surface 103a for receiving the first laser beam and the second laser beam refracted at the front surface 104b and emitted from the rear surface 104a, and detects a first light receiving position where the first laser beam is received at the light receiving surface 103a, and a second light receiving position where the second laser beam is received at the light receiving surface 103a.

Description

  The present invention relates to a displacement measuring device that measures the displacement of an object, and more particularly, to a displacement measuring device that measures interlayer displacement of a structure or local rotational deformation of a structure.

Currently, there are displacement measuring devices that measure the displacement of structures against disturbances such as earthquakes. A displacement measuring device is described in Patent Document 1, for example.
The displacement measuring device described in Patent Document 1 is an optical displacement measuring device that optically measures the displacement of a building, and applies an irradiation light source and light irradiated by the irradiation light source to each floor (layer) of the building. A light receiving member for receiving light. The optical displacement measuring device described in Patent Document 1 continuously transmits the irradiation position of the irradiation light in the light receiving unit to the measurement error correction device. The measurement error correction device corrects an error due to local deformation included in the transmitted light receiving position and detects an interlayer displacement of the building.

JP2013-122428A

  However, the displacement measuring device described in Patent Document 1 described above needs to include a measurement error correction device for correcting an error due to local deformation. Patent Document 1 describes that a measurement error correction apparatus includes a structural analysis model data storage unit and performs a computer simulation using the structure storage data to perform a measurement error. A measurement error correction apparatus having such a function requires a memory for storing structure storage data and a CPU capable of executing simulation. For this reason, the optical measurement device described in Patent Document 1 including a measurement error correction device leaves room for improvement in terms of downsizing and cost of the device.

  Furthermore, the measurement error correction apparatus described in Patent Document 1 obtains a measured displacement a predetermined number of times corresponding to, for example, the duration of an earthquake, and generates a time history of the measured displacement and a time history of the estimated displacement. Then, the measurement error is corrected repeatedly by simulation until the estimated displacement time history converges. Such a configuration described in Patent Document 1 cannot correct the displacement error while the displacement is applied to the building, and cannot accurately measure the accurate displacement.

As a configuration for dynamically measuring the displacement of a building, there is one that detects a rotational deformation angle using a tilting device such as a gyro sensor. However, since the gyro sensor has a configuration in which the axis moves in all directions, it is difficult to measure the displacement in a specific direction.
The present invention has been made in view of the above points, and an object of the present invention is to provide a displacement measuring device that can measure the displacement of a structure for each direction and is advantageous for downsizing the device scale. To do.

  In order to solve the above-described problem, one aspect of the displacement measuring apparatus of the present invention is a refraction having a surface made of a slope intersecting with one direction for detecting displacement and a back surface made of a plane parallel to the one direction. A member, a light irradiation unit that irradiates the first light and the second light toward the surface of the refraction member, and the first light and the second light that are refracted at the surface and emitted from the back surface A first light receiving position where the first light is received on the light receiving surface and a second light receiving position for detecting the second light receiving position where the second light is received on the light receiving surface, The refraction member is fixed to one side where the displacement can relatively occur, and the light irradiation unit is fixed to the other side where the displacement can occur relatively.

In one embodiment of the displacement measuring apparatus of the present invention, in the above invention, the light irradiation unit includes the first light having a first wavelength and the second light having a second wavelength different from the first wavelength. , Is irradiated.
In one embodiment of the displacement measuring apparatus of the present invention, in the above invention, the light irradiation unit irradiates the first light at a first angle with respect to the surface, and the second light with respect to the surface. Irradiation is performed at a second angle smaller than the first angle.

  Moreover, one aspect of the displacement measuring apparatus of the present invention is directed to the refractive member having a surface made of a plane parallel to one direction and a back surface made of a plane parallel to the surface, and to the surface of the refractive member. A light irradiating unit that irradiates a first light having a first wavelength and a second light having a second wavelength different from the first wavelength, the first light refracted on the front surface and emitted from the back surface; A light receiving surface that receives the second light, and detects a first light receiving position where the first light is received on the light receiving surface and a second light receiving position where the second light is received on the light receiving surface. And the refractive member is fixed to one side where the rotational displacement about the one direction as a central axis can be relatively generated, and the light irradiation unit can relatively generate the rotational displacement. It is fixed to the other side.

