JP2012063363A - Pressure sensor - Google Patents

Pressure sensor Download PDF

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JP2012063363A
JP2012063363A JP2011256246A JP2011256246A JP2012063363A JP 2012063363 A JP2012063363 A JP 2012063363A JP 2011256246 A JP2011256246 A JP 2011256246A JP 2011256246 A JP2011256246 A JP 2011256246A JP 2012063363 A JP2012063363 A JP 2012063363A
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detection piece
base
pressure sensor
thin portion
uniform thickness
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JP5353996B2 (en
JP2012063363A5 (en
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Jun Watanabe
潤 渡辺
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Abstract

PROBLEM TO BE SOLVED: To provide a pressure sensor that is improved in linearity of pressure sensitivity characteristics by constituting a diaphragm which bends to deform speedily in a state in which measured pressure is small, and gradually bends in a state of high pressure.SOLUTION: The pressure sensor includes a lower electrode film 4 and a dielectric film 5 laminated in order on a surface of a base 3, a detection piece 10 which has a thin part 11 at a position opposed to the dielectric film, and is fixed on the surface of the base, and an upper electrode film 13 which is formed at least at a part of the thin part, and has position relation of opposition to the lower electrode film, and has an airtight space S of a fine gap between an under surface of the detection piece and the dielectric film, the thin part of the detection piece being not uniform in thickness over the entire surface.

Description

本発明は流体の圧力を測定するために使用される圧力センサーの改良に関し、特に、圧力が小さい段階では速やかに撓み変形する一方で、高圧力の状態では徐々に撓むように薄肉部（ダイヤフラム）を構成することによって圧力感度特性の直線性を向上させた圧力センサーに関する。   The present invention relates to an improvement of a pressure sensor used to measure the pressure of a fluid, and in particular, a thin-walled portion (diaphragm) is bent so as to bend and deform quickly when the pressure is low, but gradually bend when the pressure is high. The present invention relates to a pressure sensor in which linearity of pressure sensitivity characteristics is improved by configuring.

自動車等の車両に装備されるタイヤの空気圧を圧力センサーにより検出して異常発生時に警告を発するタイヤ圧モニタリングシステムが従来から知られている。
自動車等のゴムタイヤ内に装備されて空気圧を測定する空気圧センサーとして、特開２００１−１７４３５７公報には、セラミクスから成るダイヤフラムとセラミクスから成るベースとを接合し、両者間に形成される隙間内の静電容量変化を圧力に変換する技術が開示されている。しかし、セラミクスを検出片として使用した空気圧センサーは、検出精度の点で問題があり改善が望まれている。
このような不具合を有さない空気圧センサーとして、最近では図６に示すようにシリコン（Ｓｉ）から成る検出片を用いたタッチモード容量型圧力センサーが注目されている。この圧力センサーは、基台としてのガラス板１０１上に下部電極膜１０２、誘電体薄膜１０３、電極膜１０４を順次積層して成る底板１００上に、シリコン製の検出片１１０を組み付けた構成を備えている。この圧力センサーは、圧力によって検出片１１０の薄肉部（ダイヤフラム）１１０ａが変形して誘電体薄膜１０３に直接接触することによって生じる静電容量変化を圧力検出に利用している。この種の空気圧センサーは、例えば電気学会論文誌 ２００３年 Ｖｏｌ．１２３−Ｅ「タイヤ圧モニタリングシステム用タッチモード容量型圧力センサー」に開示されている。
シリコン製の検出片を用いた空気圧センサーにあっては、シリコンウェハのダイヤフラム１１０ａの肉厚を３μｍ程度までエッチングによって薄く加工する必要があるばかりでなく、ダイヤフラム１１０ａと誘電体薄膜１０３との間のギャップを３μｍ程度の極小寸法に設定する必要がある。しかし、シリコンをエッチングする場合には厚さを正確にコントロールすることが難しく、この程度に微小な寸法レベルで高い精度を確保することが困難である。その結果、製造のばらつきが大きくなる。
また、シリコン材料はその結晶構造の物性から、弾性変形の繰り返し再現性の点で問題がある。
この不具合については、実開昭６３−１７５８３３号に開示されているようにシリコンよりも安定した物性を有する水晶を圧力センサーの検出片として利用することにより、シリコン製の検出片を用いた圧力センサーの欠点であった弾性変形における繰り返し再現性の悪さを解消することができる。 2. Description of the Related Art Conventionally, a tire pressure monitoring system that issues a warning when an abnormality occurs by detecting the air pressure of a tire equipped in a vehicle such as an automobile by a pressure sensor is known.
As an air pressure sensor that is mounted in rubber tires of automobiles and the like and measures air pressure, Japanese Patent Laid-Open No. 2001-174357 discloses a ceramic diaphragm and a ceramic base joined to each other and a static in a gap formed between the two. A technique for converting a capacitance change into a pressure is disclosed. However, an air pressure sensor using ceramics as a detection piece has a problem in terms of detection accuracy and is desired to be improved.
As an air pressure sensor not having such a problem, a touch mode capacitive pressure sensor using a detection piece made of silicon (Si) as shown in FIG. This pressure sensor has a structure in which a detection piece 110 made of silicon is assembled on a bottom plate 100 formed by sequentially laminating a lower electrode film 102, a dielectric thin film 103, and an electrode film 104 on a glass plate 101 as a base. ing. This pressure sensor uses a change in capacitance that occurs when the thin portion (diaphragm) 110a of the detection piece 110 is deformed by pressure and directly contacts the dielectric thin film 103 for pressure detection. This type of air pressure sensor is disclosed in, for example, IEEJ Transactions 2003 Vol. No. 1233-E “Touch Mode Capacitive Pressure Sensor for Tire Pressure Monitoring System”.
In the air pressure sensor using the detection piece made of silicon, not only the thickness of the diaphragm 110a of the silicon wafer needs to be thinly processed by etching to about 3 μm, but also between the diaphragm 110a and the dielectric thin film 103. It is necessary to set the gap to a minimum dimension of about 3 μm. However, when etching silicon, it is difficult to accurately control the thickness, and it is difficult to ensure high accuracy at such a minute dimension level. As a result, manufacturing variation increases.
In addition, the silicon material has a problem in the reproducibility of the elastic deformation due to the physical properties of its crystal structure.
Regarding this problem, as disclosed in Japanese Utility Model Laid-Open No. 63-175833, a pressure sensor using a detection piece made of silicon is used by using, as a detection piece of a pressure sensor, a crystal having physical properties that are more stable than silicon. It is possible to eliminate the poor reproducibility in elastic deformation, which was a drawback of the above.

ところが、上記従来の圧力センサーは、敏感なセンサー感度を得るために、いずれもダイヤフラム全体を均一厚な平行板形状に構成していた。特に、タッチモード式圧力センサーにおいては、特定の圧力値にてダイヤフラムが急激に大きく撓み変形して基台上面に接触するため、その後引き続き圧力が上昇する場合にはダイヤフラムに残される可動範囲が小さく制限されることとなり、直線性に優れたセンサー特性を得られる圧力範囲が狭い範囲（圧力が低い範囲）に制限される、という問題があった。
即ち、図７（ａ）（ｂ）はダイヤフラムの肉厚が均一なタイプのタッチモード式圧力センサーの動作を説明する断面図であり、この圧力センサーは、絶縁材料から成る基台１０１上に下部電極膜１０２、誘電体膜１０３を順次積層した底板１００上に、検出片１１０を組み付けた構成を備えている。検出片１１０のダイヤフラム１１０ａの下面には上部電極１１１が形成され、この上部電極１１１は誘電体膜１０３と所定の微小ギャップを隔てて対向配置されている。
図７（ａ）はダイヤフラム１１０ａが下向きに変形してその中央部下面が底板上面に接触した測定開始状態を示しており、これはダイヤフラム１１０ａの腰が折れ始めた状態である。これ以上の撓み量は、ダイヤフラム１１０ａと基台１０１との接合部構造の剛性のみによりほぼ決定されるので、ダイヤフラムは（ａ）の状態を更に越えて底板側へ撓み難い状態にある。従って、（ａ）の状態にあるときに、更に僅かに高い圧力が加わった場合であってもダイヤフラムは大きく変形して（ｂ）の状態に移行する。しかし、（ｂ）の状態は既にダイヤフラムの撓み可能範囲の限界に近い状態であるため、その後は、検出片と底板との接合部の剛性による影響によってダイヤフラム１１０ａの撓み変形量は極めて限られた範囲となる。このため、図示した従来の圧力センサーは測定可能な圧力範囲が極めて狭かった。
従って、このように測定可能な圧力範囲が狭い圧力センサーを自動車のタイヤに適用する場合には、標準の空気圧が異なるタイヤ毎に最適の感度を備えた圧力センサーを用意する必要があり、他種類の圧力センサーを製造する必要が生じるため、コストアップをもたらす原因となっている。 However, in order to obtain sensitive sensor sensitivity, the above conventional pressure sensors all have the entire diaphragm configured in a uniform parallel plate shape. In particular, in the touch mode type pressure sensor, the diaphragm suddenly greatly bends and deforms at a specific pressure value and comes into contact with the upper surface of the base. Therefore, when the pressure continues to increase, the movable range remaining on the diaphragm is small. There is a problem that the pressure range in which sensor characteristics with excellent linearity can be obtained is limited to a narrow range (low pressure range).
7A and 7B are cross-sectional views for explaining the operation of a touch mode type pressure sensor having a uniform diaphragm thickness. The pressure sensor is formed on a base 101 made of an insulating material. The detection piece 110 is assembled on the bottom plate 100 in which the electrode film 102 and the dielectric film 103 are sequentially laminated. An upper electrode 111 is formed on the lower surface of the diaphragm 110a of the detection piece 110, and the upper electrode 111 is disposed opposite to the dielectric film 103 with a predetermined minute gap.
FIG. 7A shows a measurement start state in which the diaphragm 110a is deformed downward and the lower surface of the center part contacts the upper surface of the bottom plate. This is a state in which the waist of the diaphragm 110a starts to be broken. Since the amount of bending beyond this is substantially determined only by the rigidity of the joint structure between the diaphragm 110a and the base 101, the diaphragm is in a state where it is difficult to bend toward the bottom plate beyond the state of (a). Therefore, even when a slightly higher pressure is applied in the state (a), the diaphragm is greatly deformed and shifts to the state (b). However, since the state of (b) is already near the limit of the range in which the diaphragm can bend, the amount of deformation of the diaphragm 110a is extremely limited due to the influence of the rigidity of the joint between the detection piece and the bottom plate. It becomes a range. Therefore, the conventional pressure sensor shown in the figure has a very narrow measurable pressure range.
Therefore, when applying pressure sensors with a narrow measurable pressure range to automobile tires, it is necessary to prepare pressure sensors with optimal sensitivity for each tire with different standard air pressure. Therefore, it is necessary to manufacture a pressure sensor of this type, which causes a cost increase.

