JP2012134397A - Optical device module - Google Patents

Optical device module Download PDF

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JP2012134397A
JP2012134397A JP2010286683A JP2010286683A JP2012134397A JP 2012134397 A JP2012134397 A JP 2012134397A JP 2010286683 A JP2010286683 A JP 2010286683A JP 2010286683 A JP2010286683 A JP 2010286683A JP 2012134397 A JP2012134397 A JP 2012134397A
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optical device
substrate
device module
recess
electrode
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Keiichiro Hayashi
恵一郎 林
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Seiko Instruments Inc
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Seiko Instruments Inc
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Abstract

PROBLEM TO BE SOLVED: To enhance reliability and productivity of an optical device module where an optical device element is mounted on a glass material.SOLUTION: A lightweight, thin and compact optical device module exhibiting excellent optical noise resistance against such as light entering from the back of a mounting substrate can be obtained by fitting at least a part of an optical device element in a recess having a shape larger than that of the optical device element and a depth larger than the thickness of the optical element. Consequently, preparation after mounting is not required substantially, and the manufacturing process can be simplified significantly.

Description

本発明は、光学デバイス素子をパッケージに実装した光学デバイスモジュールの構造に関する。   The present invention relates to a structure of an optical device module in which an optical device element is mounted on a package.

従来、透明部材を直接貼り付けた構成の光学デバイスモジュールは、有効受光領域の周囲に複数の突起電極が形成された光学デバイス素子と、電極パターンが形成された光学ガラス板とから構成されている。そして、光学ガラス板の電極パターン形成面の中央に、光学デバイス素子の有効受光領域を除く周辺領域が接合材料を介して接合されるとともに、電極パターンの一端が突起電極に電気的に接続されている。なお、配線パターンの他端側は外部接続用電極としている構成が開示されている(例えば、特許文献1参照。)。   Conventionally, an optical device module having a structure in which a transparent member is directly attached is composed of an optical device element in which a plurality of protruding electrodes are formed around an effective light receiving region, and an optical glass plate on which an electrode pattern is formed. . Then, in the center of the electrode pattern forming surface of the optical glass plate, the peripheral region except the effective light receiving region of the optical device element is bonded via a bonding material, and one end of the electrode pattern is electrically connected to the protruding electrode. Yes. Note that a configuration in which the other end side of the wiring pattern is an external connection electrode is disclosed (for example, see Patent Document 1).

特開昭63−242072号公報Japanese Patent Laid-Open No. Sho 63-242072

しかしながら、このような従来の光学デバイスモジュールの構成においては、光学ガラス板の電極パターンの一端と光学デバイス素子上の電極をフリップチップ方式で接合するための突起電極が、光学デバイス素子上の電極に形成されている。   However, in such a configuration of the conventional optical device module, the protruding electrode for joining one end of the electrode pattern of the optical glass plate and the electrode on the optical device element by the flip chip method is formed on the electrode on the optical device element. Is formed.

このため、従来の光学デバイスモジュールの構成では、光学デバイス素子が接続される配線基板に貫通開口が形成されている。この配線基板に光学デバイス素子を接続した場合、配線基板の裏面に配線を設けることが出来ず、光学デバイスモジュールの高密度化を妨げる。さらに、配線基板に光学デバイス素子を接合したままでは貫通開口背面から光が入射し光学特性を損ねるために、配線基板の背面から貫通開口内部を遮光性樹脂で充填する構成としているが、製造工程が煩雑で、部品点数も多くなり低コスト化を妨げるという課題を有する。   For this reason, in the structure of the conventional optical device module, the through-opening is formed in the wiring board to which the optical device element is connected. When an optical device element is connected to this wiring board, wiring cannot be provided on the back surface of the wiring board, which hinders high density of the optical device module. Furthermore, the optical device element is still bonded to the wiring board, so that light enters from the back of the through-opening and impairs the optical characteristics, so that the inside of the through-opening is filled with a light-shielding resin from the back of the wiring board. However, it has a problem that the number of parts increases and the cost reduction is hindered.

本発明は、このような従来の課題を解決するもので、製造歩留りと光学特性に優れ、軽量で、薄型・小型の光学デバイスモジュールを提供することを目的とする。   An object of the present invention is to solve such a conventional problem and to provide an optical device module which is excellent in manufacturing yield and optical characteristics, is lightweight, is thin and small.

