JP2015000375A - Fluid control device, and fluid mixer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid control device which can mix fluid extremely efficiently, and has high processing capacity and high pressure resistance.SOLUTION: A fluid control device comprises a substrate which incorporates: a single mixture space; a plurality of guide spaces constituting a trench structure; and a plurality of inflow spaces. When viewed from the mixture space, one aperture part of the guide space is constituted of apertures of a plurality of pores arranged so as to be connected to the substantially rectangular trench structures respectively, and both long sides of one trench structure of guide spaces having an adjacent positional relationship are arranged spaced apart in parallel at a prescribed interval, and each of the apertures of the pores in the other trench structure, in an adjacent position, that correspond to the apertures of the pores in the one trench structure, are communicating with different inflow spaces.

Description

  The present invention relates to a fluid control device that mixes fluid in a minute space, and a fluid mixer. Such a fluid control device and a fluid mixer are suitably used for, for example, a micromixer and μTAS (also referred to as “Micro-TAS”: Micro Total Analysis Systems). Here, μTAS uses MEMS technology to provide minute flow paths, reaction chambers, and mixing chambers on a chip, and to analyze various liquids and gases including blood and DNA with a single chip or device. Mean device.

  Microchemical processes that perform chemical processes such as mixing, reaction, extraction, separation, heating, and cooling in minute channels and in minute spaces have been proposed, and research on micromixers that enable highly efficient mixing in minute spaces has been conducted. Has been made.

A micromixer is a device that performs mixing in a minute space of several hundred μm or less, and the distance between substrates to be mixed can be shortened, so that the mixing efficiency can be greatly improved. As an example, a microemulsifier and an emulsification method capable of generating an emulsion without using a surfactant are known (Patent Document 1).
Also known is a micromixer in which liquid flowing in from a plurality of inlets is mixed and mixed by a three-dimensional flow path formed by a combination of plates with grooves cut by precision machining. (Non-Patent Document 1).

Further, a micro mixer of Institut fuer Mikrotechnik Mainz GmbH is known (Patent Document 2). In this micromixer, the flow paths are alternately arranged in the mixing section where the two flow path groups are mixed, and the two liquids are mixed by providing a slit in the upper part and fluid coming out of the slit. .
Further, a structure has been proposed in which a flow path group having a plurality of independent flow paths is provided, and the flow path groups are arranged in a staggered pattern in the mixing unit.
However, in order to divide the flow into a large number, it is necessary to form a complicated multi-channel using a precision processing technique, and there is a problem that the manufacturing cost increases.

Even in the case of using multi-channels, in a microchannel formed in a plane, the fluid is still laminar and stirring / mixing is governed by diffusion, so there is room for improvement in terms of mixing efficiency. was there. Therefore, when a three-dimensional flow path is formed by stacking plates on which multi-channels are formed, the device configuration becomes complicated, liquid leaks at the bonded interface of the stacked plates, and the pressure resistance is increased. There was a problem that I could not.
Furthermore, the generated solid matter is gradually deposited at the intersections of the flow paths at the joint interface of the laminated plates, and the flow paths are partially blocked, which may greatly reduce the liquid mixing efficiency. there were.

  Moreover, in the micromixer described in Patent Document 2, the boundary surface between the two liquids is two, and the mixing performance cannot be enhanced to the limit.

JP 2004-81924 A Special table 2003-500202 gazette

Savemation Review August 2005, pages 60-63

  The present invention has been made in view of the above-described facts, and provides a fluid control device and a fluid mixer that can mix fluid extremely efficiently, have high processing capacity, and have a high pressure resistance. Objective.

  The fluid control device according to claim 1 of the present invention is a fluid control device comprising a base body including a single mixing space, a plurality of guiding spaces having a trench structure, and a plurality of inflow spaces, When viewed from the mixed space, one opening of the guide space is formed of a plurality of fine holes that are connected to each of the trench structures having a substantially rectangular shape, and are adjacent to each other. The other trench structure corresponding to the opening of the minute hole in the one trench structure, in which the long sides of the one trench structure in the guide space are spaced apart and arranged in parallel at a predetermined interval, The opening portions of the micro holes in each communicate with different inflow spaces.

  The fluid control device according to claim 2 of the present invention is the fluid control device according to claim 1, wherein the opening of the fine hole in the one trench structure and the opening of the fine hole in the other trench structure are: It is two-dimensionally arranged in a plane with respect to the mixed space.

  The fluid control device according to a third aspect of the present invention is the fluid control device according to the second aspect, wherein the openings of the micropores in a plane with respect to the mixing space are different from each other in the inflow spaces. They are characterized in that they are at the most adjacent positions.

  A fluid control device according to a fourth aspect of the present invention is the fluid control device according to any one of the first to third aspects, wherein the trench structure is arranged along a long side direction of the trench structure. It is characterized by being divided into two or more by a partition wall.

  A fluid mixer according to a fifth aspect of the present invention includes the fluid control device according to any one of the first to fourth aspects, the fluid control device, and a region C of the fluid control device. And a housing having at least an inflow space individually facing the regions B and C of the fluid control device.

  According to the present invention, it is possible to provide a fluid control device and a fluid mixer that enable extremely efficient mixing, have a high processing capacity, and have a high pressure resistance.

The schematic diagram which shows an example of the fluid control device which concerns on 1st Embodiment (type 1). The schematic diagram which shows the fluid control device which concerns on the modification 1A of 1st Embodiment. The schematic diagram which shows the fluid control device which concerns on the modification 1B of 1st Embodiment. The cross-sectional schematic diagram which shows an example of the fluid mixer provided with the fluid control device of 1st Embodiment. The top view which shows the opening part arrangement | positioning of the flow path with respect to the outflow space in a fluid control device. The cross-sectional schematic diagram which shows the shape of the micropore in a fluid control device. The perspective view which showed typically the fluid control device provided with the temperature control means. The cross-sectional schematic diagram which shows another example of the fluid mixer provided with the fluid control device of 1st Embodiment. The schematic diagram which shows an example of the fluid control device which concerns on 2nd Embodiment (type 2). The schematic diagram which shows the fluid control device which concerns on the modification 2A of 2nd Embodiment. The schematic diagram which shows the fluid control device which concerns on the modification 2B of 2nd Embodiment. The cross-sectional schematic diagram which shows an example of the fluid mixer provided with the fluid control device of 2nd Embodiment. The schematic diagram for demonstrating the structure of the fluid mixer provided with the fluid control device which can be attached or detached. The schematic diagram which shows one structural example of (mu) TAS chip | tip carrying a fluid control device. The schematic diagram which shows one structural example of the fluid control device which concerns on a comparative example.

Next, the present invention will be described in more detail with reference to the drawings with reference to embodiments and specific examples. However, the present invention is not limited to these embodiments and examples.
Also, in the description using the following drawings, it should be noted that the drawings are schematic and the ratio of each dimension and the like are different from the actual ones, and are necessary for the description for easy understanding. Illustrations other than the members are omitted as appropriate.

(1) Configuration of fluid control device (Type 1)
(1-1) First Embodiment (No. E1)
FIG. 1 is a schematic diagram illustrating a configuration example of a fluid control device 1 a (1) according to the present embodiment, where (a) is a perspective view schematically illustrating the fluid control device 1, and (b) Cross-sectional schematic diagram of arrow view X1-X1, (c) is a schematic cross-sectional view of arrow view Y1-Y1, and (d) is a plan view of arrow view Z1.
Hereinafter, a first embodiment according to the present invention will be described with reference to the drawings.

