JP2014209399A - Heat-assisted magnetic head inspection device and heat-assisted magnetic head inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To automatically adjust positional deviation if positional deviation is caused during cantilever replacement when measuring a magnetic field and near field light generated in a heat-assisted magnetic head.SOLUTION: A heat-assisted magnetic head inspection device 1 includes: head magnetic field detection systems 36 and 37 that measure a magnetic field generated in a heat-assisted magnetic head 11 on the basis of the amount of displacement of a cantilever 10; a near field light detection system 20 that measures near field light generated in the heat-assisted magnetic head 11 on the basis of diffusion light generated at a cantilever position; an optical system stage 2 on which the near field light detection system is mounted and that moves the near field light detection system in a two-dimensional direction; and an image display unit that picks up an image of a positional relation between the cantilever and a magnetic head by a camera 35 and displays the image. When the cantilever is replaced, a control unit 4 calculates the amount of positional deviation caused by the replacement of the cantilever while referring to the image display unit and moves the optical system stage 2 by the calculated amount of positional deviation.

Description

  The present invention relates to a thermally assisted magnetic head inspection apparatus and a thermally assisted magnetic head inspection method that can inspect the generation state of near-field light generated by a thermally assisted magnetic head.

  In recent years, a head inspection apparatus incorporating a magnetic force microscope (MFM) having a high resolution at the atomic size level has been used to measure the magnetic field shape generated by a thin film magnetic head and inspect the magnetic effective track width and the like. Yes. The magnetic force microscope has a cantilever equipped with a magnetic probe for detecting a magnetic field, which is scanned and moved on a magnetic head, and detects the displacement of the probe to measure the magnetic field shape. Patent Document 1 targets a thin film magnetic head in a row bar state in which a plurality of head elements formed on a wafer are connected, and a recording signal is input to each head element by a bonding pad and generated from each head element. A technique for measuring the state of a magnetic field with the cantilever is disclosed.

  On the other hand, as a new technology for the next-generation hard disk that is required to dramatically increase the capacity, a magnetic recording method using heat assist has been proposed. By introducing a heat-assisted magnetic head using near-field light as a heat source, recording with a narrow track width of about 20 nm can be realized. For example, Patent Document 2 discloses a configuration of a heat-assisted magnetic recording head for the purpose of improving the near-field light generation efficiency. Here, the near-field light generating section has a cross-sectional shape in which the width in the direction perpendicular to the polarization direction of the incident light traveling through the waveguide gradually decreases toward the apex where the near-field light is generated, and the incident light In this traveling direction, a conductive structure having a shape that gradually decreases in a stepwise manner toward the apex where near-field light is generated is used.

  In a heat-assisted magnetic head, in order to inspect the effective track width, it is necessary to measure the intensity distribution of near-field light generated from the head. For example, in Patent Document 3, as a technique for detecting near-field light, a near-field light generating element is brought close to a scanning probe, and near-field light and other light are distinguished and detected by scattering near-field light. A field light evaluation apparatus is disclosed.

JP 2009-230845 A JP 2011-146097 A JP 2006-38774 A

  According to the techniques described in Patent Document 1 and Patent Document 3, the magnetic field generated by the thermally-assisted magnetic head and the near-field light can be measured independently, but the measurement positions of both are associated with each other. Is not specifically considered. In the measurement of the thermally assisted magnetic head, it is necessary to detect the scattered light generated by the probe at the tip of the cantilever in the near-field light generation region, and the measurement position of the magnetic field and the near-field light must be matched. For example, when the cantilever is replaced, it is inevitable that the mounting position of the cantilever is shifted, and the positional relationship between the measured magnetic field and the near-field light may be shifted, and the measurement accuracy may deteriorate.

  An object of the present invention is to provide a heat-assisted magnetic head inspection apparatus and a heat-assisted magnetic head that automatically adjusts even if a positional deviation occurs during cantilever replacement when measuring a magnetic field generated by a heat-assisted magnetic head and near-field light. A magnetic head inspection method is provided.

