JP2011152356A - Ultrasonic probe and ultrasonograph - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic probe and an ultrasonograph which receives ultrasonic waves coming from a subject with reduced noise. <P>SOLUTION: The ultrasonic probe 2 is provided with a second piezoelectric part 22 which is provided with a second piezoelectric element provided with a piezoelectric material and converting an electric signal and an ultrasonic signal from one to the other by using piezoelectric phenomena. In the second piezoelectric element of the second piezoelectric part 22, one element has a plurality of grooves G formed in one surface and having different widths along the direction of a sound axis, and an electrode layer 221 formed along the surfaces of the grooves G. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an ultrasonic probe capable of transmitting and receiving ultrasonic waves and an ultrasonic diagnostic apparatus including the ultrasonic probe.

  Ultrasound generally refers to sound waves of 16000 Hz or higher and can be examined non-destructively, harmlessly and in real time, and thus is applied to various fields such as defect inspection and disease diagnosis. For example, an ultrasound that scans the inside of the subject with ultrasound and images the internal state of the subject based on a reception signal generated from the reflected wave (echo) of the ultrasound coming from inside the subject. There is a diagnostic device. This ultrasonic diagnostic apparatus is smaller and less expensive for medical use than other medical imaging apparatuses, has no radiation exposure such as X-rays, is highly safe, and has a blood flow utilizing the Doppler effect. It has various features such as display capability. For this reason, an ultrasonic diagnostic apparatus includes a circulatory system (for example, diagnosis of the coronary artery of the heart), a digestive system (for example, diagnosis of the gastrointestinal tract), an internal system (for example, diagnosis of the liver, pancreas and spleen), For example, it is widely used in diagnosis of kidney and bladder, etc.) and obstetrics and gynecology.

  In this ultrasonic diagnostic apparatus, an ultrasonic probe that transmits / receives ultrasonic waves (ultrasound signals) to / from a subject is used. This ultrasonic probe uses a piezoelectric phenomenon to generate an ultrasonic wave (ultrasonic signal) by mechanical vibration based on an electric signal transmitted, and generates an ultrasonic wave due to mismatch of acoustic impedance inside the subject. One or a plurality of piezoelectric elements that receive a reflected wave of a sound wave (ultrasound signal) and generate a reception electric signal are provided. For example, Patent Document 1 discloses a composite piezoelectric body as one of such piezoelectric elements. ing. The ultrasound probe also includes an acoustic matching layer that matches the acoustic impedance between the subject and the piezoelectric element in order to efficiently propagate the ultrasound between the subject and the piezoelectric element. As one of such acoustic matching layers, for example, Patent Literature 2 and Patent Literature 3 disclose acoustic matching layers.

  The ultrasonic probe disclosed in Patent Document 1 includes a composite piezoelectric body in which a large number of rod-shaped inorganic piezoelectric elements are arranged vertically, and an organic polymer material is filled in a gap between the piezoelectric elements, and the composite The piezoelectric body has a non-uniform thickness, the thickness and length of the piezoelectric elements are substantially constant, and the arrangement intervals of the piezoelectric elements are non-uniform. More specifically, the composite piezoelectric body has a flat surface on one side and a concave curved surface on the other surface, thereby specifically realizing the non-uniform thickness. Is provided with a back load material, and an acoustic matching layer or the like is provided on the concave curved surface. According to this configuration, it is described in Patent Document 1 that the ultrasonic probe disclosed in Patent Document 1 has a wider frequency characteristic than that of a piezoelectric ceramic alone.

  Moreover, the acoustic matching layer disclosed in Patent Document 2 is formed in a structure in which the acoustic impedance continuously changes in the thickness direction. More specifically, the acoustic matching layer disclosed in Patent Literature 2 is a first acoustic matching material having an acoustic impedance equal to or lower than the acoustic impedance of the transducer, and has a large cross-sectional area on the transducer side and a subject side. A cross-sectional area is formed small, and a plurality of tapered columnar bodies arranged in a matrix at intervals shorter than the ultrasonic wavelength are provided, and the gap between the plurality of tapered columnar bodies is equal to the acoustic impedance of the subject. It is filled with the second acoustic matching material having the above acoustic impedance and solidified integrally. With this configuration, in the ultrasonic probe disclosed in Patent Document 2, ultrasonic waves can be efficiently transmitted and received in a frequency band having a certain spread, and the usable frequency band can be widened. Is described.

  In addition, the ultrasonic probe disclosed in Patent Document 3 includes a piezoelectric element that transmits and receives ultrasonic waves, and a plurality of types of powder materials are filled in a polymer resin, and acoustic waves are generated in the polymer resin. An acoustic matching layer whose impedance continuously changes in the thickness direction is formed on one surface of the piezoelectric element. With this configuration, in the ultrasonic probe disclosed in Patent Document 3, an acoustic matching layer whose acoustic impedance continuously changes in the thickness direction can be easily formed, and the ultrasonic probe has a wide frequency range. Patent Document 3 describes that it can be made possible.

Japanese Patent Application Laid-Open No. 06-078399 Japanese Patent Laid-Open No. 11-089835 JP 2006-174992 A

  In general, an ultrasonic wave coming from a subject is received by a piezoelectric element of an ultrasonic probe, a part of which is converted into an electric signal by the piezoelectric element, while the remaining part is transmitted through the piezoelectric element. It is absorbed by the acoustic braking member (backing layer).

  By the way, although improvement in image quality of ultrasonic diagnostic images is required, it has been found that in an ultrasonic probe, a received wave is reflected on the surface of the piezoelectric element, causing noise and contributing to image quality degradation. . Since the reflection occurs also on the electrode surface of the piezoelectric element, it is necessary to cope with this in order to improve the image quality.

  In addition, the composite piezoelectric material disclosed in Patent Document 1 described above enables a wide band of frequency characteristics, but has an object that the acoustic impedance in the thickness direction is uniform and the reflection of ultrasonic waves is reduced. It is not a thing.

  In addition, each acoustic matching layer disclosed in Patent Document 2 and Patent Document 3 described above is disposed at a front position from the piezoelectric element toward the ultrasonic transmission / reception surface, and matches the acoustic impedance between the subject and the piezoelectric element. Thus, as described above, the ultrasonic waves that have come from the subject and have passed through the piezoelectric element are not targeted.

  Further, in these Patent Documents 1 to 3, the countermeasure against the ultrasonic wave that has come from such a subject and transmitted through the piezoelectric element is, as before, only the acoustic braking member.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ultrasonic probe capable of receiving ultrasonic waves from a subject with reduced noise. And And this invention aims at providing the ultrasonic diagnosing device provided with this ultrasonic probe.