The fluid control device 1a (1) of the present invention includes a base body including a single mixed space, a plurality of guide spaces having a trench structure, and a plurality of inflow spaces.
In the fluid control device of the present invention, when viewed from the mixing space, one opening of the guide space is formed of openings of a plurality of fine holes arranged in connection with each of the rectangular trench structures. The long sides of one of the trench structures in the guide space that are in an adjacent positional relationship are spaced apart and arranged in parallel at a predetermined interval, and in the opening of the micro hole in the one trench structure in the adjacent position Corresponding openings of the fine holes in the other trench structure each communicate with different inflow spaces.

As shown in FIG. 1, the fluid control device 1 a (1) includes a base body including a single mixed space, a plurality of guide spaces having a trench structure, and a plurality of inflow spaces. In particular, in the “first embodiment” shown in FIG. 1, in the base having a flat plate shape, the two inflow spaces Sb and Sc are on the two side surfaces (B and C) facing the base, and the outflow space Sa is the base. The case where each is arrange | positioned at the upper surface side (A) is shown.
A plurality of trench structures 3, 3,..., 4, 4,. When viewed from the mixed space, the trench structures 3, 3, ... 4, 4, ... have a substantially rectangular shape. Here, as shown in a partially enlarged view of FIG. 1 (c), the substantially rectangular shape means that the tip 3p of the trench structure 3 (that is, the farthest part from the inflow space and the deep part) is from the mixing space. As seen, in addition to being linear, it also includes a configuration having a rounded shape (for example, an arc shape). The same applies to the tip 4p of the trench structure 4.
Moreover, in the base | substrate 2, the long side of one trench structure of the guidance space which has an adjacent positional relationship is spaced apart and arrange | positioned in parallel with predetermined spacing.

A plurality of fine holes 5, 5,..., 6, 6,... Are formed so as to be connected to each of the plurality of trench structures 3, 3,. Has been. When viewed from the mixing space, one opening of the guide space has openings 5b, 5b,..., 6b, 6b of the plurality of micro holes 5, 5,. It consists of ...
When viewed from the inflow space, the other opening of the induction space has openings 3a, 3a,..., 4a, 4a of the plurality of trench structures 3, 3,. It consists of ...
.. Corresponding to the openings 5b, 5b,... Of the micro holes 5, 5,... In the one trench structure 3, 3,. , 6,... Communicate with the different inflow spaces.

A guide space group α constituting a specific group among the plurality of guide spaces has openings 3a, 3a,..., 5b, 5b in the regions A and B on the surface (outer surface) of the base 2.・ Has
A guide space group β constituting another specific group of the guide spaces has openings 4a, 4a, ..., 6b, 6b, ... in regions A and C on the surface (outer surface) of the base 2, respectively. have.
In the base 2, the micro holes 5, 5,... 6, 6,. Yes.

  As shown in the schematic sectional views of FIGS. 1B and 1C, the trench structures 3, 3,... And the fine holes 5, 5,. It is formed as a three-dimensional guiding space group α in which the region A and the region B on the surface (outer surface) of the base 2 are communicated. Similarly, the trench structures 4, 4,... And the fine holes 6, 6,... Have a three-dimensional induction space group β connecting the region A and the region C on the surface (outer surface) of the base 2. It is formed as (1).

Opening portions 5b, 5b, ..., 6b of the micro holes 5, 5, ..., 6, 6, ... of the induction space group α and the induction space group β (1) facing the region A, 6b,... Are two-dimensionally arranged in the plane with respect to the region A, as shown in FIG. Moreover, the openings are alternately formed at the most adjacent positions.
In the fluid control device 1, different materials (fluids) flow from different spaces, for example, inflow spaces c, and are trench structures 3, 3,..., 4, 4,. 5,..., 6, 6,.
... by forming a plurality of micro holes 5, 5, ..., 6, 6, ... connected to the trench structures 3, 3, ... 4, 4, ... The flow velocity distribution can be made more uniform than in the case where the space has only the trench structure, and the pressure loss in the induction space can be minimized and the two-liquid interface can be made into four surfaces. For this reason, the mixing speed of the fluid can be increased. In the micromixer described in Patent Document 2, there are two liquid-liquid boundary surfaces.

(1-2) Modification 1A (No. E2)
FIG. 2 is a schematic view showing a modified example (hereinafter also referred to as modified example 1A) of the fluid control device 1 according to the present embodiment (first embodiment), and is a plan view taken along the arrow Z2.
By appropriately changing the three-dimensional layout of the trench structure and the fine holes shown in FIG. 1, the openings of the fine holes of the induction space group α and the induction space group β (1) with respect to the region A are shown in FIG. Like the fluid control device 1b (1) shown, it can also be arranged in a staggered pattern (FIG. 2).
Openings 5b, 5b of a plurality of micro holes 5, 5, ..., 6, 6, ... connected to the trench structures 3, 3, ... 4, 4, ... .., 6b, 6b,... Are arranged in a staggered pattern so that the flow velocity distribution can be made uniform, and the two-liquid boundary surface can be made into four surfaces. For this reason, the mixing speed of the fluid can be increased.

  In the region A, it is preferable that the width and the side length of the trench structures 3, 3,... 4, 4,. In addition, the distance between the openings of the trench structures 3, 3,..., 4, 4,. This is because when a plurality of types of fluids are ejected to the outside of the region A through the trench structures 3, 3,... 4, 4,.

In the region A, the major diameter of the micropores 5, 5,..., 6, 6,. In addition, the distance between the openings of the micropores 5, 5,..., 6, 6,... Is preferably in the order of, for example, a micrometer or a nanometer. This is because when a plurality of types of fluids are ejected to the outside of the region A through the fine holes 5, 5,... 6, 6,.
In the present invention (for example, description of the fluid control device 1b (1) according to the present embodiment), “mixing” means mixing, reacting, or emulsifying (emulsion) a plurality of fluids. (Hereinafter, the same meaning is used in the description of μTAS).
The trench structures 3, 3, ... 4, 4, ... and the micro holes 5, 5, ..., 6, 6, ... that constitute the induction space group α and the induction space group β (1). The number of these is not particularly limited, and can be appropriately selected according to the type of fluid to be controlled and the processing capacity. Further, the region B and the region C may be set in different regions on the same substrate surface. Furthermore, the region A, the region B, and the region C (...) may all exist on the same surface.

(1-3) Modification 1B (No. E3)
FIG. 3 is a schematic diagram showing a modified example (hereinafter, also referred to as modified example 1B) of the fluid control device 1 according to the present embodiment (first embodiment). FIG. 3A shows the fluid control device 1c (1). (B) is a schematic cross-sectional view taken along arrow X3-X3, (c) is a schematic cross-sectional view taken along arrow Y3-Y3, and (d) is a plane taken along arrow Z3. FIG. Similarly to FIG. 1, “Modification 2” shown in FIG. 3 also flows out to the two side surfaces (B, C side) where the two inflow spaces Sb and Sc face each other in the flat substrate. The case where space Sa is each arrange | positioned at the upper surface side (A side) of a base | substrate is represented.

