JP2014225960A - Non-contact power-feeding device, moving body, and non-contact power-feeding system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid reduction in power-feeding efficiency to a moving body.SOLUTION: A non-contact power-feeding system 1 supplies power, in a non-contact manner, to a moving body 2 moving along a travel path 4 from a non-contact power-feeding device 3 by a magnetic-field resonance method. The moving body 2 has a two power-receiving coils 12a and 12b disposed respectively in two power-receiving-side resonance circuits 11a and 11b having different resonant frequencies fa and fb, and a secondary battery 14 charged by DC voltages Vda and Vdb generated on the basis of AC voltages Vra and Vrb outputted from the power-receiving-side resonance circuits 11a and 11b. The non-contact power-feeding device 3 has a plurality of two kinds of power-feeding-side resonance circuits 21a and 21b having the same resonant frequencies as the resonant frequencies fa and fb, and a plurality of two kinds of power-feeding coils 22a and 22b disposed respectively in the two kinds of power-feeding-side resonance circuits 21a and 21b. The power-feeding coils 22a and 22b are alternately juxtaposed to one another with a space along the travel path 4.

Description

  The present invention relates to a non-contact power feeding device that feeds power to a moving body in a non-contact manner, a mobile body that receives power from the non-contact power feeding device in a non-contact manner, and a non-contact power feeding including the moving body and the non-contact power feeding device. It is about the system.

  As this type of non-contact power supply system, a non-contact power supply system disclosed in Non-Patent Document 1 below is known. The moving body constituting this non-contact power feeding system includes a power receiving coil, a ferromagnetic body, and a secondary battery. The moving body travels on the travel path using the electric power stored in the secondary battery. The power receiving coil is wound around a ferromagnetic body, and one terminal is connected to the positive terminal of the secondary battery, and the other terminal is connected to the negative terminal of the secondary battery. In this power receiving coil, depending on the moving state of the moving body, the electromagnetic induction between the power feeding coil and the nearest one of the plurality of power feeding coils arranged along the traveling path as described later, An electromotive force (an electromotive force generated by a magnetic flux fluctuation generated by a current flowing through the one feeding coil) is generated at both ends, and the secondary battery is charged by the red electromotive force.

  On the other hand, a non-contact power feeding apparatus that constitutes a non-contact power feeding system together with a moving body includes a plurality of power feeding unit units and one AC power source. Each power supply unit section includes a power supply coil defined with the same inductance, a power supply capacitor defined with the same capacitance value, and a power amplifier, and is connected in parallel to a common AC power supply. Specifically, the input terminal of the power supply amplifier in each power supply unit is connected to one terminal of the AC power supply. In addition, the other terminal of the power feeding coil in each power feeding unit is connected to the other terminal of the AC power source. The AC power source is composed of a constant voltage source that supplies predetermined power at a constant frequency. Further, one side terminal of the power feeding capacitor is connected to the output terminal of the power feeding amplifier, and one side terminal of the power feeding coil is connected to the other side terminal of the power feeding capacitor.

  With this configuration, in each power supply unit, an AC voltage is constantly supplied from a common AC power supply to the power supply amplifier. For this reason, the power supply amplifier can always amplify the supplied AC voltage and supply it to the series circuit of the power supply capacitor and the power supply coil.

  In addition, the power supply coil of each power supply unit section is installed at a predetermined interval along the travel path and inside the travel path, and when the power reception coil of the moving body comes close to the power supply coil, It is arranged at a position where guidance is possible.

  In this non-contact power feeding device, since the ferromagnetic body is disposed in the power receiving coil of the moving body, the distance between the moving body and the feeding coil (between the ferromagnetic body of the moving body and the feeding coil) The inductance of the feeding coil varies greatly according to the distance. In this non-contact power feeding device using the change in inductance of the power feeding coil, one power feeding unit having a power feeding coil whose distance from the moving body is within a predetermined range is When the power supply capacitor functions as a resonance circuit, power is supplied to the moving body. Thereby, the effective electric power supplied to this electric power feeding unit part from AC power supply becomes large.

