JP2013074100A - Sheet sticking apparatus and sticking method, and sheet manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow an unnecessary sheet to be successfully peeled and an adhesive sheet to be successfully stuck, even for the adhesive sheet having an arc portion and a straight portion in a tip end and a rear end in a delivering direction.SOLUTION: A sheet sticking apparatus 10 comprises: delivery means 14 for delivering a master roll RS in which a belt-like sheet WS is tentatively adhered to a belt-like peeling sheet RL; cutting means 15 for forming a notch CU having an arc shape in the belt-like sheet WS to form an adhesive sheet AS inside the notch CU and to form an unnecessary sheet US outside the notch CU; and a peeling plate 18 for peeling the adhesive sheet AS from an initial stage peeling region (a tip end in a delivering direction) Sa. The cutting means 15 is provided so as to form a strip-like notch St at a position continuous with the notch CU of the initial stage peeling region in the unnecessary sheet US to form a strip portion TS.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and a sheet manufacturing apparatus and a manufacturing method, and more specifically, a sheet sticking apparatus and a sticking method capable of forming an adhesive sheet by forming a cut in a belt-like sheet, In addition, the present invention relates to a sheet manufacturing apparatus and a manufacturing method.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 includes a feeding unit that feeds an original fabric in which a belt-like sheet is temporarily attached to a release sheet, a cutting blade that forms a circular cut in the course of feeding the original fabric, A peel plate for peeling the adhesive sheet formed on the inside from the release sheet, and a press roller capable of pressing the peeled adhesive sheet against the wafer and the ring frame for pasting. In such a sheet affixing device, after the notch formation, and before the adhesive sheet is peeled from the release sheet, a winding means for peeling off the unnecessary sheet formed outside the notch from the release sheet and winding it up. What you have is known.

JP-A-2005-116929

  By the way, recently, there is a tendency that the diameter of the wafer is increased, and the diameter of the adhesive sheet is increased accordingly. Therefore, as shown in FIG. 4 (A), the adhesive sheet AS is at a certain interval along the feeding direction of the adhesive sheet AS at the leading end portion in the feeding direction (hereinafter referred to as “tip vertical interval Sx”). , The ratio (hereinafter referred to as “tip horizontal width Sy”) along the direction orthogonal to the feeding direction of the adhesive sheet AS at the position advanced by the vertical length Sx (hereinafter referred to as “tip vertical width ratio Sxy”) increases. When it sees microscopically, it will be in the state as if a ridge is also a straight line. When the leading end aspect ratio Sxy is increased, when the unnecessary sheet at the leading end in the feeding direction of the adhesive sheet AS is separated from the adhesive sheet AS by the winding means, the separation is performed at once in a wide range. In such a case, the cutting formed by the cutting means is insufficient, for example, the adhesive sheet AS and the unnecessary sheet are not completely separated, or the adhesive between the adhesive sheet AS and the unnecessary sheet is reattached. In some cases, the force required to separate the adhesive sheet AS and the unnecessary sheet may exceed the force required to separate the adhesive sheet AS and the release sheet, and the adhesive sheet AS may be wound together with the unnecessary sheet. There arises a disadvantage that the adhesive sheet AS cannot be pasted by being taken up by the take-up means.

[Object of invention]
An object of the present invention is to provide a sheet sticking apparatus and a sticking method capable of satisfactorily peeling off unnecessary sheets and thus sticking adhesive sheets even with adhesive sheets having a circular arc part or a straight line part at the leading end and rear end in the feeding direction. And providing a sheet manufacturing apparatus and a manufacturing method.

In order to achieve the above-mentioned object, the present invention feeds out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. A cutting means for forming an incision in a predetermined shape in the belt-like sheet and forming an adhesive sheet inside the incision, and forming an unnecessary sheet outside the incision; and temporarily attaching to the release sheet A peeling means for peeling the adhesive sheet from the leading end portion in the feeding direction of the adhesive sheet, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The cutting means employs a configuration in which a strip-like cut is formed in the unnecessary sheet so as to form a strip-like cut continuous with a cut corresponding to the leading end of the adhesive sheet in the feeding direction.

  In this invention, it is preferable that the said cutting | disconnection means takes the structure of having a cutting blade provided with the strip blade part which forms a strip-shaped cut.