In the fluid control device 1c (1), the trench structures 3, 3, ... 4, 4, ... are partition walls 31, 31 ... arranged along the long side direction of the trench structure. 41, 41... (In the case of FIG. 3, the trench structure 3 is divided into three (3a) each, and the trench structure 4 is also divided into three (4a) each. Example). This minimizes variations in pressure loss in the induction space and allows more uniform mixing.
3, the trench structures 3, 3,..., 4, 4,... Have a substantially rectangular shape when viewed from the mixed space. Here, as shown in a partially enlarged view of FIG. 3C, the substantially rectangular shape means that the tip 3p of the trench structure 3 (that is, the farthest part from the inflow space and the deep part) is from the mixing space. As seen, in addition to being linear, it also includes a configuration having a rounded shape (for example, an arc shape). The same applies to the tip 4p of the trench structure 4.

The fluid control device 1 (1a, 1b, 1c) according to the above-described embodiment can be configured in the fluid mixer 10 by being disposed in the housing 20.
(2) Configuration of fluid mixer (Type 1)
FIG. 4 is a schematic cross-sectional view showing a configuration example of the fluid mixer 10A (10), and is a case where the fluid control device disclosed in (1-1) is mounted.
As shown in FIG. 4A, the fluid mixer 10 </ b> A (10) includes a fluid control device 1 and a single outflow space that includes the fluid control device 1 and faces the region A of the fluid control device 1. It is comprised from the housing | casing 20 provided with single inflow space Sb, Sc which faces Sa and the area | region B and the area | region C of this fluid control device 1 separately. As the case 20, for example, a metal such as stainless steel can be used. The fluid mixer 10A (10) shown in FIG. 4A is configured such that the fluid control device 1 (the outer surface) and the housing 20 (the inner surface) are in direct contact with each other.

The housing 20A (20) includes an upper housing 20Aa that forms an outflow space Sa facing the surface (outer surface) of the region A of the base 2 constituting the fluid control device 1, and the surfaces of the regions B and C of the base 2 The lower housing 20Ab that forms the inflow spaces Sb and Sc facing the (outer surface). Further, the respective surfaces (outer surfaces) of the regions A, B, and C of the fluid control device 1 are joined to the upper housing 20Aa and the lower housing 20Ab through seal members (not shown) as necessary, The outflow space Sa and the inflow spaces Sb and Sc are formed as independent spaces. An elastic seal member such as an O-ring can be used as the seal member.
In the fluid mixer 10A (10), different materials (fluids) flow in from different spaces, for example, inflow spaces Sb and Sc, and are trench structures 3, 3,..., 4, 4,. .. And flows out of a common space, for example, the outflow space Sa, through the micro holes 5, 5,...

  As shown in FIG. 4, the fluid mixer 10 </ b> A (10) allows the fluid control device 1 to be attached and detached by sandwiching and joining the fluid control device 1 between the upper and lower housings 20 </ b> Aa and 20 </ b> Ab. Therefore, the fluid control device can be appropriately selected or regularly maintained (repaired or replaced) depending on the type and nature of the fluid to be mixed.

(3) Other application examples of the fluid control device (a) In such a fluid control device 1 (1a, 1b, 1c), it is preferable that the variation in the pressure loss of the plurality of induction spaces is within ± 10%. .
Each of the trench structures 3, 3,..., 4, 4,..., Assuming that fluid can flow in a plurality of induction spaces at a constant speed, so that variations in pressure loss in each induction space are within ± 10% It is preferable to design the fine holes 5, 5, ..., 6, 6, .... When the variation in the pressure loss is larger than ± 10%, depending on the processing speed, there is a possibility that a large variation occurs in the mixing property of the fluid.

(B) In the fluid control device 1 (1a, 1b, 1c), it is preferable that the plurality of guide spaces have substantially the same length.
By unifying the lengths of the plurality of trench structures 3, 3,..., 4,... And the micro holes 5, 5,. The flow velocity of the fluid in the openings 5b, 5b, ..., 6b, 6b, ... of the micro holes 5, 5, ..., 6, 6, ... in the plane with respect to the outflow space Sa. It can be made uniform. The flow velocity of the fluid in the openings 5b, 5b,..., 6b, 6b,... Of the micro holes 5, 5,. By aligning, the fluid flows out uniformly, and the fluid can be mixed more uniformly. .., 6b, 6b,... Are preferably within ± 100% and more preferably within ± 50% of the average value.

  The trench structures 3, 3, ... 4, 4, ... and the fine holes 5, 5, ..., 6, 6, ... have the same width, short side length or diameter. , The length of the long side of each of the trench structures 3, 3,... 4, 4 and the length of the fine holes 5, 5,. What is necessary is just to design so that it may become equal. This makes it possible to equalize the fluid flow velocity in the openings 5b, 5b,..., 6b, 6b,. it can. On the other hand, each of the trench structures 3, 3, ... 4, 4, ... and the fine holes 5, 5, ..., 6, 6, ... have different widths, short side lengths or diameters. In this case, the flow velocity of the fluid in the openings 5b, 5b,..., 6b, 6b,. be able to. When changing the lengths of the trench structures 3, 3, ... 4, 4, ... and the fine holes 5, 5, ..., 6, 6, ... Adjust the pitch of the openings 5b, 5b,..., 6b, 6b,... Or position the one opening 3a, 3a,. By adjusting, the lengths of the trench structures 3, 3,..., 4, 4, and the fine holes 5, 5,.

(C) In the fluid control device 1 (1a, 1b, 1c), the openings 5b, 5b, ... of the micro holes 5, 5, ..., 6, 6, ... in the plane with respect to the outflow space Sa. , 6b, 6b,... May be random in the plane with respect to the outflow space Sa.
Disturbing the pitch of the openings 5b, 5b,..., 6b, 6b,... Of the micro holes 5, 5,. Arrange it properly. As a result, the diffusion length of the fluid varies depending on the location, and nonuniform (random) mixing can be realized. As a result, a random product can be obtained. For example, when this fluid control device 1, 1a, 1b is used for the production of nanoparticles, not monodisperse particles with uniform particle diameter, but polydisperse particles with a constant variation in flow diameter are stabilized at a time. Can be processed.

(D) In the fluid control device 1 (1a, 1b, 1c), the fine holes 5, 5, ..., 6, 6, ... in the plane with respect to the outflow space Sa, the openings 5b, 5b, ..., In the arrangement of 6b, 6b,..., The pitch in a specific region in the plane may be different from the pitch in another specific region.
For example, as shown in FIG. 5, the openings 5b, 5b,..., 6b, 6b of the micro holes 5, 5,. The pitch (1) is different between the first region M and the second region N in the plane. As a result, the diffusion length of the fluid varies depending on the in-plane region. For example, when the pitch of the micropores in the first region M is made small (narrow) and the pitch of the micropores in the second region N is made large (wide), the fluid mixing speed becomes faster in the first region M. In the second region N, it becomes slower. Thus, for example, when this fluid control device is used for nanoparticle production, two different types of products or variations such as simultaneous molding of particles having a particle size of two levels, not monodispersed particles having a uniform particle size, can be obtained. The product with it can be obtained.

(E) In the fluid control device 1 (1a, 1b, 1c), the openings 5b, 5b, ... of the micro holes 5, 5, ..., 6, 6, ... in the plane with respect to the outflow space Sa. , 6b, 6b,..., In the vicinity, the diameter of the fine holes may be reduced.
As shown in FIG. 6, the openings 5b, 5b,..., 6b, 6b,... Of the micro holes 5, 5,. In the vicinity, the diameters of the fine holes 5, 5,..., 6, 6,. Thereby, the flow velocity of the fluid in the vicinity of the outflow port is increased, and the vortex is easily generated. Thereby, the mixing property of the fluid is improved. In addition, since only the fine pore diameter in the vicinity of the outlet is thin, it is possible to minimize the increase in pressure loss. In FIG. 6, only one hole is shown in order to explain the shape of the fine hole.

