JP2015096285A - Micro valve, liquid balancing device, and micro device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micro valve which enables easy flow control of a minute amount of a liquid and easy manufacturing.SOLUTION: A micro valve 1 is provided between a micro passage 2a and a micro passage 2b. The micro valve 1 comprises: a pair of movable pieces 10, 10; and a gap 17 (an opening/closing part 18) located between the movable pieces 10, 10. The movable pieces 10, 10 respectively have first planes 11, 11 that are inclined walls. When a pressure caused by a fluid is applied from the micro passage 2a to the micro valve 1, the first planes 11, 11 of the movable pieces 10, 10 are pushed to push and spread the gap 17. The action allows the fluid to be transferred to the micro passage 2b side. When the application of the pressure is terminated, the movable pieces 10, 10 return to the original state to close the gap 17.

Description

  The present invention relates to a microvalve, a liquid weighing device, and a microdevice. The present invention is useful for controlling the flow rate of a liquid flowing through a microchannel.

  Microdevices (microchannel devices, microfluidic devices) that can handle a small amount of liquid sample are known. For example, a microchannel for transporting a liquid sample or the like is formed in a substrate (chip) that can be easily handled by hand. If necessary, the sample introduction part, reagent holding part, reaction A microdevice provided with a tank or the like is known (for example, Patent Documents 1 and 2).

  In recent years, an analyzer having excellent portability using a micro device has been used in the medical field and the field of environmental measurement. For this microdevice, a flow rate adjusting device for adjusting the flow rate of the sample solution is used, and it is possible to perform dilution, concentration, etc., and to perform blood and environmental analysis. Such a flow rate adjusting device is disclosed in Patent Document 3 below, for example. The flow rate adjusting device disclosed in Patent Document 3 has a deformed portion that expands or contracts due to a temperature change and changes in volume, and deforms the deformed portion to adjust the flow rate of the liquid flowing through the microchannel. To do.

  Moreover, the technique which can weigh a trace volume liquid of a fixed volume using a microdevice is known (for example, patent document 4).

JP 2012-132879 A JP 2012-215535 A JP 2012-31894 A JP 2007-279068 A

  In the flow rate adjustment device described in Patent Document 3, the heating unit and the cooling unit are required to open and close the device. However, in this configuration, depending on how heat is transmitted, a time difference occurs in the valve opening and closing, making it difficult to control the flow rate of the liquid. Further, in this flow rate adjusting device, it is necessary to arrange a heat-changing material in the microchannel, and it becomes difficult to produce the microfluidic device itself.

  In view of the above-mentioned present situation, an object of the present invention is to provide a microvalve that can easily control the flow rate of a liquid and that can be easily manufactured, a liquid weighing device using the microvalve, and the like. .

  One aspect of the present invention for solving the above problems is a microvalve that is provided in a microchannel formed in a microchip and controls the flow rate of the liquid flowing through the microchannel by opening and closing thereof, It is composed of a pair of movable pieces that are integrated with the inner wall of the microchannel and projecting into the microchannel, and a gap between the pair of movable pieces, and the flow rate of the liquid is controlled by opening and closing the gap. The movable piece has an inclined wall that reaches the gap from the inner wall of the microchannel and forms a predetermined angle with respect to the liquid flow direction, and is sandwiched between the inclined walls. In the flow channel, the cross-sectional area of the flow channel gradually decreases along the flow direction of the liquid, and by applying pressure by the liquid to the inclined wall, the opening and closing part is opened, and the liquid can pass through. On an inclined wall And the switching unit by releasing the pressure is microvalve characterized by obstruction.

The present invention relates to a microvalve provided in a microchannel formed in a microchip. The microvalve of the present invention has a pair of movable pieces integrated with the inner wall of the microchannel, and the movable pieces protrude from the microchannel. In addition, the microvalve of the present invention has an opening / closing part constituted by a gap between the pair of movable pieces, and the flow rate of the liquid is controlled by the opening / closing part. Furthermore, in the microvalve of the present invention, the movable piece has an inclined wall that extends from the inner wall of the microchannel to the gap and forms a predetermined angle with respect to the liquid flow direction. Then, by applying a pressure by the liquid to the inclined wall, the opening / closing part is opened so that the liquid can pass through. On the other hand, by releasing the pressure on the inclined wall, the opening / closing part is closed.
The microvalve of the present invention opens and closes by the pressure of the liquid, and does not require operations such as heating and cooling to open and close the valve. Furthermore, since a movable piece integrated with the inner wall of the microchannel is used to open and close the valve, it is not necessary to install a separate body in the microchannel, and the microvalve can be easily manufactured.

