JP2013251408A - Manufacturing method of solid electrolytic capacitor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a solid electrolytic capacitor by which a forming method of a solid electrolytic layer can be improved, and improvement of capacitance and low ESR can be achieved.SOLUTION: A manufacturing method of a solid electrolytic capacitor includes the steps of: supplying a dispersion solution 5 obtained by dispersing conductive fine particles with a solvent onto the surface of an anode electrode body 3 obtained by forming a dielectric oxide film 4 on a plate-like or foil-like porous valve action metal; and spreading the dispersion solution 5 into a depth of a porous layer by pressing force of an elastic body 2 to form a solid electrolytic layer across the depth of the porous layer.

Description

The present invention relates to a method for manufacturing a solid electrolytic capacitor, and more particularly to a method for manufacturing a solid electrolytic capacitor in which a method for forming a solid electrolyte layer is improved in order to improve the characteristics of capacitance and equivalent series resistance (hereinafter simply referred to as ESR).

  The solid electrolytic capacitor is a capacitor using a conductive solid metal oxide or conductive polymer as an electrolyte. Since this solid electrolytic capacitor has a higher conductivity of the solid electrolyte than the electrolytic capacitor using the electrolytic solution, it is possible to achieve low ESR, and it is not necessary to seal the electrolytic solution that is liquid. This is suitable for applications requiring high performance and as surface mount electrolytic capacitors.

  Conventionally, metal oxides having conductivity such as manganese dioxide and lead dioxide have been mainly used as solid electrolytes. However, in recent years, higher electrical conductivity can be obtained, and the ESR of solid electrolytic capacitors can be lowered. Attention has been focused on solid electrolyte layers containing conductive fine particles.

  As conductive fine particles used for the solid electrolyte layer, π-conjugated conductive polymers such as polyacetylene, polythiophene, polypyrrole, polyaniline, polyacrylonitrile, and derivatives thereof are known.

  As an anode of such a solid electrolytic capacitor, an insulating oxide film layer serving as a dielectric is formed on a valve metal such as aluminum or tantalum whose surface area has been expanded by a porous treatment or the like. Is done.

  A solid electrolyte layer made of conductive fine particles is formed on the anode. Formation of the solid electrolyte layer requires a polymerization step to polymerize the raw material, and it is common to perform a polymerizable monomer solution and an oxidant solution on the anode surface by means of chemical polymerization, gas phase polymerization, electrolytic polymerization, etc. It is. Means for obtaining a dispersion solution in which pre-polymerized conductive fine particles are dispersed in a solvent and immersing the object to be processed in the dispersion solution or applying the dispersion solution to the object to be processed and then evaporating the solvent. There is also.

  By the way, in recent years, digital devices have been reduced in size and performance, and the operating frequency has been increased. Accordingly, noise removal and power supply voltage smoothing are required, and the role of electrolytic capacitors in electronic circuits has become important. Against this background, solid electrolytic capacitors are also required to be further miniaturized, further increased in capacitance, and reduced in ESR.

  In order to increase the electrostatic capacity of the solid electrolytic capacitor, first, the area of the dielectric oxide film in the anode electrode body may be increased. Further, it is necessary to increase the area in contact with the solid electrolyte layer with respect to the dielectric oxide film having an increased surface area. Even if the area of the dielectric oxide film is increased, the capacitance does not increase unless the contact area with the solid electrolyte layer serving as a true cathode is small. Therefore, it is necessary to improve the contact area of the solid electrolyte layer with respect to the surface area of the dielectric oxide film, that is, the so-called capacity appearance rate. In addition, the contact area of the solid electrolyte layer with respect to the surface area of the dielectric oxide film increases, and the solid electrolyte layer inside the porous layer is densely formed, thereby increasing the current path inside the solid electrolytic capacitor, This also reduces the ESR of the solid electrolytic capacitor.

  In order to improve ESR characteristics, the following proposals have been made for a method of forming the solid electrolyte layer on the anode. In Patent Document 1, the air in the porous layer formed on the anode is removed under reduced pressure, and then the mixture of the polymerizable monomer solution and the oxidant solution is fed into the capacitor element by pressurization, whereby the porous layer Techniques for filling conductive fine particles deeply have been proposed.