  As a suitable angle for the taper angle, when the outlet diameter of the micropores 3 and 4 is d1 and the inner diameter is d2, the ratio (ΔD (d1)) of the reduction amount ΔD (d1−d2) of the induction space width to the taper distance L / L) is preferably in the range of 0.05 to 2, more preferably in the range of 0.1 to 1. When (ΔD / L) is smaller than 0.05, it is difficult to produce a sufficient difference in micropore diameter. On the other hand, when (ΔD / L) is greater than 2, depending on the type of fluid, stagnation occurs in the induction space, and deposits are easily formed in the induction space. For example, when the outlet diameter d1 of the micro holes is 23 μm and the inner diameter d2 is 25 μm, an increase in flow velocity of about 18% can be expected in the vicinity of the outlet. Therefore, if the difference ΔD in the induction space diameter is 1 μm or less, a sufficient effect can be obtained.

(F) In the fluid control device 1 (1a, 1b, 1c), the openings 5b, 5b, ... of the micro holes 5, 5, ..., 6, 6, ... in the plane with respect to the outflow space Sa. , 6b, 6b,..., In the vicinity, the diameter of the micropores may be widened.
In the vicinity of the openings 5b, 5b,..., 6b, 6b,... Of the micro holes 5, 5,. It is good also as a structure which expanded the diameter of 6. By adopting such a structure, it is possible to suppress separation of a flow generated between two types of fluids flowing out from adjacent micropores 5, 5,..., 6, 6,. Thereby, the resistance of the fluid flowing out from the turbulent flow and the fine holes 5, 5,..., 6, 6,... Can be suppressed, so that the fluid can be pushed out with a larger pressure. As a result, the throughput of the mixture can be increased.

(G) In the fluid control device 1 (1a, 1b, 1c), a coating layer may be provided on the side wall of the guide space.
By providing a coating layer on the side walls of the trench structures 3, 3,... 4, 4, and the micro holes 5, 5,. Chemical resistance can be improved. However, since it is necessary to increase the thickness of the coating layer in order to provide chemical resistance, it is difficult to provide a thick film coating layer on the substrate 2 side, but it can be provided on the housing side.
In addition, when a highly viscous fluid is allowed to flow through the guide space, there is a concern that deposits accumulate on the side walls and clog the holes. Since the fluororesin coating layer can be applied and formed as a thin film, it can also be formed in the micropores. Therefore, by providing a fluororesin coating layer on the substrate 2 side, the trench structures 3, 3,..., 4, 4, and the fine holes 5, 5,.・ Clogging can be suppressed.

(H) In the fluid control device 1 (1a, 1b, 1c), temperature adjusting means may be provided inside the base body 2.
A separate micro induction space may be provided on the downstream side of the region A, and temperature adjusting means may be provided so as to control the temperature of the substance flowing in the induction space. Although the temperature adjusting means is not particularly limited, a wiring structure that becomes a heater or a heater and a temperature sensor portion can be formed on the base 2. At this time, an insulating layer may be provided on the substrate 2 in order to keep insulation against the solution. Examples of wiring for the heater or temperature sensor include nichrome and ITO. Moreover, you may use a microwave for temperature rising.
For example, as shown in FIG. 7, by providing a conduit or a PWW (post wall waveguide) 90 as temperature control means on the base 2 and providing a flow path 25 inside the base 2, heating can be performed. Become. Further, a temperature channel may be provided on the substrate 2 as a temperature control means, and a fluid (liquid or gas) having an appropriate temperature may be flowed into the channel to raise the temperature and cool it.

(I) In the fluid control device 1 (1a, 1b, 1c), temperature adjusting means may be provided outside the base body 2.
A temperature adjustment mechanism may be provided outside the base 2 (for example, the housing 20 portion). The temperature adjusting means is not particularly limited, and for example, a thermocouple serving as a temperature sensor or a micro heater serving as a heater can be used. What is necessary is just to provide the insertion port of these temperature control mechanisms in the outer side of the base | substrate 2. FIG. Alternatively, the temperature may be raised and cooled by providing a flow path inside the base 2 and flowing a fluid (liquid or gas) having an appropriate temperature through the flow path.

(J) In the fluid control device 1 (1a, 1b, 1c), the base body 2 has an outlet channel 21 in which one communicates with the outflow space Sa and the other communicates with the surface. May have a structure in which the diameter is narrowed so that one side is wide and the other side is narrow.
As shown in FIG. 8, in the outlet channel 21 provided in the housing 20, one of which communicates with the outflow space Sa and the other communicates with the surface, the other side of the outlet channel 21 has a structure with a restriction. It is good. In the region A, the micropores 5, 5,..., 6, 6,... Take a two-dimensional arrangement. It needs to be a large area. On the other hand, in order to speed up the mixing of the two kinds of fluids exiting the micro holes 5, 5, ..., 6, 6, ..., the diameter of the outlet channel is reduced and the diffusion distance between the fluids is increased. It is preferable to make it small. Therefore, it is preferable that the outlet guide space in the region A has a structure having a restriction.

(4) Manufacturing method of fluid control device Next, the manufacturing method of the fluid control device 1 mentioned above is demonstrated. The manufacturing method of each fluid control device according to the modified example of the fluid control device 1 is the same as that of the fluid control device 1.

  The manufacturing process of the fluid control device 1 of the present embodiment includes a step of condensing and irradiating a laser beam having a pulse width of a picosecond order or less inside the substrate 2 to form a plurality of modified portions, And removing the modified portion formed inside the base body 2 by etching to form a guide space (trench structure and fine holes).

(4-1) Modified portion forming step First, laser light irradiation is performed on a region serving as a guide space of the base 2. As the light source of the laser light, for example, femtosecond laser light can be used. A femtosecond laser is a laser whose pulse width is on the order of femtoseconds (fs). Substrate that is an object to be processed in the vicinity of the focal point because it has a high peak intensity because it is an ultrashort pulse of several femtoseconds to several hundred femtoseconds, and induces multiphoton absorption that is a nonlinear optical phenomenon near the focal point. 2 can be changed to form a fine modified portion. At that time, as the substrate 2 which is a material to be processed, a transparent material such as a glass material is preferably used.

For example, the laser light is irradiated from one main surface side of the base 2 and the condensing part S is scanned so that the formed guide space is arranged in at least two layers in the base 2. In addition, the reforming unit serving as the guide space scans the condensing unit S so as to be formed in order from the far side from the laser light source. As a result, a modified portion that becomes a guide space can be formed three-dimensionally inside the base 2.
Moreover, it can be set as the modification part in which a desired induction | guidance | derivation space diameter is formed by adjusting the output of the laser beam to irradiate suitably according to the fluid to mix.

The irradiation intensity is preferably in the vicinity of the processing threshold of the material constituting the substrate 2 or above the processing threshold and above the ablation threshold. This is to form a modified portion with higher etching selectivity.
Here, the processing threshold is defined as the lower limit value of the laser pulse power for forming the modified portion. The ablation threshold is a lower limit value of laser pulse power for generating ablation, and is different from the processing threshold. Generally, the processing threshold value is smaller than the ablation threshold value.
When forming the modified portion, the laser beam may be irradiated from only one or the other main surface of the substrate or from both main surfaces of the substrate.