  The heat-assisted magnetic head inspection apparatus of the present invention includes an XY stage that mounts a heat-assisted magnetic head and scans in a two-dimensional direction, a cantilever that has a magnetic probe at the tip and is excited at a predetermined frequency, and heat-assisted the cantilever. A Z stage that is held at a predetermined height from the surface of the magnetic head, a head magnetic field detection system that measures the magnetic field generated by the thermally-assisted magnetic head from the amount of displacement of the cantilever, and the near-field light generated by the thermally-assisted magnetic head is positioned at the cantilever position. The near-field light detection system for measuring from the scattered light generated in the above, the optical stage mounted with the near-field light detection system and moved in a two-dimensional direction, and the positional relationship between the cantilever and the thermally assisted magnetic head are captured and displayed by the camera. An XY stage so that the image display unit, the heat-assisted magnetic head, the cantilever, and the near-field light detection system are in a predetermined positional relationship; A control unit that controls the academic stage, and when the cantilever is replaced, the control unit refers to the image display unit to calculate the amount of positional deviation due to the replacement of the cantilever, and the optical system stage is moved by the calculated amount of positional deviation. Move.

  According to the present invention, when measuring a magnetic field generated by a thermally assisted magnetic head and near-field light, even if a positional deviation occurs during cantilever replacement, this can be automatically adjusted, and work efficiency is improved. .

1 is a schematic configuration diagram (plan view) showing an embodiment of a heat-assisted magnetic head inspection apparatus. FIG. 1 is a schematic configuration diagram (side view) showing an embodiment of a heat-assisted magnetic head inspection apparatus. The figure which shows the screen for position alignment at the time of cantilever replacement | exchange. The flowchart which shows the stage position adjustment at the time of cantilever replacement | exchange. The figure which shows the screen for position alignment at the time of magnetic head replacement | exchange. The flowchart which shows the stage position adjustment at the time of magnetic head replacement | exchange.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 and 2 are schematic configuration diagrams showing an embodiment of a thermally-assisted magnetic head inspection apparatus according to the present invention. FIG. 1 is a plan view (XY plane view), and FIG. 2 is a side view (XZ plane view). . The portion of the optical system stage 2 in FIG. 2 is a plan view as in FIG. A heat-assisted magnetic head inspection apparatus 1 (hereinafter simply referred to as a magnetic head inspection apparatus) is based on a scanning probe microscope, includes an optical system stage 2, a measurement system stage 3, and a control unit 4 for controlling each stage, The light emission state of the near-field light generated by the assist magnetic head 11 (hereinafter simply referred to as a magnetic head) and the magnetic field distribution are inspected.

  First, the configuration of the measurement system stage 3 will be described. The measurement system stage 3 includes an X stage 31, a Y stage 32, and a Z stage 33, and the magnetic head 11 to be inspected is held on a mounting table 30 on the Y stage 32. The magnetic head 11 is in a slider state cut out from the row bar state into a single magnetic head. In this embodiment, it may be in a row bar state before being cut out from the wafer into a single magnetic head. The magnetic head 11 incorporates a laser element, and generates near-field light for heat assist. The probe unit 12 supplies power for generating a magnetic field and near-field light to the magnetic head 11 to be inspected. The magnetic field generated by the magnetic head 11 and near-field light are detected by scanning the surface of the magnetic head 11 (the disk facing surface) with the cantilever 10.

  The X stage 31 and the Y stage 32 move the mounting table 30 of the magnetic head 11 in a two-dimensional XY direction by a piezo element. The Z stage 33 holds the cantilever 10 and moves the cantilever 10 in the Z direction by a piezo element. By adjusting the Z stage 33, a magnetic probe (hereinafter simply referred to as a probe) formed at the tip of the cantilever 10 is positioned at a predetermined height (corresponding to the head flying height) from the surface of the magnetic head 11. Adjust as follows. The height adjustment of the cantilever 10 is performed based on the magnitude of a displacement signal described later obtained from the cantilever 10. An upper camera 35 for positioning the magnetic head 11 with respect to the cantilever 10 is provided above the cantilever 10 in the Z direction.

  The control unit 4 is composed of a PC and a monitor, and controls the X stage 31 and the Y stage 32 via the measurement system stage drive control circuit 42 based on the image of the magnetic head 11 picked up by the upper camera 35, and thereby the magnetic head. 11 is adjusted so as to be in a predetermined position. When the positioning adjustment of the magnetic head 11 is completed, power is supplied from the probe unit 12 to the electrode of the magnetic head 11 according to a command from the control unit 4.

