JP2010186677A - Conductive structure, actuator, variable resistor, turning member, turning connector, electric motor, controller, rotation information detecting device, stroke detection device, and method of manufacturing conductive terminal - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conductive structure electrically connecting a pair of relatively moving members with each other in a state of reducing restrictions on relative movement. <P>SOLUTION: An upper end of a conductive terminal 10 is electrically connected with a fixed-side electrode 9 disposed on a substrate 7. A recessed groove 11 is formed in an upper surface of a moving element 2 and an ionic liquid 12 is charged into the recessed groove 11 to electrically connect it with a movable-side electrode 2b disposed on a bottom part of the recessed groove 11. A lower end of the conductive terminal 10 is immersed in the ionic liquid 12 to electrically connect the fixed-side electrode 9 with the movable-side electrode 2b via the conductive terminal 10 and the ionic liquid 12. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a conductive structure that electrically connects a pair of relatively movable members, an actuator including the conductive structure, a variable resistor, a rotating member, a rotating connector, an electric motor, a controller, a rotation information detecting device, The present invention relates to a stroke detection device and a method for manufacturing a conductive terminal constituting a conductive structure.

Conventionally, for example, in a small linear actuator used in a variable gain equalizer for optical communication or the like, a plurality of moving elements are moved relative to a base frame (see, for example, Patent Document 1). Specifically, a predetermined voltage is applied to the carrier disposed below the slider, so that the slider is electrostatically attracted to the carrier, and the piezoelectric element is expanded and contracted in this state, together with the carrier. The mover can be moved. At that time, by applying the same voltage to the specific moving element as the carrier, the specific moving element is restricted from moving together with the conveying element.
Therefore, an electrode (hereinafter referred to as a moving side electrode) is formed on each moving element, and the moving side electrode and an electrode formed on the base frame side (hereinafter referred to as a fixed side electrode) are electrically connected. Has been. As a conductive structure for connecting the moving-side electrode and the fixed-side electrode, a plate spring having conductivity is usually used in a small actuator.

Japanese Patent Laid-Open No. 2003-244979 (FIGS. 6 to 9)

  However, in the conductive structure as described above, since the relatively moving base frame and the moving element are connected by the leaf spring, the leaf spring is attached as the moving amount of the moving element increases. Since the force increases, there is a problem that the movement of the moving element is restricted by the biasing force of the leaf spring.

  Therefore, the present invention provides a conductive structure that can electrically connect a pair of relatively moving members with less relative movement restrictions, an actuator including the conductive structure, a variable resistor, a rotation An object is to provide a member, a rotary connector, an electric motor, a controller, a rotation information detection device, a stroke detection device, and a method of manufacturing a conductive terminal.

In order to achieve the above object, the conductive structure of the present invention is arranged on the first member arranged on the first member side and on the second member side movable relative to the first member. A conductive structure for electrically connecting the second electrode, the conductive structure being electrically connected to the first electrode and housed in a housing portion provided in the first member And a conductive terminal electrically connected to the second electrode and in contact with the conductive fluid so as to allow the relative movement. .
According to this conductive structure, when the first member and the second member move relative to each other, the relative movement of both the members is allowed while the conductive terminal is in contact with the conductive fluid. The electrodes of both members can be electrically connected without substantially restricting the relative movement of the members.

In addition, the conductive fluid is preferably a conductive liquid. According to this, compared with the case of using a conductive gas, it is not necessary to seal the liquid, so that the electrodes of both members can be electrically connected with a simple configuration.
Moreover, it is preferable that the said accommodating part has an opening, and the said opening is formed small so that the said liquid may not fall from the said opening by surface tension with the dead weight of the said liquid. According to this, even if the arrangement of one member is changed so that the opening of the housing portion faces downward, the liquid can be prevented from falling.
Moreover, it is preferable that the said conductive terminal is immersed in the said liquid from the said opening, and is contacting the said liquid. According to this, the electrodes of both members can be electrically connected with a simpler configuration.

The conductive terminal is preferably movable relative to the opening along the surface direction of the opening. According to this, when the first member and the second member are relatively moved so that the conductive terminal is relatively moved along the surface direction of the opening, the relative movement of both the members is hardly restricted. The electrodes of the members can be electrically connected.
Moreover, it is preferable that the said conductive terminal is relatively movable with respect to the said opening from the said opening to the depth direction of the said accommodating part. According to this, when the first member and the second member are relatively moved so that the conductive terminal is relatively moved from the opening in the depth direction of the housing portion, the relative movement of both the members is hardly restricted. The electrodes of both members can be electrically connected.

Moreover, it is preferable that the said conductive terminal is relatively movable with respect to the said accommodating part in a one-dimensional direction. According to this, when the first member and the second member move relative to each other so as to move the conductive terminal relative to the accommodating portion in a one-dimensional direction, the relative movement of both members is hardly restricted. The electrodes of both members can be electrically connected.
Moreover, it is preferable that the said conductive terminal is relatively movable with respect to the said accommodating part in a two-dimensional direction. According to this, when the first member and the second member move relative to each other so as to move the conductive terminal relative to the housing portion in a two-dimensional direction, the relative movement of both members is hardly restricted. The electrodes of both members can be electrically connected.
Moreover, it is preferable that the said conductive terminal is relatively movable with respect to the said accommodating part in a three-dimensional direction. According to this, when the first member and the second member move relative to each other so as to move the conductive terminal relative to the accommodating portion in a three-dimensional direction, the relative movement of both the members is hardly restricted. The electrodes of both members can be electrically connected.

The conductive terminal is preferably a bonding wire. According to this, the electrodes of both members can be electrically connected with a simple configuration.
Moreover, it is preferable that the said conductive terminal has the electroconductive electroconductive part formed in the whole contact range made to contact the said electroconductive fluid. According to this, even when the contact range of the conductive terminal varies when the first member and the second member move relative to each other, the electrodes of both members can be electrically connected.
Moreover, it is preferable that the said conductive terminal has the electroconductive electroconductive part formed in a part of contact range made to contact the said electroconductive fluid. According to this, it can prevent that parts other than the contact range of an electrically-conductive terminal are accidentally electrically connected with other electrodes other than the electrode of both members.

Moreover, the actuator of this invention is an actuator provided with the said electrically-conductive structure, Comprising: Either one member is a fixing body among the said 1st member and the said 2nd member, and the other member is the said fixation. A mover that is movable relative to a body, and that electrically connects an electrode disposed on the fixed body side and an electrode disposed on the mover side by the conductive terminal and the conductive fluid. It is.
According to the actuator configured in this way, the electrode on the fixed body side and the electrode on the mover side movable relative to the fixed body are electrically connected by the conductive fluid and the conductive terminal. Therefore, when the movable element moves relative to the fixed body, the conductive terminal or the conductive fluid can be moved while the conductive terminal is in contact with the conductive fluid within the moving range. Therefore, the stationary body side electrode and the movable body side electrode can be electrically connected with almost no restriction on the movement of the movable body.

The variable resistor according to the present invention is a variable resistor having the conductive structure, and one of the first member and the second member is a fixed body, and the other The member is a movable body that can move relative to the fixed body, and the plurality of electrodes arranged on the first member side and the electrodes arranged on the second member side are connected to the conductive terminal and It is electrically connected by the conductive fluid.
According to the variable resistor configured as described above, the conductive terminal electrically connected to the other electrode is connected to the conductive fluid electrically connected to the plurality of electrodes on either the fixed body side or the movable body side. Since the movable body or the fixed body is moved in a state where a voltage is applied between the one electrode, a resistance value corresponding to the physical movement position of the conductive terminal can be obtained. .

The rotating member of the present invention is a rotating member having the conductive structure, and one of the first member and the second member is a fixed body, and the other member is the other member. The member is a rotating body rotatably attached to the fixed body, and the electrode disposed on the fixed body side and the electrode disposed on the rotating body side are electrically connected by the conductive terminal and the conductive fluid. Connected.
According to the rotating member configured in this way, the fixed body side electrode and the rotating body side electrode are electrically connected by the conductive fluid and the conductive terminal. When the moving body rotates, the conductive terminal or the conductive fluid can be rotated while the conductive terminal is in contact with the conductive fluid within the rotation range. Therefore, the fixed body side electrode and the rotating body side electrode can be electrically connected without substantially restricting the rotation of the rotating body.

The rotating connector of the present invention includes the rotating member.
According to the rotating connector configured in this way, the fixed body side electrode and the rotating body side electrode are electrically connected by the conductive fluid and the conductive terminal. When the rotating body rotates, the conductive terminal or the conductive fluid can be rotated while the conductive terminal is in contact with the conductive fluid within the rotation range. Therefore, the fixed body side electrode and the rotating body side electrode can be electrically connected without substantially restricting the rotation of the rotating body.

Moreover, the electric motor of the present invention is an electric motor having the conductive structure, and one of the first member and the second member is a housing having a stator, and the other member is A rotating shaft that is rotatable with respect to the housing and has a rotor, and an electrode disposed on the housing side and an electrode disposed on the rotating shaft side are formed by the conductive terminal and the conductive fluid. It is an electrical connection.
According to the electric motor configured as described above, since the electrode on the housing side and the electrode on the rotating shaft side are electrically connected by the conductive fluid and the conductive terminal, the rotating shaft rotates with respect to the housing. In doing so, the conductive terminal or the conductive fluid can be rotated while the conductive terminal is in contact with the conductive fluid. Therefore, the housing-side electrode and the rotating shaft-side electrode can be electrically connected with almost no restriction on the rotation of the rotating shaft.