(4-2) Guidance space formation process The base body 2 in which the region to be the guidance space has been modified through the modification portion formation step is immersed in an etching solution (chemical solution), the modification portion is wet-etched, and modified. The mass is removed from the substrate. In the base body 2 from which the modified portion has been removed, a group of induction spaces composed of a trench structure and fine holes are formed in a three-dimensional manner.

  In the fluid control device 1 according to the present embodiment, quartz glass is used as the substrate 2 and a solution containing hydrofluoric acid (HF) as a main component is used as an etching solution. Such an etching process utilizes a phenomenon in which the modified portion is etched at an etching rate several tens of times that of the unirradiated region of the laser beam. Therefore, by controlling the etching time, only the region where the induction space irradiated with the laser beam should be formed can be selectively etched and removed, and the etching selectivity can be used to fix it in the substrate 2. As a structure, a group of guidance spaces can be formed in a three-dimensional manner.

  The etching solution is not particularly limited. For example, in addition to a solution containing hydrofluoric acid (HF) as a main component, a hydrofluoric acid-based mixed acid obtained by adding an appropriate amount of nitric acid or the like to hydrofluoric acid, or an alkali such as KOH can be used. Also, other chemicals can be used depending on the material of the substrate 2.

(5) Action / Effect In the fluid control device 1 (1a, 1b, 1c) according to the present embodiment (type 1), a plurality of guide spaces each having an independent trench structure are formed in a single base body 2. Is formed. A plurality of guiding spaces are a guiding space group α that constitutes a specific group and a guiding space group β (n) that constitutes another particular group, a region B into which fluid flows in on the surface (outer surface) of the base 2, Each of C and a region A where fluid flows out has an opening, and is formed as a three-dimensional guide space group that communicates region A, region B, and region C. In particular, in the present embodiment, a plurality of fine holes are formed in which the guidance space is connected to the trench structure.
The openings of the guidance space group α and the guidance space group β (n) facing the region A are two-dimensionally arranged in the plane with respect to the region A. In addition, the opening portions of the micro holes constituting each of the guiding space group α and the guiding space group β (n) are formed so that the opening portions leading to the region A are alternately located at the most adjacent positions.

Therefore, in the fluid control device 1 (1a, 1b, 1c) according to the present embodiment (type 1), a plurality of types of fluids flowing from the regions B and C may be mixed before flowing out from the region A. And the flow of fluid can be controlled independently. For this reason, there is no possibility that solids generated by mixing a plurality of fluids in the guidance space gradually accumulate in the guidance space and partially block the guidance space.
In addition, since the plurality of guide space groups are three-dimensionally stacked in the base body 2, a large number of guide spaces can be provided in comparison with the two-dimensional guide space. Capability and productivity can be increased.
Furthermore, since the induction space group in the base body 2 is an integral and continuous body, liquid leakage does not occur at the bonding interface, and the pressure resistance performance can be improved.
In particular, in this embodiment, the flow velocity distribution can be made more uniform by forming a plurality of micro holes arranged by connecting the guide space to the trench structure than when the guide space has only the trench structure. In addition, the pressure loss in the induction space can be minimized and the two-liquid boundary surface can be four. For this reason, the mixing speed of the fluid can be increased.

(6) Configuration of fluid control device (Type 2)
(6-1) Second Embodiment (No. E4)
FIG. 9 is a schematic diagram illustrating a configuration example of the fluid control device 1d (1) according to the present embodiment, and FIG. 9A is a perspective view schematically illustrating the fluid control device 1d (1). ) Is a schematic cross-sectional view of arrow view X9-X9, (c) is a schematic cross-sectional view of arrow view Y9-Y9, (d) is a partial plan view of arrow view Z9a, and (e) is a view of arrow view Z9b. FIG.
A second embodiment according to the present invention will be described below with reference to the drawings.

The fluid control device 1d (1) of the present invention includes a base body including a single mixed space, a plurality of guide spaces having a trench structure, and a plurality of inflow spaces.
Similarly to the fluid control device 1a (1) of the first embodiment, the fluid control device 1d (1) according to the present embodiment has a substantially rectangular shape as viewed from the mixing space. The long sides of one of the trench structures in the guide space that are adjacent to each other are arranged at predetermined intervals. The openings of the fine holes in the other trench structure, which are arranged in parallel and correspond to the openings of the fine holes in one of the trench structures, are in communication with the different inflow spaces.
However, in the fluid control device 1d (1) of the present invention, in the base having a flat plate shape, the two inflow spaces Sb and Sc are in different regions (B and C) on the lower surface side of the base, and the outflow space Sa is the upper surface of the base. The point which is each arrange | positioned at the side (A) differs from the fluid control device 1a (1) of 1st Embodiment.

As shown in FIG. 9, in the fluid control device 1 d (1), a plurality of trench structures 3, 3,..., 4, 4,. When viewed from the mixed space, the trench structures 3, 3, ... 4, 4, ... have a substantially rectangular shape.
Here, as in FIG. 1 (c), the substantially rectangular shape means that the tip 3p of the trench structure 3 (that is, the farthest part from the inflow space and the deepened part) is a straight line when viewed from the mixing space. In addition to the above, it is meant to include a configuration having a rounded shape (for example, an arc shape). The same applies to the tip 4p of the trench structure 4.
Moreover, in the base | substrate 2, the long side of one trench structure of the guidance space which has an adjacent positional relationship is spaced apart and arrange | positioned in parallel with predetermined spacing.

A plurality of fine holes 5, 5,..., 6, 6,... Are formed so as to be connected to each of the plurality of trench structures 3, 3,. Has been. When viewed from the mixing space, one opening of the guide space has openings 5b, 5b,..., 6b, 6b of the plurality of micro holes 5, 5,. It consists of ...
When viewed from the inflow space, the other opening of the induction space has openings 3a, 3a,..., 4a, 4a of the plurality of trench structures 3, 3,. It consists of ...
.. Corresponding to the openings 5b, 5b,... Of the micro holes 5, 5,... In the one trench structure 3, 3,. , 6,... Communicate with the different inflow spaces in different regions (B, C) on the lower surface side of the base.

A guide space group α constituting a specific group among the plurality of guide spaces has openings 3a, 3a,..., 5b, 5b in the regions A and B on the surface (outer surface) of the base 2.・ Has
A guide space group β constituting another specific group of the guide spaces has openings 4a, 4a, ..., 6b, 6b, ... in regions A and C on the surface (outer surface) of the base 2, respectively. have.
In the base 2, the micro holes 5, 5,... 6, 6,. Yes.

  As shown in the schematic cross-sectional views of FIGS. 9B and 9C, the trench structures 3, 3,... And the fine holes 5, 5,. It is formed as a three-dimensional guiding space group α in which the region A and the region B on the surface (outer surface) of the base 2 are communicated. Similarly, the trench structures 4, 4,... And the fine holes 6, 6,... Have a three-dimensional induction space group β connecting the region A and the region C on the surface (outer surface) of the base 2. It is formed as (1).

Opening portions 5b, 5b, ..., 6b of the micro holes 5, 5, ..., 6, 6, ... of the induction space group α and the induction space group β (1) facing the region A, 6b,... Are two-dimensionally arranged in the plane with respect to the region A as shown in FIG. Moreover, the openings are alternately formed at the most adjacent positions.
On the other hand, in different regions (B, C) on the lower surface side of the base, the openings 3a, 3a,... Of one of the trench structures 3, 3,. Thus, it has a substantially rectangular shape reflecting the trench structure, and is arranged in parallel and spaced apart from each other. The openings 4a, 4a, ... of the trench structures 4, 4, ... have the same shape and arrangement.