特開２００１−１７４３５７公報JP 2001-174357 A 実開昭６３−１７５８３３号公報Japanese Utility Model Publication No. 63-175833 特開平０６−０２１７４０号公報Japanese Patent Laid-Open No. 06-021740 電気学会論文誌 ２００３年 Ｖｏｌ．１２３−Ｅ「タイヤ圧モニタリングシステム用タッチモード容量型圧力センサ」IEEJ Transactions 2003, Vol. 123-E “Touch Mode Capacitive Pressure Sensor for Tire Pressure Monitoring System”

本発明は上記に鑑みてなされたものであり、測定する圧力が小さい段階では速やかに撓み変形する一方で、高圧力の状態では徐々に撓むようにダイヤフラムを構成することによって圧力感度特性の直線性を向上させ、一種類の圧力センサーによって低圧から高圧まで高感度にて測定することができる圧力センサーを提供することを目的とする。   The present invention has been made in view of the above, and the linearity of the pressure sensitivity characteristic can be obtained by configuring the diaphragm so that it bends and deforms quickly when the pressure to be measured is small and gradually bends when the pressure is high. An object of the present invention is to provide a pressure sensor that can be measured with high sensitivity from a low pressure to a high pressure with a single type of pressure sensor.

上記課題を解決するため、請求項１の発明は、絶縁材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、該薄肉部の少なくとも一部に形成され且つ下部電極膜と対向する位置関係にある上部電極膜と、を備え、該検出片の下面と該誘電体膜との間に微小ギャップの気密空間を備えた圧力センサーにおいて、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする。
請求項２の発明は、請求項１において、前記薄肉部は、その一端から所定幅の範囲は均一厚領域であり、該均一厚領域から薄肉部の他端までの範囲は均一厚領域よりも厚肉の増厚領域となっていることを特徴とする。
請求項３の発明は、請求項２において、前記増厚領域は、薄肉部の肉厚がテーパー状且つ直線的に漸増するか、或いは少なくとも一つの段差部を有した階段状の構成を有することを特徴とする。
請求項４の発明は、請求項１、２、又は３において、前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有することを特徴とする。
請求項５の発明は、請求項１、２、３、又は４において、前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であることを特徴とする。
請求項６の発明は、請求項５において、前記検出片の薄肉部の平坦面を、前記基台上の下部電極膜と対面するよう対向配置したことを特徴とする。
請求項７の発明は、請求項１乃至６の何れか一項において、前記検出片と前記基台とが同一種の圧電結晶材料から成り、検出片の結晶軸と基台の結晶軸とを一致させた状態で、検出片に対して基台を重ね合わせたことを特徴とする。 In order to solve the above-described problems, the invention of claim 1 is a base comprising an insulating material, a lower electrode film and a dielectric film sequentially laminated on the surface of the base, and a position facing the dielectric film. And a detection piece fixed on the surface of the base and an upper electrode film formed on at least a part of the thin part and facing the lower electrode film. In the pressure sensor provided with an airtight space with a minute gap between the lower surface of the piece and the dielectric film, the thickness of the thin portion of the detection piece is not uniform over the entire surface.
According to a second aspect of the present invention, in the first aspect, the thin portion has a uniform thickness region from one end to a predetermined width, and a range from the uniform thickness region to the other end of the thin portion is larger than the uniform thickness region. It is a thickened region.
A third aspect of the present invention is the method according to the second aspect, wherein the thickened region has a stepwise configuration in which the thickness of the thin portion is tapered and linearly increased, or has at least one stepped portion. It is characterized by.
According to a fourth aspect of the present invention, in the first, second, or third aspect, the detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion.
According to a fifth aspect of the present invention, in the first, second, third, or fourth aspect, one of the thin portions of the detection piece is a flat surface and the other surface is an inclined surface or a stepped shape. Features.
The invention of claim 6 is characterized in that, in claim 5, the flat surface of the thin portion of the detection piece is arranged so as to face the lower electrode film on the base.
A seventh aspect of the present invention provides the detection piece according to any one of the first to sixth aspects, wherein the detection piece and the base are made of the same kind of piezoelectric crystal material, and the crystal axis of the detection piece and the crystal axis of the base are The base is superposed on the detection piece in the matched state.

請求項８の発明は、請求項１乃至７の何れか一項において、前記基台は、凹陥部と、凹陥部外周を包囲する外枠とを有し、且つ凹陥部の内底面上に前記下部電極膜と誘電体膜を積層した構成を備え、基台の外枠上面により前記検出片の底面を支持することにより薄肉部と誘電体膜との間に前記微小ギャップを形成したことを特徴とする。
請求項９の発明は、請求項１乃至８の何れか一項において、前記検出片が、水晶材料から構成されていることを特徴とする。
請求項１０の発明は、請求項９において、前記検出片は、水晶板から成り、該検出片の主面に対する放線が水晶結晶軸Ｚに対して０°以外の角度をなしており、前記検出片は、水晶板をウェットエッチングによって薄く加工した前記薄肉部を有することを特徴とする。
請求項１１の発明は、請求項９、又は１０において、前記検出片を構成する水晶板は、厚味すべりモードを有することを特徴とする。
請求項１２の発明は、請求項９、１０、又は１１において、前記検出片を構成する水晶板は、ＡＴカット水晶板であることを特徴とする。
請求項１３の発明は、請求項１乃至１２に記載の圧力センサーは、タッチモード容量圧力センサーであることを特徴とする。
請求項１４の発明は、請求項３において、前記段差部は、薄肉部の基材上に金属層を付加することによって形成したものであることを特徴とする。 The invention of claim 8 is the invention according to any one of claims 1 to 7, wherein the base has a recessed portion and an outer frame surrounding the outer periphery of the recessed portion, and the inner base of the recessed portion is formed on the inner bottom surface. It has a structure in which a lower electrode film and a dielectric film are laminated, and the minute gap is formed between the thin part and the dielectric film by supporting the bottom surface of the detection piece by the upper surface of the outer frame of the base. And
The invention of claim 9 is characterized in that, in any one of claims 1 to 8, the detection piece is made of a quartz material.
The tenth aspect of the present invention is the detection device according to the ninth aspect, wherein the detection piece is formed of a quartz plate, and a ray with respect to a main surface of the detection piece forms an angle other than 0 ° with respect to the quartz crystal axis Z. The piece is characterized by having the thin portion obtained by thinly processing a quartz plate by wet etching.
The invention of claim 11 is characterized in that, in claim 9 or 10, the quartz plate constituting the detection piece has a thick-slip mode.
According to a twelfth aspect of the present invention, in the ninth, tenth, or eleventh aspect, the quartz plate constituting the detection piece is an AT-cut quartz plate.
A thirteenth aspect of the invention is characterized in that the pressure sensor according to the first to twelfth aspects is a touch mode capacitive pressure sensor.
The invention of claim 14 is characterized in that, in claim 3, the stepped portion is formed by adding a metal layer on a thin-walled base material.