  Also preferably, the strip blade portions are provided at a plurality of locations on the cutting blade, and each strip blade portion is provided so as to be selectively disposed at a position where the strip-shaped cut can be formed. .

  Furthermore, the feeding means may perform cutting at the strip blade portion a plurality of times for forming one adhesive sheet in conjunction with the cutting means.

  Further, it is possible to adopt a configuration in which the strip portion is provided with a biasing unit that applies tension to assist the separation of the adhesive sheet and the unnecessary sheet.

Furthermore, the sheet sticking method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end portion in the feeding direction of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, a method is adopted in which a strip-like cut is formed in the unnecessary sheet so as to be continuous with a cut corresponding to the leading end of the adhesive sheet in the feeding direction.

Further, the sheet manufacturing apparatus of the present invention is a feeding means for feeding out a raw material in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is temporarily attached to the belt-like release sheet via the adhesive layer. When,
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is provided such that a strip portion can be formed by forming a strip-like cut continuous with a cut corresponding to at least one of a leading end portion and a trailing end portion in the feeding direction of the adhesive sheet in the unnecessary sheet. The structure is adopted.

The sheet manufacturing method of the present invention is a feeding step in which a belt-like sheet having an adhesive layer on one surface of a belt-like base material sheet is fed out from the original fabric temporarily attached to the belt-like release sheet via the adhesive layer. When,
A cutting step of forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut,
In the cutting step, a method of forming a strip portion by forming a strip-like cut continuous with a cut corresponding to at least one of a leading end portion and a trailing end portion in the feeding direction of the adhesive sheet in the unnecessary sheet. Adopted.

According to the present invention, since the strip portion is formed by forming the strip-shaped cut, the adhesive sheet and the unnecessary sheet can be separated from the strip portion when only the unnecessary sheet is peeled from the release sheet. Therefore, even if the arc portion of the adhesive sheet has a large diameter or a straight line, it can be separated step by step, that is, for each small area, even if the adhesive sheet has a large tip aspect ratio. Separation does not take place extensively. As a result, even when the cut formed by the cutting means is insufficient or when the adhesive between the adhesive sheet and the unnecessary sheet is re-adhered, the force required to separate the adhesive sheet from the unnecessary sheet is increased. It is possible to suppress as much as possible the force required for peeling between the adhesive sheet and the release sheet, and to improve the reliability of separation of the adhesive sheet from the unnecessary sheet and to prevent them from being wound together. Thus, it becomes possible to eliminate the inconvenience that the adhesive sheet cannot be attached.
In addition, according to the said sheet manufacturing apparatus and manufacturing method, it can prevent that an adhesive sheet is wound up with an unnecessary sheet | seat, and the raw material by which the adhesive sheet is not temporarily attached is produced partially. In addition, when the original fabric with the booklet cuts is prepared and the original fabric is used for the sheet application device or application method, the inconvenience that the adhesive sheet cannot be applied as in the past is eliminated. Is possible.

  Moreover, when the cutting blade of a cutting | disconnection means has a strip blade part, it becomes possible to form a strip-shaped cut easily when forming a cut.

  Furthermore, since a plurality of strip blade portions can be selectively arranged so as to be able to form a strip-shaped cut continuous with the cut of the initial peeling region, even if one strip blade portion deteriorates due to wear or the like, Other strip blade portions can be used by changing the position of each strip blade portion.

  Further, by performing the cutting at the strip blade portion a plurality of times, it becomes possible to stably set the depth of the strip-shaped cut to a predetermined depth.

  Further, when the biasing means is provided, tension is applied to the strip portion, so that the strip portion can be surely separated from the adhesive sheet step by step.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. The schematic perspective view of the original fabric after cutting formation. The development view of a blade substrate and a cutting blade. (A) And (B) is explanatory drawing of the peeling procedure of an unnecessary sheet | seat. The Ad arrow line view of FIG. 1 in the case of a modification. (A)-(C) are the top views of the original fabric after the cut formation which shows a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this specification, “left”, “right”, “upper”, and “lower” are used with reference to FIG. 1 unless otherwise specified.