上記従来の課題を解決するために、本発明の光学デバイスは、受光領域または発光領域と突起電極とが光学機能面に設けられた光学デバイス素子と、前記光学デバイス素子よりも広い面積を有し、前記光学デバイス素子に電気的に接続する電極および外部接続用電極が形成されている透明部材と、を備え、前記光学デバイス素子の前記光学機能面と、前記透明部材の前記電極形成面とは対向しており、前記突起電極と前記電極とが金属接合されていることによって電気的な接続が保持されている構成からなる。   In order to solve the above-described conventional problems, an optical device of the present invention has an optical device element in which a light receiving region or a light emitting region and a protruding electrode are provided on an optical function surface, and a larger area than the optical device element. A transparent member on which an electrode electrically connected to the optical device element and an external connection electrode are formed, and the optical functional surface of the optical device element and the electrode forming surface of the transparent member The protruding electrode and the electrode are metal-bonded to each other and are electrically connected to each other.

本発明の光学デバイスモジュールは、前記の光学デバイス素子と、前記光学デバイス素子を実装する透明部材を有しており、前記光学デバイス素子を格納する実装基板とを備え、前記実装基板には、前記光学デバイス素子を収容するための、前記光学デバイス素子より大きな形状で、かつ深さが前記光学素子の厚みより大きい凹部と、前記凹部の周囲に配置された第1の基板端子と、該第1の基板端子と凹部底部に有する第2の基板端子とを電気的に接続する基板配線とが前記凹部の最高部面と前記凹部底部最低部面に設けられており、前記凹部には前記光学デバイス素子の少なくとも一部が納められており、前記第1の基板端子及び前記第2の基板端子は、外部接続用電極に対向する位置に配置されているとともに、貫通電極35を介して外部接続用電極と電気的に接合されている構成からなる。   An optical device module of the present invention includes the optical device element and a transparent member that mounts the optical device element, and includes a mounting substrate that stores the optical device element. A recess having a shape larger than that of the optical device element for accommodating the optical device element and having a depth larger than the thickness of the optical element, a first substrate terminal disposed around the recess, and the first Board wiring for electrically connecting the substrate terminal and the second substrate terminal at the bottom of the recess are provided on the highest surface of the recess and the lowest surface of the bottom of the recess, and the optical device is provided in the recess. At least a part of the element is accommodated, and the first substrate terminal and the second substrate terminal are disposed at positions facing the external connection electrodes and through the through electrode 35. Consisting configuration that is part connection electrode electrically joined.

このような構成とすることにより、軽量で、薄型・小型、かつ実装基板の背面から入射する光等による光ノイズ耐性に優れた光学デバイスモジュールを実現できる。この結果、取付け後の調製もほとんど不要となり、製造工程も大幅に簡略化できる。   With such a configuration, it is possible to realize an optical device module that is lightweight, thin, small, and excellent in resistance to optical noise due to light incident from the back surface of the mounting substrate. As a result, almost no preparation after installation is required, and the manufacturing process can be greatly simplified.

本発明の光学デバイスモジュールは、軽量で、薄型・小型で、かつ光学特性および品質の優れた光学デバイスモジュールを低コストで実現できるという大きな効果を奏する。   INDUSTRIAL APPLICABILITY The optical device module of the present invention has a great effect that an optical device module that is lightweight, thin, small, and excellent in optical characteristics and quality can be realized at low cost.

本発明の第1の実施の形態にかかる光学デバイスモジュールを説明するための模式的に示した断面図である。It is sectional drawing shown typically for demonstrating the optical device module concerning the 1st Embodiment of this invention. 本発明の第2の実施の形態にかかる光学デバイスモジュールの構成部材である実装基板3を説明するための模式的に示した上面図である。It is the top view shown typically for demonstrating the mounting board | substrate 3 which is a structural member of the optical device module concerning the 2nd Embodiment of this invention. 本発明の第2の実施の形態にかかる光学デバイスモジュールの構成部材である実装基板3を説明するための模式的に示した断面図である。It is sectional drawing shown typically for demonstrating the mounting board | substrate 3 which is a structural member of the optical device module concerning the 2nd Embodiment of this invention.

以下、本発明を実施するための最良の形態について図面を参照しながら説明する。なお、実施例では、いわゆる光学デバイス、光学デバイスモジュールとして説明する。光学デバイス、光学デバイスモジュールは照度センサーなどからなる受光電子部品またはLEDなどからなる発光電子部品である。   The best mode for carrying out the present invention will be described below with reference to the drawings. In the embodiment, a so-called optical device or optical device module will be described. An optical device or an optical device module is a light receiving electronic component including an illuminance sensor or a light emitting electronic component including an LED.