請求項１の発明は、薄肉部の肉厚が全面に亘って均一厚ではなく、傾斜状に漸増したり、階段状に増大するように構成されており、また、請求項２の発明は、検出片の薄肉部の一端から所定幅の範囲を均一厚領域とし、該均一厚領域から薄肉部の他端に向かう範囲を均一厚領域よりも厚肉の増厚領域としているので、ダイヤフラムとしての薄肉部に厚味差部分が形成されることとなり、低圧力測定時には肉厚の薄い均一厚領域が機能し、高圧力測定時には肉厚の厚い増厚領域が機能し、トータルで圧力センサー感度の直線性を向上させることができる。
請求項３の発明では、まず、増厚領域は、薄肉部の肉厚がテーパー状をなし且つ直線的に漸増するため、厚さが連続的な傾斜構造となり、高圧力測定時には薄肉部の腰の強さを維持し、圧力センサー感度の直線性を向上できる。また、増厚領域は少なくとも一つの段差部を有した階段状の構成を有するため、高圧力測定時には薄肉部の腰の強さを維持し、圧力センサー感度の直線性を向上できる。
請求項４の発明では、検出片は、薄肉部の外周縁に厚肉環状部を一体化した構成を有するため、検出片の強度を高め、耐久性を向上することができる。
請求項５、６の発明では、検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であるため、平坦面を底板上面と対向配置することによって、均一ギャップの気密空間を形成することが可能となり、圧力センサーの性能を安定させることができる。
請求項７の発明では、前記検出片と前記基台とを同一種の圧電結晶材料から構成し、検出片の結晶軸と基台の結晶軸とを一致させたので、両者の熱膨張特性を厳密に一致させることができ、熱歪みによる影響を回避できる。 The invention of claim 1 is configured such that the thickness of the thin wall portion is not uniform over the entire surface, but gradually increases in an inclined manner or increases stepwise, and the invention of claim 2 A range of a predetermined width from one end of the thin portion of the detection piece is a uniform thickness region, and a range from the uniform thickness region to the other end of the thin portion is a thickened region that is thicker than the uniform thickness region. A thickness difference part will be formed in the thin part, and the thin uniform thickness area will function at low pressure measurement, and the thick increase area will function at high pressure measurement. Linearity can be improved.
In the invention of claim 3, first, the thickness of the thickened portion is tapered and the thickness of the thinned portion increases linearly, so that the thickness of the thickened portion becomes a continuous inclined structure. The strength of the sensor can be maintained and the linearity of the pressure sensor sensitivity can be improved. Further, since the thickened region has a stepped configuration having at least one step portion, the strength of the waist of the thin portion can be maintained during high pressure measurement, and the linearity of the pressure sensor sensitivity can be improved.
In the invention of claim 4, since the detection piece has a configuration in which the thick annular portion is integrated with the outer peripheral edge of the thin portion, the strength of the detection piece can be increased and the durability can be improved.
In the inventions of claims 5 and 6, since the thin portion of the detection piece has one surface which is a flat surface and the other surface is an inclined surface or a stepped shape, the flat surface is disposed opposite to the upper surface of the bottom plate. Thus, it becomes possible to form an airtight space with a uniform gap, and the performance of the pressure sensor can be stabilized.
In the seventh aspect of the invention, the detection piece and the base are made of the same type of piezoelectric crystal material, and the crystal axis of the detection piece and the crystal axis of the base are made to coincide with each other. It is possible to strictly match and avoid the influence of thermal distortion.

請求項８の発明では、基台は、凹陥部と、凹陥部外周を包囲する外枠とを有しており、この場合には外枠をスペーサとして検出片を搭載することができる。
請求項９の発明では、検出片が水晶材料から構成されているので、経年変化が少なく、機械変形による再現性が高い（ヒステリシスが少ない）。また、ダイヤフラムとしての薄肉部の肉厚を厳密に管理することが容易であり、個片毎に薄肉部の肉厚差のない均一板厚のダイヤフラムを得ることができる。
請求項１０の発明では、水晶から成る検出片の主面に対する放線が水晶結晶軸Ｚに対して０°以外の角度をなしており、水晶板をウェットエッチングによって薄く加工した薄肉部を有するので、異方性エッチングを実現するための、検出片の材料を特定することができる。これにより、ウェットエッチングする際に、容易に薄肉部に傾斜面を形成することができる。
請求項１１の発明では、検出片を構成する水晶板は、厚味すべりモードを有するので、厚さ管理が容易となる。
請求項１２の発明では、検出片を構成する水晶板は、ＡＴカット水晶板であるので、請求項９、１０、１１と同等の効果を得ることができる。
請求項１３の発明では、圧力センサーがタッチモード容量圧力センサーであるため、強い圧力が加わる環境での使用が可能となる。
請求項１４の発明では、段差部は、薄肉部の基材上に金属層を付加することによって形成できるので、製造が容易である。 In the invention of claim 8, the base has a recessed portion and an outer frame surrounding the outer periphery of the recessed portion. In this case, the detection piece can be mounted using the outer frame as a spacer.
In the invention of claim 9, since the detection piece is made of a quartz material, the secular change is small and the reproducibility by mechanical deformation is high (the hysteresis is small). In addition, it is easy to strictly manage the thickness of the thin portion as a diaphragm, and a diaphragm having a uniform plate thickness with no difference in thickness of the thin portion can be obtained for each piece.
In the invention of claim 10, since the ray to the main surface of the detection piece made of quartz has an angle other than 0 ° with respect to the quartz crystal axis Z, the quartz plate has a thin portion processed thinly by wet etching. The material of the detection piece for realizing anisotropic etching can be specified. Thereby, when wet etching is performed, the inclined surface can be easily formed in the thin portion.
In the invention of claim 11, since the quartz plate constituting the detection piece has the thick sliding mode, the thickness management becomes easy.
In the twelfth aspect of the invention, since the quartz plate constituting the detection piece is an AT cut quartz plate, the same effects as in the ninth, tenth and eleventh aspects can be obtained.
In the invention of claim 13, since the pressure sensor is a touch mode capacitive pressure sensor, it can be used in an environment where a strong pressure is applied.
In the invention of claim 14, the stepped portion can be formed by adding a metal layer on the thin-walled base material, so that the manufacture is easy.

（ａ）（ｂ）及び（ｃ）は本発明の一実施形態に係るタッチモード容量型圧力センサーの構成を示す縦断面図。(A) (b) And (c) is a longitudinal cross-sectional view which shows the structure of the touch mode capacitive pressure sensor which concerns on one Embodiment of this invention. （ａ）は本発明の圧力センサーの他の実施形態を示す断面図、（ｂ）はその変形実施形態の説明図。(A) is sectional drawing which shows other embodiment of the pressure sensor of this invention, (b) is explanatory drawing of the deformation | transformation embodiment. （ａ）（ｂ）は本発明の他の実施形態に係る圧力センサーの断面図。(A) (b) is sectional drawing of the pressure sensor which concerns on other embodiment of this invention. 本発明の他の実施形態に係る圧力センサーの断面図。Sectional drawing of the pressure sensor which concerns on other embodiment of this invention. （ａ）（ｂ）は従来のタッチモード式圧力センサーと、本発明のタッチモード式圧力センサーの圧力−容量特性を比較する図。(A) and (b) are the figures which compare the pressure-capacitance characteristic of the conventional touch mode type pressure sensor and the touch mode type pressure sensor of this invention. 従来例の説明図。Explanatory drawing of a prior art example. （ａ）（ｂ）はダイヤフラムの肉厚が均一なタイプのタッチモード式圧力センサーの動作を説明する断面図。(A) (b) is sectional drawing explaining operation | movement of the touch mode type pressure sensor of the type with the uniform thickness of a diaphragm.

以下、本発明を図面に示した実施の形態により詳細に説明する。
図１は本発明の一実施形態に係るタッチモード容量型圧力センサーの構成を示す縦断面図であり、（ａ）（ｂ）及び（ｃ）はダイヤフラムの変化状態を示している。
このタッチモード容量型圧力センサー（以下、圧力センサー、という）１は、底板２と、底板２上に組み付けられた検出片１０と、底板２上面と検出片１０の下面との間に微小ギャップの気密空間Ｓを介在させた状態で両者を接合する接合部材２０と、から概略構成されている。
底板２は、水晶、ガラス、セラミック等の絶縁材料から成る基台３と、基台３上に順次形成した下部電極膜４、誘電体膜５と、を備えている。
検出片１０は、例えば水晶板から構成されており、下部電極膜４上の誘電体膜５と対面する薄肉部（ダイヤフラム）１１と、薄肉部１１の外周を一体的に包囲する厚肉環状部１２と、から構成されている。
薄肉部１１の下面には、下部電極膜４と対向するように上部電極膜１３が形成されている。
圧力センサー１は、自動車等の車両のタイヤ内の適所にトランスポンダーに組み付けられた状態で固定配置されて使用される。トランスポンダーは、アンテナコイルを備え、車両側のアンテナから出力された電磁波によってアンテナコイルに誘起される電流によって圧力センサーを作動させ、測定された圧力情報を電磁波として車両側へ出力する。タイヤ内の空気圧は、圧力センサー１の薄肉部１１に加わり、大気圧に設定された気密空間Ｓ内の圧力を越えた圧力が加わった場合に薄肉部１１を撓み変形させる。
即ち、外部気圧が気密空間Ｓ内の気圧を上回った場合に、薄肉部１が下方に撓んで上部電極膜１３の下面が誘電体膜５に接触したときの上部電極膜１３と誘電体膜５との接触面積の変化を容量値として検出して外部圧力をセンシングすることが可能となる。
この圧力センサー１をタイヤ内に組み込んだ場合には、主としてタイヤ内の空気圧の減少状態をモニタするために使用される。空気圧が許容値を下回ったことをリアルタイムに検出し、ドライバー等に対して速やかに警告表示させるためには、圧力感度特性の直線性が重要である。
接合部材２０は、接着手段、及びスペーサを兼ねており、薄肉部１１の下面と底板２の上面との間に基準圧力を得るための気密空間Ｓを形成している。 Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings.
FIG. 1 is a longitudinal sectional view showing a configuration of a touch mode capacitive pressure sensor according to an embodiment of the present invention, and FIGS. 1A, 1B, and 1C show a change state of a diaphragm.
The touch mode capacitive pressure sensor (hereinafter referred to as pressure sensor) 1 includes a bottom plate 2, a detection piece 10 assembled on the bottom plate 2, and a small gap between the upper surface of the bottom plate 2 and the lower surface of the detection piece 10. It is schematically composed of a joining member 20 that joins the two with the airtight space S interposed.
The bottom plate 2 includes a base 3 made of an insulating material such as quartz, glass, or ceramic, and a lower electrode film 4 and a dielectric film 5 that are sequentially formed on the base 3.
The detection piece 10 is made of, for example, a quartz plate, and has a thin portion (diaphragm) 11 facing the dielectric film 5 on the lower electrode film 4 and a thick annular portion that integrally surrounds the outer periphery of the thin portion 11. 12.
An upper electrode film 13 is formed on the lower surface of the thin portion 11 so as to face the lower electrode film 4.
The pressure sensor 1 is used by being fixedly arranged in a state where it is assembled to a transponder at a proper position in a tire of a vehicle such as an automobile. The transponder includes an antenna coil, operates a pressure sensor with a current induced in the antenna coil by an electromagnetic wave output from the vehicle-side antenna, and outputs measured pressure information to the vehicle side as an electromagnetic wave. The air pressure in the tire is applied to the thin portion 11 of the pressure sensor 1, and when the pressure exceeding the pressure in the airtight space S set to atmospheric pressure is applied, the thin portion 11 is bent and deformed.
That is, when the external pressure exceeds the pressure in the airtight space S, the upper electrode film 13 and the dielectric film 5 when the thin portion 1 is bent downward and the lower surface of the upper electrode film 13 is in contact with the dielectric film 5. It is possible to sense the external pressure by detecting the change in the contact area with the capacitance value.
When this pressure sensor 1 is incorporated in a tire, it is mainly used for monitoring a decrease state of air pressure in the tire. In order to detect in real time that the air pressure has fallen below the allowable value and promptly display a warning to the driver or the like, the linearity of the pressure sensitivity characteristic is important.
The joining member 20 also serves as an adhesive means and a spacer, and forms an airtight space S for obtaining a reference pressure between the lower surface of the thin portion 11 and the upper surface of the bottom plate 2.

