JP2012042267A - Industrial machine - Google Patents

Industrial machine Download PDF

Info

Publication number
JP2012042267A
JP2012042267A JP2010182214A JP2010182214A JP2012042267A JP 2012042267 A JP2012042267 A JP 2012042267A JP 2010182214 A JP2010182214 A JP 2010182214A JP 2010182214 A JP2010182214 A JP 2010182214A JP 2012042267 A JP2012042267 A JP 2012042267A
Authority
JP
Japan
Prior art keywords
moving mechanism
axis direction
cable
axis
axial direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010182214A
Other languages
Japanese (ja)
Other versions
JP5639815B2 (en
Inventor
Kazuaki Kawarai
一晃 河原井
Fusa Ogane
房 大金
Masao Kawabori
政夫 川堀
Fusao Shimizu
房雄 清水
Masao Suzuki
政夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP2010182214A priority Critical patent/JP5639815B2/en
Publication of JP2012042267A publication Critical patent/JP2012042267A/en
Application granted granted Critical
Publication of JP5639815B2 publication Critical patent/JP5639815B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an industrial machine that moves a moving mechanism while suppressing fluctuations of the moving mechanism, and reduces a measurement error depending upon a control object.SOLUTION: A three-dimensional measuring machine 1 includes: a moving mechanism 2 that has a table 11 on which a body to be measured is placed and a support part 213 capable of moving with respect to the table 11, and is provided to be movable in a predetermined axial direction while supported by the support part 213 to move a probe 12 in the predetermined axial direction; a controller that controls the moving mechanism 2; and a cableveyor 3 that is attached to a portal frame 21, and guides and accommodates a cable connecting the moving mechanism 2 and controller to each other, in which a centroid axis line O-O extending in a Z-axial direction while passing through the center of gravity of the cableveyor 3 is aligned with a support guide axis P-P extending in the Z-axial direction while passing through the center of the support port 213, in an X-axial direction.

Description

本発明は産業機械に関する。   The present invention relates to an industrial machine.

従来、被測定物を測定するために設けられた制御対象物としてのプローブを互いに直交するX軸方向、Y軸方向およびZ軸方向に移動させる移動機構と、この移動機構を制御する制御装置と、移動機構に取り付けられ、移動機構と制御装置とを接続するケーブルを案内して収納するケーブル案内装置とを備える産業機械としての三次元測定機が知られている(例えば、特許文献1参照)。
この三次元測定機では、移動機構は、制御装置によってY軸方向に移動され、プローブをY軸方向に移動させる門型フレームと、制御装置によってX軸方向に移動され、プローブをX軸方向に移動させるXスライダと、制御装置によってZ軸方向に移動され、プローブをZ軸方向に移動させるZ軸スピンドルとを備える。
Conventionally, a moving mechanism for moving a probe as a control object provided for measuring an object to be measured in the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other, and a control device that controls the moving mechanism A three-dimensional measuring machine is known as an industrial machine provided with a cable guide device that is attached to a moving mechanism and guides and stores a cable that connects the moving mechanism and a control device (for example, see Patent Document 1). .
In this coordinate measuring machine, the moving mechanism is moved in the Y-axis direction by the control device, the portal frame that moves the probe in the Y-axis direction, and moved in the X-axis direction by the control device, and the probe is moved in the X-axis direction. An X-slider to be moved and a Z-axis spindle that is moved in the Z-axis direction by the control device and moves the probe in the Z-axis direction.

門型フレームとXスライダとZ軸スピンドルとは、それぞれに設けられた駆動モータによって駆動される。例えば、門型フレームは、被測定物を載置するガイド部材としてのテーブルに対して移動可能な支持部を有し、その支持部に支持されて、駆動モータによって駆動される。
門型フレームとXスライダとZ軸スピンドルとはそれぞれ、駆動モータのモータ速度に基づくフィードバック信号が制御装置に送信されるフィードバック信号線と、駆動モータのモータ速度を制御する駆動信号が制御装置から送信される駆動信号線などが入ったケーブルを介して制御装置に接続される。
The portal frame, the X slider, and the Z-axis spindle are driven by drive motors provided respectively. For example, the portal frame has a support portion that can move with respect to a table as a guide member on which the object to be measured is placed, is supported by the support portion, and is driven by a drive motor.
Each of the portal frame, the X slider, and the Z-axis spindle transmits a feedback signal line that transmits a feedback signal based on the motor speed of the drive motor to the control device, and a drive signal that controls the motor speed of the drive motor from the control device. Connected to the control device via a cable containing a drive signal line and the like.