In the fluid control device 1d (1), different materials (fluids) flow from different spaces, for example, inflow spaces c, and are trench structures 3, 3,..., 4, 4,. And the fine holes 5, 5,..., 6, 6,.
In different regions (B, C) on the lower surface side of the substrate, openings 3a, 3a,..., 4a, 4a,. As shown in FIG. 9 (d), a substantially rectangular shape reflecting the trench structure is formed, and the majority of the guide space is formed as a trench structure, so that the guide space is formed as a fine hole. The induction space can take in a large amount of fluid and flow a large amount of fluid.
And in the front part which discharge | releases to mixing space, several micro hole 5, 5, ..., 6 distribute | arranged and connected to trench structure 3, 3, ..., 4,4, ... , 6,... Can be made more uniform than the case where the guiding space has only a trench structure, and the pressure loss in the guiding space can be minimized and the two-liquid boundary. There can be four surfaces. For this reason, the mixing speed of the fluid can be increased. In the micromixer described in Patent Document 2, there are two liquid-liquid boundary surfaces.

That is, in the fluid control device 1d (1) of the second embodiment (type 2), the two inflow spaces Sb and Sc are discharged into different regions (B and C) on the lower surface side of the base in the flat base. The point where the space Sa is arranged on the upper surface side (A) of the base body is different from the fluid control device 1a (1) of the first embodiment.
However, the fluid control device 1d (1) of the second embodiment (type 2) is different from the first embodiment (type 1) described above in other points (6a) to (6c), as shown below. It is the same.

(6a) When viewed from the mixed space, one opening portion of the guide space is formed of openings of a plurality of fine holes arranged in connection with each of the rectangular trench structures, and is adjacent to each other. The long sides of one of the trench structures in the guide space are arranged in parallel at a predetermined interval apart from each other, and correspond to the opening of the microhole in one trench structure at the adjacent position. The openings of the fine holes in the trench structure each communicate with different inflow spaces.
(6b) A plurality of trench structures 3, 3,..., 4, 4,. When viewed from the mixed space, the trench structures 3, 3, ... 4, 4, ... have a substantially rectangular shape. Here, the substantially rectangular shape is not clearly shown in the figure, but the tip portion 3p of the trench structure 3 (that is, the farthest part from the inflow space and the deep part) is straight when viewed from the mixed space. In addition, it means that a configuration having a rounded shape (for example, an arc shape) is included. The same applies to the tip 4p of the trench structure 4.
(6c) In the base body 2, the long sides of one of the trench structures of the guide spaces adjacent to each other are spaced apart and arranged in parallel at a predetermined interval.

Also in the fluid control device of the second embodiment (type 2), a plurality of micropores 5 arranged in connection with each of the plurality of trench structures 3, 3, ... 4, 4, ..., 5, ..., 6, 6, ... are formed. When viewed from the mixing space, one opening of the guide space has openings 5b, 5b,..., 6b, 6b of the plurality of micro holes 5, 5,. It consists of ...
When viewed from the inflow space, the other opening of the induction space has openings 3a, 3a,..., 4a, 4a of the plurality of trench structures 3, 3,. It consists of ...
.. Corresponding to the openings 5b, 5b,... Of the micro holes 5, 5,... In the one trench structure 3, 3,. , 6,... Communicate with the different inflow spaces.

  In particular, in the fluid control device of the second embodiment (type 2) shown in FIG. 9, the opening portions of the micropores communicating with different inflow spaces in the region B and the region C on the lower surface side of the base body 2 respectively. Each trench structure is configured to form one (single) substantially rectangular shape [FIG. 9 (e)]. Therefore, the fluid control device according to the second embodiment (type 2) shown in FIG. 9 can cope with a large inflow amount as compared with the configuration [FIG. 15] communicating with the inflow space through the openings of the plurality of fine holes. It is also possible to reduce the pressure loss.

The fluid control device 1 shown in FIG. 9 indicates that “in the base body having a flat plate shape, the two inflow spaces Sb and Sc are arranged at different positions on the lower surface side of the base body, and correspond to the areas B and C, respectively. This is a configuration example in which the outflow space Sa is disposed on the upper surface side of the base body and corresponds to the region A. However, the fluid control device of the second embodiment (type 2) is not limited to the configuration example of FIG. For example, as long as the conditions of individually arranging without satisfying the areas A to C are satisfied, either one or both of the areas B and C may be provided on the upper surface side of the same base as the area A.
In the case of the fluid control device of the second embodiment (type 2), the above-described high pressure resistance performance can be realized only by arranging the casing so as to sandwich the base from both the upper and lower sides of the base.

(6-2) Modification 2A (No. E5)
FIG. 10 is a schematic diagram showing a modified example (hereinafter also referred to as modified example 2A) of the fluid control device according to the present embodiment (second embodiment). 10A is a perspective view schematically showing the fluid control device 1e (1), FIG. 10B is a schematic cross-sectional view taken along arrow X10-X10, and FIG. 10C is a view taken along arrow Y10-Y10. (D) is a plan view of the arrow Z10a, and (e) a plan view of the arrow Z10b.

  As in the fluid control device 1d (1) of the second embodiment described above, the fluid control device 1e (1) of the modified example 2A includes a single mixed space, a plurality of guide spaces having a trench structure, and a plurality of And an inflow space. In the fluid control device 1e (1) of FIG. 10, even if they belong to the same guidance space group, the plurality of guidance spaces forming the trench structure are separated from other guidance spaces substantially over their entire length. It is arranged.

  Further, the fluid control device 1e (1) of the modified example 2A states that “in the flat base, the two inflow spaces Sb and Sc are in different regions (B, C) on the lower surface side of the base, and the outflow space Sa is in the base. The points arranged on the upper surface side (A) are the same as those in the second embodiment (type 2) described above.

  However, the fluid control device of the modified example 2A states that “a portion α in front of each of the plurality of guide spaces having a trench structure communicating with the two inflow spaces Sb and Sc has a plurality of micro holes 3a, 3a,. 4a, 4a,... Are different from the fluid control device 1d (1) of the second embodiment (type 2) described above [FIG. 10 (e)].

By providing the points different from the second embodiment (type 2) described above, in the fluid control device 1e (1) of the modified example 2A, the fluid control device enters the fluid control device from the two inflow spaces Sb and Sc. The fluid is introduced into the trench structure for the first time after passing through the plurality of fine holes 3a, 3a,..., 4a, 4a,.
Therefore, according to the fluid control device of the modified example 2A, high pressure resistance performance can be realized as in the second embodiment (type 2) described above, and a plurality of fine holes 3a, 3a,..., 4a, 4a, As for ..., the number of micropores provided per unit area, the aperture diameter of the micropores, the aperture shape of the micropores, the inner wall surface shape of the micropores, the length (depth distance) of the micropores, etc. are adjusted as appropriate. Therefore, the plurality of fine holes 3a, 3a,..., 4a, 4a,.

(6-3) Modification 2B (No. E6)
FIG. 11 is a schematic diagram illustrating another modification (hereinafter, also referred to as modification 2B) of the fluid control device 1 according to the present embodiment (second embodiment). 11A is a perspective view schematically showing the fluid control device 1f (1), FIG. 11B is a schematic cross-sectional view taken along arrow X11-X11, and FIG. 11C is a view taken along arrow Y11-Y11. (D) is a top view of arrow Z11a, (e) is a top view of arrow Z11b.