  As a result of various studies, the present inventor has found that the above object is achieved by the present invention described below. That is, the ultrasonic probe according to one aspect of the present invention includes a piezoelectric material, and can convert a signal between an electric signal and an ultrasonic signal by using a piezoelectric phenomenon. The piezoelectric element includes an element, and the piezoelectric element of the piezoelectric part has a plurality of grooves with different widths along the sound axis direction formed on one surface of the element, along the surface of the groove. It has the formed electrode layer, It is characterized by the above-mentioned.

  Since the ultrasonic probe having such a configuration can reduce the reflection of ultrasonic waves by the piezoelectric portion, it can receive ultrasonic waves coming from the subject with reduced noise. Therefore, from this point of view, it is preferable that the piezoelectric unit has not only an ultrasonic reflection reducing function for reducing the reflection of ultrasonic waves but also an ultrasonic reflection preventing function for further preventing ultrasonic reflection.

  Here, the difference between the ultrasonic reflection reducing function of the present invention and the acoustic braking function of the acoustic braking member (backing layer) will be described below. The acoustic braking function is a function of absorbing ultrasonic waves incident on the acoustic braking member from the outside, that is, a function of converting ultrasonic energy into thermal energy, while the ultrasonic reflection reduction function is from the outside. This is a function of reducing the reflection to the one end with respect to the ultrasonic wave incident at one end of the member having the sound wave reflection reducing function (ultrasonic reflection reducing member). Therefore, in the ultrasonic reflection reducing member, the ultrasonic wave incident at one end from the outside may be radiated to the outside at the other end.

  According to another aspect, in the above-described ultrasonic probe, the plurality of grooves are arranged at predetermined intervals, and the depth of the grooves formed in the outer region is set in the central region. It is characterized by being shallower than the formed groove.

  According to this configuration, the thickness of the piezoelectric element is relatively increased in the outer region and the thickness of the piezoelectric element is relatively decreased in the central region due to the plurality of grooves having different depths. Compared to the piezoelectric element, the frequency band is widened.

  Further, in another aspect, in the above-described ultrasonic probe, the plurality of grooves are formed at predetermined intervals, and the groove formed in the central region is formed in the outer region. It is characterized by being steeper than a groove. The predetermined interval may be a constant interval or an indefinite interval.

  According to this configuration, since the thickness of the piezoelectric element is relatively changed by the groove, the frequency band is widened as compared with the piezoelectric element having a uniform thickness.

  In another aspect, in the above-described ultrasonic probe, the piezoelectric unit includes a first piezoelectric unit for reception for receiving an ultrasonic wave coming from the subject, and an ultrasonic wave to the subject. A second piezoelectric part for transmission for transmitting the second piezoelectric part, wherein an effective acoustic impedance of the second piezoelectric part is larger than an effective acoustic impedance of the piezoelectric part. The predetermined interval may be a constant interval or an indefinite interval.

  In general, when the subject is a living body, the acoustic impedance of the living body is about 1.5 MRayl, and the acoustic impedance of the piezoelectric part is larger than the acoustic impedance of the living body. For this reason, according to the said structure, an effective acoustic impedance can be changed in order of a test object, a 1st piezoelectric part, and a 2nd piezoelectric part, and it becomes possible to transmit / receive an ultrasonic wave efficiently.

  An ultrasonic diagnostic apparatus according to another aspect of the present invention includes any one of the above-described ultrasonic probes.

  According to the above configuration, it is possible to provide an ultrasonic diagnostic apparatus using an ultrasonic probe that can reduce noise. For this reason, in such an ultrasonic diagnostic apparatus, an ultrasonic image can be improved.

  Since the ultrasonic probe according to the present invention reduces the reflection of ultrasonic waves by the piezoelectric portion, it can receive the ultrasonic waves coming from the subject with reduced noise. In the present invention, it is possible to provide an ultrasonic diagnostic apparatus using an ultrasonic probe that can reduce noise.

It is a figure which shows the external appearance structure of the ultrasound diagnosing device in embodiment. It is a block diagram which shows the electrical structure of the ultrasonic diagnosing device in embodiment. It is sectional drawing which shows the structure of the ultrasound probe in the ultrasound diagnosing device of embodiment. It is a figure which shows the structure of the 2nd piezoelectric part shown in FIG. 3 in detail. It is sectional drawing which shows the 2nd piezoelectric part as a comparative example with respect to the 2nd piezoelectric part shown in FIG. It is sectional drawing which shows the other 1st structure of the 2nd piezoelectric part in the ultrasonic probe of embodiment. It is sectional drawing which shows the other 2nd structure of the 2nd piezoelectric part in the ultrasonic probe of embodiment.

  Hereinafter, an embodiment according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted suitably. Further, in this specification, when referring generically, it is indicated by a reference symbol without a suffix, and when referring to an individual configuration, it is indicated by a reference symbol with a suffix.

  FIG. 1 is a diagram illustrating an external configuration of an ultrasonic diagnostic apparatus according to an embodiment. FIG. 2 is a block diagram illustrating an electrical configuration of the ultrasonic diagnostic apparatus according to the embodiment. FIG. 3 is a cross-sectional view illustrating a configuration of an ultrasonic probe in the ultrasonic diagnostic apparatus according to the embodiment. FIG. 3A shows the case where the first piezoelectric part for reception is directly laminated on the second piezoelectric part for transmission, and FIG. 3B shows the intermediate layer on the second piezoelectric part. The case where the 1st piezoelectric part is laminated | stacked indirectly via is shown. FIG. 4 is a diagram showing the structure of the second piezoelectric part shown in FIG. 3 in more detail. 4A is a perspective view, and FIG. 4B is a longitudinal sectional view.

  As shown in FIG. 1, the ultrasonic diagnostic apparatus S according to the embodiment transmits an ultrasonic wave (first ultrasonic signal) to a subject such as a living body (not shown), and is based on the first ultrasonic signal. The ultrasonic probe 2 that receives ultrasonic waves (second ultrasonic signal) coming from within the subject, and the ultrasonic probe 2 and the cable 3 are connected to each other, and the cable 3 is connected to the ultrasonic probe 2. The ultrasonic probe 2 transmits the first ultrasonic signal to the subject by transmitting a transmission signal of an electrical signal via the, and also comes from within the subject received by the ultrasonic probe 2. And an ultrasonic diagnostic apparatus main body 1 that images the internal state of the subject as an ultrasonic image based on the received signal of the electrical signal generated by the ultrasonic probe 2 according to the second ultrasonic signal. Configured.

