JP2014005960A - Heat exchange device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the treatment flow amount per unit time without enlarging a device and reduce the power consumption thereby achieving energy saving.SOLUTION: A heat exchange device includes: a dividing wall part 5 which is provided in a heat exchange chamber thereby dividing the heat exchange chamber in a right direction Fs relative to heat exchange surfaces 2f, 2r and forming a pair of heat exchange divided chamber parts 3f, 3r; one or more inflow port parts 6i which may flow a fluid L from the right angle Fs relative to the one heat exchange surface 2f into the one heat exchange divided chamber part 3f; one or more outflow port parts 6e which may flow out the fluid L in the other heat exchange divided chamber part 3r in the right angle Fs relative to the other heat exchange surface 2r; and multiple circulation hole parts 7 ... which penetrate through the dividing wall part 5 and are formed along a periphery 5c of the dividing wall part 5 at a predetermined interval.

Description

  The present invention relates to a heat exchanging device including a heat exchanging block portion provided with a heat exchanging chamber for circulating a fluid to be heat exchanged.

  Conventionally, a heat exchange block part with a predetermined thickness provided inside a heat exchange chamber for circulating a fluid to be heat exchanged, and a pair of heat exchange surfaces in the thickness direction of the heat exchange block part are respectively attached to the heat exchange block part. A heat exchange device disclosed in Patent Document 1 is known as a heat exchange device including a pair of temperature control units that perform heat exchange with respect to a fluid.

  The heat exchange device disclosed in the document 1 includes at least a heat exchange block portion having a predetermined thickness having a heat exchange chamber provided therein with a predetermined flow path pattern for circulating a fluid to be heat exchanged, and this heat. A heat exchange device including a pair of temperature control units that are attached to a pair of heat exchange surfaces in the thickness direction of the exchange block unit and perform heat exchange with respect to a fluid, respectively, and a partition wall is provided inside the heat exchange chamber By providing the heat exchange chamber in a direction perpendicular to the heat exchange surface to form a pair of heat exchange compartment portions, each heat exchange compartment portion is provided with a predetermined flow path pattern, and a partition wall is provided. A through hole is provided to connect one end portions of the flow path patterns of each heat exchange compartment portion in series, and the other end portion of one flow passage pattern in the pair of heat exchange compartment portions is an inflow end of the fluid, and the other The other end of the flow path pattern Provided at least one heat exchange section and the end is obtained by configuration.

JP 2010-151427 A

  However, the conventional heat exchange structure using the predetermined flow path pattern described above has the following problems to be solved.

  First, since one flow path corresponding to the flow path pattern is basically formed in a spiral or zigzag shape, there is a limit to increasing the cross-sectional area of the flow path, and processing per unit time The flow rate cannot be increased. In this case, in order to increase the processing flow rate, it is only necessary to increase the size of the entire heat exchange device. However, the increase in the size of the heat exchange device increases the weight and cost of the entire heat exchange device.

  Secondly, since one flow path formed in a spiral shape or a zigzag shape is used, not only the cross-sectional area of the flow path is reduced, but the total length of the flow path is increased and the number of non-linear flow paths is increased. Eventually, there is a limit to promoting energy saving, such as an increase in overall channel resistance (pressure loss) when the fluid flows and an increase in power consumption.

  The object of the present invention is to provide a heat exchange device that solves such problems in the background art.

  In order to solve the above-described problems, the present invention provides at least a heat exchange block unit 2 having a predetermined thickness in which a heat exchange chamber for circulating a fluid L to be heat exchanged is provided, and the heat exchange block unit 2. When the heat exchange device 1 is provided with a pair of temperature control parts 4f and 4r that are attached to the pair of heat exchange surfaces 2f and 2r in the thickness direction of the fluid L and perform heat exchange with the fluid L, respectively, The heat exchange chamber is divided in the direction Fs perpendicular to the heat exchange surfaces 2f and 2r to form a pair of heat exchange chamber portions 3f and 3r, and one heat exchange surface 2f. One or two or more inflow ports 6i capable of flowing the fluid L into the inside of one heat exchange compartment 3f from the perpendicular direction Fs, and the fluid L inside the other heat exchange compartment 3r are connected to the other heat exchange surface. One or two or more that can flow out from 2r in the direction perpendicular to Fs An outlet portion 6e, the partition wall 5 and the through, and characterized by comprising a plurality of circulation holes 7 ... formed at predetermined intervals along the periphery 5c of the partition wall 5.