The controller of the present invention is a controller having the conductive structure, wherein one of the first member and the second member is a housing, and the other member is the housing. An operating body that can be moved and operated with respect to a body, and electrically connects an electrode disposed on the housing side and an electrode disposed on the operating body side by the conductive terminal and the conductive fluid. is there.
According to the controller configured as described above, the operation body moves with respect to the housing because the housing-side electrode and the operation-body-side electrode are electrically connected by the conductive fluid and the conductive terminal. In operation, the conductive terminal or the conductive fluid can be moved while the conductive terminal is in contact with the conductive fluid. Therefore, the housing side electrode and the operating body side electrode can be electrically connected without substantially restricting the movement operation of the operating body.

Moreover, the rotation information detection device of the present invention is a rotation information detection device provided with the conductive structure, and one of the first member and the second member is a fixed body, The other member is a rotating body that is rotatable with respect to the fixed body, and a plurality of electrodes disposed on the first member side and electrodes disposed on the second member side are connected to the conductive terminal. And electrically connected by the conductive fluid.
According to the rotation information detecting apparatus configured as described above, since the conductive terminal is brought into contact with the conductive fluid electrically connected to the plurality of electrodes on the fixed body side, a voltage is generated between the electrodes on the fixed body side. By rotating the rotating body in a state in which is applied, a resistance value corresponding to the physical rotation position of the conductive terminal can be obtained, and rotation information of the rotating body can be detected from this resistance value.

Further, the stroke detection device of the present invention is a stroke detection device provided with the conductive structure, and one of the first member and the second member is a fixed body, and the other The member is a reciprocating body capable of reciprocating with respect to the fixed body, and a plurality of electrodes disposed on the first member side, and an electrode disposed on the second member side, the conductive terminal and It is electrically connected by the conductive fluid.
According to the stroke detection device configured as described above, the conductive terminal electrically connected to the electrode on the reciprocating body is brought into contact with the conductive fluid electrically connected to the plurality of electrodes on the fixed body side. Therefore, by reciprocating the reciprocating body in a state where a voltage is applied between the electrodes on the fixed body side, a resistance value according to the physical reciprocating position of the conductive terminal can be obtained, and this resistance value Therefore, the stroke amount of the reciprocating body can be detected.

  Further, in the method for manufacturing the conductive structure, one end is electrically connected to the first electrode, and the other end is electrically connected to the second electrode movable relative to the first member. A method of manufacturing a conductive terminal in contact with a conductive fluid, wherein a dummy electrode is disposed, the first electrode and the dummy electrode are connected by a bonding wire, and the bonding wire is connected to the first electrode and the dummy. Cutting at an intermediate portion with the electrode removes the dummy electrode and the bonding wire connected to the dummy electrode. According to this manufacturing method, since it is not necessary to use special manufacturing equipment, the conductive terminal can be easily manufactured.

  According to the present invention, when the first member and the second member move relative to each other, the relative movement of both members is allowed in a state where the conductive terminal is in contact with the conductive fluid. The electrodes of both members can be electrically connected without substantially restricting the relative movement of the two members.

It is a perspective view showing an actuator provided with a conductive structure concerning a 1st embodiment of the present invention. It is a sectional side view which shows the slider of the said actuator. It is sectional drawing of the slider which shows the surface tension of the ionic liquid with which the said slider is filled. It is operation | movement explanatory drawing when moving the slider of the said actuator to a positive direction. It is operation | movement explanatory drawing when moving the slider of the said actuator to a negative direction. It is a perspective view which shows the manufacturing method of the conductive terminal of the said conductive structure. (A) is a perspective view of the variable resistor which concerns on the 2nd Embodiment of this invention, (b) is AA sectional drawing of (a), (c) is a circuit diagram of the variable resistor of (a). is there. It is a disassembled perspective view of the variable resistor which concerns on the 3rd Embodiment of this invention. It is a perspective view of the variable resistor which concerns on the 4th Embodiment of this invention. It is a graph which shows the relationship between the horizontal distance from the stationary-side electrode in the said variable resistor to a conductive terminal, and resistance value. (A) is a perspective view of the rotation type connector which concerns on the 5th Embodiment of this invention, (b) is a perspective view which shows the fixed body of the rotation member in the rotation type connector of (a). (A) is sectional side view of the electric motor which concerns on the 6th Embodiment of this invention, (b) is BB sectional drawing of (a) of (a), (c) is a principal part enlarged view of (a). It is. It is a perspective view of a controller concerning a 7th embodiment of the present invention. It is a perspective view of the rotation information detection apparatus which concerns on the 8th Embodiment of this invention. It is a perspective view of the stroke detection apparatus which concerns on the 9th Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[First Embodiment]
FIG. 1 is a perspective view of an actuator provided with a conductive structure according to the first embodiment of the present invention. In the figure, this actuator 1 is a small linear actuator used in a variable gain equalizer for optical communication. The actuator 2 is a plurality of first members arranged in an array, and these sliders 2. A carrier 3 that is disposed below the movable element 2 and conveys the movable element 2, a stator 4 that is disposed opposed to the lower part of the movable element 2, and a PZT that displaces the movable element 3 by an expansion and contraction operation along the arrow A direction. A laminated piezoelectric element 5 made of (lead zirconate titanate ceramic), a stator 4, a carrier 3, a base frame 6 on which the laminated piezoelectric element 5 is placed, and a movable element 2. A substrate 7 as a fixed body, which is a second member, and a conductive structure 8 for electrically connecting the electrode on the substrate 7 side and the electrode on each mover 2 side are provided. Small and precise production using .

  The laminated piezoelectric element 5 has one end fixed to the base frame 6 and the other end connected to the carrier 3, and performs an expansion / contraction operation in the direction of the arrow A. The carrier 3 has an adsorption electrode 3a for adsorbing the mover 2 by electrostatic attraction on the upper surface facing the mover 2, and adsorbs the mover 2 to the adsorption electrode 3a. The movable element 2 is conveyed in the direction of the arrow A according to the displacement of the multilayer piezoelectric element 5. The stator 4 has an adsorption electrode 4 a that adsorbs and holds the movable element 2 by electrostatic attraction on the upper surface facing the movable element 2, and is fixed on the base frame 6.

FIG. 2 is a side sectional view of the movable element 2. Each movable element 2 has an insulating layer 2a formed on the lower surface, and a movable electrode 2b, which is a first electrode, is disposed on the insulating layer 2a. The upper surface of the moving side electrode 2b constitutes the bottom surface of a groove 11 described later.
Further, the outer surface of the moving element 2 is subjected to parylene coding, an insulating layer (not shown) is formed, and the adjacent moving elements 2 are electrically insulated. Thereby, each movable element 2 can be individually moved in the arrow A direction.

  Next, the conductive structure 8 will be described in detail. In FIG. 1, fixed side electrodes 9, which are the same number of second electrodes as the mover 2, are arranged on a substrate 7, and each fixed side electrode 9 has an upper end portion of a pin-shaped conductive terminal 10. Is connected. The lower end portion of the conductive terminal 10 is immersed in an ionic liquid 12 described later and is in contact with the ionic liquid 12. The conductive terminal 10 has a conductive part 10a formed in the entire immersion range (contact range).

  In FIG. 2, a concave groove 11 is formed on the upper surface of each movable element 2, which is a housing portion extending in the longitudinal direction (arrow A direction) of the movable element 2. The concave groove 11 is filled with an imidazolium salt-based ionic liquid 12 which is a conductive fluid from an opening 11a formed in the upper portion thereof (corresponding to “accommodating” in the claims. Each embodiment below) The fixed side electrode 9 on the substrate 7 side and the movable element 2 are connected via the ionic liquid 12 and the conductive terminal 10 (conductive portion 10a) immersed in the ionic liquid 12 from the opening 11a. The movable electrode 2b on the side is electrically connected. The conductive structure 8 of the present invention is constituted by the conductive terminal 10 and the ionic liquid 12.

  The concave groove 11 has a width of 2 mm, a length of 15 mm and a depth of 0.2 mm, and is formed by DRIE (deep reactive ion etching). Further, the length of the opening 11a of the groove 11 in the longitudinal direction is slightly longer than the total length of movement of the conductive terminal 10 moving in the surface direction (arrow A direction) of the opening 11a. Thereby, the conductive terminal 10 is immersed in the ionic liquid 12 so that the movement of the moving element 2 in the arrow A direction is allowed.

As shown in FIG. 3, the size of the opening 11a of the groove 11 is such that the ionic liquid 12 is opened by its own weight when the actuator 1 is arranged upside down and the opening 11a of the groove 11 is directed downward. It is so small that it does not fall from the surface tension by 11a. Therefore, it is desirable that the ionic liquid 12 has the above-described surface tension, has a viscosity that does not hinder the movement of the moving element 2, and has high conductivity and non-volatility. In the present embodiment, EMImTFSI (1-methyl-3-ethylimidazolium bistrifluoromethanesulfonylimide) is used.
Here, the width of the opening 11a is W (m), the length of the opening 11a is L (m, see FIG. 2), and the height of the ionic liquid 12 rising in the concave groove 11 by capillary action is H ( m), the contact angle is θ (m), the contact angle is θ, the density of the ionic liquid 12 is ρ (kg / m ³ ), and the gravitational acceleration is g (m / s ² ). (N / m) is
γ = LWH / 2 (L + W) × ρg / cos θ
It is represented by From this equation, the surface tension of EMImTFSI, which is the ionic liquid 12 of the present embodiment, is about 0.057 (N / m).