  Patent Document 2 is a method of impregnating or applying a dispersion solution in which conductive fine particles produced in advance are dispersed in a solvent on the anode electrode body, but by controlling the particle size of the conductive fine particles of the polymer solution, A method for forming a solid electrolyte layer inside the porous pores of the anode has been proposed.

JP 2001-110681 A JP 2009-111105 A

  However, when pressurizing with air as in Patent Document 1, there is a problem that the mixed liquid on the surface of the valve action metal foil scatters and a sufficient mixed liquid cannot be fed. In addition, it is necessary to reduce the pressure before pressurization, and there is a problem that the process becomes complicated and the working time becomes long. On the other hand, in the method of Patent Document 2, the opening on the outermost porous surface is blocked, but the polymer solution does not sufficiently penetrate into the pores, and sufficient ESR characteristics cannot be improved. was there.

  The present invention has been proposed in order to solve the above-mentioned problems of the prior art, and the object thereof is to improve the method of forming a solid electrolyte layer, and to increase the capacitance and reduce the ESR. Another object of the present invention is to provide a method for manufacturing a solid electrolytic capacitor.

In order to achieve the above object, the present invention provides a plate-like or foil-like valve action metal having a porous layer on its surface, and an anode electrode body having a dielectric oxide film formed on the surface of the porous layer A method for producing a solid electrolytic capacitor including a solid electrolyte layer forming step of forming a solid electrolyte layer made of conductive fine particles on the top,
(1) The solid electrolyte layer forming step includes supplying a dispersion solution in which conductive fine particles are dispersed in a solvent onto the anode electrode body;
(2) a pressing step of pressing a dispersion solution in which the supplied conductive fine particles are dispersed in a solvent against the anode electrode body, and allowing the dispersion solution to enter the porous layer;
It is characterized by including.

  In the solid electrolyte layer forming step, the supplying step, the pressing step, and the drying step may be performed one to several times, or the pressing step may be performed only for the first time. The particle size of the conductive fine particles of the dispersion solution supplied in the first supply step may be smaller than the particle size of the conductive fine particles of the dispersion solution supplied in the subsequent supply step. As a dispersion solution in which conductive fine particles are dispersed in a solvent, at least one of a five-membered heterocyclic compound, a polyaniline, and a polyaniline derivative may be selected.

  In the present invention as described above, the dispersion solution in which the conductive fine particles supplied to the anode electrode body are dispersed in a solvent is physically pressed, and enters the porous layer of the anode electrode body simultaneously with the pressing. Thereafter, the solvent is evaporated by drying to form a solid electrolyte layer over the deep part of the porous layer.

  The elastic body is a material selected in order to suppress the destruction of the dielectric oxide film formed on the anode electrode and the deformation of the anode electrode body when pressed, and any material that can suppress these may be used. A method of physically performing with an elastic body is preferable.

In order to achieve the above object, the present invention provides a plate-like or foil-like valve action metal having a porous layer on its surface, and an anode electrode body having a dielectric oxide film formed on the surface of the porous layer A method for producing a solid electrolytic capacitor including a solid electrolyte layer forming step of forming a solid electrolyte layer made of conductive fine particles on the top,
The solid electrolyte layer forming step includes:
(1) a supplying step of supplying a mixed solution of a polymerizable monomer solution and an oxidant solution onto the anode electrode body;
(2) a pressing step of pressing the mixed solution of the supplied polymerizable monomer solution and oxidant solution against the anode electrode body;
It is characterized by including.

  The elastic body is a material selected in order to suppress the destruction of the dielectric oxide film formed on the anode electrode and the deformation of the anode electrode body when pressed, and any material that can suppress these may be used. A method of physically performing with an elastic body is preferable.

In order to achieve the above object, the present invention provides a plate-like or foil-like valve action metal having a porous layer on the surface thereof, and an anode electrode body having a dielectric oxide film formed on the surface of the porous layer. A method for producing a solid electrolytic capacitor comprising a solid electrolyte layer forming step of forming a solid electrolyte layer comprising conductive fine particles,
The solid electrolyte layer forming step includes:
(1) a supplying step of supplying a polymerizable monomer solution onto the anode electrode body;
(2) pressing the polymerizable monomer solution onto the anode electrode body;
(3) a supplying step of supplying an oxidant solution onto the anode electrode body;
(4) a pressing step of pressing the oxidant solution against the anode body;
It is characterized by including.