  In this case, according to a preferred aspect of the invention, the one or more inflow ports 6i and the one or more outflow ports 6e can be arranged substantially in the center with respect to the heat exchange surfaces 2f and 2r. The heat exchange block 2 has a constant thickness, and has an inner plate part 11 having heat exchange compartment recesses Rf and Rr for forming the heat exchange compartments 3f and 3r, and the inner plate part. 11 in the thickness direction of the inner plate portion 11, one outer plate portion 12 having an inflow port opening 12 h for contacting the one surface 11 f in the thickness direction of the eleventh surface and providing the inflow port portion 6 i on the inner surface. And the other outer plate portion 13 having an outlet opening 13h for contacting the other surface 11r and providing the outlet portion 6e on the inner surface. Further, the inlet 6i can use the opening end Pis of the inflow pipe Pi inserted into the inlet opening 12h, and the outlet 6e can be inserted into the outlet 13h. The open end Pes of the outflow pipe Pe can be used. Further, by sticking one lining sheet 12p to the inner surface of one outer plate part 12, the one lining sheet 12p and the opening end Pis of the inflow pipe Pi are integrated, and / or the other outer plate. By sticking the other lining sheet 13p to the inner surface of the part 13, the other lining sheet 13p and the opening end Pes of the outflow pipe Pe can be integrated. At this time, one lining sheet 12p and the opening end Pis of the inflow pipe Pi are formed separately and integrated by coupling, and / or the other lining sheet 13p and the opening end Pes of the outflow pipe Pe are separated. And may be integrated by joining, or one lining sheet 12p and the opening end Pis of the inflow pipe Pi may be integrated by integral molding and / or the other lining sheet 13p and the outflow pipe Pe. The opening end portion Pes may be integrated by integral molding. In addition, as a suitable fluid L, a chemical | medical solution can be applied.

  According to the heat exchanging device 1 according to the present invention having such a configuration, the following remarkable effects can be obtained.

  (1) One or two or more inflow ports 6i capable of flowing the fluid L into one heat exchange compartment 3f from the direction Fs perpendicular to one heat exchange surface 2f and the inside of the other heat exchange compartment 3r One or two or more outflow port portions 6e that can flow out the fluid L from the other heat exchange surface 2r in the right-angle direction Fs, the partition wall portion 5, and a predetermined distance along the peripheral edge 5c of the partition wall portion 5. Since the plurality of flow holes 7 formed for each are provided, the simplest flow path is formed in the heat exchange chamber on the pattern. Therefore, the cross-sectional area of the flow path can be increased if necessary, and the processing flow rate per unit time can be increased. In addition, at this time, the heat exchange device is hardly increased in size and can contribute to the reduction in size, weight and cost of the entire device.

  (2) The cross-sectional area of the flow path inside the heat exchange chamber can be easily increased, the total length of the flow path is short, and the shape is simple (simple path). Therefore, since the entire flow path resistance (pressure loss) when the fluid L flows can be reduced, energy saving can be realized by reducing power consumption.

  (3) If one or two or more inflow ports 6i and one or two or more outflow ports 6e are arranged substantially in the center with respect to the heat exchange surfaces 2f and 2r according to a preferred embodiment, the fluid L is In one heat exchange chamber 3f, it diffuses evenly in the radial direction from approximately the center, and in the other heat exchange chamber 3f, it converges equally in the radial direction to approximately the center, so that it is equal to the entire fluid L. Heat exchange can be performed. Therefore, the pressure loss when the fluid L flows can be further reduced, and the heat exchange efficiency can be improved.

  (4) According to a preferred embodiment, the heat exchanging block portion 2 has a constant thickness and has an inner plate portion 11 having heat exchanging chamber recesses Rf and Rr for forming the heat exchanging chamber portions 3f and 3r. And one outer plate portion 12 having an inlet opening portion 12h for contacting the one surface 11f in the thickness direction of the inner plate portion 11 and providing the inlet portion 6i on the inner surface, and the inner plate portion 11 and the other outer plate portion 13 having an outlet opening portion 13h for contacting the other surface 11r in the thickness direction and providing the outlet portion 6e on the inner surface. It can be easily manufactured with parts and a small number of parts, and maintainability can also be improved.