  Also, one aspect of the displacement measuring apparatus of the present invention is a first refractive member having a surface made of an inclined surface intersecting a direction in which displacement is detected, a back surface made of a plane parallel to the direction, and parallel to the direction. A second refractive member having a surface composed of a plane and a back surface composed of a plane parallel to the surface; first light having a first wavelength; and second light having a second wavelength different from the first wavelength. A light irradiating unit that irradiates the first light and divides the first light to generate third light and fourth light, and divides the second light to generate fifth light and sixth light. An optical system for directing light and the fifth light or the fourth light and the sixth light toward the surface of the first refractive member or the surface of the second refractive member; and the first refractive member or the second refractive Refracting on the surface of the member, the back surface of the first refractive member or the first bending A third light-receiving surface having a light-receiving surface that receives the third light, the fourth light, the fifth light, and the sixth light emitted from the back surface of the member, wherein the third light is received by the light-receiving surface; A light receiving portion that detects a position, a fourth light receiving position where the fourth light is received, a fifth light receiving position where the fifth light is received, and a sixth light receiving position where the sixth light is received; The first refracting member is fixed to one side where the displacement can relatively occur, and the second refracting member is fixed to one side where the rotational displacement with one direction as a central axis can occur relatively. The light irradiating unit is fixed to the other side where the displacement can be relatively generated and the rotational displacement can be relatively generated.

  The present invention can provide a displacement measuring apparatus that can measure the displacement of a structure for each direction and is advantageous for downsizing the apparatus.

It is a figure for demonstrating the whole structure of the displacement meter apparatus of 1st Embodiment of this invention. It is a figure for demonstrating the refractive member shown in FIG. It is a figure for demonstrating operation | movement of the displacement measuring device when an interlayer displacement arises in the plane direction shown in FIG. 2 by external force. It is a figure for demonstrating the point which appears on the surface of the refractive member shown in FIG. It is a figure for demonstrating the method of calculating a displacement amount from the distance between two points shown in FIG. It is a figure for demonstrating the refractive member which has multiple layers from which the material of 1st Embodiment of this invention differs. It is a figure for demonstrating the displacement of a rotation direction. It is a figure for demonstrating the refractive member of 2nd Embodiment of this invention. It is a figure for demonstrating the method to calculate the rotation angle of 2nd Embodiment of this invention. It is the figure which illustrated rotation angle measurement data of a 2nd embodiment of the present invention. It is the figure which illustrated the displacement measuring device of 3rd Embodiment of this invention.

Hereinafter, the displacement measuring apparatus of 1st Embodiment, 2nd Embodiment, and 3rd Embodiment of this invention is demonstrated.
[First Embodiment]
Configuration FIG. 1 is a diagram for explaining the overall configuration of the displacement meter device of the first embodiment. The displacement measuring apparatus according to the first embodiment is an apparatus that measures an interlayer displacement, which is a displacement in a surface direction of a floor (hereinafter referred to as “floor slab”) surface 101 caused by an external force. Although the interlayer displacement includes components in a plurality of directions, in the first embodiment, the displacement measuring device measures the interlayer displacement in the direction indicated by the arrow d shown in FIG. 1 (hereinafter referred to as “plane direction”). The case will be described.

The displacement measuring device shown in FIG. 1 includes a refractive member 104, a laser irradiation device 105, and a CCD (Charge Coupled Device) image sensor 103. The refracting member 104 has a front surface (surface 104b shown in FIG. 2) made of a slope intersecting with the direction indicated by the arrow d for detecting displacement, and a back surface made of a plane parallel to one direction (back surface 104a shown in FIG. 2). And have. The laser irradiation apparatus 105 irradiates a first laser beam _{p r} and the second laser beam _{p g} toward the surface 104b of the refractive member 104. The CCD image sensor 103 is refracted at surface 104b, has a light receiving surface for receiving the first laser beam _{p r} and the second laser beam _{p g} emitted from the back surface 104a (light-receiving surface 103a shown in FIG. 2), the light-receiving surface the second laser beam p _g at the first light receiving position and the light-receiving surface 103 of the first laser beam pr is received to detect the second light receiving position of light received at 103a.

  In the first embodiment, the refractive member 104 is fixed to the side of the ceiling surface 102 where relative displacement can occur. The laser beam irradiation device 105 is fixed to the floor slab surface 101 side where relative displacement can occur. The first embodiment is not limited to the configuration in which the laser irradiation device 105 is provided on the floor slab surface 101 and the CCD image sensor 103 is provided on the ceiling surface. In the first embodiment, the laser irradiation device 105 may be provided on the ceiling surface 102 and the CCD image sensor 103 may be provided on the floor slab surface 101. Furthermore, the positional relationship between the laser irradiation device 105 and the CCD image sensor 103 may be any as long as they are fixed so as to face the position where they can be relatively displaced.

  Among the configurations described above, in the first embodiment, the CCD image sensor 103 is a two-dimensional CCD image sensor. In a two-dimensional CCD image sensor, for example, a plurality of phototransistors that convert received light into electric charges and a transfer unit that transfers electric charges are arranged on a plane. In the first embodiment, the entire surface that receives light from a plurality of phototransistors is referred to as a light receiving surface 103 a of the CCD image sensor 103.