  Here, the “micro flow path” refers to a fine flow path that is formed in a shape and dimension that develops a so-called micro effect in the liquid flowing through the flow path. Specifically, it is a fine channel that is formed in a shape and dimension that exhibits a behavior different from that of a liquid that flows through a normal-sized channel because the liquid flowing through the channel is strongly influenced by surface tension and capillary action. .

  Preferably, in a state where the opening / closing part is closed, an angle formed by the inclined wall and the inner wall of the microchannel is not less than 100 degrees and not more than 170 degrees.

  With this configuration, the pressure by the liquid is reliably applied to the inclined wall.

  Preferably, the movable piece further includes an outlet side wall surface extending from an outlet of the opening / closing portion to an inner wall of the microchannel, and the opening / closing portion does not open even when a pressure is applied to the outlet side wall surface by the liquid, Liquid cannot pass through.

  Such a configuration provides a microvalve that allows liquid to pass in only one direction.

  Preferably, in a state where the opening / closing part is closed, an angle formed by the outlet side wall surface and the inner wall of the microchannel is 90 degrees or less.

  With such a configuration, the backflow of the liquid is more reliably prevented.

  Preferably, the opening / closing part has a slit shape.

  Preferably, the movable piece is made of a flexible material.

  With this configuration, the movable piece can be operated more easily.

  Another aspect of the present invention is a liquid weighing device that is provided on a microchip and measures a small volume of liquid, and includes a microvalve having the above-described configuration and a sealed space having a certain volume. A liquid weighing device characterized by being able to weigh a certain volume of liquid by introducing the liquid into the sealed space through the microvalve.

  The present invention relates to a liquid weighing device. The liquid weighing device of the present invention has the microvalve having the above-described configuration, and measures the liquid into a sealed space having a constant volume through the microvalve. With this configuration, it is possible to weigh a small volume of liquid with a simpler configuration.

  Preferably, the sealed space is a microchannel, and the microvalves are provided at both ends of the microchannel.

  Another aspect of the present invention includes a sealed space in which a plurality of microvalves having the above-described configuration are connected, and a liquid can be introduced into the sealed space through each microvalve and the liquid can be mixed in the sealed space. This is a microdevice characterized by the above.

  The microdevice of the present invention can mix a liquid in a sealed space using the microvalve having the above-described configuration. According to the microdevice of the present invention, a trace amount liquid can be mixed by a simple operation. Furthermore, it is easy to manufacture the microdevice itself.

  Preferably, the microchamber has a polygonal shape in plan view, and the microvalve is connected to an apex of the polygon.

  According to the microvalve of the present invention, since it can be opened and closed using the pressure of the liquid, the flow rate of the trace liquid can be adjusted with a simpler operation. In addition, the microvalve itself can be easily manufactured.

  According to the liquid weighing device of the present invention, it is possible to weigh a small volume of liquid with a simpler configuration on a microchip.

  According to the microdevice of the present invention, a trace amount liquid can be mixed by a simple operation. Furthermore, it is easy to manufacture the microdevice itself.

It is explanatory drawing which represents typically the basic composition of the microvalve and microchannel which concern on one Embodiment of this invention. (A) is a top view showing the microchip containing a microvalve and a microchannel, (b) is a top view showing the state where the upper film was removed in (a). It is AA sectional drawing of Fig.2 (a). It is BB sectional drawing of Fig.2 (a). It is a perspective view showing the movable piece of a microvalve, (a) shows a pair of movable pieces, (b) shows only one movable piece. It is explanatory drawing explaining the angle of the inclined wall etc. in a movable piece. It is explanatory drawing showing the opening / closing state of the clearance gap between movable pieces, (a) is the state which applied the pressure, (b) is the state which cancelled | released pressure application, (c) represents the state which applied the pressure from the reverse side. (A)-(c) is explanatory drawing showing the usage method of a microvalve. It is a top view showing the microvalve which concerns on other embodiment of this invention. It is explanatory drawing which represents typically the basic composition of the liquid weighing device which concerns on one Embodiment of this invention. (A)-(c) is explanatory drawing showing the usage method of the liquid weighing device of FIG. (A)-(c) is explanatory drawing showing the usage method of the liquid weighing device which concerns on other embodiment. It is explanatory drawing showing the structure of the microdevice which concerns on one Embodiment of this invention. It is explanatory drawing showing the structure of the microdevice which concerns on other embodiment of this invention.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. However, the following embodiment is merely an example, and the present invention is not limited to the following embodiment. Further, the drawings referred to in each embodiment are schematically described, and the ratio of dimensions of members and the like drawn in the drawings may be different from the ratio of dimensions of actual members and the like. Specific ratios of dimensions of members and the like should be determined in consideration of the following explanation. Unless otherwise specified, the vertical and horizontal directions in the following description are based on the posture shown in FIG. That is, the orientation is such that the film 6 is on the upper side, the film 7 is on the lower side, the microchannel 2a is on the left side, and the microchannel 2b is on the right side.