  On the other hand, other power supply units having a power supply coil whose distance to the moving body is larger than the predetermined range do not supply power to the mobile body because the power supply coil and the power supply capacitor do not function as a resonance circuit. do not do. Thereby, the effective electric power supplied to these electric power feeding unit parts from AC power supply becomes small.

  Thus, according to this non-contact electric power feeding system, according to the traveling state (absolute position on the traveling path) of the moving body, the power feeding unit unit to be fed among the plurality of power feeding unit units of the non-contact power feeding device. Only the power supply coil and the power supply capacitor function as a resonance circuit, and the power supply coil and the power supply capacitor of the other power supply units do not function as a resonance circuit, so that almost no current flows through the power supply coil. Therefore, according to this non-contact power feeding system, the non-contact power feeding device is a power feeding unit unit that should perform power feeding according to the traveling state of the moving body without using a switch means or a position detection sensor for the moving body. It is possible to act only.

JP 2011-176949 A (page 4-7, FIG. 1-3)

  However, the above-described conventional contactless power supply system has the following problems to be solved. That is, in this non-contact power feeding system, a ferromagnetic material is arranged in the power receiving coil on the moving object side to be fed, and a space between the plurality of power feeding coils and the power receiving coils installed at intervals in the traveling path is provided. By increasing the change in inductance with respect to the distance, a resonance circuit is formed only in the power supply unit portion having the power receiving coil with the closest distance to the moving body, and only this power supply unit portion supplies power to the mobile body. I am doing so.

  However, a resonance circuit is formed only in the power feeding unit portion having the power receiving coil that is the closest to the moving body, and no resonance circuit is formed in the power feeding unit portion having another power receiving coil adjacent to the power receiving coil. It is difficult to make. For this reason, also in the power supply unit portion having the other power receiving coil, power is supplied to the moving body while the distance from the moving body is relatively short. However, when a resonance circuit (that is, a resonance circuit having the same resonance frequency) composed of a supply coil having the same inductance and a supply capacitor having the same capacitance is adjacent to each other and is in an operating state, mutual interference is avoided. Therefore, this conventional non-contact power feeding system has a problem to be solved that the power feeding efficiency to the moving body is reduced due to the mutual interference between the power feeding coils.

  The present invention has been made to solve such a problem, and a main object of the present invention is to provide a non-contact power feeding device that can avoid a decrease in power feeding efficiency with respect to a moving body. It is another object of the present invention to provide a moving body that receives power from the non-contact power feeding apparatus, and a non-contact power feeding system including the non-contact power feeding apparatus and the moving body.

  In order to achieve the above object, a contactless power supply device according to claim 1 is a contactless power supply device that supplies power to a moving body that moves along a predetermined movement path in a contactless manner by a magnetic resonance method, and has a resonance frequency. Each having a plurality of n types (n is an integer of 2 or more (hereinafter the same)) of power supply side resonance circuits, and a plurality of n types of power supply coils respectively disposed in the n types of power supply side resonance circuits. The n types of feeding coils are arranged in parallel along the moving path in a state where the resonance frequencies of the neighboring feeding coils do not coincide with each other.

  According to a second aspect of the present invention, there is provided the non-contact power supply device according to the first aspect, wherein the non-contact power supply device according to the first aspect includes a plurality of two types of the power supply side resonance circuits having different resonance frequencies. A plurality of the two types of the feeding coils respectively provided in the resonance circuit are provided, and the two types of the feeding coils are alternately arranged in parallel along the moving path.

  According to a third aspect of the present invention, the movable body is arranged in n power receiving side resonance circuits having different resonance frequencies (n is an integer of 2 or more (hereinafter the same)), respectively, and receives power in a non-contact manner by a magnetic resonance method. n power receiving coils, and a secondary battery charged with a DC voltage generated based on an AC voltage output from each of the power receiving side resonance circuits.

  According to a fourth aspect of the present invention, the mobile body according to the third aspect includes the two power receiving coils respectively disposed in the two power receiving side resonance circuits having different resonance frequencies.

