JP2013064644A - Shape-measuring device, shape-measuring method, system for manufacturing structures, and method for manufacturing structures - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape-measuring device, a shape-measuring method, and a method for manufacturing structures which can accurately measure the shape of an object to be measured.SOLUTION: A shape-measuring device is provided with: an application part for forming pattern light having a prescribed light intensity distribution on an object to be measured; an imaging part including an imaging element for taking an image of pattern light applied to the object to be measured in a direction differing from an application direction in which light is applied to the object to be measured; an evaluation part for evaluating imaging signal of the image; and a processing part for performing predetermined processing for the imaging results of the imaging part on the basis of evaluation results of the evaluation part to calculate positional information on the object to be measured.

Description

  The present invention relates to a shape measuring device, a shape measuring method, a structure manufacturing system, and a structure manufacturing method.

  Light that irradiates the object to be measured with line light as a method for measuring the shape of the object to be measured in a non-contact manner, and measures the shape of the object to be measured from the light cutting line formed corresponding to the cross-sectional shape of the object to be measured. Cutting methods are known.

  The shape measuring device by the light section method irradiates the measurement object with line light, images the position of the line light with a measurement camera attached at a fixed angle, specifies the three-dimensional position on the principle of triangulation, Shape data is generated. As such a shape measuring apparatus, an apparatus that images the position of line light using two measurement cameras is known (for example, see Patent Document 1).

US Pat. No. 5,424,835

  However, the above-described prior art has a problem in that the shape data cannot be measured accurately when the normal of the measurement surface of the measurement object viewed from the measurement camera forms a large angle or when the measurement surface is a curved surface. It was.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a shape measuring device, a shape measuring method, and a structure manufacturing method capable of measuring the shape of a measurement object with high accuracy.

  According to the first aspect of the present invention, an illumination unit that irradiates light to be measured with light having a predetermined light amount distribution to form pattern light on the object to be measured, and the light irradiates the object to be measured. An imaging unit including an imaging element that captures an image of the pattern light irradiated on the object to be measured from a direction different from the irradiated direction, an evaluation unit that evaluates an imaging signal of the image, and the evaluation of the evaluation unit There is provided a shape measuring apparatus comprising: a processing unit that calculates position information of the object to be measured by performing a predetermined process on the imaging result of the imaging unit based on the result.

  According to the second aspect of the present invention, there is provided a shape measuring method executed by the shape measuring apparatus, wherein the object to be measured is irradiated with light having a predetermined light quantity distribution from the illumination unit to form pattern light. An imaging procedure for capturing an image of the pattern light irradiated on the object to be measured from a direction different from an irradiation direction on which the light is irradiated on the object to be measured; and an evaluation procedure for evaluating an imaging signal of the image And a processing procedure for calculating position information of the object to be measured by performing a predetermined process on the imaging result of the imaging procedure based on the evaluation result. .

According to the third aspect of the present invention, a design process for producing design information related to the shape of the structure;
Obtained in the forming step for producing the structure based on the design information, the measuring step for measuring the shape of the produced structure using the shape measuring method according to the second aspect, and the measuring step An inspection process for comparing the shape information with the design information;
There is provided a method of manufacturing a structure characterized by comprising:

  According to the fourth aspect of the present invention, a design apparatus for producing design information related to the shape of a structure, a molding apparatus for producing the structure based on the design information, and a shape of the produced structure There is provided a structure manufacturing system that includes a shape measuring device according to a first aspect that measures based on a captured image, and an inspection device that compares the shape information obtained by the measurement with the design information. .

  According to the present invention, the shape of the measurement object can be measured with high accuracy.

It is a figure which shows the structure of the shape measuring apparatus which concerns on 1st Embodiment. It is a figure which shows the structure of a rotation mechanism. It is a block diagram which shows the structure of a shape measuring apparatus. It is a figure which shows the measurement procedure of a shape measuring apparatus. It is a vector related figure which shows a probe coordinate system. It is a vector related figure which shows a rotating shaft vector. It is a conceptual diagram which shows distribution of the brightness of pixel data. It is explanatory drawing of the influence which the angle which the to-be-measured object and the imaging optical axis of a photon detection part make has on a line profile. It is a figure for demonstrating the evaluation regarding the width height ratio of a line profile. It is a figure for demonstrating the evaluation regarding the non-target property of a line profile. It is a conceptual diagram explaining the process of the process part which concerns on 2nd Embodiment. It is explanatory drawing of the synthetic | combination method of the pixel data of the process part which concerns on 3rd Embodiment. It is a figure which shows schematic structure of the photon detection part which concerns on 4th Embodiment. It is a block block diagram of the structure manufacturing system which concerns on 5th Embodiment. It is a figure which shows the processing flow of a structure manufacturing system.

  Embodiments according to the shape measuring apparatus of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram illustrating a configuration of a shape measuring apparatus according to the first embodiment. The shape measuring apparatus 100 according to the present embodiment is a three-dimensional shape measuring apparatus (for example, a coordinate measuring machine (CMM)) that detects a three-dimensional shape of the object 3 to be measured. The shape measuring apparatus 100 projects a line-shaped projection pattern by projecting line light (line-shaped measurement light) in which a distribution with a large amount of light is formed in a single line shape on the surface of the object to be measured 3 from a certain direction. Projecting onto the object to be measured. The object to be measured on which the linear projection pattern is projected is imaged from an angle different from the projection direction. The coordinates of the position at which the line-shaped projection pattern is projected are obtained depending on the position of each point of the captured line-shaped projection pattern. In other words, the shape measuring apparatus 100 uses a triangulation principle or the like for each pixel in the longitudinal direction of the line-shaped projection pattern from the captured image of the surface of the object 3 to be measured from the reference plane of the surface of the object 3 to be measured. Is a device for calculating the height of the three-dimensional shape of the surface of the object 3 to be measured. Further, each time the line-shaped projection pattern is scanned over the entire surface of the object 3 to be measured, the line-shaped projection pattern is imaged. By doing in this way, the shape measurement of the whole area | region of a to-be-measured object is enabled.

  The shape measuring device 100 includes a measuring device main body 1 and a control device 4 as shown in FIG. The control device 4 is connected to the measurement device main body 1 via a control line and controls the measurement device main body 1. The measurement apparatus main body 1 includes a drive unit 11 (see FIG. 3) having a rotation mechanism 13 and a head drive unit 14, a position detection unit 12 (see FIG. 3), a head unit 17, a surface plate 18, and an optical cutting probe. 2 are provided. Here, the DUT 3 is disposed on the surface plate 18.

The surface plate 18 is made of stone or cast iron, and its upper surface is kept horizontal.
Based on the drive signal supplied from the control device 4, the head drive unit 14 moves the head unit 17 in the directions of the three orthogonal axes of the X axis, the Y axis, and the Z axis. The head drive unit 14 includes an X-axis moving unit 141, a Y-axis moving unit 142, and a Z-axis moving unit 143. Here, the XY plane defines a plane parallel to the upper surface of the surface plate 18. In other words, the X-axis direction defines one direction on the surface plate 18, and the Y-axis direction defines a direction orthogonal to the X-axis direction on the upper surface of the surface plate 18, and the Z-axis direction. The direction defines a direction orthogonal to the upper surface of the surface plate 18.

