JP2013187509A - Positional information acquiring method of mounting members, positional information acquiring device of the same and manufacturing method of electronic device - Google Patents

Positional information acquiring method of mounting members, positional information acquiring device of the same and manufacturing method of electronic device Download PDF

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JP2013187509A
JP2013187509A JP2012053801A JP2012053801A JP2013187509A JP 2013187509 A JP2013187509 A JP 2013187509A JP 2012053801 A JP2012053801 A JP 2012053801A JP 2012053801 A JP2012053801 A JP 2012053801A JP 2013187509 A JP2013187509 A JP 2013187509A
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mounting member
mounting
image
position information
recognition
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Kazumi Shinohara
和美 篠原
Toshio Fujimoto
敏雄 藤本
Takanori Inai
高徳 井内
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Seiko Epson Corp
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PROBLEM TO BE SOLVED: To acquire positional information such as positions, inclinations and components mounting positions of respective mounting members formed on a member divided into the multiple mounting members at a high speed.SOLUTION: A positional information acquiring method of mounting members comprises the steps of: imaging each of product substrates 11 frame-by-frame while relatively moving a CCD camera 4 with respect to a board divided into multiple product substrates 10 made of a ceramic material; setting a recognition image of each of the product substrates 11 such that the entire product substrate 11 set as an imaging object fits into a substantially center inside an image frame and the product substrates 11 adjacent thereto are partially imaged inside the image frame; performing image processing of each of the recognition images and calculating feature points of the product substrate 11 set as the imaging object and the product substrates 11 adjacent thereto partially imaged; and superimposing two recognition images in which the product substrates 11 set as the imaging objects adjacent to each other such that the feature points in common therewith coincide with each other, synthesizing an image of the entire board divided into the multiple product substrates 10 and acquiring positional information of all the product substrates 11 from a synthetic image acquired.

Description

本発明は、電子デバイスを製造する方法に関し、特に多面取り基板のような多数取り用部材について、個々の実装部材の寸法、位置、形状、部品実装位置等に関する情報を取得するための方法及び装置に関する。   The present invention relates to a method of manufacturing an electronic device, and more particularly to a method and apparatus for acquiring information on dimensions, positions, shapes, component mounting positions, etc. of individual mounting members for a multi-cavity member such as a multi-chip board. About.

従来より、電子デバイスの製造工程において、基板等の実装部材をカメラで撮像した画像を用いて、電子部品の実装位置を決定する方法が使用されている。例えば、1つの回路基板に多数の電子部品を全自動で所望の場所に正確にマウントするために、回路基板上の電子部品取着位置をテレビカメラで撮像して検知するマウント方法が知られている(例えば、特許文献1を参照)。この特許文献1に記載の方法では、テレビカメラの撮像出力と予め記憶されている取着位置の標準パターンとを比較することにより、位置ずれ量を算出して実際の取着位置を認識している。   Conventionally, in a manufacturing process of an electronic device, a method of determining a mounting position of an electronic component using an image obtained by capturing a mounting member such as a substrate with a camera has been used. For example, in order to mount a large number of electronic components on a single circuit board in a fully automatic manner at a desired location, a mounting method is known in which an electronic component mounting position on the circuit board is imaged and detected by a television camera. (For example, refer to Patent Document 1). In the method described in Patent Document 1, a positional deviation amount is calculated by comparing the imaging output of a television camera and a prestored standard pattern of the attachment position to recognize the actual attachment position. Yes.

同様に、部品実装基板を撮像して得られた画像を用いて、部品の有無や位置ずれ等を検査する方法が知られている(例えば、特許文献2を参照)。この方法では、検査対象の基板について予め全体画像を作成し、検査時に基板の撮像対象領域を撮像して処理対象画像を取得し、全体画像とのずれ量を用いて処理対象画像に検査領域を設定している。また、基板の全体画像は、基板を複数の領域に分けて撮像し、各領域の画像をつなぎ合わせて作成することができる。そのとき、隣り合う領域間でX軸及びY軸テーブル部の移動量に生じる機械誤差に対応して、所定画素数分の重なり部分を設けることによって、適切な全体画像を作成している。   Similarly, there is known a method of inspecting the presence / absence of a component, positional deviation, and the like using an image obtained by imaging a component mounting board (see, for example, Patent Document 2). In this method, an entire image is created in advance for a substrate to be inspected, an imaging target region of the substrate is imaged at the time of inspection to obtain a processing target image, and an inspection region is added to the processing target image using a deviation amount from the entire image. It is set. In addition, the entire image of the board can be created by dividing the board into a plurality of areas and connecting the images of the areas. At this time, an appropriate whole image is created by providing overlapping portions of a predetermined number of pixels corresponding to the mechanical error that occurs in the movement amount of the X-axis and Y-axis table portions between adjacent regions.

また、生産の効率を高めるために、1枚の基板上に多数のプリント基板を形成し、各プリント基板に電子部品を実装した後に分割できるようにした多面取り基板が広く採用されている。かかる多面取り基板において、カメラで各プリント基板の基板マークを認識した結果と、部品供給部で検出されている相対位置の情報とからプリント基板の部品実装位置を求めるようにした電子部品実装方法が知られている(例えば、特許文献3を参照)。   Further, in order to increase production efficiency, a multi-sided board in which a large number of printed boards are formed on one board and electronic components are mounted on each printed board and can be divided is widely adopted. In such a multi-sided board, there is an electronic component mounting method for obtaining the component mounting position of the printed circuit board from the result of recognizing the board mark of each printed circuit board by the camera and the information of the relative position detected by the component supply unit. It is known (see, for example, Patent Document 3).

特開昭61−36941号公報JP-A-61-36941 特開2007−184589号公報JP 2007-184589 A 特開2003−69288号公報JP 2003-69288 A

しかしながら、いずれの従来方法も、撮像対象の取着位置や領域にカメラを相対的に移動させた後、静止した状態で撮像して画像を取得している。そのため、多数のプリント基板を形成した多面取り基板のように、撮像対象が多数個所ある場合、それら全部を撮像するのに長い時間を要するという問題がある。更に、カメラ、又は基板等の実装部材を載せたテーブルを機械的に移動させるので、その機械的誤差や制御信号の遅れ等によって撮像位置に誤差が生じ、撮像対象の位置や形状を正確に認識できない虞がある。   However, in any of the conventional methods, after the camera is relatively moved to the attachment position or region to be imaged, the image is captured in a stationary state to acquire an image. Therefore, when there are a large number of imaging targets such as a multi-sided board on which a large number of printed boards are formed, there is a problem that it takes a long time to image all of them. Furthermore, since the table on which the mounting member such as the camera or the board is mounted is mechanically moved, an error occurs in the imaging position due to the mechanical error or the delay of the control signal, and the position and shape of the imaging target are accurately recognized. There is a possibility that it cannot be done.