  A contactless power supply system according to a fifth aspect includes the contactless power supply device according to the first aspect and the moving body according to the third aspect, wherein the resonance frequency of the n kinds of power supply side resonance circuits is the It is defined to be the same as the resonance frequency of the n power receiving side resonance circuits.

  A non-contact power feeding system according to claim 6 includes the non-contact power feeding device according to claim 2 and the movable body according to claim 4, wherein the resonance frequency of the two types of power feeding side resonance circuits is It is defined to be the same as the resonance frequency of the two power reception side resonance circuits.

  According to the non-contact power supply apparatus according to claim 1 and the non-contact power supply system according to claim 5, the conventional non-contact power supply coil in which the power supply coils constituting the power supply side resonance circuit having the same resonance frequency are arranged adjacent to each other. Unlike the contact power supply device and the non-contact power supply system, since the resonance frequencies of the adjacent power supply coils do not match, mutual interference between adjacent power supply side resonance circuits (between adjacent power supply coils) can be greatly reduced. . According to the moving body described in claim 3 and the non-contact power feeding system described in claim 5, the moving body includes n power receiving side resonance circuits having the same resonance frequency as the resonance frequency of the n kinds of power feeding side resonance circuits. Therefore, the moving body can always receive power from the non-contact power feeding device while greatly reducing the mutual interference between the power feeding side resonance circuits (feed coils) in the non-contact power feeding device as described above. it can. Therefore, according to this non-contact power feeding system, it is possible to avoid a decrease in power feeding efficiency from the non-contact power feeding device to the moving body.

  Moreover, according to the non-contact power feeding device according to claim 2, the moving body according to claim 4, and the non-contact power feeding system according to claim 6, the number of power receiving coils provided in the moving body can be minimized. In addition, since the types of AC signals supplied to the power supply side resonance circuit can be minimized in the non-contact power supply device, mutual interference between the power supply side resonance circuits (power supply coils) can be greatly reduced and While constantly supplying power to the moving body from the contact power supply device, each configuration of the non-contact power supply device, the mobile body, and the non-contact power supply system can be most simplified.

1 is an explanatory diagram for explaining a configuration of a non-contact power feeding system 1. FIG. It is a top view for demonstrating the structure about the XY table 6 of the board | substrate inspection apparatus 5 comprised using the non-contact electric power feeding system 1. FIG. It is a side view of the XY table 6 seen from the arrow direction in FIG.

  Hereinafter, with reference to an accompanying drawing, an embodiment of non-contact electric supply system 1 is described.

  Initially, the structure of the non-contact electric power feeding system 1 is demonstrated with reference to drawings.

  As shown in FIG. 1, the non-contact power feeding system 1 includes a moving body 2 and a non-contact power feeding device 3, and the non-contact power feeding device 3 is configured to be movable along a predetermined moving path 4. The mobile body 2 is configured to move based on the electric power received from the non-contact power supply device 3 by supplying power to the power source 2 in a non-contact manner by a magnetic resonance method.

  The moving body 2 includes n power receiving coils 12 arranged in n power receiving side resonance circuits 11 having different resonance frequencies f (n is an integer of 2 or more, and the same applies hereinafter), and each power receiving side resonance circuit 11. Are provided with a rectifying / smoothing circuit 13 that generates a DC voltage Vd based on the AC voltage Vr output from the secondary battery 14 that is charged by the DC voltage Vd generated by each rectifying / smoothing circuit 13.

  Specifically, as an example in this example, the moving body 2 includes two power reception side resonance circuits 11a and 11a (a power reception side resonance circuit 11 when not distinguished). As a result, the power receiving coil 12a constituting the power receiving side resonance circuit 11a and the power receiving coil 12b constituting the power receiving side resonance circuit 11b are provided (also referred to as “power receiving coil 12” when not distinguished). Each of the power receiving side resonance circuits 11a and 11b includes a power receiving capacitor (not shown) in addition to the power receiving coils 12a and 12b, and the resonance frequencies fa and resonance frequencies fb are different from each other. . Further, the AC voltages Vra, Vrb (also referred to as “AC voltage Vr” when not distinguished from each other) output from the power receiving resonance circuits 11a, 11b are substantially equal to each other in inductance value and power reception. The capacitance value of the capacitor is specified.

