JP2015114633A - Light irradiation apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light irradiation apparatus capable of radiating a substantially parallel light beam with uniform and high luminance.SOLUTION: A light irradiation apparatus for radiating a light beam to a rectangular irradiation area on an irradiation object includes: a plurality of luminous elements arrayed like a square lattice or a triangular lattice on a substrate; a lens unit having a plurality of first lens to form the light beam emitted from the luminous element into the light beam with a predetermined spread angle; a light guide member for mixing and guiding the light beam emitted from the lens unit; a second lens for forming the light beam from each luminous element emitted from the light guide member into a substantially parallel light beam; a third lens for enlarging the light beam emitted from the second lens at a predetermined magnification so as to be condensed on the irradiation object; and an aperture diaphragm having a circular opening with an optical axis of a light guide part as a center and disposed between the light guide member and the second lens or between the second lens and the third lens.

Description

  The present invention relates to a light irradiation apparatus that can irradiate a rectangular irradiation area on an irradiation object with substantially parallel light, and more particularly to a light irradiation apparatus that can irradiate an irradiation object with uniform and high illuminance.

  2. Description of the Related Art Conventionally, as a light source device (light irradiation device) mounted on a liquid crystal peripheral exposure device or the like, a light source device that irradiates a substantially parallel light in an ultraviolet wavelength range to a rectangular irradiation area on an irradiation object has been used. Yes. Such a light source device is described in Patent Document 1, for example.

  The light source device described in Patent Document 1 is a flat substrate on which a plurality of LEDs (Light Emitting Diodes) that emit ultraviolet light are mounted, and one non-uniform light beam that forms non-uniform luminous flux from the plurality of LEDs into parallel light. It is equipped with a spherical lens and a rectangular column-shaped translucent rod that mixes and emits ultraviolet light from an aspherical lens. The ultraviolet light that has become uniform light by the translucent rod is converted into a condenser lens, a relay lens, etc. Then, the resist in the irradiation area is exposed by projecting onto the rectangular irradiation area on the glass substrate.

JP 2007-041466 A

  According to the light source device described in Patent Document 1, ultraviolet light from a plurality of LEDs enters the light-transmitting rod and is mixed, so uniform and high-illuminance ultraviolet light can be obtained. However, in the light source device described in Patent Document 1, since the ultraviolet light from a plurality of LEDs is formed into parallel light by a single aspheric lens and guided to a translucent rod, a plurality of LEDs are mounted. There is a problem that the desired ultraviolet light cannot be obtained unless the alignment between the substrate, the aspherical lens and the translucent rod is accurately performed. In other words, if these positions are not accurately aligned, the ultraviolet light that has passed through the aspherical lens will not become parallel light and will not become uniform ultraviolet light, and there will be a problem of ultraviolet light from a plurality of LEDs. The problem arises that the desired illuminance cannot be obtained due to the portion being cut.

  The present invention has been made in view of such circumstances, and the object of the present invention is to provide a rectangular irradiation area on an irradiation object without requiring complicated alignment work of optical components. On the other hand, it is to provide a light irradiation apparatus capable of irradiating substantially parallel light with uniform and high illuminance.

  In order to achieve the above object, a light irradiation apparatus of the present invention is a light irradiation apparatus that irradiates light to a rectangular irradiation area on an irradiation object, and has an optical axis on a rectangular area on a substrate. Are arranged in a square lattice shape or a triangular lattice shape, the light emitting elements are arranged on the optical axis of each light emitting element, and the light emitted from the light emitting elements has a predetermined spread angle. A lens unit having a plurality of first lenses to be molded into light, a light guide member that mixes and guides light emitted from the lens unit, and an optical axis that is common to the optical axis of the light guide unit. The second lens for shaping the light from each light emitting element emitted from the optical member into substantially parallel light, and the optical axis common to the optical axis of the light guide unit, and the light emitted from the second lens A third lens that magnifies at a predetermined magnification and focuses on the object to be irradiated, and an optical axis of the light guide unit Having a circular opening to mind, and an aperture stop is disposed between the light guide member and between the second lens or the second lens and the third lens.

