JP2013004158A - Semiconductor storage device and refresh control method thereof - Google Patents

Semiconductor storage device and refresh control method thereof Download PDF

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JP2013004158A
JP2013004158A JP2011137512A JP2011137512A JP2013004158A JP 2013004158 A JP2013004158 A JP 2013004158A JP 2011137512 A JP2011137512 A JP 2011137512A JP 2011137512 A JP2011137512 A JP 2011137512A JP 2013004158 A JP2013004158 A JP 2013004158A
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refresh
plate
access frequency
counter circuit
semiconductor device
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Sanenari Arai
実成 荒井
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Micron Memory Japan Ltd
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Elpida Memory Inc
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Abstract

PROBLEM TO BE SOLVED: To increase the frequency of refresh operation of a plate that is frequently accessed.SOLUTION: A semiconductor device comprises: a disturb counter circuit that detects access frequencies to plates and outputs an activation signal when an access frequency exceeds a predetermined threshold value; and a refresh counter circuit that outputs a refresh interruption signal for a plate with an access frequency exceeding the predetermined threshold value when the activation signal is detected at an auto-refresh command.

Description

本発明は、アクセス頻度の高いプレートに対してリフレッシュを割り込むための構成を備える半導体装置及びそのリフレッシュ制御方法に関する。   The present invention relates to a semiconductor device having a configuration for interrupting refresh to a frequently accessed plate and a refresh control method thereof.

ダイナミックRAMなどの半導体記憶装置においては、電荷をコンデンサに保持することでデータ情報を記憶している。このデータ情報の劣化を回復させるために再び記憶し直すリフレッシュ動作が必要となる。   In a semiconductor memory device such as a dynamic RAM, data information is stored by holding electric charge in a capacitor. In order to recover the deterioration of the data information, a refresh operation for re-storing is required.

特許文献1は、複数のメモリブロックを備えた半導体装置を開示する。各メモリブロックは、メモリセルアレイ、I/Oゲート、駆動回路、列デコーダ、行デコーダなどを有し、入力端子1から入力されるアドレス信号が動作ブロック選択回路2、列アドレスバッファ3、及び行アドレスバッファ4に与えられる。この動作ブロック選択回路2からのブロック選択信号によりいずれかのメモリブロックが選択される。入力された入力列アドレス信号が列アドレスバッファ3から列デコーダに与えられ、列デコーダは列アドレス信号に応じて列アドレスを指定する。入力された行アドレス信号が行アドレスバッファ4から行デコーダに与えられ、行デコーダは行アドレス信号に応じてワード線を活性化する。このような半導体装置では、ディスターブリフレッシュ試験と呼ばれる試験を行い、メモリセルの不良を発見している。   Patent Document 1 discloses a semiconductor device including a plurality of memory blocks. Each memory block has a memory cell array, an I / O gate, a drive circuit, a column decoder, a row decoder, etc., and an address signal input from the input terminal 1 is an operation block selection circuit 2, a column address buffer 3, and a row address. Provided to buffer 4. One of the memory blocks is selected by the block selection signal from the operation block selection circuit 2. The inputted input column address signal is given from the column address buffer 3 to the column decoder, and the column decoder designates a column address according to the column address signal. The input row address signal is applied from the row address buffer 4 to the row decoder, and the row decoder activates the word line in response to the row address signal. In such a semiconductor device, a test called a disturb refresh test is performed to find a memory cell defect.

近年、プロセスの微細化に伴い、隣接ワード線のディスターブの影響が無視できない状態となっている。上述のような半導体装置においては、読み出し、書き込み動作を繰り返している間に、非選択セルのデータが反転するというデータディスターブの問題がある。つまり、データディスターブとは、メモリセル中にある特定のワード線に書き込み、読み出しのための電圧を加えると、その電圧が選択された行および列につながっている隣接セル(非選択セル)にも僅かな影響を与え、その動作を繰り返している間に、僅かな影響の積み重ねで選択されたセル以外のセルの情報が反転する現象をいう。例えば、データ書込み時に、選択ワード線に接続された非選択メモリセルのデータが劣化する場合がある。   In recent years, with the miniaturization of processes, the influence of disturbing adjacent word lines cannot be ignored. In the semiconductor device as described above, there is a problem of data disturbance in which data of a non-selected cell is inverted while reading and writing operations are repeated. In other words, data disturb means that when a voltage for writing and reading is applied to a specific word line in a memory cell, the voltage is applied to adjacent cells (non-selected cells) connected to the selected row and column. This is a phenomenon in which the information of cells other than the selected cell is inverted due to the accumulation of slight influences while giving a slight influence and repeating the operation. For example, when data is written, data in unselected memory cells connected to the selected word line may deteriorate.