However, the light receiving section of the first embodiment is not limited to the CCD image sensor, and may be any configuration as long as it is an element capable of measuring light intensity.
The laser irradiation apparatus 105 includes a laser light source that outputs laser light having a wavelength of about 700 nm and a laser light source that outputs laser light having a wavelength of about 550 nm. Laser light having a wavelength of about 700 nm becomes laser light having a red color, and laser light having a wavelength of about 500 nm becomes laser light having a green color. The first laser beam p _r shown in FIG. 1 is a laser beam having a red, second laser beam p _g is a laser light having a green color.

Furthermore, the displacement measuring apparatus according to the first embodiment includes a distance detection unit 100 that detects a distance between the first light receiving position and the second light receiving position. The distance detection unit 100 has two points on the back surface 104a from which the first laser light _pr and the second laser light _pg are emitted from the distance between the first light receiving position and the second light receiving position output from the CCD image sensor 103. And a small computer having a function of outputting the detected distance between two points. In the first embodiment, software for calculating the distance between the first light receiving position and the second light receiving position and the amount of interlayer displacement is installed in a general-purpose computer and functions as the distance detection unit 100.

FIG. 2 is a view for explaining the refractive member 104 shown in FIG. Refractive member 104 is refracted at refraction angle corresponding to the first laser beam p _r and the second laser beam p _g to each wavelength. The refracting member 104 is a triangular prism made of transparent optical glass, and is arranged so that the back surface 104a parallel to the direction of the arrow d overlaps the light receiving surface 103a. The refracting member 104 has a surface 104b that is an inclined surface that intersects the direction of the arrow d. As shown in FIG. 2, when the x, y, and z directions are defined, the inclination of the surface 104b is expressed such that the z component changes in the y direction and the z component has a constant value in the x direction. The

The first laser beam _{p r} and the second laser beam _{p g} from the surface 104b is incident on the refractive member 104 is refracted at refraction angle corresponding to the wavelength of each at the surface 104b. Then, due to a difference in refraction angle, a first laser beam p _r exit position and distance [Delta] L _t on the outgoing position of the second laser beam p _g of the rear surface 104a occurs. The first laser beam _pr and the second laser beam _pg are emitted from the back surface 104a of the refractive member 104 and received by the light receiving surface 103a. The CCD image sensor 103, the output position of the first laser beam _{p r} and an exit position of the second laser beam _{p g,} the light receiving position of the first laser beam _{p r} and the second laser beam _{p g} on the light receiving surface 103a . Receiving position of the first laser beam _{p r} and the second laser beam _{p g} is, CCD image sensor 103 is detected by imaging the rear surface 104a.

-Operation Hereinafter, the operation in which the displacement measuring apparatus of the first embodiment measures the interlayer displacement will be described in detail.
FIG. 3 is a diagram for explaining the operation of the displacement measuring apparatus when an interlayer displacement occurs in the plane direction shown in FIG. 2 due to an external force. In FIG. 3, the floor slab surface 101 shown in FIG. 1 moves from a position indicated by I (position I) to a position indicated by II (position II) relative to the ceiling surface 102 shown in FIG. Moving. In FIG. 3, the displacement amount of the interlayer displacement generated at this time is indicated as δ in the drawing.

Here, in FIG. 3, the point at which the first laser beam _pr and the second laser beam _pg are incident on the refractive member 140 at the position I is a point a, and the first laser beam _pr and the second laser beam p at the position II. A point where _g is incident on the refractive member 140 is a point a ′. Further, in FIG. 1, an intersection point between the straight line passing through the point a and perpendicular to the back surface 104a and the back surface 104a is a point b, and an intersection point between the straight line passing through the point b and perpendicular to the back surface 104a and the back surface 104a is a point b ′. .

Further, in FIG. 3, the second laser beam p _g incident points on the rear surface 104a of the first laser beam p _r incident from the point a to the refractive member 140 is emitted point c, from point a to the refractive member 140 is emitted A point on the back surface 104a to be set is a point d. Further, in FIG. 3, the second laser beam p incident 'a point on the back surface 104a of the first laser beam p _r incident on the refractive member 140 from the emitting point c' point a, from the point a 'to the refractive member 140 A point on the back surface 104a from which _g is emitted is defined as a point d ′. In the first embodiment, the angle formed by the back surface 104a and the front surface 104b is θ. Further, in FIG. 3, an intersection point between the surface 104b and a straight line passing through the points b, c, d, b ′, c ′, d ′ is defined as a point o.