これらの図において、それぞれの構成部材の厚みや長さ等は図面の作成上、実際の厚みや長さ等とは異なって描かれている。また、各構成部材の電極や端子の個数も実際とは異なり、図示しやすい数量としている。さらに、各構成部材の材質も下記説明の材質に限定されるものではない。   In these drawings, the thickness, length, etc. of each constituent member are drawn differently from the actual thickness, length, etc. in the drawing. In addition, the number of electrodes and terminals of each component is different from the actual number and is easy to show. Furthermore, the material of each constituent member is not limited to the material described below.

(第1の実施の形態)
図1は、本発明の形態にかかる光学デバイスモジュール100の断面図である。本実施の形態の光学デバイスモジュール100は、光学デバイス素子2と、前記光学デバイス素子を実装する透明部材1を有しており、前記光学デバイス素子2を格納する実装基板3とを備える。前記実装基板には、前記光学デバイス素子より大きな形状で、かつ深さが前記光学デバイス素子の厚みより大きい凹部4と、前記凹部4の周囲に配置された第1の基板端子31と、該第1の基板端子と凹部4底部に有する第2の基板端子33とを電気的に接続する基板配線32とが前記凹部4の最高部面と前記凹部4底部最低部面に設けられている。前記凹部には前記光学デバイス素子の少なくとも一部が納められる。前記第1の基板端子31及び前記第2の基板端子33が配置された面と反対側の面に、外部接続用電極34が配置される。第1の基板端子31と外部接続用端子34、及び第2の基板端子32と外部接続用端子34は、貫通電極35を介して電気的に接続される。
(First embodiment)
FIG. 1 is a cross-sectional view of an optical device module 100 according to an embodiment of the present invention. The optical device module 100 according to the present embodiment includes an optical device element 2 and a transparent substrate 1 for mounting the optical device element, and includes a mounting substrate 3 for storing the optical device element 2. The mounting substrate has a recess 4 having a shape larger than that of the optical device element and a depth greater than the thickness of the optical device element, a first substrate terminal 31 disposed around the recess 4, and the first A substrate wiring 32 for electrically connecting one substrate terminal and the second substrate terminal 33 provided at the bottom of the recess 4 is provided on the highest surface of the recess 4 and the lowest surface of the bottom of the recess 4. At least a part of the optical device element is accommodated in the recess. An external connection electrode 34 is disposed on the surface opposite to the surface on which the first substrate terminal 31 and the second substrate terminal 33 are disposed. The first substrate terminal 31 and the external connection terminal 34, and the second substrate terminal 32 and the external connection terminal 34 are electrically connected through the through electrode 35.

実装基板3には、複数の貫通電極35が形成されている。また、凹部4の周囲に形成されている貫通電極35の一方側の端部に存する第1の基板端子31は、光学デバイスモジュール100の透明部材1に設けられた接続用電極11と対応する位置に配置されている。なお、第1の基板端子31と凹部4底部に有する第2の基板端子33とを電気的に接続する基板配線32はナノ金属ぺーストをインクジェットにより塗布することにより形成される。また、スパッタ、蒸着により基板配線32を形成しても良い。   A plurality of through electrodes 35 are formed on the mounting substrate 3. In addition, the first substrate terminal 31 existing at one end of the through electrode 35 formed around the recess 4 is a position corresponding to the connection electrode 11 provided on the transparent member 1 of the optical device module 100. Is arranged. The substrate wiring 32 that electrically connects the first substrate terminal 31 and the second substrate terminal 33 provided at the bottom of the recess 4 is formed by applying a nano metal paste by inkjet. Further, the substrate wiring 32 may be formed by sputtering or vapor deposition.

また、前記実装基板3は、例えばガラスエポキシ樹脂、アラミド不織布、ポリイミド樹脂、各種セラミック、ガラス、表面に絶縁被膜を備える金属板のうちのいずれかの材料を用いることができる。   The mounting substrate 3 may be made of any material selected from, for example, glass epoxy resin, aramid nonwoven fabric, polyimide resin, various ceramics, glass, and a metal plate having an insulating coating on the surface.