  (5) According to a preferred embodiment, the inlet end Pis of the inlet pipe Pi inserted through the inlet opening 12h is used as the inlet 6i, and the outlet outlet 13h is inserted into the outlet 6h. By using the open end portion Pes of the outflow pipe Pe, a connecting means such as a joint becomes unnecessary, and the structure can be simplified, which can contribute to cost reduction and improvement in sealing performance.

  (6) By adhering one lining sheet 12p to the inner surface of one outer plate part 12 according to a preferred embodiment, the one lining sheet 12p and the opening end Pis of the inflow pipe Pi are integrated, and ( Or, if the other lining sheet 13p and the open end Pes of the outflow pipe Pe are integrated by attaching the other lining sheet 13p to the inner surface of the other outer plate part 13, a joint or the like Without using the connecting means, it is possible to easily secure the sealing performance in the heat exchange chamber and to increase the degree of freedom in selecting the material for the outer plate portions 12 and 13. Therefore, a chemical solution can be applied as a suitable fluid L.

  (7) According to a preferred embodiment, one lining sheet 12p and the open end Pis of the inflow pipe Pi are formed separately and integrated by coupling, and / or the other lining sheet 13p and the open end of the outflow pipe Pe If the part Pes is formed separately and integrated by bonding, it can be used especially when using a material that can be easily combined, and the lining sheet 12p and the opening end Pis of the inflow pipe Pi are integrally formed. And / or the other lining sheet 13p and the opening end portion Pes of the outflow pipe Pe can be integrated by integral molding, particularly when a material that can be easily molded is used. Therefore, the flexibility at the time of manufacture is excellent, and the optimization of the manufacturing method can be easily realized.

A sectional front view of a heat exchange device according to a preferred embodiment of the present invention, A plan view showing a part of the heat exchange device, The top view which shows the inner plate part in the heat exchanger, An exploded cross-sectional front view of the heat exchange device, A cross-sectional front view showing a state where the inflow pipe (outflow pipe) and the lining sheet are combined in the heat exchange device, A cross-sectional front view showing a state where the inflow pipe (outflow pipe) and the lining sheet in the heat exchange device are integrally formed, Operation explanatory diagram of the heat exchange device, The top view which shows an example of the usage condition of the heat exchanger, Structural explanatory drawing seen from the plane of the inner plate part in the heat exchange apparatus which concerns on the modified embodiment of this invention,

  Next, preferred embodiments according to the present invention will be given and described in detail with reference to the drawings.

  First, the configuration of the heat exchange device 1 according to the present embodiment will be specifically described with reference to FIGS.

  The illustrated heat exchange device 1 is a chemical heat exchange device that uses a chemical as the fluid L. The heat exchange device 1 according to the present embodiment is suitable for use in heat exchange of such a chemical solution. As shown in FIG. 1, the heat exchange device 1 includes a heat exchange block unit 2 having a predetermined thickness in which a heat exchange chamber for circulating a fluid L to be heat exchanged is provided. The heat exchange block 2 has a constant thickness as shown in FIG. 4 and a constant thickness as shown in FIG. In addition, the inner plate portion 11 and the outer shape are formed in the same shape, and the inner plate portion 11 includes a pair of outer plate portions 12 and 13 that are brought into contact with the surfaces 11f and 11r in the thickness direction of the inner plate portion 11, respectively. . If the heat exchange block part 2 is configured in this way, there is an advantage that it can be easily manufactured with simple parts and a small number of parts, and the maintainability can be improved.

  In this case, the inner plate portion 11 is integrally formed of a fluorine-based resin material having excellent chemical resistance such as PFA and PTFE. As shown in FIG. 4, one surface 11f has one heat exchange compartment portion 3f. A heat exchange compartment recess Rf for providing the other heat exchange compartment recess Rr for providing the other heat exchange compartment 3r is formed on the other surface 11r. In addition, each recessed part Rf, Rr for heat exchange compartments is formed in square shape, as shown in FIG. Thus, the heat exchange chamber recesses Rf and Rr are provided inside the heat exchange chamber to bisect the heat exchange chamber in the direction Fs perpendicular to the heat exchange surfaces 2f and 2r, thereby providing a pair of heat exchange chamber portions 3f. , 3r to form the partition wall portion 5. The partition wall 5 is formed with a plurality of flow holes 7 penetrating the partition wall 5 and arranged at predetermined intervals along the peripheral edge 5c of the partition wall 5. Furthermore, the space between the peripheral edge 5c of the partition wall portion 5 and the outer edge of the inner plate portion 11 becomes surfaces 11f and 11r that come into contact with the outer plate portions 12 and 13, and therefore, this surface 11f (11r) has fixing surfaces described later. A plurality (twelve examples) of bolt insertion holes 11s through which the bolts nuts Bn are inserted are formed at predetermined intervals.