特開平07−105698号公報Japanese Patent Laid-Open No. 07-105698

そのため、半導体装置では、メモリセルの論理データの劣化を回復させるリフレッシュ動作を頻繁に実行しなければならず、リフレッシュビジー率が増大する。リフレッシュビジー率の増大は、通常の読み出し、書き込み動作を妨げる原因となり、消費電流の増大の原因となる。   Therefore, in the semiconductor device, the refresh operation for recovering the deterioration of the logical data of the memory cell must be frequently executed, and the refresh busy rate increases. An increase in the refresh busy rate is a cause of hindering normal read / write operations and an increase in current consumption.

また、リフレッシュを行う際に、ワード線単位では生後は回路的に非常に困難であり、回路が複雑になってしまう。   Further, when performing refresh, it is very difficult to make a circuit in terms of a word line unit after birth, and the circuit becomes complicated.

本発明者らは、上記従来技術の欠点を解消してディスターブによる耐性を上げることを目的として鋭意研究を重ねた結果、アクセス頻度が高いプレート(PLT)にはディスターブされているワード線が存在する確立が高いという見地から、プレートのアクセス頻度を検出して、当該アクセス頻度高のプレートのリフレッシュ頻度を上げる構成を採用し、かつプレート単位での制御により構成することで、回路的な簡易化も図ることを可能にしながら、ディスターブによる影響が低減できることを発見し、この知見に基づく発明を完成するに至った。   As a result of intensive research aimed at eliminating the drawbacks of the prior art and increasing the resistance due to disturbance, the present inventors have found that there is a disturbed word line on a plate (PLT) with high access frequency. From the standpoint of high establishment, it is possible to simplify the circuit by adopting a configuration that detects the access frequency of the plate, increases the refresh frequency of the plate with the high access frequency, and controls by the plate unit. It was discovered that the influence of disturb could be reduced while making it possible to achieve the plan, and the invention based on this finding was completed.

本発明は、リフレッシュ頻度をプレート単位で変化させることでディスターブによる影響を低減できる技術を提供することを目的とする。   An object of this invention is to provide the technique which can reduce the influence by a disturbance by changing refresh frequency per plate.

上述の課題に鑑み、本発明の一態様は、メモリ動作中にメモリセルに書き込まれた記憶データのリフレッシュ動作を行う半導体装置において、半導体装置はプレートへのアクセス頻度を検出し、該アクセス頻度が所定の閾値を超えたときに活性信号を出力するディスターブカウンタ回路と、オートリフレッシュコマンド時に前記活性信号を検出すると、前記アクセス頻度が所定の閾値以上のプレートについてのリフレッシュ割り込み信号を出力するリフレッシュカウンタ回路と、を備え、前記リフレッシュ割り込み信号に応じて、前記プレートのリフレッシュ動作が他のプレートのリフレッシュ動作よりも多く行われる半導体装置に関する。   In view of the above problems, according to one embodiment of the present invention, in a semiconductor device that performs a refresh operation of stored data written in a memory cell during a memory operation, the semiconductor device detects the access frequency to the plate, and the access frequency is A disturb counter circuit that outputs an activation signal when a predetermined threshold is exceeded, and a refresh counter circuit that outputs a refresh interrupt signal for a plate whose access frequency is equal to or higher than the predetermined threshold when the activation signal is detected during an auto-refresh command And, in response to the refresh interrupt signal, a refresh operation of the plate is performed more frequently than refresh operations of other plates.

更に本発明の他の態様は、メモリセルに書き込まれた記憶データのリフレッシュ制御方法において、プレートへのアクセス頻度を検出して該アクセス頻度が所定の閾値を超えたときに活性信号を出力し、オートリフレッシュコマンド時に活性信号を検出するとアクセス頻度が所定の閾値以上のプレートについてのリフレッシュ割り込み信号を出力し、リフレッシュ割り込み信号に応じてプレートのリフレッシュ動作が他のプレートのリフレッシュ動作よりも多く行うリフレッシュ制御方法に関する。   Furthermore, another aspect of the present invention provides a refresh control method for storage data written in a memory cell, and detects an access frequency to a plate and outputs an activation signal when the access frequency exceeds a predetermined threshold value. Refresh control that outputs a refresh interrupt signal for a plate whose access frequency is equal to or higher than a predetermined threshold when an active signal is detected during an auto-refresh command, and performs a refresh operation of the plate more frequently than a refresh operation of other plates in response to the refresh interrupt signal Regarding the method.