The X-axis moving unit 141 includes an X-axis motor that drives the head unit 17 in the X-axis direction, and moves the head unit 17 in the X-axis direction within a predetermined range on the surface plate 18. The Y-axis moving unit 142 includes a Y-axis motor that drives the head unit 17 in the Y-axis direction, and moves the head unit 17 in the Y-axis direction within a predetermined range on the surface plate 18. The Z-axis moving unit 143 includes a Z-axis motor that drives the head unit 17 in the Z-axis direction, and moves the head unit 17 in the Z-axis direction within a predetermined range.
The head unit 17 is positioned above the light cutting probe 2 and supports the light cutting probe 2 (sensor unit) via the rotation mechanism 13. That is, the head drive unit 14 moves the light cutting probe 2 in each of the coordinate axis directions of the three-dimensional coordinate system orthogonal to each other.

FIG. 2 is a diagram illustrating a configuration of the rotation mechanism 13 in the present embodiment.
As shown in FIG. 2, the rotation mechanism 13 is disposed between the head unit 17 and the light cutting probe 2, and supports the light cutting probe 2 rotatably with respect to the head driving unit 14. That is, the rotation mechanism 13 can rotate the optical cutting probe 2 at an arbitrary angle with respect to the surface of the object 3 to be measured.

  The rotating mechanism 13 includes a first rotating shaft 131, a second rotating shaft 132, and a third rotating shaft 133. The rotation mechanism 13 includes a drive motor that rotates each of the first rotation shaft 131, the second rotation shaft 132, and the third rotation shaft 133, and is based on a drive signal supplied from the control device 4. The optical cutting probe 2 is rotated at an arbitrary angle.

The first rotating shaft 131 is a rotating shaft that rotates the optical cutting probe 2 in the Z-axis range of 360 degrees including the second rotating shaft 132 and the third rotating shaft 133 attached below the first rotating shaft 131. .
The second rotating shaft 132 is a mechanism that is attached to the lower portion of the first rotating shaft 131 and rotates the optical cutting probe 2 including the third rotating shaft 133 in the vertical direction within a range of −95 to +95 degrees.
The third rotating shaft 133 is a mechanism that is attached to the second rotating shaft 132 and rotates the optical cutting probe 2 within a range of 360 degrees.

  The light cutting probe 2 (sensor unit) is applied to the device under test 3 from a light irradiation unit 21 (illumination) for irradiating the device under test 3 with line light for performing light cutting, and from a direction different from the irradiation direction of the line light. It has the light detection part 22 which detects the irradiated line light.

  The light irradiation unit 21 is configured by a cylindrical lens (not shown), a slit plate having a thin strip-shaped notch, or the like, and receives illumination light from a light source to generate fan-shaped line light. As the light source, an LED, a laser light source, an SLD (Super Luminescent Diode), or the like can be used.

  The light detection unit 22 images line light projected on the surface of the object to be measured 3 from different directions deviated from the plane including the light irradiation direction of the light irradiation unit 21 and the longitudinal direction of the line light. That is, the light detection unit 22 detects the surface of the DUT 3 on which the light cut surface (line) appears when the line light is irradiated.

  In addition, the light detection unit 22 includes a first image sensor 22a and a second image sensor 22b as shown in FIG. The first image sensor 22a and the second image sensor 22b detect the surface of the DUT 3 from different positions. Each of the first image sensor 22a and the second image sensor 22b is composed of a CCD camera of 1024 × 1024 pixels, for example. As will be described later, the light detection unit 22 drives the drive unit 11 so that each time the line light is scanned at a predetermined interval, the first imaging element 22a and the second imaging element 22b capture an image of the object 3 to be measured. It has become.

Next, the configuration of the shape measuring apparatus 100 will be described with reference to FIG.
FIG. 3 is a block diagram showing the configuration of the shape measuring apparatus 100 according to the present embodiment. In this figure, the same components as those in FIGS. 1 to 3 are denoted by the same reference numerals.

In FIG. 3, the shape measuring device 100 includes a measuring device main body 1 and a control device 4.
Further, as described above, the measurement apparatus main body 1 includes the drive unit 11, the position detection unit 12, and the light cutting probe 2.
The drive unit 11 includes a rotation mechanism 13 and a head drive unit 14, and changes the position and posture of the light cutting probe 2 based on a drive signal supplied from the control device 4. That is, the drive unit 11 moves the optical cutting probe 2 and the object to be measured 3 relative to each other.

The position detection unit 12 includes a rotation position detection unit 15 and a head position detection unit 16.
The head position detection unit 16 includes, for example, an X-axis encoder, a Y-axis encoder, and a Z-axis encoder that detect the positions of the head drive unit 14 in the X-axis, Y-axis, and Z-axis directions, respectively. The head position detection unit 16 detects the position of the head drive unit 14 using these encoders, and supplies a signal indicating the position of the head drive unit 14 to a coordinate detection unit 51 described later.

  The rotational position detector 15 includes encoders that respectively detect rotational positions of the first rotational shaft 131, the second rotational shaft 132, and the third rotational shaft 133. The rotational position detector 15 uses these encoders to detect the rotational positions of the first rotational shaft 131, the second rotational shaft 132, and the third rotational shaft 133, and outputs a signal indicating the detected rotational position to the coordinate detector. 51.

As described above, the light cutting probe 2 includes the light irradiation unit 21 and the light detection unit 22 in order to detect the surface shape of the DUT 3 by the light cutting method. Based on a control signal for controlling the irradiation of light supplied from an interval adjusting unit 52, which will be described later, the light irradiation unit 21 has a linear slit on the device under test 3 so that light on the device under test 3 is exposed to a straight line. Irradiate light (line-shaped light).
The light detection unit 22 captures an image of a light section line formed on the surface of the DUT 3 by the irradiation light from the light irradiation unit 21. Here, the image of the light cutting line is formed at a position where each point of the image of the light cutting line differs according to the cross-sectional shape of the DUT 3. Then, the light detection unit 22 images a shadow pattern formed on the surface of the DUT 3 and supplies the captured image information to the coordinate calculation unit 53 of the control device 4. The light detection unit 22 has a Scheimpflug optical system. Referring to FIG. 5, when the irradiation direction of the line light from the light irradiation unit 21 is L1, the imaging surface of the light detection unit 22 is conjugated with a surface including L1 and the longitudinal direction of the slit light. It has become.

The control device 4 includes an arithmetic processing unit 41, an input device 42, and a monitor 44. The input device 42 includes a keyboard for a user to input various instruction information.
The input device 42 detects the input instruction information, and stores the detected instruction information in the storage unit 55. The monitor 44 receives measurement data (coordinate values of all measurement points) and the like supplied from the data output unit 57. The monitor 44 can display received measurement data (coordinate values of all measurement points) and the like. The monitor 44 can also display a measurement screen, an instruction screen, and the like.

  The arithmetic processing unit 41 controls the process of measuring the shape of the device under test 3 in the shape measuring apparatus 100, calculates the height of the surface of the device under test 3 from the reference plane, and calculates the three-dimensional shape of the device under test 3. Is performed. The arithmetic processing unit 41 includes a coordinate detection unit 51, a coordinate calculation unit 53, a drive control unit 54, a storage unit 55, a measurement control unit 56, and a data output unit 57.