The first laser beam p _r incident from the point a to the refractive member 104 is refracted at the refractive index n _r which corresponds to the wavelength at the surface 104b, it is emitted from the point c. The second laser beam _{p g} incident from the point a to the refractive member 104 is refracted at the refractive index _{n g} corresponding to the wavelength at the surface 104b, and emitted the distance [Delta] L _t1 from d point spaced from point c. A point a 'first laser beam p _r incident on the refractive member 104 from is refracted at the refractive index n _r which corresponds to the wavelength at the surface 104b, the point c' is emitted from. 'The second laser beam p _g is incident on the refractive member 104 from refracted at the refractive index n _g corresponding to the wavelength at the surface 104b, the point c' point a is emitted from a point at a distance [Delta] L _t2 from d ' . “L” is the distance from point b to point o in the figure.

  4A and 4B are diagrams for explaining points c, d, c ', and d' appearing on the back surface 104a of the refractive member 104. FIG. 4A is a diagram for explaining points c and d appearing before the interlayer displacement occurs (the laser irradiation device 105 is at position I), and FIG. 4B is a diagram after the interlayer displacement occurs ( It is a figure for demonstrating the points c 'and d' which appear in the laser irradiation apparatus 105 in the position II).

As shown in FIG. 4 (a), in the previous story displacement, bright spot with a peak of light intensity appears at the point c by the first laser beam p _r. Also, a bright spot with a peak of light intensity appears at the point d by the second laser beam p _g. Then, after the interlayer displacement, as shown in FIG. 4 (b), the bright spot appears having a peak of light intensity to the point c 'by the first laser beam p _r. Moreover, the bright point appears having a peak of light intensity to the point d 'by the second laser beam p _g. The CCD image sensor 103 shown in FIG. 1 and the like images a bright spot on the back surface 104 a of the refractive member 104. The position at which the first laser beam _pr and the second laser beam _pg are received on the light receiving surface 103 is detected by imaging. Data of the captured image is output to the distance detection unit 100.

The distance detection unit 100 detects the distance between the points c and d on the back surface 104a and the distance between the points c ′ and d ′ from the center of the bright spot imaged by the CCD image sensor 103, and outputs the detected distance. To do. Then, the displacement amount δ shown in FIG. 3 is calculated from the detected distance.
However, the first embodiment is not limited to the configuration in which the distance detection unit 100 calculates the displacement amount δ, and the distance between the points c and d on the back surface 104a and the points c ′ and d ′ from the image data. It may have only a function of detecting the distance. The distance detection unit 100 outputs the distance between the points c and d and the distance between the points c ′ and d ′ to another computer, a removable memory, etc., and calculates the displacement δ by the other computer. May be. Furthermore, the distance may be output by printing the distance on paper or displayed on a display screen (not shown).

FIG. 5 is a diagram for explaining a method of calculating the displacement amount δ from the detected distance between the points c and d and the distance between the points c ′ and d ′. Before and after the interlayer displacement, a first laser beam _{p r} and the second laser beam _{p g,} incident on the surface 104b of the refractive member 104 at equal incident angle theta. The first laser beam _{p r} incident on the refractive member 104 is refracted at refraction angle theta _r at the surface 104b. The second laser beam _{p g} is refracted at refraction angle theta _g at the surface 104b. The refraction angles θ _r and θ _g are values determined by the refractive index corresponding to the wavelength of the laser light. Here, the refractive index of the first laser beam _{p r n r,} the refractive index of the second laser beam _{p g} and _{n g,} refraction angle theta _r of the first laser beam pr, refraction angle of the second laser beam pg and theta _g, refractive index _{n r} for the refractive member 104 of the first laser beam _{p r,} between the refractive index _{n g} to the refractive member 104 of the second laser beam _{p g,} the following equation (1), (2 ) Note that equation (1), in (2), theta is the angle of incidence with respect to the first laser beam _{p r,} the surface 104b of the second laser beam _{p g.}

θ _r = n _r · θ (1)
θ _g = n _g · θ Equation (2)
Before the interlayer displacement (before displacement), there is a relationship of the following expression (3) between the distance l _r1 between the points b and c and the refraction angle θ _r . From the relationship shown in Expression (3), the distance l _r1 is obtained as in Expression (3-i).

tan (θ _r −θ) = l _r1 / (L · tan θ) (3)
l _r1 = L tan θ · tan (θ _r −θ) Equation (3-i)
Further, before the displacement, there is a relationship of the following formula (4) between the distance l _g between the points b and d and the refraction angle θ _g . From the relationship shown in Equation (4), the distance l _g1 is obtained as in Equation (4-i).

tan (θ _g −θ) = l _g1 / (L · tan θ) Equation (4)
l _g1 = L · tan θ · tan (θ _g −θ) Equation (4-i)
Note that in both formulas (3-i) and (4-i), “L” is the distance from point b to point o of the refractive member 104.
By taking the difference between the distance l _r1 and the distance l _g1 , ΔL _t1 shown in FIG. 5 is obtained as in equation (5-i). ΔL _t1 is a distance between the points c and d detected by the distance detector 100 shown in FIG.