The actuator 1 of the present embodiment controls the expansion / contraction operation of the multilayer piezoelectric element 5 by a control signal. Hereinafter, the specific control will be described with reference to FIG. 4 and FIG.
In FIG. 4, when moving the moving element 2 in the forward direction (the direction of arrow A1 in FIG. 4B), first, as shown in FIG. 4A, a predetermined voltage is applied to the conveying element 3. As shown by the arrow B, the moving element 2 is attracted to the conveying element 3 by electrostatic attraction. At this time, the stator 4 is set to 0 potential so as not to attract the mover 2, and the mover 2 is also set to 0 potential. From this state, when the stacked piezoelectric element 5 is extended in the direction of the arrow D1, as shown in FIG. 4B, the moving element 2 is attracted and held by the carrier 3 that is displaced in the positive direction, while moving in the positive direction. Move to. At this time, the concave groove 11 of the movable element 2 also moves in the positive direction. However, since the concave groove 11 is formed so as to extend in the moving direction (the arrow A1 direction in FIG. 1), the ions in the concave groove The conductive terminal 10 immersed in the conductive liquid 12 does not interfere with the wall surface of the groove 11.

When the extension operation of the stacked piezoelectric element 5 is completed, the application of voltage to the carrier 3 is stopped and the mover 2 is attracted so that the mover 2 does not return to the original position, as shown in FIG. Is released, a predetermined voltage is applied to the stator 4, and the mover 2 is attracted to the stator 4 by electrostatic attraction as indicated by an arrow C. When the stacked piezoelectric element 5 is contracted from this state, only the carrier 3 is displaced in the direction of the arrow D2 as shown in FIG.
By repeating the above operation, the movable element 2 sequentially moves in the positive direction every time the stacked piezoelectric element 5 is extended. In this way, the movable element 2 can be displaced with high accuracy by the laminated piezoelectric element 5, and a sufficient movement distance can be secured by repeated operations.

  In FIG. 5, when the mover 2 is moved in the negative direction (the direction of arrow A2 in FIG. 5B), first, as shown in FIG. 5A, a predetermined voltage is applied to the carrier 3. As shown by the arrow B, the moving element 2 is attracted to the conveying element 3 by electrostatic attraction. At this time, the stator 4 is set to 0 potential so as not to attract the mover 2, and the mover 2 is also set to 0 potential. From this state, when the stacked piezoelectric element 5 is contracted in the direction of the arrow D2, as shown in FIG. 5B, the moving element 2 moves in the negative direction while being attracted and held by the carrier 3 that is displaced in the negative direction. Moving.

When the contraction operation of the multilayer piezoelectric element 5 is completed, the application of the voltage to the carrier 3 is stopped and the mover 2 is adsorbed as shown in FIG. 5C so that the mover 2 does not return to the original position. Is released, a predetermined voltage is applied to the stator 4, and the mover 2 is attracted to the stator 4 by electrostatic attraction as indicated by an arrow C. When the stacked piezoelectric element 5 is extended from this state, only the carrier 3 is displaced in the direction of the arrow D1 as shown in FIG.
By repeating the above operation, each time the stacked piezoelectric element 5 is contracted, the movable element 2 sequentially moves in the negative direction.

As described above, by setting the potential of the movable element 2 to 0, the movable element 2 can be moved in the positive direction or the negative direction. In this embodiment, the above-described FIG. As described above, the transport element 3, the stator 4, and the stacked piezoelectric element 5 are one, whereas a plurality of the movers 2 are provided. A voltage is applied to the movable element 2 for the movable element 2 to be held. That is, the same voltage as the voltage applied to the carrier 3 is applied to the mover 2 when the mover 2 is moved in the positive direction or the negative direction by the carrier 3. Specifically, a voltage is applied from the fixed side electrode 9 on the substrate 7 to the moving side electrode 2 b through the conductive terminal 10 and the ionic liquid 12. Thereby, the mover 2 is not attracted to the carrier 3 but is attracted and held by the stator 4 at the fixed position.
In this way, by controlling the voltages applied to the carrier 3, the stator 4, and the mover 2, only the desired mover 2 among the plurality of movers 2 is individually moved in the positive direction or the negative direction. be able to.

FIG. 6 is a perspective view showing a method for manufacturing the conductive terminal 10. Hereinafter, the manufacturing method will be specifically described.
In FIG. 6, the conductive terminal 10 is manufactured using a wire bonding apparatus (not shown) used in the manufacturing process of the semiconductor device. Specifically, a dummy electrode 13 is disposed on the lower stage 7a of the substrate 7 having a step formed on the upper surface, and a bonding wire 14 is connected to the fixed electrode 9 attached to the dummy electrode 13 and the upper stage 7b by a wire bonding apparatus. (See FIG. 6A). Next, the bonding wire 14 is cut at an intermediate position between the fixed electrode 9 and the dummy electrode 13 with a laser (not shown) (see FIG. 6B). After the bonding wire 14 is cut, the substrate 7 is cut in a horizontal direction so as to be divided into a lower step 7a and an upper step 7b, and the lower step 7a on the dummy electrode 13 side is removed (see FIG. 6C). Thereby, the bonding wire 14 connected to the fixed electrode 9 side can be used as the conductive terminal 10.

  With the above configuration, according to the actuator 1 including the conductive structure 8 according to the first embodiment, the fixed side electrode 9 on the substrate 7 side and the moving side on the mover 2 side that can move relative to the substrate 7. Since the electrode 2b is electrically connected to the conductive fluid ionic liquid 12 and the conductive terminal 10, the movable element 2 is placed on the substrate 7 in a state where the conductive terminal 10 is immersed in the ionic liquid 12. Can be moved. Therefore, the fixed side electrode 9 on the substrate 7 side and the movable side electrode 2b on the movable element 2 side can be electrically connected without substantially restricting the movement of the movable element 2.

In addition, since a conductive liquid (ionic liquid 12) is used as the conductive fluid, it is not necessary to seal the accommodating portion filled with the liquid as compared with the case where a conductive gas is used. With the configuration, the fixed side electrode 9 and the moving side electrode 2b can be electrically connected.
Furthermore, since the opening 11a of the concave groove 11 is formed so small that the ionic liquid 12 does not fall from the opening 11a due to its own weight due to surface tension, the actuator 1 is arranged so that the opening 11a faces downward. Even if it arrange | positions, it can prevent that the ionic liquid 12 falls from the opening 11a.
Further, since the conductive terminal 10 is immersed in the ionic liquid 12 from the opening 11a formed in the concave groove 11, the fixed side electrode 9 and the moving side electrode 2b are electrically connected with a simpler configuration. be able to.

In addition, since the conductive terminal 10 a is formed in the entire immersion range immersed in the ionic liquid 12 in the conductive terminal 10, the conductive terminal 10 is moved when the movable element 2 moves relative to the substrate 7. Even if the immersion range varies, the stationary electrode 9 and the movable electrode 2b can be electrically connected.
Further, since the bonding wire 14 is used as the conductive terminal 10, the fixed electrode 9 and the movable electrode 2b can be electrically connected with a simple configuration.
Further, according to the method of manufacturing the conductive terminal 10, the fixed side electrode 9 and the dummy electrode 13 are connected by the bonding wire 14, and the bonding wire 14 is cut at an intermediate portion between the fixed side electrode 9 and the dummy electrode 13, Since the dummy electrode 13 side is removed, there is no need to use special manufacturing equipment, and therefore the conductive terminal 10 can be easily manufactured.

In the present embodiment, the first member is described as the movable element 2 and the second member is defined as the substrate 7. However, the first member is the substrate and the second member is the movable element, and the substrate side is ionic. It is also possible to fill the liquid, connect one end of the conductive terminal to the mover side, and immerse the other end of the conductive terminal in the ionic liquid. In this case, the first electrode is a fixed electrode, and the second electrode is a moving electrode.
Further, when the conductive terminal 10 is manufactured by the wire bonding apparatus, the dummy electrode 13 is attached on the substrate 7, but the dummy electrode is attached to the bottom of the concave groove 11 of each moving element 2, and the dummy electrode and the substrate 7 are attached. After the upper fixed side electrode 9 is joined by the wire bonding apparatus, the bonding wire may be cut at a position close to the bottom of the concave groove 11. In this case, since the cutting part (lower end part) of the bonding wire (conductive terminal) joined to the fixed electrode 9 side is arranged in the concave groove, the lower end part of the conductive terminal is aligned in the concave groove. The work to perform is unnecessary.
Furthermore, the dummy electrode 13 used at the time of manufacturing the conductive terminal 10 can be used as a moving side electrode disposed on each moving element 2 side.
In the present embodiment, the bonding wire 14 is used as the conductive terminal 10, but other conductive members can be used.

[Second Embodiment]
FIG. 7A is a perspective view of a variable resistor according to the second embodiment of the present invention, FIG. 7B is a cross-sectional view taken along the line AA in FIG. 7A, and FIG. These are circuit diagrams of a variable resistor.
In FIG. 7A, the variable resistor 15 of the present embodiment is used as a linear potentiometer, and the movable body 17 that is the second member with respect to the fixed body 16 that is the first member. It moves linearly in the direction of the arrow E (one-dimensional direction). The variable resistor 15 includes a fixed side electrode 18 that is a pair of first electrodes disposed on the fixed body 16 side, a movable side electrode 19 that is a second electrode disposed on the movable body 17 side, and a fixed side. A conductive structure 20 is provided for electrically connecting the electrode 18 and the moving electrode 19.

Hereinafter, the conductive structure 20 will be described in detail. On the upper surface of the fixed body 16, a concave groove 21 is formed that is a housing portion extending in the moving direction (arrow E direction) of the moving body 17. An opening 21 a is formed in the upper portion of the concave groove 21, and the fixed electrode 18 is disposed on each side of the concave groove 21 in the longitudinal direction.
As shown in FIG. 7B, the fixed side electrode 18 is formed in an L shape so as to extend along both longitudinal side surfaces of the concave groove 21 and the upper surface of the fixed body 16 adjacent to the both side surfaces. . Each fixed-side electrode 18 has a connection terminal 22, one connection terminal 22 is grounded, and the other connection terminal 22 is connected to a power source (not shown) so that a voltage is applied. Yes.
The concave groove 21 is filled with an imidazolium salt-based ionic liquid 23 (EMImTFSI), which is a conductive fluid, from the opening 21a. The ionic liquid 23 serves as a resistor disposed on the pair of fixed-side electrodes 18 (see FIG. 7C).