  In addition, n (two in this example) power receiving coils 12 are formed as planar coils (or spiral coils) having an annular shape (circular annular shape, polygonal annular shape, elliptical annular shape, etc.) in plan view as an example. Thus, they are arranged close to each other with their central axes coinciding with each other. In addition, since the n power receiving coils 12 are arranged close to each other in this way, the distance between each power receiving coil 12 and a power feeding coil 22 described later of the non-contact power feeding device 3 is substantially equal. Set to

  The moving body 2 includes two rectifying / smoothing circuits 13a and 13b (also referred to as “rectifying / smoothing circuit 13” when not distinguished). In this case, the rectifying / smoothing circuit 13a generates a DC voltage Vda based on the AC voltage Vra output from the power receiving side resonance circuit 11a, and the rectifying / smoothing circuit 13b generates the AC voltage Vrb output from the power receiving side resonance circuit 11b. Based on this, a DC voltage Vdb is generated. Further, the DC voltages Vda and Vdb (also referred to as “DC voltage Vd” when not distinguished from each other) output from the rectifying and smoothing circuits 13 a and 13 b are diode-ored by a diode (not shown) and supplied to the secondary battery 14. In this example, since the amplitudes of the AC voltages Vra and Vrb are specified to be substantially the same as described above, the voltage values of the DC voltages Vda and Vdb are also specified to be approximately the same. Thereby, the secondary battery 14 is charged to this voltage value.

  The non-contact power feeding device 3 includes a plurality of n types of power feeding side resonance circuits 21 each having the same resonance frequency as the resonance frequency f of the n power receiving side resonance circuits 11. Further, the n types of power supply side resonance circuits 21 are provided with a power supply coil 22 together with a power supply capacitor (not shown). For this reason, the non-contact power feeding device 3 includes a plurality of n types of power feeding coils 22. In addition, the n types of power supply coils 22 are arranged in parallel along the moving path 4 with a certain interval between the adjacent power supply coils 22 in a state where the resonance frequencies f do not match.

  In this example, as an example, the two power receiving side resonance circuits 11a and 11b are disposed on the moving body 2 side. Accordingly, the non-contact power feeding device 3 corresponds to the two power receiving side resonance circuits 11a. , 11b, and a plurality of power supply side resonance circuits 21a and 21b having the same resonance frequencies fa and fb as the resonance frequencies fa and fb, respectively. Each power supply side resonance circuit 21a is provided with a power supply coil 22a, and each power supply side resonance circuit 21b is provided with a different type of power supply coil 22b from the power supply coil 22a. For this reason, the non-contact power feeding device 3 includes a plurality of two types of power feeding coils 22a and 22b (also referred to as “power feeding coils 22” when not distinguished). Therefore, in this non-contact power feeding device 3, two types of power feeding coils 22 a and 22 b are arranged in parallel along the moving path 4 at intervals. In addition, each power supply coil 22 is formed in an annular shape (circular annular shape, polygonal annular shape, elliptical annular shape, etc.) having the same diameter as the receiving coil 12 in plan view.

  The non-contact power feeding device 3 is provided for each of the n AC power sources 23 that output an AC signal S having the same frequency as each resonance frequency f of the n types of power feeding side resonance circuits 21, and for each power receiving side resonance circuit 11. And an amplifier circuit 24 that amplifies an AC signal S having the same frequency as the resonance frequency f output from the AC power source 23 and outputs the amplified signal to the power receiving side resonance circuit 11.