ΔL _t1 = lg ₁ −lr ₁
= L · tan θ {tan (θ _g −θ) −tan (θ _r −θ)} Expression (5-i)
Similarly, after the displacement, a distance l _r2 between the points b ′ and c ′ and a distance l _g2 between the points b ′ and d ′ are expressed by the following expressions (3-ii) and (4-ii): Is required.
l _r2 = L · tan θ · tan (θ _r −θ) (formula (3-ii))
l _g2 = L · tan θ · tan (θ _g −θ) Equation (4-ii)
By taking the difference between the distance l _r2 and the distance l _g2 , ΔL _t2 shown in FIG. 5 is obtained as in equation (5-ii). ΔL _t2 is a distance between the points c ′ and d ′ detected by the distance detection unit 100 shown in FIG.

ΔL _t2 = lg ₂ −lr ₂
= (L−δ) tan θ {tan (θ _g −θ) −tan (θ _r −θ)} Expression (5-ii)
Between ΔL _t1 , ΔL _t2, and the displacement amount δ shown in FIG. 5, there is a relationship shown in Expression (6).
ΔL _t1 −ΔL _t2 = δ · tan θ {tan (θ _g −θ) −tan (θ _r −θ)} (6)
From the equation (6), the displacement amount δ can be obtained as in the following equation (7).

δ = (ΔL _t1 −ΔL _t2 ) / (tan θ {tan (θ _g −θ) −tan (θ _r −θ)})
... Formula (7)
In the above equation (7), the values of θ, θ _r , and θ _g are known. In the first embodiment, the values of ΔL _t1 and ΔL _t2 shown in Expression (7) can be obtained from the distance detection unit 100. The displacement measurement apparatus of the first embodiment can measure the displacement amount δ by sequentially substituting the values of ΔL _t1 and ΔL _t2 detected by the distance detection unit 100 into the equation (7).

  According to the first embodiment, since the displacement amount δ can be calculated by sequentially substituting the distance obtained from the captured image into the relatively simple expression (7), the displacement is added to the structure. The displacement amount δ can be dynamically measured during the period. The fact that the displacement amount δ can be calculated dynamically is effective in experiments conducted by applying an external force to the structure artificially. That is, if the displacement of the structure can be detected dynamically in the experiment, the experimenter can adjust the degree of external force applied to the structure while monitoring the displacement applied to the structure.

Further, in the first embodiment, the displacement amount δ can be calculated by an operation that requires a smaller load on the calculation than in the simulation. For this reason, the first embodiment is more advantageous for downsizing the apparatus scale than the configuration in which the error is corrected by simulation.
In the first embodiment, only the displacement amount of the displacement generated in the plane direction (the direction of the arrow d) shown in FIGS. 1 and 2 can be extracted and measured.

  Further, in the first embodiment, the displacement of the structure is detected using the distance (difference) between the light receiving position point of the first laser light and the light receiving position of the second laser light. For this reason, 1st Embodiment can amplify and visualize the displacement which arose in the structure, and can make it easy to detect a displacement amount. Furthermore, the light receiving position of the first laser light and the light receiving position of the second laser light similarly vary due to local deformation of the structure. For this reason, 1st Embodiment can obtain the displacement amount with little error by the local deformation | transformation of a structure.

  The first embodiment of the present invention is not limited to the configuration described above. For example, in the above configuration, the first laser beam and the second laser beam are irradiated by a laser irradiation apparatus having two laser light sources. However, the laser irradiation apparatus according to the first embodiment is not limited to the configuration having two laser light sources, and the laser irradiation has one light source that can alternately switch the wavelength of the laser light at a relatively high speed. It may be a device.

In the first embodiment described above, the first laser light is red laser light, and the second laser light is green laser light. However, the first embodiment is not limited to such a configuration. For example, the first laser light and the second laser light may have any wavelength as long as they can be imaged. However, the values of ΔL _t1 and ΔL _t2 become larger as the difference between the wavelength of the first laser beam and the wavelength of the second laser beam becomes larger, so that measurement becomes easier.

In addition, when sufficient values of ΔL _t1 and ΔL _t2 cannot be obtained due to a difference in wavelength between the first laser beam and the second laser beam, a refractive member made of a material having a large refractive index corresponding to the wavelength of the second laser beam. Can be considered. Further, the refractive member of the first embodiment is not limited to one made of a single material, and may have a plurality of parts made of different materials.

FIG. 6 is a diagram for explaining a refractive member 114 having a plurality of layers made of different materials. The refractive member 114 has a three-layer structure of layers 114a, 114b, and 114c made of members having different absolute refractive indexes. The layers 114a, 114b, and 114c are stacked from the front surface to the back surface of the refractive member. Then, the layer 114a, the refractive index _{n r1} for the first laser beam _{p r,} have, and has a refractive index _{n g1} to the second laser beam _{p g.} Layer 114b has a refractive index _{n r2} with respect to the first laser beam _{p r,} have, and has a refractive index _{n g2} to the second laser beam _{p g.} The layer 114c has a refractive index _{n r3} with respect to the first laser beam _{p r,} have, and has a refractive index _{n g3} for the second laser beam _{p g.} According to the refraction member 114, the first laser light and the second laser light can be refracted three times, and the first laser light and the second laser light can be largely refracted from the front surface to the back surface of the refraction member 114.