これらの問題は、当然ながら、高性能のカメラを高速で高精度に駆動して撮像すれば、解消することができる。しかしながら、そのようなカメラ及び駆動手段は高価であり、工業的に利用するのには不向きである。   Naturally, these problems can be solved by driving a high-performance camera at high speed and with high accuracy. However, such a camera and driving means are expensive and unsuitable for industrial use.

また、特許文献3記載の方法は、実装部材がプリント基板であってその部品実装位置は事前に決定されており、実装時に多面取り基板が正確に位置決めされる限り、変動することはない。ところが、表面実装型の圧電デバイス等に多用されているセラミック材料で多面取り基板を構成した場合、焼成によって基板全体が収縮してしまう。そのため、個々の製品基板の寸法や位置、各部品実装位置が当初の設計位置からずれたり、多面取り基板毎に寸法や位置のずれ量が変動する虞がある。   In the method described in Patent Document 3, the mounting member is a printed circuit board, and its component mounting position is determined in advance, and does not vary as long as the multi-chip board is accurately positioned during mounting. However, when a multi-sided substrate is made of a ceramic material often used for surface-mount type piezoelectric devices, the entire substrate contracts due to firing. Therefore, there is a possibility that the size and position of each product board and each component mounting position may deviate from the original design position, and the deviation in size and position may vary for each multi-sided board.

このまま各製品基板に電子部品を実装すると、不良品が発生し、歩留まりを低下させるという問題が発生する。かかる問題を解消するためには、電子部品の実装前に、各多面取り基板に形成されている個々の製品基板について、その位置や部品実装位置等の情報を取得しておくことが必要である。   If an electronic component is mounted on each product substrate as it is, a defective product is generated, resulting in a problem that the yield is lowered. In order to solve this problem, it is necessary to acquire information such as the position and component mounting position of each product board formed on each multi-sided board before mounting the electronic component. .

そこで本発明は、上述した従来の問題点に鑑みてなされたものであり、その目的は、電子部品を実装するための基板やベース等の実装部材を多数形成した多数取り用部材について、個々の実装部材の位置、傾き、部品実装位置等の位置情報を高速で取得し得る方法及び装置を提供することにある。   Therefore, the present invention has been made in view of the above-described conventional problems, and the purpose of the present invention is to provide individual multi-members on which a large number of mounting members such as a substrate and a base for mounting electronic components are formed. It is an object of the present invention to provide a method and apparatus capable of acquiring position information such as the position, inclination, and component mounting position of a mounting member at high speed.

更に本発明の目的は、かかる方法及び装置を低コストで実現することにある。   It is a further object of the present invention to implement such a method and apparatus at low cost.

また、本発明の別の目的は、本発明の実装部材の位置情報取得方法及び装置を用いて、各実装部材に電子部品を自動的に正確に実装することができ、それにより多数の電子デバイスを歩留まり良く製造することにある。   Another object of the present invention is to automatically and accurately mount an electronic component on each mounting member using the mounting member position information acquisition method and apparatus of the present invention, whereby a large number of electronic devices can be mounted. Is to manufacture with good yield.

本発明の実装部材の位置情報取得方法は、上記目的を達成するために、
複数の実装部材が配列されている多数取り用部材に対して、カメラを相対的に移動させながら、少なくとも1つの実装部材の全体と、前記少なくとも1つの実装部材の隣に配置されている他の実装部材の少なくとも一部とが1つの画像枠内に収まるように撮像して、複数の認識画像を取得する工程と、
複数の認識画像を、各認識画像にそれぞれ含まれている前記少なくとも1つの実装部材及び他の実装部材の特徴点を一致させるように合成し、その合成画像から複数の実装部材の位置情報を取得する工程と、
を含むことを特徴とする。
In order to achieve the above object, the mounting member position information acquisition method of the present invention provides:
While moving the camera relative to a multi-piece member in which a plurality of mounting members are arranged, the entire at least one mounting member and other ones arranged next to the at least one mounting member Capturing a plurality of recognition images by imaging so that at least a part of the mounting member fits within one image frame; and
A plurality of recognition images are combined so that the feature points of the at least one mounting member and the other mounting member included in each recognition image are matched, and position information of the plurality of mounting members is obtained from the combined image. And a process of
It is characterized by including.

このように複数の認識画像を、それぞれに撮像対象の実装部材に加えて、それに隣り合う実装部材の一部が写り込むように撮像するので、カメラを移動させながら撮像しても、カメラを撮像対象の実装部材に対してそれほど高精度に位置決めしなくても、合成画像から正確な実装部材の位置情報を取得することができる。しかも、カメラを停止することなく撮像できるので、多数取り用部材全体について全部の実装部材に要する撮像時間を大幅に短縮することができる。更に、カメラの移動は比較的安価な駆動手段で良く、低コスト化を図ることができる。   As described above, since a plurality of recognition images are captured so that a part of the mounting member adjacent to each other is captured in addition to the mounting member to be imaged, the camera is imaged even when the camera is moved. Even if positioning is not performed with high accuracy with respect to the target mounting member, accurate position information of the mounting member can be acquired from the composite image. And since it can image without stopping a camera, the imaging time which all the mounting members require about the whole member for multiple acquisition can be reduced significantly. Further, the camera can be moved by a relatively inexpensive driving means, and the cost can be reduced.

或る実施例では、複数の認識画像を取得する工程と、実装部材の位置情報を取得する工程とを逐次的に実行する。これにより、カメラで撮像して取得した各認識画像を逐次的に画像処理し、各認識画像に含まれている前記少なくとも1つの実装部材及び他の実装部材の特徴点を抽出して、合成画像を作成することが可能になる。従って、実装部材の位置情報をより高速で取得することができる。   In an embodiment, the step of acquiring a plurality of recognition images and the step of acquiring the position information of the mounting member are sequentially performed. Thereby, each recognition image captured and captured by the camera is sequentially subjected to image processing, the feature points of the at least one mounting member and other mounting members included in each recognition image are extracted, and the composite image Can be created. Therefore, the position information of the mounting member can be acquired at higher speed.