  The ultrasonic waves coming from within the subject based on the first ultrasonic signal are not only reflected waves (echoes) reflected from the first ultrasonic signal in the subject due to acoustic impedance mismatches in the subject, for example, When an ultrasonic contrast agent (contrast agent) such as microbubbles (microbubbles) is used, there is also an ultrasonic wave generated by the microbubbles of the ultrasonic contrast agent based on the first ultrasonic signal. When an ultrasonic contrast agent is irradiated with ultrasonic waves, the microbubbles of the ultrasonic contrast agent resonate or resonate, and further collapse or disappear at a sound pressure above a certain threshold. In the ultrasonic contrast agent, ultrasonic waves are generated by resonance of microbubbles or by collapse or disappearance of microbubbles.

  For example, as shown in FIG. 2, the ultrasonic diagnostic apparatus main body 1 includes an operation input unit 11, a transmission unit 12, a reception unit 13, an image processing unit 14, a display unit 15, and a control unit 16. Configured.

  The operation input unit 11 is, for example, a device for inputting data such as a command for instructing start of diagnosis and personal information of a subject, and is, for example, an operation panel or a keyboard provided with a plurality of input switches.

  The transmission unit 12 is a circuit that supplies a transmission signal of an electrical signal to the ultrasonic probe 2 via the cable 3 under the control of the control unit 16 and causes the ultrasonic probe 2 to generate a first ultrasonic signal. is there. The transmission unit 12 includes, for example, a high voltage pulse generator that generates a high voltage pulse. When the ultrasonic probe 2 includes a plurality of piezoelectric elements, the transmitter 12 transmits the main beam (main beam) in a predetermined direction (predetermined direction) by the plurality of piezoelectric elements constituting the ultrasonic probe 2. For example, a transmission beam that generates a drive signal by adding a delay time by a delay circuit to a pulse generated by a high-voltage pulse generator in order to transmit the first ultrasonic signal of the transmission beam formed to A former may also be provided. The drive signal generated by the transmission unit 12 is a plurality of pulse-like signals in which delay times are individually set appropriately for each of the plurality of piezoelectric elements, and the ultrasonic probe 2 is transmitted via the cable 3. Are supplied to each of the plurality of piezoelectric elements. With this plurality of drive signals, the ultrasonic probe 2 causes the phases of the ultrasonic waves radiated from the piezoelectric elements to coincide with each other in a specific direction (specific direction) (or a specific transmission focus point), and the main direction is the main direction. A first ultrasonic signal of the transmission beam forming the beam is generated. The predetermined direction is represented by an angle based on a normal direction (0 degree) on a transmission / reception surface of an ultrasonic signal formed by the plurality of piezoelectric elements. Such electronic scanning methods include a linear scanning method, a sector scanning method, and a convex method.

  The receiving unit 13 is a circuit that receives a reception signal of an electrical signal from the ultrasound probe 2 via the cable 3 under the control of the control unit 16, and outputs the reception signal to the image processing unit 14. The receiving unit 13 includes, for example, an amplifier that amplifies the received signal with a predetermined amplification factor to compensate for the transmission loss (transmission loss) of the cable 3. Then, similarly to the formation of a transmission beam at the time of transmission, a reception beam may be formed at the time of reception by so-called phasing addition. That is, by appropriately setting a delay time individually for a plurality of output signals output from each of the plurality of piezoelectric elements in the ultrasound probe 2, and adding the plurality of delayed output signals, The phases of the output signals match in a specific direction (specific direction) (or a specific reception focus point), and a main beam is formed in the specific direction. In such a case, the receiving unit 13 may include, for example, a reception beamformer to which each output signal amplified by the amplifier is input.

  The image processing unit 14 controls the inside of the subject based on a predetermined frequency component in the second ultrasound signal received from the inside of the subject based on the first ultrasound signal received by the receiving unit 13 according to the control of the control unit 16. It is a circuit which forms the image (ultrasonic image) showing the internal state of. Examples of the predetermined frequency component include a fundamental wave component and harmonic components such as a second harmonic component, a third harmonic component, and a fourth harmonic component. The image processing unit 14 may be configured to form an ultrasonic image using a plurality of frequency components. For example, the image processing unit 14 performs processing by the DSP (Digital Signal Processor) that generates an ultrasonic image of the subject based on the output of the receiving unit 13 and the DSP to display the ultrasonic image on the display unit 15. And a digital-analog conversion circuit (DAC circuit) for converting the converted signal from a digital signal to an analog signal. The DSP includes, for example, a B-mode processing circuit, a Doppler processing circuit, a color mode processing circuit, and the like, and can generate so-called B-mode images, Doppler images, and color mode images.

  The display unit 15 is a device that displays an ultrasonic image of the subject generated by the image processing unit 14 under the control of the control unit 16. The display unit 15 is, for example, a display device such as a CRT display, LCD (liquid crystal display), organic EL display, or plasma display, or a printing device such as a printer.

  The control unit 16 includes, for example, a microprocessor, a storage element, and peripheral circuits thereof, and the ultrasonic probe 2, the operation input unit 11, the transmission unit 12, the reception unit 13, the image processing unit 14, and a display. It is a circuit that performs overall control of the ultrasound diagnostic apparatus S by controlling the unit 15 according to the function.

  The ultrasonic probe (ultrasonic probe) 2 is a device that transmits a first ultrasonic signal into the subject and receives a second ultrasonic signal coming from within the subject based on the first ultrasonic signal. It is. For example, as shown in FIG. 3A, the ultrasonic probe 2 includes a flat plate-like acoustic braking member (acoustic absorption member, backing layer, damper layer) 21 and one main surface of the acoustic braking member 21. A second piezoelectric part 22 laminated on the first piezoelectric part 22, a first piezoelectric part 23 laminated on the second piezoelectric part 22, an acoustic matching layer 24 laminated on the first piezoelectric part 23, and the acoustic matching layer And an acoustic lens 25 laminated thereon. As described above, the ultrasonic probe 2 of the present embodiment has the second piezoelectric portion 22, the first piezoelectric portion 23, and the acoustic matching layer 24 from the acoustic braking member 21 toward the ultrasonic transmission / reception surface along the sound axis direction. The acoustic lenses 25 are sequentially stacked in this order.