  The cantilever 10 is vibrated at a predetermined frequency and a predetermined amplitude by a vibration unit 34 attached to the Z stage 33. When the magnetic field from the magnetic head 11 is received, an attractive force or a repulsive magnetic force is generated at the probe of the cantilever 10, and the displacement amount of the cantilever 10 in the Z direction changes. The head magnetic field detection system detects the shape of the magnetic field generated by the magnetic head 11 from the vibration state (displacement amount) of the cantilever 10. As for the amount of displacement of the cantilever 10, the laser light emitted from the laser light source 36 is applied to the cantilever 10, and the light reflected by the cantilever 10 is detected by the displacement sensor 37. An output signal from the displacement sensor 37 is sent to the control unit 4 through a differential amplifier, a DC converter, a feedback controller, etc. (not shown), and a magnetic field shape is obtained.

  Next, the configuration of the optical system stage 2 will be described. The optical system stage 2 is equipped with a near-field light detection system 20 and measures near-field light generated by the magnetic head 11. The optical system stage 2 moves the near-field light detection system 20 in the two-dimensional XY direction by the optical system stage drive control circuit 41.

  The near-field light detection system 20 includes an image forming lens system 23 including an objective lens, a half mirror, an LED light source, and an image forming lens, a pinhole-equipped mirror 22 having a pinhole formed in the center, and a pinhole-equipped mirror. It has a photodetector 21 that detects light that has passed through 22 pinholes. Furthermore, a relay lens system 24 that forms an optical image reflected by the mirror 22 with a pinhole, and a horizontal camera 25 that detects the optical image formed by the relay lens system 24 are provided.

  When the probe of the cantilever 10 enters the generation region of the near-field light by the magnetic head 11, scattered light by the near-field light is generated. Of the generated scattered light, the scattered light incident on the imaging lens system 23 forms a scattered light image of the probe of the cantilever 10 on the imaging surface of the imaging lens. The scattered light image on the probe surface passes through the pinhole of the pinhole-equipped mirror 22 and is detected by the photodetector 21. Thus, the intensity of near-field light generated by the magnetic head 11 can be measured.

  On the other hand, the light emitted from the LED light source of the imaging lens system 23 passes through the objective lens and illuminates the probe of the cantilever 10 and the magnetic head 11. The image of the area irradiated with the illumination light is input to the imaging lens system 23, reflected by the mirror 22 with the pinhole, and taken by the lateral camera 25 through the relay lens 24.

  The near-field light signal detected by the photodetector 21 and the image signal from the horizontal camera 25 are sent to the control unit 4. In the control unit 4, a signal synchronized with the vibration of the cantilever 10 is extracted from the output signal of the photodetector 21, and the image signal from the lateral camera 25 is displayed on the monitor screen. While confirming the image captured by the horizontal camera 25 on the monitor screen, the XY position of the optical system stage 2 (near-field light detection system 20) is adjusted via the optical system stage drive control circuit 41, and the cantilever 10 is Adjustment is made so that the scattered light generated by the probe passes through the pinhole and is detected by the photodetector 21.

  Next, an alignment method when the cantilever 10 is replaced in the magnetic head inspection apparatus 1 described above will be described. In the replacement operation of the cantilever 10, it is inevitable that a slight displacement occurs in the mounting position after replacement. Regarding the positional deviation between the cantilever 10 and the magnetic head 11, the upper camera 35 confirms the images of the cantilever 10 and the magnetic head 11, and the magnetic head 11 is moved by the X table 31 and the Y table 32. 11 desired positions.

  Furthermore, it is necessary to adjust the positional deviation between the cantilever 10 and the near-field light detection system 20. This is because the scattered light of the near-field light detected by the near-field light detection system 20 is generated at the probe position of the cantilever 10. As this adjustment method, as described above, the probe position of the cantilever 10 is confirmed on the monitor screen with the horizontal camera 25, and the optical system stage 2 is moved in the XY directions by the optical system stage drive control circuit 41. The detection position of the detection system 20 can be matched with the probe of the cantilever 10. However, this method is an adjustment operation while observing the monitor screen from the horizontal camera 25, and needs to be performed separately from the positioning operation of the magnetic head 11 using the upper camera 35 described above, and the work efficiency is not good. . Therefore, in this embodiment, by adjusting the position adjustment of the magnetic head 11 and the position adjustment of the near-field light detection system 20 in association with each other, the adjustment work of the near-field light detection system 20 is automated and the work efficiency is improved. I tried to make it. The method will be described below.

  FIG. 3 is a diagram showing an alignment screen when the cantilever is replaced. In either case, the cantilever 10 is imaged by the upper camera 35 and displayed on the monitor screen of the control unit 4.