このような三次元測定機では、図1に想像線で示すように、ケーブル案内装置は、門型フレームから所定の離間距離Lだけ離れた位置に取り付けられている。離間距離Lは、ケーブル案内装置の重心を通ってZ軸方向に延びる重心軸線O1−O1と、支持部の中心を通ってZ軸方向に延びる支持案内軸P−Pとの間の距離である。
門型フレームが制御装置によって移動されると、その移動に応じてケーブル案内装置が変形する。
In such a coordinate measuring machine, as indicated by an imaginary line in FIG. 1, the cable guide device is attached at a position separated from the portal frame by a predetermined separation distance L. The separation distance L is a distance between the center of gravity axis O1-O1 extending in the Z-axis direction through the center of gravity of the cable guide device and the support guide axis PP extending in the Z-axis direction through the center of the support portion. .
When the portal frame is moved by the control device, the cable guide device is deformed in accordance with the movement.

特開平07−159151号公報Japanese Patent Application Laid-Open No. 07-159151

このような従来の三次元測定機では、門型フレームに対して、ケーブル案内装置の重量と離間距離Lとの積で算出されるモーメントが門型フレームの移動方向を中心軸とした回転方向に加わる。このため、門型フレームは、その移動に際して、移動方向を中心軸とした回転方向に揺動する。よって、プローブが門型フレームの移動方向について被測定物を測定するときに測定誤差が生じる。
また、特に、制御装置の近くでは配線量も増え、ケーブル案内装置の重量も増える。このため、前述の揺動がより顕著に現れる。
さらに、設計上の公差などにより、門型フレームの移動方向にわたって離間距離Lも一定ではない。そうすると、門型フレームに加わるモーメントも門型フレームの位置ごとに異なり、前述の揺動がより複雑になる。
In such a conventional coordinate measuring machine, the moment calculated by the product of the weight of the cable guide device and the separation distance L is in a rotational direction about the moving direction of the portal frame with respect to the portal frame. Join. For this reason, the portal frame swings in the rotational direction with the moving direction as the central axis when moving. Therefore, a measurement error occurs when the probe measures the object to be measured in the moving direction of the portal frame.
In particular, the amount of wiring increases near the control device, and the weight of the cable guide device also increases. For this reason, the above-mentioned oscillation appears more remarkably.
Furthermore, the separation distance L is not constant over the moving direction of the portal frame due to design tolerances. In this case, the moment applied to the portal frame also varies depending on the position of the portal frame, and the aforementioned swing becomes more complicated.

本発明の目的は、移動機構の揺動を抑えて移動機構を移動させることができ、制御対象物による測定誤差を低減できる産業機械を提供することである。   An object of the present invention is to provide an industrial machine that can move a moving mechanism while suppressing swinging of the moving mechanism, and can reduce measurement errors due to a controlled object.

本発明の産業機械は、被測定物を載置するガイド部材と、前記ガイド部材に対して移動可能な支持部を有し、前記支持部で支持されて所定の軸方向へ移動可能に設けられ、制御対象物を所定の軸方向へ移動させる移動機構と、前記移動機構を制御する制御装置と、前記移動機構に取り付けられ、前記移動機構と前記制御装置とを接続するケーブルを案内して収納するケーブル案内装置とを備える産業機械であって、前記ケーブル案内装置の重心を通って鉛直方向に延びる重心軸線が、前記移動機構の移動方向および鉛直方向と互いに直交する水平方向において、前記支持部の中心を通って鉛直方向に延びる支持案内軸と一致していることを特徴とする。   The industrial machine of the present invention has a guide member for placing an object to be measured and a support portion movable with respect to the guide member, and is supported by the support portion so as to be movable in a predetermined axial direction. , A moving mechanism for moving a control target object in a predetermined axial direction, a control device for controlling the moving mechanism, and a cable attached to the moving mechanism and connecting the moving mechanism and the control device for guiding and storing. An industrial machine including a cable guide device, wherein the center of gravity axis extending in the vertical direction through the center of gravity of the cable guide device is in the horizontal direction perpendicular to the moving direction of the moving mechanism and the vertical direction. It corresponds to a support guide shaft extending in the vertical direction through the center of the.