  On the other hand, the outer plate part 12 is integrally formed of a rigid material having excellent heat conductivity such as an aluminum material. Then, as shown in FIG. 4, an inlet opening 12 h for providing the inlet 6 i on the inner surface is formed substantially at the center of the outer plate portion 12, and each bolt of the inner plate 11 described above is inserted. A similar bolt insertion hole 12s is formed at a position of the outer plate portion 12 corresponding to the holes 11s, and a temperature adjusting portion 4f described later is formed on the outer surface of the outer plate portion 12 serving as the heat exchange surface 2f. A plurality of screw hole portions 12n to which a plurality of (four in the illustrated example) mounting bolts Bs for mounting are screwed are formed.

  A lining sheet 12p is attached to the inner surface of the outer plate portion 12. The lining sheet 12p is made of the same material as the inner plate portion 11, that is, a fluororesin material having excellent chemical resistance such as PFA and PTFE, and having a thickness of 250 to 330 [μm]. it can. The lining sheet 12p is adhered to the inner surface of the outer plate portion 12 using the adhesive material J. The lining sheet 12p is also provided with openings and insertion holes corresponding to the openings 12h and the bolt insertion holes 12s provided in the outer plate part 12, respectively.

  On the other hand, an inflow pipe Pi for flowing the fluid L into the heat exchange compartment 3f is prepared. The inflow pipe Pi is made of the same material as the lining sheet 12p and is formed to have an outer diameter that can be inserted into the inlet opening 12h, and preferably inserted without a gap. Then, the opening end Pis side, which is one end side of the inflow pipe Pi, is inserted into the inlet opening 12h from the heat exchange surface 2f side of the lining sheet 12p, and the opening end Pis of the inflow pipe Pi is connected to the lining sheet 12p. Integrate. That is, as shown in FIG. 5, the open end Pis of the inflow pipe Pi formed separately is joined (integrated) to the lining sheet 12p via a welded part Cx by welding or the like. Thereby, the opening end Pis of the inflow pipe Pi becomes the inflow port portion 6i, and the inflow port portion 6i through which the fluid L can flow into the inside of the one heat exchange compartment portion 3f from the perpendicular direction Fs of the one heat exchange surface 2f. Provided.

  In this way, if the opening end Pis of the inflow pipe Pi inserted through the inlet opening 12h is used as the inlet 6i, connection means such as a joint becomes unnecessary, and the structure can be simplified. This can contribute to the reduction of sealing and the improvement of sealing performance. Further, by attaching the lining sheet 12p to the inner surface of the outer plate part 12 so that the lining sheet 12p and the opening end Pis of the inflow pipe Pi are integrated, a connecting means such as a joint is not used. In addition, the airtightness in the heat exchange compartment 3f can be easily secured, and the degree of freedom of material selection for the outer plate part 12 can be increased. In this case, as shown in FIG. 5, the production mode in which the lining sheet 12p and the opening end portion Pis of the inflow pipe Pi are formed separately and joined together is used, in particular, using a material that can be easily joined. Can be used when On the other hand, as shown in FIG. 6, it is also possible to integrate the lining sheet 12p and the open end Pis of the inflow pipe Pi by integral molding. This production mode can be used particularly when a material that can be easily molded is used. Thus, since the production mode can be selected, there is an advantage that the manufacturing method is excellent and the manufacturing method can be easily optimized.

  The configuration on the one outer plate portion 12 side has been described above, but the configuration on the other outer plate portion 13 side can also be configured in the same manner as the one outer plate portion 12 side. In the configuration on the other outer plate part 13 side, 6e is an outlet part, 13h is an outlet part for opening, 13s... Is a bolt insertion hole, 13p is a lining sheet, 13n is a screw hole part, 3r is a heat exchange compartment part. , Pe indicates an outflow pipe, and Pes indicates an opening end portion which is one end side of the outflow pipe. Therefore, two outer plate portions 12 and 12 can be prepared, and one can be used as the outer plate portion 12 and the other as the outer plate portion 13.