また、或る実施例では、個々の実装部材がセラミック材料で形成されている。その場合、個々の実装部材は焼成によって設計寸法よりも収縮しているが、本発明の方法によって、正確な実装部材の位置情報を高速で取得できるので、有利である。   In some embodiments, the individual mounting members are made of a ceramic material. In this case, although the individual mounting members are shrunk from the design dimensions by firing, the position information of the mounting members can be obtained at high speed by the method of the present invention, which is advantageous.

別の実施例では、実装部材が、電子部品を実装するための凹所を有する。この凹所の境界は、その高低差から、明確に認識し得る濃淡差を実装部材の認識画像に生じさせる。従って、認識画像を画像処理して特徴点を抽出するのに有利であり、実装部材の位置情報をより正確に取得することができる。   In another embodiment, the mounting member has a recess for mounting an electronic component. The boundary of the recess causes a difference in density that can be clearly recognized from the height difference in the recognition image of the mounting member. Therefore, it is advantageous for image processing of the recognition image to extract feature points, and the position information of the mounting member can be acquired more accurately.

また別の実施例では、実装部材が、電子部品を実装するための平坦な基板である。このような基板の表面には通常、電子部品実装用の電極パッドや配線用のメタライズ層が設けられている。これら電極パッド等のエッジ即ち外縁は、明確に認識し得る濃淡差を実装部材の認識画像に生じさせる。従って、同様に認識画像を画像処理して特徴点を抽出するのに有利であり、実装部材の位置情報を正確に取得することができる。   In another embodiment, the mounting member is a flat substrate for mounting electronic components. On the surface of such a substrate, an electrode pad for mounting an electronic component and a metallization layer for wiring are usually provided. Edges or outer edges of these electrode pads or the like cause a difference in shading that can be clearly recognized in the recognition image of the mounting member. Accordingly, it is advantageous for image processing of the recognition image to extract feature points, and the position information of the mounting member can be accurately acquired.

本発明の別の側面によれば、複数の実装部材が配列されている多数取り用部材について、上述した本発明の方法によって、各実装部材の位置情報を取得する工程と、
取得した位置情報に基づいて各実装部材の部品実装位置を決定する工程と、
決定した各実装部材の部品実装位置にそれぞれ電子部品を実装する工程と、
を含む電子デバイスの製造方法が提供される。
これによって、電子部品を正確に実装して電子デバイスを製造することができ、不良品の発生を少なくして歩留まりの向上を実現することができる。
According to another aspect of the present invention, with respect to a multi-piece member in which a plurality of mounting members are arranged, a step of obtaining positional information of each mounting member by the method of the present invention described above,
Determining a component mounting position of each mounting member based on the acquired position information;
A step of mounting an electronic component at each component mounting position of each determined mounting member;
A method for manufacturing an electronic device is provided.
As a result, an electronic device can be manufactured by accurately mounting electronic components, and the yield can be improved by reducing the occurrence of defective products.

或る実施例において、本発明の電子デバイスの製造方法は、
取得した位置情報に基づいて実装部材の切断線を決定する工程と、
決定した切断線に従って多数取り用部材を切断し、電子部品を実装した実装部材を個片化する工程と、
を更に含む。これによって、電子デバイスの製造における不良品の発生をより少なくし、歩留まりを更に向上させることができる。
In one embodiment, a method for manufacturing an electronic device of the present invention includes:
Determining a cutting line of the mounting member based on the acquired position information;
Cutting a plurality of members according to the determined cutting line, and separating the mounting member on which the electronic component is mounted;
Is further included. As a result, the generation of defective products in the production of electronic devices can be further reduced, and the yield can be further improved.

本発明の更に別の側面によれば、
複数の実装部材が配列されている多数取り用部材に対して相対的に移動しながら実装部材を撮像するためのカメラと、
カメラが撮像した実装部材の認識画像を画像処理するため、並びに、カメラの移動及び撮像、画像処理部の画像処理を制御するための処理制御部とを備え、
カメラが、各認識画像の画像枠内にそれぞれ少なくとも1つの実装部材の全体と、この少なくとも1つの実装部材の隣に配置されている他の実装部材の少なくとも一部とが収まるように、複数の認識画像を撮像し、
処理制御部が、各認識画像にそれぞれ含まれている前記少なくとも1つの実装部材及び前記他の実装部材の特徴点を一致させるように、複数の認識画像を合成し、その合成画像から複数の実装部材の位置情報を取得する、
ように構成した実装部材の位置情報取得装置が提供される。
According to yet another aspect of the invention,
A camera for imaging the mounting member while moving relatively with respect to the multi-members on which a plurality of mounting members are arranged;
A processing control unit for performing image processing on a recognition image of the mounting member captured by the camera, and for controlling movement and imaging of the camera and image processing of the image processing unit;
The camera includes a plurality of the plurality of at least one mounting member and at least a part of the other mounting members arranged next to the at least one mounting member within the image frame of each recognition image. Take a recognition image,
The processing control unit synthesizes a plurality of recognition images so that the feature points of the at least one mounting member and the other mounting member respectively included in each recognition image are matched, and a plurality of mountings are performed from the combined image. Get the position information of the member,
A mounting member position information acquisition device configured as described above is provided.

このように構成することによって、カメラは、撮像対象の実装部材に対して高精度に位置決めする必要がないから、その移動に高精度で高価な駆動機構は不要である。従って、上述した本発明の実装部材の位置情報取得方法を比較的低コストで実現することができる。   By configuring in this way, the camera does not need to be positioned with high accuracy with respect to the mounting member to be imaged, and therefore a highly accurate and expensive drive mechanism is not required for the movement. Therefore, the mounting member position information acquisition method of the present invention described above can be realized at a relatively low cost.