本発明によれば、リフレッシュ頻度を変化することでディスターブによる影響が低減され、半導体装置のディスターブによる耐性を向上できる。   According to the present invention, the influence of disturbance is reduced by changing the refresh frequency, and the tolerance of the semiconductor device due to disturbance can be improved.

また、本発明の実施形態によれば、アクセス頻度が高いプレートのリフレッシュ(REF)動作を約2倍化し、ディスターブ特性を改善できる。   Further, according to the embodiment of the present invention, the refresh (REF) operation of a plate having a high access frequency can be approximately doubled to improve the disturb characteristic.

本発明の更なる利点及び実施形態を、記述と図面を用いて下記に詳細に説明する。   Further advantages and embodiments of the present invention are described in detail below using the description and the drawings.

本発明の実施形態によるディスターブカウンタ回路とリフレッシュカウンタ回路の概略図を示す。1 shows a schematic diagram of a disturb counter circuit and a refresh counter circuit according to an embodiment of the present invention. FIG. 本発明の実施形態によるリフレッシュ動作を説明するためのタイミング図である。FIG. 6 is a timing diagram illustrating a refresh operation according to an embodiment of the present invention.

以下、本発明の好ましい実施形態に従う半導体装置及びそのリフレッシュ方法について、添付図面を参照しつつ詳しく説明する。但し、以下に説明する実施形態によって本発明の技術的範囲は何ら限定解釈されることはない。   Hereinafter, a semiconductor device and a refresh method thereof according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the technical scope of the present invention is not construed as being limited by the embodiments described below.

まず、本発明が対象とするDRAMの一般構成を説明する。DRAMは、メモリセルアレイと、セルアレイ周辺に配置されるセンスアンプ、Xデコーダ、Yデコーダと、制御信号用のアドレスバッファ、入出力インターフェース、コマンドバッファ&デコーダ、データ回路等から構成される。上記メモリセルアレイは、バンク単位で配置され、各バンクはそれぞれのバンク制御回路を備える。   First, a general configuration of a DRAM targeted by the present invention will be described. The DRAM includes a memory cell array, sense amplifiers, X decoders, Y decoders arranged around the cell array, an address buffer for control signals, an input / output interface, a command buffer & decoder, a data circuit, and the like. The memory cell array is arranged in units of banks, and each bank has a bank control circuit.

上記バンクは、外部とのデータ入出力は共通であるが、それぞれのバンク制御回路により個別に内部動作が可能(例えば、バンク単位に同時にリフレッシュ可能)である。バンクには、Xデコーダ、Yデコーダ、センスアンプ、セルアレイなどが含まれる。また、バンクは、さらに複数のサブブロック(プレート)から構成され、デコーダも分割、階層化され得る。なお、バンクの構成はかかる構成に制限されるものでないことは勿論である。また、本発明においてプレートとは、メモリセルアレイバンクを複数のサブブロックに分割したものをいう。   The above-described banks share the same data input / output with the outside, but can individually perform internal operations (for example, can be refreshed in units of banks) by each bank control circuit. The bank includes an X decoder, a Y decoder, a sense amplifier, a cell array, and the like. The bank is further composed of a plurality of sub-blocks (plates), and the decoder can be divided and hierarchized. Of course, the configuration of the bank is not limited to such a configuration. In the present invention, a plate means a memory cell array bank divided into a plurality of sub-blocks.

図1に示すように、本発明の実施形態においてDRAMは、所定の閾値以上のアクセス頻度があった場合に“Hi”のプレートディスターブ情報信号(PLTDIST)を出力するディスターブカウンタ回路10と、プレートに対するリフレッシュ割り込み信号(REFADD)を出力するリフレッシュカウンタ回路20とを備えている。本発明の実施形態では、DRAMのプレート毎にディスターブカウンタ回路10とリフレッシュカウンタ回路20が用意され、各プレートのリフレッシュ動作が個別に制御される。アクセス頻度は、プレートにおけるワード線に対する書き込み電圧の印加回数によりカウントされる。   As shown in FIG. 1, in the embodiment of the present invention, the DRAM includes a disturb counter circuit 10 that outputs a “Hi” plate disturb information signal (PLTDIST) when there is an access frequency equal to or higher than a predetermined threshold, and a plate. And a refresh counter circuit 20 that outputs a refresh interrupt signal (REFADD). In the embodiment of the present invention, a disturb counter circuit 10 and a refresh counter circuit 20 are prepared for each plate of the DRAM, and the refresh operation of each plate is individually controlled. The access frequency is counted by the number of application of the write voltage to the word line on the plate.

