JP2014047878A - Tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an economical tube capable of reducing waste quantity by eliminating generation of surplus of the tube.SOLUTION: A tube to be arranged in an apparatus includes a fixing position indication indicated on the tube and indicating a position to be fixed on a predetermined position of the apparatus by a fixing member. Thereby when performing operation for drawing the tube in the apparatus, an operator can confirm the fixing position indication and fix the tube at the position of the fixing position indication on the predetermined position. In the tube fixed on the predetermined position, previously designed ideal drawing can be achieved, a situation that the length of the tube is insufficient for drawing is not generated and necessity for preparing an excessively long tube can be eliminated.

Description

  The present invention relates to a tube through which a fluid flows.

  Many industrial machines and manufacturing apparatuses use various fluids such as water and air. For example, in a semiconductor device manufacturing process, in a grinding device called a grinder that grinds and thins a semiconductor wafer, or a cutting device called a dicer that divides a thinned semiconductor wafer into chips, a required part of the device It is known that piping for transmitting air, processing fluid, suction force, and the like is stretched (see, for example, Patent Documents 1 and 2).

  More specifically, the cutting apparatus includes at least a chuck table for sucking and holding a semiconductor wafer, an air-bearing spindle unit including a cutting blade for cutting the semiconductor wafer held on the chuck table, and a cut semiconductor wafer. And a cleaning device for cleaning.

  In addition, the grinding device includes at least a chuck table for sucking and holding a semiconductor wafer, an air bearing spindle unit including a grinding wheel for grinding the semiconductor wafer held on the chuck table, and a cleaning device for cleaning the ground semiconductor wafer. And.

  Further, in these cutting devices and grinding devices, an air suction source that generates a negative pressure for sucking the semiconductor wafer to the chuck table, an air supply source that supplies high-pressure air to the air bearing, and a cleaning solution is supplied to the cleaning device. In addition to a cleaning liquid supply source and the like, pipes are provided for guiding the fluid from the fluid suction source and the supply source to the respective action locations.

  As piping for various fluids in such a cutting device or grinding device, a tube having a diameter of about several millimeters to several tens of millimeters is generally used, and a tube cut to an appropriate length is a device. Connected in place.

  And the tube for flowing such a fluid is normally accumulate | stored in the state wound by the reel, and cut | disconnecting and using the tube pulled out from the reel to the target length is performed.

JP-A-10-321562 JP-A-55-112761

  In various processing apparatuses such as the cutting apparatus and the grinding apparatus described above, a plurality of tubes are stretched in order to individually flow various fluids such as liquid and gas. For the purpose of preventing the tubes from getting tangled and for the purpose of ordering, it is necessary to bind a plurality of tubes at a predetermined binding position or to fix the tubes at a predetermined position such as a framework of a processing apparatus.

  Here, when the tube cut to a predetermined length is drawn around in the processing apparatus, that is, when the tube is attached and stretched, the bundling at the predetermined bundling position and the fixing at the predetermined position are ensured. In the case where it is performed, there is no problem that the length of the tube is insufficient or excessive.

  However, when the operator performs binding at a position away from the predetermined binding position, for example, the route around the tube (the trajectory of the tube) changes, so that the length of the tube is insufficient, or There is a possibility that problems such as surplus occur.

  The degree of occurrence of this defect varies depending on the work variation of the operator. In the first place, it is assumed that there is some variation in the length of the tube when it is pulled out from the reel and cut.

  For this reason, conventionally, the tube is pulled out longer than a predetermined length and cut with a margin, and after the long tube is routed, the excess portion is cut.

  However, since the surplus portion is discarded, it is very uneconomical, and the cost for disposal and consideration for protecting the natural environment are lacking. In particular, for a processing apparatus that uses several tens to several hundreds of tubes in one processing apparatus, a large amount of tubes are discarded, which is a big problem.

  This invention is made | formed in view of such a point, The place made into the objective is providing the economical tube which eliminates generation | occurrence | production of the excess of a tube and can reduce a waste part.

  According to the first aspect of the present invention, there is provided a tube provided in the apparatus, the tube having a fixed position indication displayed on the tube and indicating a position to be fixed by a fixing member at a predetermined position of the apparatus. Is done.

  According to the present invention, since the fixed position display indicating the position to be fixed in the apparatus is displayed, it is possible to prevent the operator from excessively drawing and using the tube excessively.

  Therefore, it is economical because it is possible to reduce the number of tubes to be discarded as surplus, and it is possible to prevent costs for disposal and to consider the protection of the natural environment.

  Furthermore, since the fixed position display is displayed, it is possible to realize a configuration that is easy for the operator who installs the tube.

It is an external appearance perspective view of a cutting device. It is a perspective view of the semiconductor wafer supported by the annular frame via the dicing tape. It is a figure explaining the principle of the tube of this invention. It is a figure shown about other embodiment of a fixed position display.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external perspective view of a cutting device 2 using a tube of the present invention for piping. On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, the first street (division planned line) S1 and the second street S2 are orthogonal to each other on the surface of the light emitting device wafer W to be diced (hereinafter also simply referred to as “wafer W”). A large number of devices D such as LEDs are formed on the wafer W by being partitioned by the first street S1 and the second street S2.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of (for example, 25) wafers are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12 that is an area on which a wafer to be loaded / unloaded is temporarily placed is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement region 12, a transfer means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement region 12 is Adsorbed by the conveying means 16 and conveyed onto the chuck table 18 and sucked by the chuck table 18, and held on the chuck table 18 by fixing the frame F by a plurality of fixing means (clamps) 19. .