  (A) is a camera screen before exchanging the cantilever, in which the surface of the cantilever 10 and the magnetic head 11 in the vicinity thereof as viewed from above in the Z direction are projected. Here, the X stage 31 and the Y stage 32 are moved, and the desired measurement position (for example, the shield part 13) of the magnetic head 11 is adjusted to coincide with the tip part (probe) of the cantilever 10. The tip position of the cantilever 10 at this time is P, and the marker 50 (broken line in the X and Y directions) is aligned with the position P and the XY coordinates are stored.

  (B) is a camera screen after the cantilever replacement, in which the cantilever 10 'after the replacement and the surface of the magnetic head 11 in the vicinity thereof are projected. In this example, the cantilever 10 ′ after replacement is attached while being shifted in the lower left direction of the screen. The tip position of the cantilever 10 'at this time is P', the marker 50 'is aligned with the position P', and the XY coordinates are stored. Further, the X stage 31 and the Y stage 32 are moved, and the desired measurement position (shield part 13) of the magnetic head 11 is adjusted to coincide with the tip part (probe) of the cantilever 10 'after replacement.

  (C) shows the relative positional relationship before and after cantilever replacement. The tip position P of the cantilever 10 before replacement is shifted to the tip position P ′ of the cantilever 10 ′ after replacement, and the shift amounts in the XY coordinates are ΔX and ΔY. The deviation amounts ΔX, ΔY are the difference values of the values stored as the XY coordinates of the markers 50, 50 ′. Naturally, the X stage 31 and the Y stage 32 in the adjustment operation of the magnetic head 11 position in (b) above. It is equal to the movement amount.

  When the shift amounts ΔX and ΔY are known, the control unit 4 moves the optical system stage 2 by the shift amounts ΔX and ΔY by the optical system stage drive control circuit 41. Thereby, the detection position of the near-field light detection system 20 can be matched with the probe of the cantilever 10. That is, the adjustment amounts ΔX and ΔY of the X stage 31 and the Y stage 32 associated with cantilever replacement are stored, and the optical system stage 2 may be moved by an amount equal to this. As a result, it is possible to automatically adjust the position of the near-field light detection system 20 with respect to the cantilever 10 ′ after replacement without checking the monitor screen from the horizontal camera 25.

FIG. 4 is a flowchart showing stage position adjustment when the cantilever is replaced. The following steps are performed by the control unit 4.
In S101, the cantilever replacement operation is started. In this state, it is assumed that the position of the measurement system stage 3 (X stage 31, Y stage 32, Z stage 33) and optical system stage 2 is optimally adjusted with respect to the cantilever 10 before replacement.

In S102, the monitor screen of the upper camera 35 is referred to, and the tip position P of the cantilever 10 before replacement is stored as the XY coordinates of the marker 50. Refer to FIG.
In S103, the control value of the optical system stage drive control circuit 41 is referred to, and the current XY position of the optical system stage 2 is stored.

In S <b> 104, the operator replaces the cantilever 10 with 10 ′ and attaches it to the Z stage 33.
In S105, the monitor screen of the upper camera 35 is referred to, the marker 50 ′ is moved to the tip position P ′ of the cantilever 10 ′ after replacement, and the XY coordinates thereof are registered. In accordance with this, the X stage 31 and the Y stage 32 are moved and adjusted so that the desired measurement position (shield part 13) of the magnetic head 11 coincides with the tip of the cantilever 10 ′. Refer to FIG.

In S106, XY coordinate deviations ΔX and ΔY are calculated as the relative positional relationship between the marker 50 with respect to the pre-exchange cantilever 10 and the marker 50 ′ with respect to the post-exchange cantilever 10 ′. Note that the value of the XY coordinates read from the monitor screen is expressed in units of pixels. Refer to FIG.
In S107, the relative positional relationship expressed by the actual distance value using the relative positional relationship of the XY coordinates expressed in units of pixels and the resolution (pixel interval) of one pixel considering the screen magnification. Is calculated.

In S108, the optical system stage drive control circuit 41 adds the relative position relationship (deviation amounts ΔX, ΔY) of the XY coordinates calculated in S107 to the current position of the optical system stage 2 stored in S103, and adds the optical The system stage 2 is moved.
In S109, the stage position adjustment accompanying the cantilever replacement is finished, and the process proceeds to the magnetic head inspection process.