  The moving side electrode 19 disposed on the moving body 17 is used as an output electrode connected to an external circuit (not shown). An upper end portion of a pin-shaped conductive terminal 24 is connected to the moving side electrode 19. The lower end portion of the conductive terminal 24 is immersed in the ionic liquid 23 from the opening 21 a of the concave groove 21 on the fixed body 16 side and is brought into contact with the ionic liquid 23. As shown in FIG. 7B, a conductive conductive portion 24a is formed at the lower end of the conductive terminal 24, and the fixed side electrode 18 and the moving side electrode 19 are electrically connected by the conductive portion 24a. ing. The conductive portion 24a is formed in a part of the vertical immersion range (contact range) in which the conductive terminal 24 is immersed in the ionic liquid 23, and the portion of the conductive terminal 24 excluding the conductive portion 24a is parylene-coded. Thus, an insulating layer 24b is formed. The surface of the insulating layer 24 b is subjected to a liquid repellent process (not shown) with a fluorine material or the like so as to repel the ionic liquid 23. The conductive structure 20 of the present embodiment is composed of a conductive terminal 24 and an ionic liquid 23.

The length in the longitudinal direction of the opening 21a of the concave groove 21 is formed to be slightly longer than the total moving length in which the conductive terminal 24 moves in the surface direction (arrow E direction) of the opening 21a. Thus, the conductive terminal 24 is immersed in the ionic liquid 23 so as to allow the moving body 17 to move in the direction of the arrow E. Further, the conductive terminal 24 is linearly movable together with the movable body 17 between the pair of fixed-side electrodes 18 of the concave groove 21 while being immersed in the ionic liquid 23.
Accordingly, when the moving body 17 is linearly moved in the direction of the arrow E in a state where a voltage is applied to the connection terminal 22 on the fixed body 16 side, the moving body 17 moves while being immersed (contacted) in the ionic liquid 23 (resistor). A resistance value corresponding to the physical position of the conductive portion 24a of the conductive terminal 24 is obtained, and the moving position of the moving body 17 can be detected from this resistance value.

With the above configuration, according to the variable resistor 15 according to the second embodiment, the variable resistor 15 (linear potentiometer) using the ionic liquid 23 as a resistor corresponds to the physical position of the conductive terminal 24. A resistance value can be obtained, and a moving position of the moving body 17 that moves linearly from the resistance value can be detected.
In addition, since the conductive terminal 24 forms the conductive portion 24a only in a part (lower end) of the immersion range of the ionic liquid 23, a portion other than the immersion range of the conductive terminal 24 is mistakenly formed by the fixed side electrode 18. Further, it is possible to prevent electrical connection with other electrodes other than the moving side electrode 19.
Furthermore, since the insulating layer 24b is formed on the conductive terminal 24 except for the conductive portion 24a, and the surface of the insulating layer 24b is liquid-repellent, the conductive terminal 24 is changed to the ionic liquid 23. By continuing the use in the immersed state, it is possible to prevent the ionic liquid 23 from going out of the concave groove 21 through the conductive terminal 24 due to a capillary phenomenon or the like. In particular, when the ionic liquid 23 is disposed above the conductive terminal 24, the dead weight of the ionic liquid 23 acts in addition to the capillary phenomenon, so that it is possible to effectively prevent the ionic liquid 23 from coming out of the groove 21. Can do.

In the present embodiment, the first member has been described as the fixed body 16 and the second member as the moving body 17. However, the first member is the moving body, the second member is the fixed body, A pair of moving electrodes and a concave groove filled with ionic liquid may be provided, one fixed electrode and a conductive terminal may be provided on the fixed body side, and the conductive terminal may be immersed in the ionic liquid. In this case, the first electrode is the pair of moving side electrodes, and the second electrode is the one fixed side electrode on the fixed body side.
Further, in this embodiment, the moving direction of the moving body 17 is a direction in which the immersion range of the conductive terminal 24 does not change (direction E in FIG. 7B), but the direction in which the immersion range of the conductive terminal 24 changes. You may make it move to. In this case, as in a fourth embodiment described later, a conductive portion can be formed in the entire immersion range of the conductive terminal, and a resistance value corresponding to the variation of the immersion range can be obtained.

[Third Embodiment]
FIG. 8 is an exploded perspective view of a variable resistor according to the third embodiment of the present invention.
In the figure, a variable resistor 25 according to the present embodiment is used as a rotary potentiometer, and is a second member that moves in an arc in the direction of arrow F (two-dimensional direction) with respect to a fixed body 26 that is a first member. The rotation angle of the moving body 27 which is the member is detected. The variable resistor 25 includes a fixed side electrode 28 that is a pair of first electrodes disposed on the fixed body 26 side, a moving side electrode 29 that is a second electrode disposed on the moving body 27 side, and a fixed side. A conductive structure 30 for electrically connecting the electrode 28 and the moving electrode 29 is provided.

Hereinafter, the conductive structure 30 will be described in detail. On the upper surface of the fixed body 26, a concave groove 31 is formed in an arc shape along the rotation direction (arrow F direction) of the movable body 27, and an opening 31 a is formed above the concave groove 31. The fixed electrodes 28 are formed on both sides of the concave groove 31 in the arc direction.
The fixed side electrode 28 is formed so as to be along the both ends of the arc direction of the concave groove 31 and the upper surface of the fixed body 26 adjacent thereto. Each fixed-side electrode 28 has a connection terminal 32, one connection terminal 32 is grounded, and the other connection terminal 32 is connected to a power source (not shown) so that a voltage is applied. Yes.
The concave groove 31 is filled with an imidazolium salt-based ionic liquid 33 (EMImTFSI), which is a conductive fluid, from the opening 31a. The ionic liquid 33 serves as a resistor disposed on the pair of fixed-side electrodes 28.

  The movable body 27 is rotatably attached to the rotating shaft 26a of the fixed body 26, and has a knob portion 27a for rotating operation and a collar portion 27b attached to the lower surface of the knob portion 27a. Yes. The moving side electrode 29 is disposed on the lower surface of the flange portion 27b, and the moving side electrode 29 is used as an output electrode connected to an external circuit (not shown). An upper end portion of a pin-shaped conductive terminal 34 is connected to the moving side electrode 29.

  The lower end portion of the conductive terminal 34 is immersed in the ionic liquid 33 from the opening 31a of the concave groove 31 on the fixed body 26 side with the moving body 27 attached to the fixed body 26, as shown by a two-dot chain line in FIG. It is made to contact with the ionic liquid 33. A conductive conductive portion 34a is formed at the lower end of the conductive terminal 34, and the fixed side electrode 28 and the moving side electrode 29 are electrically connected by the conductive portion 34a. The conductive portion 34a is formed in a part of the vertical immersion range (contact range) in which the conductive terminal 34 is immersed in the ionic liquid 33, and the portion of the conductive terminal 34 excluding the conductive portion 34a is parylene-coded. Thus, an insulating layer 34b is formed. The surface of the insulating layer 34 b is subjected to a liquid repellent process (not shown) with a fluorine material or the like so as to repel the ionic liquid 33. The conductive structure 30 of the present embodiment is composed of an ionic liquid 33 and a conductive terminal 34.

The length in the longitudinal direction of the opening 31a of the groove 31 is slightly longer than the total length of movement of the conductive terminal 34 in the surface direction (arrow F direction) of the opening 31a. Thereby, the conductive terminal 34 is immersed in the ionic liquid 33 so that the movement of the moving body 27 in the arrow F direction is allowed. In addition, the conductive terminal 34 is rotatable with the moving body 27 between the pair of fixed-side electrodes 28 in the concave groove 31 while being immersed in the ionic liquid 33.
Therefore, when the movable body 27 is rotated in the direction of the arrow F with a voltage applied to the connection terminal 32 on the fixed body 26 side, the conductive terminal rotates while being immersed (contacted) in the ionic liquid 33 (resistor). A resistance value corresponding to the physical position of the 34 conductive portions 34a is obtained, and the rotation angle of the moving body 27 can be detected from the resistance value.

With the above configuration, according to the variable resistor 25 according to the third embodiment, the variable resistor 25 (rotary potentiometer) using the ionic liquid 34 as a resistor corresponds to the physical position of the conductive terminal 34. A resistance value can be obtained, and the rotation angle of the moving body 27 that moves in a circular arc can be detected from the resistance value.
In addition, since the conductive terminal 34 forms the conductive portion 34a only in a part (lower end) of the immersion range of the ionic liquid 33, the portion other than the immersion range of the conductive terminal 34 is mistaken for the fixed side electrode 28. Further, it is possible to prevent electrical connection with other electrodes than the moving side electrode 29.
Further, the conductive terminal 34 is formed with an insulating layer 34b in a portion other than the conductive portion 34a, and the surface of the insulating layer 34b is subjected to a liquid repellent process. By continuing the use in the immersed state, it is possible to prevent the ionic liquid 33 from going out of the groove 31 through the conductive terminal 34 due to a capillary phenomenon or the like. In particular, when the ionic liquid 33 is disposed above the conductive terminal 34, the dead weight of the ionic liquid 33 also acts in addition to the capillary phenomenon, so that it is effectively prevented from exiting from the groove 31. Can do.

  In the present embodiment, the first member has been described as the fixed body 26 and the second member as the moving body 27. However, the first member is the moving body and the second member is the fixed body, A pair of moving electrodes and a concave groove filled with ionic liquid may be provided, one fixed electrode and a conductive terminal may be provided on the fixed body side, and the conductive terminal may be immersed in the ionic liquid. In this case, the first electrode is the pair of moving side electrodes, and the second electrode is the one fixed side electrode.