The coordinate detection unit 51 detects the position of the light cutting probe 2 and the posture of the light cutting probe 2 based on the six-axis coordinate signals output from the rotational position detection unit 15 and the head position detection unit 16.
Here, the 6-axis coordinate signal is a signal indicating the coordinates of the three axes of the X axis, the Y axis, and the Z axis, and the first rotation axis 131, the second rotation axis 132, and the third rotation axis 133. is there.

  That is, the coordinate detection unit 51 determines the position of the optical cutting probe 2, that is, the observation position in the horizontal direction (optical axis center position) and the observation position in the vertical direction based on the orthogonal triaxial coordinate signals output from the head position detection unit 16. Can be detected. In addition, the coordinate detection unit 51 can detect the posture of the light cutting probe 2 based on a signal indicating the rotation position output from the rotation position detection unit 15.

The coordinate detection unit 51 supplies six-axis coordinate information to the coordinate calculation unit 53 as information indicating the position of the light cutting probe 2 and the posture of the light cutting probe 2.
In addition, the coordinate detection unit 51 detects the moving path, the moving speed, and the like of the light cutting probe 2 based on the six-axis coordinate information of the light cutting probe 2.

  The coordinate calculation unit 53 receives image information captured by each of the first imaging element 22a and the second imaging element 22b of the light detection unit 22. The coordinate calculation unit 53 includes an evaluation unit 53a that performs a predetermined evaluation on the received image information, and a processing unit 53b that performs processing on the image information based on the evaluation result of the evaluation unit 53a. Details of the evaluation unit 53a and the processing unit 53b will be described later.

  The coordinate calculation unit 53 receives the six-axis coordinate information of the light cutting probe 2 supplied from the coordinate detection unit 51. The coordinate calculation unit 53 calculates the coordinates of the light irradiation unit 21 fixed to the light cutting probe 2 and the coordinates of the light detection unit 22 from the received six-axis coordinate information of the light cutting probe 2. Since the light irradiation unit 21 is fixed to the light cutting probe 2, the irradiation angle of the light irradiation unit 21 is fixed to the light cutting probe 2. Further, since the light detection unit 22 is also fixed to the light cutting probe 2, the imaging angle of the light detection unit 22 is fixed with respect to the light cutting probe 2.

The coordinate calculation unit 53 calculates the point where the irradiated light hits the DUT 3 using triangulation for each pixel of the captured image. Here, the coordinates of the point where the irradiated light hits the device under test 3 are a straight line drawn at the irradiation angle of the light irradiation unit 21 from the coordinates of the light irradiation unit 21, and the light detection unit from the coordinates of the light detection unit 22. The coordinates of a point where a straight line (optical axis) drawn at an imaging angle of 22 intersects.
In addition, said imaged image shows the image detected by the light cutting probe 2 arrange | positioned at the measurement position.
Based on such a configuration, the shape measuring apparatus 100 can calculate the coordinates of the position irradiated with the light by scanning the slit light applied to the DUT 3 in a predetermined direction. That is, the surface shape of the DUT 3 can be obtained. The coordinate calculation unit 53 detects the shape of the DUT 3 as point cloud data, which is information on the position irradiated with the line light, based on the position where the line light pattern is captured. The details of the method for detecting the shape of the DUT 3 in the coordinate calculation unit 53 will be described later.

  The drive control unit 54 is for outputting a drive signal to the head drive unit 14 and the rotation mechanism 13 to perform control for moving the drive unit 11.

The storage unit 55 is a memory such as a RAM (Random Access Memory), for example, and stores various instruction information supplied from the input device 42 as a measurement condition table. Here, in the measurement condition table, the measurement condition, the measurement end condition, the coordinate value of the measurement start point (first measurement point) of the DUT 3, the measurement target direction at the measurement start position, the measurement point Items such as an interval (for example, a measurement pitch of a constant interval) and data indicating set angle information of the rotation mechanism 13 when measuring at each measurement point are included.
The storage unit 55 stores point cloud data, which is a three-dimensional coordinate value of the surface of the object to be measured, supplied from the coordinate calculation unit 53 as measurement data. The storage unit 55 stores the coordinate value data (six-axis coordinate information) of each measurement point supplied from the coordinate detection unit 51 as route information. The storage unit 55 stores design data (CAD data).

  Further, the measurement control unit 56 ends the detection of the shape of the DUT 3 based on the measurement end condition read from the storage unit 55. Details of the measurement end condition will be described later.

  The data output unit 57 reads measurement data (coordinate values of all measurement points) and the like from the storage unit 55. The data output unit 57 supplies the measurement data (coordinate values of all measurement points) and the like to the monitor 44. The data output unit 57 outputs measurement data (coordinate values of all measurement points) and the like to a printer (not shown).

Next, with reference to FIG. 4 to FIG. 9, a procedure until the shape measuring apparatus 100 scans (relatively moves) the measurement object 3 and creates shape data will be described.
FIG. 4 is a diagram showing a measurement procedure of the shape measuring apparatus 100 according to this embodiment.
In this figure, first, a device under test 3 that is a measurement object is placed on a measurement table by a user (step S101). That is, the DUT 3 is installed in the measurement effective space in the operating range on the surface plate 18 of the shape measuring apparatus 100.

  Next, the user moves the head drive unit 14 and the rotation mechanism 13 to the measurement start position (step S102). That is, the light cutting probe 2 is moved to the measurement start position. That is, for example, six axes are used using a moving knob (a part of the input device 42) so that the light cutting line (line light) irradiated from the light cutting probe 2 is irradiated to the measurement start position of the object 3 to be measured. The coordinates are adjusted, and the drive control unit 54 moves and rotates the head drive unit 14 and the rotation mechanism 13 based on the operation signal from the movement knob. And the drive control part 54 memorize | stores the measurement start position of the drive part 11 set as a registration position in the memory | storage part 55 based on the operation signal from a movement knob. Thereby, the shape measurement apparatus 100 sets the measurement start position.

When the head drive unit 14 and the rotation mechanism 13 are moved to the measurement start position, the light cutting line is monitored by the light detection unit 22 in the light cutting probe 2 and is finely adjusted so as to be imaged at the image center position. Good.
The light cutting probe 2 is calibrated in advance before being attached to the shape measuring apparatus 100, and is calibrated in advance so that the center of the working distance is when the line light is at the center position of the measurement camera.

  Next, the irradiation direction (measurement target direction) of the light cutting line is designated by the user (step S103). That is, the user adjusts the longitudinal direction of the optical cutting line according to the shape of the DUT 3 by moving the third rotary shaft 133. At the same time, the irradiation direction of the light cutting line is also adjusted according to the direction of the surface of the measurement position of the object 3 to be measured. In this case, the scanning direction is a direction perpendicular to the longitudinal direction of the light cutting line. Here, the drive control unit 54 rotates the third rotation shaft 133 of the rotation mechanism 13 based on the operation signal from the movement knob, and stores the measurement target direction at the measurement start position set as the registration position. 55 is stored.

  Next, in the shape measuring apparatus 100, the measurement data acquisition distance or the measurement end condition is designated by the user (step S104). That is, the input device 42 designates a measurement data acquisition range or a measurement end condition for designating from where to where the measurement region is set, and the input device 42 stores the specified measurement data acquisition distance or measurement end condition. The data is stored in the unit 55.

  In the present embodiment, the following conditions can be set as measurement end conditions for ending the automatic tracking operation. The measurement control unit 56 changes the position and orientation (the above-described relative position) of the optical cutting probe 2 and repeats the position information of the point cloud from the coordinate calculation unit 53 until the specified measurement end condition is reached. Output.