本発明の圧力センサー１の特徴的な構成は、検出片の薄肉部１１の厚さが全面に亘って均一ではなく、薄肉部１１の一端から所定幅の範囲は均一厚領域１１ａであり、均一厚領域１１ａから他端に向かう範囲は薄肉部の肉厚が均一厚領域よりも大きい増厚領域１１ｂとなっている。この例では、増厚領域１１ｂは、厚さが直線的に漸増するテーパー状の断面形状を有している。
即ち、この実施形態の圧力センサー１における増厚領域１１ｂは、気密空間Ｓ側の主面が平坦（底板上面と平行）であり、気密空間と反対側の主面がテーパー状、且つ直線的な傾斜面となっている。即ち、均一厚領域１１ａの終端部Ａから薄肉部の他端部Ｂに至る範囲では、板厚が傾斜状に漸増するように構成されている。つまり、均一厚領域１１ａでは、上下の主面が平行であるが、増厚領域１１ｂでは下側の主面に対して上側の主面が非平行であり、テーパー状に拡開するように延びている。
このように構成することにより、高圧測定においても圧力感度特性の直線性を、測定可能な圧力の限界値まで、十分に維持することが可能となる。また、測定が不能となる飽和圧力値まで、直線性を有した圧力検出が可能となるため、空気圧が異なる種類のタイヤ、例えば乗用車のタイヤ（空気圧は２ｋｇ／ｃｍ２）と、トラックのタイヤ（空気圧は８ｋｇ／ｃｍ２）に対して同一構造の圧力センサーを使用することが可能となる。
なお、図２（ｂ）に示すように、均一厚領域１１ａを設けず、増厚領域１１ｂのみを備えた薄肉部１１の構成としてもよい。即ち、薄肉部の一端縁から他端縁に向けて肉厚が傾斜状に漸増したり、階段状に増大するようにした構成であってもよい。 The characteristic configuration of the pressure sensor 1 of the present invention is that the thickness of the thin portion 11 of the detection piece is not uniform over the entire surface, and the range of a predetermined width from one end of the thin portion 11 is a uniform thickness region 11a. The range from the thick region 11a toward the other end is a thickened region 11b in which the thickness of the thin portion is larger than the uniform thickness region. In this example, the thickened region 11b has a tapered cross-sectional shape in which the thickness gradually increases linearly.
That is, in the thickened region 11b in the pressure sensor 1 of this embodiment, the main surface on the airtight space S side is flat (parallel to the top surface of the bottom plate), and the main surface on the opposite side to the airtight space is tapered and linear. It is an inclined surface. That is, in the range from the terminal end A of the uniform thickness region 11a to the other end B of the thin-walled portion, the plate thickness gradually increases in an inclined manner. That is, in the uniform thickness region 11a, the upper and lower main surfaces are parallel, but in the thickened region 11b, the upper main surface is non-parallel to the lower main surface and extends so as to expand in a tapered shape. ing.
With such a configuration, it is possible to sufficiently maintain the linearity of the pressure sensitivity characteristic up to the limit value of the measurable pressure even in the high pressure measurement. In addition, since linear pressure detection is possible up to a saturation pressure value at which measurement is impossible, tires of different types of air pressure, for example, passenger car tires (air pressure is 2 kg / cm 2) and truck tires (air pressure) Can use a pressure sensor of the same structure for 8 kg / cm 2).
In addition, as shown in FIG.2 (b), it is good also as a structure of the thin part 11 provided only with the thickness increase area | region 11b, without providing the uniform thickness area | region 11a. That is, the thickness may be gradually increased from one end edge to the other end edge of the thin portion in an inclined manner or increased in a stepped manner.

次に、図１（ａ）（ｂ）（ｃ）に基づいて本発明の圧力センサの動作を説明する。まず、外部（タイヤ内）の圧力が気密空間Ｓ内の圧力と同等の場合には（ａ）に示すように薄肉部１１は変形していないが、測定圧力が低い状態では（ｂ）に示すように薄肉部１１の均一厚領域１１ａの腰（保形力）がいち早くなくなって折れ曲がり、底板上面（誘電体膜５）と接触する。
一方、薄肉部の増厚領域１１ｂは、十分な腰を有しているため、測定圧力が高くなるに連れて、徐々に底板側に押し付けられる。
本実施形態では、増厚領域１１ｂの断面形状が、傾斜（テーパー）形状となるように厚み差が設けられているため、図１（ｂ）の状態以降において、測定圧力が一定の変化を示す場合に、薄肉部の動作をよりスムーズ且つ定量的に制御することが可能となる。
また、この実施形態では、基台３の上面に設けた下部電極膜４から図示しない下部引き出し電極を基台の外縁部へ向けて延長形成する一方で、薄肉部１１の下面に形成した上部電極１３からも図示しない上部引き出し電極を検出片の外縁部へ延長形成する。両引き出し電極から通電し、気密空間及び誘電体膜５を介して対向配置された各電極膜４、１３間の容量値Ｃの変化にもとづいて外部の圧力を算出することが可能となる。
即ち、各電極膜４、１３間に形成されるコンデンサの容量値Ｃは、
Ｃ＝ε・（Ｓ／ｄ）（ε：誘電体の誘電率、Ｓ：電極の面積、ｄ：電極の間隔）
で表される。
つまり、電極膜４、１３間の間隔ｄを狭く（広く）設定すると、容量値Ｃが大きく（小さく）なる。一方、対向する２つの電極膜の対向面積を大きくすると、容量値Ｃが大きく（小さく）なるという性質を有する。 Next, the operation of the pressure sensor of the present invention will be described based on FIGS. 1 (a), (b) and (c). First, when the external pressure (in the tire) is equal to the pressure in the airtight space S, the thin portion 11 is not deformed as shown in (a), but when the measured pressure is low, it is shown in (b). As described above, the waist (shape retention force) of the uniform thickness region 11a of the thin portion 11 is quickly lost and bends, and comes into contact with the bottom plate upper surface (dielectric film 5).
On the other hand, the thickened region 11b of the thin wall portion has a sufficient waist and is gradually pressed against the bottom plate side as the measurement pressure increases.
In the present embodiment, since the thickness difference is provided so that the cross-sectional shape of the thickened region 11b is an inclined (tapered) shape, the measurement pressure shows a constant change after the state of FIG. In this case, the operation of the thin wall portion can be controlled more smoothly and quantitatively.
In this embodiment, a lower lead electrode (not shown) extends from the lower electrode film 4 provided on the upper surface of the base 3 toward the outer edge of the base, while an upper electrode formed on the lower surface of the thin portion 11. An upper lead electrode (not shown) is extended from 13 to the outer edge of the detection piece. It is possible to calculate the external pressure based on the change in the capacitance value C between the electrode films 4 and 13 that are energized from both the extraction electrodes and face each other through the airtight space and the dielectric film 5.
That is, the capacitance value C of the capacitor formed between the electrode films 4 and 13 is
C = ε · (S / d) (ε: dielectric constant of dielectric, S: area of electrode, d: distance between electrodes)
It is represented by
That is, when the distance d between the electrode films 4 and 13 is set narrow (wide), the capacitance value C becomes large (small). On the other hand, when the opposing area of the two opposing electrode films is increased, the capacitance value C increases (decreases).