  Thus, according to the present embodiment, the position adjustment of the optical system stage 2 accompanying the cantilever replacement can be automatically executed without observing the camera image, and the working efficiency is improved.

  In Example 1, the deviation in the X and Y directions of the optical system stage 2 due to cantilever replacement was automatically adjusted. On the other hand, in the second embodiment, when the magnetic head to be inspected is replaced, the deviation of the optical system stage 2 in the Z direction is automatically adjusted when the height of the magnetic head (that is, the height of the slider) changes. Is. Therefore, the optical system stage 2 according to the second embodiment includes the near-field light detection system 20 that measures the near-field light generated by the magnetic head 11, and the optical-system stage drive control circuit 41 sets the near-field light detection system 20 to 3. It is assumed to move in the dimension XYZ direction.

  Although the magnetic head will be described in a slider state, it may be in a row bar state before being cut into a single piece from the wafer. The near-field light generated by the magnetic head 11 is concentrated at the laser emission position on the surface of the magnetic head (the disk facing surface) and is scattered by the cantilever 10 and detected as scattered light. The height of the system 20 must match the height of the magnetic head 11.

  FIG. 5 is a diagram showing an alignment screen when the magnetic head is replaced. In either case, the lateral camera 25 images the side surface of the magnetic head 11 and the pinhole mirror 22 and displays them on the monitor screen of the control unit 4.

  (A) is a camera screen before the magnetic head replacement, in which the side surface of the magnetic head 11 and the pinhole portion of the mirror 22 with the pinhole are viewed from the left in the X direction. Reference numeral 60 is a head surface (disk facing surface), 61 is a laser emission position of near-field light, and 62 is an electrode (bonding pad). Here, the optical system stage 2 is moved, and the center of the pinhole of the mirror 22 with the pinhole is adjusted so as to coincide with a desired measurement position (for example, the laser emission position 61) of the magnetic head 11. Although not shown, the X stage 31 and the Y stage 32 are moved similarly to FIG. 3 of the first embodiment, and the desired measurement position (for example, the shield part 13) of the magnetic head 11 on the XY plane is the tip part of the cantilever 10 ( Adjusted to match the probe). The marker 50 (broken line) is aligned with the position of the head surface 60 at this time, and the Z coordinate is stored.

  (B) is the camera screen after the magnetic head replacement, in which the pinholes of the magnetic head 11 ′ and the pinholed mirror 22 after the replacement are projected. In this example, the magnetic head 11 ′ after replacement is attached while being shifted downward in the screen. The marker 50 'is aligned with the position of the head surface 60' of the magnetic head 11 'at this time, and the Z coordinate is stored. Although not shown, the X stage 31 and the Y stage 32 are moved as in FIG. 3 so that the desired measurement position (shield part 13) of the magnetic head 11 ′ coincides with the tip part (probe) of the cantilever 10. adjust. As a result, the laser emission position 61 ′ of the magnetic head 11 ′ and the position of the pinhole of the mirror with pinhole 22 in the Y direction coincide. However, the optical system stage 2 is not adjusted, and the Z direction is the same position as before the magnetic head replacement.

  (C) shows the relative positional relationship before and after replacement of the magnetic head. The head surface 60 before replacement is shifted to the head surface 60 'after replacement, and the shift amount in the Z coordinate is ΔZ. This shift amount ΔZ is a difference value between values stored as the Z coordinates of the markers 50 and 50 ′.

  When the deviation amount ΔZ is known, the control unit 4 causes the optical system stage drive control circuit 41 to move the optical system stage 2 in the Z direction by the deviation amount ΔZ. Thereby, the detection position of the near-field light detection system 20 can be matched with the surface of the magnetic head. That is, it is only necessary to store the head surface displacement amount ΔZ associated with the magnetic head replacement and move the optical system stage 2 by an amount equal to this amount. As a result, the position of the near-field light detection system 20 with respect to the head surface 60 ′ of the magnetic head 11 ′ after replacement can be automatically adjusted without checking the monitor screen from the horizontal camera 25.

FIG. 6 is a flowchart showing stage position adjustment when the magnetic head is replaced. The following steps are performed by the control unit 4.
In S201, the magnetic head replacement operation is started. In this state, it is assumed that the position of the measurement system stage 3 (X stage 31, Y stage 32, Z stage 33) and optical system stage 2 is optimally adjusted with respect to the magnetic head before replacement.