(1) The measurement is terminated depending on the measurement distance.
In this case, in the shape measuring apparatus 100, for example, a distance for performing measurement from the measurement start position of the object to be measured 3 is specified by mm (millimeter) unit. In addition, the distance may be designated by a method in which a frequently used distance is previously menud and designated from the menu.
In addition, when the measurement end condition is designated, the measurement control unit 56 determines that the position of the optical cutting probe 2 is a position separated from the measurement start position of the object 3 to be measured by the above-described distance or more. The measurement of the shape of the DUT 3 is terminated.

(2) The measurement is terminated by detecting the same position point group.
When this measurement end condition is designated, when the point cloud data output by the coordinate calculation unit 53 matches the already acquired data (same position point cloud) or overlaps at a short distance, the shape measuring apparatus 100 , And finish the measurement. That is, the measurement control unit 56 changes the above-described relative position, causes the coordinate calculation unit 53 to repeatedly detect the point cloud data, and the newly detected point cloud data (point cloud position information) has already been detected. When it is within a predetermined range including the value of the point cloud data, the detection of the shape of the DUT 3 is terminated. For example, when the spherical surface is continuously measured (scanned), and the 360 degree measurement results in overlapping points of close distance, the measurement control unit 56 ends the measurement of the shape of the object 3 to be measured.

(3) The measurement is terminated depending on the range of the normal angle.
When this measurement end condition is designated, the shape measuring apparatus 100 monitors whether the direction of a normal vector, which will be described later, is within a predetermined range, and when the direction of the normal vector is out of this range. End measurement. That is, the measurement control unit 56 monitors whether the direction of the normal vector is within a predetermined range. If the direction of the normal vector, which will be described later, is outside the predetermined range, the device under test is measured. The measurement of the shape of 3 is finished.

(4) The measurement is terminated according to the spatial coordinate range.
When the measurement end condition is specified, the shape measuring apparatus 100 ends the measurement when it reaches a specified range of absolute coordinates described later. That is, the measurement control unit 56 changes the relative position described above, and the point cloud data output from the coordinate calculation unit 53 reaches the shape of the object 3 to be measured when the point group data reaches the specified range of absolute coordinates. End the measurement.
As described above, in the shape measuring apparatus 100, the measurement end conditions (1) to (4) are specified as a single unit and a combination condition.

  Next, in the shape measuring apparatus 100, the data measurement pitch on the surface of the DUT 3 is designated by the user (step S105). That is, a measurement pitch (scan pitch) is designated using the input device 42, and the input device 42 stores the designated measurement pitch in the storage unit 55. At this time, the irradiation direction (measurement target direction) of the light cutting line is set for at least a plurality of positions among the measurement positions.

  Thus, the setting for measuring the shape of the DUT 3 in the shape measuring apparatus 100 is completed.

  Next, the shape measuring apparatus 100 starts measuring the shape of the DUT 3 (Step S106). That is, the measurement control unit 56 reads the measurement condition table set above from the storage unit 55 and starts measuring the shape of the DUT 3 based on the measurement condition table. The shape measuring apparatus 100 changes the position and orientation (the above-described relative position) of the light cutting probe 2 as described below, and outputs image data from the light detection unit 22 to the coordinate calculation unit 53 each time. Each time the coordinate measuring unit receives image data from the light detecting unit 22, the coordinate measuring unit outputs point cloud data.

  After starting the shape measurement of the DUT 3, the shape measuring apparatus 100 determines whether the measurement end condition has been reached (step S107). That is, the measurement control unit 56 determines whether or not the measurement end condition specified in the process of step S104 has been reached. If the measurement control unit 56 determines that the measurement end condition has been reached, the process proceeds to step S110. If the measurement control unit 56 determines that the measurement end condition has not been reached, the process proceeds to step S108.

In step S108, the shape measuring apparatus 100 acquires six-axis current coordinate information and an optical cutting image. That is, the measurement control unit 56 moves the position of the optical cutting probe 2 to the measurement start position and changes the posture based on the measurement condition table. Then, the measurement control unit 56 causes the coordinate detection unit 51 to detect the current coordinate information of the six axes and causes the light detection unit 22 to acquire a light cutting image.
Note that the coordinate detection unit 51 latches the (current) 6-axis coordinate information after the movement detected by the position detection unit 12 in synchronization with the image of the light cutting probe 2 being acquired by the light detection unit 22. And supplied to the coordinate calculation unit 53. The image acquired by the light detection unit 22 is supplied to the coordinate calculation unit 53.

  Next, the shape measuring apparatus 100 obtains a luminance peak position that can be detected in the short direction of the image of the light section line from the six-axis coordinate information and the image data acquired by the light detection unit 22, and the luminance peak position. From this, the center position of the line light is obtained. By obtaining the center position of the line light from the respective positions in the longitudinal direction of the line light, point cloud data for one image acquired by the light detection unit 22 is generated (step S109). That is, the coordinate calculation unit 53 generates point group data for one image based on the six-axis coordinate information supplied from the coordinate detection unit 51 and the image data acquired by the light detection unit 22. The coordinate calculation unit 53 stores the generated point group data in the storage unit 55.

  When generating the point cloud data, the coordinate calculation unit 53 converts probe coordinates described later to absolute coordinates described later. Hereinafter, an example in which the coordinate calculation unit 53 converts the probe coordinates to absolute coordinates to generate point cloud data will be described.

(About probe coordinate system)
First, the probe coordinate system in this embodiment will be described.
FIG. 5 is a vector relation diagram showing the probe coordinate system in this embodiment. In this description, the probe coordinate system of the first image sensor 22a will be described as an example, but the same applies to the probe coordinate system of the second image sensor 22b. In FIG. 6, the probe coordinate system has a point where the illumination optical axis L1 and the imaging optical axis L2 intersect in the first imaging element 22a alone, and the direction of the light irradiation unit 21 is the positive direction of the Z axis and orthogonal to the Z axis. The direction toward the right side of the drawing is indicated as the positive direction of the X axis, and the direction toward the back of the drawing is indicated as the positive direction of the Y axis. In the present embodiment, since the first image sensor 22a is composed of a CCD camera having 1024 × 1024 pixels as described above, the first image sensor 22a captures an image with the longitudinal direction of the line light as the vertical direction. Therefore, the coordinate calculation unit 53 can detect a maximum of 1024 peak positions by detecting the maximum luminance position in the horizontal direction (the short direction of the line light).

Thereby, in a state where the first image sensor 22a alone is calibrated in advance, the coordinate calculation unit 53 performs a light cutting plane from a precise horizontal pixel position in the captured image by a correction calculation based on the calibration data. It is possible to generate three-dimensional coordinates in the probe coordinate system.
In the present embodiment, it is assumed that the first image sensor 22a single unit calibration has been completed, and the description of the details of the correction calculation contents is omitted.

(About absolute coordinate system)
Next, the absolute coordinate system in the present embodiment will be described.
The absolute coordinate system is, for example, a coordinate system indicating a three-dimensional position in the measurement space in the X-axis, Y-axis, and Z-axis directions with the left front on the surface plate 18 of the shape measuring apparatus 100 shown in FIG. It is. The coordinate calculation unit 53 generates the point group data to be generated as position information (coordinate information) of this absolute coordinate system. Since the first image sensor 22a and the second image sensor 22b are attached to different positions in the light detection unit 22 according to this embodiment, a probe coordinate system is set for each. Therefore, it is necessary to unify each probe coordinate system by unifying them into an absolute coordinate system.