上記のごとき構成を備えた圧力センサ１を大気中に配置すると、気密空間Ｓ内は大気圧と同様の気圧に設定されている。外部の気圧が気密空間Ｓ内の気圧と同じ場合には、図１（ａ）に示すように、気密空間内の気圧は外気と釣合っているため薄肉部１１は変形しない。一方、外部の気圧が気密空間内気圧よりも高くなった場合には、図１（ｂ）（ｃ）に示すように薄肉部１１は変形して誘電体膜５に近接（接触）する。図２（ｂ）（ｃ）は、外部圧力の多寡に応じて、薄肉部１１と誘電体膜５との接触面積Ｓが変化する状態を示しており、（ｂ）に示した接触面積Ｓ１の時と、（ｃ）に示した接触面積Ｓ２の時（Ｓ１＜Ｓ２）の容量値Ｃ１、Ｃ２とを比較すると、
接触面積がＳ１の場合には、Ｃ１＝ε・（Ｓ１／ｄ）となり、
接触面積がＳ２の場合には、Ｃ２＝ε・（Ｓ２／ｄ）となる。
このように外部圧力が、気密空間Ｓの圧力（大気圧）よりも大きくなると、薄肉部が変形し、上部電極膜１３が誘電体膜５と接触するので、このときの上部電極膜１３と誘電体膜５との接触面積の変化を容量値として検出して圧力をセンシングすることが可能となる。
次に、図２（ａ）は本発明の圧力センサの他の実施形態を示す断面図であり、この圧力センサ１は、検出片１０が厚肉環状部１２を有していない点において、図１の実施形態と異なっている。この実施形態は、検出片１０の最大厚さを小さくできるので、圧力センサを薄型化する上で有効である。
図２（ｂ）は図２（ａ）の変形例であり、基台３が、凹陥部３ａと、凹陥部外周を包囲する外枠３ｂとを有し、且つ凹陥部３ａの内底面上に下部電極膜４と誘電体膜５を積層した構成を備えている。そして、基台の外枠３ｂの上面により検出片１０の底面を支持することにより薄肉部１１と誘電体膜５との間に微小ギャップを形成している。この検出片１０は、（ａ）の検出片と異なり、均一厚領域を有しておらず、薄肉部全体が増厚領域１１ｂとなっている。 When the pressure sensor 1 having the above-described configuration is arranged in the atmosphere, the airtight space S is set to an atmospheric pressure similar to the atmospheric pressure. When the external air pressure is the same as the air pressure in the airtight space S, as shown in FIG. 1A, the air pressure in the airtight space is balanced with the outside air, so that the thin portion 11 is not deformed. On the other hand, when the external air pressure becomes higher than the air pressure in the airtight space, the thin portion 11 is deformed and approaches (contacts) the dielectric film 5 as shown in FIGS. FIGS. 2B and 2C show a state in which the contact area S between the thin portion 11 and the dielectric film 5 changes according to the external pressure, and the contact area S1 shown in FIG. When comparing the capacitance values C1 and C2 at the time of the contact area S2 shown in (c) (S1 <S2),
When the contact area is S1, C1 = ε · (S1 / d),
When the contact area is S2, C2 = ε · (S2 / d).
Thus, when the external pressure becomes larger than the pressure (atmospheric pressure) of the airtight space S, the thin portion is deformed and the upper electrode film 13 comes into contact with the dielectric film 5. It is possible to sense pressure by detecting a change in the contact area with the body membrane 5 as a capacitance value.
Next, FIG. 2 (a) is a cross-sectional view showing another embodiment of the pressure sensor of the present invention. This pressure sensor 1 is a diagram in that the detection piece 10 does not have the thick annular portion 12. This is different from the first embodiment. This embodiment is effective in reducing the thickness of the pressure sensor because the maximum thickness of the detection piece 10 can be reduced.
FIG. 2B is a modification of FIG. 2A, in which the base 3 has a recessed portion 3a and an outer frame 3b surrounding the outer periphery of the recessed portion, and on the inner bottom surface of the recessed portion 3a. The lower electrode film 4 and the dielectric film 5 are stacked. A minute gap is formed between the thin portion 11 and the dielectric film 5 by supporting the bottom surface of the detection piece 10 by the upper surface of the outer frame 3b of the base. Unlike the detection piece (a), this detection piece 10 does not have a uniform thickness region, and the entire thin portion is a thickening region 11b.

次に、図３（ａ）（ｂ）は本発明の他の実施形態に係る圧力センサーの断面図であり、この圧力センサー１は、薄肉部１１の増厚領域１１ｂが、少なくとも一つの段差部１５を有して、階段状に肉厚が漸増する構成を有している。
以上の構成において、外部（タイヤ内）の圧力が気密空間Ｓ内の圧力と同等の場合には図３（ａ）に示すように薄肉部１１は変形していないが、測定圧力が低い状態では図３（ｂ）に示すように薄肉部１１の均一厚領域１１ａの腰（保形力）がいち早くなくなって折れ曲がり、底板上面（誘電体膜５）と接触する。
一方、薄肉部の増厚領域１１ｂは、均一厚領域１１ａよりも厚肉であり、十分な腰を有しているため、測定圧力が高くなるに連れて、徐々に底板側に押し付けられる。
本実施形態では、増厚領域１１ｂの断面形状が、均一厚領域１１ａよりも厚く、且つ均一厚となるように設定されているため、（ｂ）の状態以降において測定圧力が一定の変化を示す場合に、薄肉部の動作をよりスムーズ且つ定量的に制御することが可能となる。従って、誤差の少ない高精度の圧力測定が可能となる。
更に、図４の圧力センサーは、増厚領域１１ｂが複数の段差部１５ａ、１５ｂを有した階段状であり、段差部１５ａよりも、段差部１５ｂの厚さが厚くなるように設定されているため、均一厚領域１１ａが底板上面に接した段階以降に測定圧力が高くなるに連れて、薄肉部の動作をよりスムーズ且つ定量的に制御することが可能となる。
図３、図４に示した如き段差部１５、１５ａ、１５ｂを有した薄肉部１１を製造する際には、均一厚の薄肉部の主面上に、金属膜を成膜することによって増厚領域１１ｂを形成するようにしてもよい。 Next, FIGS. 3A and 3B are cross-sectional views of a pressure sensor according to another embodiment of the present invention. The pressure sensor 1 has a thickened region 11b of at least one step portion. 15 and has a structure in which the thickness gradually increases stepwise.
In the above configuration, when the external pressure (in the tire) is equal to the pressure in the airtight space S, the thin portion 11 is not deformed as shown in FIG. As shown in FIG. 3 (b), the waist (shape retention force) of the uniform thickness region 11a of the thin wall portion 11 quickly disappears and bends, and comes into contact with the bottom plate upper surface (dielectric film 5).
On the other hand, the thickened region 11b of the thin-walled portion is thicker than the uniform-thickness region 11a and has a sufficient waist, so that it is gradually pushed toward the bottom plate as the measurement pressure increases.
In this embodiment, since the cross-sectional shape of the thickened region 11b is set to be thicker and uniform than the uniform thickness region 11a, the measurement pressure shows a constant change after the state (b). In this case, the operation of the thin wall portion can be controlled more smoothly and quantitatively. Therefore, highly accurate pressure measurement with few errors is possible.
Further, the pressure sensor of FIG. 4 has a stepped shape in which the thickened region 11b has a plurality of stepped portions 15a and 15b, and is set so that the thickness of the stepped portion 15b is thicker than that of the stepped portion 15a. Therefore, as the measurement pressure increases after the stage in which the uniform thickness region 11a is in contact with the upper surface of the bottom plate, the operation of the thin portion can be controlled more smoothly and quantitatively.
When manufacturing the thin portion 11 having the step portions 15, 15 a and 15 b as shown in FIGS. 3 and 4, the thickness is increased by forming a metal film on the main surface of the thin portion having a uniform thickness. The region 11b may be formed.

次に、検出片１０と基台３を構成する材料として、同一種の圧電結晶材料を選定した場合には、検出片の結晶軸と基台の結晶軸とを一致させた状態で、検出片に対して基台を重ね合わせることが好ましい。このように構成することにより、検出片と基台の熱膨張特性が一致し、熱歪みによる悪影響を無くする利点があるので、耐久性を高め、性能を安定させることができる。
次に、検出片１０を構成する材料としては、水晶材料を使用することが好ましい。即ち、検出片１０の材料として、従来使用されていたシリコンに代えて水晶を使用することにより、次のような優位性を得ることができる。即ち、水晶はシリコンに比べて物性的に安定した素材であり、経年変化が少なく、機械変形による再現性が高い（ヒステリシスが少ない）。また、水晶によれば、ダイヤフラムとしての薄肉部の肉厚を厳密に管理することが容易であり、個片毎に薄肉部の肉厚差のない均一板厚のダイヤフラムを得ることができる。即ち、薄肉部１１を目標肉厚に加工するためには、まず水晶板に対するエッチングによって薄肉部１１を形成した後で、薄肉部１１に電極を付着させて通電して薄肉部の固有周波数を測定することにより目標周波数（目標肉厚）と比較する。目標周波数と一致しない場合には、目標周波数に達するまで微調エッチングを行う。その結果、個片毎に薄肉部の肉厚差のない均一板厚の薄肉部を得ることができる。
なお、水晶等の圧電材料の薄肉部１０ａの肉厚を微調整するためにその固有周波数を測定する技術は、例えば特開平０６−０２１７４０号公報に開示されているように、本出願人による超薄板圧電振動子の加工技術として周知であり、この技術をそのまま応用することができる。
使用する水晶材料としては、厚味すべりモードを有する材料、例えばＡＴカット水晶板が好ましい。 Next, when the same kind of piezoelectric crystal material is selected as the material constituting the detection piece 10 and the base 3, the detection piece is in a state where the crystal axis of the detection piece and the crystal axis of the base are aligned. It is preferable to superimpose the base on the surface. By configuring in this way, the thermal expansion characteristics of the detection piece and the base coincide with each other, and there is an advantage of eliminating the adverse effects due to thermal distortion. Therefore, durability can be improved and performance can be stabilized.
Next, it is preferable to use a quartz material as a material constituting the detection piece 10. That is, the following advantages can be obtained by using quartz instead of the conventionally used silicon as the material of the detection piece 10. That is, quartz is a material that is physically stable compared to silicon, has little secular change, and has high reproducibility due to mechanical deformation (less hysteresis). Further, according to quartz, it is easy to strictly manage the thickness of the thin portion as a diaphragm, and a diaphragm having a uniform plate thickness without any difference in thickness of the thin portion can be obtained for each piece. That is, in order to process the thin portion 11 to the target thickness, first, after forming the thin portion 11 by etching the quartz plate, an electrode is attached to the thin portion 11 and energized to measure the natural frequency of the thin portion. To compare with the target frequency (target wall thickness). If the target frequency does not match, fine etching is performed until the target frequency is reached. As a result, it is possible to obtain a thin portion having a uniform thickness without a difference in thickness of the thin portion for each piece.
Note that a technique for measuring the natural frequency in order to finely adjust the thickness of the thin portion 10a of the piezoelectric material such as quartz is disclosed in, for example, Japanese Patent Laid-Open No. 06-021740. It is well known as a processing technology for thin plate piezoelectric vibrators, and this technology can be applied as it is.
As a quartz material to be used, a material having a thick sliding mode, for example, an AT cut quartz plate is preferable.