  The acoustic braking member 21 is made of a material that absorbs ultrasonic waves (ultrasonic absorber), and mainly absorbs ultrasonic waves emitted from the second piezoelectric portion 22 toward the acoustic braking member 21. The acoustic braking member 21 has a sufficient thickness with respect to the wavelength of the ultrasonic wave to be used in order to keep the acoustic characteristics of the second piezoelectric portion 22 good by sufficiently attenuating the ultrasonic wave. preferable. The acoustic braking member 21 mechanically supports the second piezoelectric portion 22 and acoustically applies braking to shorten the pulse waveform of the first ultrasonic signal. The acoustic braking member 21 is generally also called an acoustic load member, a backing layer, a damper layer, or an acoustic absorbing member. Examples of the material of the acoustic braking member 21 include a material obtained by mixing an acoustic scattering powder in a resin such as an epoxy resin. In such a material, the attenuation factor of the ultrasonic wave can be increased by the acoustic scattering powder. The acoustic scattering powder includes tungsten (W), molybdenum (Mo), silver (Au), platinum (Pt), palladium (Pd), indium (In), scandium (Sc), yttrium (Y) and tantalum (Ta). In view of cost and availability, tungsten is preferably used.

The second piezoelectric unit 22 includes a second piezoelectric material, and includes a second piezoelectric element that can convert a signal between an electric signal and an ultrasonic signal by using a piezoelectric phenomenon. Is done. In the present embodiment, the second piezoelectric unit 22 is connected to the transmission unit 12 of the ultrasonic diagnostic apparatus body 1 via the cable 3 and is used for transmission for transmitting the first ultrasonic signal into the subject. The The second piezoelectric unit 22 converts a transmission signal input from the transmission unit 12 of the ultrasonic diagnostic apparatus main body 1 via the cable 3 into an ultrasonic signal and converts the ultrasonic signal to the subject as a first ultrasonic signal. Send. When the ultrasonic probe 2 is applied to the subject, the ultrasonic signal generated by the second piezoelectric unit 22 is transmitted into the subject as the first ultrasonic signal, and in this embodiment as described later, A second ultrasonic signal coming from within the subject is received by the first piezoelectric unit 23. In the present embodiment, the second piezoelectric material is an inorganic piezoelectric material that can relatively increase the transmission power because the second piezoelectric portion 22 is used for transmission. For example, so-called PZT, crystal, lithium niobate ( LiNbO ₃ ), potassium niobate tantalate (K (Ta, Nb) O ₃ ), barium titanate (BaTiO ₃ ), lithium tantalate (LiTaO ₃ ), strontium titanate (SrTiO ₃ ), PZN-PT and PMN- PT and the like. The structure and the like of the second piezoelectric part 22 will be further described later.

  The first piezoelectric unit 23 includes a first piezoelectric material, and includes a first piezoelectric element that can convert a signal between an electric signal and an ultrasonic signal by using a piezoelectric phenomenon. Is done. In the present embodiment, the first piezoelectric unit 23 is connected to the receiving unit 13 of the ultrasonic diagnostic apparatus main body 1 via the cable 3, and the second ultrasonic wave coming from within the subject based on the first ultrasonic signal. Used for reception to receive signals. The first piezoelectric unit 23 converts the received second ultrasonic signal into an electrical signal and outputs the electrical signal (reception signal) to the receiving unit 13 of the ultrasonic diagnostic apparatus body 1 via the cable 3.

The first piezoelectric element of the first piezoelectric portion 23 includes a pair of first and second electrodes facing each other, and includes a first piezoelectric material between the first and second electrodes. The first piezoelectric material is an organic piezoelectric material having a reception sensitivity at a relatively high frequency because the first piezoelectric portion 23 is used for reception in the present embodiment. For example, a polymer of vinylidene fluoride can be used. . Further, for example, a vinylidene fluoride (VDF) copolymer can be used as the organic piezoelectric material of the first piezoelectric material. This vinylidene fluoride copolymer is a copolymer (copolymer) of vinylidene fluoride and other monomers. Examples of the other monomers include ethylene trifluoride, tetrafluoroethylene, perfluoroalkyl vinyl ether ( PFA), perfluoroalkoxyethylene (PAE), perfluorohexaethylene, and the like can be used. In the vinylidene fluoride copolymer, the electromechanical coupling constant (piezoelectric effect) in the thickness direction varies depending on the copolymerization ratio. For example, an appropriate copolymerization ratio is adopted according to the specifications of the ultrasonic probe, etc. . For example, in the case of a vinylidene fluoride / ethylene trifluoride copolymer, the copolymerization ratio of vinylidene fluoride is preferably 60 mol% to 99 mol%. More preferably, the copolymerization ratio of vinylidene fluoride is 85 mol% to 99 mol%. In the case of such a composite element, the other monomers are preferably perfluoroalkyl vinyl ether (PFA), perfluoroalkoxyethylene (PAE), and perfluorohexaethylene. For example, polyurea can be used for the organic piezoelectric material. In the case of this polyurea, it is preferable to produce a piezoelectric body by vapor deposition polymerization. Examples of the monomer for polyurea include a general formula and an H ₂ N—R—NH ₂ structure. Here, R may include an alkylene group, a phenylene group, a divalent heterocyclic group, or a heterocyclic group which may be substituted with any substituent. The polyurea may be a copolymer of a urea derivative and another monomer. Preferable polyurea includes aromatic polyurea using 4,4′-diaminodiphenylmethane (MDA) and 4,4′-diphenylmethane diisocyanate (MDI).

  The first piezoelectric unit 23 may be configured to include a single first piezoelectric element, for example, or may be configured to include a plurality of first piezoelectric elements, for example. For example, the plurality of first piezoelectric elements may be linearly arranged at a predetermined interval from each other to form a one-dimensional linear array type ultrasonic transducer. For example, the plurality of first piezoelectric elements Is a two-dimensional array type arranged in two rows linearly independent from each other in a plan view at a predetermined interval, for example, j rows × k columns in two directions orthogonal to each other. An ultrasonic transducer may be configured (j and k are positive integers). An ultrasonic absorber that absorbs ultrasonic waves may be filled between the plurality of first piezoelectric elements in order to reduce mutual interference.

  The acoustic matching layer 24 is a member that matches the acoustic impedance of the second piezoelectric unit 22 and the acoustic impedance of the subject and matches the acoustic impedance of the first piezoelectric unit 23 and the acoustic impedance of the subject.

  The acoustic lens 25 is a member that exerts a lens action on waves in the wavelength band of ultrasonic waves and converges the ultrasonic waves transmitted toward the subject. The acoustic lens 25 has a shape bulging in an arc shape. The acoustic lens 25 may be formed integrally with the acoustic matching layer 24.

  In the example shown in FIG. 3A, the first piezoelectric portion 23 is directly stacked on the second piezoelectric portion 22, but as shown in FIG. 3B, the second piezoelectric portion 22 is stacked. It may be laminated indirectly on the intermediate layer 31. The intermediate layer 31 is a member for laminating the second piezoelectric portion 22 and the first piezoelectric portion 23, and matches the acoustic impedance between the second piezoelectric portion 22 and the first piezoelectric portion 23.