[Fourth Embodiment]
FIG. 9 is a perspective view of a variable resistor according to the fourth embodiment of the present invention. In FIG. 9, the variable resistor 35 of the present embodiment is used as a three-dimensional position detector, and is in the direction of arrows X, Y and Z (three-dimensional) with respect to the fixed body 36 as the first member. The moving position of the moving body 37, which is the second member movable in each direction), is detected. The variable resistor 35 includes four fixed-side electrodes 38a to 38d that are first electrodes disposed on the fixed body 36 side, and one movable side that is a second electrode disposed on the movable body 37 side. An electrode 39 and a conductive structure 40 for electrically connecting the fixed side electrodes 38a to 38d and the moving side electrode 39 are provided.

Hereinafter, the conductive structure 40 will be described in detail. On the upper surface of the fixed body 36, a concave groove 41, which is a quadrangular housing portion in plan view, is formed, and an opening 41a is formed above the concave groove 41.
Further, the fixed-side electrodes 38 a to 38 d are disposed at the corners of the four corners of the upper surface of the fixed body 36, respectively. The length of each fixed side electrode 38 a to 38 d in the direction of the arrow Z is set to the same length as the depth of the concave groove 41, and the inner corner of each fixed side electrode 38 a to 38 d is the length of the concave groove 41. Projects inward. Each of the fixed-side electrodes 38a to 38d has connection terminals 42a to 42d. Of these four connection terminals 42a to 42d, one connection terminal 42a is grounded, and the other connection terminals 42b to 42d are connected to a power source ( A voltage is applied by being connected to (not shown).
The concave groove 41 is filled with an imidazolium salt-based ionic liquid 43 (EMImTFSI), which is a conductive fluid, from the opening 41a. The ionic liquid 43 serves as a resistor disposed between the fixed side electrodes 38a to 38d.

  The moving side electrode 39 disposed on the moving body 37 is used as an output electrode connected to an external circuit (not shown). An upper end of a pin-shaped conductive terminal 44 is connected to the moving side electrode 39. The lower end portion of the conductive terminal 44 is immersed in the ionic liquid 43 through the opening 41a of the concave groove 41 on the fixed body 36 side, and is brought into contact with the ionic liquid 43, and the entire immersion range (contact range) in the vertical direction. A conductive conductive portion 44a is formed. The fixed electrodes 38a to 38d and the moving electrode 39 are electrically connected via the conductive portion 44a. The conductive structure 40 according to the present embodiment includes a conductive terminal 44 and an ionic liquid 43.

  The length of the opening 41a of the concave groove 41 in the direction of the arrows X and Y is slightly longer than the total length of movement of the conductive terminal 44 in the surface direction of the opening 41a (the direction of the arrows X and Y). Further, the depth of the concave groove 41 (the length in the arrow Z direction) is formed to be slightly longer than the total moving length in which the conductive terminal 44 moves in the depth direction of the concave groove 41 from the surface of the ionic liquid 43. Thus, the conductive terminal 44 is immersed in the ionic liquid 43 so as to allow the moving body 37 to move in the directions of arrows X, Y, and Z. In addition, the conductive terminal 44 is movable in the three-dimensional direction together with the moving body 37 between the fixed side electrodes 38 a to 38 d of the concave groove 41 while being immersed in the ionic liquid 43.

Therefore, when the moving body 37 is moved in the directions of the arrows X, Y, and Z while a voltage is applied to the connection terminal 42 on the fixed body 36 side, it is immersed (contacted) in the ionic liquid 43 (resistor). A resistance value corresponding to the physical three-dimensional position of the conductive portion 44a of the moving conductive terminal 44 is obtained, and the three-dimensional position of the moving body 37 can be detected from this resistance value.
Further, when the movable body 37 can be rotated in an arbitrary direction, as shown in FIG. 9, the three-dimensional of the conductive portion 44 a according to the rotation angle θ of the conductive terminal 44 that rotates together with the movable body 37. Since the position also changes, it is possible to detect the rotation angle θ by changing the resistance value according to the three-dimensional position.

When the moving body 37 moves in the arrow Z direction, the resistance value fluctuates due to a change in the immersion range of the conductive portion 44a immersed in the ionic liquid 43. From this resistance value, the arrow Z direction Can be detected.
FIG. 10 is a graph showing the relationship between the horizontal distance from the fixed electrode 38a to the conductive portion 44a of the conductive terminal 44 and the resistance value. The immersion range of the ionic liquid 43 in the conductive portion 44a is changed between 50 μm and 200 μm. FIG. 10 shows that the resistance value increases as the horizontal distance increases. Moreover, even if the horizontal distance is the same, it can be seen that the resistance value decreases as the immersion range increases. This decrease degree becomes more prominent as the horizontal distance becomes longer.

  With the above configuration, according to the variable resistor 35 according to the fourth embodiment, the physical position of the conductive terminal 44 as the variable resistor 35 (three-dimensional position detector) having the ionic liquid 43 as a resistor. Can be obtained, and the three-dimensional position and rotation angle of the moving body 37 can be detected from the resistance value. At that time, since the conductive part 44a is formed in the entire immersion range of the ionic liquid 43 in the conductive terminal 44, a resistance value corresponding to the immersion range of the conductive part 44a can be obtained. Therefore, the moving position (moving position in the arrow Z direction) of the moving body 37 that moves in the direction in which the immersion range of the conductive portion 44a varies can be detected from this resistance value (the immersion range and resistance value of the conductive portion). (See FIG. 10 to be described later).

In the present embodiment, the first member has been described as the fixed body 36 and the second member as the moving body 37. However, the first member is the moving body, the second member is the fixed body, It is also possible to provide four moving-side electrodes and concave grooves filled with the ionic liquid, provide one fixed-side electrode and conductive terminal on the fixed body side, and immerse the conductive terminal in the ionic liquid. In this case, the first electrode is the four moving side electrodes, and the second electrode is the one fixed side electrode.
In the present embodiment, the conductive portion 44a of the conductive terminal 44 and the fixed-side electrodes 38a to 38d are all formed over the entire immersion range of the conductive terminal 44, whereby the resistance value in the arrow Z direction is reduced. Although it fluctuates, the conductive portion 44 a and the fixed side electrodes 38 a to 38 d may be formed only in a part of the immersion range of the conductive terminal 44. In this case, the immersion position (position in the arrow Z direction) of the conductive portion 44a varies, and the linear distance between the conductive portion and each of the fixed side electrodes 38a to 38d varies. The resistance value can be varied.
Furthermore, in the present embodiment, the three-dimensional position of one moving body 37 is detected with respect to one fixed body 36, but a plurality of moving bodies are added to the ionic liquid of one fixed body. You may make it detect a three-dimensional position of each moving body by immersing a conductive terminal.

[Fifth Embodiment]
FIG. 11A is a perspective view of a rotary connector having a conductive structure according to the fifth embodiment of the present invention.
In the figure, the rotary connector 45 of this embodiment includes a connection cable 46, a rotatable rotary member 47, and a concave fitting portion 49 in which a plurality of pins 48 project. This is a rotating male connector. Note that a female connector having a pin hole (not shown) is fitted to the fitting portion 49. At this time, the male connector and the female connector are inserted by inserting the pin 48 into the pin hole. Are electrically connected.
The rotating member 47 includes a fixed body 50 that is a first member to which the connection cable 46 is connected, a rotating body 51 that is a second member rotatably attached to the fixed body 51, and the fixed body 50. The fixed side electrode 52 which is a plurality of first electrodes arranged on the side, the moving side electrode 53 which is a plurality of second electrodes arranged on the rotating body 51 side, the fixed side electrode 52 and the moving side electrode 53 And a conductive structure 54 for electrically connecting the two.

Hereinafter, the conductive structure 54 will be described in detail. FIG. 11B is a perspective view showing only the fixed body 50 of the rotating member 47. In the figure, the fixed body 50 is formed in a columnar shape, and a plurality of concave grooves 55 that are accommodating portions extending in the circumferential direction (arrow G direction) are formed on the outer peripheral surface thereof. An opening 55a is formed in the outer peripheral portion of each concave groove 55, and as shown in FIG. 11A, the fixed side electrode 18 is disposed along the bottom surface of each concave groove 55 and both side surfaces in the circumferential direction. Yes.
The concave groove 55 is filled with an imidazolium salt-based ionic liquid 56 (EMImTFSI), which is a conductive fluid, from the opening 55a.

  A mounting hole 57 having a circular cross section is formed in the rotating body 51, and the fixed body 50 is inserted into the mounting hole 57. The rotating body 51 is formed with the fitting portion 49, and the moving side electrode 53 disposed at one end of the pin 48 is embedded in the bottom portion 58 of the fitting portion 49. One end of a conductive terminal 59 is connected to the moving side electrode, and the other end of the conductive terminal 59 penetrates the peripheral surface of the mounting hole 57 and protrudes into the groove 55. It is immersed in the ionic liquid 56 from 55 a and is brought into contact with the ionic liquid 56. The conductive terminal 59 has a conductive portion 59a formed in the entire immersion range (contact range).

The circumferential length of the opening 55a of the groove 55 is slightly longer than the total turning length of the conductive terminal 59 that rotates in the surface direction (arrow G direction) of the opening 55a. Thus, the conductive terminal 59 is immersed in the ionic liquid 56 so as to allow the rotating body 51 to rotate in the direction of the arrow G. In addition, the conductive terminal 59 is rotatable with respect to the concave groove 55 together with the rotating body 51 while being immersed in the ionic liquid 56.
Therefore, when the rotating body 51 is rotated with respect to the fixed body 51, the conductive terminal 59 rotates together with the rotating body 51 in a state of being immersed in the ionic liquid 56. However, the state of being electrically connected via the conductive terminal 59 (conductive portion 59a) and the ionic liquid 56 is maintained. The conductive structure 54 of the present embodiment is constituted by the ionic liquid 56 and the conductive terminal 59.