  The elastic body is a material selected in order to suppress the destruction of the dielectric oxide film formed on the anode electrode and the deformation of the anode electrode body when pressed, and any material that can suppress these may be used. A method of physically performing with an elastic body is preferable. Moreover, you may determine the presence or absence of each press process according to the viscosity of a polymerizable monomer solution and an oxidizing agent solution.

  According to the present invention, by pressing with an elastic body, a dispersion solution of conductive fine particles forming a solid electrolyte layer, a mixed solution of a polymerizable monomer solution and an oxidizer solution, a polymerizable monomer solution and an oxidizer solution are made porous. It can be extended to the deep part of the layer. Therefore, a solid electrolyte layer can be formed over the deep part of the porous layer. For this reason, it is possible to increase the capacitance of the solid electrolytic capacitor and reduce the ESR. Moreover, since the method is physically performed using an elastic body, it can be performed in a short time with a simple apparatus.

  In addition, when conductive fine particles having a small particle diameter are put in the porous layer, the ESR becomes high because the number of contacts between the conductive fine particles increases, but there are also particles having a large particle diameter by pressing with an elastic body. It can be pushed deep into the porous layer. When conductive fine particles having a large particle diameter are placed in the porous layer, the contact between the conductive fine particles does not increase as in the case where the particle diameter is small, and ESR generated at the contact can be kept low. The ESR of the entire solid electrolyte can be reduced.

It is a flowchart which shows the manufacturing process of the solid electrolytic capacitor which concerns on embodiment of this invention. It is a perspective view which shows the outline of the dispersion solution supply process and dispersion solution press process which concern on embodiment of this invention. It is a graph which shows the characteristic of Example 1, 2 and Comparative example 1, 2, (a) shows an electrostatic capacitance, (b) shows dielectric loss tan-delta, (c) shows ESR.

Hereinafter, a method for producing a solid electrolytic capacitor according to the present invention will be described with reference to the drawings.
As shown in the flowchart of FIG. 1, the solid electrolytic capacitor according to the present invention is manufactured through the following steps. Steps 2 to 4 are steps for forming a solid electrolyte layer made of conductive fine particles on the anode electrode body in the present invention.
Step 1: Anode electrode body forming process Step 2: Dispersing solution supplying process Step 3: Dispersing solution pressing process Step 4: Drying process Step 5: Electrode drawing process

(Step 1: anode electrode body forming process)
A porous layer is formed by depositing a fine powder such as an etching treatment or aluminum on a plate having a predetermined size or the surface of a foil-like valve metal. The depth of the porous layer and the roughness of the surface can be selected according to applications such as withstand voltage and capacitance required for the solid electrolytic capacitor.

  Next, an oxide film serving as a dielectric is formed on the surface of the porous layer. For example, a dielectric oxide film is formed by applying a voltage (chemical conversion treatment) at 4 V for 30 minutes in an aqueous solution of ammonium adipate to obtain an anode electrode body. The thickness of the oxide film can be adjusted as appropriate by the applied voltage in the chemical conversion treatment. The anode electrode body is selected from valve metals such as tantalum and aluminum.

(Step 2: Dispersion solution supply process)
The dispersion solution is formed by dispersing conductive fine particles in a solvent. Examples of the conductive fine particles used in this dispersion solution include 5-membered heterocyclic compounds such as polypyrrole, poly- (3,4-ethylenedioxythiophene), poly- (3,4-ethylenedioxythiophene), polyaniline, and the like. Those previously polymerized can be used. In particular, it is preferable to contain at least one of thiophene derivatives such as poly- (3,4-ethylenedioxythiophene or poly- (3,4-ethylenedioxythiophene), polyaniline, or polyaniline derivatives. However, it is not particularly limited, and water or an organic solvent can be selected, but it is preferable to select one having excellent dispersibility with respect to the conductive fine particles to be used.

  FIG. 2 is a perspective view schematically showing the dispersion solution supply step and the dispersion solution pressing step. The produced dispersion solution 5 is supplied onto the porous layer of the anode electrode body 3 including the dielectric oxide film 4. As a method of supplying this dispersion solution 5, it can carry out by dripping from a nozzle, application | coating using a spray, a roller, a brush etc., for example. However, the method is not limited to these methods, and any method may be used as long as a predetermined amount of the dispersion solution 5 can be supplied onto the anode electrode body 3. Further, this dispersion solution supply step may be performed a plurality of times.