  According to such a configuration, since the plurality of first lenses are integrally fixed and supported by the lens unit, it is not necessary to perform position adjustment (alignment adjustment) between each light emitting element and each first lens. In addition, since the plurality of first lenses are integrally fixed and supported by the lens unit, the optical axis of the light emitting element and the first lens may be shifted, and unnecessary light different from the design value may be generated. Unnecessary light is removed by an aperture stop arranged in the optical path. For this reason, it becomes possible to irradiate the substantially parallel light of uniform and high illumination intensity with respect to the rectangular irradiation area on the irradiation object, without requiring the complicated alignment operation | work of an optical component.

  Further, the second lens can be configured by at least two lenses.

  Further, the second lens can be constituted by a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.

  Further, the third lens can be configured by at least two lenses.

  The third lens can be configured by a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.

  The light guide member is opposed to the lens unit, is opposed to the rectangular incident surface that takes in all the light from the plurality of light emitting elements, and the second lens, and emits light incident from the incident surface to the second lens. It is desirable that the glass rod has a rectangular column shape and has a rectangular exit surface.

  Moreover, it is desirable that the substantially parallel light emitted from the second lens is light having a spread angle of 25 ° or less.

  The light is preferably light in the ultraviolet wavelength region.

  The plurality of light emitting elements can be configured by n types of light emitting elements that emit light of n types (n is an integer of 2 or more) of different wavelengths.

  The plurality of light emitting elements are arranged in a first direction and a second direction orthogonal to the direction of the optical axis and orthogonal to each other, and each light emitting element has a substantially square outer shape when viewed from the direction of the optical axis. The LED (Light Emitting Diode) has a shape, and can be arranged so that two sides of the outer shape are parallel to the first direction.

  The plurality of light emitting elements are arranged in a first direction and a second direction orthogonal to the direction of the optical axis and orthogonal to each other, and each light emitting element has a substantially square outer shape when viewed from the direction of the optical axis. LED (Light Emitting Diode) having one of them, and can be arranged so that one diagonal line of the outer shape is parallel to the first direction.

  As described above, according to the present invention, uniform and high illuminance substantially parallel light is irradiated onto a rectangular irradiation area on an irradiation object without requiring complicated alignment work of optical components. A possible light irradiation device can be realized.

It is a schematic diagram which shows the structure of the light irradiation apparatus which concerns on embodiment of this invention. It is a figure which shows the structure of the LED unit with which the light irradiation apparatus which concerns on embodiment of this invention is equipped. It is a figure which shows the structure of the LED element with which the light irradiation apparatus which concerns on embodiment of this invention is equipped. It is a figure which shows the structure of the lens unit with which the light irradiation apparatus which concerns on embodiment of this invention is equipped. It is a figure which shows the structure of the glass rod with which the light irradiation apparatus which concerns on embodiment of this invention is equipped. It is an optical path figure of the ultraviolet light radiate | emitted from the glass rod with which the light irradiation apparatus which concerns on embodiment of this invention is equipped. It is a graph which shows the light quantity distribution on the irradiation target object W of the ultraviolet light radiate | emitted from the light irradiation apparatus which concerns on embodiment of this invention, and distribution of a light beam angle. It is a figure which shows the structure of the LED unit of the light irradiation apparatus which concerns on the modification of this invention. It is a figure which shows the structure of the LED unit of the light irradiation apparatus which concerns on the modification of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or an equivalent part in a figure, and the description is not repeated.

  FIG. 1 is a schematic diagram illustrating a configuration of a light irradiation apparatus 100 according to an embodiment of the present invention. The light irradiation apparatus 100 according to the present embodiment is incorporated in a liquid crystal peripheral exposure apparatus or the like, and has an ultraviolet wavelength range substantially shorter than a rectangular irradiation area on an irradiation object W (for example, a resist on a glass substrate). It is a device that emits parallel light.