本発明の実装部材の位置情報取得装置の構成を示す概略図。Schematic which shows the structure of the positional information acquisition apparatus of the mounting member of this invention. (A)図は多数取り基板の平面図、(B)図は多数取り基板の各製品基板の撮像経路を示す図。FIG. 5A is a plan view of a multi-cavity substrate, and FIG. 5B is a diagram illustrating an imaging path of each product substrate of the multi-cavity substrate. (A)図は製品基板の認識画像、(B)図は製品基板の中心位置及び傾きの算出を説明する図。(A) A figure is a recognition image of a product board, (B) A figure explaining calculation of a center position and inclination of a product board. (A)〜(D)図は、隣り合う4つの製品基板の認識画像。FIGS. 4A to 4D are recognition images of four adjacent product substrates. 図4(A)〜(D)の認識画像を合成した画像。The image which synthesize | combined the recognition image of Fig.4 (A)-(D). 別の多数取り基板の平面図。The top view of another multi-cavity board | substrate.

以下に、添付図面を参照しつつ、本発明の好適な実施例を詳細に説明する。尚、添付図面において、同一又は類似の構成要素には同一又は類似の参照符号を付して示す。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the accompanying drawings, the same or similar components are denoted by the same or similar reference numerals.

図1は、本発明による実装部材の位置情報取得装置の好適な実施例の構成を概略的に示している。この位置情報取得装置1は、多数取り用部材を載置するための組立テーブル2と、テーブル駆動装置3と、CCDカメラ4と、カメラ駆動装置5と、CPU6と、画像処理部7と、記憶装置8と、モニター9とを備える。CCDカメラ4は、組立テーブル2の上方に、該テーブル上面に対物レンズを向けて垂直に配置されている。本実施例では、CPU6により制御されて、CCDカメラ4がカメラ駆動装置5により±X軸方向に駆動され、組立テーブル2がテーブル駆動装置3により±Y軸方向に駆動される。   FIG. 1 schematically shows a configuration of a preferred embodiment of a mounting member position information acquisition apparatus according to the present invention. The position information acquisition device 1 includes an assembly table 2 on which multiple members are placed, a table driving device 3, a CCD camera 4, a camera driving device 5, a CPU 6, an image processing unit 7, and a storage. A device 8 and a monitor 9 are provided. The CCD camera 4 is vertically arranged above the assembly table 2 with the objective lens facing the upper surface of the table. In this embodiment, controlled by the CPU 6, the CCD camera 4 is driven in the ± X axis direction by the camera driving device 5, and the assembly table 2 is driven in the ± Y axis direction by the table driving device 3.

別の実施例では、CCDカメラ4を固定し、組立テーブル2を±XY軸方向に駆動することができる。逆に、組立テーブル2を固定し、CCDカメラ4を±XY軸方向に駆動することも可能である。   In another embodiment, the CCD camera 4 can be fixed and the assembly table 2 can be driven in the ± XY axis directions. Conversely, the assembly table 2 can be fixed and the CCD camera 4 can be driven in the ± XY axis directions.

本実施例では、多数取り用部材として、矩形の多数取り基板10が組立テーブル2上に載置されている。図2(A)に示すように、多数取り基板10は、セラミック材料の薄板を積層して焼成した積層基板であり、同じ矩形形状・寸法の多数の製品基板11が隣り合わせでマトリックス状に配列して形成されている。製品基板11は、後述するように、電子部品を実装するための空所を画定する凹部を中央に形成した箱型構造を有する。多数取り基板10は、セラミック材料に限定されるものでなく、ガラスエボキシ材料、ガラス材料、その他様々な材料で形成することができる。   In this embodiment, a rectangular multi-cavity substrate 10 is placed on the assembly table 2 as a multi-cavity member. As shown in FIG. 2A, the multi-substrate 10 is a multi-layer substrate obtained by laminating and firing thin ceramic materials, and a large number of product substrates 11 having the same rectangular shape and dimensions are arranged side by side in a matrix. Is formed. As will be described later, the product substrate 11 has a box-type structure in which a recess for defining a space for mounting an electronic component is formed in the center. The multi-chip substrate 10 is not limited to a ceramic material, and can be formed of a glass eboxy material, a glass material, and various other materials.

本発明によれば、CCDカメラ4によって、多数取り基板10の各製品基板11を1コマずつ撮像する。撮像経路は、例えば、図2(B)に矢印で示すように設定することができる。同図中最上列左端の製品基板11を開始位置Sとして、+X軸方向に右端の製品基板11まで移動し、そこから−Y方向に一列下の製品基板11に移動した後、−X軸方向に左端の製品基板11まで移動する。更に−Y方向に一列下の製品基板11に移動し、そこから+X軸方向に右端の製品基板1112まで移動した後、−Y方向に一列下即ち最下列の製品基板1113に移動し、更に−X軸方向に左端終点位置Eの製品基板1116まで移動する。このようにXY軸方向に沿ってジクザグにCCDカメラ4を相対移動させることによって、全部の製品基板11を効率良く高速で撮像することができる。別の実施例では、同じ製品基板11を開始位置Sとして左端の列を縦に最下まで移動し、一列右に移って縦に最上まで移動し、その後同様にジグザグに移動して最上列右端の製品基板11まで移動するように、撮像経路を設定することもできる。 According to the present invention, each product substrate 11 of the multi-substrate 10 is imaged one frame at a time by the CCD camera 4. The imaging path can be set, for example, as shown by an arrow in FIG. Starting at S the product substrate 11 1 in the top row left in the figure, + X-axis direction to move to the right edge of the product substrate 11 4, after moving from there to product substrates 11 5 of a row under the -Y direction, - moves in the X-axis direction to the left edge of the product substrate 11 8. Moves further to the product substrate 11 9 of a row under the -Y direction, and moves from there + after moving in the X-axis direction to the right end of the product substrate 11 12, a row under the -Y direction, i.e. to the product substrate 11 13 bottom row , further moves in the -X direction until the product substrate 11 16 the left end position E. Thus, by relatively moving the CCD camera 4 in a zigzag manner along the XY axis direction, all product substrates 11 can be imaged efficiently and at high speed. In another example, move to the lowest of the leftmost column in the vertical as the same product substrate 11 1 Start position S, it moves to the uppermost vertically moved in a row right, top row to thereafter move similarly in a zigzag to move to the right end of the product substrate 11 4, it is also possible to set the imaging path.