  1 to 4, a sheet sticking apparatus 10 includes a table 11 that sucks and supports a wafer WF as an adherend and a ring frame RF, and a linear motion motor 12 as a drive device that can move the table 11 in the left-right direction. A stripping sheet RL and a strip-shaped sheet WS temporarily attached to one surface of the strip-shaped sheet WS. The cut sheet CU is formed in the belt-like sheet WS, the adhesive sheet AS is formed inside the cut CU, and the unnecessary sheet US is formed outside the cut CU, and the unnecessary sheet US is wound up. Possible take-up means 16, biasing means 17, release plate 18 as release means for folding release sheet RL and peeling adhesive sheet AS from release sheet RL, The adhesive sheet AS peeled by Hanareban 18 is constituted by a pressing roller 19 as a pressing means for affixing is pressed against the ring frame RF and the wafer WF. The belt-like sheet WS includes a base sheet BS and an adhesive layer AD laminated on one surface of the base sheet BS, and is temporarily attached to the release sheet RL via the adhesive layer AD. A protective sheet PS is stuck on the lower surface of the wafer WF.

  The feeding means 14 includes a support shaft 25 that supports the original fabric RS, and a first drive roller 27 and a first pinch roller 28 that sandwich the original fabric RS that is fed from the support shaft 25 and passes through the cutting means 15. The second drive roller 31 and the second pinch roller 32 that sandwich the release sheet RL after passing through the release plate 18, and the winding shaft that winds the release sheet RL after passing through the release sheet RL with a predetermined torque by a drive device (not shown). 34. The drive rollers 27 and 31 are rotatably provided via rotation motors DM1 and DM2 as drive devices.

  The cutting means 15 is disposed on the side of the strip-shaped sheet WS of the unstretched fabric RS that is rotatable, and is disposed on the release sheet RL side of the unfolded fabric RS, and is interlocked with the die-cut roller 36 by a mechanism (not shown). A platen roller 37 that is rotatably provided, a rotation motor DM3 as a driving device for rotating the die cut roller 36, and a distance adjusting means for adjusting a relative distance between the die cut roller 36 and the platen roller 37, not shown. And a drive device such as a linear motor.

  The die cut roller 36 cuts the belt-like sheet WS to form a cut CU, a blade substrate 41 on which the cutting blade 40 protrudes from the surface, and can wind the blade substrate 41 around the outer periphery. A cylindrical magnet cylinder 43 is provided.

  The cutting blade 40 protrudes from the blade substrate 41 so as to have a height in the thickness direction of the belt-like sheet WS when the cut CU is formed. As shown in FIG. 3, the cutting blade 40 is provided in a substantially circular shape when the blade substrate 41 is developed on a plane, and a cutting CU (see FIG. 2) having the same shape as the shape can be formed. A circular blade portion 46 and four strip blade portions 47 that are formed at intervals of 90 ° in the circumferential direction of the circular blade portion 46 and are capable of forming a strip portion TS by forming a strip-shaped cut St are provided. The diameter dimension of the circular blade portion 46 is larger than the inner diameter dimension of the ring frame RF, smaller than the outer dimension, and set to a diameter of 400 mm. As shown in FIG. 3, the strip blade portion 47 is composed of a plurality of linear blades provided at predetermined intervals, specifically at intervals of 4 mm, and the base portions of these blades are connected to the circular blade portion 46. . In the case of this embodiment, the cutting board 40 is formed by etching the blade substrate 41. In addition, the length of each blade of the strip blade portion 47 is formed so as to become longer toward the center as shown in the upper and right sides of the figure, or the same length as shown in the lower side of the figure. Alternatively, as shown on the left side of the figure, the free end side may be formed to have a length aligned on the same straight line, or may be formed to become shorter toward the center.