次に、上記各実施形態に示した如き薄肉部を備えた検出片を製造する場合には、ウェットエッチングによる方法が好ましい。ガスエッチング等のドライエッチング法によっても製造は可能であるが、生産性を考慮した場合にはウェットエッチングが有効である。この場合、ウェットエッチングによるエッチング速度に対して異方性を有する材料を使用することが好ましい。このような異方性を有する材料としては、水晶材料、特にＡＴカット水晶板を使用することが好ましい。即ち、水晶は、温度変化に対して安定した物質である一方で、ウェットエッチングによるエッチング速度に対して異方性を有しているため、図１、図２に示した如き均一厚領域１１ａと増厚領域１１ｂを備えた薄肉部１１を容易に製造することができる。
特に、水晶板面の法線と、水晶結晶のＺ軸とのなす角度θがθ≠０°である場合には、異方性に起因してエッチング面に傾斜面を形成し易いという利点があり、所望の傾斜面を得ることができる。
即ち、検出片１０を水晶板から構成する場合には、検出片の主面に対する放線が水晶結晶軸Ｚに対して０°以外の角度をなすように構成するのが好ましい。
更に、検出片を、ＡＴカット水晶板等の厚味すべりモードを有する材料にて構成する場合には、異方性による利点に加えて、厚味を周波数換算してモニタリングすることが可能であるため、薄肉部を精度良く加工することができる。
また、エッチングにより肉厚が漸増する増厚領域１１ｂを形成する場合には、図１に示すように検出片の上面中央部のみをエッチングして凹陥部を形成し、下面をフラット形状に保つ。そして、フラットな下面を底板２の上面に対向させるように組み付けることが好ましい。このようにすることにより、気密空間Ｓのギャップが均一化するため、測定精度を高めることが可能となる。
なお、ガスエッチングによって、図１、図２、図３に示した如き構造の検出片を加工する場合には、エッチング面を覆うマスクの位置をずらすことにより、各部のエッチング時間を異ならせる作業を行う必要がある。 Next, when manufacturing a detection piece having a thin portion as shown in the above embodiments, a method by wet etching is preferable. Manufacture is also possible by dry etching methods such as gas etching, but wet etching is effective in consideration of productivity. In this case, it is preferable to use a material having anisotropy with respect to the etching rate by wet etching. As the material having such anisotropy, it is preferable to use a quartz material, particularly an AT-cut quartz plate. That is, quartz is a material that is stable with respect to temperature changes, but has anisotropy with respect to the etching rate by wet etching, so that the uniform thickness region 11a as shown in FIGS. The thin part 11 provided with the thickened region 11b can be easily manufactured.
In particular, when the angle θ formed between the normal line of the crystal plate surface and the Z axis of the crystal crystal is θ ≠ 0 °, there is an advantage that an inclined surface can be easily formed on the etched surface due to anisotropy. Yes, a desired inclined surface can be obtained.
That is, when the detection piece 10 is formed of a quartz plate, it is preferable that the ray with respect to the main surface of the detection piece forms an angle other than 0 ° with respect to the quartz crystal axis Z.
Furthermore, when the detection piece is made of a material having a thick sliding mode such as an AT-cut quartz plate, it is possible to monitor the thickness in terms of frequency in addition to the advantage due to anisotropy. Therefore, the thin portion can be processed with high accuracy.
Further, when the thickened region 11b whose thickness is gradually increased by etching is formed, as shown in FIG. 1, only the center portion of the upper surface of the detection piece is etched to form a recessed portion, and the lower surface is kept flat. And it is preferable to assemble | attach so that a flat lower surface may be made to oppose the upper surface of the baseplate 2. As shown in FIG. By doing so, the gap of the airtight space S is made uniform, so that the measurement accuracy can be improved.
When processing the detection piece having the structure shown in FIGS. 1, 2, and 3 by gas etching, the etching time of each part is varied by shifting the position of the mask covering the etching surface. There is a need to do.

次に、図５（ａ）（ｂ）は均一厚の薄肉部を有したシリコンから成る検出片を使用した従来のタッチモード式圧力センサーと、ＡＴカット水晶から成る検出片を使用した図１に示す本発明のタッチモード式圧力センサーの圧力−容量特性を比較する図である。何れの圧力センサーも、容量が８０ｐＦとなった時点で飽和する点では同じであるが、本発明の圧力センサーは、飽和状態に達するまでの過程における圧力感度の直線性に優れると共に、より高圧側まで圧力を計測できるポテンシャルを備えている。従来例の圧力センサーは測定圧力が５ｋｇ／ｃｍ２になった段階で飽和に近い状態に達しているのに対して、本発明の圧力センサーは１０ｋｇ／ｃｍ２に達するまで直線性を維持している。
従って、本発明では、同一の圧力センサーを空気圧力の異なるタイヤに共用することができる。つまり、空気圧力の異なるタイヤごとに異なった圧力センサーを製造し、適用する必要が無くなる。
本発明の圧力センサーは、タイヤ等の閉空間内の気体の圧力変化を測定する以外にも、流体一般の圧力測定に適用することができる。 Next, FIGS. 5 (a) and 5 (b) show the conventional touch mode type pressure sensor using a detection piece made of silicon having a thin part with a uniform thickness and the detection piece made of AT cut crystal in FIG. It is a figure which compares the pressure-capacitance characteristic of the touch mode type pressure sensor of this invention shown. All the pressure sensors are the same in that they are saturated when the capacitance reaches 80 pF, but the pressure sensor of the present invention has excellent linearity of pressure sensitivity in the process until reaching the saturation state, and the higher pressure side. It has the potential to measure pressure up to. While the pressure sensor of the conventional example has reached a state close to saturation when the measured pressure reaches 5 kg / cm 2 , the pressure sensor of the present invention maintains linearity until it reaches 10 kg / cm 2. Yes.
Therefore, in the present invention, the same pressure sensor can be shared by tires having different air pressures. That is, it is not necessary to manufacture and apply different pressure sensors for tires having different air pressures.
The pressure sensor of the present invention can be applied to pressure measurement in general fluids in addition to measuring a pressure change of a gas in a closed space such as a tire.

１ 圧力センサー、２ 底板、３ 基台、４ 下部電極膜、５ 誘電体膜、１０検出片、１１ 薄肉部（ダイヤフラム）、１１ａ 均一厚領域、１１ｂ 増厚領域、１２ 厚肉環状部、１３ 上部電極膜、１５、１５ａ、１５ｂ 段差部、Ｓ 気密空間、２０ 接合部材 DESCRIPTION OF SYMBOLS 1 Pressure sensor, 2 Bottom plate, 3 Bases, 4 Lower electrode film, 5 Dielectric film, 10 Detection piece, 11 Thin part (diaphragm), 11a Uniform thickness area, 11b Thickening area, 12 Thick annular part, 13 Upper part Electrode film, 15, 15a, 15b Stepped portion, S airtight space, 20 bonding member

Claims (59)