Further, by using a material having a large difference between the refractive index for the first laser beam and the refractive index for the second laser beam for the layers 114a, 114b, and 114c, the refractive member 114 can be formed between the points c and d and the point c ′. , D ′ can be made large.
In the first embodiment described above, the first laser beam and the second laser beam having different wavelengths are used to generate distances between the points c and d and between the points c ′ and d ′. However, the first embodiment is not limited to such a configuration. For example, the first laser beam and the second laser beam may be laser beams having the same wavelength. In such a case, the laser beam irradiation apparatus irradiates the first laser beam with a predetermined angle (first angle) with respect to the surface of the refractive member, and the second laser beam with respect to the surface from the first angle. Is irradiated at a small angle (second angle). In this way, the first laser light and the second laser light having the same wavelength can be refracted at different refraction angles in the refractive member. At this time, equations (1) to (7) cannot be applied as they are, but if the first angle and the second angle are θ1 and θ2, respectively, and the corresponding part of equations (1) to (7) is read, the amount of displacement Can be calculated.

[Second Embodiment]
Next, a displacement measuring apparatus according to a second embodiment of the present invention will be described. The displacement measuring apparatus according to the second embodiment detects a displacement in the rotational direction of a structure. In the description of the second embodiment, the same components as those described in the first embodiment are denoted by the same reference numerals, and the description thereof is partially omitted.

  FIGS. 7A and 7B are diagrams for explaining the displacement in the rotational direction. FIG. 7A shows the laser irradiation apparatus 105 placed on the floor slab surface 101 before the displacement occurs. FIG. 7B shows a state in which a displacement in the rotational direction has occurred on the floor slab surface 101 due to the application of an external force. An axis s shown in FIGS. 7A and 7B represents an axis parallel to the floor slab surface 101, and an axis t represents an axis perpendicular to the floor slab surface 101.

  In the second embodiment, when the axis s is tilted to the axis s ′ and the axis t is tilted to the axis t ′, the laser beam irradiation device 105 is displaced in the rotational direction along with the displacement of the floor slab surface 101. The displacement in the rotational direction of the floor slab surface 101 and the laser beam irradiation device 105 occurs with the axis u shown in the figure as the central axis. In FIGS. 7A and 7B, the central axis of the displacement is shown as an axis in the depth direction of the paper for the sake of convenience, but the central axis may be an axis toward the front side of the paper.

Configuration FIGS. 8A and 8B are views for explaining a refractive member 804 according to the second embodiment. FIG. 8A shows a state in which the first laser beams _{pr and pg} are irradiated from the laser irradiation device 105 toward the refractive member 804 in a state where the floor slab surface 101 is not displaced. In FIG. 8B, the floor slab surface 101 is displaced in the rotational direction, and the first laser beam _pr, p is applied to the refractive member 804 in a state where the laser irradiation device 105 is rotated about the axis u by the rotational angle α. _The state which is irradiating _g is shown.

As shown in FIGS. 8A and 8B, the refractive member 804 has a flat plate shape and is parallel to the axis u to which the first laser beam p _r and the second laser beam _pg are irradiated. A back surface 804a, which is a flat surface, and a front surface 804b parallel to the back surface 804a. As shown in FIG. 8 (a), in a state where displacement is not generated, the first laser beam p _r and the second laser beam p _g is incident perpendicular to the surface 804b. At this time, the first laser beam _{p r} and the second laser beam _{p g,} the process proceeds to the refractive member 804 without being refracted at the surface 804b.

As shown in FIG. 8 (b), when the floor slab surface 101 is rotated by the rotation angle alpha, the first laser beam p _r, the second laser beam p _g, relative to the surface 804b in a state inclined angle of rotation alpha Irradiated. At this time, the first laser beam p _r, the second laser beam p _g, refracted at the surface 804b, is refracted at refraction angle corresponding to each wavelength. The difference in the refraction angle corresponding to the wavelength, the position where the first laser beam p _r is emitted from the back surface 804a, and a position where the second laser beam p _g is emitted from the back surface 804a are different. Thus, the first laser beam p _r, 2 single bright spot at a position on the back surface 804a of the second laser beam p _g is emitted occurs.