  In this example, as an example, the non-contact power feeding device 3 includes two types of power feeding side resonance circuits 21a and 21b having different resonance frequencies (also referred to as “power feeding side resonance circuit 21” when not distinguished). Same as the AC power supply 23a that outputs an AC signal Sa having the same frequency as the resonance frequency fa of the circuit 21a and the resonance frequency fb of the power supply side resonance circuit 21b (also referred to as “resonance frequency f” when the resonance frequencies fa and fb are not distinguished). Two AC power sources 23b that output AC signals Sb of frequencies (also referred to as “AC signal S” when AC signals Sa and Sb are not distinguished) (also referred to as “AC power source 23” when AC power sources 23a and 23b are not distinguished) It has. The amplifier circuit 24 connected to each power supply side resonance circuit 21a receives and amplifies the AC signal Sa having the frequency fa from the AC power source 23a and outputs the AC signal Sa to the power supply side resonance circuit 21a. The connected amplifier circuit 24 receives and amplifies the AC signal Sb having the frequency fb from the AC power source 23b and outputs the amplified signal to the power supply side resonance circuit 21b.

  Next, the configuration of the substrate inspection apparatus 5 to which the above-described contactless power supply system 1 is applied will be described. In this example, the non-contact power feeding system 1 is applied to an XY table 6 constituting a part of the board inspection apparatus 5 as shown in FIG. Specifically, the Y-axis moving mechanism 8 for moving the inspection head 7 that is moved in the X-axis direction and the Y-axis direction by the XY table 6 in the Y-axis direction is used as the moving body 2, and this Y-axis This is applied to supply power to the moving mechanism 8. Therefore, hereinafter, only the XY table 6 will be described, and description of other configurations of the substrate inspection apparatus 5 will be omitted.

  As shown in FIG. 2, the XY table 6 includes a mounting base 31 having a rectangular shape in plan view to which a substrate (not shown) is attached. The XY table 6 is movably attached to a pair of guide rails 32, 32 disposed along a pair of sides parallel to the X-axis direction of the mounting base 31, and the pair of guide rails 32, 32. Of the pair of guide rails 32, 32, a pair of guide rails 34, 33, a guide rail 34 mounted between the pair of mobile platforms 33, 33 in a state parallel to the Y-axis direction, A ball screw 36 whose both ends are rotatably supported by a pair of bearings 35 disposed on both ends of one guide rail 32 (in this example, the guide rail 32 disposed above in FIG. 2); A motor 37 that is attached to one guide rail 32 and rotationally drives the ball screw 36 and a pair of bearings 38 and 38 disposed on both ends of the guide rail 34 are rotatably supported. And Runeji 39, attached to the guide rails 34 and a motor 40 for rotating the ball screw 39. Further, a ball screw 36 is screwed to the moving table 33 on the one guide rail 32 side. The inspection head 7 is movably attached to the guide rail 34 and a ball screw 39 is screwed together.

  Of the above-described components, a Y-axis movement that moves the inspection head 7 along the Y-axis direction by the pair of moving platforms 33, 33, the guide rail 34, the pair of bearings 38, 38, the ball screw 39, and the motor 40. A mechanism 8 is configured. The pair of guide rails 32 and 32, the pair of bearings 35 and 35, and the ball screw 36 constitute an X-axis movement mechanism that moves the Y-axis movement mechanism 8 along the X-axis direction.

  With this configuration, the X-axis movement mechanism operates the motor 37 with electric power supplied from the outside to rotate the ball screw 36, thereby moving the Y-axis movement mechanism 8 along the pair of guide rails 32 and 32 in the X direction. Move. The Y-axis moving mechanism 8 moves the inspection head 7 along the guide rail 34 in the Y-axis direction by rotating the ball screw 39 by operating the motor 40 with electric power supplied from the outside.

  Next, the non-contact power feeding system 1 applied to the XY table 6 for power feeding to the motor 40 constituting the Y axis moving mechanism 8 will be described.