  With the configuration described above, according to the rotating member 47 and the rotating connector 45 according to the fifth embodiment, the fixed side electrode 52 on the fixed body 51 side and the moving side electrode 53 on the rotating body 51 side are electrically conductive. Since the fluid is electrically connected to the ionic liquid 56 and the conductive terminal 59, the rotating body 51 is rotated with respect to the fixed body 51 in a state where the conductive terminal 59 is immersed in the ionic liquid 56. Can be made. Therefore, the fixed side electrode 52 on the fixed body 51 side and the moving side electrode 53 on the rotary body 51 side can be electrically connected without substantially restricting the rotation of the rotating body 51.

In the present embodiment, the first member has been described as the fixed body 50 and the second member as the rotating body 51. However, the first member is the rotating body, the second member is the fixed body, and the rotating body side. A concave groove filled with an ionic liquid may be provided on the fixed body, a conductive terminal may be provided on the fixed body side, and the conductive terminal may be immersed in the ionic liquid. In this case, the first electrode is a moving electrode, and the second electrode is a fixed electrode.
In the present embodiment, the rotary connector 45 is a male connector, but can be a female connector.
Further, in the present embodiment, the rotating member 47 is used as a rotating portion of the rotating connector 45. However, in the body device, for example, a foldable mobile phone, the folding rotating portion is used as the above described rotating rotating portion. You may make it comprise with the rotation member 47. FIG.

[Sixth Embodiment]
FIG. 12A is a side sectional view of an electric motor according to the sixth embodiment of the present invention, FIG. 12B is an enlarged view of the main part of FIG. 12A, and FIG. These are the principal part enlarged views of Fig.12 (a).
In FIG. 12A, the electric motor 60 of the present embodiment is a wound three-phase induction motor, and is a second member that is rotatably supported by a housing 61 that is a first member via a bearing 62. A rotor 64 having a winding 64 a is attached to the rotating shaft 63, and a stator 65 having a winding 65 a is attached to the inner surface of the housing 61 facing the rotor 64.
As shown in FIG. 12C, the electric motor 60 includes three fixed electrodes 66, which are three first electrodes arranged on the housing 61 side, and three second electrodes, which are arranged on the rotating shaft 63 side. And a conductive structure 68 for electrically connecting each stationary electrode 66 and each movable electrode 67 to each other.

Hereinafter, the conductive structure 68 will be described in detail. As shown in FIG. 12B, four annular portions 61b having different diameters are fixed to the left side wall 61a of the housing 61 in FIG. A pair of adjacent annular portions 61b and the inner surface of the side wall 61a located in these annular portions 61b form three annular grooves 69 that are accommodation portions. As shown in FIG. 12C, each annular groove 69 is formed with an opening 69a, and has a U-shaped cross section along the bottom surface (the inner surface of the side wall 61a) of the annular groove 69 and the annular portion 61b. Fixed side electrode 66 is arranged. Each stationary electrode 66 is connected to a power cable 71 connected to an external power source (not shown) by a bolt 70 that is fixed to the side wall 61 a of the housing 61.
Each annular groove 69 is filled with imidazolium salt-based ionic liquid 72 (EMImTFSI), which is a conductive fluid, from the opening 69a. The size of the opening 69a of the annular groove 69 is so small that the ionic liquid 72 does not fall due to its own weight from the opening 69a due to surface tension.

As shown in FIG. 12A, a rotating substrate 73 is fixed to the left end portion of the rotating shaft 63 so as to face the annular groove 69. As shown in FIG. 5, the moving electrodes 67 are arranged in the radial direction. Each moving-side electrode 67 is electrically connected to the rotor 64 via a wiring cable (not shown) disposed in the rotating shaft 63.
One end of a conductive conductive terminal 74 is connected to each moving side electrode 67, and the other end of each conductive terminal 74 is immersed in an ionic liquid 72 filled in each annular groove 69 from an opening 69a. In contact with the ionic liquid 72. The conductive terminal 74 has a conductive portion 74a formed in the entire immersion range (contact range).

Each annular portion 61 b constituting the annular groove 69 is attached to the inner surface of the side wall 61 a so that the center thereof coincides with the axis of the rotating shaft 63. Thereby, the conductive terminal 74 is immersed in the ionic liquid 72 so as to allow the rotation of the rotating shaft 63. In addition, the conductive terminal 74 is rotatable with respect to the annular groove 69 together with the rotating shaft 63 while being immersed in the ionic liquid 72.
Therefore, when the rotating shaft 63 is rotated, the conductive terminal 74 rotates while being immersed in the ionic liquid 72 in the annular groove, so that the fixed side electrode 66 and the moving side electrode 67 are connected to the conductive terminal 74 and the ionicity. The state of being electrically connected via the liquid 72 is maintained. The conductive structure 68 of the present embodiment is composed of the conductive terminal 74 (conductive portion 74a) and the ionic liquid 72.

  With the above configuration, according to the electric motor 60 according to the sixth embodiment, the stationary electrode 66 on the housing 61 side and the moving electrode 67 on the rotating shaft 63 side are connected to the ionic liquid 72 of the conductive fluid and the conductive terminal. 74, the rotating shaft 63 can be rotated with respect to the housing 61 while the conductive terminal 74 is immersed in the ionic liquid 72. Therefore, the stationary electrode 66 on the housing 61 side and the moving electrode 67 on the rotating shaft 63 side can be electrically connected with almost no restriction on the rotation of the rotating shaft 63.

  In the present embodiment, the first member has been described as the housing 61 and the second member as the rotating shaft 63. However, the first member is the rotating shaft and the second member is the housing, and the first member is an ion on the rotating shaft side. A concave groove filled with an ionic liquid may be provided, a conductive terminal may be provided on the housing side, and the conductive terminal may be immersed in the ionic liquid. In this case, the first electrode is a moving electrode, and the second electrode is a fixed electrode.

[Seventh Embodiment]
FIG. 13 is a perspective view of a controller according to the seventh embodiment of the present invention. In FIG. 13, the controller 75 of the present embodiment is used as a stick controller, and can be tilted in the arrow X and Y directions with respect to the casing 76 that is the first member, and the arrow Z direction. The three-dimensional direction is operated by an operating body 77 that is a second member that can be moved and operated.
The operating body 77 has an operating shaft 77a extending in the vertical direction (arrow Z direction) and a handle 77b fixed to the upper end of the operating shaft 77a. The lower end of the operation shaft 77a is attached to the holding body 79 via a spherical body 78 so as to be able to tilt and rotate. The operation shaft 77a is supported so as to be movable in the axial direction with respect to the spherical body 78. Accordingly, the operation shaft 77a can be tilted and rotated by holding the handle 77b, so that the operation in the arrow X and Y directions can be performed, and the operation shaft 77a can be moved in the axial direction by holding the handle 77b. An operation in the Z direction can be performed.

The controller 75 includes four fixed-side electrodes 80a to 80d that are the first electrodes disposed on the housing 76 side, and one moving-side electrode 81 that is the second electrode disposed on the operation body 77 side. And a conductive structure 82 for electrically connecting the fixed side electrodes 80a to 80d and the moving side electrode 81.
Hereinafter, the conductive structure 82 will be described in detail. On the upper surface of the housing 76, a concave groove 83 that is a quadrangular housing portion in plan view is formed, and an opening 83 a is formed above the concave groove 83. Further, the fixed side electrodes 80a to 80d are arranged at the corners of the four corners of the upper surface of the housing 76, respectively. The lengths of the fixed side electrodes 80a to 80d in the direction of the arrow Z are set to the same length as the depth of the concave groove 83, and the inner corners of the fixed side electrodes 80a to 80d are Projects inward. Each of the fixed-side electrodes 80a to 80d has connection terminals 84a to 84d. Of these four connection terminals 84a to 84d, one connection terminal 84a is grounded, and the other connection terminals 84b to 84d are power supplies ( A voltage is applied by being connected to (not shown).
The concave groove 83 is filled with imidazolium salt-based ionic liquid 85 (EMImTFSI), which is a conductive fluid, through the opening 83a. The ionic liquid 85 serves as a resistor disposed between the fixed side electrodes 80a-80.

  The moving electrode 81 disposed on the operating body 77 is used as an output electrode connected to an external circuit (not shown). An upper end of a pin-shaped conductive terminal 86 is connected to the moving side electrode 81. The lower end portion of the conductive terminal 86 is immersed in the ionic liquid 85 from the opening 83a of the concave groove 83 on the housing 76 side, and is brought into contact with the ionic liquid 85, and the entire vertical immersion range (contact range) thereof. A conductive conductive portion 86a is formed. The fixed side electrodes 80a to 80 and the moving side electrode 81 are electrically connected via the conductive portion 86a. The conductive structure 82 of the present embodiment includes a conductive terminal 86 and an ionic liquid 85.

  The length of the opening 83a of the concave groove 83 in the direction of the arrows X and Y is formed slightly longer than the total length of movement of the conductive terminal 86 tilting in the directions of the arrows X and Y. Further, the depth of the concave groove 83 (the length in the arrow Z direction) is formed slightly longer than the total moving length in which the conductive terminal 86 moves in the depth direction of the concave groove 83 from the surface of the ionic liquid 85. Thus, the conductive terminal 86 is immersed in the ionic liquid 85 so as to allow the operation body 77 to tilt the arrows X and Y and move the arrow 77 in the arrow Z direction. In addition, the conductive terminal 86 is movable in the three-dimensional direction together with the operation body 77 between the fixed side electrodes 80 a to 80 of the concave groove 83 in a state where the conductive terminal 86 is immersed in the ionic liquid 85.