  As shown in FIG. 1, the light irradiation device 100 includes an LED unit 110, a lens unit 120, a glass rod 130 (light guide member), a condenser lens 140 (second lens), an aperture stop 150, a relay lens. 160 (third lens) and a cylindrical case 101 for housing these components. The LED unit 110, the lens unit 120, the glass rod 130, the condenser lens 140, the aperture stop 150, and the relay lens 160 are arranged in order toward the irradiation target W with the optical axes aligned (that is, on the optical axis AX). Has been placed. In this embodiment, the working distance WD (distance from the case 101 to the irradiation object W) of the light irradiation device 100 is set to 125 mm, and light in the ultraviolet wavelength region emitted from the light irradiation device 100 is used. (Hereinafter referred to as “ultraviolet light”) is condensed so as to have a uniform light amount distribution on the working distance WD (details will be described later). In the present specification, the traveling direction of ultraviolet light emitted from the light irradiation device 100 (that is, the direction parallel to the optical axis AX) is defined as the Z-axis direction, and is orthogonal to the Z-axis direction and 2 orthogonal to each other. Two directions are defined as an X-axis direction and a Y-axis direction.

  FIG. 2 is a diagram illustrating a configuration of the LED unit 110 of the present embodiment. As shown in FIG. 2, the LED unit 110 of the present embodiment includes a plurality of LEDs arranged in a substantially square substrate 112 and a rectangular region 112 a on the substrate 112 with the optical axes aligned in the Z-axis direction. And an element 114 (light emitting element). The LED element 114 of this embodiment has a rectangular outer shape of 6.8 mm (length in the X-axis direction) × 6.8 mm (length in the Y-axis direction) (FIG. 3), and two sides thereof are in the X-axis direction. 6 rows (Y-axis direction) × 6 (X-axis direction) two-dimensional square lattices are arranged in the rectangular region 112 a and are electrically connected to the substrate 112. The board 112 is an electronic circuit board made of glass epoxy resin, ceramics, etc., and is connected to an LED drive circuit (not shown), and each LED element 114 receives a drive current from the LED drive circuit via the board 112. It comes to be supplied.

  FIG. 3 is a diagram illustrating a configuration of the LED element 114 of the present embodiment. As shown in FIG. 3, the LED element 114 of the present embodiment includes four LED chips 114a arranged in a square lattice pattern therein. When a driving current is supplied to each LED element 114, each LED chip 114a emits light with a light amount corresponding to the driving current, and ultraviolet light with a predetermined light amount is emitted from each LED element 114. In the present embodiment, each LED chip 114a is configured to emit ultraviolet light having a wavelength of 365 nm in response to a drive current supplied from the LED drive circuit. That is, ultraviolet light having a wavelength of 365 nm is emitted from each LED element 114 on the substrate 112 with a predetermined light amount.

  In addition, the drive current supplied to each LED element 114 is adjusted so that each LED element 114 of this embodiment may radiate | emit the ultraviolet light of a substantially uniform light quantity. As shown in FIG. 2, in this embodiment, the pitch PH in the X-axis direction and the pitch PV in the Y-axis direction of the LED elements 114 are both set to about 10 mm. Further, the LED unit 110 of the present embodiment is arranged in a case (not shown) so that the center C of the rectangular region 112a on the substrate 112 substantially coincides with the optical axis AX.

  FIG. 4 is a diagram illustrating a configuration of the lens unit 120 of the present embodiment. As shown in FIG. 4, the lens unit 120 of this embodiment includes a base plate 122 and a plurality of first lenses 124. The base plate 122 is a plate-like member for integrally fixing and supporting a plurality of first lenses 124. The base plate 122 has six rows (in the Y-axis direction) × 6 pieces (X-axis) to which the first lenses 124 are attached. (Axial direction) circular openings 122a are provided, and the first lens 124 is fitted and fixed in each opening 122a. In addition, as a method of fixing the first lens 124 to the base plate 122, a method in which the first lens 124 is sandwiched between the base plate 122 and a plate (not shown) substantially the same shape as the base plate 122, fitting, pressure bonding, adhesion, etc. It is possible to apply the method.