In the second embodiment, CCD image sensor 103 shown in FIG. 1, the imaging first laser beam _{p r} emitted from the back surface 804a of the refractive member 804, the two bright points caused by the second laser beam _{p g.} The imaging, the first laser beam _{p r,} the position where the second laser beam _{p g} is received in the light-receiving surface 103a is detected. The CCD image sensor 103 outputs the data of the captured bright spot image to the distance detection unit 100 shown in FIG. The distance detection unit 100 detects points f and g from the center of the bright spot imaged by the CCD image sensor 103. The distance between the points f and g is denoted as ΔL _t3 in FIG.

FIG. 9 is a diagram for explaining a method for calculating the rotation angle α from the distance between the detected points f and g. If the displacement in the rotational direction occurs, the first laser beam _{p r,} the second laser beam _{p g,} incident from the point e to the surface 804b of the refractive member 804. Then, the first laser beam _{p r} refracted at refraction angle theta _r at the surface 804b, the second laser beam _{p g} refracted at refraction angle theta _g. The first laser beam _{p r} refracted is emitted from the point f of the back surface 804a, the second laser beam _{p g} emitted from point g of backside 804a.

From the above, ΔL _t3 and the refraction angles θ _r and θ _g have the relationship shown in the following formula (8). In Equation (8), t indicates the thickness of the refractive member 804.
ΔL _t3 = t (tan θ _g −tan θ _r ) (8)
Further, the refractive index in the refractive member 804 of the first laser beam p _r n _r, and the refractive index in the refractive member 804 of the second laser beam p _g and n _g, the relationship of the refractive index and the refractive angle, as follows It is expressed in

θ _r = n _r · α Equation (9-i)
θ _g = n _g · α Equation (9-ii)
In Expression (8), Expression (9-i), and (9-ii), ΔL _t3 is obtained by measurement. Further, the thickness t and the refractive indexes n _r and _ng of the refractive member 804 are known values. From the above, in the second embodiment, the rotation angle α corresponding to ΔL _t3 is calculated in advance and stored as rotation angle measurement data in a memory (not shown) of the distance detection unit 100. In the second embodiment, the distance detection unit 100 determines the rotation angle α by comparing the detected ΔL _t3 value with the rotation angle measurement data.

FIG. 10 is a diagram illustrating rotation angle measurement data. In FIG. 10, the vertical axis represents ΔL _t3 and the horizontal axis represents the rotation angle α. The distance detection unit 100 compares ΔL _t3 with the vertical axis of the rotation angle measurement data, and detects the rotation angle α corresponding to the detected ΔL _t3 . Then, the detected rotation angle α is output.
The second embodiment described above can extract and measure only the amount of displacement generated in the rotational direction.

[Third Embodiment]
Moreover, the displacement measuring device of this invention is not restricted to what comprises separately the measuring device which measures the displacement of a plane direction, and the apparatus which measures the displacement of a rotation direction as above mentioned. In the third embodiment, a displacement measuring apparatus that measures both the displacement in the plane direction and the displacement in the rotation direction will be described.
FIG. 11 is a diagram illustrating a displacement measuring apparatus according to the third embodiment. 11, components similar to those illustrated in FIGS. 1 and 8 are denoted by the same reference numerals, and description thereof is omitted.

Displacement measurement apparatus of the third embodiment irradiation, the refractive member 104,804, a CCD image sensor 103 fixed superimposed the refractive member 104,804, the first laser beam _{p r} and the second laser beam _{p g} The laser irradiation device 105 that performs the above operation and the first laser beam _pr that is emitted from the laser irradiation device 105 are divided to generate a third laser beam p _r1 and a fourth laser beam _pr2 , and the laser irradiation device 105 emits the laser beam. It was by dividing the second laser beam _{p g} generates a fifth laser beam _{p g1} and sixth laser light _{p g2,} toward the third laser beam _{p r1} and fifth laser beam _{p g1} on the surface 804b, the fourth laser A half mirror 111 and a mirror 112 for directing the light _pr2 and the sixth laser light _pg2 toward the surface 104b.

Half mirror 111, a third laser beam _{p r1} by dividing the first laser beam _{p r,} to generate a fourth laser beam _{p r2,} reflecting the fourth laser beam _{p r2} while transmitting the third laser beam _{p r1} To do. Further, the half mirror 111, the fifth laser beam _{p g1} by dividing the second laser beam _{p g,} generates a sixth laser beam _{p g2,} sixth laser beam _{p g2} with transmitting the fifth laser beam _{p g1} Reflect. A third laser beam _{p r1} which is transmitted and the fifth laser beam _{p g1} toward the surface 804b of the reflecting member 804. The reflected fourth laser beam _pr2 and sixth laser beam _pg2 are directed to the mirror 112, reflected by the mirror 112, and directed to the surface 104b of the reflecting member 104.