  The blade substrate 41 is detachably provided on the magnet cylinder 43 through magnetic force. The blade substrate 41 is formed in a substantially square shape when developed on a plane, and each strip blade portion 47 is provided along the four sides thereof. Further, the blade substrate 41 is provided with a length of one side equal to or less than the outer peripheral length of the magnet cylinder 43, and can be wound around the magnet cylinder 43 with two opposite sides facing each other from the developed state. Therefore, when the blade substrate 41 is mounted on the magnet cylinder 43, the strip blade portions 47 of the cutting blade 40 are located on both sides in the axial direction and both sides in the circumferential direction of the magnet cylinder 43, and each blade of the strip blade portion 47 has its axis. It extends in parallel with the direction or circumferential direction. Here, the adhesive sheet AS formed by the cutting blade 40 is the first in the feeding direction of the belt-like sheet WS (the direction in which the original fabric RS is directed from the support shaft 25 toward the take-up shaft 34). It becomes an initial peeling region Sa (see FIG. 2) as a leading end portion in the feeding direction of the adhesive sheet to be peeled. The initial peeling region Sa has an arc portion SC at the leading end in the feeding direction. When the blade substrate 41 is wound around the magnet cylinder 43, the two opposing sides may be changed to the other two sides, or the direction of the magnet cylinder 43 with respect to the axial direction may be reversed. Thereby, it becomes possible to form the cut CU in the initial peeling region Sa in any of the four strip blade portions 47, and selectively use any one of the strip blade portions 47 according to the deterioration state of the strip blade portion 47 or the like. Is possible.

  Here, the cutting means 15 is provided with energy applying means (not shown), and the cutting CU can be formed while applying energy to the raw fabric RS by the energy applying means. Examples of the energy applying means include a coil heater built in at least one of the die-cut roller 36 and the platen roller 37, and a blower that blows hot air from a position away from the rollers 36 and 37 to the formation position of the cut CU. An irradiation device that irradiates energy rays such as a vessel, ultraviolet rays, infrared rays, and microwaves.

  The winding means 16 is wound around the unnecessary sheet US after the cutting means 15 forms the cut CU, and peels off the unnecessary sheet US from the release sheet RL. A take-up shaft 51 for taking up the unnecessary sheet US is provided. The take-up shaft 51 is rotatably provided via a rotation motor DM4 as a drive device, and can take up the unnecessary sheet US with a predetermined torque.

  The biasing means 17 includes an exhaust pipe 60 provided between the peeling roller 50 and the take-up shaft 51 and connected to a pressurizing means (not shown) such as a compressor or a turbine.

  Next, a method for applying the adhesive sheet AS in the present embodiment will be described.

  First, the raw fabric RS supported by the support shaft 25 is passed between the first drive roller 27 and the first pinch roller 28 and between the die cut roller 36 and the platen roller 37. Then, the strip-like sheet WS is peeled from the release sheet RL, and the strip-like sheet WS is wound around the peeling roller 50, and then the lead end is fixed to the winding shaft 51. Further, the release sheet RL is folded at the tip of the release plate 18 to pass between the second drive roller 31 and the second pinch roller 32, and its lead end is fixed to the winding shaft 34. In the present embodiment, as shown in FIG. 1, the center of the region where the cutting blade 40 in the rotation direction of the die cut roller 36 is not formed is set as the start position Strt of the die cut roller 36, and the start position Strt is applied to the platen roller 37. The rotation of the die cut roller 36 is stopped in the state of approaching again.

  Then, when the raw fabric RS is fed out by interlocking the rotation motors DM1 to DM4, the cutting blade 40 forms a cut CU from the base sheet BS side to the release sheet RL side, and the strip sheet WS is cut. It is divided into an adhesive sheet AS inside the CU and an unnecessary sheet US outside the cut CU. Along with the formation of the cut CU, the strip blade portion 47 forms a strip-shaped cut St connected to the cut CU corresponding to the initial peeling region Sa of the adhesive sheet AS on the unnecessary sheet US, thereby forming the strip portion TS. In the unnecessary sheet US, the strip-shaped cut St is formed at four positions in the circumferential direction of the cut CU including the position adjacent to the initial peeling region Sa of the adhesive sheet AS.