本実施の形態の光学デバイスモジュール100は、以下のようにして作製することができる。すなわち、実装基板3を構成する基材の一方の面の凹部4に、光学デバイスモジュール100の接続用電極11が実装基板3に形成された第1の基板端子31に接触する位置まで光学デバイス素子2を挿入する。この状態で、透明部材1の接続用電極11と実装基板3の第1の基板端子31とを位置合わせする。そして、両者間を加熱、加圧して電気的な接合と機械的な接着を行う。なお、両者間の接合は、導電性接着剤(異方性含む)やはんだ及びAuSn合金接続やナノ銀ペーストによる接続、非導電接着剤による収縮接続、あるいは陽極接合でも行うことができる。   The optical device module 100 of the present embodiment can be manufactured as follows. In other words, the optical device element reaches a position where the connection electrode 11 of the optical device module 100 contacts the first substrate terminal 31 formed on the mounting substrate 3 in the recess 4 on one surface of the base material constituting the mounting substrate 3. 2 is inserted. In this state, the connection electrode 11 of the transparent member 1 and the first substrate terminal 31 of the mounting substrate 3 are aligned. And both are heated and pressurized to perform electrical bonding and mechanical bonding. The bonding between the two can also be performed by conductive adhesive (including anisotropy), solder and AuSn alloy connection, connection by nano silver paste, shrink connection by non-conductive adhesive, or anodic bonding.

なお、前記透明部材1は、ソーダガラス、硬質ガラス、石英、アルミナガラス、エポキシ系樹脂、アクリル系樹脂、ポリイミド系樹脂等であって、少なくとも可視光に対して透明でかつ、実装基板3の基材と線膨張係数が同等レベルの材料を用いることにより、環境試験に強いモジュールを製作することができる。   The transparent member 1 is soda glass, hard glass, quartz, alumina glass, epoxy resin, acrylic resin, polyimide resin, etc., and is transparent to at least visible light and is based on the mounting substrate 3. By using a material having the same level of linear expansion coefficient as that of the material, it is possible to manufacture a module that is strong against environmental tests.

また、接続用電極11はナノ金属ペーストを直接透明部材1に塗布したが、導電性ペーストを印刷したもの、または蒸着やメッキにより形成したものであり、回路基板等の配線材料として通常用いられるものであれば特に制約なく用いることができる。例えば、銀、銅、ニッケル、金、クロム、アルミニウム等の単体構成、あるいはこれらの積層構成を用いることができる。   In addition, the connecting electrode 11 is obtained by applying a nano metal paste directly to the transparent member 1 but is formed by printing a conductive paste or by vapor deposition or plating, and is usually used as a wiring material for a circuit board or the like. If it is, it can be used without restriction. For example, a single component such as silver, copper, nickel, gold, chromium, or aluminum, or a laminated configuration thereof can be used.

また、凹部4底部に照度センサーを制御する半導体素子(図示せず)を実装することもできる。製造方法を以下に説明すると、前記照度センサーを制御する半導体素子の大きさを考慮した深さ及び底面積を有する凹部が形成された実装基板に予め、前記照度センサーを制御する半導体素子を実装した後、第1の実施の形態と同様のように透明部材1と電気的に接続することにより、制御機能を有する照度センサーを製造することも可能である。   A semiconductor element (not shown) for controlling the illuminance sensor can also be mounted on the bottom of the recess 4. A manufacturing method will be described below. A semiconductor element for controlling the illuminance sensor is mounted in advance on a mounting substrate having a recess having a depth and a bottom area in consideration of the size of the semiconductor element for controlling the illuminance sensor. Thereafter, an illuminance sensor having a control function can be manufactured by electrically connecting to the transparent member 1 in the same manner as in the first embodiment.

(第2の実施の形態)
図2は、本発明の形態にかかる光学デバイスモジュールの構成部材である実装基板3の上面図である。図3は、本発明の形態にかかる光学デバイスモジュールの構成部材である実装基板3の断面図である。実装基板3は、凹部4の内側面の少なくとも一面に凹部傾斜角度より緩やかな傾斜路5を備え、前記傾斜路5の最高部が前記凹部4を有する実装基板面の最高部と同一高さで、かつ前記傾斜路5の最低部が前記凹部の内側底部と同一高さで形成されている。前記凹部の周囲に配置された第1の基板端子と、前記凹部の底部に配置された第2の基板端子と、前記透明部材の接続用電極とを電気的に接続する基板配線は、ナノ金属ペーストで配線されている。
(Second Embodiment)
FIG. 2 is a top view of the mounting substrate 3 which is a constituent member of the optical device module according to the embodiment of the present invention. FIG. 3 is a cross-sectional view of the mounting substrate 3 which is a constituent member of the optical device module according to the embodiment of the present invention. The mounting substrate 3 includes an inclined path 5 that is gentler than the recess inclination angle on at least one inner surface of the recess 4, and the highest portion of the inclined path 5 is the same height as the highest portion of the mounting substrate surface having the recess 4. And the lowest part of the said slope 5 is formed in the same height as the inner bottom part of the said recessed part. The substrate wiring that electrically connects the first substrate terminal disposed around the recess, the second substrate terminal disposed at the bottom of the recess, and the connection electrode of the transparent member is made of a nano metal. Wired with paste.