このような構成によれば、ケーブル案内装置の重心軸線が、水平方向において、移動機構の支持案内軸と一致しているため、移動機構に対して、ケーブル案内装置の重量に起因して移動機構の移動方向を中心軸としたモーメントが発生することを抑えられる。よって、移動機構が、その移動方向を中心として揺動することなくその方向に沿って移動でき、制御対象物によるその方向に関する測定誤差を低減できる。   According to such a configuration, since the center of gravity axis of the cable guide device coincides with the support guide shaft of the moving mechanism in the horizontal direction, the moving mechanism is caused by the weight of the cable guiding device. It is possible to suppress the generation of a moment with the moving direction of as the central axis. Therefore, the moving mechanism can move along the direction without swinging around the moving direction, and the measurement error related to the direction due to the controlled object can be reduced.

本発明の産業機械において、前記ケーブル案内装置は、前記ガイド部材を挟んで前記移動機構と反対側に取り付けられることが好ましい。   In the industrial machine according to the present invention, it is preferable that the cable guide device is attached to the opposite side of the moving mechanism with the guide member interposed therebetween.

このような構成によれば、ガイド部材や移動機構の内部を加工してケーブル案内装置を収納するスペースを作らなくて済み、ガイド部材を挟んで移動機構と反対側のすでに空いているスペースを利用してケーブル案内装置を収納しておくことができる。このため、産業機械をコンパクトにすることができる。   According to such a configuration, it is not necessary to create a space for storing the cable guide device by processing the inside of the guide member or the moving mechanism, and use an already vacant space on the opposite side of the moving mechanism across the guide member. Thus, the cable guide device can be stored. For this reason, an industrial machine can be made compact.

本発明の実施形態に係る三次元測定機を示す正面図。The front view which shows the three-dimensional measuring machine which concerns on embodiment of this invention. 本発明の実施形態に係る三次元測定機を示す左側面図。The left view which shows the coordinate measuring machine which concerns on embodiment of this invention.

以下、本発明の実施形態を図面に基づいて説明する。
図1と図2に示す産業機械としての三次元測定機1は、図示しない被測定物を上面に載置するガイド部材としてのテーブル11と、被測定物を測定するために三次元測定機1に設けられた制御対象物としてのプローブ12を移動させる移動機構2と、移動機構2を制御する図示しない制御装置と、移動機構2に取り付けられたケーブル案内装置としてのケーブルベア3とを備える。
テーブル11は基台13上に支持されており、テーブル11の図1中左側部分は基台13よりも図1中左側に突出した突出部11Aとなっている。プローブ12は、被測定物の表面に接触される測定子12Aを備える。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
A coordinate measuring machine 1 as an industrial machine shown in FIGS. 1 and 2 includes a table 11 as a guide member for placing an object to be measured (not shown) on the upper surface, and a coordinate measuring machine 1 for measuring the object to be measured. A moving mechanism 2 for moving the probe 12 as a control object provided in the control mechanism, a control device (not shown) for controlling the moving mechanism 2, and a cable bear 3 as a cable guide device attached to the moving mechanism 2.
The table 11 is supported on a base 13, and the left portion of the table 11 in FIG. 1 is a protruding portion 11 A that protrudes to the left in FIG. The probe 12 includes a probe 12A that is brought into contact with the surface of the object to be measured.