  The first lens 124 is a plano-convex lens that molds ultraviolet light emitted from the LED elements 114 into ultraviolet light having a predetermined spread angle, and the optical axis of each first lens 124 is substantially the same as the optical axis of each LED element 114. The position is adjusted so as to match. And the ultraviolet light which passed each 1st lens 124 is radiate | emitted toward the glass rod 130 of a back | latter stage (FIG. 1).

  As described above, in the lens unit 120 of the present embodiment, the plurality of first lenses 124 are integrally fixed and supported, and position adjustment (alignment adjustment) between each LED element 114 and each first lens 124 is performed. It is unnecessary. That is, if only the position adjustment of the LED unit 110 and the lens unit 120 is performed, the optical axis of each first lens 124 substantially coincides with the optical axis of each LED element 114, so that each first lens 124 corresponds to each LED element 114. The ultraviolet light from is efficiently taken (that is, wasted) and can be emitted toward the glass rod 130 at the subsequent stage. Here, in order for the optical axis of each first lens 124 to substantially coincide with the optical axis of each LED element 114, each LED element 114 needs to be accurately disposed at a predetermined position on the substrate 112. In addition, each first lens 124 needs to be accurately disposed at a predetermined position on the base plate 122. In practice, the manufacturing variation of the substrate 112, the LED element 114, the first lens 124, and the base plate 122 Due to assembly errors, it is difficult to accurately match the optical axes of all the LED elements 114 with the optical axes of all the first lenses 124. When the optical axis of the first lens 124 does not coincide with the optical axis of the LED element 114 (that is, when the optical axis is tilted or shifted), the ultraviolet light passing through the first lens 124 is desired. The lens unit 120 emits ultraviolet light having a wider divergence angle (hereinafter referred to as “unnecessary light”) than the predetermined divergence angle. The Therefore, in this embodiment, the aperture stop 150 is disposed in the optical path of ultraviolet light to solve this problem (details will be described later).

  As shown in FIG. 1, the ultraviolet light that has passed through each first lens 124 enters the incident surface 130 a of the glass rod 130 at the subsequent stage. FIG. 5 is a diagram showing the configuration of the glass rod 130 of the present embodiment. As shown in FIG. 5, the glass rod 130 is a light guide member made of square columnar glass, and has an incident surface 130a formed at one end surface and an output surface 130b formed at the other end surface. The glass rod 130 according to the present embodiment has a size of 58 mm (X-axis direction) × 58 mm (Y-axis direction) × 250 mm (Z-axis direction), and all ultraviolet light emitted from the lens unit 120 is incident on the surface. It is comprised so that it may inject into 130a. As described above, the ultraviolet light incident on the incident surface 130a of the glass rod 130 (that is, the ultraviolet light emitted from the lens unit 120) has a predetermined spread angle. The component ultraviolet light is guided while being reflected (that is, mixed), and ultraviolet light having a uniform light amount distribution is emitted from the emission surface 130b. In addition, since the glass rod 130 of the present embodiment has a quadrangular prism shape, the divergence angle of the ultraviolet light incident on the incident surface 130a is maintained also on the emission surface 130b, and from the emission surface 130b, ultraviolet light having a predetermined divergence angle ( That is, ultraviolet light having a spread angle substantially equal to the ultraviolet light emitted from the lens unit 120 is emitted toward the subsequent condenser lens 140, the aperture stop 150, and the relay lens 160.

  FIG. 6 is an optical path diagram of ultraviolet light emitted from the emission surface 130b of the glass rod 130 of the present embodiment. The condenser lens 140 and the relay lens 160 of the present embodiment are projection optical systems that project the image of the exit surface 130b at a predetermined magnification and project it onto the irradiation object W. As described above, the glass rod of the present embodiment. Since the ultraviolet light having a uniform light amount distribution is emitted from the 130 exit surface 130b, the irradiation target W is irradiated with the ultraviolet light having a uniform light amount distribution.