本発明の実施形態によるDRAMは、メモリセルにおけるコンデンサに電荷の形態でデータ情報を記憶している。この電荷がリーク電流やディスターブにより減少した場合、その記憶情報が損なわれる。そのため、コンデンサからのデータ消失を防ぐために、一定間隔毎に電荷を再チャージするリフレッシュ動作(再書き込み動作)を必要とする。   A DRAM according to an embodiment of the present invention stores data information in the form of electric charges in a capacitor in a memory cell. If this charge is reduced by leakage current or disturbance, the stored information is lost. Therefore, in order to prevent data loss from the capacitor, a refresh operation (rewrite operation) for recharging the charge at regular intervals is required.

リフレッシュ動作には、オートリフレッシュモードとセルフリフレッシュモードがある。オートリフレッシュモードでは、メモリコントローラからDRAMに対してコマンドを発行すると、DRAMの内部にあるリフレッシュカウンタが示す行アドレスに対してリフレッシュ動作を行う。データを保持するためには、リフレッシュサイクル内に全てのロウアドレスに対してDRAMのリフレッシュ動作を行う必要がある。   The refresh operation includes an auto refresh mode and a self refresh mode. In the auto refresh mode, when a command is issued from the memory controller to the DRAM, a refresh operation is performed on a row address indicated by a refresh counter in the DRAM. In order to retain data, it is necessary to perform a DRAM refresh operation for all row addresses within a refresh cycle.

本発明の実施形態において、ディスターブカウンタ回路10は、検出したプレート選択信号(PLTm選択信号)の頻度をディスターブカウンタ回路10内でカウントし、その頻度が所定の閾値以上の回数を超えた場合には、リフレッシュカウンタ回路20へプレートディスターブ情報信号(PLTDIST)を出力する。また、ディスターブカウンタ回路10は、リセット信号(RSTm)によりそのカウンタ値がリセットされる。   In the embodiment of the present invention, the disturb counter circuit 10 counts the frequency of the detected plate selection signal (PLTm selection signal) in the disturb counter circuit 10 and when the frequency exceeds the predetermined threshold value or more. The plate disturb information signal (PLTDIST) is output to the refresh counter circuit 20. The counter value of the disturb counter circuit 10 is reset by a reset signal (RSTm).

リフレッシュカウンタ回路20は、外部からオートリフレッシュ信号(AREF)と、ディスターブカウンタ回路10からのプレートディスターブ情報信号を受け、後段へのリフレッシュ割り込み信号(REFADD)を出力する。また、リフレッシュカウンタ回路20は、リセット信号により初期化される。   The refresh counter circuit 20 receives an auto-refresh signal (AREF) and a plate disturb information signal from the disturb counter circuit 10 from the outside, and outputs a refresh interrupt signal (REFADD) to the subsequent stage. The refresh counter circuit 20 is initialized by a reset signal.

次に、図2を参照しながら本発明の実施形態による半導体装置のリフレッシュ制御方法を説明する。   Next, a refresh control method for a semiconductor device according to an embodiment of the present invention will be described with reference to FIG.

本発明の実施形態において、オートリフレッシュは、製品や容量によって異なるが、例えば64msなどのtREF期間中に4K〜16K回実施される。   In the embodiment of the present invention, auto refresh is performed 4K to 16K times during a tREF period of, for example, 64 ms, depending on the product and capacity.