  As shown in FIG. 1, a microvalve 1 according to an embodiment of the present invention is provided between, for example, two microchannels 2a and 2b formed on a microchip, and the microchannel 2a and the microchannel 2b are provided. The flow rate of the liquid passing between the two is controlled. In this embodiment, both the microvalve 1 and the microchannels 2a and 2b are provided in a flat microchip 3 having a laminated structure.

As shown in FIGS. 2 to 4, the microchip 3 has a laminated structure in which a film 6 and a film 7 are provided on an upper surface and a lower surface of a flat substrate 5, respectively. The microchannels 2a and 2b are formed by elongated slit-shaped openings formed in the base material 5 and films 6 and 7 sandwiching the openings from above and below. That is, the microchannels 2a and 2b have a cylindrical shape with a rectangular cross section, the two side surfaces (side walls 23) are formed of the base material 5, and the top and bottom surfaces are formed of the film 6 and the film 7, respectively.
The flow direction of the liquid in the microchannels 2a and 2b is parallel to the side walls 23a and 23b of the microchannels 2a and 2b.

  The channel diameters (inner diameters) of the microchannels 2a and 2b are preferably 50 μm or more and 3 mm or less. The channel lengths of the microchannels 2a and 2b are preferably 1 μm or more and 1000 μm or less. The microchannel 2a and the microchannel 2b have basically the same configuration, and it can be said that one microchannel 2 is divided into the microchannel 2a and the microchannel 2b by the microvalve 1.

  The substrate 5 is made of a flexible resin. Examples of the resin include organic siloxane compounds. Examples of the organosiloxane compound include polydimethylsiloxane (PDMS), polymethylhydrogensiloxane, and the like.

The films 6 and 7 are provided on the upper surface and the lower surface of the substrate 5, respectively. The thickness of the films 6 and 7 is preferably 5 μm or more and 1 mm or less, more preferably 10 μm or more and 500 μm or less, and further preferably 20 μm or more and 100 μm or less.
Examples of the material constituting the films 6 and 7 include plastic resin, silicon resin, glass, ceramic, and silicon. Examples of the resin include polyethylene terephthalate (PET), polyethylene, polyester / polypropylene / nylon, polyvinyl alcohol, polyvinyl chloride, polyacrylonitrile, polycarbonate, ethylene vinyl acetate copolymer, ethylene-vinyl alcohol copolymer, ethylene-methacrylic acid. Examples thereof include acid copolymers and organic siloxane compounds such as polydimethylsiloxane.

  A microvalve 1 is provided between the microchannel 2a and the microchannel 2b. As shown in FIGS. 2 to 6, the microvalve 1 is mainly composed of a pair of movable pieces 10, 10 and a gap 17 (opening / closing part 18) formed between the movable pieces 10, 10. .

The movable piece 10 projects from the side wall 23 of the microchannel 2 into the microchannel 2. The movable piece 10 is constituted by a part of the substrate 5 and is integrated with the side wall 23 of the microchannel 2.
When the movable piece 10 is viewed in plan, its upper surface 20 and lower surface 21 are substantially trapezoidal. The side surface of the movable piece 10 includes three planes, a first plane 11, a second plane 12, and a third plane 15. That is, the movable piece 10 is surrounded by the first plane 11, the second plane 12, and the third plane 15 on three sides.