  After the formation of the cut CU, the unrolled sheet RS is peeled off from the release sheet RL by the peeling roller 50, and the unnecessary sheet US is wound around the take-up shaft 51. In peeling off the unnecessary sheet US, the initial peeling area Sa of the adhesive sheet AS and the unnecessary sheet US are separated as shown in FIG. In the figure, a position where the unnecessary sheet US starts to receive the peeling force by the peeling roller 50 is defined as a start position SP indicated by a one-dot chain line in the figure. When the winding of the unnecessary sheet US proceeds, the strip-shaped cut St adjacent to the initial peeling area Sa is fed out toward the peeling roller 50. Then, when the cut CU that forms the right end of the strip portion TS in the figure passes through the start position SP, the unnecessary sheet US and the adhesive sheet AS at the strip portion TS are separated. As shown in FIG. 2A, the separation is first performed at the strip portion TS in the forefront portion of the adhesive sheet AS in the feed-out direction, that is, the center portion in the width direction of the original fabric RS. Next, as shown in FIG. 5B, the cut is performed by passing the start position SP at the cut CU at the right end of the strip TS adjacent to the upper and lower sides of the strip TS separated in FIG. . As a result, the strips TS can be separated step by step in the order of passing through the start position SP of the peeling roller 50. At this time, gas may be ejected from the exhaust pipe 60 to apply tension to the strip portion TS. This gas ejection may be configured so that a plurality of strip portions TS can be simultaneously energized, or a plurality of ejection ports are provided in the exhaust pipe 60, and each ejection port is individually opened and closed. You may comprise so that energization can be performed for every TS.

When the adhesive sheet AS of the original fabric RS on which the unnecessary sheet US has been wound is peeled off from the tip of the release plate 18 by a predetermined amount, the tip of the adhesive sheet AS is detected by a sensor (not shown) and stopped. Become. In the standby state, as shown in FIG. 1, the die cut roller 36 has the start position Strt opposed to the platen roller 37, and the cutting position adjusting means that is a driving device (not shown) The position of the platen roller 37 can be displaced in the vertical direction. According to this, the intervals between the adhesive sheets AS can be arbitrarily adjusted, and the positions thereof can be changed in the vertical direction according to the length in the feeding direction of the adhesive sheet AS. Thereafter, the ring complaint RF and the wafer WF are placed on the table 11 via a transfer means (not shown) and are sucked and held. Next, the table 11 is conveyed below the peeling plate 18 from the right side to the left side via the linear motor 12. When the table 11 is detected at a predetermined position by a sensor (not shown), the first and second drive rollers 27 and 31 are rotated in synchronism with the conveyance of the table 11 to feed out the original fabric RS, and the leading edge of the peeling plate 18 The adhesive sheet AS is peeled off. Then, the peeled adhesive sheet AS receives a pressing force by the pressing roller 19 and is attached to each upper surface of the ring claim RF and the wafer WF, and the wafer WF and the ring claim RF are integrated through the adhesive sheet AS.
Here, when the separation state between the adhesive sheet AS and the unnecessary sheet US at the position where the tip vertical distance Sx is 1 mm is viewed microscopically, the tip horizontal distance Sy is approximately equal to the position where the tip vertical distance Sx is 1 mm. Since it is 40 mm, the tip aspect ratio Sxy is 40, and the adhesive sheet AS may rise together with the unnecessary sheet US in the direction of the winding shaft 51 depending on its rigidity. However, in the case of the present embodiment, as shown in FIG. 4A, the interval between the strip blade portions 47 is set to 4 mm, and therefore the tip vertical interval Sx is 1 mm by the strip portion TS having a width of 4 mm. At the position, the unnecessary sheet US is separated into nine stages. That is, even if the adhesive sheet AS has a low rigidity, the tip aspect ratio can be made very small, so that it is possible to suppress the adhesive sheet AS from rising together with the unnecessary sheet US in the direction of the winding shaft 51 as much as possible. .

  Therefore, according to such an embodiment, since the strip-shaped cut St is formed in the unnecessary sheet US, the adhesive sheet AS and the unnecessary sheet US are separated for each strip portion TS, and the separation is performed in stages. To be done. As a result, it is possible to prevent the adhesive sheet AS and the unnecessary sheet US from being separated in a wide range at once, and regardless of the curvature of the outer edge of the adhesive sheet AS, the reliability of the separation is improved and the adhesive sheet AS is unnecessary. It is possible to prevent the sheet US and the sheet US from rising together in the direction of the take-up shaft 51.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, the winding means 16 is omitted, and the unnecessary sheet US is not peeled from the release sheet RL, but the adhesive sheet AS is peeled off by the release plate 18, and the release sheet RL and the unnecessary sheet US are wound around the take-up shaft 34. You may make it take. Even in such a case, as shown in FIG. 5, when the release sheet RL and the unnecessary sheet US are folded by the release plate 18, the adhesive sheet AS and the unnecessary sheet US are separated for each strip portion TS. And the separation of them will be performed in stages. Thereby, it is possible to prevent the initial peeling region Sa from being peeled off by the peeling plate 18 and the adhesive sheet AS being taken up in the direction of the second drive roller 31 together with the unnecessary sheet US. At this time, the urging means 17 sucks the strip portion TS below the release plate 18 with a suction pump, a vacuum ejector, or the like, or the strip portion TS with a pin or the like from the release sheet RL folded by the release plate 18. It is possible to employ a configuration in which the button is pushed downward.