  As shown in FIGS. 1 and 6, the condenser lens 140 is a lens that molds ultraviolet light incident from the glass rod 130 into substantially parallel light. In this embodiment, it is composed of a pair of biconvex lenses 141 and 142, and when the ultraviolet light incident from the glass rod 130 passes through the pair of biconvex lenses 141 and 142, the spread angle is ± 14 ° or less in the Z-axis direction. It is molded into ultraviolet light having

  The ultraviolet light emitted from the condenser lens 140 passes through the aperture stop 150 and enters the relay lens 160. The aperture stop 150 of the present embodiment is a stop having a circular opening with a diameter of 86 mm at the center, and has a function of removing unnecessary light from the ultraviolet light emitted from the condenser lens 140.

  As described above, due to the effects of manufacturing variations and assembly errors of the substrate 112, the LED element 114, the first lens 124, and the base plate 122, the lens unit 120 is mixed with ultraviolet light having a predetermined spread angle, Ultraviolet light (that is, unnecessary light) having a wider spread angle than a predetermined spread angle is emitted. Such unnecessary light also passes through the glass rod 130 and the condenser lens 140. However, since the divergence angle of the unnecessary light is wider than a predetermined divergence angle, even if it passes through the condenser lens 140, the prescribed light (that is, the design value). (B) The spread angle is not more than ± 14 °. Then, when unnecessary light having a wide divergence angle is irradiated onto the irradiation object W in this way, there arises a problem that the uniformity of the light amount distribution is lowered. Therefore, in the present embodiment, the aperture stop 150 is disposed between the condenser lens 140 and the relay lens 160 so that unnecessary light is removed and a uniform light amount distribution can be obtained on the irradiation object W. doing. In other words, in the present embodiment, by arranging the aperture stop 150, the influence of manufacturing variations and assembly errors of the substrate 112, the LED element 114, the first lens 124, and the base plate 122 is canceled. Then, unnecessary light is removed by the aperture stop 150, and only ultraviolet light having a predetermined spread angle (that is, ultraviolet light having a spread angle of ± 14 ° or less in the Z-axis direction by the condenser lens 140) passes through the relay lens 160, The irradiation object W is irradiated.

  As shown in FIGS. 1 and 6, the relay lens 160 is a lens that enlarges ultraviolet light incident through the aperture stop 150 at a predetermined magnification and collects the light on the irradiation object W. In the present embodiment, it is composed of a pair of plano-convex lenses 161 and 162 arranged so that the convex surfaces face each other. When ultraviolet light incident through the aperture stop 150 passes through the pair of plano-convex lenses 161 and 162, The light is condensed in a rectangular irradiation area on the irradiation object W arranged on the working distance WD, and the irradiation area is uniformly illuminated.

FIG. 7 shows the results of the simulation of the light amount distribution and the luminous flux angle distribution of the ultraviolet light when the irradiation object W is illuminated using the light irradiation apparatus 100 of the present embodiment. FIG. 7A shows the light amount distribution of the ultraviolet light in the X-axis direction on the irradiation object W, the horizontal axis indicates the position in the X-axis direction where the position of the optical axis AX is 0 mm, and the vertical axis indicates the ultraviolet light. Strength (mW / cm ² ). FIG. 7B is a light amount distribution of ultraviolet light on the irradiation target W in the Y-axis direction, the horizontal axis indicates the position in the Y-axis direction where the position of the optical axis AX is 0 mm, and the vertical axis is The intensity of ultraviolet light (mW / cm ² ) is shown. FIG. 7C shows the distribution of the luminous flux angle of the ultraviolet light incident on the irradiation object W, and the horizontal axis indicates the ultraviolet light when the direction of the optical axis AX (that is, the Z-axis direction) is 0 °. The vertical axis represents the frequency of each angle as a relative value. As shown in FIGS. 7A and 7B, the rectangular irradiation area (± 35 mm × ± 35 mm) on the irradiation object W arranged on the working distance WD is uniformly illuminated with ultraviolet light. I can see that Moreover, as shown in FIG.7 (c), it turns out that only the ultraviolet light within +/- 14 degrees is irradiated in the irradiation area.