  The first plane (inclined wall) 11 is a plane connected to the side wall 23a of the microchannel 2a. The first plane 11 is a plane (wall) extending from the side wall 23a to the gap 17, and as shown in FIG. 6, is inclined at an angle α1 of 90 degrees or more with respect to the side wall (inner wall) 23a. Therefore, in the region (flow channel) sandwiched between the pair of first planes 11, 11, the flow channel cross-sectional area gradually decreases along the flow direction (from left to right). In plan view, the distance between the pair of first planes 11 and 11 is tapered.

  The third plane (exit side wall surface) 15 is a plane connected to the side wall 23b of the microchannel 2b. As shown in FIG. 6, the third plane 15 forms 90 degrees (right angle) with respect to the side wall (inner wall) 23b or an angle slightly smaller than 90 degrees (acute angle) (angle β1). Therefore, no flow path is formed between the third planes 15 and 15. When the portions of the third planes 15 and 15 are viewed in a plan view, the third planes 15 and 15 are linearly perpendicular to the side wall 23 b, or have an inverted “<” shape that is bent at the gap 17.

  The second plane 12 is located between the first plane 11 and the third plane 15. The second planes 12 and 12 face each other and are parallel to each other. The second planes 12 and 12 are parallel to the side walls 23a and 23b.

Between the second planes 12 and 12 of the two movable pieces 10 and 10, a slit-like (linear) gap 17 (opening / closing part 18) is formed. However, when the micro valve 1 is closed, the second planes 12 and 12 are in surface contact with each other, and the gap 17 is substantially closed.
The height of the gap 17 is equal to the vertical length (height) of the movable piece 10. Further, the gap 17 is perpendicular to the bottom surface and the top surface of the microchannel 2.
The gap 17 can be produced by, for example, cutting with a cutting tool such as a punching tooth or a cutter.
In the present embodiment, when the second planes 12 and 12 are brought into close contact with each other and separated from each other, the gap 17 (opening / closing part 18) is opened and closed, and the flow rate of the liquid is controlled.

  The vertical length (height) of the movable piece 10 is substantially equal to the vertical length (depth) of the microchannel 2. Therefore, the upper surface 20 of the movable piece 10 is in surface contact with the film 6, and the lower surface 21 of the movable piece 10 is in surface contact with the film 7.

Here, adhesion | attachment between the base material 5 and the films 6 and 7 can be performed using an adhesive agent, a double-sided tape, a corona / plasma process, etc., for example.
However, although the upper surface 20 of the movable piece 10 and the film 6 are in surface contact with each other, they are not bonded, or are only weakly bonded to the extent that lateral shift is allowed. Therefore, the upper surface 20 and the film 6 can be laterally displaced while being in surface contact, and can slide, for example. The same applies to the space between the lower surface 21 and the film 7.
Specifically, if the above-mentioned adhesion between the base material 5 and the films 6 and 7 is performed using an adhesive, there is no gap between the upper surface 20 and the film 6 and between the lower surface 21 and the film 7. It is not necessary to apply an adhesive. If a double-sided tape is used, a double-sided tape in which the shapes of the upper surface 20 and the lower surface 21 are punched out may be used. If corona / plasma treatment is used, the upper surface 20 and the lower surface 21 may be covered with a mask.

Next, the relationship between the operation of the microvalve 1 and the liquid flow will be described.
As described above, in the present embodiment, the first flat surface 11 of the movable piece 10 is an inclined wall that forms an angle α1 of 90 degrees or more with respect to the side wall 23a. In other words, assuming a plane X (corresponding to the AA cross section in FIG. 2) along the liquid flow direction (left-right direction) including the gap 17, the angle α2 formed by the plane X and the first plane 11 is , Less than 90 degrees (FIG. 6).
On the other hand, in the present embodiment, the third flat surface 15 of the movable piece 10 forms an angle β1 of 90 degrees or less with respect to the side wall 23b. In other words, the angle β2 formed by the plane X and the third plane 15 is 90 degrees or more (FIG. 6).
In the present embodiment, the side walls 23a and 23b and the plane X are parallel to each other.