CCDカメラ4は、最初に開始位置Sに配置され、最初の製品基板11を撮像する。そこからCCDカメラ4は、前記撮像経路に沿って終点位置Eまで停止することなく移動しながら、順に前記各製品基板を1つずつコマ取りで撮像する。CCDカメラ4を前記製品基板毎に静止させる必要がないので、全撮像時間を従来よりも大幅に短縮することができる。例えば、縦横26×24個の製品基板11を配列した多数取り基板は、製品基板毎に静止して撮像する場合に比して、全撮像時間が略1/10に短縮された。 CCD camera 4 is placed into the first starting position S, imaging the first product substrate 11 1. From there, the CCD camera 4 images the product substrates one by one in order while moving without stopping to the end point position E along the imaging path. Since the CCD camera 4 does not need to be stationary for each product substrate, the total imaging time can be greatly shortened compared to the conventional technique. For example, a multi-chip substrate in which 26 × 24 product substrates 11 arranged horizontally and vertically has a total imaging time shortened to about 1/10 as compared with a case where images are taken stationary for each product substrate.

各認識画像は、その画像枠内に対象の1つの製品基板11の全体が中央に、更にそのXY方向に隣り合う1つ又は複数の他の製品基板11の一部が写り込むように撮像される。図3(A)は、最初の製品基板11の認識画像I1を示している。各製品基板11の上面には、後の組立工程でリッドを接合するためのメタライズ層13が設けられている。メタライズ層13は、上述した概ね矩形の中央凹所12を囲むように概ね矩形に形成されている。凹所12の底面には、実装する電子部品と電気的に接続するために1対の電極パッド14が設けられている。 Each recognition image is imaged so that the entire target product substrate 11 is reflected in the center of the image frame, and a part of one or more other product substrates 11 adjacent in the XY direction is reflected in the image frame. The FIG. 3 (A) shows a recognition image I1 of the first product substrate 11 1. On the upper surface of each product substrate 11, a metallized layer 13 is provided for bonding the lid in a later assembly process. The metallized layer 13 is formed in a substantially rectangular shape so as to surround the generally rectangular central recess 12 described above. A pair of electrode pads 14 are provided on the bottom surface of the recess 12 so as to be electrically connected to the electronic component to be mounted.

メタライズ層13及び電極パッド14のエッジ即ち外縁は、図3(A)に示すように、前記認識画像において、製品基板11の素面との濃淡差から明確に認識することができる。本実施例では、公知の画像処理によりメタライズ層13の内側のエッジを検出することによって、製品基板11の位置及び傾きを求めることができる。 As shown in FIG. 3A, the edges of the metallized layer 13 and the electrode pad 14 can be clearly recognized from the difference in density from the surface of the product substrate 11 in the recognition image. In this embodiment, by detecting the inner edges of the metallization layer 13 by a known image processing, it is possible to determine the position and the inclination of the product substrate 11 1.

先ず、図3(B)に示すように、メタライズ層13の前記矩形の4辺について、それぞれ近似直線L1〜L4を求める。次に、隣り合う近似直線L1〜L4の交点K1〜K4を特徴点としてその座標位置を求める。更に、前記矩形の対角方向にそれぞれ位置する交点K1とK4とを結ぶ直線と交点K2とK3とを結ぶ直線とから、製品基板11の中心位置Cの座標を求める。また、交点K1とK3とを結ぶ直線の傾きと、交点K2とK4とを結ぶ直線の傾きとの平均値を、製品基板11の傾きとする。更に同様にして、同じ認識画像I1に写り込んでいる隣の製造基板11、11についても、それらのメタライズ層のエッジを認識画像I1の範囲内で検出して、それぞれ前記矩形の一辺に対応する近似直線から、それらの交点K22,K32,K18,K28を特徴点として求める。 First, as shown in FIG. 3B, approximate straight lines L1 to L4 are obtained for the four sides of the rectangle of the metallized layer 13, respectively. Next, the coordinate positions of the intersection points K1 to K4 of the adjacent approximate lines L1 to L4 are obtained as feature points. Furthermore, from the line connecting the straight line and the intersection K2 and K3 connecting the intersections K1 and K4 respectively positioned in a diagonal direction of the rectangular, we obtain the coordinates of the center position C of the product substrate 11 1. Furthermore, the slope of a straight line connecting the intersection point K1 and K3, the average value of the slope of the straight line connecting the intersection point K2 and K4, the inclination of the product substrate 11 1. Further in the same manner, for the same production of next recognition are crowded appear in the image I1 substrate 11 2, 11 8, by detecting the edge of their metallization layer within the recognition image I1, one side of each of the rectangular From the corresponding approximate straight lines, their intersections K22, K32, K18, and K28 are obtained as feature points.

このようにして、CCDカメラ4により取得した認識画像から、その中央に位置する対象の製品基板11と、それに隣り合って部分的に写り込んでいる他の製品基板11とについて、それぞれ前記メタライズ層のエッジを検出することによって、全部の前記製品基板について前記特徴点の座標位置が求められ、それから位置及び傾きを求めることができる。尚、最初の製品基板11の認識画像I1は、後に撮像する他の前記製品基板の認識画像と合成するための基準認識画像となる。 In this way, from the recognition image acquired by the CCD camera 4, the metallized layer for the target product substrate 11 located in the center and the other product substrate 11 that is partially reflected next to the target product substrate 11. By detecting this edge, the coordinate position of the feature point is obtained for all the product substrates, and the position and inclination can be obtained therefrom. Note that recognition image I1 of the first product substrate 11 1 is used as a reference recognized image to be combined with other recognition image of the product substrate for imaging later.

次に、全製品基板11の認識画像を合成して、多数取り基板10全体の認識画像を作成する工程を説明する。図4(A)〜(D)は、XY方向に隣り合う4つの製品基板11,11,11,11,の認識画像I1,I2,I7,I8を示している。これらの認識画像は、上述した画像処理によって、それぞれ対象の製品基板及び部分的に写り込んでいる隣の製品基板について、メタライズ層の前記矩形の一辺に対する近似直線の各交点即ち特徴点が求められている。 Next, a process of synthesizing the recognition images of all the product substrates 11 to create a recognition image of the entire multi-chip substrate 10 will be described. 4A to 4D show recognition images I1, I2, I7, and I8 of four product substrates 11 1 , 11 2 , 11 7 , and 11 8 that are adjacent in the XY direction. These recognition images are obtained by the above-described image processing to obtain respective intersections, that is, feature points of approximate straight lines with respect to one side of the rectangle of the metallized layer for the target product substrate and the adjacent product substrate partially reflected. ing.