(Conversion from probe coordinate system to absolute coordinate system)
Next, a process of converting the probe coordinate system to the absolute coordinate system and generating point cloud data in the coordinate calculation unit 53 will be described. The coordinate calculation unit 53 performs a calculation in which 6-axis coordinate information is added to the point group coordinates generated as the probe coordinate system, and converts the coordinate into an absolute coordinate system.
Here, the three-dimensional coordinates of the points indicated by the probe coordinate system are shown as Expression (1).

FIG. 6 is a vector relation diagram showing a rotation axis vector in the present embodiment.
In this figure, the rotation center of the first rotation shaft 131 and the second rotation shaft 132 is indicated as a point C1, and the rotation center of the third rotation shaft 133 (also the probe coordinate origin) is indicated as a point C2. In addition, the angle of the first rotation shaft 131 when the image is acquired by the light cutting probe 2 is denoted as angle a, the angle of the second rotation shaft 132 is denoted as angle b, and the angle of the third rotation shaft 133 is denoted as angle c. . Here, if the rotation matrices corresponding to the respective rotation axes of the first rotation axis 131, the second rotation axis 132, and the third rotation axis 133 are Ma, Mb, and Mc, respectively, the conversion to the absolute coordinate is expressed by the equation ( 2).

Here, O (O) is a vector indicating absolute coordinates at the rotation center of the first rotation shaft 131 and the second rotation shaft 132, and the X axis, Y axis, and the like of the shape measuring apparatus 100 detected by the coordinate detection unit 51. And calibrated to coincide with the coordinate information of the Z axis.
L represents a vector directed to the rotation center of the third rotation shaft 133 with the rotation center of the first rotation shaft 131 and the second rotation shaft 132 as the base point when (a = b = 0). Assuming that the norm of the vector L is l (el), the vector L is expressed as equation (3).

  By the arithmetic processing shown as Expression (3), the coordinate calculation unit 53 can convert the tip of the vector L, that is, the origin point C2 of the probe coordinate system, to the absolute coordinate system. That is, the coordinate calculation unit 53 indicates that the position information (point cloud data) on the surface of the object to be measured 3 detected by the light cutting probe 2 can be converted into an absolute coordinate system.

  Here, an example of image data (imaging signal) supplied from the light detection unit 22 to the coordinate calculation unit 53 will be described. FIG. 7 is a conceptual diagram showing a luminance distribution shape of image data captured by the image sensor, and corresponds to image information captured by the first image sensor 22a, for example. Note that L1 in FIG. 7 corresponds to the longitudinal direction of the line light imaged by the first image sensor 22a. Further, L2 in FIG. 7 corresponds to the short direction of the line light in the first image sensor 22a. Further, L3 in FIG. 7 indicates the magnitude of the luminance of the pixel data detected by the pixel of the first image sensor 22a. In the following description, the pixel data shown in FIG. 7 is referred to as a line profile, and the line indicating the luminance distribution along the direction L2. This line profile interpolates luminance values between pixels by performing interpolation calculation along the direction of L2 based on the pixel value of each pixel.

  In the present embodiment, line light composed of laser light is irradiated onto the object to be measured 3. In general, since laser light has a Gaussian distribution of cross-sectional intensity of light, each line profile in the first image sensor 22a similarly has a Gaussian distribution as shown in FIG. In the present embodiment, the first imaging element 22a detects the light amount distribution profile in the short direction of the line light image at each position in the length direction of the line light as described above. That is, when the surface to be measured is a flat surface, the length direction of the line light image coincides with the L1 direction, so that there are 1024 pixels of the image sensor in the direction orthogonal to the length. Sometimes, 1024 line profiles can be detected for one line light. Since the second image sensor 22b has the same configuration as the first image sensor 22a, a line that is a light amount distribution in the short direction of an image of 1024 line lights as in the first image sensor 22a. The profile can be detected.

  By the way, the scattered light from the DUT 3 constituting the image captured by the light detection unit 22 is detected by the normal direction of the object surface and the image of the light detection unit 22 (the first image sensor 22a and the second image sensor 22b). The intensity distribution changes depending on the angle formed by the optical axis direction. Therefore, the shape of the line profile acquired by the light detection unit 22 is deformed by the change in the normal angle. The luminance value of the peak indicated by the line profile in which such deformation has occurred becomes low in reliability.

  Therefore, the coordinate calculation unit 53 according to the present embodiment causes the evaluation unit 53a to evaluate the line profile from the imaging result of the light detection unit 22, that is, the image data acquired by the first imaging element 22a and the second imaging element 22b. ing. In addition, the coordinate calculation unit 53 calculates the position information of the object to be measured 3 by performing a predetermined process, which will be described later, on the imaging result of the light detection unit 22 based on the evaluation result.

  The evaluation unit 53a evaluates all line profiles acquired by the first image sensor 22a and the second image sensor 22b. The evaluation items of the evaluation unit 53a include the following items.

(1) Evaluation of the angle formed by the imaging optical axis of the light detection unit 22 with respect to the normal direction of the measurement surface.
FIG. 8 is a diagram showing the influence of the angle formed by the imaging optical axis of the light detection unit 22 with respect to the normal direction of the DUT 3 on the line profile. FIG. 8A defines the width of the line profile imaged by the light detection unit 22 when the angle formed by the imaging optical axis and the normal line of the measurement surface of the DUT 3 is approximately 90 °, as W1. is there. FIG. 8B defines the width of the line profile captured by the light detection unit 22 as W2 when the angle formed by the imaging optical axis and the normal of the measurement surface is 60 °. FIG. 8C defines the width of the line profile captured by the light detection unit 22 as W3 when the angle formed by the imaging optical axis and the normal of the measurement surface is 30 °.

  The inclination of the measurement surface with respect to the light detection unit 22, that is, the normal angle θ, can be expressed by the equation θ = acos (W / W1), where W is the width of the line profile. Note that W in the above equation is the width of the line profile. The evaluation unit 53a can evaluate and estimate the normal angle of the measurement surface of the DUT 3 based on the value of the width W of the line profile. When the normal line angle greatly deviates from a predetermined threshold, the evaluation unit 53a can evaluate that the line profile is data with low reliability.

(2) Evaluation of the width / height ratio of the line profile.
As shown in FIG. 9, the evaluation unit 53a evaluates whether the ratio of the width W and the height H at which the line profile has a predetermined luminance, that is, the width W of the line profile defined by a certain threshold is equal to or greater than a certain width. .

  If the angle formed by the imaging optical axis of the light detection unit 22 with respect to the normal direction of the device under test 3 is too large, the line profile becomes a shape crushed in the width direction, so that the width W becomes narrow and the height H becomes high. Thus, the width / height ratio of the line profile changes. Therefore, when the width-height ratio of the line profile deviates from a predetermined value, the evaluation unit 53a can evaluate that the line profile is data with low reliability.