前記光学デバイスモジュールにおいて、前記凹部の周囲に配置された第1の基板端子31と、前記凹部の底部に配置された第2の基板端子33と、前記透明部材の接続用電極とを電気的に接続する基板配線をインクジェットによりナノ金属ペーストを描画して配線するための傾斜路5を設けることにより、前記凹部4内側の急勾配の面より安定して基板配線32を形成できる。   In the optical device module, the first substrate terminal 31 disposed around the recess, the second substrate terminal 33 disposed at the bottom of the recess, and the connection electrode of the transparent member are electrically connected. By providing the inclined path 5 for wiring the substrate wiring to be connected by drawing the nano metal paste by inkjet, the substrate wiring 32 can be stably formed from the steep surface inside the concave portion 4.

また、前記傾斜路5の最高部が前記凹部4を有する実装基板面の最高部と同一高さで、かつ前記傾斜路5の最低部が前記凹部の内側底部と同一高さで、最高部及び最低部のどちらか一方または双方に傾斜していない水平部分を設けることにより、インクジェットによりナノ金属ペースト描画の精度が向上することにより、接続端子として信頼性の高い端子形状を形成できる。   The highest portion of the ramp 5 is the same height as the highest portion of the mounting substrate surface having the recess 4, and the lowest portion of the ramp 5 is the same height as the inner bottom portion of the recess. By providing a horizontal portion that is not inclined on either one or both of the lowest portions, the accuracy of drawing the nano metal paste is improved by ink jetting, whereby a highly reliable terminal shape can be formed as a connection terminal.

なお、前記傾斜路5を設けて形成した凹部4を有する実装基板3を特徴とし、その他の部分は第1の実施形態と同じである。この透明部材2に用いる透明基材4の材料等については、第1の実施の形態の透明基材4と同じものを用いることができる。   The mounting board 3 having the recess 4 formed by providing the ramp 5 is characterized, and other parts are the same as those of the first embodiment. About the material of the transparent base material 4 used for this transparent member 2, the same thing as the transparent base material 4 of 1st Embodiment can be used.

前記実装基板3は、例えばガラスエポキシ樹脂、アラミド不織布、ポリイミド樹脂、各種セラミック、ガラス、表面に絶縁被膜を備える金属板のうちのいずれかの材料を用いることができる。   The mounting substrate 3 may be made of any material selected from, for example, glass epoxy resin, aramid nonwoven fabric, polyimide resin, various ceramics, glass, and a metal plate having an insulating coating on the surface.

また、前記の実施形態の説明では光学デバイスモジュールが1個場合の製造方法を説明したが、複数の光学デバイスモジュールを一度に製造することもできる。以下に説明すると、複数の前記光学デバイス素子2を透明部材に所定の間隔で接合する。   In the above description of the embodiment, the manufacturing method in the case of one optical device module has been described. However, a plurality of optical device modules can be manufactured at a time. Explained below, the plurality of optical device elements 2 are bonded to the transparent member at a predetermined interval.

次に所定の間隔に複数の前記凹部4を実装基板に形成する。次に前記複数の凹部各々に前記光学デバイス素子の少なくとも一部が納まるように第1の実施の形態と同様な電気的な接続をする。次に、切断機を用いて複数の光学デバイスモジュールを各々に分割して製造する。上記の構成とすることで、軽量で、薄型・小型の光学デバイスモジュールを容易で、かつ歩留まりよく製造することができる。   Next, a plurality of the recesses 4 are formed on the mounting substrate at predetermined intervals. Next, the same electrical connection as in the first embodiment is performed so that at least a part of the optical device element is accommodated in each of the plurality of recesses. Next, a plurality of optical device modules are divided and manufactured using a cutting machine. With the above configuration, a lightweight, thin and small optical device module can be easily manufactured with a high yield.