移動機構2は門型フレーム21とXスライダ22とZ軸スピンドル23とを備える。
門型フレーム21は、テーブル11における図1の左右方向(X軸方向)の両端から図1の上下方向(Z軸方向)に延出し、図1の紙面手前および奥方向(Y軸方向)に沿ってスライド移動可能に設けられるコラム211A,211Bと、各コラム211A,211Bで支持され、X軸方向に沿って延出する水平ビーム212とを備える。
The moving mechanism 2 includes a portal frame 21, an X slider 22, and a Z-axis spindle 23.
The portal frame 21 extends from both ends of the table 11 in the left-right direction (X-axis direction) in FIG. 1 in the up-down direction (Z-axis direction) in FIG. Columns 211A and 211B provided so as to be slidable along, and a horizontal beam 212 supported by the columns 211A and 211B and extending along the X-axis direction.

図1中左側のコラム211Aは、テーブル11に対して移動可能な1対の支持部213,213を有し、各支持部213,213には、図示しない荷重受けエアベアリングが設けられている。
各支持部213,213はテーブル11の突出部11A上を移動可能であり、コラム211Aは、突出部11A上で各支持部213,213によって支持されている。これにより、門型フレーム21は支持部213,213によって支持され、制御装置によってY軸方向に移動される。この門型フレーム21のY軸方向への移動によってプローブ12がY軸方向に移動される。
The left column 211A in FIG. 1 has a pair of support portions 213 and 213 that can move with respect to the table 11. Each of the support portions 213 and 213 is provided with a load receiving air bearing (not shown).
Each support part 213, 213 is movable on the protrusion part 11A of the table 11, and the column 211A is supported by each support part 213, 213 on the protrusion part 11A. Thereby, the portal frame 21 is supported by the support portions 213 and 213 and is moved in the Y-axis direction by the control device. The probe 12 is moved in the Y-axis direction by the movement of the portal frame 21 in the Y-axis direction.

Xスライダ22は、Z軸方向に沿って延出する筒状に形成され、門型フレーム21の水平ビーム212にX軸方向へスライド移動可能に設けられている。Xスライダ22は制御装置によってX軸方向に移動され、このX軸方向への移動によってプローブ12がX軸方向に移動される。
Z軸スピンドル23は、水平ビーム212内を通ってXスライダ22の内部に挿入されてZ軸方向へスライド移動可能に設けられ、下端でプローブ12を支持する。Z軸スピンドル23は制御装置によってZ軸方向に移動され、このZ軸方向への移動によってプローブ12がZ軸方向に移動される。
The X slider 22 is formed in a cylindrical shape extending along the Z-axis direction, and is provided on the horizontal beam 212 of the portal frame 21 so as to be slidable in the X-axis direction. The X slider 22 is moved in the X axis direction by the control device, and the probe 12 is moved in the X axis direction by the movement in the X axis direction.
The Z-axis spindle 23 is inserted into the X slider 22 through the horizontal beam 212 and is slidable in the Z-axis direction, and supports the probe 12 at the lower end. The Z-axis spindle 23 is moved in the Z-axis direction by the control device, and the probe 12 is moved in the Z-axis direction by the movement in the Z-axis direction.

ケーブルベア3は、テーブル11を挟んで門型フレーム21と反対側に取り付けられる。ケーブルベア3は、内部に収納空間が形成された可撓性の延出収納部31と屈曲収納部32とを備え、移動機構2と制御装置とを接続する後述するケーブルを案内して収納する。
延出収納部31は、図1の紙面手前側から見たときにL字形をしており、コラム211Aの下部に連結されている。延出収納部31は、X軸方向に延びる連結部31Aを有している。
図2に示すように、屈曲収納部32は、左側方から見るとU字形をしており、一方の端部32Aを介して延出収納部31の連結部31Aに連結されている。屈曲収納部32の下直線部32Bは図示しない載置部材上に載置され、他方の端部32Cが載置部材に固着されている。
また、図1に示すように、連結部31Aと屈曲収納部32とは、テーブル11の突出部11Aの下方であってかつ基台13の図1中左側方のスペースに配置されている。
The cable bear 3 is attached to the opposite side of the portal frame 21 with the table 11 interposed therebetween. The cable bear 3 includes a flexible extended storage portion 31 and a bent storage portion 32 in which a storage space is formed. The cable bear 3 guides and stores a cable, which will be described later, that connects the moving mechanism 2 and the control device. .
The extension storage portion 31 has an L shape when viewed from the front side of the sheet of FIG. 1, and is connected to the lower portion of the column 211A. The extension storage part 31 has a connection part 31A extending in the X-axis direction.
As shown in FIG. 2, the bent storage portion 32 has a U shape when viewed from the left side, and is connected to the connection portion 31 </ b> A of the extended storage portion 31 through one end portion 32 </ b> A. The lower straight portion 32B of the bent storage portion 32 is placed on a placement member (not shown), and the other end portion 32C is fixed to the placement member.
Further, as shown in FIG. 1, the connecting portion 31 </ b> A and the bent storage portion 32 are arranged in a space below the protruding portion 11 </ b> A of the table 11 and on the left side of the base 13 in FIG. 1.