認識画像I1と認識画像I2とは、それらに共通する特徴点K21,K41,K12,K32を互いに一致させるように重ねることによって、合成することができる。同様に、認識画像I1と認識画像I8とは、それらに共通する特徴点K31,K41,K18,K28を互いに一致させるように重ねることによって合成される。認識画像I2と認識画像I7とは、それらに共通する特徴点K32,K42,K17,K27を互いに一致させるように重ねることによって合成される。認識画像I8と認識画像I8とは、それらに共通する特徴点K28,K48,K17,K37を互いに一致させるように重ねることによって合成される。   The recognition image I1 and the recognition image I2 can be synthesized by overlapping the feature points K21, K41, K12, and K32 common to them. Similarly, the recognition image I1 and the recognition image I8 are synthesized by overlapping the feature points K31, K41, K18, K28 common to them so as to match each other. The recognition image I2 and the recognition image I7 are synthesized by overlapping the feature points K32, K42, K17, K27 common to them. The recognition image I8 and the recognition image I8 are synthesized by overlapping the feature points K28, K48, K17, and K37 common to them.

このようにして、図5に示すように、認識画像I1,I2,I7,I8の合成画像を得ることができる。この画像処理を全部の製品基板の認識画像について行うことによって、多数取り基板10全体について、各製品基板11の正確な位置情報を取得することができる。尚、上記実施例では、認識画像毎に1つの製品基板11を撮像対象に設定したが、2つ以上の前記製品基板を撮像対象とすることができる。この場合、各認識画像は、対象の2つ以上の前記製品基板の全体と、それらの隣に配置されている少なくとも1つの他の前記製品基板の一部とが1つの画像枠内に収まるように撮像される。このようにすれば、少なくとも2つの認識画像を取得することによって、多数取り基板10全体の製品基板11をカバーすることが可能である。また、多数取り基板10の全部の製品基板11について位置情報を必要としない場合は、位置情報が要求される製品基板11を撮像対象とする認識画像を含めて、少なくとも2つの認識画像を取得すればよい。   In this way, a composite image of the recognized images I1, I2, I7, and I8 can be obtained as shown in FIG. By performing this image processing on the recognition images of all product substrates, it is possible to obtain accurate position information of each product substrate 11 for the entire multi-substrate 10. In the above-described embodiment, one product substrate 11 is set as an imaging target for each recognition image, but two or more product substrates can be set as an imaging target. In this case, each recognition image is such that the entire two or more target product substrates and a part of at least one other product substrate arranged next to each other are within one image frame. To be imaged. In this way, it is possible to cover the product substrate 11 of the entire multi-chip substrate 10 by acquiring at least two recognition images. In addition, when position information is not required for all product substrates 11 of the multi-chip substrate 10, at least two recognition images including a recognition image for the product substrate 11 for which position information is required are acquired. That's fine.

これら製品基板11の位置情報を取得するための画像処理は、製品基板11の認識画像を取得するCCDカメラ4の撮像処理と共に、画像処理部7がCPU6により制御されて実行する。本実施例では、画像処理部7が、前記CCDカメラから連続的に入力する画像信号を逐次的に処理する。このように逐次的に画像処理することによって、合成画像の作成及び実装部材の位置情報をより高速で取得することができる。得られた多数取り基板10全体の各製品基板11の位置情報は、記憶装置8に記憶される。前記位置情報は、モニター9に出力させて確認することができる。   The image processing for acquiring the position information of the product substrate 11 is executed while the image processing unit 7 is controlled by the CPU 6 together with the imaging processing of the CCD camera 4 for acquiring the recognition image of the product substrate 11. In this embodiment, the image processing unit 7 sequentially processes image signals continuously input from the CCD camera. By sequentially performing image processing in this manner, it is possible to obtain a composite image and position information of the mounting member at a higher speed. The obtained position information of each product substrate 11 of the multi-substrate 10 is stored in the storage device 8. The position information can be confirmed by outputting it to the monitor 9.

また、前記位置情報は、必要に応じて又は要求により、画像処理部7から直接又は記憶装置8から外部に出力される。出力された前記位置情報は、例えば、多数取り基板10に電子部品を実装して電子デバイスを製造する工程に利用することができる。即ち、前記各製品基板の位置情報からその部品実装位置を正確に決定できるので、前記各製品基板に電子部品を正確に自動実装することができる。特に、前記各製品基板のメタライズ層の位置及び傾きを正確に決定することによって、電子部品実装後の各製品基板にそれぞれリッドを高精度に接合して封止することができる。更にその後、前記各製品基板の位置情報からその切断線を正確に決定し、それに沿って個々の電子デバイスを切り出すことによって、歩留まり良く個片化することができる。   Further, the position information is output from the image processing unit 7 directly or from the storage device 8 to the outside as needed or requested. The output position information can be used, for example, in a process of manufacturing an electronic device by mounting electronic components on the multi-chip substrate 10. That is, since the component mounting position can be accurately determined from the position information of each product substrate, the electronic component can be automatically and accurately mounted on each product substrate. In particular, by accurately determining the position and inclination of the metallized layer of each product substrate, the lid can be bonded and sealed to each product substrate after mounting the electronic component with high accuracy. After that, by accurately determining the cutting line from the position information of each product substrate and cutting out the individual electronic devices along the cutting line, it is possible to obtain individual pieces with high yield.

本発明は、1つの製品基板に複数の電子部品を実装する多数取り基板についても、同様に実施することができる。その場合、各製品基板を同様に撮像して認識画像を画像処理することによって、同様の作用効果を得ることができる。   The present invention can be similarly applied to a multi-chip substrate in which a plurality of electronic components are mounted on one product substrate. In that case, the same effect can be obtained by imaging each product substrate in the same manner and processing the recognition image.