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by processing such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  A cutting means (cutting unit) 24 for cutting the wafer W held on the chuck table 18 is disposed on the left side of the alignment means 20. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  Reference numeral 25 denotes transport means for transporting the wafer W after the cutting to the cleaning device 27. The cleaning device 27 cleans the wafer W and blows air from an air nozzle to dry the wafer W.

  Next, the principle of the tube of the present invention will be described with reference to FIG. The tube 11 is formed of, for example, a resin exhibiting flexibility, and a fixed position display 13 for displaying a position where the tube 11 is fixed is printed on the tube 11.

  The fixed position display 13 can be composed of straight lines, broken lines, chain lines, numbers, English characters, kanji, katakana, hiragana, figures, etc., or a combination of these.

  The fixed position display 13 of the present embodiment includes a straight line 13a orthogonal to the length direction of the tube 11 and a “solid” character 13b disposed in the vicinity of the straight line 13a.

  By using the binding band 52 to tie the tube 11 to the device frame 23 using the straight line 13a of the fixed position display 13 as a guide, the predetermined position of the tube 11 (the position of the fixed position display 13) becomes the predetermined binding position. They are bound together at (device frame 23).

  In addition, the operator can recognize that the straight line 13 a indicates the fixed position by the “fixed” character 13 b of the fixed position display 13. Thus, it is preferable to use the character 13b that reminds of an idea.

  As described above, the fixed position display 13 is the tube 11 disposed in the apparatus, and indicates the position that is displayed on the tube 11 and should be fixed by the binding band 52 (fixing member) at a predetermined position in the apparatus. It is set as the structure provided.

  Thus, when performing the work of drawing the tube 11 into the apparatus, the operator confirms the fixed position display 13 and fixes (or binds) the tube 11 to a predetermined position at the position of the fixed position display 13. be able to.

  And about the tube 11 fixed (or united) in a predetermined position in this way, the ideal routing designed beforehand is implement | achieved. For this reason, the situation that the length becomes insufficient when being drawn does not occur, and it is not necessary to prepare an extra long tube 11.

  In addition, it is economical because it is possible to reduce the number of tubes to be discarded as surplus, and it is possible to prevent costs for disposal and to consider the protection of the natural environment.

  It is possible to reduce the printing cost by printing both the straight line 13a and the character 13b of the fixed position display 13 with the same color. In addition to printing both the straight line 13a and the character 13b, either one may be printed. The fixed position display 13 may be displayed by printing by an inkjet method or the like, or may be displayed by irradiating the tube 11 with a predetermined laser beam.

  In addition, the position in the length direction of the tube 11 on which the fixed position display 13 is to be printed is, for example, assembling each tube in an actual apparatus and actually binding the tube 11 in an appropriate state using the binding band 52. At the same time, the bound position can be marked as an optimum fixed position, and then the tube can be removed and the distance from the tube end of the marked fixed position can be measured.

  In addition to this, for example, the tube may be stretched around the model of the processing apparatus by simulation using a computer, and the optimum binding position may be obtained by simulating the optimum binding position.

  FIG. 4 shows an example of printing a fixed position display 13A including fixed destination information 13c as another embodiment. The fixing destination information 13c indicates an object to which the tube 11A is to be fixed at a place where the fixed position display 13A is arranged.

  Specifically, for example, the notation “A3” indicates fixing to the third position from the lower side of the vertical frame 15 placed on the right side of the apparatus, and the notation “A4” indicates that the lower side of the vertical frame 15 placed on the right side of the apparatus. This indicates that the position is fixed at the fourth position from the side.

  The fixed position display 13A has a small circle mark row 13d composed of a plurality of small circle marks in addition to the fixed destination information 13c. This small circle mark row 13d makes it possible to find the position of the fixed position display 13A more easily than in the case of only the fixed destination information 13c.

  In the above embodiment, the color of the tube 11 is not particularly limited, but a color with a strong contrast with the color of the fixed position display is adopted in order to make the fixed position display easy to see. Is preferred.

  Further, in order to make the fixed position display easy to see, the color of the tube 11 is set to a predetermined color only for the place where the fixed position display is arranged, that is, for example, the fixed position display only for the print portion of the fixed position display. It is also possible to form a region having a strong color and a contrast color.

  In the above-described embodiment, the example in which the tube of the present invention is applied to the piping of the cutting apparatus has been described. However, the use of the tube of the present invention is not limited thereto, and examples thereof include a grinding apparatus and a polishing apparatus. The same applies to piping of other processing devices.

11 Tube 13 Fixed position display 13a Straight line 13b Character 52 Binding band

Claims (1)

A tube disposed in the apparatus,
A tube provided with a fixed position display which is displayed on the tube and indicates a position to be fixed by a fixing member at a predetermined position of the apparatus.

Images