  Since such a constituent member is used, both surfaces 11f and 11r of the inner plate portion 11 are sandwiched between the outer plate portions 12 and 13 so that the lining sheets 12p and 13p come into contact with each other, as shown in FIG. If fixed by a plurality of bolts and nuts Bn..., A pair of heat exchange compartment recesses Rf and Rr formed in the inner plate portion 11 are sandwiched between the pair of outer plate portions 12 and 13, and the heat exchange compartment portion 3f is sealed. , 3r can be obtained, and both surfaces in the thickness direction of the heat exchange block portion 2 become a pair of heat exchange surfaces 2f, 2r. In addition, although illustration was abbreviate | omitted, between each outer plate part 12 and 13 containing the inner plate part 11 and the lining sheet | seats 12p and 13p, the seal ring for improving a sealing property is interposed.

  On the other hand, the heat exchange device 1 includes a pair of temperature control units 4f and 4r that are attached to the pair of heat exchange surfaces 2f and 2r in the thickness direction of the heat exchange block unit 2 to exchange heat with the fluid L, respectively. As shown in FIGS. 1 and 2, one temperature control unit 4 f includes a plurality of thermo modules Mt... Using Peltier elements, and the inner surface side of the thermo modules Mt. Further, the water jacket portion 22 that radiates or cools the thermo modules Mt... Is overlaid on the outer surface of the thermo modules Mt. The illustrated water jacket portion 22 uses four jacket units Uj... And is combined to avoid the inflow pipe Pi as shown in FIG. Each jacket unit Uj has an inflow port Uji ... and an outflow port Uje ... for cooling water (including hot water), and has a water channel Rw from the inflow port Uji ... to the outflow port Uje .... In the illustrated water jacket portion 22, the jacket units Uj... Are connected in series, but may be connected in parallel.

  Then, the holding plate 23 is overlapped on the outer surface of the water jacket portion 22, and the mounting bolts Bs are provided on the outer surface of the outer plate 12 through positions where the holding plate 23, the water jacket portion 22, the thermo module Mt. The water jacket portion 22 and the thermo modules Mt... Are fixed by screwing into the screw holes 12 n. The thermo modules Mt... Are connected to a control unit (not shown) and perform feedback control on the temperature of the fluid L detected by the temperature sensor. In this case, the pair of temperature control units 4f and 4r may be controlled simultaneously or independently. When performing independent control, various control modes can be set such that rough control is performed on the temperature control unit 4f side and high-precision control is performed on the temperature control unit 4r side. Although one temperature adjustment unit 4f has been described above, the other temperature adjustment unit 4r is configured similarly to the one temperature adjustment unit 4f.

  Next, the usage method and operation | movement of the heat exchange apparatus 1 which concern on this embodiment are demonstrated with reference to FIGS.

  The example demonstrates the case where the fluid (chemical | medical solution) L is cooled with the heat exchange apparatus 1. FIG. First, if a fluid (chemical solution) L is supplied by a liquid feed pump (not shown), the fluid L reaches the inflow port 6i from the inflow pipe Pi, and one heat exchange compartment from the inflow port 6i (open end Pis). Supplied to the section 3f. In this case, as shown in FIG. 7, the heat is supplied from a direction perpendicular to the surface to one surface of the partition wall portion 5, which is approximately the center of the one heat exchange chamber portion 3 f. As shown by the solid arrow Fwf shown in FIG. 7, the fluid L supplied to the approximate center of one heat exchange compartment 3f diffuses in the radial direction of 360 ° within the heat exchange compartment 3f. The flow and the fluid L reach the periphery of the heat exchange compartment 3f, that is, the periphery 5c of the partition wall 5.

  Since the peripheral edge 5c of the partition wall 5 has a plurality of flow holes 7 formed at predetermined intervals along the circumferential direction, the fluid L passes through the flow holes 7 and the other of the partition walls 5. It reaches the peripheral edge 5c on the surface (opposite surface), that is, the peripheral edge of the other heat exchange compartment 3r. Since the fluid L is continuously supplied to the periphery of the other heat exchange compartment 3r one after another, the fluid L is centered inside the heat exchange compartment 3r as indicated by the dotted arrow Fwr shown in FIG. The fluid L reaches the approximate center of the heat exchange compartment 3r. Since the outflow port 6e faces the approximate center of the other heat exchange compartment 3r, the fluid L reaching the approximate center of the heat exchange compartment 3r flows from the outflow port 6e (open end Pes) to the outflow pipe Pe. Spill through.