(Step 3: Dispersion solution pressing step)
As shown in FIG. 2, the anode electrode body 3 is placed on the lower elastic body 2, the dispersion solution 5 is supplied onto the anode electrode body 3 and pressed by the upper elastic body 2, and concave and convex shapes are formed thereon. The press jig 1 is prepared and pressed from above the convex mold with a hydraulic press. The press jig 1 only needs to be able to press the elastic body by a predetermined amount, and its shape and size are not limited. For example, when the anode electrode body 3 is 10 × 10 mm, the concave portion of the press jig 1 can have a diameter of about 15 mm and a depth of about 10 mm.

  The elastic body 2 is preferably softer than the valve metal so as not to damage the anode electrode body 3 at the time of pressing, for example, elastomer rubber, nitrile rubber, isopropylene rubber, stin butadiene rubber, butadiene rubber, poly Isobutylene and the like are conceivable, and elastomer rubber is used in the examples. Since the dispersion solution 5 instantaneously enters the deep part of the porous layer of the anode electrode body 3 by pressing by the elastic body 2, the pressing time may be about 1 to 2 seconds.

(Step 4: drying process)
After the addition of the dispersion solution 5 and the pressing by the elastic body is completed, the anode electrode body 3 is subjected to a drying process in order to remove the solvent and obtain a solid electrolyte layer. In the drying treatment, the solvent of the dispersion solution 5 may be evaporated, and is preferably less than 200 ° C. from the viewpoint of preventing deterioration of the anode electrode body and the conductive fine particles. Further, this drying step may be performed a plurality of times.

In addition, it is preferable to repeat said step 2: dispersion | distribution solution supply process to step 4: drying process in multiple times.
In the formation of the solid electrolyte once, the portion where the solvent was present after the drying step becomes a void. In order to form the solid electrolyte layer in the void more densely, it is only necessary to repeat the steps from the dispersion solution supplying step to step 4: the drying step a plurality of times to form the solid electrolyte layer so as to reduce the void. .

(Step 5: Electrode extraction process)
A carbon layer and a silver paste layer are formed on the solid electrolyte layer formed in the above step, an anode external terminal and a cathode external terminal are attached, and the electrode is drawn out to obtain a solid electrolytic capacitor.

  In the manufacturing process of the solid electrolytic capacitor, the supplying process, the pressing process, and the drying process may be repeated one or more times. In that case, the pressing step may be performed only for the first time.

  Further, in the manufacturing process of the solid electrolytic capacitor, when the supply step is performed a plurality of times, the particle size of the conductive fine particles of the dispersion solution 5 supplied for the first time is a dispersion in which the conductive fine particles supplied from the next time are dispersed It is preferable to make it smaller than the particle diameter of the conductive fine particles of the solution 5.

(Second embodiment)
Next, a second embodiment will be described.
In the second embodiment, each step in the flowchart shown in FIG. 1 is changed as follows.
Step 1: Anode electrode forming process Step 2: Mixing solution supply process of polymerizable monomer solution and oxidant solution Step 3: Mixed solution pressing process of polymerizable monomer solution and oxidant solution Step 4: Polymerizable monomer solution and oxidant Solution polymerization process Step 5: Electrode extraction process

  Among steps 1 to 5 above, steps 1 and 5 are the same as those in the above-described embodiment, and thus the description thereof is omitted.

Step 2 is a mixed solution supply step of the polymerizable monomer solution and the oxidizing agent solution.
Examples of the polymerizable monomer include five-membered heterocyclic compounds such as pyrrole and 3,4-ethylenedioxythiophene, and it is particularly preferable to use a thiophene derivative such as 3,4-ethylenedioxythiophene. As the solvent for the polymerizable monomer solution, alcohols such as methanol, ethanol, butanol and isopropyl alcohol are preferably used.

Any oxidizing agent solution may be used as long as it accelerates the polymerization of the polymerizable monomer. Ferric p-toluenesulfonate, ferric alkylbenzenesulfonate, ferric naphthalenesulfonate, ferric alkylnaphthalenesulfonate Anthraquinone sulfonic acid ferric acid and the like are used, and methanol, ethanol, isopropyl alcohol, butanol and the like are used as the solvent.
The mixed solution of the polymerizable monomer solution and the oxidizer solution is supplied by, for example, dropping from a nozzle or coating using a spray, a roller, a brush, or the like. However, the present invention is not limited to these methods, and any method may be used as long as a predetermined amount of the mixed solution of the polymerizable monomer solution and the oxidant solution can be supplied onto the anode electrode body 3.
Then, the polymerization of the polymerizable monomer solution proceeds by the mixed solution of the polymerizable monomer solution and the oxidant solution that has penetrated into the porous layer, and becomes conductive fine particles.