1 透明部材
11 接続用電極
2 光学デバイス素子
3 実装基板
31 第1の基板端子
32 基板配線
33 第2の基板端子
34 外部接続用電極
35 貫通電極
4 凹部
5 傾斜路
100 光学デバイスモジュール
DESCRIPTION OF SYMBOLS 1 Transparent member 11 Connection electrode 2 Optical device element 3 Mounting board 31 1st board terminal 32 Board wiring 33 2nd board terminal 34 External connection electrode 35 Through-electrode 4 Concave part 5 Ramp 100 Optical device module

Claims (6)

受光領域と突起電極、または発光領域と突起電極が、光学機能面に設けられた光学デバイス素子と、
前記光学デバイス素子より広い面積を有し、接続用電極と、前記光学機能面と対向するとともに前記突起電極と金属接合により電気的に接続される電極と、を有する透明部材と、
前記光学デバイス素子を格納するとともに、該光学デバイス素子と電気的に接続する実装基板と、から構成される光学デバイスモジュール。
An optical device element in which the light receiving region and the protruding electrode or the light emitting region and the protruding electrode are provided on the optical function surface;
A transparent member having a larger area than the optical device element, and having a connection electrode and an electrode facing the optical functional surface and electrically connected to the protruding electrode by metal bonding;
An optical device module configured to store the optical device element and to be mounted electrically connected to the optical device element.
前記実装基板は、
前記光学デバイス素子を収容する凹部と、
前記凹部の周囲に配置された第1の基板端子と、
前記凹部の底部に配置された第2の基板端子と、
前記第1の基板端子及び第2の基板端子が配置された面とは反対側の面に配置された外部接続用電極と、
前記第1の基板端子と前記第2の基板端子を電気的に接続する基板配線と、を備え、
前記第1の基板端子及び第2の基板端子は、貫通電極を介して前記外部接続用電極と電気的に接続されることを特徴とする請求項1に記載の光学デバイスモジュール。
The mounting substrate is
A recess for housing the optical device element;
A first substrate terminal disposed around the recess;
A second substrate terminal disposed at the bottom of the recess;
An external connection electrode disposed on a surface opposite to the surface on which the first substrate terminal and the second substrate terminal are disposed;
A board wiring for electrically connecting the first board terminal and the second board terminal;
The optical device module according to claim 1, wherein the first substrate terminal and the second substrate terminal are electrically connected to the external connection electrode through a through electrode.
前記基板配線をナノ金属ペーストで配線することを特徴とする請求項2に記載の光学デバイスモジュール。   The optical device module according to claim 2, wherein the substrate wiring is wired with a nano metal paste. 前記実装基板は、前記凹部の内側面の少なくとも一面に凹部傾斜角度より小さい角度を有する傾斜路を備え、
該傾斜路の最高部が前記実装基板面の最高部と同一高さで、かつ前記傾斜路の最低部が前記凹部の内側底部と同一高さであることを特徴とする請求項2または3に記載の光学デバイスモジュール。
The mounting board includes an inclined path having an angle smaller than the concave inclination angle on at least one of the inner side surfaces of the concave part,
The highest part of the slope is the same height as the highest part of the mounting substrate surface, and the lowest part of the slope is the same height as the inner bottom part of the recess. The optical device module described.
前記基板配線は、前記傾斜路上にインクジェットによりナノ金属ペーストを描画して配線することを特徴とする請求項4に記載の光学デバイスモジュール。   5. The optical device module according to claim 4, wherein the substrate wiring is formed by drawing a nano metal paste by ink jet on the slope. 前記傾斜路の最高部または最低部は、傾斜していない水平部分を有することを特徴とする請求項4に記載の光学デバイスモジュール。   The optical device module according to claim 4, wherein the highest part or the lowest part of the ramp has a horizontal part that is not inclined.
JP2010286683A 2010-12-22 2010-12-22 Optical device module Pending JP2012134397A (en)

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JP2013011568A (en) * 2011-06-30 2013-01-17 Seiko Instruments Inc Optical sensor device
WO2023002656A1 (en) * 2021-07-21 2023-01-26 ソニーセミコンダクタソリューションズ株式会社 Semiconductor package

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JP2002314149A (en) * 2001-04-13 2002-10-25 Shinko Electric Ind Co Ltd Semiconductor device
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JPH04106974A (en) * 1990-08-27 1992-04-08 Olympus Optical Co Ltd Solid state image sensor
JPH0660156U (en) * 1993-01-25 1994-08-19 松下電工株式会社 Printed board
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* Cited by examiner, † Cited by third party
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JP2013011568A (en) * 2011-06-30 2013-01-17 Seiko Instruments Inc Optical sensor device
WO2023002656A1 (en) * 2021-07-21 2023-01-26 ソニーセミコンダクタソリューションズ株式会社 Semiconductor package

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