As in the fluid control device 1d (1) of the second embodiment described above, the fluid control device 1f (1) of Modification 2B includes a single mixed space, a plurality of guide spaces that form a trench structure, and a plurality of guide spaces. And an inflow space.
Further, the fluid control device 1f (1) of the modified example 2B states that “in the flat base, the two inflow spaces Sb and Sc are in different regions (B and C) on the lower surface side of the base, and the outflow space Sa is the base. The points arranged on the upper surface side (A) are the same as those in the second embodiment (type 2) described above.

  However, in the fluid control device 1f (1) of the modified example 2B, even though belonging to the same guidance space group, the plurality of guidance spaces forming the trench structure are “the trench structures 3 and 4 of the trench structure 3 and 4 as viewed from the mixed space”. In the portions 3c and 4c "provided with the openings 5b and 6b of a plurality of micro holes arranged in connection with each other, the portions 3c and 4c" are spaced apart from other guiding spaces. In the “other portions 3a, 3b, 4a, 4b”, all or part of them belong to the same induction space group and have a large trench structure ”in the second embodiment described above ( It is different from type 2) [FIG. 11 (e)].

By providing a different point from the second embodiment (type 2) described above, in the fluid control device 1f (1) of the modified example 2B, the fluid enters the fluid control device from the two inflow spaces Sb and Sc. In the “other portions 3a, 3b, 4a, and 4b”, the fluid to be transferred can travel inside one large trench structure.
Therefore, according to the fluid control device 1f (1) of the modified example 2B, high pressure resistance performance can be realized as in the fluid control device 1d (1) of the second embodiment (type 2) described above, and the second embodiment. Compared with the (type 2) fluid control device 1d (1), the influence of pressure loss can be reduced. By adjusting the ratio of the “large one trench structure” in the “other portions 3a, 3b, 4a, 4b” as appropriate, a detailed design according to various conditions of the fluid, such as viscosity, flow rate, flow velocity, etc. It can also be done. For example, by changing the cross-sectional area or cross-sectional shape of the “large one trench structure” in the fluid traveling direction, eddy currents that are generated in the fluid and hinder flowability are eliminated or reduced. It is also possible.

(7) Configuration of fluid mixer (Type 2)
FIG. 12 is a schematic cross-sectional view showing another configuration example of the fluid mixer 10B (10), in which the fluid control device of the second embodiment (type 2) disclosed in (6-1) is mounted. It is.
Hereinafter, a fluid mixer 10B (10) according to the present invention will be described with reference to the drawings.

  As shown in FIG. 12, the fluid mixer 10 </ b> B (10) includes a fluid control device 1, a single outflow space Sa that includes the fluid control device 1 and faces the region A of the fluid control device 1, and The fluid control device 1 includes a housing 20B (20) provided with a single inflow space Sb and Sc that individually face the region B and the region C, respectively. As the housing 20B (20), metals such as stainless steel can be used. In the fluid mixer 10B (10) shown in FIG. 12, a seal member, which will be described later, is provided between the fluid control device 1 (outer surface) and the housing 20B (20) (inner surface) to indirectly contact each other. Is configured to do.

  The casing 20B (20) includes an upper casing 20a that forms an outflow space Sa facing the surface (outer surface) of the region A of the base 2 constituting the fluid control device 1, and the surfaces of the regions B and C of the base 2 And a lower housing 20b that forms inflow spaces Sb and Sc facing the (outer surface). Further, the respective surfaces (outer surfaces) of the regions A, B, and C of the fluid control device 1 are joined to the upper housing 20Ba and the lower housing 20Bb via the seal member R, and the outflow space Sa and the inflow space Sb are joined together. , Sc is formed as an independent space. By providing the sealing member R between the surface (outer surface) of the fluid control device 1 and the housing 20B (20), the adhesion between the fluid mixer 10B (10) and the housing 20B (20) is improved. Since it increases, the flexibility corresponding to the pressure, flow rate, and flow velocity of the fluid can be improved. Here, as the seal member R, an elastic seal member such as an O-ring can be used.

  Also, as shown in FIG. 12, in the fluid mixer 10B (10), the fluid control device 1 can be attached and detached by sandwiching and joining the fluid control device 1 between the upper and lower housings 20a and 20b. It is said. With the configuration in which the sealing member R is provided between the fluid mixer 10B (10) and the housing 20B (20), the fluid mixer 10B (10) can be appropriately used as a fluid control device depending on the type and nature of the fluid to be mixed. It is superior to the fluid mixer 10A (10) described above in the function to be selected and the function to be periodically maintained (repaired and replaced), and can be multifunctional and improve long-term reliability.

  FIG. 13 is a schematic diagram for explaining a configuration of a fluid mixer including a detachable fluid control device. As shown in FIG. 13, the fluid mixer 10 </ b> B (10) is configured such that the fluid control device 1 is joined by sandwiching the fluid control device 1 between upper and lower housings (upper housing 20 a and lower housing 20 b). The control device 1 is detachable. Therefore, the fluid control device can be appropriately selected according to the type and nature of the fluid to be mixed.

(8) Comparative Example: Fluid Control Device and Fluid Mixer FIG. 15 is a schematic diagram illustrating a configuration example of the fluid control device 101 according to Comparative Example 1, and FIG. 15 (a) schematically illustrates the fluid control device 101. It is the shown perspective view. 15B is a schematic cross-sectional view taken along the arrow X101-X101, FIG. 15C is a schematic cross-sectional view taken along the arrow Y101-Y101, and FIG. 15D is a plan view taken along the arrow Z101.
Hereinafter, the fluid control device 101 according to the comparative example 1 will be described with reference to the drawings. As will be described later, the fluid control device according to Comparative Example 1 is described as follows: “In the substrate 102, the micropores 103, 103,..., 104, 104,. However, it is different from the fluid control device according to the present invention in that it has a configuration in which it is arranged so as to be spaced apart from other fine holes along its entire length.

As shown in FIGS. 15A to 15D, the fluid control device 101 includes a plurality of fine holes 103, 103,..., 104, 104,. Is formed. .., 104, 104,... Constitute a specific group, and each of the flow path groups α opens in the region A and the region B on the surface (outer surface) of the base 2. .., 103b, 103b,... And the flow path group β (1) constituting another specific group of the fine holes is a region on the surface (outer surface) of the base 2 A and region C have openings 104a, 104a,..., 104b, 104b,.
In the substrate 2, the micro holes 103, 103,..., 104, 104,... Belonging to the respective flow path groups α, β (1) are separated from other micro holes over the entire length thereof. It is arranged.

In particular, in the configuration example shown in FIG. 15 (Comparative Example 1), an outflow space Sa is formed facing the surface (outer surface) of the region A of the base 2 constituting the fluid control device 1, and the region B of the base 2 is formed. Inflow spaces Sb and Sc are formed so as to face the surface (outer surface) of C, and the region A is disposed on the upper surface of the substrate 2 and the regions B and C are disposed on different side surfaces of the substrate 102.
As a modified example (comparative example 2) of the configuration example (comparative example 1) shown in FIG. 15, a configuration in which the region A is arranged on the upper surface of the base 102 and the regions B and C are arranged at different locations on the lower surface of the base (not shown) Is mentioned. The other points are the same as the configuration example (Comparative Example 1) shown in FIG.