  Accordingly, when the operating body 77 is tilted in the arrows X and Y directions and moved in the arrow Z direction while a voltage is applied to the connection terminal 84 on the housing 76 side, the ionic liquid 85 (resistor). A resistance value corresponding to the physical three-dimensional position of the conductive portion 86a of the conductive terminal 86 that moves while being immersed (contacted) is obtained, and an operation body 77 can be operated from the resistance value in a three-dimensional direction. .

  With the configuration described above, according to the controller 75 according to the seventh embodiment, the stationary side electrodes 80a to 80d on the housing 76 side and the moving side electrode 81 on the operating body 77 side are connected to the ionic liquid 72 of the conductive fluid. And the conductive terminal 74 are electrically connected to each other, so that the operation body 77 can be tilted and moved with respect to the casing 76 while the conductive terminal 74 is immersed in the ionic liquid 72. . Therefore, the stationary electrodes 80a to 80d on the housing 76 side and the moving electrode 81 on the operating body 77 side can be electrically connected without substantially restricting the tilting operation and the moving operation of the operating body 77.

In the present embodiment, the first member has been described as the casing 76 and the second member as the operating body 77. However, the first member is the operating body, the second member is the casing, and the operating body side It is also possible to provide four moving-side electrodes and a groove for filling the ionic liquid, provide one fixed-side electrode and a conductive terminal on the housing side, and immerse the conductive terminal in the ionic liquid. In this case, the first electrode is the four moving side electrodes, and the second electrode is the one fixed side electrode.
In the present embodiment, the controller 75 is described as performing an operation in a three-dimensional direction. However, the controller 75 may perform an operation in a one-dimensional or two-dimensional direction.

Furthermore, by forming the conductive portion 86a of the conductive terminal 86 and each of the fixed side electrodes 80a to 80d over the entire immersion range of the conductive terminal 86, the resistance value in the arrow Z direction varies. However, the conductive portion 86 a and the fixed side electrodes 80 a to 80 d may be formed only in a part of the immersion range of the conductive terminal 86. In this case, when the immersion position (position in the arrow Z direction) of the conductive portion 86a is changed, the linear distance between the conductive portion and each of the fixed side electrodes 80a to 80d is changed. The resistance value can be varied.
In the present embodiment, a single operation body 77 is operated in a three-dimensional direction with respect to one housing 76. However, a plurality of operation bodies are applied to the ionic liquid in one housing. The conductive terminals may be immersed, and operations in a three-dimensional direction may be performed by each operation body.

[Eighth Embodiment]
FIG. 14 is a perspective view of a rotation information detection apparatus according to the eighth embodiment of the present invention. In FIG. 14, the rotation information detection device 87 of the present embodiment is a rotation that is a second member that can rotate about the arrow Z direction axis (the arrow H direction) relative to the fixed body 88 that is the first member. The rotation information such as the rotation direction and the rotation amount of the body 89 is detected. The rotation information detecting device 87 includes four fixed-side electrodes 90a to 90d that are first electrodes disposed on the fixed body 88 side and one movement that is a second electrode disposed on the rotating body 89 side. A side electrode 91, a conductive structure 92 for electrically connecting the fixed side electrodes 90a to 90d and the moving side electrode 91 are provided.

Hereinafter, the conductive structure 92 will be described in detail. On the upper surface of the fixed body 88, a concave groove 93 which is a quadrangular housing part in plan view is formed, and an opening 93a is formed above the concave groove 93.
In addition, the fixed side electrodes 90a to 38d are arranged at the corners of the four corners of the upper surface of the fixed body 88, respectively. The length of each fixed side electrode 90a to 90d in the direction of the arrow Z is set to the same length as the depth of the concave groove 93, and the inner corners of each fixed side electrode 90a to 90d are Projects inward. Each of the fixed-side electrodes 90a to 90d has connection terminals 94a to 94d. Of these four connection terminals 94a to 94d, one connection terminal 94a is grounded, and the other connection terminals 94a to 94d are power supplies ( A voltage is applied by being connected to (not shown).
The concave groove 93 is filled with an imidazolium salt-based ionic liquid 95 (EMImTFSI), which is a conductive fluid, from the opening 93a. The ionic liquid 95 serves as a resistor disposed between the fixed side electrodes 90a to 90d.

  The moving electrode 91 disposed on the lower surface of the rotating body 89 is used as an output electrode connected to an external circuit (not shown). An upper end of a pin-shaped conductive terminal 96 is connected to the moving side electrode 91. The conductive terminal 96 has a rotating plate 96b at the lower portion thereof, and the lower end portion of the rotating plate 96b is immersed in the ionic liquid 95 through the opening 93a of the concave groove 93 on the fixed body 88 side to come into contact with the ionic liquid 95. The conductive portion 96a is formed in the entire immersion range (contact range) in the vertical direction (arrow Z direction) of the rotating plate 96b. The fixed electrodes 90a to 90d and the moving electrode 91 are electrically connected through the conductive portion 96a. The conductive structure 92 according to this embodiment includes a conductive terminal 96 and an ionic liquid 95.

  The length of the opening 93a of the concave groove 93 in the arrow X and Y directions is slightly longer than the entire length of the rotating plate 96b of the conductive terminal 96 (length extending in the radial direction with respect to the arrow Z direction axis). ing. Thereby, the conductive terminal 96 is immersed in the ionic liquid 95 so as to allow the rotation of the rotating body 89 in the direction of the arrow H. In addition, the conductive terminal 96 is rotatable in the arrow H direction together with the rotating body 89 between the fixed side electrodes 90 a to 90 d of the concave groove 93 while being immersed in the ionic liquid 95.

Therefore, when the rotating body 89 is rotated in the direction of the arrow H while a voltage is applied to the connection terminal 94 on the fixed body 88 side, the conductive terminal rotates while being immersed (contacted) in the ionic liquid 95 (resistor). The resistance value corresponding to the physical rotation position of the 96 conductive portions 96a is obtained, and the rotation information of the rotating body 89 can be detected from this resistance value.
With the above configuration, according to the rotation information detecting device 87 according to the eighth embodiment, a resistance value corresponding to the physical rotation position of the conductive terminal 96 can be obtained, and the rotation of the rotating body 89 can be obtained from this resistance value. Information can be detected.

In the present embodiment, the first member has been described as the fixed body 88 and the second member as the rotating body 89. However, the first member is the moving body, the second member is the fixed body, It is also possible to provide four moving-side electrodes and concave grooves filled with the ionic liquid, provide one fixed-side electrode and conductive terminal on the fixed body side, and immerse the conductive terminal in the ionic liquid. In this case, the first electrode is the four moving side electrodes, and the second electrode is the one fixed side electrode.
Further, in the present embodiment, rotation information of one rotating body 89 is detected for one fixed body 88, but the conductivity of a plurality of rotating bodies is transferred to the ionic liquid of one fixed body. You may make it detect the rotation information of each rotary body by immersing a terminal.

[Ninth Embodiment]
FIG. 15 is a perspective view of a stroke amount detection device according to the ninth embodiment of the present invention. In FIG. 15, the stroke amount detection device 97 of the present embodiment is a reciprocating body that is a second member that can linearly reciprocate in the direction of the arrow I within a cylindrical fixed body 98 that is a first member. 99 stroke amounts are detected. The stroke amount detection device 97 includes a pair of fixed-side electrodes 100 that are first electrodes disposed on the fixed body 98 side, and one moving-side electrode 101 that is a second electrode disposed on the reciprocating body 99 side. And a conductive structure 102 for electrically connecting the fixed side electrode 100 and the moving side electrode 101.

Hereinafter, the conductive structure 102 will be described in detail. The fixed body 98 is formed with a concave groove 103 which is an accommodating portion extending in the reciprocating direction (arrow I direction) of the reciprocating body 99. An opening 103 a is formed in the upper part of the concave groove 103, and the fixed electrode 100 is disposed on both sides of the concave groove 103 in the longitudinal direction. One of the pair of fixed-side electrodes 100 is grounded, and the other is connected to a power source (not shown) so that a voltage is applied.
The concave groove 103 is filled with an imidazolium salt-based ionic liquid 104 (EMImTFSI), which is a conductive fluid, through the opening 103a. The ionic liquid 104 serves as a resistor disposed on the pair of fixed-side electrodes 100.

  The moving side electrode 101 disposed on the reciprocating body 99 is used as an output electrode connected to an external circuit (not shown). An upper end portion of a pin-shaped conductive terminal 105 is connected to the moving side electrode 101. The lower end portion of the conductive terminal 105 is immersed in the ionic liquid 104 from the opening 103 a of the concave groove 103 on the fixed body 98 side and is brought into contact with the ionic liquid 104. The conductive terminal 105 is formed with a conductive conductive portion 105a in the entire immersion range (contact range) in the vertical direction (depth direction of the groove), and the conductive portion 105a and the fixed side electrode 100 are moved to the moving side. The electrode 101 is electrically connected. The conductive structure 102 according to this embodiment includes a conductive terminal 105 and an ionic liquid 104.

  The depth of the groove 103 is longer than the total length of movement of the conductive terminal 105 moving from the surface of the ionic liquid 104 in the depth direction of the groove 103 (arrow I direction). Thus, the conductive terminal 105 is immersed in the ionic liquid 104 so as to allow the reciprocating body 99 to move in the direction of the arrow I. In addition, the conductive terminal 105 is capable of reciprocating together with the reciprocating body 99 between the pair of fixed-side electrodes 100 of the concave groove 103 while being immersed in the ionic liquid 104.

Therefore, when the reciprocating body 99 is reciprocated in the direction of arrow I in a state where a voltage is applied to the fixed side electrode 100 on the fixed body 98 side, it moves while being immersed (contacted) in the ionic liquid 104 (resistor). A resistance value corresponding to the physical reciprocating position of the conductive portion 105a of the conductive terminal 105 is obtained, and the stroke amount of the reciprocating body 99 can be detected from this resistance value.
With the above configuration, according to the stroke amount detection device according to the ninth embodiment, a resistance value corresponding to the physical reciprocating position of the conductive terminal 105 can be obtained. The stroke amount can be detected.