  The Y-axis moving mechanism 8 as the moving body 2 includes power receiving side resonance circuits 11a and 11b having power receiving coils 12a and 12b, rectifying and smoothing circuits 13a and 13b, and a secondary battery 14. . In this case, the secondary battery 14 supplies the stored electric power to the motor 40 and the inspection head 7. In addition, as shown in FIGS. 2 and 3, each of the power receiving coils 12 a and 12 b has, as an example, a movable table 33 (a motor 40 is provided) attached to the other guide rail 32 of the pair of guide rails 32 and 32. It is attached to the back surface 33a of the movable table 33).

  On the other hand, as shown in FIGS. 2 and 3, the non-contact power feeding device 3 includes a coil mounting in which the power feeding coils 22 a and 22 b constituting the power feeding side resonance circuits 21 a and 21 b are arranged in parallel with the other guide rail 32 as an example. It is disposed on the mounting table 41. Specifically, one surface 41a of the coil mounting table 41 is formed so as to be close to and parallel to the rear surface 33a of the moving table 33 to which the power receiving coils 12a and 12b are attached. Each of the power feeding coils 22a and 22b is formed on the one surface 41a along the moving path 4 of the moving table 33 (in the XY table 6, the other guide rail 32 corresponds to the moving path 4, so Along the guide rails 32), they are arranged side by side alternately.

  Note that the components other than the power supply coils 22 a and 22 b among the components of the non-contact power supply device 3 can be arranged at any part of the XY table 6 except for the Y-axis moving mechanism 8. By adopting this configuration, in the XY table 6 (that is, in the substrate inspection apparatus 5 having the XY table 6), the Y-axis moving mechanism 8 that moves along the X direction on the mounting base 31 is used. On the other hand, since power is supplied in a non-contact manner from the non-contact power feeding device 3 in which the respective power feeding coils 22a and 22b are arranged on the coil mounting table 41, the wiring of the power line with the Y-axis moving mechanism 8 becomes unnecessary. ing.

  Next, the operation of the non-contact power feeding system 1 will be described together with the operation of the XY table 6.

  In the non-contact power feeding system 1, the AC power source 23a of the non-contact power feeding device 3 has an alternating current having the same frequency as the resonance frequency fa of the power feeding side resonance circuit 21a with respect to the amplifier circuit 24 connected to each power feeding side resonance circuit 21a. The signal Sa is supplied, and each amplifier circuit 24 amplifies the AC signal Sa and outputs it to the corresponding power feeding side resonance circuit 21a. Thereby, each electric power feeding side resonance circuit 21a has changed to the resonance state.

  The AC power supply 23b supplies an AC signal Sb having the same frequency as the resonance frequency fb of the power supply side resonance circuit 21b to the amplifier circuit 24 connected to each power supply side resonance circuit 21b. The AC signal Sb is amplified and output to the corresponding power supply side resonance circuit 21b. Thereby, each electric power feeding side resonance circuit 21b has changed to the resonance state.

  In this non-contact power supply system 1, unlike the conventional non-contact power supply system in which the power supply coils constituting the power supply side resonance circuit having the same resonance frequency are arranged side by side, the adjacent power supply coils 22 are adjacent to each other. Are arranged side by side with their resonance frequencies f not matching. For this reason, in this non-contact electric power feeding system 1, the mutual interference between adjacent electric power feeding side resonance circuits 21 (between adjacent electric power feeding coils 22) is reduced significantly.

  In this state, in the XY table 6, when the motor 37 constituting the X-axis moving mechanism is operated and the Y-axis moving mechanism 8 as the moving body 2 is moved along the pair of guide rails 32 and 32. The moving table 33 having the power receiving coil 12 attached to the back surface 33a moves along the other guide rail 32 (moving path 4). At this time, the power receiving coil 12 attached to the moving table 33 moves on the coil array formed by the plurality of power feeding coils 22 arranged in parallel along the other guide rail 32, and at least any one of them. It moves in an opposed state (including a substantially opposed state).

  For this reason, the power receiving side resonance circuit 11 constituted by the power receiving coil 12 attached to the movable table 33 always includes any one power feeding coil 22 (the power feeding coil 22 facing the power receiving coil 12). The circuit 21 resonates at the same resonance frequency as the resonance frequency f of the circuit 21.