In S202, the monitor screen of the horizontal camera 25 is referred to, and the marker 50 is aligned with the head surface 60 of the magnetic head 11 before replacement and stored as a Z coordinate. Refer to FIG.
In S203, the current Z position of the optical system stage 2 is stored with reference to the control value of the optical system stage drive control circuit 41.

In S <b> 204, the operator replaces the magnetic head 11 with 11 ′ and attaches it to the mounting table 30.
In S205, the monitor screen of the horizontal camera 25 is referred to, the marker 50 ′ is moved to the head surface 60 ′ of the magnetic head 11 ′ after replacement, and the Z coordinate is registered. Refer to FIG. Further, the X stage 31 and the Y stage 32 are moved and adjusted so that the desired measurement position (shield part 13) of the magnetic head 11 ′ coincides with the tip of the cantilever 10.

In S206, as the relative positional relationship between the marker 50 with respect to the magnetic head 11 before replacement and the marker 50 ′ with respect to the magnetic head 11 ′ after replacement, a shift amount ΔZ of the Z coordinate is calculated. Note that the value of the Z coordinate read from the monitor screen is expressed in units of pixels. Refer to FIG.
In S207, the relative positional relationship represented by the actual distance value using the relative positional relationship of the Y coordinate expressed in units of pixels and the resolution (pixel interval) of one pixel considering the screen magnification. Is calculated.

In S208, the optical system stage drive control circuit 41 adds the relative position relationship (deviation amount ΔZ) of the Z coordinate calculated in S207 to the position of the current optical system stage 2 stored in S203, and the optical system stage. Move 2.
In step S209, the stage position adjustment accompanying the magnetic head replacement is finished, and the process proceeds to the magnetic head inspection process.

  As described above, according to the present embodiment, the position adjustment of the optical system stage 2 accompanying the magnetic head replacement can be automatically executed without observing the camera image, and the working efficiency is improved.

1 ... Thermally assisted magnetic head inspection device,
2 ... Optical system stage,
3 ... Measurement system stage,
4 ... control unit,
10, 10 '... cantilever,
11, 11 '... heat-assisted magnetic head,
12 ... Probe unit,
20: Near-field light detection system,
21 ... photodetector,
22 ... mirror with pinhole,
23 ... Imaging lens system,
24 ... Relay lens system,
25 ... Horizontal camera,
30 ... mounting table,
31 ... X stage,
32 ... Y stage,
33 ... Z stage,
34 ... Excitation unit,
35 ... Upper camera,
36 ... laser light source,
37 ... displacement sensor,
41. Optical stage drive control circuit,
42 ... Measurement stage drive control circuit,
50, 50 '... marker,
60 ... head surface,
61 ... Laser emission position,
62 ... Electrode.

Claims (5)