Step 3 is a pressing step of the mixed solution of the polymerizable monomer solution and the oxidant solution.
In Step 3, the object to be pressed in the pressing process is only changed to the mixed solution of the polymerizable monomer solution and the oxidant solution described above.

(Third embodiment)
Next, a second embodiment will be described.
In the second embodiment, each step in the flowchart shown in FIG. 1 is changed as follows.
Step 1: Anode electrode forming process Step 2: Polymerizable monomer solution supply process Step 3: Polymerizable monomer solution pressing process Step 4: Polymerizable monomer solution drying process Step 5: Oxidant solution supplying process Step 6: Oxidant solution pressing Process Step 7: Polymerizable Monomer Solution, Oxidant Solution Polymerization Process Step 8: Electrode Extraction Process

  Of the above steps 1 to 8, step 1 and step 8 are the same as step 1 and step 5 of the first embodiment described above, and thus the description thereof is omitted. In the solid electrolyte layer forming step of FIG. 1, the steps of supplying the polymerizable monomer solution (step 2), pressing (step 3), and drying (step 4) correspond to S02, S03, and S04, and supplying the oxidant solution (step 5) The pressing (step 6), the polymerizable monomer solution, and the oxidizing agent solution polymerization step (step 7) are S02, S03, and S04, and S02 to S04 are repeated twice.

Step 2 is a polymerizable monomer solution supply step.
Examples of the polymerizable monomer include five-membered heterocyclic compounds such as pyrrole and 3,4-ethylenedioxythiophene, and it is particularly preferable to use a thiophene derivative such as 3,4-ethylenedioxythiophene. As the solvent for the polymerizable monomer solution, alcohols such as methanol, ethanol, butanol and isopropyl alcohol are preferably used.
As a means for supplying, for example, the supply is performed by dropping from a nozzle or applying using a spray, a roller, a brush or the like. However, it is not limited to these methods, and any method may be used as long as a predetermined amount of the polymerizable monomer solution can be supplied onto the anode electrode body 3.

  In step 3, the dispersion solution 5, which is a polymerizable monomer solution, is pressed by an elastic body and supplied into the porous layer of the anode electrode body 3.

  In step 4, a drying process is performed to remove the solvent and obtain a solid electrolyte layer. In the drying process, the solvent of the dispersion solution 5 may be evaporated, and the temperature is preferably less than 60 ° C. from the viewpoint of preventing volatilization of the polymerizable monomer solution of the anode electrode body. Further, this drying step may be performed a plurality of times.

The oxidizing agent solution in Step 5 may be any solution that accelerates the polymerization of the polymerizable monomer, such as ferric p-toluenesulfonate, ferric alkylbenzenesulfonate, ferric naphthalenesulfonate, alkylnaphthalenesulfonate. Ferric iron, ferric anthraquinone sulfonic acid and the like are used, and methanol, ethanol, isopropyl alcohol, butanol and the like are used as the solvent.
As a means for supplying, for example, the supply is performed by dropping from a nozzle or applying using a spray, a roller, a brush or the like. However, the method is not limited to these methods, and any method may be used as long as a predetermined amount of the oxidizing agent solution can be supplied onto the anode electrode body 3.

  In step 6, the dispersion solution 5, which is an oxidant solution, is pressed by an elastic body and supplied into the porous layer of the anode electrode body 3.

  In step 7, the polymerizable monomer solution and the oxidant solution that have permeated into the porous layer are subjected to heat treatment, whereby polymerization of the polymerizable monomer proceeds to form conductive fine particles.

  Steps 2 to 7 may be performed once or may be repeated a plurality of times.

Examples of the present invention and comparative examples will be described.
Example 1
A porous layer was formed by an etching method with a size of 6 mm × 6 mm in the center of one surface of an aluminum plate having a size of 10 × 10 mm and a thickness of 60 μm. Then, by performing a chemical conversion treatment at 4 V for 30 minutes in an aqueous solution of ammonium adipate, an aluminum dielectric oxide film was formed on the surface of the porous layer to form an anode electrode body.