  In this example, the moving body 2 includes a power reception side resonance circuit 11a having a resonance frequency fa constituted by the power reception coil 12a and a power reception side resonance circuit 11b having a resonance frequency fb constituted by the power reception coil 12b. Therefore, when the power feeding coil 22 facing the power receiving coils 12a and 12b is the power feeding coil 22a, the power receiving side resonance circuit 11a in which the power receiving side resonance circuit 11a whose resonance frequency is defined as fa is constituted by the power feeding coil 22a. Resonates due to magnetic field resonance at a resonance frequency fa of 21a.

  When the power feeding coil 22 facing the power receiving coils 12a and 12b is the power feeding coil 22b, the power receiving side resonance circuit 21b in which the power receiving side resonance circuit 11b whose resonance frequency is defined as fb is constituted by the power feeding coil 22b. Resonates due to magnetic field resonance at the resonance frequency fb.

  Thereby, in this non-contact electric power feeding system 1, since the electric power feeding side resonance circuit 21a outputs the alternating voltage Vra when the electric power feeding side resonance circuit 21a comprised by the electric power feeding coil 22a is resonating, the rectification smoothing circuit 13a becomes this When the DC voltage Vda is generated from the AC voltage Vra and supplied to the secondary battery 14, and the power supply side resonance circuit 21b composed of the power supply coil 22b is resonating, the power supply side resonance circuit 21b outputs the AC voltage Vrb. Therefore, the rectifying / smoothing circuit 13b generates the DC voltage Vdb from the AC voltage Vrb and supplies it to the secondary battery 14.

  Therefore, in the XY table 6, even if the Y-axis moving mechanism 8 is moved along the pair of guide rails 32 and 32 by the X-axis moving mechanism, the secondary arranged in the Y-axis moving mechanism 8 is used. Since the battery 14 is always charged by non-contact power feeding from the non-contact power feeding device 3, the motor 40 and the inspection head 7 constituting the Y-axis moving mechanism 8 are driven by the power charged in the secondary battery 14. It can be operated at all times.

  Thus, in this non-contact power feeding system 1, the moving body 2 includes n power receiving coils respectively disposed in the n power receiving side resonance circuits 11 having different resonance frequencies f (two in the above example). 12 and a secondary battery 14 charged with a DC voltage Vd generated based on the AC voltage Vr output from each power-receiving-side resonance circuit 11, and the non-contact power feeding device 3 includes n power-receiving sides There are a plurality of n types of power supply side resonance circuits 21 each having the same resonance frequency as the resonance frequency f of the resonance circuit 11, and a plurality of n types of power supply coils 22 respectively disposed in the n types of power supply side resonance circuits 21. The n types of feeding coils 22 are arranged in parallel along the moving path 4 in a state where the resonance frequencies f of the neighboring feeding coils 22 do not coincide with each other.

  Therefore, according to the non-contact power supply device 3 and the non-contact power supply system 1, the conventional non-contact power supply system in which the power supply coils constituting the power supply side resonance circuit having the same resonance frequency are juxtaposed in a state adjacent to each other. In contrast, since the resonance frequencies f of the adjacent power supply coils 22 do not match, mutual interference between adjacent power supply side resonance circuits 21 (between adjacent power supply coils 22) can be greatly reduced. Further, according to the moving body 2 and the non-contact power feeding system 1, the mobile body 2 is provided with n power receiving side resonance circuits 11 having the same resonance frequency f as the resonance frequencies f of the n types of power feeding side resonance circuits 21. Therefore, the moving body 2 can always receive power from the non-contact power feeding device 3 while greatly reducing the mutual interference between the power feeding side resonance circuits 21 in the non-contact power feeding device 3 as described above. . Therefore, according to this non-contact electric power feeding system 1, the fall of the electric power feeding efficiency with respect to the mobile body 2 from the non-contact electric power feeder 3 can be avoided.