  On the other hand, energization control in the cooling mode is performed on the thermo modules Mt of the temperature control units 4f and 4r. Therefore, the heat exchange surfaces 2f and 2r of the heat exchange block 2 are cooled by the cooling action of the thermo modules Mt... And heat exchange is performed for the fluid L flowing through the heat exchange compartments 3f and 3r. That is, the fluid L is cooled. At this time, in one heat exchange compartment 3f, since the fluid L flows from the center side to the peripheral side, the fluid L has a relatively high temperature on the central side and a relatively low temperature on the peripheral side. Become. Further, in the other heat exchange compartment 3r, since the fluid L flows from the peripheral side to the central side, the fluid L has a relatively high temperature on the peripheral side and a relatively low temperature on the central side. . As a result, the entire temperature distribution from the center side to the peripheral side in the heat exchange block unit 2 is further averaged (uniformized). Thereby, it becomes possible to further reduce the temperature difference (temperature unevenness) between the center side and the peripheral side in the entire heat exchange block part 2, and avoid unnecessary expansion strain and heat loss that occur between the center side and the peripheral side. it can. In particular, when the temperature control units 4f and 4r are configured by the thermo modules Mt using Peltier elements, the difference in the degree of load between the thermo modules Mt on the center side and the peripheral side of the heat exchange block unit 2 is small. , It is possible to contribute to the prevention of the entire deterioration and the extension of the life of the thermo modules Mt. Note that a liquid using cooling water is supplied to the water jacket portion 22, and the heat generation side of the thermo modules Mt... Is cooled.

  Therefore, according to such a heat exchange device 1 according to the present embodiment, one or more of the fluid L can flow into the inside of the one heat exchange compartment 3f from the direction Fs perpendicular to the one heat exchange surface 2f. The inlet 6i, one or two or more outlets 6e through which the fluid L inside the other heat exchange compartment 3r can flow out from the other heat exchange surface 2r in the perpendicular direction Fs, and the partition wall 5 pass through. And a plurality of flow holes 7 formed at predetermined intervals along the peripheral edge 5c of the partition wall 5, so that the simplest flow path in the pattern is provided inside the heat exchange chamber. It is formed. Therefore, the cross-sectional area of the flow path can be increased if necessary, and the processing flow rate per unit time can be increased. In addition, at this time, the heat exchange device is hardly increased in size and can contribute to the reduction in size, weight and cost of the entire device.

  Further, the cross-sectional area of the flow path inside the heat exchange chamber can be easily increased, the total length of the flow path is short, and a simple shape (simple path) is obtained. Therefore, the overall flow resistance (pressure loss) when the fluid L flows is reduced, which can contribute to reduction of power consumption and further promote energy saving. In addition, since the inlet 6i and the outlet 6e are arranged at substantially the center with respect to the heat exchange surfaces 2f and 2r, the fluid L is diffused evenly in the radial direction from the substantially center in the one heat exchange compartment 3f. At the same time, in the other heat exchange compartment 3f, it converges evenly from the radial direction to the approximate center. Thereby, while being able to perform uniform heat exchange with respect to the whole fluid L, the pressure loss at the time of the fluid L flowing can be made smaller, and it can contribute to the improvement of heat exchange efficiency.

  In addition, although the above usage mode turns into the mode which uses the heat exchange apparatus 1 independently, since the inflow pipe Pi and outflow pipe Pe which concern on this embodiment protrude from the heat exchange surfaces 2f and 2r, in FIG. As shown, a large number (e.g., nine) of heat exchange devices 1 can be arranged in close contact with each other in the same plane direction, and can be configured as an integrated heat exchange device 100. There is an advantage that it can be changed easily and flexibly according to the purpose.

  Next, a heat exchange device 1 according to a modified embodiment of the present invention will be described with reference to FIGS. 9 (a), (b) and (c).