  In the present embodiment, since the first plane 11 is an inclined wall having the above-described configuration, when the liquid is flowed from the microchannel 2a toward the microchannel 2b, the pressure by the liquid is applied to the first plane 11 that is the inclined wall. As shown in FIG. 7A, a force acts in the direction in which the gap 17 is pushed and widened. Thereby, the movable pieces 10 and 10 are elastically deformed with the root portion 22 as a fulcrum, the second planes 12 and 12 are separated from each other, and the gap 17 (opening and closing portion 18) is opened. As a result, the liquid in the microchannel 2a can move to the microchannel 2b through the gap 17. In other words, by continuing to apply pressure with the liquid from the microchannel 2a side, the state where the gap 17 (opening / closing portion 18) is opened is maintained, and the liquid can be transferred from the microchannel 2a to the microchannel 2b side. .

On the other hand, when the application of pressure by the liquid is stopped from this state, as shown in FIG. 7B, the movable pieces 10 and 10 return to the original state, and the second planes 12 and 12 come close to and in close contact with each other to form the gap 17 ( The opening / closing part 18) is closed. Thereby, the transfer of the liquid to the microchannel 2b can be stopped.
That is, in the microvalve 1 of the present embodiment, the gap 17 (opening / closing part 18) can be opened and closed by adjusting the pressure application by the liquid from the microchannel 2a side.

  In the present embodiment, the angle α1 formed by the first plane 11 and the side wall 23a is 90 degrees or more, preferably 100 degrees or more and 170 degrees or less, and more preferably 120 degrees or more and 160 degrees or less. preferable. In other words, the angle α2 formed by the plane X and the first plane 11 is preferably 10 degrees or more and 80 degrees or less, and more preferably 20 degrees or more and 60 degrees or less. When the angle α1 is 170 degrees or more (the angle α2 is 10 degrees or less), the length of the first plane 11 in the flow direction (left-right direction) increases, and the size of the microvalve 1 becomes larger than necessary. On the other hand, when the angle α1 is 100 degrees or less (the angle α2 is 80 degrees or more), the force that pushes the gap 17 becomes weak, and the opening and closing of the gap 17 may become unstable.

  On the other hand, when the eyes are moved to the microchannel 2b side, the third plane 15 forms 90 degrees (right angle) with respect to the side wall 23b or an angle (acute angle) slightly smaller than 90 degrees (β1 ≦ 90 degrees). , Β2 ≧ 90 degrees), the gap 17 (opening / closing portion 18) does not open even when pressure is applied by the liquid from the microchannel 2b side toward the third plane 15 (FIG. 7C). On the contrary, since a force is applied in a direction in which the second planes 12 and 12 are closer to each other, the gap 17 (opening / closing portion 18) is rather positively closed.

  Thus, in the present embodiment, the liquid flow is restricted in one direction by the microvalve 1, and the microvalve 1 can function as a check valve.

  In the present embodiment, the angle β1 formed by the third plane 15 and the side wall 23b is 90 degrees or less. However, if the backflow from the microchannel 2b to the microchannel 2a does not occur, the angle β1 is slightly increased. May exceed. On the other hand, the lower limit of the angle β1 (upper limit of the angle β2) is not particularly limited as long as it does not interfere with the angles α1 and α2 related to the first plane 11.

A method of using the microvalve 1 will be described with reference to FIG. In FIG. 8, the liquid to be transferred is represented by hatching.
First, a liquid is introduced into the microchannel 2a (FIG. 8A) and filled up to the entrance of the gap 17 (FIG. 8B). Thereby, a liquid contacts the 1st planes 11 and 11 which are inclined walls.
Next, pressure is applied to the liquid. The application of pressure can be performed using, for example, an external pump connected to the microchannel 2a. As a result, the gap 17 widens and the liquid is transferred to the microchannel 2b side (FIG. 8C).
When the desired amount of liquid has been transferred, the pressure application is released. For example, the pump is stopped and the pressure is released. As a result, the gap 17 is closed and the liquid transfer stops. The basic operation of the microvalve 1 has been described above.

  In the embodiment described above, the microvalve 1 is illustrated in which the inclined wall is provided only on the microchannel 2a side, that is, the upstream side in the flow direction and functions as a check valve. However, the inclined wall may be provided on the downstream side. it can. In the microvalve 25 shown in FIG. 9, the third plane 27 of the movable piece 26 is an inclined wall similar to the first plane 11. According to the microvalve 25, the flow rate of the liquid can be controlled in both directions between the microchannels 2a and 2b. Other configurations of the microvalve 25 are the same as those of the microvalve 1.