(3) Evaluation of non-target property of line profile.
As shown in FIG. 10, the evaluation unit 53a is centered on the maximum luminance position of the line profile, and each area (integrated value) of regions A and B composed of a line indicating the predetermined luminance value and the line profile with respect to the left and right sides thereof. If the ratio exceeds a certain value, the line profile can be evaluated as having a low reliability evaluation value. The case where the ratio exceeds a certain value means that the left and right distortion of the line profile with respect to the center is large. This is because the line profile inherently has a Gaussian distribution, so that the left and right areas are approximately equal with the maximum luminance position as the center, but the left and right areas are different (the line profile is distorted) This is because the line profile has low reliability as data. Accordingly, when the non-target property of the line profile is larger than the predetermined range, the evaluation unit 53a can evaluate that the line profile is data with low reliability.

(4) Evaluation of frequency components of line profile.
The evaluation unit 53a performs a Fourier transform on the line profile, obtains a frequency component, and evaluates that the line profile has a low reliability evaluation value when a frequency component equal to or higher than a specific frequency is included. Can do. Here, the case where the frequency is equal to or higher than the specific frequency means data in which the line profile contains a lot of noise components, and the case where the frequency is lower than the specific frequency means data where the peak of the line profile, that is, the maximum luminance is low.

  As described above, in this embodiment, the evaluation unit 53a performs at least one of the above-described (1) to (4).

  Specifically, the evaluation unit 53a compares line profiles at the same position of the DUT 3 among the line profiles acquired by the first image sensor 22a and the second image sensor 22b. Then, the evaluation unit 53a evaluates which data (line profile) of the first image sensor 22a and the second image sensor 22b is highly reliable at the same position of the DUT 3. The evaluation result is stored in the storage unit 55.

  Based on the evaluation result stored in the storage unit 55, the processing unit 53b combines only highly reliable data based on the line profile selected from one of the first image sensor 22a and the second image sensor 22b. Thus, the point cloud data of the three-dimensional coordinate value is calculated. Then, the processing unit 53b can calculate the three-dimensional shape of the DUT 3 by using triangulation.

Next, the shape measuring apparatus 100 repeats the above steps S108 and S109 until the measurement end condition is reached in step S107. When the measurement end condition is reached, the shape measuring apparatus 100 proceeds to step S110.
The shape measuring apparatus 100 saves (stores) the point cloud data in the storage unit 55 in step S110.

  As described above, according to the shape measuring apparatus 100 according to the present embodiment, the evaluation unit 53a evaluates the line profiles acquired by the first image sensor 22a and the second image sensor 22b attached at different positions. Based on the result, the processing unit 53b includes a coordinate calculation unit 53 that selects a highly reliable line profile from either the first image sensor 22a or the second image sensor 22b. Thereby, since the three-dimensional shape of the device under test 3 can be calculated based only on the highly reliable line profile, the shape of the device under test 3 can be measured with high accuracy.

(Second Embodiment)
Subsequently, a second embodiment of the present invention will be described. The difference between the present embodiment and the first embodiment is that the evaluation unit 53a of the coordinate calculation unit 53 uses the image data captured by the first image sensor 22a and the second image sensor 22b in the short direction of the line light image. A reliability evaluation value is set for each line profile that is a light quantity distribution, and the processing unit 53b calculates the three-dimensional shape of the DUT 3 using the reliability evaluation value for weighting. The reliability evaluation value is an index indicating the reliability as data in the line profile. When the reliability evaluation value is low, it indicates invalid data, and when the reliability evaluation value is high, it is valid data. It is shown. Hereinafter, the shape calculation method by the coordinate calculation unit 53 will be described, and description of other configurations and processes that are common to the first embodiment will be omitted.

The evaluation unit 53a evaluates the items shown in the first embodiment.
For example, the evaluation unit 53a assumes that the reliability evaluation value is low for a line profile whose normal angle greatly deviates from a predetermined threshold. Further, the evaluation unit 53a assumes that the reliability evaluation value is low for a line profile whose width / height ratio greatly deviates from a predetermined range. In addition, the evaluation unit 53a assumes that the reliability evaluation value is low for a line profile that is low in objectivity, that is, greatly distorted. Further, it is assumed that the reliability evaluation value is low for a line profile whose frequency component is greatly deviated from a predetermined range.

  The processing unit 53b weights each line profile of the first imaging element 22a and the second imaging element 22b at the same position in the DUT 3 based on the reliability evaluation value stored in the storage unit 55. By combining, the point cloud data of the three-dimensional coordinate value is calculated.

The processing unit 53b weights each line profile in an arbitrary pixel column of the first image sensor 22a and the second image sensor 22b based on the reliability evaluation value.
FIG. 11 is a diagram for conceptually explaining the weighting process by the processing unit 53b. In FIG. 11, P1 indicates a line profile of the first image sensor 22a at a predetermined position, and P2 indicates a line profile of the second image sensor 22b at a predetermined position.

  In this description, a case where the processing unit 53b performs weighting based on the reliability evaluation value regarding the asymmetry of the line profile evaluated by the evaluation unit 53a will be described as an example. As illustrated in FIG. 11, the processing unit 53 b sets the weighting of the first image sensor 22 a having a large asymmetry and a low reliability evaluation value (relatively low reliability) to 0.3 so that the asymmetry is low and the reliability is low. The weighting in the second image sensor 22b having a high evaluation value (relatively high reliability) is set to 0.7.

  In this way, the processing unit 53b can synthesize the line profile at each measurement position of the DUT 3 with emphasis on the more reliable data of the first image sensor 22a and the second image sensor 22b. The point cloud data of three-dimensional coordinate values can be calculated. Then, the processing unit 53b calculates the three-dimensional shape of the object to be measured by using triangulation.

  According to this embodiment, since the evaluation unit 53a calculates a reliability evaluation value for the line profile and the processing unit 53b uses the reliability evaluation value for weighting, highly reliable point cloud data can be obtained. Therefore, the three-dimensional shape of the DUT 3 can be calculated with high accuracy.

(Third embodiment)
Subsequently, a third embodiment of the present invention will be described. The difference between the present embodiment and the first embodiment is a method of synthesizing point group data of three-dimensional coordinate values converted into an absolute coordinate system by the processing unit 53b of the coordinate calculation unit 53. In the following, the method of synthesizing point cloud data by the processing unit 53b will be mainly described, and description of other configurations and processes common to the first embodiment will be omitted.

  The point group data of the three-dimensional coordinate values after being converted into the absolute coordinate system is slightly changed due to the mounting error of the light detection unit 22 (first imaging element 22a and second imaging element 22b) and the optical system error (lens distortion, etc.). The position is shifted. On the other hand, the processing unit 53b according to the present embodiment combines pixel data in consideration of the positional deviation.

  A method of synthesizing point cloud data in the processing unit 53b in the present embodiment will be conceptually described. FIG. 12 is a diagram showing point group data of three-dimensional coordinate values converted into an absolute coordinate system. FIG. 12 shows a line profile in the YZ plane of the absolute coordinate system, and the X direction shows the luminance.

  When the positional deviation occurs, the line profiles P1 and P2 of the first image sensor 22a and the second image sensor 22b selected by the processing unit 53b shown in FIG. It has become.

  The processing unit 53b according to the present embodiment sets a rectangular area A having long sides in the width direction (short side direction) of the line light as shown in FIG. 12, and a plurality of lines existing in the area A A luminance peak value is calculated from the profile, and processing for synthesizing the peak luminance value of the region A is performed. Note that the peak luminance value may be calculated by weighting the location and luminance of each point constituting the line profile in the region A.