In the heat-assisted magnetic head inspection device that inspects the magnetic field generated by the heat-assisted magnetic head and the near-field light,
An XY stage on which the heat-assisted magnetic head is placed and scanned in a two-dimensional direction;
A cantilever having a magnetic probe at the tip and excited at a predetermined frequency;
A Z stage for holding the cantilever at a predetermined height from the surface of the heat-assisted magnetic head;
A head magnetic field detection system for measuring the magnetic field generated by the thermally-assisted magnetic head from the amount of displacement of the cantilever;
A near-field light detection system for measuring near-field light generated by the thermally-assisted magnetic head from scattered light generated at the cantilever position;
An optical stage mounted with the near-field light detection system and moved in a two-dimensional direction;
An image display unit that captures and displays a positional relationship between the cantilever and the heat-assisted magnetic head with a camera;
A controller that controls the XY stage and the optical system stage so that the thermally-assisted magnetic head, the cantilever, and the near-field light detection system have a predetermined positional relationship;
When the cantilever is replaced, the control unit refers to the image display unit to calculate a displacement amount due to the replacement of the cantilever, and moves the optical system stage by the calculated displacement amount. Assist magnetic head inspection device. In a thermally assisted magnetic head inspection method for inspecting a magnetic field generated by a thermally assisted magnetic head and near-field light,
Exciting a cantilever having a magnetic probe at a tip at a predetermined frequency;
Placing the thermally-assisted magnetic head on an XY stage and scanning in a two-dimensional direction;
Holding the cantilever at a predetermined height from the surface of the magnetic head by a Z stage;
Measuring a magnetic field generated by the thermally-assisted magnetic head from a displacement amount of the cantilever by a head magnetic field detection system;
Measuring near-field light generated by the thermally-assisted magnetic head from scattered light generated at the cantilever position by a near-field light detection system;
Mounting the near-field light detection system by an optical system stage and moving it in a two-dimensional direction;
Imaging the positional relationship between the cantilever and the thermally-assisted magnetic head with a camera and displaying the image on the image display unit;
Controlling the XY stage and the optical system stage so that the thermally-assisted magnetic head, the cantilever, and the near-field light detection system are in a predetermined positional relationship,
A heat-assisted magnetic head inspection characterized in that when the cantilever is replaced, a displacement amount due to the replacement of the cantilever is calculated with reference to the image display unit, and the optical system stage is moved by the calculated displacement amount. Method. The heat-assisted magnetic head inspection method according to claim 2,
A heat-assisted magnetic head inspection method, wherein when the cantilever is replaced, the XY stage is moved to adjust the position of the heat-assisted magnetic head, and the optical system stage is moved by the amount of movement. In the heat-assisted magnetic head inspection device that inspects the magnetic field generated by the heat-assisted magnetic head and the near-field light,
An XY stage on which a thermally assisted magnetic head is mounted and scanned in a two-dimensional direction;
A cantilever having a magnetic probe at the tip and excited at a predetermined frequency;
A Z stage for holding the cantilever at a predetermined height from the surface of the heat-assisted magnetic head;
A head magnetic field detection system for measuring the magnetic field generated by the thermally-assisted magnetic head from the amount of displacement of the cantilever;
A near-field light detection system that measures the near-field light generated by the thermally-assisted magnetic head as a scattered light by the cantilever through a pinhole;
An optical stage mounted with the near-field light detection system and moving in a three-dimensional direction;
A first camera that images a positional relationship between the cantilever and the thermally-assisted magnetic head in the XY direction;
A second camera that images the positional relationship between the pinhole and the thermally-assisted magnetic head in the YZ direction;
An image display unit for displaying images of the first camera and the second camera;
A controller that controls the XY stage and the optical system stage so that the thermally-assisted magnetic head, the cantilever, and the near-field light detection system have a predetermined positional relationship;
When the cantilever is replaced, the control unit refers to the image of the first camera displayed on the image display unit to calculate a displacement amount in the XY direction due to the replacement of the cantilever, and the calculated displacement The optical system stage is moved in the XY direction by an amount,
When the heat-assisted magnetic head is replaced, the control unit calculates a displacement amount in the Z direction due to the replacement of the heat-assisted magnetic head with reference to the image of the second camera displayed on the image display unit. And a heat-assisted magnetic head inspection apparatus, wherein the optical system stage is moved in the Z direction by the calculated displacement amount. In a thermally assisted magnetic head inspection method for inspecting a magnetic field generated by a thermally assisted magnetic head and near-field light,
Exciting a cantilever having a magnetic probe at a tip at a predetermined frequency;
Placing the thermally-assisted magnetic head on an XY stage and scanning in a two-dimensional direction;
Holding the cantilever at a predetermined height from the surface of the magnetic head by a Z stage;
Measuring a magnetic field generated by the thermally-assisted magnetic head from a displacement amount of the cantilever by a head magnetic field detection system;
Measuring near-field light generated by the thermally-assisted magnetic head from scattered light generated at the cantilever position by a near-field light detection system;
Mounting the near-field light detection system by an optical system stage and moving it in a three-dimensional direction;
Imaging the cantilever and the thermally assisted magnetic head in the XY direction and the YZ direction with the first camera and the second camera, respectively, and displaying them on the image display unit;
Controlling the XY stage and the optical system stage so that the thermally-assisted magnetic head, the cantilever, and the near-field light detection system are in a predetermined positional relationship,
When the cantilever is replaced, the control unit refers to the image of the first camera displayed on the image display unit to calculate a displacement amount in the XY direction due to the replacement of the cantilever, and the calculated displacement The optical system stage is moved in the XY direction by an amount,
When the heat-assisted magnetic head is replaced, the control unit calculates a displacement amount in the Z direction due to the replacement of the heat-assisted magnetic head with reference to the image of the second camera displayed on the image display unit. And a method for inspecting a thermally-assisted magnetic head, wherein the optical system stage is moved in the Z direction by the calculated displacement amount.

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