  In the above-described embodiment, an example in which the flow rate of the liquid is controlled by fully opening and closing the opening / closing part 18 has been described, but the opening degree of the opening / closing part 18 may be changed continuously or stepwise. For example, the opening degree of the opening / closing part 18 can be adjusted by adjusting the applied pressure.

  Next, an embodiment of the liquid weighing device of the present invention will be described. A liquid weighing device 30 according to an embodiment of the present invention is provided on a microchip, and includes two microvalves similar to the microvalve 1 having the above-described configuration. As shown in FIG. 10, the liquid weighing device 30 has a structure in which the micro flow path 2a, the micro valve 1a, the sealed space 32, the micro valve 1b, and the micro flow path 2b are connected in series in this order. Yes. That is, the microvalves 1 a and 1 b are provided at both ends of the sealed space 32.

  The sealed space 32 is a space having a constant volume. In the present embodiment, the sealed space 32 has an elongated cylindrical shape similar to the microchannels 2a and 2b. The sealed space 32 may have a shape other than the microchannel, for example, a so-called microchamber.

A procedure for measuring (weighing) a fixed volume of liquid using the liquid weighing device 30 will be described. In FIGS. 11A to 11C, the liquid is indicated by hatching.
First, a liquid to be weighed is introduced into the microchannel 2a. The amount of introduction is equal to or greater than the volume of the sealed space 32 (FIG. 11A).
Next, the microvalve 1 a adjacent to the microchannel 2 a is opened, and the liquid is transferred to the sealed space 32. More specifically, a liquid pressure is applied to the microvalve 1a to open the gap 17. Thereby, the liquid is introduced into the sealed space 32 through the gap 17. The liquid transfer is continued until the sealed space 32 is completely filled with the liquid (FIG. 11B).

  When the sealed space 32 is completely filled with the liquid, the microvalve 1a is closed. Specifically, the application of pressure to the liquid is released. As a result, a fixed volume of liquid is weighed into the sealed space 32.

  Next, the microvalve 1b adjacent to the microchannel 2b is opened, and the liquid is transferred to the microchannel 2b. Specifically, pressure is applied to the liquid in the sealed space 32 to open the gap 17 of the microvalve 1b. Thereby, the liquid is introduced into the micro flow path 2b through the gap 17, and a fixed volume of liquid is collected in the micro flow path 2b (FIG. 11C). In this way, a fixed volume of liquid can be weighed using the liquid weighing device 30.

  In addition, as a method of applying pressure to the liquid in the sealed space 32, an appropriate pump may be connected to the sealed space 32 and operated. At this time, since the microvalve 1 functions as a check valve, the liquid does not flow back to the microchannel 2a side. The above-mentioned pump is not particularly limited, but it is based on a chemical reaction using a diagram type pump, an electroosmotic flow type pump, a pump that generates gas by light or thermal decomposition, or generation of oxygen by hydrogen peroxide and sodium permanganate. A pump, etc. can be employed.

A configuration as shown in FIG. 12 is also possible as a mode in which a liquid is introduced into the micro flow path 2a to apply pressure. In the configuration shown in FIG. 12, another micro channel 37 orthogonal to the micro channel 2a is provided on the upstream side of the micro channel 2a. The upstream side of the microchannel 2 a is connected so as to branch from the microchannel 37.
In the embodiment shown in FIG. 12, first, a liquid is caused to flow through the microchannel 37, branched from the side surface of the microchannel 37, and introduced into the microchannel 2a (FIG. 12A). When the liquid can be introduced to the entrance of the gap 17 of the microvalve 1a, air is passed through the microchannel 37 to apply pressure to the liquid in the microchannel 2a. Thereby, the microvalve 1a is opened, and the liquid is transferred to the sealed space 32. Thereby, a constant volume of liquid is weighed. The subsequent procedure is the same as in FIG.

  A micro device for mixing a small amount of liquid can be constructed by using the plurality of micro valves configured as described above and at least one sealed space. Hereinafter, an embodiment of a microdevice for liquid mixing will be described.

  A micro device 40 shown in FIG. 13 includes five micro valves 41a to 41e and six micro channels 42a to 42f. The microvalves 41a to 41e have the same configuration as the microvalve 1 described above. The microchannels 42a to 42f have the same configuration as the microchannels 2a and 2b described above.