  In the present embodiment, the first member is described as the fixed body 98, and the second member is the reciprocating body 99. However, the first member is the return body and the second member is the fixed body. It is also possible to provide a pair of moving side electrodes and a concave groove filled with the ionic liquid, provide one fixed side electrode and a conductive terminal on the fixed body side, and immerse the conductive terminal in the ionic liquid. In this case, the first electrode is the pair of moving side electrodes, and the second electrode is the one fixed side electrode.

The present invention is not limited to the above embodiments.
For example, in each of the above embodiments, the EMImTFSI of the ionic liquid 12 (23, 33, 43, 56, 72, 85, 95, 104) is used as the conductive fluid. Other conductive liquids may be used as long as they are conductive and non-volatile and have a predetermined viscosity.
Moreover, in each said embodiment, the accommodating part with which the ionic liquid 12 (23, 33, 43, 56, 72, 85, 95, 104) is filled is the concave groove 11 (21, 31, 41, 55, 69). , 83, 93, 103), but other shapes may be used.
Further, in each of the above embodiments, the surface of the insulating layer 24b (34b) of the conductive terminal 24 (34) is subjected to a liquid repellent process that repels the ionic liquid 23 (33). It is also possible to perform a liquid repellent process that repels the ionic liquid 23 (33) along the edge of the opening 21a (31a) of the 21 (31). In this case, it is possible to more effectively prevent the ionic liquid 23 from flowing out of the concave groove 21 (31).

  Further, in each of the above embodiments, the conductive terminal 10 (24, 34, 44, 59, 74, 86, 96, 105) is replaced with the ionic liquid 12 (23, 33, 43, 56, 72, 85, 95, 104). The conductive fluid is made into a highly viscous gel-like liquid, and the tip of the conductive terminal (conductive part) is brought into contact with the surface of the gel-like liquid, and in this state the conductive fluid is made conductive. The tip surface of the terminal may be slid on the surface. In this case, even a highly viscous conductive fluid hardly restrains the movement of the moving body. In particular, it is effective in that the conductive fluid can be prevented from dropping when the conductive fluid is disposed above the conductive terminal. At that time, if a liquid repellent process is applied to the front end face of the conductive terminal and the gel-like liquid is repelled, the surface of the gel-like liquid can be smoothly slid.

In each of the above embodiments, the conductive liquid 12 (23, 33, 43, 56, 72, 85, 95, 104) is used as the conductive fluid. It is also possible to use it with the conductive member inserted.
In each of the above embodiments, the second electrode 9 (19, 29, 39, 53, 67, 81, 91, 101) is connected to the second member 7 (17, 27, 37, 51, 63, 77, 89, 99), all the conductive members (conductive terminals 10 (24, 34, 44, 59, 74, 86) electrically connected from the second electrode are described. , 96, 105)) may be used as the second electrode.

1 Actuator 2 Mover (first member)
2a Moving electrode (first electrode)
7 Substrate (fixed body, second member)
8 Conductive structure 9 Fixed side electrode (second electrode)
10 Conductive terminal 11 Groove (accommodating part)
11a Opening 12 Ionic liquid (conductive fluid)
13 Dummy electrode 14 Bonding wire 15, 25, 35 Variable resistor 16, 26, 36 Fixed body (first member)
17, 27, 37 Moving body (second member)
18, 28, 38 Fixed side electrode (first electrode)
19, 29, 39 Moving electrode (second electrode)
20, 30, 40 Conductive structure 21, 31, 41 Concave groove (container)
21a, 31a, 41a Opening 23, 33, 43 Ionic liquid (conductive fluid)
24, 34, 44 Conductive terminal 24a, 34a, 44a Conducting portion 45 Rotating connector 47 Rotating member 50 Fixed body (first member)
51 Rotating body (second member)
52 Fixed side electrode (first electrode)
53 Moving electrode (second electrode)
54 Conductive structure 56 Ionic liquid (conductive fluid)
59 Conductive terminal 60 Electric motor 61 Housing (first member)
63 Rotating shaft (second member)
64 Rotor 65 Stator 66 Fixed side electrode (first electrode)
67 Moving electrode (second electrode)
68 Conductive structure 72 Ionic liquid (conductive fluid)
74 Conductive terminal 75 Controller 76 Case (first member)
77 Operating body (second member)
80 Fixed electrode (first electrode)
81 Moving electrode (second electrode)
82 Conductive structure 85 Ionic liquid (conductive fluid)
86 Conductive terminal 87 Rotation information detecting device 88 Fixed body (first member)
89 Rotating body (second member)
90 Fixed electrode (first electrode)
91 Moving electrode (second electrode)
92 Conductive structure 95 Ionic liquid (conductive fluid)
96 Conductive terminal 97 Stroke detection device 98 Fixed body (first member)
99 Reciprocating body (second member)
100 Fixed electrode (first electrode)
101 Moving electrode (second electrode)
102 conductive structure 104 ionic liquid (conductive fluid)
105 Conductive terminal γ Surface tension

Claims (21)

A conductive structure for electrically connecting the first electrode disposed on the first member side and the second electrode disposed on the second member side movable relative to the first member. Because
A conductive fluid electrically connected to the first electrode and housed in a housing provided in the first member;
A conductive terminal electrically connected to the second electrode and in contact with the conductive fluid so as to allow the relative movement;
A conductive structure characterized by comprising:   The conductive structure according to claim 1, wherein the conductive fluid is a conductive liquid.   The conductive structure according to claim 2, wherein the accommodating portion has an opening, and the opening is formed small enough that the liquid does not fall from the opening by surface tension due to the weight of the liquid.   The conductive structure according to claim 3, wherein the conductive terminal is immersed in the liquid from the opening and is in contact with the liquid.   The conductive structure according to claim 3 or 4, wherein the conductive terminal is movable relative to the opening along a surface direction of the opening.   The conductive structure according to claim 3 or 4, wherein the conductive terminal is relatively movable with respect to the opening from the opening in a depth direction of the housing portion.   The conductive structure according to claim 1, wherein the conductive terminal is relatively movable in a one-dimensional direction with respect to the housing portion.   The conductive structure according to claim 1, wherein the conductive terminal is relatively movable in a two-dimensional direction with respect to the housing portion.   The conductive structure according to claim 1, wherein the conductive terminal is relatively movable in a three-dimensional direction with respect to the housing portion.   The conductive structure according to claim 1, wherein the conductive terminal is a bonding wire.   The conductive structure according to any one of claims 1 to 10, wherein the conductive terminal includes a conductive conductive portion formed over the entire contact range in contact with the conductive fluid.   The conductive structure according to any one of claims 1 to 10, wherein the conductive terminal has a conductive part formed in a part of a contact range in contact with the conductive fluid. An actuator comprising the conductive structure according to any one of claims 1 to 12,
Of the first member and the second member, either one member is a fixed body, and the other member is a mover that can move relative to the fixed body,
An actuator characterized in that an electrode arranged on the fixed body side and an electrode arranged on the movable element side are electrically connected by the conductive terminal and the conductive fluid. A variable resistor comprising the conductive structure according to any one of claims 1 to 12,
Of the first member and the second member, one of the members is a fixed body, and the other member is a movable body that can move relative to the fixed body,
A variable resistor characterized in that a plurality of electrodes arranged on the first member side and an electrode arranged on the second member side are electrically connected by the conductive terminal and the conductive fluid. vessel. A rotating member comprising the conductive structure according to any one of claims 1 to 12,
Of the first member and the second member, either one of the members is a fixed body, and the other member is a rotating body that is rotatably attached to the fixed body,
A rotating member, wherein the electrode disposed on the fixed body side and the electrode disposed on the rotating body side are electrically connected by the conductive terminal and the conductive fluid.   A rotating connector comprising the rotating member according to claim 15. An electric motor comprising the conductive structure according to any one of claims 1 to 12,
One of the first member and the second member is a housing having a stator, and the other member is a rotating shaft that is rotatable with respect to the housing and has a rotor,
An electric motor characterized in that an electrode arranged on the housing side and an electrode arranged on the rotating shaft side are electrically connected by the conductive terminal and the conductive fluid. A controller comprising the conductive structure according to any one of claims 1 to 12,
One of the first member and the second member is a casing, and the other member is an operating body that can be moved with respect to the casing.
A controller characterized in that an electrode disposed on the housing side and an electrode disposed on the operating body side are electrically connected by the conductive terminal and the conductive fluid. A rotation information detecting device comprising the conductive structure according to any one of claims 1 to 12,
Of the first member and the second member, one of the members is a fixed body, and the other member is a rotating body that is rotatable with respect to the fixed body,
Rotation information characterized in that a plurality of electrodes arranged on the first member side and an electrode arranged on the second member side are electrically connected by the conductive terminal and the conductive fluid. Detection device. A stroke detection device comprising the conductive structure according to any one of claims 1 to 12,
One of the first member and the second member is a fixed body, and the other member is a reciprocating body capable of reciprocating with respect to the fixed body,
Stroke detection characterized in that a plurality of electrodes arranged on the first member side and an electrode arranged on the second member side are electrically connected by the conductive terminal and the conductive fluid. apparatus. Production of a conductive terminal having one end electrically connected to the first electrode and the other end contacting a conductive fluid electrically connected to a second electrode movable relative to the first member A method,
Place a dummy electrode,
Connecting the first electrode and the dummy electrode by a bonding wire;
Cutting the bonding wire at an intermediate portion between the first electrode and the dummy electrode;
The method for producing a conductive terminal, wherein the dummy electrode and the bonding wire connected to the dummy electrode are removed.

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