(Solid electrolyte layer formation)
The dispersion solution was formed by dispersing poly- (3,4-ethylenedioxythiophene) in water. 1.5 μl of this dispersion was supplied onto the anode electrode body. In this example, after dropping, the dispersion solution on the anode electrode body is spread.

  Next, the front and back surfaces of the foil were sandwiched between elastomer rubbers, and pressed from above with a pressure of 10 MPa and 30 MPa using a hydraulic press. After the pressing treatment, drying was performed at 130 ° C. for 10 minutes for removing the solvent.

  After the solid electrolyte layer is formed, graphite and silver paste are printed to form a carbon layer and a silver paste layer. Further, the cathode electrode is formed on the silver paste layer, and the anode electrode body is etched. The anode electrode was pulled out from the peripheral part that was not, and the solid electrolytic capacitor of Example 1 was obtained.

(Example 2)
In the solid electrolyte layer forming step, the solid electrolyte layer forming step was performed twice. Otherwise, a solid electrolytic capacitor was produced in the same manner as in Example 1. The dispersion solution and the pressing conditions in the solid electrolyte layer forming step are the same as in Example 1.

(Comparative Example 1)
In the solid electrolyte layer forming step, spreading was performed after the dispersion solution was dropped, but the pressing step using elastomer rubber was not performed. Otherwise, a solid electrolytic capacitor was produced in the same manner as in Example 1.

  (Comparison of Example and Comparative Example)

  Table 1 shows capacitance values when the amount of pressing by the elastic body is changed in the formation of the solid electrolyte layer of Example 1. The capacitance value represents an average value. The electrostatic capacity is larger when pressing at 10 or 30 MPa than the capacity without pressing. At 10 MPa and 30 MPa, the capacitance of 30 MPa is smaller, but this is considered to be within the range of variation in capacitance. This is because the average value of the capacitance of 30 MPa falls within the variation range of the capacitance measured at 10 MPa.

From this result, it is considered that the effect of improving the capacitance characteristics can be obtained if the pressure at which the dispersion solution in which the conductive fine particles are dispersed and the anode electrode body are pressed by the elastic body is in the range of 10 MPa to 30 MPa. When a pressure greater than 30 MPa is applied, the etching layer formed on the foil is crushed and the dispersion solution is less likely to penetrate into the porous layer.

  FIG. 3 shows the measurement results of capacitance, dielectric loss (tan δ) and ESR of the solid electrolytic capacitors prepared in Examples 1 and 2 and Comparative Example 1. As frequency conditions, electrostatic capacity was measured at 120 Hz, dielectric loss (tan δ) and ESR were measured at 100 kHz.

  As shown in the measurement results of the capacitance shown in FIG. 3A, the capacitances of Examples 1 and 2 that were pressed with elastomer rubber were larger than those of Comparative Example 1 that was not pressed. . Moreover, in Example 1 and Example 2, the direction of Example 2 which performed the press by elastomer rubber twice has a larger electrostatic capacitance.

  As shown in the measurement result of the dielectric loss (tan δ) shown in FIG. 3B, the dielectric loss (tan δ) is higher in Examples 1 and 2 in which the elastomer rubber is pressed than in Comparative Examples 1 and 2 in which the pressure is not applied. ) Has become smaller. Further, in Example 1 and Example 2, the dielectric loss (tan δ) is smaller than that in Example 2 in which the pressing with the elastomer rubber was performed twice.

  As shown in the measurement results of ESR shown in FIG. 3C, the values of ESR in Examples 1 and 2 that were pressed with elastomer rubber were smaller than those in Comparative Examples 1 and 2 that were not pressed. Moreover, in Example 1 and Example 2, the value of ESR is smaller than that of Example 2 in which pressing with the elastomer rubber was performed twice.

(Effect of Example)
From the above results, after applying a dispersion solution in which conductive fine particles are dispersed to the anode electrode body, the conductive particles are infiltrated to the deep part of the porous layer on the anode electrode body by physically pressing with an elastomer rubber. The solid electrolyte layer can be formed over the deep part of the porous layer. It is possible to improve the characteristics of the solid electrolytic capacitor such as increase in capacitance, decrease in dielectric loss tan δ, and reduction in ESR.