  Further, in forming the cut CU, each of the rotation motors DM1 to DM4 is interlocked to reciprocate the original fabric RS in the feed-out direction, and adjacent to the initial peeling area Sa with respect to the formation of one adhesive sheet AS. The strip-shaped cut St in the unnecessary sheet US may be cut a plurality of times.

  Furthermore, you may comprise a sheet manufacturing apparatus by abbreviate | omitting the peeling plate 18 and the press roller 19 of the said sheet sticking apparatus 10. FIG. According to the apparatus, after the adhesive sheet AS is formed by the cutting means 15 as in the above-described embodiment, the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL is wound around the winding shaft 34. The raw fabric RS wound on the winding shaft 34 can be separately conveyed and stored, or used in a sheet sticking apparatus or the like that does not have a cutting means. Thus, since the raw fabric RS wound on the winding shaft 34 becomes an initial peeling region Sa of a sheet sticking device or the like that is used separately in the feeding direction rear end portion of the feeding means 14, at least in the adhesive sheet AS. What is necessary is just to comprise the cutting | disconnection means 15 so that the strip-shaped cut St may be formed so that it may continue to the cut CU corresponding to the feed direction rear end part of the feed means 14. FIG.

Further, the planar shape of the adhesive sheet AS and the cutting blade 40 is not limited to the above-described embodiment, and can be changed to a polygonal shape, an ellipse, an ellipse, a rhombus, a shape combining a straight line and a curve, or the like. .
Furthermore, the planar shape of the strip blade part 47 and the strip-shaped cut St may increase or decrease the strip blade part 47, or may be one. When the number of the strip blade portions 47 is one, two strip portions TS are formed in the width direction of the original fabric RS with the strip-shaped cut St interposed therebetween.
Further, the interval between the strip blade portions 47 may be larger or smaller than 4 mm.
Further, as shown in FIG. 6A, the strip-shaped cut St extends in a direction orthogonal to the feeding direction of the adhesive sheet AS, or as shown in FIG. The cut St may extend in a direction crossing the feeding direction of the adhesive sheet AS, or may be a strip-shaped cut St that is not parallel to each other as shown in FIG. Note that the strip-shaped cut St does not have to be a linear shape, but may be a curved shape, a broken line shape, or a combination thereof.

Furthermore, in the said embodiment, you may abbreviate | omit at least 1 strip blade part 47 other than the strip blade part 47 adjacent to the initial stage peeling area | region Sa.
Moreover, the number of the strip blade parts 47 which can be selectively utilized can be increased by forming the blade substrate 41 in a circular shape or a polygonal shape.

The cutting means 15 may use other cutting means such as a laser beam as long as the cut CU and the strip-shaped cut St can be formed.
Further, the cutting blade 40 is not only formed by etching, but also a sculpting blade formed by machining, a rotary die, a flat blade having a blade formed on a flat plate, a Thomson blade, etc. May be used.
Further, the urging means 17 may spray hot air or cold air. When the belt-like sheet WS is contracted by heating or cooling, an energy applying means (not shown) provided in the cutting means 15 or a cold air blower Can be used as the urging means 17, or the strip-shaped cut St can be urged individually or entirely via a driving device, or can be urged by an elastic member. It is good.