本発明の実施形態では、オートリフレッシュの際に、各ディスターブカウンタ回路は、自プレートへのプレート(PLTm)選択信号をカウントする。カウント値がN回以上あった場合には、ディスターブカウンタ回路10の出力するプレートディスターブ情報信号は“Hi”となる。そして、プレートが切り替わるオートリフレッシュのコマンド時にリフレッシュカウンタ回路20の出力するリフレッシュ割り込み信号に応じた該当プレートに対するリフレッシュコマンドが割り込まれる。プレートにおけるディスターブ回数を示すカウント値がN回に達しなかった場合には、自プレートに対するリフレッシュ動作が開始された段階でディスターブカウンタ回路10のカウンタ値がリセットされる。これにより、自プレートのリフレッシュ動作までに当該プレートにN回以上のアクセスがあった場合にのみ、該プレートのリフレッシュ割り込みが入る。割り込みが入った分だけ、割り込みがないプレートに対してはリフレッシュ期間が延びてしまうので、通常のディスターブが多くない状態でのリフレッシュ実力は確保する必要がある。   In the embodiment of the present invention, at the time of auto refresh, each disturb counter circuit counts a plate (PLTm) selection signal to its own plate. When the count value is N times or more, the plate disturb information signal output from the disturb counter circuit 10 is “Hi”. Then, the refresh command for the corresponding plate is interrupted according to the refresh interrupt signal output from the refresh counter circuit 20 at the time of the auto refresh command for switching the plate. When the count value indicating the number of disturbances in the plate has not reached N times, the counter value of the disturb counter circuit 10 is reset when the refresh operation for the own plate is started. As a result, only when the plate has been accessed N times or more before the refresh operation of the plate itself, a refresh interrupt for the plate is entered. Since the refresh period is extended for the plate without interruption by the amount of interruption, it is necessary to secure the refresh ability in a state where there are not many normal disturbances.

続いて、図2に示す本発明の実施形態による半導体装置の具体的なタイミング例について説明する。以下においては、メモリセルアレイバンクが16個のプレートを有する半導体装置について例示的に説明する。タイミング例は、16個のプレート(PLT0〜15)があるメモリ構成において、例えばPLT5とPLT12の特定のプレートにディスターブが集中している場合を想定したタイミングチャートである。   Next, a specific timing example of the semiconductor device according to the embodiment of the present invention shown in FIG. 2 will be described. In the following, a semiconductor device in which the memory cell array bank has 16 plates will be described as an example. The timing example is a timing chart assuming a case where disturbances are concentrated on specific plates of PLT5 and PLT12 in a memory configuration having 16 plates (PLT0 to 15).

初期化でのリセット(RESET)信号により、ディスターブカウンタ回路10とリフレッシュカウンタ回路20をリセットする。その後各プレートのディスターブ回数がカウントされ、PLT12の回数がPLT6をリフレッシュしている期間において、N回のディスターブ回数を超えたため、PLT12についてのプレートディスターブ情報信号(PLTDIST12)が“Hi”となる。この“Hi”を受けて、次プレートのPLT7のリフレッシュ開始時にPLT12のリフレッシュが割り込まれる。この割り込みによりリセット(RST12)が“Hi”となり、PLT12用のディスターブカウンタ回路10はリセットされる。   The disturb counter circuit 10 and the refresh counter circuit 20 are reset by a reset (RESET) signal at initialization. Thereafter, the number of times of disturb of each plate is counted, and since the number of times of PLT 12 has refreshed PLT 6, the number of times of disturb exceeds N times. Therefore, the plate disturb information signal (PLTDIST 12) for PLT 12 becomes “Hi”. In response to this “Hi”, the refresh of the PLT 12 is interrupted when the refresh of the PLT 7 of the next plate is started. By this interruption, the reset (RST12) becomes “Hi”, and the disturb counter circuit 10 for PLT12 is reset.

PLT5側はPLT5のリフレッシュ動作により、PLT5用のディスターブカウンタがリセットされた後、PLT11のリフレッシュ期間中にPLT5のアクセス回数がN回を超えて、PLT5についてのプレートディスターブ情報信号(PLTDIST5)が“Hi”となり、次リフレッシュプレートであるPLT12のリフレッシュ開始時にPLT5のリフレッシュが割り込まれる。この割り込みによりリセット(RST5)が“Hi”となり、PLT5用ディスターブカウンタ回路10はリセットされる。同様な形で各プレートに対してN回のアクセス回数検出が行われる。   On the PLT 5 side, after the disturb counter for PLT 5 is reset by the refresh operation of PLT 5, the number of accesses of PLT 5 exceeds N times during the refresh period of PLT 11, and the plate disturb information signal (PLTDIST 5) for PLT 5 becomes “Hi. "", The refresh of PLT 5 is interrupted at the start of refresh of PLT 12 which is the next refresh plate. By this interruption, reset (RST5) becomes "Hi", and the disturb counter circuit 10 for PLT5 is reset. In a similar manner, N times of access detection are performed for each plate.

図2のタイミングチャートにおいて、PLT3、4、6に着目すると次リフレッシュまでに、4回の割り込みが入っていることになる。この割り込み回数については、Nの値を変化させることで所望の回数に調整できる。例えば、Nの値を変化させてリフレッシュ動作を通常の2倍にすることができる。   In the timing chart of FIG. 2, when attention is paid to PLTs 3, 4, and 6, there are four interrupts before the next refresh. The number of interruptions can be adjusted to a desired number by changing the value of N. For example, the refresh operation can be doubled by changing the value of N.