According to the displacement measuring apparatus of the third embodiment, the other refracting members, the half mirror 111 and the mirror 112 are added to the displacement measuring apparatus shown in the first embodiment or the second embodiment, and the displacement and rotation direction in the plane direction are added. Both displacements can be measured simultaneously.
Note that the displacement measuring device of the third embodiment irradiates the surface 804b with the third laser beam p _r1 and the fifth laser beam _pg1, and applies the fourth laser beam p _r2 and the sixth laser beam _pg2 to the surface 104b. It is not limited to the structure which irradiates toward. Displacement measurement apparatus of the third embodiment, the third laser beam _{p r1,} the fifth laser beam _{p g1} irradiated toward the surface 104b, toward the fourth laser beam _{p r2,} the sixth laser beam _{p g2} on the surface 804b May be irradiated.

  Furthermore, the third embodiment is not limited to the configuration in which the CCD image sensor 103 images both the refractive members 104 and 804. For example, in the third embodiment, a CCD image sensor that images the refractive member 104 and a CCD image sensor that images the refractive member 804 may be provided separately. When the CCD image sensor 103 captures both of the refractive members 104 and 804, for example, the distance detection unit 100 illustrated in FIG. 1 scans the captured image from one end, and first appears red. The distance between the center of one bright spot and the center of the next green bright spot is detected, and the distance between the center of the next red bright spot and the center of the next green bright spot is detected. Also good.

  The displacement measuring device of the present invention can be applied to any field that measures displacement generated in a structure when an external force is applied to the structure. Further, the displacement measuring device of the present invention can be applied to measuring “sway” applied to an article during conveyance of the article.

DESCRIPTION OF SYMBOLS 100 Distance detection part 101 Floor slab surface 102 Ceiling surface 103 CCD image sensor 103a Light-receiving surface 104,114,804 Refraction member 104a, 804a Back surface 104a, 804a Surface 105 Laser irradiation apparatus 111 Half mirror 112 Mirror 114a, 114b, 114c layer

Claims (5)

A refracting member having a surface composed of a slope intersecting with one direction for detecting displacement, and a back surface composed of a plane parallel to the one direction;
A light irradiation unit configured to irradiate the first light and the second light toward the surface of the refractive member;
A light receiving surface that refracts on the front surface and receives the first light and the second light emitted from the back surface; and a first light receiving position and a light receiving surface on which the first light is received on the light receiving surface. A light receiving portion for detecting a second light receiving position where the second light is received,
The refracting member is fixed to one side where the displacement can occur relatively, and the light irradiation unit is fixed to the other side where the displacement can occur relatively.   The displacement measurement according to claim 1, wherein the light irradiation unit irradiates the first light having a first wavelength and the second light having a second wavelength different from the first wavelength. apparatus.   The light irradiation unit irradiates the first light with respect to the surface at a first angle, and irradiates the second light with respect to the surface at a second angle smaller than the first angle. The displacement measuring apparatus according to claim 1. A refractive member having a surface composed of a plane parallel to one direction and a back surface composed of a plane parallel to the surface;
A light irradiation unit that irradiates a first light having a first wavelength toward the surface of the refractive member and a second light having a second wavelength different from the first wavelength;
A light receiving surface that refracts on the front surface and receives the first light and the second light emitted from the back surface; and a first light receiving position and a light receiving surface on which the first light is received on the light receiving surface. A light receiving portion for detecting a second light receiving position where the second light is received,
The refracting member is fixed to one side where the rotational displacement about the one direction as a central axis can relatively occur, and the light irradiation unit is fixed to the other side where the rotational displacement can occur relatively. A displacement measuring device characterized by that. A first refracting member having a surface composed of a slope intersecting with a direction in which displacement is detected, and a back surface composed of a plane parallel to the direction;
A second refracting member having a surface composed of a plane parallel to the direction and a back surface composed of a plane parallel to the surface;
A light irradiation unit that irradiates a first light having a first wavelength and a second light having a second wavelength different from the first wavelength;
The first light is divided to generate third light and fourth light, and the second light is divided to generate fifth light and sixth light, and the third light and fifth light are An optical system for directing the fourth light and the sixth light toward the surface of the second refractive member toward the surface of the first refractive member;
Refracted on the surface of the first refractive member, refracted on the surface of the third light, the fifth light, and the second refractive member emitted from the back surface of the first refractive member, and the second refractive A light receiving surface that receives the fourth light and the sixth light emitted from the back surface of the member; a third light receiving position where the third light is received on the light receiving surface; and the fourth light is received. A light receiving portion that detects a fourth light receiving position, a fifth light receiving position where the fifth light is received, and a sixth light receiving position where the sixth light is received;
The first refracting member is fixed to one side where the displacement can relatively occur, and the second refracting member is fixed to one side where the rotational displacement with one direction as a central axis can occur relatively. The light irradiation unit is fixed to the other side where the displacement can be relatively generated and the rotational displacement can be relatively generated.

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