  The processing unit 53b sequentially moves the area A along the Y direction in the figure, and calculates the peak value of the luminance from among the plurality of line profiles P1 and P2 existing in each area A. All the point cloud data is synthesized along the length direction. Then, the processing unit 53b can calculate the three-dimensional shape of the DUT 3 by using triangulation.

  According to this embodiment, since the processing unit 53b locally synthesizes the point cloud data by setting the region A, the reliability in which the error caused by the light detection unit 22 is considered as compared with the first embodiment. It is possible to calculate highly reliable point cloud data. Therefore, the three-dimensional shape of the DUT 3 can be calculated with high accuracy.

(Fourth embodiment)
Subsequently, a fourth embodiment of the present invention will be described. The difference between the present embodiment and the first to third embodiments is that the light detection unit includes only one image sensor. Hereinafter, the configuration of the light detection unit will be mainly described, and description of other configurations and processes that are common to the above-described embodiment will be omitted.

FIG. 13 is a diagram showing a schematic configuration of the light detection unit 122 in the present embodiment.
As shown in FIG. 13, the light detection unit 122 includes only one image sensor 122a. The image sensor 122a is composed of, for example, a CCD camera having 1024 × 1024 pixels. The light detection unit 122 drives the drive unit 11 so that the image sensor 122a images the object 3 to be measured every time the line light is scanned at a predetermined interval.

  The coordinate calculation unit 53 receives image information captured by the image sensor 122 a of the light detection unit 122. In addition, the coordinate calculation unit 53 receives the six-axis coordinate information of the light cutting probe 2 supplied from the coordinate detection unit 51. The coordinate calculation unit 53 calculates the coordinates of the light irradiation unit 21 fixed to the light cutting probe 2 and the coordinates of the light detection unit 122 from the received six-axis coordinate information of the light cutting probe 2.

  Also in this embodiment, since the image sensor 122a is composed of a CCD camera having 1024 × 1024 pixels as described above, it captures an image with the longitudinal direction of the line light as the vertical direction. Therefore, the coordinate calculation unit 53 can detect a maximum of 1024 peak positions by detecting the maximum luminance position in the horizontal direction (short direction of the line light).

  As a result, in a state where the image sensor 122a alone is calibrated, the coordinate calculation unit 53 performs a correction calculation based on the calibration data from a precise horizontal pixel position in the captured image, and a probe in the light section plane. It is possible to generate three-dimensional coordinates in the coordinate system. In the present embodiment, it is assumed that the single calibration of the image sensor 122a has been completed, and the description of the details of the correction calculation contents is omitted.

  The coordinate calculation unit 53 converts the probe coordinates to absolute coordinates as described above when generating the point cloud data.

  The evaluation unit 53a according to the present embodiment evaluates the imaging result of the light detection unit 122, that is, the line profile acquired by the imaging element 122a. Further, the processing unit 53b calculates the position information of the DUT 3 by performing a predetermined process on the imaging result of the light detection unit 122 based on the evaluation result.

  Examples of the evaluation performed by the evaluation unit 53a in the present embodiment include (1) to (4) shown in the first embodiment. Specifically, the evaluation unit 53a performs evaluation (normal angle, width-to-height ratio, asymmetry, frequency, etc.) for each of the line profiles acquired by imaging by the image sensor 122a. Then, the evaluation result (that is, the result regarding whether or not the line profile is highly reliable data) is transmitted to the storage unit 55.

Based on the evaluation results stored in the storage unit 55, the processing unit 53b calculates point group data of three-dimensional coordinate values after excluding those with low reliability from the line profile of the image sensor 122a. Therefore, the processing unit 53b can calculate the three-dimensional shape of the DUT 3 with high accuracy by using triangulation.
As described above, the present invention can accurately measure the three-dimensional shape of the DUT 3 by evaluating the measurement profile of the line light even in the shape measuring apparatus including the light detecting unit 122 having only one image sensor 122a. .

(Fifth embodiment)
Next, as a fifth embodiment of the present invention, a structure manufacturing system including the shape measuring apparatus 100 according to any one of the first to fourth embodiments described above will be described.
FIG. 14 is a block configuration diagram of the structure manufacturing system 200. The structure manufacturing system 200 includes the shape measuring device 100, the design device 110, the molding device 120, the control device (inspection device) 130, and the repair device 140 described above.

The design device 110 creates design information related to the shape of the structure, and transmits the created design information to the molding device 120. In addition, the design device 110 stores the created design information in a coordinate storage unit 151 described later of the control device 150. Here, the design information is information indicating the coordinates of each position of the structure.
The molding apparatus 120 produces the structure based on the design information input from the design apparatus 110. The molding process of the molding apparatus 120 includes casting, forging, cutting, or the like.
The shape measuring apparatus 100 measures the coordinates of the manufactured structure (object to be measured), and transmits information (shape information) indicating the measured coordinates to the control device 150.

  The control device 150 includes a coordinate storage unit 151 and an inspection unit 152. As described above, design information is stored in the coordinate storage unit 151 by the design device 110. The inspection unit 152 reads design information from the coordinate storage unit 151. The inspection unit 152 compares information (shape information) indicating coordinates received from the shape measuring apparatus 100 with design information read from the coordinate storage unit 151.

The inspection unit 152 determines whether or not the structure has been molded according to the design information based on the comparison result. In other words, the inspection unit 152 determines whether or not the created structure is a non-defective product.
If the structure is not molded according to the design information, the inspection unit 152 determines whether or not the structure can be repaired. If repair is possible, the inspection unit 152 calculates a defective part and a repair amount based on the comparison result, and transmits information indicating the defective part and information indicating the repair amount to the repair device 140.

  The repair device 140 processes the defective portion of the structure based on the information indicating the defective portion received from the control device 150 and the information indicating the repair amount.

  FIG. 15 is a flowchart showing the flow of processing by the structure manufacturing system 200. First, the design apparatus 110 creates design information related to the shape of the structure (step S201). Next, the molding apparatus 120 produces the structure based on the design information (step S202). Next, the shape measuring apparatus 100 measures the shape of the manufactured structure (step S203). Next, the inspection unit 152 of the control device 150 inspects whether or not the structure is created according to the sincerity design information by comparing the shape information obtained by the shape measuring device 100 with the design information ( Step S204).

  Next, the inspection unit 152 of the control device 150 determines whether or not the created structure is a non-defective product (step S205). When the created structure is a non-defective product (step S205; YES), the structure manufacturing system 200 ends the process. On the other hand, when the created structure is not a non-defective product (step S205; NO), the inspection unit 152 of the control device 150 determines whether or not the created structure can be repaired (step S206).

  When the inspection unit 152 determines that the created structure can be repaired (step S206; YES), the repair device 140 reprocesses the structure (step S207) and returns to the process of step S103. On the other hand, when the inspection unit 152 determines that the created structure cannot be repaired (step S206; NO), the structure manufacturing system 200 ends the process. Above, the process of this flowchart is complete | finished.

  As described above, since the shape measuring apparatus 100 in the above embodiment can accurately measure the coordinates (three-dimensional shape) of the structure, the structure manufacturing system 200 determines whether the created structure is a non-defective product. Can be determined. In addition, the structure manufacturing system 200 can repair the structure by reworking the structure when the structure is not a good product.