    Here, in the ultrasonic probe 2 of the present embodiment, the second piezoelectric portion 22a disposed between the first piezoelectric portion 23 and the acoustic braking member 21 reduces the ultrasonic reflection to reduce the reflection of the ultrasonic waves. It also has functions. In this embodiment, in order to provide this ultrasonic reflection reduction function, as shown in FIGS. 3 and 4, the second piezoelectric portion 22 is in the direction of the sound axis formed on one main surface in one element. A second piezoelectric portion 22a having a plurality of grooves G having different widths w. In the example shown in FIG. 4, four grooves G-1, G-2, G-3, and G-4 are formed. More specifically, in the second piezoelectric portion 22a, the cross section V-shaped in which the horizontal width w gradually decreases along the direction (depth direction) from the first piezoelectric portion 23 side toward the acoustic braking member 21 side. A plurality of V-shaped grooves G having a shape are formed at a predetermined interval l along a predetermined direction orthogonal to the depth direction. In FIG. 4, the acoustic braking member 21 and the second piezoelectric portion 22a are shown, and other configurations are omitted.

  The second piezoelectric portion 22a shown in FIG. 4 has a plurality of second piezoelectric elements 22a-1, 22a-2, 22a-3 linearly arranged one-dimensionally along a predetermined direction with a predetermined interval therebetween. , 22a-4,... Constitutes a one-dimensional linear array type ultrasonic transducer. Each of the second piezoelectric elements 22a-1, 22a-2, 22a-3, 22a-4,... Is a plurality of the V grooves G (G-1, G-2, G-3, G -4). That is, one second piezoelectric element includes a plurality of V grooves G. The arrangement direction of the plurality of second piezoelectric elements is orthogonal to the arrangement direction of the plurality of V grooves G formed in each of the second piezoelectric elements.

  Such a plurality of V-grooves G can be formed by, for example, a dicing saw having a V-shaped blade. Further, for example, a plurality of V grooves G may be formed by etching. Further, for example, the tip is not conical but rounded, but a plurality of grooves G may be formed by sandblasting.

  In the plurality of V-grooves G formed in this way, a material having a lower acoustic impedance than the second piezoelectric material forming the second piezoelectric element of the second piezoelectric portion 22, for example, a resin such as an epoxy resin is contained. Filled. Here, since the resin filled in the V-groove G has an electrode layer 221 formed along the V-groove G, as will be described later, the resin enters the V-groove G via the electrode layer 221. Will be filled. Thus, the second piezoelectric element in the second piezoelectric portion 22a of the present embodiment is a 2-2 composite piezoelectric body (2-2) in which a piezoelectric body and a resin (polymer material) are combined as one piezoelectric element. The second piezoelectric element of the present embodiment further has an acoustic impedance that changes along the depth direction. Since the composite piezoelectric material is a resin composite with an inorganic piezoelectric material, the acoustic impedance is relatively low and the mechanical Q is relatively low (relatively wide band) compared to a piezoelectric material made of an inorganic piezoelectric material. And electrical characteristics such as electromechanical coupling coefficient kt, relative permittivity, and acoustic impedance are relatively easy to change.

  Here, the reflectance R of the sound pressure at the interface between the first member of the acoustic impedance Z1 and the second member of the acoustic impedance Z2 is, when there is a difference ΔZ (= Z2−Z1) in the acoustic impedance at the interface, Logically, R = (Z2−Z1) / (Z1 + Z2) = ΔZ / (Z1 + Z2). Therefore, if the acoustic impedance continuously changes along the propagation direction of the ultrasonic wave, the acoustic impedance difference ΔZ can be regarded as approximately 0 at each position in the propagation direction (ΔZ≈0), and the reflectance. R becomes 0 (R = 0), and ultrasonic waves are not reflected.

  The second piezoelectric portion 22 of the present embodiment includes a plurality of V grooves G filled with a resin having a lower acoustic impedance than the second piezoelectric material, and the volume fraction of the resin gradually increases along the depth direction. Then, since it changes continuously, reflection due to acoustic impedance difference can be reduced. Therefore, from this viewpoint, it is preferable that the second piezoelectric portion 22 has not only an ultrasonic reflection reduction function for reducing the reflection of ultrasonic waves but also an ultrasonic reflection prevention function for further proceeding to prevent the reflection of ultrasonic waves. In the present embodiment, since the width w of the groove G gradually decreases along the depth direction, the acoustic impedance is lower on the first piezoelectric portion 23 side of the second piezoelectric portion 22 than on the acoustic braking member 21 side.

  Since the phase of the reflected wave in the second piezoelectric portion 22 depends on the position in the in-plane direction of the electrode on which the second ultrasonic signal is incident, the second ultrasonic signal integrated in the electrode surface is The reflected wave is weakened. For example, considering a case where the second ultrasonic signal is incident from one electrode surface of the second piezoelectric portion 22, is reflected by the other electrode surface, and returns to the one electrode again, the second ultrasonic signal that has entered the position without the V groove G is second. The phase θ1 in the reflected wave of the ultrasonic signal is θ1 = 2πf (2a / V1), and the phase θ2 in the reflected wave of the second ultrasonic signal incident on the position where the V groove G is located is θ2 = 2πf ((2 (A−b) / V2) + (2b / V1)), and the phase difference θ2−θ1 is θ2−θ1 = 2πf ((2 (ab) / V2) − (2 (ab)). / V1)). Here, V1 is the speed of sound of the piezoelectric material of the second piezoelectric portion 22, and V2 is the speed of sound in the V-groove G (when the resin is filled as described above, it becomes the speed of sound of the resin). Yes, f is the frequency of the second ultrasonic signal, a is the thickness of the second piezoelectric portion 22a, d is the depth of the V-groove at the position in the in-plane direction, b is b = a−d (see FIG. 4B). Thus, the phase difference is expressed by the above equation and depends on the position in the in-plane direction of the electrode on which the second ultrasonic signal is incident. Therefore, when there is no V groove G, b = 0 and V2 = V1. Therefore, the phase difference becomes 0 and the reflected waves strengthen each other. However, when there is a V-groove G, the second ultrasonic signal integrated in the electrode plane is reflected by the reflected wave. The waves are weakened. Therefore, the SN ratio of the first piezoelectric part 23 is improved. The predetermined interval l may be a constant interval or an indefinite interval. From this point of view, the period l of the plurality of V grooves G (the predetermined interval l) is the second piezoelectric portion. It is preferable that 22a is less than or equal to the wavelength λ calculated with respect to the frequency of the ultrasonic wave to be transmitted.