In the present embodiment, the micro flow path 42b and the micro flow path 42d function as a sealed space for liquid mixing.
A micro flow path 42a and a micro flow path 42c are connected to the micro flow path (sealed space) 42b via a micro valve 41a and a micro valve 41c, respectively. With respect to the microvalve 41a, the liquid can be transferred only from the microchannel 42a toward the microchannel 42b. With respect to the microvalve 41c, liquid can be transferred only from the microchannel 42c toward the microchannel 42b.

  A micro channel 42b and a micro channel 42e are connected to the micro channel (sealed space) 42d via a micro valve 41b and a micro valve 41e, respectively. With respect to the microvalve 41b, the liquid can be transferred only from the microchannel 42b toward the microchannel 42d. With respect to the microvalve 41e, liquid can be transferred only from the microchannel 42e toward the microchannel 42d.

  The micro flow path 42d and the micro flow path 42f are connected via a micro valve 41d. The liquid can be transferred only from the micro flow path 2d toward the micro flow path 42f.

  In the micro device 40, liquid can be introduced into the micro channel (sealed space) 42b from the micro channel 42a and the micro channel 42c and mixed. For example, each liquid can be introduced from the microchannels 42a and 42c at a constant volume ratio, and the liquid can be mixed at a desired mixing ratio. The volume ratio (mixing ratio) of the liquid to be introduced can be adjusted, for example, by changing the ratio of the inflow speed from the microvalves 41a and 41c.

  Similarly, in the microdevice 40, liquid can be introduced into the microchannel (sealed space) 42d from the microchannel 42b and the microchannel 42e and mixed. The mixed liquid can be collected from the micro flow path 42f.

  The microdevice 50 shown in FIG. 14 can mix five types of liquids. The microdevice 50 has a sealed space 55 that is a star-shaped decagon (concave polygon) in plan view. The five micro flow paths 52a to 52e are radially connected to the sealed space 55 via the micro valves 51a to 51e. The connection positions are the five apexes projecting inward (the inner angle is 180 degrees or more). ). The microvalves 51a to 51e have the same configuration as the microvalve 1 described above. The connection direction of the microvalves 51 a to 51 e is a direction in which the liquid can move only from the microchannels 52 a to 52 e toward the sealed space 55. The microchannels 52a to 52e have a constant volume.

  Further, the five micro flow paths 52f to 52j are radially connected to the sealed space 55, and the connection positions are five vertices protruding outward (vertices having an inner angle of less than 180 degrees).

  Further, other micro flow paths 62a to 62e are connected to the micro flow paths 52a to 52e via micro valves 61a to 61e. The microvalves 61a to 61e have the same configuration as the microvalve 1 described above. The connection direction of the microvalves 61a to 61e is a direction in which the liquid can move only from the microchannels 62a to 62e toward the microchannels 52a to 52e.

  Furthermore, another micro flow path 62f to 62j is connected to the micro flow paths 52f to 52j via micro valves 61f to 61j. The microvalves 61f to 61j have the same configuration as the microvalve 1 described above. The connection direction of the microvalves 61f to 61j is a direction in which the liquid can move only from the microchannels 52f to 52j toward the microchannels 62f to 62j.

  When mixing the liquid using the micro device 50, first, the liquid is introduced from the micro flow paths 62a to 62e to the micro flow paths 52a to 52e via the micro valves 61a to 61e to be filled. Thereby, five kinds of liquids having a constant volume are weighed. Next, the microvalves 51 a to 51 e are sequentially opened to introduce each liquid into the sealed space 55. Thereby, the liquid is mixed in the sealed space 55.

  Next, air is sent into the sealed space 55, and the mixed liquid is transferred to the microchannels 52f to 52j. Further, the mixed liquid is transferred to the micro flow paths 62f to 62j via the micro valves 61f to 61j. Thereby, liquid mixture can be collect | recovered to microchannel 62f-62j.

  Examples of the liquid subject to the present invention include water, oil, biochemical buffer, blood, lymph, urine, soil extract water, hydroponic water, and the like. Further, since the microchannel is a minute channel, the liquid may be, for example, a droplet in the microchannel.