図6は、1つの製品基板に1つの水晶振動子とそれを駆動するためのICとを実装する多数取り基板20を示している。各製品基板21は、前記水晶振動子及びICを収容するための凹所22を中央に有し、該凹所を囲むようにメタライズ層23が設けられている。凹所22内には、水晶振動子の実装領域24に1対の電極パッド25が設けられ、ICの実装領域26に複数の接続端子27が設けられている。   FIG. 6 shows a multi-chip substrate 20 on which one crystal resonator and an IC for driving it are mounted on one product substrate. Each product substrate 21 has a recess 22 in the center for housing the crystal resonator and IC, and a metallized layer 23 is provided so as to surround the recess. In the recess 22, a pair of electrode pads 25 are provided in the crystal resonator mounting region 24, and a plurality of connection terminals 27 are provided in the IC mounting region 26.

本実施例によれば、図2の多数取り基板10と同様に、CCDカメラ4を移動させながら各製品基板21を撮像する。各製品基板21の認識画像は、その中央に撮像対象の前記製品基板が収まり、かつそれに隣り合う製品基板が部分的に写り込むように撮像される。この認識画像を、図3に関連して説明した製品基板11の場合と同様に画像処理する。即ち、メタライズ層23の内側のエッジを検出し、それらの近似直線を求めてそれらの4つの交点を特徴点として算出する。更に、それら4つの交点を結ぶ2つの対角線から、製品基板21の中心C0の座標位置を求める。   According to the present embodiment, each product substrate 21 is imaged while moving the CCD camera 4 in the same manner as the multi-chip substrate 10 of FIG. The recognition image of each product substrate 21 is imaged so that the product substrate to be imaged fits in the center and the product substrate adjacent to it is partially reflected. The recognition image is subjected to image processing in the same manner as in the case of the product substrate 11 described with reference to FIG. That is, the inner edges of the metallized layer 23 are detected, their approximate straight lines are obtained, and their four intersections are calculated as feature points. Further, the coordinate position of the center C0 of the product substrate 21 is obtained from two diagonal lines connecting these four intersections.

次に、実装しようとする前記水晶振動子の外形及び寸法は分かっているので、その2つの対角線の交点を算出し、前記水晶振動子の4つの角の位置に関する中心C1の座標位置を求める。製品基板21の中心C0が前記水晶振動子の設計外形寸法からオフセットされる、即ち水晶振動子の実装領域24の外側に位置するように、水晶振動子の中心C1を設定することによって、前記水晶振動子の実装位置が得られる。同様に、前記ICの外形及び寸法は分かっているので、その2つの対角線の交点を算出し、前記ICの4つの角の位置に関する中心C2の座標位置を求める。製品基板21の中心C0が前記ICの設計外形寸法からオフセットされる、即ちICの実装領域26の外側に位置するように、前記ICの中心C2を設定することによって、前記ICの実装位置が得られる。   Next, since the outer shape and dimensions of the crystal resonator to be mounted are known, the intersection of the two diagonal lines is calculated, and the coordinate position of the center C1 with respect to the positions of the four corners of the crystal resonator is obtained. By setting the center C1 of the crystal resonator so that the center C0 of the product substrate 21 is offset from the design external dimension of the crystal resonator, that is, located outside the mounting region 24 of the crystal resonator, The mounting position of the vibrator can be obtained. Similarly, since the outline and dimensions of the IC are known, the intersection of the two diagonal lines is calculated, and the coordinate position of the center C2 with respect to the positions of the four corners of the IC is obtained. The mounting position of the IC is obtained by setting the center C2 of the IC so that the center C0 of the product substrate 21 is offset from the designed external dimension of the IC, that is, located outside the mounting area 26 of the IC. It is done.

本発明は、上記実施例に限定されるものでなく、その技術的範囲内で様々な変形又は変更を加えて実施することができる。例えば、前記メタライズ層の外側のエッジや、電極パッドその他基板上の凹凸部によって生じる濃淡差同様に画像処理することによっても、同様に前記製品基板の位置情報を取得することができる。製品基板を撮像する上記実施例のCCDカメラは、同様に画像処理可能な他のタイプのカメラに置き換えることができる。また、上記各実施例の多数取り基板は、凹所が設けられていない平坦な基板であっても良い。更に本発明は、基板以外の実装部材及び多数取り用部材にも、同様に適用することができる。   The present invention is not limited to the above embodiments, and can be implemented with various modifications or changes within the technical scope thereof. For example, the position information of the product substrate can be obtained in the same manner by performing image processing in the same manner as the difference in shading caused by the outer edge of the metallized layer, the electrode pad, and other uneven portions on the substrate. The CCD camera of the above embodiment for imaging the product substrate can be replaced with another type of camera capable of image processing in the same manner. Further, the multi-cavity substrate of each of the above embodiments may be a flat substrate in which no recess is provided. Furthermore, the present invention can be similarly applied to a mounting member other than a substrate and a multi-member.

1…位置情報取得装置、2…組立テーブル、3…テーブル駆動装置、4…CCDカメラ、5…カメラ駆動装置、6…CPU、7…画像処理部、8…記憶装置、9…モニター、10,20…多数取り基板、11,21…製品基板、12,22…凹所、13,23…メタライズ層、14,25…電極パッド、24,26…実装領域、27…接続端子。 DESCRIPTION OF SYMBOLS 1 ... Position information acquisition device, 2 ... Assembly table, 3 ... Table drive device, 4 ... CCD camera, 5 ... Camera drive device, 6 ... CPU, 7 ... Image processing part, 8 ... Storage device, 9 ... Monitor, 10, DESCRIPTION OF SYMBOLS 20 ... Multiple pick-up board | substrate, 11, 21 ... Product board | substrate, 12, 22 ... Recess, 13, 23 ... Metallization layer, 14, 25 ... Electrode pad, 24, 26 ... Mounting area | region, 27 ... Connection terminal.