  FIG. 9A shows an example in which the overall shape is changed. In the embodiment shown in FIGS. 1 to 7 described above, the overall shape of the heat exchange compartments 3f and 3r is formed in a square shape, but FIG. 9A shows the whole of the heat exchange compartments 3f and 3r. The shape is a rectangle. For this reason, two separated inlet portions 6i, 6i are provided, and two separated outlet portions 6e, 6e are provided. In this case, the number of the inlet portions 6i and 6i is two, but basically, since the fluid L is divided into two, the two inlet portions 6i and 6i are regarded as one inlet portion. Can be seen. Accordingly, also in the layout shown in FIG. 9A, the inlet 6i (outlet 6e) is arranged substantially in the center with respect to the heat exchange surface 2f (2r). Thus, the heat exchange device 1 may have a rectangular overall shape, and may increase the number of inflow ports 6i (outflow ports 6e) as the rectangle becomes elongated. In particular, the heat exchanging device 1 disperses the fluid L evenly in the radial direction from the approximate center by disposing the inflow port portion 6i (outlet port portion 6e) substantially at the center with respect to the heat exchange surface 2f (2r). In addition, since it is desirable to converge evenly in the center from the radial direction, the number and position of the inlet portions 6i (outlet portions 6e) can be selected so that this function can be realized to the maximum. Except for the above points, the configuration and functions of other details are the same as those of the embodiment shown in FIGS. For this reason, in FIG. 9A, the same components as those in FIGS. 1 to 7 are denoted by the same reference numerals to clarify the configuration, and detailed description thereof is omitted.

  FIG. 9B shows an example in which the overall shape of the heat exchange compartments 3f and 3r is changed. In the embodiment shown in FIGS. 1 to 7 described above, the overall shape of the heat exchange chamber portions 3f and 3r is formed in a square shape, but FIG. 9B shows the entire heat exchange chamber portions 3f and 3r. The shape is circular. When this form is selected, the heat exchange area becomes smaller than that of the embodiment shown in FIGS. 1 to 7, but the fluid L is substantially at the center as indicated by the dotted arrow Fwe shown in FIG. 9B. From the viewpoint of evenly diffusing from the radial direction to the radial direction and evenly converging from the radial direction to the approximate center. Except for the above points, the configuration and functions of other details are the same as those of the embodiment shown in FIGS. Therefore, in FIG. 9B, the same parts as those in FIGS. 1 to 7 are denoted by the same reference numerals to clarify the configuration, and detailed description thereof is omitted.

  FIG. 9 (c) is provided with a plurality of guide strips (or guide grooves) 31... For guiding the flow of the fluid L inside the heat exchange compartments 3f and 3r. Thereby, since the fluid L flows along the shape of the guide strips 31..., The flow can be adjusted and the heat exchanging distance (heat exchanging time) can be lengthened although it is slight. Except for the above points, the configuration and functions of other details are the same as those of the embodiment shown in FIGS. For this reason, in FIG.9 (c), while attaching the same code | symbol to the same part as FIGS. 1-7, the structure is clarified, The detailed description is abbreviate | omitted.

  The preferred embodiment (including the modified embodiment) has been described in detail above. However, the present invention is not limited to such an embodiment, and the detailed configuration, shape, quantity, material, etc. Changes, additions and deletions can be made arbitrarily without departing from the scope.

  For example, arranging the inflow port portion 6i and the outflow port portion 6e substantially at the center with respect to the heat exchange surfaces 2f and 2r is a concept including not only the center but also the center periphery that can secure the effect of the invention. The “right angle direction Fs” does not mean an exact right angle but is a concept including a slight inclination that can ensure the effect of the invention. On the other hand, the form in which the lining sheet 12p (13p) and the opening end Pis (Pes) of the inflow pipe Pi (outflow pipe Pe) are integrated may be integrated by the same form or may be integrated by different forms. . On the other hand, the shapes of the heat exchange chambers 3f and 3r are not limited to the illustrated squares, rectangles, and circles, and various shapes such as polygons having symmetry such as regular triangles and hexagons can be applied. Moreover, although the temperature control part 4f and 4r illustrated the form directly attached to the heat exchange surfaces 2f and 2r of the outer plates 12 and 13, a mounting plate formed of a heat conductive material is prepared separately. The temperature control parts 4f and 4r may be attached to one surface, and the other surface may be attached to the heat exchange surfaces 2f and 2r of the outer plates 12 and 13 with a heat conductive paste or the like interposed therebetween. Furthermore, although the case where temperature control part 4f, 4r was comprised by the combination of thermomodule Mt ... and the water jacket part 22 was shown, the case where it comprises with the other temperature control means which has the same function is not excluded. . In addition, although the cooling water or the warm water was illustrated as a liquid sent to the water jacket part 22, other various liquids, such as an antifreeze liquid, are applicable.