A liquid weighing device 30 having the configuration shown in FIG. 12 was produced, and an experiment for flowing a liquid was performed.
The base material 5 was made of silicon resin (manufactured by Toray Dow Corning, SILPOT 184) by soft lithography. The microchannels 2a and 2b and the sealed space 32 are 0.5 mm wide and 0.5 mm deep. The angle α2 of the first plane (inclined wall) 11 of the movable piece 10 was 20 degrees. The angle β2 of the third plane 15 was 90 degrees.
The gap 17 was produced by processing with a sword (width 0.2 mm, length 10 mm).
Silicone resin (SILPOT 184, manufactured by Toray Dow Corning Co., Ltd.) was used as the films 6 and 7 that sandwich the substrate 5 from above and below.
The adhesion between the substrate 5 and the films 6 and 7 was performed by performing a plasma treatment on the surface of the substrate 5 and then bonding them together.
A phosphate buffer solution was used as the liquid.

  The liquid was introduced from the microchannel 37 into the microchannel 2a by the procedure described above. Furthermore, air was sent in to open the microvalve 1a, and the liquid was transferred to the sealed space 32. After the sealed space 32 was filled with the liquid, the microvalve 1b was opened and the liquid was transferred to the microchannel 2b. As a result, a constant volume of liquid could be recovered in the microchannel 2b.

DESCRIPTION OF SYMBOLS 1 Micro valve 2, 2a, 2b Micro flow path 3 Microchip 5 Base material 6 Film 7 Film 10 Movable piece 11 1st plane (inclined wall)
15 Third plane (exit side wall surface)
17 Clearance 18 Opening / closing part 23, 23a, 23b Side wall (inner wall)
25 Micro valve 26 Movable piece 27 Third plane (inclined wall)
DESCRIPTION OF SYMBOLS 30 Liquid weighing device 32 Sealed space 40 Micro device 41a-41e Micro valve 42a-42f Micro flow path 50 Micro device 51a-51j Micro valve 52a-52j Micro flow path 55 Sealed space 61a-61j Micro valve 62a-62j Micro flow path

Claims (10)

A microvalve that is provided in a microchannel formed in a microchip and controls the flow rate of the liquid flowing through the microchannel by opening and closing thereof,
A pair of movable pieces integrated with the inner wall of the microchannel and projecting into the microchannel;
An opening / closing portion configured by a gap between the pair of movable pieces, the flow rate of the liquid being controlled by opening / closing the gap;
The movable piece has an inclined wall that reaches the gap from the inner wall of the microchannel and forms a predetermined angle with respect to the liquid flow direction,
In the flow path sandwiched between the inclined walls, the cross-sectional area of the flow path gradually decreases along the flow direction of the liquid,
By applying a pressure by the liquid to the inclined wall, the opening / closing part is opened to allow liquid to pass through, and by releasing the pressure to the inclined wall, the opening / closing part is closed. A micro valve.   3. The microvalve according to claim 2, wherein an angle formed between the inclined wall and the inner wall of the microchannel is 100 degrees or more and 170 degrees or less in a state where the opening / closing portion is closed.   The movable piece further has an outlet side wall surface from the outlet of the opening / closing portion to the inner wall of the microchannel, and the opening / closing portion does not open even when a pressure is applied to the outlet side wall surface by the liquid, and the liquid passes through. The microvalve according to claim 1 or 2, wherein the microvalve cannot be used.   4. The microvalve according to claim 3, wherein an angle formed by the outlet side wall surface and the inner wall of the microchannel is 90 degrees or less in a state where the opening / closing portion is closed.   The micro valve according to any one of claims 1 to 4, wherein the opening / closing part has a slit shape.   The microvalve according to any one of claims 1 to 5, wherein the movable piece is made of a flexible material. A liquid weighing device provided on a microchip for weighing a small volume of liquid,
The microvalve according to any one of claims 1 to 6 and a sealed space having a constant volume,
A liquid weighing device capable of weighing a fixed volume of liquid by introducing the liquid into the sealed space through the microvalve.   The liquid weighing device according to claim 7, wherein the sealed space is a microchannel, and the microvalves are provided at both ends of the microchannel.   A sealed space to which a plurality of the microvalves according to any one of claims 1 to 6 are connected is provided, and liquid can be introduced into the sealed space through each microvalve, and the liquid can be mixed in the sealed space. A micro device characterized by that.   The microdevice according to claim 9, wherein the sealed space has a polygonal shape in plan view, and the microvalve is connected to an apex of the polygon.

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