  As shown in the schematic cross-sectional views of FIGS. 15B and 15C, the fine holes 103, 103,... Provided in the single base 102 are regions on the surface (outer surface) of the base 102. It is formed as a three-dimensional channel group α in which A and the region B are communicated. Similarly, the fine holes 104, 104,... Are formed as a three-dimensional flow path group β (1) that connects the region A and the region C on the surface (outer surface) of the base body 102.

Each of the openings 103b, 103b,..., 104b, 104b,... Of the flow path group α and the flow path group β (1) facing the area A is an area as shown in FIG. In the plane with respect to A, they are arranged two-dimensionally. Moreover, the openings are alternately formed at the most adjacent positions.
In FIG. 1D, the symbol S is “space”, which means the distance between the outer peripheral ends of the adjacent opening 3b and the opening 4b. The symbol L is “pitch” and means the distance between the center (black circle) of the adjacent opening 3b and the center (black circle) of the opening 4b.

(9) Functional comparison of the present invention and comparative examples Based on the above (1) to (8), the following table summarizes the issues of the present invention (mixability, processing capacity, pressure resistance). It is Table 1. Here, each item A to T is displayed in five stages, with the most excellent configuration example as the highest evaluation “5”.
The following AD was evaluated about the fluid control device (glass part).
A: Mixability means ease of mixing of fluids.
B: A processing capacity means the quantity of the liquid mixture produced per unit time. The smaller the pressure loss in the flow path, the higher the throughput.
C: Pressure resistance means the strength of the flow path with respect to the fluid pressure.
D: The filter effect means a high ability to prevent foreign matter from flowing in. The smaller the opening on the inflow space side of the substrate, the higher the filter effect.
The following E to F were evaluated for the fluid mixer (relationship with the casing).
E: Pressure resistance means the total performance of the strength of the flow path with respect to the fluid pressure and the strength of the seal between the base and the casing.
F: The processing capacity means the total performance of the amount of the mixed liquid produced per unit time and the seal strength between the substrate and the casing.

The contents corresponding to the special note T in Table 1 are as follows. In particular, the features of Comparative Example 1 (C1) will be described.
T1: The processing capacity of the glass part is high.
T2: In addition to the high processing capacity of the glass part, a staggered pattern (uniform flow velocity distribution, two-liquid interface
4), the mixing speed can be improved.
T3: The processing ability of the glass part can be secured while increasing the pressure resistance of the glass part.
T4: The best balance. Configuration in which the chassis is arranged so that the base is sandwiched from both the upper and lower sides of the base + size
It is possible to cope with a large amount of inflow (improvement of processing capacity) and reduce pressure loss.
T5: In addition to the functions and characteristics of E4, a filter function can be added, so it has excellent long-term stability.
T6: Compared with T1 to T5, the processing capacity of the housing is the highest.

From Table 1, the following became clear.
(A) Regarding the mixing property, the fluid control devices (E1 to E6) and the comparative examples (C1 to C2) according to the present invention are not different, and all have excellent characteristics.
(B) Regarding the substrate processing capability, all of the fluid control devices (E1 to E6) according to the present invention are higher than the comparative examples (C1 to C2). Among these, E1, E2, and E6 are excellent.
(C) Regarding the pressure resistance, a comparative example in which all the channels are composed of fine holes is excellent. However, also in the fluid control device according to the present invention, the same pressure resistance is ensured by providing the structure in which the trench structure is divided (E3).
(D) In the fluid mixer (in relation to the casing), in order to obtain excellent pressure resistance, a configuration (E4 to E6, C2) in which an inflow space and an outflow space are provided at positions sandwiching the fluid control device, respectively. It is valid. In the case of adopting this configuration, it is possible to provide a seal member between the fluid control device and the housing so as to be in indirect contact with each other, so that the pressure resistance is further improved. In addition, the fluid control device can be attached and detached, which is effective in terms of replacement and maintenance.
(E) In the fluid mixer (in relation to the housing), in order to obtain excellent processing capability, the combination of the micropores and the trench structure in the induction space is located at the minimum part (near the mixing space) (E6) is effective. Since the processing capacity of the casing is the highest as compared with T1 to T5, it is necessary to devise the pressure resistance of the glass portion.
Therefore, the present invention contributes to the provision of a fluid control device and a fluid mixer that enable extremely efficient mixing, have a high processing capacity, and have a high pressure resistance.

(10) Application example of fluid control device (third embodiment)
FIG. 14 is a schematic diagram showing a configuration example of the μTAS chip 100 according to the present embodiment on which the fluid control devices 1, 1 a, and 1 b as described above are mounted. FIG. 14A is a plan view of the μTAS chip 100. (B) is an enlarged plan view of the fluid control device portion, and (c) is an enlarged cross-sectional view of the fluid control device portion.

  The μTAS chip 100 shown in FIG. 14 includes at least a base body 110 that functions as a μTAS chip main body and a fluid control device 1 (1a, 1b) that is provided so as to be integrated with the base body 110. The μTAS chip 100 further includes a reactor 120, a separator 130, and a detector 140 on the downstream side of the fluid control device 1 (1a, 1b). This is a configuration example of the μTAS chip. It is not limited. For example, the reactor 120, the separator 130, and the detector 140 may be configured separately from the μTAS chip 100.

  The fluid (liquid or gas) to be analyzed and the selected carrier flow from the inflow spaces Sb and Sc through the respective filter function units F, and then flow into the induction space of the fluid control device 1 and the outflow space Sa. Mixed in. Thereafter, the sample reacted in the reactor 120 is separated from the carrier by the separator 130 as necessary, and desired analysis information is taken out by the detector 140 to an external device or the like.

  As for the configuration of μTAS, in addition to the one in which the fluid mixing unit, reactor, separator, etc. are integrated on one substrate as in this embodiment, individual components such as a fluid mixer, reactor, separator, etc. are assembled and systemized. You can also

  The embodiments of the present invention have been described with specific examples. However, the technical scope of the present invention is not limited to the above-described embodiments, and various modifications are made without departing from the spirit of the present invention. It is possible.

  1a, 1b, 1c, 1d, 1e, 1f (1) Fluid control device, 2 substrate, 3, 4 trench structure, 5, 6 micropore, 100 μTAS chip, Sa outflow space, Sb, Sc inflow space, α, β (N) Guide space group.

Claims (5)

A fluid control device comprising a base body including a single mixed space, a plurality of guide spaces having a trench structure, and a plurality of inflow spaces,
When viewed from the mixed space, one opening of the guide space is formed of openings of a plurality of micro holes arranged in connection with each of the trench structures having a substantially rectangular shape,
The long sides of one of the trench structures in the guide space that are in an adjacent positional relationship are spaced apart and arranged in parallel at a predetermined interval, corresponding to the opening of a microhole in one of the trench structures in the adjacent position The fluid control device is characterized in that the openings of the micro holes in the other trench structure communicate with the different inflow spaces.   The opening of the micro hole in the one trench structure and the opening of the micro hole in the other trench structure are two-dimensionally arranged in a plane with respect to the mixed space. The fluid control device as described.   3. The fluid according to claim 2, wherein the openings of the micropores in the plane with respect to the mixing space are arranged such that the openings leading to the different inflow spaces are closest to each other. Control device.   The fluid control according to any one of claims 1 to 3, wherein the trench structure is divided into two or more by partition walls arranged along a long side direction of the trench structure. device.   A fluid control device according to any one of claims 1 to 4, a single outflow space that contains the fluid control device and faces a region C of the fluid control device, and A fluid mixer comprising: a housing having at least an inflow space that individually faces the region B and the region C.

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