  The heat exchanging device 1 according to the present invention is optimal for use in a chemical liquid heat exchanging device that uses a chemical solution as the fluid L. While being able to apply a fluid, it can be used as a heat exchange device 1 in various apparatuses such as a semiconductor manufacturing apparatus and a liquid crystal glass substrate processing apparatus.

  DESCRIPTION OF SYMBOLS 1: Heat exchange apparatus, 2: Heat exchange block part, 2f: Heat exchange surface, 2r: Heat exchange surface, 3f: Heat exchange compartment part, 3r: Heat exchange compartment part, 4f: Temperature control part, 4r: Temperature control part , 5: partition wall portion, 5c: peripheral edge of partition wall portion, 6i: inlet portion, 6e: outlet portion, 7 ...: flow hole portion, 11: inner plate portion, 11f: one surface of inner plate portion, 11r: The other surface of the inner plate part, 12: Outer plate part, 12h: Inlet opening part, 12p: Lining sheet, 13: Outer plate part, 13h: Outlet opening part, 13p: Lining sheet, L: Fluid, Fs: Right angle direction, Rf: Heat exchange compartment recess, Rr: Heat exchange compartment recess, Pi: Inflow pipe, Pe: Outflow pipe, Pis: Open end, Pes: Open end

Claims (8)

  At least a heat exchange block portion having a predetermined thickness in which a heat exchange chamber for circulating a fluid to be heat exchanged is provided, and a pair of heat exchange surfaces in the thickness direction of the heat exchange block portion. In a heat exchange device comprising a pair of temperature control units that perform heat exchange with respect to the fluid, the heat exchange chamber is divided into two in a direction perpendicular to the heat exchange surface by being provided inside the heat exchange chamber. A partition wall that forms a pair of heat exchange compartments, one or more inlets that allow fluid to flow into one of the heat exchange compartments from a direction perpendicular to one of the heat exchange surfaces, and the other heat One or two or more outflow ports that can flow the fluid inside the exchange chamber from the other heat exchange surface in a direction perpendicular to the other, and a predetermined interval along the periphery of the partition wall. And having a plurality of flow holes formed for each Heat exchange apparatus according to symptoms.   The heat exchange apparatus according to claim 1, wherein the one or more inflow ports and the one or more outflow ports are arranged substantially in the center with respect to the heat exchange surface.   The heat exchange block portion has a constant thickness, and has an inner plate portion having a heat exchange compartment recess for forming the heat exchange compartment portion, and one surface in the thickness direction of the inner plate portion. The outer plate portion having an inlet opening for providing the inlet portion on the inner surface, and the other surface in the thickness direction of the inner plate portion, and the outlet portion The other outer plate part which has the opening part for outflow ports provided in an inner surface, The heat exchange apparatus of Claim 1 or 2 characterized by the above-mentioned.   The inflow port portion uses the open end portion of the inflow pipe inserted into the inflow port opening portion, and the outflow port portion uses the open end portion of the outflow pipe inserted into the outflow port opening portion. The heat exchange device according to claim 3.   By sticking one lining sheet to the inner surface of the one outer plate portion, the one lining sheet and the opening end portion of the inflow pipe are integrated, and / or on the inner surface of the other outer plate portion. The heat exchange device according to claim 4, wherein the other lining sheet and the open end of the outflow pipe are integrated by sticking the other lining sheet.   The one lining sheet and the opening end of the inflow pipe are formed separately and integrated by bonding, and / or the other lining sheet and the opening end of the outflow pipe are formed separately and combined. 6. The heat exchange device according to claim 5, wherein the heat exchange device is integrated.   The one lining sheet and the opening end of the inflow pipe are integrated by integral molding, and / or the other lining sheet and the opening end of the outflow pipe are integrated by integral molding. Item 6. The heat exchange device according to Item 5.   The heat exchange apparatus according to claim 1, wherein a chemical solution is applied to the fluid.

Images