門型フレーム21を駆動する図示しない駆動モータに関するフィードバック信号線と駆動信号線などが入った図示しないケーブルが、コラム211Aの下部から延出されて延出収納部31内に収納され、続いて屈曲収納部32内にもそのU字形状に合わせて収納される。
また、図1と図2に一点鎖線で示すように、ケーブルベア3の図示しない重心を通って鉛直方向としてのZ軸方向に延びる重心軸線O−Oは、水平方向としてのX軸方向において、支持部213の中心を通ってZ軸方向に延びる支持案内軸P−Pと一致している。
A cable (not shown) including a feedback signal line and a drive signal line for a drive motor (not shown) for driving the portal frame 21 is extended from the lower part of the column 211A and stored in the extension storage part 31, and then bent. Also stored in the storage portion 32 in accordance with the U-shape.
1 and 2, the center-of-gravity axis OO extending in the Z-axis direction as the vertical direction through the center of gravity (not shown) of the cable bear 3 in the X-axis direction as the horizontal direction, It coincides with a support guide axis PP extending in the Z-axis direction through the center of the support portion 213.

門型フレーム21が図示しない制御装置によってY軸方向に移動されると、コラム211AがY軸方向に移動される。コラム211Aの移動に応じて、主に屈曲収納部32がその可撓性によってY軸方向に変形し、内部に収納されているケーブルに捻じれなどが生じないようにされている。このとき、屈曲収納部32が主にY軸方向に変形するため、ケーブルベア3全体の図示しない重心のY軸方向における位置は変化するが、X軸方向における位置はほとんど変化しない。   When the portal frame 21 is moved in the Y-axis direction by a control device (not shown), the column 211A is moved in the Y-axis direction. In accordance with the movement of the column 211A, the bent storage portion 32 is mainly deformed in the Y-axis direction due to its flexibility, so that the cables stored therein are not twisted. At this time, since the bent housing portion 32 is mainly deformed in the Y-axis direction, the position of the center of gravity (not shown) of the entire cable bear 3 changes in the Y-axis direction, but the position in the X-axis direction hardly changes.

そうすると、X軸方向において、重心軸線O−Oが支持案内軸P−Pとほぼ一致したまま、コラム211AがY軸方向に移動される。このため、コラム211Aは、Y軸を中心として揺動することなくY軸に沿って移動し、それによって門型フレーム21が、Y軸を中心として揺動することなくY軸に沿って移動する。この門型フレーム21のY軸方向への移動により、プローブ12が、Y軸を中心として揺動することなくY軸に沿って被測定物のY軸方向の測定を行う。   Then, in the X-axis direction, the column 211A is moved in the Y-axis direction while the center of gravity axis OO substantially coincides with the support guide axis PP. For this reason, the column 211A moves along the Y axis without swinging around the Y axis, whereby the portal frame 21 moves along the Y axis without swinging around the Y axis. . By the movement of the portal frame 21 in the Y-axis direction, the probe 12 measures the object to be measured along the Y-axis without swinging around the Y-axis.