基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base and a detection piece fixed on the surface of the base and provided with a thin portion at a position facing the upper surface of the base, and the thickness of the thin portion of the detection piece is not uniform over the entire surface A pressure sensor characterized by that. 基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a uniform thickness within a predetermined width from one end thereof. The thin-walled portion that is not uniform over the entire surface, and a thickened region in which the range from the uniform-thickness region to the other end of the thin-walled portion is thicker than the uniform-thickness region A pressure sensor comprising: 基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a uniform thickness within a predetermined width from one end thereof. The thin-walled portion that is not uniform over the entire surface, and a thickened region in which the range from the uniform-thickness region to the other end of the thin-walled portion is thicker than the uniform-thickness region The thickened region has a configuration in which the thickness of the thin portion gradually increases from the uniform thickness region toward the other end of the thin portion. 基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a uniform thickness within a predetermined width from one end thereof. The thin-walled portion that is not uniform over the entire surface, and a thickened region in which the range from the uniform-thickness region to the other end of the thin-walled portion is thicker than the uniform-thickness region The thickened region has a step-like configuration in which the thickness of the thin portion has at least one step portion. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有することを特徴とする請求項１、２、３又は４に記載の圧力センサー。   5. The pressure sensor according to claim 1, wherein the detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion. 前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であることを特徴とする請求項１、２、３又は４に記載の圧力センサー。   5. The pressure sensor according to claim 1, wherein one of the thin portions of the detection piece is a flat surface and the other surface is an inclined surface or a stepped shape. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有し、前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状の構成を有することを特徴とする請求項１、２、３又は４に記載の圧力センサー。   The detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion, and the thin portion of the detection piece has a flat surface on one side and an inclined surface on the other side, or The pressure sensor according to claim 1, wherein the pressure sensor has a stepped configuration. 前記基台は、凹陥部と、該凹陥部の外周を包囲する外枠と、を有し、前記外枠の上面に前記検出片を支持することにより前記薄肉部と前記凹陥部との間に得られた微小ギャップと、を有することを特徴とする請求項１、２、３又は４に記載の圧力センサー。   The base includes a recessed portion and an outer frame that surrounds the outer periphery of the recessed portion, and supports the detection piece on the upper surface of the outer frame so that the thin portion and the recessed portion are interposed. The pressure sensor according to claim 1, 2, 3, or 4, wherein the pressure sensor has an obtained micro gap. 前記圧力センサーはタッチモード容量圧力センサーであることを特徴とする請求項１、２、３又は４に記載の圧力センサー。   The pressure sensor according to claim 1, 2, 3, or 4, wherein the pressure sensor is a touch mode capacitive pressure sensor. 前記段差部は、薄肉部の基材上に金属層を付加することによって形成したものであることを特徴とする請求項４に記載の圧力センサー。   The pressure sensor according to claim 4, wherein the stepped portion is formed by adding a metal layer on a thin-walled base material. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a thin piece at a position facing the upper surface of the base and a detection piece fixed on the surface of the base, and the thickness of the thin piece of the detection piece is the entire surface A pressure sensor that is not uniform over the entire area. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a predetermined width from one end thereof A uniform thickness region having a uniform thickness, and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. A pressure sensor having the thin portion that is not uniform. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a predetermined width from one end thereof A uniform thickness region having a uniform thickness, and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. The pressure sensor according to claim 1, wherein the pressure sensor includes the thin portion that is not uniform, and the thickened region has a configuration in which the thickness of the thin portion gradually increases from the uniform thick region toward the other end of the thin portion. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece having a predetermined width from one end thereof A uniform thickness region having a uniform thickness, and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. The pressure sensor according to claim 1, wherein the pressure sensor has a thin portion that is not uniform, and the thickened region has a stepped configuration in which the thickness of the thin portion has at least one step portion. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片とを備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base made of a piezoelectric crystal material; and a detection piece made of a piezoelectric crystal material fixed on the surface of the base and having a thin portion at a position facing the upper surface of the base, and the thin portion of the detection piece The pressure sensor is characterized in that the thickness is not uniform over the entire surface. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece made of a piezoelectric crystal material provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece comprising: A uniform thickness region having a uniform thickness from one end to a predetermined width; and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. A pressure sensor comprising the thin portion which is not uniform over the entire surface. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece made of a piezoelectric crystal material provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece comprising: A uniform thickness region having a uniform thickness from one end to a predetermined width; and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. The thin portion that is not uniform over the entire surface, and the thickened region has a structure in which the thickness of the thin portion gradually increases from the uniform thickness region toward the other end of the thin portion. sensor. 圧電結晶材料から成る基台と、該基台の上面と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片とを備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, and a detection piece made of a piezoelectric crystal material provided with a thin portion at a position facing the upper surface of the base and fixed on the surface of the base, the detection piece comprising: A uniform thickness region having a uniform thickness from one end to a predetermined width; and a thickened region in which the range from the uniform thickness region to the other end of the thin portion is thicker than the uniform thickness region. The pressure sensor is characterized in that the thin portion is not uniform over the entire surface, and the thickened region has a step-like configuration in which the thickness of the thin portion has at least one step portion. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有することを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17 or 18, wherein the detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion. . 前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であることを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The thin portion of the detection piece has one surface which is a flat surface, and the other surface is an inclined surface or a stepped shape. 18. The pressure sensor according to 18. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有し、前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状の構成を有することを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion, and the thin portion of the detection piece has a flat surface on one side and an inclined surface on the other side, or 19. The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17, or 18, characterized by having a stepped configuration. 前記基台は、凹陥部と、該凹陥部の外周を包囲する外枠と、を有し、前記外枠の上面に前記検出片を支持することにより前記薄肉部と前記凹陥部との間に得られた微小ギャップと、を有する請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The base includes a recessed portion and an outer frame that surrounds the outer periphery of the recessed portion, and supports the detection piece on the upper surface of the outer frame so that the thin portion and the recessed portion are interposed. The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17, or 18 having the obtained micro gap. 圧電結晶材料から成る前記基台と、該基台と同一種の圧電結晶材料から成る前記検出片と、を備え、前記検出片の結晶軸の方向と前記基台の結晶軸の方向とを一致させた状態で、前記検出片に対して前記基台を重ね合わせたことを特徴とする請求項１５、１６、１７又は１８に記載の圧力センサー。   The base made of piezoelectric crystal material and the detection piece made of the same type of piezoelectric crystal material as the base, and the crystal axis direction of the detection piece coincides with the crystal axis direction of the base The pressure sensor according to claim 15, 16, 17 or 18, wherein the base is superposed on the detection piece in a state where the detection piece is placed. 前記圧電結晶材料が水晶であることを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   19. The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17 or 18, wherein the piezoelectric crystal material is quartz. 前記検出片が水晶板から成り、該水晶板の主面に対する法線が水晶結晶軸Ｚに対して０°以外の角度を成しており、前記検出片が前記水晶板をウェットエッチングによって薄く加工した前記薄肉部を有することを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The detection piece is made of a quartz plate, the normal to the main surface of the quartz plate forms an angle other than 0 ° with respect to the quartz crystal axis Z, and the detection piece is thinly processed by wet etching. The pressure sensor according to claim 11, wherein the pressure sensor has the thinned portion. 前記検出片を構成する圧電結晶材料は、厚味すべりモードを有することを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17 or 18, wherein the piezoelectric crystal material constituting the detection piece has a thick-slip mode. 前記検出片を構成する圧電結晶材料は、ＡＴカット水晶板であることを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17 or 18, wherein the piezoelectric crystal material constituting the detection piece is an AT-cut quartz plate. 前記圧力センサーは、タッチモード容量圧力センサーであることを特徴とする請求項１１、１２、１３、１４、１５、１６、１７又は１８に記載の圧力センサー。   The pressure sensor according to claim 11, 12, 13, 14, 15, 16, 17 or 18, wherein the pressure sensor is a touch mode capacitive pressure sensor. 前記段差部は、薄肉部の基材上に金属層を付加することによって形成したものであることを特徴とする請求項１８に記載の圧力センサー。   The pressure sensor according to claim 18, wherein the stepped portion is formed by adding a metal layer on a thin-walled base material. 基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a detection piece having a thin portion at a position facing the dielectric film and fixed on the surface of the base An upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and a space of a minute gap between the lower surface of the detection piece and the dielectric film, The pressure sensor according to claim 1, wherein the thickness of the thin portion of the detection piece is not uniform over the entire surface. 基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a detection piece having a thin portion at a position facing the dielectric film and fixed on the surface of the base An upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and a space of a minute gap between the lower surface of the detection piece and the dielectric film, The detection piece includes a uniform thickness region having a uniform thickness within a predetermined width from one end thereof, and an increase from the uniform thickness region to the other end of the thin portion being thicker than the uniform thickness region. And a thin portion that is not uniform over the entire surface including a thick region. 基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a detection piece having a thin portion at a position facing the dielectric film and fixed on the surface of the base An upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and a space of a minute gap between the lower surface of the detection piece and the dielectric film, The detection piece includes a uniform thickness region having a uniform thickness within a predetermined width from one end thereof, and an increase from the uniform thickness region to the other end of the thin portion being thicker than the uniform thickness region. A thin region that is not uniform over the entire surface, and the increased thickness region has a configuration in which the thickness of the thin portion gradually increases from the uniform thickness region toward the other end of the thin portion. A pressure sensor characterized by that. 