以上により、アクセス頻度が高いプレートについては、リフレッシュ頻度を多くすることが可能であり、当該プレートで存在する可能性が高い、ディスターブされているワード線のリフレッシュ回数を増やすことができる。それゆえに、半導体装置のディスターブに対する耐性が強化される。   As described above, it is possible to increase the refresh frequency for a plate having a high access frequency, and it is possible to increase the number of refreshes of a disturbed word line that is highly likely to exist in the plate. Therefore, the resistance of the semiconductor device to disturbance is enhanced.

10 ディスターブカウンタ回路
20 リフレッシュカウンタ回路
PLT プレート(サブブロック)
REFRESH リフレッシュ信号
PLTDIST プレートディスターブ情報信号
AREF オートリフレッシュ信号
RSTm リセット信号
RESET リセット信号
REFADD リフレッシュ割り込み信号
10 disturb counter circuit 20 refresh counter circuit PLT plate (sub block)
REFRESH refresh signal PLTDIST plate disturb information signal AREF auto refresh signal RSTm reset signal RESET reset signal REFADD refresh interrupt signal

Claims (5)

メモリ動作中にメモリセルに書き込まれた記憶データのリフレッシュ動作を行う半導体装置において、
プレートへのアクセス頻度を検出し、該アクセス頻度が所定の閾値を超えたときに活性信号を出力するディスターブカウンタ回路と、
オートリフレッシュコマンド時に前記活性信号を検出すると、前記アクセス頻度が所定の閾値以上のプレートについてのリフレッシュ割り込み信号を出力するリフレッシュカウンタ回路と、を備え、
前記リフレッシュ割り込み信号に応じて、前記プレートのリフレッシュ動作が他のプレートのリフレッシュ動作よりも多く行われることを特徴とする半導体装置。
In a semiconductor device that performs a refresh operation of stored data written in a memory cell during a memory operation,
A disturb counter circuit for detecting an access frequency to the plate and outputting an activation signal when the access frequency exceeds a predetermined threshold;
A refresh counter circuit that outputs a refresh interrupt signal for a plate whose access frequency is equal to or higher than a predetermined threshold when the activation signal is detected during an auto-refresh command,
In accordance with the refresh interrupt signal, the semiconductor device is characterized in that the refresh operation of the plate is performed more frequently than the refresh operation of other plates.
前記ディスターブカウンタ回路と前記リフレッシュカウンタ回路は、プレート毎に設けられていることを特徴とする請求項1に記載の半導体装置。   The semiconductor device according to claim 1, wherein the disturb counter circuit and the refresh counter circuit are provided for each plate. 前記プレートへのアクセス頻度は、該プレートにおけるワード線に対する書き込み電圧の印加回数によりカウントされることを特徴とする請求項1又は2に記載の半導体装置。   3. The semiconductor device according to claim 1, wherein the access frequency to the plate is counted by the number of times of applying a write voltage to a word line in the plate. 前記所定の閾値は、前記プレートに対するリフレッシュ動作を2倍化する値に設定されることを特徴とする請求項1乃至3の何れか一項に記載の半導体装置。   4. The semiconductor device according to claim 1, wherein the predetermined threshold is set to a value that doubles a refresh operation for the plate. メモリセルに書き込まれた記憶データのリフレッシュ制御方法において、
プレートへのアクセス頻度を検出して該アクセス頻度が所定の閾値を超えたときに活性信号を出力し、オートリフレッシュコマンド時に前記活性信号を検出すると前記アクセス頻度が所定の閾値以上のプレートについてのリフレッシュ割り込み信号を出力し、前記リフレッシュ割り込み信号に応じて前記プレートのリフレッシュ動作が他のプレートのリフレッシュ動作よりも多く行うことを特徴とするリフレッシュ制御方法。
In a refresh control method for stored data written in a memory cell,
An activation signal is output when the access frequency to the plate is detected and the access frequency exceeds a predetermined threshold, and when the activation signal is detected at the time of an auto-refresh command, refreshing is performed for a plate whose access frequency is equal to or higher than the predetermined threshold. A refresh control method, comprising: outputting an interrupt signal, and performing a refresh operation of the plate more frequently than refresh operations of other plates in response to the refresh interrupt signal.
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