以上のような本実施形態の三次元測定機1では、以下の効果がある。
本実施形態の三次元測定機1では、ケーブルベア3の重心軸線O−Oが、X軸方向において、門型フレーム21の支持案内軸P−Pと一致している。このため、ケーブルベア3が図1に想像線で示すような従来の位置に配置されている場合と比べて、コラム211Aに対して、ケーブルベア3の重量に起因してY軸を中心とした図1中反時計方向へのモーメントが発生することを抑えられる。よって、コラム211Aひいては門型フレーム21が、Y軸を中心として揺動することなくY軸に沿って移動でき、プローブ12によるY軸方向に関する測定誤差を低減できる。
The coordinate measuring machine 1 of the present embodiment as described above has the following effects.
In the coordinate measuring machine 1 of the present embodiment, the center of gravity axis OO of the cable bear 3 coincides with the support guide axis PP of the portal frame 21 in the X-axis direction. For this reason, compared with the case where the cable bearer 3 is arranged at a conventional position as shown by an imaginary line in FIG. 1, the Y axis is centered on the column 211A due to the weight of the cable bearer 3. The occurrence of a counterclockwise moment in FIG. 1 can be suppressed. Therefore, the column 211A and the portal frame 21 can move along the Y axis without swinging around the Y axis, and the measurement error in the Y axis direction by the probe 12 can be reduced.

なお、本発明は前述の実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良等は本発明に含まれるものである。
前記実施形態では、プローブ12をX軸方向、Y軸方向およびZ軸方向に沿って移動させる三次元測定機1について説明したが、アーム先端や加工工具などを少なくとも1軸方向、例えばX軸方向に移動させる産業ロボットや加工機械などであってもよい。
また、前記実施形態では、ケーブル案内装置として、ケーブルベア3について説明したが、ケーブルベア3以外にも、帯状の薄いプラスチックやスチール等で形成されているものでもよい。
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the embodiment described above, the coordinate measuring machine 1 that moves the probe 12 along the X-axis direction, the Y-axis direction, and the Z-axis direction has been described. It may be an industrial robot or a processing machine to be moved to
Moreover, although the cable bear 3 was demonstrated as a cable guide apparatus in the said embodiment, it may be formed with strip | belt-shaped thin plastics, steel, etc. besides the cable bear 3. FIG.

本発明は産業機械に利用することができる。   The present invention can be used for industrial machines.

1…三次元測定機(産業機械)
2…移動機構
3…ケーブルベア(ケーブル案内装置)
11…テーブル(ガイド部材)
12…プローブ(制御対象物)
213…支持部
1 ... CMM (industrial machine)
2 ... Movement mechanism 3 ... Cable bear (cable guide device)
11 ... Table (guide member)
12 ... Probe (control object)
213 ... support part

Claims (2)

被測定物を載置するガイド部材と、前記ガイド部材に対して移動可能な支持部を有し、前記支持部で支持されて所定の軸方向へ移動可能に設けられ、制御対象物を所定の軸方向へ移動させる移動機構と、前記移動機構を制御する制御装置と、前記移動機構に取り付けられ、前記移動機構と前記制御装置とを接続するケーブルを案内して収納するケーブル案内装置とを備える産業機械であって、
前記ケーブル案内装置の重心を通って鉛直方向に延びる重心軸線が、前記移動機構の移動方向および鉛直方向と互いに直交する水平方向において、前記支持部の中心を通って鉛直方向に延びる支持案内軸と一致していることを特徴とする産業機械。
A guide member for placing an object to be measured; and a support portion movable with respect to the guide member. The guide member is supported by the support portion so as to be movable in a predetermined axial direction. A moving mechanism that moves in the axial direction, a control device that controls the moving mechanism, and a cable guide device that is attached to the moving mechanism and guides and stores a cable that connects the moving mechanism and the control device. Industrial machinery,
A center axis of gravity extending in the vertical direction through the center of gravity of the cable guiding device, and a support guide shaft extending in the vertical direction through the center of the support portion in a horizontal direction perpendicular to the moving direction of the moving mechanism and the vertical direction; An industrial machine characterized by matching.
請求項1に記載の産業機械において、
前記ケーブル案内装置は、前記ガイド部材を挟んで前記移動機構と反対側に取り付けられることを特徴とする産業機械。
The industrial machine according to claim 1,
The industrial machine according to claim 1, wherein the cable guide device is attached to a side opposite to the moving mechanism with the guide member interposed therebetween.
JP2010182214A 2010-08-17 2010-08-17 Industrial machinery Active JP5639815B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010182214A JP5639815B2 (en) 2010-08-17 2010-08-17 Industrial machinery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010182214A JP5639815B2 (en) 2010-08-17 2010-08-17 Industrial machinery