  Further, according to the non-contact power feeding device 3, the moving body 2 and the non-contact power feeding system 1, the two power receiving coils respectively disposed in the two power receiving side resonance circuits 11a and 11b having different resonance frequencies fa and fb. The movable body 2 is configured with 12a and 12b, and a plurality of two power supply side resonance circuits 21a and 21b having the same resonance frequencies fa and fb as the resonance frequencies fa and fb of the two power reception side resonance circuits 11a and 11b are provided. The non-contact power feeding device 3 is configured by including a plurality of two types of power feeding coils 22a and 22b respectively disposed in the two types of power feeding side resonance circuits 21a and 21b. Since the power supply coils 22a and 22b are alternately arranged in parallel with each other, the number of power reception coils 12a and 12b arranged in the moving body 2 can be minimized, and the non-contact power supply device 3 Since the types of AC signals Sa and Sb supplied to the power supply side resonance circuits 21a and 21b can be minimized, the mutual interference between the power supply side resonance circuits 21 is greatly reduced, and the non-contact power supply device 3 is used. Therefore, the configurations of the non-contact power feeding device 3, the mobile body 2, and the non-contact power feeding system 1 can be most simplified.

  In the non-contact power feeding system 1 described above, the example in which the numerical value n is set to 2 has been described. However, the numerical value n is not limited to 2, and may be any number as long as it is a number such as 3, 4,. Can be. However, if the numerical value n is increased too much, the number of the power receiving side resonance circuits 11 and the rectifying / smoothing circuits 13 provided in the moving body 2 becomes too large, and the moving body 2 becomes larger. For this reason, it is preferable to suppress to about five pieces.

  Moreover, although the example which applied the non-contact electric power feeding system 1 to the XY table 6 of the board | substrate inspection apparatus 5 was given and demonstrated, this non-contact electric power feeding system 1 can also be applied other than the board | substrate inspection apparatus 5. FIG. For example, the present invention can also be applied to non-contact power supply for a vehicle as a moving body that moves on a fixed moving path.

DESCRIPTION OF SYMBOLS 1 Non-contact electric power feeding system 2 Mobile body 3 Non-contact electric power feeder 11a, 11b Power receiving side resonance circuit 12a, 12b Power receiving coil 14 Secondary battery 21a, 21b Power feeding side resonance circuit 22a, 22b Power feeding coil

Claims (6)

A non-contact power supply device that supplies power in a non-contact manner by a magnetic resonance method to a moving body that moves along a predetermined movement path,
There are a plurality of n types (n is an integer of 2 or more (hereinafter the same)) of power supply side resonance circuits having different resonance frequencies, and n types of power supply coils respectively disposed in the n types of power supply side resonance circuits. Each having a plurality of
The n types of power feeding coils are non-contact power feeding devices arranged in parallel along the moving path in a state where the resonance frequencies of the adjacent power feeding coils do not coincide with each other. A plurality of the two types of the feeding-side resonance circuits having different resonance frequencies, and a plurality of the two types of the feeding coils respectively disposed in the two types of the feeding-side resonance circuits,
The non-contact power feeding device according to claim 1, wherein the two types of power feeding coils are alternately arranged in parallel along the moving path with a space therebetween.   N power receiving coils arranged in n power receiving side resonance circuits each having a different resonance frequency (n is an integer of 2 or more (hereinafter the same)) and receiving power in a non-contact manner by a magnetic resonance method; and each power receiving side A moving body comprising: a secondary battery charged with a DC voltage generated based on an AC voltage output from a resonance circuit.   The mobile body according to claim 3, comprising two power receiving coils respectively disposed in the two power receiving side resonance circuits having different resonance frequencies.   A non-contact power feeding device according to claim 1 and a moving body according to claim 3, wherein the resonance frequency of the n kinds of power supply side resonance circuits is the same as the resonance frequency of the n power reception side resonance circuits. The non-contact power supply system specified in 1.   A contactless power supply device according to claim 2 and a movable body according to claim 4, wherein the resonance frequencies of the two types of power supply side resonance circuits are the resonance frequencies of the two power reception side resonance circuits. A contactless power supply system that is specified in the same way.

Images