  In general, a piezoelectric element includes a pair of electrodes facing each other, and a piezoelectric material is provided between the pair of electrodes. As shown in FIGS. 3 and 4, the second piezoelectric element in the second piezoelectric portion 22 a of the present embodiment is along the surface of each of the plurality of V grooves G formed on one main surface of the second piezoelectric element. An electrode layer 221 is formed with a predetermined thickness (film thickness), an electrode layer 222 is formed with a predetermined thickness (film thickness) on the other substantially flat main surface of the second piezoelectric element, and the electrode layers 221 and 222 are This corresponds to a pair of electrodes. The electrode layers 221 and 222 are made of a metal material such as gold (Au) and platinum (Pt), for example, and are formed by a thin film forming technique such as vapor deposition or sputtering.

  FIG. 5 is a cross-sectional view showing a second piezoelectric portion as a comparative example with respect to the second piezoelectric portion shown in FIG. The second piezoelectric element of the second piezoelectric portion 41 as a comparative example shown in FIG. 5 is formed on one main surface in the same manner as the second piezoelectric element of the second piezoelectric portion 22a of the present embodiment shown in FIGS. A plurality of V-grooves G are formed, and an electrode layer 411 having a predetermined thickness (film thickness) is formed on the other flat main surface of the second piezoelectric element. The electrode layer 411 is paired with the electrode layer 412. 5 is formed on the one main surface so as to be cross-linked to each of the plurality of V grooves G as shown in FIG.

  When a voltage is applied to the second piezoelectric element of the second piezoelectric portion 22a in order to transmit an ultrasonic wave, the second piezoelectric element of the comparative example shown in FIG. Since they are separated from each other, the electric field generated in the electrode layer 411 due to the voltage is difficult to be applied to the second piezoelectric portion 22 provided with the V-groove G, and the ultrasonic power is reduced as compared with the applied voltage. On the other hand, in the second piezoelectric element of the second piezoelectric portion 22a of the present embodiment shown in FIGS. 3 and 4, the surface of the V groove G is in contact with the surface of the V groove G in the example shown in FIGS. Since the electrode layer 221 is formed, the electric field generated in the electrode layer 411 due to the voltage is firmly applied to the second piezoelectric portion 22 provided with the V-groove G, and the ultrasonic power is smaller than the applied voltage. There is no.

  Further, in the second piezoelectric element of the comparative example shown in FIG. 5, since the electric field generated in the electrode layer 411 due to the voltage is not easily applied to the second piezoelectric portion 22 having the V-groove G, the element characteristics such as the frequency characteristics are not improved. It is difficult to stabilize. On the other hand, in the second piezoelectric element of the second piezoelectric portion 22a of the present embodiment shown in FIGS. 3 and 4, a portion from the surface of the one main surface to the bottom of the V-groove G appears as an electrode layer, which is effective. It becomes a simple electrode layer. For this reason, the frequency characteristic of the second piezoelectric element is determined by the thickness of the portion from the bottom of the substantially V-groove G to the other main surface, which makes it easy to design and increase the frequency.

  In such an ultrasonic diagnostic apparatus S, for example, when an instruction to start diagnosis is input from the operation input unit 11 at the time of diagnosis, a transmission signal of an electrical signal is generated by the transmission unit 12 under the control of the control unit 16. The The generated electrical signal transmission signal is supplied to the ultrasonic probe 2 via the cable 3. More specifically, the transmission signal of the electrical signal is supplied to the second piezoelectric portion 22 (22a) in the ultrasonic probe 2, and the second piezoelectric portion 22 (22a) has the second piezoelectric portion 22 ( 22a) is supplied to the plurality of second piezoelectric elements with a predetermined delay time. The second piezoelectric element expands and contracts in the thickness direction when the transmission signal of the electric signal is supplied, and ultrasonically vibrates according to the transmission signal of the electric signal. Due to this ultrasonic vibration, the second piezoelectric element emits a first ultrasonic signal. The first ultrasonic signal radiated from the second piezoelectric element toward the acoustic braking member 21 is absorbed by the acoustic braking member 21. Further, the first ultrasonic signal radiated from the second piezoelectric element toward the acoustic lens 25 is radiated through the first piezoelectric portion 23, the acoustic matching layer 24, and the acoustic lens 25. For example, when the ultrasonic probe 2 is in contact with the subject, the first ultrasonic signal is transmitted from the ultrasonic probe 2 to the subject.

  Note that the ultrasound probe 2 may be used in contact with the surface of the subject, or may be used by being inserted into the subject, for example, being inserted into a body cavity of a living body. .

  The ultrasonic wave transmitted to the subject is reflected at one or a plurality of boundary surfaces having different acoustic impedances inside the subject, and becomes a reflected wave of the ultrasonic wave. Alternatively, when the ultrasound contrast agent is injected into the subject, ultrasound is generated by the ultrasound contrast agent due to the first ultrasound signal. This ultrasonic wave includes not only the frequency (fundamental fundamental frequency) component of the transmitted first ultrasonic signal but also a harmonic frequency component that is an integral multiple of the fundamental frequency. For example, second harmonic components such as twice, three times, and four times the fundamental frequency, third harmonic components, and fourth harmonic components are also included. This ultrasonic wave is received by the ultrasonic probe 2. More specifically, the ultrasonic waves are received by the plurality of first piezoelectric elements in the first piezoelectric unit 23 via the acoustic lens 25 and the acoustic matching layer 24. That is, this ultrasonic wave is received by the first piezoelectric element, and mechanical vibration is converted into an electric signal by the first piezoelectric element and is extracted as a received signal.

  Then, the reception signal of this electrical signal taken out by the first piezoelectric unit 23 is received by the receiving unit 13 controlled by the control unit 16 via the cable 3. The reception unit 13 performs reception processing on the input reception signal, and more specifically, outputs the signal to the image processing unit 14 after amplification, for example.

  Here, in the above description, in order to perform electronic scanning while changing the azimuth and the focus depth (observation point), the first ultrasonic signal is sequentially transmitted from the second piezoelectric unit 22 toward the subject and reflected by the subject. The second ultrasonic signal is received by the first piezoelectric unit 23.