  As mentioned above, although embodiment which concerns on this invention was described, this invention is not limited to the said embodiment, In the range which does not deviate from the meaning of invention, it can change suitably. For example, in the above-described embodiment, the object to be measured is irradiated with line-shaped pattern light, and scattered light is received by the pattern light irradiated to the object to be measured. The case where a three-dimensional shape is detected has been described as an example. The present invention can also be applied to a configuration in which a light beam that forms a spot-like pattern is irradiated when the surface of the object to be measured is irradiated, and scattered light from the light beam irradiated to the object to be measured is received from an angle different from the irradiation direction. It is. Here, the spot-shaped light is not limited to the circular shape of the light irradiated on the surface of the DUT 3, but includes an island shape having a long side and a short side. .

  A spot-like pattern (hereinafter referred to as spot light) is formed as an image of a spot-like pattern (hereinafter referred to as spot light image) on the CMOS sensor 251, and the CMOS sensor 251 is a spot light image on the CMOS sensor 251. The position of is detected. The shape measuring apparatus 100 scans the light beam and irradiates the surface of the object to be measured 3 to detect the position of each spot light image. Then, the shape measuring apparatus 100 calculates the height of the surface of the object 3 to be measured from the reference plane using the principle of triangulation at the position of the detected spot light image, and the three-dimensional shape of the surface of the object 3 to be measured. Ask for. When using the light cutting method, the spot pattern is scanned and each spot-like pattern is scanned in one direction in a short period, so that the line-like pattern is projected onto the object to be measured. Irradiate to be equivalent. In this way, the light beam scanned in a short period in one direction is sequentially moved in a direction perpendicular to the one direction so that a spot-like pattern is formed over the entire measurement region of the measurement object. Is projected.

  The present invention can perform the above-described evaluation on the line profile of each spot light in the direction in which the object to be measured is moved in the light cutting method using the spot light. In this way, the three-dimensional shape of the object to be measured can be accurately calculated by excluding the spot light data with low reliability.

  Moreover, in the said embodiment, although the case where a three-dimensional shape was measured by scanning pattern light with respect to the whole region of the measurement surface in a to-be-measured object, this invention is one place of the measurement surface of a to-be-measured object. It can be applied to the case where the cross-sectional shape at an arbitrary position of the object to be measured, that is, the two-dimensional shape, is measured by irradiating the pattern light on. According to this configuration, since data of measurement points with low reliability is removed, the cross-sectional shape (two-dimensional shape) of the object to be measured can be calculated with high accuracy.

  In the above embodiment, the mode in which the direction of the light cutting probe 2 is changed using the rotating mechanism 13 including the first rotating shaft 131, the second rotating shaft 132, and the third rotating shaft 133 has been described. A form for rotating the table for fixing the measurement object 3 may be used.

DESCRIPTION OF SYMBOLS 3 ... Measured object, 21 ... Light irradiation part, 22 ... Light detection part, 22a ... 1st image sensor, 22b ... 2nd image sensor, 53a ... Evaluation part, 53b ... Processing part, 100 ... Shape measuring apparatus, 122a ... Image sensor, 200 ... structure manufacturing system, A ... area

Claims (18)

An illumination unit that forms pattern light having a predetermined light amount distribution on the object to be measured;
An imaging unit including an imaging element that captures an image of the pattern light irradiated on the measurement object from a direction different from an irradiation direction of the light irradiated on the measurement object;
An evaluation unit that evaluates an imaging signal of the image;
A processing unit that calculates position information of the object to be measured by performing a predetermined process on the imaging result of the imaging unit based on the evaluation result of the evaluation unit;
A shape measuring apparatus comprising:   The evaluation unit is an image acquired by the imaging unit using an imaging signal from the pixel corresponding to a predetermined direction of the pattern light among imaging signals of the pattern light image captured by each pixel of the imaging element. The shape measuring apparatus according to claim 1, wherein data is evaluated.   The shape measuring apparatus according to claim 2, wherein the evaluation unit evaluates the reliability of the image data based on an intensity of the pattern light image in the image data.   4. The shape measuring apparatus according to claim 2, wherein the evaluation unit evaluates reliability of the image data based on a ratio between a width and a height of the pattern light image in the image data. .   5. The evaluation unit according to claim 2, wherein the evaluation unit evaluates the reliability of the image data based on asymmetry of a brightness distribution shape in the image of the pattern light in the image data. The shape measuring device according to item.   The shape evaluation apparatus according to claim 2, wherein the evaluation unit evaluates reliability of the image data based on a frequency of the image data. The imaging unit includes a plurality of the imaging elements,
The evaluation unit compares the image data at the same measurement position of the object to be measured in each of the imaging elements, and selects one data from the plurality of pixel data based on a preset evaluation criterion. The shape measuring apparatus according to any one of claims 2 to 6, wherein   The shape measuring apparatus according to claim 7, wherein the processing unit calculates position information of the object to be measured by synthesizing an image of the pattern light in the selected image data. The imaging unit includes a plurality of the imaging elements,
The evaluation unit compares the image data at the same measurement position of the measurement object in each of the imaging elements,
The processing unit weights the image data of the imaging elements based on the comparison result of the evaluation unit, and calculates the position information of the object to be measured by combining the image data based on the weighting. The shape measuring apparatus according to any one of claims 2 to 6, wherein   The said processing part converts the positional information obtained from the said image data of each said image pick-up element into an absolute coordinate system, and synthesize | combines the said positional information in this absolute coordinate system. The shape measuring apparatus described.   The processing unit sequentially calculates a peak value of the image data included in the synthesis area in each of the synthesis areas while sequentially moving a synthesis area including the plurality of image data in the absolute coordinate system. The shape measuring apparatus according to claim 10, wherein synthesis is performed.   The said illumination part forms the said strip | belt-shaped pattern light, The said evaluation part evaluates the said image data which shows the luminance distribution in the transversal direction of the said pattern light, The any one of Claims 2-11 characterized by the above-mentioned. The shape measuring device described in 1. A shape measuring method executed by a shape measuring apparatus,
An irradiation procedure for forming a pattern light by irradiating the object to be measured with light having a predetermined light amount distribution from the illumination unit,
An imaging procedure for capturing an image of the pattern light irradiated on the object to be measured from a direction different from an irradiation direction on which the light is irradiated on the object to be measured;
An evaluation procedure for evaluating the imaging signal of the image;
A processing procedure for calculating position information of the object to be measured by performing a predetermined process on the imaging result of the imaging procedure based on the evaluation result;
A shape measuring method characterized by comprising:   The evaluation procedure evaluates image data acquired by using an imaging signal corresponding to a predetermined direction of the pattern light among the imaging signals of the pattern light captured by the imaging device. The shape measuring method described. A design process for creating design information on the shape of the structure;
A molding process for producing the structure based on the design information;
A measuring step of measuring the shape of the manufactured structure using the shape measuring method according to claim 14;
An inspection process for comparing the shape information obtained in the measurement process with the design information;
A method for producing a structure characterized by comprising:   The method for manufacturing a structure according to claim 15, further comprising a repair process that is executed based on a comparison result of the inspection process and performs reworking of the structure.   The method of manufacturing a structure according to claim 16, wherein the repairing step is a step of re-executing the forming step. A design device for creating design information on the shape of the structure;
A molding apparatus for producing the structure based on the design information;
The shape measuring device according to any one of claims 1 to 12, wherein the shape of the manufactured structure is measured based on a captured image;
An inspection device for comparing the shape information obtained by the measurement with the design information;
Structure manufacturing system including.

Images