Claims (8)

複数の実装部材が配列されている多数取り用部材に対して、カメラを相対的に移動させながら、少なくとも1つの前記実装部材の全体と、前記少なくとも1つの実装部材の隣に配置されている他の前記実装部材の少なくとも一部とが1つの画像枠内に収まるように撮像して、複数の認識画像を取得する工程と、
前記複数の認識画像を、各前記認識画像にそれぞれ含まれている前記少なくとも1つの実装部材及び前記他の実装部材の特徴点を一致させるように合成し、その合成画像から複数の前記実装部材の位置情報を取得する工程と、
を含むことを特徴とする実装部材の位置情報取得方法。
A plurality of mounting members are arranged, and the camera is moved relatively with respect to the multiple-taking member, and the whole of the at least one mounting member and the other disposed next to the at least one mounting member. Capturing at least a part of the mounting member within a single image frame to obtain a plurality of recognition images;
The plurality of recognition images are combined so that the feature points of the at least one mounting member and the other mounting member respectively included in each of the recognition images are matched, and a plurality of the mounting members are obtained from the combined image. Obtaining location information;
The position information acquisition method of the mounting member characterized by including.
前記複数の認識画像を取得する工程と、前記実装部材の位置情報を取得する工程とを逐次的に実行することを特徴とする請求項1に記載の実装部材の位置情報取得方法。   The mounting member position information acquisition method according to claim 1, wherein the step of acquiring the plurality of recognition images and the step of acquiring the position information of the mounting member are sequentially performed. 前記実装部材がセラミック材料で形成されていることを特徴とする請求項1または2に記載の実装部材の位置情報取得方法。   The mounting member position information acquisition method according to claim 1, wherein the mounting member is formed of a ceramic material. 前記実装部材が、電子部品を実装するための凹所を有することを特徴とする請求項1乃至3のいずれか1項に記載の実装部材の位置情報取得方法。   The mounting member positional information acquisition method according to claim 1, wherein the mounting member has a recess for mounting an electronic component. 前記実装部材が、電子部品を実装するための平坦な基板であることを特徴とする請求項1乃至3のいずれか1項に記載の実装部材の位置情報取得方法。   4. The mounting member position information acquisition method according to claim 1, wherein the mounting member is a flat substrate for mounting an electronic component. 複数の実装部材が配列されている多数取り用部材について、請求項1乃至5のいずれか1項に記載の方法によって、前記各実装部材の位置情報を取得する工程と、
取得した前記位置情報に基づいて前記各実装部材の部品実装位置を決定する工程と、
決定した前記各実装部材の前記部品実装位置にそれぞれ電子部品を実装する工程と、
を含むことを特徴とする電子デバイスの製造方法。
A step of obtaining positional information of each mounting member by a method according to any one of claims 1 to 5, with respect to a multi-piece member in which a plurality of mounting members are arranged;
Determining a component mounting position of each mounting member based on the acquired position information;
Mounting electronic components at the component mounting positions of the determined mounting members,
The manufacturing method of the electronic device characterized by the above-mentioned.
前記位置情報に基づいて前記実装部材の切断線を決定する工程と、
決定した前記切断線に従って前記多数取り用部材を切断し、前記電子部品を実装した前記実装部材を個片化する工程と、
を更に含むことを特徴とする請求項6に記載の電子デバイスの製造方法。
Determining a cutting line of the mounting member based on the position information;
Cutting the multi-members according to the determined cutting line, and singulating the mounting member on which the electronic component is mounted;
The method of manufacturing an electronic device according to claim 6, further comprising:
複数の実装部材が配列されている多数取り用部材に対して相対的に移動しながら前記実装部材を撮像するためのカメラと、
前記カメラが撮像した前記実装部材の認識画像を画像処理するため、並びに、前記カメラの移動及び撮像、前記画像処理部の画像処理を制御するための処理制御部とを備え、
前記カメラが、各前記認識画像の画像枠内にそれぞれ少なくとも1つの前記実装部材の全体と、前記少なくとも1つの実装部材の隣に配置されている他の前記実装部材の少なくとも一部とが収まるように、前記複数の認識画像を撮像し、
前記処理制御部が、前記各認識画像にそれぞれ含まれている前記少なくとも1つの実装部材及び前記他の実装部材の特徴点を一致させるように、前記複数の認識画像を合成し、その合成画像から複数の前記実装部材の位置情報を取得する
ことを特徴とする実装部材の位置情報取得装置。
A camera for imaging the mounting member while moving relatively with respect to a multi-piece member in which a plurality of mounting members are arranged;
A processing control unit for performing image processing on a recognition image of the mounting member captured by the camera, and for controlling movement and imaging of the camera and image processing of the image processing unit;
The camera is arranged such that the entire at least one mounting member and at least a part of the other mounting members arranged next to the at least one mounting member are accommodated in an image frame of each recognition image. And capturing the plurality of recognition images,
The processing control unit synthesizes the plurality of recognition images so that the feature points of the at least one mounting member and the other mounting member respectively included in the respective recognition images are matched, and from the combined image A mounting member position information acquisition apparatus, which acquires position information of a plurality of the mounting members.
JP2012053801A 2012-03-09 2012-03-09 Positional information acquiring method of mounting members, positional information acquiring device of the same and manufacturing method of electronic device Pending JP2013187509A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009095A1 (en) * 2017-07-06 2019-01-10 メイショウ株式会社 Component mounting device and program for mounting component
JP2019016774A (en) * 2017-07-06 2019-01-31 メイショウ株式会社 Component mounting device and component mounting program
CN113111741A (en) * 2021-03-27 2021-07-13 西北工业大学 Assembly state identification method based on three-dimensional feature points
CN113380661A (en) * 2020-03-09 2021-09-10 捷进科技有限公司 Chip mounting device and method for manufacturing semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009095A1 (en) * 2017-07-06 2019-01-10 メイショウ株式会社 Component mounting device and program for mounting component
JP2019016774A (en) * 2017-07-06 2019-01-31 メイショウ株式会社 Component mounting device and component mounting program
CN113380661A (en) * 2020-03-09 2021-09-10 捷进科技有限公司 Chip mounting device and method for manufacturing semiconductor device
KR20210113955A (en) * 2020-03-09 2021-09-17 파스포드 테크놀로지 주식회사 Die bonding apparatus and manufacturing method of semiconductor apparatus
KR102506283B1 (en) * 2020-03-09 2023-03-07 파스포드 테크놀로지 주식회사 Die bonding apparatus and manufacturing method of semiconductor apparatus
CN113380661B (en) * 2020-03-09 2023-09-29 捷进科技有限公司 Chip mounting apparatus and method for manufacturing semiconductor device
CN113111741A (en) * 2021-03-27 2021-07-13 西北工业大学 Assembly state identification method based on three-dimensional feature points
CN113111741B (en) * 2021-03-27 2024-05-07 西北工业大学 Assembly state identification method based on three-dimensional feature points

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