  Then, the image processing unit 14 generates an ultrasound image of the subject based on the reception signal received by the reception unit 13 from the time from transmission to reception, the reception intensity, and the like under the control of the control unit 16. For example, the image processing unit 14 extracts a harmonic component from the received signal by a filtering method, and generates an ultrasonic image of the internal state inside the subject using a harmonic imaging technique based on the extracted harmonic component. The Further, for example, the image processing unit 14 extracts a harmonic component from the received signal by the phase inversion method (pulse inversion method), and uses the harmonic imaging technique based on the extracted harmonic component to inside the subject. An ultrasound image of the state is generated. The display unit 15 displays the ultrasound image of the subject generated by the image processing unit 14 under the control of the control unit 16.

  In the ultrasonic diagnostic apparatus S operating in this way, as described above, since the second piezoelectric unit 22 includes the plurality of V grooves G, it enters the first piezoelectric unit 23 via the acoustic lens 25 and the acoustic matching layer 24. Even if the second ultrasonic signal is not received by the first piezoelectric unit 23 and passes through the first piezoelectric unit 23 and enters the second piezoelectric unit 22, reflection at the second piezoelectric unit 22 is reduced. Then, the light passes through the second piezoelectric portion 22 and is absorbed by the acoustic braking member 21. Since the reflection at the second piezoelectric portion 22 is thus reduced, the first piezoelectric portion 23 reduces the reception of reflected waves that become noise, and the first piezoelectric portion 23 includes the acoustic lens 25 and the acoustic matching layer 24. Thus, the second ultrasonic signal incident on the first piezoelectric portion 23 can be preferentially received, and the SN ratio of the reception of the second ultrasonic signal can be improved. Further, even if it is reflected, the phase of the reflected wave at the second piezoelectric portion 22 depends on the position in the in-plane direction of the electrode on which the second ultrasonic signal is incident. The reflected second wave of the second ultrasonic signal is weakened. Therefore, the SN ratio of the reception of the second ultrasonic signal in the first piezoelectric unit 23 is improved. As a result, the ultrasonic diagnostic apparatus S of the present embodiment can form an ultrasonic image with higher image quality.

  Further, since the electrode layer 221 is formed along the surface of the V-groove G, a desired power can be obtained, and the frequency characteristics can be easily designed and the frequency can be easily increased.

  The ultrasonic probe 2 used in the above-described ultrasonic diagnostic apparatus S includes a first piezoelectric unit 23 for reception and a second piezoelectric unit 22 for transmission. For this reason, in the ultrasonic probe 2 having such a configuration, each element can be an element suitable for reception and an element suitable for transmission.

  Further, in the ultrasonic probe 2 used in the above-described ultrasonic diagnostic apparatus S, the first piezoelectric portion 23 is configured to include a piezoelectric body made of an organic piezoelectric material for reception, and the second piezoelectric portion 22 is fed. It is configured with a piezoelectric body of an inorganic piezoelectric material for reliability. For this reason, the effective acoustic impedance of the second piezoelectric portion 22 is larger than the effective acoustic impedance of the first piezoelectric portion 23. In general, when the subject is a living body, the acoustic impedance of the living body is about 1.5 MRayl, and the acoustic impedances of the first and second piezoelectric units 22 and 23 are larger than the acoustic impedance of the living body. Therefore, in the ultrasonic probe 2 having such a configuration, the subject, the acoustic lens 25, the acoustic matching layer 24, the first piezoelectric unit 23, and the second piezoelectric unit 22 sequentially change from a small acoustic impedance to a large acoustic impedance. They are lined up in order along the sound axis. For this reason, the ultrasonic probe 2 having such a configuration can efficiently transmit and receive ultrasonic waves.

  In the above-described embodiment, the second piezoelectric material of the second piezoelectric portion 22 in the ultrasonic probe 2 is an inorganic piezoelectric material, and the first piezoelectric material of the first piezoelectric portion 23 is an organic piezoelectric material. However, the first and second piezoelectric materials forming the first and second piezoelectric portions 22 and 23 in the ultrasonic probe 2 may be both inorganic piezoelectric materials and organic piezoelectric materials. When the piezoelectric material is an organic piezoelectric material, the plurality of piezoelectric elements may be individual elements separated from each other, or an integrated sheet-like piezoelectric part may be used.

  More specifically, first, an organic piezoelectric body made of a flat organic piezoelectric material having a predetermined thickness is prepared, and then a plurality of elementary electrodes separated from each other on one main surface thereof are screen printed, for example. It is formed by vapor deposition or sputtering. The plurality of element electrodes are formed so as to be arranged in a two-dimensional array in two directions that are linearly independent in a plan view, for example, in two directions orthogonal to each other. The element electrode is, for example, rectangular in plan view. Subsequently, an electrode is formed on the other main surface of the organic piezoelectric body over substantially the entire surface, for example, by screen printing, vapor deposition, sputtering, or the like. As a result, a plurality of elementary electrodes arranged in a two-dimensional array are provided on one main surface, and a piezoelectric portion is provided having electrodes on the other main surface over substantially the entire surface. The piezoelectric portion having such a configuration includes a single piezoelectric element composed of an element electrode, an electrode opposed to the element electrode, and an organic piezoelectric body of an organic piezoelectric material interposed between the element electrode and the electrode. The organic piezoelectric element is included. Since it is manufactured in this way, there is no need to form a groove (gap, gap, gap, slit) in the sheet-like organic piezoelectric body in order to form a plurality of organic piezoelectric elements. Accordingly, in such a configuration, a process for forming a groove in the organic piezoelectric element is not necessary, and thus the manufacturing process of the organic piezoelectric element is further simplified, and the ultrasonic probe 2 is manufactured with less man-hours. It becomes possible.

  In the ultrasonic probe 2 in the above-described embodiment, the second piezoelectric units 22 are linearly arranged at a predetermined interval from each other and are one-dimensional linear array type ultrasonic transducers. The piezoelectric unit 22 may be configured to include, for example, a single first piezoelectric element. For example, the second piezoelectric unit 22 includes a plurality of second piezoelectric elements arranged in a plan view at predetermined intervals. For example, a two-dimensional array type ultrasonic transducer arranged in two rows linearly independent from each other, for example, m rows × n columns in two directions orthogonal to each other and configured in a two-dimensional array (m, n is a positive integer). Between the 2nd piezoelectric elements in the 2nd piezoelectric part 22, in order to reduce mutual interference, the ultrasonic absorber which absorbs an ultrasonic wave may be filled. Further, although the number of the first piezoelectric elements of the first piezoelectric portion 23 and the number of the second piezoelectric elements of the second piezoelectric portion 22 may be the same, the viewpoint of making them more suitable for the transmission characteristics and the reception characteristics. Therefore, the number of each element may be different.