  Moreover, the magnitude | size of the dispersion solution press by an elastic body may be 10MPa-30MPa, and it can carry out easily using a small press jig | tool. Furthermore, since the pressing time may be about several seconds, the characteristics of the capacitance, dielectric loss (tan δ), and ESR of the solid electrolytic capacitor can be improved without greatly affecting the manufacturing process time.

(Other embodiments)
As described above, the embodiments of the present invention have been described. However, the present invention is not intended to limit the scope of the invention and can be implemented in various other forms without departing from the gist of the invention. Various omissions, replacements, and changes can be made. These embodiments, combinations thereof, and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  For example, in this embodiment, the solid electrolyte layer is formed only on one side of the valve metal, but the solid electrolyte layer may be formed on the front and back surfaces of the valve metal by the same method. That is, a porous layer and a dielectric oxide film may be formed on the front and back surfaces, and a dispersion solution may be supplied to the front and back surfaces and pressed with an elastic body.

  In this example, a dispersion solution in which conductive fine particles are dispersed is used. Instead of the dispersion solution, a polymerizable monomer solution and an oxidant solution are alternately supplied to the anode electrode body, and the anode body is made of an elastic body. A solid electrolyte layer may be formed on the surface of the porous layer of the anode electrode body by pressing. In this case, when the polymerizable monomer solution is supplied to the anode electrode body, the polymerizable monomer has good permeability to the porous layer, and therefore, the pressing step using the elastic body may or may not be performed. Alternatively, a mixed solution of a polymerizable monomer solution and an oxidant solution may be supplied to the anode electrode body and pressed with an elastic body to form a solid electrolyte layer on the surface of the porous layer of the anode electrode body.

DESCRIPTION OF SYMBOLS 1 ... Press jig 2 ... Elastic body 3 ... Anode electrode body 4 ... Dielectric oxide film 5 ... Dispersion solution

Claims (6)

A solid electrolyte layer which is a plate-like or foil-like valve action metal having a porous layer on its surface and forms a solid electrolyte layer on an anode electrode body having a dielectric oxide film formed on the surface of the porous layer A method of manufacturing a solid electrolytic capacitor including a forming step,
The solid electrolyte layer forming step includes:
Supplying a dispersion solution in which conductive fine particles are dispersed in a solvent onto the anode electrode body;
A pressing step of pressing the supplied dispersion solution against the anode electrode body by pressing means and infiltrating the porous layer; and
The manufacturing method of the solid electrolytic capacitor characterized by including this. In the pressing step,
The method for producing a solid electrolytic capacitor according to claim 1, wherein the dispersion solution is pressed against the anode electrode body with an elastic body. A solid electrolyte layer which is a plate-like or foil-like valve action metal having a porous layer on its surface and forms a solid electrolyte layer on an anode electrode body having a dielectric oxide film formed on the surface of the porous layer A method of manufacturing a solid electrolytic capacitor including a forming step,
The solid electrolyte layer forming step includes:
A supplying step of supplying a mixed solution of a polymerizable monomer solution and an oxidant solution onto the anode electrode body;
A pressing step of pressing the mixed solution of the supplied polymerizable monomer solution and the oxidant solution against the anode electrode body and entering the porous layer; and
The manufacturing method of the solid electrolytic capacitor characterized by including this. In the pressing step,
The method for manufacturing a solid electrolytic capacitor according to claim 3, wherein the mixed solution is pressed against the anode electrode body by an elastic body. A solid electrolyte layer which is a plate-like or foil-like valve action metal having a porous layer on its surface and forms a solid electrolyte layer on an anode electrode body having a dielectric oxide film formed on the surface of the porous layer A method of manufacturing a solid electrolytic capacitor including a forming step,
The solid electrolyte layer forming step includes:
A polymerizable monomer solution supplying step of supplying a polymerizable monomer solution onto the anode electrode body;
An oxidant solution supply step of supplying an oxidant solution onto the anode electrode body;
A pressing step of pressing the polymerizable monomer solution or the oxidant solution supplied on the anode electrode body;
The manufacturing method of the solid electrolytic capacitor characterized by including this. In the pressing step,
6. The method for manufacturing a solid electrolytic capacitor according to claim 5, wherein the polymerizable monomer solution and the oxidant solution are pressed against the anode electrode body with an elastic body.