Publications (2)

Publication Number Publication Date
JP2012042267A true JP2012042267A (en) 2012-03-01
JP5639815B2 JP5639815B2 (en) 2014-12-10

Family

ID=45898777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010182214A Active JP5639815B2 (en) 2010-08-17 2010-08-17 Industrial machinery

Country Status (1)

Country Link
JP (1) JP5639815B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9441935B2 (en) 2014-07-07 2016-09-13 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
US10001357B2 (en) 2015-10-01 2018-06-19 Mitutoyo Corporation Coordinate measuring apparatus
DE102018204016A1 (en) 2017-03-16 2018-09-20 Mitutoyo Corporation PROFILE MEASURING MACHINE

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298186A (en) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd Positioning stage
JP2005331402A (en) * 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd Stage device
JP2006269509A (en) * 2005-03-22 2006-10-05 Nsk Ltd Positioning device
JP2006286995A (en) * 2005-03-31 2006-10-19 Nsk Ltd Moving apparatus
JP2008076415A (en) * 2007-12-12 2008-04-03 Sumitomo Heavy Ind Ltd Stage device
JP2008198134A (en) * 2007-02-15 2008-08-28 Yaskawa Electric Corp Movable table controller and movable table provided therewith

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298186A (en) * 1999-04-15 2000-10-24 Hitachi Denshi Ltd Positioning stage
JP2005331402A (en) * 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd Stage device
JP2006269509A (en) * 2005-03-22 2006-10-05 Nsk Ltd Positioning device
JP2006286995A (en) * 2005-03-31 2006-10-19 Nsk Ltd Moving apparatus
JP2008198134A (en) * 2007-02-15 2008-08-28 Yaskawa Electric Corp Movable table controller and movable table provided therewith
JP2008076415A (en) * 2007-12-12 2008-04-03 Sumitomo Heavy Ind Ltd Stage device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9441935B2 (en) 2014-07-07 2016-09-13 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
US9464878B1 (en) 2014-07-07 2016-10-11 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
US9874429B2 (en) 2014-07-07 2018-01-23 Tokyo Seimitsu Co., Ltd. Three-dimensional coordinate measuring machine
US10001357B2 (en) 2015-10-01 2018-06-19 Mitutoyo Corporation Coordinate measuring apparatus
DE102018204016A1 (en) 2017-03-16 2018-09-20 Mitutoyo Corporation PROFILE MEASURING MACHINE

Also Published As

Publication number Publication date
JP5639815B2 (en) 2014-12-10

Similar Documents

Publication Publication Date Title
CA2807204C (en) Device for error correction for cnc machines
EP2434253B1 (en) Coordinates measuring head unit and coordinates measuring machine
US8915124B2 (en) Surface texture measuring apparatus
JP5797942B2 (en) Error compensation system using encoder feedback, error mapping, and pneumatic control
JP6168344B2 (en) Measuring machine and moving guide mechanism of measuring machine
KR20090004511A (en) An eyeglasses frame shape measuring apparatus
JP2005043177A (en) Copying probe
CN103658966A (en) Friction stir welding apparatus
JP2014238376A (en) Measuring device
JP5639815B2 (en) Industrial machinery
JP2018184970A (en) Axial movement device by belt driving
JP5091702B2 (en) Probe straightness measurement method
JP5986880B2 (en) Measuring machine and measuring force adjusting method
JP4806236B2 (en) Stage drive device
JP6025905B2 (en) 3D coordinate measuring machine
JP5485066B2 (en) CMM
JP5676045B2 (en) 3D coordinate measuring machine
JP5717914B1 (en) 3D coordinate measuring machine
JP2019070666A (en) Three-dimensional coordinate measurement apparatus
JP4538285B2 (en) Processing system
JP7096972B2 (en) CMM
JP5677360B2 (en) 3D coordinate measuring machine
JP2019158385A (en) measuring device
JP6390070B2 (en) CMM
JP6478961B2 (en) 3D coordinate measuring machine

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130702

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140224

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140304

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140416

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20141014

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141027

R150 Certificate of patent or registration of utility model

Ref document number: 5639815

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250