  As described above, in the light irradiation device 100 of the present embodiment, the lens unit 120 integrally fixes and supports the plurality of first lenses 124, and the positions of the LED elements 114 and the first lenses 124 are as follows. Adjustment (alignment adjustment) is unnecessary. Further, unnecessary light generated by adopting such a configuration is removed by disposing an aperture stop 150 in the optical path of ultraviolet light. Therefore, according to the configuration of the present embodiment, substantially parallel light with uniform and high illuminance is applied to the rectangular irradiation area on the irradiation target W without requiring complicated alignment work of the optical components. Irradiation is possible.

  The above is the description of the present embodiment, but the present invention is not limited to the above configuration, and various modifications can be made within the scope of the technical idea of the present invention.

  For example, in the present embodiment, the aperture stop 150 is disposed between the condenser lens 140 and the relay lens 160. However, the aperture stop 150 may be disposed in the optical path of ultraviolet light, for example, a glass rod. You may arrange | position between 130 and the condenser lens 140. FIG.

  In addition, the condenser lens 140 of the present embodiment is configured by a pair of biconvex lenses 141 and 142, but is not limited to such a configuration, and for example, a pair of plano-convex lenses or a pair of lenses A meniscus lens can also be used. The condenser lens 140 can be configured by combining two or more lenses, and can be configured by a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.

  In addition, the relay lens 160 of the present embodiment is configured by a pair of plano-convex lenses 161 and 162 arranged so that the convex surfaces face each other, but is not limited to such a configuration. The pair of plano-convex lenses 161 and 162 may be arranged so that the planes face each other, or both convex surfaces or both planes may be arranged with their directions aligned. Moreover, the relay lens 160 can also be comprised by a pair of biconvex lens or a pair of meniscus lens. The relay lens 160 can be configured by combining two or more lenses, and can be configured by a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.

  Moreover, although the glass rod 130 of the present embodiment has been described as having a quadrangular prism shape, it is sufficient that ultraviolet light incident on the incident surface 130a can be mixed and guided, and for example, a truncated pyramid shape is applied. You can also.

  Further, in the present embodiment, the ultraviolet light emitted from the glass rod 130 is formed into ultraviolet light having a spread angle of ± 14 ° or less in the Z-axis direction by the condenser lens 140. It is not limited to a simple configuration, and can be appropriately changed according to the specification of the irradiation object W and the required specification of ultraviolet light. In general, it is considered that any ultraviolet light having a divergence angle of ± 25 ° or less can be applied to a liquid crystal peripheral exposure apparatus in which the light irradiation apparatus 100 of this embodiment is incorporated. In order to irradiate ultraviolet light having a light amount distribution, it is desirable that the spread angle of the ultraviolet light that has passed through the condenser lens 140 is as small as possible (that is, as the parallel light approaches), preferably ± 20 ° or less, and more preferably ± 15. It is desirable to configure it to be less than °.

  In addition, the LED element 114 of the present embodiment includes the four LED chips 114a arranged in a square lattice shape, but is not limited to this configuration, and includes at least one LED chip. It only has to be.

  In addition, the LED element 114 of the present embodiment emits ultraviolet light having a wavelength of 365 nm, but is not limited to such a configuration, and ultraviolet light having other wavelengths (for example, wavelength 385 nm, wavelength 405 nm). The light may be emitted, and a plurality of types of LED elements having different wavelengths may be combined (that is, a plurality of wavelengths may be mixed).