  Further, in the ultrasound probe 2 in the above-described embodiment, the second piezoelectric portion 22 includes a plurality of V grooves G having the same depth and formed on the one main surface at a predetermined interval. As shown in FIG. 6, the second piezoelectric portion 22 a is configured such that the second piezoelectric portion 22 is formed by arranging a plurality of V grooves with different depths formed on one main surface at predetermined intervals. The second piezoelectric portions 22c and 22d configured with G may be used. FIG. 6 is a cross-sectional view showing another first configuration of the second piezoelectric portion in the ultrasonic probe of the embodiment, and FIG. 6A shows the first configuration in the other first configuration, FIG. 6B shows a second configuration in the other first configuration. As shown in FIGS. 6A and 6B, the second piezoelectric portions 22c and 22d are provided with a plurality of V grooves G, and the plurality of V grooves G are arranged at a predetermined interval. The depth of the groove formed in the outer region is shallower than that of the groove formed in the central region. In the ultrasonic probe 2 having such a configuration, the thickness of the piezoelectric elements of the second piezoelectric portions 22c and 22d is relatively increased in the outer region due to the plurality of V grooves G having different depths, and the central region. Then, since the thickness of the piezoelectric element is relatively thin, it is possible to widen the frequency band compared to a piezoelectric element having a uniform thickness. For example, as shown in FIG. 6A, the plurality of V grooves G having different depths d are relatively deep V grooves Ga-3 and Ga− having a depth d1 formed in the central region. 4 and relatively shallow V-grooves Gb-1, Gb-2; Gb-5, Gb-6 with different depths d (d1, d2) formed in the outer region. (Depth d1> depth d2). Further, for example, as shown in FIG. 6B, the plurality of V grooves G having different depths d are sequentially formed from the V groove G formed in the central region to the V groove G formed in the outer region. There may be three or more types of grooves that become shallower. In the example shown in FIG. 6B, the second piezoelectric portion 22d has the deepest V grooves Ga-3 and Ga-4 having a depth d1 formed in the central region and the depth formed in the outer region. The relatively shallowest V-groove Gb-1; Gb-6 having a depth d2 and a V-groove Gc-2 having a relatively intermediate depth of a depth d3 formed in an intermediate region between the central region and the outer region Three types of depth d (d1, d2, d3) different from Gc-5 (depth d1> depth d3> depth d2).

  In the ultrasonic probe 2 in the above-described embodiment, the second piezoelectric portion 22 includes a plurality of V-grooves G having the same shape (including similar shapes) formed on one main surface. As shown in FIG. 7, the second piezoelectric portion 22 includes a plurality of grooves G (Gd, Ge) formed on one main surface and arranged at a predetermined interval. Among the plurality of grooves G, the grooves Gd-2 and Gd-3 formed in the central region are the second piezoelectric portions 22e that are steeper than the grooves Ge-1 and Ge-4 formed in the outer region. Good. That is, as shown in FIG. 7, when the angle formed between the one main surface of the outer end portion OT of the groove G and the tangential plane in contact with the wall surface of the groove G in the outer end portion OT is an angle θ, the central region The angle θ1 of the groove Gd formed in the outer region is larger than the angle θ2 of the groove Ge formed in the outer region. The cross-sectional shape of the grooves Gd and Ge is a left-right symmetric curved shape that protrudes from the first piezoelectric portion 23 side toward the acoustic braking member 21 side, such as a bowl or a dish. FIG. 7 is a cross-sectional view illustrating another second configuration of the second piezoelectric portion in the ultrasonic probe according to the embodiment. In the ultrasonic probe 2 having such a configuration, since the thickness of the piezoelectric element is relatively changed by the grooves Gd and Ge, the frequency band is widened as compared with the piezoelectric element having a uniform thickness. As shown in FIG. 7, the plurality of V-grooves G having different depths are formed in the central region, and grooves Gd-2 and Gd-3 having a relatively large depth and outer regions. Two types of grooves with different depths may be formed with the formed grooves Ge-1 and Ge-4 with a relatively small depth (depth d1> depth d2). In addition, for example, a plurality of V grooves G having different depths d are formed from V grooves G formed in the central region to V grooves formed in the outer region, as in the case shown in FIGS. There may be three or more types of grooves that gradually decrease in depth toward G.

  In the ultrasonic probe 2 in the above-described embodiment, the groove G in the second piezoelectric element of the second piezoelectric portion 22 is a V-groove G having a V-shaped cross section, but is limited to such a cross-sectional shape. In short, what is necessary is just a shape with different widths along the sound axis direction. For example, the cross-sectional shape of the groove G is not limited to a pair of symmetrical straight lines that form the V-shape described above, but includes, for example, higher-order functions such as quadratic functions and cubic functions, exponential functions, logarithmic functions, and trigonometric functions. A curve represented by a function such as a pair of left and right symmetrical shapes may be formed. The cross-sectional shape of the groove G is represented by an even function.

  In the second piezoelectric portion 22 (22a, 22c, 22d, 22e) in the above-described embodiments, a plurality of grooves G are formed on one surface on the first piezoelectric portion 23 side. A plurality of such grooves G may be formed on one surface of the acoustic braking member 21 side. Similar effects can be obtained by such a configuration.

  In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Therefore, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. To be construed as inclusive.

S ultrasonic diagnostic apparatus G (Ga to Ge) groove 1 ultrasonic diagnostic apparatus main body 2 ultrasonic probe 21 acoustic braking member 22 (22a, 22c, 22d, 22e) second piezoelectric section 23 first piezoelectric section

Claims (5)

Comprising a piezoelectric material comprising a piezoelectric material, comprising a piezoelectric element capable of mutually converting signals between an electrical signal and an ultrasonic signal by utilizing a piezoelectric phenomenon;
The piezoelectric element of the piezoelectric part has a plurality of grooves having different widths along the sound axis direction formed on one surface in one element, and includes an electrode layer formed along the surface of the groove. Ultrasonic probe characterized by The plurality of grooves are formed to be arranged at a predetermined interval, and the depth of the grooves formed in the outer region is shallower than the grooves formed in the central region. Ultrasonic probe. The plurality of grooves are formed by being arranged at a predetermined interval, and the groove formed in the central region is steeper than the groove formed in the outer region. The ultrasonic probe described in 1. The piezoelectric unit includes a first piezoelectric unit for reception for receiving ultrasonic waves coming from a subject, and a second piezoelectric unit for transmission for transmitting ultrasonic waves to the subject,
4. The ultrasonic probe according to claim 1, wherein an effective acoustic impedance of the second piezoelectric unit is larger than an effective acoustic impedance of the piezoelectric unit. 5. An ultrasonic diagnostic apparatus comprising the ultrasonic probe according to any one of claims 1 to 4.

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