Furthermore, various design changes can be made to the feeding means 14, the peeling plate 18, and the pressing roller 19.
Further, the interval adjusting means may be a so-called bearer, and the relative distance between the cutting blade 40 and the platen roller 37 by the interval adjusting means is the thickness and properties of the original RS, particularly the thickness and properties of the release sheet RS. Can be changed as appropriate.
Furthermore, the thickness of the member which comprises original fabric RS is not limited at all.
In addition, a driving device for moving the sheet sticking device 10 is provided, and the sheet sticking device 10 is moved rightward in FIG. 1 or the table 11 is moved leftward while the table 11 is stopped. The apparatus 10 may be configured to stick the adhesive sheet AS to the adherend by moving the apparatus 10 in the right direction,

  Furthermore, the drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

  In addition, the adherend may be a glass plate, a steel plate, or a resin plate instead of the wafer WF or the ring frame RF, and the semiconductor wafer may be a silicon semiconductor wafer or a compound semiconductor wafer. It may be. Further, instead of the ring frame RF, a frame having a different shape such as a C-shape or U-shape may be used, or a single adherend may be used as an attachment target of the adhesive sheet AS without the ring frame RF.

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 14 Feeding means 15 Cutting means 18 Release plate (peeling means)
19 Pressing roller (pressing means)
40 Cutting blade 47 Strip blade part AD Adhesive layer AS Adhesive sheet BS Base sheet CU Cutting RF Ring frame (Substrate)
RL Release sheet RS Original Sa Initial release area (adhesive sheet feed direction tip)
St Strip-shaped notch TS Strip part US Unnecessary sheet WF Semiconductor wafer (adhered body)
WS Strip sheet

Claims (8)

The belt-like sheet having an adhesive layer on one surface of the belt-like base material sheet is provided with a feeding means for feeding out the original fabric temporarily attached to the belt-like release sheet via the adhesive layer, and the belt-like sheet is cut into a predetermined shape. A cutting means for forming an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut, and feeding the adhesive sheet temporarily attached to the release sheet to the adhesive sheet A sheet sticking device comprising a peeling means for peeling from the tip of the direction, and a pressing means for pressing and sticking the adhesive sheet to an adherend,
The sheet pasting device, wherein the cutting means is provided so as to be able to form a strip portion by forming a strip-like cut continuous with a cut corresponding to a leading end portion in the feeding direction of the adhesive sheet in the unnecessary sheet. .   2. The sheet sticking apparatus according to claim 1, wherein the cutting means includes a cutting blade having a strip blade portion that forms a strip-shaped cut.   The said strip blade part is provided in the multiple places of a cutting blade, and each strip blade part is provided so that it can selectively arrange | position in the position which can form the said strip-shaped cut. Sheet sticking device.   The sheet sticking device according to claim 2 or 3, wherein the feeding means performs cutting at the strip blade portion a plurality of times for the formation of one adhesive sheet in conjunction with the cutting means.   The sheet sticking device according to claim 1, further comprising an urging unit that applies tension to the strip portion to assist separation of the adhesive sheet and the unnecessary sheet. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting step of forming an incision of a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch, and forming an unnecessary sheet outside the notch,
A peeling step of peeling the adhesive sheet temporarily attached to the release sheet from the leading end portion in the feeding direction of the adhesive sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
In the cutting step, a strip sticking method is formed by forming a strip-like cut continuous with a cut corresponding to a leading end portion of the adhesive sheet in the feeding direction in the unnecessary sheet. A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A sheet manufacturing apparatus including a cutting means for forming an incision having a predetermined shape in the belt-like sheet to form an adhesive sheet inside the notch and forming an unnecessary sheet outside the notch,
The cutting means is provided so as to be able to form a strip portion by forming a strip-like cut continuous with a cut corresponding to at least one of a leading end portion and a trailing end portion of the adhesive sheet in the unnecessary sheet. A sheet manufacturing apparatus. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet via the adhesive layer by the strip-shaped sheet having the adhesive layer on one surface of the strip-shaped base sheet;
A cutting step of forming a cut in a predetermined shape in the belt-like sheet to form an adhesive sheet inside the cut and forming an unnecessary sheet outside the cut,
In the cutting step, a strip portion is formed in the unnecessary sheet by forming a strip-like cut continuous with a cut corresponding to at least one of a leading end portion and a trailing end portion in the feeding direction of the adhesive sheet. Sheet manufacturing method.

Images