  In addition, the LED unit 110 of the present embodiment is configured to include 36 LED elements 114 arranged in a two-dimensional square lattice of 6 rows (Y-axis direction) × 6 (X-axis direction). What is necessary is just to arrange | position equally in the area | region 112a, and it is not limited to 36 structure. Further, the LED elements 114 do not necessarily have to be arranged in a two-dimensional square lattice shape, and may be arranged in a triangular lattice shape as shown in FIG. 8, for example. In the present embodiment, the LED element 114 is arranged in such an orientation that its two sides are parallel to the X-axis direction. For example, as shown in FIG. May be arranged in such an orientation that the diagonals thereof are parallel to the X-axis direction.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

DESCRIPTION OF SYMBOLS 100 Light irradiation apparatus 101 Case 110 LED unit 112 Board | substrate 114 LED element 114a LED chip 120 Lens unit 122 Base plate 124 1st lens 130 Glass rod 140 Condenser lens 141, 142 Biconvex lens 150 Aperture stop 160 Relay lens 161, 162 Plano-convex lens

Claims (11)

A light irradiation device for irradiating light on a rectangular irradiation area on an irradiation object,
A plurality of light emitting elements that emit light in a rectangular region on the substrate, arranged in a square lattice or a triangular lattice with the direction of the optical axis aligned,
A lens unit having a plurality of first lenses arranged on the optical axis of each of the light emitting elements and shaping the light emitted from the light emitting elements into light having a predetermined spread angle;
A light guide member for mixing and guiding the light emitted from the lens unit;
A second lens that has an optical axis common to the optical axis of the light guide section, and that shapes light from each of the light emitting elements emitted from the light guide member into substantially parallel light,
A third lens that has an optical axis common to the optical axis of the light guide, expands the light emitted from the second lens at a predetermined magnification, and focuses the light on the irradiation object;
An aperture stop having a circular opening centered on the optical axis of the light guide and disposed between the light guide member and the second lens or between the second lens and the third lens When,
A light irradiation apparatus comprising:   The light irradiation apparatus according to claim 1, wherein the second lens includes at least two lenses.   The light irradiation apparatus according to claim 2, wherein the second lens includes a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.   The light irradiation apparatus according to any one of claims 1 to 3, wherein the third lens includes at least two lenses.   The light irradiation apparatus according to claim 4, wherein the third lens is a biconvex lens, a plano-convex lens, a meniscus lens, or a combination thereof.   The light guide member is opposed to the lens unit, has a rectangular incident surface that takes in all the light from the plurality of light emitting elements, is opposed to the second lens, and light incident from the incident surface is a second lens. 6. The light irradiation device according to claim 1, wherein the light irradiation device is a quadrangular columnar glass rod having a rectangular emission surface that emits light to the surface.   7. The light irradiation apparatus according to claim 1, wherein the substantially parallel light emitted from the second lens is light having a spread angle of 25 ° or less.   The light irradiation apparatus according to claim 1, wherein the light is light in an ultraviolet wavelength region.   The plurality of light-emitting elements are configured by n types of light-emitting elements that emit light of n types (n is an integer of 2 or more) of different wavelengths. The light irradiation apparatus of a term. The plurality of light emitting elements are arranged in a first direction and a second direction orthogonal to the direction of the optical axis and orthogonal to each other,
Each of the light emitting elements is an LED (Light Emitting Diode) having a substantially square outer shape when viewed from the direction of the optical axis, and is arranged so that two sides of the outer shape are parallel to the first direction. The light irradiation apparatus according to any one of claims 1 to 9, wherein the light irradiation apparatus is provided. The plurality of light emitting elements are arranged in a first direction and a second direction orthogonal to the direction of the optical axis and orthogonal to each other,
Each of the light emitting elements is an LED (Light Emitting Diode) having a substantially square outer shape when viewed from the direction of the optical axis, and one diagonal line of the outer shape is parallel to the first direction. It arrange | positions, The light irradiation apparatus as described in any one of Claims 1-9 characterized by the above-mentioned.

Images