基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a detection piece having a thin portion at a position facing the dielectric film and fixed on the surface of the base An upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and a space of a minute gap between the lower surface of the detection piece and the dielectric film, The detection piece includes a uniform thickness region having a uniform thickness within a predetermined width from one end thereof, and an increase from the uniform thickness region to the other end of the thin portion being thicker than the uniform thickness region. A thin region that is not uniform over the entire surface, and the increased thickness region has a step-like configuration in which the thickness of the thin portion has at least one stepped portion. Pressure sensor. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有することを特徴とする請求項３０、３１、３２又は３３に記載の圧力センサー。   The pressure sensor according to claim 30, 31, 32, or 33, wherein the detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion. 前記検出片は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であることを特徴とする請求項３０、３１、３２又は３３に記載の圧力センサー。   34. The pressure sensor according to claim 30, 31, 32, or 33, wherein one side of the detection piece is a flat surface and the other side is an inclined surface or a stepped shape. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有し、前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状の構成を有することを特徴とする請求項３０、３１、３２又は３３に記載の圧力センサー。   The detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion, and the thin portion of the detection piece has a flat surface on one side and an inclined surface on the other side, or The pressure sensor according to claim 30, 31, 32, or 33, wherein the pressure sensor has a stepped configuration. 前記基台は、凹陥部と、該凹陥部の外周を包囲する外枠と、を有し、前記外枠の上面に前記検出片を支持することにより前記薄肉部と前記凹陥部との間に得られた微小ギャップと、を有することを特徴とする請求項３０、３１、３２又は３３に記載の圧力センサー。   The base includes a recessed portion and an outer frame that surrounds the outer periphery of the recessed portion, and supports the detection piece on the upper surface of the outer frame so that the thin portion and the recessed portion are interposed. 34. The pressure sensor according to claim 30, 31, 32, or 33, wherein the pressure sensor has an obtained micro gap. 前記圧力センサーはタッチモード容量圧力センサーであることを特徴とする請求項３０、３１、３２又は３３に記載の圧力センサー。   The pressure sensor according to claim 30, 31, 32, or 33, wherein the pressure sensor is a touch mode capacitive pressure sensor. 前記段差部は、薄肉部の基材上に金属層を付加することによって形成したものであることを特徴とする請求項３３に記載の圧力センサー。   The pressure sensor according to claim 33, wherein the step portion is formed by adding a metal layer on a thin-walled base material. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A small gap between the detection piece, the upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and the lower surface of the detection piece and the dielectric film And the thickness of the thin portion of the detection piece is not uniform over the entire surface. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A small gap between the detection piece, the upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and the lower surface of the detection piece and the dielectric film And the detection piece has a uniform thickness region in which a range of a predetermined width from one end thereof is a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion is larger than the uniform thickness region. A pressure sensor comprising the thinned portion that is not uniform over the entire surface including a thickened region that is thick. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A small gap between the detection piece, the upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and the lower surface of the detection piece and the dielectric film And the detection piece has a uniform thickness region in which a range of a predetermined width from one end thereof is a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion is larger than the uniform thickness region. And the thickened region has a thinned portion that is not uniform over the entire surface, and the thickened portion has a thickness of the thinned portion from the uniform thickened region toward the other end of the thinned portion. A pressure sensor having a gradually increasing configuration. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A small gap between the detection piece, the upper electrode film formed on at least a part of the thin portion in a positional relationship facing the lower electrode film, and the lower surface of the detection piece and the dielectric film And the detection piece has a uniform thickness region in which a range of a predetermined width from one end thereof is a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion is larger than the uniform thickness region. And a thickened thickened region, and the thinned portion is not uniform over the entire surface, and the thickened region has a stepped configuration in which the thickness of the thinned portion has at least one stepped portion. A pressure sensor comprising: 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片の薄肉部の厚さは全面に亘って均一でないことを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A detection piece made of the piezoelectric crystal material formed, an upper electrode film formed on at least a part of the thin portion facing the lower electrode film, and a lower surface of the detection piece and the dielectric film A pressure gap, wherein the thickness of the thin portion of the detection piece is not uniform over the entire surface. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A detection piece made of the piezoelectric crystal material formed, an upper electrode film formed on at least a part of the thin portion facing the lower electrode film, and a lower surface of the detection piece and the dielectric film The detection piece has a uniform thickness region in which a range of a predetermined width from one end of the detection piece has a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion. A pressure sensor comprising the thinned portion that is not uniform over the entire surface, and a thickened region that is thicker than the uniform thickness region. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が前記均一厚領域から前記薄肉部の他端に向かい漸増する構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A detection piece made of the piezoelectric crystal material formed, an upper electrode film formed on at least a part of the thin portion facing the lower electrode film, and a lower surface of the detection piece and the dielectric film The detection piece has a uniform thickness region in which a range of a predetermined width from one end of the detection piece has a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion. A thickened region that is thicker than the uniform thickness region, and the thinned portion that is not uniform over the entire surface, wherein the thickened portion has a thickness of the thinned portion from the uniform thickness region to the thinned portion. A pressure sensor characterized by having a configuration that gradually increases toward the other end of the sensor. 圧電結晶材料から成る基台と、該基台の面上に順次積層された下部電極膜及び誘電体膜と、該誘電体膜と対向する位置に薄肉部を備えるとともに基台の面上に固定された圧電結晶材料から成る検出片と、前記下部電極膜と対向する位置関係となる前記薄肉部の少なくとも一部に形成した上部電極膜と、前記検出片の下面と前記誘電体膜との間に微小ギャップの空間と、を備え、前記検出片は、その一端から所定幅の範囲が均一な厚さである均一厚領域と、該均一厚領域から前記薄肉部の他端までの範囲が前記均一厚領域よりも厚肉である増厚領域と、を備えた全面に亘って均一でない前記薄肉部を有し、前記増厚領域は、薄肉部の肉厚が少なくとも一つの段差部を有した階段状の構成を有することを特徴とする圧力センサー。   A base made of a piezoelectric crystal material, a lower electrode film and a dielectric film sequentially stacked on the surface of the base, and a thin portion at a position facing the dielectric film and fixed on the surface of the base A detection piece made of the piezoelectric crystal material formed, an upper electrode film formed on at least a part of the thin portion facing the lower electrode film, and a lower surface of the detection piece and the dielectric film The detection piece has a uniform thickness region in which a range of a predetermined width from one end of the detection piece has a uniform thickness, and a range from the uniform thickness region to the other end of the thin portion. A thickened region that is thicker than the uniform thickness region, and the thinned portion that is not uniform over the entire surface, and the thickened region has at least one step portion with a thinned portion. A pressure sensor having a stepped configuration. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有することを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46, or 47, wherein the detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion. . 前記検出片は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状であることを特徴とする請求項４０、４１、４２、４３、４４、４６又は４７に記載の圧力センサー。   The pressure according to claim 40, 41, 42, 43, 44, 46 or 47, wherein the detection piece has one surface which is a flat surface and the other surface is an inclined surface or a stepped shape. sensor. 前記検出片は、前記薄肉部の外周縁に厚肉環状部を一体化した構成を有し、前記検出片の薄肉部は、一方の面が平坦面であり、他方の面が傾斜面、或いは階段状の構成を有することを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   The detection piece has a configuration in which a thick annular portion is integrated with an outer peripheral edge of the thin portion, and the thin portion of the detection piece has a flat surface on one side and an inclined surface on the other side, or 48. Pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, characterized by a stepped configuration. 前記基台は、凹陥部と、該凹陥部の外周を包囲する外枠と、を有し、前記外枠の上面に前記検出片を支持することにより前記薄肉部と前記凹陥部との間に得られた微小ギャップと、を有することを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   The base includes a recessed portion and an outer frame that surrounds the outer periphery of the recessed portion, and supports the detection piece on the upper surface of the outer frame so that the thin portion and the recessed portion are interposed. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46, or 47, wherein the pressure sensor has an obtained micro gap. 前記圧力センサーはタッチモード容量圧力センサーであることを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   48. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, wherein the pressure sensor is a touch mode capacitive pressure sensor. 圧電結晶材料から成る前記基台と、該基台と同一種の圧電結晶材料から成る前記検出片と、を備え、前記検出片の結晶軸の方向と前記基台の結晶軸の方向とを一致させた状態で、前記検出片に対して前記基台を重ね合わせたことを特徴とする請求項４４、４５、４６又は４７に記載の圧力センサー。   The base made of piezoelectric crystal material and the detection piece made of the same type of piezoelectric crystal material as the base, and the crystal axis direction of the detection piece coincides with the crystal axis direction of the base 48. The pressure sensor according to claim 44, 45, 46, or 47, wherein the base is superimposed on the detection piece in a state of being caused to move. 前記圧電結晶材料が水晶であることを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   48. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, wherein the piezoelectric crystal material is quartz. 前記検出片が水晶板から成り、該水晶板の主面に対する法線が水晶結晶軸Ｚに対して０°以外の角度を成しており、前記検出片が前記水晶板をウェットエッチングによって薄く加工した前記薄肉部を有することを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   The detection piece is made of a quartz plate, the normal to the main surface of the quartz plate forms an angle other than 0 ° with respect to the quartz crystal axis Z, and the detection piece is thinly processed by wet etching. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46, or 47, wherein the pressure sensor has the thinned portion. 前記検出片を構成する圧電結晶材料は、厚味すべりモードを有することを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   48. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, wherein the piezoelectric crystal material constituting the detection piece has a thick-slip mode. 前記検出片を構成する圧電結晶材料は、ＡＴカット水晶板であることを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   48. The pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, wherein the piezoelectric crystal material constituting the detection piece is an AT-cut quartz plate. 前記圧力センサーは、タッチモード容量圧力センサーであることを特徴とする請求項４０、４１、４２、４３、４４、４５、４６又は４７に記載の圧力センサー。   48. A pressure sensor according to claim 40, 41, 42, 43, 44, 45, 46 or 47, wherein the pressure sensor is a touch mode capacitive pressure sensor. 前記段差部は、薄肉部の基材上に金属層を付加することによって形成したものであることを特徴とする請求項４７に記載の圧力センサー。   48. The pressure sensor according to claim 47, wherein the step portion is formed by adding a metal layer on a thin-walled base material.
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